Processing method for registration and lamination of pattern plates on two sides

Abstract

The invention discloses a processing method for registration and lamination of pattern plates on two sides, and relates to the technical field of optical component processing, and the processing method comprises the following processing steps: S1, designing a mother set drawing which is provided with a pattern area and a non-pattern area, and setting a positioning mark in the non-pattern area; s2, the mother set drawing is transferred to a graphic plate, a graph is formed on the graphic plate, and a positioning structure is arranged on the graphic plate; s3, gluing the two pattern plates needing to be laminated, and checking the offset between the positioning marks on the two pattern plates after the two pattern plates are laminated; s4, when the offset is within a set range, locking the two pattern plates by using a positioning structure, and irradiating the pattern plates by using a UV lamp for curing and gluing; and S5, checking the offset between the positioning marks on the two pattern plates again. According to the processing method for registration and attachment of the two-sided pattern plates, the registration precision of the two-sided pattern plates is higher, and the consistency of the manufactured two-sided pattern plates is good.

Description

Technical Field

[0001] The invention relates to the technical field of optical component processing, and in particular to a processing method for registering and laminating double-sided graphic plates. Background Art

[0002] A double-sided pattern plate is a type of photomask and is an optical element. A double-sided pattern plate is made by laminating two pattern plates. In some cases, such as in three-dimensional integrated circuits, two pattern plates need to be superimposed and then exposed. Compared with a single pattern plate, a double-sided pattern plate has higher requirements for the accuracy of the pattern after lamination. If the pattern deviation of the two-sided pattern plates after lamination is large, it cannot be used in semiconductor manufacturing.

[0003] Currently, the registration of two-sided graphic plates is mostly achieved manually under a microscope. The error of graphic plate alignment is large, the operation is difficult, and the consistency of the produced two-sided graphic plates is poor. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a processing method for registering and laminating two-sided graphic plates, which has higher registration accuracy and better consistency of the two-sided graphic plates.

[0005] The processing method for registering and laminating two-sided graphic plates according to an embodiment of the present invention comprises the following processing steps: Step S1, designing a master drawing, wherein the master drawing has a graphic area and a non-graphic area, and positioning marks are set in the non-graphic area; Step S2, transferring the master drawing to a graphic plate, forming a graphic on the graphic plate, and providing a positioning structure on the graphic plate; Step S3, gluing the two graphic plates to be bonded, and after the two graphic plates are bonded, checking the offset between the positioning marks on the two graphic plates; Step S4, when the offset is within the set range, the two graphic plates are locked by using a positioning structure, and the graphic plates are irradiated with a UV lamp for curing and gluing; Step S5, checking the offset between the positioning marks on the two graphic plates again.

[0006] The processing method for registering and bonding two-sided graphic plates according to the embodiment of the present invention has at least the following beneficial effects: the positioning mark and the graphic are designed together in the master drawing, which can minimize the processing error between the positioning mark and the graphic; after the two graphic plates are glued, the offset is checked first, and only when the offset is within the set value range, the positioning structure is used to lock the two graphic plates; the positioning structure locks the two graphic plates to minimize the new offset of the graphic plates during the curing and gluing process; after the graphic plates are cured and glued, the offset is checked again. Through the above-mentioned processing method, the registration accuracy of the two-sided graphic plates is higher, and the consistency of the manufactured two-sided graphic plates is good.

[0007] According to some embodiments of the present invention, in step S1, the master drawing is provided with a plurality of identical graphics, and the processing method for registering and laminating two-sided graphic plates further includes step S6, cutting the graphic plate to form a plurality of optical elements, each of which has a single graphic.

[0008] According to some embodiments of the present invention, in the step S3, it also includes a step S3.1, checking the offset between the positioning marks on the two graphic plates. When the offset exceeds the set range, any one of the graphic plates is moved and adjusted, and the offset between the positioning marks on the two graphic plates is checked again, and step S3.1 is repeated until the offset is within the set range.

[0009] According to some embodiments of the present invention, the setting range of the offset is 0-2 μm.

[0010] According to some embodiments of the present invention, in step S2, the positioning structure is a positioning hole, and in step S4, a positioning pin is inserted into the positioning hole to lock the two graphic plates.

[0011] According to some embodiments of the present invention, in step S2, the master drawing is transferred to the graphic plate by laser direct writing.

[0012] According to some embodiments of the present invention, it is characterized in that, in the step S2, the position deviation between the pattern on the pattern plate and the positioning structure is less than or equal to 0.5 μm.

[0013] According to some embodiments of the present invention, in step S4, the power of the UV lamp is less than or equal to 5 watts, and the time for the UV lamp to irradiate the graphic plate is 1.5 hours to 2.5 hours.

[0014] According to some embodiments of the present invention, the step S4 further includes a step S4.1, wherein after the graphic plate is irradiated by the UV lamp, the graphic plate is placed in a constant temperature environment for constant temperature curing.

[0015] According to some embodiments of the present invention, in step S4.1, the temperature of the constant temperature environment is 50° C. to 60° C., and the constant temperature curing time is 11.5 hours to 12.5 hours.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 It is a schematic diagram of a first process of a processing method for registering and laminating two-sided graphic plates according to an embodiment of the present invention; Figure 2 It is a second flow chart of the processing method for registering and laminating two-sided graphic plates according to an embodiment of the present invention. DETAILED DESCRIPTION

[0018] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0019] In the description of the present invention, it should be understood that descriptions involving orientation, such as orientation or positional relationship indicated as up, down, etc., are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0020] In the description of the present invention, "a plurality" means more than two. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0021] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0022] Generally speaking, a two-sided graphic plate is formed by overlapping and laminating two graphic plates. The graphics on each graphic plate are different. After overlapping and laminating, a new graphic is formed. Therefore, it is necessary to minimize the offset between the graphics when the two graphic plates are superimposed to ensure that the new graphic formed by the two-sided graphic plates meets the design requirements.

[0023] As described in the background art, the manual registration of the two-sided graphic plates under a microscope has a large error, and can only produce a single two-sided graphic plate, that is, a single optical element, at a time. In some examples, the offset between the graphics of the two graphic plates is more than 0.05mm when the two-sided graphic plates are manually registered, and residual glue is easily left at the edges of the produced two-sided graphic plates, requiring manual repair, which greatly affects the processing efficiency of the two-sided graphic plates.

[0024] Reference Figure 1 The process shown in the figure is a processing method for registering and laminating two-sided graphic plates according to an embodiment of the present invention, and includes the following processing steps: Step S1, designing a master drawing, wherein the master drawing has a graphic area and a non-graphic area, and positioning marks are set in the non-graphic area; Step S2, transferring the master drawing to a graphic plate, forming a graphic on the graphic plate, and providing a positioning structure on the graphic plate; Step S3, gluing the two graphic plates to be bonded, and after the two graphic plates are bonded, checking the offset between the positioning marks on the two graphic plates; Step S4, when the offset is within the set range, the positioning structure is used to lock the two graphic plates, and a UV lamp is used to irradiate the graphic plates for curing and gluing; Step S5, checking the offset between the positioning marks on the two graphic plates again.

[0025] The positioning marks and graphics are designed together in the master drawing, which can minimize the processing error between the positioning marks and the graphics. For example, after the master drawing is imported into the computer, the graphics and positioning marks are transferred to the graphic plate in one operation by laser direct writing. It should be understood that the positioning structure on the graphic plate can be made before the master drawing is transferred, or it can be made after the master drawing is transferred.

[0026] The transferred graphic plates are glued. After the two graphic plates are glued and bonded, the offset between the graphics of the two graphic plates is checked first. It should be understood that after the graphic plates are glued, they can still move before curing and gluing. Only when the offset between the graphics of the two graphic plates is within the set value range, the positioning structure is used to lock the two graphic plates. It is precisely because the graphic plates that have not been cured and glued can still move, so it is necessary to rely on the positioning structure to lock the two graphic plates to minimize the new offset of the graphic plates during the curing and gluing process.

[0027] Because the glue will shrink when the graphic plate is being cured and glued, it may cause the graphic plate to move and generate new offsets, so the offset needs to be checked again after the two graphic plates are cured and glued. Through the above processing method, the registration accuracy of the two-sided graphic plate is higher, and the consistency of the two-sided graphic plates is good. Use UV lamp to irradiate the graphic plate for curing and gluing, where UV lamp is ultraviolet lamp.

[0028] The manual method is to manually register the two-sided graphic plates under a microscope, and generally only a single two-sided graphic plate can be produced at a time.

[0029] Reference Figure 2 As shown in the process, it can be understood that in step S1, the master drawing is provided with a plurality of identical graphics, and the processing method for registering and laminating the two-sided graphic plates also includes step S6, cutting the graphic plate to form a plurality of optical elements, each optical element having a single graphic.

[0030] The double-sided graphic plate is manufactured by the above-mentioned double-sided graphic plate registration and lamination processing method. The registration accuracy of the two-sided graphic plate is higher, so two larger graphic plates can be used for registration and lamination, and finally cut to obtain multiple optical elements, that is, a two-sided graphic plate with a single pattern, which can greatly improve the production efficiency of the two-sided graphic plate.

[0031] It should be understood that in order to improve the accuracy of cutting the graphic plate, cutting lines may be designed between multiple identical graphics in the master drawing.

[0032] It can be understood that step S3 also includes step S3.1, which checks the offset between the positioning marks on the two graphic plates. When the offset exceeds the set range, any graphic plate is moved and adjusted, and the offset between the positioning marks on the two graphic plates is checked again, and step S3.1 is repeated until the offset is within the set range.

[0033] Before curing and gluing, both graphic plates can be moved and adjusted. When the offset between the graphics of the two graphic plates exceeds the set range, the offset can be changed by moving the graphic plates. The offset can be corrected to within the set range while adjusting and checking. It is understood that the setting range of the offset is preferably 0 to 2 μm.

[0034] It should be understood that the offset is the deviation distance between the graphics of two graphic plates. Taking the positioning mark of one graphic plate as the reference, the distance between the positioning mark of the other graphic plate and the aforementioned positioning mark is the offset. Therefore, the offset is always a positive value. When the offset is 0, the two graphic plates are in ideal alignment.

[0035] In some embodiments, it is understandable that in step S2, the positioning structure is a positioning hole, and in step S4, a positioning pin is inserted into the positioning hole to lock the two graphic plates.

[0036] The positioning hole processing is simpler. Preferably, at least two positioning holes are opened on each graphic plate. When two graphic plates are superimposed and fitted, and the offset is checked to be within the set range, the positioning pin is inserted into the positioning hole, which can limit the movement of the graphic plate in two mutually perpendicular directions in the plane, thereby minimizing the new offset of the graphic plate.

[0037] It can be understood that in step S2, the master drawing is transferred to the graphic plate by laser direct writing.

[0038] Laser direct writing is the use of a variable intensity laser beam to perform variable dose exposure on the resist material on the surface of the graphic plate, and after development, the required relief contour is formed on the surface of the resist layer. It should be understood that laser direct writing is a relatively mature technology and will not be described in detail here. By transferring the master drawing to the graphic plate by laser direct writing, the position accuracy between the graphic on the graphic plate and the positioning structure can be ensured, that is, the position deviation can be controlled within a very small range.

[0039] For example, it can be understood that in step S2, the position deviation between the pattern on the pattern plate and the positioning structure is less than or equal to 0.5 μm.

[0040] It can be understood that in step S4, the power of the UV lamp is less than or equal to 5 watts, and the time for the UV lamp to irradiate the graphic plate is 1.5 hours to 2.5 hours.

[0041] Control the power and duration of UV lamp exposure to the graphic plate to slow down the shrinkage of the glue during curing as much as possible, and avoid increasing the offset of the graphic plate due to excessive shrinkage of the glue during curing and gluing.

[0042] It is understandable that step S4 also includes step S4.1, in which the graphic plate is placed in a constant temperature environment for constant temperature curing after being irradiated by the UV lamp.

[0043] Furthermore, after the UV lamp is irradiated, placing the two graphic plates in a constant temperature environment for a longer time can allow for better curing between them. It is understood that in step S4.1, the temperature of the constant temperature environment is 50°C to 60°C, and the constant temperature curing time is 11.5 hours to 12.5 hours.

[0044] In some embodiments, a master drawing is designed, and the master drawing has a graphic area and a non-graphic area, and a positioning mark is set in the non-graphic area, and the positioning mark is a target, and the master drawing is provided with multiple identical graphics. The master drawing is transferred to the graphic plate by laser direct writing to form a graphic on the graphic plate, and a positioning structure is provided on the graphic plate, and the positioning structure is a positioning hole. Glue the two graphic plates that need to be bonded, and after the two graphic plates are bonded, check the offset between the targets on the two graphic plates. Check the offset between the targets on the two graphic plates. When the offset exceeds 2μm, move and adjust any one of the graphic plates, and check the offset between the targets on the two graphic plates again, and repeat until the offset is within 2μm.

[0045] When the offset is within 2μm, use the positioning pin to insert the positioning hole to lock the two graphic plates, and use the UV lamp to irradiate the graphic plates for curing and gluing. The power of the UV lamp is 5 watts, and the UV lamp irradiates the graphic plates for 2 hours. After the graphic plates are irradiated by the UV lamp, they are placed in a constant temperature environment for constant temperature curing. The temperature of the constant temperature environment is 50℃~60℃, and the constant temperature curing time is 12 hours. Check the offset between the targets on the two graphic plates again to ensure that the offset is within 2μm. Finally, the graphic plates are cut to form multiple optical elements, each of which has a single pattern.

[0046] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A processing method for registering and laminating two-sided graphic plates, characterized in that: The processing steps include: Step S1, designing a master drawing, wherein the master drawing has a graphic area and a non-graphic area, and positioning marks are set in the non-graphic area; Step S2, transferring the master drawing to a graphic plate, forming a graphic on the graphic plate, and providing a positioning structure on the graphic plate; Step S3, gluing the two graphic plates to be bonded, and after the two graphic plates are bonded, checking the offset between the positioning marks on the two graphic plates; Step S4, when the offset is within the set range, the two graphic plates are locked by using a positioning structure, and the graphic plates are irradiated with a UV lamp for curing and gluing; Step S5, checking the offset between the positioning marks on the two graphic plates again.

2. The processing method for registering and laminating two-sided graphic plates according to claim 1, characterized in that: In the step S1, the master drawing is provided with a plurality of identical graphics, and the processing method for registering and laminating two-sided graphic plates further comprises a step S6, cutting the graphic plate to form a plurality of optical elements, each of which has a single graphic.

3. The processing method for registering and laminating two-sided graphic plates according to claim 1, characterized in that: In the step S3, it also includes step S3.1, checking the offset between the positioning marks on the two graphic plates. When the offset exceeds the set range, move and adjust any one of the graphic plates, and check the offset between the positioning marks on the two graphic plates again, and repeat step S3.1 until the offset is within the set range.

4. The method for processing double-sided graphic plates for registration and lamination according to claim 3, characterized in that: The setting range of the offset is 0 to 2 μm.

5. The method for processing double-sided graphic plates for registration and lamination according to claim 1, characterized in that: In the step S2, the positioning structure is a positioning hole, and in the step S4, a positioning pin is inserted into the positioning hole to lock the two graphic plates.

6. The method for processing double-sided graphic plates by registration and lamination according to claim 1, characterized in that: In the step S2, the master drawing is transferred to the graphic plate by laser direct writing.

7. The processing method for registering and laminating two-sided graphic plates according to claim 6, characterized in that: In the step S2, the position deviation between the pattern on the pattern plate and the positioning structure is less than or equal to 0.5 μm.

8. The method for processing double-sided graphic plates for registration and lamination according to claim 1, characterized in that: In step S4, the power of the UV lamp is less than or equal to 5 watts, and the UV lamp irradiates the graphic plate for 1.5 hours to 2.5 hours.

9. The method for processing double-sided graphic plates for registration and lamination according to claim 1, characterized in that: In the step S4, there is also a step S4.1, after the graphic plate is irradiated by the UV lamp, the graphic plate is placed in a constant temperature environment for constant temperature curing.

10. The processing method for registering and laminating two-sided graphic plates according to claim 9, characterized in that: In the step S4.1, the temperature of the constant temperature environment is 50°C to 60°C, and the constant temperature curing time is 11.5 hours to 12.5 hours.

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