Substrate loading machine adopting image collecting and scanning structure

Abstract

The invention belongs to the technical field of semiconductor conveying, and particularly relates to a substrate loading machine adopting an image collecting and scanning structure. Comprising a vertical plate and a scanning mechanism, the scanning mechanism comprises a door opening panel, a scanning element and a two-dimensional motion unit, the two-dimensional motion unit is arranged on the lower portion of the vertical plate of the substrate loader, the output end of the two-dimensional motion unit is connected with the door opening panel, the door opening panel is arranged at a loading window in the upper portion of the vertical plate, and the scanning element is arranged on the top of the door opening panel; the two-dimensional motion unit drives the door opening panel to perform door opening action through horizontal and lifting motion, and the scanning element scans a substrate in the substrate box located on the inner side of the loading window and acquires an image in the lifting motion process of the door opening panel, so that the position and state of the substrate are detected. According to the invention, the scanning element is arranged on the door opening mechanism, the scanning motion is carried out in the door opening motion process, and the scanning motion does not need to independently carry out feeding motion, so that the number of structures and motion elements is reduced, dust is reduced, and the cleanliness of the substrate is ensured.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor transmission, and in particular relates to a substrate loader adopting an image acquisition scanning structure. Background Art

[0002] With the continuous development of the semiconductor industry, the requirements for packaging technology are getting higher and higher. Due to the limitation of wafer size, the traditional wafer-level packaging technology has a low packaging utilization rate and faces certain limitations in the packaging of high-density and high-integration chips. Therefore, panel-level packaging (PLP) technology has gradually developed and become one of the important technologies in the field of semiconductor packaging. The panel has a large size, high packaging efficiency, and a shape closer to the shape of the chip. Compared with wafer-level packaging, it can reduce material waste and reduce production costs.

[0003] A Panel FOUP (front-opening standard panel box) is a special container for holding square substrates, and a substrate loader can automatically load a Panel FOUP and open the door of the Panel FOUP so that other transmission equipment can reach into the Panel FOUP to take out the substrate. In order to ensure safe placement and loading of substrates, the substrate loader needs to detect the position and status of the substrate in the Panel FOUP.

[0004] Comparative Document 1: For example, in the patent with publication number JP7443885B2 and patent name "Mapping Device and Loading Port Device", the scanning device uses a scanning bracket equipped with two pairs of opposing sensors to perform feeding movement, and probes into the Panel FOUP. The two pairs of opposing sensors respectively detect the position and state of the substrate by detecting the two corners of the substrate at the opening end of the Panel FOUP. This scanning device is independent of the door opening structure, and the scanning device needs to perform feeding movement alone, which is not conducive to the stable operation of the whole machine and also increases the operating time of the system; at the same time, the number of structures and moving elements is large, which increases the risk of dust contaminating the substrate; in addition, the opposing sensor detects the state of the substrate based on the principle of light being blocked. For thinner substrates and transparent substrates, it may not be detected or detected incorrectly, affecting the transmission safety of the substrate.

[0005] Comparative Document 2: For example, in the patent with publication number: CN115910877A and patent name "Loading Port", two photoelectric reflection sensors are arranged on the door opening device. When the door opening device descends, the two photoelectric reflection sensors descend accordingly and detect the position and state of the substrate in the Panel FOUP. The photoelectric reflection sensor detection method has low applicability to the thickness of the substrate, especially for thinner substrates, which may fail to detect or detect incorrectly, affecting the transmission safety of the substrate. Summary of the invention

[0006] In view of the above problems, the purpose of the present invention is to provide a substrate loader adopting an image acquisition scanning structure to solve the problems of low accuracy and applicability of substrate detection by the existing scanning mechanism, unreliable detection results, and complex structure, low operating stability and efficiency, and easy contamination of the substrate due to the independence of the scanning mechanism and the door opening mechanism.

[0007] In order to achieve the above object, the present invention adopts the following technical solutions:

[0008] The present invention provides a substrate loader adopting an image acquisition and scanning structure, comprising a scanning mechanism and a vertical plate. The scanning mechanism comprises a door opening panel, a scanning element and a two-dimensional motion unit, wherein the two-dimensional motion unit is arranged at the lower part of the vertical plate of the substrate loader, and the output end is connected to the door opening panel, the door opening panel is arranged at the loading window on the upper part of the vertical plate, and the scanning element is arranged on the door opening panel; the two-dimensional motion unit drives the door opening panel to perform a door opening action through horizontal movement and lifting movement, and the scanning element scans the substrate in the substrate box located on the inner side of the loading window and acquires the image during the lifting movement of the door opening panel, so as to realize the detection of the position and state of the substrate.

[0009] The scanning element includes at least one camera, which is installed on the door opening panel through an adjusting member, and the installation position of the camera is adjusted through the adjusting member.

[0010] The adjustment part includes an L-shaped connecting plate and an adjustment bolt. The L-shaped connecting plate includes a bottom surface and a side surface which are perpendicular to each other. The bottom surface is provided with a first positioning hole for connecting with the door opening panel and a first arc hole with the positioning hole as the center of the circle. The L-shaped connecting plate can be rotated in the left and right directions relative to the door opening panel; the side surface is provided with a second positioning hole for connecting with the camera and a second arc hole with the second positioning hole as the center of the circle. The camera can adjust the pitch angle relative to the L-shaped connecting plate.

[0011] The two-dimensional motion unit includes a horizontal motion mechanism and a lifting motion mechanism, wherein the lifting motion mechanism is arranged at the lower part of the vertical plate, and the output end is connected to the horizontal motion mechanism, and the lifting motion mechanism is used to output power in the vertical direction; the output end of the horizontal motion mechanism is connected to the lower end of the door opening panel, and the horizontal motion mechanism is used to output horizontal power in the direction approaching or moving away from the loading window.

[0012] The lifting motion mechanism includes a linear drive, a supporting plate, a lifting guide rail slider and a flexible transmission element, wherein the linear drive and the lifting guide rail slider are both arranged on the vertical plate in the vertical direction, the supporting plate is connected to the lifting guide rail slider, the output end of the linear drive is connected to the supporting plate, the flexible transmission element is arranged on the fixed component of the linear drive and connected to the supporting plate, and the flexible transmission element is used to detect the lifting position information of the lifting motion mechanism.

[0013] The flexible transmission element includes an encoder, a synchronous belt, a synchronous belt pressure plate and two synchronous pulleys, wherein the encoder is installed at a fixed end of the linear drive, and the two synchronous pulleys are respectively installed at the other fixed end of the linear drive and the movable end of the encoder, and the two synchronous pulleys are connected through a synchronous belt transmission, one end of the synchronous belt pressure plate is connected to the synchronous belt, and the other end is connected to the bearing plate, and the encoder records the lifting height position information of the lifting motion mechanism and outputs it.

[0014] A camera controller is also provided on the carrier plate, and the camera controller receives the lifting height position information of the lifting motion mechanism output by the encoder, and controls the scanning element to perform image acquisition according to the lifting height position information.

[0015] The horizontal motion mechanism includes a rotary drive, a crank slider assembly, a horizontal guide rail slider and a connecting plate, wherein the rotary drive and the horizontal guide rail slider are both arranged on the supporting plate, the output end of the rotary drive is connected to the horizontal guide rail slider through the crank slider assembly, one end of the connecting plate is connected to the crank slider assembly, and the other end of the connecting plate is connected to the door opening panel.

[0016] The crank slider assembly includes a rotating block, a needle bearing and a moving plate, wherein the moving plate is connected to the horizontal guide slider, and a strip slot is provided on the moving plate in the vertical direction; the rotating block is connected to the output end of the rotary driver, and the needle bearing is arranged on the rotating block and accommodated in the strip slot of the moving plate;

[0017] The rotary driver drives the rotary block to rotate, and the rotary block drives the moving plate to move horizontally in a direction close to or away from the loading window through a needle bearing, and is guided by a horizontal guide rail slider, and the lower end of the connecting plate is connected to the moving plate.

[0018] The rotary driver comprises a rotary drive cylinder, a cylinder mounting plate and connecting rods, wherein the cylinder mounting plate is connected to the supporting plate via a plurality of connecting rods, the crank slider assembly is located between the supporting plate and the cylinder mounting plate, the rotary drive cylinder is mounted on the cylinder mounting plate, and the output end is connected to the rotary block.

[0019] The advantages and beneficial effects of the present invention are as follows: the present invention provides a substrate loader adopting an image acquisition and scanning structure, in which a scanning element is arranged on a door opening mechanism, and a scanning movement is performed simultaneously during the door opening movement. The scanning movement does not require a separate feeding movement, thereby reducing the number of structures and moving elements, reducing the risk of dust generation, ensuring the cleanliness of the substrate, and at the same time improving the operating stability of the substrate loader, eliminating the time required for a separate scanning movement, and improving the operating rhythm speed of the substrate loader.

[0020] The present invention adopts a camera as a scanning element, and uses the camera to take pictures to record the position and state of the substrate. It has higher applicability to the thickness of the substrate, and the scanning and recording range is larger, the result is more accurate and reliable, and the safety of substrate transmission is improved.

[0021] The camera of the present invention is installed on the door opening mechanism based on the arc hole, the shooting angle can be adjusted in multiple directions, and the camera installation position can be adjusted in combination with the shooting effect; two cameras are respectively arranged on the left and right sides of the door opening mechanism, and work together to detect the position and state of the substrate, and the detection result is more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of a substrate loader adopting an image acquisition scanning structure of the present invention;

[0023] Figure 2 It is a structural schematic diagram of the scanning mechanism in the present invention;

[0024] Figure 3 This is a schematic diagram of the installation of the camera in the present invention;

[0025] Figure 4 It is a structural schematic diagram of the lifting motion mechanism in the present invention;

[0026] Figure 5 It is an exploded view of the horizontal motion mechanism in the present invention;

[0027] Figure 6 It is a motion schematic diagram of the scanning mechanism in the present invention.

[0028] In the figure: 1-substrate loader, 11-vertical plate, 2-substrate box, 3-scanning mechanism, 31-camera, 32-door panel, 321-adjusting part, 33-horizontal movement mechanism, 331-rotation drive cylinder, 332-cylinder mounting plate, 333-connecting rod, 334-rotation block, 335-needle bearing, 336-movement plate, 337-horizontal guide slider, 338-connecting plate, 34-lifting movement mechanism, 341-lifting drive cylinder, 342-carrying plate, 343-lifting guide slider, 344-camera controller, 345-encoder, 346-synchronous pulley, 347-synchronous belt, 348-synchronous belt pressure plate. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] See also Figure 1 , Figure 2As shown, the present invention provides a substrate loader adopting an image acquisition and scanning structure, including a scanning mechanism 3 and a vertical plate 11. The scanning mechanism 3 includes a door opening panel 32, a scanning element and a two-dimensional motion unit, wherein the two-dimensional motion unit is arranged at the lower part of the vertical plate 11 of the substrate loader 1, and the output end is connected to the door opening panel 32, the door opening panel 32 is arranged at the loading window on the upper part of the vertical plate 11, and the scanning element is arranged on the top of the door opening panel 32; the two-dimensional motion unit drives the door opening panel 32 to open the door through horizontal movement and lifting movement, and the scanning element scans the substrate in the substrate box 2 located on the inner side of the loading window during the lifting movement of the door opening panel 32 and acquires the image, so as to realize the detection of the position and state of the substrate.

[0031] See also Figure 2 , Figure 3 As shown, in the embodiment of the present invention, the scanning element includes at least one camera 31 , and the camera 31 is installed on the top of the door panel 32 through an adjusting member 321 , and the installation position of the camera 31 is adjusted by the adjusting member 321 .

[0032] Specifically, the adjustment member 321 includes an L-shaped connecting plate and an adjustment bolt. The L-shaped connecting plate includes a bottom surface and a side surface that are perpendicular to each other. The bottom surface is provided with a first positioning hole for connecting with the door panel 32 and a first arc-shaped hole with the first positioning hole as the center of the circle. The L-shaped connecting plate can adjust the rotation position in the left and right directions; the side surface is provided with a second positioning hole for connecting with the camera 31 and a second arc-shaped hole with the second positioning hole as the center of the circle. The camera 31 can adjust the pitch angle relative to the L-shaped connecting plate. After the position of the camera 31 is adjusted, it is locked and fixed by the adjustment bolt. The installation position of the camera 31 can be adjusted in real time according to the scanning results, and the installation angle can be adjusted in multiple directions based on the first arc-shaped hole and the second arc-shaped hole.

[0033] Preferably, there are two cameras 31, which are respectively arranged on both sides of the top of the door panel 32. The two cameras 31 work together to detect the position and state of the substrate. The scanning element is arranged on the door panel 32, and performs a scanning action while lifting and lowering. The door panel 32 is configured to engage with the substrate box door, driving the substrate box door to move accordingly.

[0034] See also Figure 1 , Figure 2 As shown, in an embodiment of the present invention, the two-dimensional motion unit includes a horizontal motion mechanism 33 and a lifting motion mechanism 34, wherein the lifting motion mechanism 34 is arranged at the lower part of the vertical plate 11, and the output end is connected to the horizontal motion mechanism 33, and the lifting motion mechanism 34 is used to output power in the vertical direction, and can drive the horizontal motion mechanism 33 and the door opening panel 32 to perform lifting and lowering motion; the output end of the horizontal motion mechanism 33 is connected to the lower end of the door opening panel 32, and the horizontal motion mechanism 33 is used to output horizontal power in the direction close to or away from the loading window.

[0035] See also Figure 4 As shown, in an embodiment of the present invention, the lifting motion mechanism 34 includes a linear drive, a supporting plate 342, a lifting guide rail slider 343 and a flexible transmission element, wherein the linear drive and the lifting guide rail slider 343 are both arranged on the vertical plate 11 along the vertical direction, the supporting plate 342 is connected to the lifting guide rail slider 343, the output end of the linear drive is connected to the supporting plate 342, the flexible transmission element is arranged on the fixed part of the linear drive and is connected to the supporting plate 342, and the flexible transmission element is used to detect the lifting position information of the lifting motion mechanism 34.

[0036] In an embodiment of the present invention, the flexible transmission element includes an encoder 345, a synchronous belt 347, a synchronous belt pressure plate 348 and two synchronous pulleys 346, wherein the encoder 345 is installed at a fixed end of the linear drive, and the two synchronous pulleys 346 are respectively installed at the other fixed end of the linear drive and the movable end of the encoder 345, and the two synchronous pulleys 346 are connected through the synchronous belt 347. One end of the synchronous belt pressure plate 348 is connected to the synchronous belt 347, and the other end is connected to the supporting plate 342. The encoder 345 records the lifting height position information of the lifting motion mechanism 34 and outputs it.

[0037] Preferably, the linear actuator comprises a lifting drive cylinder 341 and a mounting seat, wherein the lifting drive cylinder 341 is vertically arranged, and both ends of the shell are connected to the vertical plate 11 through the mounting seat.

[0038] Furthermore, a camera controller 344 is provided on the carrier plate 342 , and the camera controller 344 receives the lifting height position information of the lifting motion mechanism 34 output by the encoder 345 , and controls the camera 31 in the scanning element to perform image acquisition according to the lifting height position information.

[0039] The lifting mechanism 34 operates as follows: driven by the lifting drive cylinder 341, the carrier plate 342 performs lifting motion along the lifting guide slider 343, and the carrier plate 342 carries the horizontal motion mechanism 33. At the same time, the synchronous belt pressure plate 348 clamps the synchronous belt 347 to perform lifting motion, and the synchronous belt pulley 346 converts the linear lifting motion of the synchronous belt 347 into a rotary motion and transmits it to the encoder 345. The encoder 345 records the lifting height position information of the lifting mechanism 34 and provides it to the camera controller 344.

[0040] See also Figure 5As shown, in an embodiment of the present invention, the horizontal motion mechanism 33 includes a rotational drive, a crank slider assembly, a horizontal guide rail slider 337 and a connecting plate 338, wherein the rotational drive and the horizontal guide rail slider 337 are both arranged on a supporting plate 342, the output end of the rotational drive is connected to the horizontal guide rail slider 337 through the crank slider assembly, one end of the connecting plate 338 is connected to the crank slider assembly, and the other end of the connecting plate 338 is connected to the door opening panel 32.

[0041] In an embodiment of the present invention, the crank slider assembly includes a rotating block 334, a needle bearing 335 and a moving plate 336, wherein the moving plate 336 is connected to a slider in a horizontal guide rail slider 337, and a strip slot is provided on the moving plate 336 in a vertical direction; the output end of the rotary drive is connected to the rotating block 334, and a needle bearing 335 is provided on the rotating block 334, and the needle bearing 335 is accommodated in the strip slot of the moving plate 336; the rotary drive drives the rotating block 334 to rotate, and the rotating block 334 drives the moving plate 336 to move horizontally in a direction close to or away from the loading window through the needle bearing 335, and is guided by the horizontal guide rail slider 337, and the moving plate 336 is connected to the lower end of the connecting plate 338.

[0042] In an embodiment of the present invention, the rotary drive includes a rotary drive cylinder 331, a cylinder mounting plate 332 and a connecting rod 333, wherein the cylinder mounting plate 332 is connected to the supporting plate 342 through multiple connecting rods 333, the horizontal guide rail slider 337 and the moving plate 336 are both located between the supporting plate 342 and the cylinder mounting plate 332, the rotary drive cylinder 331 is installed on the cylinder mounting plate 332, and the output end is connected to the rotating block 334.

[0043] In this embodiment, there are four connecting rods 333 , and the cylinder mounting plate 332 is mounted on the supporting plate 342 through the four connecting rods 333 . A pair of horizontal guide rail sliders 337 are provided on the supporting plate 342 to adjust the movement stability of the moving plate 336 .

[0044] The horizontal motion mechanism 33 operates in the following manner: the rotary driver provides rotary power, the crank slider assembly converts the rotary motion into linear motion, slides on the horizontal guide slider 337, and the connecting plate 338 can transmit the horizontal motion to the door opening panel 32, so that the door opening panel 32 moves away from or close to the loading window. Specifically, the rotary drive cylinder 331 drives the rotary block 334 to rotate, and the needle bearing 335 connected to the rotary block 334 moves in the strip slot of the motion plate 336, thereby driving the motion plate 336 to move horizontally on the horizontal guide slider 337.

[0045] The present invention provides a substrate loader using an image acquisition scanning structure, and its working principle is:

[0046] See also Figure 1 , Figure 6 As shown, the substrate box 2 is placed on the substrate loader 1, the substrate box door of the substrate box 2 is located at the loading window, the scanning mechanism 3 is located at the rear side of the substrate loader 1, and a pair of cameras 31 are carried on the door panel 32. After the door panel 32 is engaged with the substrate box door, the horizontal motion mechanism 33 drives the door panel 32 to move horizontally in the direction away from the substrate box 2, so that the substrate box door is separated from the substrate box 2. After the horizontal motion reaches the set position, the lifting motion mechanism 34 carries the horizontal motion mechanism 33, the door panel 32, the camera 31 and the substrate box door to move downward together, and the encoder 345 records the position information. After the camera 31 reaches the specified position, based on the position information transmitted by the encoder 345, the program in the camera controller 344 will determine whether the set photo position has been reached. Once the photo condition is met, the camera controller 344 will generate a corresponding instruction, and the camera controller 344 controls the scanning element to scan the substrate in the substrate box 2, that is, the camera controller 344 controls the camera 31 to take pictures to detect the position and state of the substrate in the substrate box 2. The dual cameras work together to achieve full three-dimensional detection of the substrate state, and combined with the position information recorded by the encoder 345, the placement position and state of the entire substrate in the substrate box 2 are obtained.

[0047] The present invention provides a substrate loader adopting an image acquisition scanning structure, which integrates the scanning element and the door opening mechanism, and has the characteristics of simple structure, high operating stability and efficiency, low pollution risk, high detection accuracy and wide adaptability. The camera cooperates with the encoder and the camera controller to perform scanning, position recording and scanning control respectively, and the whole set of structures realizes the detection of the position and state of the substrate. The scanning element is installed based on an adjustable structure, and its position can be adjusted in real time based on the scanning results.

[0048] The above description is only an embodiment of the present invention and is not intended to limit the protection scope of the present invention. Any modification, equivalent replacement, improvement, expansion, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.

Claims

1. A substrate loader using an image acquisition scanning structure, comprising a scanning mechanism (3) and a vertical plate (11), characterized in that: The scanning mechanism (3) comprises a door opening panel (32), a scanning element and a two-dimensional motion unit, wherein the two-dimensional motion unit is arranged at the lower part of the vertical plate (11) of the substrate loader (1), and the output end is connected to the door opening panel (32), the door opening panel (32) is arranged at the loading window on the upper part of the vertical plate (11), and the scanning element is arranged on the door opening panel (32); the two-dimensional motion unit drives the door opening panel (32) to open the door through horizontal movement and lifting movement, and the scanning element scans the substrate in the substrate box (2) located inside the loading window and collects images during the lifting movement of the door opening panel (32), thereby realizing the detection of the position and state of the substrate.

2. The substrate loader using the image acquisition scanning structure according to claim 1, characterized in that: The scanning element comprises at least one camera (31); the camera (31) is mounted on the door opening panel (32) via an adjusting member (321); and the mounting position of the camera (31) is adjusted via the adjusting member (321).

3. The substrate loader using the image acquisition scanning structure according to claim 2, characterized in that: The adjusting member (321) comprises an L-shaped connecting plate and an adjusting bolt, wherein the L-shaped connecting plate comprises a bottom surface and a side surface which are perpendicular to each other, wherein the bottom surface is provided with a first positioning hole for connecting with the door opening panel (32) and a first arc-shaped hole with the first positioning hole as the center of a circle, and the L-shaped connecting plate can be rotated in the left and right directions relative to the door opening panel (32); and the side surface is provided with a second positioning hole for connecting with the camera (31) and a second arc-shaped hole with the second positioning hole as the center of a circle, and the camera (31) can be adjusted in pitch angle relative to the L-shaped connecting plate.

4. The substrate loader using the image acquisition and scanning structure according to claim 1, characterized in that: The two-dimensional motion unit comprises a horizontal motion mechanism (33) and a lifting motion mechanism (34), wherein the lifting motion mechanism (34) is arranged at the lower part of the vertical plate (11), and the output end is connected to the horizontal motion mechanism (33), and the lifting motion mechanism (34) is used to output power in the vertical direction; the output end of the horizontal motion mechanism (33) is connected to the lower end of the door opening panel (32), and the horizontal motion mechanism (33) is used to output horizontal power in the direction close to or away from the loading window.

5. The substrate loader using the image acquisition scanning structure according to claim 4, characterized in that: The lifting mechanism (34) comprises a linear drive, a bearing plate (342), a lifting guide rail slider (343) and a flexible transmission element, wherein the linear drive and the lifting guide rail slider (343) are both arranged on the vertical plate (11) along the vertical direction, the bearing plate (342) is connected to the lifting guide rail slider (343), the output end of the linear drive is connected to the bearing plate (342), the flexible transmission element is arranged on the fixed part of the linear drive and connected to the bearing plate (342), and the flexible transmission element is used to detect the lifting position information of the lifting mechanism (34).

6. The substrate loader using the image acquisition and scanning structure according to claim 5, characterized in that: The flexible transmission element comprises an encoder (345), a synchronous belt (347), a synchronous belt pressure plate (348) and two synchronous pulleys (346), wherein the encoder (345) is mounted on a fixed end of the linear drive, and the two synchronous pulleys (346) are respectively mounted on the other fixed end of the linear drive and the movable end of the encoder (345), the two synchronous pulleys (346) are connected through a synchronous belt (347), one end of the synchronous belt pressure plate (348) is connected to the synchronous belt (347), and the other end is connected to the bearing plate (342), and the encoder (345) records the lifting height position information of the lifting motion mechanism (34) and outputs it.

7. The substrate loader using the image acquisition and scanning structure according to claim 6, characterized in that: The carrier plate (342) is also provided with a camera controller (344), which receives the lifting height position information of the lifting motion mechanism (34) output by the encoder (345), and controls the scanning element to perform image acquisition according to the lifting height position information.

8. The substrate loader using the image acquisition and scanning structure according to claim 5, characterized in that: The horizontal motion mechanism (33) comprises a rotary drive, a crank slider assembly, a horizontal guide rail slider (337) and a connecting plate (338), wherein the rotary drive and the horizontal guide rail slider (337) are both arranged on the supporting plate (342), the output end of the rotary drive is connected to the horizontal guide rail slider (337) through the crank slider assembly, one end of the connecting plate (338) is connected to the crank slider assembly, and the other end of the connecting plate (338) is connected to the door opening panel (32).

9. The substrate loader using the image acquisition and scanning structure according to claim 8, characterized in that: The crank slider assembly comprises a rotating block (334), a needle bearing (335) and a moving plate (336), wherein the moving plate (336) is connected to the horizontal guide rail slider (337), and a strip-shaped slot hole is provided on the moving plate (336) along the vertical direction; the rotating block (334) is connected to the output end of the rotating driver, and the needle bearing (335) is arranged on the rotating block (334) and accommodated in the strip-shaped slot hole of the moving plate (336); The rotary driver drives the rotary block (334) to rotate, and the rotary block (334) drives the moving plate (336) to move horizontally in a direction close to or away from the loading window through the needle bearing (335), and is guided by the horizontal guide rail slider (337). The lower end of the connecting plate (338) is connected to the moving plate (336).

10. The substrate loader using the image acquisition and scanning structure according to claim 9, characterized in that: The rotary driver comprises a rotary drive cylinder (331), a cylinder mounting plate (332) and connecting rods (333), wherein the cylinder mounting plate (332) is connected to the bearing plate (342) via a plurality of connecting rods (333), the crank slider assembly is located between the bearing plate (342) and the cylinder mounting plate (332), the rotary drive cylinder (331) is mounted on the cylinder mounting plate (332), and the output end is connected to the rotary block (334).

Images