High-stability temperature sensor

Abstract

According to the high-stability temperature sensor provided by the invention, the sealing assembly is utilized to realize the sealing connection of the protective sleeve and the connecting sleeve, so that the sealing performance is improved, and the situation that oxygen in external air is continuously oxidized with an armored thermocouple metal sleeve in the protective sleeve due to the air volume change in the protective sleeve in the temperature change process is improved; and thermocouple defects are caused. Furthermore, a filling cavity is formed at the joint of the protective sleeve and the connecting sleeve, and oxygen activity reaction powder is filled in the filling cavity, so that the entered trace oxygen reacts with the oxygen activity reaction powder to be consumed, and the oxygen is prevented from entering the measuring end to be subjected to oxidation reaction with the metal sleeve of the sheathed thermocouple; therefore, the problems of inaccurate temperature measurement and service life reduction of the sensor caused by oxidation of the sheathed thermocouple metal sleeve are further improved, and the purpose of improving the temperature measurement stability of the temperature sensor is achieved.

Description

Technical Field

[0001] The invention relates to the technical field of photovoltaic power generation, and in particular to a high-stability temperature sensor. Background Art

[0002] As energy shortage and environmental pollution become increasingly serious, solar photovoltaic power generation technology, as one of the representatives of clean energy, is regarded as an important way to solve the energy crisis and reduce carbon emissions. The basic principle of solar photovoltaic power generation technology is achieved through the photovoltaic effect. Under light irradiation, photons in crystalline silicon solar cells will be absorbed, thereby changing the charge distribution inside them to form a potential difference, converting solar energy into electrical energy. Silicon is the most basic material for solar cells. Pure silicon itself has no conductivity, but doping it with some other elements, such as boron and phosphorus, can change its performance and form the most basic unit of solar cells, the PN junction. There are many methods for manufacturing PN junctions, including alloy method, diffusion method and epitaxial growth method, among which diffusion method is a more common process. The diffusion of wafers is generally carried out in a diffusion furnace. During the diffusion process of the doped elements, it is necessary to ensure that the inside of the diffusion furnace is in a specific constant temperature zone so that the doped elements can be fully and evenly diffused. It can be seen that temperature control is a very important link in the diffusion process. The effect of temperature control directly determines the quality of semiconductor wafer diffusion. Therefore, it is usually adopted to set multiple temperature detection points in the constant temperature zone to perform temperature inspection, display and control operations at the same time, so as to timely correct the control temperature of the wafer diffusion process. It can be seen that the development of a temperature sensor that can accurately detect the actual temperature of the entire constant temperature zone in the semiconductor wafer diffusion furnace is of great significance for furnace temperature control and semiconductor diffusion quality assurance.

[0003] Patent document with application number 201620109983.7 discloses a multi-point thermocouple structure for measuring the temperature of the entire section of a semiconductor diffusion furnace. The structure includes a protective sleeve and a porous insulating core rod. The porous insulating core rod is installed in the protective sleeve. The porous insulating core rod includes N temperature measuring points. A pair of thermocouples is arranged at each temperature measuring point. The thermocouples arranged at different temperature measuring points are independent of each other. The output end of the thermocouple is connected to the connector via a ferrule joint. The structure has multiple temperature measuring points. A pair of thermocouples is arranged at each temperature measuring point. The actual temperature of the entire section in the diffusion furnace can be accurately detected, and the uniformity of the furnace temperature can be reliably guaranteed. Patent document with application number 202410423246.3 discloses a material for sensor filaments and an integrated multi-point temperature sensor prepared using the material. Compared with the prior art, the material adds three components: lanthanum, gadolinium, and scandium, and uses armoring technology to form an integrated armored thermocouple. Multiple armored thermocouples of different lengths form multiple temperature measuring points. The integrated multi-point temperature sensor has long-term working stability and can work at 1050°C for a long time in the complex atmosphere environment of a crystalline silicon growth diffusion furnace used in the photovoltaic field. The service life is greater than 10 months, which greatly improves the service life.

[0004] The temperature sensor in the above-mentioned related technology generally has an outer sleeve made of very pure quartz, alumina or silicon carbide, which is suitable for the atmosphere in the furnace. The sleeve contains multiple armored thermocouples. The metal shell of the armored thermocouple is oxidized by contact with the outside air through the port of the sleeve. The oxidation of the metal outer sleeve brings many problems. For example, the shedding of the oxide layer brings the risk of harming the furnace environment, and the thickening of the oxide layer brings abnormal expansion of the thermocouple, resulting in uneven internal deformation, which leads to a decrease in the accuracy of thermocouple temperature measurement. In order to improve stability and prevent the outer metal protection tubes of multiple armored thermocouples from contacting with the outside air, oxidation occurs, and the temperature measurement accuracy decreases. Finally, it is necessary to fill the external port of the temperature sensor with glue to achieve overall sealing and fixation to isolate the outside air. However, although the glue-filling seal prevents the outside air from entering, the outer sleeve of the thermocouple is a consumable part and is often damaged during use. Normally, if the outer sleeve of the thermocouple is damaged, the equipment will break the vacuum, and thus judge that there is an abnormality. After checking and replacing the sleeve, the equipment can continue to operate normally. The glue-filling seal prevents the outside air from entering, and prevents the vacuum from being broken due to the damage of the outer sleeve of the thermocouple, so that the damage of the thermocouple cannot be monitored, which will cause the armored thermocouple to be completely exposed in the furnace, bringing impurity elements to the product in the furnace. Therefore, how to realize that the thermocouple can improve the defects of the armored thermocouple in the temperature sensor during the long-term working process, the outer metal protection tube is in contact with the outside air and oxidized, resulting in inaccurate temperature measurement and reduced temperature measurement stability without the need for glue filling has become a technical problem that needs to be overcome in this field. Summary of the invention

[0005] The object of the present invention is to provide a high-stability temperature sensor, which can improve the defect that the outer metal protection tube of the armored thermocouple in the temperature sensor is oxidized when in contact with the outside air during long-term operation, resulting in inaccurate temperature measurement and reduced temperature measurement stability.

[0006] The present invention provides a high-stability temperature sensor, comprising:

[0007] A protective sleeve, wherein one axial end of the protective sleeve is open to form an open end, and the other axial end is closed to form a closed end;

[0008] an armored thermocouple, wherein the measuring end of the armored thermocouple is located inside the closed end of the protective sleeve,

[0009] A connecting sleeve, wherein the axial ends of the connecting sleeve form a first opening and a second opening, and the first opening of the connecting sleeve is sealed and connected to the open end of the protection sleeve through a first sealing component, the second opening is closed by a second sealing component, and the guide end of the armored thermocouple passes through the second opening and is electrically connected to an external circuit for transmitting an electrical signal from a measuring end;

[0010] The connecting sleeve and the first sealing component and the second sealing component form a filling cavity, and the filling cavity is filled with oxygen active reaction powder.

[0011] By adopting the above technical solution, the sealing connection between the protective sleeve and the connecting sleeve is realized by using the sealing component, so as to improve the problem that during the temperature change, the volume of air in the protective sleeve changes, causing the oxygen in the outside air to continue to oxidize with the metal sleeve of the armored thermocouple in the protective sleeve, thereby causing thermocouple defects. Furthermore, a filling cavity is formed at the connection between the protective sleeve and the connecting sleeve, and oxygen-active reaction powder is filled in the filling cavity, so that the trace amount of oxygen entering reacts with the oxygen-active reaction powder and is consumed, thereby preventing oxygen from entering the measuring end and reacting with the metal sleeve of the armored thermocouple for oxidation, thereby further improving the problem that the oxidation of the metal sleeve of the armored thermocouple makes the temperature measurement inaccurate, and the stability of the temperature sensor is difficult to further improve.

[0012] Furthermore, the oxygen active reaction powder includes at least one solid deoxidizer powder.

[0013] By adopting the above technical solution, the above powder with high oxygen activity is used, which reacts quickly with oxygen and can quickly consume oxygen. At the same time, the above powder is widely available, cheap and easy to obtain, which is conducive to reducing production costs.

[0014] Furthermore, the number of the armored thermocouples is one or more than two.

[0015] By adopting the above technical scheme, temperature detection of single or multiple temperature points can be realized. In addition to being applicable to diffusion furnaces in the photovoltaic industry, it can also be applicable to temperature measurement and control in other fields. At the same time, since the armored thermocouple of the present invention does not need to be integrally sealed with glue at the external connection port, it is convenient for the inspection and replacement of single or multiple thermocouples, and is more conducive to improving the temperature measurement stability and service life of the temperature sensor and reducing maintenance costs.

[0016] Furthermore, the tube wall near the first opening of the connecting sleeve protrudes inward to form a mounting ring, the axial end of the protective sleeve abuts against the mounting ring, and the armored thermocouple passes through the protective sleeve and through the mounting ring to enter the connecting sleeve.

[0017] By adopting the above technical solution, the mounting ring is used to achieve convenient and stable assembly between the connecting sleeve and the protective sleeve, and when there are multiple armored thermocouples, the mounting ring can bundle and fix the multiple thermocouples to improve the stability of the temperature sensor.

[0018] Furthermore, the first sealing assembly includes a clamping ring, a plug and a first chuck, one axial end of the clamping ring is threadedly connected to the open end of the protective sleeve, and the other end is threadedly connected to the first opening of the connecting sleeve, the tube wall of the connecting sleeve close to the first opening is connected to the mounting ring to form a conical annular surface, the plug is sleeved on the outside of the protective sleeve, and the plug is made of elastic material in a spindle shape, the clamping ring presses the plug between the conical annular surface of the connecting sleeve and the protective sleeve to achieve a sealed connection between the connecting sleeve and the protective sleeve, the first chuck abuts against the side wall of the mounting ring away from the protective sleeve, and the first chuck is provided with a first through hole for the armored thermocouple to pass through, and the armored thermocouple passes through the first through hole and enters the connecting sleeve from the protective sleeve.

[0019] By adopting the above technical solution, a clamping ring is used to abut a plug made of elastic material between the connecting sleeve and the protective sleeve, so as to prevent air from entering the protective sleeve from the threaded connection between the connecting sleeve and the protective sleeve, and causing an oxidation reaction with the metal sleeve of the armored thermocouple to cause inaccurate temperature measurement. Furthermore, the conical annular surface formed by the connecting sleeve is conducive to the clamping ring to tighten the plug during the rotation and tightening process, thereby improving the airtightness. The first chuck encapsulates the oxygen active reaction powder filled in the filling chamber in the connecting sleeve, so as to prevent the oxygen active reaction powder from entering the measuring end of the protective sleeve, so that the trace oxygen that enters reacts at the guide end and is consumed. At the same time, the armored thermocouple passes through the first through hole on the first chuck, and the number of the first through holes corresponds to the number of the armored thermocouples. The first chuck can also fix the armored thermocouple and improve stability.

[0020] Furthermore, a plurality of reaction windows are provided on the first chuck, and a filter screen is fixedly connected to the reaction window, and the filter screen has a filter hole diameter smaller than the particle diameter of the oxygen active reaction powder.

[0021] By adopting the above technical solution, the reaction window on the first chuck can increase the contact area between the incoming trace oxygen and the oxygen-active reaction powder, thereby further improving the reaction rate, which is conducive to the rapid consumption of trace oxygen. At the same time, the filter net fixedly connected at the reaction window can prevent the oxygen-active reaction powder from entering the protective sleeve.

[0022] Furthermore, the contact surface between the clamping ring and the plug is chamfered into a conical surface.

[0023] By adopting the above technical solution, it is beneficial to push the plug to be clamped between the clamping ring, the protective sleeve and the connecting sleeve during the spiral clamping of the clamping ring, while improving the uniformity of the force and preventing the plug from being damaged and failing during the clamping process.

[0024] Furthermore, the second sealing assembly includes a second chuck and a clamping column. The second chuck is provided with a second through hole for the armored thermocouple to pass through. The clamping column is threadedly connected to the second opening of the connecting sleeve to press the second chuck against the oxygen-active reaction powder.

[0025] By adopting the above technical solution, the second sealing component is used to achieve the sealing of the second opening of the connecting sleeve, and the filled oxygen active reaction powder is pressed against the joint end of the connecting sleeve and the protective sleeve, which is conducive to the rapid reaction of the entering trace oxygen with the oxygen active reaction powder.

[0026] Furthermore, the connecting sleeve has a filling port on the tube wall between the first opening and the second opening, a feed pipe is fixedly connected to the filling port, a cover plate is threadedly connected to the feed pipe, and the joint surface of the feed pipe and the cover plate is sealed by a sealing ring.

[0027] By adopting the above technical solution, the rapid filling and replacement of the oxygen active reaction powder filled in the connecting sleeve is realized, and the oxygen active reaction powder is replenished in time to further improve the temperature measurement stability of the temperature sensor.

[0028] Furthermore, an observation window is provided on the tube wall of the connecting sleeve, a transparent baffle is provided on the observation window, and a sealing connection is achieved between the junction of the transparent baffle and the observation window via a sealing ring.

[0029] By adopting the above technical solution, the state of the oxygen active reaction powder can be observed conveniently, and when it is observed that the internal oxygen active reaction powder is invalid, the oxygen active reaction powder can be replaced in time.

[0030] In summary, the present invention has at least one of the following beneficial effects:

[0031] 1. The high-stability temperature sensor provided by the present invention utilizes a sealing component to realize a sealed connection between a protective sleeve and a connecting sleeve, thereby improving the problem that during the temperature change, the volume of air in the protective sleeve changes, causing oxygen in the outside air to continuously oxidize with the metal sleeve of the armored thermocouple in the protective sleeve, thereby causing thermocouple defects. Furthermore, a filling cavity is formed at the connection between the protective sleeve and the connecting sleeve, and oxygen-active reaction powder is filled in the filling cavity, so that the trace amount of oxygen that enters reacts with the oxygen-active reaction powder and is consumed, thereby preventing oxygen from entering the measuring end and oxidizing with the metal sleeve of the armored thermocouple, thereby further improving the problem that the oxidation of the metal sleeve of the armored thermocouple makes the temperature measurement inaccurate, and the stability of the temperature sensor is difficult to further improve, thereby achieving the effect of improving the temperature measurement stability of the temperature sensor.

[0032] 2. The high-stability temperature sensor provided by the present invention can be installed with a corresponding number of armored thermocouples according to the temperature control requirements of single-point temperature measurement or multi-point temperature measurement. At the same time, the temperature sensor of the present invention does not require additional overall glue filling and packaging. When the temperature measurement of a single or multiple armored thermocouples fails, they can be easily installed and replaced to further improve the temperature measurement stability of the temperature sensor.

[0033] 3. A high-stability temperature sensor provided by the present invention can conveniently observe the state of the oxygen-active reaction powder in the filling chamber by arranging a filling port and an observation window on the connecting sleeve, so that the oxygen-active reaction powder can be replaced and filled in time, thereby increasing the service life and reducing the maintenance cost, so as to further improve the temperature measurement stability of the temperature sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a partial structural schematic diagram of a temperature sensor according to an embodiment of the present invention. DETAILED DESCRIPTION

[0035] The present invention provides a high stability temperature sensor. In order to make the purpose, technical solution and effect of the present invention clearer and more specific, the present invention is further described in detail below. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. In the description of the present invention, it should be understood that the orientation or positional relationship of the embodiments of the present invention is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. Unless otherwise specified and limited, it should be noted that the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a mechanical connection or an electrical connection, or it can be the internal communication of two elements, it can be directly connected, or it can be indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to the specific circumstances.

[0036] The armored thermocouple is made of a combination of a metal sheath, an insulating material and a couple wire through cold drawing or hot rolling. The metal sheath is usually made of stainless steel, heat-resistant steel, iron-chromium-aluminum alloy, nickel-based high-temperature alloy, etc. The insulating material is made of insulating powders such as magnesium oxide and aluminum oxide. The couple wire is an S-type thermocouple composed of Pt / Pt-10Rh, an R-type thermocouple composed of Pt / Pt-13Rh, or a nickel-chromium-copper-nickel thermocouple (E type), an iron-copper-nickel thermocouple (J type), a nickel-chromium-nickel-silicon thermocouple (K type), a copper-copper-nickel thermocouple (T type) and a nickel-chromium-silicon-nickel-silicon-magnesium thermocouple (N type). In order to prevent the metal sleeve of the armored thermocouple from being corroded by chemical media, oxidizing atmosphere or reducing atmosphere, the armored thermocouple is assembled in a protective sleeve made of high-stability materials, such as quartz, alumina ceramics, silicon carbide ceramics, etc. At the same time, the number of armored thermocouples can be set according to the needs of the temperature measurement points. Single-point temperature measurement uses a single armored thermocouple, and multi-point temperature measurement uses multiple armored thermocouples, and the measuring ends are distributed along the axial direction of the protective sleeve at the corresponding temperature measurement points. In order to improve the operability and mechanical properties of the temperature sensor, stainless steel, aluminum alloy, carbon steel, etc. are used to prepare a handle structure, and the protective sleeve and the junction box structure or the wiring socket assembly are connected by threaded connection, clamping or mortise and tenon connection of the handle structure. Other conventional detachable connection methods are used to connect the protective sleeve and the junction box structure or the wiring socket assembly, and the wire of the armored thermocouple in the protective sleeve is electrically connected to the compensation wire of the external junction box structure or the wiring socket assembly, thereby realizing the transmission of electrical signals of the armored thermocouple. During the temperature change process, the exchange of air in the protective sleeve with the outside air causes the oxygen in the outside air to continuously oxidize the armored thermocouple metal sleeve in the protective sleeve, causing thermocouple defects.

[0037] To this end, the inventor has creatively proposed a high-stability temperature sensor after a long period of experimental research. Please refer to Figure 1 The temperature sensor includes a protective sleeve 1, an armored thermocouple 2, a connecting sleeve 3, a first sealing component and a second sealing component. Specifically, the protective sleeve 1 of this embodiment can be made of a quartz tube or alumina, and one axial end of the protective sleeve 1 is open ( Figure 1 The left end of the protective sleeve 1 forms an open end, and one end (not shown in the figure) is closed to form a closed end. The measuring end of the armored thermocouple 2 is located in the closed end of the protective sleeve 1, and the guiding end of the armored thermocouple 2 passes through the open end of the protective sleeve 1 and enters the connecting sleeve 3. The number of armored thermocouples in this embodiment is 5. In other embodiments, the number of armored thermocouples can be a single or more than two. The model of the armored thermocouple 2 can be the aforementioned S type, R type or other models. The specific model can be selected according to the temperature measurement requirements. The connecting sleeve 3 has a first opening ( Figure 1 The right opening in the middle) and the second opening ( Figure 1 The connecting sleeve 3 of the present embodiment can be made of stainless steel or nickel-based alloy, the first opening of the connecting sleeve 3 is tightly connected to the open end of the protective sleeve 1 through a first sealing component, the second opening is closed by a second sealing component, and the leading end of the armored thermocouple 2 passes through the second opening and is electrically connected to the compensation line of the external junction box structure for transmitting the electrical signal of the measuring end.

[0038] The first sealing component is used to achieve a sealed connection between the protection sleeve 1 and the connecting sleeve 3, thereby improving the sealing performance. Furthermore, the connecting sleeve 3, the first sealing component and the second sealing component form a filling cavity, and the filling cavity is filled with oxygen-activated reaction powder 4. Exemplarily, the oxygen active reaction powder 4 includes at least one of solid deoxidizer powders, which may be, for example, at least one of metal element powder, glucose oxidase, and ascorbic acid. The metal element powder may be iron powder or other powder that is easy to react with oxygen. It is understandable that the oxygen active reaction powder 4 may also include carrier powder or catalyst powder, etc. The carrier powder may be an alumina carrier, a silica carrier, a silica gel carrier, a hollow ceramic ball, a hollow glass bead, a foam plastic, an expanded perlite, an activated carbon carrier or diatomaceous earth, etc. The catalyst may be sodium chloride, calcium chloride, calcium hydroxide, etc., which catalyzes the rapid reaction of the oxygen active reaction powder 4 with oxygen, so that the trace amount of oxygen entering reacts with the oxygen active reaction powder 4 and is consumed, thereby preventing oxygen from entering the measuring end of the protective sleeve 1 and oxidizing the metal sleeve of the armored thermocouple 2, thereby further improving the problem that the oxidation of the metal sleeve of the armored thermocouple 2 makes the temperature measurement inaccurate, and the stability of the temperature sensor is difficult to further improve.

[0039] In order to achieve convenient and stable assembly between the protective sleeve 1 and the connecting sleeve 3, the tube wall near the first opening of the connecting sleeve 3 bulges inward to form a mounting ring 31. The axial end of the open end of the protective sleeve 1 abuts against the mounting ring 31. The armored thermocouple 2 passes through the protective sleeve 1 and passes through the mounting ring 31 to enter the connecting sleeve 3. When there are multiple armored thermocouples 2, the mounting ring 31 can bundle and fix the multiple armored thermocouples 2 to improve the structural stability of the temperature sensor.

[0040] The first sealing assembly of the present embodiment includes a retaining ring 5, a plug 6 and a first chuck 7. The retaining ring 5 is made of a rigid material such as cast iron or stainless steel. The retaining ring 5 is a horizontally placed "U"-shaped disc, including a disc and a circumferential side wall formed by the axial extension of the circumferential edge of the disc. A mounting hole is provided at the center of the disc, and a thread is formed on the inner surface of the mounting hole, so that the axial end of the disc of the retaining ring 5 is threadedly connected to the outer wall surface of the open end of the protective sleeve 1 through the mounting hole, and the inner surface of the circumferential side wall surface is also threaded, so that the circumferential side wall surface of the retaining ring 5 is threadedly connected to the outer wall surface of the first opening of the connecting sleeve 3. The plug 6 is made of elastic material, such as rubber, polyurethane, etc. The plug 6 adopts a cylindrical structure, and the two axial ends of the cylindrical structure are chamfered to form a spindle-shaped structure. Correspondingly, the pipe wall of the connecting sleeve 3 close to the first opening is connected with the mounting ring 31 to form a conical annular surface 32. The plug 6 is sleeved on the outside of the protective sleeve 1, and the clamping ring 5 presses one end of the plug 6 between the conical annular surface 32 of the connecting sleeve 3 and the outer wall of the protective sleeve 1 to prevent air from entering the threaded connection between the connecting sleeve 3 and the protective sleeve 1. It enters the protective sleeve 1 and undergoes an oxidation reaction with the metal sleeve of the armored thermocouple 2, resulting in inaccurate temperature measurement. The conical annular surface 32 formed by the connecting sleeve 3 is conducive to the clamping ring 5 to press the plug 6 tightly during the rotation and clamping process, thereby improving the airtightness. Similarly, the contact surface between the clamping ring 5 and the plug 6 is chamfered into a conical surface, which is conducive to pushing the plug 6 to be clamped between the clamping ring 5, the protective sleeve 1 and the connecting sleeve 3 during the spiral clamping process of the clamping ring 5, while improving the uniformity of the force and preventing the plug 6 from being damaged and failing during the clamping process.

[0041] The first chuck 7 abuts against the side wall of the mounting ring 31 of the connecting sleeve 3 away from the protective sleeve 1. The geometric size of the first chuck 7 is adapted to the inner diameter of the connecting sleeve 3, so that the circumferential outer wall of the first chuck 7 abuts against the inner wall surface of the connecting sleeve 3, thereby encapsulating the oxygen active reaction powder 4 filled in the filling chamber in the connecting sleeve 3, preventing the oxygen active reaction powder 4 from entering the measuring end of the protective sleeve 1, so that the trace oxygen entering reacts at the guide end and is consumed. At the same time, the first chuck 7 is provided with a first through hole 71 for the armored thermocouple 2 to pass through. The armored thermocouple 2 passes through the first through hole 71 and enters the connecting sleeve 3 from the protective sleeve 1. The number of the first through holes 71 corresponds to the number of the armored thermocouples 2. The first chuck 7 can also fix the armored thermocouple 2 to improve the structural stability. Furthermore, a plurality of reaction windows (not shown in the figure) are provided on the first chuck 7, and a filter screen is fixedly connected to the reaction window, and the filter screen has a filter hole diameter smaller than the particle diameter of the oxygen active reaction powder 4. The reaction window on the first chuck 7 can increase the contact area between the incoming trace oxygen and the oxygen active reaction gas 4, thereby further improving the reaction rate, which is conducive to the rapid consumption of trace oxygen, and at the same time, the filter screen fixedly connected at the reaction window can prevent the oxygen active reaction powder 4 from entering the protective sleeve 1.

[0042] Please refer to Figure 1The second sealing component arranged at the second opening of the connecting sleeve 3 includes a second chuck 8 and a clamping column 9. The outer surface of the clamping column 8 is provided with a thread, and the clamping column 8 is threadedly connected to the inner wall surface of the second opening of the connecting sleeve 3. The geometric size of the second chuck 8 is adapted to the inner diameter of the connecting sleeve 3, so that the circumferential side wall of the second chuck 8 abuts against the inner wall surface of the connecting sleeve 3. The second chuck 8 is located between the clamping column 9 and the filled oxygen active reaction powder 4. The clamping column 9 spirally rotates to push the second chuck 8 to move toward the oxygen active reaction powder 4 in the connecting sleeve 3, so that the oxygen active reaction powder 4 is pressed tightly between the first chuck 7 and the second chuck 8, so that the oxygen active reaction powder 4 is pressed tightly against the joint end of the connecting sleeve 3 and the protective sleeve 1, which is conducive to the trace oxygen entering from the micropores of the joint end to react quickly and fully with the oxygen active reaction powder 4. The second chuck 8 is provided with a second through hole 81 for the armored thermocouple 2 to pass through. The armored thermocouple 2 passes through the second through hole 81 and passes through the connecting sleeve 3 to connect with the compensation wire of the external junction box structure to transmit electrical signals. The connection method can be welding, overlapping, bonding, winding connection, etc. It should be understood that the temperature sensor of the present invention uses the first and second sealing components and the oxygen-active reaction powder 4 to effectively prevent oxygen in the air from entering the protective sleeve 1 and reacting with the armored thermocouple 2. Therefore, the temperature sensor provided by the present invention does not need additional overall glue encapsulation at the second opening of the connecting sleeve 3. When the temperature measurement of a single or multiple armored thermocouples 2 fails, it can be easily installed and replaced to further improve the temperature measurement stability of the temperature sensor.

[0043] In order to realize the rapid filling and replacement of the oxygen active reaction powder 4 filled in the connecting sleeve 3, and timely replenish the oxygen active reaction powder 4 to further improve the temperature measurement stability of the temperature sensor, a filling port is provided on the tube wall of the micropores between the first opening and the second opening of the connecting sleeve 3, and the feeding pipe 10 is fixedly connected to the filling port. The fixed connection method of this embodiment can be welding, clamping, screw connection, one-piece molding, etc. The feed pipe 10 is threadedly connected to the cover plate 11, and the joint surface of the feed pipe 10 and the cover plate 11 is sealed by a sealing ring 12. The material of the feed pipe 10 and the cover plate 11 can be stainless steel or cast iron, etc. Furthermore, an observation window is provided on the tube wall of the connecting sleeve 3, and a transparent baffle 13 is provided on the observation window, and the junction of the transparent baffle 13 and the observation window is also sealed by a sealing ring. The positioning connection between the observation window and the transparent baffle 13 can be pivoted or snapped. The setting of the observation window can conveniently realize the status observation of the oxygen active reaction powder 4. When it is observed that the internal oxygen active reaction powder fails, such as color changes, etc., the oxygen active reaction powder 4 can be replaced in time.

[0044] In summary, the temperature sensor provided by the present invention utilizes a sealing component to realize a sealed connection between the protective sleeve 1 and the connecting sleeve 3, thereby improving the sealing performance and improving the problem that during the temperature change, the volume of air in the protective sleeve changes, causing the oxygen in the outside air to continuously oxidize with the metal sleeve of the armored thermocouple in the protective sleeve, thereby causing thermocouple defects. Furthermore, a filling cavity is formed at the connection between the protective sleeve 1 and the connecting sleeve 3, and the oxygen active reaction powder 4 is filled in the filling cavity, so that the trace amount of oxygen entering reacts rapidly with the oxygen active reaction powder 4 and is quickly consumed, thereby preventing oxygen from entering the measuring end and oxidizing the metal sleeve of the armored thermocouple 2, thereby further improving the problem that the oxidation of the metal sleeve of the armored thermocouple 2 makes the temperature measurement inaccurate, and the stability of the temperature sensor is difficult to further improve, thereby achieving the effect of improving the temperature measurement stability of the temperature sensor.

[0045] It should be understood that the application of the present invention is not limited to the above examples. For ordinary technicians in this field, improvements or changes can be made based on the above description. All these improvements and changes should fall within the scope of protection of the claims attached to the present invention.

Claims

1. A high stability temperature sensor, characterized in that: include: A protective sleeve, wherein one axial end of the protective sleeve is open to form an open end, and the other axial end is closed to form a closed end; An armored thermocouple, wherein the measuring end of the armored thermocouple is located in the closed end of the protective sleeve, and a connecting sleeve is provided, wherein the axial ends of the connecting sleeve form a first opening and a second opening, and the first opening of the connecting sleeve is sealed and connected to the open end of the protective sleeve through a first sealing component, and the second opening is closed through a second sealing component, and the guide end of the armored thermocouple passes through the second opening and is electrically connected to an external circuit for transmitting an electrical signal of the measuring end; The connecting sleeve and the first sealing component and the second sealing component form a filling cavity, and the filling cavity is filled with oxygen active reaction powder.

2. The high stability temperature sensor according to claim 1, characterized in that: The oxygen active reaction powder includes at least one solid deoxidizer powder.

3. The high stability temperature sensor according to claim 1 or 2, characterized in that: The number of the armored thermocouples is one or more than two.

4. The high stability temperature sensor according to claim 1 or 2, characterized in that: The tube wall near the first opening of the connecting sleeve protrudes inward to form a mounting ring, the axial end of the protective sleeve abuts against the mounting ring, and the armored thermocouple passes through the protective sleeve and through the mounting ring into the connecting sleeve.

5. The high stability temperature sensor according to claim 4, characterized in that: The first sealing assembly includes a clamping ring, a plug and a first chuck, one axial end of the clamping ring is threadedly connected to the open end of the protective sleeve, and the other end is threadedly connected to the first opening of the connecting sleeve, the tube wall of the connecting sleeve close to the first opening is connected to the mounting ring to form a conical annular surface, the plug is sleeved on the outside of the protective sleeve, and the plug is made of elastic material in a spindle shape, the clamping ring presses the plug between the conical annular surface of the connecting sleeve and the protective sleeve to achieve a sealed connection between the connecting sleeve and the protective sleeve, the first chuck abuts against the side wall of the mounting ring away from the protective sleeve, the first chuck is provided with a first through hole for the armored thermocouple to pass through, and the armored thermocouple passes through the first through hole and enters the connecting sleeve from the protective sleeve.

6. The high stability temperature sensor according to claim 5, characterized in that: A plurality of reaction windows are provided on the first chuck, and a filter screen is fixedly connected to the reaction window, and the filter screen has a filter hole diameter smaller than the particle diameter of the oxygen active reaction powder.

7. The high stability temperature sensor according to claim 5, characterized in that: The contact surface between the clamping ring and the plug is chamfered into a conical surface.

8. The high stability temperature sensor according to claim 1 or 2, characterized in that: The second sealing assembly includes a second chuck and a clamping column. The second chuck is provided with a second through hole for the armored thermocouple to pass through. The clamping column is threadedly connected to the second opening of the connecting sleeve to press the second chuck against the oxygen-active reaction powder.

9. The high stability temperature sensor according to claim 1 or 2, characterized in that: The connecting sleeve is provided with a filling port on the tube wall between the first opening and the second opening, the filling port is fixedly connected to a feed pipe, the feed pipe is threadedly connected to a cover plate, and the joint surface between the feed pipe and the cover plate is sealed by a sealing ring.

10. The high stability temperature sensor according to claim 1 or 2, characterized in that: An observation window is provided on the tube wall of the connecting sleeve, and a transparent baffle is arranged on the observation window. The junction between the transparent baffle and the observation window is sealed and connected via a sealing ring.

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