A tracking and scanning measurement system and platform

Abstract

The present invention discloses a tracking and scanning measurement system and platform. The tracking and scanning measurement system includes a two-dimensional angle measuring and driving device, a contact laser tracker, a non-contact laser scanner, and a control device. The control device is connected to the contact laser tracker, the non-contact laser scanner, and the two-dimensional angle measuring and driving device, and is used to, in the tracking coordinate measurement mode, drive the laser tracker to track a set tracking cooperation target in real time by controlling the two-dimensional angle measuring and driving device, and obtain the coordinate data of the contact point between the tracking cooperation target and the surface to be measured by combining two-dimensional angle measurement with laser interference ranging data. In the scanning measurement mode, the non-contact laser scanner is driven to scan the surface to be measured by controlling the two-dimensional angle measuring and driving device, and the scanned point cloud data of the surface to be measured is obtained by combining two-dimensional angle measurement with absolute ranging data. The present invention can achieve high-precision tracking coordinate measurement and high-efficiency scanning measurement with one instrument, significantly improving the detection efficiency.

Description

Technical Field

[0001] The present invention belongs to the technical field of metrological inspection in manufacturing, and particularly relates to a tracking scanning measurement system and platform. Background Art

[0002] The assembly accuracy and the contour accuracy of equipment are key factors for ensuring the quality of high-end equipment such as aircraft, missiles, and ships, and for ensuring stealth, aerodynamic, and hydrodynamic performance. An accurate measurement system is one of the key means to ensure the assembly accuracy of equipment and the contour accuracy of the whole machine. For example, advanced measurement means are required for measuring the spatial position and attitude in the manufacturing, inspection, and spatial positioning processes such as the assembly and docking of large parts, the assembly of space detector payloads, the high-precision positioning of unmanned aerial vehicles, and the calibration of robots.

[0003] Currently, for the measurement of large equipment components, in view of the characteristics of each measurement area, in order to obtain high-precision and high-efficiency measurement, it is necessary to combine the characteristics of each measurement device and use targeted measurement devices to measure each measurement area. For example, a high-precision large-size laser tracker can perform contact precise measurement on the area to be measured, but it requires the operation of holding a target ball, and the measurement speed is slow. A laser scanner can perform large-area and high-efficiency scanning on the measurement area, but the non-contact measurement accuracy is low during station transfer. In addition, since it does not have the function of tracking coordinate measurement, it cannot be applied to the attitude measurement in the docking state. In order to achieve the effects of high-precision tracking coordinate measurement and high-efficiency scanning measurement at the same time, different measurement devices are usually required to perform on-site measurement on the same large equipment. Since each measurement device uses its own measurement coordinate system, the coordinate points after measurement need to be converted by common points to obtain the coordinate point data under the same coordinate. It can be seen that the existing measurement devices cannot meet the requirements of high-precision tracking measurement of the component assembly feature points of large equipment and high-precision and rapid on-site measurement of the contour of the whole machine. Summary of the Invention

[0004] The purpose of the present invention is to provide a tracking scanning measurement system and platform, which can achieve high-precision tracking coordinate measurement and high-efficiency non-contact scanning measurement to meet the requirements of high-precision and rapid on-site measurement of the component assembly feature points and the contour of the whole machine of large equipment.

[0005] To achieve the above object, one aspect of the present invention provides a tracking scanning measurement system, including:

[0006] A contact laser tracker, including a tracking cooperation target and a tracking scanning device. The tracking cooperation target is used to move on the surface to be measured in a contact manner according to a set movement strategy, and the tracking scanning device is used to obtain the coordinate data of the contact point between the tracking cooperation target and the surface to be measured in the target coordinate system in real time by tracking the tracking cooperation target;

[0007] A non-contact laser scanner is used to scan a surface to be measured according to a set scanning strategy and obtain real-time scanning point cloud data of the surface to be measured in the target coordinate system.

[0008] A two-dimensional angle measuring and driving device is used to drive the contact laser tracker and the non-contact laser scanner.

[0009] A control device is connected to the contact laser tracker, the non-contact laser scanner and the two-dimensional angle measuring and driving device. In the tracking coordinate measurement mode, it drives the tracking and scanning device to track the tracking cooperation target in real time through controlling the two-dimensional angle measuring and driving device to obtain the coordinate data. In the scanning measurement mode, it drives the non-contact laser scanner to scan the surface to be measured through controlling the two-dimensional angle measuring and driving device to obtain the scanning point cloud data.

[0010] Another aspect of the present invention provides a tracking and scanning measurement platform, including the above-mentioned tracking and scanning measurement system and a computing and processing device. The computing and processing device is connected to the tracking and scanning measurement system to obtain the coordinate data and scanning point cloud data of the surface to be measured from the tracking and scanning measurement system.

[0011] According to the tracking and scanning measurement system and platform of the above aspect of the present invention, a contact laser tracker and a non-contact laser scanner can be integrated into the same device, and point cloud data under the same coordinates can be obtained. Later, three-dimensional modeling processing can be directly performed on the point cloud data without the need for coordinate conversion as in the prior art. Thus, fast, complete and high-precision scanning and tracking measurement can be achieved by one instrument, significantly improving the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] In order to more clearly illustrate the technical solutions of the present invention, the drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts:

[0013] Figure 1 It is a schematic structural diagram of the tracking and scanning measurement system according to an embodiment of the present invention;

[0014] Figure 2 It is a schematic principle diagram of the contact laser tracker and the non-contact laser scanner according to an embodiment of the present invention;

[0015] Figure 3 It is a schematic principle diagram of the coordinate measurement according to an embodiment of the present invention;

[0016] Figure 4 It is a schematic structural diagram of the constant temperature box according to an embodiment of the present invention;

[0017] Figure 5 It is a schematic structural diagram of the visual tracking module according to an embodiment of the present invention;

[0018] Figure 6 It is a schematic structural diagram of the contact laser tracker and the non-contact laser scanner according to an embodiment of the present invention;

[0019] Figure 7 It is an exploded schematic diagram of the pitch and yaw drive mechanism according to an embodiment of the present invention;

[0020] Figure 8 It is an exploded schematic diagram of the horizontal rotation drive mechanism according to an embodiment of the present invention;

[0021] Figure 9 It is a schematic structural diagram of a tracking and scanning measurement platform according to an embodiment of the present invention. Detailed implementation manners

[0022] To make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0023] Refer to Figure 1 , Figure 1 It is a schematic structural diagram of the tracking and scanning measurement system 100 according to an embodiment of the present invention. The tracking and scanning measurement system 100 includes: a support frame 1, a mounting housing 2, a two-dimensional angle measurement drive device 3, a contact laser tracker 4, a non-contact laser scanner 5, and a control device 6.

[0024] Among them, the installation housing 2 is installed on the support frame 1, the two-dimensional angle measurement driving device 3 is installed inside the installation housing 2, the contact laser tracker 4 at least includes a tracking cooperation target 41 and a tracking and scanning device 42, the tracking and scanning device 42 is arranged on the installation housing 2, during measurement, the tracking cooperation target 41 is used to move on the surface to be measured 200 in a way of contacting the surface to be measured 200 according to a set movement strategy, and the tracking and scanning device 42 obtains the coordinate data of the surface to be measured 200 in the target coordinate system in real time by tracking the tracking cooperation target 41. The non-contact laser scanner 5 is arranged inside the installation housing 2, and during measurement, it scans the surface to be measured 200 according to a specified scanning method and obtains the scanned point cloud data of the surface to be measured 200 in the target coordinate system in real time. The two-dimensional angle measurement driving device 3 is used to drive the contact laser tracker 4 and the non-contact laser scanner 5. The control device 6 is connected to the two-dimensional angle measurement driving device 3, the contact laser tracker 4 and the non-contact laser scanner 5. In the tracking coordinate measurement mode, the contact laser tracker 4 is turned on, and the tracking and scanning device 42 is driven by controlling the two-dimensional angle measurement driving device 3 to track the tracking cooperation target 41 in real time to obtain the coordinate data. In the scanning measurement mode, the non-contact laser scanner 5 is turned on, and the non-contact laser scanner 5 is driven by controlling the two-dimensional angle measurement driving device 3 to scan the surface to be measured 200 to obtain the scanned point cloud data.

[0025] In this embodiment, the support frame 1 can be a tripod, and the installation housing 2 is installed on the support frame 1.

[0026] In some embodiments, the tracking cooperation target 41 can be a corner cube target ball, and the corner cube target ball can be a target ball or a target mirror. However, it is not limited thereto. As long as it can receive and reflect laser light and cooperate with the tracking and scanning device 42 to obtain the coordinate data of the surface to be measured 200 in the target coordinate system in real time, the tracking cooperation target 41 can be of any structure. For the convenience of understanding, the tracking cooperation target 41 in the following embodiments is described with a corner cube target ball.

[0027] During measurement by the contact laser tracker 4, the corner cube target ball moves on the surface to be measured 200 in a way of contacting the surface to be measured 200 according to a set movement strategy, and the tracking and scanning device 42 obtains the coordinate data of the surface to be measured 200 in the target coordinate system in real time by tracking the corner cube target ball. The set movement strategy can be a strategy determined according to the shape of the surface to be measured 200.

[0028] In this embodiment, the set movement strategy can be that the corner cube target ball moves automatically according to the movement strategy, or it can be that the corner cube target ball is held by hand and moves according to the movement strategy. This embodiment does not limit this.

[0029] The coordinate data in this embodiment can be understood as the contact point cloud data obtained through the tracking cooperation target 41.

[0030] When the non-contact laser scanner 5 is measuring, it scans the surface 200 to be measured according to the specified scanning strategy, and obtains the scanned point cloud data of the surface 200 to be measured in the target coordinate system in real time. The specified scanning strategy can be a strategy determined by the control device 6 according to the shape of the surface 200 to be measured and the measuring distance.

[0031] In actual use, in the tracking coordinate measurement mode, the control device 6 starts the contact laser tracker 4 and the two-dimensional angle measuring drive device 3. The corner cube target ball can be moved on the surface 200 to be measured in contact with the surface 200 in a set moving strategy by means of a manipulator or hand-held. The control device 6 drives the tracking and scanning device 42 to track the corner cube target ball in real time through the control of the two-dimensional angle measuring drive device 3 to obtain the coordinate data in the target coordinate system, and determines the contact point cloud data of the surface 200 to be measured according to the coordinate data. In the scanning measurement mode, the control device 6 turns on the non-contact laser scanner 5, and drives the non-contact laser scanner 5 to scan the surface 200 to be measured through the control of the two-dimensional angle measuring drive device 3 to obtain the scanned point cloud data in the target coordinate system, so as to accurately construct a three-dimensional model and assemble it by using the coordinate data and the scanned point cloud data.

[0032] In some embodiments, the control device 6 can be externally connected to a host computer to receive the control instructions sent by the host computer, and send the measured contact point cloud data and scanned point cloud data to the host computer, so that the host computer can perform three-dimensional modeling according to the scanned point cloud data and the contact point cloud data to achieve high-precision assembly.

[0033] In this embodiment, the contact laser tracker 4 and the non-contact laser scanner 5 can scan the surface 200 to be measured in the same coordinate to obtain point cloud data, which enables the point cloud data measured in the same coordinate to achieve high-precision assembly and high-efficiency assembly. In addition, the contact laser tracker 4 can achieve on-site large-size high-precision contact coordinate measurement, and the non-contact laser scanner 5 can achieve high-precision fast and complete scanning measurement. In this way, both high-precision fast and complete scanning can be quickly completed, and large-size high-precision scanning can be achieved, thus solving the contradiction that the laser tracker cannot perform fast non-contact scanning measurement and the laser scanner cannot perform high-precision tracking coordinate measurement, so as to realize fast, complete, high-precision scanning and tracking measurement through one instrument, significantly improving the detection efficiency, and meeting the on-site high-precision and fast measurement requirements for the characteristic points of the components and the overall shape of the equipment such as airplanes, missiles, and warships.

[0034] In some embodiments, whether to use the tracking coordinate measurement mode or the scanning measurement mode to measure the surface 200 to be measured can be selected through manual confirmation, or the control device 6 can obtain the measurement mode requirements sent by other electronic devices, or there is a trained measurement mode determination model in the control device 6. According to the captured image of the area to be measured, the measurement mode corresponding to the area to be measured is output. This embodiment is not limited thereto.

[0035] In some embodiments, as Figure 1 shown, the installation housing 2 includes a scanner housing 21 and a regulation housing 22. The control device 6, the contact laser tracker 4, and the non-contact laser scanner 5 are all installed in the scanner housing 21. The two-dimensional angle measuring drive device 3 is installed in the regulation housing 22. The scanner housing 21 and the regulation housing 22 are installed on the support frame 1. In this embodiment, the support frame 1 can be a tripod. The scanner housing 21 is placed on the top of the tripod, and the regulation housing 22 is placed in the middle of the tripod.

[0036] In some embodiments, as Figure 2 shown, the tracking and scanning device 42 includes: an interference ranging module 421, a target tracking module 422, and a visual tracking module 423. Among them, the interference ranging module 421, the target tracking module 422, and the visual tracking module 423 are all installed in the scanner housing 21 and are electrically connected to the control device 6.

[0037] The control device 6 is used to turn on the interference ranging module 421, the target tracking module 422, and the visual tracking module 423 in the tracking coordinate measurement mode. Determine the position information of the corner cube target ball according to the captured image fed back by the visual tracking module 423, and send the position information of the corner cube target ball to the two-dimensional angle measuring drive device 3 to control the two-dimensional angle measuring drive device 3 to drive the interference ranging module 421 to move according to the position information of the corner cube target ball, so that the ranging laser emitted by the interference ranging module 421 enters the corner cube target ball through the target tracking module 422. During the movement of the corner cube target ball, the incident ranging laser is reflected by the corner cube target ball and then enters the target tracking module 422.

[0038] The target tracking module 422 is used to measure the relative distance value between the corner cube target ball and the present target tracking module 422 at the current moment and the position offset value relative to the previous moment in the target coordinate system according to the received ranging laser, and send the relative distance value at the current moment and the position offset value to the control device 6.

[0039] The control device 6 is further configured to control the two-dimensional angle measuring and driving device 3 to drive the target tracking module 422 to perform adaptive adjustment of the horizontal angle and the pitch angle according to the position offset value, so as to realize the tracking measurement of the corner cube target ball by adjusting the position offset value, and determine the coordinate data of the surface to be measured 200 in the target coordinate system based on the obtained absolute distance values at different times.

[0040] In this embodiment, as Figure 3 shown, let the center point of the corner cube target ball be P(x, y, z), and the center of the coordinate system of the contact laser tracker 4 be the biaxial rotation center O. When the system tracks the corner cube target ball, if the horizontal angle from O to P is , the pitch angle is θ , and the distance between O and P is R , according to the transformation from the spherical coordinate system to the rectangular coordinate system, there are:

[0041]

[0042] where x is the horizontal coordinate of the coordinate system, y is the vertical coordinate of the coordinate system, and z is the vertical coordinate of the coordinate system.

[0043] In this embodiment, for the purpose of achieving high-precision scanning and tracking measurement, the interference ranging module 421 combines laser interference ranging with the target tracking module 422 to achieve high-precision tracking coordinate measurement, so as to realize tracking coordinate measurement, and perform tracking ranging through the feedback of the target tracking module 422. Through experimental detection, the accuracy of the target tracking module 422 can reach ±18μm + 8.5μm / m.

[0044] In this embodiment, the position of the corner cube target ball is fed back through the target tracking module 422, the absolute distance measurement of the cooperative target is realized through the interference ranging module 421, and the two-dimensional angle measuring and driving device 3 drives the target tracking module 422 to perform adaptive adjustment of the horizontal angle and the pitch angle according to the position deviation and distance feedback measured by the target tracking module 422, so as to realize the tracking measurement of the corner cube target ball, and finally the measurement result is transmitted to the host for data processing.

[0045] As an embodiment, as Figure 2 shown, the target tracking module 422 includes a lens assembly 4221 and a position sensing tracker 4222; the lens assembly 4221 is disposed on the light incident side of the position sensing tracker 4222, and the lens assembly 4221 performs optical signal processing on the ranging laser emitted by the interference ranging module 421, so that a part of the processed ranging laser is reflected by the corner cube target ball and then enters the lens assembly 4221 to form an interference signal with the ranging laser that passes through the lens assembly 4221 and then enters the position sensing tracker 4222.

[0046] The position sensing tracker 4222 is used to measure the position of the spot formed by the incident interference signal, and determine the position offset value of the corner cube target ball relative to the previous moment at the current moment between the corner cube target ball and the present lens assembly 4221 in the target coordinate system.

[0047] The control device 6 is electrically connected to the position sensing tracker 4222, and is used to control the adaptive adjustment of the horizontal angle and the pitch angle according to the relative distance value and the position offset value, so as to realize the tracking measurement of the corner cube target ball by adjusting the position offset value; the control device 6 is further used to determine the coordinate data of the surface to be measured 200 in the target coordinate system according to the relative distance values at different moments obtained.

[0048] In this embodiment, the position sensing tracker 4222 can measure the position of the spot formed by the interference signal, and determine the position offset value of the corner cube target ball relative to the previous moment at the current moment between the corner cube target ball and the present lens assembly 4221 in the target coordinate system, so that the control device 6 controls the two-dimensional angle measuring drive device 3 to drive the present target tracking module 422 to perform adaptive adjustment of the horizontal angle and the pitch angle according to the relative distance value and the position offset value sent by the target tracking module 422, so as to realize the tracking measurement of the corner cube target ball by adjusting the position offset value, and determine the coordinate data of the surface to be measured 200 in the target coordinate system according to the relative distance values at different moments obtained.

[0049] In some embodiments, as Figure 2 shown, the target tracking module 422 further includes; a filter 4223, and the filter 4223 is disposed between the lens assembly 4221 and the position sensing tracker 4222. The filter 4223 in this embodiment can filter out some unnecessary light signals to improve the measurement accuracy.

[0050] In some embodiments, as Figure 2 shown, the above-mentioned lens assembly 4221 includes a first fiber collimator 42211 and a beam splitter 42212. The ranging laser emitted by the interference ranging module 421 is focused into a parallel light signal by the first fiber collimator 42211 and then enters the beam splitter 42212. A part of the ranging laser of the parallel light signal passes through the beam splitter 42212 and enters the corner cube target ball and then is reflected into the beam splitter 42212, and forms an interference light signal with another part of the ranging laser passing through the beam splitter 42212 and enters the position sensing tracker 4222.

[0051] In this embodiment, the first fiber collimator 42211 is only named for the convenience of distinguishing from the fiber collimator in the following text, and is not used to limit a certain fiber collimator.

[0052] The first fiber collimating mirror 42211 can collimate light to the required diameter or spot size while reducing the divergence angle of the light beam, ensuring that the light propagates in a parallel state.

[0053] The beam splitter 42212 can split the ranging laser emitted by the first fiber collimating mirror 42211 into ranging lasers in different directions. One beam of light passes through the beam splitter 42212, enters the corner cube target ball and is reflected back into the beam splitter 42212, and the other beam of light serves as a reference light, passes through the beam splitter 42212 and interferes with the ranging laser reflected into the beam splitter 42212.

[0054] In some embodiments, as Figure 2 shown, the lens assembly 4221 further includes a collimating lens group 42213. The collimating lens group 42213 is disposed between the first fiber collimating mirror 42211 and the beam splitter 42212, and the collimating lens group 42213 is used to expand the parallel light signal emitted by the first fiber collimating mirror 42211 and then enter the beam splitter 42212.

[0055] In this embodiment, the collimating lens group 42213 focuses the parallel light emitted by the first fiber collimating mirror 42211 on the beam splitter 42212 to further improve the measurement accuracy.

[0056] In some embodiments, the filter 4223 is a band-pass filter to selectively filter out light of non-target wavelengths, improve the monochromaticity and stability of the laser output, and ensure the normal operation of the laser within a specific wavelength range. In other embodiments, the band-pass filter is a narrow-band filter to selectively transmit the fiber wavelengths in a set wavelength band, thereby improving the purity and stability of the laser.

[0057] In some embodiments, as Figure 2As shown in the figure, the interference ranging module 421 includes a helium-neon laser assembly 4211, a second fiber collimator 4212, a beam splitter 4213, a fiber optic mirror 4214, and a detector 4215. Among them, the second fiber collimator 4212 is disposed on the light-emitting side of the helium-neon laser assembly 4211, the beam splitter 4213 is disposed on the light-emitting side of the second fiber collimator 4212, and the fiber optic mirror 4214 and the detector 4215 are respectively disposed on the light-emitting side of the beam splitter 4213. The laser signal emitted by the helium-neon laser assembly 4211 is focused into a parallel light signal by the second fiber collimator 4212 and then enters the beam splitter 4213. A part of the ranging laser enters the fiber optic mirror 4214, and the other part passes through the beam splitter 4213 and forms an interference signal with the ranging laser reflected into the beam splitter 4213 by the fiber optic mirror 4214. A part of the ranging laser enters the first fiber collimator 42211, and the other part of the ranging laser enters the detector 4215. The helium-neon laser assembly 4211 and the detector 4215 are used to be electrically connected to the control device 6. The control device 6 controls the helium-neon laser assembly 4211 to be turned on or off, and controls the helium-neon laser assembly 4211 to emit a laser signal through the electrical signal fed back by detecting the ranging laser by the detector 4215.

[0058] In this embodiment, the second fiber collimator 4212 is only named for the convenience of distinguishing from the fiber collimators in the context before and after, and is not used to limit a certain fiber collimator.

[0059] The helium-neon laser assembly 4211 has the characteristics of large power output, narrow spectral line width, long wavelength, etc. The laser emitted by the helium-neon laser assembly 4211 outputs a parallel ranging laser through the second fiber collimator 4212. The ranging laser is split into two beams of ranging laser by the beam splitter 4213. One beam of ranging laser is reflected by the fiber optic mirror 4214 and then enters the beam splitter 4213. The other beam of ranging laser passes through the beam splitter 4213 and interferes with the reflected ranging laser, and then enters the first fiber collimator 42211. The detector 4215 detects the ranging laser to timely feed back the electrical signal corresponding to the intensity of the ranging laser when it enters the first fiber collimator 42211 to the control device 6, so that the control device 6 further regulates the laser signal entering the helium-neon laser assembly 4211 according to the fed-back electrical signal.

[0060] The interference ranging module 421 of this embodiment can be combined with the target tracking module 422 to measure the relative distance value at the current moment.

[0061] In some embodiments, such as Figure 2As shown, the interference ranging module 421 further includes a first isolator 4216. The first isolator 4216 is disposed between the second fiber collimator 4212 and the beam splitter 4213, so that all the ranging laser light emitted from the second fiber collimator 4212 enters the beam splitter 4213.

[0062] The first isolator 4216 is named only for the convenience of distinguishing it from the isolators in the context before and after, and is not used to define a certain isolator.

[0063] The first isolator 4216 can further restrict the direction of the ranging laser light, so that the emitted ranging laser light can only be transmitted to the beam splitter 4213 in a single direction to reduce the energy loss of the ranging laser light. At the same time, it also improves the optical wave transmission efficiency by isolating the reflected light.

[0064] In some embodiments, the helium-neon laser assembly 4211 includes a helium-neon laser, a switch circuit, a heating wire, and a temperature sensor.

[0065] Among them, the helium-neon laser, the switch circuit, and the temperature sensor are all electrically connected to the control device 6. The heating wire is wound around the outer side of the helium-neon laser and is electrically connected to the switch circuit. The temperature sensor is attached to the outer side of the helium-neon laser to measure the temperature of the helium-neon laser in real time and send the temperature measurement result to the control device 6 as a temperature electrical signal.

[0066] The control device 6 is used to control the helium-neon laser to emit a laser signal. During the emission of the laser signal, it determines whether to heat the helium-neon laser by controlling the switch circuit to use the heating wire according to the electrical signal fed back by the detector 4215 and the temperature signal sent by the temperature sensor, so as to maintain the temperature of the helium-neon laser within a set range.

[0067] In this embodiment, the heating wire is used to heat the helium-neon laser. The control device 6 can determine whether to turn on the heating wire to heat the helium-neon laser according to the electrical signal fed back by the detector 4215, so that the temperature of the helium-neon laser is in a constant temperature state to ensure the performance of the helium-neon laser and the stability of the output laser signal.

[0068] In some embodiments, as Figure 2 shown, the above non-contact laser scanner 5 includes a scanning vision module 51 and a swept-frequency absolute non-contact ranging module 52. The scanning vision module 51 and the swept-frequency absolute non-contact ranging module 52 are both electrically connected to the control device 6.

[0069] The scanning vision module 51 is used to photograph the area to be measured in a panoramic manner and send the photographed area to be measured to the control device 6.

[0070] The control device 6 is used to start the scanning vision module 51 and the swept-frequency absolute non-contact ranging module 52 in the scanning measurement mode, so as to perform scanning path planning on the area to be measured to obtain a scanning path planning strategy, and send the scanning path planning strategy to the scanning vision module 51.

[0071] The swept-frequency absolute non-contact ranging module 52 is used to measure the absolute distance value between the surface 200 to be measured and the present swept-frequency absolute non-contact ranging module 52 during the scanning process, and send the absolute distance value to the control device 6.

[0072] The control device 6 is further used to control the two-dimensional angle measurement driving device 3 to drive the scanning vision module 51 to scan the area to be measured according to the scanning path planning strategy according to the absolute distance value, so as to adapt to scans at different distances through the zoom lens.

[0073] In this embodiment, scans at different distances can be adapted through the zoom lens, and precise laser scanning can be automatically realized to obtain more accurate point cloud data.

[0074] The scanning vision module 51 photographs the area to be measured, so that the control device 6 can determine the scanning path planning measurement according to the area to be measured, so that the swept-frequency absolute non-contact ranging module 52 determines the absolute distance value between the surface 200 to be measured in the area to be measured and the present swept-frequency absolute non-contact ranging module 52 during the scanning process. Furthermore, according to the absolute distance value, the two-dimensional angle measurement driving device 3 is controlled to drive the scanning vision module 51 to scan the area to be measured according to the scanning path planning strategy, so as to adapt to scans at different distances through the zoom lens, thereby quickly and precisely realizing large-area non-contact scanning.

[0075] In some embodiments, as Figure 2 shown, the swept-frequency absolute non-contact ranging module 52 includes an external cavity resonant laser 521, a measurement interferometer 522, a first coupler 523, an auxiliary interferometer 524, a third fiber collimator 525, and a ranging signal processing unit 526.

[0076] The first coupler 523 is placed on the light output side of the external cavity resonant laser 521. One light output side of the first coupler 523 is provided with the measurement interferometer 522, and the other light output side is provided with the auxiliary interferometer 524. The measurement interferometer 522 is electrically connected to the ranging signal processing unit 526. The light output side of the measurement interferometer 522 is provided with the third fiber collimator 525, and the light output side of the third fiber collimator 525 is provided with the scanning vision module 51; the ranging signal processing unit 526 is electrically connected to the control device 6.

[0077] The ranging signal processing unit 526 is used to control the external cavity resonant laser 521 to emit a laser signal, so that the laser signal is divided into two paths after being processed by the first coupler 523. One optical signal is incident into the measurement interferometer 522, and after being processed by the measurement interferometer 522, it is emitted to the third fiber collimator 525 for focusing processing and then incident into the scanning vision module 51, and the optical signal fed back by the received scanning vision module 51 is subjected to measurement optical interference processing, and the processed measurement optical interference signal is sent to the ranging signal processing unit 526; the other optical signal enters the auxiliary interferometer 524 for clock interference processing, and the processed clock optical interference signal is incident into the ranging signal processing unit 526.

[0078] The ranging signal processing unit 526 is further used to determine the absolute distance value according to the measurement optical interference signal and the clock optical interference signal, so as to adjust the frequency of the laser signal emitted by the external cavity resonant laser 521 according to the absolute distance value.

[0079] In this embodiment, the first coupler 523 is only named for the convenience of distinguishing from the couplers in the following text, and is not used to limit a certain coupler.

[0080] The first coupler 523 can have a good isolation effect on the laser signal input by the external cavity resonant laser 521 and the electrical signal output by the first coupler 523.

[0081] In this embodiment, the absolute distance value between the surface 200 to be measured and the swept-frequency absolute non-contact ranging module 52 is measured by combining the measurement interferometer 522 and the auxiliary interferometer 524.

[0082] In some embodiments, as Figure 2 shown, the swept-frequency absolute non-contact ranging module 52 further includes a second isolator 527, and the second isolator 527 is disposed between the external cavity resonant laser 521 and the first coupler 523.

[0083] In this embodiment, the second isolator 527 is only named for the convenience of distinguishing from the isolators in the context before and after, and is not used to limit a certain isolator.

[0084] The second isolator 527 can perform bidirectional transmission on the ranging laser emitted by the first coupler 523.

[0085] In some other embodiments, the scanning vision module 51 includes a fourth fiber collimator 511, a zoom lens group 512, and a zoom lens 513; the zoom lens 513, the zoom lens group 512, and the fourth fiber collimator 511 are arranged in sequence according to the entry and exit of the light signal, the fourth fiber collimator 511 is close to the side of the first fiber collimator 42211, and the zoom lens group 512 is installed on the two-dimensional angular measurement driving device 3 so that the two-dimensional angular measurement driving device 3 drives the zoom lens group 512 to achieve the focal length.

[0086] In this embodiment, the fourth fiber collimator 511 is named only for the convenience of distinguishing it from the fiber collimators in the context before and after, and is not used to define a certain fiber collimator.

[0087] In practical applications, the laser signal from the first fiber collimator 42211 is incident on the fourth fiber collimator 511 and a parallel ranging laser is emitted after processing. The ranging laser is incident on the zoom lens group 512. Driven by the two-dimensional angular measurement driving device 3, the distance between the zoom lens group 512 and the zoom lens 513 is changed, so that the best focal length can be adjusted according to the distance between the surface 200 to be measured and the zoom lens 513, thereby achieving the purpose of improving the ranging accuracy.

[0088] In some embodiments, as Figure 2 shown, the measurement interferometer 522 includes a first balanced detector 5221, a second coupler 5222, a first 3dB coupler 5223, and a circulator 5224. The light input port of the second coupler 5222 is arranged at the light output port of the first coupler 523. The first light output port of the second coupler 5222 is arranged at the first light input port of the first 3dB coupler 5223. The second light output port of the second coupler 5222 is arranged at the first light input port of the circulator 5224. The first light output port of the circulator 5224 is arranged in alignment with the third fiber collimator 525. The second light input port of the circulator 5224 receives the laser signal emitted by the third fiber collimator 525. The second light output port of the circulator 5224 is arranged at the second light input port of the first 3dB coupler 5223. The light output port of the first 3dB coupler 5223 is arranged at the first balanced detector 5221. The first balanced detector 5221 is electrically connected to the ranging signal processing unit 526 to send a measurement light interference signal to the ranging signal processing unit 526.

[0089] In this embodiment, the second coupler 5222 is named only for the convenience of distinguishing it from the couplers in the context before and after, and is not used to define a specific coupler. The first light output port is named only for the convenience of distinguishing it from the light output ports in the following text, and is not used to define a specific light output port. Correspondingly, the second light output port is named only for the convenience of distinguishing it from the light output ports in the following text, and is not used to define a specific light output port. The first 3dB coupler 5223 is named only for the convenience of distinguishing it from the 3dB couplers in the following text, and is not used to define a specific 3dB coupler.

[0090] The circulator 5224 amplifies the ranging laser emitted from the second coupler 5222 and then injects it into the third fiber collimator 525 from another fiber port. At the same time, the circulator 5224 combines the ranging laser injected from the third fiber collimator 525 with the ranging laser injected from the second coupler 5222 inside the circulator 5224 to form an interference signal and input it into the first 3dB coupler 5223. In addition, the circulator 5224 can also make the isolation degree between non-communication ports larger before inputting it into the first 3dB coupler 5223.

[0091] In some embodiments, the auxiliary interferometer 524 includes a third coupler 5241, a second 3dB coupler 5242, a second balanced detector 5243, and an optical interferometer 5244. The light input port of the third coupler 5241 is arranged at the first light output port of the first coupler 523. The light output port of the third coupler 5241 is arranged at the light input port of the second 3dB coupler 5242 through the optical interferometer 5244. The light output port of the second 3dB coupler 5242 is arranged at the light input port of the second balanced detector 5243. The second balanced detector 5243 is electrically connected to the ranging signal processing unit 526 to send a clock optical interference signal to the ranging signal processing unit 526.

[0092] In this embodiment, the third coupler 5241 is named only for the convenience of distinguishing it from the couplers in the context before and after, and is not used to define a specific coupler. The second 3dB coupler 5242 is named only for the convenience of distinguishing it from the 3dB couplers in the previous text, and is not used to define a specific 3dB coupler. The second balanced detector 5243 is named only for the convenience of distinguishing it from the balanced detectors in the previous text, and is not used to define a specific balanced detector.

[0093] The second balanced detector 5243 can perform denoising processing on the ranging laser output by the second 3dB coupler 5242 to improve the sensitivity of the ranging laser.

[0094] In some embodiments, the optical interferometer 5244 can be an M-Z (Mach-Zenhder, fiber Mach-Zehnder) interferometer to improve the measurement accuracy.

[0095] In some embodiments, as Figure 2 shown, the tracking and scanning measurement system further includes an optical fiber switch, which is connected to the swept-frequency absolute non-contact ranging module 52 and the interference ranging module 421, and is electrically connected to the control device 6. The control device 6 is configured to, after the ranging laser emitted by the interference ranging module 421 to the tracking cooperation target 41 is blocked and the light is interrupted in the tracking coordinate measurement mode, be able to connect the swept-frequency absolute non-contact ranging module 52 and the target tracking module 422 by controlling the optical fiber switch, measure the initial absolute distance value from the tracking cooperation target 41 to the swept-frequency absolute non-contact ranging module 52 after the light interruption is resumed, and correct the relative distance value between the tracking cooperation target after the light interruption is resumed and the lens assembly of the target tracking module 422 in the target coordinate system through the absolute distance initial value.

[0096] In some embodiments, the scanner housing 21 includes: a control box and a scanner integrated housing. An auxiliary interferometer 524, a temperature sensor, and a control device 6 are installed in the control box. The remaining components of the contact laser tracker 4 except the temperature sensor and the remaining components of the non-contact scanner 5 except the auxiliary interferometer 524 are installed in the scanner integrated housing, and the scanner integrated housing is installed on the support frame 1.

[0097] In some embodiments, as Figure 2 and 6 shown, the tracking and scanning measurement system further includes a thermostat 7; the thermostat 7 is installed with the auxiliary interferometer 524 for maintaining the temperature of the auxiliary interferometer 524. Since the auxiliary interferometer 524 requires heat preservation and constant temperature in the constant temperature solution, and its installation is limited by the size space of the scanner integrated housing, the auxiliary interferometer 524 in the swept-frequency absolute non-contact ranging module 52 and its thermostat 7 are installed in the control box.

[0098] In some embodiments, as Figure 4As shown in the figure, the thermostat 7 includes an internal optical fiber installation box 71, an optical fiber connection seat 72, an internal insulation box 73, an internal temperature control board 74, an external metal box 75, an external temperature control board 76, an outer thermal insulation cover 77, and a bottom heat dissipation connector 78; inside the internal optical fiber installation box 71, there is an optical fiber connection seat 72 for connecting optical fibers and an optical fiber winding member for winding optical fibers. The bottom of the internal insulation box 73 is provided with an installation hole for placing the internal temperature control board 74, and the bottom of the external metal box 75 is provided with an installation hole for placing the external temperature control board 76. An auxiliary interferometer 524 is placed in the internal optical fiber installation box 71. The internal optical fiber installation box 71 is arranged inside the internal insulation box 73. The installation hole at the bottom of the internal insulation box 73 is installed with the internal temperature control board 74 and is arranged inside the external metal box 75. The external metal box 75 is installed inside the outer thermal insulation cover 77. The installation hole at the bottom of the outer thermal insulation box is installed with the external temperature control board 76. The bottom heat dissipation connector 78 is installed at the bottom of the outer thermal insulation cover 77 and is used to contact the external temperature control board 76, so as to use the internal temperature control board 74 and the external temperature control board 76 through the external metal box 75 to guide the heat in the internal optical fiber installation box 71 to the bottom heat dissipation connector 78 for heat dissipation. The outer thermal insulation cover 77 covers the internal optical fiber installation box 71. The bottom heat dissipation connector 78 is pasted on the outer end face of the outer thermal insulation cover 77 and is sealed inside the internal optical fiber installation box 71 together with the outer thermal insulation cover 77. In this embodiment, the auxiliary interferometer 524 is installed by using the internal optical fiber installation box 71. The internal insulation box 73 performs the first layer of constant temperature control on the auxiliary interferometer 524, and fine temperature control is performed by the internal temperature control board 74 installed at the bottom of the internal insulation box 73; preliminary temperature control is performed by combining the external metal box 75 with the external temperature control board 76, and insulation control is performed by using the internal insulation box 73. The internal temperature control board 74 can adopt a TEC (Thermo Electric Cooler) semiconductor cooler, the external temperature control board 76 can adopt a TEC semiconductor cooler, and the external metal box 75 can be made of brass.

[0099] In some embodiments, as Figure 4 shown, the outer thermal insulation cover 77 includes: an optical fiber metal box cover 771, a heat insulating cotton 772, a metal plate 773, and an outer top insulation cover 774; wherein, the optical fiber metal box cover 771, the heat insulating cotton 772, the metal plate 773, and the outer top insulation cover 774 are adhesively bonded in sequence to form an integral cover structure, and the optical fiber metal box cover 771 covers the internal insulation box 73 in a manner close to the internal optical fiber installation box 71. The technical solution provided in this embodiment further performs a heat preservation function on the auxiliary interferometer 524. As an embodiment, the metal box is made of brass.

[0100] In some embodiments, as Figure 5As shown in the figure, the visual tracking module 423 includes: a telephoto objective lens 4231, a telephoto objective lens retaining ring 4232, a telescope group 4233, an inner lens barrel 4234, a relay lens 4235, an imaging lens group 4236, an outer lens barrel 4237, and an imaging CCD (Charge-coupled Device) lens group 4238. Among them, bosses for mounting the telescope group 4233, the relay lens 4235, and the imaging lens group 4236 are sequentially arranged in the inner lens barrel 4234 at a specified distance. A groove for stably mounting in the scanner integration housing is provided on the outer side surface of the outer lens barrel 4237. The telephoto objective lens 4231 is disposed within the telephoto objective lens retaining ring 4232, and the telephoto objective lens retaining ring 4232 is sleeved on the inner lens barrel assembly. The corresponding telescope group 4233, relay lens 4235, and imaging lens group 4236 are sequentially installed at the bosses of the inner lens barrel 4234, and the telescope group 4233 is close to the telephoto objective lens retaining ring 4232. The outer lens barrel 4237 is sleeved outside the inner lens barrel 4234. An imaging CCD lens group 4238 is installed at the end of the outer lens barrel 4237 away from the telephoto objective lens 4231 and is installed in the scanner integration housing through the groove. In this embodiment, the relay lens 4235 amplifies and relays the optical signal incident from the telescope group 4233 to expand the coverage range, enhance the signal quality, and reduce the transmission delay.

[0101] In other embodiments, as Figure 6 shown, the two-dimensional angle measurement driving device 3 includes a horizontal rotation driving mechanism 31, a horizontal rotation shaft 32, a pitch rotation driving mechanism 33, a pitch rotation shaft 34, and a pitch rotation support frame 35.

[0102] Among them, the horizontal rotation driving mechanism 31 is installed in the regulation housing 22. The output end of the horizontal rotation driving mechanism 31 is connected to the horizontal rotation shaft 32. The execution end of the horizontal rotation shaft 32 is installed with the pitch rotation support frame 35. The scanner housing 21 is installed on the pitch rotation support frame 35 to drive the scanner housing 21 to achieve the horizontal rotation movement through the pitch rotation support frame 35. The input end of the horizontal rotation driving mechanism 31 is electrically connected to the control device 6 to drive the horizontal rotation shaft 32 to rotate under the control of the control device 6.

[0103] The output end of the pitch rotation driving mechanism 33 is installed with the pitch rotation shaft 34 and is installed on the pitch rotation support frame 35. The pitch rotation support frame 35 is installed with the scanner housing 21. The input end of the pitch rotation driving mechanism 33 is connected to the control device 6 to drive the pitch rotation shaft 34 to rotate under the control of the control device 6 and drive the scanner housing 21 to achieve the pitch rotation movement.

[0104] In this embodiment, the control device 6 drives the horizontal rotation shaft 32 to rotate through the horizontal rotation drive mechanism 31. The horizontal rotation shaft 32 drives the scanner housing 21 on the pitch rotation support frame 35 to achieve horizontal rotation movement, thereby driving the contact laser tracker 4 and the non-contact laser scanner 5 in the scanner housing 21 to achieve horizontal rotation movement.

[0105] The control device 6 drives the pitch rotation shaft 34 to rotate through the pitch rotation drive mechanism 33, driving the contact laser tracker 4 and the non-contact laser scanner 5 installed in the scanner housing 21 on the pitch rotation support frame 35 to achieve pitch rotation movement.

[0106] It can be seen that by applying the technical solution provided in this embodiment, high-precision rotation of the pitch axis and the horizontal axis can be achieved, and it is ensured that the measurement optical center is concentric with the measurement components installed at the rotation intersection points of the horizontal rotation shaft 32 and the pitch rotation shaft 34, achieving a high-precision measurement effect.

[0107] In some embodiments, as Figure 6 and 7 shown, the pitch rotation drive mechanism 33 includes a pitch motor rotor 331, a pitch motor stator 332, a pitch circular grating assembly 333, a first angular contact bearing 334, a second angular contact bearing 335, a motor mounting seat, a compression adjustment ring 336, a gland 337, a limit mounting plate 338, a bearing preloading ring, and a mounting cover 339.

[0108] The first angular contact bearing 334 is installed on one side of the pitching rotary shaft 34. The pitching circular grating assembly 333 is installed on the first angular contact bearing 334 and the pitching rotary shaft 34 for measuring the pitching rotation angle of the pitching rotary shaft. A bearing preloading ring is sleeved on the other side of the pitching rotary shaft and then connected to the second angular contact bearing 335. The motor mounting base is installed on the second angular contact bearing 335. The pitching motor rotor is installed on the motor mounting base. The pitching motor stator 332 is installed on the pitching motor rotor and sleeved on the end of the pitching rotary shaft. The gland 337 is installed on the motor mounting base in a manner of pressing the pitching motor stator 332. The motor mounting base is installed on the pitching rotary support frame 35. The bearing preloading ring is sleeved on the pitching rotary shaft 34 and presses the second angular contact bearing 335. The compression adjusting ring 336 is sleeved on the pitching rotary shaft 34 and tightly arranged inside the pitching motor rotor. The limit mounting plate 338 is limit arranged at the end of the pitching rotary shaft 34. The two mounting covers 339 cover the pitching motor rotor, the pitching motor stator 332, the pitching circular grating assembly 333, the first angular contact bearing 334, the second angular contact bearing 335, the motor mounting base, the compression adjusting ring 336 and the limit mounting plate 338 and are then installed on the pitching rotary support frame 35.

[0109] In this embodiment, the first angular contact bearing 334 is named only for facilitating the distinction from the angular contact bearings in the context before and after, and is not used to define a certain angular contact bearing. Correspondingly, the second angular contact bearing 335 is named only for facilitating the distinction from the angular contact bearings in the context before and after, and is not used to define a certain angular contact bearing.

[0110] As an embodiment, the pitching circular grating assembly 333 includes a pitching circular grating mounting base 3331, a pitching circular grating reading head 3332 and a pitching circular grating. The pitching circular grating mounting base 3331 is installed on the pitching rotary shaft 34. The pitching circular grating is installed on the pitching circular grating mounting base 3331. The pitching circular grating reading head 3332 is installed on the first angular contact bearing 334 to read the rotation angle of the pitching rotary shaft 34.

[0111] To achieve high-precision rotation, a double high-precision double-contact bearing shafting scheme is adopted, which installs the first angular contact bearing 334 and the second angular contact bearing 335 on the pitch axis mounting seat. The pitch rotation shaft needs to adopt a design with a larger bearing diameter at one end than the bearing mounting diameter at the other end to facilitate through-type installation. At the same time, a small pre-tightening force is used for pre-tightening to facilitate accuracy improvement. Both the first angular contact bearing 334 and the second angular contact bearing 335 need to use high-precision bearings, and the radial and axial runout of the inner ring must be controlled within the set accuracy range, such as 2.5 μm. On one side of the pitch rotation shaft 34, a pitch circular grating mounting seat 3331 is installed to support and fix the pitch circular grating. The pitch circular grating is installed on the circular grating mounting seat 3152, and the coaxiality of the installation is ensured through precision machining of the circular grating mounting seat 3152. The pitch circular grating reading head 3332 on this side is installed at the end of the pitch rotation shaft 34 to measure the angle; on the other side of the pitch rotation shaft 34, a bearing preloading ring is installed. By adjusting the outer pressing adjustment ring 336, the clearance of the first angular contact bearing 334 can be adjusted. The pitch motor rotor is installed on the pitch rotation shaft 34, and the pitch motor stator 332 is installed on the motor mounting seat and fixed by a gland 337. The two work together to achieve the motor drive function; the limit mounting plate 338 is installed at one end of the pitch rotation shaft 34 to achieve the function of limiting the rotation angle; in addition, the wire routing, the installation of the direct drive torque motor, the installation of the circular grating, etc. also need to be considered. After installation, it is protected by an installation cover.

[0112] In some embodiments, such as Figure 6 and 8 shown, the horizontal rotation drive mechanism 31 includes a third angular contact bearing 311, a fourth angular contact bearing 312, an intermediate main support seat 313, a bearing retaining ring 314, a horizontal circular grating measurement assembly 315, a horizontal motor stator 316, and a horizontal motor rotor 317.

[0113] Among them, the horizontal rotating shaft is sleeved with the horizontal motor rotor 317, the horizontal motor rotor 317 is installed in the horizontal motor stator 316. At a set position of the horizontal rotating shaft, a horizontal circular grating measuring component 315 for measuring the rotation angle of the horizontal rotating shaft is also installed. The horizontal circular grating measuring component 315 is close to the horizontal motor rotor 317 and is connected to the horizontal motor stator 316. The third angular contact bearing 311 and the fourth angular contact bearing 312 are sequentially sleeved on the horizontal rotating shaft 32 in a manner separated by the intermediate main support seat 313, and are installed in the intermediate main support seat 313 together with the horizontal circular grating measuring component 315, the horizontal motor stator 316, and the horizontal motor rotor 317. The bearing retaining ring 314 is sleeved on the horizontal rotating shaft in a manner close to the horizontal motor stator 316 and pressing the third angular contact bearing 311. The horizontal motor stator 316 is electrically connected to the control device 6, and under the control of the control device 6, the horizontal rotating shaft is driven to rotate through the horizontal motor rotor 317. The execution end of the horizontal rotating shaft is installed with the pitching rotation support frame 35.

[0114] In this embodiment, the third angular contact bearing 311 is only named for the convenience of distinguishing from the angular contact bearings in the context before and after, and is not used to define a certain angular contact bearing. Correspondingly, the fourth angular contact bearing 312 is only named for the convenience of distinguishing from the angular contact bearings in the context before and after, and is not used to define a certain angular contact bearing.

[0115] The bearing retaining ring 314 is sleeved on the horizontal rotating shaft and installed in the third angular contact bearing 311, and can adjust the pressing force and play a positioning role for the horizontal motor stator 316, the horizontal motor rotor 317, and the horizontal circular grating measuring component 315.

[0116] As an embodiment, the horizontal circular grating measurement assembly 315 includes a horizontal circular grating reading head 3151, a horizontal circular grating, a reading head mounting seat, and a circular grating mounting seat 3152. The circular grating mounting seat is sleeved and installed on the horizontal rotation shaft. The horizontal circular grating is installed on the circular grating mounting seat. The reading head mounting seat is installed on the fourth angular contact bearing 312. The horizontal circular grating reading head 3151 is installed on the reading head mounting seat. When the horizontal rotation shaft 32 rotates, it drives the horizontal circular grating to rotate. At this time, the angle of rotation of the horizontal rotation shaft can be read by the horizontal circular grating reading head 3151. In this embodiment, to ensure the convenient disassembly and assembly of the motor circular grating assembly, the horizontal motor rotor 317 and the horizontal circular grating measurement assembly 315 are installed below the horizontal rotation shaft. The horizontal motor rotor 317 realizes the horizontal driving function through cooperation with the horizontal motor stator 316. The circular grating is installed and fixed on the circular grating mounting seat at the bottom of the horizontal rotation shaft. The coaxial accuracy of rotation is ensured through precision machining of the circular grating mounting seat 3152. To achieve high-precision horizontal angle measurement, a circular grating is also required as an angle sensor, and the horizontal circular grating reading head 3151 is used for eccentricity correction. As an embodiment, the selected horizontal circular grating can meet the angle measurement requirements of ±0.8″ and has a trigger reading function for the reference position signal to correct the influence of eccentricity.

[0117] In this embodiment, the horizontal rotation shaft is sleeved on the third angular contact bearing 311 and the fourth angular contact bearing 312 and can rotate independently relative to the third angular contact bearing 311 and the fourth angular contact bearing 312. A scanner housing 21 is installed on the pitch rotation support frame 35. While the horizontal rotation shaft rotates, it drives the scanner housing 21 to rotate through the pitch rotation support frame 35, thereby realizing horizontal rotation motion and pitch rotation motion.

[0118] As another embodiment, the horizontal rotation shaft is a hollow structure. The horizontal rotation drive mechanism 31 further includes a wire groove cover and a wire pressing cover. Among them, the wire groove cover is sleeved outside the horizontal motor rotor 317 and fits against the end of the bearing support, and is away from the scanner housing 21. The wire pressing cover covers the end of the horizontal rotation shaft and is close to the scanner housing 21 to route the electronic component lines through the wire pressing cover and the wire groove cover.

[0119] As another embodiment, the horizontal slewing drive mechanism 31 further includes a horizontal guide 318. The horizontal guide 318 is a hollow housing structure. A plurality of rolling elements are provided at the boss extending outward from the outer edge of the housing structure. The housing structure is sleeved on the horizontal slewing shaft. The rolling elements are pressed against the outside of the intermediate main support seat 313 and can rotate independently relative to the intermediate main support seat 313 under the drive of the horizontal slewing shaft. The horizontal guide 318 in this embodiment can guide the horizontal slewing shaft to rotate independently relative to the intermediate main support seat 313.

[0120] In this embodiment, to reasonably reduce the weight of components, the horizontal slewing shaft 32 adopts a hollow design; the horizontal circular grating reading head 3151, the horizontal motor stator 316, and the horizontal guide 318 are installed on the intermediate main support seat 313 to ensure that the slewing shaft rotates while the related devices are fixed; to ensure the accuracy of the horizontal slewing shaft, a combined installation scheme of a top third angular contact bearing 311 and a fourth angular contact bearing 312 is adopted, and the bearing stiffness is increased by preloading through a bearing retaining ring 314 installed on the horizontal slewing shaft.

[0121] As an embodiment, the horizontal slewing drive mechanism 31 further includes two protective covers 319. The two protective covers 319 are installed on the pitching rotation support frame 35 to protect the horizontal slewing drive mechanism 31 and the cables.

[0122] As Figure 8 shown, the horizontal circular grating reading head 3151 is installed at the bottom of the intermediate main support seat 313 to realize the function of horizontal reading angle measurement; the horizontal guide 318 is installed at the top of the horizontal slewing shaft 32 to realize the guiding function by moving along the arc-shaped groove on the intermediate main support seat 313; to realize the wiring of this tracking and scanning measurement system, it is convenient to avoid using slip rings by cable winding, improve the communication quality, and a cable winding space composed of two protective covers is designed at the top. The cables are connected to the relevant circuits at the bottom through the reserved holes of the pitching shaft mounting seat and the intermediate support seat; a wiring trough cover is installed at the bottom to protect the cables of devices such as the bottom motor circular grating; the pitching shaft mounting seat is installed at the top of the horizontal slewing shaft and is used to install the pitching angle drive measurement component. A wiring pressing cover is installed at the bottom below it for disassembly and assembly of the wiring. Both the pitching shaft mounting seat and the intermediate main support seat 313 are made of hard aluminum material, quenched and tempered, then rough machined, and precision machined after natural aging to ensure the structural stability; finally, the coaxial accuracy is ensured through a grinding process.

[0123] As can be seen, the tracking and scanning measurement system provided by the embodiment of the present invention includes a support frame 1, an installation housing 2, a two-dimensional angle measurement driving device 3, a contact laser tracker 4, a non-contact laser scanner 5, and a control device 6. The two-dimensional angle measurement driving device 3 is installed in the installation housing 2 on the support frame 1, and the tracking and scanning device 42 of the contact laser tracker 4 is arranged in the installation housing 2. During measurement, the tracking cooperation target 41 moves on the surface to be measured 200 in a measurement mode of contacting the surface to be measured 200 according to a set movement strategy. The tracking and scanning device 42 of the contact laser tracker 4 obtains the coordinate data of the surface to be measured 200 in the target coordinate system in real time by tracking the tracking cooperation target 41. The non-contact laser scanner 5 is arranged in the installation housing 2. During measurement, the laser is started to scan the surface to be measured 200 according to a specified scanning strategy, and the scanned point cloud data of the surface to be measured 200 in the target coordinate system is obtained in real time. In the tracking coordinate measurement mode, the control device 6 turns on the tracking and scanning device of the tracking cooperation target 41, and drives the tracking and scanning device 42 to track the tracking cooperation target 41 in real time by controlling the two-dimensional angle measurement driving device 3 to obtain coordinate data. In the scanning measurement mode, the non-contact laser scanner 5 is turned on, and the non-contact laser scanner 5 is driven to scan the surface to be measured 200 by controlling the two-dimensional angle measurement driving device 3 to obtain scanned point cloud data. It can be seen that this embodiment can integrate the contact laser tracker 4 and the non-contact laser scanner 5 into the same device, and can obtain point cloud data under the same coordinates. Later, three-dimensional modeling processing can be directly performed on the point cloud data, without the need for coordinate conversion as in the prior art. It can be seen that the technical solution provided by this embodiment can achieve fast, complete, and high-precision scanning and tracking measurement through one instrument, significantly improving the detection efficiency.

[0124] The embodiment of the present invention also provides a tracking and scanning measurement platform, as Figure 9 shown. The tracking and scanning measurement platform includes the tracking and scanning measurement system 100 described in any of the above embodiments and a computing and processing device 300. The computing and processing device 300 is connected to the tracking and scanning measurement system to obtain coordinate data and scanned point cloud data from the tracking and scanning measurement system. The computing and processing device can establish a three-dimensional model according to the coordinate data and the scanned point cloud data, which can significantly improve the modeling efficiency.

[0125] Only some exemplary embodiments of the present invention have been described by way of illustration above. Undoubtedly, for those of ordinary skill in the art, without departing from the spirit and scope of the present invention, the described embodiments can be modified in various different ways. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the protection scope of the claims of the present invention.

Claims

1. A tracking and scanning measurement system, characterized in that, Including: A contact laser tracker, including a tracking cooperative target and a tracking and scanning device. The tracking cooperative target is used to move on the surface to be measured in a way of contacting the surface to be measured according to a set moving strategy. The tracking and scanning device is used to obtain the coordinate data of the contact point between the tracking cooperative target and the surface to be measured in the target coordinate system in real time by tracking the tracking cooperative target; A non-contact laser scanner, which is used to scan the surface to be measured according to a set scanning strategy and obtain the scanned point cloud data of the surface to be measured in the target coordinate system in real time; A two-dimensional angle measuring and driving device, which is used to drive the contact laser tracker and the non-contact laser scanner; A control device, which is connected to the contact laser tracker, the non-contact laser scanner and the two-dimensional angle measuring and driving device, and is used to, in the tracking coordinate measurement mode, drive the tracking and scanning device to track the tracking cooperative target in real time by controlling the two-dimensional angle measuring and driving device to obtain the coordinate data, and in the scanning measurement mode, drive the non-contact laser scanner to scan the surface to be measured by controlling the two-dimensional angle measuring and driving device to obtain the scanned point cloud data; The tracking and scanning device includes: an interference ranging module, a target tracking module and a visual tracking module; The control device is used to, in the tracking coordinate measurement mode, determine the position information of the tracking cooperative target according to the captured image fed back by the visual tracking module, and send the position information of the tracking cooperative target to the two-dimensional angle measuring and driving device, so as to control the two-dimensional angle measuring and driving device to drive the interference ranging module to move according to the position information of the tracking cooperative target, so that the ranging laser emitted by the interference ranging module enters the tracking cooperative target through the target tracking module. During the movement of the tracking cooperative target, the incident ranging laser is reflected to the target tracking module after passing through the tracking cooperative target.

2. The tracking and scanning measurement system according to claim 1, wherein The target tracking module is used to measure the relative distance value between the tracking cooperative target and the present target tracking module at the current moment and the position offset value relative to the previous moment in the target coordinate system according to the received ranging laser, and send the relative distance value at the current moment and the position offset value to the control device; The control device is further used to control the two-dimensional angle measuring and driving device to drive the target tracking module to perform adaptive adjustment of the horizontal angle and the pitch angle according to the position offset value, so as to realize the tracking measurement of the tracking cooperative target by adjusting the position offset value, obtain the horizontal angle value and the pitch angle value measured by the two-dimensional angle measuring and driving device, and determine the coordinate data based on the relative distance values, the horizontal angle values and the pitch angle values at different moments obtained; 3. The tracking and scanning measurement system according to claim 2, wherein The target tracking module includes: a lens assembly and a position sensing tracker; The lens assembly is disposed on the light incident side of the position sensing tracker. The lens assembly processes the ranging laser emitted from the interference ranging module, so that a part of the processed ranging laser is incident on the tracking cooperation target and then reflected to the lens assembly, and forms an interference signal with the ranging laser after another part of the ranging laser passes through the lens assembly and is incident on the position sensing tracker; The position sensing tracker is used to measure the position of the light spot formed by the incident ranging laser, determine the position offset value of the tracking cooperation target and the present lens assembly at the current moment relative to the previous moment in the target coordinate system, and send the position offset value to the control device; The control device is used to perform adaptive adjustment of the horizontal angle and the pitch angle according to the relative distance value and the position offset value, so as to realize the tracking measurement of the tracking cooperation target by adjusting the position offset value, obtain the horizontal angle value and the pitch angle value measured by the two-dimensional angle measurement driving device, and determine the coordinate data based on the relative distance values, the horizontal angle values and the pitch angle values at different moments obtained; 4. The tracking and scanning measurement system according to claim 3, wherein The lens assembly includes: a first fiber collimator, a beam splitter and a collimator group; Wherein, the ranging laser emitted by the interference ranging module is focused into a parallel light signal by the first fiber collimator and then incident on the beam splitter. A part of the ranging laser of the parallel light signal passes through the beam splitter and is incident on the tracking cooperation target and then reflected into the beam splitter, and forms an interference light signal with another part of the ranging laser passing through the beam splitter and is incident on the position sensing tracker; The collimator group is disposed between the first fiber collimator and the beam splitter, and the collimator group is used to perform beam expansion processing on the parallel light signal emitted by the first fiber collimator and then incident on the beam splitter.

5. The tracking and scanning measurement system according to claim 4, wherein The interference ranging module includes: a helium-neon laser assembly, a second fiber collimator, a beam splitter, a fiber mirror and a detector; Wherein, the second fiber collimator is disposed on the light incident side of the helium-neon laser assembly, the beam splitter is disposed on the light incident side of the second fiber collimator, and the fiber mirror and the detector are respectively disposed on the light incident side of the beam splitter; The laser signal emitted by the helium-neon laser assembly is focused into a parallel light signal by the second fiber collimator and then incident on the beam splitter. A part of the ranging laser is incident on the fiber mirror, and another part passes through the beam splitter and forms an interference signal with the ranging laser reflected by the fiber mirror and incident on the beam splitter. A part of the ranging laser is incident on the first fiber collimator, and another part of the ranging laser is incident on the detector; The control device is used to control the helium-neon laser assembly to be turned on or off, and control the helium-neon laser assembly to emit a laser signal through the electrical signal fed back by detecting the ranging laser by the detector.

6. The tracking and scanning measurement system according to claim 5, characterized in that, The helium-neon laser assembly includes: a helium-neon laser, a switch circuit, a heating wire and a temperature sensor; The heating wire is wound around the outer side of the helium-neon laser and is electrically connected to the switch circuit. The temperature sensor is attached to the outer side of the helium-neon laser to measure the temperature of the helium-neon laser in real time, and send the temperature measurement result to the control device as a temperature electrical signal. The control device is used to control the helium-neon laser to emit a laser signal. During the emission of the laser signal, it determines whether to heat the helium-neon laser by controlling the switch circuit to use the heating wire according to the electrical signal fed back by the detector and the temperature electrical signal sent by the temperature sensor, so as to maintain the temperature of the helium-neon laser within a set range.

7. The tracking and scanning measurement system according to any one of claims 4-6, characterized in that, The non-contact laser scanner includes: a scanning vision module and a swept-frequency absolute non-contact ranging module. The scanning vision module is used to photograph the area to be measured in a panoramic manner and send the photographed area to be measured to the control device. The control device is used to control the scanning vision module and the swept-frequency absolute non-contact ranging module to perform scanning path planning on the area to be measured to obtain a scanning path planning strategy in the scanning measurement mode, and send the scanning path planning strategy to the swept-frequency absolute non-contact ranging module. The swept-frequency absolute non-contact ranging module is used to measure the absolute distance value between the surface to be measured and the swept-frequency absolute non-contact ranging module during the scanning process, and send the absolute distance value to the control device. The control device is also used to control the two-dimensional angle measurement driving device to drive the scanning vision module to scan the area to be measured according to the scanning path planning strategy based on the absolute distance value, so as to perform light energy convergence through zooming to adapt to scanning at different distances.

8. The tracking and scanning measurement system according to claim 7, wherein The swept-frequency absolute non-contact ranging module includes an external cavity resonant laser, a measurement interferometer, a first coupler, an auxiliary interferometer, a third fiber collimator, and a ranging signal processing unit. The first coupler is placed on the light output side of the external cavity resonant laser. One light output side of the first coupler is provided with the measurement interferometer, and the other light output side is provided with the auxiliary interferometer. The measurement interferometer is electrically connected to the ranging signal processing unit. The light output side of the measurement interferometer is provided with the third fiber collimator, and the light output side of the third fiber collimator is provided with the swept-frequency absolute non-contact ranging module. The ranging signal processing unit is used to control the external cavity resonant laser to emit a laser signal, so that the laser signal is divided into two paths after being processed by the first coupler. One path of the optical signal is incident into the measurement interferometer, processed by the measurement interferometer, and then emitted to the third fiber collimator for focusing processing and then incident into the swept-frequency absolute non-contact ranging module. The ranging signal processing unit measures the optical interference of the optical signal fed back by the swept-frequency absolute non-contact ranging module received, and sends the processed measurement optical interference signal to the ranging signal processing unit. The other path of the optical signal enters the auxiliary interferometer for clock interference processing, and then the processed clock optical interference signal is incident into the ranging signal processing unit. The ranging signal processing unit is further configured to determine the absolute distance value according to the measurement optical interference signal and the clock optical interference signal, so as to adjust the frequency of the laser signal emitted by the external cavity resonant laser according to the absolute distance value.

9. The tracking and scanning measurement system according to claim 8, characterized in that, The measurement interferometer includes a first balanced detector, a second coupler, a first 3dB coupler, and a circulator; The light input port of the second coupler is disposed at the light output port of the first coupler. The first light output port of the second coupler is disposed at the first light input port of the first 3dB coupler. The second light output port of the second coupler is disposed at the first light input port of the circulator. The first light output port of the circulator is aligned with the third fiber collimator. The second light input port of the circulator receives the laser signal emitted by the third fiber collimator. The second light output port of the circulator is disposed at the second light input port of the 3dB coupler. The light output port of the first 3dB coupler is disposed at the first balanced detector. The first balanced detector is electrically connected to the ranging signal processing unit to send the measurement optical interference signal to the ranging signal processing unit.

10. The tracking and scanning measurement system according to claim 8, wherein The auxiliary interferometer includes a third coupler, a second 3dB coupler, a second balanced detector, and an optical interferometer; The light input port of the third coupler is disposed at the first light output port of the first coupler. The light output port of the third coupler is disposed at the light input port of the second 3dB coupler through the optical interferometer. The light output port of the second 3dB coupler is disposed at the light input port of the second balanced detector. The second balanced detector is electrically connected to the ranging signal processing unit to send the clock optical interference signal to the ranging signal processing unit.

11. The tracking and scanning measurement system according to claim 8, characterized in that, The tracking and scanning measurement system further includes a thermostat, and the auxiliary interferometer is installed in the thermostat for maintaining the temperature of the auxiliary interferometer; The thermostat includes an internal optical fiber installation box, an optical fiber connection seat, an internal insulation box, an internal temperature control board, an external metal box, an external temperature control board, an outer thermal insulation cover, and a bottom heat dissipation connector; the internal optical fiber installation box is internally provided with an optical fiber connection seat for connecting optical fibers and an optical fiber winding member for winding optical fibers. The bottom of the internal insulation box is provided with an installation hole for placing the internal temperature control board. The bottom of the external metal box is provided with an installation hole for placing the external temperature control board; The auxiliary interferometer is placed in the internal optical fiber installation box. The internal optical fiber installation box is disposed in the internal insulation box. The installation hole at the bottom of the internal insulation box is installed with the internal temperature control board and is disposed in the external metal box. The external metal box is installed in the outer thermal insulation cover. The installation hole at the bottom of the outer thermal insulation box is installed with the external temperature control board. The bottom heat dissipation connector is installed at the bottom of the outer thermal insulation cover and is used to contact the external temperature control board, so as to guide the heat in the internal optical fiber installation box to the bottom heat dissipation connector for heat dissipation by means of the external metal box using the internal temperature control board and the external temperature control board; The outer thermal insulation cover is covered on the inner optical fiber installation box, and the bottom heat dissipation connecting piece is pasted on the outer end face of the outer thermal insulation cover and sealed in the inner optical fiber installation box together with the outer thermal insulation cover.

12. The tracking and scanning measurement system according to claim 7, wherein The scanning vision module includes a fourth optical fiber collimator, a zoom lens group and a zoom lens; The zoom lens, the zoom lens group and the fourth optical fiber collimator are arranged in sequence according to the entry and exit of the light signal. The fourth optical fiber collimator is close to the side of the first optical fiber collimator, and the zoom lens group is installed on the two-dimensional angle measuring driving device so that the two-dimensional angle measuring driving device drives the zoom lens group to achieve zooming.

13. The tracking and scanning measurement system according to claim 7, wherein The tracking and scanning measurement system further includes: an optical fiber switch, the optical fiber switch is connected to the swept-frequency absolute non-contact ranging module and the interference ranging module, and the control device is used to enable the swept-frequency absolute non-contact ranging module and the target tracking module to be connected through the optical fiber switch after the ranging laser emitted by the interference ranging module to the tracking cooperation target is blocked and the light is cut off in the tracking coordinate measurement mode, measure the initial absolute distance value of the tracking cooperation target to the swept-frequency absolute non-contact ranging module after the light is cut off and then continued, and correct the relative distance value between the tracking cooperation target and the lens assembly of the target tracking module in the target coordinate system after the light is cut off and then continued through the absolute distance initial value.

14. The tracking and scanning measurement system according to any one of claims 2-4, characterized in that, The visual tracking module includes: a telephoto objective lens, a telephoto objective lens retaining ring, a telephoto lens group, an inner lens barrel, a relay lens, an imaging lens group, an outer lens barrel and an imaging CCD lens group; Among them, bosses for installing the telephoto lens group, the relay lens and the imaging lens group are sequentially arranged in the inner lens barrel at a specified distance; The telephoto objective lens is arranged in the telephoto objective lens retaining ring, the telephoto objective lens retaining ring is sleeved on the inner lens barrel assembly, the corresponding telephoto lens group, relay lens and imaging lens group are sequentially installed at each boss of the inner lens barrel, and the telephoto lens group is close to the telephoto objective lens retaining ring. The outer lens barrel is sleeved outside the inner lens barrel, and the imaging CCD lens group is installed at the end of the outer lens barrel away from the telephoto objective lens.

15. The tracking and scanning measurement system according to any one of claims 1-4, characterized in that, The two-dimensional angle measuring driving device includes a horizontal rotation driving mechanism, a horizontal rotation shaft, a pitch rotation driving mechanism, a pitch rotation shaft and a pitch rotation support frame; The output end of the horizontal rotation driving mechanism is connected to the horizontal rotation shaft, the execution end of the horizontal rotation shaft is installed with the pitch rotation support frame, and the input end of the horizontal rotation driving mechanism drives the horizontal rotation shaft to rotate under the control of the control device; The output end of the pitch rotation driving mechanism is installed with the pitch rotation shaft and installed on the pitch rotation support frame, and the input end of the pitch rotation driving mechanism drives the pitch rotation shaft to rotate under the control of the control device.

16. The tracking and scanning measurement system according to claim 15, wherein The pitch rotation driving mechanism includes a pitch motor rotor, a pitch motor stator, a pitch circular grating assembly, a first angular contact bearing, a second angular contact bearing, a motor mounting seat, a compression adjustment ring, a gland, a mounting cover, a limit mounting plate and a bearing preloading ring; The first angular contact bearing is installed on one side of the pitching rotation shaft. The pitching circular grating assembly is installed on the first angular contact bearing and the pitching rotation shaft for measuring the pitching rotation angle of the pitching rotation shaft. A bearing preloading ring is sleeved on the other side of the pitching rotation shaft and then connected to the second angular contact bearing. The second angular contact bearing is provided with the motor mounting seat. The motor mounting seat is provided with the pitching motor rotor. The pitching motor rotor is provided with the pitching motor stator and is sleeved on the end of the pitching rotation shaft. The gland is installed on the motor mounting seat in a manner of pressing the pitching motor stator. The motor mounting seat is installed on the pitching rotation support frame. The bearing preloading ring is sleeved on the pitching rotation shaft and presses the second angular contact bearing. The pressing and adjusting ring is sleeved on the pitching rotation shaft and presses and is arranged inside the pitching motor rotor. The limiting mounting plate is limitably arranged at the end of the pitching rotation shaft. After the two mounting covers cover the pitching motor rotor, the pitching motor stator, the pitching circular grating assembly, the first angular contact bearing, the second angular contact bearing, the motor mounting seat, the pressing and adjusting ring and the limiting mounting plate, they are installed on the pitching rotation support frame.

17. The tracking and scanning measurement system according to claim 15, wherein The horizontal slewing drive mechanism includes a third angular contact bearing, a fourth angular contact bearing, an intermediate main support seat, a bearing pressure ring, a horizontal circular grating measuring assembly, a horizontal motor stator and a horizontal motor rotor; Wherein, the horizontal rotation shaft is sleeved with the horizontal motor rotor. The horizontal motor rotor is installed inside the horizontal motor stator. At a set position of the horizontal rotation shaft, a horizontal circular grating measuring assembly for measuring the rotation angle of the horizontal rotation shaft is also installed. The horizontal circular grating measuring assembly is close to the horizontal motor rotor and is connected to the horizontal motor stator. The third angular contact bearing and the fourth angular contact bearing are sequentially sleeved on the horizontal rotation shaft in a manner of being separated by the intermediate main support seat, and are installed in the intermediate main support seat together with the horizontal circular grating measuring assembly, the horizontal motor stator and the horizontal motor rotor; the bearing pressure ring is sleeved on the horizontal rotation shaft in a manner of being close to the horizontal motor stator and pressing the third angular contact bearing. The horizontal motor stator drives the horizontal rotation shaft to rotate through the horizontal motor rotor under the control of the control device; the execution end of the horizontal rotation shaft is provided with the pitching rotation support frame.

18. The tracking and scanning measurement system according to claim 15, characterized in that It further includes: A support frame and a mounting housing installed on the support frame; The mounting housing includes a scanner housing and a regulation housing. The control device, the contact laser tracker and the non-contact laser scanner are all installed inside the scanner housing; The horizontal slewing drive mechanism is installed inside the regulation housing. The execution end of the horizontal rotation shaft is provided with the scanner housing to drive the scanner housing to perform the horizontal slewing motion.

19. The tracking and scanning measurement system according to any one of claims 1-4, characterized in that, The tracking cooperation target is a corner cube target ball.

20. A tracking and scanning measurement platform, characterized in that Including the tracking and scanning measurement system and the computing and processing device according to any one of claims 1-19, the computing and processing device is connected to the tracking and scanning measurement system to obtain coordinate data and scanned point cloud data of the surface to be measured from the tracking and scanning measurement system.

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