Liquid crystal micro-display reflector

Abstract

The invention provides a liquid crystal micro-display reflector, and relates to the technical field of semiconductors. Comprising a substrate; the first insulating layer covers the substrate; the plurality of bottom reflection electrodes are arranged on the first insulating layer in a rectangular array mode, the bottom reflection electrodes in adjacent rows are arranged in a staggered mode, and the projection of the bottom reflection electrodes in the first direction has a partial overlapping area; the second insulating layer covers the first insulating layer and the bottom reflecting electrode; the top reflection electrodes are arranged on the second insulating layer in a rectangular array mode, the top reflection electrodes in adjacent columns are arranged in a staggered mode, the top reflection electrodes are located between the adjacent bottom reflection electrodes in the same row, and the projection of the top reflection electrodes in the second direction has a partial overlapping area; and the plurality of top conductive columns penetrate through the second insulating layer and the first insulating layer, are arranged in one-to-one correspondence with the top reflecting electrodes and are used for electrically connecting the top reflecting electrodes with the substrate. The technical problems of circuit failure and the like caused by easy breakdown leakage between two diagonally adjacent aluminum films are solved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a liquid crystal micro-display reflector. Background Art

[0002] With the maturity of laser light source technology, the market share of projection products based on liquid crystal micro-display reflectors is gradually increasing. At present, the pixel size of mainstream products is mostly in the range of 3~4um. The main factor restricting the further miniaturization of pixels is the isolation spacing between pixels. Since the dielectric material filled between adjacent pixels bears the role of electrical isolation, there is a limit width to ensure that the dielectric layer will not break down and leak during operation. When the pixel size is miniaturized and the isolation spacing remains unchanged, the proportion of the area of ​​the isolation area in the array area will increase, which is manifested as a decrease in optical reflectivity on a macro scale. Taking rectangular pixels as an example, when the pixel side length is 4um and the spacing is 0.2um, the pixel area accounts for 90.7%; when the pixel side length is reduced to 3um and the spacing is 0.2um, the pixel area accounts for 87%. As shown in the optical photo below, smaller pixels directly show that the "grid" is denser and the macro brightness is lower. The imaging principle of liquid crystal micro-display reflectors is to reflect the image from an external light source. If the reflectivity is lower than 80%, it cannot meet the system requirements.

[0003] The current solutions to improve reflectivity mainly focus on the following aspects: optimizing the thickness of the passivation layer (anti-reflection film); optimizing the roughness of the aluminum film surface; optimizing the pixel sidewall morphology, etc. Existing reflectors use staggered aluminum films to improve reflectivity, but in such a design, breakdown and leakage are prone to occur between two diagonally adjacent aluminum films, resulting in circuit failure, damage and waste of the LCD microdisplay reflector. Summary of the invention

[0004] The present application mainly provides a liquid crystal micro-display reflector to solve the technical problem that breakdown and leakage easily occur between two diagonally adjacent aluminum films, resulting in circuit failure.

[0005] The technical solution adopted by this application to solve the above technical problems is: The present application provides a liquid crystal micro-display reflector, comprising a substrate; a first insulating layer, covering the substrate; a plurality of bottom reflective electrodes, arranged in a rectangular array on the first insulating layer, the bottom reflective electrodes in adjacent rows are staggered, and the projections in the first direction have a partial overlap area; a plurality of bottom conductive pillars, running through the first insulating layer, and arranged one-to-one with each of the bottom reflective electrodes, for electrically connecting the bottom reflective electrodes to the substrate; a second insulating layer, covering the first insulating layer and the bottom reflective electrodes, and the second insulating layer is a transparent insulating layer; a plurality of top reflective electrodes, arranged in a rectangular array on the second insulating layer, the top reflective electrodes in adjacent columns are staggered, and the top reflective electrodes are located between adjacent bottom reflective electrodes in the same row, and the projections in the second direction have a partial overlap area; a plurality of top conductive pillars, running through the second insulating layer and the first insulating layer, and arranged one-to-one with each of the top reflective electrodes, for electrically connecting the top reflective electrodes to the substrate; wherein the first direction and the second direction are perpendicular to each other.

[0006] Optionally, the bottom reflective electrode and the top reflective electrode partially overlap in a vertical projection.

[0007] Optionally, the bottom reflection electrode and the top reflection electrode are both rectangular; and the length direction of the bottom reflection electrode and the length direction of the top reflection electrode are arranged perpendicular to each other.

[0008] Optionally, the lengths of the bottom reflection electrode and the top reflection electrode are both L, and the widths of the bottom reflection electrode and the top reflection electrode are both W; the spacing between the bottom reflection electrodes in adjacent rows is 60nm~150nm, the spacing between the top reflection electrodes in adjacent columns is 60nm~150nm, the spacing between adjacent bottom reflection electrodes in the same row is less than L; and the spacing between adjacent top reflection electrodes in the same column is less than L; or, the spacing between adjacent bottom reflection electrodes in the same row is less than W; and the spacing between adjacent top reflection electrodes in the same column is less than W.

[0009] Optionally, it also includes: a plurality of bottom reflection enhancement films, covering the bottom reflection electrode and arranged one-to-one with each of the bottom reflection electrodes; a plurality of top reflection enhancement films, covering the top reflection electrode and arranged one-to-one with each of the top reflection electrodes; the bottom reflection enhancement films and the top reflection enhancement films are arranged in pairs.

[0010] Optionally, at least part of the bottom anti-reflection film is located between adjacent top reflective electrodes.

[0011] Optionally, the bottom anti-reflection film includes a first bottom covering film and a second bottom covering film stacked in sequence, the first bottom covering film covers the bottom reflection electrode, and the second bottom covering film is located between two adjacent top reflection electrodes.

[0012] Optionally, a thickness ratio of the first bottom coating film to the second bottom coating film is 1:(1.1-1.2).

[0013] Optionally, the top reflection enhancement film includes a first top covering film and a second top covering film stacked in sequence, and the first top covering film covers the top reflection electrode.

[0014] Optionally, a thickness ratio of the first top coating film to the second top coating film is 1:(1.1-1.2).

[0015] Optionally, the first bottom film and the first top film are silicon nitride films; and the second bottom film and the second top film are silicon oxide films.

[0016] The present application provides a liquid crystal micro-display reflector, which can maximize the reflection area by arranging the bottom reflection electrode and the top reflection electrode in layers and staggered with each other and designing a partial overlapping area, thereby improving the optical efficiency and display brightness. The overlapping area design avoids the situation where the top angles of the bottom reflection electrodes are opposite to each other, and avoids the situation where the top angles of the top reflection electrodes are opposite to each other, thereby reducing the probability of tip discharge between the top angles and reducing the risk of current breakdown and leakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solution of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 This is a schematic diagram of the structure of the liquid crystal micro-display reflector of this application; Figure 2 This is a schematic diagram of the distribution of the bottom reflective electrode and the top reflective electrode of the present application.

[0019] Icon: 10-substrate; 20-bottom reflective electrode; 30-bottom conductive column; 40-second insulating layer; 50-top reflective electrode; 60-top conductive column; 70-bottom anti-reflection film; 71-first bottom covering film; 72-second bottom covering film; 80-top anti-reflection film; 81-first top covering film; 82-second top covering film; 90-first insulating layer.

[0020] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solutions and advantages of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0022] It should be noted that all directional indications in the embodiments of the present application (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0023] In this application, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0024] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present application, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in the field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0025] The current solutions to improve reflectivity mainly focus on the following directions: optimizing the thickness of the passivation layer (anti-reflection film); optimizing the roughness of the aluminum film surface; optimizing the pixel sidewall morphology, etc. Existing reflectors use staggered aluminum films to improve reflectivity, but in such a design, breakdown leakage is prone to occur between two diagonally adjacent aluminum films, resulting in circuit failure, damage and waste of the liquid crystal microdisplay reflector. In response to the above problems, the embodiments of the present application provide the following technical solutions to overcome the above problems.

[0026] Please refer to Figure 1 and Figure 2 The embodiment of the present application provides a liquid crystal micro-display reflector, comprising a substrate 10; a first insulating layer 90 covering the substrate 10; a plurality of bottom reflective electrodes 20, arranged in a rectangular array on the first insulating layer 90, the bottom reflective electrodes 20 in adjacent rows are staggered, and in a first direction ( Figure 2 The projection of the first insulating layer 90 in the Y direction) has a partial overlap area; a plurality of bottom conductive pillars 30, which penetrate the first insulating layer 90 and are arranged one-to-one with each of the bottom reflective electrodes 20, for electrically connecting the bottom reflective electrode 20 to the substrate 10; a second insulating layer 40, which covers the first insulating layer 90 and the bottom reflective electrode 20, and the second insulating layer 40 is a transparent insulating layer; a plurality of top reflective electrodes 50, which are arranged in a rectangular array on the second insulating layer, the top reflective electrodes 50 of adjacent columns are arranged alternately, and the top reflective electrodes 50 are located between the adjacent bottom reflective electrodes 20 in the same row, and the projection in the second direction has a partial overlap area; a plurality of top conductive pillars 60, which penetrate the second insulating layer 40 and the first insulating layer 90, and are arranged one-to-one with each of the top reflective electrodes 50, for electrically connecting the top reflective electrode 50 to the substrate 10; wherein the first direction and the second direction are perpendicular to each other (the substrate 10 may have a complex circuit structure such as a logic circuit, for example, composed of multiple devices).

[0027] Specifically, the substrate 10 is the basis of the entire structure, and the substrate 10 provides electrical connection and physical support.

[0028] The bottom reflection electrodes 20 are arranged in a rectangular array on the first insulating layer 90 to form a pixelated reflection area. The bottom reflection electrodes 20 in adjacent rows are staggered to increase the effective reflection area, improve the utilization rate and reflection efficiency of light, and form a partial overlap area in the bottom reflection electrodes 20 in adjacent rows in the first direction, which reduces the probability of tip discharge at the top corner between the bottom reflection electrodes 20.

[0029] The bottom conductive pillar 30 penetrates the first insulating layer 90 to realize the electrical connection between the bottom reflective electrode 20 and the substrate 10, ensuring that each pixel electrode can be independently controlled. The second insulating layer 40: covers the first insulating layer 90 and the bottom reflective electrode 20, is a transparent insulating layer, allows light to pass through and illuminate the bottom reflective electrode 20, and provides additional electrical isolation.

[0030] Top reflective electrode 50: arranged in a rectangular array on the second insulating layer 40 to form a pixelated reflective area. The top reflective electrodes 50 of adjacent columns are staggered to increase the effective reflection area, improve the utilization rate and reflection efficiency of light, and form a partial overlap area between the top reflective electrodes 50 of adjacent columns in the second direction, which reduces the probability of tip discharge at the top corner between the top reflective electrodes 50. And a layered complementary staggered layout is formed with the bottom reflective electrode 20, which not only increases the effective reflection area, improves the utilization rate and reflection efficiency of light, but also prevents current breakdown and leakage between the top reflective electrode 50 and the bottom reflective electrode 20. The top conductive column 60 penetrates the second insulating layer 40 and the first insulating layer 90 to achieve electrical connection between the top reflective electrode 50 and the substrate 10.

[0031] It should be noted that Figure 2 The X direction is the first direction, the Y direction is the second direction, and the first direction and the second direction are perpendicular to each other, so that the bottom reflective electrode 20 and the top reflective electrode 50 form a staggered layout similar to a chessboard. This layout helps to maximize the reflection area while reducing direct contact between adjacent electrodes and reducing the risk of breakdown.

[0032] The present application provides a liquid crystal micro-display reflector, which can maximize the reflection area by arranging the bottom reflection electrode 20 and the top reflection electrode in layers and staggered with each other and designing a partial overlapping area, thereby improving the optical efficiency and display brightness. The overlapping area design avoids the situation where the top angles of the bottom reflection electrodes 20 are opposite to each other, and avoids the situation where the top angles of the top reflection electrodes 50 are opposite to each other, thereby reducing the probability of tip discharge between the top angles and reducing the risk of current breakdown and leakage.

[0033] In the embodiment of the present application, the bottom reflective electrode 20 and the top reflective electrode 50 partially overlap in vertical projection.

[0034] Specifically, the projections of the bottom reflective electrode 20 and the top reflective electrode 50 in the vertical direction overlap each other, which means that when viewed from above, parts of the two electrode layers overlap. This design can increase the effective reflection area because light can be reflected by the two electrode layers, increasing the utilization and reflectivity of light. Increasing the reflectivity can not only increase the brightness, but also improve the contrast and color saturation of the image, thereby improving the overall image quality. The overlapping design allows each pixel area to utilize light more efficiently, which is beneficial for improving display performance without increasing power consumption.

[0035] In the embodiment of the present application, the bottom reflection electrode 20 and the top reflection electrode 50 are both rectangular; the length direction of the bottom reflection electrode 20 and the length direction of the top reflection electrode 50 are perpendicular to each other.

[0036] Specifically, the bottom reflective electrode 20 and the top reflective electrode 50 are in a rectangular shape. This regular geometric shape helps to accurately control the area and spacing of the electrodes, thereby accurately controlling the size and arrangement of the pixels. The length direction of the bottom reflective electrode 20 is perpendicular to the length direction of the top reflective electrode 50. This layout forms a staggered grid pattern, which can maximize the use of space and improve the fill factor of the pixel. In a vertical setting, the staggered arrangement of the top reflective electrode 50 and the bottom reflective electrode 20 can reduce the shielding of the bottom reflective electrode 20 by the top reflective electrode 50 while maintaining a high space utilization rate.

[0037] In this embodiment, the rectangular electrodes arranged perpendicularly to each other can improve the fill factor of the pixel array, that is, the ratio of the effective display area to the total area, thereby improving the display efficiency. By precisely controlling the pixel size and arrangement, the display resolution can be improved, making the image clearer and more delicate. The rectangular electrodes arranged perpendicularly to each other can provide better mechanical stability because the staggered arrangement between them reduces deformation caused by thermal expansion or other mechanical stresses.

[0038] In an embodiment of the present application, the lengths of the bottom reflection electrode 20 and the top reflection electrode 50 are both L, and the widths of the bottom reflection electrode 20 and the top reflection electrode 50 are both W; the spacing between the bottom reflection electrodes 20 in adjacent rows is 60nm~150nm, the spacing between the top reflection electrodes 50 in adjacent columns is 60nm~150nm, the spacing between the adjacent bottom reflection electrodes 20 in the same row is less than L; and the spacing between the adjacent top reflection electrodes 50 in the same column is less than L.

[0039] Specifically, the length of the bottom reflection electrode 20 and the width of the top reflection electrode 50 are both L, and the width is W. This uniform size helps to maintain consistent optical and electrical properties and simplify the manufacturing process. The spacing between the bottom reflection electrodes 20 in adjacent rows is 60nm~150nm, and the spacing between the top reflection electrodes 50 in adjacent columns is also 60nm~150nm. This fine spacing control helps to reduce crosstalk between electrodes while maintaining sufficient isolation to avoid electrical breakdown. The spacing between adjacent bottom reflection electrodes 20 in the same row is less than L, and the spacing between adjacent top reflection electrodes 50 in the same column is less than L. This arrangement helps to maximize the fill factor of the pixel and improve display efficiency. The staggered arrangement of the bottom reflection electrode 20 and the top reflection electrode 50 forms a grid structure, which can improve the utilization of light because each pixel position may be illuminated by light.

[0040] In this embodiment, by precisely controlling the size and spacing of the bottom reflective electrode 20 and the top reflective electrode 50, the reflective area of ​​each pixel can be maximized, thereby improving optical efficiency and display brightness. The optimized pixel arrangement helps to improve the resolution and clarity of the image because each pixel can be independently controlled, reducing interference between pixels. The uniform size and fine spacing control of the bottom reflective electrode 20 and the top reflective electrode 50 simplifies the manufacturing process because they can be implemented through a standardized etching process.

[0041] In the embodiment of the present application, the spacing between the adjacent bottom reflective electrodes 20 in the same row is less than W; the spacing between the adjacent top reflective electrodes 50 in the same column is less than W.

[0042] Specifically, the spacing between adjacent bottom reflection electrodes 20 in the same row is smaller than the width of the top reflection electrode 50, and the effective display area is increased while ensuring that the top reflection electrode 50 and the bottom reflection electrode 20 have a partial overlap area. In addition, the spacing between adjacent top reflection electrodes 50 in the same column is smaller than the width of the bottom reflection electrode 20, so that the reflection area of ​​the bottom reflection electrode 20 can be maximized, and the proportion of the effective display area can be increased, that is, the fill factor is improved. The fill factor refers to the area ratio of pixels actually used for display in the display area.

[0043] In an embodiment of the present application, it further includes: a plurality of bottom anti-reflection films 70 covering the bottom reflection electrode 20 , being located between the bottom reflection electrode 20 and the second transparent insulating anti-reflection film, and being arranged one-to-one correspondingly to each of the bottom reflection electrodes 20 .

[0044] Specifically, the bottom anti-reflection film 70 directly covers the bottom reflective electrode 20, so that the reflectivity of the light reflected from the bottom reflective electrode 20 is improved when passing through the anti-reflection film. The anti-reflection film is located between the bottom reflective electrode 20 and the second transparent insulating layer. Such a layout can protect the bottom reflective electrode 20 from environmental influences and improve the optical performance of the overall structure. Although the bottom reflective electrode 20 and the top reflective electrode 50 are arranged in layers, when the tops of the bottom reflective electrode 20 and the top reflective electrode 50 have the same anti-reflection film, the consistency of the reflection performance of each pixel in the entire array is ensured, which is crucial to maintaining the uniformity of the image and improving the display quality.

[0045] It should be noted that the main function of the anti-reflection film is to increase the optical reflectivity of the reflector and to enhance the reflected light by using the principle of light interference.

[0046] In the embodiment of the present application, the bottom anti-reflection film 70 includes a first bottom covering film 71 and a second bottom covering film 72 stacked in sequence, and the first bottom covering film 71 covers the bottom reflection electrode 20 .

[0047] Specifically, the bottom anti-reflection film 70 enhances reflection by stacking two layers of thin films made of different materials (a first bottom film 71 and a second bottom film 72). This structure uses the interference principle of light to optimize the phase of the reflected light by precisely controlling the thickness and refractive index of the film layer, thereby achieving a higher reflectivity. The first bottom film 71 directly covers the bottom reflective electrode 20, which can protect the electrode from environmental influences, such as physical damage, chemical corrosion, etc., thereby extending the service life of the reflector.

[0048] Understandable, such as Figure 1 As shown, the area of ​​the second insulating layer 40 directly below the second bottom film 72 is the first bottom film 71, because the first bottom film 71 is a part of the second insulating layer 40 (a part located on the bottom reflective electrode 20, and the second bottom film 72 is a dielectric layer located between the top reflective electrodes 50 (usually, when forming the top reflective electrode 50, a dielectric layer is first deposited, then patterned, and then filled with the top reflective electrode. It is also possible to first deposit a layer of metal, and then pattern the metal to form the top reflective electrode 50, but no matter which method, there is a dielectric layer between the top reflective electrodes 50 with the same thickness as the top reflective electrode for spacing the pixel electrodes), which is more conducive to the control of the film layer and the reduction of the cost. In this embodiment, through the precisely designed multi-layer film structure, the reflectivity of the bottom reflective electrode 20 can be significantly improved, thereby improving the display brightness and contrast. Improving the reflectivity can enhance the brightness and contrast of the image, improve the color saturation, and thus improve the overall image quality.

[0049] In the embodiment of the present application, the thickness ratio of the first bottom coating film 71 to the second bottom coating film 72 is 1:(1.1-1.2).

[0050] Specifically, the thickness ratio of the first bottom film 71 and the second bottom film 72 is 1:(1.1-1.2). This ratio control is to achieve a specific optical path difference, make up for the height difference between the bottom reflection electrode 20 and the top reflection electrode 50, and the light waves reflected by the two films undergo constructive interference under specific conditions, thereby maximizing the reflectivity. By adjusting the thickness ratio of the two films, the light waves reflected from the two films can be matched in phase, thereby achieving superposition of light waves under specific conditions and enhancing reflected light.

[0051] In the embodiment of the present application, a plurality of top reflection enhancement films 80 are further included, covering the top reflection electrodes 50 and being arranged one-to-one corresponding to each of the top reflection electrodes 50 .

[0052] Specifically, the top reflective film 80 is designed to increase the display brightness by increasing the reflectivity. This film is usually composed of multiple layers of materials with different refractive indices, and uses the principle of light interference to enhance the light reflected from the top reflective electrode 50. The top reflective film 80 not only enhances reflection, but also provides physical and chemical protection for the top reflective electrode 50 to prevent environmental factors such as humidity, temperature changes or chemical corrosion. The top reflective film 80 can reduce the loss of light at the interface between the electrode and the insulating layer and improve the efficiency of light utilization. Increasing the reflectivity helps to improve the contrast and color saturation of the image, thereby improving the overall image quality.

[0053] In the embodiment of the present application, the top anti-reflection film 80 includes a first top covering film 81 and a second top covering film 82 stacked in sequence, and the first top covering film 81 covers the top reflective electrode 50 .

[0054] Specifically, the top anti-reflection film 80 uses the principle of multilayer thin film interference to enhance reflection. By precisely controlling the thickness of the first top coating 81 and the second top coating 82 and the refractive index of the material, light of a specific wavelength can be caused to undergo constructive interference in the multilayer film, thereby enhancing the intensity of the reflected light. The stacking order and thickness ratio of the first top coating 81 and the second top coating 82 are designed to control the phase of the light wave, so that the light wave reflected from the top reflective electrode 50 can undergo constructive interference when passing through these film layers, thereby increasing the amplitude of the reflected light. The first top coating 81 covers the top reflective electrode 50, providing physical and chemical protection for these sensitive underlying structures to prevent the influence of environmental factors such as humidity, temperature changes or chemical corrosion.

[0055] In the embodiment of the present application, the thickness ratio of the first top covering film 81 to the second top covering film 82 is 1:(1.1-1.2).

[0056] Specifically, the thickness ratio of the first top covering film 81 and the second top covering film 82 is 1:(1.1~1.2), which can maximize the reflectivity of the bottom reflection electrode 20 and the top reflection electrode 50 and compensate for the loss of light in the bottom reflection electrode 20 and the top reflection electrode 50. By adjusting the thickness ratio of the two films, the light waves reflected from the two films can be matched in phase, thereby achieving the superposition of light waves under specific conditions and enhancing the reflected light.

[0057] In the embodiment of the present application, the first bottom coating 71 and the first top coating 81 are silicon nitride films; the second bottom coating 72 and the second top coating 82 are silicon oxide films. The first bottom coating 71 and the second bottom coating 72 form a composite film layer pair (i.e., a pair of anti-reflection films), and the first top coating 81 and the second top coating 82 form a second composite film layer pair (i.e., a pair of anti-reflection films). The above two pairs of composite film layers appear in pairs, that is, there are two pairs of composite film layer pairs above the bottom reflection electrode 20, and there is one pair of composite film layer pairs above the top reflection electrode 50. The composite film layer pairs with similar properties on the top of the top reflection electrode 50 and above the bottom reflection electrode 20 will make the reflection of light more controllable, and the reflection effect of the bottom reflection electrode 20 can better meet the influence of the light leakage reflection between the top reflection electrodes 50.

[0058] Because the top of the top reflective electrode 50 and the bottom reflective electrode 20 have a composite film pair with the same film layer, the reflective performance of light is similar and easy to adjust and calculate, which is conducive to the matching of the performance of the two reflective electrodes.

[0059] Furthermore, in order to form a pair of anti-reflection films and to simplify the process, at least part of the anti-reflection films of the pair directly connected to the surface of the bottom reflection electrode are located between the adjacent top reflection electrodes. That is, as described above, the second bottom coating film 72 is a dielectric layer (such as Figure 1 as shown).

[0060] Specifically, silicon nitride film is a material with high hardness, high chemical stability and good optical transparency. It is often used in optical coatings because it has a high refractive index, which helps to achieve the desired light interference effect in anti-reflection films.

[0061] Silicon oxide film is a widely used transparent insulating material with a low refractive index and good chemical stability. It is often used in optical applications to adjust the refractive index and control the transmission characteristics of light.

[0062] By combining a high-refractive-index silicon nitride film with a low-refractive-index silicon oxide film, the optical path difference between the film layers can be precisely controlled, thereby optimizing the interference effect of light and enhancing the intensity of reflected light. This material combination can precisely control the interference of light waves between film layers by adjusting the thickness of each layer, achieving constructive interference and thus improving reflectivity.

[0063] The above is only a specific implementation of the embodiment of the present application, but the protection scope of the embodiment of the present application is not limited thereto, and any changes or replacements within the technical scope disclosed in the embodiment of the present application should be included in the protection scope of the embodiment of the present application. Therefore, the protection scope of the embodiment of the present application should be based on the protection scope of the claims.

Claims

1. A liquid crystal micro-display reflector, characterized in that: including a substrate; A first insulating layer covering the substrate; A plurality of bottom reflection electrodes, which are arranged in a rectangular array on the first insulating layer, and the bottom reflection electrodes in adjacent rows are arranged alternately, and their projections in the first direction have a partial overlap area; A plurality of bottom conductive pillars, penetrating the first insulating layer and arranged one by one corresponding to each of the bottom reflective electrodes, for electrically connecting the bottom reflective electrodes to the substrate; a second insulating layer, covering the first insulating layer and the bottom reflective electrode, and the second insulating layer is a transparent insulating layer; A plurality of top reflection electrodes, arranged in a rectangular array on the second insulating layer, the top reflection electrodes in adjacent columns are staggered, and the top reflection electrodes are located between adjacent bottom reflection electrodes in a row, and their projections in the second direction have a partial overlap area; a plurality of top conductive pillars, penetrating the second insulating layer and the first insulating layer, and arranged one-to-one corresponding to each of the top reflective electrodes, for electrically connecting the top reflective electrodes to the substrate; The first direction and the second direction are perpendicular to each other.

2. The liquid crystal micro-display reflector according to claim 1, characterized in that: The bottom reflective electrode and the top reflective electrode partially overlap in a vertical projection.

3. The liquid crystal micro-display reflector according to claim 2, characterized in that: The bottom reflective electrode and the top reflective electrode are both rectangular; The length direction of the bottom reflection electrode and the length direction of the top reflection electrode are arranged perpendicular to each other.

4. The liquid crystal micro-display reflector according to claim 3, characterized in that: The lengths of the bottom reflection electrode and the top reflection electrode are both L, and the widths of the bottom reflection electrode and the top reflection electrode are both W; The spacing between the bottom reflection electrodes in adjacent rows is 60nm-150nm, the spacing between the top reflection electrodes in adjacent columns is 60nm-150nm, the spacing between the adjacent bottom reflection electrodes in the same row is less than L; and the spacing between the adjacent top reflection electrodes in the same column is less than L; Alternatively, the spacing between the adjacent bottom reflective electrodes in the same row is smaller than W; and the spacing between the adjacent top reflective electrodes in the same column is smaller than W.

5. The liquid crystal micro-display reflector according to any one of claims 1 to 4, characterized in that: Also includes: A plurality of bottom anti-reflection films are covered on the bottom reflection electrode and are arranged one by one corresponding to each of the bottom reflection electrodes; A plurality of top reflection enhancement films are covered on the top reflection electrodes and are arranged one by one corresponding to each of the top reflection electrodes; The bottom anti-reflection film and the top anti-reflection film are arranged in pairs.

6. The liquid crystal micro-display reflector according to claim 5, characterized in that: At least a portion of the bottom anti-reflection film is located between adjacent top reflective electrodes.

7. The liquid crystal micro-display reflector according to claim 6, characterized in that: The bottom anti-reflection film comprises a first bottom covering film and a second bottom covering film which are stacked in sequence, wherein the first bottom covering film covers the bottom reflection electrode, and the second bottom covering film is located between two adjacent top reflection electrodes.

8. The liquid crystal micro-display reflector according to claim 7, characterized in that: The thickness ratio of the first bottom coating film to the second bottom coating film is 1:(1.1-1.2).

9. The liquid crystal micro-display reflector according to claim 8, characterized in that: The top reflection enhancement film includes a first top covering film and a second top covering film stacked in sequence, and the first top covering film covers the top reflection electrode.

10. The liquid crystal micro-display reflector according to claim 9, characterized in that: The thickness ratio of the first top coating film to the second top coating film is 1:(1.1-1.2).

11. The liquid crystal micro-display reflector according to claim 10, characterized in that: The first bottom film and the first top film are silicon nitride films; the second bottom film and the second top film are silicon oxide films.

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