Chuck bearing table

Abstract

The embodiment of the invention provides a chuck bearing table. The chuck bearing table comprises a first base, a rack, a carrying disc and a driving module. A first mounting groove is formed in the first base and is configured to provide supporting force in the vertical direction; a rotating bearing is arranged at the bottom of the rack, is mounted in the first mounting groove, is movably connected with the rack and the first base, and is configured to enable the rack to circumferentially rotate around the vertical direction; the carrying disc is arranged at the top of the rack and is configured to carry a probe and a to-be-detected piece; the driving module comprises a driving motor used for providing power for rotation of the rack; and the switching mechanism responds to the driving motor to provide power for the switching mechanism, one part of the switching mechanism does linear motion in the radial direction of the rotating bearing, and the other part of the switching mechanism does circular motion in the circumferential direction of the rotating bearing so as to drive the rack to rotate relative to the first base.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor chip testing, and in particular to a chuck carrier. Background Art

[0002] With the continuous advancement of electronic technology, the probe station has become one of the important testing equipment in the semiconductor industry and is widely used in various tests of wafers in testing plants.

[0003] With the continuous progress and development of the semiconductor industry, the size of wafer grains has gradually become smaller, and the number of grains has gradually increased. Therefore, there are increasingly higher requirements for the needle insertion accuracy of the probe station and the load capacity of the wafer carrier. Currently, the carriers for loading wafers on the market widely use motor-driven screw structures, or motor-driven single wedge blocks. There are certain limitations on the load capacity of the carrier or the positioning accuracy of the carrier itself. Therefore, a structure that combines the load capacity and walking accuracy is currently needed. Summary of the invention

[0004] The purpose of the present disclosure is to provide a chuck carrier to solve the technical problems in the related art. The specific solution is as follows:

[0005] The embodiment of the present application provides a chuck carrier platform, comprising: a first base, a first mounting groove is provided on the first base, and is configured to provide a supporting force in the vertical direction; a frame, a bottom of which is provided with a rotating bearing, the rotating bearing is installed in the first mounting groove, is movably connected to the frame and the first base, and is configured to enable the frame to rotate circumferentially around the vertical direction; a loading plate is arranged on the top of the frame and is configured to carry a probe waiting for a detection member; a driving module is connected to the first base and the frame respectively, and is configured to drive the frame to rotate relative to the first base, the driving module comprising: a driving motor for providing power for the rotation of the frame; a conversion mechanism, in response to the driving motor providing power to the conversion mechanism, a part of the conversion mechanism performs linear motion along the radial direction of the rotating bearing, and another part of the conversion mechanism performs circular motion along the circumferential direction of the rotating bearing, so as to drive the frame to rotate relative to the first base.

[0006] In some embodiments, the conversion mechanism includes: a rolling bearing seat, fixedly connected to the first base, configured to support the frame to rotate relative to the first base; a first slider assembly, including an axis core and a first connecting member, the axis core is arranged on the first connecting member and at least partially extends into the rolling bearing seat, and a first sliding portion is arranged on the surface of the first connecting member.

[0007] In some embodiments, the conversion mechanism also includes: a second base fixedly connected to the frame; a lead screw disposed on the second base and extending along the first direction, a movable second slider assembly being disposed on the lead screw, and the drive motor being disposed at one end of the lead screw; in response to forward or reverse rotation of the drive motor, the second slider assembly moves forward or backward in the first direction.

[0008] In some embodiments, the second slider assembly includes: a special-shaped nut connected to the lead screw and configured to move along the first direction under the action of a driving motor; a second slider disposed on the special-shaped nut, a second sliding portion being disposed on the surface of the second slider along a second direction, the second direction being perpendicular to the first direction, and the second sliding portion being slidably connected to the first sliding portion.

[0009] In some embodiments, in response to the second sliding assembly moving along the first direction, the first connecting member moves along the second direction relative to the second sliding block to drive the frame to rotate relative to the first base.

[0010] In some embodiments, the second slider assembly further includes: a limit block, which is disposed on the special-shaped nut or the second slider and is configured to limit the movement range of the first connecting member in the second direction.

[0011] In some embodiments, the first slider assembly further includes: a rolling bearing, which is disposed on the surface of the first connecting member and surrounds the shaft core, and is configured to be movably connected to the rolling bearing seat to bear the radial and axial loads of the first connecting member.

[0012] In some embodiments, the conversion mechanism further includes: a wedge structure, disposed between the first connecting member and the rolling bearing seat, and / or between the second sliding block and the special-shaped nut, configured to adjust the gap between adjacent structural members.

[0013] In some embodiments, the rotation speed of the frame is 0-20 mm / s.

[0014] In some embodiments, the deflection angle of the frame relative to the first base is ±5 degrees

[0015] Compared with the related art, the above solution of the embodiment of the present disclosure has at least the following beneficial effects:

[0016] The chuck carrier provided by the present disclosure has a drive motor and a high-precision conversion mechanism. Under the action of the drive motor, the linear motion can be converted into circular motion through the conversion mechanism to realize the rotation of the carrier relative to the first base, ensuring that the error during the movement is small. The chuck carrier provided by the present disclosure can make the fine-tuning accuracy of the carrier better than 1μm through the setting of the drive module.

[0017] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings herein are incorporated into the specification and constitute a part of the specification, showing embodiments consistent with the present disclosure, and together with the specification, are used to explain the principles of the present disclosure. Obviously, the drawings described below are only some embodiments of the present disclosure, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0019] Figure 1 It is a schematic structural diagram of a chuck carrier according to an exemplary embodiment.

[0020] Figure 2 It is a schematic structural diagram of a first base according to an exemplary embodiment.

[0021] Figure 3 It is a partial exploded view of a chuck carrier according to an exemplary embodiment.

[0022] Figure 4 It is a partial exploded view of a chuck carrier according to an exemplary embodiment.

[0023] Figure 5 It is a partially enlarged view of a conversion mechanism according to an exemplary embodiment.

[0024] Figure 6 The figure is a schematic diagram showing the structure of a first slider and a second slider according to an exemplary embodiment.

[0025] Figure 7 is a partially enlarged view of a conversion mechanism according to another exemplary embodiment.

[0026] Reference numerals:

[0027] A first base 1000, a first mounting groove 1001, a second mounting groove 1002, a through hole 1003, and a rotating bearing 1100;

[0028] Rack 2000, loading tray 3000, drive module 4000;

[0029] Conversion mechanism 4100, drive motor 4200;

[0030] Rolling bearing seat 4101;

[0031] A first slider assembly 4110, a first connecting member 4111, a shaft core 4112, a rolling bearing 4413, a first slider 4114, a first sliding portion 4415, and a wedge structure 4116;

[0032] A second slider assembly 4120, a special-shaped nut 4121, a second slider 4122, a second sliding portion 4123, and a limit block 4124;

[0033] A second base 4300, a connecting portion 4310, a lead screw support 4411, and a lead screw 4412;

[0034] Front-rear axis Y, lateral axis X, vertical axis Z. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0036] The terms used in the embodiments of the present disclosure are only for the purpose of describing specific embodiments, and are not intended to limit the present disclosure. The singular forms "a", "said" and "the" used in the embodiments of the present disclosure and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings, and "multiple" generally includes at least two, and other quantifiers are similar.

[0037] It should be understood that, although the terms first, second, third, etc. may be used to describe in the disclosed embodiments, these descriptions should not be limited to these terms. These terms are only used to distinguish the described objects. For example, without departing from the scope of the disclosed embodiments, the first may also be referred to as the second, and similarly, the second may also be referred to as the first. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0038] In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] It should also be noted that the term "includes", "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, so that a commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprising a ..." do not exclude the existence of other identical elements in the commodity or device including the elements.

[0040] Currently, before the chip is packaged, it goes through a wafer testing process. The purpose of this test is to identify invalid wafers and provide valuable feedback for wafer manufacturing, quality control, and production process control. The wafer probe station performs electrical testing on the integrated circuits of each wafer chip. It plays a key role in testing and ensuring the functionality of the integrated circuits (ICs) on the wafer before they are cut into individual chips to achieve accurate, automated, and repeatable electrical testing. The base of the wafer detection system is usually a highly stable chassis that houses a wafer stage on which the wafer is placed for testing. The inspection wafer stage moves in the X, Y, and Z directions to accurately position the wafer under the probe. Ensuring high-precision alignment is a challenge, especially as the wafer size increases and the wafer die size gradually becomes smaller, even a slight misalignment can lead to inaccurate testing and damage to the wafer. Therefore, there are extremely high requirements for the Z-axis load capacity and walking accuracy of the wafer carrier.

[0041] To solve the above technical problems, the present invention discloses a chuck carrier platform, comprising: a first base, a first mounting groove is provided on the first base, and is configured to provide a supporting force in a vertical direction; a frame, a bottom of which is provided with a rotating bearing, the rotating bearing is installed in the first mounting groove, is movably connected with the frame and the first base, and is configured to enable the frame to rotate circumferentially around the vertical direction; a loading plate is arranged on the top of the frame and is configured to carry a probe waiting for a detection member; a driving module is connected to the first base and the frame respectively, and is configured to drive the frame to rotate relative to the first base, the driving module comprising: a driving motor for providing power for the rotation of the frame; a conversion mechanism, in response to the driving motor providing power to the conversion mechanism, a part of the conversion mechanism performs linear motion along the radial direction of the rotating bearing, and another part of the conversion mechanism performs circular motion along the circumferential direction of the rotating bearing, so as to drive the frame to rotate relative to the first base.

[0042] The chuck carrier provided by the present disclosure has a drive motor and a high-precision conversion mechanism. Under the action of the drive motor, the linear motion can be converted into circular motion through the conversion mechanism to realize the rotation of the carrier relative to the first base, ensuring that the error during the movement is small. The probe station provided by the present disclosure can make the carrier fine-tuning accuracy better than 1μm through the setting of the drive module.

[0043] The optional embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0044] In order to more clearly describe the behavior of the chuck carrier, such as Figure 1 As shown, the following directions are defined: the chuck carrier can be calibrated by defining the following three mutually perpendicular axes: the transverse axis X, the front-rear axis Y and the central vertical axis Z. Among them, the extension direction of the transverse axis X is the first direction, the direction of the arrow along the transverse axis X is the "left side" of the chuck carrier, and the opposite direction of the arrow along the transverse axis X is the "right side" of the probe station. The extension direction of the front-rear axis Y is the second direction, the direction of the arrow along the front-rear axis Y is marked as "forward", and the direction opposite to the arrow along the front-rear axis Y is marked as "backward". The extension direction of the vertical axis Z is the third direction, the vertical axis Z is the direction extending upward along the bottom surface of the probe station, the direction of the arrow along the vertical axis Z is the "upper side" of the chuck carrier, and the opposite direction of the arrow along the vertical axis Z is the "lower side" of the chuck carrier.

[0045] like Figure 1 As shown, the embodiment of the present application provides a chuck carrier, comprising: a first base 1000, a frame 2000, a carrier plate 3000, and a driving module 4000, wherein the driving module 4000 comprises a driving motor 4200 and a conversion mechanism 4100. The driving motor 4200 is configured to provide power so that the conversion mechanism 4100 converts its own linear motion into the rotational motion of the frame 2000. Further, the carrier plate 3000 can rotate relative to the first base 1000 driven by the frame 2000, so as to adjust the angle of the probe on the surface of the carrier plate 3000, so that the fine-tuning accuracy of the carrier plate 3000 is better than 1 μm.

[0046] In some embodiments, Figure 2 As shown, a first mounting groove 1001 is provided on the surface of the first base 1000, and the first mounting groove 1001 is used to accommodate the rotating bearing 1100 and provide a supporting force in the vertical direction so that the rotating bearing 1100 is connected to the frame 2000, and the frame 2000 can rotate relative to the first base 1000.

[0047] The first installation groove 1001 may be circular and configured to accommodate the rotating bearing 1100, so that the frame 2000 drives the loading plate 3000 to rotate. In order to reduce the stress between the rotating bearing 1100 and the first base 1000 in the vertical direction, at least a portion of the bottom surface of the first installation groove 1001 may be provided with a through hole 1003, and the through hole 1003 passes through the first base 1000, which has the functions of facilitating installation, realizing the positioning of mechanical parts, and avoiding stress concentration on the surface of the first base 1000.

[0048] In some embodiments, at least a portion of the bottom surface of the first mounting groove 1001 is sunken in the vertical direction, forming a groove on the surface of the first mounting groove 1001 for supporting and limiting the rotating bearing 1100, providing a stable mounting platform, and in response to the frame 2000 being installed on the first base 1000, the frame 2000 can rotate freely relative to the first base 1000 under the condition of no fixing parts installation.

[0049] In some embodiments, Figure 3 As shown, a rotating bearing 1100 is provided at the bottom of the rack 2000, and the rotating bearing 1100 can be selectively assembled in the first mounting groove 1001, and is movably connected to the rack 2000 and the first base 1000, so that the rack 2000 can rotate circumferentially around the vertical direction. A loading tray 3000 is provided at the top of the rack 2000. The loading tray 3000 is one of the key components of the probe station, which is usually used to fix the wafer to ensure that the wafer remains stable during the test process. The loading tray 3000 is arranged at the top of the rack 2000 and is configured to carry the probe waiting for the detection part.

[0050] In the semiconductor manufacturing process, the probe station is used to test the electrical properties of the chips on the wafer before the wafer is cut into individual chips. This helps to find and eliminate defective chips at an early stage, and improve production efficiency and product quality. Specifically, during the test, the wafer needs to be loaded first, that is, the wafer is placed on the carrier plate 3000 and fixed. The carrier plate 3000 will adjust the temperature according to the test requirements. Then, through a microscope and a visual system, the operator accurately aligns the probe on the probe card with the solder joints on the wafer. This step requires extremely high precision, usually at the micron level. The chuck carrier provided in the present embodiment is used to control the rotation of the carrier plate 3000 so that the probe on the probe card is accurately aligned with the solder joints on the wafer.

[0051] In some embodiments, Figure 3 As shown, the chuck carrier platform further includes a driving module 4000 , parts of which are respectively connected to the first base 1000 and the frame 2000 , and are configured to drive the frame 2000 to rotate relative to the first base 1000 .

[0052] Specifically, the driving module 4000 includes: a driving motor 4200 and a conversion mechanism 4100. The driving motor 4200 is disposed on one side of the conversion mechanism 4100, and is used to provide basic power for the rotation of the frame 2000; the conversion mechanism 4100 is disposed on the frame 2000, and in response to the driving motor 4200 providing power to the conversion mechanism 4100, a part of the conversion mechanism 4100 performs linear motion along the radial direction of the rotating bearing 1100, and another part of the conversion mechanism 4100 performs circular motion along the circumference of the rotating bearing 1100, so as to drive the frame 2000 to rotate relative to the first base 1000.

[0053] In some embodiments, Figure 1 , Figure 3 As shown, the conversion mechanism 4100 includes: a rolling bearing seat 4101 and a first slider assembly 4110. The rolling bearing seat 4101 is installed in the second installation slot 1002 of the first base 1000, and is configured to provide a fulcrum for the rotation of the conversion mechanism 4100 relative to the first base 1000, so as to support the frame 2000 to drive the loading plate 3000 to rotate relative to the first base 1000.

[0054] like Figure 4 As shown, the first slider assembly 4110 includes an axis core 4112 and a first connecting member 4111, wherein the axis core 4112 is disposed on the first connecting member 4111, and the axis core 4112 at least partially extends into the rolling bearing seat 4101, and is configured so that the first connecting member 4111 can rotate relative to the rolling bearing seat 4101 with the axis core 4112 as the axis. In this process, the rolling bearing seat 4101 plays a crucial role, which stably supports the axis core 4112, ensures that the axis core 4112 can rotate accurately during the rotation process, reduces vibration and offset, and ensures the accuracy and smoothness of the entire movement.

[0055] In some embodiments, Figure 5 As shown, the first slider assembly 4110 also includes a rolling bearing 4413, which is arranged on the surface of the first connecting member 4111 and surrounds the shaft core 4112, and is configured to be movably connected to the rolling bearing seat 4101 to bear the radial and axial loads of the first connecting member 4111.

[0056] In some embodiments, the conversion mechanism 4100 further includes a wedge structure 4116, which can be disposed between the first connecting member 4111 and the rolling bearing seat 4101, or between the second slider 4122 and the special-shaped nut 4121, and is configured to adjust the gap between adjacent structural members. In the mechanical structure of the same probe station, the wedge structure 4116 can also be disposed between the first connecting member 4111 and the rolling bearing seat 4101 and between the second slider 4122 and the special-shaped nut 4121 at the same time.

[0057] In some embodiments, Figure 5 , Figure 6 As shown, the first slider assembly 4110 further includes a first slider 4114, which is disposed on a side of the first connecting member 4111 away from the axis and fixedly connected to the first connecting member 4111. The first slider 4114 is partially sunken, and the two side wall surfaces of the sunken portion are provided with guide protrusions to form a first sliding portion 4415, which extends along the Y direction of the front-rear axis, that is, along the second direction. The provision of the first sliding portion 4415 limits the sliding guide of the first sliding assembly, and the first slider 4114 will move along the second direction under the action of an external force, so that the axis core 4112 rotates relative to the rolling bearing seat 4101 inside the rolling bearing seat 4101, thereby realizing the relative rotation of the loading plate 3000 and the first base 1000.

[0058] In some embodiments, the conversion mechanism 4100 further includes a second base 4300, a lead screw 4412, and a connecting portion 4310. Figure 7 As shown, the second base 4300 and the first base 1000 have the same surface extension direction, which is used to provide a stable working plane for the lead screw 4412. The connecting portion 4310 can be a "C"-shaped structural member, and the upper and lower end surfaces of the connecting portion 4310 are respectively fixedly connected to the second base 4300 and the frame 2000, thereby achieving synchronous rotation of the second base 4300 and the frame 2000.

[0059] A lead screw support 4411 is disposed on the lower surface of the second base 4300. A lead screw 4412 is disposed on the second base 4300 with the assistance of the lead screw support 4411 and extends along the transverse axis X, that is, the lead screw 4412 extends along the first direction. A movable second slider assembly 4120 is disposed on the lead screw 4412. The drive motor 4200 is disposed at one end of the lead screw 4412. In response to the forward or reverse rotation of the drive motor 4200, the second slider assembly 4120 moves leftward or rightward in the first direction.

[0060] It should be separately explained that the present embodiment does not impose any specific limitation on the relationship between the rotation of the drive motor 4200 and the movement of the second slider assembly 4120. When the drive motor 4200 rotates forward, the second slider assembly 4120 can move to the left or to the right; when the drive motor 4200 rotates reversely, the second slider assembly 4120 can move to the right or to the left. The present embodiment does not impose any limitation on this.

[0061] In some embodiments, the second slider assembly 4120 includes: a special-shaped nut 4121 and a second slider 4122. Figure 7 As shown, the special-shaped nut 4121 is movably arranged on the lead screw 4412, and is suitable for moving leftward or rightward along the lead screw 4412 under the driving action of the driving motor 4200. The second slider 4122 is arranged on the side of the special-shaped nut 4121 adjacent to the first slider assembly 4110, and is configured to move synchronously with the special-shaped nut 4121.

[0062] In some embodiments, Figure 6 , Figure 7 As shown, the width of the second slider 4122 matches the sinking width of the surface of the first slider 4114, and the surface of the second slider 4122 is provided with a second sliding portion 4123, the second sliding portion 4123 extends along the second direction, and the second sliding portion 4123 is used to connect with the first sliding portion 4415, and the second sliding portion 4123 can slide relative to the first sliding portion 4415. When the second sliding assembly moves along the first direction, in order to avoid the occurrence of part position difference between the first slider 4114 and the second slider 4122, the first slider 4114 moves in the second direction relative to the second slider 4122. Furthermore, since the first slider assembly 4110 is connected to the rolling bearing seat 4101, in response to the movement of the first sliding assembly, the rolling bearing seat 4101 will rotate relative to the first sliding assembly, thereby realizing the rotation of the frame 2000 relative to the first base 1000.

[0063] The lead screw 4412 used in this embodiment is a high-precision mechanical part, and the moving position of the second slider 4122 can be accurately controlled through the rotational movement of the lead screw 4412. The cooperation between the first slider assembly 4110 and the rolling bearing seat 4101 can be used to support and guide the rotation of the frame 2000 and the loading plate 3000, ensuring the smoothness and accuracy of the movement of the loading plate 3000.

[0064] In some embodiments, the conversion mechanism 4100 can be a crank slider mechanism, and the portion connecting the first slider 4114 and the second slider 4122 can be regarded as a movable crank. Specifically, under the action of the driving motor 4200, the second slider 4122 can be controlled to move left or right along the lead screw 4412. In this process, the linear motion of the second slider 4122 drives the shaft core 4112 of the first slider assembly 4110 to perform circular motion relative to the rolling bearing seat 4101. The first slider 4114 is connected to the shaft core 4112 through the first connecting member 4111, and the shaft core 4112 is rotatably installed in the rolling bearing seat 4101. When the first slider 4114 performs circular motion relative to the rolling bearing seat 4101 with the shaft core 4112 as the axis, the frame 2000 rotates as a whole relative to the first base 1000, thereby successfully converting the linear displacement of the second slider 4122 into the rotational displacement of the shaft core 4112.

[0065] The chuck carrier provided in the present disclosure has a driving motor 4200 and a high-precision conversion mechanism 4100. Under the action of the driving motor 4200, the conversion mechanism 4100 can convert linear motion into circular motion to realize the rotation of the carrier plate 3000 relative to the first base 1000, ensuring that the error during the movement is small. The probe station provided in the present disclosure can make the fine-tuning accuracy of the carrier plate 3000 better than 1μm through the setting of the driving module 4000.

[0066] In some embodiments, the second slider assembly 4120 further includes a limit block 4124, which can be disposed on a side of the special-shaped nut 4121 away from the second substrate, and a thickness of the limit block 4124 in a vertical direction is greater than a thickness of the second slider 4122, and the limit block 4124 is used to limit movement of the first connecting member 4111 to avoid a large relative displacement between the first connecting member 4111 and the second slider 4122, which would cause excessive rotation of the loading plate 3000.

[0067] In some other embodiments, the limit block 4124 may also be provided on the second sliding block 4122 , and configured to limit the movement range of the first connecting member 4111 in the second direction.

[0068] In some embodiments, precision electronic component samples such as wafers and chips waiting to be tested are placed on the carrier plate 3000. If the carrier plate 3000 rotates too fast, a large centrifugal force will be generated. For tiny and fragile sample structures, the sample may be displaced or damaged, or the contact between the probe and the sample may be affected, such as the probe scratching the sample surface or causing poor contact, affecting the test accuracy. In order to protect the sample and the probe, the rotation speed of the frame 2000 is limited to 0 to 20 mm / s. In addition, from the perspective of the device itself, the high-speed rotation of the carrier plate 3000 will generate a large load on its drive module 4000. Long-term operation at high speed can easily lead to problems such as overheating of the drive and increased wear of the conversion mechanism 4100, reducing the service life of the equipment. Reasonable limitation of the rotation speed can enable the device to operate within a safe working range, reduce the probability of failure, and ensure measurement accuracy.

[0069] In some embodiments, since the rotation angle of the carrier relative to the first base 1000 is small, the deflection angle of the frame 2000 relative to the first base 1000 is ±5 degrees. When testing samples, it is often necessary to accurately align specific test points. If there is no angle limit, the carrier plate 3000 may rotate excessively, causing the sample to collide with the surrounding equipment structure, causing damage to the sample or the equipment. By limiting the rotation angle of the carrier plate 3000, precise positioning can be performed according to a pre-set angle value. For example, when testing regularly arranged pins on a chip, each pin corresponds to a certain angle position. Limiting the rotation angle can ensure that the probe accurately contacts the target pin, thereby improving the accuracy and efficiency of the test.

[0070] Finally, it should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other. For the system or device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part description.

[0071] The above embodiments are only used to illustrate the technical solutions of the present disclosure, rather than to limit them. Although the present disclosure has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present disclosure.

Claims

1. A chuck carrier, characterized in that: include: A first base, wherein a first mounting groove is provided on the first base and configured to provide a supporting force in a vertical direction; A frame, with a rotating bearing disposed at the bottom, the rotating bearing being installed in the first installation groove, being movably connected with the frame and the first base, and being configured to enable the frame to rotate circumferentially around the vertical direction; A loading tray, disposed on the top of the rack, configured to carry the probe waiting for the inspection piece; A driving module, connected to the first base and the frame respectively, configured to drive the frame to rotate relative to the first base, the driving module comprising: A driving motor, used to provide power for the rotation of the frame; A conversion mechanism, in response to the drive motor providing power to the conversion mechanism, a part of the conversion mechanism performs linear motion along the radial direction of the rotary bearing, and another part of the conversion mechanism performs circular motion along the circumferential direction of the rotary bearing, so as to drive the frame to rotate relative to the first base.

2. The chuck carrier according to claim 1, characterized in that: The conversion mechanism comprises: a rolling bearing seat, fixedly connected to the first base and configured to support the frame to rotate relative to the first base; The first slider assembly includes an axis core and a first connecting member. The axis core is arranged on the first connecting member and at least partially extends into the rolling bearing seat. A first sliding portion is arranged on the surface of the first connecting member.

3. The chuck carrier according to claim 2, characterized in that: The conversion mechanism also includes: A second base, fixedly connected to the frame; A lead screw is arranged on the second base and extends along the first direction, a movable second slider assembly is arranged on the lead screw, and the drive motor is arranged at one end of the lead screw; In response to the driving motor rotating forward or reversely, the second slider assembly moves forward or backward in the first direction.

4. The chuck carrier according to claim 3, characterized in that: The second slider assembly comprises: a special-shaped nut connected to the lead screw and configured to move along the first direction under the action of a driving motor; The second sliding block is arranged on the special-shaped nut. A second sliding portion is arranged on the surface of the second sliding block along a second direction. The second direction is perpendicular to the first direction. The second sliding portion is slidably connected to the first sliding portion.

5. The chuck carrier according to claim 4, characterized in that: In response to the second sliding assembly moving along the first direction, the first connecting member moves along the second direction relative to the second sliding block to drive the frame to rotate relative to the first base.

6. The chuck carrier according to claim 4, characterized in that: The second slider assembly also includes: A limit block is provided on the special-shaped nut or the second sliding block and is configured to limit the movement range of the first connecting member in the second direction.

7. The chuck carrier according to claim 2, characterized in that: The first slider assembly also includes: The rolling bearing is arranged on the surface of the first connecting member and surrounds the shaft core, and is configured to be movably connected to the rolling bearing seat to bear the radial and axial loads of the first connecting member.

8. The chuck carrier according to claim 4, characterized in that: The conversion mechanism also includes: The wedge structure is arranged between the first connecting member and the rolling bearing seat, and / or between the second sliding block and the special-shaped nut, and is configured to adjust the gap between adjacent structural members.

9. The chuck carrier according to claim 3, characterized in that: The rotation speed of the frame is 0-20 mm / s.

10. The chuck carrier according to claim 3, characterized in that: The deflection angle of the frame relative to the first base is ±5 degrees.

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