Graphite boat and coating equipment

Abstract

The invention belongs to the technical field of solar cell preparation, and discloses a graphite boat and coating equipment, which comprises a plurality of boat pages, an electrode block, a first cover plate and a second cover plate, and is characterized in that the plurality of boat pages comprise a plurality of first boat pages partially and conductively connected and a plurality of second boat pages partially and conductively connected; the multiple first boat pages and the multiple second boat pages are sequentially and alternately stacked in the first direction at intervals. The first cover plate and the second cover plate are arranged on two sides of the plurality of boat pages, the first cover plate is electrically connected with the first conductive boat page close to the second layer, and the second cover plate is electrically connected with the second conductive boat page close to the second layer; the electrode block is conductively connected to the third conductive boat page close to the first layer of the first cover plate and located on the side, away from the second cover plate, of the third conductive boat page, the electrode block and the first cover plate are arranged at an interval, and the electrode block is exposed from the side, away from the second cover plate, of the first cover plate; the electrode block and the first cover plate abut against an external positive electrode piece and an external negative electrode piece respectively to achieve electric connection.

Description

Technical Field

[0001] The invention relates to the technical field of solar cell preparation, and in particular to a graphite boat and coating equipment. Background Art

[0002] When making solar cells, the surface of the silicon wafer needs to be coated, such as Si x N y / SiO2 / SiO N (Inorganic Nitrogen Oxide Anti-Reflective Film), the coating equipment currently used is a tubular plasma deposition furnace. Working form: The boat pages of the graphite boat are used to carry silicon wafers, and the graphite boat is transported to the coating chamber of the coating equipment. The radio frequency electrodes in the coating chamber are connected to the graphite boat, so that discharge between the boat pages excites plasma, and the silicon wafer is coated, thereby obtaining a qualified film layer.

[0003] The current-drawing method in the coating chamber of the existing coating equipment is as follows: the coating chamber is provided with an electrode plug, which has good contact with the graphite boat, has a long service and maintenance cycle, and is easy to maintain. However, when the graphite boat enters the coating chamber, the following problems may occur: the conveying paddle used to convey the graphite boat is deformed, or the conveying paddle shakes during conveyance, or the electrode rod on the electrode head is deformed, so that the electrode head of the electrode cannot be accurately inserted into the electrode hole of the graphite boat, and there is a problem of difficulty in electrode docking. Summary of the invention

[0004] The object of the present invention is to provide a graphite boat and a coating device, which are convenient for electrode docking.

[0005] To achieve this object, the present invention adopts the following technical solutions:

[0006] A graphite boat, comprising:

[0007] A plurality of boat pages, including a plurality of first boat pages partially connected to each other in an electrically conductive manner and a plurality of second boat pages partially connected to each other in an electrically conductive manner, wherein the plurality of first boat pages and the plurality of second boat pages are alternately stacked and spaced in sequence along a first direction;

[0008] A first cover plate and a second cover plate are arranged on both sides of the plurality of boat pages along the first direction, the first cover plate is electrically connected to the first conductive boat page of the second layer close to it, and the second cover plate is electrically connected to the second conductive boat page of the second layer close to it;

[0009] The electrode block is conductively connected to the third conductive boat page close to the first layer of the first cover plate, and is located on the side of the third conductive boat page away from the second cover plate. The electrode block is spaced apart from the first cover plate and is exposed from the side of the first cover plate away from the second cover plate. One of the electrode block and the first cover plate is used to abut against an external positive electrode member, and the other is used to abut against an external negative electrode member.

[0010] In some possible implementations, an insulating component is further included, and the insulating component is passed through the first cover plate; the electrode block passes through the insulating component, and one end of the electrode block is connected to the third conductive boat page, and the other end is exposed from the insulating component.

[0011] In some possible implementations, the insulating assembly includes a spacer ring, the spacer ring is penetrated by the first cover plate, and the electrode block passes through the spacer ring.

[0012] In some possible implementations, the insulating assembly further includes an insulating gasket, which is disposed on a side of the first cover plate facing away from the second cover plate, the insulating gasket abuts against a lower end of the spacer ring, and is provided with an opening for the electrode block to pass through.

[0013] In some possible implementations, the insulating assembly further includes a first insulating block, the first insulating block is disposed between the third conductive boat page and the first cover plate, and the spacer ring passes through the first insulating block.

[0014] In some possible implementations, a receiving groove is provided on a side of the first insulating block facing away from the first cover plate, a flange is provided on the periphery of the electrode block, the flange is provided in the receiving groove, and two ends of the spacer ring are respectively abutted against the flange and the insulating gasket.

[0015] In some possible implementations, the first cover plate and the electrode block are flush with each other on sides facing away from the second cover plate; the first cover plate is provided with a groove, the insulating gasket is provided in the groove, and the insulating gasket does not protrude from the first cover plate and the electrode block.

[0016] In some possible implementations, a limiting groove is provided on the upper surface of the boat page, and the silicon wafer is limited in the limiting groove.

[0017] A coating device comprises a coating chamber and a graphite boat as described above placed in the coating chamber, wherein a positive electrode member and a negative electrode member are arranged in the coating chamber, and one of the electrode block and the first cover plate abuts against the positive electrode member, and the other abuts against the negative electrode member.

[0018] In some possible implementations, the positive electrode member and the negative electrode member are provided on a side of the coating chamber close to an opening, the graphite boat enters and exits the coating chamber from the opening, and when the graphite boat is provided in the coating chamber, the electrode block faces the opening.

[0019] Beneficial effects of the present invention:

[0020] The present invention provides a graphite boat and a coating device. When the graphite boat is placed in a coating chamber, the positive electrode member and the electrode block are in contact, and the negative electrode member and the first cover plate are in contact. The positive electrode member, the electrode block, a plurality of second boat pages and the second cover plate are in electrical communication with each other, and the negative electrode member, the first cover plate and a plurality of first boat pages are in electrical communication with each other. The silicon wafer is arranged between the first boat page and the second boat page. Since the polarities of the adjacent first boat pages and the second boat pages are opposite, the coating purpose is achieved.

[0021] The first cover plate and the electrode block are used as conductive sheets, one of which is a positive conductive sheet and the other is a negative conductive sheet. The electrode blocks are arranged so that the positive conductive sheet and the negative conductive sheet are located on the same side along the first direction, so as to abut against the positive electrode member and the negative electrode member respectively. When the graphite boat is placed in the coating chamber, it can abut against the positive electrode member and the negative electrode member in the coating chamber, so as to facilitate the docking of the graphite boat with the positive electrode member and the negative electrode member. The problem of being unable to dock due to deformation of the electrode rod of the electrode head, deformation of the conveying paddle used to convey the graphite boat to the coating chamber, or shaking of the conveying paddle in the existing solution is avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic diagram of a graphite boat from a viewing angle provided by a specific embodiment of the present invention;

[0023] Figure 2 yes Figure 1 A magnified image of point A;

[0024] Figure 3 is a schematic diagram of a graphite boat from another perspective provided by a specific embodiment of the present invention;

[0025] Figure 4 yes Figure 3 A magnified view of point B;

[0026] Figure 5 is a schematic diagram of a first boat page provided by a specific embodiment of the present invention;

[0027] Figure 6 is a schematic diagram of a second boat page provided by a specific embodiment of the present invention;

[0028] Figure 7 It is a schematic diagram of placing a silicon wafer on a first boat page provided by a specific embodiment of the present invention.

[0029] In the figure:

[0030] 1. First boat sheet; 11. Limiting groove; 12. Inclined surface; 13. Weight reduction groove; 14. First protrusion; 2. Second boat sheet; 21. Second protrusion; 3. First cover plate; 31. Groove; 4. Second cover plate; 5. Electrode block; 51. Flange; 6. Insulating assembly; 61. Insulating gasket; 62. First insulating block; 621. Accommodating groove; 63. Spacer ring; 7. Reinforcing rib; 8. Insulating rod; 9. Nut; 10. Insulating ring; 20. Conductive block; 30. Second insulating block; 40. First conductive boat sheet; 50. Second conductive boat sheet; 60. Third conductive boat sheet; 100. Silicon wafer. DETAILED DESCRIPTION

[0031] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0032] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0034] This embodiment provides a coating device, including a coating chamber and a graphite boat placed in the coating chamber.

[0035] like Figure 1-Figure 4As shown, this embodiment further provides a graphite boat, including a plurality of boat pages, a first cover plate 3, a second cover plate 4, and an electrode block 5. The plurality of boat pages include a plurality of first boat pages 1 in one part and a plurality of second boat pages 2 in another part, the plurality of first boat pages 1 are conductively connected to each other, the plurality of second boat pages 2 are conductively connected to each other, and the plurality of first boat pages 1 and the plurality of second boat pages 2 are alternately stacked and spaced in sequence along a first direction. The first cover plate 3 and the second cover plate 4 are arranged on both sides of the plurality of boat leaves along the first direction. The first cover plate 3 and the second cover plate 4 are arranged on both sides of the plurality of boat leaves along the first direction. The first cover plate 3 is electrically connected to the first conductive boat leaf 40 of the second layer close to it, and the second cover plate 4 is electrically connected to the second conductive boat leaf 50 of the second layer close to it; the electrode block 5 is conductively connected to the third conductive boat leaf 60 of the first layer close to the first cover plate 3, and is located on the side of the third conductive boat leaf 60 away from the second cover plate 4, is spaced apart from the first cover plate 3, and is exposed from the lower side of the first cover plate 3; one of the electrode block 5 and the first cover plate 3 is used to abut against an external positive electrode member, and the other is used to abut against an external negative electrode member.

[0036] Among them, the first conductive boat page 40 can be the first boat page 1 or the second boat page 2, the second conductive boat page 50 can be the first boat page 1 or the second boat page 2, and the third conductive boat page 60 is the boat page opposite to the first conductive boat page 40, that is, the first conductive boat page 40 is the first boat page 1, and the third conductive boat page 60 is the second boat page 2, so that the third conductive boat page 60 is not conductively connected to the first conductive boat page 40.

[0037] A positive electrode member and a negative electrode member are provided in the coating chamber. When the graphite boat is placed in the coating chamber, one of the electrode block 5 and the first cover plate 3 abuts against the positive electrode member, and the other abuts against the negative electrode member.

[0038] In this embodiment, the positive electrode member and the electrode block 5 are abutted, and the negative electrode member and the first cover plate 3 are abutted as an example for exemplary description. The positive electrode member, the electrode block 5, the plurality of second boat sheets 2 and the second cover plate 4 are mutually conductive, and the negative electrode member, the first cover plate 3 and the plurality of first boat sheets 1 are mutually conductive. The silicon wafer 100 is disposed between the first boat sheet 1 and the second boat sheet 2. Since the adjacent first boat sheet 1 and the second boat sheet 2 have opposite polarities, when there is a certain gas pressure and SiH4 and NH3 gases in the chamber, glow discharge will occur between the two boat sheets. The glow discharge can decompose the SiH4 and NH3 gases in the space to form Si and N ions, which combine to form SiN x The molecules are deposited on the surface of the silicon wafer 100 to achieve the coating purpose.

[0039] The first cover plate 3 and the electrode block 5 are used as conductive sheets, one of which is a positive electrode conductive sheet and the other is a negative electrode conductive sheet. The electrode block 5 is arranged so that the positive electrode conductive sheet and the negative electrode conductive sheet are located on the same side along the first direction, so as to abut against the positive electrode member and the negative electrode member respectively. When placing the graphite boat in the coating chamber, it can abut against the positive electrode member and the negative electrode member in the coating chamber, so as to facilitate the docking of the graphite boat with the positive electrode member and the negative electrode member. The problem of being unable to dock due to deformation of the electrode rod of the electrode head, deformation of the conveying paddle used to convey the graphite boat to the coating chamber, or shaking of the conveying paddle in the existing scheme is avoided. The graphite boat in this scheme can be placed horizontally or in other ways.

[0040] A positive electrode member and a negative electrode member are also provided on one side of the coating chamber with an opening. The graphite boat enters and exits the coating chamber from the opening. When the graphite boat is arranged in the coating chamber, the electrode block 5 is located on the side of the graphite boat facing the opening, so that the electrode block 5 and the first cover plate 3 of the graphite boat are in one-to-one contact with the positive electrode member and the negative electrode member at the opening, thereby avoiding the electrical connection position being located deep in the coating chamber, and facilitating subsequent installation and maintenance.

[0041] The graphite boat also includes an insulating component 6, which is inserted into the first cover plate 3; the electrode block 5 is inserted into the insulating component 6, and one end is connected to the third conductive boat page 60, and the other end is exposed to the insulating component 6. By providing the insulating component 6, the electrode block 5 and the first cover plate 3 can be effectively prevented from being conducted, thereby improving the structural reliability. In other embodiments, the first cover plate 3 and the electrode block 5 can be spaced apart, and the second boat page 2 and the first cover plate 3 can be spaced apart to prevent the first cover plate 3 and the electrode block 5 from being conducted.

[0042] The insulating assembly 6 includes a spacer ring 63, which is penetrated by the first cover plate 3, and the electrode block 5 passes through the spacer ring 63. The spacer ring 63 is arranged between the first cover plate 3 and the electrode block 5 to avoid the possibility of contact between the first cover plate 3 and the electrode block 5, so as to prevent the first cover plate 3 and the electrode block 5 from being conductive.

[0043] Furthermore, the insulating assembly 6 further includes an insulating gasket 61, which is connected to the side of the first cover plate 3 facing away from the second cover plate 4, and the insulating gasket 61 abuts against the lower end of the spacer ring 63, and is provided with an opening for the electrode block 5 to pass through. The insulating gasket 61 abuts against the lower end of the spacer ring 63, so that the position of the spacer ring 63 is stable, and it is prevented from falling off from the bottom, thereby ensuring the isolation of the first cover plate 3 and the electrode block 5.

[0044] Furthermore, the insulating assembly 6 further includes a first insulating block 62, which is disposed between the third conductive boat leaf 60 and the first cover plate 3, and a spacer ring 63 passes through the first insulating block 62. The first insulating block 62 is disposed so that the boat leaf of the first layer below is spaced from the first cover plate 3 to avoid conduction.

[0045] The above structure can realize the insulation connection between the electrode block 5 and the first cover plate 3, and can also realize the conductive connection between the electrode block 5 and the third conductive boat 60, and has a simple structure and is easy to assemble. In other embodiments, any two of the first insulating block 62, the insulating gasket 61 and the spacer ring 63 are an integrated structure or the three are an integrated structure, without limitation.

[0046] In one embodiment, a first insulating block 62 is provided with a receiving groove 621 on the side facing away from the first cover plate 3, a flange 51 is provided on the periphery of the electrode block 5, the flange 51 is provided in the receiving groove 621, and the electrode block 5 abuts against the second boat page 2, a spacer ring 63 is sleeved on the electrode block 5, and the two ends of the spacer ring 63 abut against the flange 51 and the insulating gasket 61, respectively, so as to achieve the position limitation of the electrode block 5 and the insulating assembly 6. In other embodiments, the electrode block 5 can also be connected to the third conductive boat page 60 or bonded to the second boat page 2 by fasteners, etc., without limitation. The boat can be placed horizontally, vertically, or in other ways.

[0047] The first cover plate 3 and the electrode block 5 are flush with the sides facing away from the second cover plate 4, that is, the positive electrode member and the negative electrode member connected thereto are at the same height; the first cover plate 3 is provided with a groove 31, and the insulating gasket 61 is provided in the groove 31, and the insulating gasket 61 does not protrude from the first cover plate 3 and the electrode block 5, so as to prevent the insulating gasket 61 from causing structural interference when the graphite boat enters the coating chamber, thereby facilitating docking.

[0048] In one embodiment, the graphite boat further includes a second insulating block 30, an insulating rod 8, a nut 9, an insulating ring 10 and a conductive block 20, and the above structures are provided in plurality; the first boat page 1 is provided with two first protrusions 14, and the two first protrusions 14 are centrally symmetrically arranged on both sides of the length direction of the first boat page 1; the second boat page 2 is provided with two second protrusions 21, and the two second protrusions 21 are centrally symmetrically arranged on both sides of the length direction of the second boat page 2, and the first protrusions 14 and the second protrusions 21 on the graphite boat are spaced apart in the width direction of the graphite boat. Multiple first boat pages 1 are arranged along the first direction, and the first protrusions 14 of adjacent first boat pages 1 are connected by conductive blocks 20, and the conductive blocks 20 and the second boat pages 2 are spaced apart in the length direction of the graphite boat to prevent conduction. Multiple second boat pages 2 are arranged along the first direction, and the second protrusions 21 of adjacent second boat pages 2 are connected by conductive blocks 20, and the conductive blocks 20 and the first boat pages 1 are spaced apart in the length direction of the graphite boat to prevent conduction.

[0049] In this embodiment, the first cover plate 3 and the two first protrusions 14 of the first boat leaf 1 at the bottom are supported and connected correspondingly by two conductive blocks 20. The second cover plate 4 and the two first protrusions 14 of the first boat leaf 1 at the top are supported and connected correspondingly by two second insulating blocks 30. The first cover plate 3 and a second protrusion 21 of the second boat leaf 2 at the bottom are connected by an electrode block 5 and an insulating assembly 6, and the first cover plate 3 and another second protrusion 21 of the second boat leaf 2 at the bottom are connected by a second insulating block 30. In other embodiments, the electrode block 5 can also be connected to other positions of the second boat leaf 2, or multiple electrode blocks 5 can also be provided, without limitation. The second cover plate 4 and the two first protrusions 14 of the second boat leaf 2 at the top are supported and connected correspondingly by two conductive blocks 20.

[0050] The insulating rod 8 passes through the first cover plate 3, the second cover plate 4, the first protrusion 14 of the first boat leaf 1, the conductive block 20 and the second insulating block 30. Both ends of the insulating rod 8 are provided with external threads to be threadedly connected with the nuts 9. The two nuts 9 abut against the sides of the first cover plate 3 and the second cover plate 4 that are away from each other, thereby realizing the fixed connection of the plurality of first boat leaves 1 with the first cover plate 3 and the second cover plate 4. The insulating rod 8 passes through the first cover plate 3, the second cover plate 4, the second protrusion 21 of the second boat leaf 2, the conductive block 20 and the second insulating block 30. Both ends of the insulating rod 8 are provided with external threads to be threadedly connected with the nuts 9. The two nuts 9 abut against the sides of the first cover plate 3 and the second cover plate 4 that are away from each other, thereby realizing the fixed connection of the plurality of second boat leaves 2 with the first cover plate 3 and the second cover plate 4. The fixed connection of the first boat leaf 1 and the second boat leaf 2 is realized through the first cover plate 3 and the second cover plate 4, thereby realizing the fixed connection of the entire graphite boat.

[0051] Furthermore, an insulating ring 10 is supported and connected between the first boat page 1 and the second boat page 2, and the insulating rod 8 passes through the first cover plate 3, the second cover plate 4, the first boat page 1, the second boat page 2 and the insulating ring 10. The two ends of the insulating rod 8 are threadedly connected by nuts 9, and the two nuts 9 abut against the side of the first cover plate 3 and the second cover plate 4 that are away from each other, thereby achieving the fixation between the first cover plate 3, the second cover plate 4, the multiple boat pages and the insulating ring 10, further achieving the overall fixed connection, and improving the structural reliability. Multiple insulating rings 10 can be supported and connected between the first boat page 1 and the second boat page 2, and multiple insulating rods 8 and nuts 9 are connected accordingly, without limitation. The positions of the insulating ring 10 and the insulating rod 8 avoid the limit groove 11 to prevent the silicon wafer 100 from being carried.

[0052] The electrode block 5, the conductive block 20, the first cover plate 3, the second cover plate 4 and the nut 9 are all made of conductive materials, such as graphite materials or metal materials, and the above parts can be made of the same material or different materials without limitation. The insulating assembly 6, the second insulating block 30, the insulating rod 8 and the insulating ring 10 are all made of insulating materials, such as ceramic materials, without limitation.

[0053] In the prior art, the silicon wafer is vertically inserted into the groove between two adjacent wafer boat pages. On the one hand, there is an inevitable gap between the silicon wafer and the bottom surface of the groove. While the outer side of the silicon wafer is coated, the inner side edge is also coated with a film layer of the same material as the outer coating. This phenomenon is called wrap-around plating, and a special process is required to remove the wrap-around coating layer in the subsequent process, which increases costs and affects the performance of the finished photovoltaic cells. On the other hand, there are non-conductive bars under and on both sides of the silicon wafer for support and positioning. When the silicon wafer is inserted, it is easy to cause cracks or even breakage when it collides with them. In addition, the bars under and on both sides of the silicon wafer will block the gas carrying the reaction source, resulting in the coating thickness of the part of the silicon wafer adjacent to the bars being thinner than other parts, affecting the battery performance. To solve the above problems, in this embodiment, the first direction is the vertical direction, and the upper surface of the boat page is used to carry the silicon wafer 100. By changing the layout of the graphite boat, the original vertical wafer placement is changed to horizontal wafer placement to ensure that the back of the silicon wafer 100 is directly attached to the boat page, avoiding the problem of winding plating, cracks and fragments caused by the collision of the silicon wafer 100, and uneven coating problems.

[0054] like Figure 5 and Figure 6 As shown, the upper surface of the boat page is provided with a limiting groove 11, and the silicon wafer 100 is limited in the limiting groove 11 to ensure that the silicon wafer 100 is reliably installed on the boat page. Optionally, the upper surfaces of the first boat page 1 and the second boat page 2 are both provided with limiting grooves 11 to increase the number of silicon wafers 100 that can be carried and improve production capacity.

[0055] like Figure 7 As shown, further, an inclined surface 12 is provided on the edge of the limiting groove 11, and the inclined surface 12 is inclined from the four sides of the limiting groove 11 to the inside of the limiting groove 11, and the height of the contact point between the inclined surface 12 and the silicon wafer 100 is not greater than the thickness of the silicon wafer 100, that is, the height of the lowest edge of the inclined surface 12 is not greater than the thickness of the silicon wafer 100, so that when the silicon wafer 100 is located in the limiting groove 11, the lowest edge of the inclined surface 12 is flush with the surface of the silicon wafer 100 or the lowest point of the inclined surface 12 is lower than the surface of the silicon wafer 100, which is used to position the silicon wafer 100 while avoiding protruding from the positioning points around the silicon wafer 100, so as to avoid affecting the process gas flow and causing uneven coating.

[0056] Optionally, a weight-reducing groove 13 is provided on the lower surface of the boat page to reduce the weight of the entire graphite boat and facilitate the input or removal of the graphite boat into the coating chamber.

[0057] The first direction is the vertical direction. The positive electrode member and the negative electrode member are arranged at the bottom of the coating chamber, so as to facilitate observation of the connection between the positive electrode member and the negative electrode member when the graphite boat is transported to the coating chamber.

[0058] A reinforcing rib 7 is provided on the side of the first cover plate 3 facing away from the second cover plate 4. The first cover plate 3 is used to bear the weight of the graphite boat. The structural strength is improved by providing the reinforcing rib 7. Optionally, the reinforcing rib 7 is at least one metal strip welded or detachably connected to the first cover plate 3. Exemplarily, two reinforcing ribs 7 are arranged at intervals along the width direction of the graphite boat. The reinforcing rib 7 is extended along the length direction of the graphite boat to prevent the reinforcing rib 7 from interfering with the structure in the coating chamber when the graphite boat enters the coating chamber.

[0059] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A graphite boat, characterized in that: include: A plurality of boat pages, comprising a plurality of first boat pages (1) partially interconnected with each other in a conductive manner and a plurality of second boat pages (2) partially interconnected with each other in a conductive manner, wherein the plurality of first boat pages (1) and the plurality of second boat pages (2) are alternately stacked and spaced in sequence along a first direction; A first cover plate (3) and a second cover plate (4) are arranged on both sides of the plurality of boat pages along the first direction, the first cover plate (3) being electrically connected to a first conductive boat page (40) of the second layer adjacent to the first cover plate (3), and the second cover plate (4) being electrically connected to a second conductive boat page (50) of the second layer adjacent to the first cover plate (4); The electrode block (5) is conductively connected to a third conductive boat page (60) close to the first layer of the first cover plate (3) and is located on a side of the third conductive boat page (60) facing away from the second cover plate (4). The electrode block (5) is spaced apart from the first cover plate (3) and is exposed from a side of the first cover plate (3) facing away from the second cover plate (4). One of the electrode block (5) and the first cover plate (3) is used to abut against an external positive electrode component, and the other is used to abut against an external negative electrode component.

2. The graphite boat according to claim 1, characterized in that: It also comprises an insulating component (6), wherein the insulating component (6) is passed through the first cover plate (3); the electrode block (5) passes through the insulating component (6), with one end connected to the third conductive boat page (60) and the other end exposed to the insulating component (6).

3. The graphite boat according to claim 2, characterized in that: The insulating component (6) comprises a spacer ring (63), the spacer ring (63) is penetrated through the first cover plate (3), and the electrode block (5) passes through the spacer ring (63).

4. The graphite boat according to claim 3, characterized in that: The insulating component further comprises an insulating gasket (61), which is arranged on a side of the first cover plate (3) facing away from the second cover plate (4), the insulating gasket (61) abuts against the lower end of the spacer ring (63) and is provided with an opening for the electrode block (5) to pass through.

5. The graphite boat according to claim 4, characterized in that: The insulating assembly further comprises a first insulating block (62), wherein the first insulating block (62) is arranged between the third conductive boat page (60) and the first cover plate (3), and the spacer ring (63) passes through the first insulating block (62).

6. The graphite boat according to claim 5, characterized in that: A receiving groove (621) is provided on the side of the first insulating block (62) facing away from the first cover plate (3), a flange (51) is provided on the outer periphery of the electrode block (5), the flange (51) is arranged in the receiving groove (621), and two ends of the spacer ring (63) are respectively in contact with the flange (51) and the insulating gasket (61).

7. The graphite boat according to claim 4, characterized in that: The first cover plate (3) and the electrode block (5) are flush with each other on the side facing away from the second cover plate (4); the first cover plate (3) is provided with a groove (31), the insulating gasket (61) is arranged in the groove (31), and the insulating gasket (61) does not protrude from the first cover plate (3) and the electrode block (5).

8. The graphite boat according to any one of claims 1 to 7, characterized in that: A limiting groove (11) is provided on the upper surface of the boat leaf, and the silicon chip (100) is limited in the limiting groove (11).

9. A coating device, characterized in that: The invention comprises a coating chamber and a graphite boat as claimed in any one of claims 1 to 8 placed in the coating chamber, wherein a positive electrode member and a negative electrode member are arranged in the coating chamber, and one of the electrode block (5) and the first cover plate (3) abuts against the positive electrode member, and the other abuts against the negative electrode member.

10. The coating device according to claim 9, characterized in that: The positive electrode member and the negative electrode member are arranged on one side of the coating chamber close to the opening, the graphite boat enters and exits the coating chamber from the opening, and when the graphite boat is arranged in the coating chamber, the electrode block (5) faces the opening.

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