An apparatus and method for measuring the inner surface angle of an optical device in a high-speed optical module

Abstract

The present invention discloses a device and method for measuring the inner surface angle of an optical device in a high-speed optical module, including a vibration isolation table, on which a light receiving positioning plate base, a mounting base, a visual recognition unit, and a light receiving positioning plate are provided; on the light receiving positioning plate base, a laser output head, a telecentric objective lens, and a multi-axis adjustment coupling frame for adjusting the relative position between the laser output head and the telecentric objective lens are provided, and on the mounting base, a multi-axis adjustment unit and a metal part fixing clamp connected to the displacement end of the multi-axis adjustment unit are provided; on the light receiving positioning plate, an avoidance hole is provided, and the light beam emitted by the laser output head passes through the telecentric objective lens, is focused, passes through the avoidance hole, and then is transmitted to a metal part located in the metal part fixing clamp. The light beam passes through the central hole of the metal part and is reflected by the surface of a ceramic or glass device inside the metal part, and then is received by the light receiving positioning plate. The present invention calculates the angle of the inner surface of the optical device and determines the positions of its high side and low side at the same time.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical modules, and particularly relates to a device and method for measuring the inner surface angle of an optical device in a high-speed optical module. Background Art

[0002] With the vigorous development of artificial intelligence technology, the demand for computing power in its applications has shown an explosive growth. Against this background, the construction scale of data centers and supercomputer centers has been continuously expanding, which has directly promoted the continuous expansion of the high-speed optical module market. In recent years, the global demand for high-speed optical modules has risen sharply. Correspondingly, the demand for various optical devices, which are the core components of high-speed optical modules, has also been increasing vigorously.

[0003] In an optical device, due to the structural characteristics of the receiver, its ferrule is encapsulated inside a metal part. This special structural design brings detection difficulties: if traditional detection methods such as microscopes are used, it is impossible to effectively observe and measure the end face angle and the orientation of the high edge. Especially in some application scenarios, the receiver needs to be docked with an FSI isolator, which requires accurate knowledge of the angle and the high and low edge orientation information of its inner surface to ensure the correctness of the docking direction. However, there is currently no mature detection device in the industry that can reliably measure the angle parameters and the high and low edge positions of the ferrule inside the metal part of the receiver.

[0004] Therefore, there is an urgent need to develop a device for measuring the inner surface angle of an optical device in a high-speed optical module to solve the above technical problems. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a device and method for measuring the inner surface angle of an optical device in a high-speed optical module to address the technical deficiencies in the prior art. It can calculate the angle of the inner surface of the optical device and determine the positions of its high side and low side by visually identifying the position and angle of the reflected light through a CCD.

[0006] The technical solution adopted by the present invention to solve its technical problems is as follows: The present invention discloses a device for measuring the inner surface angle of an optical device in a high-speed optical module, including a vibration isolation table. A light receiving positioning plate base, a mounting base, and a vision recognition unit are arranged on the vibration isolation table. A light receiving positioning plate is arranged between the light receiving positioning plate base and the mounting base, and the light receiving positioning plate is within the imaging range of the vision recognition unit. A laser output head, a telecentric objective lens, and a multi-axis adjustment coupling frame for adjusting the relative position between the laser output head and the telecentric objective lens are arranged on the light receiving positioning plate base. A multi-axis adjustment unit and a metal part fixing fixture connected to the displacement end of the multi-axis adjustment unit are arranged on the mounting base. An avoidance hole is arranged on the light receiving positioning plate. The light beam emitted by the laser output head passes through the telecentric objective lens, is focused and passes through the avoidance hole, and then is transmitted to a metal part located in the metal part fixing fixture. The light beam passes through the central hole of the metal part and is reflected by the surface of a ceramic or glass device inside the metal part, and then is received by the light receiving positioning plate.

[0007] In a preferred implementation of the present invention, the multi-axis adjustment coupling frame includes a bottom plate. A fixed vertical plate, a first plate member connected to the vertical plate, and a second plate member displaceable along the X-axis direction are arranged on the bottom plate. The laser output head displaceable along the Z-axis and Y-axis directions is arranged on the first plate member. A screw jack for realizing the rotation of the first plate around the Z-axis is arranged on the vertical plate, and the telecentric objective lens is arranged on the second plate member.

[0008] In a preferred implementation of the present invention, the multi-axis adjustment unit includes a plate member displaceable along the axial direction of the metal part. An electric rotary table rotatable around the central axis of the metal part is arranged on the plate member. A multi-dimensional adjustment frame is connected to the electric rotary table, and the metal part fixing fixture is connected to the mobile end of the multi-dimensional adjustment frame.

[0009] In a preferred implementation of the present invention, the multi-dimensional adjustment frame includes an X-axis linear slide table module and / or a Y-axis linear slide table module and / or a Z-axis linear slide table module and / or an X-axis rotation module and / or a Y-axis rotation module and / or a Z-axis rotation module, and the X-axis is the central axis direction of the optical fiber.

[0010] In a preferred implementation of the present invention, the metal part fixing fixture includes a substrate for connecting the multi-dimensional adjustment frame and a cover plate connected to the substrate. Corresponding optical fiber semi-circular limiting grooves and metal part limiting grooves are arranged on the substrate and the cover plate.

[0011] In a preferred implementation of the present invention, both the substrate and the cover plate are detachably connected to a positioning block, and a metal part limiting groove is arranged on the positioning block.

[0012] In a preferred embodiment of the present invention, magnets are disposed on the substrate and the cover plate in a displacement-corresponding manner.

[0013] In a preferred embodiment of the present invention, a plurality of positioning pin shafts are disposed on the base of the light-receiving positioning plate, and positioning holes adapted to the positioning pins are disposed on the light-receiving positioning plate.

[0014] In a preferred embodiment of the present invention, the vision recognition unit includes a CCD and a display. An annular light source is disposed on the lens of the CCD, and the display is connected to the CCD.

[0015] The present invention also discloses a method for using a device for measuring the inner surface angle of an optical device in a high-speed optical module. Place a 0° plane standard device in a metal part fixing fixture, and adjust through the multi-axis adjustment unit so that the reflected light returns to the center of the light-receiving positioning plate; move the 0° plane standard device outward along the multi-axis adjustment unit by a preset distance ΔL and adjust the reflected light to return along the original path, ensuring that the far and near field moving axis of the multi-axis adjustment unit is perpendicular to the plane of the light-receiving positioning plate; rotate the 0° plane standard device 360° and adjust the multi-axis adjustment unit so that the reflected light spot remains at the center of the light-receiving positioning plate, ensuring that the rotation axis is perpendicular to the plane of the light-receiving positioning plate; place the optical device to be measured in the calibrated metal part fixing fixture; set the distance L between the inner surface of the optical device to be measured and the light-receiving positioning plate; use the CCD to obtain the position information of the reflected light spot on the light-receiving positioning plate; measure the distance r from the reflected light spot to the center of the light-receiving positioning plate; calculate the angle of the inner surface of the optical device according to the preset distance L and the measured distance r ;

[0016]

[0017] Obtain the azimuth angle of the reflected light spot on the light-receiving positioning plate through the CCD detector; determine the high-side position and the low-side position of the inner surface of the optical device according to the azimuth angle of the reflected light spot; display the calculated angle value and the high and low side position information on the display.

[0018] The beneficial effects produced by the present invention are as follows: By providing an inner surface angle measuring device for an optical device based on CCD vision recognition, the present invention realizes the accurate measurement of the angle and the high and low side positions of the inner insert in the metal part in the high-speed optical module. This device overcomes the technical problem that traditional detection methods such as microscopes cannot effectively observe the inner insert in the metal part, and provides a reliable detection means for the assembly and quality control of high-speed optical modules.

[0019] The present invention establishes a complete optical path measurement system by arranging a light-receiving positioning plate, a multi-axis adjustment unit, and a CCD detection system on the seismic isolation table. The light beam focused by the telecentric objective lens is reflected by the inner surface of the metal part and then received by the light-receiving positioning plate. Combining with the CCD vision recognition technology, the position information of the reflected light spot can be accurately obtained. This solution can not only accurately calculate the angular parameters of the inner surface of the device, but also determine the high and low edge positions by the orientation of the reflected light spot on the light-receiving positioning plate, thus providing an accurate direction guidance for the subsequent docking with the FSI isolator.

[0020] In addition, the present invention adopts a combined design of a multi-axis adjustment coupling frame and a multi-dimensional adjustment frame to ensure the accurate adjustment of the optical path and the flexible control of the device position during the measurement process. The detachable design of the metal part fixing fixture and the magnet positioning structure further improve the convenience and repeatability of the measurement operation. These innovative designs not only improve the measurement accuracy, but also significantly improve the measurement efficiency, meeting the urgent needs of the current high-speed optical module market for the detection of optical devices.

[0021] The present invention not only solves the technical problem in the prior art that the angular parameters of the inner ferrule of the metal part cannot be effectively measured, but also provides an accurate, efficient and reliable measurement solution through a systematic design, which has important practical significance for promoting the development of the high-speed optical module industry. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present invention will be further described below in conjunction with the drawings and embodiments. In the drawings:

[0023] Figure 1 is a schematic diagram of a device for measuring the inner surface angle of an optical device in a high-speed optical module according to the present invention;

[0024] Figure 2 is a schematic diagram of a multi-axis adjustment coupling frame of a device for measuring the inner surface angle of an optical device in a high-speed optical module according to the present invention;

[0025] Figure 3 is an enlarged schematic diagram of a multi-axis adjustment coupling frame of a device for measuring the inner surface angle of an optical device in a high-speed optical module according to the present invention;

[0026] Figure 4 is a schematic diagram of a multi-axis adjustment unit of a device for measuring the inner surface angle of an optical device in a high-speed optical module according to the present invention;

[0027] Figure 5 is a schematic diagram of the device for measuring the inner surface angle of an optical device in a high-speed optical module according to the present invention and the light-receiving positioning plate;

[0028] Figure 6 is a schematic diagram of a metal part fixing fixture of a device for measuring the inner surface angle of an optical device in a high-speed optical module according to the present invention;

[0029] Figure 7 It is a schematic optical path diagram of a metal part of a device for measuring the inner surface angle of an optical device in a high-speed optical module according to the present invention;

[0030] Figure 8 It is a schematic diagram of the light-receiving positioning plate of the device for measuring the inner surface angle of an optical device in a high-speed optical module according to the present invention receiving the reflected light spot;

[0031] Figure 9 It is a schematic diagram of a metal part of the prior art. Detailed implementation manners

[0032] In order to make the objectives, technical solutions and advantages of the present invention more clear and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0033] Embodiment 1

[0034] The following will elaborate in detail on the specific implementation manners of the present invention to provide a comprehensive understanding of the hollow-core fiber and solid-core fiber coupling device.

[0035] As Figure 1 shown, the present invention discloses a device for measuring the inner surface angle of an optical device in a high-speed optical module, the overall structure of which is arranged on a vibration isolation table 2 to ensure that it is not affected by external vibrations during the measurement process. A light-receiving positioning plate base 3, a mounting base 9 and a vision recognition unit are arranged on the vibration isolation table 2. The light-receiving positioning plate base 3 and the mounting base 9 are arranged at intervals along the X axis. The vision recognition unit is located between the light-receiving positioning plate base 3 and the mounting base 9, and they together constitute the basic support structure of the device. Among them, a light-receiving positioning plate 7 is arranged between the light-receiving positioning plate base 3 and the mounting base 9. The light-receiving positioning plate 7 is accurately positioned within the imaging range of the vision recognition unit to ensure the accuracy of image acquisition.

[0036] As Figure 2-3As shown in the figure, the present invention configures a laser optical path system on the light-receiving positioning plate base 3, including a visible laser source 1, a laser output head 4, and a telecentric objective lens 6. The visible laser source 1 is connected to the laser output head 4. The visible laser source 1 and the laser output head 4 cooperate to output visible light with a small diameter and high collimation. Since most lasers are parallel light, a telecentric objective lens 6 is required for focusing, so that the spot size is smaller and can accurately hit the inner surface of the metal part. In order to accurately adjust the relative position between the laser output head 4 and the telecentric objective lens 6, a multi-axis adjustment coupling frame 5 is provided. The structure of the multi-axis adjustment coupling frame 5 includes a bottom plate 5-1, the bottom plate 5-1 is fixed on the light-receiving positioning plate base 3, a fixed vertical plate 5-3 is provided on the bottom plate 5-1, a first plate member 5-2 connected to the vertical plate 5-3, and a second plate member 5-4 that can displace along the X axis. The vertical plate 5-3 is L-shaped. A laser output head 4 that can displace along the Z axis and the Y axis is provided on the first plate member 5-2. A screw jack 5-5 for realizing the rotation of the first plate member 5-2 around the Z axis is provided on the vertical plate 5-3. The screw jack 5-5 is provided at both ends of the vertical plate 5-3. A telecentric objective lens 6 is provided on the second plate member 5-4.

[0037] As Figure 4 shown, a mechanism system for fixing and adjusting the position of the metal part to be measured 17 is provided on the installation base 9. The system includes a multi-axis adjustment unit, and its core component is a plate member 16 that can displace along the axis of the metal part 17. An electric rotary table 15 is installed on the plate member 16, and the rotary table can make the metal part 17 rotate around its central axis. The electric rotary table 15 is connected to a multi-dimensional adjustment frame 13, and the multi-dimensional adjustment frame 13 is then connected to a metal part fixing fixture 12. The design of the multi-dimensional adjustment frame 13 is very comprehensive, including an X-axis linear slide table module, a Y-axis linear slide table module, a Z-axis linear slide table module, and corresponding X-axis rotation modules, Y-axis rotation modules, and Z-axis rotation modules. The coordinated use of these modules can achieve precise adjustment of the metal part 17 to be measured in all directions in space.

[0038] As Figure 6 shown, the metal part fixing fixture 12 is composed of a base plate 12-1 and a cover plate 12-2. Corresponding optical fiber semi-circular limiting grooves and metal part limiting grooves are provided on both of them for accurately positioning the metal part to be measured. In order to improve the convenience and reliability of clamping, magnets 12-3 with corresponding displacements are provided on the base plate 12-1 and the cover plate 12-2, and quick fixation is achieved through magnetic force. At the same time, both the base plate 12-1 and the cover plate 12-2 can be detachably connected to the positioning block 12-4, and corresponding metal part limiting grooves are also provided on the positioning block 12-4. This design greatly improves the versatility and maintenance convenience of the device.

[0039] As Figure 5As shown in the figure, the present invention provides a plurality of positioning pins 3-1 on the base 3 of the light-receiving positioning plate, which cooperate with the positioning holes 3-2 on the light-receiving positioning plate 7. This positioning method ensures the accuracy and repeatability of the installation position of the light-receiving positioning plate 7. The light-receiving positioning plate 7 is also provided with avoidance holes, so that the light beam emitted from the laser output head 4 can pass through the telecentric objective lens 6 and then pass through the avoidance holes after focusing, and reach the metal part to be measured fixed in the metal part fixing fixture 12. The light beam passes through the central hole of the metal part and is reflected by the surface of the ceramic or glass device inside the metal part, and then is received by the light-receiving positioning plate. The surface angle and the position of the high and low edges of the metal part are judged by the position of the reflected light; the relative position of the laser output head 4 and the telecentric objective lens 6 is adjusted by the coupling frame, so that the size of the output light spot is smaller within the working distance range.

[0040] As Figure 1 shown, the image acquisition system of the present device consists of a vision recognition unit, including a CCD 10 and a display 8, which are connected by a data cable. In order to provide good lighting conditions, a ring light source 11 is specially arranged on the lens of the CCD 10. This design can ensure sufficient and uniform lighting during image acquisition, and the CCD 10 can be placed on the mounting base 9.

[0041] During the actual measurement process of the present invention, the metal part 17 to be measured (whose structure is as Figure 9 shown) is fixed in the metal part fixing fixture 12. Through the precise adjustment of the multi-axis adjustment unit, the reflected light spot can be accurately landed on the light-receiving positioning plate 7. The CCD 10 collects the light spot image on the light-receiving positioning plate 7 and transmits the data to the display 8 for real-time display and analysis. By measuring the change of the light spot position and combining the pre-calibrated parameters, the angle parameters of the inner surface of the metal part to be measured can be calculated.

[0042] This embodiment fully demonstrates the innovative breakthrough of the present invention in the field of precision optical alignment and curing technology, and provides a key technical solution for the practical application of hollow optical fibers.

[0043] Embodiment 2

[0044] The present invention also discloses a method for using a device for measuring the inner surface angle of an optical device in a high-speed optical module. The specific implementation steps of this method are described in detail below.

[0045] First is the system calibration stage. The primary task in this stage is to establish an accurate measurement reference. During the specific operation, first place the 0° plane standard device in the metal part fixing fixture 12. The selection of the standard device has an important impact on the subsequent measurement accuracy. Therefore, a calibrated standard device with a flatness meeting the requirements must be selected. After placing the standard device, adjust each degree of freedom of the multi-axis adjustment unit (including the moving plate 16, the electric rotary table 15, and the multi-dimensional adjustment frame 13) so that the light beam reflected from the surface of the standard device can precisely return to the center position of the light receiving positioning plate 7. The purpose of this step is to ensure the reference position of the entire optical path system.

[0046] Subsequently, perpendicularity calibration is carried out. The operator needs to move the 0° plane standard device outwards by a preset distance ΔL through the multi-axis adjustment unit (the moving plate 16 cooperating with the multi-dimensional adjustment frame 13). The selection of this preset distance needs to consider the overall size and accuracy requirements of the measurement system. Generally, it is recommended to select a moderate distance value, which should neither be too small to result in an insignificant adjustment effect nor too large to exceed the measurement range of the system. After the movement is completed, adjust again to make the reflected light return along the original path. The purpose of this step is to ensure that the near and far field movement axes of the multi-axis adjustment unit are strictly perpendicular to the plane of the light receiving positioning plate 7.

[0047] Next, rotation axis calibration is carried out. Rotate the 0° plane standard device 360° around its central axis through the electric rotary table 15, and at the same time observe the position change of the reflected light spot. By finely adjusting each parameter of the multi-axis adjustment unit, ensure that during the entire rotation process, the reflected light spot always remains at the center position of the light receiving positioning plate 7. The core purpose of this operation is to ensure that the rotation axis is perpendicular to the plane of the light receiving positioning plate 7, laying a foundation for subsequent angle measurement.

[0048] After completing the system calibration, enter the actual measurement stage. First, place the device under test in the calibrated metal part fixing fixture 12. Pay attention to maintaining stability during placement to avoid position deviation. The device under test is fixed through the substrate 12-1 and the cover plate 12-2, and a stable magnetic clamping force is provided by the magnet 12-3. Then set the distance L between the inner surface of the device under test and the light receiving positioning plate 7. The selection of this distance is very crucial and needs to be large enough to ensure the measurement sensitivity so that small changes in the position of the reflected light spot can be accurately captured.

[0049] During the measurement process, the beam emitted by the laser output head 4 is focused by the telecentric objective lens 6 and then irradiates the surface of the device under test through the avoidance hole on the light receiving and positioning plate 7. The CCD 10 is used to collect the position information of the reflected light spot on the light receiving and positioning plate 7, where the annular light source 11 provides uniform illumination conditions. Through image processing technology, the distance r from the reflected light spot to the center of the light receiving and positioning plate 7 is accurately measured. The distance measurement here needs to combine the resolution of the CCD 10 and the shape characteristics of the light spot to ensure the accuracy of the measurement. At the same time, the CCD 10 also needs to obtain the azimuth angle information of the reflected light spot on the light receiving and positioning plate 7.

[0050] In the data processing stage, the system calculates the actual angle of the inner surface of the optical device according to the pre-set distance L and the measured distance r by using the principles of geometric optics. By analyzing the azimuth angle of the reflected light spot on the light receiving and positioning plate 7, the high-side position and the low-side position of the inner surface of the optical device can be accurately determined. This information is of great guiding significance for subsequent device installation and debugging.

[0051] Finally, the system displays the calculated angle value and the high and low side position information on the display 8 in real time. The displayed content should be clear and intuitive for easy reading and recording by the operator. These data can be used for quality control and production records to ensure the consistency and traceability of the product.

[0052] By performing the above steps, the measurement method of the present invention can achieve accurate measurement of the inner surface angle of the optical device in the high-speed optical module, providing reliable technical support for product quality control. This method has standardized operations and clear steps, and has good practicability and repeatability.

[0053] The test optical path of the present invention is as Figure 7-8 shown. The distance between the inner surface of the optical device and the light receiving and positioning plate is L, and L is set to a relatively large distance so that the change in the distance r from the reflected light spot to the center of the light receiving and positioning plate is more obvious, making the angle measurement more accurate. n2 is the normal line of the inner surface S1 of the device, n2 is perpendicular to S1, and n1 is perpendicular to S2, so

[0054]

[0055] At the same time

[0056]

[0057] So

[0058]

[0059] L is known, and r is obtained by measuring the distance from the reflected light spot to the center of the light receiving and positioning plate, and then the angle of the inner surface S1 of the device can be obtained .

[0060] Alternatively, it can also be calculated by adjusting the change Δr of the distance from the reflected light spot to the center of the light-receiving positioning plate when the far-field and near-field ΔL of the six-dimensional adjustment frame changes:

[0061]

[0062] At the same time, from Figure 7 and Figure 8 it can be seen that the azimuth of the reflected light on the light-receiving positioning plate is the same as that of the lower edge. Therefore, the high-edge position and the lower-edge position of the inner surface of the optical device can be obtained through the angle of the light spot on the light-receiving positioning plate, and marked.

[0063] For the above calculations, the CCD detects the light-receiving positioning plate and the position of the light spot reflected thereon, automatically calculates through visual recognition, and marks it on the display.

[0064] It should be understood that those of ordinary skill in the art can make improvements or transformations according to the above description, and all such improvements and transformations should fall within the protection scope of the appended claims of the present invention.

Claims

1. A device for measuring the angle of the inner surface of an optical device in a high-speed optical module, characterized in that: It includes a seismic isolation table (2), on which a light-receiving positioning plate base (3), a mounting base (9) and a visual recognition unit are provided. A light-receiving positioning plate (7) is arranged between the light-receiving positioning plate base (3) and the mounting base (9), and the light-receiving positioning plate (7) is within the imaging range of the visual recognition unit; a laser output head (4), a telecentric objective lens (6) and a multi-axis adjustment coupling frame (5) for adjusting the relative position between the laser output head (4) and the telecentric objective lens (6) are arranged on the light-receiving positioning plate base (3), and a multi-axis adjustment unit and a metal part fixing fixture (12) connected to the displacement end of the multi-axis adjustment unit are arranged on the mounting base (9); an avoidance hole is arranged on the light-receiving positioning plate (7), and the light beam emitted by the laser output head (4) passes through the telecentric objective lens (6) and is focused to pass through the avoidance hole and then transmitted to the metal part located in the metal part fixing fixture (12). The light beam passes through the central hole of the metal part and is reflected by the surface of the ceramic or glass device inside the metal part and then received by the light-receiving positioning plate; The multi-axis adjustment unit includes a plate member (16) that can axially displace along the metal part. An electric rotary table (15) that can rotate around the central axis of the metal part is arranged on the plate member (16). A multi-dimensional adjustment frame (13) is connected to the electric rotary table (15), and the metal part fixing fixture (12) is connected to the mobile end of the multi-dimensional adjustment frame (13); the plate member (16) is used to adjust the change of the far and near fields ΔL of the multi-dimensional adjustment frame (13) to calculate the angle of the inner surface of the optical device.

2. The device for measuring the angle of the inner surface of an optical device in a high-speed optical module according to claim 1, wherein The multi-axis adjustment coupling frame (5) includes a bottom plate (5-1). A fixed vertical plate (5-3), a first plate member (5-2) connected to the vertical plate (5-3), and a second plate member (5-4) that can axially displace along the X axis are arranged on the bottom plate (5-1). The laser output head (4) that can axially displace along the Z axis and the Y axis is arranged on the first plate member (5-2). A screw jack (5-5) for realizing the rotation of the first plate member (5-2) around the Z axis is arranged on the vertical plate (5-3), and the telecentric objective lens (6) is arranged on the second plate member (5-4).

3. The device for measuring the angle of the inner surface of an optical device in a high-speed optical module according to claim 1, wherein The multi-dimensional adjustment frame (13) includes an X-axis linear slide table module and / or a Y-axis linear slide table module and / or a Z-axis linear slide table module and / or an X-axis rotation module and / or a Y-axis rotation module and / or a Z-axis rotation module.

4. The device for measuring the angle of the inner surface of an optical device in a high-speed optical module according to claim 1, wherein The metal part fixing fixture (12) includes a substrate (12-1) for connecting the multi-dimensional adjustment frame (13) and a cover plate (12-2) connected to the substrate (12-1). Fiber optic semi-circular limit grooves and metal part limit grooves are correspondingly arranged on the substrate (12-1) and the cover plate (12-2).

5. The device for measuring the inner surface angle of an optical device in a high-speed optical module according to claim 4, wherein Both the substrate (12-1) and the cover plate (12-2) are detachably connected to a positioning block (12-4), and a metal part limit groove is arranged on the positioning block (12-4).

6. The device for measuring the inner surface angle of an optical device in a high-speed optical module according to claim 4, wherein Magnets (12-3) with corresponding displacements are arranged on the substrate (12-1) and the cover plate (12-2).

7. The device for measuring the angle of the inner surface of an optical device in a high-speed optical module according to claim 1, characterized in that, A plurality of positioning pin shafts (3-1) are arranged on the light collecting positioning plate base (3), and positioning holes (3-2) matching with the positioning pins (3-1) are arranged on the light collecting positioning plate (7).

8. The device for measuring the angle of the inner surface of an optical device in a high-speed optical module according to claim 1, wherein The visual recognition unit includes a CCD (10) and a display (8). An annular light source (11) is arranged on the lens of the CCD (10), and the display (8) is connected to the CCD (10).

9. A method for using a device for measuring the angle of the inner surface of an optical device in a high-speed optical module as described in any one of claims 1-8, characterized in that, Place the 0° plane standard device in the metal part fixing fixture (12), and adjust through the multi-axis adjustment unit to make the reflected light return to the center of the light collecting positioning plate (7); move the 0° plane standard device outward along the multi-axis adjustment unit by a preset distance and adjust the reflected light to return along the original path to ensure that the far and near field moving axes of the multi-axis adjustment unit are perpendicular to the plane of the light collecting positioning plate; rotate the 0° plane standard device 360° and adjust the multi-axis adjustment unit to keep the reflected light spot at the center of the light collecting positioning plate (7), ensuring that the rotation axis is perpendicular to the plane of the light collecting positioning plate (7); place the device under test for light in the calibrated metal part fixing fixture (12); Set the distance L between the inner surface of the optical device under test and the light-receiving positioning plate (7); use a CCD to obtain the position information of the reflected light spot on the light-receiving positioning plate; measure the distance r from the reflected light spot to the center of the light-receiving positioning plate; when the far and near field ΔL changes by adjusting the multi-dimensional adjustment frame (13), calculate the change Δr in the distance from the reflected light spot to the center of the circle of the light-receiving positioning plate, and calculate the angle of the inner surface of the optical device ; Obtain the azimuth angle of the reflected light spot on the light collecting positioning plate through the CCD detector; determine the high-side position and the low-side position of the inner surface of the optical device according to the azimuth angle of the reflected light spot; display the calculated angle value and the high and low side position information on the display.

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