Cascade x-ray light source system and small angle x-ray scattering measurement device

Abstract

The application discloses a kind of cascade X-ray light source systems and small-angle X-ray scattering measuring devices, the cascade X-ray light source system includes: multiple light source modules of emitting X-ray, multiple X-ray optical paths of light source module emission are coaxial, each light source module includes X-ray optical device, X-ray optical device is set on the axis of X-ray optical path, X-ray optical device is configured to focus, monochromate X-ray emitted by corresponding light source module, the X-ray focused by all X-ray optical devices coincides at target focal point, forms high-brightness X-ray.The application is emitted by multiple light source modules in cascade, so that the brightness of X-ray is higher, to improve the efficiency of measurement.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of key dimension measurement of nano-grating or nano field effect transistor, and particularly relates to a cascaded X-ray source system and a small-angle X-ray scattering measurement device. BACKGROUND

[0002] With the advancement of microelectronic process, the storage chip develops from 2D to 3D, and the structure of the chip becomes more and more complex. The influencing factors of the performance and yield of the memory device become more and more complex, and the accurate measurement of the high aspect ratio (HAR) structure becomes more and more important. The traditional measurement technology such as optical critical dimension measurement (OCD) is limited by the longer wavelength of visible light, and the measurement accuracy of the HAR structure has limitations, especially in the middle and bottom regions of the stack structure; the critical dimension scanning electron microscope (CD-SEM) and the transmission electron microscope (TEM) have high measurement accuracy, but as a surface analysis technology, they need to be combined with the destructive test of the focused ion beam (FIB) to obtain the deep structure information. Therefore, it is difficult for the semiconductor factory to quickly and accurately measure the HAR structure and improve the process, thereby increasing the cost and process complexity, and further causing the delay of the technology iteration cycle.

[0003] The critical dimension small-angle X-ray scattering device (CD-SAXS device) usually uses X-rays with a wavelength less than 0.1 nm as an excitation source. When the X-rays irradiate the sample to be measured, the scattering occurring in a small-angle range, the intensity of the X-rays scattered from the sample at different angles is analyzed by rotating the angle between the sample and the light beam, and the three-dimensional geometric structure information of the sample in the nanometer scale range (1-100 nm) such as the critical dimension, the tilt angle and the overlay error is obtained by using a model method to inversely solve the scattering signal. The X-ray small-angle scattering technology has the characteristics of non-contact, non-destructive and statistical average. Unlike the optical scattering technology, the scattering signal intensity of the small-angle X-ray scattering instrument increases with the increase of the number of layers of the 3D structure, and it is expected to play an increasingly important role in the measurement of HAR and other structures in the future.

[0004] However, due to the restriction of physical principles, the scattering interface of matter to X-rays is small, the scattering signal of SAXS is weak, and the measurement efficiency of the CD-SAXS device is low. In the process of generating X-rays, the electrons escaping from the cathode are accelerated by the high-voltage electric field and focused by the electron optical system (such as electromagnetic lens, electrostatic lens, etc.), and then hit the surface of the anode target. About 1% of the energy of the electrons is converted into X-rays (mainly bremsstrahlung and characteristic radiation), and the proportion of useful characteristic X-ray energy is even lower. More than 99% of the energy is released in the form of heat. The continuous bombardment of the high-power electron beam on the metal target will cause the temperature of the target surface to rise sharply, causing the target surface to ablate or melt, and then causing the damage of the anode target, which limits the further improvement of the brightness of the X-ray source. Therefore, how to improve the brightness of the X-ray has become a problem to be solved for improving the measurement efficiency of the CD-SAXS device. SUMMARY

[0005] Therefore, the present application provides a kind of cascade X-ray source system and small-angle X-ray scattering measurement device, solve the problem of low brightness of existing X-ray source, and solve the problem of low measurement efficiency of existing small-angle X-ray scattering measurement device by improving the brightness of X-ray source.

[0006] To solve the above technical problems, one technical scheme adopted by the present application is to provide a kind of cascade X-ray source system, which comprises: a plurality of X-ray emitting light source modules, the X-ray light path emitted by the plurality of light source modules is coaxial, each light source module comprises X-ray optical device, X-ray optical device is arranged on the axis of X-ray light path, X-ray optical device is configured to focus and monochromatize the X-ray emitted by the corresponding light source module, and the X-rays focused by all X-ray optical devices coincide at the target focal point to form high-brightness X-ray.

[0007] As a further improvement of the present application, the light source module further comprises an anode and an electron gun, the anode is arranged on the axis of the X-ray light path, and the electron gun is configured to emit an electron stream to the anode, the electron stream hits the anode to generate X-rays emitted in multiple directions, the X-ray optical device is configured to focus and monochromatize the X-rays emitted in multiple directions, and the obtained X-rays are focused to the target focal point.

[0008] As a further improvement of the present application, the anode comprises a liquid metal pumping system, a nozzle, a liquid metal circulating system and a liquid metal anode, the liquid metal anode is arranged on the axis of the X-ray light path, the liquid metal pumping system is communicated with the nozzle, the liquid metal pumping system is configured to generate high-pressure liquid metal, which is sprayed through the nozzle to form the liquid metal anode, and the liquid metal circulating system is configured to recycle and recycle the liquid metal anode.

[0009] As a further improvement of the present application, the light source module further comprises a first displacement stage, the nozzle is disposed on the first displacement stage, and the first displacement stage is configured to move the nozzle.

[0010] As a further improvement of the present application, the diameter of the liquid metal anode is configured to be in the order of hundreds of microns.

[0011] As a further improvement of the present application, the light source module further comprises a second displacement stage, the X-ray optical device is disposed on the second displacement stage, and the second displacement stage is configured to move the X-ray optical device.

[0012] As a further improvement of the present application, the X-ray optical device comprises one of an ellipsoidal optical device or a parabolic optical device.

[0013] As a further improvement of the present application, the light source system further comprises a vacuum cavity, and all the light source modules are disposed in the vacuum cavity.

[0014] To solve the above technical problems, another technical solution adopted by the present application is to provide a small-angle X-ray scattering measurement device, which comprises one of the above-mentioned cascaded X-ray light source systems, a third displacement stage and a detection system; the X-rays emitted by the cascaded X-ray light source system are coaxial and focused at a target intersection point, forming high-brightness X-rays; the third displacement stage is disposed on the axis of the X-ray light path, and is configured to support a sample and adjust the spatial position of the sample and / or the angle between the sample and the X-ray light path, the sample is irradiated by the high-brightness X-rays to generate a scattering signal; the detection system is disposed on the axis of the X-ray light path, and is configured to collect the scattering signal.

[0015] As a further improvement of the present application, it further comprises a first vacuum tube, a second vacuum tube and a light beam collimation system, the first vacuum tube is disposed between the light source system and the third displacement stage, and the X-ray light path passes through the first vacuum tube, the second vacuum tube is disposed between the third displacement stage and the detection system, and the scattering signal passes through the second vacuum tube to irradiate the detection system, and the light beam collimation system is disposed between the light source system and the third displacement stage, and the X-ray light path passes through the light beam collimation system.

[0016] The beneficial effects of the present application are: the cascade X-ray light source system of the present application arranges multiple light source modules along the axis of the X-ray light path in turn, and then focuses the X-rays generated by each light source module at the same focal point through the X-ray optical device arranged in each light source module, thereby performing near-linear superposition of the X-rays emitted by multiple light source modules to obtain high-brightness X-rays, which greatly improves the brightness of the X-rays finally output by the light source system, thereby making the intensity of the scattering signal formed by the cascade X-ray light source system irradiating the sample higher, and further improving the measurement efficiency of the small-angle X-ray scattering measurement device using the cascade X-ray light source system. Moreover, the multiple light source modules are cascaded, each of which uses a liquid metal anode, and the target material of the liquid metal anode is liquid, and there is no problem of solid anode being liquefied by electron beam bombardment, and the liquid metal anode itself has no water cooling structure, and the size of the liquid metal anode is in the order of hundreds of microns, and the structure is more compact, so that the loss is smaller when the X-rays pass through, and the brightness of the finally emitted X-rays is ensured to be high. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is a structural schematic diagram of the cascade X-ray light source system of the embodiment of the present application;

[0018] Figure 2 is a structural schematic diagram of one example of the cascade X-ray light source system of the embodiment of the present application;

[0019] Figure 3 is a focusing principle schematic diagram of the ellipsoidal optical device of one example of the cascade X-ray light source system of the embodiment of the present application;

[0020] Figure 4 is a structural schematic diagram of the light source module of the cascade X-ray light source system of the embodiment of the present application;

[0021] Figure 5 is a structural schematic diagram of the small-angle X-ray scattering measurement device of the embodiment of the present application. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0023] The terms "first", "second", "third", etc. in the present application are only used for descriptive purpose and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second", "third" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise explicitly and specifically limited. All directional indications (such as upper, lower, left, right, front, back, etc.) in the embodiments of the present application are only used to explain the relative spatial position, movement condition, etc. between the components, and if the specific posture (as shown in the drawings) changes, the directional indications also change accordingly. In addition, the terms "comprise" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but can optionally include steps or units not listed, or can optionally include other steps or units inherent to the process, method, product or device.

[0024] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase that the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily mutually exclusive of one another. As will be apparent to those of ordinary skill in the art, embodiments described herein can be combined with other embodiments.

[0025] Figure 1 is a structural schematic diagram of a cascaded X-ray light source system according to an embodiment of the present application. As shown in Figure 1As shown, the cascade X-ray light source system includes a plurality of X-ray emitting light source modules 11, and the X-ray light paths emitted by the plurality of light source modules 11 are coaxial, where the X-ray light path refers to the light path formed by the X-rays emitted by each light source module 11, and the X-ray light paths emitted by the plurality of light source modules 11 are coaxial, i.e., the X-rays emitted by the plurality of light source modules 11 overlap to form an X-ray light path. It should be noted that the number of light source modules 11 can be pre-set according to requirements, and the number of light source modules 11 is not limited in this embodiment, for example, two or three light source modules 11 are arranged in sequence on the axis of the X-ray light path. Each light source module 11 includes an X-ray optical device 111, which is arranged on the axis of the X-ray light path, and the X-ray optical device 111 is configured to focus and monochromatize the X-rays emitted by the corresponding light source module 11. The X-rays focused by all X-ray optical devices 111 coincide at a target focal point, forming high-brightness X-rays. It can be understood that, in order to enhance the brightness of the X-rays finally output by the light source system 1, the plurality of light source modules 11 are cascaded to form a plurality of X-rays, and then the plurality of X-rays are superimposed and focused on the target focal point to form high-brightness X-rays. Therefore, each light source module 11 does not need to increase the power of the electron beam, and high-brightness X-rays can be obtained without ablation or melting of the anode target.

[0026] Specifically, for the convenience of understanding, this embodiment takes the light source system including two light source modules 11 as an example for description. Referring to Figure 2 , the light source system 1 includes a first light source module 11A and a second light source module 11B, and the first light source module 11A and the second light source module 11B are arranged in sequence on the axis of the X-ray light path. The first X-ray optical device 111A collects the X-rays generated by the first light source module 11A, and the second X-ray optical device 111B collects the X-rays generated by the second light source module 11B. The positions of the first light source module 11A and the second light source module 11B are adjusted, so that the X-rays focused by the first X-ray optical device 111A and the X-rays focused by the second X-ray optical device 111B coincide at the focal point B. Specifically, assuming that the first X-ray optical device 111A and the second X-ray optical device 111B are both ellipsoidal monochromators, in order to enable the two to focus at the target focal point B, referring to Figure 3 , the focal length f1 of the first X-ray optical device 111A should be greater than the focal length f2 of the second X-ray optical device 111B. Then, by adjusting the spatial positions between the first X-ray optical device 111A and the second X-ray optical device 111B, the focal points of the first X-ray optical device 111A and the second X-ray optical device 111B coincide, and the coinciding focal point is the target focal point.

[0027] The cascaded X-ray light source system of the embodiment is arranged by arranging multiple light source modules 11 along the axis of the X-ray light path in sequence, and then focusing the X-rays generated by each light source module 11 at the same focal point through the X-ray optical device 111 arranged in each light source module 11, so as to perform near-linear superposition of the X-rays emitted by the multiple light source modules 11, and obtain high-brightness X-rays, which greatly improves the brightness of the X-rays finally output by the light source system 1, so that the intensity of the scattering signal formed by the cascaded X-ray light source system irradiating the sample is higher, and the measurement efficiency of the small-angle X-ray scattering measurement device using the cascaded X-ray light source system is further improved.

[0028] Further, on the basis of the above-mentioned embodiments, in other embodiments, please refer to Figure 4 The light source module 11 further includes an anode 12 and an electron gun 13, the anode 12 is arranged on the axis of the X-ray light path, and the electron gun 13 is configured to emit an electron stream to the anode 12, the electron stream bombards the anode 12 to generate X-rays emitted in multiple directions, and the X-ray optical device 111 is configured to focus and monochromatize the X-rays emitted in multiple directions, and focus the obtained X-rays to the target focal point.

[0029] Specifically, in the embodiment, the electron gun 13 is used to generate an electron beam, which is accelerated, focused, deflected and finally guided to the anode 12 through the built-in electron optical system of the electron gun 13, the electron beam bombards the surface of the anode 12 to generate X-rays emitted in eight directions through bremsstrahlung and characteristic radiation. The X-ray optical device 111 and the anode 12 are on the same axis of the X-ray light path, which is used to collect and monochromatize the X-rays, and then focus the processed X-rays to the target focal point.

[0030] Further, in order to further simplify the equipment and improve the measurement efficiency, on the basis of the above-mentioned embodiments, in other embodiments, please refer to Figure 4 The anode 12 includes a liquid metal pumping system 121, a nozzle 122, a liquid metal circulating system 123 and a liquid metal anode 124, the liquid metal anode 124 is arranged on the axis of the X-ray light path, the liquid metal pumping system 121 is in communication with the nozzle 122, the liquid metal pumping system 121 is configured to generate high-pressure liquid metal, which is sprayed through the nozzle 122 to form the liquid metal anode 124, and the liquid metal circulating system 123 is configured to recycle and recycle the liquid metal anode 124.

[0031] Specifically, the liquid metal material is in liquid state, which does not have liquefaction problem under the cyclic thermal stress induced by the periodic bombardment of the electron beam, and the surface of the liquid metal material is effectively self-repaired, which is a significant advantage over the solid anode 12 material. By eliminating the surface liquefaction problem, the overall power load on the liquid metal anode 124 material can be increased, and therefore the power of the electron beam can be increased to generate brighter X-rays. Moreover, the liquid metal anode 124 itself does not require a water-cooled structure, so the overall ray measurement device is more compact.

[0032] Further, the light source module 11 further comprises a first displacement table 14, the nozzle 122 is disposed on the first displacement table 14, and the first displacement table 14 is configured to drive the nozzle 122 to move.

[0033] Specifically, the first displacement table 14 is used to drive the nozzle 122 to move to adjust the position of the nozzle 122, so as to focus the electron gun 13 and the liquid metal anode 124.

[0034] Further, the diameter of the liquid metal anode 124 is configured to be in the order of hundreds of microns.

[0035] Specifically, the diameter of the liquid metal anode 124 is configured to be in the order of hundreds of microns, and the size of the diameter of the liquid metal anode 124 can also be adjusted by adjusting the outlet size of the nozzle 122.

[0036] It should be noted that since the plurality of light source modules 11 are on the same axis, the X-rays generated by the light source module 11 far from the target focal point will inevitably pass through the liquid metal anode 124 of the light source module 11 close to the target focal point before reaching the target focal point. However, it can be understood that the X-rays generated by the light source module 11 form a circular spot after being focused by the X-ray optical device 111, and the diameter is much larger than the order of hundreds of microns, and the amount of X-rays passing through the liquid metal anode 124 is small, so the amount of X-rays absorbed and attenuated is small, and most of the X-rays do not pass through the liquid metal anode 124 and are directly focused at the target focal point. Therefore, due to the limited attenuation of the X-ray intensity caused by cascading, the spot brightness at the target focal point can be considered as the near-linear superposition of the X-rays generated by all the light source modules 11.

[0037] Further, referring to Figure 4 , the light source module 11 further comprises a second displacement table 15, and the X-ray optical device 111 is disposed on the second displacement table 15, and the second displacement table 15 is configured to drive the X-ray optical device 111 to move.

[0038] Specifically, the second displacement table 15 is configured to drive the X-ray optical device 111 to move, so as to adjust the light collection efficiency of the X-ray optical device 111, and adjust the distance between the X-ray optical device 111 and the anode 12, so that the light collection efficiency of the X-ray optical device 111 is maximized.

[0039] Further, the X-ray optical device 111 comprises one of an ellipsoidal optical device or a parabolic optical device, which is not limited in the embodiment.

[0040] Further, the light source system further comprises a vacuum cavity 16, and all the light source modules 11 are arranged in the vacuum cavity 16.

[0041] Specifically, by arranging the vacuum cavity 16, the X-rays generated by the light source modules 11 can be prevented from being attenuated and interfered by the atmosphere.

[0042] Figure 5 is a structural schematic diagram of a small-angle X-ray scattering measurement device according to an embodiment of the present application. As shown in the figure, the cascaded X-ray light source system comprises the cascaded X-ray light source system 1 according to any one of the above embodiments, a third displacement table 2 and a detection system 3. Figure 5

[0043] The light source system 1 comprises a plurality of light source modules 11 emitting X-rays, and the X-ray light paths emitted by the plurality of light source modules 11 are coaxial. It should be noted that the number of light source modules 11 can be pre-set according to requirements, and the number of light source modules 11 is not limited in the embodiment. For example, two or three light source modules 11 are arranged in sequence on the axis of the X-ray light path. Each light source module 11 comprises an X-ray optical device 111 arranged on the axis of the X-ray light path. The X-ray optical device 111 is configured to focus and monochromatize the X-rays emitted by the corresponding light source module 11. The X-rays focused by all the X-ray optical devices 111 coincide at a target focal point, forming high-brightness X-rays. It can be understood that, in order to enhance the brightness of the X-rays finally output by the light source system 1, the embodiment forms a plurality of X-rays through the cascaded plurality of light source modules 11, and then superimposes the plurality of X-rays to form high-brightness X-rays. Therefore, each light source module 11 does not need to increase the power of the electron beam, and high-brightness X-rays can be obtained without ablation or melting of the target of the anode 12.

[0044] ​The third displacement table 2 is arranged on the axis of the X-ray light path, and is configured to support the sample 7 and adjust the spatial position of the sample 7 and / or the angle between the sample 7 and the X-ray light path. The sample 7 is irradiated by the high-brightness X-ray to generate a scattering signal. Specifically, the third displacement table 2 adjusts the spatial position of the sample 7 to the target focal point.

[0045] The detection system 3 is arranged on the axis of the X-ray light path, and is configured to collect the scattering signal and process and analyze the scattering signal to obtain the measurement result of the sample 7.

[0046] The small-angle X-ray scattering measurement device of the embodiment can perform near-linear superposition of the X-rays emitted by the plurality of light source modules 11 by arranging the plurality of light source modules 11 along the axis of the X-ray light path and focusing the X-rays generated by each light source module 11 at the same focal point by the X-ray optical device 111 arranged in each light source module 11, thereby obtaining high-brightness X-rays. The high-brightness X-rays are used to irradiate the sample 7 to form a scattering signal, which is detected and analyzed by the detection system 3. The brightness of the X-rays finally output by the light source system 1 is greatly improved, so that the intensity of the scattering signal formed by irradiating the sample 7 is higher, and the final measurement efficiency of the small-angle X-ray scattering measurement device is improved.

[0047] Further, the small-angle X-ray scattering measurement device further comprises a first vacuum tube 4 and a second vacuum tube 5. The first vacuum tube 4 is arranged between the light source system 1 and the third displacement table 2, and the X-ray light path passes through the first vacuum tube 4. The second vacuum tube 5 is arranged between the third displacement table 2 and the detection system 3, and the scattering signal passes through the second vacuum tube 5 to irradiate the detection system 3.

[0048] Specifically, the first vacuum tube 4 is used to reduce the attenuation and interference of the atmosphere on the X-rays in the propagation path, and the second vacuum tube 5 is used to reduce the attenuation and interference of the atmosphere on the scattering signal in the propagation path.

[0049] Further, the small-angle X-ray scattering measurement device further comprises a beam collimation system 6, which is arranged between the light source system 1 and the third displacement table 2, and the X-ray light path passes through the beam collimation system 6.

[0050] Specifically, the beam collimation system 6 is used to control the spot size of the X-rays from the X-ray optical device 111.

[0051] The above is only an embodiment of the present application, and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation using the content of the specification and drawings, or direct or indirect application in other related technical fields, is also included in the patent protection scope of the present application.

Claims

1. A cascaded X-ray source system, characterized in that, It includes: Multiple X-ray emitting light source modules are arranged sequentially along the same straight line. The X-ray light paths emitted by the multiple light source modules are coaxial. Each light source module includes an X-ray optical device, which is arranged on the axis of the X-ray light path. The X-ray optical device is configured to focus and monochromate the X-rays emitted by the corresponding light source module. The X-rays focused by the X-ray optical devices of all light source modules coincide at the target focal point, forming high-brightness X-rays. The X-ray optical device includes either an ellipsoidal optical device or a parabolic optical device.

2. The cascaded X-ray source system according to claim 1, characterized in that, The light source module also includes an anode and an electron gun. The anode is disposed on the axis of the X-ray optical path. The electron gun is configured to emit an electron beam toward the anode. The electron beam bombards the anode to generate X-rays emitted in multiple directions. The X-ray optics are configured to focus and monochromate the X-rays emitted in multiple directions and focus the obtained X-rays to the target focal point.

3. The cascaded X-ray source system according to claim 2, characterized in that, The anode includes a liquid metal pumping system, a nozzle, a liquid metal circulation system, and a liquid metal anode. The liquid metal anode is disposed on the axis of the X-ray beam path. The liquid metal pumping system is connected to the nozzle. The liquid metal pumping system is configured to generate high-pressure liquid metal, which is sprayed through the nozzle to form the liquid metal anode. The liquid metal circulation system is configured to recover and recycle the liquid metal anode.

4. The cascaded X-ray source system according to claim 3, characterized in that, The light source module further includes a first displacement stage, on which the nozzle is disposed, and the first displacement stage is configured to drive the nozzle to move.

5. The cascaded X-ray source system according to claim 3, characterized in that, The diameter of the liquid metal anode is configured to be on the order of hundreds of micrometers.

6. The cascaded X-ray source system according to claim 1, characterized in that, The light source module also includes a second displacement stage, on which the X-ray optical device is disposed, and the second displacement stage is configured to move the X-ray optical device.

7. The cascaded X-ray source system according to claim 1, characterized in that, The light source system also includes a vacuum chamber, in which all light source modules are housed.

8. A small-angle X-ray scattering measurement device, characterized in that, It includes the cascaded X-ray source system, the third displacement stage, and the detection system as described in any one of claims 1-7; The cascaded X-ray source system emits X-ray beams that are coaxial and focused at the target intersection point, forming high-brightness X-rays. The third displacement stage is disposed on the axis of the X-ray optical path and is configured to support the sample and adjust the spatial position of the sample and / or the angle between the sample and the X-ray optical path. The sample is irradiated by the high-brightness X-rays and generates a scattering signal. The detection system is positioned on the axis of the X-ray optical path and is configured to collect the scattered signal.

9. The small-angle X-ray scattering measuring device according to claim 8, characterized in that, It also includes a first vacuum tube, a second vacuum tube, and a beam collimation system. The first vacuum tube is disposed between the light source system and the third displacement stage, and the X-ray beam path passes through the first vacuum tube. The second vacuum tube is disposed between the third displacement stage and the detection system, and the scattered signal passes through the second vacuum tube to irradiate the detection system. The beam collimation system is disposed between the light source system and the third displacement stage, and the X-ray beam path passes through the beam collimation system.

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