A vacuum cold spraying nano ceramic powder aerosol powder feeder

Abstract

The invention discloses a vacuum cold spraying nano-ceramic powder aerosol powder feeder, and relates to the field of vacuum cold spraying technology. The powder feeder is used for vacuum cold spraying of nano-ceramic powder, and the powder feeder includes a powder barrel, a power source and a rotating shaft. A screen is provided at the bottom of the powder barrel, and the screen is used to separate the bottom space of the powder barrel into an air intake chamber and a powder storage space; the power source is installed on the powder barrel; the rotating shaft is connected to the power source, and the bottom of the rotating shaft located in the powder barrel is connected to an impeller, and the middle of the rotating shaft located in the powder barrel is connected to a crushing brush, and the impeller and the crushing brush rotate with the rotation of the rotating shaft. Driven by the power source, the rotating shaft rotates, and the impeller can form a suction force. The nano-ceramic powder rises to the crushing brush under the dual effects of the rising power and the rotating wind force of the impeller. The agglomerated nano-ceramic powder is crushed by the impact of the rapid rotation of the crushing brush to form a powder aerosol state, and finally stable powder feeding is achieved through the top of the powder barrel.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum cold spraying, in particular to a vacuum cold spraying nano ceramic powder aerosol powder feeder. Background Art

[0002] In semiconductor manufacturing processes, for example, in plasma etching processes, structures with uniform and dense ceramic coatings are required; for example, etching the bottom of a silicon substrate requires an aluminum oxide base plate. Since aluminum oxide is not resistant to etching, the surface needs to be covered with an etching-resistant ceramic coating, and the coating must be uniform and dense. According to relevant literature reports, vacuum cold spraying of nanopowders can obtain uniform and dense ceramic coatings, but nanopowders are very easy to agglomerate, have poor fluidity, and are difficult to deliver uniformly.

[0003] To achieve uniform and dense ceramic coating by vacuum cold spraying, a great difficulty is to realize the aerosolization of nano-ceramic powder, which is also a technical problem that needs to be solved urgently in this field.

[0004] In view of this, the present invention is proposed. Summary of the invention

[0005] The object of the present invention is to provide a vacuum cold spraying nano ceramic powder aerosol powder feeder to solve or improve the above technical problems.

[0006] The present invention can be implemented like this:

[0007] The present invention provides a vacuum cold spraying nano-ceramic powder aerosol powder feeder, which is used for vacuum cold spraying of nano-ceramic powder. The vacuum cold spraying nano-ceramic powder aerosol powder feeder comprises a powder barrel, a power source and a rotating shaft;

[0008] A screen is provided at the bottom of the powder tube, and the screen is used to separate the bottom space of the powder tube into an air inlet cavity located below the screen and a powder storage space located above the screen. The air inlet cavity is used for air intake, and the top of the powder tube is used for air exhaust;

[0009] The power source is installed in the powder barrel;

[0010] The rotating shaft is connected to a power source. The bottom of the rotating shaft in the powder barrel is connected to an impeller. The middle of the rotating shaft in the powder barrel is connected to a crushing brush. The impeller and the crushing brush rotate with the rotating shaft.

[0011] In an optional embodiment, the bottom of the powder cartridge is in a conical structure, the conical end of the conical structure is connected to an air inlet pipe, and the air inlet pipe is in communication with the air inlet cavity.

[0012] In an optional embodiment, the crushing brush is a cylindrical stainless steel wire brush.

[0013] In an optional embodiment, the vacuum cold spraying nano-ceramic powder aerosol feeder further includes an air outlet pipe, and the air outlet pipe is installed on the top side of the powder cylinder.

[0014] In an optional embodiment, the vacuum cold spraying nano-ceramic powder aerosol feeder also includes a bearing seat, a first bearing and a second bearing. The bearing seat is installed on the top of the powder barrel, the first bearing and the second bearing are installed in the bearing seat at intervals, and the first bearing and the second bearing are both mounted on the rotating shaft.

[0015] In an optional embodiment, the vacuum cold spraying nano-ceramic powder aerosol feeder further includes a Y-shaped sealing ring, which is disposed on the bearing seat and is fitted on the rotating shaft;

[0016] And / or, the vacuum cold spraying nano-ceramic powder aerosol feeder further includes an O-type sealing ring, and the O-type sealing ring is arranged between the bearing seat and the powder cylinder.

[0017] In an optional embodiment, the vacuum cold spraying nano-ceramic powder aerosol feeder also includes a connecting seat and a coupling, the connecting seat is installed on the top of the bearing seat, the power source is installed on the top of the connecting seat, and the power source is connected to the rotating shaft through the coupling.

[0018] In an optional embodiment, the vacuum cold spraying nano-ceramic powder aerosol feeder also includes a retaining ring, the second bearing is located above the first bearing, and the retaining ring is arranged on the rotating shaft and is located above the second bearing.

[0019] In an optional embodiment, the vacuum cold spraying nano-ceramic powder aerosol feeder further includes a positioning sleeve, which is sleeved in the bearing seat and located between the first bearing and the second bearing.

[0020] In an optional embodiment, the vacuum cold spraying nano-ceramic powder aerosol feeder also includes a base plate, multiple support rods and multiple rubber feet, the multiple support rods are connected to the base plate, and the multiple support rods are supported at the bottom of the powder barrel; the multiple rubber feet are connected to the bottom of the base plate.

[0021] The present invention has the following beneficial effects:

[0022] The vacuum cold spraying nano-ceramic powder aerosol feeder provided by the present invention is used for vacuum cold spraying of nano-ceramic powder. The vacuum cold spraying nano-ceramic powder aerosol feeder comprises a powder barrel, a power source and a rotating shaft. A screen is provided at the bottom of the powder barrel, and the screen is used to separate the bottom space of the powder barrel into an air intake chamber located below the screen and a powder storage space located above the screen, the air intake chamber is used for air intake, and the top of the powder barrel is used for air exhaust; the power source is installed on the powder barrel; the rotating shaft is connected to the power source, the bottom of the rotating shaft located in the powder barrel is connected to an impeller, and the middle of the rotating shaft located in the powder barrel is connected to a crushing brush, wherein the impeller and the crushing brush rotate with the rotation of the rotating shaft.

[0023] Driven by the power source, the rotating shaft rotates, and the impeller can form suction. In addition, the nano-ceramic powder placed above the screen moves upward under the action of the air intake of the air intake chamber. That is, the nano-ceramic powder rises to the crushing brush under the dual action of the rising power and the rotating wind force of the impeller. The agglomerated nano-ceramic powder is crushed by the impact of the rapid rotation of the crushing brush, forming a powder aerosol state, and finally realizes stable powder delivery through the top of the powder barrel. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0025] Figure 1 A schematic diagram of the structure of a vacuum cold spraying nano-ceramic powder aerosol feeder provided in an embodiment of the present invention.

[0026] Icons: 100-vacuum cold spraying nano-ceramic powder aerosol powder feeder; 110-bottom plate; 111-rubber foot; 112-support rod; 120-powder cylinder; 121-inlet pipe; 122-screen; F-nanoceramic powder; 123-impeller; 124-rotating shaft; 125-crushing brush; 126-outlet pipe; 127-O-ring; 130-bearing seat; 131-first fastener; 132-Y-ring; 133-first bearing; 134-positioning sleeve; 135-second bearing; 136-retaining ring; 140-connecting seat; 141-second fastener; 142-coupling; 150-power source; 151-third fastener. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0028] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0030] In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear to indicate an orientation or position relationship, they are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the product of the invention is usually placed when used. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0031] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0032] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.

[0033] Example

[0034] Please refer to Figure 1 The present embodiment provides a vacuum cold spraying nano-ceramic powder aerosol powder feeder 100, which is used for vacuum cold spraying of nano-ceramic powder F. It can realize aerosolization of nano-ceramic powder F during vacuum cold spraying and achieve stable powder feeding.

[0035] The vacuum cold spraying nano-ceramic powder aerosol feeder 100 includes a powder barrel 120 , a power source 150 and a rotating shaft 124 .

[0036] A screen 122 is provided at the bottom of the powder tube 120, and the screen 122 is used to separate the bottom space of the powder tube 120 into an air inlet cavity located below the screen 122 and a powder storage space located above the screen 122; the air inlet cavity is used for air intake, and the top of the powder tube 120 is used for air exhaust.

[0037] The power source 150 is installed on the powder cartridge 120 .

[0038] The rotating shaft 124 is connected to the power source 150 . The rotating shaft 124 is located at the bottom of the powder tube 120 and is connected to the impeller 123 . The rotating shaft 124 is located in the middle of the powder tube 120 and is connected to the crushing brush 125 . The impeller 123 and the crushing brush 125 rotate with the rotation of the rotating shaft 124 .

[0039] Driven by the power source 150, the rotating shaft 124 rotates, and the impeller 123 can generate suction force. In addition, the nano-ceramic powder F placed above the screen 122 moves upward under the action of the air intake of the air intake chamber. That is, the nano-ceramic powder F rises to the crushing brush 125 under the dual action of the rising power and the rotating wind force of the impeller 123. The agglomerated nano-ceramic powder F is crushed by the impact of the rapid rotation of the crushing brush 125, forming a powder aerosol state, and finally realizes stable powder delivery through the top of the powder barrel 120.

[0040] In some optional embodiments, the power source 150 may be a speed-adjustable motor to adjust the speed of the rotating shaft 124. In other optional embodiments, the power source 150 may also be a high-speed motor to achieve high-speed rotation of the rotating shaft 124, thereby achieving high-speed rotation of the impeller 123 and the crushing brush 125.

[0041] In this embodiment, the bottom of the powder tube 120 is a conical structure, and the conical end of the conical structure is connected to an air inlet pipe 121, and the air inlet pipe 121 is communicated with the air inlet cavity.

[0042] In some optional embodiments, the air inlet pipe 121 may be connected to an external air source to blow up the nano-ceramic powder F on the screen 122 by blowing air.

[0043] In this embodiment, the crushing brush 125 is a cylindrical stainless steel wire brush. In some optional embodiments, the periphery of the cylindrical stainless steel wire brush and the inner wall of the powder tube 120 may be clearance-fitted; in other optional embodiments, the periphery of the cylindrical stainless steel wire brush and the inner wall of the powder tube 120 may also be interference-fitted.

[0044] Furthermore, the vacuum cold spraying nano-ceramic powder aerosol feeder 100 further includes an air outlet pipe 126 .

[0045] The air outlet pipe 126 is installed on the top side of the powder cylinder 120 , and the nano-ceramic powder F can be stably delivered to the outside through the air outlet pipe 126 .

[0046] The powder cartridge 120 is formed with an air inlet chamber, a powder storage area and a powder aerosolization area from bottom to top. The corresponding structures in the powder cartridge 120 may include an air inlet pipe 121, a screen 122, an impeller 123, a rotating shaft 124, a crushing brush 125 and an air outlet pipe 126.

[0047] The airflow entering from the air inlet pipe 121 drives the nano-ceramic powder F on the screen 122 to be blown up, and the rotation of the impeller 123 also drives the nano-ceramic powder F to be transported upward. After being crushed by the crushing brush 125, the aerosolized nano-ceramic powder F is formed and finally transported to the outside through the air outlet pipe 126.

[0048] In order to facilitate the stable operation of the rotating shaft 124 , in this embodiment, the vacuum cold spraying nano-ceramic powder aerosol feeder 100 further includes a bearing seat 130 , a first bearing 133 and a second bearing 135 .

[0049] The bearing seat 130 is installed on the top of the powder cylinder 120 . The first bearing 133 and the second bearing 135 are installed in the bearing seat 130 at intervals. The first bearing 133 and the second bearing 135 are both mounted on the rotating shaft 124 .

[0050] In addition, in other embodiments, only one bearing or three bearings or more than three bearings may be used.

[0051] Furthermore, the vacuum cold spraying nano-ceramic powder aerosol feeder 100 further includes a Y-shaped sealing ring 132 to achieve sealing of related connecting parts.

[0052] The Y-shaped sealing ring 132 is disposed on the bearing seat 130 and is mounted on the rotating shaft 124 .

[0053] Meanwhile, the vacuum cold spraying nano-ceramic powder aerosol feeder 100 further includes an O-ring 127 , which is disposed between the bearing seat 130 and the powder cylinder 120 .

[0054] By providing a sealing ring, the sealing of adjacent components can be achieved to avoid contamination of the nano-ceramic powder F or leakage of the nano-ceramic powder F.

[0055] Furthermore, the vacuum cold spraying nano-ceramic powder aerosol feeder 100 also includes a connecting seat 140 and a coupling 142 to facilitate the installation of a power source 150 .

[0056] The connecting seat 140 is installed on the top of the bearing seat 130 , and the power source 150 is installed on the top of the connecting seat 140 . The power source 150 is connected to the rotating shaft 124 through a coupling 142 .

[0057] Similarly, in order to improve the sealing performance, the vacuum cold spraying nano-ceramic powder aerosol feeder 100 further includes a retaining ring 136 .

[0058] The second bearing 135 is located above the first bearing 133, and the retaining ring 136 is disposed on the rotating shaft 124 and is located above the second bearing 135. In addition, sealing can also be achieved by other sealing structures.

[0059] Due to the long-term use, the first bearing 133 and the second bearing 135 may be displaced. In order to alleviate this phenomenon, in this embodiment, the vacuum cold spraying nano-ceramic powder aerosol feeder 100 also includes a positioning sleeve 134.

[0060] The positioning sleeve 134 is sleeved in the bearing seat 130 , and the positioning sleeve 134 is located between the first bearing 133 and the second bearing 135 .

[0061] Through the above arrangement, the positions of the first bearing 133 and the second bearing 135 can be stabilized.

[0062] Furthermore, in order to effectively support the powder cylinder 120 , in this embodiment, the vacuum cold spraying nano-ceramic powder aerosol feeder 100 further includes a bottom plate 110 , a plurality of support rods 112 and a plurality of rubber feet 111 .

[0063] A plurality of support rods 112 are connected to the bottom plate 110 , and the plurality of support rods 112 are supported on the bottom of the powder tube 120 ; and a plurality of rubber feet 111 are connected to the bottom of the bottom plate 110 .

[0064] The entire bottom plate 110 can support the entire weight. The number of the rubber feet 111 and the support rods 112 is not limited. In this embodiment, four rubber feet 111 and four support rods 112 that are evenly distributed can be used.

[0065] Furthermore, in this embodiment, the vacuum cold spraying nano-ceramic powder aerosol feeder 100 further includes a first fastener 131 , and the bearing seat 130 and the powder cylinder 120 are locked by the first fastener 131 .

[0066] Furthermore, the vacuum cold spraying nano-ceramic powder aerosol feeder 100 further includes a second fastener 141 , and the connecting seat 140 and the bearing seat 130 are locked by the second fastener 141 .

[0067] Furthermore, the vacuum cold spraying nano-ceramic powder aerosol feeder 100 further includes a third fastener 151 , and the power source 150 and the connecting seat 140 are locked by the third fastener 151 .

[0068] That is, two adjacent components are connected by fasteners, such as bolts or screws, to facilitate installation and disassembly.

[0069] In summary, the vacuum cold spraying nano-ceramic powder aerosol powder feeder 100 provided by the present invention is used for vacuum cold spraying of nano-ceramic powder F. The vacuum cold spraying nano-ceramic powder aerosol powder feeder 100 includes a powder barrel 120, a power source 150 and a rotating shaft 124. A screen 122 is provided at the bottom of the powder barrel 120. The screen 122 is used to separate the bottom space of the powder barrel 120 into an air inlet cavity below the screen 122 and a powder storage space above the screen 122. The air inlet cavity is used for air intake, and the top of the powder barrel 120 is used for air outlet; the power source 150 is installed on the powder barrel 120; the rotating shaft 124 is connected to the power source 150, the bottom of the rotating shaft 124 located in the powder barrel 120 is connected to an impeller 123, and the middle of the rotating shaft 124 located in the powder barrel 120 is connected to a crushing brush 125, wherein the impeller 123 and the crushing brush 125 rotate with the rotation of the rotating shaft 124.

[0070] Driven by the power source 150, the rotating shaft 124 rotates, and the impeller 123 can generate suction force. In addition, the nano-ceramic powder F placed above the screen 122 moves upward under the action of the air intake of the air intake chamber. That is, the nano-ceramic powder F rises to the crushing brush 125 under the dual action of the rising power and the rotating wind force of the impeller 123. The agglomerated nano-ceramic powder F is crushed by the impact of the rapid rotation of the crushing brush 125, forming a powder aerosol state, and finally realizes stable powder delivery through the top of the powder barrel 120.

[0071] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A vacuum cold spraying nano ceramic powder aerosol powder feeder, used for vacuum cold spraying of nano ceramic powder, characterized in that: The vacuum cold spraying nano ceramic powder aerosol feeder comprises a powder barrel, a power source and a rotating shaft; A screen is provided at the bottom of the powder cartridge, and the screen is used to separate the bottom space of the powder cartridge into an air inlet cavity located below the screen and a powder storage space located above the screen, the air inlet cavity is used for air intake, and the top of the powder cartridge is used for air exhaust; The power source is installed on the powder cartridge; The rotating shaft is connected to the power source, the bottom of the rotating shaft located in the powder tube is connected to an impeller, and the middle of the rotating shaft located in the powder tube is connected to a crushing brush, wherein the impeller and the crushing brush rotate with the rotating shaft.

2. The vacuum cold spraying nano-ceramic powder aerosol feeder according to claim 1, characterized in that: The bottom of the powder tube is in a conical structure, and an air inlet pipe is connected to the conical end of the conical structure, and the air inlet pipe is in communication with the air inlet cavity.

3. The vacuum cold spraying nano-ceramic powder aerosol feeder according to claim 1, characterized in that: The crushing brush is a cylindrical stainless steel wire brush.

4. The vacuum cold spraying nano-ceramic powder aerosol feeder according to claim 1, characterized in that: The vacuum cold spraying nano-ceramic powder aerosol feeder also includes an air outlet pipe, and the air outlet pipe is installed on the top side of the powder cylinder.

5. The vacuum cold spraying nano-ceramic powder aerosol feeder according to any one of claims 1 to 4, characterized in that: The vacuum cold spraying nano-ceramic powder aerosol feeder also includes a bearing seat, a first bearing and a second bearing. The bearing seat is installed on the top of the powder cylinder, the first bearing and the second bearing are installed in the bearing seat at intervals, and the first bearing and the second bearing are both mounted on the rotating shaft.

6. The vacuum cold spraying nano-ceramic powder aerosol feeder according to claim 5, characterized in that: The vacuum cold spraying nano-ceramic powder aerosol feeder also includes a Y-shaped sealing ring, which is arranged on the bearing seat and is fitted on the rotating shaft; And / or, the vacuum cold spraying nano-ceramic powder aerosol feeder further comprises an O-type sealing ring, and the O-type sealing ring is arranged between the bearing seat and the powder cylinder.

7. The vacuum cold spraying nano-ceramic powder aerosol feeder according to claim 5, characterized in that: The vacuum cold spraying nano-ceramic powder aerosol feeder also includes a connecting seat and a coupling, the connecting seat is installed on the top of the bearing seat, the power source is installed on the top of the connecting seat, and the power source is connected to the rotating shaft through the coupling.

8. The vacuum cold spraying nano-ceramic powder aerosol feeder according to claim 5, characterized in that: The vacuum cold spraying nano-ceramic powder aerosol feeder also includes a retaining ring, the second bearing is located above the first bearing, and the retaining ring is arranged on the rotating shaft and located above the second bearing.

9. The vacuum cold spraying nano-ceramic powder aerosol feeder according to claim 5, characterized in that: The vacuum cold spraying nano-ceramic powder aerosol feeder also includes a positioning sleeve, which is sleeved in the bearing seat and located between the first bearing and the second bearing.

10. The vacuum cold spraying nano-ceramic powder aerosol feeder according to any one of claims 1 to 4, characterized in that: The vacuum cold spraying nano-ceramic powder aerosol feeder also includes a bottom plate, a plurality of support rods and a plurality of rubber feet, wherein the plurality of support rods are connected to the bottom plate and supported at the bottom of the powder tube; and the plurality of rubber feet are connected to the bottom of the bottom plate.

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