Spectrum calibration method, calibration device and angle-resolved light path system

Abstract

This invention discloses a spectral calibration method, calibration device, and angle-resolved optical path system. The calibration method includes: controlling multiple objective lenses with different set magnifications to collect incident light reflected from a standard diffuse reflector at multiple different set collection angles, obtaining multiple reflection spectral information; establishing a calibration database based on all acquired reflection spectral information; the calibration database includes calibration values ​​corresponding to the objective lenses at multiple set collection angles, where the multiple set collection angles encompass all set collection angles; acquiring the actual spectral information of the light emitted by the sample under test received by the objective lens, as well as the actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample under test; correcting the actual spectral information according to the calibration database, the actual magnification, and the actual collection angle to obtain calibrated spectral information. This invention provides a spectral calibration method, calibration device, and angle-resolved optical path system, which simplifies the calibration process and improves the spectral calibration effect.

Description

Technical Field

[0001] This invention relates to the field of spectral calibration technology, and in particular to a spectral calibration method, calibration device, and angle-resolved optical path system. Background Technology

[0002] Semiconductor light-emitting devices (LEDs) have wide applications in consumer electronics, communication systems, and medical instruments. From both a technological and economic development perspective, LEDs have broad application prospects and have received widespread attention and research. As the size of semiconductor LEDs becomes smaller, even below 10μm, the sidewall light extraction efficiency significantly affects the overall light extraction performance of the device. Therefore, research on the sidewall light extraction performance of semiconductor LEDs is particularly important.

[0003] In the production and R&D process, angle-resolved optical path systems are typically used to analyze and test the light emission performance of semiconductor light-emitting devices. Taking Micro-LED devices as an example, the semiconductor sample is first placed on the sample stage, and then the light-emitting semiconductor sample is analyzed and tested using an angle-resolved optical path system.

[0004] However, it is currently difficult to fabricate standard semiconductor light-emitting devices with controllable and known light emission intensities at each light emission angle. This causes the calibration device to be affected by inconsistent light intensity at each light emission angle, resulting in low accuracy in calibrating the actual spectral information of the semiconductor light-emitting device. Summary of the Invention

[0005] This invention provides a spectral calibration method, calibration device, and angle-resolved optical path system. The calibration process is simple and can improve the spectral calibration effect.

[0006] According to one aspect of the present invention, a spectral calibration method is provided, the spectral calibration method comprising:

[0007] Multiple objective lenses with different set magnifications are controlled to collect incident light reflected from a standard diffuse reflector at multiple different set collection angles to obtain multiple reflection spectrum information; wherein, the set collection angle is the angle between a first set perpendicular line and a second set perpendicular line, the first set perpendicular line being perpendicular to the surface of the standard diffuse reflector reflecting incident light, and the second set perpendicular line being perpendicular to the surface of the objective lens receiving light.

[0008] A calibration database is established based on all the acquired reflectance spectral information; wherein, the calibration database includes calibration values ​​corresponding to objectives of multiple magnifications at multiple set collection angles, and the multiple set collection angles include all the set collection angles;

[0009] The actual spectral information of the light emitted by the sample under test received by the objective lens, as well as the actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample under test, are obtained; wherein, the actual collection angle is the angle between the surface of the light emitted by the sample under test and the second set vertical line;

[0010] The actual spectral information is corrected based on the calibration database, the actual magnification, and the actual collection angle to obtain the calibration spectral information.

[0011] Optionally, establishing a calibration database based on all the acquired reflectance spectral information includes:

[0012] Obtain the maximum peak intensity in the reflectance spectral information corresponding to each set collection angle under each set magnification objective lens;

[0013] Find the reference peak intensity corresponding to each objective lens at each set magnification from all the maximum peak intensities corresponding to each set magnification;

[0014] Based on the reference peak intensity, the maximum peak intensity corresponding to each set collection angle under each set magnification objective is normalized to obtain the normalized value corresponding to each set collection angle under each set magnification objective.

[0015] The calibration database is established based on all the normalized values.

[0016] Optionally, establishing the calibration database based on all the normalized values ​​includes:

[0017] Each set collection angle and its corresponding normalized value under each set magnification objective lens are used as the calibration function for each set magnification objective lens.

[0018] The calibration database is established based on the calibration function corresponding to each objective lens with a set magnification.

[0019] Optionally, the step of normalizing the maximum peak intensity corresponding to each set collection angle under each set collection angle at each set magnification objective, based on the reference peak intensity, to obtain the normalized value corresponding to each set collection angle under each set magnification objective, includes:

[0020] The ratio of the maximum peak intensity to the reference peak intensity at each set collection angle under each set magnification objective is used as the normalized value for each set collection angle.

[0021] Optionally, the calibration spectral information obtained by correcting the actual spectral information based on the calibration database, the actual magnification, and the actual collection angle includes:

[0022] The calibration function corresponding to the actual magnification is determined based on the actual magnification and the calibration database;

[0023] Find the normalized value corresponding to the collection angle that is equal to the actual collection angle in the calibration function corresponding to the actual magnification, and use the normalized value as the actual calibration value;

[0024] The calibration spectral information is determined based on the actual spectral information and the actual calibration value.

[0025] Optionally, establishing a calibration database based on all the acquired reflectance spectral information includes:

[0026] Obtain the peak wavelength corresponding to the maximum peak intensity in the reflection spectrum information corresponding to each set collection angle under each set magnification objective lens;

[0027] Find the reference wavelength corresponding to each objective lens at each set magnification from all the peak wavelengths corresponding to each set magnification;

[0028] The wavelength offset corresponding to each peak wavelength under each objective lens at each set magnification is determined based on the reference wavelength corresponding to each set magnification objective lens;

[0029] The set collection angle and its corresponding wavelength offset under each set magnification objective lens are used as the calibration function for each set magnification objective lens.

[0030] The calibration database is established based on the calibration function corresponding to each objective lens with a set magnification.

[0031] Optionally, the calibration spectral information includes wavelength information;

[0032] The actual spectral information is corrected based on the calibration database, the actual magnification, and the actual collection angle to obtain calibration spectral information, including:

[0033] The calibration function corresponding to the actual magnification is determined based on the actual magnification and the calibration database;

[0034] Find the wavelength offset corresponding to the set collection angle that is equal to the actual collection angle in the calibration function corresponding to the actual magnification, and use the wavelength offset as the actual calibration value;

[0035] The calibration spectral information is determined based on the difference between the actual spectral information and the actual calibration value.

[0036] Optionally, the set collection angle includes -90° to 90°; and / or

[0037] The objective lenses, each with a different set magnification, collect incident light reflected from a standard diffuse reflector at multiple different set collection angles, thus obtaining multiple reflection spectral information, including:

[0038] Select an objective lens with the set magnification;

[0039] The objective lens, controlled by the current magnification, collects the incident light reflected by the standard diffuse reflector at multiple different set collection angles, thereby obtaining the reflection spectrum information corresponding to each set collection angle;

[0040] Adjust the magnification of the objective lens, and return to the step of the objective lens controlling the current magnification collecting the incident light reflected by the standard diffuser at multiple different set collection angles, until all objective lenses with set magnifications collect the incident light reflected by the standard diffuser at different set collection angles.

[0041] According to another aspect of the present invention, a spectral calibration device is provided, comprising: a light acquisition module, a database determination module, an information acquisition module, and a calibration module;

[0042] The light acquisition module is used to control multiple objective lenses with different set magnifications to collect incident light reflected by a standard diffuse reflector at multiple different set collection angles, thereby obtaining multiple reflection spectrum information; wherein, the set collection angle is the angle between a first set perpendicular line and a second set perpendicular line, the first set perpendicular line being perpendicular to the surface of the standard diffuse reflector reflecting incident light, and the second set perpendicular line being perpendicular to the surface of the objective lens receiving light.

[0043] The database determination module is used to establish a calibration database based on all the acquired reflectance spectral information; wherein, the calibration database includes calibration values ​​corresponding to multiple magnification objectives at multiple collection angles;

[0044] The information acquisition module is used to acquire the actual spectral information of the light emitted by the sample under test received by the objective lens, as well as the actual magnification and actual collection angle of the objective lens that receives the light emitted by the sample under test; wherein, the actual collection angle is the angle between the surface of the light emitted by the sample under test and the second set vertical line;

[0045] The calibration module is used to correct the actual spectral information based on the calibration database, the actual magnification, and the actual collection angle to obtain calibration spectral information.

[0046] According to another aspect of the present invention, an angle-resolved optical path system is provided, which includes the spectral calibration device provided in any embodiment of the present invention.

[0047] This invention provides a spectral calibration method, which includes: controlling multiple objective lenses with different set magnifications to collect incident light reflected from a standard diffuse reflector at multiple different set collection angles, obtaining multiple reflection spectral information; then establishing a calibration database based on all the acquired reflection spectral information; next, acquiring the actual spectral information of the light emitted by the sample under test received by the objective lens, as well as the actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample under test; finally, correcting the actual spectral information based on the calibration database, the actual magnification, and the actual collection angle to obtain calibrated spectral information. It is evident that the process of correcting the actual spectral information in this invention is simple. This invention uses a standard diffuse reflector instead of a self-luminous sample. The light intensity reflected from the surface of the standard diffuse reflector is consistent in all regions, avoiding the influence of the reflected light intensity on the calibration results and effectively solving the problem of difficult calibration caused by the lack of a standard semiconductor light-emitting device. Since the magnification and collection angle of the objective lens affect the information of the light collected by the objective lens, this embodiment combines the actual magnification and actual collection angle to calibrate the actual spectral information, which can improve the accuracy of the calibration. In summary, the spectral calibration method provided in this embodiment is simple in calibration process and can improve the spectral calibration effect.

[0048] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0049] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0050] Figure 1 This is a schematic flowchart of a spectral calibration method provided according to an embodiment of the present invention;

[0051] Figure 2 This is a schematic diagram of the structure of an angle-resolved optical path system according to an embodiment of the present invention;

[0052] Figure 3 This is a schematic diagram of the structure of a support platform at different angles according to an embodiment of the present invention;

[0053] Figure 4 This is a schematic diagram illustrating the beam collection situation under different set collection angles according to an embodiment of the present invention;

[0054] Figure 5 This is a schematic flowchart of another spectral calibration method provided according to an embodiment of the present invention;

[0055] Figure 6 This is a schematic diagram of multiple calibration functions provided according to embodiments of the present invention;

[0056] Figure 7 This is a schematic flowchart of another spectral calibration method provided according to an embodiment of the present invention;

[0057] Figure 8 This is a schematic diagram showing the correspondence between the actual collection angle before correction and the maximum peak intensity;

[0058] Figure 9 This is a schematic diagram showing the correspondence between the actual collection angle and the calibrated light intensity value after calibration using the spectral calibration method provided in this embodiment;

[0059] Figure 10 This is a schematic flowchart of another spectral calibration method provided according to an embodiment of the present invention;

[0060] Figure 11 This is a schematic diagram of the structure of a spectral calibration device according to an embodiment of the present invention;

[0061] Figure 12 This is a schematic diagram of another angle-resolved optical path system provided according to an embodiment of the present invention. Detailed Implementation

[0062] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0063] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0064] refer to Figure 1 , Figure 1 This is a schematic flowchart of a spectral calibration method according to an embodiment of the present invention. The spectral calibration method provided in this embodiment includes the following steps:

[0065] S110: Control multiple objectives with different set magnifications to collect incident light reflected by the standard diffuse reflector at multiple different set collection angles, thereby obtaining multiple reflection spectrum information.

[0066] Reference Figure 2 and Figure 3 , Figure 2 This is a schematic diagram of an angle-resolved optical path system according to an embodiment of the present invention. Figure 3 This is a schematic diagram of a support stage at different angles according to an embodiment of the present invention. This angle-resolved optical path system can collect incident light reflected by a standard diffuse reflector. The angle-resolved optical path system includes a detection module 110 and a support stage 120. The detection module 110 includes an objective lens 111, and the support stage 120 is used to support the standard diffuse reflector.

[0067] The collection angle α is set to be the angle between the first set vertical line 101 and the second set vertical line 102. The first set vertical line 101 is perpendicular to the surface of the standard diffuse reflector that reflects the incident light, and the second set vertical line 102 is perpendicular to the surface of the objective lens 111 that receives the light.

[0068] Specifically, the collection angle α can be controlled by the deflection detection module 110 or the stage 120. When only the stage 120 is deflected while keeping the position of the objective lens 111 unchanged, the collection angle α will change with the deflection angle of the stage 120. The standard diffuse reflector 200 is fixed on the stage 120, and the standard diffuse reflector 200 remains relatively stationary with respect to the stage 120 during the deflection of the stage 120.

[0069] The standard diffuse reflector 200 can be a white board. The standard diffuse reflector 200 includes a Teflon white coating with a uniformly slightly rough surface. This Teflon white coating allows incident light to be uniformly reflected in all directions on the surface of the standard diffuse reflector 200, thus ensuring that the intensity of reflected light from the standard diffuse reflector 200 is the same or almost identical in all directions. Using this principle, a standard diffuse reflector 200 can be used instead of a self-emissive sample (e.g., a semiconductor light-emitting device). Light is projected onto the surface of the standard diffuse reflector 200 to generate diffuse reflected light at various angles. Then, the detection module 110 collects the reflected incident light from various set collection angles α to obtain the reflection spectrum information for each set collection angle α.

[0070] The light transmitted through objective lens 111, after striking the standard diffuse reflector plate 200, becomes a diffuse Lambertian beam pattern that diffuses uniformly in all directions. Rotating objective lens 111 does not change the diffuse Lambertian beam pattern of the reflected light; however, due to the collection angle θ of objective lens 111, it only collects reflected light within a certain angle. (Reference) Figure 4 , Figure 4 This is a schematic diagram illustrating the beam collection situation under different set collection angles according to an embodiment of the present invention. Figure 4 The solid black line represents incident light 310, the dashed black line represents reflected light 320, and the red line represents reflected light 330 that can be collected by objective lens 111 within the collection angle θ. The collection angle θ is different for objectives 111 of different magnifications, and the collection efficiency of objectives 111 of the same magnification is also different at different set collection angles. Different collection angles θ will result in different reflected spectral information collected by objectives of the same magnification at different set collection angles.

[0071] S120. Establish a calibration database based on all the acquired reflectance spectral information.

[0072] The calibration database includes calibration values ​​for objectives of multiple magnifications at multiple set collection angles, and the multiple set collection angles encompass all set collection angles.

[0073] Specifically, for objectives with the same magnification, each set collection angle corresponds to a specific reflectance spectrum. First, a calibration function for each set magnification objective can be determined based on the multiple reflectance spectra corresponding to that objective. Then, a calibration database can be established based on the calibration functions for each set magnification objective. The calibration function can include the collection angle and its corresponding calibration value.

[0074] For example, the calibration database is shown in the table below:

[0075]

[0076]

[0077] S130. Obtain the actual spectral information of the light emitted by the sample under test received by the objective lens, as well as the actual magnification and actual collection angle of the objective lens that receives the light emitted by the sample under test.

[0078] The actual collection angle is the angle between the surface of the sample emitting light and the second set vertical line.

[0079] Specifically, such as Figure 2 As shown, before performing step S130, the sample to be tested is fixed on the stage 120 and controlled to emit light. The sample to be tested can be a semiconductor light-emitting device, specifically a Micro-LED device. Here, the second set vertical line 102 is perpendicular to the surface of the objective lens 111 that receives the light emitted by the sample to be tested.

[0080] The actual collection angle and actual magnification can be set according to actual needs. The actual collection angle can range from -90° to 90°, and can be equal to one of the multiple set collection angles α. The actual magnification can be equal to one of the multiple set magnifications.

[0081] S140. Correct the actual spectral information according to the calibration database, actual magnification and actual collection angle to obtain the calibration spectral information.

[0082] The calibration database includes objectives with multiple magnifications and calibration values ​​corresponding to multiple set collection angles. Based on the actual magnification and collection angle, the database can be used to find the calibration value corresponding to the actual magnification and the set collection angle. The actual spectral information is then corrected using this calibration value to obtain the calibrated spectral information.

[0083] It should be noted that steps S130 and S140 in this embodiment are for correcting the actual spectral information of the sample under a certain actual collection angle under an objective lens of a certain actual magnification. When it is necessary to correct the actual spectral information under other actual collection angles, the actual collection angle and / or the actual magnification can be adjusted, and steps S130 and S140 can be executed again, so as to obtain multiple calibrated spectral information of multiple actual collection angles under multiple objective lenses of a certain magnification.

[0084] This embodiment provides a spectral calibration method, which includes: controlling multiple objective lenses with different set magnifications to collect incident light reflected from a standard diffuse reflector at multiple different set collection angles, obtaining multiple reflection spectral information; then establishing a calibration database based on all the acquired reflection spectral information; next, acquiring the actual spectral information of the light emitted by the sample under test received by the objective lens, as well as the actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample under test; finally, correcting the actual spectral information based on the calibration database, the actual magnification, and the actual collection angle to obtain calibrated spectral information. It can be seen that the process of correcting the actual spectral information in this embodiment is simple. This embodiment uses a standard diffuse reflector instead of a self-luminous sample. The light intensity reflected from the surface of the standard diffuse reflector is consistent in all areas, avoiding the influence of the reflected light intensity on the calibration results, and effectively solving the problem of difficult calibration caused by the lack of a standard semiconductor light-emitting device. Since the magnification and collection angle of the objective lens affect the information of the light collected by the objective lens, this embodiment combines the actual magnification and the actual collection angle to calibrate the actual spectral information, which can improve the accuracy of the calibration. In summary, the spectral calibration method provided in this embodiment is simple to perform and can improve the spectral calibration effect.

[0085] Optional, Figure 5 This is a flowchart illustrating another spectral calibration method provided according to an embodiment of the present invention. (Refer to...) Figure 5 The spectral calibration method provided in this embodiment includes the following steps:

[0086] S210: Control multiple objectives with different set magnifications to collect incident light reflected by the standard diffuse reflector at multiple different set collection angles, thereby obtaining multiple reflection spectrum information.

[0087] The content of step S210 is the same as that of step S110. For a detailed description of step S210, please refer to the description of step S110. It will not be repeated here.

[0088] S220: Obtain the maximum peak intensity in the reflectance spectrum information corresponding to each set collection angle under each set magnification objective lens.

[0089] For each set objective lens at a given magnification, a corresponding reflection spectrum is generated at each set collection angle. This reflection spectrum includes the relationship between wavelength and light intensity, with the maximum peak intensity being the highest value of the light intensity in the reflection spectrum. Each reflection spectrum corresponds to a maximum peak intensity; that is, for each set objective lens at a given magnification, each set collection angle corresponds to a maximum peak intensity. Multiple maximum peak intensities are obtained for each set objective lens.

[0090] S230. Find the reference peak intensity corresponding to each set magnification objective lens from all the maximum peak intensities corresponding to each set magnification objective lens.

[0091] The reference peak intensity corresponding to the objective lens with a set magnification is one of the maximum peak intensities among multiple maximum peak intensities corresponding to the objective lens with the set magnification.

[0092] Combination Figure 4 The collection angle θ is different for objectives with different magnifications, and the design of the detection module is rarely perfectly symmetrical. These two factors combined can lead to differences in collection efficiency at various set collection angles α. The inventors extracted reflectance spectral information collected by objectives with different magnifications at different set collection angles α and found that the higher the magnification of the objective, the greater the decrease in collection efficiency as the absolute value of the set collection angle α increases. Therefore, in this embodiment, the reference peak intensity can be the maximum peak intensity corresponding to the set collection angle α with the smallest absolute value under the same set magnification. When the set collection angle α includes 0°, the maximum peak intensity corresponding to 0° is the reference peak intensity.

[0093] S240. Based on the reference peak intensity, normalize the maximum peak intensity corresponding to each set collection angle under each set magnification objective lens to obtain the normalized value corresponding to each set collection angle under each set magnification objective lens.

[0094] Each objective lens with a set magnification corresponds to a reference peak intensity. Based on the reference peak intensity of the objective lens with the set magnification, the multiple maximum peak intensities corresponding to the objective lens with the same set magnification are normalized.

[0095] Normalizing the maximum peak intensities adjusts them to the same scale, thereby improving the efficiency of correcting actual spectral information. Normalization based on a reference peak intensity ensures that all maximum peak intensities corresponding to a given magnification objective are correlated with the reference peak intensity corresponding to that magnification objective.

[0096] Optionally, the ratio of the maximum peak intensity to the reference peak intensity at each set collection angle under each set magnification objective can be used as the normalized value for each set collection angle.

[0097] Specifically, the ratio of the maximum peak intensity to the reference peak intensity at each set collection angle under each set magnification objective can reflect the collection efficiency at each set collection angle. It can be seen that the normalized value is related to the collection efficiency, and the collection efficiency will affect the actual spectral information. In this embodiment, the calibration effect can be further improved by correcting the actual spectral information with the normalized value.

[0098] S250. Establish a calibration database based on all normalized values.

[0099] The calibration database can include normalized values ​​corresponding to each set collection angle under each set magnification objective.

[0100] Optionally, a calibration database can be built based on all normalized values, including the following steps:

[0101] S251. Use each set collection angle and its corresponding normalized value under each set magnification objective as the calibration function corresponding to each set magnification objective.

[0102] refer to Figure 6 , Figure 6 According to the schematic diagram of multiple calibration functions provided in the embodiments of the present invention, plotting the normalized values ​​according to polar coordinates yields the following result: Figure 6 The calibration function curves shown correspond to objectives with different magnification settings are as follows: Figure 6 The calibration functions corresponding to objective lens magnification settings of 5, 10, 20, and 50 are shown. For example, when the objective lens magnification is set to 5 and the collection angle is set to -90°, the corresponding normalized value in polar coordinates is a3; when the objective lens magnification is set to 10 and the collection angle is set to -50°, the corresponding normalized value in polar coordinates is close to a7.

[0103] Can Figure 6 At the same set magnification, these discrete points can be used as the calibration function corresponding to the objective lens at the set magnification. Alternatively, these discrete points can be connected sequentially to form a curve, which can then be used as the calibration function.

[0104] S252. Establish a calibration database based on the calibration function corresponding to each objective lens with a set magnification.

[0105] The calibration functions corresponding to each objective lens at a given magnification can be combined to form a calibration database. For an example, please refer to [link / reference]. Figure 6 , Figure 6 A calibration database can be formed by combining the calibration functions corresponding to the set magnifications of 5, 10, 20, and 50. Alternatively, calibration functions for other magnifications can be determined based on the known calibration functions for objectives with set magnifications. Then, all these calibration functions can be combined to form a calibration database. For example, given multiple set magnifications including 5, 10, 20, and 50, an interpolation algorithm can be used to determine the calibration function for an objective with magnification of 30, and an interpolation algorithm can be used to determine the calibration function for an objective with magnification of 40. The calibration functions corresponding to magnifications of 5, 10, 20, 30, 40, and 50 can then be combined to form the calibration database.

[0106] S260. Obtain the actual spectral information of the light emitted by the sample under test received by the objective lens, as well as the actual magnification and actual collection angle of the objective lens that receives the light emitted by the sample under test.

[0107] The content of step S260 is the same as that of step S130. For a detailed description of step S260, please refer to the description of step S130. It will not be repeated here.

[0108] S270. Correct the actual spectral information according to the calibration database, actual magnification and actual collection angle to obtain the calibration spectral information.

[0109] The content of step S270 is the same as that of step S140. For a detailed description of step S270, please refer to the description of step S140. It will not be repeated here.

[0110] Optional, Figure 7 This is a flowchart illustrating another spectral calibration method provided according to an embodiment of the present invention. (Refer to...) Figure 7 The spectral calibration method provided in this embodiment includes the following steps:

[0111] S310 controls multiple objectives with different set magnifications to collect incident light reflected from a standard diffuse reflector at multiple different set collection angles, thereby obtaining multiple reflection spectrum information.

[0112] The content of step S310 is the same as that of step S210. For a detailed description of step S310, please refer to the description of step S210. It will not be repeated here.

[0113] S320: Obtain the maximum peak intensity in the reflectance spectrum information corresponding to each set collection angle under each set magnification objective lens.

[0114] The content of step S320 is the same as that of step S220. For a detailed description of step S320, please refer to the description of step S220. It will not be repeated here.

[0115] S330: Find the reference peak intensity corresponding to each set magnification objective lens from all the maximum peak intensities corresponding to each set magnification objective lens.

[0116] The content of step S330 is the same as that of step S230. For a detailed description of step S330, please refer to the description of step S230. It will not be repeated here.

[0117] S340. Based on the reference peak intensity, normalize the maximum peak intensity corresponding to each set collection angle under each set magnification objective lens to obtain the normalized value corresponding to each set collection angle under each set magnification objective lens.

[0118] The content of step S340 is the same as that of step S240. For a detailed description of step S340, please refer to the description of step S240. It will not be repeated here.

[0119] S350, take each set collection angle and its corresponding normalized value under each set magnification objective as the calibration function corresponding to each set magnification objective.

[0120] The content of step S350 is the same as that of step S251. For a detailed description of step S350, please refer to the description of step S251. It will not be repeated here.

[0121] S360. Establish a calibration database based on the calibration function corresponding to each objective lens at a set magnification.

[0122] The content of step S360 is the same as that of step S252. For a detailed description of step S360, please refer to the description of step S252. It will not be repeated here.

[0123] S370. Obtain the actual spectral information of the light emitted by the sample under test received by the objective lens, as well as the actual magnification and actual collection angle of the objective lens that receives the light emitted by the sample under test.

[0124] The content of step S370 is the same as that of step S260. For a detailed description of step S370, please refer to the description of step S260. It will not be repeated here.

[0125] S380. Determine the calibration function corresponding to the actual magnification based on the actual magnification and the calibration database.

[0126] Find the calibration function in the calibration database that corresponds to the set magnification that is equal to the actual magnification, and use that function as the calibration function corresponding to the actual magnification.

[0127] S390. Find the normalized value corresponding to the collection angle that is equal to the actual collection angle in the calibration function corresponding to the actual magnification, and use the normalized value as the actual calibration value.

[0128] For example, continue to refer to Figure 10 The calibration database includes an objective lens with a set magnification of 5 and a set collection angle of -90°, where the normalized value in polar coordinates is a3. When the actual magnification is 5 and the actual collection angle is -90°, the actual calibration value can be determined to be a3. It should be noted that a3 here is a value in polar coordinates.

[0129] S391. Determine the calibration spectral information based on the actual spectral information and the actual calibration value.

[0130] The actual spectral information is the spectral information of the light from the sample after passing through the objective lens. The actual spectral information includes the light intensity corresponding to each wavelength. The ratio of each light intensity in the actual spectral information to the actual calibration value can be used as the calibration light intensity, and the correspondence between the calibration light intensity and wavelength can be used as the calibration spectral information. The calibration spectral information includes the calibration light intensity corresponding to each wavelength.

[0131] Due to the asymmetry of the optical path within the detection module, the collection efficiencies on both sides are unlikely to be completely identical. If the difference in collection efficiencies is significant, completely opposite spurious data may occur. After correction, almost opposite results may appear. See reference [link / reference needed] for details. Figure 8 and Figure 9 .

[0132] It should be noted that, Figure 8 This includes the maximum peak intensity from the actual spectral information corresponding to multiple actual collection angles. Figure 9 It is the calibrated light intensity value after correcting the maximum peak intensity corresponding to each actual collection angle. The ratio of the maximum peak intensity corresponding to the actual collection angle to the actual calibrated value is used as the calibrated light intensity value.

[0133] The relationship between actual spectral information and actual calibration values ​​will be explained in detail below:

[0134] The calibration spectral information is denoted as F(x), the actual spectral information as G(x), and the actual calibration value as η(x). It should be noted that when the magnification of the objective lens and the collection angle are fixed, η(x) is a specific constant.

[0135] The following relationship exists among the calibration spectral information (F(x)), the actual spectral information (G(x)), and the actual calibration value (η(x)):

[0136] F(x)·η(x)=G(x) (1)

[0137] Normalizing formula (1) yields:

[0138]

[0139] Simplifying formula (2) yields the following equation:

[0140]

[0141] The normalized function is named as follows:

[0142] f(x)=κ·F(x),g(x)=ξ·G(x) (4)

[0143] Based on formulas (3) and (4), the following formula can be obtained:

[0144]

[0145] After rearranging formula (5), we can obtain the following formula:

[0146]

[0147] Where κ and ξ are normalization constant coefficients; f(x) is the normalized calibration spectral information; g(x) is the normalized actual spectral information; and x is the wavelength.

[0148] Therefore, the ratio of the actual spectral information obtained from the test to the actual calibration value is used as the calibration spectral information.

[0149] Optional, Figure 10 This is a flowchart illustrating another spectral calibration method provided according to an embodiment of the present invention. (Refer to...) Figure 10 The spectral calibration method provided in this embodiment includes the following steps:

[0150] S410 controls multiple objectives with different set magnifications to collect incident light reflected from a standard diffuse reflector at multiple different set collection angles, thereby obtaining multiple reflection spectrum information.

[0151] The content of step S410 is the same as that of step S110. For a detailed description of step S410, please refer to the description of step S110. It will not be repeated here.

[0152] S420: Obtain the peak wavelength corresponding to the maximum peak intensity in the reflection spectrum information corresponding to each set collection angle under each set magnification objective lens.

[0153] Chromatic aberration exists in objective lenses. This aberration can cause a shift in the peak wavelength corresponding to the maximum peak intensity at different collection angles under the same set magnification objective lens. In this embodiment, the peak wavelength corresponding to the maximum peak intensity is obtained. Based on the calibration database determined by the peak wavelength, the influence of chromatic aberration on the actual spectral information of the actual magnification objective lens can be improved.

[0154] You can continue to refer to this. Figures 4-7 First, find the maximum peak intensity in the reflectance spectrum information curve, and then determine the wavelength corresponding to the maximum peak intensity. This wavelength is the peak wavelength.

[0155] S430: Find the reference wavelength corresponding to each set magnification objective from all the peak wavelengths corresponding to each set magnification objective.

[0156] In this embodiment, the reference wavelength can be the peak wavelength of the set collection angle α with the smallest absolute value. When the set collection angle α includes 0°, the peak wavelength corresponding to 0° is the reference wavelength.

[0157] S440. Determine the wavelength offset corresponding to each peak wavelength under each set magnification objective lens based on the reference wavelength corresponding to each set magnification objective lens.

[0158] The difference between the peak wavelength and the reference wavelength is used as the wavelength offset. For example, the reference wavelength corresponding to a 5x objective lens is set to λ, and the peak wavelength corresponding to a 5x objective lens at a set collection angle of 20° is set to λ. α When the objective lens with a magnification of 5 is set at a collection angle of 20°, the wavelength shift Δλ is Δλ = λ. α -λ.

[0159] S450, Use the set collection angle and its corresponding wavelength offset under each set magnification objective as the calibration function for each set magnification objective.

[0160] For objectives with the same set magnification, each set collection angle corresponds to a wavelength offset. The correspondence between these set collection angles and wavelength offsets is used as the calibration function for the objective with that set magnification.

[0161] S460. Establish a calibration database based on the calibration function corresponding to each objective lens at a set magnification.

[0162] The calibration functions corresponding to all objectives with set magnification can be combined to form a calibration database.

[0163] S470. Obtain the actual spectral information of the light emitted by the sample under test received by the objective lens, as well as the actual magnification and actual collection angle of the objective lens that receives the light emitted by the sample under test.

[0164] The content of step S470 is the same as that of step S130. For a detailed description of step S470, please refer to the description of step S130. It will not be repeated here.

[0165] S480. Correct the actual spectral information based on the calibration database, actual magnification and actual collection angle to obtain the calibration spectral information.

[0166] The content of step S480 is the same as that of step S140. For a detailed description of step S480, please refer to the description of step S140. It will not be repeated here.

[0167] Optionally, the calibration spectral information includes wavelength information;

[0168] The actual spectral information is corrected based on the calibration database, the actual magnification, and the actual collection angle to obtain the calibration spectral information, including the following steps:

[0169] S481. Determine the calibration function corresponding to the actual magnification based on the actual magnification and the calibration database.

[0170] The calibration function corresponding to the set magnification that is equal to the actual magnification can be found in the calibration database, and this calibration function can be used as the calibration function corresponding to the actual magnification.

[0171] S482. Find the wavelength offset corresponding to the set collection angle that is equal to the actual collection angle in the calibration function corresponding to the actual magnification, and use the wavelength offset as the actual calibration value.

[0172] The calibration function corresponding to the actual magnification includes multiple set collection angles and wavelength offsets corresponding to the set collection angles. First, find the set collection angle that is equal to the actual collection angle, then determine the wavelength offset corresponding to the set collection angle, and use the wavelength offset as the actual calibration value.

[0173] S483. Determine the calibration spectral information based on the difference between the actual spectral information and the actual calibration value.

[0174] The actual spectral information includes the light intensity corresponding to each wavelength. The difference between the wavelength and the actual calibration value is taken as the calibrated wavelength. The light intensity corresponding to the calibrated wavelength is the same as the light intensity corresponding to the wavelength before calibration. In other words, the calibrated spectral information can be obtained by shifting the actual spectral information curve by the absolute value of the actual calibration value by a number of units.

[0175] Optionally, the collection angle can be set to -90° to 90°. For example, multiple collection angles can be 0°, 10°, 20°, 30°, 40°, 50°, 60°, 70°, 80°, 90°, -10°, -20°, -30°, -40°, -50°, -60°, -70°, -80°, and -90°.

[0176] Specifically, the collection angle can be set from -90° to 90°, which can collect reflected light from the front and side walls of the standard diffuse reflector plate. This allows for the correction of the actual spectral information of the light emitted from the front and side walls of the sample under test, making the calibration spectral information at the actual collection angle more accurate.

[0177] Optionally, multiple objectives with different magnifications are controlled to collect the incident light reflected from the standard diffuse reflector at multiple different collection angles to obtain multiple reflection spectrum information, including the following steps:

[0178] S111. Select an objective lens with a set magnification.

[0179] You can choose any objective lens with a set magnification from a variety of objective lenses.

[0180] S112. The objective lens with the current magnification is controlled to collect the incident light reflected by the standard diffuse reflector at multiple different set collection angles in sequence, so as to obtain the reflection spectrum information corresponding to each set collection angle.

[0181] The objective lens at the current magnification collects the incident light reflected from the standard diffuse reflector at a set collection angle, obtaining the reflection spectrum information corresponding to the set collection angle. Then, the set collection angle is changed by deflecting the objective lens or the stage, and the incident light reflected from the standard diffuse reflector is collected at the changed set collection angle, obtaining another reflection spectrum information. This process is repeated multiple times, obtaining a reflection spectrum information each time the set collection angle is adjusted. After obtaining the corresponding reflection spectrum information for each set collection angle corresponding to the current magnification objective lens, step S113 is executed.

[0182] S113. Adjust the magnification of the objective lens, and then return to step S111 until all objective lenses with set magnifications collect the incident light reflected by the standard diffuse plate at different set collection angles.

[0183] After adjusting the magnification of the objective lens, the multiple reflection spectrum information corresponding to the adjusted objective lens is obtained according to the method in step S112.

[0184] refer to Figure 11 , Figure 11 This is a schematic diagram of the structure of a spectral calibration device according to an embodiment of the present invention. The spectral calibration device provided in this embodiment includes: a light acquisition module 410, a database determination module 420, an information acquisition module 430, and a calibration module 440.

[0185] The light acquisition module 410 is used to control multiple objective lenses with different set magnifications to collect incident light reflected by a standard diffuse reflector at multiple different set collection angles, thereby obtaining multiple reflection spectrum information; wherein, the set collection angle is the angle between a first set vertical line and a second set vertical line, the first set vertical line being perpendicular to the surface of the standard diffuse reflector reflecting incident light, and the second set vertical line being perpendicular to the surface of the objective lens receiving light.

[0186] The database determination module 420 is used to establish a calibration database based on all acquired reflectance spectral information; wherein, the calibration database includes calibration values ​​corresponding to objectives of multiple magnifications at multiple collection angles.

[0187] The information acquisition module 430 is used to acquire the actual spectral information of the light emitted by the sample under test received by the objective lens, as well as the actual magnification and actual collection angle of the objective lens that receives the light emitted by the sample under test; wherein, the actual collection angle is the angle between the surface of the sample under test emitting light and the second set vertical line.

[0188] The calibration module 440 is used to correct the actual spectral information based on the calibration database, the actual magnification and the actual collection angle to obtain the calibration spectral information.

[0189] Specifically, the spectral calibration device provided in this embodiment may also include a standard diffuse reflector plate.

[0190] The spectral calibration device provided in this embodiment has the same beneficial effects as the spectral calibration method provided in any embodiment of the present invention. For technical details not covered in this embodiment, please refer to the spectral calibration method provided in any embodiment of the present invention.

[0191] This embodiment also provides an angle-resolved optical path system, which includes the spectral calibration device provided in any embodiment of the present invention.

[0192] refer to Figure 12 , Figure 12 This is a schematic diagram of another angle-resolved optical path system provided according to an embodiment of the present invention. The angle-resolved optical path system provided in this embodiment includes a detection module 110, a spectrum collection module 130, a control module 140, and a support stage 120.

[0193] The detection module 110 includes a series of microscopic imaging optical paths, such as an objective lens, a charge-coupled device (CCD) camera, a white light illumination assembly, lenses, and mirrors, as well as a spectral collection optical path. The control module 140 can be a computer, and the control module 140 is electrically connected to the detection module 110, the spectral collection module 130, and the stage 120.

[0194] It should be noted that, Figure 2 and Figure 12 The difference between the angle-resolved optical path systems shown is that the collection angle is set differently.

[0195] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and this is not limited herein.

[0196] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A spectral calibration method, characterized in that, include: Multiple objective lenses with different set magnifications are controlled to collect incident light reflected from a standard diffuse reflector at multiple different set collection angles to obtain multiple reflection spectrum information; wherein, the set collection angle is the angle between a first set perpendicular line and a second set perpendicular line, the first set perpendicular line being perpendicular to the surface of the standard diffuse reflector reflecting incident light, and the second set perpendicular line being perpendicular to the surface of the objective lens receiving light. A calibration database is established based on all the acquired reflectance spectral information; wherein, the calibration database includes calibration values ​​corresponding to objectives of multiple magnifications at multiple set collection angles, and the multiple set collection angles include all the set collection angles; The actual spectral information of the light emitted by the sample under test received by the objective lens, as well as the actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample under test, are obtained; wherein, the actual collection angle is the angle between the surface of the light emitted by the sample under test and the second set vertical line; The actual spectral information is corrected based on the calibration database, the actual magnification, and the actual collection angle to obtain the calibration spectral information; The step of establishing a calibration database based on all the acquired reflectance spectral information includes: Obtain the maximum peak intensity in the reflectance spectral information corresponding to each set collection angle under each set magnification objective lens; Find the reference peak intensity corresponding to each objective lens at each set magnification from all the maximum peak intensities corresponding to each set magnification; Based on the reference peak intensity, the maximum peak intensity corresponding to each set collection angle under each set magnification objective is normalized to obtain the normalized value corresponding to each set collection angle under each set magnification objective. The calibration database is established based on all the normalized values; Alternatively, establishing a calibration database based on all the acquired reflectance spectral information includes: Obtain the peak wavelength corresponding to the maximum peak intensity in the reflection spectrum information corresponding to each set collection angle under each set magnification objective lens; Find the reference wavelength corresponding to each objective lens at each set magnification from all the peak wavelengths corresponding to each set magnification; The wavelength offset corresponding to each peak wavelength under each objective lens at each set magnification is determined based on the reference wavelength corresponding to each set magnification objective lens; The set collection angle and its corresponding wavelength offset under each set magnification objective lens are used as the calibration function for each set magnification objective lens. The calibration database is established based on the calibration function corresponding to each objective lens with a set magnification.

2. The spectral calibration method according to claim 1, characterized in that, The process of establishing the calibration database based on all the normalized values ​​includes: Each set collection angle and its corresponding normalized value under each set magnification objective lens are used as the calibration function for each set magnification objective lens. The calibration database is established based on the calibration function corresponding to each objective lens with a set magnification.

3. The spectral calibration method according to claim 1, characterized in that, The step of normalizing the maximum peak intensity corresponding to each set collection angle under each set collection angle at each set magnification objective, based on the reference peak intensity, to obtain the normalized value corresponding to each set collection angle under each set magnification objective, includes: The ratio of the maximum peak intensity to the reference peak intensity at each set collection angle under each set magnification objective lens is used as the normalized value for each set collection angle.

4. The spectral calibration method according to claim 2, characterized in that, The calibration spectral information obtained by correcting the actual spectral information based on the calibration database, the actual magnification, and the actual collection angle includes: The calibration function corresponding to the actual magnification is determined based on the actual magnification and the calibration database; Find the normalized value corresponding to the collection angle that is equal to the actual collection angle in the calibration function corresponding to the actual magnification, and use the normalized value as the actual calibration value; The calibration spectral information is determined based on the actual spectral information and the actual calibration value.

5. The spectral calibration method according to claim 1, characterized in that, The calibration spectral information includes wavelength information; The actual spectral information is corrected based on the calibration database, the actual magnification, and the actual collection angle to obtain calibration spectral information, including: The calibration function corresponding to the actual magnification is determined based on the actual magnification and the calibration database; Find the wavelength offset corresponding to the set collection angle that is equal to the actual collection angle in the calibration function corresponding to the actual magnification, and use the wavelength offset as the actual calibration value; The calibration spectral information is determined based on the difference between the actual spectral information and the actual calibration value.

6. The spectral calibration method according to any one of claims 1-5, characterized in that, The set collection angle includes -90° to 90°; and / or The objective lenses, each with a different set magnification, collect incident light reflected from a standard diffuse reflector at multiple different set collection angles, thus obtaining multiple reflection spectral information, including: Select an objective lens with the set magnification; The objective lens, controlled by the current magnification, collects the incident light reflected by the standard diffuse reflector at multiple different set collection angles, thereby obtaining the reflection spectrum information corresponding to each set collection angle; Adjust the magnification of the objective lens, and return to the step of the objective lens controlling the current magnification collecting the incident light reflected by the standard diffuser at multiple different set collection angles, until all objective lenses with set magnifications collect the incident light reflected by the standard diffuser at different set collection angles.

7. A spectral calibration device, characterized in that, include: Light acquisition module, database determination module, information acquisition module, and calibration module; The light acquisition module is used to control multiple objective lenses with different set magnifications to collect incident light reflected by a standard diffuse reflector at multiple different set collection angles, thereby obtaining multiple reflection spectrum information; wherein, the set collection angle is the angle between a first set perpendicular line and a second set perpendicular line, the first set perpendicular line being perpendicular to the surface of the standard diffuse reflector reflecting incident light, and the second set perpendicular line being perpendicular to the surface of the objective lens receiving light. The database determination module is used to establish a calibration database based on all the acquired reflectance spectral information; wherein, the calibration database includes calibration values ​​corresponding to multiple magnification objectives at multiple collection angles; The information acquisition module is used to acquire the actual spectral information of the light emitted by the sample under test received by the objective lens, as well as the actual magnification and actual collection angle of the objective lens that receives the light emitted by the sample under test; wherein, the actual collection angle is the angle between the surface of the light emitted by the sample under test and the second set vertical line; The calibration module is used to correct the actual spectral information based on the calibration database, the actual magnification, and the actual collection angle to obtain calibration spectral information.

8. An angle-resolved optical path system, characterized in that, Includes the spectral calibration device as described in claim 7.

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