A semiconductor discrete device test structure

Abstract

The present invention discloses a semiconductor discrete device test structure, which belongs to the field of semiconductor test technology. It includes: a rotating test table fixed on a test stand; the rotating test table has a rotating table that can rotate forward and backward; the test piece is evenly distributed around the axis of the rotating table and positioned on the rotating table, and the contact of the test piece faces the side away from the axis of the rotating table; the swing detection table is arranged on one side of the rotating test table for detecting the test piece; the swing detection table includes a slewing support, a support shaft, a swing table, a torsion spring and an adjustment plate; wherein a lever is fixed under the rotating table, and a positioning block that cooperates with the lever is fixed under the swing table. The present invention enables the test piece and the test head to be dynamically docked through the cooperation of the rotating test table and the swing detection table, thereby realizing continuous testing of the test piece, reducing manual intervention, and improving test efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor testing, and in particular to a semiconductor discrete device testing structure. Background Art

[0002] In the semiconductor manufacturing industry, the testing of discrete devices is a key link to ensure product quality and performance. Traditional testing methods usually rely on manual operation, placing the test pieces one by one on the test bench, and then manually or mechanically contacting the test head with the test piece to complete the testing process. This docking method has a discontinuous testing process, low test efficiency, and test accuracy affected by human factors. Summary of the invention

[0003] In view of the above-mentioned technical deficiencies, the present invention provides a semiconductor discrete device test structure.

[0004] The present invention adopts the following technical solution: a semiconductor discrete device test structure, comprising: Stand; A rotating test table is fixed on the test stand; the rotating test table has a rotating table that can rotate forward and backward; the test pieces are evenly distributed around the axis of the rotating table and positioned on the rotating table, and the contact points of the test pieces face the side away from the axis of the rotating table; A swing test table, arranged on one side of the rotating test table, for testing the test piece; The swing detection platform comprises: A slewing support, fixed on the frame; A support shaft, the lower end of which is rotatably mounted on the slewing support center; A swing table, fixed to the upper end of the support shaft; A torsion spring is mounted on the slewing support; the upper and lower ends of the torsion spring are respectively fixedly connected to the slewing support and the swing table; An adjustment plate is mounted on the swing table; a test head is positioned on a side of the adjustment plate close to the test table; Wherein, a lever is fixed under the rotating table, and a positioning block cooperating with the lever is fixed under the swinging table; When the rotating platform rotates forward, the lever pushes the positioning block and causes the swing platform to reverse; until the lever passes over the positioning block, the swing platform is reset under the action of the torsion spring; When the rotating table reverses, the lever pushes the positioning block and causes the swing table to rotate forward, until the lever fits the positioning block, at which time the contact of the test piece on the rotating table is in contact with the test head on the adjustment plate.

[0005] It is further provided that: the rotary test bench comprises a rotary motor vertically fixed on the stand; and the rotary table is fixed on the output shaft at the upper end of the rotary motor.

[0006] The rotating table is provided with a plurality of workstations evenly distributed along the axis of the rotating table, and the test piece is positioned on the workstations; the rotary motor drives the rotating table to rotate forwardly by two workstations and reversely by one workstation to work alternately.

[0007] The positioning block is in an "L" shape; The lever is a straight rod, the number of which is equal to the number of workstations on the rotating table, and the lever and the corresponding workstation are located on the same diameter on the rotating table; When the rotating platform is reversed to a point where a side of the shifting rod is in contact with the positioning block, the contact surface between the shifting rod and the positioning block passes through the center of the swinging platform and the rotating platform.

[0008] A flange is fixed on the support shaft, the center of the swing platform is sleeved on the upper end of the support shaft and supported on the flange, and the flange is fixedly connected to the swing platform.

[0009] The swing platform is in a fan-shaped structure, the arc edge of the swing platform is close to the rotating platform, and a counterweight is fixed on the side of the swing platform away from the rotating platform.

[0010] The adjustment plate is fan-shaped, the center of the adjustment plate is sleeved on the upper end of the support shaft, and the upper end of the support shaft passes through the adjustment plate; the arc edge of the adjustment plate is close to the rotating table; A pressure cover is fixed to the upper end of the support shaft by bolts; the periphery of the pressure cover abuts against the adjustment plate to press the adjustment plate onto the swing table.

[0011] A plurality of positioning grooves arranged around the center of the adjusting plate are provided on the arc edge of the adjusting plate, and the test head is positioned in the positioning grooves.

[0012] The adjustment plate is provided with alignment grooves corresponding to the positioning grooves one by one; the alignment grooves and the corresponding positioning grooves are located on the same diameter of the adjustment plate, and the alignment grooves penetrate the adjustment plate in the thickness direction of the adjustment plate; An alignment line matched with the alignment groove is provided on the swing platform, and an extension line of the alignment line passes through the center of the swing platform.

[0013] The beneficial effects of the present invention are: Through the cooperation of the rotating test table and the swing test table, the test piece and the test head can be dynamically docked, realizing the continuous testing of the test piece, reducing manual intervention and improving the testing efficiency; The adjustment plate structure is used to quickly switch different test heads to meet various test requirements. The setting of the alignment slots and alignment lines makes the positioning of the adjustment plate more accurate and improves the position accuracy of the test head. By setting the elastic seat, it is ensured that the test piece and the test head can be in good contact, thereby improving the accuracy and stability of the test. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 The present invention is a three-dimensional diagram of a semiconductor discrete device testing structure.

[0016] Figure 2 The figure is a front view of a semiconductor discrete device test structure of the present invention.

[0017] Figure 3 The figure is a top view of a semiconductor discrete device test structure of the present invention.

[0018] Figure 4 An exploded view of a semiconductor discrete device test structure of the present invention.

[0019] Figure 5 It is a bottom view of the rotating table and the swing table in the present invention.

[0020] Figure 6 The present invention is a top view of a semiconductor discrete device test structure during transposition.

[0021] Figure 7 It is a three-dimensional diagram of the swing detection platform in the present invention.

[0022] Figure 8 It is a three-dimensional diagram of the elastic seat in the present invention.

[0023] Description of reference numerals: 1. Stand; 2. Rotating test bench; 21. Rotating table; 22. Lever; 23. Rotating motor; 3. Test piece; 4. Swing test bench; 41. Slewing support; 42, support shaft; 421, flange; 422, gland; 43. Swing table; 431. Positioning block; 432. Counterweight block; 433. Alignment line; 44. Torsion spring; 45, adjusting plate; 451, positioning slot; 452, alignment slot; 5. Test head; 6. Elastic seat; 61. Mounting slot; 62. Spring rod; 63. Limit bolt. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] Embodiment 1: like Figure 1 As shown, the present invention provides a semiconductor discrete device test structure, including a rotating test table 2 and a swing test table 4 fixed on a test stand 1. During operation, a test piece 3 is positioned on the rotating test table 2, and a test head 5 is positioned on the swing test table 4; through the cooperation between the rotating test table 2 and the swing test table 4, the test piece 3 is docked with the test head 5, and the test of the test piece 3 is completed.

[0026] Combination Figures 1 to 4 As shown, the rotary test table 2 includes a vertically arranged rotary motor 23, and the bottom end of the rotary motor 23 is fixed to the stand 1 by bolts. The center of the rotary table 21 is sleeved on the output shaft of the upper end of the rotary motor 23, and the rotary table 21 is fixedly connected to the output shaft of the rotary motor 23 by bolts. The rotary table 21 can be driven to rotate forward and reverse by the rotary motor 23. The rotary table 21 is provided with a plurality of workstations evenly distributed along the axis of the rotary table 21, and a fixture is fixed to the workstation by bolts, and the test piece 3 is positioned on the fixture. The test piece 3 is arranged to overlap the diameter of the rotary table 21, and the contact of the test piece 3 faces the side away from the axis of the rotary table 21 and exceeds the periphery of the rotary table 21.

[0027] Recombination Figure 7 As shown, the swing test platform 4 includes a slewing support 41 fixed to the frame 1 by bolts, a support shaft 42 rotatably mounted at the center of the slewing support 41, and a flange 421 welded to the middle of the support shaft 42. The swing platform 43 is a fan-shaped structure, the center of the swing platform 43 has a hole and is mounted on the support shaft 42, and the flange 421 is against the swing platform 43 and is fixedly connected to the swing platform 43 by bolts. The arc edge of the swing platform 43 is close to the rotating platform 21, and a counterweight 432 is fixed on the side of the swing platform 43 away from the rotating platform 21. The torsion spring 44 is mounted on the slewing support 41, and the upper and lower ends of the torsion spring 44 are respectively fixedly connected to the slewing support 41 and the flange 421. Under the action of the torsion spring 44, the swing platform 43 can be reset to a certain range of angle positions. The adjustment plate 45 is mounted on the swing platform 43, and the test head 5 is positioned on the side of the adjustment plate 45 close to the test platform 2.

[0028] Combined with Figure 5, in order to achieve the movement coordination between the rotating test platform 2 and the swing test platform 4, a lever 22 is fixed under the rotating platform 21, and a positioning block 431 is fixed under the swing platform 43; The lever 22 is a straight rod, fixed to the lower side of the swing table 43 by bolts; the number of the levers 22 is the same as the workstations on the rotating table 21, and they are opposite to each other up and down, that is, the levers 22 and the corresponding workstations are located on the same diameter on the rotating table 21; The positioning block 431 is in an “L” shape and is fixed to the center line of the lower side surface of the swing table 43 by bolts; the “L”-shaped corner of the positioning block 431 cooperates with the lever 22 .

[0029] Working process: Combination Figures 1 to 6 As shown, the test piece 3 is positioned at a station on the rotating table 21 by a fixture, and the test head 5 is positioned on the adjustment plate 45; the rotary motor 23 drives the rotating table 21 to rotate forward by two stations and reverse by one station alternately; like Figure 3 As shown in the figure, after the test piece 3 on the first station is tested, the rotating table 21 rotates forward to the station. During this process, the swing table 43 gradually reverses and returns to the station under the action of the torsion spring 44. Figure 6 As the rotating table 21 continues to rotate, the lever 22 under the second station pushes the positioning block 431 and causes the swing table 43 to reverse until the lever 22 under the second station passes over the positioning block 431, and then the swing table 43 is rotated forward again under the action of the torsion spring 44 to reset to Figure 2 The location shown; Then, the rotating table 21 reverses one station. During this process, the lever 22 at the second station pushes the positioning block 431 and causes the swing table 43 to rotate forward, and the contact point of the test piece 3 gradually contacts the test head 5 on the adjustment plate 45 until the lever 22 at the second station fits with the positioning block 431. At this time, the fitting surface of the lever 22 at the second station and the positioning block 431 passes through the center of the swing table 43 and the rotating table 21 and returns to the center of the swing table 43 and the rotating table 21. Figure 3 As shown, the contact of the test piece 3 on the second station is brought into contact with the test head 5 on the adjustment plate 45, and the test is started; It's like the same old story over and over again.

[0030] Embodiment 2: Based on the above embodiment 1, Figures 1 to 4 ,as well as Figure 7 As shown, in order to facilitate the rapid switching of different test heads 5, this embodiment provides an adjustment plate 45 structure.

[0031] The adjustment plate 45 is fan-shaped and slightly smaller than the swing table 43. The adjustment plate 45 has a central opening and is mounted on the upper end of the support shaft 42. A plurality of positioning grooves 451 are provided on the arc edge of the adjustment plate 45. The positioning grooves 451 are arranged around the center of the adjustment plate 45. The test head 5 is positioned in the positioning grooves 451 through the elastic seat 6. The upper end of the support shaft 42 passes through the adjustment plate 45 and is fixed with a pressure cover 422 by bolts. The periphery of the pressure cover 422 is pressed on the adjustment plate 45; in this way, by loosening the pressure cover 422, the position of the adjustment plate 45 can be changed by rotating around the support shaft 42, so that the required test head 5 can be moved to the center line of the swing table 43; then, the pressure cover 422 is tightened again to press the adjustment plate 45 on the swing table 43.

[0032] In order to facilitate confirmation of the position of the adjustment plate 45, a plurality of alignment grooves 452 are provided on the adjustment plate 45. The alignment grooves 452 correspond to the positioning grooves 451 one by one and are located on the same diameter on the adjustment plate 45. The alignment grooves 452 penetrate the adjustment plate 45 in the thickness direction of the adjustment plate 45. An alignment line 433 matching the alignment grooves 452 is provided on the swing table 43, and the extension line of the alignment line 433 passes through the center of the swing table 43. When the adjustment plate 45 is rotated, when the corresponding alignment grooves 452 coincide with the alignment lines 433 on the swing table 43, it can be confirmed that the corresponding test head 5 has reached the corresponding position.

[0033] Embodiment three: Based on the above embodiment 2, combined with Figure 7 , Figure 8 As shown, in order to ensure good contact between the test piece 3 and the test head 5, this embodiment provides an elastic seat 6.

[0034] The elastic seat 6 is fixed to the positioning groove 451 on the adjustment plate 45 by bolts, and the diameter of the elastic seat 6 coincides with that of the adjustment plate 45. The elastic seat 6 is provided with a mounting groove 61 near the rotary test table 2, and the test head 5 is inserted into the mounting groove 61. A spring rod 62 is fixed at the bottom of the mounting groove 61, and the spring rod 62 supports the test head 5 outward. Two limiting bolts 63 are installed on the elastic seat 6 at the outer end of the mounting groove 61, and the cap of the limiting bolt 63 is pressed on the outer end of the test head 5 to prevent the test head 5 from being separated from the elastic seat 6.

[0035] At work, Figure 3 As shown, the test piece 3 is pressed against one side of the test head 5 , so that the test head 5 is slightly pressed against the spring rod 62 ; thus, under the action of the spring rod 62 , the test head 5 and the test piece 3 can maintain good contact.

[0036] It can be seen from the above embodiments that the present invention realizes continuous testing of the test piece by the cooperation of rotation and swing; realizes rapid switching of different test heads by adding an adjustment plate structure; and ensures good contact between the test piece and the test head by adding an elastic seat structure. The present invention not only improves the test efficiency, but also improves the accuracy and stability of the test, and provides strong technical support for the test of semiconductor discrete devices.

[0037] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A semiconductor discrete device test structure, It is characterized in that include: Stand (1); A rotating test table (2) is fixed on the test stand (1); the rotating test table (2) has a rotating table (21) that can rotate forwards and backwards; the test pieces (3) are evenly distributed around the axis of the rotating table (21) and positioned on the rotating table (21), with the contact points of the test pieces (3) facing the side away from the axis of the rotating table (21); A swing test table (4), arranged on one side of the rotary test table (2), and used for testing the test piece (3); The swing detection platform (4) comprises: A slewing support (41) fixed on the stand (1); A support shaft (42), the lower end of which is rotatably mounted at the center of the slewing support (41); A swing table (43) fixed to the upper end of the support shaft (42); A torsion spring (44) is sleeved on the slewing support (41); the upper and lower ends of the torsion spring (44) are respectively fixedly connected to the slewing support (41) and the swing table (43); An adjustment plate (45) is mounted on the swing table (43); a test head (5) is positioned on a side of the adjustment plate (45) close to the test table (2); Wherein, a lever (22) is fixed under the rotating platform (21), and a positioning block (431) cooperating with the lever (22) is fixed under the swinging platform (43); When the rotating platform (21) rotates forward, the lever (22) pushes the positioning block (431) and causes the swing platform (43) to rotate in the reverse direction; until the lever (22) passes over the positioning block (431), the swing platform (43) is reset under the action of the torsion spring (44); When the rotating table (21) rotates in reverse, the lever (22) pushes the positioning block (431) and causes the swing table (43) to rotate forward; until the lever (22) fits the positioning block (431), at which time the contact of the test piece (3) on the rotating table (21) and the test head (5) on the adjustment plate (45) are in contact and conductive.

2. A semiconductor discrete device test structure according to claim 1, characterized in that: The rotary test bench (2) comprises a rotary motor (23) vertically fixed on the bench frame (1); the rotary table (21) is fixed on an output shaft at the upper end of the rotary motor (23).

3. A semiconductor discrete device test structure according to claim 2, characterized in that: The rotating table (21) is provided with a plurality of workstations evenly distributed along the axis of the rotating table (21), and the test piece (3) is positioned at the workstations; the rotary motor (23) drives the rotating table (21) to rotate forward at two workstations and reverse at one workstation in an alternating manner.

4. A semiconductor discrete device test structure according to claim 3, characterized in that: The positioning block (431) is in an "L" shape; The shifting rod (22) is a straight rod, the number of the shifting rods (22) is equal to the number of workstations on the rotating table (21), and the shifting rods (22) and the corresponding workstations are located on the same diameter on the rotating table (21); When the rotating platform (21) is reversed to a position where a side edge of a lever (22) is in contact with a positioning block (431), the contact surface between the lever (22) and the positioning block (431) passes through the center of the swing platform (43) and the rotating platform (21).

5. The semiconductor discrete device test structure according to claim 1, characterized in that: A flange (421) is fixed on the support shaft (42), the center of the swing table (43) is sleeved on the upper end of the support shaft (42) and supported on the flange (421), and the flange (421) is fixedly connected to the swing table (43).

6. The semiconductor discrete device test structure according to claim 5, characterized in that: The swing table (43) is in a fan-shaped structure, the arc edge of the swing table (43) is close to the rotating table (21), and a counterweight (432) is fixed to the side of the swing table (43) away from the rotating table (21).

7. The semiconductor discrete device test structure according to claim 5, characterized in that: The adjusting plate (45) is in a fan-shaped structure, the center of the adjusting plate (45) is sleeved on the upper end of the supporting shaft (42), and the upper end of the supporting shaft (42) passes through the adjusting plate (45); the arc edge of the adjusting plate (45) is close to the rotating table (21); A pressure cover (422) is fixed to the upper end of the support shaft (42) by means of bolts; the periphery of the pressure cover (422) abuts against the adjustment plate (45) to press the adjustment plate (45) onto the swing table (43).

8. The semiconductor discrete device test structure according to claim 7, characterized in that: A plurality of positioning grooves (451) arranged around the center of the adjustment plate (45) are provided on the circular arc edge of the adjustment plate (45), and the test head (5) is positioned in the positioning grooves (451).

9. A semiconductor discrete device test structure according to claim 8, characterized in that: The adjustment plate (45) is provided with alignment grooves (452) corresponding to the positioning grooves (451) one by one; the alignment grooves (452) and the corresponding positioning grooves (451) are located on the same diameter on the adjustment plate (45), and the alignment grooves (452) penetrate the adjustment plate (45) in the thickness direction of the adjustment plate (45); An alignment line (433) that cooperates with the alignment groove (452) is provided on the swing platform (43), and an extension line of the alignment line (433) passes through the center of the swing platform (43).

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