Array emission multi-beam forming integrated chip and forming method

Abstract

The invention discloses an array emission multi-beam forming integrated chip and a forming method, belongs to the technical field of phased arrays, and solves the problems that a large-scale array and a simultaneous multi-beam forming chip are multiple in control channels, large in loss, complex in network structure, sensitive to the environment and complex in control. Multi-wavelength optical signals are filtered and shunted by adopting the elliptical micro-ring array, the on-off of each path of signals is controlled through the optical switch in the adjustable optical delay line, and the delay amount of the delay line is adjusted according to the actual demand of the phased array system, so that the optical signals of each path can be subjected to independent delay control; on-chip synthesis of a plurality of transmitting beams can be realized at the same time, the requirement on the agility capability of the modulated optical carrier laser is low, and compared with the existing full delay line path or full micro-ring path, the multi-beam integrated circuit has more flexible routing control and multi-beam realization, and the integration level of the whole chip is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of phased arrays and relates to an array transmission multi-beam forming integrated chip and a forming method. Background Art

[0002] In phased arrays, optically controlled beamforming technology is one of the important technical directions that can overcome the limitations of traditional beamforming technology and realize wide bandwidth and angular scanning of array electronic systems. It is expected to solve technical problems such as large instantaneous bandwidth, high sensitivity, multi-beamforming, and miniaturization of future equipment. It has the ability to significantly improve the detection accuracy, interception probability, anti-interference and other key performance of equipment, and promote changes in the technical system of electronic systems.

[0003] The optical beamforming network has gone through three stages: fiber delay line engineering, fiber delay line system integration, and photonic integrated delay line. The overall development trend is to further improve performance while constantly trying to make breakthroughs in volume, weight, and power consumption. The optical delay array system built with discrete devices has the disadvantages of large volume and weight, high cost, poor stability, and low delay accuracy. Chip integration technology is an effective way to solve the above problems. Since the cutting accuracy of optical fiber is generally 0.1-0.2mm, and the processing accuracy of optical waveguides in optical chips can reach the nanometer level, it has a higher delay accuracy; at the same time, the optical fiber will undergo phase change jitter under external vibration conditions, resulting in poor system stability. Therefore, chip integration technology can greatly improve the stability of optical beamforming.

[0004] There have been related studies at home and abroad that use photon integration technology to realize large-bandwidth, large-delay optical beamforming networks. These delay methods have all achieved chip integration and have their own strengths. For example, the invention patent with application publication number CN113067635A discloses a transceiver integrated phased array beamforming device based on an integrated optical delay chip. It uses the advantages of the integrated optical delay chip that can accurately control the delay amount, and combines the system architecture of the transmission and reception sharing a set of delay networks to overcome the problems of insufficient delay accuracy, non-uniform dispersion coefficient, and precise control of laser wavelength in the existing length delay and dispersion delay systems of microwave photon beamforming. However, photon integrated delay still faces problems such as large loss, complex network structure, environmental sensitivity, and complex control. In particular, in large-scale arrays and simultaneous multi-beamforming chips, there is a contradiction between a large number of control channels and small-size modules. Therefore, it is particularly important to further optimize the design of array-transmitting multi-beamforming integrated chips. Summary of the invention

[0005] The technical solution of the present invention is used to solve the problems of large-scale arrays and simultaneous multi-beam forming chips with multiple control channels, large losses, complex network structures, environmental sensitivity and complex control.

[0006] The present invention solves the above technical problems through the following technical solutions:

[0007] An array-transmitting multi-beam forming integrated chip comprises a first elliptical micro-ring array, an optical coupler array, an adjustable optical delay line array, a transmission waveguide, a second elliptical micro-ring array and a photodetector array which are sequentially connected along the incident direction of an optical carrier signal;

[0008] The first elliptical micro-ring array includes M first elliptical micro-rings, the input ends of the M first elliptical micro-rings are connected together as the input end of the first elliptical micro-ring array, and the multi-wavelength optical carrier signal is received and filtered to generate M optical modulation signals;

[0009] The optical coupler array includes M equal power dividers, the input ends of the M equal power dividers are respectively connected to the M output ends of the first elliptical micro-ring array, and power division coupling is performed on each optical modulation signal to evenly divide the M optical modulation signals into M×N optical modulation signals;

[0010] The adjustable optical delay line array comprises M×N adjustable delay lines, the input ends of the M×N adjustable delay lines are respectively connected to the M×N output ends of the M equal power dividers, and the optical modulation signal on each adjustable delay line is independently delayed and controlled;

[0011] The input ends of the M×N transmission waveguides are respectively connected to the output ends of the adjustable optical delay line array;

[0012] The second elliptical microring array includes M×N second elliptical microrings, the photodetector array includes N photodetectors, the input ends of the M×N second elliptical microrings are respectively connected to the output ends of the transmission waveguide, the output ends of the M second elliptical microrings with different central wavelengths are connected together and then connected to the input end of the photodetector, and the photodetector array outputs N independent transmission beams, wherein M represents the number of beamformations and N represents the number of antenna units of the beamforming array.

[0013] Furthermore, the multi-wavelength optical carrier signal includes a wavelength of λ i The optical signal, λ i ∈[1,M], the central wavelengths of the M first elliptical micro-rings are λ i .

[0014] Furthermore, the first elliptical micro-ring and the second elliptical micro-ring are both high-order elliptical micro-ring filters.

[0015] Furthermore, the equal power divider is a plurality of cascaded 1×2 optical couplers, and the number of the 1×2 optical couplers is The number of output channels of the power divider is

[0016] Furthermore, the adjustable delay line includes an optical switch and a multi-bit controllable delay line; the optical switch and the multi-bit controllable delay line are cascaded.

[0017] The present invention also provides an array transmission multi-beam forming method, comprising the following steps:

[0018] S1, using a first elliptical micro-ring array to receive a multi-wavelength optical carrier signal and then filtering it to generate M optical modulation signals;

[0019] S2, using an optical coupler array to perform power division coupling on each optical modulation signal, and dividing the M optical modulation signals into M×N optical modulation signals;

[0020] S3, using an adjustable optical delay line array to independently control the delay of M×N optical modulation signals;

[0021] S4, using a transmission waveguide to transmit the delayed M×N optical modulated signals to the second elliptical micro-ring array;

[0022] S5. Utilize the second elliptical micro-ring array to filter and combine the M optical modulation signals with different central wavelengths and input them into the photodetector, and use the photodetector array to output N independent transmission beams.

[0023] The advantages of the present invention are:

[0024] The present invention adopts an elliptical micro-ring array to filter and branch multi-wavelength optical signals, controls the on and off of each signal through an optical switch in an adjustable optical delay line, and adjusts the delay amount of the delay line according to the actual needs of the phased array system. It can independently control the delay of the optical signal of each path, and can simultaneously realize on-chip synthesis of multiple transmission beams. It has low requirements on the agility of the modulated optical carrier laser. Compared with the existing full delay line path or full micro-ring path, it has more flexible routing control and multi-beam realization, thereby improving the integration of the overall chip.

[0025] The present invention integrates multiple array channels on a single chip based on on-chip integration technology, reduces the influence of ambient temperature and vibration on the phase between channels, and ensures the delay consistency between array channels; the present invention adopts micromachining technology to realize the multiplexing and demultiplexing of modulated multi-wavelength optical signals on the integrated chip, integrates the adjustable optical delay line array on a single chip, allows each wavelength of light-carrying microwave signal to be independently subjected to two-dimensional optical delay, and the multi-wavelength laser after delay is subjected to photoelectric conversion on the photodetector, and simultaneously forms multiple independent transmission beams, supports the transmission beam forming and scanning of the phased array system, and has higher delay accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of an array transmission multi-beam forming integrated chip according to the first embodiment of the present invention. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in combination with the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] The technical solution of the present invention is further described below in conjunction with the accompanying drawings and specific embodiments:

[0029] Embodiment 1

[0030] like Figure 1 As shown, specifically, an array-transmitting multi-beam forming integrated chip is disclosed, comprising a first elliptical microring array, an optical coupler array, an adjustable optical delay line array, a transmission waveguide, a second elliptical microring array and a photodetector array sequentially connected along the incident direction of an optical carrier signal;

[0031] The first elliptical micro-ring array includes M first elliptical micro-rings, the input ends of the M first elliptical micro-rings are connected together as the input end of the first elliptical micro-ring array, and the multi-wavelength optical carrier signal is received and filtered to generate M optical modulation signals;

[0032] In this embodiment, the number of antenna units of the phased array system beam forming array is set to N, corresponding to the simultaneous formation of M transmission beams, and the multi-wavelength optical carrier signal includes a wavelength of λ i The optical signal, λ i ∈[1,M], the multi-wavelength optical carrier signal is input into the input end of the first elliptical microring array, and the central wavelength of each elliptical microring corresponds to the wavelength λ of the multi-wavelength optical carrier signal 1 ~λ M , used to filter out the corresponding wavelength λ i The optical modulation signal.

[0033] In this embodiment, the first elliptical microring is a high-order elliptical microring filter. To ensure that the optical filter has a large isolation and a free spectrum range, according to the beamforming bandwidth requirements of the phased array system, for each wavelength of the multi-wavelength optical carrier signal, an elliptical microring corresponding to the center wavelength is selected for precise filtering. In this embodiment, a high-order elliptical microring filter is selected to achieve broadband flat filtering characteristics, and the wavelength of the elliptical microring is calibrated using electrodes, and optical modulation signals of M different wavelengths are filtered out through the first elliptical microring array.

[0034] The optical coupler array includes M equal power dividers, the input ends of the M equal power dividers are respectively connected to the M output ends of the first elliptical micro-ring array, and power division coupling is performed on each optical modulation signal to evenly divide the M optical modulation signals into M×N optical modulation signals;

[0035] Furthermore, the equal power divider is a plurality of cascaded 1×2 optical couplers, and the number of the 1×2 optical couplers is The number of output channels of the power divider is

[0036] In this embodiment, M optical modulated signals of different wavelengths output by the first elliptical microring array are input into the optical coupler array for coupling power division, and each optical modulated signal is evenly divided into at least N optical modulated signals by an equal power divider, corresponding to the number of antenna units of the beamforming array of the phased array system.

[0037] In this embodiment, each optical modulated signal of different wavelength filtered by the first elliptical microring is evenly divided into N paths through multiple cascaded 1×2 optical couplers. Since M and N do not completely satisfy the power relationship of 2, the number of output channels of the cascaded 1×2 optical coupler should be greater than the number N of antenna units.

[0038] In this embodiment, when the number of antenna units N does not satisfy the power of 2, the number of channels corresponding to the higher power is selected to divide the optical modulated signal into the corresponding number of optical paths. Taking the number of antenna units N as 30 as an example, 31 1×2 optical couplers are cascaded to form a 1-to-32 equal power divider, and the wavelength is λ i The optical modulated signal is evenly divided into 32 optical modulated signals, and the redundant output channels do not need to be used.

[0039] The adjustable optical delay line array includes M×N adjustable delay lines; the input ends of the M×N adjustable delay lines are respectively connected to the M×N output ends of the M equal power dividers, and the optical modulation signal on each adjustable delay line is independently delayed and controlled;

[0040] Furthermore, the adjustable delay line includes an optical switch and a multi-bit controllable delay line; the optical switch and the multi-bit controllable delay line are cascaded.

[0041] In this embodiment, the wavelength is λ iThe optical modulated signal is branched into N optical signals through an optical coupler array and input into the N adjustable delay lines. Each adjustable delay line is cascaded with a multi-bit controllable delay line through an optical switch. The optical switch controls the on and off of each signal to select the signal according to the needs of the system. The multi-bit controllable delay line can delay the signal to different degrees according to the needs of the system. The optical signal on each path can be independently delayed to meet the independent switching and shaping requirements of the beam, and further realize the adjustment of the beam properties.

[0042] The input ends of the M×N transmission waveguides are respectively connected to the output ends of the adjustable optical delay line array;

[0043] In this embodiment, in order to ensure the independent propagation of each optical signal, the optical signals outputted by the M×N adjustable delay lines are respectively transmitted to the second elliptical micro-ring array through independent transmission waveguides.

[0044] The second elliptical microring array includes M×N second elliptical microrings, the photodetector array includes N photodetectors, the input ends of the M×N second elliptical microrings are respectively connected to the output ends of the transmission waveguide, the output ends of the M second elliptical microrings with different central wavelengths are connected together and then connected to the input end of the photodetector, and the photodetector array outputs N independent transmission beams;

[0045] In this embodiment, in order to realize that each antenna unit of the beamforming array can output an independent transmission beam, in this embodiment, the delayed wavelength is λ 1 ~λ M The optical signal is directly filtered and combined. The combined optical signal includes a multi-wavelength optical signal delayed by an adjustable optical delay line, which is input into the corresponding photodetector in the photodetector array to stimulate the antenna unit of the beamforming array.

[0046] In this example, each second elliptical microring in the second elliptical microring array also uses a high-order elliptical microring filter according to the beamforming bandwidth requirements of the phased array system to achieve broadband flat filtering characteristics, and uses electrodes to calibrate the wavelength of the elliptical microring. The second elliptical microring array is used to filter and combine optical modulated signals of different wavelengths, and the signals are input to the antenna units of each beamforming array accordingly.

[0047] Working principle:

[0048] The integrated chip provided in this embodiment can be implemented on a silicon-based monolithic chip, or by pasting a photodetector array onto a silicon nitride chip. An optical carrier signal containing M wavelengths is input into the first elliptical microring array for filtering and then outputs M independent optical modulation signals of different wavelengths. Each optical modulation signal of different wavelength is coupled and divided into N identical optical modulation signals by an optical coupler array. The number of antenna units of the corresponding beamforming array surface, after M×N optical modulation signals are input into the adjustable optical delay line array, the on-off of each signal is controlled by the optical switch in the adjustable optical delay line, and the delay amount of the delay line is adjusted according to the actual needs of the phased array system. The optical signals of the M×N paths can be independently delayed and controlled to meet the independent switching and shaping requirements of the beam. The second elliptical microring array is used to select each M optical signal of different wavelengths after delay and directly filter and combine them. The combined optical signal contains a wavelength of λ 1 ~λ M The optical signal is input into the corresponding photodetector in the photodetector array to stimulate the antenna unit of the beamforming array.

[0049] In this embodiment, when scanning each formed transmission beam, it is only necessary to control the wavelength λ of the corresponding beam formed on the adjustable optical delay line array. i The delay amount of the N adjustable delay lines can be realized; in addition, the scanning between beams can be adjusted separately, independently of each other.

[0050] This embodiment uses an elliptical micro-ring array to filter and branch multi-wavelength optical signals, controls the on and off of each signal through an optical switch in an adjustable optical delay line, and adjusts the delay amount of the delay line according to the actual needs of the phased array system. It can independently control the delay of the optical signal of each path, and can simultaneously realize on-chip synthesis of multiple transmission beams. It has low requirements on the agility of the modulated optical carrier laser. Compared with the existing full delay line path or full micro-ring path, it has more flexible routing control and multi-beam realization, thereby improving the integration of the overall chip.

[0051] This embodiment integrates multiple array channels on a single chip based on on-chip integration technology, reduces the impact of ambient temperature and vibration on the phase between channels, and ensures the delay consistency between array channels; the micromachining process adopted in this embodiment realizes the multiplexing and demultiplexing of modulated multi-wavelength optical signals on the integrated chip, integrates the adjustable optical delay line array on a single chip, allows each wavelength of light-carrying microwave signal to be independently subjected to two-dimensional optical delay, and the multi-wavelength laser after delay is subjected to photoelectric conversion on the photodetector, and simultaneously forms multiple independent transmission beams, supports the transmission beam forming and scanning of the phased array system, and has higher delay accuracy.

[0052] Embodiment 2

[0053] The present invention also discloses an array transmission multi-beam forming method, comprising the following steps:

[0054] S1, using a first elliptical micro-ring array to receive a multi-wavelength optical carrier signal and then filtering it to generate M optical modulation signals;

[0055] In this embodiment, the first elliptical micro-ring array includes M first elliptical micro-rings, the input ends of the M first elliptical micro-rings are connected together as the input end of the first elliptical micro-ring array, and the multi-wavelength optical carrier signal is received and filtered to generate M optical modulation signals;

[0056] The number of antenna units in the beamforming array of the phased array system is set to N, corresponding to the simultaneous formation of M transmit beams. The multi-wavelength optical carrier signal includes a wavelength of λ i The optical signal, λ i ∈[1,M], the multi-wavelength optical carrier signal is input into the input end of the first elliptical microring array, and the central wavelength of each elliptical microring corresponds to the wavelength λ of the multi-wavelength optical carrier signal 1 ~λ M , used to filter out the corresponding wavelength λ i The optical modulation signal.

[0057] In this embodiment, the first elliptical microring is a high-order elliptical microring filter. To ensure that the optical filter has a large isolation and a free spectrum range, according to the beamforming bandwidth requirements of the phased array system, for each wavelength of the multi-wavelength optical carrier signal, an elliptical microring corresponding to the central wavelength is selected for precise filtering. In this embodiment, a high-order elliptical microring filter is selected to achieve broadband flat filtering characteristics, and the wavelength of the elliptical microring is calibrated using electrodes, and optical modulation signals of M different wavelengths are filtered out through the first elliptical microring array.

[0058] S2, using an optical coupler array to perform power division coupling on each optical modulation signal, and dividing the M optical modulation signals into M×N optical modulation signals;

[0059] In this embodiment, the optical coupler array includes M equal power dividers, the input ends of the M equal power dividers are respectively connected to the M output ends of the first elliptical micro-ring array, and power division coupling is performed on each optical modulation signal to evenly divide the M optical modulation signals into M×N optical modulation signals;

[0060] Furthermore, the equal power divider is a plurality of cascaded 1×2 optical couplers, and the number of 1×2 optical couplers is The number of output channels of the power divider is

[0061] In this embodiment, M optical modulated signals of different wavelengths output by the first elliptical microring array are input into the optical coupler array for coupling power division, and each optical modulated signal is evenly divided into at least N optical modulated signals by an equal power divider, corresponding to the number of antenna units of the beamforming array of the phased array system.

[0062] In this embodiment, each optical modulated signal of different wavelength filtered by the first elliptical microring is evenly divided into N paths through multiple cascaded 1×2 optical couplers. Since M and N do not completely satisfy the power relationship of 2, the number of output channels of the cascaded 1×2 optical coupler should be greater than the number N of antenna units.

[0063] In this embodiment, when the number of antenna units N does not satisfy the power of 2, the number of channels corresponding to the higher power is selected to divide the optical modulated signal into the corresponding number of optical paths. Taking the number of antenna units N as 30 as an example, 31 1×2 optical couplers are cascaded to form a 1-to-32 equal power divider, and the wavelength is λ i The optical modulated signal is evenly divided into 32 optical modulated signals, and the redundant output channels do not need to be used.

[0064] S3, using an adjustable optical delay line array to independently control the delay of M×N optical modulation signals;

[0065] In this embodiment, the adjustable optical delay line array includes M×N adjustable delay lines; the input ends of the M×N adjustable delay lines are respectively connected to the M×N output ends of the M equal power dividers, and the optical modulation signal on each adjustable delay line is independently delayed and controlled;

[0066] Furthermore, the adjustable delay line includes an optical switch and a multi-bit controllable delay line; the optical switch and the multi-bit controllable delay line are cascaded.

[0067] In this embodiment, the wavelength is λ i The optical modulated signal is branched into N optical signals through an optical coupler array and input into the N adjustable delay lines. Each adjustable delay line is cascaded with a multi-bit controllable delay line through an optical switch. The optical switch controls the on and off of each signal to select the signal according to the needs of the system. The multi-bit controllable delay line can delay the signal to different degrees according to the needs of the system. The optical signal on each path can be independently delayed to meet the independent switching and shaping requirements of the beam, and further realize the adjustment of the beam properties.

[0068] S4, using a transmission waveguide to transmit the delayed M×N optical modulated signals to the second elliptical micro-ring array;

[0069] In this embodiment, the input ends of the M×N transmission waveguides are respectively connected to the output ends of the adjustable optical delay line array;

[0070] In this embodiment, in order to ensure the independent propagation of each optical signal, the optical signals outputted by the M×N adjustable delay lines are respectively transmitted to the second elliptical micro-ring array through independent transmission waveguides.

[0071] S5. Utilize the second elliptical micro-ring array to filter and combine the M optical modulation signals with different central wavelengths and input them into the photodetector, and use the photodetector array to output N independent transmission beams.

[0072] In this embodiment, the second elliptical microring array includes M×N second elliptical microrings, the photodetector array includes N photodetectors, the input ends of the M×N second elliptical microrings are respectively connected to the output ends of the transmission waveguide, the output ends of the M second elliptical microrings with different central wavelengths are connected together and then connected to the input end of the photodetector, and the photodetector array outputs N independent transmission beams;

[0073] In this embodiment, in order to realize that each antenna unit of the beamforming array can output an independent transmission beam, in this embodiment, the delayed wavelength is λ 1 ~λ M The optical signal is directly filtered and combined. The combined optical signal includes a multi-wavelength optical signal delayed by an adjustable optical delay line, which is input into the corresponding photodetector in the photodetector array to stimulate the antenna unit of the beamforming array.

[0074] In this example, each second elliptical microring in the second elliptical microring array also uses a high-order elliptical microring filter according to the beamforming bandwidth requirements of the phased array system to achieve broadband flat filtering characteristics, and uses electrodes to calibrate the wavelength of the elliptical microring. The second elliptical microring array is used to filter and combine optical modulated signals of different wavelengths, and the signals are input to the antenna units of each beamforming array accordingly.

[0075] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An array transmit multi-beam forming integrated chip, characterized in that: It includes a first elliptical micro-ring array, an optical coupler array, an adjustable optical delay line array, a transmission waveguide, a second elliptical micro-ring array and a photodetector array which are sequentially connected along the incident direction of the optical carrier signal; The first elliptical micro-ring array includes M first elliptical micro-rings, the input ends of the M first elliptical micro-rings are connected together as the input end of the first elliptical micro-ring array, and the multi-wavelength optical carrier signal is received and filtered to generate M optical modulation signals; The optical coupler array includes M equal power dividers, the input ends of the M equal power dividers are respectively connected to the M output ends of the first elliptical micro-ring array, and power division coupling is performed on each optical modulation signal to evenly divide the M optical modulation signals into M×N optical modulation signals; The adjustable optical delay line array comprises M×N adjustable delay lines, the input ends of the M×N adjustable delay lines are respectively connected to the M×N output ends of the M equal power dividers, and the optical modulation signal on each adjustable delay line is independently delayed and controlled; The input ends of the M×N transmission waveguides are respectively connected to the output ends of the adjustable optical delay line array; The second elliptical microring array includes M×N second elliptical microrings, the photodetector array includes N photodetectors, the input ends of the M×N second elliptical microrings are respectively connected to the output ends of the transmission waveguide, the output ends of the M second elliptical microrings with different central wavelengths are connected together and then connected to the input end of the photodetector, and the photodetector array outputs N independent transmission beams, wherein M represents the number of beamformations and N represents the number of antenna units of the beamforming array.

2. The array transmit multi-beam forming integrated chip according to claim 1, characterized in that: The multi-wavelength optical carrier signal includes a wavelength of λ i The optical signal, λ i ∈[1,M], the central wavelengths of the M first elliptical micro-rings are λ i .

3. The array transmit multi-beam forming integrated chip according to claim 1, characterized in that: The first elliptical micro-ring and the second elliptical micro-ring are both high-order elliptical micro-ring filters.

4. The array transmit multi-beam forming integrated chip according to claim 1, characterized in that: The equal power divider is a plurality of cascaded 1×2 optical couplers, the number of which is The number of output channels of the power divider is 5. The array transmit multi-beam forming integrated chip according to claim 1, characterized in that: The adjustable delay line comprises an optical switch and a multi-bit controllable delay line; the optical switch and the multi-bit controllable delay line are cascaded.

6. The array transmit multi-beam forming method according to any one of claims 1 to 5, characterized in that: The following steps are involved: S1, using a first elliptical micro-ring array to receive a multi-wavelength optical carrier signal and then filtering it to generate M optical modulation signals; S2, using an optical coupler array to perform power division coupling on each optical modulation signal, and dividing the M optical modulation signals into M×N optical modulation signals; S3, using an adjustable optical delay line array to independently control the delay of M×N optical modulation signals; S4, using a transmission waveguide to transmit the delayed M×N optical modulated signals to the second elliptical micro-ring array; S5. Utilize the second elliptical micro-ring array to filter and combine the M optical modulation signals with different central wavelengths and input them into the photodetector, and use the photodetector array to output N independent transmission beams.

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