An ultra-large-range white light confocal dispersion lens and a white light confocal measurement system

Abstract

The present invention discloses an ultra-large-range white-light confocal dispersion lens and a white-light confocal measurement system. The lens comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, and a sixth lens, arranged coaxially along the incident axis. The first and second lenses form a first cemented lens, the third and fourth lenses form a second cemented lens, and the fifth and sixth lenses form a third cemented lens. The dispersion lens has a dispersion range of 74 mm and a rear working distance ranging from 113 mm to 187 mm. The system has a total length of 152.122 mm, a compact structure, and is easy to assemble. It offers high usability and wide application adaptability.

Description

Technical Field

[0001] The present application relates to the field of optical measurement technology, and in particular to an ultra-large-range white light confocal dispersion lens and a white light confocal measurement system. Background Art

[0002] The white-light confocal measurement system is a high-precision photoelectric measurement technology that leverages the phenomenon of dispersion and the principles of confocal microscopy to accurately detect object displacement. By analyzing the relationship between wavelength variations and focal position of light reflected from an object's surface, the system accurately measures minute displacements and is suitable for micro- and nanoscale displacement detection. Compared to traditional laser confocal systems, white-light confocal systems offer a wider wavelength range and higher measurement accuracy, providing non-contact, rapid, and non-destructive displacement measurement. They are widely used in precision measurement, materials testing, and microscopic displacement analysis.

[0003] The core component of a white-light confocal measurement system is a white-light dispersive lens. The performance of this lens directly impacts the system's measurement performance. While significant progress has been made in the research of white-light confocal dispersive lenses, their application still faces challenges in addressing ultra-large measurement ranges, hindering their ability to meet the demands of some large-displacement measurement applications. Summary of the Invention

[0004] In light of this, embodiments of the present application provide an ultra-wide-range white-light confocal dispersive lens and white-light confocal measurement system capable of meeting the demand for high-precision measurements over an extremely large measurement range. This dispersive lens has a 74mm dispersion range, a rear working distance ranging from 113mm to 187mm, and a total system length of 152.122mm. This system offers excellent single-point imaging, a compact structure, and ease of assembly, resulting in high usability and broad application adaptability.

[0005] According to a first aspect of an embodiment of the present application, there is provided a white light confocal dispersion lens with an ultra-wide range, comprising a first lens, a second lens, a third lens, a fourth lens, a fifth lens, and a sixth lens, which are coaxially arranged in sequence along the incident direction of light, wherein the first lens and the second lens form a first cemented lens, the third lens and the fourth lens form a second cemented lens, and the fifth lens and the sixth lens form a third cemented lens;

[0006] The distance between the first and second cemented lenses is 0 mm, and the distance between the second and third cemented lenses is 3 mm to 5 mm; the distance between the object plane and the incident surface of the first lens is 105 mm to 115 mm, and the distance between the incident surface of the first lens and the exit surface of the sixth lens is 40 mm to 50 mm;

[0007] The glass material of the first lens: 1.6 < n < 1.8, 50 < Vd < 60; the glass material of the second lens: 1.7 < n < 1.9, 20 < Vd < 30; the glass material of the third lens: 1.7 < n < 1.9, 20 < Vd < 30; the glass material of the fourth lens: 1.7 < n < 1.9, 45 < Vd < 55; the glass material of the fifth lens: 1.6 < n < 1.8, 50 < Vd < 60; the glass material of the sixth lens: 1.7 < n < 1.9, 20 < Vd < 30; where n is the refractive index and Vd is the Abbe number;

[0008] Light enters from the first lens and finally exits through the sixth lens. In this process, the divergent light is preliminarily collimated by the first cemented lens, and preliminary dispersion processing is carried out at the same time. Then, the beam is further focused by the second cemented lens and the secondary dispersion is completed. Finally, the beam passes through the third cemented lens. Among them, the fifth lens is mainly used to correct the aberration of the system, and the sixth lens performs the third dispersion processing.

[0009] Preferably, the distance between the first cemented lens and the second cemented lens is 0 mm, and the distance between the second cemented lens and the third cemented lens is 4.122 mm; the distance between the object plane and the incident surface of the first lens is 110 mm, and the distance between the incident surface of the first lens and the exit surface of the sixth lens is 42.122 mm.

[0010] Optionally, the beam emitted by the light source enters from the first lens and exits from the sixth lens, where: the first lens is a negative focal length lens, the incident surface is concave, -75 mm < r < -65 mm, the exit surface is concave, 120 mm < r < 130 mm; the second lens is a positive focal length lens, the incident surface is convex, 120 mm < r < 130 mm, the exit surface is convex, -60 mm < r < -50 mm; the third lens is a positive focal length lens, the incident surface is convex, 50 mm < r < 60 mm, the exit surface is convex, -60 mm < r < -50 mm; the fourth lens is a negative focal length lens, the incident surface is concave, -60 mm < r < -50 mm, the exit surface is concave, 230 mm < r < 240 mm; the fifth lens is a negative focal length lens, the incident surface is concave, -70 mm < r < -60 mm, the exit surface is concave, 20 mm < r < 30 mm; the sixth lens is a positive focal length lens, the incident surface is convex, 20 mm < r < 30 mm, the exit surface is convex, -870 mm < r < -860 mm; where r is the radius of curvature.

[0011] Optionally, the radius of curvature of the incident surface of the first lens is -70.3mm, and the radius of curvature of the exit surface is 123.2mm; the radius of curvature of the incident surface of the second lens is 123.2mm, and the radius of curvature of the exit surface is -54.3mm; the radius of curvature of the incident surface of the third lens is 57.7mm, and the radius of curvature of the exit surface is -55.7mm; the radius of curvature of the incident surface of the fourth lens is -55.7mm, and the radius of curvature of the exit surface is 238.3mm; the radius of curvature of the incident surface of the fifth lens is -62.1mm, and the radius of curvature of the exit surface is 24.1mm; the radius of curvature of the incident surface of the sixth lens is 24.1mm, and the radius of curvature of the exit surface is -866.5mm.

[0012] Optionally, the first lens and the fifth lens are made of the same glass material, and the second lens and the third lens are made of the same glass material.

[0013] Optionally, the distance between the object plane and the exit surface of the sixth lens (i.e., the total length of the system) is 152.122 mm; and the maximum clear aperture of the six lenses constituting the dispersion lens is 17 mm.

[0014] According to a second aspect of an embodiment of the present application, a white light confocal measurement system is provided, comprising a white laser module, a spectrometer, a split-two optical fiber, and the ultra-large-range white light confocal dispersive lens described in the first aspect, wherein the white laser module, the white light confocal dispersive lens, and the spectrometer are connected via a split-two optical fiber.

[0015] The technical solutions provided by the embodiments of the present application may have the following beneficial effects:

[0016] As can be seen from the above embodiment, light enters through the first lens and ultimately exits through the sixth lens. During this process, the divergent light is initially collimated by the first cemented lens, consisting of the first and second lenses, and undergoes preliminary dispersion. Next, the second cemented lens, consisting of the third and fourth lenses, further focuses the light beam and performs secondary dispersion. Finally, the light beam passes through the third cemented lens, consisting of the fifth and sixth lenses. The fifth lens primarily corrects system aberrations, while the sixth lens performs tertiary dispersion. To achieve a wide range of dispersion, the design incorporates multiple lenses with high refractive index and low Abbe number. This white light confocal dispersive lens has a dispersion range of 74mm, a back working distance of 113mm to 187mm, a total system length of 152.122mm, an object-side numerical aperture (NA) of 0.13, and an image-side numerical aperture (NA') of 0.073. This system not only performs excellent single-point imaging, but also has a compact structure and simple assembly, offering high practicality and broad application prospects.

[0017] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0019] Figure 1 FIG. 4 is an optical structure diagram of a white light confocal dispersion lens provided in accordance with an embodiment of the present invention.

[0020] Figure 2 FIG. 1 is a diagram showing the relationship between the focus position and wavelength of a white light confocal dispersion lens provided in one embodiment of the present invention.

[0021] Figure 3 4 is a spot diagram of a white light confocal dispersive lens provided by an embodiment of the present invention at a wavelength of 470 nm.

[0022] Figure 4 1 is a spot diagram of a white light confocal dispersive lens provided by an embodiment of the present invention at a wavelength of 585 nm.

[0023] Figure 5 1 is a spot diagram of a white light confocal dispersive lens provided by an embodiment of the present invention at a wavelength of 700 nm.

[0024] Figure 6 This is a light trace diagram of a white light confocal dispersion lens provided by an embodiment of the present invention at a wavelength of 470nm.

[0025] Figure 7 This is a light trace diagram of a white light confocal dispersion lens provided by an embodiment of the present invention at a wavelength of 585 nm.

[0026] Figure 8 This is a light trace diagram of a white light confocal dispersive lens provided by an embodiment of the present invention at a wavelength of 700 nm.

[0027] Figure 9 Schematic diagram of the structure of a white light confocal measurement system provided by one embodiment of the present invention.

[0028] In the picture:

[0029] L1, first lens; L2, second lens; L3, third lens; L4, fourth lens; L5, fifth lens; L6, sixth lens;

[0030] 21. White laser module; 22. Spectrometer; 23. One-to-two optical fiber; 24. White light confocal dispersion lens. DETAILED DESCRIPTION

[0031] Exemplary embodiments will be described in detail herein, with examples illustrated in the accompanying drawings. In the following description, when referring to the drawings, identical numerals in different figures represent identical or similar elements, unless otherwise indicated. The embodiments described in the following exemplary embodiments are not intended to represent all embodiments consistent with the present application. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present application, as detailed in the appended claims.

[0032] The terms used in this application are for the purpose of describing specific embodiments only and are not intended to limit this application. As used in this application and the appended claims, the singular forms "a," "an," "the," and "the" are intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items.

[0033] It should be understood that although the terms first, second, third, etc. may be used in this application to describe various information, such information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, without departing from the scope of this application, first information may also be referred to as second information, and similarly, second information may also be referred to as first information. Depending on the context, the word "if" as used herein may be interpreted as "at the time of" or "when" or "in response to determining".

[0034] Reference Attachment Figure 1 As shown, an embodiment of the present invention provides a white light confocal dispersion lens with an ultra-wide range, comprising a first lens L1, a second lens L2, a third lens L3, a fourth lens L4, a fifth lens L5, and a sixth lens L6, which are coaxially arranged in sequence along the incident direction of light. The first lens L1 and the second lens L2 form a first cemented lens, the third lens L3 and the fourth lens L4 form a second cemented lens, and the fifth lens L5 and the sixth lens L6 form a third cemented lens. Light is incident from the first lens and eventually emerges from the sixth lens. During this process, the divergent light is initially collimated and initially dispersed by the first cemented lens. Subsequently, the light beam is further focused and undergoes secondary dispersion by the second cemented lens. Finally, the light beam passes through the third cemented lens. The fifth lens is primarily used to correct system aberrations, while the sixth lens undergoes tertiary dispersion.

[0035] In one embodiment, the distance between the first cemented lens and the second cemented lens is 0 mm, and the distance between the second cemented lens and the third cemented lens is 3 mm; the distance between the object plane and the incident surface of the first lens L1 is 105 mm, and the distance between the incident surface of the first lens L1 and the exit surface of the sixth lens L6 is 40 mm.

[0036] In another embodiment, the distance between the first cemented lens and the second cemented lens is 0 mm, and the distance between the second cemented lens and the third cemented lens is 5 mm; the distance between the object surface and the incident surface of the first lens L1 is 115 mm, and the distance between the incident surface of the first lens L1 and the exit surface of the sixth lens L6 is 50 mm.

[0037] In a preferred embodiment, the distance between the first cemented lens and the second cemented lens is 0 mm, and the distance between the second cemented lens and the third cemented lens is 4.122 mm; the distance between the object surface and the incident surface of the first lens L1 is 110 mm, and the distance between the incident surface of the first lens L1 and the exit surface of the sixth lens L6 is 42.122 mm.

[0038] In one embodiment, the light beam emitted by the light source is incident on the first lens L1 and exits from the sixth lens L6, where: the first lens L1 is a negative focal length lens, the incident surface is a concave surface, -75 mm < r < -65 mm, the exit surface is a concave surface, 120 mm < r < 130 mm; the second lens L2 is a positive focal length lens, the incident surface is a convex surface, 120 mm < r < 130 mm, the exit surface is a convex surface, -60 mm < r < -50 mm; the third lens L3 is a positive focal length lens, the incident surface is a convex surface, 50 mm < r < 60 mm, the exit surface is a convex surface, -60 mm < r < -50 mm; the fourth lens L4 is a negative focal length lens, the incident surface is a concave surface, -60 mm < r < -50 mm, the exit surface is a concave surface, 230 mm < r < 240 mm; the fifth lens L5 is a negative focal length lens, the incident surface is a concave surface, -70 mm < r < -60 mm, the exit surface is a concave surface 20 mm < r < 30 mm; the sixth lens L6 is a positive focal length lens, the incident surface is a convex surface, 20 mm < r < 30 mm, the exit surface is a convex surface -870 mm < r < -860 mm; where r is the radius of curvature. By reasonably configuring the positive focal length lens and the negative focal length lens and designing the radius of curvature of each lens, the collimation, focusing and dispersion processing of the light beam are optimized, and the synergistic effect between the lenses effectively reduces the aberration, ensuring high-precision measurement within a very large range.

[0039] In one embodiment, the radius of curvature of the incident surface of the first lens L1 is -75 mm, and the radius of curvature of the exit surface is 120 mm; the radius of curvature of the incident surface of the second lens L2 is 120 mm, and the radius of curvature of the exit surface is -60 mm; the radius of curvature of the incident surface of the third lens L3 is 50 mm, and the radius of curvature of the exit surface is -60 mm; the radius of curvature of the incident surface of the fourth lens L4 is -60 mm, and the radius of curvature of the exit surface is 230 mm; the radius of curvature of the incident surface of the fifth lens L5 is -70 mm, and the radius of curvature of the exit surface is 20 mm; the radius of curvature of the incident surface of the sixth lens L6 is 20 mm, and the radius of curvature of the exit surface is -870 mm.

[0040] In another embodiment, the radius of curvature of the incident surface of the first lens L1 is -65 mm, and the radius of curvature of the exit surface is 130 mm; the radius of curvature of the incident surface of the second lens L2 is 130 mm, and the radius of curvature of the exit surface is -50 mm; the radius of curvature of the incident surface of the third lens L3 is 60 mm, and the radius of curvature of the exit surface is -50 mm; the radius of curvature of the incident surface of the fourth lens L4 is -50 mm, and the radius of curvature of the exit surface is 240 mm; the radius of curvature of the incident surface of the fifth lens L5 is -60 mm, and the radius of curvature of the exit surface is 30 mm; the radius of curvature of the incident surface of the sixth lens L6 is 30 mm, and the radius of curvature of the exit surface is -860 mm.

[0041] In a preferred embodiment, the radius of curvature of the incident surface of the first lens L1 is -70.3 mm, and the radius of curvature of the exit surface is 123.2 mm; the radius of curvature of the incident surface of the second lens L2 is 123.2 mm, and the radius of curvature of the exit surface is -54.3 mm; the radius of curvature of the incident surface of the third lens L3 is 57.7 mm, and the radius of curvature of the exit surface is -55.7 mm; the radius of curvature of the incident surface of the fourth lens L4 is -55.7 mm, and the radius of curvature of the exit surface is 238.3 mm; the radius of curvature of the incident surface of the fifth lens L5 is -62.1 mm, and the radius of curvature of the exit surface is 24.1 mm; the radius of curvature of the incident surface of the sixth lens L6 is 24.1 mm, and the radius of curvature of the exit surface is -866.5 mm.

[0042] In one embodiment, the glass material of the first lens L1: 1.6 < n < 1.8, 50 < Vd < 60; the glass material of the second lens L2: 1.7 < n < 1.9, 20 < Vd < 30; the glass material of the third lens L3: 1.7 < n < 1.9, 20 < Vd < 30; the glass material of the fourth lens L4: 1.7 < n < 1.9, 45 < Vd < 55; the glass material of the fifth lens L5: 1.6 < n < 1.8, 50 < Vd < 60; the glass material of the sixth lens L6: 1.7 < n < 1.9, 20 < Vd < 30; where n is the refractive index and Vd is the Abbe number. By reasonably selecting the glass materials of each lens, the system controls the refractive index (n) and the Abbe number (Vd), effectively reducing aberrations such as spherical aberration and coma in the system. Not only does it improve the dispersion performance of the optical system, but it also enhances the imaging quality and measurement accuracy of the system, ensuring high-precision and stable measurement effects within a very large range.

[0043] In one embodiment, the first lens L1 and the fifth lens L5 use the same glass material, and the second lens L2 and the third lens L3 use the same glass material. Optimizing the lens structure and the selection of glass materials not only simplifies the manufacturing process, reduces production costs, but also effectively reduces the influence of chromatic aberration and temperature fluctuations caused by material differences on optical performance, thereby improving the stability and measurement accuracy of the system.

[0044] In one embodiment, the distance between the object surface and the exit surface of the sixth lens L6 (i.e., the total system length) is 152.122 mm; among the six lenses constituting the dispersion lens, the maximum clear aperture is 17 mm. On the premise of ensuring a large dispersion range, this dispersion lens effectively reduces the system volume, optimizes the design, and improves the compactness of the overall structure.

[0045] Table 1 Parameters of the lens group:

[0046] surface Radius of curvature (unit / mm) Net diameter (unit / mm) The incident surface of the first lens L1 -70.3 14.232 The exit surface of the first lens L1 123.2 17 The incident surface of the second lens L2 123.2 17 The second lens L2 exit surface -54.3 17 The incident surface of the third lens L3 57.7 17 The third lens L3 exit surface -55.7 17 Incident surface of the fourth lens L4 -55.7 17 The exit surface of the fourth lens L4 238.3 14.814 The incident surface of the fifth lens L5 -62.1 14.39 The exit surface of the fifth lens L5 24.1 15 The exit surface of the sixth lens L6 24.1 15 The exit surface of the sixth lens L6 -866.5 14.05

[0047] In one embodiment, Table 1 gives the parameters of the lens group of the white light confocal dispersion lens. Light enters from the entrance surface of the first lens L1 and finally exits from the exit surface of the sixth lens L6. In this process, the divergent light is preliminarily collimated by the first cemented lens composed of the first lens L1 and the second lens L2, and preliminary dispersion processing is carried out at the same time. Then, the second cemented lens composed of the third lens L3 and the fourth lens L4 further focuses the light beam and completes the secondary dispersion. Finally, the light beam passes through the third cemented lens composed of the fifth lens L5 and the sixth lens L6. Among them, the fifth lens L5 is mainly used to correct the aberrations of the system, while the sixth lens L6 performs the third dispersion processing.

[0048] See Appendix Figure 2The focus position and wavelength relationship diagram of the white light confocal dispersive lens provided in this embodiment shows that the dispersive lens achieves a dispersion range of 74mm in the wavelength range of 470nm~700nm, and the back working distance is 113mm~187mm.

[0049] See attached Figure 3 This is the spot diagram of the white light confocal dispersion lens provided in this embodiment at a wavelength of 470nm, Figure 4 This is the spot diagram of the white light confocal dispersion lens provided in this embodiment at a wavelength of 585nm, Figure 5 The spot diagram of the white light confocal dispersive lens provided in this embodiment at a wavelength of 700nm. The spot diagram shows that the spot size of each field of view is less than or equal to the Airy disk, indicating that the system is close to the diffraction limit. Figure 6 This is the light trace diagram of the white light confocal dispersion lens provided in this embodiment at a wavelength of 470nm, Figure 7 This is the light trace diagram of the white light confocal dispersion lens provided in this embodiment at a wavelength of 585nm, Figure 8 The light trajectory diagram of the white light confocal dispersive lens provided in this embodiment at a wavelength of 700nm. In the lens design, the system object height is set to 50μm. From the light trajectory diagram, it can be seen that the system image height is also 50μm, and the entire dispersive lens has a magnification relationship of 1x from object to image.

[0050] As can be seen from the above examples, this application provides an ultra-wide-range white light confocal dispersive lens, consisting of six lenses. This dispersive lens has a dispersion range of 74mm, a rear working distance covering 113mm to 187mm, and a total system length of 152.122mm, capable of meeting the needs of high-precision measurement over an extremely large measurement range. The system offers excellent single-point imaging, a compact structure, and ease of assembly, offering high practical value and broad application adaptability.

[0051] refer to Figure 9 An embodiment of the present invention further provides a white-light confocal measurement system, comprising a white laser module 21, a spectrometer 22, a split-to-two optical fiber 23, and the aforementioned ultra-large-range white-light confocal dispersive lens 24. The white laser module 21, white-light confocal dispersive lens 24, and spectrometer 22 are connected via the split-to-two optical fiber. Light emitted by the white laser module 21 is incident from branch end ① of the split-to-two optical fiber 23, exits from the common end ②, and enters the white-light confocal dispersive lens 24. The light then passes through the first lens L1 through the sixth lens L6, undergoing dispersion. After the dispersed light is irradiated onto a target object, the single-wavelength light focused on the target object is reflected and returned to the white-light confocal dispersive lens 24. It then passes through the sixth lens L6 to the first lens L1, exits from the branch end ③, and enters the spectrometer 22.

[0052] Those skilled in the art will readily appreciate other embodiments of the present application after considering the specification and practicing the contents disclosed herein. This application is intended to cover any variations, uses, or adaptations of the present application that follow the general principles of the present application and include common knowledge or customary techniques in the art not disclosed herein. The description and examples are to be considered merely as exemplary, and the true scope and spirit of the present application are indicated by the claims.

[0053] It should be understood that the present application is not limited to the exact structures described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present application is limited only by the appended claims.

Claims

1. A super-wide-range white light confocal dispersion lens, characterized in that: It consists of a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens which are coaxially arranged in sequence along the light incidence direction. Among them, the first lens and the second lens form a first cemented lens, the third lens and the fourth lens form a second cemented lens, and the fifth lens and the sixth lens form a third cemented lens; The distance between the first cemented lens and the second cemented lens is 0 mm, and the distance between the second cemented lens and the third cemented lens is 3 mm to 5 mm; the distance between the object plane and the incident surface of the first lens is 105 mm to 115 mm, and the distance between the incident surface of the first lens and the exit surface of the sixth lens is 40 mm to 50 mm; The glass material of the first lens: 1.6 < n < 1.8, 50 < Vd < 60; the glass material of the second lens: 1.7 < n < 1.9, 20 < Vd < 30; the glass material of the third lens: 1.7 < n < 1.9, 20 < Vd < 30; the glass material of the fourth lens: 1.7 < n < 1.9, 45 < Vd < 55; the glass material of the fifth lens: 1.6 < n < 1.8, 50 < Vd < 60; the glass material of the sixth lens: 1.7 < n < 1.9, 20 < Vd < 30; where n is the refractive index and Vd is the Abbe number; Light enters from the first lens and finally exits through the sixth lens. In this process, the divergent light is preliminarily collimated by the first cemented lens while preliminary dispersion processing is carried out. Then, the beam is further focused by the second cemented lens and the second dispersion is completed. Finally, the beam passes through the third cemented lens. Among them, the fifth lens is mainly used to correct the aberration of the system, and the sixth lens performs the third dispersion processing; The first lens is a negative focal length lens; the second lens is a positive focal length lens; the third lens is a positive focal length lens; the fourth lens is a negative focal length lens; the fifth lens is a negative focal length lens; the sixth lens is a positive focal length lens.

2. The ultra-wide-range white light confocal dispersion lens according to claim 1, wherein: The distance between the first cemented lens and the second cemented lens is 0 mm, and the distance between the second cemented lens and the third cemented lens is 4.122 mm; the distance between the object plane and the incident surface of the first lens is 110 mm, and the distance between the incident surface of the first lens and the exit surface of the sixth lens is 42.122 mm.

3. The ultra-wide-range white light confocal dispersion lens according to claim 1, wherein: The light beam emitted by the light source enters through the first lens and exits through the sixth lens, where: the incident surface of the first lens is concave, -75 mm < r < -65 mm, and the exit surface is concave, 120 mm < r < 130 mm; the incident surface of the second lens is convex, 120 mm < r < 130 mm, and the exit surface is convex, -60 mm < r < -50 mm; the incident surface of the third lens is convex, 50 mm < r < 60 mm, and the exit surface is convex, -60 mm < r < -50 mm; the incident surface of the fourth lens is concave, -60 mm < r < -50 mm, and the exit surface is concave, 230 mm < r < 240 mm; the incident surface of the fifth lens is concave, -70 mm < r < -60 mm, and the exit surface is concave, 20 mm < r < 30 mm; the incident surface of the sixth lens is convex, 20 mm < r < 30 mm, and the exit surface is convex, -870 mm < r < -860 mm; where r is the radius of curvature.

4. The ultra-wide-range white light confocal dispersion lens according to claim 1, characterized in that: The radius of curvature of the incident surface of the first lens is -70.3 mm, and the radius of curvature of the exit surface is 123.2 mm; the radius of curvature of the incident surface of the second lens is 123.2 mm, and the radius of curvature of the exit surface is -54.3 mm; the radius of curvature of the incident surface of the third lens is 57.7 mm, and the radius of curvature of the exit surface is -55.7 mm; the radius of curvature of the incident surface of the fourth lens is -55.7 mm, and the radius of curvature of the exit surface is 238.3 mm; the radius of curvature of the incident surface of the fifth lens is -62.1 mm, and the radius of curvature of the exit surface is 24.1 mm; the radius of curvature of the incident surface of the sixth lens is 24.1 mm, and the radius of curvature of the exit surface is -866.5 mm.

5. The ultra-wide-range white light confocal dispersion lens according to claim 1, characterized in that: The first lens and the fifth lens are made of the same kind of glass material, and the second lens and the third lens are made of the same kind of glass material.

6. The ultra-wide-range white light confocal dispersion lens according to claim 1, characterized in that: The distance between the object surface and the exit surface of the sixth lens is 152.122 mm; Among the six lenses constituting the dispersion lens, the maximum clear aperture is 17 mm.

7. A white light confocal measurement system, characterized in that: It includes a white laser module, a spectrometer, a one-to-two optical fiber, and the ultra-large-range white-light confocal dispersion lens according to any one of claims 1-6. The white laser module, the white-light confocal dispersion lens, and the spectrometer are connected by a one-to-two optical fiber.

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