Device and system for delivering a flow of liquid and apparatus and method for non-immersed wet chemical treatment of planar substrates

Abstract

An apparatus for delivering a flow of liquid to wet a surface of a vertically held planar substrate (1) comprises a container (5) for storing the liquid. The container (5) is provided with at least one discharge channel through a side wall of the container (5), each discharge channel defining a respective inflow orifice open to an interior (37) of the container (5). The device is provided with at least one hole (17; 40) to deliver liquid passing through at least one of the discharge channels as the flow. The device is provided with at least one delivery port which is open into the interior (37) of the container (5) and which is connected to at least one connection device (21; 62) to connect the device to a supply conduit (61) for supplying liquid to the device. At least one overflow opening opens into the interior (37) of the container (5) at a liquid level between the at least one discharge channel inflow opening and a highest liquid level of the container interior (37) in order to discharge liquid out of the container interior (37).

Description

Technical Field

[0001] The present invention relates to a device for delivering a liquid stream to wet the surface of a vertically held planar substrate,

[0002] The device comprises a container for storing a liquid,

[0003] wherein the container is provided with at least one drainage channel through a side wall of the container, each drainage channel defining a respective inflow orifice opening to the interior of the container,

[0004] wherein the device is provided with at least one hole in the exterior of the device to deliver liquid through at least one of the discharge channels as the flow, and

[0005] Wherein the device is provided with at least one delivery port opening into the interior of the container and in fluid communication with at least one connection means for connecting the device to a supply conduit for supplying liquid to the device.

[0006] The present invention also relates to a system for delivering a liquid stream to wet the surface of a vertically held planar substrate, comprising:

[0007] at least one overflow device;

[0008] wherein each overflow device comprises a container for storing a liquid,

[0009] wherein the container is provided with at least one drainage channel through a side wall of the container, each drainage channel defining a respective inflow orifice opening to the interior of the container,

[0010] The overflow device is provided with at least one hole in the exterior of the device to deliver liquid passing through at least one of the discharge channels as the flow; and

[0011] A liquid supply system is provided for supplying liquid to the interior of the container of each overflow device.

[0012] The invention also relates to an apparatus for immersion wet-chemical processing of planar substrates.

[0013] The present invention also relates to a method of making a device for delivering a liquid stream to wet the surface of a vertically held planar substrate.

[0014] The invention also relates to a method for wetting the surface of a vertically held planar substrate. Background Art

[0015] US10,513,779B2 discloses a surface treatment system. The substrate is pinched and held at the upper end by the clamp of the suspension. In one embodiment, a pipe as a treatment solution release section is arranged on both sides of the substrate held by the suspension. Each pipe has a hole so that the treatment solution can be discharged upward at an angle. The discharged treatment solution flows downward over the surface of the substrate and reaches the bottom, and is circulated and discharged from the pipe again by a pump. In an alternative embodiment, the treatment solution is discharged downward at an angle from a slope. The treatment solution pumped upward by the pump is stored in a storage tank. When the liquid level is higher than the edge of the slope, the treatment solution overflows onto the slope. The treatment solution that has overflowed onto the slope contacts the treatment solution receiving member of the suspension and flows downward onto the substrate. The problem with this system is that the slope must extend to the lower edge of the treatment solution receiving member very close to the suspension. This means that great care must be taken to avoid contact between the suspension and the fixed part of the treatment section.

[0016] US 9,359,676 B2 discloses an electrodeless copper electroplating tank, which includes a tank body mounted on a frame and a circulation pump for circulating a treatment solution accumulated on the bottom of the tank by supplying a treatment solution to a liquid injection part. The treatment solution is sprayed upwardly from the injection port of the liquid injection part toward a plate-like workpiece obliquely relative to a horizontal plane. Therefore, the treatment solution is attached to the upper side of the plate-like workpiece, and the plate-like workpiece is clamped by a conveying suspension inside the tank body. The liquid injection part is composed of a circular pipe as a pipe member with an internal space. Both sides of the longitudinal direction are sealed. The injection port includes a plurality of holes arranged at predetermined intervals along the longitudinal direction. In addition, a flexible pipe and a pipe system are connected to the liquid injection part. The flexible pipe and the pipe system penetrate the side wall of the tank body. The injection angle of the injection port is set to be obliquely upward relative to the horizontal plane. Therefore, the liquid vortex of the treatment solution ejected from the injection port moves into a parabolic path. The injection vortex velocity of the treatment solution depends on the pressure from the pump and the size of the injection port. The problem is that the flow rate and therefore the angle of contact of the liquid vortex with the workpiece surface is difficult to control because the pressure from the pump is difficult to control accurately and the pipes will generate back pressure. It is almost inevitable that the vortex will hit the workpiece surface relatively hard, thereby generating turbulence extending downwardly on the surface and resulting in an uneven surface treatment. Summary of the invention

[0017] It is an object of the present invention to provide a device, system and method of the type mentioned above in the opening paragraph which allow a liquid stream to impinge on a substrate surface or an adjacent surface of a device holding the substrate from a reasonable distance at a relatively well-controlled angle.

[0018] According to a first aspect, this object is achieved by a device according to the present invention, characterized in that at least one overflow port opens into the interior of the container at a liquid level between at least one discharge channel inflow orifice and the highest liquid level inside the container, for example, at least one overflow port opens into the interior of the container at a liquid level between at least one discharge channel inflow orifice and the highest liquid level inside the container to drain liquid out of the interior of the container.

[0019] The device comprises a container for storing a liquid. In use, the liquid is present in the interior, which is substantially delimited by at least a bottom wall and a side wall. Thus, it is possible to determine the liquid level, i.e. the liquid level relative to the bottom wall. The container may be covered or closed at the top. The interior of the container may be ventilated. The container is provided with at least one discharge channel passing through the side wall of the container. For example, the discharge channel may be a simple orifice or defined by a conduit extending through the side wall. In use, the or each discharge channel defines a respective inflow orifice open to the interior of the container, through which liquid may flow from the interior of the container into the discharge channel.

[0020] The device is provided with at least one hole in the exterior of the device. This hole may be defined by the exhaust channel, wherein the exhaust channel terminates at the end opposite to the inflow orifice. In other embodiments, the exhaust channel is only in communication with the hole, for example via an intermediate flow conducting portion. The flow is a free-flowing flow. That is, from the point where the flow leaves the hole, the flow is not guided.

[0021] The device is provided with at least one delivery port, which opens into the interior of the container and is in fluid communication with at least one connection device to connect the device to a supply conduit for supplying liquid to the device. The connection device may be, for example, a fitting, or an end of a hose or pipe connectable to a fitting. The liquid is generally pumped into the device by a pump external to the device.

[0022] The device comprises at least one overflow port, which opens into the interior of the container at a level between at least one discharge channel inflow orifice and the highest liquid level inside the container, for example at least one overflow port opens into the interior of the container at a level between at least one discharge channel inflow orifice and the highest liquid level inside the container. This overflow port or these overflow ports are configured to conduct liquid out of the container, more specifically out of the container interior. By supplying liquid at a sufficient rate, the liquid level in the container is maintained and determined by the liquid level of the overflow or at least the overflow at the lowest liquid level. Because this liquid level is below the highest liquid level inside the container, there is a free surface of the liquid inside the container. The pressure at which the liquid flows through one or more discharge channels and then flows through the orifice is the hydrostatic pressure. When a spray bar is used, there is no back pressure. The pressure at which the liquid is supplied is irrelevant. The liquid flow is gravity driven. According to Torricelli's law, the flow emerges from the orifice at a substantially constant rate, the rate being determined solely by the level of the liquid inside the container (neglecting viscosity and streamline contraction). The direction in which the opening points is irrelevant, nor is the density of the liquid. There is no need to control the pump supplying liquid to the device to maintain a constant pressure.

[0023] The flow emerges from the hole as a jet along a parabolic path. Thus, when on a downward trajectory, the flow will impinge on the substrate or a portion of an adjacent substrate. This reduces the amount of turbulence in the flow travelling along the surface of the substrate. Furthermore, because the speed and direction are constant, it is possible to optimise the size of the portion of the substrate or substrate holding device on which the liquid flow impinges, as well as the distance between that area and the hole, to ensure that a balanced film flow is always established over the substrate.

[0024] Because the level of the free liquid surface in the interior of the container is determined by the overflow position, there is also no need to control the liquid level with the aid of sensors and a controller configured to control the supply of liquid. This makes the device relatively robust and useful in applications where the process liquid is relatively aggressive. Furthermore, the supply pump can be operated substantially at one single operating point, rather than intermittently.

[0025] In an embodiment of the device, the aperture is formed by a slit.

[0026] Thus, the liquid flow will be sheet-like or film-like. The liquid may impinge on the substrate or substrate holding device and flow down the major surface of the substrate in a relatively uniform film over the width of the planar substrate. The film has a substantially uniform thickness and velocity across the width of the substrate. Furthermore, the slit has a relatively small height so that the velocity is substantially constant over the height of the hole. The hole is formed where the slit emerges from the outer surface of the device.

[0027] In an example of any embodiment, wherein the hole is formed by a slit, the slit has a height, a width and a depth, seen from the outside of the device, and the width decreases with increasing depth from the hole in the direction of the container.

[0028] Thus, to an observer moving through the slit in the direction of the container, the slit appears to have a reduced lateral dimension, i.e. a reduced width. The effect is to produce a sheet or film-like liquid flow emerging as a jet from the aperture that does not contract laterally. This increases the uniformity of the flow of the liquid flow.

[0029] In an example of any embodiment, wherein the hole is formed by a slit, the slit has a height, a width and a depth as seen from the outside of the device, and at least a section of the slit extending from the hole has a uniform height, and the ratio of the width of the entire section having a uniform height to the height has a value between 5 and 15, for example between 9 and 11.

[0030] For example, the value of the ratio may be about 10. It has been found that this ratio results in a relatively stable sheet-like flow of liquid, particularly for liquids of the type commonly used in electrochemical processes such as electroplating.

[0031] In an example of any of the embodiments, wherein the hole is formed by a slit, the discharge channel comprises a section between the slit and the inflow orifice, the section flaring outwardly toward the interior of the container in the height direction.

[0032] Here, the height refers to the distance between the lowest surface and the highest surface delimiting the discharge channel. Therefore, this height increases towards the interior of the container. The effect is that constriction of the liquid flow at the inlet of the discharge channel is largely avoided. The pressure drop across the discharge channel is also minimized. In use, a stable uniform sheet-like liquid flow is thus obtained. In this embodiment, the slits may have a uniform height.

[0033] In an embodiment of the device, the device comprises a body formed in one piece and having a cavity formed therein, and the cavity at least partially defines the container interior.

[0034] The body may be obtained by molding, machining or a combination thereof. In this embodiment, the effort required to seal the interior of the container is reduced. The dimensions may also have a smaller tolerance range. It is observed that the term cavity does not imply a completely enclosed hollow interior.

[0035] In an example of any embodiment, wherein the hole is formed by a slit and the device includes a body made of one piece and having a cavity formed therein, wherein the cavity at least partially defines the interior of the container, the device includes at least a first masking portion, the first masking portion is different from the body and is mounted to the exterior of the body, and the slit is defined between the first masking portion and one of a protrusion of the container and a second masking portion mounted to the exterior of the body.

[0036] In this embodiment, the body may be relatively large, and the size of the slit may be relatively accurate.

[0037] In a specific example of the embodiment, wherein the hole is formed by a slit and the device includes a body made of one piece and having a cavity formed therein, wherein the cavity at least partially defines the interior of the container, the device includes at least a first masking portion, which is different from the body and is mounted to the exterior of the body, and the slit is defined between the first masking portion and one of a protrusion of the container and a second masking portion mounted to the exterior of the body, and at least the first masking portion at least partially closes the cavity.

[0038] Thus, the first masking portion forms part of a wall (e.g., a side wall) of the device. In particular, the first masking portion may delimit at least the interior of the container. In the case where the slit is defined between the first masking portion and a second masking portion that is different from the body and mounted to the exterior of the body, the second masking portion may also partially close the cavity. The first masking portion and the second masking portion together may close the cavity in addition to the discharge channel that the first masking portion and the second masking portion together define and optionally any port defined in the body. This embodiment can be implemented with relatively few parts.

[0039] In an embodiment of the device, at least one of the overflow openings extends above a peak of a barrier separating the container interior from a space for receiving liquid directed from the container interior via that overflow opening.

[0040] Thus, a weir is formed inside the device that determines the level of the liquid in the interior of the container. In use, this level can be maintained slightly above the level of the peak, so that the interior of the container is constantly overflowing. In use, the overflowing liquid is collected in the space and is directed out of the device from there. For example, there may be a port open to the space for receiving liquid. This port may be connected or may be connected to a conduit. Compared to a simple overflowing open container, this embodiment allows the liquid to be better separated from the environment of the device.

[0041] In an example of any embodiment of the device, at least one of the overflow ports extends above the peak of the potential barrier, thereby separating the interior of the container from a space for receiving liquid discharged from the interior of the container via that overflow port, and the device includes a body made in one piece and having a cavity formed therein, wherein the cavity at least partially defines the interior of the container, the cavity at least partially defines the interior of the container and the space for receiving the liquid discharged from the interior of the container via that overflow port.

[0042] The barrier may be spaced apart from the body or integrated into the body. This embodiment requires relatively few parts, in particular the need to seal the interior of the container and the space for receiving the liquid via the overflow. If there are two or more such spaces and associated overflows, each of the spaces may be at least partially defined by the body.

[0043] In an example of any embodiment, wherein at least one of the overflow ports extends above the peak of the potential barrier so as to separate the container interior from a space for receiving liquid discharged from the container interior via that overflow port, at least the container interior has an elongated shape as viewed from above, and the corresponding overflow ports extending above the peak of the potential barrier so as to separate the container interior from a corresponding space for receiving liquid discharged from the container interior via that overflow port in a longitudinal direction are arranged on either side of the container interior.

[0044] In this embodiment, a relatively large volume flow rate of the overflowing liquid can be set. Moreover, due to the symmetrical arrangement, a relatively uniform flow of the liquid inside the container is achieved. This is particularly useful in the case where the hole is formed by slits aligned in the longitudinal direction.

[0045] In an embodiment of the device, the exhaust channels are greater than one in number.

[0046] The effect is that the sidewall section through which the discharge channel extends remains relatively solid compared to providing a discharge channel with large breadth and / or cross-sectional area. The corresponding inlet orifices may be arranged in rows, such as rows at substantially constant liquid levels. The inlet orifices and / or the discharge channel may have corresponding shapes and sizes. In a specific example, the interior of the container has a polygonal shape, such as a quadrilateral shape, as viewed from the top, and the inlet orifices are arranged in rows extending over a large portion of the size of one side. The spacing between the orifices (in the direction in which the row extends) may be less than the corresponding size of the inlet orifices (i.e., the size in the same direction). This all helps to reduce the effect of streamline contraction so that the speed at which the liquid gushes out is more accurately determined only by the liquid level of the liquid in the container.

[0047] In an example of an embodiment, wherein the discharge channels are greater than one in number and the holes are formed by slits, the discharge channels define respective outlet orifices at their ends opposite to the respective inlet orifices, and the device comprises a channel extending parallel to the slits and in liquid communication with the slits, the outlet orifices opening into the channel.

[0048] The channels aid in flow equalization so that the liquid flow has a relatively uniform velocity across the width of the slot.

[0049] In an example of any embodiment, wherein the hole is formed by a slit, the discharge channel defines a corresponding outflow orifice at the end of the channel opposite to the corresponding inflow orifice, the device includes at least a first masking portion, the first masking portion is different from the container and is mounted to the outside of the container in front of the outflow orifice, and the slit is defined between the first masking portion and a second masking portion mounted to the outside of the container and one of the protruding portions of the container.

[0050] The goal is to provide the stream as a relatively thin liquid sheet or liquid film. Therefore, the slit should have a relatively small height. For uniformity, the height should be relatively clearly defined within the entire width of the slit. This can be achieved by defining the slit between the first masking part and the second masking part or the integral protruding part of the container that are installed on the outside of the container. The height can be set by means of a gauge with a size corresponding to the expected height of the slit. The first masking part is placed against the gauge and then fixed to the container. Subsequently, the gauge is removed to open the slit. This requires a good quality surface on the first masking part and the corresponding part (second masking part or protruding part), but it is easier to achieve than when the slit is machined in a solid part. It is also easier to provide a hole with a relatively sharp edge to ensure that the liquid flow flows along a parabolic trajectory.

[0051] In an example of any embodiment, wherein the discharge channels are greater than 1 in number, the holes are formed by slits, the discharge channels define corresponding outflow orifices at the ends of the discharge channels opposite to the corresponding inflow orifices, the device includes a channel extending parallel to the slit and connected to the slit liquid, the outflow orifice opens into the channel, the device includes at least a first masking portion, the first masking portion is different from the container and is mounted to the outside of the container in front of the outflow orifice, and the slit is defined between the first masking portion and a second masking portion mounted to the outside of the container and one of the protruding portions of the container, and the channel is formed between the outside of the container and at least the first masking portion.

[0052] This allows for relatively easy manufacturing, since the channel can be defined by, for example, a groove in the container exterior and / or a chamfer on the first and / or second masking portions. In other words, channel sidewalls can be machined on the exposed exterior surfaces of the component parts of the device and then closed by assembling the component parts.

[0053] In an example of any embodiment, wherein the hole is formed by a slit, the slit has a height, a width and a depth, seen from the outside of the device, and the width decreases with increasing depth from the hole in the direction of the container.

[0054] Thus, to an observer moving through the slit in the direction of the container, the slit appears to have a reduced lateral dimension, i.e. a reduced width. The effect is to produce a sheet or film-like liquid flow emerging as a jet from the aperture that does not contract laterally. This increases the uniformity of the flow of the liquid flow.

[0055] In an embodiment, the at least one overflow comprises at least one overflow port extending through a sidewall of the container.

[0056] The device will generally be positioned in a station in an apparatus for wet chemical non-immersion surface treatment of the substrate. The bottom of such a station will generally include a pool or sump in which the treatment liquid that has flowed downward across the main surface of the substrate is collected. The liquid discharged from the overflow port extending through the side wall of the container will drip into the pool. A recirculation system can be used to supply the collected liquid back to the device. For many applications, it is useful to ventilate the treatment liquid. The recirculation type just described is suitable for this. In addition, when the overflow port extends through the side wall of the container, it is possible to provide relatively more and / or relatively large overflow ports.

[0057] In a specific example of this embodiment, at least one (eg, all) of the at least one overflow port extending through the sidewall of the container is disposed on an opposite side of the container from the at least one drain channel.

[0058] This ensures that overflowing liquid remains clearly separated from the liquid flow used to wet the substrate.

[0059] An example of any embodiment in which the at least one overflow port comprises at least one overflow port extending through the side wall of the container further comprises at least one flow guide on the exterior of the container, wherein the flow guide is provided with an inclined surface segment below an external aperture of at least one of the at least one overflow port extending through the side wall of the container, the inclined surface segment extending to an external surface in which the external aperture is defined and angled such that a lower end of the inclined surface segment is distal from the external surface in which the external aperture is defined.

[0060] This ensures that the overflow liquid is directed away from the device and also away from the substrate. The overflow liquid can be directed onto the side walls of the processing station of the apparatus for non-immersion wet chemical processing of the substrate in which the device is arranged. This allows the device to be located relatively high in the processing station without splashing out or causing spraying when the overflow liquid impacts the liquid collected at the bottom of the processing station.

[0061] In this example of embodiment, the inclined surface section transitions at the lower end into a finger-like surface section, for example a finger-like surface section that is angled to the inclined surface section.

[0062] There are empty gaps between adjacent fingers through which the liquid can flow. Thus, the fingers interrupt the flow of liquid. This allows for a higher amount of aeration of overflowing process liquid before collection and recirculation.

[0063] In an example of any embodiment, wherein the at least one overflow port comprises at least one overflow port extending through a side wall of the container, and the device further comprises at least one flow guide on the outside of the container, the flow guide being provided with an inclined surface segment below an external hole of at least one of the at least one overflow port extending through the side wall of the container, the inclined surface segment extending to an external surface wherein the external hole is defined and angled such that a lower end of the inclined surface segment is away from the external surface wherein the external hole is defined and close to at least a section of the inclined surface segment of the external surface wherein the external hole is defined, and is laterally bounded by a portion of a vertical surface segment defining a facing surface.

[0064] This further helps to direct the overflowing liquid to minimize splashing.

[0065] In an example of any embodiment, wherein the at least one overflow port comprises at least one overflow port extending through a side wall of the container, and the device further comprises at least one flow guide on the exterior of the container, the flow guide having an inclined surface segment below an exterior hole of at least one of the at least one overflow port extending through the side wall of the container, the inclined surface segment extending to an exterior surface defining the exterior hole and angled such that a lower end of the inclined surface segment is distal from the exterior surface defining the exterior hole, the flow guide being a portion different from the container and mounted to the exterior of the container.

[0066] This simplifies production.In particular, the flow guide may consist of plate-like segments which are joined together, for example adhesively or by welding or soldering.

[0067] In an embodiment of the device, the at least one overflow port comprises at least one overflow port defined in a conduit extending through at least a portion of the interior of the container, such as at least one overflow port opening into the interior in a direction away from the bottom of the interior of the container.

[0068] The conduit allows the overflowing liquid to be collected for rapid recirculation and without contamination. Furthermore, it is possible to provide relatively numerous and / or relatively elongated overflow ports along the length of the conduit without substantially weakening the container. Furthermore, the overflow ports in the conduit may face upwards.

[0069] In an embodiment of the device, the at least one overflow comprises at least one overflow port in fluid communication with a connection device connected to the conduit to carry liquid overflowing into the at least one overflow port away from the device.

[0070] This allows a relatively high rate of recirculation and removal of liquid from the device. In conjunction with a high supply rate, the level of the free surface of liquid inside the container is therefore relatively undisturbed. The connecting means may be a fitting, or simply a pipe or hose end that can be coupled to a fitting or connector.

[0071] In embodiments, the at least one delivery port comprises, eg, consists of, at least one delivery port formed in a conduit extending through at least a portion of the interior of the container.

[0072] Thus, liquid can enter the interior of the container in one dimension, for example, within the breadth of the interior of the container. This helps to ensure a uniform level of liquid in the interior of the container. In addition, it is only necessary to pass one conduit through the side wall in order to supply liquid at a relatively high rate and low pressure.

[0073] In an embodiment of the device, the container comprises a single body delimiting at least at the bottom and on all sides at least one wall of the interior of the container.

[0074] The single body may be a monolithic body made in one piece. The body may be molded and / or machined. The body may be made of metal, polymeric material or composite. Seams formed by bonding are largely avoided, so that the risk of accidental leakage is minimized. The wall need not completely delimit the interior of the container. For example, there may be an orifice closed by a stopper or cover separated from the body. In another embodiment, the wall of the container interior is completely included in the body, wherein the wall delimits the container interior.

[0075] In an example of that embodiment, wherein the container comprises a single body defining at least one wall of the interior of the container at least at the bottom and on all sides, the body leaves the interior of the container at least partially open at the top.

[0076] This makes manufacturing easier. In addition, the interior of the container does not need to be sealed.

[0077] In an example of this embodiment, the body partially delimits the interior of the container at the top, and at least one (eg, a plurality of) apertures are defined in the portion of the body partially delimiting the interior of the container at the top.

[0078] Thus, the portion of the top wall in which the aperture is defined acts as a reinforcing strut to make the container more rigid and thus dimensionally stable.

[0079] An example of any embodiment in which the container comprises a single body defining walls delimiting the interior of the container at least at the bottom and on all sides and the body leaves the interior of the container at least partially open at the top comprises at least one lid mounted to the body and closing the interior of the container at the top.

[0080] The lid helps prevent contamination of the liquid within the interior of the container.

[0081] In an embodiment of the device, at least the interior of the container has an elongated shape, seen from above, and at least one (eg all) of the drainage channels extend through the side wall on a longer side of the interior of the container.

[0082] This is useful for relatively uniform wetting of relatively wide substrates.For example, the elongated shape may be a polygonal (eg quadrilateral) shape.

[0083] In an embodiment of the device, at least one of the at least one overflow comprises an overflow port that is elongated in shape, having a width greater than a height, seen in the flow direction.

[0084] This allows a relatively large flow rate of the overflowing liquid.The lower edge will generally be at a level corresponding to the expected level of the free surface of the liquid in the container interior.

[0085] In an embodiment of the device, the at least one inflow opening is located at the bottom of the interior of the container.

[0086] Thus, the inflow orifice may have a lower edge or lowest point of the rim at the liquid level of the bottom of the interior of the container. This allows the device to be emptied for maintenance or the like. In use, stagnant volumes of process liquid are substantially avoided. Furthermore, because gas rises to the top, the risk of bubbles in the process liquid flowing through the discharge channel remains relatively low.

[0087] Embodiments of the device include at least one liquid displacement structure arranged to reduce the volume of the container interior that can be occupied by liquid while leaving space adjacent to the liquid displacement structure in the container interior to form a liquid column extending to a bottom surface delimiting the container interior.

[0088] Thus, it is possible to provide a relatively high liquid column, for example it is possible to provide a relatively large hydrostatic pressure at the inlet orifice, without having to bring the inlet orifice close to the bottom surface. On the other hand, when operation of the device is stopped, the liquid level drops relatively quickly below the horizontal surface of the inlet orifice, because the displacement configuration occupies some of the volume that would otherwise be occupied by the liquid.

[0089] In an example of any embodiment of the device comprising at least one liquid displacement structure, the liquid displacement structure is arranged to reduce the volume that can be occupied by liquid inside the container, while leaving space for liquid inside the container adjacent to the displacement structure to form a liquid column extending to the bottom surface that delimits the interior of the container, and the at least one displacement structure includes at least one replaceable displacement body installed in the container.

[0090] This allows the device to be adapted to different applications.One or more displacement bodies may be removed or may be replaced to provide a larger volume for the liquid to occupy.

[0091] In an example of any embodiment of the device comprising at least one liquid displacement structure, the liquid displacement structure is arranged to reduce the volume of the container interior that can be occupied by liquid while leaving space adjacent to the displacement structure in the container interior for the liquid to form a liquid column extending to the bottom surface bounding the container interior, and the at least one displacement structure is spaced apart from the bottom surface bounding the container interior.

[0092] In particular, the displacement configuration may be spaced apart from the bottom surface by a distance greater than the liquid level of one or more inflow orifices. The displacement configuration of this embodiment provides the effect of allowing the flow of liquid through the aperture to be stopped relatively quickly after the supply of liquid through the delivery port is stopped, but with little effect on the pressure distribution at the inflow orifice leading to the discharge channel.

[0093] According to another aspect, the system for delivering a liquid flow to wet the surface of a vertically held planar substrate according to the present invention is characterized in that the system is configured to maintain the liquid level of the free surface of the liquid in the interior of the container of each overflow device at a level between the at least one discharge channel inflow orifice and the highest liquid level in the interior of the container.

[0094] In one embodiment, the system is configured to maintain the level of the free surface of the liquid in the container of each overflow device at a level between the at least one discharge channel inflow orifice and the highest liquid level inside the container by employing a device according to the present invention or a device further comprising any of the features described above, either alone or in combination, as one or more overflow devices. In the case where the overflow device is a device according to the present invention, the resulting system is a relatively simple embodiment that provides a liquid flow with a well-defined and constant velocity, because the liquid supply system can be configured to supply liquid at a rate that exceeds the flow rate of the liquid flow, so that excess liquid is permanently discharged via the overflow, for example through one or more overflow ports.

[0095] In another embodiment, the system comprises a sensor arrangement, a controller and a controllable liquid supply system to maintain the level of the free surface of the liquid in the container.

[0096] In either case, because the level of the free surface of the liquid in the container of each overflow device is at a level between the at least one discharge channel inlet orifice and the highest liquid level inside the container, there is no back pressure. The hydrostatic pressure determines the flow rate out of the orifice. The flow of liquid is gravity driven. By keeping the liquid level constant, pressure fluctuations in the supply of liquid to the overflow device have no effect on the free-flowing stream of liquid emerging from the orifice of the overflow device.

[0097] According to another aspect, the apparatus for non-immersion wet-chemical processing of planar substrates according to the invention comprises at least one substrate holding device, at least one processing station, at least one support for at least suspending the substrate holding device in the processing station, and at least one system for delivering a liquid flow according to the invention, which is arranged in the processing station to direct the liquid flow onto at least one of the substrate and the substrate holding device.

[0098] Since the substrate holding device is suspended, the planar substrate is held in a vertical orientation in use. The main surface of the substrate makes a negligible small angle with the vertical (its normal is essentially oriented horizontally). When the liquid flow is directed onto the substrate, a relatively uniform film-like liquid flow is formed on the main surface of the relevant substrate, but for a small area at the top, the liquid flow impinges on the surface. When the flow is directed onto the substrate holding device, the existence of such a small area can even be avoided by first allowing the liquid to flow a sufficient distance above the flat surface of the substrate holding device. In either case, since the liquid flow is gravity-driven, the liquid flow impinges at a well-determined speed and angle.

[0099] In an embodiment of the apparatus, at least one of the substrate holding means comprises:

[0100] Support structure,

[0101] wherein the support structure comprises at least one portion for engaging at least one of the at least one support member so as to suspend the support structure in the processing station of the apparatus;

[0102] at least one clamping device supported by the support structure to hold the substrate in a plane; and

[0103] at least a first upper flow guiding portion arranged on one side of said plane and having an inner facing surface facing inwardly and an outer facing surface facing outwardly relative to said plane,

[0104] wherein the outwardly facing surface comprises:

[0105] an upper outwardly facing surface segment, wherein at least one of the systems for delivering a liquid flow is configured to direct the liquid flow onto the upper outwardly facing surface segment, and

[0106] a lower outwardly facing surface segment extending from a transition portion between at least a central segment of the upper outwardly facing surface segment and the lower outwardly facing surface segment to a lower edge,

[0107] Wherein at least a section of the lower outwardly facing surface section extending up to the lower edge is oriented at a less acute angle relative to the plane than the upper outwardly facing surface section.

[0108] The substrate holding device is suitable for holding the substrate in an apparatus for non-immersion wet chemical treatment during the treatment. In this type of treatment, the substrate is not immersed in a bath of treatment liquid but is held in the apparatus and in this case wetted by means of liquid directed onto the upper flow guide portion. From there, the liquid flows downward onto the exposed areas of the main surface of the substrate to achieve the treatment. The liquid then drips onto the bottom of a pool or tank included in the apparatus.

[0109] The planar substrate may be flexible such that the substrate is planar only when held by the clamping device.

[0110] The substrate holding device comprises a support structure comprising at least one portion for engaging a support so as to suspend the support structure in the apparatus. Thus, the configuration and orientation of the at least one portion for engaging the support determines that in use the substrate holding device is oriented upwards and thus determines which outwardly facing surface segment is the upper outwardly facing surface segment and which outwardly facing surface segment is the lower outwardly facing surface segment. Similarly, the position, orientation and configuration of the at least one clamping device determines the position and orientation of the plane and thus the position and orientation of the plane can be determined even in the absence of a substrate.

[0111] The substrate holding device comprises at least a first upper flow guiding section, which is arranged on one side of the plane and has an inwardly facing surface facing inwardly relative to the plane and an outwardly facing surface facing outwardly. That is, the first upper flow guiding section does not cross the plane, but has an inwardly facing surface facing in the direction of the plane and an outwardly facing surface facing away from the plane. In this context, the inwardly facing surface faces in a direction having at least a component perpendicular to the plane. The outwardly facing surface faces in a direction having no such component. In principle, the outwardly facing surface may comprise a section facing in a direction completely parallel to the plane.

[0112] The inwardly facing surface and the outwardly facing surface need not be completely flat. The outwardly facing surface is substantially unimpeded by the flow of liquid directed onto the upper outwardly facing surface section and can be wetted by it. The lower outwardly facing surface section is adjacent to the upper outwardly facing surface section or at least a central section thereof and extends to the lower edge of the outwardly facing surface section. This will also be the lower edge of the first upper flow guiding portion. The lower edge may be a straight edge or a curved line. Embodiments with straight edges are relatively easy to implement.

[0113] Depending on whether both major surfaces of the substrate are to be processed, there may be a second upper flow guiding portion on the opposite side of the plane. In general, there may be at most one upper flow guiding portion for either of the two sides. In most cases, the lower edge will extend within the maximum dimension of the exposed area of ​​the major surface of either substrate held in the plane by the clamping device. In most cases, this dimension will be determined by the support structure, which will typically frame the area of ​​the plane in which the substrate may be held.

[0114] As previously mentioned, the apparatus and system for delivering a liquid stream provides a liquid stream having a well-defined, generally constant velocity and trajectory. Thus, this stream can be targeted to the upper outwardly facing surface section so that when reaching the lower edge, the flow is always laminar. Thus, the entire exposed area of ​​the major surface is treated relatively uniformly across its width.

[0115] In an example of this embodiment, the inner facing strip extends longitudinally along the lower edge and laterally to the lower edge, and at least a central longitudinal section of the strip is movable into engagement with the major surface of the planar substrate over the entire length of that section.

[0116] It is possible to define a strip facing the inner surface, in use, at least a central section of the inner facing surface (seen in the longitudinal direction along the length of the edge) is movable into engagement with a major surface of any planar substrate lying in the plane defined by the at least one clamping device. Thus, there is no gap between the lower edge and the major surface. The engagement between at least the central section of the strip and the major surface of the substrate is substantially uninterrupted over the length of that central section. In use, any liquid flowing downwardly over the upper and lower outer facing surface sections will smoothly transition to the exposed areas of the major surface of the planar substrate, and the flow continues as a balanced film flow over and above the exposed areas. There are relatively few or no eddies, thereby ensuring uniform treatment of the exposed areas of the major surface of the substrate up to or close to the contact line with the lower edge.

[0117] The central longitudinal section of the strip is the middle section looking at the outward or inward facing surface. Where the lower edge is rounded at the corners at the longitudinal ends, it may not engage the planar major surface of a planar substrate. In many embodiments, the strip will be movable into engagement with the major surface of a planar substrate over the entire length of the strip.

[0118] The strip of the inner facing surface need not be flat over the microfluidic level, especially if made of a material having a hardness substantially different from that of the substrate surface.

[0119] In an example of any embodiment of the apparatus, wherein at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above, the strip facing the inner surface extends longitudinally along the lower edge and laterally to the lower edge, and at least a central longitudinal section of the strip is movable to engage with the major surface of the planar substrate over the entire length of that section, the at least one clamping device of the substrate holding device comprises at least one upper clamping device, wherein the arms of the upper clamping device are arranged to engage the major surface of the substrate at a level equal to or above the liquid level of the strip.

[0120] The effect is that the arms do not interfere with the flow of liquid from the first upper flow guiding portion onto or over the major surface of the substrate.

[0121] In an example of any embodiment of the apparatus, wherein at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above, the strip facing the inner surface extends longitudinally along the lower edge and laterally to the lower edge, at least a central longitudinal portion of the strip is movable to engage with a major surface of a planar substrate throughout the length of that section, the at least one clamping device of the substrate holding device comprises at least one upper clamping device, and the arms of the upper clamping device are arranged to engage the major surface of the substrate at a level equal to or above the liquid level of the strip, and the arms of the upper clamping device are arranged to engage the major surface between the plane and the strip.

[0122] Thus, a clamping engagement is located between the upper flow guiding portion and the major surface of the substrate. In use, this may be close to the upper edge of the planar substrate so that a large portion of the major surface of the substrate is exposed and processable.

[0123] In an example of any embodiment, wherein at least one clamping device comprises at least one upper clamping device, and the arms of the upper clamping device are arranged to engage the main surface of the substrate at a level equal to or above the liquid level of the strip, the first upper flow guide portion forms the arms of the upper clamping device.

[0124] Hence, no separate holding device is required and the substrate holding device may be relatively compact and have relatively few parts.The further arm of the upper holding device may be a part of or fixed to the support structure of the substrate holding device.

[0125] In an example of any embodiment of the apparatus, wherein at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above, at least one of the substrate holding devices comprising at least the first upper flow guide portion further comprises a second one of the upper flow guide portions, which is arranged on a side of the plane opposite to the first upper flow guide portion.

[0126] This embodiment is suitable for relatively uniform processing of both major surfaces of a planar substrate. The second upper flow guide portion may include any or all of the features of the embodiments of the first upper flow guide portion. In many such cases, the second upper flow guide portion will be at least a mirror image (relative to the plane) of the first upper flow guide portion, if not identical in shape and size.

[0127] In an example of this embodiment, the first upper flow guide portion and the second upper flow guide portion are arranged to clamp the substrate therebetween.

[0128] Thus, no further upper clamping means are required. This makes the device relatively compact and economical in parts. One or more resilient elements may be provided to urge the first and second flow guiding portions (more particularly the strips thereof facing the inner surfaces) towards each other. Because at least a central longitudinal section of the strips can be moved into engagement with the major surface of the planar substrate over the entire length of that section, there is a relatively long contact zone extending substantially over the width of the substrate. This helps to prevent damage to the substrate surface. Furthermore, when the substrate is held under tension, the tension is relatively evenly distributed over the width of the substrate.

[0129] In an example of any embodiment of the apparatus, at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above, at least the first of the upper flow guide portions being pivotally attached to the support structure, wherein the pivot axis extends parallel to the plane.

[0130] The strip or a central section thereof is thus relatively easy to move into engagement with the major surface of the planar substrate regardless of the exact thickness of the planar substrate. One or more biasing means may be provided between the support structure and one or more pivoting upper flow guiding parts to bias the strip towards the plane. If the lower edge is straight, then the lower edge will be at least approximately parallel to the pivot axis. The pivotable attachment may be through a pivot protruding from one of the support structure and the upper flow guiding part, the pivot being inserted through a corresponding aperture in the other of the support structure and the upper flow guiding part.

[0131] In an example of any embodiment of the apparatus, at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above, at least the first of the upper flow guide portions being composed of a plate-like segment defining at least the inward-facing surface and the outward-facing surface.

[0132] This makes it relatively easy to manufacture the upper flow guiding portion by cutting the segments out of a plate-like material and joining the segments together, for example by welding or gluing. Portions of the upper flow guiding portion used to attach the upper flow guiding portion to the support structure need not be made of plate-like segments. At least those portions defining the inwardly facing surface and the outwardly facing surface are typically made of one or more plate-like segments.

[0133] In an example of any embodiment of the apparatus, wherein at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above, the outwardly facing surface segment folds inwardly toward the plane at a transition from the upper outwardly facing surface segment to the lower outwardly facing surface segment.

[0134] In particular, in combination with features of the previous embodiments, this embodiment is relatively easy to manufacture. The transition may be along a straight line, such as a straight line parallel to the lower edge, to flow evenly across the width of the outwardly facing surface (looking onto that surface in the direction of the plane). The embodiment allows one or both of the upper outwardly facing surface segment and the lower outwardly facing surface segment to be flat but face in a different direction than the other of the upper outwardly facing surface segment and the lower outwardly facing surface segment.

[0135] In an example of any embodiment of the apparatus, wherein at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above, at least one of the upper outwardly facing surface segment and the lower outwardly facing surface segment being flat over at least a majority of its surface area.

[0136] This provides unobstructed flow across the relevant surface segment.

[0137] In an example of any embodiment of the apparatus, wherein at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above, at least the upper outwardly facing surface segment being laterally bounded by surfaces facing each other and extending at an angle (e.g., transversely) relative to the plane.

[0138] In use, the upper outwardly facing surface section is the section against which the process liquid flow impinges. The surfaces facing towards each other and extending at an angle to the plane delimit the upper outwardly facing surface section so that liquid cannot flow out of the upper outwardly facing surface section at its side edges but is forced to flow onto the lower outwardly facing surface section.

[0139] In an example of any embodiment of the apparatus, wherein at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above, the lower edge extending between side edges of the lower outwardly facing surface segment, the side edges meeting the lower edge at respective corners of the lower outwardly facing surface segment.

[0140] Thus, the lower outwardly facing surface section is substantially lip-shaped. The side edges may abut or be located in close proximity to components of the support structure, such that the lower outwardly facing surface section extends partially between these components. The side edges may be straight over most of their extent, as may the lower edge.

[0141] In an example of this embodiment, the outward facing surface further includes a laterally lower outward facing surface segment that is separated from the lower outward facing surface segment and adjacent to the upper outward facing surface segment, and the laterally lower outward facing surface segment and the upper outward facing surface segment extend at an angle of less than 180° to each other.

[0142] Although the lower outwardly facing surface segments are inclined inwardly in the direction of the plane towards the lower edge, the laterally lower outwardly facing surface segments are therefore inclined outwardly towards their lower edges. In use, this helps to carry process liquid away from the portion of the support structure laterally framing the substrate. Furthermore, in case the surface segments are defined by plate-like segments, the laterally lower outwardly facing surface segments enhance the rigidity of the upper flow guiding portion.

[0143] In an example of any embodiment of the apparatus, wherein at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above, the at least one clamping device comprising at least one lower clamping device arranged to engage the substrate at a lower edge of the substrate.

[0144] This allows the substrate device to be used to hold a relatively flexible substrate in a well-defined position in the plane. The substrate is unlikely to wobble or warp.

[0145] In an example of any embodiment of the apparatus, wherein at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above, the substrate holding device further comprises at least a first lower flow guide portion, the first lower flow guide portion being arranged on a respective side of the plane and having an inwardly facing surface facing inwardly relative to the plane and an outwardly facing surface facing outwardly, the outwardly facing surface comprising at least an upper outwardly facing surface segment extending to an upper edge of the outwardly facing surface and inclining inwardly toward the plane in the direction of the upper edge, wherein a strip of the inwardly facing surface extends longitudinally along the upper edge and laterally to the upper edge, and wherein at least a central longitudinal segment of the strip is movable to engage with the main surface of the substrate over the entire length of that segment.

[0146] The lower flow guiding portion guides the film flow away from the device at the bottom edge reaching the exposed area of ​​the major surface of the substrate. This helps protect the support structure and / or lower clamping device from process liquids.

[0147] In an example of any embodiment, at least one of the substrate holding devices includes: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; at least a first upper flow guide portion as defined above and at least a first lower flow guide portion as defined above, the upper edge extending between the side edges of the upper outwardly facing surface segment, and the side edges meeting the upper edge at corresponding corners of the upper outwardly facing surface segment.

[0148] This embodiment is easy to manufacture with a straight upper edge and thus a straight strip.A continuous line of contact with the flat main surface of the planar substrate can be achieved relatively easily.

[0149] In this example of embodiment, the side edge extends from a respective corner of the upper outwardly facing surface segment to a respective second corner, and the upper outwardly facing surface segment widens at the second corner to increase the extent of the upper outwardly facing surface segment in a direction parallel to the upper edge.

[0150] In this embodiment, the portion of the lower flow guiding portion defining the upper outwardly facing surface section may be folded between cross members of the support structure framing the region of the plane in which the substrate is arranged to be held.

[0151] In an example of any embodiment, at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; at least a first upper flow guide portion as defined above and at least a first lower flow guide portion as defined above, at least a segment of the upper outwardly facing surface segments being laterally bounded by surfaces facing each other and extending at an angle (e.g., transversely) relative to the plane.

[0152] These surfaces, which face toward each other and extend at an angle (e.g. transversely) relative to the plane, direct the liquid to flow downward from the major surface of the substrate onto the lower flow guiding portion without spreading out. Thus, the flow across the major surface being treated is also relatively uniform at the bottom edge of its exposed area.

[0153] In an example of any embodiment, at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; at least a first upper flow guide portion as defined above and at least a first lower flow guide portion as defined above, the outwardly facing surface of the lower flow guide portion comprising a lower outwardly facing surface segment adjacent to the upper outwardly facing surface segment, and the upper outwardly facing surface segment and the lower outwardly facing surface segment extend at an angle greater than 180° to each other.

[0154] In use, the lower outwardly facing surface section may be at a relatively small or negligible angle to the vertical, while the upper outwardly facing surface section is inclined. The lower outwardly facing surface section may protect the lower part of the support structure or clamping device. In either case, the effect is that the balanced membrane flow does not break away at the lower end of the upper outwardly facing surface section.

[0155] In an example of any embodiment, at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; at least a first upper flow guide portion as defined above and at least a first lower flow guide portion as defined above, at least the upper outwardly facing surface section being flat.

[0156] This provides a smooth, even, unobstructed flow across the upper outwardly facing surface section.

[0157] In an example of any of the embodiments, at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; at least a first upper flow guide portion as defined above and at least a first lower flow guide portion as defined above, wherein the at least one clamping device comprises at least one lower clamping device arranged to engage the substrate at a lower edge of the substrate, the arms of the lower clamping device being arranged to engage the main surface of the substrate at a liquid level equal to or lower than the liquid level of the strip of the first lower flow guide portion.

[0158] Thus, the lower gripper arm does not interrupt flow across the major surface of the substrate at the lower end of the exposed area of ​​that major surface.

[0159] In this example of embodiment, the arms of the lower clamping device are arranged to engage the major surface between the plane of the first lower flow guiding section and the strip.

[0160] Thus, the lower clamping device and the first lower flow guiding part may be arranged at the same liquid level or even coincide.

[0161] In an example of any embodiment, at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; at least a first upper flow guide portion as defined above and at least a first lower flow guide portion as defined above, wherein the at least one clamping device comprises at least one lower clamping device arranged to engage the substrate at a lower edge of the substrate, the first lower flow guide portion forming the arm of the lower clamping device.

[0162] Thus, there is no need to provide a separate clamping device. Moreover, the strip can engage the substrate to clamp the substrate. Because at least the central longitudinal section of the strip can be moved into engagement with the major surface of the substrate over the entire length of that section, there is a relatively extended contact area between the clamping device and the substrate. When the substrate is held under tension, this tension is evenly distributed. In either case, there are no sharp stresses on isolated pieces of the substrate surface.

[0163] In an example of any embodiment, wherein at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above and at least a first lower flow guide portion as defined above, the substrate holding device further comprises a second one of the lower flow guide portions, which is arranged on a side of the plane opposite to the first lower flow guide portion.

[0164] In this embodiment, both major surfaces of the substrate can be processed simultaneously. The second lower flow guiding portion may include any of the features of any of the embodiments of the first lower flow guiding portion. The second lower flow guiding portion may be at least the mirror image (with respect to the plane) of the first lower flow guiding portion, for example the mirror image is identical in shape and size.

[0165] In an example of this embodiment, the first lower flow guide portion and the second lower flow guide portion are arranged to clamp the substrate therebetween.

[0166] Therefore, no separate clamping device is required. The substrate holding device is very suitable for holding substrates of different thicknesses.

[0167] In an example of any embodiment, at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above and at least a first lower flow guide portion as defined above, at least the first of the lower flow guide portions being pivotally attached to the support structure by means of a pivot axis extending parallel to the plane.

[0168] This makes it relatively easy to move the strip facing the inner surface into engagement with the surface of the substrate. One or more biasing means may be provided between the support structure and the pivoting lower flow guiding portion to bias the strip facing the inner surface towards the plane. If the upper edge is straight, then the upper edge will be at least approximately parallel to the pivot axis. The pivotable attachment may be through a pivot protruding from one of the support structure and the lower flow guiding portion, the pivot being inserted through a corresponding aperture in the other of the support structure and the lower flow guiding portion.

[0169] In an example of any embodiment, at least one of the substrate holding devices comprises: a support structure; at least one clamping device supported by the support structure to hold the substrate in a plane; and at least a first upper flow guide portion as defined above and at least a first lower flow guide portion as defined above, at least the first of the lower flow guide portions being composed of a plate-like segment defining at least the inward-facing surface and the outward-facing surface.

[0170] This allows the lower flow guiding part to be relatively easy to manufacture by cutting it into segments from a plate-like material and joining the segments together, for example by welding or gluing. Portions of the lower flow guiding part used to attach the lower flow guiding part to the support structure need not be made of plate-like segments. However, at least those portions defining the inwardly facing surface and the outwardly facing surface are typically made of one or more plate-like segments.

[0171] According to another aspect, the present invention provides a method of manufacturing any embodiment of a device according to the present invention for delivering a liquid flow to wet through the surface of a vertically held planar substrate, wherein:

[0172] the discharge passage defining a respective outflow orifice at an end of the discharge passage opposite the respective inflow orifice,

[0173] The device comprises at least a first shielding portion which is distinct from the container and which is mounted to the exterior of the container in front of the outflow orifice, and

[0174] The slit is defined between the first shielding portion and one of a second shielding portion mounted to the exterior of the container and a protruding portion of the container.

[0175] The present invention also provides a method of making any embodiment of a device for delivering a liquid stream to wet the surface of a vertically held planar substrate, wherein:

[0176] The device comprises a body formed in one piece and having a cavity formed therein,

[0177] The cavity at least partially defines the interior of the container,

[0178] The holes are formed by slits,

[0179] The device comprises at least a first shielding portion which is different from the main body and is mounted to the exterior of the main body, and

[0180] The slit is defined between the first shielding portion and one of a protruding portion of the container and a second shielding portion mounted to the exterior of the body.

[0181] Each of these two manufacturing methods includes:

[0182] providing the container and at least the first masking portion;

[0183] placing a gauge having a dimension defining the height of the slit as viewed in the flow direction between the first masking portion and one of the second masking portion and the protruding portion of the container to define the slit;

[0184] securing at least the first masking portion to the container; and

[0185] Remove the gauge from the slit.

[0186] The method allows the liquid stream to emerge from the hole in the shape of a sheet. The sheet has a relatively well-defined height. Moreover, the method allows the slit height to be varied by using gauges of different sizes.

[0187] According to another aspect, in a method for wetting the surface of a vertically held planar substrate according to the present invention, liquid is supplied to at least one device according to the present invention, and the flow rate of the liquid supplied to the device is at least equal to the total flow rate of the liquid through the at least one discharge channel.

[0188] In particular, the flow rate may be greater. Thus, the level of free liquid in the interior of the container remains constant. However, the supply rate does not need to be controlled very accurately. Furthermore, the supply does not have to be intermittent, but can be continuous.

[0189] An embodiment of the method includes: mounting the substrate to a substrate holding device, the substrate holding device including a support structure and at least one clamping device, the at least one clamping device being supported by the support structure to hold the substrate in a plane; suspending the support structure to hold the substrate in a vertical direction; and directing the liquid flow onto an upper outward-facing surface segment of an outward-facing surface of an upper flow guide portion arranged on one side of the plane, the outward-facing surface facing outward relative to the plane, so as to establish a film flow onto the main surface of the substrate on the upper outward-facing surface segment.

[0190] Thus, a balanced flow of liquid is established before it reaches the main surface of the substrate to be processed. This allows the main surface to be processed relatively uniformly over its entire height.

[0191] An embodiment of the method comprises using a device according to the invention.

[0192] Therefore, the device, system and apparatus according to the invention are each suitable for use in the method according to the invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0193] The invention will be explained in more detail with reference to the accompanying drawings, in which:

[0194] Figure 1 is a cross-sectional view of a portion of a processing station of an apparatus for non-immersion wet chemical processing of planar substrates;

[0195] Figure 2 exists in Figure 1 A perspective view of one of the two first overflow devices in a portion of a station shown in FIG.

[0196] Figure 3 yes Figure 2 a second perspective view of a first overflow device;

[0197] Figure 4 yes Figure 2 and 3 a top view of a first overflow device with a cover removed;

[0198] Figure 5 It is along Figure 4 A cross-sectional view of the first overflow device along line AA;

[0199] Figure 6 yes Figures 2 to 5 A side plan view of a first overflow device;

[0200] Figure 7 It is along Figure 6 A cross-sectional view of the first overflow device along line BB;

[0201] Figure 8 is formed Figures 2 to 7 a perspective view of a body of a container in a first overflow device;

[0202] Fig. 9 yes Figures 2 to 8 A perspective view of an upper shielded portion of a first overflow device;

[0203] Fig.10 yes Fig. 9 A front plan view of the upper sheltered portion;

[0204] Fig.11 yes Fig. 9 and 10 a cross-sectional view of an upper shielded portion of;

[0205] Fig.12 yes Figures 2 to 11 a perspective view of a lower shielded portion of a first overflow device;

[0206] Fig.13 yes Fig.12 A front plan view of the lower sheltered portion;

[0207] Fig.14 yes Fig.12 and 13 a cross-sectional view of the lower shielded portion of;

[0208] Fig.15 is for Figure 1 A perspective view of an alternative second overflow device in a portion of a station shown in FIG.

[0209] Fig.16 yes Fig.15 A rear view of the second overflow device shown in FIG.

[0210] Fig.17 yes Fig.15 and 16 A front view of a second overflow device shown in FIG.

[0211] Fig.18 is a perspective view of a body forming a container in a second overflow arrangement;

[0212] Fig.19 yes Fig.18 A front view of a portion of a second overflow device as shown;

[0213] Fig. 20 is a perspective view of a lower shielded portion of a second overflow device;

[0214] Fig.21 yes Fig. 20 A top view of the lower shielded portion shown in FIG.

[0215] Fig. 22 yes Fig. 20 and 21 a rear view of the lower masking portion shown in ;

[0216] Fig.23 is a perspective view of an upper shielded portion of a second overflow device;

[0217] Fig.24 yes Fig.23 a rear view of the upper masking portion shown in ;

[0218] Fig.25 is a cross-sectional view through a portion of a front wall of a second overflow device formed by an upper shielding portion and a lower shielding portion;

[0219] Fig.26 is for Figure 1 A perspective view of a substrate holding device in an apparatus of FIG.

[0220] Fig. 27 yes Fig.26 A front plan view of a substrate holding device;

[0221] Fig.28 It is along Fig. 27 A cross-sectional view of line AA in FIG.

[0222] Fig.29 is included in Figures 26 to 28 a perspective view of a first upper flow guide portion in a substrate holding device of FIG.

[0223] Fig.30 yes Fig.29 a cross-sectional view of a first upper flow guiding portion;

[0224] Fig.31 yes Fig.29 and 30 a detailed cross-sectional view of a portion of a first upper flow guiding portion;

[0225] Fig.32 is included in Figures 26 to 28 a perspective view of a second upper flow guide portion in a substrate holding device of FIG.

[0226] Fig.33 yes Fig.32 A front plan view of a second upper flow guiding portion;

[0227] Fig.34 yes Fig.32 and 33 a cross-sectional view of a second upper flow guiding portion;

[0228] Fig.35 yes Figures 32 to 34 a detailed cross-sectional view of a portion of a second upper flow guiding portion;

[0229] Fig.36 Is installed in Figures 26 to 27 The substrate holding device of Figures 29 to 35 a cross-sectional view of a portion of a first upper flow guiding portion and a second upper flow guiding portion;

[0230] Fig.37 is included in Figures 26 to 35 A perspective view of one of two identically shaped lower flow guide portions in a substrate holding device of FIG.

[0231] Fig.38 yes Fig.37 A cross-sectional view of a lower flow guide portion of

[0232] Fig.39 yes Fig.37 and 38 a detailed cross-sectional view of a portion of the lower flow guiding portion of

[0233] Fig.40 Yes Figures 37 to 39 The installation shown in Figures 26 to 35 Side plan view of the two lower flow guiding parts in a substrate holding device of . DETAILED DESCRIPTION

[0234] Hereinafter, a method for using a planar substrate 1 ( Figures 26 to 28 ). Instead of being immersed in a bath of treatment liquid, the substrate 1 is wetted on at least one side with the treatment liquid, which flows in the form of a relatively thin film across the major surface of the substrate 1 on that side. This reduces the amount of treatment liquid required, thereby providing environmental and economic benefits. For example, the treatment may include rinsing, desmearing, etching, swelling, reduction or electroplating, including for example electroless electroplating. In fact, the apparatus may include a plurality of treatment stations, each treatment station being configured in a manner to be described in more detail, but the treatment liquid differing between at least two of the stations.

[0235] Although the substrate 1 is referred to as planar, the substrate may be flexible, such as a foil. In particular, the device is suitable for substrates such as printed circuit boards, semiconductor dies or integrated circuit substrates.

[0236] In the embodiment shown, the apparatus is arranged to treat the two main surfaces of the substrate 1 by wetting them with a treatment liquid, which flows down the surface as a balanced film flow substantially over the entire width of the relevant main surface. In view of this, the substrate 1 is held in a substrate holding device 2, which will be described in more detail below. The treatment liquid is directed onto the substrate holding device 2 from either side in the form of a respective liquid stream. The stream is lamellar and follows a parabolic trajectory that intersects the surface of the substrate holding device at an acute angle. A laminar flow is established before the liquid flows onto the main surface of the substrate 1.

[0237] Two examples of apparatus will be described in detail using the same substrate holding device 2. The two examples differ in the means for delivering the liquid flow.

[0238] Since both main surfaces of the substrate 1 are treated, the apparatus in the first example comprises two first overflow devices 3a, 3b ( Figure 1 ). The first overflow devices 3a, 3b are identical, so that only one is described and shown in detail.

[0239] The first overflow device 3 comprises a main body 4 ( Figures 2 to 8), the body forms a container 5 for storing liquid. In the embodiment shown, the body 4 is made in one piece, although surface treatments (including coating and anodizing) are also possible. The body 4 can be molded or machined and made of metal or polymer materials (including polymer composites). The body 4 defines a container interior for storing liquid, which is bounded by a bottom wall and side walls. Viewed from the top, the side walls are quadrilateral, wherein the side walls bound the container interior. Otherwise, viewed from the top, both the container interior and the body 4 have an elongated shape.

[0240] In the embodiment shown, the body 4 has a plurality of elongated openings 6a to 6d ( Figure 4 and 8 ) of the main body 4. The top wall delimits the container interior at the top. Therefore, the main body 4 leaves the container interior partially open at the top. The cover 7 is mounted on the main body 4 to cover the apertures 6a to 6d. In the illustrated embodiment, the cover 7 is fixed to the main body 4 by screws. Please consider other types of fasteners or other types of attachment, such as a reversible spring lock connection.

[0241] A row of discharge channels through the side wall of the container defined by the main body 4 defines a corresponding row of inflow orifices open to the interior of the container 5. At the other end, the discharge channel defines a row of outflow orifices in the external surface 8 of the main body 4. The outflow orifice is retracted relative to the flat main part of the external surface 8 arranged in the elongated recess 9 extending in the row direction. The discharge channel, the inflow orifice and the outflow orifice have an elongated cross-section (transverse to the flow direction). The width of the discharge channel, the inflow orifice and the outflow orifice is greater than its height. In the illustrated embodiment, the discharge channel, the inflow orifice and the outflow orifice have an elongated cross-section, wherein the width is greater than the width of the wall section separating the adjacent discharge channel. In the illustrated embodiment, the cross section is constant, and the discharge channel is straight. The length of the elongated recess is equal to at least 90% of the corresponding size of the container interior. Each of these features helps to establish a relatively uniform flow by forming the wall of the main body 4 of the container 5.

[0242] The first overflow device 3 shown comprises an upper shielding portion 10 ( Figures 9 to 11 ) and the lower shielding portion 11 ( Figures 10 to 14 ). The upper masking part 10 and the lower masking part 11 are each mounted against the outer surface 8 of the body 4. The upper masking part 10 and the lower masking part 11 are mounted in front of the outflow orifice of the discharge channel. The mounting can be carried out by means of screws or other fasteners.

[0243] The upper masking portion 10, the lower masking portion 11 and the elongated recess 9 together define an equalizing channel 12 ( Figure 5 ). This equalizing channel 12 is elongated and closed at the longitudinal ends.

[0244] In the embodiment shown, the upper masking portion 10 has a flat lower surface 13 but has a recess along an edge close to the body 4 which partially defines the equalizing channel 12. The opposing edges of the lower surface 13 are relatively sharp.

[0245] The lower masking portion 11 has an upper surface in which the flat central section 14 is set back relative to the adjacent flat lateral end sections 15a, 15b. The flat central section 14 and the lower surface 13 of the upper masking portion 10 define therebetween a slit 16 forming an aperture 17 ( Figure 5 ) wherein, in use, a sheet-like stream of liquid is discharged from the aperture.

[0246] The slit 16 has a height, a width and a depth, as seen from the outside. The value of the height may be in the range of 0.5 mm to 1.5 mm, for example in the range of 0.6 mm to 1.3 mm. The value of the depth may be at least 10 mm, for example at least 25 mm. This helps to ensure that the liquid stream gushing out of the hole 17 is generally directed horizontally when leaving the hole 17. The maximum value is less important, but may be at most 50 mm. The width decreases from the hole 17 in the direction of the body 4 forming the container. The lateral edges 18a, 18b ( Fig.12 ) extends at an angle to the straight front edge 19, for example an angle in the range of 20° to 40°. This helps prevent the sheet of liquid emerging from the hole 17 from contracting laterally. The front edge 19 is relatively sharp to ensure that a well-defined liquid jet emerges from the hole 17.

[0247] When the upper and lower shielding parts 10 and 11 are mounted to the body 4, the height of the slit 16 can be relatively accurately set by placing a gauge between the upper and lower shielding parts 10 and 11. The gauge is removed after the upper and lower shielding parts 10 and 11 are fixed in place to open the slit 16.

[0248] In use, liquid is pumped by a pump (not shown) through the fitting 21 ( Figure 3 , 4 , 7) a supply conduit (not shown) connected to a supply conduit 20 supplies the first overflow device 3. The supply conduit 20 enters the container interior through the side wall at the longitudinal end of the body 4 and extends substantially over the entire range of the container interior to the opposite longitudinal end. The supply conduit 20 is closed at that end. One or more delivery ports are provided along the length of the section of the supply conduit 20 extending through the container interior. In the illustrated embodiment, these ports include relatively more small holes through the underside of the section of the supply conduit 20 extending through the container interior. The inflow orifice of the discharge channel is at a lower liquid level so that it is impossible for bubbles to enter the discharge channel.

[0249] The first overflow device 3 is provided with a plurality of overflow ports which open into the interior of the container at a level between the level of the inflow orifice of the discharge channel and the highest level of the liquid in the interior of the container. The latter level is the highest level that the free surface of the liquid could reach without the overflow ports. This is usually determined by the upper edge of the inner surface of the side wall delimiting the interior of the container.

[0250] The overflow port includes a plurality of side wall overflow ports 22a to 22d ( Figure 2 ), the side wall overflow port extends through the side wall of the body 4 forming the container 5. The side wall overflow ports 22a to 22d are provided on the side of the body 4 forming the container 5 opposite to the discharge channel, and the side wall overflow ports are at a higher liquid level.

[0251] In the illustrated embodiment, the side wall overflow ports 22a to 22d are greater than one in number and are arranged in a row at a common liquid level. Viewed in the flow direction, the side wall overflow ports 22a to 22d have an elongated cross section with a width greater than their height. The lateral extent of the section of the side wall separating adjacent side wall overflow ports 22a to 22d is less than the width of any of the side wall overflow ports 22a to 22d. Providing a plurality of slit-like overflow ports in succession results in a stronger side wall for a given wall thickness than providing one very wide slit-like overflow port.

[0252] The first overflow device 3 further comprises a flow guide 23 mounted against an outer surface 24 of the body 4 forming the container 5. In the illustrated embodiment, the side wall overflow ports 22a to 22d extend through both the side wall of the body 4 and the plate-like section of the flow guide 23. The outer holes of the side wall overflow ports 22a to 22d are formed in the plate-like section of the flow guide 23. In other embodiments, the flow guide 23 may be located entirely at a lower liquid level than the side wall overflow ports 22.

[0253] The external aperture is defined by a surface segment 25 ( Figure 5 This parallel flow guide surface section 25 transitions into an inclined flow guide surface section 26. The inclined flow guide surface section 26 is angled so that the lower end is away from the parallel flow guide surface section 25 in which the outer holes of the sidewall overflow ports 22a to 22d are defined.

[0254] The inclined flow guide surface section 26 transitions into a finger surface section 27 at the lower end of the inclined flow guide surface section 26. The finger surface section 27 is curved so that the distal ends of the fingers point downward. The fingers are arranged in rows and spaced apart to allow liquid flow to be dispersed and thereby increase ventilation.

[0255] The winglets 28a, 28b define vertical surface sections 29a, 29b facing towards each other and delimiting laterally at least the upper sections of the parallel flow guide surface sections 25 and the inclined flow guide surface sections 26. These vertical surface sections 29a, 29b guide the liquid to flow over the inclined flow guide surface sections 26. The inclined flow guide surface sections 26 carry the overflowing treatment liquid away from the first overflow device 3 to a position close enough to the side wall of the treatment station of the treatment apparatus, where the first overflow device 3 is included, for the liquid to flow downwardly along that side wall.

[0256] The overflow port of the first overflow device 3 further comprises an elongated overflow port 30 in an overflow conduit 31 extending through the interior of the body 4 forming the container 5. In the embodiment shown, the overflow conduit 31 extends through the interior from one end to the other end of the interior in the longitudinal direction. The elongated overflow port 30 is slightly short.

[0257] In the embodiment shown, the elongated overflow port 30 opens into the interior in a direction away from the bottom of the interior of the body 4 forming the container 5. An overflow conduit 31 extends through the side wall of the body 4 forming the container 5 to an overflow conduit fitting 32. This overflow conduit fitting 32 is connected to a return conduit 33 for returning the treated liquid to a pump (not shown) or a reservoir from which the pump is arranged to pump the treated liquid. One or more filters or sedimentation reservoirs may be interposed between the return conduit 33 and the pump.

[0258] In alternative embodiments, there may be more than one overflow port in the overflow conduit 31, rather than a single elongated overflow port 30. Instead of the return conduit 33, a hose may be used.

[0259] The liquid flow gushing out through the slit 16 defined between the upper shielding part 10 and the lower shielding part 11 will flow in the form of a curved sheet, and the curve (i.e., the flow trajectory) is basically parabolic in shape. The liquid flow will gush out in a substantially horizontal direction. The speed is determined only by the hydrostatic pressure. In use, the pump is arranged to supply liquid at a higher volume flow rate than being able to leave the first overflowing device 3 through the discharge channel at a flow rate determined by the hydrostatic pressure. This ensures that there is always an overflow of the processing liquid. The liquid level of the free surface of the liquid in the interior of the main body 4 forming the container 5 is thus determined relatively accurately and remains constant, even if there is a change in the rate of supply of liquid by the pump. Therefore, the discharge speed of the hole 17 defined by the slit 16 formed between the upper shielding part 10 and the lower shielding part 11 is constant. The angle at which the liquid flow impinges on the substrate holding device 2 is also constant.

[0260] The second overflow device 34 ( Figures 15 to 25) includes a body 35 forming a container for storing liquid. In the embodiment shown, the body 35 is made in one piece, although surface treatment (including coating and anodizing) is also possible. The body 35 can be molded or machined and made of metal or polymer material (including polymer composite materials). In a specific embodiment, the body 35 can be obtained by both molding and machining.

[0261] Cavity 36( Fig.18 ) is formed in the body 35. The cavity 36 at least partially delimits the container interior 37 and the two overflow spaces 38, 39. More specifically, the body 35 defines surfaces delimiting the container interior 37 and the overflow spaces 38, 39 on five sides. These are all sides except for one side on which a hole 40 for delivering the liquid as a liquid stream is provided. On that side, the cavity 36 is closed by an upper masking part 41 and a lower masking part 42 mounted to the outside of the body 35.

[0262] Thus, the upper shielding portion 41 and the lower shielding portion 42 form the side walls of the container.

[0263] The upper and lower shielding portions 41, 42 are mounted against a flat outer surface 43 ( Fig.18 , 19 In the illustrated embodiment, a groove 44 for seating one or more sealing elements (not shown) is formed (eg, machined) in the exterior surface 43 .

[0264] The discharge passage is provided through the side wall of the container formed by the upper shielding part 41 and the lower shielding part 42. The discharge passage is defined between the upper shielding part 41 and the lower shielding part 42.

[0265] Discharge channel ( Fig.25 ) comprises a flared section 45 and a slit 46. In use, the slit 46 forms an aperture 40 for delivering liquid passing through the discharge channel as a liquid stream to wet one of the main surfaces of the substrate 1 held in the substrate holding device 2. The flared section 45 interconnects the slit 46 with the container interior 37 and flares outwardly in the height direction towards the container interior 37. This is achieved by providing the upper masking part 41 and the lower masking part 42 with respective bevels 47, 48.

[0266] The slit 46 has a height, a width and a depth as seen from the outside of the second overflow device 34. The height between the hole 40 and the start of the flared discharge channel section 45 is uniform. The width decreases with increasing depth in the direction from the hole to the container interior 37. In use, the slit 46 ensures that a sheet-like liquid stream is discharged.

[0267] The value of the height of the slit 46 may be in the range of 0.5 mm to 1.5 mm, for example in the range of 0.6 mm to 1.3 mm. The value of the depth may be at least 5 mm, for example in the range of 6 mm to 12 mm. The value of the ratio of the depth to the height may be in the range of 5 to 15, for example in the range of 9 mm to 11 mm, for example about 10.

[0268] In the illustrated embodiment, a flat section of the lower surface 49 of the upper masking portion 41 delimits the slit 46. The slit 46 is formed by a central section 50 ( Fig. 20 , 21 ). This central surface section 50 extends between two lateral edges 52a, 52b which are angled with the straight front edge 53, for example at an angle in the range of 20° to 40°. In use, this helps prevent the sheet of liquid emerging from the aperture 40 from contracting laterally. The surface section front edge 53 is relatively sharp to ensure that a well-defined liquid jet emerges from the aperture 40.

[0269] In an alternative embodiment, the upper surface 51 may be flat, and the slot 46 defined by a recessed portion of the upper masking portion 41 .

[0270] When the upper and lower shielding parts 41 and 42 are mounted to the body 35, the height of the slit 46 can be relatively accurately set by placing a gauge between the upper and lower shielding parts 41 and 42. After the upper and lower shielding parts 41 and 42 are fixed in place, the gauge is removed to open the slit 46.

[0271] It should be understood that, viewed from above, the second overflow device 34 has an elongated shape, as does the body 35 and the container interior 37. Likewise, the hole 40 is elongated and extends in the longitudinal direction. In the illustrated embodiment, the container interior 37 is delimited by a plane bottom surface 54.

[0272] The overflow spaces 38, 39 are arranged on either side of the container interior 37, viewed in the longitudinal direction. Thus, in the embodiment shown there are two overflow openings 55, 56 ( Fig.19 ). The discharge channel formed by the flared discharge channel section 45 and the slit 46 defines an inflow orifice which is open only to the container interior 37. There is no direct liquid connection between the overflow spaces 38, 39 and the discharge channel.

[0273] The overflow spaces 38, 39 are separated from the container interior 37 by respective barriers 57, 58. The barriers 57, 58 of the illustrated embodiment are an integral part of the body 35. The barriers 57, 58 act as weirs to define overflow openings 55, 56 extending above respective tops 59, 60 of the barriers 57, 58. The peaks 59, 60 are located at a higher liquid level (relative to the bottom surface 54 of the container interior 37) than the discharge channel. The peaks 59, 60 are lower (relative to the bottom surface 54 of the container interior 37) than the upper edge of the side wall through which the discharge channel extends, at least where that side wall delimits the container interior 37. It should be remembered that in this embodiment, that side wall is formed by the upper masking portion 41 and the lower masking portion 42. Therefore, in use, the liquid level can have a free surface at a level above the peaks 59, 60, thereby allowing liquid in the container interior 37 to overflow into the overflow spaces 38, 39.

[0274] In use, liquid is supplied to the second overflow device 34 by a pump (not shown) through a supply conduit connected to a supply conduit 61 via a fitting 62. The supply conduit 61 opens into the container interior 37 through a supply orifice 63 in the bottom surface 54 defining the container interior 37. Thus, there is a relatively steady upward flow of liquid as liquid overflows through the overflow openings 55, 56. Stagnant zones in the container interior 37 are largely avoided.

[0275] The second overflow device 34 is provided with outflow ports, each of which passes through a corresponding outflow orifice 64, 65 ( Fig.19 ) opens into one of the overflow spaces 38, 39. In the embodiment shown, the outflow port extends through a side wall which is located on the side opposite to the side on which the wall provided with the discharge channel is located. The outflow orifices 64, 65 have at least a lower edge section at the level of the bottom surface delimiting the overflow space 38, 39 arranged to be emptied. When the operation of the second overflow device 34 stops, the overflow space 38, 39 can thus be completely emptied.

[0276] The outflow port connects the overflow spaces 38, 39 to outflow conduit sections 66, 67 ( Fig.15 , 16 In use, liquid is supplied at a rate such that the liquid in the second overflow device 34 has a free surface at a substantially constant level, slightly above the level of the lowest level of the overflow openings 55, 56, which is determined by the position of the peaks 59, 60 of the potential barriers 57, 58.

[0277] The pressure of the liquid at the inflow orifice defined by the discharge channel formed by the flared discharge channel section 45 and the slit 46 is determined by the height difference between the liquid level of the free surface of the liquid and the liquid level of the discharge channel. However, there is a certain distance between the inflow orifice and the bottom surface 54 delimiting the container interior 37. This improves the uniformity of the flow in the longitudinal direction. When the operation of the second overflow device 34 is stopped, the liquid should not continue to flow through the slit 46 for too long. To achieve this, as shown, the second overflow device 34 includes a plurality of displacement bodies 69a to 69f ( Fig.18 , 19 ), the displacement bodies are arranged to reduce the volume of the container interior 37 that can be occupied by liquid while leaving space adjacent thereto for the liquid to form a column of liquid extending to the bottom surface 54. In the illustrated embodiment, the displacement bodies 69a to 69f are suspended above the bottom surface 54. Furthermore, the displacement bodies 69a to 69f are replaceable and, in fact, removable without the need for replacement.

[0278] In an alternative embodiment, one or more displacement formations are provided which are an integral part of the body and which protrude into the container interior 37 .

[0279] In the illustrated embodiment, the barriers 57, 58 present surfaces 70, 71 that delimit the container interior 37 and slope inwardly (i.e., toward the center of the container interior 37) as the distance from the bottom surface 54 that delimits the container interior 37 increases. This also provides the effect of enabling liquid to stop flowing through the drain channel more quickly when the supply of liquid to the container interior 37 is stopped.

[0280] The substrate holding device 2 comprises a support structure 72 ( Figures 26 to 28 ), the support structure 72 is in the form of a frame surrounding the substrate 1 on all sides, viewed perpendicularly to the main surface of the substrate 1.

[0281] In the illustrated embodiment, the support structure 72 includes transversely projecting arms 73a, 73b for engaging a support member (not shown) so as to suspend the support structure 72 in a processing station of a processing device. In the illustrated embodiment, claws 74a, 74b that are open in a downward direction are formed at the distal ends of the transversely projecting arms 73a, 73b. These claws 74a, 74b can engage horizontally extending pins (not shown) of the corresponding support member. Examples of such support members are disclosed in WO 2020 / 260389 A1.

[0282] In an alternative embodiment, the support structure 72 may include a hook or similar device for suspending the support structure 72 on an overhead conveyor, which in turn includes a portion of a support member forming a support for suspending the support structure 72 in a station of the processing equipment.

[0283] In the illustrated embodiment, the substrate holding device 2 comprises first and second upper flow guiding portions 75, 76 and first and second lower flow guiding portions 77a, 77b. The first and second lower flow guiding portions 77a, 77b are identical so that only one of them will be described.

[0284] In use, a substrate 1 is held in a plane by the substrate holding device 2. The substrate 1 occupies an area of ​​the plane framed by the support structure 72. The upper flow guiding portions 75, 76 are supported by the support structure 72 and are located on opposite sides of the plane, as are the lower flow guiding portions 77a, 77b.

[0285] The first upper flow guide portion 75 and the second upper flow guide portion 76 form respective arms of an upper clamping device for clamping the substrate 1 close to the upper edge of the substrate 1. The lower flow guide portions 77a, 77b form respective arms of a lower clamping device for clamping the substrate 1 close to the lower edge of the substrate 1.

[0286] To this end, the first upper flow guide portion 75 is provided with protruding upper pivot stubs 78a, 78b ( Fig.29 ) are pivotally attached to the support structure 72, the pivot stubs defining a pivot axis parallel to the plane in which the substrate 1 is held. The upper pivot stubs 78a, 78b are received in holes (not shown in detail) in the support structure 72. The upper biasing means 79a, 79b ( Fig.36 ) pushes the first upper flow guide portion 75 toward the second upper flow guide portion 76 and applies a clamping force. In the illustrated embodiment, the upper biasing means 79a, 79b are coil springs. In alternative embodiments, the coil springs may include other types of elastic elements, gas springs or magnets.

[0287] Each lower flow guide portion 77 is provided with a protruding lower pivot stub 80a, 80b ( Fig.37 ), the lower pivot stub being used to be pivotally attached to the support structure 72.

[0288] The protruding lower pivot stubs 80a, 80b define a pivot axis parallel to the plane in which the substrate 1 is held. The lower pivot stubs 80a, 80b are received in holes (not shown in detail) in the support structure 72. The lower biasing means 81a, 81b ( Fig.40 ) pushes the lower flow guide portions 77a, 77b toward each other and applies a clamping force. In the illustrated embodiment, the lower biasing means 81a, 81b are also coil springs. In alternative embodiments, the coil springs may include other types of elastic elements, gas springs or magnets.

[0289] In use, the first upper flow guide portion 75 has an inwardly facing surface 82 facing inwardly relative to a plane in which the substrate 1 is arranged to be held and an outwardly facing surface facing outwardly. The inwardly facing surface 82 comprises a strip 83 for uninterruptedly engaging a major surface of the substrate 1 over the entire longitudinal extent of the strip 83. When the strip 83 contacts the (flat) major surface, the remainder of the inwardly facing surface 82 is spaced apart from that surface.

[0290] The strip 83 is provided with grooves or similar surface structures for better engagement. In other words, the surface roughness of the strip 83 is higher than the surface roughness of the other parts of the inner surface 82.

[0291] The outward-facing surface comprises an upper outward-facing surface section 84, on which one of the first overflowing device 3a, 3b or the second overflowing device 34 is arranged to guide the process liquid flow. The upper outward-facing surface section 84 is flat. In use, the upper outward-facing surface section 84 is oriented substantially parallel to the plane in which the substrate 1 is arranged to be held. This means that in use, the upper outward-facing surface section 84 is substantially oriented vertically. The distance between the overflowing device 3, 34 and the first upper flow guiding part 75 is such that the liquid flow impinges on the upper outward-facing surface section 84 from above at an acute angle.

[0292] The first lower outwardly facing surface section 85 extends from the fold 86, thereby forming a transition between the central section of the upper outwardly facing surface section 84 and the lower edge 87. The first lower outwardly facing surface section 85 is flat. The first lower outwardly facing surface section 85 faces downward, that is, the lower edge 87 is closer to the plane in which the substrate 1 is held than the fold 86.

[0293] In the illustrated embodiment, the lower edge 87 is straight.

[0294] The lower edge 87 extends between the lateral edges of the first lower outwardly facing surface segment 85 , which meet the lower edge 87 at respective corners 88 a , 88 b of the first lower outwardly facing surface segment 85 .

[0295] The outwardly facing surface of the first upper flow guiding portion 75 further includes laterally lower outwardly facing surface segments 89a, 89b ( 89b ) spaced from the first lower outwardly facing surface segment 85 and adjacent to the upper outwardly facing surface segment 84. Fig.28 , 30 , 31). The transition occurs at the fold 86, but the laterally lower outwardly facing surface segments 89a, 89b face upwardly. Thus, each laterally lower outwardly facing surface segment 89a, 89b is at an angle α (less than 180°) relative to the upper outwardly facing surface segment 84. Fig.31The laterally lower outwardly facing surface sections 89a, 89b reinforce the first upper flow guiding portion 75 and direct liquid away from the support structure 72.

[0296] The upper outwardly facing surface section 84 is composed of facing surfaces 90a, 90b (eg, transversely) that face toward each other and extend at an angle to the plane in which the substrate is arranged to be held. Fig.30 , 31 , 36) laterally delimited. The facing surfaces 90a, 90b direct the liquid onto the lower outwardly facing surface section 85.

[0297] In use, the second upper flow guiding portion 76 ( Figures 32 to 36 ) has an inwardly facing surface 91 facing inwardly relative to a plane in which the substrate 1 is arranged to be held and an outwardly facing surface facing outwardly. The inwardly facing surface 91 comprises a strip 92 for uninterruptedly engaging a major surface of the substrate 1 over the entire longitudinal extent of the strip 92. When the strip 92 contacts the (flat) major surface, the remainder of the inwardly facing surface 91 is spaced apart from that surface.

[0298] The strip 92 is provided with grooves or similar surface structures for better engagement. In other words, the surface roughness of the strip 92 is higher than the surface roughness of the other parts of the inner surface 91 .

[0299] The outwardly facing surface comprises an upper outwardly facing surface section 93 on which one of the first overflowing device 3a, 3b or the second overflowing device 34 is arranged to guide the process liquid flow. The upper outwardly facing surface section 93 is flat. In use, the upper outwardly facing surface section 93 is oriented substantially parallel to the plane in which the substrate 1 is arranged to be held. Therefore, the upper outwardly facing surface section 93 is substantially oriented vertically. The distance between the overflowing device 3, 34 and the second upper flow guiding portion 76 is such that the liquid flow impinges on the upper outwardly facing surface section 93 from above at an acute angle.

[0300] The second lower outwardly facing surface section 94 extends from the fold 95, thereby forming a transition between the central section of the upper outwardly facing surface section 93 and the lower edge 96. The second lower outwardly facing surface section 94 is flat. The second lower outwardly facing surface section 94 faces downward, that is, the lower edge 96 is closer to the plane in which the substrate 1 is held than the fold 95.

[0301] In the illustrated embodiment, the lower edge 96 is straight.

[0302] The lower edge 96 extends between the lateral edges of the first lower outwardly facing surface segment 94 , which meet the lower edge 96 at respective corners 97 a , 97 b of the first lower outwardly facing surface segment 94 .

[0303] The outwardly facing surface of the first upper flow guiding portion 76 further includes laterally lower outwardly facing surface segments 98a, 98b spaced from the centrally located second lower outwardly facing surface segment 94 and adjacent to the upper outwardly facing surface segment 93. The transition occurs at the fold 95, but the laterally lower outwardly facing surface segments 98a, 98b face upwardly. Thus, each laterally lower outwardly facing surface segment 98a is at an angle β ( Fig.35 ) extends to the upper outwardly facing surface section 93. This angle β is typically greater than 90°. The laterally lower outwardly facing surface sections 98a, 98b reinforce the second upper flow guiding portion 76 and direct the liquid away from the support structure 72.

[0304] The upper outwardly facing surface section 93 is composed of facing surfaces 99a, 99b ( Fig.33 ) are delimited laterally. The facing surfaces 99a, 99b direct the liquid onto the lower outwardly facing surface sections 94, 98a, 98b.

[0305] In use, each lower flow guiding portion 77 ( Figures 37 to 40 ) has an inwardly facing surface 100 facing inwardly relative to a plane in which the substrate 1 is arranged to be held and an outwardly facing surface facing outwardly. The inwardly facing surface 100 comprises an elongated strip 101 for uninterruptedly engaging a major surface of the substrate 1 over the entire longitudinal extent of the strip 101. When the strip 101 contacts the (flat) major surface, the remainder of the inwardly facing surface 100 is spaced apart from that surface of the substrate 1.

[0306] The strip 101 is provided with grooves or similar surface structures for better bonding. In other words, the surface roughness of the strip 101 is higher than the surface roughness of the other parts of the inner facing surface 100.

[0307] The outwardly facing surface comprises an inclined upper outwardly facing surface section 102 extending to an upper edge 103 and inwardly inclined towards a plane in which the substrate 1 is arranged to be held in the direction of the upper edge 103 .

[0308] In the illustrated embodiment, the inclined upper outwardly facing surface section 102 is flat.

[0309] The strip 101 extends longitudinally along the upper edge 103 and transversely to the upper edge 103 .

[0310] The upper edge 103 extends between the lateral edges of the first inclined upper outwardly facing surface section 102 , which meet the upper edge 103 at respective first corners 104a , 104b of the inclined upper outwardly facing surface section 102 .

[0311] The lateral edges extend from the first corners 104a, 104b to the respective second corners 105a, 105b ( Fig.37 ), wherein the inclined upper outwardly facing surface section 102 is widened to increase the width of the inclined upper outwardly facing surface section 102.

[0312] The wider portion of the inclined upper outwardly facing surface section 102 is delimited laterally by facing surfaces 106 (only one of which is visible in the figure) that face towards each other and extend at an angle (e.g. transversely) relative to the plane in which the substrate 1 is arranged to be held. The plate-like segments 107a, 107b defining the facing surfaces 106 are interconnected with the plate-like segments defining the inclined upper outwardly facing surface section 102 by respective webs 108a, 108b extending at an angle relative to both of the plate-like segments.

[0313] The lower outwardly facing surface section 109 extends from the fold 110, thereby forming a transition between the inclined upper outwardly facing surface section 102 and the lower outwardly facing surface section 109. The lower outwardly facing surface section 109 is flat. In use, the lower outwardly facing surface section 109 is oriented generally parallel to the plane in which the substrate 1 is arranged to be held. In either case, the inclined upper outwardly facing surface section 102 and the lower outwardly facing surface section 109 extend at an angle greater than 90° to each other. The lower outwardly facing surface section 109 primarily performs a protective function to keep liquid away from the support structure.

[0314] In use, the process liquid is directed onto the upper outwardly facing surface sections 84, 93 of one of the first upper flow guide portion 75 and the second upper flow guide portion 76 and from there flows as a balanced film flow over the lower outwardly facing surface sections 85, 94 onto the major surface of the substrate 1. The film flow then continues onto the inclined upper outwardly facing surface section 102 of the lower flow guide portion 77 before leaving the substrate holding device 2. The liquid is then collected for recycling, optionally after filtration or another type of treatment. Essentially, the entire exposed area of ​​the major surface of the substrate 1 is wetted in a relatively uniform manner.

[0315] The invention is not limited to the embodiments described above, which may vary within the scope of the appended claims. For example, in an alternative embodiment, the second upper flow guide portion 76 may be pivotable relative to the support structure 72 in the same manner as the first upper flow guide portion 75 .

[0316] Reference Number List

[0317] 1 - Substrate

[0318] 2 - Substrate holding device

[0319] 3 - First overflow device

[0320] 4 - Main Body

[0321] 5 - Container

[0322] 6a-d - Top wall openings

[0323] 7 - Cover

[0324] 8 - Front exterior surface

[0325] 9 - elongated concave portion

[0326] 10 - Upper masking section

[0327] 11 - Lower masking section

[0328] 12 - Balanced Channels

[0329] 13 - Lower surface of upper masking part

[0330] 14 - Central section of the upper surface of the lower shielding portion

[0331] 15a, b - Sections of the upper surface of the lower shielding portion at the lateral ends

[0332] 16 - Slit

[0333] 17 - Hole

[0334] 18a, b - lateral edges of the central section of the upper surface of the lower masking part

[0335] 19 - front edge of the central section of the upper surface of the lower masking part

[0336] 20 - Supply catheter

[0337] 21 - Supply accessories

[0338] 22a-d - Overflow ports in side walls

[0339] 23 - Flow guide

[0340] 24 - Rear external surface

[0341] 25 - Parallel flow guide surface section

[0342] 26 - Inclined flow guide surface section

[0343] 27 - Finger-like surface segments

[0344] 28a,b - Winglets

[0345] 29a,b - vertical surface segments

[0346] 30 - Slim overflow port

[0347] 31 - Overflow duct

[0348] 32 - Overflow Tube Accessories

[0349] 33 - Return pipe

[0350] 34 - Second overflow device

[0351] 35 - Main Body

[0352] 36 - Cavity

[0353] 37 - Inside the container

[0354] 38 - First overflow space

[0355] 39 - Second overflow space

[0356] 40 - Hole

[0357] 41 - Upper masking section

[0358] 42 - Lower masking section

[0359] 43 - External surface of the body

[0360] 44 - Grooves in the external surface

[0361] 45 - Flared discharge channel section

[0362] 46 - Slit

[0363] 47 - Bevel on upper masking part

[0364] 48 - Bevel on lower masking section

[0365] 49 - Lower surface of upper masking part

[0366] 50 - Center surface segment

[0367] 51 - upper surface of the lower masking portion

[0368] 52a, b - Transverse surface segment edges

[0369] 53 - Surface segment front edge

[0370] 54 - Bottom surface

[0371] 55 - First overflow port

[0372] 56 - Second overflow port

[0373] 57 - First Barrier

[0374] 58 - Second Barrier

[0375] 59 - The Peak of the First Barrier

[0376] 60 - Peak of the Second Barrier

[0377] 61 - Supply catheter

[0378] 62 - Supply Accessories

[0379] 63 - Supply orifice

[0380] 64 - first outflow orifice

[0381] 65 - Second outflow orifice

[0382] 66 - first outflow conduit segment

[0383] 67 - Second outflow conduit section

[0384] 68 - Reflux Catheter

[0385] 69a-f - Displacement Body

[0386] 70 - first barrier surface

[0387] 71 - Second barrier surface

[0388] 72 - Support structure

[0389] 73a,b - Arm

[0390] 74a,b - Claw

[0391] 75 - first upper flow guiding section

[0392] 76 - Second upper flow guiding section

[0393] 77a,b - Lower flow guiding section

[0394] 78a,b - Pivoting stub

[0395] 79a,b - Upper biasing device

[0396] 80a,b - Pivoting stub of lower flow guiding section

[0397] 81a,b - Lower biasing device

[0398] 82 - Inwardly facing surface of the first upper flow guiding portion

[0399] 83 - Strip of the inner facing surface of the first upper flow guiding portion

[0400] 84 - Upper outwardly facing surface section of the first upper flow guiding portion

[0401] 85 - lower outward facing surface section of the first upper flow guiding portion

[0402] 86 - Fold in the outwardly facing surface section of the first upper flow guiding portion

[0403] 87 - Lower edge of the first upper flow guiding portion

[0404] 88a, b - Corner of the lower outer facing surface section of the first upper flow guiding portion

[0405] 89a, b - Laterally lower outwardly facing surface section of the first upper flow guiding portion

[0406] 90a, b - facing surface of the first upper flow guiding portion

[0407] 91 - Inwardly facing surface of the second upper flow guiding portion

[0408] 92 - Strip of the inner facing surface of the second upper flow guiding portion

[0409] 93 - Upper outwardly facing surface section of the second upper flow guiding portion

[0410] 94 - lower outwardly facing surface section of the second upper flow guiding portion

[0411] 95 - Fold in the outwardly facing surface of the second upper flow guiding portion

[0412] 96 - lower edge of the second upper flow guiding portion

[0413] 97a, b - Corner of the lower outer facing surface section of the second upper flow guiding portion

[0414] 98a, b - Laterally lower outwardly facing surface section of the second upper flow guiding portion

[0415] 99a, b - facing surface of the second upper flow guiding portion

[0416] 100 - Inwardly facing surface of the lower flow guiding portion

[0417] 101 - Strips of the inner facing surface of the lower flow guiding part

[0418] 102 - inclined upper outwardly facing surface section

[0419] 103 - Upper edge of the lower flow guide portion

[0420] 104a,b - first corner

[0421] 105a,b - Second corner

[0422] 106 - facing surface of the lower flow guiding portion

[0423] 107a, b - Plate-shaped segments of the lower flow guiding part

[0424] 108a,b - Web

[0425] 109 - lower outwardly facing surface section of the lower flow guiding portion

[0426] 110 - Fold in the outwardly facing surface section of the lower flow guiding part.

Claims

1. A device for delivering a liquid stream to wet the surface of a vertically held planar substrate (1), The device comprises a container (5) for storing a liquid, wherein the container (5) is provided with at least one discharge channel through a side wall of the container (5), each discharge channel defining a respective inflow orifice opening into the interior (37) of the container (5), wherein the device is provided with at least one hole (17; 40) in the exterior of the device to deliver liquid through at least one of the discharge channels as the flow, and wherein the device is provided with at least one delivery port which opens into the interior (37) of the container (5) and is in fluid communication with at least one connecting device (21; 62) for connecting the device to a supply conduit (61) for supplying liquid to the device, Features At least one overflow port opens into the interior (37) of the container (5) at a liquid level between at least one discharge channel inflow opening and the highest liquid level in the container interior (37) to drain liquid out of the container interior (37).

2. The device according to any one of the preceding claims, The number of the exhaust channels is greater than one.

3. The device according to claim 1 or 2, The holes (17; 40) are formed by slits (16; 46).

4. The device according to claim 2 and 3, wherein the discharge passage defines a respective outflow orifice at an end of the discharge passage opposite the respective inflow orifice, and The device comprises a channel (12) extending parallel to the slit (16) and in fluid communication with the slit (16), and the outflow orifice opens into the channel (12).

5. The device according to claim 3 or 4, wherein the discharge passage defines a respective outflow orifice at an end of the discharge passage opposite the respective inflow orifice, wherein the device comprises at least a first masking part (10, 11) which is distinct from the container (5) and which is mounted to the outside of the container (5) in front of the outflow orifice, and The slit (16) is defined between the first shielding portion (10, 11) and one of a second shielding portion (10, 11) mounted to the exterior of the container (5) and a protruding portion of the container (5).

6. The device according to any one of claims 3 to 5, wherein the slit (16) has a height, a width and a depth as viewed from the outside of the device, and The width decreases as the depth from the hole (17) increases in the direction of the container (5).

7. The device according to any one of the preceding claims, Wherein the at least one overflow port comprises at least one overflow port (22a to 22d) extending through a side wall of the container (5).

8. The device according to any one of the preceding claims, wherein the at least one overflow opening comprises at least one overflow port (30) defined in a conduit (31) extending through at least a portion of the interior (37) of the container (5), for example at least one overflow port (30) opening into the interior (37) in a direction away from the bottom of the interior (37) of the container (5).

9. The device according to any one of the preceding claims, wherein the at least one overflow port comprises at least one overflow port (30) which is in fluid communication with a connection device (32) for connecting to a conduit (33) to carry liquid overflowing into the at least one overflow port (30) away from the device, wherein at least the interior (37) of the container (5) has an elongated shape when viewed from above, and Wherein at least one (eg all) of the drainage channels extend through the side wall on a longer side of the interior (37) of the container (5).

10. A system for delivering a liquid stream to wet the surface of a vertically held planar substrate (1), comprising: at least one overflow device (3; 34), for example in the form of a device according to any of the preceding claims, Each overflow device (3; 34) comprises a container (5) for storing a liquid, wherein the container (5) is provided with at least one discharge channel through a side wall of the container (5), each discharge channel defining a respective inflow orifice opening into the interior (37) of the container (5), The overflow device (3; 34) is provided with at least one hole (17; 40) in the exterior of the device (3) to deliver liquid passing through at least one of the discharge channels as the flow; and a liquid supply system for supplying liquid to the interior (37) of the container (5) of each overflow device (3; 34), Characterized in that the system is configured to maintain the level of the free surface of the liquid in the interior (37) of the container (5) of each overflow device (3; 34) at a level between at least one discharge channel inflow orifice and the highest liquid level in the interior (37) of the container (5).

11. An apparatus for non-immersion wet chemical treatment of planar substrates (1), comprising at least one substrate holding device (2), at least one processing station, at least one support for suspending the substrate holding device (2) at least in the processing station, and at least one system according to claim 22, which is arranged in the processing station to guide a liquid flow onto at least one of the substrate (1) and the substrate holding device (2).

12. A method for manufacturing a device (3) according to claim 5 or 6, comprising: Providing the container (5) and at least the first shielding portion (10, 11); placing a gauge having a dimension defining the height of the slit (16) as viewed in the flow direction between the first masking portion (10, 11) and the second masking portion (10, 11) and the one of the protruding portions of the container (5) to define the slit (16); securing at least the first masking portion (10, 11) to the container (5); and The gauge is removed from the slot (16).

13. A method for wetting the surface of a vertically held planar substrate (1), wherein a liquid is supplied to at least one device (3; 34) according to any one of claims 1 to 9, and The liquid is supplied to the device (3; 34) at a flow rate that is at least equal to the total flow rate of the liquid through the at least one discharge channel.

14. The method according to claim 13, comprising: Mounting the substrate (1) to a substrate holding device (2), the substrate holding device comprising a support structure (72) and at least one clamping device supported by the support structure (72) to hold the substrate (1) in a plane; suspending the support structure (72) to hold the substrate (1) in a vertical orientation; and The liquid flow is directed onto an upper outwardly facing surface segment (84) of an outwardly facing surface of an upper flow guide portion (75) arranged on one side of the plane, the outwardly facing surface facing outwardly relative to the plane to establish a film flow onto the main surface of the substrate (1) over the upper outwardly facing surface segment (84).

15. A method according to claim 14, comprising using an apparatus according to claim 11.

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