Non-contact differential type capacitor angle measurement zero position calibration and precision measurement device

Abstract

The embodiment of the invention provides a non-contact differential type capacitor angle measurement zero position calibration and precision measurement device. The device belongs to a non-contact angular displacement sensor precision measuring device. Through the high-precision electric encoder, low-precision differential capacitor angle measurement zero position calibration and precision detection can be realized. The device is simple in use method and reliable in structure, is controlled by the direct drive motor, can simultaneously realize three-axis high-precision angle output at any position of a working angle, does not need to replace shafting parts, can realize angle measurement precision detection of non-contact differential capacitors of different specifications by replacing and installing an angle measurement fixing plate, and has relatively high universality.

Description

Technical Field

[0001] The present application relates to the technical field of angle measurement, and in particular to a non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device. Background Art

[0002] Differential capacitance angle measurement is an angle measurement device. Different from the single angle measurement encoder used in traditional sleeve shafts, differential capacitance angle measurement is installed and used in pairs. Through the solution of the signal processing board, three-axis angle measurement can be achieved. This angle measurement does not occupy the volume of the shaft system in terms of structural installation, and has the advantages of simple structure, high reliability, small moment of inertia, and good linearity of angle output. It has a good application prospect in the angle measurement of optoelectronic stable platforms. However, the accuracy of differential capacitance angle measurement is greatly affected by the processing and installation process. In the angle measurement processing stage, it is especially affected by the characteristics of the metal coating material on the angle measurement surface and the partition etching process. In the actual installation operation, it is greatly affected by the operator's skills. Even in the same batch of production, it is difficult to ensure consistent accuracy. At present, each pair of differential capacitance angle measurement needs to be zero-calibrated and accuracy tested before formal equipment application.

[0003] Differential capacitive angle measurement is a non-contact angle measurement and is greatly affected by installation accuracy. It has lower accuracy than traditional photoelectric encoders. Summary of the invention

[0004] The purpose of the present invention is to use a high-precision capacitive encoder to detect the accuracy of differential displacement angle measurement, and to realize three-axis angle measurement and calibration at the same time. The device has a high degree of automation and can realize zero-position calibration and accuracy detection of differential displacement angle measurements of different specifications by changing some structures.

[0005] An embodiment of the present invention provides a non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device, the device comprising:

[0006] A base 1, comprising a bottom plate for being placed on a horizontal plane and two side plates perpendicular to the bottom plate and respectively arranged at two ends of the bottom plate;

[0007] Three sets of axis systems are arranged on the base, and the three sets of axis systems include a pitch axis system group 5, a roll axis system group 4 and an azimuth axis system group 6 which are nested in sequence, and each set of axis systems includes a corresponding motor and an electric encoder for controlling the motion angle and angle output of the corresponding axis system;

[0008] Two fixed pole fixing plates 10 are correspondingly arranged at two right angles formed by the two side plates of the base and the bottom plate;

[0009] The moving pole mounting arm 11 has a top end fixedly connected to the three sets of shaft systems, and two arms at the bottom end extend respectively to the two fixed pole fixing plates 10 and are provided with two moving pole fixing plates 3 corresponding to the two angle measuring fixed pole fixing plates 10. The three sets of shaft systems can drive the moving pole fixing plates 3 to move relative to the fixed pole fixing plates 10 through the moving pole mounting arm 11;

[0010] The angle measurement fixed electrode 201 of the differential capacitive angle measurement 2 can be fixedly connected to the fixed electrode fixing plate 10 , and the angle measurement moving electrode 202 can be fixedly connected to the moving electrode fixing plate 3 .

[0011] In some embodiments, the device further comprises a pitch ring frame 8, wherein the pitch ring frame 8 is arranged on the inner side of the top end of the two side plates;

[0012] The pitch axis system group 5 is disposed between the top ends of the two side plates and the pitch ring frame 8 and can rotate in the pitch axis direction, thereby driving the moving pole mounting arm 11 to rotate in the pitch axis direction.

[0013] In some embodiments, the device further comprises an azimuth seat 9, wherein the azimuth seat 9 is arranged on the inner side of the middle of the pitch ring frame 8 perpendicular to the extension direction of the base;

[0014] The roll axis system assembly 4 is disposed between the pitch ring frame 8 and the azimuth seat 9 and can rotate in the roll axis direction, thereby driving the moving pole mounting arm 11 to rotate in the roll axis direction.

[0015] In some embodiments, the device further comprises an azimuth axis 13, wherein the azimuth axis 13 is perpendicular to the pitch ring 8 and the azimuth seat 9;

[0016] The azimuth axis system group 6 is arranged between the azimuth seat 9 and the azimuth axis 13, and can rotate in the azimuth axis, thereby driving the moving pole mounting arm 11 to rotate in the position axis.

[0017] In some embodiments, the top end of the moving pole mounting arm 11 is fixedly connected to the azimuth axis 13 .

[0018] In some embodiments, the pitch axis system group 5 includes a pitch motor 501 and a pitch electric encoder 502, and the pitch motor 501 and the pitch electric encoder 502 are arranged between the top ends of the two side panels and the pitch ring frame 8. The movement angle of the pitch motor 501 is controlled by a pitch motor driver 503 installed on the pitch ring frame 8, and the pitch angle of the pitch motor 501 at this time can be output.

[0019] In some embodiments, the roll axis system group 4 includes a roll motor 401 and a roll electric encoder 402, and the roll motor 401 and the roll electric encoder 402 are arranged between the pitch ring frame 8 and the azimuth seat 9. The movement angle of the roll motor 401 is controlled by a roll motor driver 403 installed on the pitch ring frame 8, and the roll angle of the roll motor 401 at this time can be output.

[0020] In some embodiments, the azimuth axis system group 6 includes an azimuth motor 601 and an azimuth electric encoder 602, and the azimuth motor 601 and the azimuth electric encoder 602 are arranged between the azimuth seat 9 and the azimuth axis 13. The movement angle of the azimuth motor 601 is controlled by an azimuth motor driver 603 installed on the pitch ring frame 8, and the azimuth angle of the azimuth motor 601 at this time can be output at the same time.

[0021] In some embodiments, the angle measuring and polarizing device 201 can be fixedly connected to the polarizing fixing plate 10, including:

[0022] The angle measuring and polarizing plate 201 is positioned by means of the cylindrical pin 7 and the polarizing fixing plate 10 .

[0023] In some embodiments, the two fixed-pole fixing plates 10 are correspondingly arranged at two right angles formed by the two side plates of the base and the bottom plate, including: the fixed-pole fixing plates 10 are arranged at an angle of 45° relative to the two side plates of the base and the bottom plate;

[0024] The two arms at the bottom ends of the moving pole mounting arms 11 are perpendicular to each other.

[0025] The present invention starts from detecting the accuracy of differential capacitance angle measurement, uses a high-precision capacitive encoder installed on three axes to perform zero-position calibration and accuracy detection on differential capacitance angle measurement, and realizes the accuracy measurement and calibration of differential capacitance angle measurement. In actual operation, the device can quickly realize zero-position calibration and accuracy measurement of angle measurement of different specifications by replacing parts.

[0026] The above embodiment of the present invention is a non-contact differential capacitance angle measurement zero position calibration and precision measurement device, which belongs to the non-contact angular displacement sensor precision measurement device. The low-precision differential capacitance angle measurement zero position calibration and precision detection can be achieved through a high-precision electric encoder. The device is simple to use and has a reliable structure. Through direct drive motor control, three-axis high-precision angle output can be achieved at any position of the working angle. Without replacing the shaft system parts, the non-contact differential capacitance angle measurement precision detection of different specifications can be achieved by replacing and installing the angle measurement fixing plate, and it has strong versatility. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The drawings illustrate generally, by way of example and not limitation, various embodiments discussed herein.

[0028] Figure 1 This is a schematic structural diagram of a differential capacitance angle measurement zero position calibration and accuracy measurement device according to an embodiment of the present invention;

[0029] Figure 2 This is a schematic diagram of the installation of a differential capacitor angle measurement and polarization determination according to an embodiment of the present invention;

[0030] Figure 3 It is a schematic diagram of a forward cross-section of a differential capacitance angle measurement zero position calibration and accuracy measurement device according to an embodiment of the present invention;

[0031] Figure 4 It is a schematic cross-sectional view of a device for zero-position calibration and precision measurement of differential capacitance angle measurement according to an embodiment of the present invention;

[0032] Figure 5 It is a schematic vertical cross-sectional view of a differential capacitive angle measurement zero position calibration and accuracy measurement device according to an embodiment of the present invention.

[0033] Explanation of symbols:

[0034] 1-base; 2-differential capacitor angle measurement; 3-moving pole fixing plate; 4-roll axis group; 5-pitch axis group; 6-azimuth axis group; 7-locating pin; 8-pitch ring frame; 9-azimuth seat; 10-fixed pole fixing plate; 11-moving pole mounting arm; 13-azimuth axis; 201-angle measurement fixed pole; 202-angle measurement moving pole; 401-roll motor; 402-roll electric encoder; 403-roll motor driver; 501-pitch motor; 502-pitch electric encoder; 503-pitch motor driver; 601-azimuth motor; 602-azimuth electric encoder; 603-azimuth motor driver. DETAILED DESCRIPTION

[0035] In order to enable a more detailed understanding of the features and technical contents of the embodiments of the present application, the implementation of the embodiments of the present application is described in detail below in conjunction with the accompanying drawings. The attached drawings are for reference only and are not used to limit the embodiments of the present application.

[0036] In the embodiments of the present application, it should be noted that, unless otherwise specified and limited, the term "connection" should be understood in a broad sense. For example, it can be an electrical connection or a connection between two components. It can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to the specific circumstances.

[0037] It should be noted that the terms "first\second\third" involved in the embodiments of the present application are only used to distinguish similar objects, and do not represent a specific order for the objects. It is understandable that the specific order or sequence of "first\second\third" can be interchanged where permitted. It should be understood that the objects distinguished by "first\second\third" can be interchanged where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0038] The following is combined with Figures 1 to 5 The embodiments of the present invention are described in detail.

[0039] The embodiment of the present invention provides a non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device, such as Figures 1 to 5 As shown, the device comprises:

[0040] The base 1 comprises a bottom plate for being placed on a horizontal plane and two side plates which are perpendicular to the bottom plate and respectively arranged at two ends of the bottom plate.

[0041] Three sets of axis systems are arranged on the base, and the three sets of axis systems include a pitch axis system group 5, a roll axis system group 4 and an azimuth axis system group 6 which are nested in sequence. Each set of axis systems includes a corresponding motor and an electric encoder for controlling the motion angle and angle output of the corresponding axis system. The three axis system rotation axes are orthogonal to each other and nested with each other to realize three-axis rotational freedom.

[0042] The two fixed pole fixing plates 10 are correspondingly arranged at two right angles formed by the two side plates of the base and the bottom plate.

[0043] like Figure 3 As shown, the moving pole mounting arm 11 has three sets of shaft systems fixedly connected to the top end, and two arms at the bottom end extend respectively to the two fixed pole fixing plates 10 and are provided with two moving pole fixing plates 3 corresponding to the two angle measuring fixed pole fixing plates 10. The three sets of shaft systems can drive the moving pole fixing plates 3 to move relative to the fixed pole fixing plates 10 through the moving pole mounting arm 11.

[0044] like Figure 2 , Figure 3 and Figure 5 As shown, the angle measurement fixed electrode 201 of the differential capacitive angle measurement 2 can be fixedly connected to the fixed electrode fixing plate 10, and the angle measurement moving electrode 202 can be fixedly connected to the moving electrode fixing plate 3.

[0045] In some embodiments, Figure 1 As shown, the above device also includes a pitch ring frame 8, and the pitch ring frame 8 is arranged on the inner side of the top end portion of the two side plates.

[0046] The pitch axis system group 5 is arranged between the top ends of the two side plates and the pitch ring frame 8, and can rotate in the pitch axis direction, thereby driving the moving pole mounting arm 11 to rotate in the pitch axis direction.

[0047] In some embodiments, Figure 4 As shown, the above device also includes an azimuth seat 9, which is arranged on the inner side of the middle of the pitch ring frame 8 perpendicular to the extension direction of the base.

[0048] The roll axis system assembly 4 is disposed between the pitch ring frame 8 and the azimuth seat 9, and can rotate in the roll axis direction, thereby driving the moving pole mounting arm 11 to rotate in the roll axis direction.

[0049] In some embodiments, Figure 4 As shown, the above device also includes an azimuth axis 13, which is perpendicular to the pitch ring frame 8 and the azimuth seat 9.

[0050] The azimuth axis system group 6 is arranged between the azimuth seat 9 and the azimuth axis 13, and can rotate in the azimuth axis direction, thereby driving the moving pole mounting arm 11 to rotate in the position axis direction.

[0051] In some embodiments, Figure 4 As shown, the top end of the moving pole mounting arm 11 is fixedly connected to the azimuth axis 13 .

[0052] In some embodiments, Figure 3 and Figure 5 As shown, the pitch axis system group 5 includes a pitch motor 501 and a pitch electric encoder 502. The pitch motor 501 and the pitch electric encoder 502 are arranged between the top ends of the two side plates and the pitch ring frame 8. The movement angle of the pitch motor 501 is controlled by a pitch motor driver 503 installed on the pitch ring frame 8, and the pitch angle of the pitch motor 501 at this time can be output.

[0053] In some embodiments, Figure 4 and Figure 5 As shown, the roll axis system 4 includes a roll motor 401 and a roll electric encoder 402. The roll motor 401 and the roll electric encoder 402 are arranged between the pitch ring frame 8 and the azimuth seat 9. The movement angle of the roll motor 401 is controlled by a roll motor driver 403 installed on the pitch ring frame 8, and the roll angle of the roll motor 401 at this time can be output.

[0054] In some embodiments, Figure 4 and Figure 5 As shown, the azimuth axis system group 6 includes an azimuth motor 601 and an azimuth electric encoder 602. The azimuth motor 601 and the azimuth electric encoder 602 are arranged between the azimuth seat 9 and the azimuth axis 13. The movement angle of the azimuth motor 601 is controlled by an azimuth motor driver 603 installed on the pitch ring frame 8, and the azimuth angle of the azimuth motor 601 at this time can be output.

[0055] In some embodiments, Figure 2 and Figure 3As shown, the angle measuring and polarizing plate 201 can be fixedly connected to the polarizing plate 10, and includes:

[0056] The angle measuring and polarizing device 201 is positioned by means of the cylindrical pin 7 and the polarizing fixing plate 10 .

[0057] In some embodiments, Figure 1 and Figure 3 As shown, the two fixed pole fixing plates 10 are correspondingly arranged at two right angles formed by the two side plates and the bottom plate of the base, including: the fixed pole fixing plates 10 are arranged at an angle of 45° relative to the two side plates and the bottom plate of the base.

[0058] The two arms at the bottom ends of the moving pole mounting arm 11 are perpendicular to each other.

[0059] In some embodiments, the rotation axis of the fixed pole mounting surface on the fixed pole fixing plate 10 is 45° to the bottom plate and the side plate. The mounting arm 11 is a V-shaped part. The V-shaped angle is a fixed angle, which is consistent with the installation angle of the capacitive angle measurement in the system. For ease of solution and installation, 90° is preferred. By connecting the bearing to the azimuth axis system, the rotational freedom can be achieved in the azimuth direction. The three axis systems are nested and installed, so that the moving pole mounting arm and the fixed pole mounting plate can achieve orthogonal three-axis rotational freedom.

[0060] The embodiment of the present invention provides a non-contact differential capacitance angle measurement zero position calibration and accuracy measurement method based on the above device, the method comprising the following steps:

[0061] Step 1: The three angle encoders, roll electric encoder 402, pitch electric encoder 502, and azimuth electric encoder 602, find the position where the three axis systems rotate 0°. At the same time, two pairs of capacitor angle measurement positions are recorded and calibrated as the zero position of capacitor angle measurement.

[0062] Step 2: The roll motor driver 403, the pitch motor driver 503, and the azimuth motor driver 603 drive the roll motor 401, the pitch motor 501, and the azimuth motor 601 respectively, and the three-axis coupling rotation of the capacitor angle measuring moving pole is realized, thereby realizing relative rotational motion with the fixed pole, and the fixed pole partition capacitance value changes. It can be solved into the capacitor angle measurement angle measurement value.

[0063] Step 3, by simultaneously recording the three-axis angle values ​​of the roll electric encoder 402, the pitch electric encoder 502, and the azimuth electric encoder 602 within the angle range of the combined capacitance angle measurement solution, and comparing them with the three-axis angle values ​​of the combined capacitance angle measurement solution, the data is analyzed to obtain the relative error value, and the precision measurement is completed. The electric encoder of this embodiment adopts a high-precision capacitance encoder.

[0064] The central idea of ​​this case is to use high-precision angles to calibrate low-precision angles, and to adopt high-precision angles to obtain low-precision angle error values.

[0065] The present invention starts from detecting the accuracy of differential capacitance angle measurement, uses a high-precision capacitive encoder installed on three axes to perform zero-position calibration and accuracy detection on differential capacitance angle measurement, and realizes the accuracy measurement and calibration of differential capacitance angle measurement. In actual operation, the device can quickly realize zero-position calibration and accuracy measurement of angle measurement of different specifications by replacing parts.

[0066] The above embodiment of the present invention is a non-contact differential capacitance angle measurement zero position calibration and precision measurement device, which belongs to the non-contact angular displacement sensor precision measurement device. The low-precision differential capacitance angle measurement zero position calibration and precision detection can be achieved through a high-precision electric encoder. The device is simple to use and has a reliable structure. Through direct drive motor control, three-axis high-precision angle output can be achieved at any position of the working angle. Without replacing the shaft system parts, the non-contact differential capacitance angle measurement precision detection of different specifications can be achieved by replacing and installing the angle measurement fixing plate, and it has strong versatility.

[0067] The embodiment of the present invention provides a non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device, such as Figure 1 As shown, the device comprises:

[0068] The three-axis freedom rotation mechanism includes three rotating axis systems: azimuth, pitch, and roll. The angle range of the three rotating axis systems is within -5° to +5°. At the same time, the direct drive motor and driver are nested on the ring frame.

[0069] The three-axis independent angle measurement device has three high-precision capacitive encoders installed in the three nested rotating axis systems.

[0070] The angle measurement pole and moving pole mounting seats are replaceable structures, which can adapt to different specifications of non-contact differential capacitance angle measurement to complete zero position calibration and precision measurement in the same device.

[0071] Combination Figure 1 This is a structural layout diagram of a differential capacitive angle measurement zero position calibration and precision measurement device. The entire device mainly includes a base 1 and a pitch axis group 5, a roll axis group 4 and an azimuth axis group 6 which are nested in sequence. Each axis group is equipped with a high-precision electric encoder, a direct drive motor and a driver.

[0072] Figure 2 It is the overall structure of differential capacitive angle measurement, which consists of two spherical electrodes, namely, an angle measuring fixed pole 201 and an angle measuring moving pole 202. The angle measuring fixed pole 201 is fixed on the fixed pole mounting seat 10 by a positioning pin. The surface of the angle measuring moving pole 202 is divided into zones by the inductive metal coating, and the zones are insulated from each other. The three-axis rotation angle can be calculated by solving the inductive capacitance of each zone between the moving pole and the fixed pole.

[0073] Specifically, the surface of the angular moving electrode 202 is divided into four independent surfaces by a cross-line resist coating, and the four surfaces are insulated from each other.

[0074] like Figure 1 As shown, the differential capacitance angle measurement zero position calibration and accuracy measurement device is composed of three sets of rotating shaft systems.

[0075] like Figure 3 and Figure 5 As shown, a pitch motor and a pitch electric encoder are installed between the base and the pitch ring frame in the device to form a pitch axis system. The pitch motor driver installed on the pitch ring frame controls the movement angle of the pitch motor and can output the pitch angle of the device at this time.

[0076] like Figure 4 and Figure 5 As shown, a roll motor and a roll electric encoder are installed between the pitch ring and the azimuth seat in the device to form a roll axis system, and the roll motor driver installed on the pitch ring completes the motion angle control of the roll motor, and can output the roll angle of the device at this time. An azimuth motor and an azimuth electric encoder are installed between the azimuth seat and the azimuth axis in the device to form an azimuth axis system, and the azimuth motor driver installed on the pitch ring completes the motion angle control of the azimuth motor, and can output the azimuth angle of the device at this time.

[0077] like Figure 2 and Figure 3 As shown, the fixed pole of the differential capacitance angle measurement is connected to the base through the fixed pole fixing plate, the moving pole is connected to the moving pole mounting arm through the moving pole fixing plate, and finally the connection is completed through the azimuth axis and the azimuth axis system. The three-axis relative motion of the moving pole and the fixed pole can be achieved through the three-axis combined motion. The three-axis angle of the differential capacitance angle measurement can be obtained by solving.

[0078] In the embodiment of the present invention, the high-precision capacitive encoder can be understood as a high-precision angular displacement sensor, including but not limited to a capacitive encoder, a time grating encoder, a grating encoder, and an encoder. The resolution is preferably better than 10″.

[0079] The technical solutions described in the embodiments of the present application can be combined arbitrarily without conflict.

[0080] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device, characterized in that: The device comprises: A base (1) comprises a bottom plate for being placed on a horizontal plane and two side plates which are perpendicular to the bottom plate and are respectively arranged on two ends of the bottom plate; Three sets of axis systems are arranged on the base, the three sets of axis systems include a pitch axis system group (5), a roll axis system group (4) and an azimuth axis system group (6) which are nested in sequence, and each set of axis systems includes a corresponding motor and an electric encoder for controlling the motion angle and angle output of the corresponding axis system; Two fixed-pole fixing plates (10) are correspondingly arranged at two right angles formed by the two side plates of the base and the bottom plate; A moving pole mounting arm (11), the top end of which is fixedly connected to the three sets of shaft systems, and two arms at the bottom end respectively extend toward the two fixed pole fixing plates (10) and are provided with two moving pole fixing plates (3) corresponding to the two angle measuring fixed pole fixing plates (10), wherein the three sets of shaft systems can drive the moving pole fixing plates (3) to move relative to the fixed pole fixing plates (10) through the moving pole mounting arm (11); The angle measurement fixed pole (201) of the differential capacitance angle measurement (2) can be fixedly connected to the fixed pole fixing plate (10), and the angle measurement moving pole (202) can be fixedly connected to the moving pole fixing plate (3).

2. The non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device according to claim 1, characterized in that: The device further comprises a pitch ring frame (8), wherein the pitch ring frame (8) is arranged on the inner side of the top end portions of the two side plates; The pitch axis system group (5) is arranged between the top ends of the two side plates and the pitch ring frame (8), and is capable of rotating in the pitch axis direction, thereby driving the moving pole mounting arm (11) to rotate in the pitch axis direction.

3. The non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device according to claim 2, characterized in that: The device further comprises an azimuth seat (9), wherein the azimuth seat (9) is arranged on the inner middle side of the pitch ring frame (8) perpendicular to the extension direction of the base; The roll axis system group (4) is arranged between the pitch ring frame (8) and the azimuth seat (9), and can rotate in the roll axis direction, thereby driving the moving pole mounting arm (11) to rotate in the roll axis direction.

4. The non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device according to claim 3, characterized in that: The device further comprises an azimuth axis (13), wherein the azimuth axis (13) is perpendicular to the pitch ring frame (8) and the azimuth seat (9); The azimuth axis system group (6) is arranged between the azimuth seat (9) and the azimuth axis (13), and can rotate in the azimuth axis direction, thereby driving the moving pole mounting arm (11) to rotate in the azimuth axis direction.

5. The non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device according to claim 4, characterized in that: The top end of the moving pole mounting arm (11) is fixedly connected to the azimuth axis (13).

6. The non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device according to claim 4, characterized in that: The pitch axis system group (5) comprises a pitch motor (501) and a pitch electric encoder (502), wherein the pitch motor (501) and the pitch electric encoder (502) are arranged between the top ends of the two side plates and the pitch ring frame (8), and a pitch motor driver (503) installed on the pitch ring frame (8) controls the movement angle of the pitch motor (501) and can output the pitch angle of the pitch motor (501) at this time.

7. The non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device according to claim 4, characterized in that: The roll axis system group (4) comprises a roll motor (401) and a roll electric encoder (402), wherein the roll motor (401) and the roll electric encoder (402) are arranged between the pitch ring frame (8) and the azimuth seat (9), and the movement angle of the roll motor (401) is controlled by a roll motor driver (403) installed on the pitch ring frame (8), and the roll angle of the roll motor (401) at this time can be outputted at the same time.

8. The non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device according to claim 4, characterized in that: The azimuth axis system group (6) comprises an azimuth motor (601) and an azimuth electric encoder (602). The azimuth motor (601) and the azimuth electric encoder (602) are arranged between the azimuth seat (9) and the azimuth axis (13). The azimuth motor driver (603) installed on the pitch ring frame (8) controls the movement angle of the azimuth motor (601) and can output the azimuth angle of the azimuth motor (601) at this time.

9. The non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device according to claim 1, characterized in that: The angle measuring and polarization device (201) can be fixedly connected to the polarization fixing plate (10), and comprises: The angle measurement and polarization (201) is positioned by means of a cylindrical pin (7) and the polarization fixing plate (10).

10. The non-contact differential capacitance angle measurement zero position calibration and accuracy measurement device according to claim 1, characterized in that: The two fixed-pole fixing plates (10) are correspondingly arranged at two right angles formed by the two side plates of the base and the bottom plate, comprising: the fixed-pole fixing plates (10) are arranged at an angle of 45° relative to the two side plates of the base and the bottom plate; The two arms at the bottom ends of the moving pole mounting arms (11) are perpendicular to each other.

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