High-speed driving unit, double-station driving module and operation device

Abstract

The invention relates to the technical field of semiconductor chip testing, and particularly discloses a high-speed driving unit, a double-station driving module and an operation device, the high-speed driving unit comprises a vertical sliding rail, the lower end of the vertical sliding rail is used for being connected with an execution mechanism; the driving end of the horizontal direct-drive mechanism is connected with the vertical sliding rail, and the horizontal direct-drive mechanism drives the vertical sliding rail to reciprocate in the horizontal direction; the horizontal sliding rail is in sliding connection with the upper end of the vertical sliding rail in the horizontal direction; and the vertical direct-drive mechanism is fixedly arranged relative to the horizontal direct-drive mechanism, the driving end of the vertical direct-drive mechanism is connected with the horizontal sliding rail, and the horizontal sliding rail is driven to drive the vertical sliding rail to reciprocate in the vertical direction. According to the high-speed driving unit, the double-station driving module and the operation device, the problem that the production efficiency is low due to the fact that an existing driving unit is low in movement speed can be effectively solved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor chip testing, and in particular to a high-speed drive unit, a double-station drive module and an operating device. Background Art

[0002] When testing semiconductor chips, actuators such as suction cups or cameras are often used. Generally, the actuators are mounted on a drive unit that drives the actuator to perform translational motion. The drive unit drives the suction cup or camera to move, so as to pick up the chip or perform visual inspection on the chip.

[0003] Existing drive units usually include:

[0004] A vertical direct drive assembly, wherein a driving end of the vertical direct drive assembly is connected to the actuator to drive the actuator to reciprocate in a vertical direction;

[0005] A horizontal direct drive assembly, wherein the driving end of the horizontal direct drive assembly is connected to the vertical direct drive assembly to drive the vertical direct drive assembly and the actuator to reciprocate in the horizontal direction.

[0006] In the prior art, both the horizontal direct drive assembly and the vertical direct drive assembly are motor screw modules. Since the entire vertical direct drive assembly is installed at the driving end of the horizontal direct drive assembly, when the horizontal direct drive assembly drives the actuator to move horizontally, it needs to drive not only the actuator itself but also the motor and screw of the vertical direct drive assembly to move horizontally.

[0007] The motor is heavy, and when it drives the motor of the vertical direct-drive component to move, it greatly increases the workload of the horizontal direct-drive component, making it difficult for the horizontal direct-drive component to drive the actuator to move at high speed, which to a certain extent limits the further improvement of production efficiency.

[0008] Therefore, it is necessary to improve the existing drive unit to solve the problem of slow movement speed and low production efficiency.

[0009] The above information disclosed in this Background section is included only for enhancement of understanding of the background of the present disclosure and therefore it may contain information that does not form the prior art that is currently known to a person of ordinary skill in the art. Summary of the invention

[0010] One object of the present invention is to provide a high-speed drive unit, a double-station drive module and an operating device, which can effectively solve the problem of slow movement speed of the existing drive unit, resulting in low production efficiency.

[0011] To achieve the above objectives, in a first aspect, the present invention provides a high-speed drive unit, comprising:

[0012] A vertical slide rail, the lower end of which is used to connect the actuator;

[0013] A horizontal direct drive mechanism, wherein a driving end of the horizontal direct drive mechanism is connected to the vertical slide rail to drive the vertical slide rail to reciprocate in a horizontal direction;

[0014] A horizontal slide rail, wherein the horizontal slide rail is slidably connected to the upper end of the vertical slide rail in a horizontal direction;

[0015] A vertical direct drive mechanism is fixedly arranged relative to the horizontal direct drive mechanism, and a driving end of the vertical direct drive mechanism is connected to the horizontal slide rail, driving the horizontal slide rail to drive the vertical slide rail to reciprocate in the vertical direction.

[0016] Optionally, the horizontal direct drive mechanism includes:

[0017] Horizontal base plate;

[0018] A horizontal slider, wherein the horizontal slider is slidably connected to the horizontal bottom plate in a horizontal direction, and the horizontal slider is slidably connected to the vertical slide rail in a vertical direction;

[0019] A horizontal screw rod, which is rotatably mounted on the horizontal bottom plate and is threaded through the horizontal slider;

[0020] A horizontal motor is rotatably connected to the horizontal lead screw to drive the horizontal slider to slide back and forth relative to the horizontal bottom plate.

[0021] Optionally, the vertical direct drive mechanism includes:

[0022] A vertical bottom plate, the vertical bottom plate is fixedly mounted on the horizontal bottom plate, wherein the horizontal slide rail is slidably connected to the vertical bottom plate in a vertical direction, and the horizontal slide rail is slidably connected to the vertical slide rail in a horizontal direction;

[0023] A vertical screw rod, which is rotatably mounted on the vertical bottom plate and is threaded through the horizontal slide rail to drive the horizontal slide rail to slide back and forth relative to the vertical bottom plate;

[0024] A vertical motor is rotatably connected to the vertical lead screw to drive the horizontal slide rail to slide back and forth relative to the horizontal bottom plate.

[0025] Optionally, the horizontal motor and the horizontal screw rod and / or the vertical motor and the vertical screw rod are connected via a belt and pulley assembly or a gear assembly.

[0026] Optionally, a quick-release joint for detachably connecting to the actuator is provided at the lower end of the vertical slide rail.

[0027] Optionally, the quick-release connector is provided with a snap-fitting member for snap-fitting connection with the actuator.

[0028] Optionally, the quick-release connector is provided with a magnet for magnetically connecting to the actuator.

[0029] In a second aspect, a dual-station driving module is provided, comprising a module bottom plate, and two high-speed driving units located on the module bottom plate.

[0030] Optionally, the two high-speed drive units are arranged rotationally symmetrically around the vertical axis.

[0031] In a third aspect, a working device is provided, comprising the high-speed drive unit or the double-station drive module, and an actuator connected to a vertical slide rail.

[0032] The beneficial effects of the present invention are: providing a high-speed drive unit, a double-station drive module and an operating device, when it is necessary to drive the actuator to move up and down, the vertical direct drive mechanism drives the horizontal slide rail to drive the vertical slide rail to move up and down in the vertical direction; when it is necessary to drive the actuator to move left and right, the horizontal direct drive mechanism drives the vertical slide rail to move left and right;

[0033] In the above process, neither the horizontal direct-drive mechanism nor the vertical direct-drive mechanism needs to follow the actuator to perform translational movement. The direct-drive mechanism has a smaller workload and a faster driving speed, thereby improving the execution efficiency of the actuator.

[0034] Therefore, the high-speed drive unit, double-station drive module and operating device provided by the present invention can effectively solve the problem of slow movement speed of the existing drive unit, which leads to low production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0036] Figure 1 A schematic diagram of the top structure of a dual-station drive module provided in an embodiment;

[0037] Figure 2 A schematic diagram of the bottom structure of a dual-station drive module provided in an embodiment;

[0038] Figure 3 A schematic structural diagram of a high-speed drive unit provided in an embodiment.

[0039] In the figure:

[0040] 100. module base plate; 200. high-speed drive unit;

[0041] 1. Vertical slide rail;

[0042] 2. Horizontal direct drive mechanism; 201. Horizontal bottom plate; 202. Horizontal slider; 203. Horizontal lead screw; 204. Horizontal motor;

[0043] 3. Horizontal slide rail;

[0044] 4. Vertical direct drive mechanism; 401. Vertical base plate; 402. Vertical lead screw; 403. Vertical motor;

[0045] 5. Quick release connector; 501. Fastener. DETAILED DESCRIPTION

[0046] The reference to "embodiment" in the present invention means that the specific features, structures or characteristics described in conjunction with the embodiment may be included in at least one embodiment of the present invention. The word "embodiment" appearing in various places in the specification does not necessarily refer to the same embodiment, nor does it particularly limit its independence or association with other embodiments. In principle, in the present invention, as long as there is no technical contradiction or conflict, the various technical features mentioned in each embodiment can be combined in any way to form a corresponding implementable technical solution.

[0047] Unless otherwise defined, the technical terms used herein have the same meanings as those generally understood by those skilled in the art to which the present invention belongs; the use of relevant terms herein is only for describing specific embodiments and is not intended to limit the present invention.

[0048] In the description of the present invention, the term "and / or" is an expression used to describe the logical relationship between objects, indicating that three relationships may exist, for example, A and / or B, which means: A exists, B exists, and A and B exist at the same time. In addition, the character " / " in this article generally indicates that the objects before and after are in a logical relationship of "or".

[0049] In the present invention, terms such as "first" and "second" are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship of quantity, priority or sequence between these entities or operations.

[0050] Without further restrictions, in the present invention, the words "include", "comprises", "has" or other similar expressions used in sentences are intended to cover non-exclusive inclusion. These expressions do not exclude the presence of additional elements in the process, method or product including the elements, so that the process, method or product including a series of elements may include not only those limited elements, but also other elements not explicitly listed, or also include elements inherent to such process, method or product.

[0051] Similar to the understanding in the Examination Guidelines, in the present invention, expressions such as "greater than", "less than", "exceed" and the like are understood to exclude the number itself; expressions such as "above", "below", "within" and the like are understood to include the number itself. In addition, in the description of the embodiments of the present invention, the meaning of "multiple" is more than two (including two), and similar expressions related to "multiple" are also understood in this way, such as "multiple groups", "multiple times", etc., unless otherwise clearly and specifically limited.

[0052] In the description of the embodiments of the present invention, the space-related expressions used, such as "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "vertical", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicate the orientation or position relationship based on the orientation or position relationship shown in the specific embodiments or drawings, and are only for the convenience of describing the specific embodiments of the present invention or facilitating the reader's understanding, and do not indicate or imply that the referred device or component must have a specific position, a specific orientation, or be constructed or operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present invention.

[0053] Unless otherwise expressly specified or limited, in the description of the embodiments of the present invention, the terms such as "install", "connect", "connect", "fix", "set" and the like used should be understood in a broad sense. For example, the "connection" can be a fixed connection, a detachable connection, or an integrated setting; it can be a mechanical connection, an electrical connection, or a communication connection; it can be a direct connection, or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. For those skilled in the art of the technical field to which the present invention belongs, the specific meanings of the above terms in the embodiments of the present invention can be understood according to the specific circumstances.

[0054] The present invention provides a high-speed drive unit, a dual-station drive module and an operating device, which are suitable for automated production line scenarios that require high-speed and high-precision chip transfer or visual inspection, etc., and can effectively solve the problem of slow movement speed of existing drive units, resulting in low production efficiency.

[0055] In this embodiment, the operating device includes a high-speed driving unit or a double-station driving module, and an actuator connected to the high-speed driving unit or the double-station driving module.

[0056] Optionally, the actuator includes at least one of a suction cup, a clamp or a camera to suck, clamp or visually inspect the chip.

[0057] See also Figure 1 and Figure 2 In this embodiment, the double-station driving module includes a module base plate 100 and two high-speed driving units 200 located on the module base plate 100 .

[0058] See also Figure 3 The high-speed driving unit 200 includes a vertical slide rail 1, a horizontal direct driving mechanism 2, a horizontal slide rail 3, and a vertical direct driving mechanism 4.

[0059] The lower end of the vertical slide rail 1 is used to connect the actuator. The driving end of the horizontal direct drive mechanism 2 is connected to the vertical slide rail 1, driving the vertical slide rail 1 to reciprocate in the horizontal direction. The horizontal slide rail 3 is slidably connected to the upper end of the vertical slide rail 1 in the horizontal direction. The vertical direct drive mechanism 4 is fixedly arranged relative to the horizontal direct drive mechanism 2, and the driving end of the vertical direct drive mechanism 4 is connected to the horizontal slide rail 3, driving the horizontal slide rail 3 to drive the vertical slide rail 1 to reciprocate in the vertical direction.

[0060] The high-speed drive unit 200, the double-station drive module and the operating device provided in this embodiment, when it is necessary to drive the actuator to move up and down, the vertical direct drive mechanism 4 drives the horizontal slide rail 3 to drive the vertical slide rail 1 to move up and down in the vertical direction; when it is necessary to drive the actuator to move left and right, the horizontal direct drive mechanism 2 drives the vertical slide rail 1 to move left and right;

[0061] In the above process, neither the horizontal direct-drive mechanism 2 nor the vertical direct-drive mechanism 4 needs to follow the actuator to perform translational movement. The direct-drive mechanism has a smaller workload and a faster driving speed, thereby improving the execution efficiency of the actuator.

[0062] Therefore, the high-speed drive unit 200, the double-station drive module and the operating device provided by the present invention can effectively solve the problem that the existing drive unit has a slow movement speed, resulting in low production efficiency.

[0063] In this embodiment, the horizontal direct-drive mechanism 2 includes a horizontal base plate 201 , a horizontal slider 202 , a horizontal lead screw 203 , and a horizontal motor 204 .

[0064] The horizontal slider 202 is slidably connected to the horizontal base plate 201 in the horizontal direction, and the horizontal slider 202 is slidably connected to the vertical slide rail 1 in the vertical direction; the horizontal screw rod 203 is rotatably installed on the horizontal base plate 201 and threaded through the horizontal slider 202; the horizontal motor 204 is rotatably connected to the horizontal screw rod 203 to drive the horizontal slider 202 to slide reciprocatingly relative to the horizontal base plate 201.

[0065] The vertical direct drive mechanism 4 includes a vertical base plate 401 , a vertical lead screw 402 , and a vertical motor 403 .

[0066] The vertical base plate 401 is fixed on the horizontal base plate 201; the horizontal slide rail 3 is slidably connected to the vertical base plate 401 in the vertical direction, and the horizontal slide rail 3 is slidably connected to the vertical slide rail 1 in the horizontal direction; the vertical screw rod 402 is rotatably installed on the vertical base plate 401, and is threaded through the horizontal slide rail 3 to drive the horizontal slide rail 3 to slide back and forth relative to the vertical base plate 401; the vertical motor 403 is rotatably connected to the vertical screw rod 402 to drive the horizontal slide rail 3 to slide back and forth relative to the horizontal base plate 201.

[0067] When the actuator moves, the horizontal motor 204 and the vertical motor 403 do not need to move with the actuator. Therefore, the workload of the horizontal motor 204 and the vertical motor 403 is small and the driving speed is fast, thereby improving the execution efficiency of the actuator.

[0068] Optionally, the horizontal motor 204 and the horizontal screw rod 203 and / or the vertical motor 403 and the vertical screw rod 402 are connected via a belt and pulley assembly or a gear assembly.

[0069] In this embodiment, the lower end of the vertical slide rail 1 is provided with a quick-release joint 5 for detachably connecting with the actuator. By providing the quick-release joint 5, the actuator and the vertical slide rail 1 can be quickly connected and disassembled, which facilitates the replacement and maintenance of the actuator and improves the working efficiency.

[0070] Optionally, the quick-release connector 5 is provided with a snap-fitting member 501 for snap-fitting connection with the actuator, and / or the quick-release connector 5 is provided with a magnet for magnetically connecting with the actuator.

[0071] In this embodiment, the two high-speed drive units 200 are arranged rotationally symmetrically around the vertical axis. The rotationally symmetrical design is conducive to the concave-convex matching of the two high-speed drive units 200, thereby improving the overall structural compactness and reducing the floor space.

[0072] In summary, the high-speed drive unit 200, the dual-station drive module, and the operating device provided in this embodiment have the following advantages:

[0073] ① High-speed performance: The horizontal motor 204 and the vertical motor 403 do not need to move with the actuator, which reduces the workload of the motor, improves the driving speed and accuracy, realizes high-speed and precise movement of the actuator, and effectively improves production efficiency.

[0074] ② Compact structure: The central rotational symmetric design of the double-station drive module makes the structure more compact, reduces the floor space, and is conducive to the layout of the production line.

[0075] ③Easy to maintain: The setting of the quick-release joint 5 makes the connection and disassembly of the actuator more convenient, and is easy to maintain and replace.

[0076] ④Flexibility: The actuator can be a suction cup, a gripper or a camera, which is suitable for a variety of operational needs, such as chip transfer, visual inspection, etc.

[0077] ⑤ Strong scalability: The design of the double-station drive module is easy to expand. The drive unit can be increased or decreased according to production needs to adapt to production lines of different sizes.

[0078] It should be noted that the linear drive mechanism mentioned in the present invention may be a cylinder, a hydraulic cylinder, an electric cylinder or a motor screw linear module, etc., and the rotary drive mechanism mentioned may be a brushed motor, a brushless motor, or a rotary cylinder, etc. The present invention does not limit the specific structural forms of the linear drive mechanism and the rotary drive mechanism.

[0079] Finally, it should be noted that although the above embodiments have been described in the specification and drawings of this application, this does not limit the scope of patent protection of this application. All technical solutions generated by replacing or modifying equivalent structures or equivalent processes based on the essential concept of this application using the contents recorded in the specification and drawings of this application, as well as directly or indirectly implementing the technical solutions of the above embodiments in other related technical fields, are included in the scope of patent protection of this application.

Claims

1. A high-speed drive unit, characterized in that: include: A vertical slide rail (1), the lower end of the vertical slide rail (1) being used for connecting an actuator; A horizontal direct drive mechanism (2), wherein a driving end of the horizontal direct drive mechanism (2) is connected to the vertical slide rail (1) to drive the vertical slide rail (1) to reciprocate in a horizontal direction; A horizontal slide rail (3), wherein the horizontal slide rail (3) is slidably connected to the upper end of the vertical slide rail (1) in a horizontal direction; A vertical direct drive mechanism (4), wherein the vertical direct drive mechanism (4) is fixedly arranged relative to the horizontal direct drive mechanism (2), and a driving end of the vertical direct drive mechanism (4) is connected to the horizontal slide rail (3), driving the horizontal slide rail (3) to drive the vertical slide rail (1) to reciprocate in the vertical direction.

2. The high-speed drive unit according to claim 1, characterized in that: The horizontal direct drive mechanism (2) comprises: horizontal bottom plate (201); A horizontal sliding block (202), wherein the horizontal sliding block (202) is connected to the horizontal bottom plate (201) in a sliding manner in a horizontal direction, and the horizontal sliding block (202) is connected to the vertical sliding rail (1) in a sliding manner in a vertical direction; A horizontal screw rod (203), the horizontal screw rod (203) is rotatably mounted on the horizontal base plate (201) and is threadedly passed through the horizontal slider (202); A horizontal motor (204) is rotatably connected to the horizontal screw rod (203) to drive the horizontal slider (202) to slide back and forth relative to the horizontal bottom plate (201).

3. The high-speed drive unit according to claim 2, characterized in that: The vertical direct drive mechanism (4) comprises: A vertical bottom plate (401), the vertical bottom plate (401) being fixedly mounted on the horizontal bottom plate (201), wherein the horizontal slide rail (3) is slidably connected to the vertical bottom plate (401) along a vertical direction, and the horizontal slide rail (3) is slidably connected to the vertical slide rail (1) along a horizontal direction; A vertical screw rod (402), the vertical screw rod (402) is rotatably mounted on the vertical base plate (401) and is threadedly passed through the horizontal slide rail (3) to drive the horizontal slide rail (3) to slide back and forth relative to the vertical base plate (401); A vertical motor (403) is rotatably connected to the vertical lead screw (402) to drive the horizontal slide rail (3) to slide back and forth relative to the horizontal bottom plate (201).

4. The high-speed drive unit according to claim 3, characterized in that: The horizontal motor (204) and the horizontal screw rod (203) and / or the vertical motor (403) and the vertical screw rod (402) are connected via a belt and pulley assembly or a gear assembly.

5. The high-speed drive unit according to claim 1, characterized in that: The lower end of the vertical slide rail (1) is provided with a quick-release joint (5) for detachably connecting with the actuator.

6. The high-speed drive unit according to claim 5, characterized in that: The quick-release joint (5) is provided with a snap-fitting member (501) for snap-fitting connection with the actuator.

7. The high-speed drive unit according to claim 5, characterized in that: The quick-release connector (5) is provided with a magnet for magnetically connecting with the actuator.

8. A dual-station drive module, characterized in that: It comprises a module bottom plate (100), and two high-speed drive units (200) according to any one of claims 1 to 7, which are located on the module bottom plate (100).

9. The double-station drive module according to claim 8, characterized in that: The two high-speed drive units (200) are arranged rotationally symmetrically around the center of the vertical axis.

10. A working device, characterized in that: It comprises the high-speed drive unit (200) described in any one of claims 1 to 7 or the double-station drive module described in any one of claims 8 to 9, and an actuator connected to the vertical slide rail (1).

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