Plasma driving circuit and driving method thereof

Abstract

The application discloses a kind of plasma driving circuit and its driving method, the plasma driving circuit includes double balanced mixer, power setting circuit, error amplifier, voltage-controlled oscillator, single-ended to differential circuit, driving circuit and transformer circuit;The double balanced mixer is connected driving circuit and the transformer circuit respectively, the input of error amplifier is connected double balanced mixer and power setting circuit respectively, the output of error amplifier is connected the input of voltage-controlled oscillator;The output of voltage-controlled oscillator is connected the input of single-ended to differential circuit, the output of single-ended to differential circuit is connected the input of driving circuit respectively;The output of driving circuit is connected the transformer circuit respectively.The plasma driving circuit and its driving method proposed in the application can adjust the frequency by pure hardware, quickly adapt to the sudden change of sample solution, and can ensure the stability of power.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of plasma driving, and relates to a driving circuit, in particular to a plasma driving circuit and a driving method thereof. BACKGROUND

[0002] Generally, an E-class power amplifier is used to drive a plasma coil to generate a radio frequency voltage, but to control the stability of the power, the voltage, the current and the reflected current need to be collected, and then the total power and the reflected power are obtained by the product of the voltage and the current. When the radio frequency power is stable, the reflected power needs to be minimized. The value of the reflected power is collected by a single-chip microcomputer, and the terminal mechanical capacitor is adjusted by a motor to achieve the set impedance matching, so that the reflected power is minimized. However, the existing mode is slow in response and cannot be applied to the case of sudden mutation of the sample solution concentration.

[0003] Therefore, there is an urgent need to design a new plasma driving circuit to overcome at least part of the above-mentioned defects of the existing plasma driving circuit. SUMMARY

[0004] The present application provides a plasma driving circuit and a driving method thereof, which can quickly adapt to the sudden mutation of the sample solution and ensure the stability of the power.

[0005] To solve the above technical problems, according to one aspect of the present application, the following technical solution is adopted:

[0006] A plasma driving circuit, comprising: a double balanced mixer, a power setting circuit, an error amplifier, a voltage controlled oscillator, a single-ended to differential circuit, a driving circuit and a transformer circuit.

[0007] The double balanced mixer is connected to the driving circuit and the transformer circuit respectively, the input end of the error amplifier is connected to the double balanced mixer and the power setting circuit respectively, and the output end of the error amplifier is connected to the input end of the voltage controlled oscillator.

[0008] The output end of the voltage controlled oscillator is connected to the input end of the single-ended to differential circuit, and the output end of the single-ended to differential circuit is connected to the input end of the driving circuit respectively; the output end of the driving circuit is connected to the transformer circuit respectively.

[0009] The double balanced mixer is used to mix the signals output by the transformer circuit and the driving circuit and screen out the fundamental frequency; and the power setting circuit is used to generate a comparison power.

[0010] The error amplifier is used to dynamically compare the screened fundamental frequency with the comparison power generated by the power setting circuit to generate an error signal.

[0011] The voltage-controlled oscillator is used to drive the voltage-controlled oscillator to generate a tunable frequency by using the generated error signal; the single-ended to differential circuit is used to convert the single-ended signal into a differential signal, and enhance the driving force;

[0012] The driving circuit is used to further enhance the driving force to drive the transformer circuit; the transformer circuit is used to realize the functions of impedance transformation and impedance matching to adapt to the plasma coil.

[0013] As an embodiment of the present application, the double balanced mixer comprises a second transformer T2, a third transformer T3, a first mixer D1, a second inductor L2, a third inductor L3, a fourth inductor L4, a fifth inductor L5, a sixth inductor L6, a seventh inductor L7, a first zero capacitor C10, a first one capacitor C11, a first two capacitor C12, a first three capacitor C13, a first four capacitor C14, a first five capacitor C15, a first five resistor R15, a second one resistor R21 and a second two resistor R22.

[0014] A first end of the first zero capacitor C10 is connected to a voltage feedback end of the driving circuit output, and a second end of the first zero capacitor C10 is connected to a first end of the first one capacitor C11. A second end of the first one capacitor C11 is respectively connected to a first end of the second inductor L2 and a first end of the first five resistor R15. A second end of the second inductor L2 is respectively connected to a first end of the third inductor L3 and a first end of the first three capacitor C13. A second end of the third inductor L3 is respectively connected to a first end of the fourth inductor L4 and a first end of the first two capacitor C12. The first five resistor R15, the first three capacitor C13 and the first two capacitor C12 are grounded.

[0015] A second end of the fourth inductor L4 is connected to a sixth end of the second transformer T2. A fourth end of the second transformer T2 is grounded, and a second end of the second transformer T2 is grounded. A first end of the second transformer T2 is connected to a first end of the first mixer D1, and a third end of the second transformer T2 is connected to a second end of the first mixer D1.

[0016] A third end of the first mixer D1 is connected to a third end of the third transformer T3, and a fourth end of the first mixer D1 is connected to a first end of the third transformer T3. A sixth end of the third transformer T3 is grounded. A second end of the third transformer T3 is connected to a first end of the second one resistor R21, and a second end of the second one resistor R21 is grounded.

[0017] The fourth end of the third transformer T3 is connected to the second end of the seventh inductor L7, the first end of the seventh inductor L7 is connected to the second end of the sixth inductor L6 and the first end of the fourteenth capacitor C14 respectively; the first end of the sixth inductor L6 is connected to the second end of the fifth inductor L5 and the first end of the fifteenth capacitor C15 respectively; the first end of the fifth inductor L5 is connected to the first end of the second resistor R22; the second end of the second resistor R22, the second end of the fifteenth capacitor C15 and the second end of the fourteenth capacitor C14 are grounded respectively.

[0018] As an embodiment of the application, the error amplifier comprises a sixth A chip U6A, a sixth B chip U6B, a sixteenth resistor R16, a seventeenth resistor R17, a nineteenth resistor R19, a twenty-third resistor R23;

[0019] The non-inverting input end of the sixth B chip U6B is connected to the output end of the double balanced mixer, and the inverting input end of the sixth B chip U6B is connected to the output end of the sixth B chip U6B and the first end of the nineteenth resistor R19;

[0020] The output end of the nineteenth resistor R19 is connected to the inverting input end of the sixth A chip U6A and the first end of the twenty-third resistor R23 respectively;

[0021] The non-inverting input end of the sixth A chip U6A is connected to the second end of the sixteenth resistor R16 and the first end of the seventeenth resistor R17 respectively; the first end of the sixteenth resistor R16 is connected to a first power supply voltage, and the second end of the seventeenth resistor R17 is grounded; and the output end of the sixth A chip U6A is connected to the second end of the twenty-third resistor R23.

[0022] As an embodiment of the application, the voltage-controlled oscillator comprises a fifth chip U5, an eighteenth resistor R18 and a twentieth resistor R20; the third pin of the fifth chip U5 is connected to the second end of the twentieth resistor R20 and the second end of the eighteenth resistor R18 respectively; the fifth pin of the fifth chip U5 outputs a frequency adjustment signal; the second pin of the fifth chip U5 is grounded, and the fourth pin of the fifth chip U5 is grounded;

[0023] The first end of the eighteenth resistor R18 is connected to a second power supply voltage, and the first end of the twentieth resistor R20 is connected to the output end of the error amplifier.

[0024] As an embodiment of the application, the single-ended to differential circuit comprises a second chip U2 and a seventh resistor R7; the twenty-fifth pin of the second chip U2 is connected to the second end of the seventh resistor R7, and the first end of the seventh resistor R7 is connected to a second power supply voltage;

[0025] The first pin and the fourth pin of the second chip U2 are connected to a frequency adjustment signal of the voltage-controlled oscillator output.

[0026] As an embodiment of the present application, the driving circuit comprises a first chip U1, a third chip U3, a fourth chip U4, a first A diode Q1A, a first B diode Q1B, a second A diode Q2A, a second B diode Q2B, a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, an eighth resistor R8, a ninth resistor R9, a first zero resistor R10, a first one resistor R11, a first two resistor R12, a first three resistor R13;

[0027] The third chip U3 is connected to the first chip U1 and the fourth chip U4 respectively, a sixth pin of the third chip U3 is connected to a second end of the eighth resistor R8, and a first end of the eighth resistor R8 is connected to a second power supply voltage.

[0028] Part pins of the first chip U1 are connected to a first end of the second resistor R2, a first end of the third resistor R3, a first end of the fourth resistor R4, a first end of the first resistor R1, and a first end of the fifth resistor R5 respectively, and a second end of the second resistor R2, a second end of the third resistor R3, and a second end of the fourth resistor R4 are grounded respectively.

[0029] A second end of the first resistor R1 is connected to a positive electrode of the first B diode Q1B, and a second end of the fifth resistor R5 is connected to a positive electrode of the first A diode Q1A; a negative electrode of the first B diode Q1B and a negative electrode of the first A diode Q1A output a voltage feedback to the transformer circuit.

[0030] Part pins of the fourth chip U4 are connected to a first end of the first zero resistor R10, a first end of the first one resistor R11, a first end of the first two resistor R12, a first end of the ninth resistor R9, and a first end of the first three resistor R13 respectively, and a second end of the first zero resistor R10, a second end of the first one resistor R11, and a second end of the first two resistor R12 are grounded respectively.

[0031] A second end of the ninth resistor R9 is connected to a positive electrode of the second B diode Q2B, and a second end of the first three resistor R13 is connected to a positive electrode of the second A diode Q2A; a negative electrode of the second B diode Q2B and a negative electrode of the second A diode Q2A output a voltage feedback to the transformer circuit.

[0032] As an embodiment of the present application, the transformer circuit comprises a first transformer T1, a first A capacitor C1A, a second capacitor C2, a third capacitor C3, a fourth A capacitor C4A, a fifth A capacitor C5A, and a first interface circuit P1.

[0033] The first end of the first transformer T1 is connected with a voltage feedback signal output by a driving circuit, and the third end of the first transformer T1 is connected with a voltage feedback signal output by the driving circuit.

[0034] The sixth end of the first transformer T1 is connected with the first end of the second capacitor C2, the first end of the third capacitor C3, the first end of the fourth capacitor C4A and the first end of the first capacitor C1A respectively.

[0035] The fourth end of the first transformer T1 is connected with the second end of the second capacitor C2, the second end of the third capacitor C3, the second end of the fourth capacitor C4A and the first end of the fifth capacitor C5A respectively, and the second end of the fifth capacitor C5A is connected with the second end of the first interface circuit P1.

[0036] The second end of the first transformer T1 is connected with a third voltage, and the fifth end of the first transformer T1 is grounded.

[0037] As an embodiment of the present application, the double balanced mixer is used to mix the signals output by the transformer circuit and the driving circuit and to filter out the base frequency.

[0038] According to another aspect of the present application, the following technical solution is adopted: a driving method of the above-mentioned plasma driving circuit, wherein the driving method comprises:

[0039] The double balanced mixer mixes the signals output by the transformer circuit and the driving circuit and filters out the base frequency, and the power setting circuit generates a comparison power.

[0040] The error amplifier dynamically compares the filtered base frequency with the comparison power generated by the power setting circuit to generate an error signal, and the voltage-controlled oscillator drives the voltage-controlled oscillator to generate a tunable frequency by using the generated error signal.

[0041] The single-ended-to-differential circuit converts the single-ended signal into a differential signal to enhance the driving force, the driving circuit further enhances the driving force to drive the transformer circuit, and the transformer circuit realizes the functions of impedance conversion and impedance matching to adapt to the plasma coil.

[0042] The plasma driving circuit and the driving method thereof have the advantages that the frequency can be adjusted by using pure hardware, the sudden change of the sample solution can be adapted simply and quickly, and the stability of the power can be ensured. BRIEF DESCRIPTION OF DRAWINGS

[0043] Figure 1 FIG. 1 is a schematic diagram of the composition of the plasma driving circuit according to an embodiment of the present application.

[0044] Figure 2 The circuit schematic diagram of the plasma driving circuit in an embodiment of the present application. DETAILED DESCRIPTION

[0045] The preferred embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0046] In order to further understand the present application, the preferred embodiments of the present application are described below in conjunction with the embodiments, but it should be understood that the description is only for further illustrating the features and advantages of the present application, and is not a limitation on the claims of the present application.

[0047] The description in this part is only for several typical embodiments, and the present application is not limited to the scope described in the embodiments. The same or similar prior art means and some technical features in the embodiments can be replaced with each other, which is within the description and protection scope of the present application.

[0048] The description of the steps in each embodiment in the specification is only for convenience of description, and the implementation manner of the present application is not limited by the order of the steps.

[0049] The "connection" in the specification includes both direct connection and indirect connection, such as connection through some active devices, passive devices or electrically conductive media; and can also include the connection through other active devices or passive devices known to those skilled in the art on the basis of achieving the same or similar functional purposes, such as the connection through switches, follower circuits or other circuits or components.

[0050] The present application discloses a plasma driving circuit, Figure 1 The composition schematic diagram of the plasma driving circuit in an embodiment of the present application; please refer to Figure 1 The plasma driving circuit includes a double balanced mixer 1, a power setting circuit 2, an error amplifier 3, a voltage controlled oscillator 4, a single-ended to differential circuit 5, a driving circuit 6 and a transformer circuit 7. In an embodiment, the plasma driving circuit can be an inductively coupled plasma driving circuit, and of course can also be other plasma driving circuits.

[0051] The double balanced mixer 1 is connected with the driving circuit 6 and the transformer circuit 7 respectively, the input end of the error amplifier 3 is connected with the double balanced mixer 1 and the power setting circuit 2 respectively, and the output end of the error amplifier 3 is connected with the input end of the voltage controlled oscillator 4. The output end of the voltage controlled oscillator 4 is connected with the input end of the single-ended to differential circuit 5, and the output end of the single-ended to differential circuit 5 is connected with the input end of the driving circuit 6 respectively; and the output end of the driving circuit 6 is connected with the transformer circuit 7 respectively.

[0052] The double balanced mixer 2 is used to mix the signal outputted by the antenna pickup transformer circuit 7 and the signal of the driving circuit 6 and filter out the base frequency; the power setting circuit 2 is used to generate the comparison power. The error amplifier 3 is used to dynamically compare the filtered base frequency with the comparison power generated by the power setting circuit 2 to generate an error signal. The voltage controlled oscillator 4 is used to drive the voltage controlled oscillator 4 to generate a tunable frequency by using the generated error signal; the single-ended to differential circuit 5 is used to convert the single-ended signal into a differential signal to enhance the driving force. The driving circuit 6 is used to further enhance the driving force to drive the transformer circuit 7; the transformer circuit 7 is used to realize the functions of impedance transformation and impedance matching to adapt the plasma coil.

[0053] Figure 2 The circuit schematic diagram of the plasma driving circuit in an embodiment of the present application; please refer to Figure 2 In an embodiment of the present application, the double balanced mixer comprises a second transformer T2, a third transformer T3, a first mixer D1, a second inductor L2, a third inductor L3, a fourth inductor L4, a fifth inductor L5, a sixth inductor L6, a seventh inductor L7, a first zero capacitor C10, a first one capacitor C11, a first two capacitor C12, a first three capacitor C13, a first four capacitor C14, a first five capacitor C15, a first five resistor R15, a second one resistor R21 and a second two resistor R22.

[0054] The first end of the first zero capacitor C10 is connected to the voltage feedback end of the driving circuit output, the second end of the first zero capacitor C10 is connected to the first end of the first one capacitor C11, the second end of the first one capacitor C11 is respectively connected to the first end of the second inductor L2 and the first end of the first five resistor R15; the second end of the second inductor L2 is respectively connected to the first end of the third inductor L3 and the first end of the first three capacitor C13; the second end of the third inductor L3 is respectively connected to the first end of the fourth inductor L4 and the first end of the first two capacitor C12; the first five resistor R15, the first three capacitor C13 and the first two capacitor C12 are grounded.

[0055] The second end of the fourth inductor L4 is connected to the sixth end of the second transformer T2, the fourth end of the second transformer T2 is grounded, and the second end of the second transformer T2 is grounded; the first end of the second transformer T2 is connected to the first end of the first mixer D1, and the third end of the second transformer T2 is connected to the second end of the first mixer D1.

[0056] The third end of the first mixer D1 is connected to the third end of the third transformer T3, and the fourth end of the first mixer D1 is connected to the first end of the third transformer T3; the sixth end of the third transformer T3 is grounded; the second end of the third transformer T3 is connected to the first end of the second one resistor R21, and the second end of the second one resistor R21 is grounded.

[0057] The fourth end of the third transformer T3 is connected to the second end of the seventh inductor L7, the first end of the seventh inductor L7 is connected to the second end of the sixth inductor L6 and the first end of the fourteenth capacitor C14 respectively; the first end of the sixth inductor L6 is connected to the second end of the fifth inductor L5 and the first end of the fifteenth capacitor C15 respectively; the first end of the fifth inductor L5 is connected to the first end of the second resistor R22; the second end of the second resistor R22, the second end of the fifteenth capacitor C15 and the second end of the fourteenth capacitor C14 are grounded respectively.

[0058] Please refer to Figure 2 , the error amplifier includes the sixth A chip U6A, the sixth B chip U6B, the first six resistor R16, the first seven resistor R17, the first nine resistor R19, the second three resistor R23. The positive input end of the sixth B chip U6B is connected to the output end of the double balanced mixer, the negative input end of the sixth B chip U6B is connected to the output end of the sixth B chip U6B and the first end of the first nine resistor R19. The output end of the first nine resistor R19 is connected to the negative input end of the sixth A chip U6A and the first end of the second three resistor R23 respectively. The positive input end of the sixth A chip U6A is connected to the second end of the first six resistor R16 and the first end of the first seven resistor R17 respectively; the first end of the first six resistor R16 is connected to the first power supply voltage, and the second end of the first seven resistor R17 is grounded; the output end of the sixth A chip U6A is connected to the second end of the second three resistor R23.

[0059] The circuit of the voltage controlled oscillator is as shown in Figure 2 The voltage controlled oscillator includes the fifth chip U5, the first eight resistor R18 and the second zero resistor R20; the third pin of the fifth chip U5 is connected to the second end of the second zero resistor R20 and the second end of the first eight resistor R18 respectively; the fifth pin of the fifth chip U5 outputs a frequency adjustment signal; the second pin of the fifth chip U5 is grounded, and the fourth pin of the fifth chip U5 is grounded. The first end of the first eight resistor R18 is connected to the second power supply voltage, and the first end of the second zero resistor R20 is connected to the output end of the error amplifier.

[0060] As shown in Figure 2 , the single-ended to differential circuit includes the second chip U2 and the seventh resistor R7; the fifth pin of the second chip U2 is connected to the second end of the seventh resistor R7, and the first end of the seventh resistor R7 is connected to the second power supply voltage. The first one pin and the first four pin of the second chip U2 are connected to the frequency adjustment signal output by the voltage controlled oscillator.

[0061] Please continue to refer to Figure 2The driving circuit includes a first chip U1, a third chip U3, a fourth chip U4, a first A diode Q1A, a first B diode Q1B, a second A diode Q2A, a second B diode Q2B, a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, an eighth resistor R8, a ninth resistor R9, a first zero resistor R10, a first first resistor R11, a first second resistor R12, and a first third resistor R13.

[0062] The third chip U3 is connected to the first chip U1 and the fourth chip U4. Pin 6 of the third chip U3 is connected to the second terminal of the eighth resistor R8, and the first terminal of the eighth resistor R8 is connected to the second power supply voltage. Some pins of the first chip U1 are connected to the first terminals of the second resistor R2, the third resistor R3, the fourth resistor R4, the first resistor R1, and the fifth resistor R5, respectively. The second terminals of the second resistor R2, the third resistor R3, and the third resistor R4 are grounded. The second terminal of the first resistor R1 is connected to the anode of the first B diode Q1B, and the second terminal of the fifth resistor R5 is connected to the anode of the first A diode Q1A. The output voltages of the cathodes of the first B diode Q1B and the first A diode Q1A are fed back to the transformer circuit.

[0063] The pins of the fourth chip U4 are connected to the first terminals of the first zero-resistance R10, the first terminals of the first first resistor R11, the first terminals of the first second resistor R12, the first terminal of the ninth resistor R9, and the first terminal of the first third resistor R13, respectively. The second terminals of the first zero-resistance R10, the first first resistor R11, and the first second resistor R12 are grounded. The second terminal of the ninth resistor R9 is connected to the anode of the second B diode Q2B, and the second terminal of the first third resistor R13 is connected to the anode of the second A diode Q2A. The output voltages of the cathodes of the second B diode Q2B and the second A diode Q2A are fed back to the transformer circuit.

[0064] like Figure 2As shown, the transformer circuit includes a first transformer T1, a first A capacitor C1A, a second capacitor C2, a third capacitor C3, a fourth A capacitor C4A, a fifth A capacitor C5A, and a first interface circuit P1. The first end of the first transformer T1 is connected to the voltage feedback signal output by the driving circuit, and the third end of the first transformer T1 is connected to the voltage feedback signal output by the driving circuit. The sixth end of the first transformer T1 is connected to the first end of the second capacitor C2, the first end of the third capacitor C3, the first end of the fourth A capacitor C4A, and the first end of the first A capacitor C1A, respectively. The second end of the first A capacitor C1A is connected to the first end of the first interface circuit P1. The fourth end of the first transformer T1 is connected to the second end of the second capacitor C2, the second end of the third capacitor C3, the second end of the fourth A capacitor C4A, and the first end of the fifth A capacitor C5A, respectively. The second end of the fifth A capacitor C5A is connected to the second end of the first interface circuit P1. The second end of the first transformer T1 is connected to the third voltage, and the fifth end of the first transformer T1 is grounded. The first interface circuit P1 is connected to the output coil.

[0065] The application further discloses a driving method of the above-mentioned plasma driving circuit, which comprises the following steps:

[0066] The double-balanced mixer mixes and filters the signal output by the transformer circuit and the signal of the driving circuit (e.g., collected by an antenna) to obtain a base frequency.

[0067] The error amplifier dynamically compares the base frequency with the comparison power generated by the power setting circuit to generate an error signal.

[0068] The single-ended-to-differential circuit converts the single-ended signal into a differential signal to enhance the driving force.

[0069] The driving circuit further enhances the driving force to drive the transformer circuit.

[0070] It is noted that the present application can be implemented in software and / or in a combination of software and hardware; e.g., using application specific integrated circuits (ASIC), a general purpose computer or any other similar hardware devices. In some embodiments, software programs implementing the present application can be executed by a processor to perform the steps or functions described herein. Also, software programs (including related data structures) of the present application can be stored in computer-readable media; e.g., RAM memory, magnetic or optical drive or diskette, and so on. Further, some of the steps or functions can be implemented using hardware; e.g., as circuitry that is cooperated with the processor in performing the various steps or functions.

[0071] The technical features of the above-described embodiments can be combined in any manner, and for the sake of brevity, not all possible combinations are described, however, it is to be understood that the scope of the disclosure encompasses all possible combinations.

[0072] The description and drawings of the application set forth herein are illustrative only and are not intended to limit the scope of the application. The effects or advantages of the embodiments described herein can not be incorporated in the embodiments described, and the description of the effects or advantages is not intended to limit the embodiments. Variations and modifications of the embodiments disclosed herein can be possible, and alternatives and equivalents of the various components of the embodiments are known to those of ordinary skill in the art. It is to be understood that the application can be practiced without the specific details set forth herein, and that a variety of implementations can be made of the application without departing from the spirit or scope of the application. Other variations and modifications of the embodiments disclosed herein can be made, and it is to be understood that the application can be practiced otherwise than as specifically described herein.

Claims

1. A plasma drive circuit, characterized by comprising: The plasma driving circuit comprises a double balanced mixer, a power setting circuit, an error amplifier, a voltage controlled oscillator, a single-ended to differential circuit, a driving circuit and a transformer circuit; The double balanced mixer is connected to the driving circuit and the transformer circuit respectively, the input end of the error amplifier is connected to the double balanced mixer and the power setting circuit respectively, and the output end of the error amplifier is connected to the input end of the voltage controlled oscillator; The output end of the voltage controlled oscillator is connected to the input end of the single-ended to differential circuit, and the output end of the single-ended to differential circuit is connected to the input end of the driving circuit respectively; the output end of the driving circuit is connected to the transformer circuit respectively; The double balanced mixer is used to mix the signals output by the transformer circuit and the driving circuit and screen out the fundamental frequency; the power setting circuit is used to generate the comparison power; The error amplifier is used to dynamically compare the screened fundamental frequency with the comparison power generated by the power setting circuit to generate an error signal; The voltage controlled oscillator is used to drive the voltage controlled oscillator to generate a tunable frequency by using the generated error signal; the single-ended to differential circuit is used to convert a single signal into a differential signal to enhance the driving force; The driving circuit is used to further enhance the driving force to drive the transformer circuit; and the transformer circuit is used to realize the functions of impedance transformation and impedance matching to adapt to the plasma coil.

2. The plasma driving circuit of claim 1, wherein: The double balanced mixer comprises a second transformer T2, a third transformer T3, a first mixer D1, a second inductor L2, a third inductor L3, a fourth inductor L4, a fifth inductor L5, a sixth inductor L6, a seventh inductor L7, a first zero capacitor C10, a first one capacitor C11, a first two capacitor C12, a first three capacitor C13, a first four capacitor C14, a first five capacitor C15, a first five resistor R15, a second one resistor R21 and a second two resistor R22; The first end of the first zero capacitor C10 is connected to the voltage feedback end of the driving circuit, the second end of the first zero capacitor C10 is connected to the first end of the first one capacitor C11, the second end of the first one capacitor C11 is connected to the first end of the second inductor L2 and the first end of the first five resistor R15 respectively; the second end of the second inductor L2 is connected to the first end of the third inductor L3 and the first end of the first three capacitor C13 respectively; the second end of the third inductor L3 is connected to the first end of the fourth inductor L4 and the first end of the first two capacitor C12 respectively; the first five resistor R15, the first three capacitor C13 and the first two capacitor C12 are grounded respectively; The second end of the fourth inductor L4 is connected to the sixth end of the second transformer T2, the fourth end of the second transformer T2 is grounded, and the second end of the second transformer T2 is grounded; the first end of the second transformer T2 is connected to the first end of the first mixer D1, and the third end of the second transformer T2 is connected to the second end of the first mixer D1; The third end of the first mixer D1 is connected to the third end of the third transformer T3, and the fourth end of the first mixer D1 is connected to the first end of the third transformer T3; the sixth end of the third transformer T3 is grounded; the second end of the third transformer T3 is connected to the first end of the second resistor R21, and the second end of the second resistor R21 is grounded; The fourth end of the third transformer T3 is connected to the second end of the seventh inductor L7, and the first end of the seventh inductor L7 is connected to the second end of the sixth inductor L6 and the first end of the first four capacitor C14 respectively; the first end of the sixth inductor L6 is connected to the second end of the fifth inductor L5 and the first end of the first five capacitor C15 respectively; the first end of the fifth inductor L5 is connected to the first end of the second resistor R22; the second end of the second resistor R22, the second end of the first five capacitor C15, and the second end of the first four capacitor C14 are grounded respectively.

3. The plasma driving circuit of claim 1, wherein: The error amplifier comprises a sixth A chip U6A, a sixth B chip U6B, a first six resistor R16, a first seven resistor R17, a first nine resistor R19, and a second three resistor R23; The non-inverting input end of the sixth B chip U6B is connected to the output end of the double-balanced mixer, and the inverting input end of the sixth B chip U6B is connected to the output end of the sixth B chip U6B and the first end of the first nine resistor R19; The output end of the first nine resistor R19 is connected to the inverting input end of the sixth A chip U6A and the first end of the second three resistor R23 respectively; The non-inverting input end of the sixth A chip U6A is connected to the second end of the first six resistor R16 and the first end of the first seven resistor R17 respectively; the first end of the first six resistor R16 is connected to a first power supply voltage, and the second end of the first seven resistor R17 is grounded; and the output end of the sixth A chip U6A is connected to the second end of the second three resistor R23.

4. The plasma driving circuit of claim 1, wherein: The voltage-controlled oscillator comprises a fifth chip U5, a first eight resistor R18, and a second zero resistor R20; the third pin of the fifth chip U5 is connected to the second end of the second zero resistor R20 and the second end of the first eight resistor R18 respectively; the fifth pin of the fifth chip U5 outputs a frequency adjustment signal; the second pin of the fifth chip U5 is grounded, and the fourth pin of the fifth chip U5 is grounded; The first end of the first eight resistor R18 is connected to a second power supply voltage, and the first end of the second zero resistor R20 is connected to the output end of the error amplifier.

5. The plasma driving circuit of claim 1, wherein: The single-ended-to-differential circuit comprises a second chip U2 and a seventh resistor R7; the fifth pin of the second chip U2 is connected to the second end of the seventh resistor R7, and the first end of the seventh resistor R7 is connected to a second power supply voltage; The first one pin and the first four pin of the second chip U2 are connected to the frequency adjustment signal output by the voltage-controlled oscillator.

6. The plasma driving circuit of claim 1, wherein: The driving circuit includes a first chip U1, a third chip U3, a fourth chip U4, a first A diode Q1A, a first B diode Q1B, a second A diode Q2A, a second B diode Q2B, a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, an eighth resistor R8, a ninth resistor R9, a first zero resistor R10, a first one resistor R11, a first two resistor R12, a first three resistor R13; The third chip U3 is connected with the first chip U1 and the fourth chip U4 respectively, a sixth pin of the third chip U3 is connected with a second end of the eighth resistor R8, and a first end of the eighth resistor R8 is connected with a second power supply voltage; Part pins of the first chip U1 are connected with a first end of the second resistor R2, a first end of the third resistor R3, a first end of the fourth resistor R4, a first end of the first resistor R1, and a first end of the fifth resistor R5 respectively, and a second end of the second resistor R2, a second end of the third resistor R3, and a second end of the fourth resistor R4 are grounded respectively; A second end of the first resistor R1 is connected with a positive pole of the first B diode Q1B, and a second end of the fifth resistor R5 is connected with a positive pole of the first A diode Q1A; a negative pole of the first B diode Q1B and a negative pole of the first A diode Q1A output a voltage feedback to a transformer circuit; Part pins of the fourth chip U4 are connected with a first end of the first zero resistor R10, a first end of the first one resistor R11, a first end of the first two resistor R12, a first end of the ninth resistor R9, and a first end of the first three resistor R13 respectively, and a second end of the first zero resistor R10, a second end of the first one resistor R11, and a second end of the first two resistor R12 are grounded respectively; A second end of the ninth resistor R9 is connected with a positive pole of the second B diode Q2B, and a second end of the first three resistor R13 is connected with a positive pole of the second A diode Q2A; a negative pole of the second B diode Q2B and a negative pole of the second A diode Q2A output a voltage feedback to the transformer circuit.

7. The plasma driving circuit of claim 1, wherein: The transformer circuit includes a first transformer T1, a first A capacitor C1A, a second capacitor C2, a third capacitor C3, a fourth A capacitor C4A, a fifth A capacitor C5A, and a first interface circuit P1; A first end of the first transformer T1 is connected with a voltage feedback signal output by the driving circuit, and a third end of the first transformer T1 is connected with a voltage feedback signal output by the driving circuit; A sixth end of the first transformer T1 is connected with a first end of the second capacitor C2, a first end of the third capacitor C3, a first end of the fourth A capacitor C4A, and a first end of the first A capacitor C1A respectively, and a second end of the first A capacitor C1A is connected with a first end of the first interface circuit P1. The fourth end of the first transformer T1 is connected with the second end of the second capacitor C2, the second end of the third capacitor C3, the second end of the fourth capacitor C4A and the first end of the fifth capacitor C5A respectively; the second end of the fifth capacitor C5A is connected with the second end of the first interface circuit P1; The second end of the first transformer T1 is connected with the third power supply voltage, and the fifth end of the first transformer T1 is grounded; the first interface circuit P1 is connected with the output coil.

8. The plasma driving circuit of claim 1, wherein: The double balanced mixer mixes and filters the base frequency from the signal outputted by the transformer circuit and the signal of the driving circuit.

9. A driving method of the plasma driving circuit according to any one of claims 1 to 8, characterized by, The driving method comprises: The double balanced mixer mixes and filters the base frequency from the signal outputted by the transformer circuit and the signal of the driving circuit; the power setting circuit generates the comparison power; The error amplifier dynamically compares the filtered base frequency with the comparison power generated by the power setting circuit to generate an error signal; the voltage controlled oscillator drives the voltage controlled oscillator to generate a tunable frequency by using the generated error signal; The single-ended to differential circuit converts the single-ended signal into a differential signal to enhance the driving force; the driving circuit further enhances the driving force to drive the transformer circuit; the transformer circuit realizes impedance conversion and impedance matching to adapt to the plasma coil.

Images