A torque tool capable of regulating the installation of a side nozzle and an installation method thereof

Abstract

The present invention discloses a torque tool capable of standardizing the installation of side nozzles, comprising: a torque screwdriver body and a screwdriver blade connected to the torque screwdriver body; the screwdriver blade comprises a claw head with a multi-claw self-centering structure, and the claw head is provided with a clamp for clamping the side nozzle. The torque tool capable of standardizing the installation of side nozzles has a simple structure and can realize standardized assembly between the side nozzle and the air ring. The present invention also discloses an assembly method using the above-mentioned torque tool capable of standardizing the installation of side nozzles, which uses standard tools to improve the uniformity of the installation angle of the side nozzles, and can avoid the problem of air leakage in some side nozzles affecting the quality of thin film deposition.

Description

Technical Field

[0001] The present invention relates to the technical field of thin film deposition equipment, and in particular to a torsion tool capable of regulating the installation of a side nozzle and an installation method thereof. Background Art

[0002] During the process adjustment of the HDP-CVD (high-density plasma chemical vapor deposition) process at the customer's machine startup, it is often necessary to manually adjust the si de nozzle aperture size to control the local reaction gas flow rate to meet the film thickness uniformity specification requirements.

[0003] In the prior art, the side nozzles are usually installed and adjusted manually by engineers, and the tightening degree between the side nozzles and the gas ring cannot be standardized, resulting in differences in process effects. At the same time, the engineers manually adjust the installation angles between the side nozzles and the gas rings, and when the chamber temperature rises and falls several times, the side nozzles will become loose to varying degrees, resulting in local air leakage, and ultimately causing changes in the film thickness at the corresponding points on the wafer. Summary of the invention

[0004] The purpose of the present invention is to overcome the shortcomings of the prior art and provide a torque tooling and installation method thereof that can standardize the installation of side nozzles, so as to solve the technical problem that the thickness of wafer thin film deposition is uneven due to differences in the existing manual installation and adjustment of side nozzles.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] In a first aspect, an embodiment of the present invention provides a torque tooling capable of regulating the installation of a side nozzle, comprising: a torque screwdriver body and a screwdriver blade connected to the torque screwdriver body;

[0007] The screwdriver blade comprises a claw head with a multi-claw self-centering structure, and a clamping opening for clamping the side nozzle is provided on the claw head.

[0008] Wherein, the claw head includes: a connecting plate, at least three clamping arms vertically extending from the outer plate surface of the connecting plate, the clamping arms together enclose the clamping opening, and the inner plate surface of the connecting plate is connected to the torque screwdriver body.

[0009] Wherein, the inner side surface of the clamp arm is also provided with an anti-slip structure.

[0010] Wherein, the anti-slip structure is a raised thread.

[0011] Wherein, a locking piece is also provided on the outer side of the clamping arm, and the locking piece is used to adjust the clamping force of the nozzle on the opposite side of the clamping opening.

[0012] Wherein, the locking member includes: a clamp and a screw threaded on the clamp, and the clamp surrounds the outer side surface of the clamp arm.

[0013] Wherein, the clamping arm is made of rubber material.

[0014] Wherein, the difference between the inner diameter of the clamp and the outer diameter of the side nozzle is less than 3 mm.

[0015] There are three clamping arms, and the three clamping arms are distributed in a ring with equal central angles.

[0016] In a second aspect, an embodiment of the present invention provides a method for installing a side nozzle and an air ring, the method being performed by a torque tooling capable of regulating the installation of a side nozzle as described in any one of the above, and comprising the following steps:

[0017] The torque preset value of the torque screwdriver body is set according to the side nozzle and the gas ring assembly specification requirements assembled with the side nozzle;

[0018] Insert the side nozzle into the connecting hole on the gas ring;

[0019] The side nozzle is clamped by a torque tooling that can standardize the installation of the side nozzle, and the rotation is continued until the torque screwdriver reaches the preset torque value, and the assembly of the side nozzle and the gas ring is completed.

[0020] The torque tooling and installation method thereof for standardizing the installation of the side nozzle of the present invention adopt a tooling tool with a simple structure to achieve standardized assembly between the side nozzle and the air ring, so as to avoid the problem of uneven wafer film deposition thickness caused by differences in manual methods.

[0021] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the following preferred embodiments are specifically cited and described in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the side nozzle structure assembled with a torque tooling that can standardize the installation of the side nozzle according to an embodiment of the present invention.

[0023] Figure 2 This is a schematic structural diagram of a first implementation of a torsion tooling capable of standardizing the installation of a side nozzle according to an embodiment of the present invention.

[0024] Figure 3 for Figure 2 The enlarged structural schematic diagram of local A is shown.

[0025] Figure 4It is a structural schematic diagram of a second embodiment of a torsion tooling capable of standardizing the installation of a side nozzle according to an embodiment of the present invention.

[0026] Figure 5 for Figure 4 The enlarged structural schematic diagram of local B is shown.

[0027] Figure 6 Schematic diagram of the connection state of the second implementation structure of the torsion tooling capable of standardizing the installation of the side nozzle and the side nozzle according to an embodiment of the present invention.

[0028] Figure 7 for Figure 6 Schematic diagram of the local C enlarged structure shown.

[0029] Description of reference numerals:

[0030] The torque tool assembly 100 for standardizing the installation of the side nozzle, the side nozzle 200, the torque screwdriver body 11, the handle 111, the torque component 112, the screwdriver rod 113, the screwdriver blade 12, the connecting plate 121, the clamping arm 122, the clamping mouth 123, and the anti-slip structure 1221; the torque tool assembly 300 for standardizing the installation of the side nozzle, the torque screwdriver body 31, the handle 311, the torque component 312, the screwdriver rod 313, the screwdriver blade 32, the connecting plate 321, the clamping arm 322, the clamping mouth 320, the locking piece 33, the clamp 331, the screw 332, and the nut 333. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0033] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships described in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0034] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0035] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral molding; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0036] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0037] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0038] During the process adjustment of the HDP-CVD (high-density plasma chemical vapor deposition) process at the customer's machine startup, it is often necessary to manually adjust the si de nozzle aperture size to control the local reaction gas flow rate to meet the film thickness uniformity specification requirements.

[0039] In the prior art, the installation of the side nozzle is usually manually installed and adjusted by engineers, and the tightening degree between the side nozzle and the gas ring cannot be standardized, resulting in differences in process effects. At the same time, the engineers manually adjust, and there are differences in the installation angle between the side nozzle and the gas ring. After the chamber temperature has gone up and down several times, the side nozzle will become loose to varying degrees, resulting in local air leakage, and ultimately causing changes in the film thickness at the corresponding point of the wafer. In order to solve the above problems, this embodiment discloses a torque tool 200 (300) that can standardize the installation of the side nozzle.

[0040] See also Figures 1 to 3 In the first embodiment, a torque fixture 100 capable of regulating the installation of a side nozzle is disclosed in the embodiment. The torque fixture 100 capable of regulating the installation of a side nozzle is used to Figure 1 The side nozzle 200 is assembled to a gas ring, which is a process gas output ring in a process chamber of a thin film deposition process equipment. The torque tool 100 that can standardize the installation of the side nozzle includes: a torque screwdriver body 11 and a screwdriver blade 12 connected to the torque screwdriver body 11;

[0041] The screwdriver blade 12 comprises a claw head with a multi-claw self-centering structure, and a clamping opening 123 for clamping the side nozzle is provided on the claw head.

[0042] The main body of the torque screwdriver 11 is an existing conventional torque screwdriver (also called a torque screw or a torque screwdriver, or a torque wrench, etc.). The principle of the torque screwdriver is that the torque value can be preset. When the fastener being screwed reaches the preset torque value, the internal clutch of the torque screwdriver automatically disengages and makes a clicking sound. This action can be felt by hand, and at this time, the force can be continued to operate without exceeding the preset limit.

[0043] How to use the preset torque screwdriver:

[0044] 1. Set the required torque: The required torque can be set by the scale on the shaft cylinder. Align the zero scale of the secondary scale ring with the center line of the cylinder, and then rotate the shaft cylinder clockwise to increase the reading. When the required torque value is reached, stop.

[0045] 2. Correct use of preset torque screwdrivers: After being set, preset torque screwdrivers can be connected to various fasteners through adapters and twisted clockwise to measure the tightening torque. Twist clockwise to measure the tightening torque. When the set value is reached, a "click, click, click..." sound will be emitted. Once the preset torque screwdriver is set, it can be used repeatedly at the same set value until another torque value needs to be set.

[0046] Please refer again Figure 2and Figure 3 The claw head includes: a connecting plate 121, at least three clamping arms 122 vertically extending from the outer plate surface of the connecting plate 121, the clamping arms 122 together enclose the clamping opening 123, and the inner plate surface of the connecting plate 121 is connected to the torque screwdriver body 11.

[0047] It is understandable that the screwdriver blade 12 and the torque screwdriver body 11 may be detachably connected or may be an integrated structure. The torque screwdriver body 11 includes a handle 111, a torque component 112 connected to the handle 111, and a screwdriver rod 113 connected to the torque component 112. The inner side surface of the connecting plate 121 is connected to the end of the screwdriver rod 113. The connecting plate 121 and the screwdriver rod 113 may be an integrated structure or a detachable connection structure.

[0048] The inner side surface of the clamp arm 122 is further provided with an anti-slip structure 1221 .

[0049] In this embodiment, the anti-skid structure 1221 is a raised thread. In other embodiments, the anti-skid structure 1221 can also be any other anti-skid structure with a large friction force that can prevent the side nozzle 200 and the claw head from sliding relative to each other within a preset torque range.

[0050] In this embodiment, the clamp arm 122 is made of rubber. Specifically, the clamp arm 122 is made of an intersecting material with good mechanical properties, such as nitrile rubber. The clamp arm 122 made of rubber can avoid the contact between the tooling and the side nozzle to produce particles, which affects the cleanliness of the process chamber. At the same time, the clamp arm 122 made of rubber can avoid damage to the side nozzle caused by rigid contact with the side nozzle 200.

[0051] It is understandable that the claw head can also be other structures, and its main function is to achieve automatic centering of the side nozzle 200 and to clamp the outer wall of the side nozzle 200 to make it rotate synchronously. Its specific structure includes but is not limited to the combined structure of the clamping arm 122 and the connecting plate 121 of this embodiment.

[0052] The difference between the inner diameter of the clamping opening 123 and the outer diameter of the side nozzle 200 is less than 3 mm. Specifically, the inner diameter of the clamping opening 123 is greater than the outer diameter of the main body of the side nozzle 200, and the difference between the two diameters is less than 3 mm.

[0053] In this embodiment, there are three clamp arms 122, and the three clamp arms 122 are arranged in a circular shape with equal central angles. In other embodiments, a plurality of clamp arms 122 are also arranged in a circular shape with equal central angles and equal spacing, so as to maintain the automatic centering of the side nozzle 200 and uniform clamping force.

[0054] See also Figures 4 to 7 In the second embodiment, the torque fixture 300 that can regulate the side nozzle installation is used to Figure 1 The side nozzle 200 is assembled to the gas ring, which is a process gas output ring in the process chamber of the thin film deposition process equipment. The torque tool 300 that can standardize the installation of the side nozzle includes: a torque screwdriver body 31 and a screwdriver blade 32 connected to the torque screwdriver body 31;

[0055] The screwdriver blade 32 includes a claw head with a multi-claw self-centering structure, and a clamp 320 for clamping the side nozzle is provided on the claw head.

[0056] The main body of the torque screwdriver 31 is an existing conventional torque screwdriver (also called a torque screw or a torque screwdriver, or a torque wrench, etc.). The principle of the torque screwdriver is that the torque value can be preset. When the fastener being screwed reaches the preset torque value, the internal clutch of the torque screwdriver automatically disengages and makes a clicking sound. This action can be felt by hand, and at this time, the force can be continued to operate without exceeding the preset limit.

[0057] Please refer again Figure 4 and Figure 5 The claw head includes: a connecting plate 321, at least three clamping arms 322 vertically extending from the outer plate surface of the connecting plate 321, the clamping arms 322 together enclose the clamping opening 320, and the inner plate surface of the connecting plate 321 is connected to the torque screwdriver body 31.

[0058] It is understandable that the screwdriver blade 32 and the torque screwdriver body 31 may be detachably connected or may be an integrated structure. The torque screwdriver body 31 includes a handle 311, a torque component 312 connected to the handle 311, and a screwdriver rod 313 connected to the torque component 312. The inner side surface of the connecting plate 321 is connected to the end of the screwdriver rod 313. The connecting plate 321 and the screwdriver rod 313 may be an integrated structure or a detachable connection structure.

[0059] A locking member 33 is further disposed on the outer side of the clamping arm 322 , and the locking member 33 is used to adjust the clamping force of the clamping opening 320 on the side nozzle 200 .

[0060] Specifically, the locking member 33 includes: a clamp 331 and a screw 332 screwed to the clamp 331, a nut 333 is connected to the screw 332, and the clamp 331 embraces the outer side of the clamp arm 322. By adjusting the tightness of the screw 332, the clamping force of the clamp 331 on the clamp arm 322 can be adjusted synchronously, thereby changing the clamping force between the clamp 320 and the side nozzle 200.

[0061] In this embodiment, the clamp arm 322 is made of rubber. Specifically, the clamp arm 322 is made of an intersecting material with good mechanical properties, such as nitrile rubber. The clamp arm 322 made of rubber can avoid particles generated by contact between the tooling and the side nozzle, which affects the cleanliness of the process chamber. At the same time, the clamp arm 322 made of rubber can avoid damage to the side nozzle caused by rigid contact with the side nozzle 200.

[0062] It is understandable that the claw head can also be other structures, and its main function is to achieve automatic centering of the side nozzle 200 and to clamp the outer wall of the side nozzle 200 to make it rotate synchronously. Its specific structure includes but is not limited to the combined structure of the clamping arm 322 and the connecting plate 321 of the present embodiment.

[0063] The difference between the inner diameter of the clamping opening 320 and the outer diameter of the side nozzle 200 is less than 3 mm. Specifically, the inner diameter of the clamping opening 320 is greater than the outer diameter of the main body of the side nozzle 200, and the difference between the two diameters is less than 3 mm.

[0064] In this embodiment, there are three clamp arms 322, and the three clamp arms 322 are arranged in a circular shape with equal central angles. In other embodiments, a plurality of clamp arms 322 are also arranged in a circular shape with equal central angles and equal spacing, so as to maintain the automatic centering of the side nozzle 200 and a uniform clamping force.

[0065] This embodiment also provides a method for installing a side nozzle and an air ring. The method is performed by the torque tool 100 or 300 capable of regulating the installation of the side nozzle as described in any one of the above, and includes the following steps:

[0066] The first step is to set a preset torque value of the torque screwdriver body 11 (31) according to the side nozzle 200 and the gas ring assembly specification requirements assembled with the side nozzle;

[0067] The second step is to insert the side nozzle 200 into the connecting hole on the air ring. The front end of the side nozzle 200 is provided with an external thread 21, and the external thread 21 can be screwed with the inner wall thread of the connecting hole of the air ring. Specifically, this step can be carried out manually by inserting the side nozzle 200 into the connecting hole on the air ring to preliminarily assemble the side nozzle 200 and the air ring. Of course, this step can also be completed by automated equipment, such as a robot.

[0068] Step 3: Use the torque tool 100 (or 300) that can standardize the installation of the side nozzle to clamp the side nozzle 200, and continue to rotate until the torque screwdriver reaches the preset torque value, and then the side nozzle 200 and the air ring are assembled. If the claw head structure of the second embodiment is used, it is necessary to synchronously adjust the locking force of the locking member 33 so that there is no relative sliding between the claw head and the side nozzle 200.

[0069] The torque tooling and installation method of the standard side nozzle installation of the present embodiment adopts a front-stage pipeline cleaning module to provide cleaning processes for process modules of at least two groups of machines simultaneously or in steps, which not only improves the utilization rate of the front-stage pipeline cleaning module, but also has a simple structure, reduces the space occupied by the equipment, facilitates machine maintenance, and reduces the manufacturing cost of the device.

[0070] The above examples are only used to further illustrate the technical content of the present invention, so that readers can understand it more easily, but they do not mean that the implementation of the present invention is limited to this. Any technical extension or re-creation made according to the present invention is protected by the present invention. The protection scope of the present invention shall be subject to the claims.

Claims

1. A torque tooling for standardizing the installation of side nozzles, characterized in that: include: A torque screwdriver body and a screwdriver blade connected to the torque screwdriver body; The screwdriver blade comprises a claw head with a multi-claw self-centering structure, and a clamping opening for clamping the side nozzle is provided on the claw head.

2. The torsion tooling capable of regulating the installation of the side nozzle according to claim 1 is characterized in that: The claw head comprises: a connecting plate, at least three clamping arms vertically extending from the outer plate surface of the connecting plate, the clamping arms together enclose the clamping opening, and the inner plate surface of the connecting plate is connected to the torque screwdriver body.

3. The torsion tooling capable of regulating the installation of the side nozzle according to claim 2 is characterized in that: The inner side surface of the clamp arm is also provided with an anti-slip structure.

4. The torsion tooling capable of regulating the installation of the side nozzle according to claim 3 is characterized in that: The anti-slip structure is a raised thread.

5. The torsion tooling capable of regulating the installation of the side nozzle according to claim 2 is characterized in that: A locking piece is also provided on the outer side of the clamping arm, and the locking piece is used to adjust the clamping force of the nozzle on the opposite side of the clamping opening.

6. The torsion tooling capable of regulating the installation of the side nozzle according to claim 5 is characterized in that: The locking member comprises a clamp and a screw threadedly connected to the clamp, and the clamp surrounds the outer side surface of the clamp arm.

7. The torsion tooling capable of regulating the installation of the side nozzle according to any one of claims 2 to 6, characterized in that: The clamping arm is made of rubber.

8. The torsion tooling capable of regulating the installation of the side nozzle according to claim 7 is characterized in that: The difference between the inner diameter of the clamp and the outer diameter of the side nozzle is less than 3 mm.

9. The torsion tooling capable of regulating the installation of the side nozzle according to claim 8, characterized in that: The number of the clamping arms is three, and the three clamping arms are distributed in a ring with equal central angles.

10. A method for installing a side nozzle and an air ring, the method being performed by a torsion tool capable of regulating the installation of a side nozzle as claimed in any one of claims 1 to 9, characterized in that: The following steps are involved: The torque preset value of the torque screwdriver body is set according to the side nozzle and the gas ring assembly specification requirements assembled with the side nozzle; Insert the side nozzle into the connecting hole on the gas ring; The side nozzle is clamped by a torque tooling that can standardize the installation of the side nozzle, and the rotation is continued until the torque screwdriver reaches the preset torque value, and the assembly of the side nozzle and the gas ring is completed.

Images