Resistivity measuring device and use method thereof

Abstract

The resistivity measuring device comprises a support, an object placing table, a positioning structure and a measuring assembly, the object placing table is movably arranged on the support, the positioning structure is arranged on the support, the measuring assembly is connected with the positioning structure, the measuring assembly is located above the object placing table, and a silicon electrode or a silicon ring to be measured is placed on the object placing table. The positioning structure can move the measuring assembly and move the measuring assembly to a to-be-measured point, it is guaranteed that the measuring needle moves in the vertical direction, and the surface of the silicon electrode or the surface of the silicon ring is prevented from being scratched or bruised, the invention further provides a using method of the resistivity measuring device, the accuracy of the measuring result and the measuring speed are improved, and the measuring efficiency is improved. According to the resistivity measuring device and the using method thereof, the resistivity of the silicon electrode or the silicon ring can be conveniently measured, the accuracy of a measuring structure can be improved, the surface of the silicon electrode or the silicon ring can be prevented from being scratched or crushed by the measuring needle, and the product quality can be improved.

Description

Technical Field

[0001] The present invention belongs to the field of resistivity, and in particular, relates to a resistivity measuring device and a method for using the same. Background Art

[0002] Etching machine is a kind of equipment commonly used in semiconductor manufacturing process, which is used to etch silicon materials to achieve the needs of micro-machining and chip production. In the etching process, silicon electrodes and silicon rings play an important role. The resistivity of silicon refers to the ability of silicon materials to hinder electric current. The resistivity of silicon is very important in the design and manufacturing process of silicon electrodes and silicon rings, so it is necessary to measure the resistivity of the product before and after processing.

[0003] The existing measurement method generally adopts manual measurement. Manual measurement is performed by an operator holding a resistivity meter. It is difficult to ensure that the probe is perpendicular to the surface of the silicon electrode or silicon ring to be measured every time, which affects the accuracy of the resistivity measurement results. When the angle between the probe and the surface of the silicon electrode or silicon ring product is too small, when the operator presses the probe, it will cause the probe to slide on the product surface, causing scratches on the silicon electrode or silicon ring, affecting product quality. Moreover, when the operator holds the measurement by hand, it cannot be guaranteed that the operator's pressing force is consistent each time. When the employee presses too hard, the probe will leave an indentation on the product, causing the silicon electrode or silicon ring to be crushed, affecting product quality.

[0004] Therefore, there is an urgent need to develop a resistivity measuring device and a method of using the device that can conveniently measure the resistivity of a silicon electrode or a silicon ring, improve the accuracy of the measuring structure, avoid scratches or crushing of the surface of the silicon electrode or the silicon ring by the measuring needle, and help improve product quality. Summary of the invention

[0005] The present invention is made to solve the above problems, and aims to provide a resistivity measuring device and a method of using the same, which can conveniently measure the resistivity of a silicon electrode or a silicon ring, improve the accuracy of the measuring structure, avoid scratches or crushing of the surface of the silicon electrode or the silicon ring by the measuring needle, and improve the product quality. In order to achieve the above purpose, the technical solution adopted by the present invention is as follows:

[0006] The present invention provides a resistivity measuring device having the following characteristics: it comprises a bracket, a storage table, a positioning structure and a measuring component, wherein the storage table is movably arranged on the bracket, the positioning structure is arranged on the bracket, the measuring component is connected to the positioning structure, and the measuring component is located above the storage table.

[0007] The resistivity measuring device provided by the present invention may also have such a feature that the bracket includes a base plate, a support rod and a cross beam, one end of the support rod is connected to the base plate, and the other end of the support rod is connected to the cross beam.

[0008] The resistivity measuring device provided by the present invention may also have the following characteristics: a slewing support bearing is provided on the bottom plate, a rotating rod is provided at the bottom of the storage table, and the rotating rod is connected to the slewing support bearing.

[0009] In the resistivity measuring device provided by the present invention, it can also have such a feature that the positioning structure includes a support plate, a frame, a movable plate and a lifting unit, the support plate is arranged on the cross beam, the frame is arranged on the cross beam, the support plate is located above the frame, the lifting unit is arranged on the support plate, and the lifting unit is connected to the movable plate.

[0010] In the resistivity measuring device provided by the present invention, it can also have such a feature that the lifting unit includes a stepper motor, a lifting screw and a lifting nut, the stepper motor is arranged on the support plate, one end of the lifting screw is connected to the motor shaft of the stepper motor, the lifting screw is movably arranged on the frame, the lifting nut is movably arranged on the lifting screw, and the lifting nut is connected to the movable plate.

[0011] The resistivity measuring device provided by the present invention may also have such a feature that the measuring assembly includes a mounting frame, a resistivity probe and a displacement sensor, the mounting frame is arranged on the movable plate, and the resistivity probe and the displacement sensor are arranged on the mounting frame.

[0012] The resistivity measuring device provided by the present invention may also have such a feature, and further includes a clamping unit, which includes a fixed plate, a pressure block, a slider, a pull rope and a fixed pulley. The fixed plate is arranged on the support rod, and a slide groove is provided on the movable plate. The slider is movably arranged in the slide groove. One end of the pull rope is connected to the slider, and the other end of the pull rope is connected to the pressure block. The pressure block is movably arranged on the fixed plate, and the fixed pulley is arranged on the frame, and the pull rope passes around the fixed pulley.

[0013] The resistivity measuring device provided by the present invention may also have such a feature that a movable groove is provided on the fixed plate, a pressure block is movably arranged in the movable groove, a compression spring is provided in the movable groove, and the compression spring is arranged in the movable groove and connected to the pressure block.

[0014] In the resistivity measuring device provided by the present invention, it can also have such a feature that the clamping unit also includes a slide rod and a sleeve, the sleeve is arranged on the frame, the slide rod is movably arranged in the sleeve, one end of the slide rod is connected to the slider, and the other end of the slide rod is connected to the pull rope.

[0015] The present invention also provides a method for using the resistivity measuring device described above, which has the following characteristics and comprises the following steps: step S1, placing a silicon electrode or silicon ring to be measured on a storage table; step S2, moving the measuring component through a positioning structure to move the measuring component to a point to be measured; step S3, recording measurement data.

[0016] The technical effect of the present invention is as follows: the resistivity measuring device provided by the present invention includes a bracket, a storage table, a positioning structure and a measuring component. The storage table is movably arranged on the bracket, the positioning structure is arranged on the bracket, the measuring component is connected to the positioning structure, the measuring component is located above the storage table, the silicon electrode or silicon ring to be measured is placed on the storage table, the positioning structure can move the measuring component, move the measuring component to the point to be measured, and ensure that the measuring needle moves in a vertical direction to prevent scratches or pressure injuries to the surface of the silicon electrode or silicon ring. The present invention also provides a method for using the resistivity measuring device, which can accurately measure the resistivity of the silicon electrode or silicon ring through the resistivity measuring device provided by the present invention, which is beneficial to improving the accuracy of the measurement results and the measurement speed.

[0017] Therefore, the resistivity measuring device and the use method thereof provided by the present invention can conveniently measure the resistivity of a silicon electrode or a silicon ring, can improve the accuracy of the measurement structure, can avoid scratches or crushing of the surface of the silicon electrode or the silicon ring by the measuring needle, and is conducive to improving product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] This specification includes the following drawings, which show the following contents:

[0019] Figure 1 is a schematic structural diagram of a resistivity measuring device in an embodiment of the present invention in a front view direction;

[0020] Figure 2 is a schematic structural diagram of a positioning structure in a side view direction in an embodiment of the present invention;

[0021] Figure 3 is a schematic diagram of the structure of a measuring component in an embodiment of the present invention;

[0022] Figure 4 is a schematic structural diagram of a pressing unit in an embodiment of the present invention;

[0023] Figure 5 Schematic diagram of the structure of the movable plate in the embodiment of the present invention.

[0024] Marked in the figure: bracket-10, base plate-11, support rod-12, crossbeam-13, slewing support bearing-14, storage table-20, ball-21, positioning structure-30, support plate-31, frame-32, movable plate-33, slide groove-331, lifting unit-34, stepper motor-341, lifting screw-342, lifting nut-343, measuring component-40, mounting frame-41, resistivity probe-42, displacement sensor-43, clamping unit-50, fixed plate-51, movable groove-511, compression spring-512, pressure block-52, slider-53, pull rope-54, fixed pulley-55, slide rod-56, sleeve-57. DETAILED DESCRIPTION

[0025] The specific implementation methods of the present invention are further explained in detail below by describing the embodiments with reference to the accompanying drawings, with the aim of helping those skilled in the art to have a more complete, accurate and in-depth understanding of the inventive concept and technical solution of the present invention and facilitating their implementation.

[0026] Figure 1 It is a schematic structural diagram of a resistivity measuring device in an embodiment of the present invention in a front view direction.

[0027] like Figure 1 As shown, the resistivity measuring device provided by the present invention includes a bracket 10, a storage table 20, a positioning structure 30 and a measuring component 40. The storage table 20 is movably arranged on the bracket 10, the positioning structure 30 is arranged on the bracket 10, the measuring component 40 is connected to the positioning structure 30, the measuring component 40 is located above the storage table 20, and the silicon electrode or silicon ring to be measured is placed on the storage table 20. The positioning structure 30 can move the measuring component 40, move the measuring component 40 to the point to be measured, and ensure that the measuring needle moves in the vertical direction to prevent scratches or pressure injuries on the surface of the silicon electrode or silicon ring, and can conveniently and accurately measure the resistivity of the silicon electrode or silicon ring, which is beneficial to improving the accuracy and measurement speed of the measurement results and reducing labor costs.

[0028] The bracket 10 includes a base plate 11, a support rod 12 and a cross beam 13. One end of the support rod 12 is connected to the base plate 11, and the other end of the support rod 12 is connected to the cross beam 13. The two support rods 12 are arranged parallel to each other, and the two ends of the cross beam 13 are respectively connected to the two support rods 13, thereby improving the overall structural strength of the bracket 10 and improving the bearing capacity of the bracket 10.

[0029] A slewing bearing 14 is provided on the bottom plate 11, and a rotating rod is provided at the bottom of the storage platform 20. The rotating rod is connected to the slewing bearing 14, and the outer ring of the slewing bearing 14 is connected to the bottom plate 11. The rotating rod at the bottom of the storage platform 20 is inserted into the inner ring of the slewing bearing 14, so that the storage platform 20 can be rotatably arranged on the bottom plate 11, and the storage platform 20 can be rotated to adjust the position of the silicon electrode or silicon ring. A ball bearing 21 is also provided at the bottom of the storage platform 20, and the ball bearing 21 is located between the storage platform 20 and the bottom plate 11, which can ensure that the storage platform 20 rotates smoothly.

[0030] Figure 2 It is a schematic structural diagram of the positioning structure in the side view direction in an embodiment of the present invention.

[0031] like Figure 1 and Figure 2As shown, the positioning structure 30 includes a support plate 31, a frame 32, a movable plate 33 and a lifting unit 34. The support plate 31 is arranged on the cross beam 13, the frame 32 is arranged on the cross beam 13, and the support plate 31 is located above the frame 32. The lifting unit 34 is arranged on the support plate 31, and the lifting unit 34 is connected to the movable plate 33. The lifting unit 34 can drive the movable plate 33 to perform lifting movement in the vertical direction.

[0032] The lifting unit 34 includes a stepper motor 341, a lifting screw 342 and a lifting nut 343. The stepper motor 341 is arranged on the support plate 31. The motor shaft of the drive motor 341 is connected to one end of the lifting screw 342 through a coupling. The lifting screw 342 is arranged in the vertical direction. One end of the lifting screw 342 is connected to the motor shaft of the drive motor 341, and the other end of the lifting screw 342 is rotatably penetrated on the frame 32, so that the drive motor 341 can drive the lifting screw 342 to rotate. The lifting nut 343 is movably arranged on the lifting screw 342 through threaded cooperation. The lifting nut 343 is connected to the movable plate 33. When the lifting screw 342 rotates, the lifting nut 343 can be lifted and lowered in the vertical direction, thereby driving the movable plate 33 to be lifted and lowered in the vertical direction.

[0033] Figure 3 is a schematic diagram of the structure of a measuring component in an embodiment of the present invention;

[0034] like Figure 3 As shown, the measuring assembly 40 includes a mounting frame 41, a resistivity probe 42 and a displacement sensor 43. The mounting frame 41 is arranged on the movable plate 33, the resistivity probe 42 and the displacement sensor 43 are arranged on the mounting frame 41, the resistivity probe 42 is connected to the resistivity measuring instrument, and the displacement sensor 43 is an infrared sensor, which can measure the distance that the resistivity probe 42 descends in the vertical direction, so as to facilitate the recording of the measurement data and prevent the resistivity probe 42 from descending too low during the measurement process. Since the positions of the resistivity probe 42 and the displacement sensor 43 remain relatively unchanged, it is ensured that the distance that the probe on the resistivity probe 42 contracts after each contact with the product remains unchanged, so that the resistivity measuring device provided by the present invention is suitable for products of different thicknesses, and can prevent the probe from scratching or crushing the surface of the silicon electrode or the silicon ring, which is beneficial to improving the product quality.

[0035] Figure 4 is a schematic structural diagram of a pressing unit in an embodiment of the present invention; Figure 5 Schematic diagram of the structure of the movable plate in the embodiment of the present invention.

[0036] like Figure 4 and Figure 5As shown, the resistivity measuring device provided by the present invention further includes a pressing unit 50, which includes a fixing plate 51, a pressing block 52, a slider 53, a pull rope 54 and a fixed pulley 55. The fixing plate 51 is arranged on the support rod 12. Figure 5 As shown, a slide groove 331 is provided on the movable plate 33, and a slider 53 is slidably arranged in the slide groove 331. The bottom of the slide groove 331 is sloped. One end of the pull rope 54 is connected to the pressure block 52, and the other end of the pull rope 54 is connected to the slider 53. The pressure block 52 is movably arranged on the fixed plate 51, and a fixed pulley 55 is arranged on the frame 32. The pull rope 54 passes around the fixed pulley 55.

[0037] When the movable plate 33 is in the initial position, the slider 53 is at the lowest end of the slide groove 331, the slider 53 pulls the pull rope 54, and the pressure block 52 is separated from the storage table 20, so that the storage table 20 can be easily rotated to adjust the position of the silicon electrode or silicon ring; when the movable plate 33 moves downward, the slider 53 slides upward along the slide groove 331 relative to the movable plate 33, and the slider 33 moves in the horizontal direction toward the fixed pulley 55, so that the pressure block 52 is pressed against the storage table 20, preventing the storage table 20 from shaking or moving during the measurement process, which is beneficial to improving the accuracy of measuring the resistivity of the silicon electrode or silicon ring.

[0038] A movable groove 511 is provided on the fixed plate 51, and the pressure block 52 is movably arranged in the movable groove 511. One end of the pull rope 54 passes through the movable groove 511 and is connected with the pressure block 52. A compression spring 512 is provided in the movable groove 511. The compression spring 512 is in a compressed state and can press the pressure block 52 tightly on the placement table 20 during the measurement process to prevent the placement table 20 from shaking or moving during the measurement process, which is beneficial to improving the accuracy of measuring the resistivity of the silicon electrode or silicon ring.

[0039] The clamping unit 50 also includes a slide rod 56 and a sleeve 57. The sleeve 57 is arranged on the frame 32. The slide rod 56 can be slidably inserted into the sleeve 57. One end of the slide rod 56 is connected to the slider 53, and the other end of the slide rod 56 is connected to the pull rope 54, so that the slider 53 can slide smoothly in the vertical direction in the slide groove 331, thereby improving the structural reliability of the clamping unit 50.

[0040] The present invention also provides a method for using the resistivity measuring device, comprising the following steps:

[0041] Step S1 : placing a silicon electrode or silicon ring to be tested on a stage 20 , and rotating the stage 20 to adjust the position of the silicon electrode or silicon ring to be tested.

[0042] Step S2, move the measuring component 40 through the positioning structure 30, move the measuring component 40 to the point to be measured, and the stepping motor 341 drives the lifting screw 342 to rotate, thereby driving the lifting nut 343 and the moving plate 33 to move in the vertical direction, driving the resistivity probe 42 to descend, so that the measuring needle of the resistivity probe 42 abuts against the point to be measured, and the pressure block 52 presses the storage table 20.

[0043] Step S3, after recording the measurement data, repeat the above operation to record the measurement data of multiple points.

[0044] Therefore, the resistivity measuring device and the use method thereof provided by the present invention can conveniently measure the resistivity of a silicon electrode or a silicon ring, can improve the accuracy of the measurement structure, can avoid scratches or crushing of the surface of the silicon electrode or the silicon ring by the measuring needle, and is conducive to improving product quality.

[0045] Functions and Effects of the Embodiments

[0046] The resistivity measuring device provided by the present invention includes a bracket 10, a storage table 20, a positioning structure 30 and a measuring component 40. The storage table 20 is movably arranged on the bracket 10, the positioning structure 30 is arranged on the bracket 10, the measuring component 40 is connected to the positioning structure 30, and the measuring component 40 is located above the storage table 20. The silicon electrode or silicon ring to be measured is placed on the storage table 20. The positioning structure 30 can move the measuring component 40, move the measuring component 40 to the point to be measured, and ensure that the measuring needle moves in the vertical direction to prevent scratches or pressure injuries to the surface of the silicon electrode or silicon ring, and can conveniently and accurately measure the resistivity of the silicon electrode or silicon ring, which is beneficial to improving the accuracy of the measurement results and the measurement speed, and reducing labor costs. The resistivity measuring device and the use method thereof provided by the present invention can conveniently measure the resistivity of the silicon electrode or silicon ring, can improve the accuracy of the measurement structure, can avoid scratches or pressure injuries to the surface of the silicon electrode or silicon ring by the measuring needle, and are beneficial to improving product quality.

[0047] The present invention is described above by way of example in conjunction with the accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-mentioned methods. As long as various non-substantial improvements are made using the method concept and technical solution of the present invention; or the above concept and technical solution of the present invention are directly applied to other occasions without improvement, they are all within the protection scope of the present invention.

Claims

1. A resistivity measuring device, characterized in that: The invention comprises a support (10), a storage platform (20), a positioning structure (30) and a measuring component (40), wherein the storage platform (20) is movably arranged on the support (10), the positioning structure (30) is arranged on the support (10), the measuring component (40) is connected to the positioning structure (30), and the measuring component (40) is located above the storage platform (20).

2. The resistivity measuring device according to claim 1, characterized in that: The bracket (10) comprises a base plate (11), a support rod (12) and a crossbeam (13); one end of the support rod (12) is connected to the base plate (11), and the other end of the support rod (12) is connected to the crossbeam (13).

3. The resistivity measuring device according to claim 2, characterized in that: A slewing support bearing (14) is provided on the bottom plate (11), and a rotating rod is provided at the bottom of the storage platform (20), and the rotating rod is connected to the slewing support bearing (14).

4. The resistivity measuring device according to claim 3, characterized in that: The positioning structure (30) comprises a support plate (31), a frame (32), a movable plate (33) and a lifting unit (34); the support plate (31) is arranged on the crossbeam (13); the frame (32) is arranged on the crossbeam (13); the support plate (31) is located above the frame (32); the lifting unit (34) is arranged on the support plate (31); and the lifting unit (34) is connected to the movable plate (33).

5. The resistivity measuring device according to claim 4, characterized in that: The lifting unit (34) comprises a stepping motor (341), a lifting screw (342) and a lifting nut (343); the stepping motor (341) is arranged on the supporting plate (31); one end of the lifting screw (342) is connected to the motor shaft of the stepping motor (341); the lifting screw (342) is movably arranged on the frame (32); the lifting nut (343) is movably arranged on the lifting screw (342); and the lifting nut (343) is connected to the moving plate (33).

6. The resistivity measuring device according to claim 5, characterized in that: The measuring assembly (40) comprises a mounting frame (41), a resistivity probe (42) and a displacement sensor (43); the mounting frame (41) is arranged on the movable plate (33); the resistivity probe (42) and the displacement sensor (43) are arranged on the mounting frame (41).

7. The resistivity measuring device according to claim 6, characterized in that: The invention also comprises a clamping unit (50), wherein the clamping unit (50) comprises a fixed plate (51), a pressure block (52), a slider (53), a pull rope (54) and a fixed pulley (55), wherein the fixed plate (51) is arranged on the support rod (12), a slide groove (331) is arranged on the movable plate (33), the slider (53) is movably arranged in the slide groove (331), one end of the pull rope (54) is connected to the slider (53), and the other end of the pull rope (54) is connected to the pressure block (52), the pressure block (52) is movably arranged on the fixed plate (51), the fixed pulley (55) is arranged on the frame (32), and the pull rope (54) passes around the fixed pulley (55).

8. The resistivity measuring device according to claim 7, characterized in that: The fixed plate (51) is provided with a movable groove (511), the pressing block (52) is movably arranged in the movable groove (511), a compression spring (512) is provided in the movable groove (511), the compression spring (512) is arranged in the movable groove (511), and the compression spring (512) is connected to the pressing block (52).

9. The resistivity measuring device according to claim 8, characterized in that: The clamping unit (50) further comprises a slide rod (56) and a sleeve (57), wherein the sleeve (57) is arranged on the frame (32), the slide rod (56) is movably arranged in the sleeve (57), one end of the slide rod (56) is connected to the slider (53), and the other end of the slide rod (56) is connected to the pull rope (54).

10. A method for using the resistivity measuring device according to any one of claims 1 to 9, characterized in that: The following steps are involved: Step S1, placing a silicon electrode or silicon ring to be measured on a storage table (20); Step S2, moving a measuring component (40) via a positioning structure (30) to move the measuring component (40) to a point to be measured; Step S3, recording measurement data.

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