Corrosion-resistant and wear-resistant metal sealing ring and preparation method thereof

Abstract

The invention relates to a corrosion-resistant and wear-resistant metal sealing ring and a preparation method thereof, and relates to the technical field of metal sealing elements, the corrosion-resistant and wear-resistant metal sealing ring comprises a sealing ring base body, an interface layer and a corrosion-resistant and wear-resistant layer are sequentially arranged on the surface of the sealing ring base body, the interface layer is a carbon-nitrogen interface layer, the corrosion-resistant and wear-resistant layer comprises a TiN layer and a TiON layer, and the TiN layer and the TiON layer are sequentially arranged on the surface of the sealing ring base body. The TiN layer is arranged on the surface of the carbon-nitrogen interface layer, and the TiON layer is arranged on the surface of the TiN layer. By forming the carbon-nitrogen interface layer, the strength of the metal sealing element and the chemical matching performance of the metal sealing element and an anti-corrosion and wear-resistant layer prepared on the rear surface of the metal sealing element can be improved; meanwhile, the carbon-nitrogen interface layer can relieve thermal expansion coefficient mismatch between the metal sealing ring base body and the corrosion-resistant and wear-resistant layer, the interface stress is reduced, the bonding strength between the coating and the metal sealing ring base body is improved, and the wear resistance and corrosion resistance of the metal sealing ring are enhanced; by forming the TiON layer, the friction coefficient of the metal sealing ring is reduced, and meanwhile, the wear resistance and the corrosion resistance of the metal sealing ring are improved.

Description

Technical Field

[0001] The invention relates to the technical field of metal seals, and in particular to an anti-corrosion and wear-resistant metal sealing ring and a preparation method thereof. Background Art

[0002] Metal sealing rings are one of the core components of oil and gas drilling tools such as top drives, pumps and other mechanical devices. With the development of 10,000-meter deep wells, metal sealing rings used in drilling tools are often in high temperature, high pressure, high speed and corrosive environment, which are prone to wear and corrosion, resulting in a rapid decrease in the efficiency of drilling tools and adverse effects on production safety. How to carry out corrosion protection for metal sealing rings under high temperature, high pressure and high speed has become an urgent problem to be solved for oil and gas drilling tools. At present, the main way to improve the corrosion resistance of metal sealing rings is to use corrosion-resistant alloys. However, the cost of corrosion-resistant alloys is relatively high, and there is still severe wear and corrosion under high temperature, high pressure and high speed, resulting in a short service life of metal sealing rings, affecting drilling efficiency and safety of use.

[0003] In view of the above problems, the present invention provides a corrosion-resistant and wear-resistant metal sealing ring and a preparation method thereof. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a corrosion-resistant and wear-resistant metal sealing ring and a preparation method thereof, so as to solve the problem that the existing metal sealing ring has poor wear resistance and corrosion resistance under high speed and corrosive environment.

[0005] The technical solution of the present invention to solve the above technical problems is as follows:

[0006] In a first aspect, a corrosion-resistant and wear-resistant metal sealing ring comprises a sealing ring substrate, wherein an interface layer and an corrosion-resistant and wear-resistant layer are sequentially arranged on the surface of the sealing ring substrate, wherein the interface layer is a carbon-nitrogen interface layer, and the corrosion-resistant and wear-resistant layer comprises a TiN layer and a TiON layer, wherein the TiN layer is arranged on the surface of the carbon-nitrogen interface layer, and the TiON layer is arranged on the surface of the TiN layer.

[0007] The beneficial effects of the present invention are as follows: by forming a carbon-nitrogen interface layer on the surface of the metal seal substrate, the strength of the metal seal and the chemical matching of the anti-corrosion and wear-resistant layer prepared on the rear surface thereof can be improved and enhanced; at the same time, the carbon-nitrogen interface layer can alleviate the mismatch in thermal expansion coefficient between the metal sealing ring substrate and the anti-corrosion and wear-resistant layer, while reducing the interface stress and improving the bonding strength between the coating and the metal sealing ring substrate, thereby enhancing the wear resistance and corrosion resistance of the metal sealing ring; the TiON layer is arranged on the outer layer of the anti-corrosion and wear-resistant layer, thereby further reducing the friction coefficient of the metal sealing ring and improving its wear resistance and corrosion resistance; therefore, the metal sealing ring having the above structure of the present invention has the advantages of good wear resistance and corrosion resistance and long service life.

[0008] Based on the above technical solution, the present invention can also be improved as follows.

[0009] Furthermore, the thickness of the anti-corrosion and wear-resistant layer is 5-10 μm, and the thickness of the TiON layer is 1-3 μm.

[0010] Furthermore, the carbon-nitrogen interface layer has a thickness of 0.2-1 μm.

[0011] Furthermore, the material of the sealing ring substrate includes at least one of carbon steel, stainless steel, and corrosion-resistant alloy.

[0012] In a second aspect, the method for preparing the corrosion-resistant and wear-resistant metal sealing ring comprises the following steps:

[0013] (1) performing carbon-nitrogen (CN) co-penetration treatment on the surface of the sealing ring substrate to form an interface layer on the surface of the sealing ring substrate;

[0014] (2) using a chemical vapor deposition method to deposit a TiN layer on the surface of the interface layer, which is a corrosion-resistant and wear-resistant layer of the precursor;

[0015] (3) A vacuum oxidation method is used to controllably oxidize the anti-corrosion and wear-resistant layer of the precursor, thereby obtaining a TiON layer on the outer surface of the anti-corrosion and wear-resistant layer of the precursor, and obtaining an anti-corrosion and wear-resistant metal sealing ring.

[0016] The beneficial effect of adopting the above-mentioned preparation method is: by adopting the CVD method to set the TiN layer on the surface of the carbon-nitrogen interface layer, it is beneficial to significantly improve the hardness, wear resistance and corrosion resistance of the metal sealing ring, and then the TiN layer is vacuum oxidized by a micro-oxidation process to obtain a TiON layer, which further reduces the friction coefficient of the metal sealing ring and improves its wear resistance and corrosion resistance.

[0017] Further, step (1) includes the following steps: introducing NH3 and C2H2, and carbon-nitrogen co-diffusion on the surface of the sealing ring substrate by low-temperature plasma technology, the co-diffusion temperature is 350-450°C, the time is 25-35min, and an interface layer is formed on the surface of the sealing ring substrate;

[0018] Among them, NH3 and C2H 2。 The dosage can be any amount that meets the requirements. Specifically, the flow rate of the NH3 and the C2H2 is 100 sccm, and the volume ratio of the NH3 and the C2H2 is (2-1):5.

[0019] Step (2) comprises the following steps: under vacuum conditions, in an inert gas, hydrogen and titanium tetrachloride gas flow, using chemical vapor deposition to perform a first deposition process on the sealing ring substrate obtained in step (1) to form a TiN layer, which is the anti-corrosion and wear-resistant layer of the precursor;

[0020] Step (3) includes the following steps: under vacuum conditions, in an argon and oxygen gas flow, vacuum oxidation treatment is performed on the anti-corrosion and wear-resistant layer of the precursor, a TiON layer is obtained on the outer surface of the anti-corrosion and wear-resistant layer of the precursor, and an anti-corrosion and wear-resistant metal sealing ring is obtained (ultimately a TiN-TiON layer is obtained).

[0021] Further, step (2) includes the following specific steps:

[0022] (2-1) placing the sealing ring substrate obtained in step (1) into a vacuum chamber, evacuating the vacuum chamber, and then introducing a mixture of hydrogen and argon;

[0023] (2-2) heating the sealing ring substrate and the vacuum chamber (reaction chamber);

[0024] (2-3) When the temperature of the vacuum chamber is 700-900° C., titanium tetrachloride and nitrogen are introduced to carry out a chemical reaction, thereby forming a TiN layer on the surface of the interface layer, and the deposition pressure is 1×10 4 Pa-5×10 4 Pa, deposition time 5-8h;

[0025] (2-4) After the TiN layer is prepared, the introduction of titanium tetrachloride and nitrogen is stopped, and a controllable cooling program is started to cool the temperature to obtain a corrosion-resistant and wear-resistant layer of the precursor.

[0026] Furthermore, in step (2-1), the vacuum degree of the vacuum chamber is 1×10 -2 Pa-6×10 -2 Pa, 200-400 sccm of the hydrogen and argon mixed gas is introduced, and the volume ratio of the hydrogen and the argon is 1.2-1.8; in step (2-3), 650-850 sccm of the titanium tetrachloride and nitrogen mixed gas is introduced, and the volume ratio of the titanium tetrachloride and the nitrogen is 1.2-1.5; the temperature range of the cooling in step (2-4) is 400-600°C

[0027] Further, step (3) includes the following specific steps:

[0028] (3-1) After obtaining the anti-corrosion and wear-resistant layer of the precursor, argon gas is introduced at 200-400 sccm and kept warm for a period of time; after the heat preservation process is completed, oxygen is introduced and the anti-corrosion and wear-resistant layer of the precursor is subjected to a first oxidation process;

[0029] (3-2) After the first oxidation process is completed, the introduction of oxygen is stopped and the vacuum degree of the vacuum chamber is adjusted to 1×10 1 Pa-6×10 1 Pa; start the heating program to raise the temperature of the vacuum chamber to 650-850° C.; introduce oxygen again to perform a second oxidation process on the anti-corrosion and wear-resistant layer of the precursor;

[0030] (3-3) After the second oxidation process is completed, stop introducing all gases and cool the temperature to room temperature to obtain a corrosion-resistant metal sealing ring.

[0031] Furthermore, in step (3-1), the insulation time is 5-8h, the oxygen flow rate is 100-300sccm, and the first oxidation process time is 5-8h; in step (3-2), the oxygen flow rate is 500-1000sccm, and the oxidation time of the second oxidation process is 1-3h. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 This is a schematic diagram of the structure of the corrosion-resistant and wear-resistant metal sealing ring prepared in Example 1 of the present invention.

[0033] Figure 2 This is a SEM test image of the cross-section of the anti-corrosion and wear-resistant layer of the anti-corrosion and wear-resistant metal sealing ring prepared in Example 1 of the present invention.

[0034] Figure 3 This is a test diagram of the bonding strength of the anti-corrosion and wear-resistant layer on the surface of the anti-corrosion and wear-resistant metal sealing ring substrate prepared in Example 1 of the present invention.

[0035] Figure 4 This is a test chart of the average wear rate of the anti-corrosion and wear-resistant layer on the surface of the anti-corrosion and wear-resistant metal sealing ring substrate prepared in Example 1 of the present invention.

[0036] Figure 5 This is a test chart of the average corrosion rate of the anti-corrosion and wear-resistant layer on the surface of the anti-corrosion and wear-resistant metal sealing ring substrate prepared in Example 1 of the present invention. DETAILED DESCRIPTION

[0037] The principles and features of the present invention are described below, and the examples are only used to explain the present invention and are not used to limit the scope of the present invention. If no specific technology or conditions are specified in the embodiments, the technology or conditions described in the literature in this field or the product instructions are used. If the manufacturer of the reagents or instruments used is not specified, they are all conventional products that can be purchased through regular channels.

[0038] In the following examples, the adhesion test standard is: ISO 20502:2005 Fine ceramics (advanced ceramics, advanced industrial ceramics). Determination of the adhesion of ceramic coatings by scratch test;

[0039] Wear performance test standard: ASTM D1894-01 Test method for static and dynamic friction coefficient of plastic films and sheets;

[0040] Corrosion performance test standard: GB-T 18590-2001 Corrosion pitting assessment method for metals and alloys.

[0041] Example 1

[0042] This embodiment relates to a corrosion-resistant and wear-resistant metal sealing ring, such as Figure 1 , including a sealing ring substrate, the surface of which is sequentially provided with an interface layer and an anti-corrosion and wear-resistant layer, the interface layer being a carbon-nitrogen interface layer, the anti-corrosion and wear-resistant layer comprising a TiN layer and a TiON layer, the TiN layer being provided on the surface of the carbon-nitrogen interface layer, and the TiON layer being provided on the surface of the TiN layer.

[0043] By forming a carbon-nitrogen interface layer on the surface of the metal seal substrate, the strength of the metal seal and the chemical matching with the anti-corrosion and wear-resistant layer prepared on the rear surface can be improved and enhanced; at the same time, the carbon-nitrogen interface layer can alleviate the mismatch in thermal expansion coefficient between the metal sealing ring substrate and the anti-corrosion and wear-resistant layer, while reducing the interface stress and improving the bonding strength between the coating and the metal sealing ring substrate, thereby enhancing the wear resistance and corrosion resistance of the metal sealing ring; the TiON layer is arranged on the outer layer of the anti-corrosion and wear-resistant layer to further reduce the friction coefficient of the metal sealing ring and improve its wear resistance and corrosion resistance. Therefore, the metal sealing ring with the above structure of the present invention has the advantages of good wear resistance and corrosion resistance and long service life.

[0044] Preferably, in this embodiment, the thickness of the anti-corrosion and wear-resistant layer is 5-10 μm, and the thickness of the TiON layer is 1-3 μm.

[0045] Preferably, in this embodiment, the thickness of the carbon-nitrogen interface layer is 0.2-1 μm.

[0046] Preferably, in this embodiment, the material of the sealing ring substrate includes at least one of carbon steel, stainless steel, and corrosion-resistant alloy.

[0047] Example 2

[0048] This embodiment relates to a method for preparing a corrosion-resistant and wear-resistant metal sealing ring, comprising the following steps:

[0049] 1. Formation of carbon-nitrogen interface layer:

[0050] (1-1) grinding and removing impurities from the surface of the metal sealing ring substrate, sandblasting the surface with white corundum sand, and then polishing the surface. The substrate is then ultrasonically cleaned with alcohol. The cleaned metal sealing ring substrate is then placed in an oven, dried at 100° C. for 5 hours, and then placed in a vacuum device;

[0051] (1-2) Use the vacuum pump to evacuate the chamber to a vacuum degree of 10 -4 Pa; then a certain amount of argon gas is introduced, and a high-frequency pulse voltage is applied to form a high-energy argon plasma to clean the surface of the metal sealing ring substrate for 20 minutes;

[0052] (1-3) Formation of carbon-nitrogen interface layer: After cleaning, a certain amount of NH3 and C2H2 are introduced, and the surface of the metal sealing ring substrate is CN-infiltrated by low-temperature plasma technology. The infiltration temperature is 400°C and the CN-infiltrated time is 30 min.

[0053] 2. Formation of anti-corrosion and wear-resistant layer:

[0054] (2-1) Place the metal sealing ring containing the CN interface layer into the CVD device and use a two-stage vacuum pump set to evacuate the CVD device to a vacuum of 2×10 -2 Pa, then hydrogen and argon are introduced at the same time, with a hydrogen flow rate of 150sccm and an argon flow rate of 100sccm; the furnace heating program is started, the heating rate is set to 3℃ / min, and the deposition temperature is 780℃;

[0055] (2-2) A TiN coating is prepared on the surface of a metal sealing ring substrate containing a CN interface layer by chemical vapor deposition, comprising the following steps: a CVD heating device is heated to 600°C at 5°C / min and kept at this temperature for 1 hour, and then heated to 780°C at 3°C / min, and then a coating deposition procedure is entered, titanium tetrachloride, methane, nitrogen and auxiliary gas are introduced, wherein the titanium tetrachloride flow rate is 300 sccm, the nitrogen flow rate is 450 sccm, the deposition time is 6 hours, and the deposition pressure is 4×10 4 Pa;

[0056] (2-3) After the deposition is completed, the CVD device enters a controllable cooling mode, the introduction of titanium tetrachloride and nitrogen is stopped, and the cooling rate is 8°C / min, and the temperature is reduced to 550°C;

[0057] (2-4) When the temperature in the reaction chamber drops to 550°C, argon gas is introduced at 300 sccm for 7 h.

[0058] (2-5) After the heat preservation is completed, high-purity oxygen is introduced to perform a vacuum first oxidation reaction process on the metal sealing ring substrate coated with the TiN layer. The temperature of the first oxidation process is 550° C., the oxygen flow rate is 200 sccm, and the first oxidation process time is 8 hours;

[0059] (2-6) After the first oxidation process is completed, the oxygen supply is stopped and the vacuum degree in the reaction chamber is adjusted to 3×10 1 Pa, and then the reaction chamber is heated again to 830°C;

[0060] (2-7) When the reaction chamber is heated to 830° C., oxygen is introduced to perform a second oxidation process on the metal sealing ring after the first oxidation process. The temperature of the second oxidation process is 830° C., the oxygen flow rate is 800 sccm, and the time of the second oxidation process is 2.5 h;

[0061] (2-8) After the second oxidation process is completed, stop introducing all gases and allow the temperature to naturally drop to room temperature to obtain a corrosion-resistant metal sealing ring.

[0062] Figure 2 This is a cross-sectional morphology test diagram of the corrosion-resistant metal sealing ring obtained in Example 2 of the present application. Figure 2 It can be seen that the anti-corrosion and wear-resistant layer on the surface of the anti-corrosion and corrosion-resistant metal sealing ring substrate obtained in Example 2 is tightly bonded to the metal sealing ring substrate, the coating density is high, and the thickness of the anti-corrosion and wear-resistant layer (TiN-TiON layer) is about 5 microns.

[0063] Figure 3 This is a graph showing the bonding strength test results of the corrosion-resistant and wear-resistant layer on the surface of the corrosion-resistant metal sealing ring substrate prepared in Example 2 of the present application. Figure 3 It can be seen that the bonding strength value of the corrosion-resistant and wear-resistant layer on the surface of the corrosion-resistant metal sealing ring substrate obtained in Example 2 is 55N.

[0064] Figure 4 This is a graph showing the wear performance test results of the corrosion-resistant metal sealing ring prepared in Example 2 of the present application. Figure 4 It can be seen that the average wear rate of the corrosion-resistant metal sealing ring obtained in Example 2 is 2.5×10 -6 mm 3 N -1 m -1 .

[0065] Figure 5 This is a graph showing the average corrosion rate test results of the anti-corrosion and corrosion-resistant metal sealing ring obtained in Example 2 of the present application. Figure 5 It can be seen that the average corrosion rate of the corrosion-resistant metal sealing ring obtained in Example 2 is 0.0033 mm / a.

[0066] Example 3

[0067] The only difference between this embodiment and embodiment 2 is that in step (1-3), the co-infiltration temperature is 800°C.

[0068] The binding force of the anti-corrosion and wear-resistant metal sealing ring obtained in this embodiment is 42N, and the average wear rate is 5.5×10 - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0065mm / a.

[0069] Example 4

[0070] The only difference between this embodiment and embodiment 2 is that in step (2-1), the deposition temperature is 650°C.

[0071] The binding force of the anti-corrosion and wear-resistant metal sealing ring obtained in this embodiment is 38N, and the average wear rate is 8.3×10 - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0081mm / a.

[0072] Example 5

[0073] The only difference between this embodiment and embodiment 2 is that in step (2-1), the deposition temperature is 900°C.

[0074] The binding force of the anti-corrosion and wear-resistant metal sealing ring obtained in this embodiment is 41N, and the average wear rate is 6.7×10 - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0095mm / a.

[0075] Example 6

[0076] The only difference between this embodiment and embodiment 2 is that in step (2-5), the temperature of the first oxidation process is 450°C.

[0077] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a binding force of 35N and an average wear rate of 9.7×10 - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0120mm / a.

[0078] Example 7

[0079] The only difference between this embodiment and embodiment 2 is that in step (2-5), the temperature of the first oxidation process is 650°C.

[0080] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a binding force of 43N and an average wear rate of 5.1×10 - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0056mm / a.

[0081] Example 8

[0082] The only difference between this embodiment and embodiment 2 is that in step (2-5), the oxygen flow rate is 100 sccm.

[0083] The binding force of the anti-corrosion and wear-resistant metal sealing ring obtained in this embodiment is 46N, and the average wear rate is 4.3×10 - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0049mm / a.

[0084] Example 9

[0085] The only difference between this embodiment and embodiment 2 is that in step (2-7), the oxygen flow rate is 500 sccm.

[0086] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a binding force of 40N and an average wear rate of 4.5×10 - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0052mm / a.

[0087] Example 10

[0088] The only difference between this embodiment and embodiment 2 is that in step (2-7), the temperature of the second oxidation process is 750°C.

[0089] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a binding force of 45N and an average wear rate of 4.2×10 - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0041mm / a.

[0090] Embodiment 11

[0091] The only difference between this embodiment and embodiment 2 is that in step (2-7), the temperature of the second oxidation process is 930°C.

[0092] The binding force of the anti-corrosion and wear-resistant metal sealing ring obtained in this embodiment is 43N, and the average wear rate is 4.8×10 - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0059mm / a.

[0093] Example 12

[0094] The only difference between this embodiment and embodiment 2 is that in step (2-7), the oxygen flow rate is 600 sccm.

[0095] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a binding force of 48N and an average wear rate of 3.2×10 - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0040mm / a.

[0096] Embodiment 13

[0097] The only difference between this embodiment and embodiment 2 is that in step (2-7), the oxygen flow rate is 1000 sccm°C.

[0098] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a binding force of 50N and an average wear rate of 3.4×10 - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0039mm / a.

[0099] Comparative Example 1

[0100] The only difference between this embodiment and embodiment 2 is that in step (2-1), the deposition temperature is 930°C.

[0101] The binding force of the anti-corrosion and wear-resistant metal sealing ring obtained in this embodiment is 32N, and the average wear rate is 12.3×10 - 6 mm 3 N -1 m -1 The average corrosion rate is 0.7347mm / a.

[0102] Comparative Example 2

[0103] The only difference between this embodiment and embodiment 2 is that in step (2-5), the first oxidation temperature is 400°C.

[0104] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a binding force of 34N and an average wear rate of 11.5×10 - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0.6522mm / a.

[0105] In summary, it can be seen that by forming a carbon-nitrogen interface layer on the surface of the metal seal substrate, the strength of the metal seal and the chemical matching with the anti-corrosion and wear-resistant layer prepared on the rear surface can be improved and enhanced; at the same time, the carbon-nitrogen interface layer can alleviate the mismatch of thermal expansion coefficients between the metal sealing ring substrate and the anti-corrosion and wear-resistant layer, while reducing the interface stress and improving the bonding strength between the coating and the metal sealing ring substrate, thereby enhancing the wear resistance and corrosion resistance of the metal sealing ring; the TiON layer is arranged on the outer layer of the anti-corrosion and wear-resistant layer to further reduce the friction coefficient of the metal sealing ring and improve its wear resistance and corrosion resistance. Therefore, the metal sealing ring with the above structure of the present invention has the advantages of good wear resistance and corrosion resistance and long service life.

[0106] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A corrosion-resistant and wear-resistant metal sealing ring, comprising a sealing ring substrate, characterized in that: The surface of the sealing ring substrate is sequentially provided with an interface layer and an anti-corrosion and wear-resistant layer, the interface layer is a carbon-nitrogen interface layer, the anti-corrosion and wear-resistant layer includes a TiN layer and a TiON layer, the TiN layer is provided on the surface of the carbon-nitrogen interface layer, and the TiON layer is provided on the surface of the TiN layer.

2. The corrosion-resistant and wear-resistant metal sealing ring according to claim 1 is characterized in that: The thickness of the anti-corrosion and wear-resistant layer is 5-10 μm, and the thickness of the TiON layer is 1-3 μm.

3. The corrosion-resistant and wear-resistant metal sealing ring according to claim 1 or 2, characterized in that: The thickness of the carbon-nitrogen interface layer is 0.2-1 μm.

4. The corrosion-resistant and wear-resistant metal sealing ring according to claim 1 or 2, characterized in that: The material of the sealing ring substrate includes at least one of carbon steel, stainless steel and corrosion-resistant alloy.

5. The method for preparing the corrosion-resistant and wear-resistant metal sealing ring according to any one of claims 1 to 4, characterized in that: The steps include: (1) performing carbon-nitrogen co-diffusion treatment on the surface of the sealing ring substrate to form an interface layer on the surface of the sealing ring substrate; (2) using a chemical vapor deposition method to deposit a TiN layer on the surface of the interface layer, which is a corrosion-resistant and wear-resistant layer of the precursor; (3) A vacuum oxidation method is used to controllably oxidize the anti-corrosion and wear-resistant layer of the precursor, thereby obtaining a TiON layer on the outer surface of the anti-corrosion and wear-resistant layer of the precursor, and obtaining an anti-corrosion and wear-resistant metal sealing ring.

6. The method for preparing the corrosion-resistant and wear-resistant metal sealing ring according to claim 5, characterized in that: Step (1) comprises the following steps: introducing NH3 and C2H2, and carbon-nitrogen co-diffusion is performed on the surface of the sealing ring substrate by low-temperature plasma technology, the co-diffusion temperature is 350-450°C, and the time is 25-35 minutes, so as to form an interface layer on the surface of the sealing ring substrate; Step (2) comprises the following steps: under vacuum conditions, in an inert gas, hydrogen and titanium tetrachloride gas flow, using chemical vapor deposition to perform a first deposition process on the sealing ring substrate obtained in step (1) to form a TiN layer, which is the anti-corrosion and wear-resistant layer of the precursor; Step (3) includes the following steps: under vacuum conditions, in an argon and oxygen gas flow, vacuum oxidation treatment is performed on the anti-corrosion and wear-resistant layer of the precursor to obtain a TiON layer on the outer surface of the anti-corrosion and wear-resistant layer of the precursor, thereby obtaining an anti-corrosion and wear-resistant metal sealing ring.

7. The method for preparing the corrosion-resistant and wear-resistant metal sealing ring according to claim 6, characterized in that: Step (2) includes the following specific steps: (2-1) placing the sealing ring substrate obtained in step (1) into a vacuum chamber, evacuating the vacuum chamber, and then introducing a mixture of hydrogen and argon; (2-2) heating the sealing ring substrate and the vacuum chamber; (2-3) When the temperature of the vacuum chamber is 700-900° C., titanium tetrachloride and nitrogen are introduced to carry out a chemical reaction, thereby forming a TiN layer on the surface of the interface layer, and the deposition pressure is 1×10 4 Pa-5×10 4 Pa, deposition time 5-8h; (2-4) After the TiN layer is prepared, the introduction of titanium tetrachloride and nitrogen is stopped, and a controllable cooling program is started to cool the temperature to obtain a corrosion-resistant and wear-resistant layer of the precursor.

8. The method for preparing the corrosion-resistant and wear-resistant metal sealing ring according to claim 7, characterized in that: In step (2-1), the vacuum degree of the vacuum chamber is 1×10 -2 Pa-6×10 -2 Pa, 200-400sccm of the hydrogen and argon mixed gas is introduced, and the volume ratio of the hydrogen to the argon is 1.2-1.8; in step (2-3), 650-850sccm of the titanium tetrachloride and nitrogen mixed gas is introduced, and the volume ratio of the titanium tetrachloride to the nitrogen is 1.2-1.5; the temperature range of the cooling in step (2-4) is 400-600°C.

9. The method for preparing the corrosion-resistant and wear-resistant metal sealing ring according to claim 6, characterized in that: Step (3) includes the following specific steps: (3-1) After obtaining the anti-corrosion and wear-resistant layer of the precursor, argon gas is introduced at 200-400 sccm and kept warm for a period of time; after the heat preservation process is completed, oxygen is introduced and the anti-corrosion and wear-resistant layer of the precursor is subjected to a first oxidation process; (3-2) After the first oxidation process is completed, the introduction of oxygen is stopped and the vacuum degree of the vacuum chamber is adjusted to 1×10 1 Pa-6×10 1 Pa; start the heating program to raise the temperature of the vacuum chamber to 650-850° C.; introduce oxygen again to perform a second oxidation process on the anti-corrosion and wear-resistant layer of the precursor; (3-3) After the second oxidation process is completed, stop introducing all gases and cool the temperature to room temperature to obtain a corrosion-resistant metal sealing ring.

10. The method for preparing the corrosion-resistant and wear-resistant metal sealing ring according to claim 9, characterized in that: In step (3-1), the insulation time is 5-8h, the oxygen flow rate is 100-300sccm, and the first oxidation process time is 5-8h; in step (3-2), the oxygen flow rate is 500-1000sccm, and the oxidation time of the second oxidation process is 1-3h.

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