An integrated silane gas reaction device

Abstract

The present invention relates to an integrated silane gas reaction device, including: a buffer tank for reducing the exhaust gas flow rate; a reactor, in which the exhaust gas undergoes a spontaneous combustion reaction; a dust collector for removing dust particles mixed in the exhaust gas; an exhaust pipe installed on one side of the dust collector and interconnected with the inside of the dust collector; a notch provided on the exhaust pipe, the number of which is set to two; a filter plate slidably arranged in the notch, the number of which is the same as the number of notches; a fixed frame installed on one side of the dust collector; a switching component provided on the fixed frame, used to drive two filter plates to engage with the notch in turn; a positioning component provided under the exhaust pipe, used to position the filter plate engaged with the notch. The integrated silane gas reaction device provided by the present invention realizes that the incomplete gear can alternately drive the two filter plates to abut and release the corresponding notches when it rotates one circle through the cooperation of multiple components such as incomplete gears, driving gears, screw rods, and lifting cylinders, thereby ensuring that the filter plates can be cleaned regularly.

Description

Technical Field

[0001] The invention relates to the technical field of waste gas treatment, and in particular to an integrated silane gas reaction device. Background Art

[0002] The integrated silane gas reaction unit is a highly integrated chemical production equipment, which is used to efficiently produce high-purity silane gas from raw materials (such as metallurgical grade silicon, hydrogen chloride, etc.) through a series of chemical reactions and distillation separation processes. However, a certain amount of waste gas will be generated during the production process. This type of waste gas needs to be subjected to a series of purification treatments before being discharged into the atmosphere, and can only be discharged after meeting the emission standards.

[0003] When treating exhaust gas, it is necessary to first fill the exhaust gas into the reactor to make the exhaust gas self-ignite inside. After self-ignition, silica dust will be produced, and the dust will flow into the subsequent dust collector along with the exhaust gas. There are many types of dust collectors to choose from, and the commonly used ones are bag dust collectors, wet dust collectors, electrostatic dust collectors, etc. For example, using a bag dust collector, the exhaust gas first passes through multiple filter bags arranged inside the dust collector. The filter bags can filter out dust particles mixed in the exhaust gas. However, if the filter bags are damaged or fall off during use, part of the exhaust gas will not be filtered well. Therefore, a filter screen is usually placed at the outlet duct to achieve the effect of secondary filtration. However, long-term use of the filter screen will cause the filter holes on the filter screen to be blocked, so it needs to be cleaned regularly. When cleaning, the machine needs to be turned off, and then the filter screen needs to be removed for cleaning, which will affect the equipment's treatment efficiency of the exhaust gas. Secondly, if the detachable filter plate is not installed properly during use, it will shake, which will affect the filtration quality. Summary of the invention

[0004] Based on this, it is necessary to provide an integrated silane gas reaction device that can efficiently purify waste gas in order to solve the above technical problems.

[0005] The present invention provides an integrated silane gas reaction device, comprising: Surge tank, used to reduce exhaust gas flow rate; The reactor, where the exhaust gas undergoes a spontaneous combustion reaction; Dust collector, to remove dust particles mixed in the exhaust gas; An exhaust pipe is installed on one side of the dust collector and is connected to the inside of the dust collector; The slots are provided on the exhaust pipe, and the number of the slots is set to two; filter plates, slidably disposed in the slots, the number of which is the same as the number of the slots; A fixing frame, installed on one side of the dust collector; A switching assembly, arranged on the fixing frame, for driving the two filter plates to engage with the notches in turn; A positioning assembly is arranged below the exhaust duct and is used for positioning the filter plate engaged with the slot. The switching assembly includes a rotating shaft, which is rotatably connected to the fixed frame. A lifting cylinder is fixedly provided at the bottom of the filter plate. A screw rod is connected to the internal thread of the lifting cylinder. The bottom of the screw rod is rotatably connected to the fixed frame. A connecting rod is slidably connected between the lifting cylinder and the fixed frame. A driving gear is fixedly provided on the outer side of the screw rod. An incomplete gear is fixedly sleeved on the outer side of the rotating shaft. The incomplete gear is meshed with the driving gear for transmission.

[0006] In one of the embodiments, the exhaust pipe is provided with grooves axially symmetrically on both sides of the notch, a baffle is slidably arranged in the groove, and a return spring is fixedly arranged between one end of the baffle and the inner wall of the groove.

[0007] In one embodiment, two baffles are provided with notches at one end close to each other, and inclined grooves are axially symmetrically provided on both sides of the top of the filter plate, and the inclined grooves are movably abutted against the notches.

[0008] In one embodiment, the positioning assembly includes a fixed frame, and movable grooves are axially symmetrically provided on both sides of the fixed frame. A movable block is slidably arranged in the movable groove, and a clamping groove is provided on the movable block. The clamping groove is movably connected to the bottom of the filter plate, and a positioning spring is fixedly arranged between one end of the movable block and the inner wall of the movable groove.

[0009] In one of the embodiments, two fixed frames are provided with transverse grooves at one end close to each other, a rotating rod is rotatably arranged in the transverse groove, a deflection rod is fixedly sleeved on the outer side of the rotating rod, and transverse blocks are axially symmetrically slidably arranged at both ends of the deflection rod in the transverse groove, the transverse blocks are movably abutted against the deflection rod, and the transverse blocks are fixedly connected to the moving block.

[0010] In one embodiment, the rotating rod has one end away from the deflection rod and moves through the bottom of the transverse groove and a rotating gear is fixedly provided at the end. A circular ring is fixedly provided on the top of the rotating shaft, and a driving gear is provided on the circular ring. The driving gear meshes with the rotating gear for transmission.

[0011] In one of the embodiments, round rods are axially symmetrically arranged at both ends of the fixed frame, a cam is arranged on the fixed sleeve outside the round rod, a movable frame is arranged on the movable sleeve outside the cam, fixed rods are fixedly arranged at both ends of the movable frame, a sleeve is arranged on the movable sleeve outside the fixed rod, and the sleeve is fixedly connected to the fixed frame, wherein a brush plate is fixedly arranged on the end of the fixed rod close to the filter plate, and the brush plate is movably abutted against the filter plate.

[0012] In one of the embodiments, one end of the round rod movably passes through the cam and a movable gear is fixedly provided at the end, and a rack is fixedly provided at one side of the lifting cylinder, and the rack is meshed with the movable gear for transmission.

[0013] The above-mentioned integrated silane gas reaction device, through the cooperation of multiple components such as incomplete gears, driving gears, screw rods, lifting cylinders, etc., realizes that one rotation of the incomplete gears can alternately drive the two filter plates to abut and release the abutment with the corresponding grooves, thereby ensuring that the filter plates can be cleaned regularly; through the cooperation of multiple components such as moving blocks, slots, positioning springs, etc., it can be ensured that the filter plates maintain stability during use; through the cooperation of multiple components such as round rods, cams, moving frames, etc., it is realized that the brush plate can clean the filter plate during the lifting process of the filter plate, thereby ensuring the cleanliness of the filter plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction is given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0015] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the structure of the fixing frame in the present invention; Figure 3 It is a structural schematic diagram of the notch in the present invention; Figure 4 is a cross-sectional view of the exhaust duct in the present invention; Figure 5 It is a schematic diagram of the structure of the incomplete gear in the present invention; Figure 6 for Figure 5 The enlarged schematic diagram of part A in the middle; Figure 7 It is a structural schematic diagram of the positioning component in the present invention; Figure 8 It is a schematic diagram of the internal structure of the transverse groove in the present invention; Fig. 9 It is a schematic diagram of the positional relationship between the ring and the two rotating gears in the present invention; Fig.10 It is a schematic diagram of the top view structure of the fixing frame in the present invention.

[0016] Reference numerals: 1. Buffer tank; 2. Reactor; 3. Dust collector; 4. Exhaust duct; 41. Notch; 42. Groove; 5. Filter plate; 51. Inclined slot; 6. Fixed frame; 7. Switching assembly; 71. Rotating shaft; 72. Lifting cylinder; 73. Screw rod; 74. Connecting rod; 75. Driving gear; 76. Incomplete gear; 8. Positioning assembly; 81. Fixed frame; 811. Transverse slot; 82. Moving slot; 83. Moving block; 84. Slot; 85. Positioning spring; 9. Baffle; 91. Notch; 10. Rotating rod; 11. Deflection rod; 12. Transverse block; 13. Rotating gear; 14. Ring; 15. Driving gear; 16. Round rod; 17. Cam; 18. Moving frame; 19. Fixed rod; 20. Sleeve; 21. Brush plate; 22. Movable gear; 23. Rack; 24. Reset spring. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0018] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of the present invention are for illustrative purposes only and do not represent the only implementation method.

[0019] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0020] In the present invention, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediate medium. Moreover, a first feature being “above”, “above” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0021] Unless otherwise defined, all technical and scientific terms used in the specification of the present invention have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used in the specification of the present invention includes any and all combinations of one or more related listed items.

[0022] Combine the following Figure 1-Figure 10 An integrated silane gas reaction device of the present invention is described.

[0023] like Figure 1-Figure 7 As shown, in one embodiment, it includes: Buffer tank 1, used to reduce the exhaust gas flow rate; Reactor 2, where the exhaust gas undergoes a spontaneous combustion reaction; Dust collector 3, to remove dust particles mixed in the exhaust gas; The exhaust pipe 4 is installed on one side of the dust collector 3 and is connected to the inside of the dust collector 3; The slots 41 are provided on the exhaust pipe 4, and the number of the slots 41 is two; The filter plates 5 are slidably disposed in the slots 41, and the number of the filter plates 5 is the same as the number of the slots 41; A fixing frame 6 is installed on one side of the dust collector 3; The switching assembly 7 is arranged on the fixing frame 6 and is used to drive the two filter plates 5 to engage with the notches 41 in turn; The positioning assembly 8 is arranged below the exhaust duct 4, and is used for positioning the filter plate 5 engaged with the slot 41. The switching assembly 7 includes a rotating shaft 71, which is rotatably connected to the fixing frame 6. A lifting cylinder 72 is fixedly provided at the bottom of the filter plate 5. The lifting cylinder 72 is connected with a screw rod 73 through an internal thread adapter. The bottom of the screw rod 73 is rotatably connected to the fixing frame 6. A connecting rod 74 is slidably connected between the lifting cylinder 72 and the fixing frame 6. A driving gear 75 is fixedly provided on the outer side of the screw rod 73. An incomplete gear 76 is fixedly provided on the outer side of the rotating shaft 71. The incomplete gear 76 is meshed with the driving gear 75 for transmission.

[0024] Specifically, the buffer tank 1 is connected to the reaction device through a pipeline, and the waste gas generated during the preparation process of the reaction device enters the buffer tank 1 through the pipeline to slow down the gas flow rate and provide a stable airflow for subsequent treatment, which helps to reduce the accumulation of static electricity and pressure fluctuations caused by excessive flow rate, thereby reducing the risk of explosion. In addition, nitrogen needs to be filled into the buffer tank 1, because the waste gas contains hydrogen and ammonia in addition to silane gas. Nitrogen is an inert gas that does not participate in chemical reactions. It can dilute the combustible components in the waste gas (such as hydrogen and silane gas) and reduce their proportion in the mixed gas, thereby reducing the possibility of reaching the explosion limit. By adjusting the amount of nitrogen charged, the concentration of the mixed gas can be controlled to keep it away from the explosion limit range, significantly improving the safety of the system. The exhaust gas passing through the buffer tank 1 enters the reactor 2. The exhaust gas enters the reactor 2 and undergoes a spontaneous combustion reaction to produce silica dust. Subsequently, the gas containing the dust enters the dust collector 3. The buffer tank 1, the reactor 2, and the dust collector 3 are also connected by a pipeline. In this application, the dust collector 3 adopts a bag dust collector 3, which is provided with a plurality of filter bags inside to filter out dust particles mixed in the exhaust gas. Under normal circumstances, the exhaust gas can be made The emission standard is met. However, if the emission index of the exhaust gas is high or the filter bag is worn or the seal is not tight during long-term use, filter plates 5 can be set in the two slots 41 to further ensure the filtering effect of the exhaust gas. During use, only one slot 41 is placed with a filter plate 5 in the same time period, and the other slot 41 is not placed. The filter plate 5 corresponding to the slot 41 is located below the exhaust pipe 4 and can be cleaned. When the filter plate 5 in the first slot 41 has been used for a long time, the filter plate 5 below the second slot 41 is driven by the switching component 7 to be opposite to the slot 41. The filter plates 5 are aligned with the notches 41, and the filter plates 5 in the first notch 41 are moved downward to the bottom of the notch 41 to clean the surface. The switching assembly 7 can drive the two filter plates 5 to alternately abut against the notches 41 to ensure that the cleaned filter plates 5 abut against the notches 41, thereby ensuring the filtering efficiency of the exhaust gas. When the filter plates 5 abut against the notches 41, the positioning assembly 8 ensures that the filter plates 5 remain stable during use, because the gas entering the exhaust pipe 4 from the bag filter 3 needs to be pumped by the fan, and because the amount of dust-containing gas to be treated in industrial production is usually large, it needs to be The air flow and velocity are maintained at a certain level by the fan extraction to ensure the continuity and stability of the production process. A large air volume will cause the filter plate 5 to shake to a certain extent. The positioning component 8 can well ensure the stability of the filter plate 5. The fixing frame 6 provides support for the switching component 7. In the initial state, the filter plate 5 close to the dust collector 3 is located in the notch 41, and the other filter plate 5 is located below the notch 41. When the first filter plate 5 needs to be cleaned after being used for a period of time, the rotating shaft 71 is rotated clockwise to drive the incomplete gear 76 to rotate clockwise. Only a half-circle gear is set on the outside of the incomplete gear 76.The rotation of 180 degrees will first mesh with the driving gear 75 away from the dust collector 3 and drive the corresponding screw rod 73 to rotate. The counterclockwise rotation of the screw rod 73 will drive the corresponding lifting cylinder 72 to move upward, thereby driving the corresponding filter plate 5 to move upward until it abuts and aligns with the corresponding notch 41. The connecting rod 74 slides along the surface of the fixing frame 6 to prevent the lifting cylinder 72 from rotating with the rotation of the screw rod 73 during the lifting process. The incomplete gear 76 rotates 180 degrees clockwise and then continues to rotate 180 degrees in the same direction to return to the initial position. During this process, the incomplete gear 76 does not It will mesh with the driving gear 75 far from the dust collector 3, and will drive the driving gear 75 and the screw rod 73 near the dust collector 3 to rotate counterclockwise. The rotation of the screw rod 73 will drive the corresponding lifting cylinder 72 and the filter plate 5 to move downward. The filter plate 5 will move downward for cleaning after being used for a period of time. After the cleaning is completed, the filter plate 5 far from the dust collector 3 will be used for a period of time and the incomplete gear 76 will rotate counterclockwise, which will alternately drive the two filter plates 5 to contact and release the contact with the notch 41 again, so as to ensure that the surface of the filter plate 5 filtering the exhaust gas in the notch 41 is clean.

[0025] See also Figure 3-Figure 4 As shown, in this embodiment, the exhaust pipe 4 is axially symmetrically provided with grooves 42 on both sides of the notch 41 , a baffle 9 is slidably arranged in the groove 42 , and a return spring 24 is fixedly arranged between one end of the baffle 9 and the inner wall of the groove 42 .

[0026] Specifically, when the filter plate 5 is located in the slot 41, the baffles 9 on both sides are located in the groove 42, and the reset spring 24 is in a compressed state. When the filter plate 5 moves downward and no longer abuts against the slot 41, the baffles 9 on both sides are pushed outward by the reset spring 24 until they abut against each other, thereby covering the slot 41 and preventing the gas that has not been filtered for the second time from overflowing through the side slot 41.

[0027] See also Figure 3-Figure 4 As shown, in this embodiment, two baffles 9 are provided with notches 91 at one end close to each other, and inclined grooves 51 are axially symmetrically provided on both sides of the top of the filter plate 5 , and the inclined grooves 51 are movably abutted against the notches 91 .

[0028] Specifically, when the filter plate 5 is located below the slot 41, the two baffles 9 are in an abutting state. Moving the filter plate 5 upward will cause the inclined groove 51 on the top of the filter plate 5 to abut against the notch 91 of the baffle 9, thereby pushing the two baffles 9 away from each other until they move into the groove 42. The design of the inclined groove 51 and the notch 91 can facilitate the filter plate 5 to abut and align with the slot 41.

[0029] See also Figure 7-Figure 8As shown, in this embodiment, the positioning assembly 8 includes a fixed frame 81, and movable grooves 82 are axially symmetrically provided on both sides of the fixed frame 81. A movable block 83 is slidably arranged in the movable groove 82. A clamping groove 84 is provided on the movable block 83, and the clamping groove 84 is movably engaged with the bottom of the filter plate 5. A positioning spring 85 is fixedly arranged between one end of the movable block 83 and the inner wall of the movable groove 82.

[0030] Specifically, when the filter plate 5 is abutted and aligned with the notch 41, the two sides of the bottom of the filter plate 5 are located in the slots 84 opened by the moving blocks 83 on both sides, so that the stability of the filter plate 5 during use can be ensured and there will be no shaking. When the filter plate 5 needs to move downward, the moving blocks 83 are first moved away from each other on both sides so that the slots 84 are no longer engaged with the bottom of the filter plate 5. The moving blocks 83 will compress the positioning springs 85 during the movement along the moving slots 82 opened in the fixed frame 81, and then the filter plate 5 can be moved downward for cleaning.

[0031] See also Figure 7-Figure 8 As shown, in the present embodiment, two fixed frames 81 are provided with transverse grooves 811 at one end close to each other, a rotating rod 10 is rotatably arranged in the transverse grooves 811, a deflection rod 11 is fixedly sleeved on the outer side of the rotating rod 10, and transverse blocks 12 are axially symmetrically slidably arranged at both ends of the deflection rod 11 in the transverse grooves 811, the transverse blocks 12 are movably abutted against the deflection rod 11, and the transverse blocks 12 are fixedly connected to the moving block 83.

[0032] Specifically, when the slot 84 is engaged with the two sides of the bottom of the filter plate 5, the positioning spring 85 is in a normal telescopic state, and the two ends of the deflection rod 11 are not in contact with the two transverse blocks 12. When it is necessary to release the engagement between the slot 84 and the filter plate 5, the rotating rod 10 is rotated 90 degrees. The rotation of the rotating rod 10 90 degrees will drive the two ends of the deflection rod 11 to gradually contact the transverse blocks 12. In this process, the transverse blocks 12 on both sides will be pushed away from each other. The moving away of the transverse blocks 12 will also drive the moving blocks 83 to move away from each other, thereby compressing the positioning spring 85, and the slot 84 is no longer engaged with the filter plate 5. At this time, the filter plate 5 can be moved downward for cleaning.

[0033] See also Figure 6-Figure 10 As shown, in this embodiment, one end of the rotating rod 10 away from the deflection rod 11 movably passes through the bottom of the transverse groove 811 and a rotating gear 13 is fixedly provided at the end, a circular ring 14 is fixedly provided on the top of the rotating shaft 71, and a driving gear 15 is provided on the circular ring 14, and the driving gear 15 is meshed with the rotating gear 13 for transmission.

[0034] Specifically, in the initial state, the filter plate 5 close to the dust collector 3 is located in the slot 41, and the other filter plate 5 is located below the slot 41. The two sides of the bottom of the filter plate 5 located in the slot 41 are also located in the corresponding slots 84. Rotating the rotating shaft 71 180 degrees clockwise will drive the incomplete gear 76 to rotate 180 degrees. During this process, the filter plate 5 away from one end of the dust collector 3 will be driven to move upward until it abuts against the corresponding slot 41. The moving block 83 and the slot 84 corresponding to the filter plate 5 are far away from each other and will not block the rise of the filter plate 5. At the same time, the rotation of the rotating shaft 71 will also drive the ring 14 and the driving gear 15 to rotate 180 degrees. During this process, the driving gear 15 will engage with the rotating gear 13 close to the side of the dust collector 3, thereby driving the corresponding rotating rod 10 and the deflection rod 11 to rotate 90 degrees, so that the two ends of the deflection rod 11 gradually align with the two ends of the transverse block 12. The ends abut against each other to achieve the two moving away from each other, and the corresponding moving block 83 and the slot 84 also move away from each other. At this time, the bottom of the filter plate 5 located in the notch 41 is no longer engaged with the slot 84, and then continues to rotate 180 degrees clockwise. During this process, the incomplete gear 76 engages with the driving gear 75 close to the dust collector 3 to achieve the downward movement of the filter plate 5 on this side. Because the filter plate 5 is no longer engaged with the slot 84 at this time, it will not affect the descent of the filter plate 5. At the same time, the ring 14 and the driving gear 15 continue to rotate and engage with the rotating gear 13 away from the dust collector 3, thereby driving the corresponding rotating rod 10 and the deflection rod 11 to rotate 90 degrees, so that the two transverse blocks 12 and the moving block 83 on this side are close to each other, so that the corresponding slot 84 is engaged with the filter plate 5, ensuring the stability of the filter plate 5 during use. At this point, the alternating replacement of the two filter plates 5 is completed to ensure the filtering effect.

[0035] See also Figure 5 As shown, in this embodiment, round rods 16 are axially symmetrically rotatably provided at both ends of the fixed frame 6, a cam 17 is fixedly sleeved on the outer side of the round rod 16, a movable frame 18 is movably sleeved on the outer side of the cam 17, and fixed rods 19 are fixedly provided at both ends of the movable frame 18, a sleeve 20 is movably sleeved on the outer side of the fixed rod 19, and the sleeve 20 is fixedly connected to the fixed frame 6, wherein a brush plate 21 is fixedly provided at the end of the fixed rod 19 close to the filter plate 5, and the brush plate 21 is movably abutted against the filter plate 5.

[0036] Specifically, when the filter plate 5 moves downward to the bottom of the exhaust duct 4, the round rod 16 is rotated, and the rotation of the round rod 16 drives the cam 17 to rotate. The rotation of the cam 17 drives the moving frame 18 to move back and forth laterally. The movement of the moving frame 18 drives the fixed rods 19 on both sides to move back and forth laterally along the sleeve 20. During the reciprocating movement of the fixed rods 19 provided with the brush plates 21, the brush plates 21 are driven to contact the surface of the descending filter plate 5, so as to remove dust on the surface of the filter plate 5 and in the filter holes, thereby ensuring the cleanliness of the filter plate 5.

[0037] See also Figure 5As shown, in this embodiment, one end of the round rod 16 movably passes through the cam 17 and a movable gear 22 is fixedly provided at the end, and a rack 23 is fixedly provided on one side of the lifting cylinder 72, and the rack 23 is meshed with the movable gear 22 for transmission.

[0038] Specifically, during the lifting process of the lifting cylinder 72 and the filter plate 5, the rack 23 will be driven to move back and forth up and down. During the movement of the rack 23, it will mesh with the movable gear 22 to realize the rotation of the round rod 16. The rotation of the round rod 16 will eventually realize the lateral reciprocating movement of the brush plate 21 to clean the filter plate 5.

[0039] During implementation, in the initial state, the filter plate 5 close to the dust collector 3 is located in the notch 41, and the other filter plate 5 is located below the notch 41. The bottom sides of the filter plate 5 located in the notch 41 are also located in the corresponding slots 84. Rotating the rotating shaft 71 180 degrees clockwise will drive the incomplete gear 76 to rotate 180 degrees. In this process, the filter plate 5 away from one end of the dust collector 3 will be driven to move upward until it abuts against the corresponding notch 41. The moving block 83 and the slot 84 corresponding to the filter plate 5 are far away from each other and will not block the rise of the filter plate 5. At the same time, the rotation of the rotating shaft 71 will also drive The ring 14 and the driving gear 15 rotate 180 degrees. During this process, the driving gear 15 will mesh with the rotating gear 13 on the side close to the dust collector 3, thereby driving the corresponding rotating rod 10 and the deflection rod 11 to rotate 90 degrees, so that the two ends of the deflection rod 11 gradually abut against the two ends of the transverse block 12 to achieve the two moving away from each other, and the corresponding moving block 83 and the slot 84 also move away from each other. At this time, the bottom of the filter plate 5 located in the notch 41 is no longer engaged with the slot 84, and then continues to rotate 180 degrees clockwise. During this process, the incomplete gear 76 meshes with the driving gear 75 close to the dust collector 3 to achieve the filter on this side. The plate 5 moves downward, because the filter plate 5 is no longer engaged with the slot 84 at this time, so it will not affect the descent of the filter plate 5. At the same time, the ring 14 and the driving gear 15 continue to rotate and mesh with the rotating gear 13 away from the dust collector 3, thereby driving the corresponding rotating rod 10 and the deflection rod 11 to rotate 90 degrees, so that the two transverse blocks 12 and the moving block 83 on this side are close to each other, so that the corresponding slot 84 is engaged with the filter plate 5 to ensure the stability of the filter plate 5 during use. At this point, the alternating replacement of the two filter plates 5 is completed to ensure the filtering effect. At the same time, the lifting cylinder 72 and the filter plate During the lifting and lowering process, the rack 23 will be driven to reciprocate up and down. During the movement of the rack 23, it will mesh with the movable gear 22 to realize the rotation of the round rod 16. The rotation of the round rod 16 drives the cam 17 to rotate. The rotation of the cam 17 drives the moving frame 18 to reciprocate horizontally. The movement of the moving frame 18 drives the fixed rods 19 on both sides to reciprocate horizontally along the sleeve 20. During the reciprocating horizontal movement of the fixed rods 19 provided with the brush plate 21, the brush plate 21 will be driven to contact with the surface of the descending filter plate 5, so as to remove the dust on the surface of the filter plate 5 and in the filter holes, and ensure the cleanliness of the filter plate 5.

[0040] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0041] The above-described embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the present invention. It should be pointed out that, for a person of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the attached claims.

Claims

1. An integrated silane gas reaction device, characterized in that: include: Surge tank, used to reduce exhaust gas flow rate; The reactor, where the exhaust gas undergoes a spontaneous combustion reaction; Dust collector, to remove dust particles mixed in the exhaust gas; An exhaust pipe is installed on one side of the dust collector and is connected to the inside of the dust collector; The slots are provided on the exhaust pipe, and the number of the slots is set to two; filter plates, slidably disposed in the slots, the number of which is the same as the number of the slots; A fixing frame, installed on one side of the dust collector; A switching assembly, arranged on the fixing frame, for driving the two filter plates to engage with the notches in turn; A positioning assembly is arranged below the exhaust duct and is used for positioning the filter plate engaged with the slot. The switching assembly includes a rotating shaft, which is rotatably connected to the fixed frame. A lifting cylinder is fixedly provided at the bottom of the filter plate. A screw rod is connected to the internal thread of the lifting cylinder. The bottom of the screw rod is rotatably connected to the fixed frame. A connecting rod is slidably connected between the lifting cylinder and the fixed frame. A driving gear is fixedly provided on the outer side of the screw rod. An incomplete gear is fixedly sleeved on the outer side of the rotating shaft. The incomplete gear is meshed with the driving gear for transmission.

2. The integrated silane gas reaction device according to claim 1, characterized in that: The exhaust pipe is axially symmetrically provided with grooves on both sides of the notch, a baffle is slidably arranged in the groove, and a return spring is fixedly arranged between one end of the baffle and the inner wall of the groove.

3. The integrated silane gas reaction device according to claim 2, characterized in that: Notches are provided at one end of the two baffles close to each other, and inclined grooves are axially symmetrically provided on both sides of the top of the filter plate, and the inclined grooves are movably abutted against the notches.

4. The integrated silane gas reaction device according to claim 1, characterized in that: The positioning assembly includes a fixed frame, and movable grooves are axially symmetrically provided on both sides of the fixed frame. A movable block is slidably arranged in the movable groove, and a clamping groove is provided on the movable block. The clamping groove is movably connected to the bottom of the filter plate, and a positioning spring is fixedly arranged between one end of the movable block and the inner wall of the movable groove.

5. The integrated silane gas reaction device according to claim 4, characterized in that: The two fixed frames are each provided with a transverse groove at one end close to each other, a rotating rod is rotatably arranged in the transverse groove, a deflection rod is fixedly sleeved on the outer side of the rotating rod, and transverse blocks are axially symmetrically slidably arranged at both ends of the deflection rod in the transverse groove, the transverse blocks are movably abutted against the deflection rod, and the transverse blocks are fixedly connected to the moving block.

6. The integrated silane gas reaction device according to claim 5, characterized in that: The rotating rod has one end away from the deflection rod and moves through the bottom of the transverse groove, and a rotating gear is fixedly arranged at the end. A circular ring is fixedly arranged on the top of the rotating shaft, and a driving gear is arranged on the circular ring. The driving gear is meshed with the rotating gear for transmission.

7. The integrated silane gas reaction device according to claim 1, characterized in that: Round rods are axially symmetrically arranged at both ends of the fixing frame for rotation, a cam is arranged on the fixed sleeve outside the round rod, a movable frame is arranged on the movable sleeve outside the cam, fixing rods are fixedly arranged at both ends of the movable frame, a sleeve is arranged on the movable sleeve outside the fixing rod, and the sleeve is fixedly connected to the fixing frame, wherein a brush plate is fixedly arranged on the end of the fixing rod close to the filter plate, and the brush plate is movably abutted against the filter plate.

8. The integrated silane gas reaction device according to claim 7, characterized in that: One end of the round rod movably passes through the cam and a movable gear is fixedly arranged at the end. A rack is fixedly arranged at one side of the lifting cylinder, and the rack is meshed with the movable gear for transmission.

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