A dust removal device for wafer production

Abstract

The present invention discloses a wafer production dust removal device, wherein the four corners of the bottom frame are provided with upright columns extending upward, and an upper frame is provided at one end of the column away from the bottom frame, and the bottom frame, the columns and the upper frame form a mounting frame; a dust removal mechanism is provided in the mounting frame, a movable mechanism is provided above the dust removal mechanism, and a pneumatic assembly is provided above the movable mechanism, and the dust removal mechanism, the movable mechanism and the pneumatic assembly are arranged in the mounting frame; a supporting cross plate is provided between the middle parts of two adjacent columns, and another matching supporting cross plate is provided between the two columns on the other side, the two supporting cross plates are matched and arranged relative to each other, a cross-carrying plate is provided between the two supporting cross plates, and part of the pneumatic assembly is provided on the cross-carrying plate; the dust removal mechanism includes a dust removal head cavity, a bottom plate is provided at the bottom of the dust removal head cavity, and a frame sealing cover is provided at the top of the dust removal head cavity. The present application adopts a non-contact dust removal head for cleaning, thereby improving cleaning efficiency and enhancing the degree of automation of the equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor production, in particular to a cleaning device for producing semiconductor chips. Background Art

[0002] Wafers are silicon chips used in the manufacture of silicon semiconductor integrated circuits. During the semiconductor production process, wafers are placed in wafer boxes, which are then transported to different loading ports (Loadport) by the AMHS (Automatic Material Handling System). After a period of time, dust will remain on the surface of the carrier, affecting the yield of the wafer products.

[0003] In order to maintain the cleanliness of the carrier, the carrier of the semiconductor processing equipment needs to be cleaned regularly. The existing cleaning methods mostly use manual cleaning and brush cleaning. Manual cleaning needs to be performed when the equipment is repaired and maintained, which is time-consuming and labor-intensive, inefficient, and not conducive to the overall working environment. There is no way to control the cleanliness of the cleaning; brush cleaning is a contact method, which has the risk of scratching the carrier and generating static electricity. Summary of the Invention

[0004] In order to solve the problems existing in the prior art, the purpose of the present invention is to provide a cleaning device for semiconductor chip production, which adopts non-contact suspended positive and negative airway cleaning. At the same time, the cleaning device realizes gas and electricity isolation and independent operation, thereby improving the stability and yield rate of product processing.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] A wafer production dust removal device includes a base frame, wherein the four corners of the base frame are provided with upright columns extending upward, and an upper frame is provided at one end of the column away from the base frame. The base frame, the upright columns and the upper frame form a mounting frame; a dust removal mechanism is provided in the mounting frame, a moving mechanism is provided above the dust removal mechanism, and a pneumatic assembly is provided above the moving mechanism. The dust removal mechanism, the moving mechanism and the pneumatic assembly are arranged in the mounting frame;

[0007] A supporting cross plate is provided between the middle parts of two adjacent columns, and another matching supporting cross plate is provided between the two columns on the opposite side. The two supporting cross plates are matched and arranged opposite to each other, and a cross-carrying plate is provided between the two supporting cross plates, and part of the pneumatic assembly is provided on the cross-carrying plate;

[0008] The dust removal mechanism includes a dust removal head cavity, a bottom plate is provided at the bottom of the dust removal head cavity, the dust removal head cavity and the bottom plate are integrally formed, and a frame sealing cover is provided at the top of the dust removal head cavity;

[0009] An opening is provided at the top of the dust removal head cavity, a frame sealing cover is provided at the opening at the top of the dust removal head cavity, a positive pressure chamber is provided in the dust removal head cavity, the lateral side walls of the positive pressure chamber are vertically arranged from the bottom plate in the dust removal head cavity, and the top of the positive pressure chamber is separated from the top of the dust removal head cavity by a separation distance;

[0010] The moving mechanism is arranged between the supporting horizontal plates on both sides, and the moving mechanism includes a concave rail and a motor; a concave rail is provided between the supporting horizontal plates on both sides, and both ends of the concave rail are respectively fixed on the supporting horizontal plates on both sides, one end of the concave rail is provided with a motor, and the other end of the concave rail is provided with a gear, an internal toothed belt is sleeved between the output shaft of the motor and the gear, the internal toothed belt is provided in the groove of the concave rail, and the transmission wheel on the output shaft of the motor is engaged with the internal toothed belt for transmission.

[0011] Furthermore, in some embodiments, an empty space is provided between the outer walls on both sides of the positive pressure chamber and the inner wall of the dust removal head cavity, and the cavity between the inner wall of the dust removal head cavity and the outer wall of the positive pressure chamber forms a negative pressure cavity, and negative pressure cavities are respectively provided on both sides of the positive pressure chamber, and the negative pressure cavities on both sides are arranged in the dust removal head cavity;

[0012] A dust blowing slit is provided on the bottom plate of the positive pressure chamber, and two matching variable-section rods are provided on the bottom surface of the positive pressure chamber. The variable-section rods are arranged parallel to the dust blowing slit, and the two variable-section rods are respectively arranged on both sides of the dust blowing slit;

[0013] A first suction slit and a second suction slit are provided transversely running through the bottom plate of the negative pressure chamber. The first suction slit, the second suction slit and the dust blowing slit are arranged in parallel; the first suction slit is arranged close to the dust blowing slit, and the second suction slit is arranged away from the dust blowing slit. A separation distance is provided between the first suction slit and the second suction slit; a blowing and suction operation distance is provided between the dust blowing slit and the first suction slit.

[0014] Furthermore, in some embodiments, a positive pressure sealing cover is provided at one end of the positive pressure chamber away from the bottom plate, and an air inlet duct is provided on the positive pressure sealing cover and extends upward through the frame sealing cover, and an end of the air inlet duct away from the positive pressure chamber extends above the frame sealing cover, and the air inlet duct is in continuous connection with the positive pressure chamber;

[0015] The height ratio of the positive pressure chamber to the height of the dust removal head cavity is 2 / 3 to 3 / 4:1;

[0016] The frame sealing cover is provided with a hanging rack, and one end of the hanging rack away from the frame sealing cover is arranged on the moving mechanism;

[0017] The frame sealing cover is provided with an exhaust tube, which is connected to the negative pressure chamber; the positive pressure chamber and the negative pressure chamber are respectively arranged in the dust removal head cavity, and the positive pressure chamber and the negative pressure chamber are isolated from each other and do not communicate with each other;

[0018] Dust blowing slit width: the ratio of the first suction slit width to the second suction slit width is 1:4~5:4~5; the first suction slit and the second suction slit are of equal width;

[0019] Dust blowing slit air volume: The ratio of the first suction slit air volume is 1:1.5~3, and the second suction slit air volume is equal to the first suction slit air volume.

[0020] Furthermore, in some embodiments, a supporting middle beam is provided in the middle of the bottom frame, supporting side beams are provided on both sides of the supporting middle beam, the supporting middle beam and the supporting side beams are arranged in the frame of the bottom frame, and the supporting middle beam and the supporting side beams are spaced apart;

[0021] The bottom surfaces of the supporting center beam and supporting side beams are respectively provided with positioning grooves corresponding to the carrier. The two sides of the supporting center beam are respectively provided with double tactile wings protruding outwards, and the inner sides of the supporting side beams are provided with inner tactile wings protruding inwards.

[0022] A middle accommodating groove corresponding to the supporting middle beam is provided on the bottom plate of the dust removal head cavity, and double-sided avoidance recesses corresponding to the double-sided tactile wings are provided on both sides of the middle accommodating groove; a side accommodating groove corresponding to the supporting side beam is provided on the bottom plate of the dust removal head cavity, and an inner avoidance recess corresponding to the inner tactile wing is provided on the inner side of the side accommodating groove.

[0023] Furthermore, in some embodiments, the variable-section rod is provided with an inwardly protruding compressed air convex hull, an air inlet spacing D1 is provided between the tops of the two corresponding variable-section rods, a convex hull spacing D2 is provided between the compressed air convex hulls on opposite sides of the middle of the two variable-section rods, and the air inlet spacing D1>the convex hull spacing D2; an air outlet spacing D3 is provided between the bottoms of the two corresponding variable-section rods, a dust blowing gap is provided on the bottom plate, and the dust blowing gap D4 is also the width of the dust blowing gap; the air inlet spacing D1=the air outlet spacing D3, and the air outlet spacing D3>the dust blowing gap D4;

[0024] The compressed airflow convex hull is a convex strip type;

[0025] Or the convex hull of the compressed airflow is a long strip with an arc-shaped cross section;

[0026] Or the convex hull of the compressed airflow is a long strip with a short chordal section;

[0027] The bottom surface of the positive pressure chamber is provided with a pair of card plates that match the variable-section rods, and the variable-section rods are embedded in the card plates.

[0028] The ratio of the air inlet spacing D1 to the convex hull spacing D2 is 5 to 10:1; the air inlet spacing D1 = the air outlet spacing D3; the ratio of the dust blowing spacing D4 to the convex hull spacing D2 is 1:1 to 1.5.

[0029] Furthermore, in some embodiments, a slide groove parallel to the inner toothed belt is formed at the bottom of the concave rail groove, a hanging concave slide seat is sleeved on the concave rail, a mounting beam is mounted on the top of the hanging concave slide seat, and the hanging concave slide seat is hung on the concave rail through the mounting beam;

[0030] The bottom surface of the groove of the hanging concave slide is provided with a clamping seat corresponding to the internal toothed belt. The internal toothed belt is clamped in the clamping seat, and the clamping seat and the internal toothed belt are tightly matched. The clamping seat is inserted in the slide groove, and a hanging frame is fixed under the hanging concave slide.

[0031] Furthermore, in some embodiments, the air pressure assembly includes a positive pressure fan and a negative pressure fan, a horizontal carrier plate is provided between the supporting horizontal plates on both sides, the two ends of the horizontal carrier plate are respectively fixedly arranged on the supporting horizontal plates on both sides, a negative pressure high-efficiency filter bin is provided on the horizontal carrier plate, a negative pressure fan is provided on the negative pressure high-efficiency filter bin, a negative pressure fan air inlet housing is provided on the outer side of the negative pressure fan, a negative pressure fan exhaust housing is provided on the top of the negative pressure fan, and the negative pressure high-efficiency filter bin is connected to the exhaust tube on the dust removal mechanism through a duct;

[0032] A positive pressure high efficiency filter bin is provided under the upper frame, a positive pressure fan is provided under the positive pressure high efficiency filter bin, the upper part of the positive pressure fan is provided with a positive pressure fan air inlet casing, the lower part of the positive pressure fan is provided with a positive pressure fan exhaust casing, and the positive pressure fan is connected to the air inlet pipe on the dust removal mechanism through a duct.

[0033] This application uses a non-contact dust removal head for cleaning and an automated cleaning device. The cleaning device of this application corresponds to the size of the chip box (chip wafer box) on the carrier to clean the carrier. The device of this application is placed on the chip carrier for cleaning. There are generally hundreds or thousands of wafer processing carriers (points) in the working environment. The working environment is equipped with an overhead crane system, and the overhead crane is loaded with a mobile fixture. When a station is cleaned, the overhead crane system transports the cleaning device of this application to the next idle station to be cleaned (carrier position); just follow the station route map and clean the idle stations one by one.

[0034] This application utilizes a non-contact suspension and air-electric isolation design. This design uses fluctuating airflow to blow dust away, creating a barrier (negative pressure suction) that closes off the dust removal workspace. A high-efficiency filter is installed on the suction fan (negative pressure fan) to effectively filter dust. Two fans provide either positive or negative pressure air, eliminating the need for an external air source. Furthermore, the system is battery-powered, eliminating the need for an external power source. Both the fan and motor operate at 24 volts, and the entire system is isolated from external air and electricity.

[0035] The dust removal head (blowing and suction head) of the present application blows and cleans through the middle dust blowing gap and suctions through the two side suction gaps; the dust removal head is suspended on the carrier and has no contact. The middle dust blowing gap blows and the two side suction gaps suction, so the dust will not be exposed, and the negative pressure suction (suction gaps) on both sides will not leak air, which can prevent dust from floating out.

[0036] The dust removal head has two suction slits (narrow suction channels) on each side, each wider than the dust blowing slit. Air from the central dust blowing slit of the dust removal head (working gun) diffuses to either side, where two suction slit air curtains are installed on each side to draw away dust. The suction slits on either side form a suction air curtain, preventing dust from escaping the dust blowing gun, improving cleaning efficiency and enhancing the automation level of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 Schematic diagram of the structure of an embodiment of the present invention;

[0038] Figure 2 This is a schematic structural diagram of the bottom frame portion of an embodiment of the present invention;

[0039] Figure 3 This is a cross-sectional structural diagram of the dust removal mechanism of an embodiment of the present invention;

[0040] Figure 4 This is a schematic structural diagram of an embodiment of a variable cross-section rod portion of the present invention;

[0041] Figure 5 It is a structural schematic diagram of another embodiment of the variable cross-section rod portion of the present invention;

[0042] Figure 6 This is a schematic structural diagram of the dust removal mechanism of an embodiment of the present invention;

[0043] Figure 7 Schematic cross-section of the dust removal mechanism of an embodiment of the present invention;

[0044] Figure 8 Schematic diagram of wind direction of the dust removal mechanism according to an embodiment of the present invention;

[0045] Figure 9 Schematic diagram of the structure of an embodiment of the present invention;

[0046] Figure 10 This is a schematic diagram of the assembly of the moving mechanism portion of an embodiment of the present invention;

[0047] Figure 11 This is a schematic structural diagram of the moving mechanism portion of an embodiment of the present invention;

[0048] Figure 12 This is a schematic diagram of the assembly of the pneumatic component part of an embodiment of the present invention.

[0049] Description of the marks in the figure:

[0050] Column 11, upper frame 12, supporting horizontal plate 13, horizontal load plate 14, bottom frame 21, supporting middle beam 22, positioning groove 23, double-sided touch wings 24, supporting side beams 25, inner touch wings 27, dust removal mechanism 31, dust removal head cavity 32, bottom plate 33, frame sealing cover 34, positive pressure sealing cover 35, negative pressure cavity 36, positive pressure chamber 37, air inlet 38, exhaust duct 39, middle accommodating groove 41, double-sided avoidance concave platform 42, side accommodating groove 43, inner avoidance concave platform 44, compressed air flow convex hull 45, first suction slit 46, second Suction slot 47, dust blowing slot 48, variable cross-section rod 49, moving mechanism 51, motor 52, gear 53, internal toothed belt 54, concave rail 55, slide 56, hanging concave slide seat 57, clamp seat 58, air pressure component 61, positive pressure fan 62, negative pressure fan 63, positive pressure fan exhaust housing 64, positive pressure fan air inlet housing 65, negative pressure high-efficiency filter bin 66, negative pressure fan air inlet housing 67, negative pressure fan exhaust housing 68, positive pressure high-efficiency filter bin 69, battery 81, duct 82, positioning plate 83, hanging rack 84, mounting beam 85. DETAILED DESCRIPTION

[0051] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments of the present invention and corresponding drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0052] In the description of the present invention, it should be noted that the terms "longitudinal", "transverse", "upper", "lower", "front", "back", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. In the description of the present invention, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0053] In the production of semiconductor chips, the surface layer of the carrier that holds the processed chip box is provided with three separated and evenly distributed positioning support heads. In order to prevent the cleaning device of the present application from contacting the surface of the carrier, the bottom frame 21 of the cleaning device of the present application is provided with three support arms corresponding to the three positioning support heads: a supporting middle beam 22 and two supporting side beams 25. The bottom surfaces of the supporting middle beam 22 and the two supporting side beams 25 are provided with positioning grooves 23 corresponding to the positioning support heads, so that the positioning grooves 23 of the bottom frame 21 are in conflict with the positioning support heads of the carrier. Through the load-bearing of three points and three short beams, the dust removal head is suspended on the carrier in a non-contact manner, maintaining the bottom frame 21 of the cleaning device at a distance from the surface of the carrier without contact.

[0054] Please refer to the accompanying drawings. This application includes a base frame 21. The four corners of the base frame 21 are provided with upright columns 11 extending upward. The end of the column 11 away from the base frame 21 is provided with an upper frame 12. The base frame 21, the column 11 and the upper frame 12 constitute an installation frame; a dust removal mechanism 31 is provided in the installation frame, a moving mechanism 51 is provided above the dust removal mechanism 31, and a pneumatic component 61 is provided above the moving mechanism 51. The dust removal mechanism 31, the moving mechanism 51 and the pneumatic component 61 are arranged in the installation frame.

[0055] A supporting cross plate 13 is provided between the middle parts of two adjacent columns 11, and another matching supporting cross plate 13 is provided between the two columns 11 on the opposite side. The two supporting cross plates 13 are matched and correspondingly arranged, and a cross-carrying plate 14 is provided between the two supporting cross plates 13. Partial components of the pneumatic assembly 61 are provided on the cross-carrying plate 14, and a battery 81 is provided on the cross-carrying plate 14. The battery 81 is arranged under the upper frame 12.

[0056] The bottom surface of the positive pressure chamber 37 is provided with a pair of locking plates 83 that match the variable-section rod 49 , and the variable-section rod 49 is embedded in the pair of locking plates 83 .

[0057] The dust removal mechanism 31 includes a dust removal head cavity 32, which is also a pressure-dividing chamber; a bottom plate 33 is provided at the bottom of the dust removal head cavity 32, and the dust removal head cavity 32 and the bottom plate 33 are integrally formed; a frame sealing cover 34 is provided at the top of the dust removal head cavity 32.

[0058] Furthermore, in one embodiment, an opening is provided at the top of the dust removal head cavity 32, and a frame sealing cover 34 is provided at the opening at the top of the dust removal head cavity 32, that is, the frame sealing cover 34 is a sealing cover plate of the dust removal head cavity 32. A positive pressure chamber 37 is provided in the dust removal head cavity 32, and the lateral side walls of the positive pressure chamber 37 are vertically arranged from the bottom plate 33 in the dust removal head cavity 32. The top of the positive pressure chamber 37 is separated from the top of the dust removal head cavity 32 by a separation distance, that is, a distance is provided between the top of the positive pressure chamber 37 away from the bottom plate 33 and the frame sealing cover 34.

[0059] The ratio of the height of the positive pressure chamber 37 to the height of the dust removal head cavity 32 is 2 / 3 to 3 / 4:1.

[0060] Furthermore, in one embodiment, a positive pressure sealing cover 35 (positive pressure chamber cover) is provided at one end of the positive pressure chamber 37 away from the bottom plate 33, and an air inlet duct 38 is provided on the positive pressure sealing cover 35, which extends upward and passes through the frame sealing cover 34. The end of the air inlet duct 38 away from the positive pressure chamber 37 extends above the frame sealing cover 34, and the air inlet duct 38 is connected to the positive pressure chamber 37.

[0061] A gap is provided between the outer walls of the positive pressure chamber 37 on both sides and the inner wall of the dust removal head cavity 32. The cavity between the inner wall of the dust removal head cavity 32 and the outer wall of the positive pressure chamber 37 forms a negative pressure chamber 36. The negative pressure chamber 36 is provided on the outer side of the outer wall of the positive pressure chamber 37. That is, a negative pressure chamber 36 is provided on each side of the positive pressure chamber 37, and the negative pressure chambers 36 on both sides are disposed in the dust removal head cavity 32. An exhaust cylinder 39 is provided on the frame sealing cover 34, and the exhaust cylinder 39 is connected to the negative pressure chamber 36. The positive pressure chamber 37 and the negative pressure chamber 36 are respectively disposed in the dust removal head cavity 32, and the positive pressure chamber 37 and the negative pressure chamber 36 are isolated from each other and do not intersect with each other.

[0062] A hanging bracket 84 is provided on the frame sealing cover 34 , and one end of the hanging bracket 84 away from the frame sealing cover 34 is provided on the moving mechanism 51 .

[0063] Furthermore, in one embodiment, a transversely running dust-blowing slit 48 is provided on the bottom plate 33 (bottom surface) of the positive pressure chamber 37, and two matching variable-section rods 49 are provided on the bottom surface of the positive pressure chamber 37. The variable-section rods 49 are arranged parallel to the dust-blowing slit 48, and the two variable-section rods 49 are respectively arranged on both sides of the dust-blowing slit 48.

[0064] The variable-section rod 49 is provided with a compressed air flow bulge 45 that bulges inward (toward the opposite side), and an air inlet spacing D1 is provided between the tops of the two corresponding variable-section rods 49, and a bulge spacing D2 is provided between the compressed air flow bulges 45 on the opposite sides of the middle of the two variable-section rods 49, and the air inlet spacing D1>the bulge spacing D2; the matching bottoms of the two corresponding variable-section rods 49 are provided with an air outlet spacing D3, and the dust blowing gap 48 opened on the bottom plate 33 is provided with a dust blowing gap D4, and the dust blowing gap D4 is also the width of the dust blowing gap 48; the air inlet spacing D1=the air outlet spacing D3, and the air outlet spacing D3>the dust blowing gap D4.

[0065] The compressed airflow convex hull 45 is a convex strip type;

[0066] Or the compressed airflow convex hull 45 is a long strip with an arc-shaped cross section;

[0067] Or the compressed airflow convex hull 45 is a long strip with a short chord-shaped cross section.

[0068] Variable-section rod 49: The compressed air passes through the variable-section air flow channel and the wide-narrow section variable flow channel, and through repeated compression and diffusion, a fluctuating airflow is generated, and a high-frequency and high-speed pulse airflow is generated at the outlet position (dust blowing slit 48), so that the ultrafine particles are separated from the substrate and then sucked away and collected by the surrounding negative pressure airflow.

[0069] Furthermore, in one embodiment, the ratio of the air inlet spacing D1 to the convex hull spacing D2 is 5 to 10:1; the air inlet spacing D1 = the air outlet spacing D3, D1 equals D3; and the ratio of the dust blowing spacing D4 to the convex hull spacing D2 is 1:1 to 1.5.

[0070] The size of the wind gap is D1=D3>D2≧D4, and the airflow passes through D1→D2→D3→D4 to change the air duct width→narrow→wide→narrow, thereby obtaining a high-frequency and high-speed pulse airflow, and the dust-blowing slit 48 air outlet performs impact dust blowing and wind sweeping.

[0071] The bottom plate 33 (bottom surface) of the negative pressure chamber 36 is provided with a first suction slit 46 and a second suction slit 47 extending transversely therethrough. The first and second suction slits 46, 47 are arranged parallel to the dust blowing slit 48. The first suction slit 46 (inner suction slit) is arranged close to the dust blowing slit 48, while the second suction slit 47 (outer suction slit) is arranged away from the dust blowing slit 48. A separation distance is provided between the first and second suction slits 46, 47. Furthermore, the first and second suction slits 46, 47 are provided through the bottom plate 33 of the negative pressure chamber 36, that is, the first and second suction slits 46, 47 are provided through the bottom plate 33. A spacing is provided between the dust blowing slit 48 and the first suction slit 46 for suction and blowing operations.

[0072] Furthermore, in one embodiment, the ratio of the width of the dust blowing slit 48 : the width of the first suction slit 46 : the width of the second suction slit 47 is 1:4-5:4-5;

[0073] The first suction slit 46 and the second suction slit 47 have the same width.

[0074] Furthermore, in one embodiment, the ratio of the air volume of the dust blowing slit 48 to the air volume of the first suction slit 46 is 1:1.5-3, and the air volume of the second suction slit 47 is equal to the air volume of the first suction slit 31.

[0075] A supporting middle beam 22 is provided in the middle of the bottom frame 21 , and supporting side beams 25 are provided on both sides of the supporting middle beam 22 . The supporting middle beam 22 and the supporting side beams 25 are arranged in the frame of the bottom frame 21 , and the supporting middle beam 22 and the supporting side beams 25 are arranged at intervals.

[0076] The bottom surfaces of the supporting middle beam 22 and the supporting side beams 25 are respectively provided with positioning grooves 23 corresponding to the carrier. The two sides of the supporting middle beam 22 are respectively provided with double-sided tactile wings 24 protruding outward, and the inner sides of the supporting side beams 25 are provided with inner tactile wings 27 protruding inward.

[0077] Furthermore, in one embodiment, a middle accommodating groove 41 is provided on the bottom plate 33 of the dust removal head cavity 32, which matches the supporting middle beam 22, and double-sided avoidance recesses 42 are provided on both sides of the middle accommodating groove 41, which match the double-sided tactile wings 24; a side accommodating groove 43 is provided on the bottom plate 33 of the dust removal head cavity 32, which matches the supporting side beam 25, and an inner avoidance recess 44 is provided on the inner side of the side accommodating groove 43, which matches the inner tactile wings 27.

[0078] Furthermore, in one embodiment, the dust removal mechanism 31 is hung on the moving mechanism 51 through a hanging bracket 84 , and the dust removal mechanism 31 is suspended on the bottom frame 21 ; the dust removal mechanism 31 is connected to the pneumatic assembly 61 through a conduit 82 .

[0079] Furthermore, in one embodiment, the dust removal mechanism 31 is hung on the hanging concave slide seat 57 of the moving mechanism 51 through the hanging bracket 84, and the dust removal mechanism 31 is suspended on the bottom frame 21; the dust removal mechanism 31 is connected to the pneumatic component 61 through the conduit 82.

[0080] The moving mechanism 51 is arranged between the supporting transverse plates 13 on both sides, and the moving mechanism 51 includes a concave rail 55 and a motor 52; specifically, a concave rail 55 is provided between the supporting transverse plates 13 on both sides, and both ends of the concave rail 55 are respectively fixed on the supporting transverse plates 13 on both sides, one end of the concave rail 55 is provided with a motor 52, and the other end of the concave rail 55 is provided with a gear 53, an internal toothed belt 54 is sleeved between the output shaft of the motor 52 and the gear 53, the internal toothed belt 54 is set in the groove of the concave rail 55, and the transmission wheel on the output shaft of the motor 52 is meshed with the internal toothed belt 54 for transmission connection.

[0081] The bottom of the groove of the concave rail 55 is provided with a slide groove 56 parallel to the inner toothed belt 54, and a hanging concave slide seat 57 is provided on the concave rail 55. A mounting beam 85 is mounted on the top of the hanging concave slide seat 57, and the hanging concave slide seat 57 is hung on the concave rail 55 through the mounting beam 85; the bottom surface of the groove of the hanging concave slide seat 57 is provided with a clamping seat 58 corresponding to the inner toothed belt 54, and the inner toothed belt 54 is clamped in the clamping seat 58, and the clamping seat 58 is tightly fitted with the inner toothed belt 54; the clamping seat 58 is inserted in the slide groove 56, and a hanging frame 84 is fixed under the hanging concave slide seat 57.

[0082] The motor 52 drives the clamping seat 58 to move back and forth in the slide 56 through the internal toothed belt 54. The clamping seat 58 drives the hanging concave slide 57 to move back and forth on the concave rail 55, and then drives the dust removal mechanism 31 to move back and forth through the hanging frame 84.

[0083] The air pressure component 61 includes a positive pressure fan 62 and a negative pressure fan 63. A horizontal carrier plate 14 is provided between the supporting horizontal plates 13 on both sides. The two ends of the horizontal carrier plate 14 are respectively fixed on the supporting horizontal plates 13 on both sides. A negative pressure high-efficiency filter bin 66 is provided on the horizontal carrier plate 14. A negative pressure fan 63 is provided on the negative pressure high-efficiency filter bin 66. The outer side of the negative pressure fan 63 is provided with a negative pressure fan air inlet shell 67, and the top of the negative pressure fan 63 is provided with a negative pressure fan exhaust shell 68. The negative pressure high-efficiency filter bin 66 is connected to the exhaust pipe on the dust removal mechanism 31 through a duct 82.

[0084] A positive pressure high efficiency filter bin 69 is provided under the upper frame 12, and a positive pressure fan 62 is provided under the positive pressure high efficiency filter bin 69. The upper part of the positive pressure fan 62 is provided with a positive pressure fan air inlet shell 65, and the lower part of the positive pressure fan 62 is provided with a positive pressure fan exhaust shell 64. The positive pressure fan 62 is connected to the air inlet pipe on the dust removal mechanism 31 through a duct 82.

[0085] The above detailed description includes reference to the accompanying drawings, which form a part of the detailed description. By way of illustration, the accompanying drawings show specific embodiments that can implement the present invention. These embodiments are also referred to as "examples" in this article. In addition to those elements shown and described, these examples can also include other elements. The inventors, either with respect to a specific example (or one or more aspects thereof) or with respect to other examples (or one or more aspects thereof) shown or described herein, also foresee examples of using any combination or arrangement of the elements shown or described.

Claims

1. A wafer production dust removal device, comprising: A bottom frame (21), wherein four corners of the bottom frame (21) are provided with upright columns (11) extending upward, an upper frame body (12) is provided at one end of the upright column (11) away from the bottom frame (21), and the bottom frame (21), the upright column (11) and the upper frame body (12) form a mounting frame; characterized in that a dust removal mechanism (31) is provided in the mounting frame, a moving mechanism (51) is provided above the dust removal mechanism (31), a pneumatic assembly (61) is provided above the moving mechanism (51), and the dust removal mechanism (31), the moving mechanism (51) and the pneumatic assembly (61) are arranged in the mounting frame; A supporting transverse plate (13) is provided between the middle portions of two adjacent upright posts (11), another supporting transverse plate (13) is provided between the two upright posts (11) on the opposite side, the two supporting transverse plates (13) are matched and arranged opposite to each other, a transverse carrier plate (14) is provided between the two supporting transverse plates (13), and a part of the pneumatic assembly (61) is provided on the transverse carrier plate (14); The dust removal mechanism (31) includes a dust removal head cavity (32), a bottom plate (33) is provided at the bottom of the dust removal head cavity (32), the dust removal head cavity (32) and the bottom plate (33) are integrally formed, and a frame sealing cover (34) is provided at the top of the dust removal head cavity (32); The top of the dust removal head cavity (32) is provided with an opening, and a frame sealing cover (34) is provided at the opening at the top of the dust removal head cavity (32). A positive pressure chamber (37) is provided in the dust removal head cavity (32), and the lateral side walls of the positive pressure chamber (37) are vertically arranged from the bottom plate (33) in the dust removal head cavity (32). The top of the positive pressure chamber (37) is separated from the top of the dust removal head cavity (32) by a separation distance. The moving mechanism (51) is arranged between the supporting transverse plates (13) on both sides. The moving mechanism (51) includes a concave rail (55) and a motor (52). A concave rail (55) is arranged between the supporting transverse plates (13) on both sides. Both ends of the concave rail (55) are respectively fixedly arranged on the supporting transverse plates (13) on both sides. One end of the concave rail (55) is provided with a motor (52). The other end of the concave rail (55) is provided with a gear (53). An internal toothed belt (54) is sleeved between the output shaft of the motor (52) and the gear (53). The internal toothed belt (54) is arranged in a groove of the concave rail (55). A transmission wheel on the output shaft of the motor (52) is engaged with the internal toothed belt (54) for transmission connection.

2. The wafer production dust removal device according to claim 1, characterized in that: An empty space is provided between the outer walls on both sides of the positive pressure chamber (37) and the inner wall of the dust removal head cavity (32); the cavity between the inner wall of the dust removal head cavity (32) and the outer wall of the positive pressure chamber (37) forms a negative pressure cavity (36); negative pressure cavities (36) are respectively provided on both sides of the positive pressure chamber (37), and the negative pressure cavities (36) on both sides are arranged in the dust removal head cavity (32); A dust blowing slit (48) is provided on the bottom plate (33) of the positive pressure chamber (37) and is provided with two matching variable cross-section rods (49). The variable cross-section rods (49) are arranged in parallel with the dust blowing slit (48). The two variable cross-section rods (49) are respectively arranged on both sides of the dust blowing slit (48). A first suction slit (46) and a second suction slit (47) are provided on the bottom plate (33) of the negative pressure chamber (36) and are transversely penetrated. The first suction slit (46), the second suction slit (47) and the dust blowing slit (48) are arranged in parallel. The first suction slit (46) is arranged close to the dust blowing slit (48), and the second suction slit (47) is arranged away from the dust blowing slit (48). A separation distance is provided between the first suction slit (46) and the second suction slit (47); and a blowing and suction operation distance is provided between the dust blowing slit (48) and the first suction slit (46).

3. The wafer production dust removal device according to claim 1, characterized in that: The positive pressure chamber (37) is provided with a positive pressure sealing cover (35) at one end away from the bottom plate (33), and an air inlet tube (38) extending upward and penetrating the frame sealing cover (34) is provided on the positive pressure sealing cover (35). The air inlet tube (38) is extended above the frame sealing cover (34) at one end away from the positive pressure chamber (37), and the air inlet tube (38) is connected to the positive pressure chamber (37). The height ratio of the positive pressure chamber (37) to the height ratio of the dust removal head cavity (32) is 2 / 3 to 3 / 4:1; A hanging frame (84) is provided on the frame sealing cover (34), and an end of the hanging frame (84) away from the frame sealing cover (34) is provided on the moving mechanism (51); An exhaust tube (39) is provided on the frame sealing cover (34), and the exhaust tube (39) is connected to the negative pressure chamber (36); the positive pressure chamber (37) and the negative pressure chamber (36) are respectively arranged in the dust removal head cavity (32), and the positive pressure chamber (37) and the negative pressure chamber (36) are isolated from each other and do not communicate with each other; The ratio of the width of the dust blowing slit (48): the width of the first suction slit (46): the width of the second suction slit (47) is 1:4-5:4-5; the first suction slit (46) and the second suction slit (47) are of equal width; The ratio of the air volume of the dust blowing slit (48) to the air volume of the first suction slit (46) is 1:1.5-3, and the air volume of the second suction slit (47) is equal to the air volume of the first suction slit (46).

4. The wafer production dust removal device according to claim 1, characterized in that: A supporting middle beam (22) is provided in the middle of the bottom frame (21), and supporting side beams (25) are respectively provided on both sides of the supporting middle beam (22). The supporting middle beam (22) and the supporting side beams (25) are arranged in the frame of the bottom frame (21), and the supporting middle beam (22) and the supporting side beams (25) are arranged at intervals. The bottom surfaces of the supporting middle beam (22) and the supporting side beam (25) are respectively provided with positioning grooves (23) corresponding to the carrier, the two sides of the supporting middle beam (22) are respectively provided with outwardly protruding double-sided tactile wings (24), and the inner sides of the supporting side beams (25) are respectively provided with inwardly protruding inner tactile wings (27); A middle accommodating groove (41) is provided on the bottom plate (33) of the dust removal head cavity (32) and matches the middle support beam (22). Double-side avoidance recesses (42) are provided on both sides of the middle accommodating groove (41) and match the double-side touch wings (24). A side accommodating groove (43) is provided on the bottom plate (33) of the dust removal head cavity (32) and matches the side support beams (25). An inner side avoidance recess (44) is provided on the inner side of the side accommodating groove (43) and matches the inner touch wings (27).

5. The wafer production dust removal device according to claim 2, characterized in that: The variable cross-section rod (49) is provided with an inwardly protruding compressed air convex hull (45), an air inlet spacing D1 is provided between the tops of the two corresponding variable cross-section rods (49), a convex hull spacing D2 is provided between the compressed air convex hulls (45) on the opposite sides of the middle of the two variable cross-section rods (49), and the air inlet spacing D1>the convex hull spacing D2; an air outlet spacing D3 is provided between the bottoms of the two corresponding variable cross-section rods (49), a dust blowing gap (48) opened on the bottom plate (33) is provided with a dust blowing gap D4, and the dust blowing gap D4 is also the width of the dust blowing gap (48); the air inlet spacing D1=the air outlet spacing D3, and the air outlet spacing D3>the dust blowing gap D4; The compressed airflow convex hull (45) is a convex strip type; Or the compressed airflow convex hull (45) is a long strip with an arc-shaped cross section; Or the compressed airflow convex hull (45) is a long strip with a short chordal section; The bottom surface of the positive pressure chamber (37) is provided with a pair of latching plates (83) that match and correspond to the variable cross-section rod (49), and the variable cross-section rod (49) is embedded in the pair of latching plates (83); The ratio of the air inlet spacing D1 to the convex hull spacing D2 is 5 to 10:1; the air inlet spacing D1 = the air outlet spacing D3; the ratio of the dust blowing spacing D4 to the convex hull spacing D2 is 1:1 to 1.

5.

6. The wafer production dust removal device according to claim 1, characterized in that: The bottom of the groove of the concave rail (55) is provided with a slide groove (56) parallel to the inner toothed belt (54); a hanging concave slide seat (57) is sleeved on the concave rail (55); a mounting beam (85) is mounted on the top of the hanging concave slide seat (57); and the hanging concave slide seat (57) is hung on the concave rail (55) through the mounting beam (85); The bottom surface of the groove of the hanging concave slide (57) is provided with a clamping seat (58) that matches the inner toothed belt (54), the inner toothed belt (54) is clamped and set in the clamping seat (58), and the clamping seat (58) and the inner toothed belt (54) are tightly matched; the clamping seat (58) is inserted into the slide groove (56), and a hanging frame (84) is fixedly provided below the hanging concave slide (57).

7. The wafer production dust removal device according to claim 1, characterized in that: The air pressure assembly (61) includes a positive pressure fan (62) and a negative pressure fan (63). A transverse carrier plate (14) is provided between the supporting transverse plates (13) on both sides. The two ends of the transverse carrier plate (14) are respectively fixed on the supporting transverse plates (13) on both sides. A negative pressure high efficiency filter chamber (66) is provided on the transverse carrier plate (14). The negative pressure fan (63) is provided on the negative pressure high efficiency filter chamber (66). The outer side of the negative pressure fan (63) is provided with a negative pressure fan air inlet housing (67). The top of the negative pressure fan (63) is provided with a negative pressure fan exhaust housing (68). The negative pressure high efficiency filter chamber (66) is connected to the exhaust pipe on the dust removal mechanism (31) through a conduit (82). A positive pressure high efficiency filter chamber (69) is provided below the upper frame (12), a positive pressure fan (62) is provided below the positive pressure high efficiency filter chamber (69), the upper portion of the positive pressure fan (62) is provided with a positive pressure fan air inlet housing (65), the lower portion of the positive pressure fan (62) is provided with a positive pressure fan air exhaust housing (64), and the positive pressure fan (62) is connected to the air inlet tube on the dust removal mechanism (31) through a conduit (82).

Images