Electrode forming system

Abstract

An electrode forming system for forming an electrode by supplying a powder to a substrate, the electrode forming system being provided with: a transport device for transporting the substrate along a transport path, the transport device having a first electric actuator and a ball screw mechanism capable of continuously converting rotation by the first electric actuator into movement in a direction along the transport path; a storage container for storing the powder; and a roller which is operated by a second electric actuator, is provided at the lower end of the storage container, and scrapes the powder in the storage container against a target region on the conveyance path through which the base material can pass.

Description

Technical Field

[0001] The present disclosure relates to electrode forming systems. Background Art

[0002] Patent Document 1 describes a device for producing a lithium ion battery electrode that supplies an electrode composition onto a substrate. The device includes a belt conveyor on which a substrate is placed, a supply mechanism that supplies a powdered electrode composition onto the substrate, and a rack and pinion pair that moves the relative position of the supply mechanism and the substrate.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2021-044154

[0004] In the manufacturing device for lithium-ion battery electrodes described in Patent Document 1, since the hard rack and gear are repeatedly engaged and disengaged, there is a concern that the gap between the tooth surfaces changes due to wear, etc., and periodic vibration is transmitted to the gear. Therefore, when powder is supplied to a substrate that moves through a rack and gear pair, there is a possibility that periodic thickness differences (unevenness) occur in the layer of powder supplied to the substrate. Summary of the invention

[0005] The present disclosure provides an electrode forming system that suppresses periodic unevenness of powder supplied onto a substrate.

[0006] The electrode forming system disclosed in the present invention supplies powder to a substrate to form an electrode. The electrode forming system includes a conveying device, a storage container, and a roller. The conveying device includes: a first electric actuator; and a ball screw mechanism, which can continuously convert the rotation caused by the first electric actuator into a movement along a conveying path, and the conveying device conveys the substrate along the conveying path. The storage container stores powder. The roller is actuated by a second electric actuator and is disposed at the lower end of the storage container to scrape out the powder in the storage container for a target area on the conveying path through which the substrate can pass.

[0007] In the electrode forming system, the substrate forming the electrode is transported along the conveying path by the conveying device. The powder scraped from the storage container by the roller operated by the second electric actuator is supplied to the substrate passing through the target area on the conveying path. Here, the conveying device has a ball screw mechanism that can continuously convert the rotation caused by the first electric actuator into a movement along the conveying path. That is, the conveying device can convey the substrate without using a gear rack pair that may cause the gap between the tooth surfaces to change. Therefore, the periodic vibration generated by the conveying device can be suppressed, and the movement along the conveying path can be suppressed from becoming intermittent. Thus, the electrode forming system can suppress the periodic unevenness of the powder supplied to the substrate. In addition, the conveying device and the roller are respectively operated by the electric actuator, thereby, compared with the case where the conveying device and the roller are respectively operated by hydraulic or pneumatic actuators, the movement of the conveying device and the roller can be respectively precisely controlled. Thus, in the electrode forming system, the substrate is smoothly conveyed along the conveying path by the conveying device, and the variation of the amount of powder supplied to the substrate can be suppressed.

[0008] In an electrode forming system of one embodiment, the conveying device may also include: a stage on which the substrate is placed; and a guide mechanism that extends along the conveying path and can guide the stage along the conveying path. In this case, the movement of the stage in directions other than the direction in which the guide mechanism extends can be suppressed, so that the substrate placed on the stage is stably conveyed along the conveying path. Thus, the electrode forming system can suppress the occurrence of uneven powder supplied to the substrate.

[0009] An electrode forming system of one embodiment may also include: a distance sensor that measures the distance between the substrate and the roller; and a support portion that supports the storage container directly above the target area so that it can be raised and lowered, and the support portion includes a third electric actuator that raises and lowers the storage container according to the distance measured by the distance sensor. The electrode forming system can appropriately adjust the distance between the substrate and the roller by the distance sensor and the third electric actuator, so that the thickness of the layer of powder on the substrate can be made uniform. Thus, the electrode forming system can further suppress the unevenness of the powder supplied to the substrate. In addition, the support portion is raised and lowered by the third electric actuator, thereby accurately controlling the raising and lowering of the support portion compared to the case where the support portion is raised and lowered by a hydraulic or pneumatic actuator. Thus, in the electrode forming system, the storage container can be positioned relative to the substrate with high precision, thereby suppressing the variation in the amount of powder supplied to the substrate.

[0010] The electrode forming system of one embodiment may further include a position measuring unit that measures the conveying position of the substrate, and the conveying device controls the conveying speed of the substrate according to the conveying position of the substrate measured by the position measuring unit. In the electrode forming system, the conveying speed of the substrate is controlled, so the amount of powder supplied can be adjusted according to the location of the substrate. Thus, the electrode forming system can control the density of the powder on the substrate.

[0011] The electrode forming system of one embodiment may further include a position measuring unit that measures the conveying position of the substrate, and the roller controls the rotation speed according to the conveying position of the substrate measured by the position measuring unit. By controlling the rotation speed of the roller, the amount of powder supplied from the storage device to the substrate can be adjusted. In the electrode forming system, the amount of powder supplied from the storage container can be adjusted according to the position of the substrate. Thus, the electrode forming system can control the density of the powder on the substrate.

[0012] In an electrode forming system of one embodiment, the roller can also control the rotation speed according to the conveying speed of the substrate conveyed by the conveying device. By controlling the rotation speed of the roller, the amount of powder supplied from the storage device to the substrate can be adjusted. The electrode forming system can more accurately control the density of the powder on the substrate by adjusting the amount of the supplied powder according to the conveying speed.

[0013] According to another embodiment of an electrode forming system, powder is supplied to a substrate to form an electrode. The electrode forming system includes a conveying device, a storage container, and a roller. The conveying device includes: a first electric actuator; a belt mechanism that can continuously convert the rotation caused by the first electric actuator into a movement along the direction of the conveying path; a loading table that loads the substrate; and a guiding mechanism that extends along the conveying path and can guide the loading table along the conveying path, and the conveying device conveys the substrate along the conveying path. The storage container stores powder. The roller is actuated by a second electric actuator and is disposed at the lower end of the storage container to scrape out the powder in the storage container for a target area on the conveying path through which the substrate can pass.

[0014] In the electrode forming system, the conveying device has a belt mechanism, a mounting table and a guide mechanism capable of continuously converting the rotation caused by the first electric actuator into a motion along the conveying path. The electrode forming system has the same effect as the electrode forming system having the conveying device having the ball screw mechanism.

[0015] According to the electrode forming system of the present disclosure, it is possible to suppress periodic unevenness in the powder supplied onto the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic side view showing an example of an electrode forming system according to an embodiment.

[0017] Figure 2 Yes means Figure 1 A schematic top view of an example of an electrode forming system according to an embodiment is shown along line II-II.

[0018] Figure 3 This is a flowchart showing an example of an electrode forming method using the electrode forming system according to the embodiment.

[0019] Figure 4 This is a graph showing an example of the rotation speed of the roller in the electrode forming system according to the embodiment. DETAILED DESCRIPTION

[0020] Hereinafter, the embodiments of the present disclosure will be described with reference to the accompanying drawings. In addition, in the following description, the same reference numerals are used for the same or equivalent elements, and repeated descriptions are omitted. The dimensional ratios of the drawings do not have to be consistent with those of the description. The terms "upper", "lower", "front" and "rear" are based on the states shown in the drawings and are for convenience.

[0021] [Overview of the electrode forming system]

[0022] Figure 1 This is a schematic side view showing an example of an electrode forming system according to an embodiment. Figure 2 Yes means Figure 1 FIG. 1 is a simplified top view of an example of an electrode forming system of an embodiment shown by line II-II of FIG. The X-axis and Y-axis in the figure are coordinate axes in the horizontal direction, and the Z-axis is a coordinate axis in the vertical direction. The direction along the X-axis, the direction along the Y-axis, and the direction along the Z-axis are orthogonal to each other in an orthogonal coordinate system in a three-dimensional space. The direction along the Z-axis is also referred to as the up-down direction hereinafter.

[0023] Figure 1 The electrode forming system 1 shown is a system for forming an electrode by supplying a powder 15 to a substrate 10. The substrate 10 is a component constituting a battery, such as a current collector. As an example, the substrate 10 has a rectangular top surface extending in the direction along the X-axis and along the Y-axis, and the length of the substrate 10 along the X-axis is about 500 mm, and the length of the substrate 10 along the Y-axis is about 1200 mm. The powder 15 is an electrode material, such as an electrode active substance. As an example, the electrode active substance is a metal oxide containing lithium ions. The electrode forming system 1 forms an electrode by forming a coating (layer) of the powder 15 on the substrate 10. The thickness of the coating is, for example, not less than 0.1 mm and not more than 2.0 mm.

[0024] The electrode forming system 1 includes a conveying device 20. The conveying device 20 conveys the substrate 10 along a conveying path 3. The conveying path 3 is a path for conveying the substrate 10. Figure 1The transport path 3 shown extends along the Y axis. The transport device 20 includes a mounting table 21 on which the substrate 10 is mounted, and a guide mechanism 22 which extends along the transport path 3 and can guide the mounting table 21 along the transport path 3 .

[0025] The mounting table 21 mounts the substrate 10 and is movable along the conveying path 3. The mounting table 21 is a plate-shaped member extending along the X-axis and the Y-axis. The mounting table 21 can mount the substrate 10 and the mask member 11 covering the substrate 10 from above on its upper surface. The substrate 10 may also be mounted on a film (not shown) provided on the mounting table 21.

[0026] The mask member 11 is a plate-shaped member that covers an area where the powder 15 is not supplied to the substrate 10. As an example, the length of the outer edge of the mask member 11 along the X-axis direction is about 500 mm, and the length of the outer edge of the mask member 11 along the Y-axis direction is about 1200 mm. The mask member 11 is, for example, in a frame shape that covers the outer edge portion of the substrate 10 and the central portion of the substrate 10, so that two supply areas 10a that can supply the powder 15 are arranged adjacent to each other in the direction along the Y-axis. Thus, two electrodes can be formed on one substrate 10 by the electrode forming system 1. In addition, the number of supply areas 10a provided on the substrate 10 is not limited to two. In the substrate 10, two supply areas 10a can be set as one supply area 10a without changing the area of ​​the supply area 10a, or it can be set as three or more supply areas 10a. That is, the number of supply areas 10a is arbitrarily set. In addition, the number of electrodes formed on one substrate 10 by the electrode forming system 1 is not limited, and one or more electrodes can be formed with respect to one substrate 10 according to the number of supply areas 10a. The sizes and shapes of the substrate 10 , the mask member 11 , and the mounting table 21 are appropriately adjusted according to the number, size, and shape of the supply regions 10 a provided for one substrate 10 .

[0027] The two supply regions 10a are adjacent to each other across the central portion in the direction along the Y axis. The length of each supply region 10a in the direction along the X axis is about 400 mm, and the length of each supply region 10a in the direction along the Y axis is about 500 mm. The size of the supply region 10a is set according to the size of the electrode formed on the substrate 10. As an example, the central portion of the substrate 10 is a portion sandwiched by the two supply regions 10a, extending 500 mm in the direction along the X axis, and having a width of about 50 mm in the direction along the Y axis. As an example, the outer edge portion of the substrate 10 is a portion of the substrate 10 having a width of about 75 mm in the direction along the Y axis based on each end side (outer edge) extending 500 mm in the direction along the X axis. As an example, the outer edge portion of the substrate 10 is a portion of the substrate 10 having a width of about 50 mm in the direction along the X axis based on each end side (outer edge) extending 1200 mm in the direction along the Y axis. The mask member 11 is placed on the substrate 10 before the powder 15 is supplied to the substrate 10 by the electrode forming system 1. For example, the substrate 10 is placed so as to be accommodated in the mounting table 21 in a plan view, and the mask member 11 is placed so as to be accommodated in the mounting table 21.

[0028] The guide mechanism 22 guides the stage 21 along the Y-axis. The guide mechanism 22 is, for example, a linear guide. The guide mechanism 22 has a pair of guide rails 23, 23 and a pair of guide holders 24, 24. The pair of guide rails 23, 23 extend along the Y-axis. The pair of guide rails 23, 23 are, for example, provided so as to be located directly below the two end portions of the stage 21 in the direction along the X-axis and separated by a predetermined width in the direction along the X-axis. The pair of guide holders 24, 24 are fixed to the stage 21. For example, the pair of guide holders 24, 24 are fixed to the lower surfaces of the two end portions of the stage 21 in the direction along the X-axis.

[0029] The conveying device 20 includes a drive mechanism 30 and a ball screw mechanism 31. The drive mechanism 30 drives the ball screw mechanism 31. The drive mechanism 30 is, for example, a first electric actuator. The electric actuator is, for example, an electric motor.

[0030] The ball screw mechanism 31 can continuously convert the rotation of the drive mechanism 30 into a motion along the direction of the conveying path 3. The ball screw mechanism 31 has a moving shaft 32 and a moving member 33. The moving shaft 32 is, for example, a long screw shaft and extends along the Y axis. The moving shaft 32 is supported by a bearing (not shown) so as to be rotatable around the central axis. The circumferential surface of the moving shaft 32 is continuously formed with thread cutting. The moving shaft 32 is connected to the drive mechanism 30 and rotated by the drive mechanism 30.

[0031] The moving member 33 is fixed to the mounting table 21 and is arranged to be rotatable relative to the moving shaft 32. The moving member 33 is fixed to the lower surface of the mounting table 21, for example. The moving member 33 is moved along the Y-axis by the moving shaft 32 rotating with the power generated by the driving mechanism 30. The moving member 33 is, for example, an internal thread or a nut bracket. Since the thread cutting of the moving shaft 32 is continuously formed, the moving member 33 is continuously threadedly engaged between the front end and the rear end of the moving shaft 32.

[0032] When the moving shaft 32 rotates forward (for example, right), the moving component 33 moves along the positive direction (front) of the Y axis together with the stage 21 as the moving shaft 32 rotates reversely (for example, left), the moving component 33 moves along the negative direction (back) of the Y axis together with the stage 21 as the moving shaft 32 rotates reversely. The rotation of the driving mechanism 30 is continuously converted into the movement of the moving component 33 along the Y axis through the rotation of the moving shaft 32. By the moving component 33 moving along the Y axis, the stage 21 fixed to the moving component 33 and the substrate 10 placed on the stage 21 can move along the Y axis. The stage 21 and the substrate 10 of this embodiment are transported toward the front when the powder 15 is supplied.

[0033] The electrode forming system 1 includes a storage container 40 and a roller 50. The electrode forming system 1 scrapes the powder 15 from the storage container 40 by the roller 50, and supplies the powder 15 to the substrate 10 on the mounting table 21. The storage container 40 stores the powder 15. The storage container 40 is, for example, a hopper. The storage container 40 is disposed above a predetermined position of the conveying path 3. As a specific example, the storage container 40 is disposed directly above the target area 12 on the conveying path 3 through which the substrate 10 can pass.

[0034] The target area 12 is a partial area on the conveyor path 3. The target area 12 can be arbitrarily set as a position where a structure such as the storage container 40 is provided. The target area 12 is an area where the powder 15 is supplied by the storage container 40 and the roller 50. The target area 12 is, for example, an area where the supply area 10a of the substrate 10 conveyed by the conveying device 20 along the conveyor path 3 passes. The target area 12 is an area between a pair of guide rails 23, 23 in the direction along the X-axis.

[0035] The storage container 40 is a cylindrical component that penetrates in the vertical direction. When viewed from above, the front end of the storage container 40 is inclined so that the space in the storage container 40 expands upward. The outer shape of the lower part of the storage container 40 is a rectangular parallelepiped. The shape of the storage container 40 is not limited. An inlet 40a at the upper end and a supply port 40b at the lower end are formed in the storage container 40. The powder 15 passes through the inlet 40a and the supply port 40b. For example, the powder 15 is supplied from a supply source not shown in the figure to the storage container 40 via the inlet 40a. The powder 15 is supplied to the target area 12 below via the supply port 40b of the storage container 40.

[0036] An opening and closing gate 41 is provided at the supply port 40b of the storage container 40. The opening and closing gate 41 controls the amount of the powder 15 supplied from the storage container 40 to the substrate 10 by opening and closing the supply port 40b. The opening and closing gate 41 is, for example, a plate-shaped member extending in the direction along the X-axis and in the direction along the Y-axis. The opening and closing gate 41 is, for example, provided to be movable along the Y-axis. The position of the opening and closing gate 41 is controlled by a gate driving unit 42. The gate driving unit 42 is, for example, an electric actuator. The opening and closing gate 41 is driven by the gate driving unit 42 to move to an open position or a closed position.

[0037] The roller 50 is provided at the lower end of the storage container 40, and scrapes out the powder 15 in the storage container 40 for the target area 12. The roller 50 includes a roller body 51, a rotating shaft 52, and a roller driving unit 53. The roller body 51 is provided, for example, at the lower end of the front side of the storage container 40, and scrapes out the powder 15 in the storage container 40. The roller body 51 is a cylindrical member extending along the X-axis.

[0038] The rear side of the roller body 51 is located inside the storage container 40 and can contact the powder 15. The front side of the roller body 51 is located outside the storage container 40. The rotation axis 52 extends along the X axis and is provided at the center of the roller body 51. The rotation axis 52 is provided, for example, along the front surface of the lower part of the storage container 40. The roller driving unit 53 controls the rotation of the roller body 51. The roller driving unit 53 is, for example, a second electric actuator. The roller body 51 is driven by the roller driving unit 53 to rotate around the rotation axis 52. Figure 1 Rotate in the direction of arrow R1.

[0039] When the supply port 40b of the storage container 40 is set to a closed state, the opening and closing gate 41 is moved forward from the rear end of the storage container 40 by the gate driving unit 42 and abuts against the roller body 51. At this time, the opening and closing gate 41 covers the supply port 40b of the storage container 40 from below, so that the powder 15 is not supplied from the supply port 40b of the storage container 40. When the supply port 40b of the storage container 40 is set to an open state, the opening and closing gate 41 is separated from the roller body 51 by the gate driving unit 42 and moves toward the rear end of the storage container 40. When the supply port 40b is in an open state, the roller body 51 rotates around the rotation shaft 52 to scrape out the powder 15 in the storage container 40, thereby enabling the powder 15 to be smoothly supplied to the target area 12.

[0040] The storage container 40 is provided with a distance sensor 60. The distance sensor 60 measures the distance between the substrate 10 and the roller 50. The distance sensor 60 is provided, for example, on the side of the storage container 40 and can be raised and lowered together with the storage container 40. The distance sensor 60 measures the distance in the vertical direction between the substrate 10 placed on the mounting table 21 and the roller body 51. The distance sensor 60 can also measure, for example, the distance between the mask member 11 and the roller body 51, the distance between the mounting table 21 and the roller body 51, and the like. In the following, there is a case where the substrate 10, the mask member 11, and the mounting table 21 are described as measurement objects.

[0041] The storage container 40 is supported by the support portion 70. The support portion 70 supports the storage container 40 so as to be able to be raised and lowered directly above the target area 12. The support portion 70 includes a container support portion 71 and a lifting actuator 74. The container support portion 71 supports the storage container 40 so as to be able to be raised and lowered directly above the target area 12. The container support portion 71 is, for example, a door-shaped frame and includes: a pair of column members 72 that are disposed in a manner opposing each other with the conveying path 3 interposed therebetween in the direction along the X-axis and extending in the up-down direction; and a beam member 73 that connects the upper portions of the pair of column members and extends in the direction along the X-axis. Figure 1 , the column member 72 located in the negative direction of the X-axis is omitted. The pair of column members 72 is, for example, a pair of linear guides. The storage container 40 is guided by the pair of column members 72 to be raised and lowered. The container support portion 71 may also support the gate drive portion 42, the roller drive portion 53, and the lifting actuator 74.

[0042] The lifting actuator 74 lifts the storage container 40 . The lifting actuator 74 is, for example, a third electric actuator. The storage container 40 is driven by the lifting actuator 74 to move in the up-down direction along the container support 71 .

[0043] The conveying position of the substrate 10 is measured by the position measuring unit 80. The position measuring unit 80 measures, for example, the conveying position of the measurement object including the substrate 10, the mask member 11, and the stage 21. The conveying position of the measurement object includes, for example, the relative position of each end of the measurement object relative to the object area 12 in the direction along the Y axis. The position measuring unit 80 is, for example, disposed above the conveying path 3 at the object area 12 or on the upstream side (front side) of the conveying path 3 relative to the object area 12. The position measuring unit 80 includes, for example, a light emitting unit and an image sensor. The position measuring unit 80 irradiates parallel laser light toward the conveying path 3 through the light emitting unit, and the image sensor recognizes the reflection or shadow of the parallel laser light. The position of the measurement object on the conveying path 3 is measured based on the intensity of the reflected light, the intensity of the shadow, and the like recognized by the image sensor.

[0044] The control unit 90 controls the entire electrode forming system 1. The control unit 90 is configured as a PLC (Programmable Logic Controller) as an example. The control unit 90 can also be configured as a general computer system including a CPU (Central Processing Unit), a main storage device such as a RAM (Random Access Memory) and a ROM (Read Only Memory), an input device such as a touch panel and a keyboard, an output device such as a display, an auxiliary storage device such as a hard disk, etc.

[0045] The control unit 90 is provided with, for example, an operation panel that can be operated by an operator. The control unit 90 is connected to the conveying device 20, the storage container 40, the roller 50, the distance sensor 60, the support unit 70, and the position measuring unit 80 in a communicable manner. The control unit 90 outputs a control signal to the conveying device 20, the roller 50, the distance sensor 60, the support unit 70, and the position measuring unit 80 to control the operation of each structure. The control unit 90 reads a pre-prepared program to operate the conveying device 20, the roller 50, the distance sensor 60, the support unit 70, and the position measuring unit 80. The control unit 90 may also operate the conveying device 20, the roller 50, the distance sensor 60, the support unit 70, and the position measuring unit 80 according to the instruction of the operator received by the operation panel (not shown). The control unit 90 may also be connected to the supply source of the powder 15 (not shown) in a communicable manner, and output a control signal in a manner of supplying the powder 15 according to the amount of the powder 15 in the storage container 40.

[0046] The control unit 90 can operate the lifting actuator 74 according to the distance measured by the distance sensor 60. The control unit 90 adjusts the vertical position of the storage container 40 so that the substrate 10 and the storage container 40 are at a predetermined distance based on, for example, the shape of the mask member 11, the amount of powder 15 supplied from the storage container 40, and the like. The amount of powder 15 supplied from the storage container 40 is determined, for example, based on the amount of powder 15 stored in the storage container 40, the degree of opening of the opening and closing gate 41, and the rotation speed of the roller 50. The control unit 90 drives the lifting actuator 74 to lift the storage container 40, and stops driving the lifting actuator 74 when the distance measured by the distance sensor 60 is the predetermined distance. In this case, the storage container 40 is supported by the container support unit 71 in a state where it is separated from the substrate 10 by a predetermined distance.

[0047] The control unit 90 can operate the conveying device 20 and control the conveying speed of the substrate 10 according to the conveying position of the substrate 10 measured by the position measuring unit 80. For example, when the supply region 10a of the substrate 10 is located within the target region 12, the control unit 90 reduces the conveying speed of the substrate 10 compared to when the supply region 10a of the substrate 10 is located outside the target region 12. When it is difficult to supply the powder 15 to the boundary portion between the substrate 10 and the mask member 11, the control unit 90 may reduce the conveying speed of the substrate 10.

[0048] The control unit 90 can operate the gate driving unit 42 and control the movement of the opening and closing gate 41 according to the conveying position of the substrate 10 measured by the position measuring unit 80. For example, when the supply area 10a of the substrate 10 is located in the target area 12, the control unit 90 increases the opening degree of the opening and closing gate 41 compared to when the supply area 10a of the substrate 10 is located outside the target area 12. Before the supply area 10a of the substrate 10 is immediately located in the target area 12, the control unit 90 may control the movement of the opening and closing gate 41 so that the opening and closing gate 41 is in the open state.

[0049] The control unit 90 can operate the roller driving unit 53 and control the rotation speed of the roller 50 according to the conveying position of the substrate 10 measured by the position measuring unit 80. For example, the control unit 90 drives the roller driving unit 53 so that the roller 50 (roller body 51) reaches a predetermined rotation speed when the supply area 10a of the substrate 10 is located in the target area 12. The control unit 90 stops the driving of the roller driving unit 53 so that the rotation speed of the roller 50 is 0 when the supply area 10a of the substrate 10 is located outside the target area 12. In the case where it is difficult to supply the powder 15 to the boundary portion between the substrate 10 and the mask member 11, the control unit 90 may control the roller driving unit 53 so that the rotation speed of the roller 50 becomes faster. The control unit 90 may control the rotation speed of the roller 50 according to the conveying speed of the substrate 10. The control unit 90 may control the rotation speed of the roller 50 according to the opening degree of the opening and closing gate 41.

[0050] [Electrode Formation Method]

[0051] Figure 3 FIG. 1 is a flowchart showing an example of an electrode forming method using the electrode forming system of the embodiment. Figure 3 The electrode forming method of the electrode forming system 1 of the present embodiment shown is started by the control unit 90 based on the instruction of the operator when the substrate 10 is placed on the stage 21. First, as a conveying process (S11), the conveying device 20 conveys the stage 21 on which the substrate 10 is placed along the conveying path 3. The driving mechanism 30 is driven so that the moving shaft 32 of the ball screw mechanism 31 rotates in one direction, thereby the moving component 33 moves forward (Y-axis positive direction). The moving component 33 is fixed to the lower surface of the stage 21, so that the stage 21 is conveyed forward. The stage 21 is guided forward by the guide mechanism 22. The driving mechanism 30 is adjusted, for example, so that the conveying speed until the substrate 10 enters the target area 12 is faster than the conveying speed after the substrate 10 enters the target area 12.

[0052] Next, as a position determination process ( S13 ), the control unit 90 determines whether or not the substrate 10 has passed a predetermined position based on the conveyance position of the measurement target acquired by the position measurement unit 80 .

[0053] The predetermined position refers to a position near the target area 12, and is a position where the powder 15 is supplied to the supply area 10a after a predetermined time. For example, when the position measuring unit 80 measures that the rear end of the target area 12 coincides with the front end of the stage 21, the control unit 90 determines that the substrate 10 has passed the predetermined position. When the control unit 90 determines that the substrate 10 has passed the predetermined position (S13: Yes), the conveying device 20 reduces the conveying speed of the substrate 10, and the control unit 90 transfers to the next process. When the control unit 90 determines that the substrate 10 has passed the predetermined position (S13: Yes), for example, the control unit 90 causes the gate driving unit 42 to move the opening and closing gate 41 to open the supply port 40b of the storage container 40 by a predetermined width. When the control unit 90 does not determine that the substrate 10 has passed the predetermined position (S13: No), the control unit 90 performs the position determination process again after a predetermined time (S13).

[0054] Next, as a lifting process (S15), the lifting actuator 74 lifts the storage container 40 in such a manner that the storage container 40 is located at a predetermined position. For example, the control unit 90 causes the lifting actuator 74 to lift the storage container 40 according to the distance between the substrate 10 and the roller 50 measured by the distance sensor 60. The lifting actuator 74 lifts the storage container 40, for example, in such a manner that the distance relative to the measurement object in the target area 12 becomes constant. For example, when the mask member 11 passes through the target area 12, the control unit 90 causes the lifting actuator 74 to lift the storage container 40 and stop. For example, when the supply area 10a of the substrate 10 passes through the target area 12, the control unit 90 causes the lifting actuator 74 to lower the storage container 40 and stop. This lifting process (S15) may also be performed during the execution of the following other processes.

[0055] Next, as a supply process (S17), the storage container 40 and the roller 50 supply the powder 15 from the storage container 40 to the substrate 10. The supply process (S17) is performed, for example, after a predetermined time has passed since the position determination process (S13). The predetermined time is a value obtained by dividing the distance from the conveying position of the substrate 10 to the target area 12 measured in the position determination process (S13) by the conveying speed of the conveying device 20 conveying the substrate 10. The supply process (S17) may be performed, for example, when it is determined by the position measurement unit 80 that the supply area 10a of the substrate 10 has entered the target area 12. The control unit 90 controls the conveying device 20, the gate driving unit 42, and the roller driving unit 53, for example, so as to supply a predetermined amount of powder 15 according to the location of the supply area 10a of the substrate 10 in the target area 12. By supplying a predetermined amount of powder 15 according to the location of the supply area 10a of the substrate 10 in the target area 12, a desired electrode can be formed on the substrate 10.

[0056] The driving mechanism 30 of the conveying device 20 is driven, for example, in such a manner that the conveying speed of the substrate 10 becomes a predetermined speed according to the location of the supply area 10a of the substrate 10 in the target area 12. The control unit 90 operates the gate driving unit 42 in such a manner that the opening and closing gate 41 is opened by a predetermined width according to the location of the supply area 10a of the substrate 10 in the target area 12. The control unit 90 causes the roller driving unit 53 to rotate the roller 50 at a predetermined rotation speed according to the location of the supply area 10a of the substrate 10 in the target area 12. At this time, the roller driving unit 53 controls the rotation speed of the roller 50 according to the conveying speed of the substrate 10 conveyed by the conveying device 20. At least one of the opening degree of the opening and closing gate 41, the conveying speed of the substrate 10 conveyed by the conveying device 20, and the rotation speed of the roller 50 is controlled according to the conveying position of the substrate 10 measured by the position measuring unit 80. Thus, an electrode is formed in the substrate 10 supplied with the powder 15. Furthermore, in the supply process ( S17 ), the control unit 90 may control the conveyance speed of the substrate 10 by the conveyance device 20 and the rotation speed of the roller 50 based on the conveyance position of the measurement target measured by the position measurement unit 80 .

[0057] Next, as a supply stop process (S19), the storage container 40 and the roller 50 stop supplying the powder 15 from the storage container 40 to the substrate 10. The control unit 90 determines whether the supply area 10a of the substrate 10 is carried out of the target area 12, for example, based on the measurement result of the position measurement unit 80. Then, when it is determined that the supply area 10a of the substrate 10 is carried out of the target area 12, the supply stop process (S19) is executed. The gate drive unit 42 moves the opening and closing gate 41 to a closed position, for example, in a manner that the powder 15 is not supplied from the storage container 40. With respect to the roller 50, for example, in order not to supply the powder 15 from the storage container 40, the roller drive unit 53 stops the rotation of the roller 50.

[0058] Next, as a carry-out process (S21), the transport device 20 carries out the mounting table 21 to the outside of the target area 12. When the carry-out process (S21) is completed, the electrode forming method using the electrode forming system 1 is completed.

[0059] [Example of Controlling the Rotational Speed ​​of Rollers]

[0060] Here, a specific example of the control of the rotation speed of the roller 50 in the above-mentioned electrode forming method will be described. The dimensions, speeds, control timings, etc. of the following respective configurations are merely examples. Figure 4 : is a graph showing an example of the rotation speed of the roller 50 in the electrode forming system according to the embodiment. Figure 4The graph shows the relationship between the position of the substrate 10 and the rotation speed of the roller 50 before and after the supply process (S17). The horizontal axis is the position of the substrate 10 (mm), and the vertical axis is the rotation speed (rpm) of the roller body 51 of the roller 50. The position of the substrate 10 refers to the position of the substrate 10 placed on the mounting table 21 passing through the target area 12 directly below the storage container 40 in the direction along the Y axis. The length of the substrate 10 in the direction along the Y axis is 1200 mm, and a mask member 11 is provided on the substrate 10. The mask member 11 covers an area 75 mm from the front end of the substrate 10 in the direction along the Y axis (an area of ​​0 mm or more but less than 75 mm from the front end), an area of ​​the central part of the substrate 10 in the direction along the Y axis (an area of ​​575 mm or more but less than 625 mm from the front end), and an area 75 mm from the rear end of the substrate 10 in the direction along the Y axis (an area of ​​1125 mm or more but less than 1200 mm from the front end). That is, the substrate 10 has, as the supply region 10a, a first supply region that is 75 mm or more and less than 575 mm from the front end of the substrate, and a second supply region that is 625 mm or more and less than 1125 mm from the front end of the substrate. In this example, the position of the front end of the stage 21 is set to coincide with the position of the front end of the substrate 10 (mask member 11). In addition, in this example, the powder from the supply source is not supplied to the storage container 40. The control unit 90 acquires information related to the above-mentioned substrate 10, mask member 11, powder 15, stage 21, formed electrode, etc. in advance.

[0061] The substrate 10 is transported by the transport device 20 in the transport process (S11). When it is determined in the position determination process (S13) that the substrate 10 has passed the specified position, the position of the rear end (the end in the negative direction of the Y axis) of the target area 12 coincides with the position of the front end (the end in the positive direction of the Y axis) of the mask part 11. After this determination, the lifting process (S15) is performed, and the supply process (S17) is performed. The roller 50 rotates at a low speed while the mask part 11 passes through the target area 12. Although it is not necessary to supply the powder 15 to the mask part 11, in order to supply a specified amount of powder 15 when the first supply area of ​​the substrate 10 enters the rear end of the target area 12, the control unit 90 rotates the roller 50 in advance. For example, when an area greater than 0 mm and less than 70 mm from the front end of the substrate 10 passes through the target area, the control unit 90 rotates the roller 50 at 24 rpm.

[0062] In the first supply area which is 75 mm or more and less than 575 mm from the front end of the substrate 10, a predetermined amount of powder 15 needs to be supplied to the substrate 10, so it is necessary to be in a state where a predetermined amount of powder 15 can be supplied before the position 75 mm from the front end of the substrate 10 passes through the rear end of the target area 12. Therefore, the control unit 90 changes the rotation speed of the roller 50 to a high speed. For example, when the position 70 mm from the front end of the substrate 10 passes through the rear end of the target area 12, the control unit 90 changes the rotation speed of the roller 50 from 24 rpm to 50 rpm.

[0063] Although the area of ​​575 mm or more and less than 625 mm from the front end of the substrate 10 is the area where the mask member 11 covers the substrate 10, it is necessary to suppress the failure to supply the specified amount of powder 15 at the rear end of the first supply area (the area around 575 mm from the front end of the substrate). In addition, the rear end of the first supply area is close to the boundary of the mask member 11, so it is necessary to prevent the formation of bulges of the powder 15 at the boundary. Therefore, the control unit 90 maintains the rotation speed of the roller 50 at 50 rpm until, for example, the area from the front end of the substrate 10 to 575 mm passes the front end of the target area 12. Then, while the area of ​​575 mm or more and less than 620 mm from the front end of the substrate 10 passes the target area 12, the control unit 90 rotates the roller 50 at a low speed and supplies the specified amount of powder 15 toward the mask member 11. Although it is not necessary to supply the powder 15 to the mask member 11, in order to supply the specified amount of powder 15 when the second supply area of ​​the substrate 10 enters the rear end of the target area 12, the control unit 90 continues to rotate the roller 50. For example, when the area at a distance of 575 mm or more and less than 620 mm from the front end of the substrate 10 passes through the target area, the control unit 90 changes the rotation speed of the roller 50 to 10 rpm.

[0064] In the second supply area which is 625 mm or more and less than 1125 mm from the front end of the substrate 10, it is necessary to supply a predetermined amount of powder 15 to the substrate 10, and therefore it is necessary to be in a state where the predetermined amount of powder 15 can be supplied before the position 625 mm from the front end of the substrate 10 passes through the rear end of the target area 12. Therefore, the control unit 90 changes the rotation speed of the roller 50 to a high speed. In addition, when the powder 15 is supplied to the second supply area, the storage amount of the powder in the storage container 40 is less than that in the case of supplying the powder 15 to the first supply area, so in order to supply an appropriate amount of powder 15 from the storage container 40, it is necessary for the roller 50 to scrape out the powder 15 appropriately. For example, when the second supply area passes through the target area 12, the control unit 90 sets the rotation speed of the roller 50 to a high speed compared to the case of passing through the target area 12 in the first supply area. For example, when the position 620 mm from the front end of the substrate passes through the rear end of the target area 12, the control unit 90 changes the rotation speed of the roller 50 from 10 rpm to 56 rpm.

[0065] Although the area 1125 mm to 1200 mm from the front end of the substrate 10 is the area where the mask member 11 covers the substrate 10, it is necessary to prevent the rear end of the second supply area (the area around 1125 mm from the front end of the substrate) from not supplying a predetermined amount of powder 15. Therefore, even when the rear end of the second supply area passes through the target area 12, the control unit 90 maintains the high speed of 56 rpm of the rotation speed of the roller 50 until, for example, the area from the front end of the substrate 10 to 1130 mm passes through the front end of the target area 12. In addition, although it is also necessary to prevent the formation of bulges of powder at the boundary portion between the second supply area and the mask member 11, the amount of powder 15 in the storage container 40 decreases, so even if the high speed is maintained, bulges of powder 15 will not be formed. While the area 1130 mm to 1200 mm from the front end of the substrate 10 passes through the target area 12, the control unit 90 determines that the supply area 10a of the substrate 10 is carried out of the target area 12 as a supply stop process (S19), and stops the rotation of the roller 50. In this way, the control unit 90 can supply an appropriate amount of powder 15 to each position of the substrate 10 by controlling the rotation speed of the roller 50 based on the conveying position of the substrate 10.

[0066] [Summary of Implementation Methods]

[0067] The electrode forming system 1 of the present embodiment supplies powder 15 to a substrate 10 to form an electrode. The electrode forming system 1 includes a conveying device 20, a storage container 40, and a roller 50. The conveying device 20 includes a driving mechanism 30 (an example of a first electric actuator) and a ball screw mechanism 31 capable of continuously converting the rotation of the driving mechanism into a motion along a conveying path, and the conveying device 20 conveys the substrate 10 along the conveying path 3. The storage container 40 stores the powder 15. The roller 50 is operated by a roller driving unit 53 (an example of a second electric actuator), is disposed at the lower end of the storage container 40, and scrapes out the powder in the storage container 40 for a target area 12 on the conveying path 3 through which the substrate 10 can pass.

[0068] In the electrode forming system 1, the substrate 10 to be formed into an electrode is conveyed along the conveying path 3 by the conveying device 20. The powder 15 scraped from the storage container 40 by the roller 50 is supplied to the substrate 10 passing through the target area 12 on the conveying path 3. Here, the conveying device 20 has a ball screw mechanism 31, which can continuously convert the rotation of the driving mechanism 30 into a movement along the conveying path 3. That is, the conveying device 20 can convey the substrate 10 without using a rack and pinion pair that may cause a change in the gap between the tooth surfaces. Therefore, the periodic vibration generated by the conveying device 20 can be suppressed, and the movement along the conveying path 3 can be suppressed from becoming intermittent. As a result, the electrode forming system 1 can suppress the periodic unevenness of the powder 15 supplied to the substrate 10. In addition, by suppressing the generation of periodic unevenness, it is avoided that the desired amount of powder is not supplied according to the location of the substrate, and the electrode is suppressed from having poor molding. In addition, when only a belt conveyor is used as a conveying device for the substrate 10, the deflection amount of the belt varies depending on the distance between the rotating bodies supporting the belt and the weight and position of the substrate placed on the belt. The conveying device 20 of this embodiment can convey the substrate 10 without using a belt conveyor in which the distance or inclination between the storage container 40 and the roller 50 and the substrate 10 may vary.

[0069] In addition, the conveying device 20 is operated by the driving mechanism 30 as an electric actuator, and the roller 50 is operated by the roller driving unit 53 as an electric actuator. In this case, compared with the case where the conveying device 20 and the roller 50 are respectively operated by hydraulic or pneumatic actuators, the movements of the conveying device 20 and the roller 50 can be respectively precisely controlled. In addition, in this case, the thickness of the layer of the powder 15 supplied to the substrate 10 can be made uniform. The uniformity here means that the difference between the maximum height of the layer and the minimum height of the layer is less than 50μm or less than 30μm relative to the thickness of the layer of 0.1mm or more and less than 2.0mm. Thus, in the electrode forming system 1, the substrate 10 is smoothly conveyed along the conveying path 3 by the conveying device 20, and the variation of the amount of the powder 15 supplied to the substrate 10 can be suppressed. In addition, the gate driving unit 42 is an electric actuator. The electrode forming system 1 can appropriately perform intermittent operations such as starting and stopping the supply of the powder 15 from the storage container 40 by opening and closing the gate 41 , the gate driving unit 42 , and the rollers 50 , and can finely adjust the supply amount of the powder 15 .

[0070] In addition, the conveying device 20 includes: a stage 21 on which the substrate 10 is placed; and a guide mechanism 22 extending along the conveying path 3 and capable of guiding the stage 21 along the conveying path 3. In this case, the stage 21 can be prevented from moving in directions other than the direction in which the guide mechanism 22 extends (the direction along the Y axis) (for example, the direction along the X axis and the direction along the Z axis), so that the substrate 10 placed on the stage 21 is stably conveyed along the conveying path 3. Thus, the electrode forming system 1 can prevent the powder 15 supplied to the substrate 10 from being unevenly supplied.

[0071] In addition, the electrode forming system 1 includes: a distance sensor 60 that measures the distance between the substrate 10 and the roller 50; and a support unit 70 that supports the storage container 40 so that it can be raised and lowered just above the target area 12, and the support unit 70 includes a lifting actuator 74 (an example of a third electric actuator) that lifts and lowers the storage container 40 according to the distance measured by the distance sensor 60. The electrode forming system 1 can appropriately adjust the distance between the substrate 10 and the roller 50 by the distance sensor 60 and the lifting actuator 74, so that the thickness of the layer of the powder 15 on the substrate 10 can be made uniform. For example, the length between the upper end of the substrate 10 and the lower end of the roller body 51 becomes the thickness of the layer formed by the powder 15, so the thickness of the layer of the powder 15 can be made uniform by keeping the roller body 51 at a constant distance relative to the substrate 10. As a result, the electrode forming system 1 can further suppress the unevenness of the powder 15 supplied to the substrate 10.

[0072] In addition, the lifting actuator 74 is an electric actuator. In this case, the movement of the lifting actuator 74 can be precisely controlled compared to the case where the lifting actuator 74 is a hydraulic or pneumatic actuator. Therefore, in the electrode forming system 1, the storage container 40 can be positioned with high precision relative to the substrate 10, so that the amount of the powder 15 supplied to the substrate 10 can be suppressed.

[0073] In addition, the electrode forming system 1 further includes a position measuring unit 80, which measures the conveying position of the substrate 10, and the conveying device 20 controls the conveying speed of the substrate 10 according to the conveying position of the substrate 10 measured by the position measuring unit 80. In the electrode forming system 1, the conveying speed of the substrate 10 is controlled, so the amount of the supplied powder 15 can be adjusted according to the location of the substrate 10. For example, if the conveying speed of the substrate 10 becomes faster, the amount of the powder 15 per unit area decreases, and thus the layer of the powder 15 formed on the substrate 10 becomes sparse. On the other hand, for example, if the conveying speed of the substrate 10 becomes slower, the amount of the powder 15 per unit area increases, and thus the layer of the powder 15 formed on the substrate 10 becomes dense. Thus, the electrode forming system 1 can control the density of the powder 15 on the substrate 10.

[0074] In addition, the rotation speed of the roller 50 may be controlled according to the conveying position of the substrate 10 measured by the position measuring unit 80. By controlling the rotation speed of the roller body 51 of the roller 50, the amount of the powder 15 supplied from the storage container 40 to the substrate 10 can be adjusted. In the electrode forming system 1, the amount of the powder 15 supplied from the storage container 40 can be adjusted according to the position of the substrate 10. For example, if the rotation speed of the roller 50 is slowed down, the amount of the powder 15 supplied from the storage container 40 is reduced, and thus the layer of the powder 15 formed on the substrate 10 becomes sparse. On the other hand, for example, if the rotation speed of the roller 50 is increased, the amount of the powder 15 from the storage container 40 is increased, and thus the layer of the powder 15 formed on the substrate 10 becomes dense. Thus, the electrode forming system 1 can control the density of the powder 15 on the substrate 10.

[0075] In addition, the rotation speed of the roller 50 is controlled according to the conveying speed of the substrate 10 conveyed by the conveying device 20. By controlling the rotation speed of the roller 50, the amount of the powder 15 supplied from the storage container 40 to the substrate 10 can be adjusted. The electrode forming system 1 can more precisely control the density of the powder 15 on the substrate 10 by adjusting the amount of the supplied powder 15 according to the conveying speed.

[0076] [Modifications]

[0077] The above embodiment is an example of the electrode forming system of the present disclosure. The electrode forming system of the present disclosure is not limited to the electrode forming system 1 of the embodiment, and the electrode forming system 1 of the embodiment may be modified or applied to other systems without changing the gist of the claims.

[0078] For example, at least one of the conveying device 20 and the roller 50 may not be operated by an electric actuator. In this case, at least one of the conveying device 20 and the roller 50 may be operated by a hydraulic or pneumatic actuator. For example, the conveying device 20 may not have at least one of the mounting table 21 and the guide mechanism 22. In this case, the conveying device 20 may convey the substrate 10 by the drive mechanism 30 and the ball screw mechanism 31.

[0079] For example, the electrode forming system 1 may not include at least one of the distance sensor 60 and the support unit 70. In this case, the electrode forming system 1 may be configured to fix the storage container 40 at a height at which the powder 15 is supplied to the substrate 10 so as not to be able to be raised or lowered. The lifting actuator 74 may not be an electric actuator. In this case, the lifting actuator 74 may be a hydraulic or pneumatic actuator.

[0080] For example, the position measuring unit 80 may not have a light emitting unit and an image sensor. In this case, the driving mechanism 30 may be composed of a servo motor. The driving mechanism 30 may also use the encoder of the servo motor as the position measuring unit 80, and control the position of the measuring object through the output of the encoder. For example, the electrode forming system 1 may not have a position measuring unit 80. In this case, the electrode forming system 1 may also operate each structure such as the conveying device 20, the gate driving unit 42 and the roller 50 according to a predetermined program relative to the substrate 10 conveyed at a predetermined interval. For example, the roller 50 may not control the rotation speed according to the conveying speed of the substrate 10 conveyed by the conveying device 20. In this case, the roller 50 can control the rotation speed independently of the conveying speed of the substrate 10 conveyed by the conveying device 20.

[0081] For example, the conveyor 20 may also include a belt mechanism that can continuously convert the rotation of the drive mechanism 30 into a motion along the conveyor path 3. The conveyor 20 of the electrode forming system 1 includes at least one of the ball screw mechanism 31 and the above-mentioned belt mechanism. That is, the conveyor 20 may also include a belt mechanism instead of the ball screw mechanism 31. In the case where the conveyor 20 includes the belt mechanism, the conveyor 20 further includes: a mounting table 21 that mounts the substrate 10; and a guide mechanism that extends along the conveyor path 3 and can guide the mounting table 21 along the conveyor path 3. The conveyor 20 may not include the mounting table 21. The conveyor 20 includes, for example, a first rotating body that is rotatably fixed to the drive mechanism 30; a belt member that continuously contacts and rotates with the rotating body; and a second rotating body that is provided at a predetermined position of the conveyor path 3 separated from the first rotating body and supports the belt member so that it can rotate. The first rotating body is, for example, cylindrical and rotates in accordance with the drive of the drive mechanism 30. The second rotating body is, for example, cylindrical and rotatable. The belt component is, for example, an endless belt, which is an elastic body. The inner circumference of the belt component contacts the circumference of the first rotating body and the circumference of the second rotating body, and extends along the conveying path 3 between the first rotating body and the second rotating body. The belt component is sent out by the force of the rotation of the first rotating body, for example, through friction. The belt component moves due to the friction, thereby the second rotating body also rotates. The mounting table 21 is, for example, fixed to the belt component. The belt component moves by the drive of the driving mechanism 30, so that the mounting table 21 moves in the direction along the Y axis. The first rotating body may also be, for example, a gear. In this case, the belt component may also have a concave-convex portion that meshes with the first rotating body.

[0082] In an electrode forming system in which the conveying device 20 has a belt mechanism, the substrate 10 forming the electrode is conveyed by the conveying device 20 along the conveying path 3. The powder 15 scraped out from the storage container 40 by the roller 50 is supplied to the substrate 10 passing through the target area 12 on the conveying path 3. The conveying device 20 can convey the substrate 10 by the belt mechanism without using a gear rack pair that may cause the gap between the tooth surfaces to change. Therefore, the periodic vibration of the conveying device 20 in the direction along the Y axis can be suppressed, and the movement in the direction along the conveying path 3 can be suppressed from becoming intermittent movement. Thus, the electrode forming system 1 can suppress the periodic unevenness of the powder 15 supplied to the substrate 10 in the direction along the Y axis. In addition, by suppressing the generation of periodic unevenness, it is possible to avoid not supplying the desired amount of powder according to the location of the substrate, thereby suppressing the generation of poor electrode molding. In addition, since the conveying device 20 has the guide mechanism 22, it is possible to suppress the movement of the stage 21 in directions other than the direction in which the guide mechanism 22 extends (the direction along the Y axis) (for example, the direction along the X axis and the direction along the Z axis), so that the substrate 10 placed on the stage 21 is stably conveyed along the conveying path 3. Thus, the electrode forming system can suppress the occurrence of unevenness in the powder 15 supplied to the substrate 10. Unlike the case where only a belt conveyor is used as the conveying device for the substrate 10 as described above, the deviation in the direction along the X axis and the direction along the Z axis caused by the deflection of the belt is suppressed by the guide mechanism 22. The conveying device 20 having the belt mechanism and the guide mechanism can convey the substrate 10 while suppressing the change in the distance or inclination between the storage container 40 and the roller 50 and the substrate 10.

[0083] For example, some of the processes of the electrode forming method in the above-mentioned embodiment can also be set to be independent of the order. That is, it can be performed in a different order from the order described, or at the same time. For example, before the supply process (S17), in a manner that an appropriate amount of powder 15 is supplied to the supply area 10a when the position measurement unit 80 determines that the supply area 10a of the substrate 10 enters the target area 12, each structure can be pre-operated before the supply process (S17) (before the supply area 10a of the substrate 10 enters the target area 12). For example, the conveying device 20 can adjust the conveying speed of the substrate 10, the gate drive unit 42 can open the opening and closing gate 41 in advance, and the roller drive unit 53 can rotate the roller body 51. In addition, even if the powder 15 is supplied before the supply area 10a of the substrate 10 enters the target area 12, since the powder 15 is supplied to the mask part 11, a coating film will not be formed in the area of ​​the substrate 10 other than the supply area 10a.

[0084] Here, various exemplary embodiments included in the present disclosure are described in the following items 1 to 7.

[0085] [Item 1]

[0086] An electrode forming system supplies powder to a substrate to form an electrode, wherein:

[0087] The electrode forming system comprises:

[0088] A conveying device, the conveying device having a first electric actuator and a ball screw mechanism capable of continuously converting the rotation caused by the first electric actuator into a motion along a conveying path, the conveying device conveying the substrate along the conveying path;

[0089] a storage container for storing the powder; and

[0090] A roller is actuated by a second electric actuator, is disposed at a lower end of the storage container, and scrapes out the powder in the storage container from a target area on the conveying path through which the substrate can pass.

[0091] [Item 2]

[0092] An electrode forming system according to item 1, wherein:

[0093] The above-mentioned conveying device has:

[0094] a mounting table on which the substrate is mounted; and

[0095] The guide mechanism extends along the conveyance path and is capable of guiding the mounting table along the conveyance path.

[0096] [Item 3]

[0097] An electrode forming system supplies powder to a substrate to form an electrode, wherein:

[0098] The electrode forming system comprises:

[0099] A conveying device, the conveying device comprising a first electric actuator, a belt mechanism capable of continuously converting rotation caused by the first electric actuator into motion along a conveying path, a mounting table on which the substrate is mounted, and a guide mechanism extending along the conveying path and capable of guiding the mounting table along the conveying path, wherein the conveying device transports the substrate along the conveying path;

[0100] a storage container for storing the powder; and

[0101] A roller is actuated by a second electric actuator, is disposed at a lower end of the storage container, and scrapes out the powder in the storage container from a target area on the conveying path through which the substrate can pass.

[0102] [Item 4]

[0103] The electrode forming system according to any one of items 1 to 3, comprising:

[0104] a distance sensor that measures the distance between the substrate and the roller; and

[0105] a supporting portion, the supporting portion supporting the storage container directly above the target area so as to be able to rise and fall,

[0106] The support portion includes a third electric actuator configured to move the storage container upward and downward according to the distance measured by the distance sensor.

[0107] [Item 5]

[0108] The electrode forming system according to any one of items 1 to 4, wherein

[0109] further comprising a position measuring unit for measuring a conveying position of the substrate,

[0110] The conveying device controls a conveying speed of the substrate according to a conveying position of the substrate measured by the position measuring unit.

[0111] [Item 6]

[0112] The electrode forming system according to any one of items 1 to 5, wherein

[0113] further comprising a position measuring unit for measuring a conveying position of the substrate,

[0114] The roller controls a rotation speed according to the conveyance position of the substrate measured by the position measuring unit.

[0115] [Item 7]

[0116] The electrode forming system according to any one of items 1 to 6, wherein

[0117] The roller controls a rotation speed according to a conveyance speed of the substrate by the conveyance device.

[0118] Description of Reference Numerals

[0119] 1…electrode forming system; 3…conveying path; 10…substrate; 12…target area; 15…powder; 20…conveying device; 21…carrying table; 22…guiding mechanism; 30…driving mechanism; 31…ball screw mechanism; 40…storage container; 41…opening and closing gate; 42…gate driving unit; 50…roller; 60…distance sensor; 70…support unit; 74…lifting actuator; 80…position measuring unit; 90…control unit.

Claims

1. An electrode forming system, which supplies powder to a substrate to form an electrode, The electrode forming system is characterized by comprising: a conveying device having a first electric actuator and a ball screw mechanism capable of continuously converting rotation caused by the first electric actuator into motion in a direction along a conveying path, the conveying device conveying the substrate along the conveying path; A storage container for storing the powder; as well as A roller is actuated by a second electric actuator, is disposed at a lower end of the storage container, and scrapes out the powder in the storage container from a target area on the conveying path through which the substrate can pass.

2. The electrode forming system according to claim 1, characterized in that: The conveying device comprises: a mounting table on which the substrate is mounted; and A guide mechanism extends along the conveyance path and is capable of guiding the mounting table along the conveyance path.

3. An electrode forming system, which supplies powder to a substrate to form an electrode, The electrode forming system is characterized by comprising: a conveying device having a first electric actuator, a belt mechanism capable of continuously converting rotation caused by the first electric actuator into motion along a conveying path, a stage on which the substrate is placed, and a guide mechanism extending along the conveying path and capable of guiding the stage along the conveying path, the conveying device conveying the substrate along the conveying path; A storage container for storing the powder; as well as A roller is actuated by a second electric actuator, is disposed at a lower end of the storage container, and scrapes out the powder in the storage container from a target area on the conveying path through which the substrate can pass.

4. The electrode forming system according to any one of claims 1 to 3, characterized in that: have: a distance sensor that measures the distance between the substrate and the roller; and a support portion that supports the storage container directly above the target area so as to be able to rise and fall, The support portion includes a third electric actuator configured to move the storage container upward and downward according to the distance measured by the distance sensor.

5. The electrode forming system according to any one of claims 1 to 3, characterized in that: further comprising a position measuring unit for measuring a conveying position of the substrate, The conveying device controls a conveying speed of the substrate according to a conveying position of the substrate measured by the position measuring unit.

6. The electrode forming system according to any one of claims 1 to 3, characterized in that: further comprising a position measuring unit for measuring a conveying position of the substrate, The roller controls a rotation speed according to the conveyance position of the substrate measured by the position measuring unit.

7. The electrode forming system according to any one of claims 1 to 3, characterized in that: The roller controls a rotation speed according to a conveying speed of the substrate conveyed by the conveying device.

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