Refractory medium / high-entropy alloy electron beam multi-wire synergistic in-situ additive manufacturing device and manufacturing method thereof

Abstract

The invention provides a refractory medium / high-entropy alloy electron beam multi-wire collaborative in-situ additive manufacturing device and a manufacturing method thereof, and belongs to the technical field of additive manufacturing. The problems that in the prior art, the dynamic relation between molten drops of a plurality of wire feeding mechanisms and a molten pool cannot be recorded in real time, and the wire feeding angle and position cannot be adjusted in time are solved. The device comprises a vacuum chamber, an electronic gun, a plurality of wire feeding mechanisms, a base plate and a working platform, the electronic gun is fixedly connected to the top of the vacuum chamber, the wire feeding mechanisms are arranged on the top of the vacuum chamber and evenly distributed with the axis of the electronic gun as the circle center, the working platform is arranged in the vacuum chamber, and the base plate is arranged on the working platform. The workbench is located below the electron gun and comprises an observation window, a laser lighting system and a high-speed camera system, the observation window is arranged at the side end of the vacuum chamber, the high-speed camera system is arranged on the outer side of the vacuum chamber, and the laser lighting system is installed on one side of the high-speed camera system. The method is mainly used for preparing high-temperature alloy and refractory medium / high-entropy alloy.

Description

Technical Field

[0001] The present invention belongs to the technical field of additive manufacturing, and in particular relates to an electron beam multi-wire collaborative in-situ additive manufacturing device for refractory medium / high entropy alloys and a manufacturing method thereof. Background Art

[0002] Traditional high-temperature alloys are based on iron, nickel, cobalt, molybdenum, niobium, tungsten, etc., and are a type of metal material obtained by alloying that can work for a long time at high temperatures above 600°C and under certain stresses. They have excellent high-temperature strength, thermal corrosion resistance and fatigue properties, and are mainly used in aerospace, nuclear industry and energy fields. With the development of high-temperature alloys, more and more metals or alloys are classified as high-temperature materials, such as TiAl intermetallic compounds, metal-based high-temperature composites, refractory medium / high entropy alloys, etc. As long as they can meet the service requirements of high-temperature resistant components, they can be called high-temperature materials in a broad sense.

[0003] At present, the preparation of high-temperature alloys and refractory medium / high entropy alloys mainly includes melt casting metallurgy, powder metallurgy and laser additive manufacturing. Since the elements that make up the high-temperature alloys have very high melting points, such as the melting points of Zr and Nb are as high as 1852℃ and 2468℃ respectively, this brings great difficulties to the smelting and processing of high-temperature alloys. Large equipment such as large vacuum melting furnaces and ultra-high temperature heating furnaces are required, making the smelting process complicated and costly. In addition, when using powder metallurgy to prepare high-temperature alloys and high-temperature composite materials, various expensive high-purity metal powders and pre-alloyed powders are required, and a series of complex processes such as ball milling, hot pressing and sintering, and billet forging and rolling are required to obtain high-temperature alloy products. In the process of laser additive manufacturing of high-temperature alloys, due to the high melting points of each element, high requirements are placed on the laser power, and problems such as uneven powder melting, unfused layers and warping deformation are prone to occur. In addition, the low cladding rate makes it difficult to achieve precision forming of large and complex high-temperature alloys and refractory medium / high entropy alloy components.

[0004] Electron beam fuse deposition rapid manufacturing technology uses a high-energy electron beam as a heat source and metal wire as a raw material, and deposits it layer by layer in a vacuum chamber according to the planned path of CAD, thereby achieving near-net forming of complex-shaped components. It has many advantages such as high energy density, high energy utilization, vacuum processing environment and high deposition efficiency. It is particularly suitable for the preparation of highly active, high-melting-point metals and alloys. Compared with melt casting, powder metallurgy and laser additive manufacturing, it significantly simplifies the processing technology, shortens the preparation process and improves the forming efficiency.

[0005] The existing Chinese invention patent with publication number CN114273768A proposes an electron beam multi-wire collaborative additive manufacturing device and method, which belongs to the field of additive manufacturing technology. It can realize the functions of multi-wire co-feeding and multi-wire cooperative feeding, and uses high-melting point pure metal wire or high-temperature alloy wire as raw materials to solve the problems of preparation and forming of high-temperature alloys and high-temperature composite materials. It includes a vacuum chamber, an electron gun, a wire feeding mechanism, a substrate and a working platform. The electron gun is fixedly connected to the top of the vacuum chamber, and the wire feeding mechanism is provided with multiple wire feeding mechanisms. Multiple wire feeding mechanisms are placed on the top of the vacuum chamber and are evenly arranged with the axis of the electron gun as the center of the circle. The workbench is arranged in the vacuum chamber, the substrate is arranged on the workbench, and the work platform is located below the electron gun. In addition, the technical solution involved in the present invention can be extended and applied to the rapid preparation of other metals and alloys, and is particularly suitable for the preparation and forming of metal-based gradient composite materials, but the device cannot record the dynamic relationship between the molten droplets and the molten pool of multiple wire feeding mechanisms in real time, and timely adjust the wire feeding angle and position, thereby realizing the in-situ metallurgy and stable deposition of refractory alloys in the printing process. Summary of the invention

[0006] In view of this, the present invention aims to propose an electron beam multi-wire collaborative in-situ additive manufacturing device for refractory medium / high entropy alloys and a manufacturing method thereof, so as to solve the problem in the prior art that the dynamic relationship between molten droplets and molten pools of multiple wire feeding mechanisms cannot be recorded in real time, and the wire feeding angle and position cannot be adjusted in time.

[0007] To achieve the above object, the present invention adopts the following technical solutions:

[0008] A device for electron beam multi-wire collaborative in-situ additive manufacturing of refractory medium / high entropy alloys comprises a vacuum chamber, an electron gun, a wire feeding mechanism, a substrate and a work platform, wherein the electron gun is fixedly connected to the top of the vacuum chamber, a plurality of wire feeding mechanisms are provided, and the plurality of wire feeding mechanisms are all arranged on the top of the vacuum chamber, and the plurality of wire feeding mechanisms are evenly distributed with the axis of the electron gun as the center of a circle, the workbench is arranged in the vacuum chamber, the substrate is arranged on the workbench, and the workbench is located below the electron gun, and comprises an observation window, a laser lighting system and a high-speed camera system, wherein the observation window is arranged at a side end of the vacuum chamber, the high-speed camera system is arranged outside the vacuum chamber, and the laser lighting system is installed on one side of the high-speed camera system.

[0009] Furthermore, when the electron gun is in use, it excites an electron beam, and the electron beam bombards the substrate to form a molten pool.

[0010] Furthermore, the wire feeding mechanism includes a wire feeding rod and a wire feeding nozzle, the wire feeding nozzle is fixedly connected to the wire feeding rod, and the wire feeding rod is arranged in the vacuum chamber.

[0011] Furthermore, the wire feeding mechanism also includes a wire feeding wheel, a metal wire and a wire feeding hose, the wire feeding wheel is equipped with a wire reel, the metal wire is wound on the wire reel, the wire feeding hose is connected to the wire feeding nozzle, and the wire feeding wheel is arranged above the vacuum chamber.

[0012] Furthermore, the raw material of the metal wire is a high-temperature alloy.

[0013] Furthermore, the surface of the substrate must be polished and bright.

[0014] A method for manufacturing a refractory medium / high entropy alloy electron beam multi-wire collaborative in-situ additive manufacturing device, comprising the following steps:

[0015] Step 1: Pickle different types of pure metal wires and master alloy wires, then soak and clean them with acetone, place them in a drying oven, and dry them at a constant temperature of 60° for 3 hours. At the same time, use an angle grinder to grind the surface of the substrate until the surface is smooth and clean. Use acetone and alcohol to wipe the surface of the substrate in turn, soak and clean them with acetone, place them in a drying oven, and dry them at a constant temperature of 60° for 3 hours.

[0016] Step 2: Install the processed pure metal wires or master alloy wires of different types in the wire feeding wheel, and clamp the polished substrate on the working platform;

[0017] Step 3: When the vacuum degree of the vacuum chamber reaches the equipment requirement of 7.2×10-2Pa, preheat the substrate;

[0018] Step 4: Adjust the spatial positions of multiple wire feeding mechanisms, and use different types of metal wires so that the three-dimensional centers and the molten pool center coincide with the same point or have a distance difference in the Z direction;

[0019] Step 5: Install the high-speed camera system, turn on the high-speed camera system and laser lighting system, manually adjust the beam switch, emit electron beams to bombard the substrate, observe whether the spatial positions, wire feeding methods, wire delivery distances, angles, and spacings of multiple wire feeding mechanisms coincide with the electron beam bombardment positions at the same point or have a distance difference in the Z direction, and adjust them to the appropriate position;

[0020] Step 6: According to the preparation requirements of refractory medium / high entropy alloys, a control program of the motion system is written within the process window of the electron beam fuse deposition equipment to realize the control of the wire feeding sequence of multiple wire feeding mechanisms;

[0021] Step 7: Adjust printing parameters;

[0022] Step 8: The dynamic relationship between the molten droplets and the molten pool of multiple wire feeding mechanisms is recorded in real time by a high-speed camera system, and the wire feeding angle and position are adjusted in time to achieve in-situ metallurgy and stable deposition of refractory alloys during the printing process.

[0023] Furthermore, in step 3, the preheating parameter beam density is 25 mA and the preheating printing speed is 500 mm / min.

[0024] Furthermore, in step 7, the acceleration voltage is 60 kV, the focusing current is 1030 mA to 1078 mA, the wire feeding speed of multiple wire feeding mechanisms is 0.6 m / min to 1 m / min, the printing speed is 500 mm / min, the interlayer cooling time is 30 s, and the printing beam current is 55 mA.

[0025] Compared with the prior art, the present invention has the following beneficial effects:

[0026] 1. The present invention can realize the functions of multi-wire simultaneous feeding and multi-wire coordinated feeding through the mutual coordination between multiple wire feeding mechanisms. With high melting point pure metal wire or intermediate alloy wire as raw material, the preparation-forming integration of refractory medium / high entropy alloy materials can be directly realized.

[0027] 2. In the existing research on refractory multi-principal component alloys, the focus is mainly on the formula and design of the alloys, while there is relatively little research on the manufacturing process. The present invention is the first attempt to introduce electron beam additive manufacturing technology into the manufacturing process of refractory multi-principal component alloys, and successfully achieves high-quality, rapid production and large-scale forming of refractory multi-principal component alloys.

[0028] 3. The electron beam multi-wire collaborative in-situ additive manufacturing method for refractory medium / high entropy alloys described in the present invention directly uses an electron beam to in-situ melt multiple pure metal wires to form a refractory TiZrNb medium entropy alloy. In this process, the composition and overall quality of the refractory TiZrNb medium entropy alloy can be accurately controlled by changing the chemical composition, diameter and wire feeding speed of the metal wires. The multi-wire collaborative feature is particularly suitable for the preparation and forming of medium / high entropy alloys and gradient composite materials.

[0029] 4. The use of multi-wire collaborative in-situ additive manufacturing technology has successfully solved the problem that high-temperature materials such as refractory multi-principal component alloys are difficult to stretch into wires due to their insufficient plasticity. This method increases the content of the principal component in the deposit by increasing the number of wires. By adjusting the process parameters, refractory medium / high entropy alloys with good morphology, uniform organizational structure and excellent mechanical properties can be produced.

[0030] 5. The present invention is manufactured in a vacuum environment and is very suitable for the preparation of extremely active refractory multi-principal component alloys, which significantly improves the forming purity of refractory medium / high entropy alloys and reduces impurities such as oxides generated by the reaction of active elements with substances such as oxygen during the forming process. Such improvements not only improve the metallurgical quality of the final refractory multi-principal component alloy, but also enhance the uniformity of its composition.

[0031] 6. The multi-wire collaborative preparation process greatly shortens the processing flow and improves the forming efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings:

[0033] Figure 1 It is a schematic structural diagram of a device for electron beam multi-wire collaborative in-situ additive manufacturing of refractory medium / high entropy alloys according to the present invention;

[0034] Figure 2 It is a structural schematic diagram of the wire feeding mechanism of the present invention;

[0035] Figure 3 Schematic diagram of the process of electron beam three-wire collaborative in-situ additive manufacturing of TiZrNb refractory medium entropy alloy;

[0036] Figure 4 The microstructure, phase and composition uniformity of TiZrNb refractory medium entropy alloy manufactured by electron beam three-wire collaborative in-situ additive manufacturing.

[0037] 1: vacuum chamber, 2: electron gun, 3: wire feeding mechanism, 4: additive component, 5: substrate, 6: working platform, 7: transparent observation window, 8: laser lighting system, 9: high-speed camera system, 11: electron beam; 12: molten pool; 301: wire feeding wheel, 302: metal wire, 303: wire feeding hose, 304: wire feeding rod, 305: wire feeding nozzle, 3-1: first wire feeding mechanism, 3-2: second wire feeding mechanism, 3-3: third wire feeding mechanism. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely explain the technical solutions in the embodiments of the present invention. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict, and the described embodiments are only part of the embodiments of the present invention, not all of the embodiments.

[0039] Specific implementation method 1: See Figure 1-4The present embodiment is described, a refractory medium / high entropy alloy electron beam multi-wire collaborative in-situ additive manufacturing device, comprising a vacuum chamber 1, an electron gun 2, a wire feeding mechanism 3, a substrate 5 and a work platform 6, wherein the electron gun 2 is fixedly connected to the top of the vacuum chamber 1, and the wire feeding mechanism 3 is provided with a plurality of wire feeding mechanisms 3, and the plurality of wire feeding mechanisms 3 are all arranged on the top of the vacuum chamber 1, and the plurality of wire feeding mechanisms 3 are evenly arranged with the axis of the electron gun 2 as the center of the circle, the workbench 6 is arranged in the vacuum chamber 1, the substrate 5 is arranged on the workbench 6, and the workbench 6 is located below the electron gun 2, and is characterized in that: it comprises an observation window 7, a laser lighting system 8 and a high-speed camera system 9, the observation window 7 is arranged at the side end of the vacuum chamber 1, the high-speed camera system The system 9 is arranged outside the vacuum chamber 1, the laser lighting system 8 is installed on the side of the high-speed camera system 9, the electron gun 2 excites the electron beam 11 when in use, and the electron beam 11 bombards the substrate 5 to form a molten pool 12, the wire feeding mechanism 3 includes a wire feeding rod 304 and a wire feeding nozzle 305, the wire feeding nozzle 305 is fixedly connected to the wire feeding rod 304, the wire feeding rod 304 is arranged in the vacuum chamber 1, the wire feeding mechanism 3 also includes a wire feeding wheel 301, a metal wire 302 and a wire feeding hose 303, the wire feeding wheel 301 is equipped with a wire reel, the metal wire 302 is wound on the wire reel, the wire feeding hose 303 is connected to the wire feeding nozzle 305, and the wire feeding wheel 301 is arranged above the vacuum chamber 1.

[0040] The raw material of the metal wire 302 is a high temperature alloy.

[0041] The surface of the substrate 5 must be polished and bright.

[0042] The vacuum chamber 1 provides a vacuum environment during the preparation and molding process. The electron gun 2 is arranged on the top of the vacuum chamber 1. The electron gun 2 forms an electron beam 7. A plurality of wire feeding mechanisms 3 are evenly distributed on the top of the vacuum chamber 1 with the axis of the electron gun 2 as the center of the circle. The plurality of wire feeding mechanisms 3 provide the required metal wire 302. The working platform 6 is arranged in the vacuum chamber 1. The substrate 5 is arranged on the working platform 6. The substrate 5 is provided with an additive component 4. The working platform 6 can realize movement in three directions of XYZ in the vacuum chamber 1. After the substrate 5 is clamped on the working platform 6, when the electron beam 7 bombards and scans the surface of the substrate 5 to form a molten pool 8, the wire fed by the wire feeding mechanism 3 is melted as the working platform 6 moves, thereby realizing the preparation of the additive component 4. and forming. In the existing research on refractory multi-principal component alloys, the focus is mainly on the formula and design of the alloys, while there is relatively little research on the manufacturing process. This device attempts for the first time to introduce electron beam additive manufacturing technology into the manufacturing process of refractory multi-principal component alloys, and successfully realizes the high-quality, rapid production and large-scale forming of refractory multi-principal component alloys. The refractory TiZrNb medium-entropy alloy is formed by directly in-situ melting of multiple pure metal wires through electron beams. In this process, the composition and overall quality of the refractory TiZrNb medium-entropy alloy can be precisely controlled by changing the chemical composition, diameter and wire feeding speed of the metal wires. The synergistic characteristics of multiple wires are particularly suitable for the preparation and forming of medium / high entropy alloys and gradient composites.

[0043] Specific implementation method 2: The device can simultaneously feed pure Ti wire, pure Zr wire and pure Nb wire into the substrate molten pool through three wire feeding mechanisms to achieve the preparation and forming of TiZrNb refractory medium entropy alloy. Figure 1-4 The specific steps are described as follows:

[0044] Step 1: Pickle pure Ti wire, pure Zr wire and pure Nb wire with a diameter of 1 mm, then soak and clean them with acetone, and then place them in a drying oven and dry them at a constant temperature of 60°C for 3 hours; at the same time, use an angle grinder to grind the surface of the pure titanium TA1 substrate until the surface is smooth and clean, wipe the surface of the substrate with acetone and alcohol, soak and clean them with acetone, and finally place them in a drying oven and dry them at a constant temperature of 60°C for 3 hours;

[0045] Step 2: Install the wire reels of pure Ti wire, pure Zr wire and pure Nb wire on the wire feeding wheels 301 of the first wire feeding mechanism 3-1, the second wire feeding mechanism 3-2 and the third wire feeding mechanism 3-3 respectively, so that the three kinds of wires are exposed from the wire feeding nozzle 3055-15mm, and clamp and fix the pure titanium TA1 substrate 5 with a polished surface on the working platform 6;

[0046] Step 3: When the vacuum degree in the vacuum chamber 1 reaches the equipment use requirement of 7.2×10-2Pa, preheat the substrate, and the preheating parameters are: acceleration voltage is 60kV, focusing current is 1030mA, beam density is 25mA, preheating printing speed is 500mm / min; preheat 4-6 times;

[0047] Step 4: Adjust the spatial positions of the pure Ti wire, pure Zr wire and pure Nb wire so that the three-dimensional centers of different types of metal wires coincide with the center of the molten pool at the same point or have a certain distance difference in the Z direction;

[0048] Step 5: Install the high-speed camera platform, turn on the high-speed camera system and laser illumination system, manually adjust the beam switch, launch the electron beam to bombard the substrate, and observe whether the spatial position, wire feeding speed, angle, spacing of the pure Ti wire, pure Zr wire and pure Nb wire coincide with the electron beam bombardment position at the same point or have a certain distance difference in the Z direction, and fine-tune until the appropriate position;

[0049] Step 6: Observe the high-speed camera imaging, manually adjust the electron gun 2 to emit an electron beam to bombard the pure titanium TA1 substrate 5 to form a molten pool, and adjust the spatial position of the wire feeding rod 304 and the wire feeding nozzle 305 so that the front ends of the pure Ti wire, pure Zr wire and pure Nb wire coincide with the center of the molten pool;

[0050] Step 7: Write a control program for the wire feeding mechanism, and let the first wire feeding mechanism 3-1, the second wire feeding mechanism 3-2 and the third wire feeding mechanism 3-3 feed wires at the same time, so as to ensure that the pure Ti wire, the pure Zr wire and the pure Nb wire are fed into the molten pool at the same time;

[0051] Step 8: Write a work program, determine the motion trajectory of the work platform 6, and adjust the printing parameters: the acceleration voltage is 60 kV, the focusing current is 1078 mA, the wire feeding speeds of pure Ti wire, pure Zr wire and pure Nb wire are 0.8 m / min, 0.6 m / min and 0.4 m / min respectively, the printing speed is 500 mm / min, the interlayer cooling time is 30 s, and the printing beam current is 55 mA;

[0052] Step 9: The working platform 6 moves layer by layer in the XYZ direction according to the motion estimation described in step 4, and the pure Ti wire, pure Zr wire and pure Nb wire fed into the molten pool are continuously melted and solidified, thereby realizing the preparation and forming of the additive component 4 - TiZrNb refractory high entropy alloy.

[0053] A refractory TiZrNb medium-entropy alloy is formed by directly in-situ melting of multiple pure metal wires through an electron beam. In this process, the composition and overall quality of the refractory TiZrNb medium-entropy alloy can be precisely controlled by changing the chemical composition, diameter and wire feeding speed of the metal wires. The multi-wire synergy is particularly suitable for the preparation and forming of medium / high entropy alloys and gradient composites.

[0054] The embodiments of the present invention disclosed above are only used to help illustrate the present invention. The embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. According to the content of this specification, many modifications and changes can be made. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well.

Claims

1. A device for electron beam multi-wire collaborative in-situ additive manufacturing of refractory medium / high entropy alloys, comprising a vacuum chamber (1), an electron gun (2), a wire feeding mechanism (3), a substrate (5) and a work platform (6), wherein the electron gun (2) is fixedly connected to the top of the vacuum chamber (1), a plurality of wire feeding mechanisms (3) are provided, and the plurality of wire feeding mechanisms (3) are all arranged on the top of the vacuum chamber (1), and the plurality of wire feeding mechanisms (3) are evenly distributed with the axis of the electron gun (2) as the center of the circle, the work platform (6) is arranged in the vacuum chamber (1), the substrate (5) is arranged on the work platform (6), and the work platform (6) is located below the electron gun (2), characterized in that: The invention comprises an observation window (7), a laser lighting system (8) and a high-speed camera system (9), wherein the observation window (7) is arranged at the side end of the vacuum chamber (1), the high-speed camera system (9) is arranged outside the vacuum chamber (1), and the laser lighting system (8) is installed on one side of the high-speed camera system (9).

2. The electron beam multi-wire collaborative in-situ additive manufacturing device for refractory medium / high entropy alloys according to claim 1, characterized in that: When the electron gun (2) is in use, it excites an electron beam (11), and the electron beam (11) bombards the substrate (5) to form a molten pool (12), and each wire in the molten pool (12) continuously melts and solidifies, thereby realizing the preparation and forming of the additive component (4).

3. The electron beam multi-wire collaborative in-situ additive manufacturing device for refractory medium / high entropy alloys according to claim 1, characterized in that: The wire feeding mechanism (3) comprises a wire feeding rod (304) and a wire feeding nozzle (305); the wire feeding nozzle (305) is fixedly connected to the wire feeding rod (304); and the wire feeding rod (304) is arranged in the vacuum chamber (1).

4. The electron beam multi-wire collaborative in-situ additive manufacturing device for refractory medium / high entropy alloys according to claim 3, characterized in that: The wire feeding mechanism (3) further comprises a wire feeding wheel (301), a metal wire (302) and a wire feeding hose (303); the wire feeding wheel (301) is provided with a wire reel, the metal wire (302) is wound around the wire reel, the wire feeding hose (303) is connected to a wire feeding nozzle (305), and the wire feeding wheel (301) is arranged above the vacuum chamber (1).

5. The electron beam multi-wire collaborative in-situ additive manufacturing device for refractory medium / high entropy alloys according to claim 4, characterized in that: The raw material of the metal wire (302) is a high-temperature alloy.

6. The electron beam multi-wire collaborative in-situ additive manufacturing device for refractory medium / high entropy alloys according to claim 1, characterized in that: The surface of the substrate (5) must be polished and bright.

7. A method for manufacturing a refractory medium / high entropy alloy electron beam multi-wire collaborative in-situ additive manufacturing device according to any one of claims 1 to 6, characterized in that: It includes the following steps: Step 1: pickling different types of pure metal wires and intermediate alloy wires, then soaking and cleaning them with acetone, placing them in a drying oven, and drying them at a constant temperature of 60° for 3 hours. At the same time, grinding the surface of the substrate (5) with an angle grinder until the surface is smooth and clean, wiping the surface of the substrate (5) with acetone and alcohol in turn, soaking and cleaning them with acetone, placing them in a drying oven, and drying them at a constant temperature of 60° for 3 hours; Step 2: Install processed pure metal wires of different types or intermediate alloy wires in the wire feeding wheel (301), and clamp the polished substrate (5) on the working platform (6); Step 3: Wait until the vacuum degree of the vacuum chamber (1) reaches the equipment requirement of 7.2×10 -2 Pa, preheating substrate (5); Step 4: Adjust the spatial positions of the plurality of wire feeding mechanisms (3) so that the three-dimensional centers of different types of metal wires coincide with the center of the molten pool at the same point or there is a distance difference in the Z direction; Step 5: Install a high-speed camera system (9), turn on the high-speed camera system (9) and the laser lighting system (8), manually adjust the beam switch, emit an electron beam (11) to bombard the substrate (5), observe whether the spatial positions, wire feeding methods, wire delivery distances, angles, and spacings of multiple wire feeding mechanisms (3) coincide with the electron beam bombardment position at the same point or have a distance difference in the Z direction, and adjust to a suitable position; Step 6: According to the preparation requirements of the refractory medium / high entropy alloy, a control program of the motion system is written within the process window of the electron beam fuse deposition equipment to realize the control of the wire feeding sequence of the multiple wire feeding mechanisms (3); Step 7: Adjust printing parameters; Step 8: The dynamic relationship between the molten droplets and the molten pool of multiple wire feeding mechanisms (3) is recorded in real time by a high-speed camera system (9), and the wire feeding angle and position are adjusted in time to achieve in-situ metallurgy and stable deposition of refractory alloys during the printing process.

8. The method for manufacturing a refractory medium / high entropy alloy electron beam multi-wire collaborative in-situ additive manufacturing device according to claim 7, characterized in that: In step 3, the preheating parameters are beam current density of 25 mA and preheating printing speed of 500 mm / min.

9. The electron beam multi-wire collaborative in-situ additive manufacturing device for refractory medium / high entropy alloys according to claim 7, characterized in that: In step 7, the acceleration voltage is 60 kV, the focusing current is 1030 mA to 1078 mA, the wire feeding speed of multiple wire feeding mechanisms is 0.6 m / min to 1 m / min, the printing speed is 500 mm / min, the interlayer cooling time is 30 s, and the printing beam current is 55 mA.

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