Die bonding swing arm device and die bonding equipment

Abstract

The invention is suitable for the technical field of die bonding equipment, and provides a die bonding swing arm device and die bonding equipment. The die bonding swing arm device comprises a supporting seat, a swing arm assembly, an elastic connection group and a driving unit. The die bonding equipment comprises any one of the die bonding swing arm devices. The connecting end of the swing arm assembly is connected to the supporting seat through the elastic connecting group, and the suction nozzle structure is arranged on the die bonding end far away from the connecting end, so that the suction nozzle structure can be far away from the second axis as far as possible, and the suction nozzle structure has a larger rotation diameter when the swing arm assembly swings around the second axis in the vertical direction. According to the geometrical relationship, when the rotation radius of the object is larger when the object rotates in the vertical plane, the displacement in the horizontal direction is smaller when the object moves by the same distance in the vertical direction, so that the rotation radius of the suction nozzle structure is increased, and the deviation value of the suction nozzle structure in the horizontal direction when the suction nozzle structure is adjusted in the vertical direction is reduced; and the die bonding precision is further improved.

Description

Technical Field

[0001] The invention belongs to the technical field of crystal bonding equipment, and in particular relates to a crystal bonding swing arm device and crystal bonding equipment. Background Art

[0002] The crystal bonder is one of the equipment used in the manufacture of semiconductor devices, and its function is to connect semiconductor wafers with other components. During the operation of the crystal bonder, the crystal ring is usually supported by the crystal supply platform, and then the chip on the crystal ring is separated from the blue film by the ejector device, and then the suction nozzle structure is driven by the swing arm to move and absorb the chip on the crystal ring, and finally the chip is transported to the solder joint on the packaging substrate and firmly connected to the solder joint to fix the chip. Among them, the crystal bonder swing arm device is an important component of the crystal bonder. During the operation of the crystal bonder, the crystal bonder swing arm device needs to perform high-frequency reciprocating motion to achieve crystal retrieval and crystal placement. However, most of the existing crystal bonder swing arm devices have the problem of low crystal bonding accuracy during operation. Summary of the invention

[0003] The object of the present invention is to provide a crystal bonding swing arm device and a crystal bonding equipment, aiming to solve the technical problem of low crystal bonding precision in the working process of the crystal bonding swing arm device in the prior art.

[0004] The present invention is implemented in this way. In a first aspect, a die-bonding swing arm device is provided, comprising:

[0005] The support seat has the freedom to rotate about the first axis;

[0006] A swing arm assembly, the swing arm assembly having a connecting end and a die-bonding end arranged opposite to each other, and the swing arm assembly also having a middle portion, the middle portion being located in a region between the connecting end and the die-bonding end;

[0007] an elastic connection group, connected between the support seat and the connection end, the elastic connection group being elastically deformable when subjected to an external force, so as to enable the swing arm assembly to reciprocate around a second axis supported by the elastic connection group, and the second axis being arranged at an angle to the first axis; and

[0008] A driving unit is arranged on the supporting seat, and a driving end of the driving unit is connected to the middle part of the swing arm assembly, and is used for driving the swing arm assembly to swing back and forth around the first axis.

[0009] In an optional embodiment, the die bonding swing arm device further comprises a nozzle structure having a nozzle surface for contacting the chip, and the second axis is in a horizontal direction. In the horizontal direction, the second axis is located in an area flush with the nozzle surface.

[0010] In an optional embodiment, the elastic connection group includes a first elastic sheet, the first elastic sheet is parallel to the second axis, one end of the first elastic sheet is fixed to the support seat, and the other end of the first elastic sheet is fixed to the connection end.

[0011] In an optional embodiment, the elastic connection group also includes a second elastic sheet, which is also parallel to the second axis, one end of the second elastic sheet is fit and fixed to the support seat, and the other end is fit and fixed to the connecting end, and the projections of the second elastic sheet and the first elastic sheet on a plane perpendicular to the second axis intersect with each other.

[0012] In an optional embodiment, the first elastic sheet is arranged along the horizontal direction, the second axis passes through the first elastic sheet, and along the horizontal direction, the first elastic sheet is located in a region flush with the nozzle surface of the nozzle structure.

[0013] In an optional embodiment, the swing arm assembly includes a swing arm mounting seat and a swing arm body, the first end of the swing arm mounting seat is connected to the support seat through an elastic connection group, the second end is connected to the first end of the swing arm body, and the second end of the swing arm body extends away from the swing arm mounting seat, the driving end is connected to the swing arm mounting seat, the first end of the swing arm mounting seat is the connecting end, and the second end of the swing arm body is the solid crystal end.

[0014] In an optional embodiment, the driving unit includes a voice coil motor, which includes a stator assembly and a mover assembly, wherein the stator assembly is fixedly mounted on the support seat, and the mover assembly is movably arranged inside the stator assembly, and at least a portion of the mover assembly is connected to the middle portion of the swing arm assembly, and the stator assembly has a magnetic portion, and the mover assembly has a coil portion for connecting to an external circuit, and the coil portion is also used to interact with the magnetic portion after power is supplied to drive the mover assembly to reciprocate along a preset path.

[0015] In an optional embodiment, an elastic limiting group is arranged between the support seat and / or the main body of the driving unit and the swing arm assembly, and the elastic limiting group is used to limit the swing arm assembly to avoid collision between the swing arm assembly and the support seat.

[0016] In an optional embodiment, the elastic limiting portion includes a mounting bracket and an elastic push pin, one end of the elastic push pin is fixed to the support seat or the driving unit through the mounting bracket, and the other end of the elastic push pin abuts against the swing arm assembly.

[0017] In a second aspect, a crystal bonding device is provided, comprising any one of the crystal bonding swing arm devices described above.

[0018] The technical effect of the present invention relative to the prior art is: by connecting the connecting end of the swing arm assembly to the support seat through an elastic connection group, the solid crystal end of the swing arm assembly can extend in a direction away from the support seat. At the same time, a driving unit is provided on the support seat, and the driving end of the driving unit is connected to the middle part of the swing arm assembly. When working, the swing arm assembly can be driven to swing around the first axis by the rotation of the support seat, and the driving unit can be used to drive the entire swing arm assembly to swing periodically around the second axis, so as to realize the movement of the fixed end of the swing arm assembly in multiple directions. Compared with the crystal bonding swing arm device in the prior art, the connecting end of the swing arm assembly is connected to the support seat through an elastic connecting group, and the suction nozzle structure is arranged on the crystal bonding end away from the connecting end, so that the suction nozzle structure can be as far away from the second axis as possible, so that the suction nozzle structure has a larger rotation diameter when the swing arm assembly swings around the second axis in the vertical direction. According to the geometric relationship, when the object rotates in the vertical plane, the larger the rotation radius of the object, the smaller the displacement in the horizontal direction when moving the same distance in the vertical direction. Therefore, the rotation radius of the suction nozzle structure is increased, and the deviation value of the suction nozzle structure in the horizontal direction when adjusted along the vertical direction is reduced, thereby improving the accuracy of crystal bonding.

[0019] It can be understood that the beneficial effects of the second aspect mentioned above can be found in the relevant description of the first aspect mentioned above, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments of the present invention or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 is a schematic structural diagram of a die-bonding swing arm device provided in an embodiment of the present invention;

[0022] Figure 2 is a schematic diagram of the side view structure of the die-bonding swing arm device provided in an embodiment of the present invention;

[0023] Figure 3 yes Figure 2 A schematic diagram of the enlarged structure at A in the middle;

[0024] Figure 4 is a schematic structural diagram of an elastic connection group used in an embodiment of the invention;

[0025] Figure 5It is a schematic diagram of the exploded structure of the elastic connection group adopted in the embodiment of the invention.

[0026] Description of reference numerals:

[0027] 1. Support seat; 2. Swing arm assembly; 21. Connection end; 22. Crystal fixing end; 23. Middle part; 24. Swing arm mounting seat; 25. Swing arm body; 26. First mounting surface; 27. Second mounting surface; 3. Elastic connection group; 31. First elastic sheet; 32. Second elastic sheet; 33. First clamping block; 34. Second clamping block; 4. Drive unit; 41. Stator assembly; 42. Mover assembly; 5. Nozzle structure; 51. Nozzle surface; 6. Elastic limit group; 61. Mounting bracket; 62. Elastic ejector pin. DETAILED DESCRIPTION

[0028] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0029] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0030] In this embodiment, according to Figure 1 As shown in the figure: the first axis is in the direction of the X line in the figure, and the second axis is in the direction of the Y line in the figure. The position of the second axis is not completely fixed.

[0031] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0032] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0034] Please refer to Figure 1 and Figure 2 As shown, in an embodiment of the present invention, a crystal-fixing swing arm device is provided, and the crystal-fixing swing arm device includes a support seat 1, a swing arm assembly 2, an elastic connection group 3 and a drive unit 4. The support seat 1 has the freedom of rotation around a first axis. The swing arm assembly 2 has a connecting end 21 and a crystal-fixing end 22 that are relatively arranged, and the swing arm assembly 2 also has a middle part 23, and the middle part 23 is located in the area between the connecting end 21 and the crystal-fixing end 22. The elastic connection group 3 is connected between the support seat 1 and the connecting end 21, and the elastic connection group 3 can be elastically deformed when subjected to external force, so that the swing arm assembly 2 can swing back and forth around the second axis supported by the elastic connection group 3, and the second axis is arranged at an angle with the first axis. The drive unit 4 is arranged on the support seat 1, and the driving end of the drive unit 4 is connected to the middle part 23 of the swing arm assembly 2, and the drive unit 4 is used to drive the swing arm assembly 2 to swing back and forth around the first axis.

[0035] Specifically, the support seat 1 refers to a support component with a certain volume, and the shape of the support seat 1 can be block-shaped, columnar or plate-shaped, etc. The support seat 1 has the freedom to rotate around a first axis, and the support seat 1 can be connected to a power device such as a motor, and rotate around the first axis under the drive of the power device, wherein the first axis is usually arranged in a vertical direction. The swing arm assembly 2 refers to a component with a certain length, and the swing arm assembly 2 can be rod-shaped, columnar or a combination of multiple shapes. The connecting end 21 and the solid crystal end 22 respectively refer to the two end areas of the swing arm assembly 2, and the middle part 23 can refer to other areas on the swing arm assembly 2 except for the two ends.

[0036] The driving unit 4 refers to a power assembly that can drive the components to move along a straight line or an arc, and the driving unit 4 can be a cylinder, an electric push rod, or a voice coil motor, etc. The driving end of the driving unit 4 refers to the part of the driving unit 4 that can move relative to the main body, and the driving end of the driving unit 4 is usually connected to other components.

[0037] The elastic connection group 3 refers to a component or assembly that can be elastically deformed when subjected to force. The elastic connection group 3 can be a separate component, or a combination of multiple components. The second axis refers to a virtual straight line. The second axis is generally set through the elastic connection group 3 and is usually located outside the swing arm assembly 2. The second axis is generally set in the horizontal direction and the angle between it and the first axis is generally a right angle.

[0038] The crystal-fixing swing arm device provided in the embodiment of the present invention can extend the crystal-fixing end 22 of the swing arm assembly 2 in a direction away from the support seat 1 by connecting the connecting end 21 of the swing arm assembly 2 to the support seat 1 through the elastic connection group 3. At the same time, a driving unit 4 is arranged on the support seat 1, and the driving end of the driving unit 4 is connected to the middle part 23 of the swing arm assembly 2. When working, the swing arm assembly 2 can be driven to swing around the first axis by the rotation of the support seat 1, and the driving unit 4 can be used to drive the entire swing arm assembly 2 to swing periodically around the second axis, so as to realize the movement of the fixed end of the swing arm assembly 2 in multiple directions. Compared with the crystal bonding swing arm device in the prior art, the connecting end 21 of the swing arm assembly 2 is connected to the support seat 1 through the elastic connecting group 3, and the suction nozzle structure 5 is arranged on the crystal bonding end 22 away from the connecting end 21, so that the suction nozzle structure 5 can be as far away from the second axis as possible, so that the suction nozzle structure 5 has a larger rotation diameter when the swing arm assembly 2 swings around the second axis in the vertical direction. According to the geometric relationship, when the object rotates in the vertical plane, the larger the rotation radius of the object, the smaller the displacement in the horizontal direction when moving the same distance in the vertical direction. Therefore, the rotation radius of the suction nozzle structure 5 is increased, and the deviation value of the suction nozzle structure 5 in the horizontal direction when adjusting along the vertical direction is reduced, thereby improving the accuracy of crystal bonding.

[0039] It should be noted that, in the present embodiment, the driving end of the driving unit 4 is connected to the middle portion 23 of the swing arm assembly 2 so that there is ample space at the connecting end 21 of the swing arm assembly 2 to set the elastic connecting group 3, so that the connecting end 21 of the swing arm assembly 2 can be connected to the rotating body through the elastic connecting group 3.

[0040] In one embodiment, see Figure 2 and Figure 3The crystal bonding swing arm device also includes a nozzle structure 5, and the nozzle structure 5 has a nozzle surface 51 for contacting the chip. The second axis is in the horizontal direction. In the horizontal direction, the second axis is located in an area flush with the nozzle surface 51. Specifically, the nozzle structure 5 refers to a component or assembly for sucking and placing chips. The working principle of the nozzle structure 5 is that when it is working, the vacuum system generates negative pressure at the head of the nozzle through the internal channel of the nozzle. This negative pressure enables the nozzle to firmly adsorb the chip, and when the chip needs to be placed, the chip can be separated from the nozzle structure 5 by disconnecting the connection with the vacuum system. The nozzle surface 51 refers to the part where the nozzle contacts the chip, and whether the position of the nozzle surface 51 is accurate is directly related to the accuracy of the crystal bonding. In this embodiment, when the second axis is in the horizontal direction, the first axis is in the vertical direction. According to the geometric relationship and Figure 2 and Figure 3 It can be seen that when the first axis is aligned with the nozzle surface 51 of the nozzle structure 5 in the horizontal direction, the rotation center of the nozzle surface 51, i.e., the position of the first axis, is O1. When the rotation radius of the nozzle surface 51 is R1, the motion trajectory of the nozzle surface 51 is as follows: Figure 3 As shown in C1 in FIG. 1 , when the nozzle surface 51 descends in the vertical direction by a distance of H, the offset distance of the nozzle surface 51 in the horizontal direction is D1; ​​when the first axis is located at any position that is not in the same horizontal plane as the nozzle surface 51, the rotation center position of the nozzle surface 51 is O2 (exemplary), and when the rotation radius of the nozzle surface 51 is R2 and R1 is equal to R2, the motion trajectory of the nozzle surface 51 is as follows: Figure 3 As shown in C2 in FIG. 1 , when the nozzle surface 51 drops by a distance H in the vertical direction, the nozzle surface 51 is offset by a distance D2 in the horizontal direction. Figure 3 From the results in , we can know that D2 is greater than D1. Therefore, the first axis and the nozzle surface 51 of the nozzle structure 5 are located in the same horizontal plane. When the nozzle surface 51 of the nozzle structure 5 moves the same distance in the vertical direction, the deviation in the horizontal direction is smaller, thereby reducing the deviation of the nozzle surface 51 when the swing arm assembly 2 swings.

[0041] It should be noted that the first axis and the nozzle surface 51 of the nozzle structure 5 are located in the same horizontal plane, which is only a description of the theoretical geometric relationship. In actual installation, a certain dimensional deviation is allowed, that is, in an actual product, the first axis and the nozzle surface 51 are close to being located in the same horizontal plane and also fall within the protection scope of this application.

[0042] In one embodiment, see Figure 4 and Figure 5, the elastic connection group 3 includes a first elastic sheet 31, the first elastic sheet 31 is parallel to the second axis, one end of the first elastic sheet 31 is fixed to the support seat 1, and the other end of the first elastic sheet 31 is fitted and fixed to the connecting end 21. Specifically, the first elastic sheet 31 refers to a sheet or plate-like component that can be elastically deformed after being subjected to an external force, and the elastic deformation mode of the first elastic sheet 31 is mainly bending. The first elastic sheet 31 can be made of metal, or the first elastic sheet 31 can be made of non-metallic materials such as plastic. The number of the first elastic sheet 31 can be one, or the number of the first elastic sheet 31 can be multiple. When there are multiple first elastic sheets 31, the multiple first elastic sheets 31 can be arranged in a direction parallel to the second axis. During installation, one end of the first elastic sheet 31 can be fitted and fixed to the support seat 1, and the other end can be fitted and fixed to the connecting end 21 of the swing arm assembly 2. And the first elastic sheet 31 is arranged parallel to the second axis. While the swing arm assembly 2 is connected to the support seat 1 through the first elastic sheet 31, when the middle portion 23 of the swing arm assembly 2 is pushed by the driving end of the driving unit 4, the first elastic sheet 31 is elastically deformed, so that the swing arm assembly 2 swings around the second axis supported by the first elastic sheet 31. The elastic structure adopts the first elastic sheet 31 to make the structure of the elastic connection group 3 simpler.

[0043] In one embodiment, see Figure 4 and Figure 5 , the elastic connection group 3 also includes a second elastic sheet 32, the second elastic sheet 32 ​​is also parallel to the second axis, one end of the second elastic sheet 32 ​​is fixedly attached to the support seat 1, and the other end is fixedly attached to the connection end 21, and the projections of the second elastic sheet 32 ​​and the first elastic sheet 31 on a plane perpendicular to the second axis intersect each other. Specifically, the second elastic sheet 32 ​​refers to a sheet or plate-like component that can be elastically deformed after being subjected to an external force, and the elastic deformation mode of the second elastic sheet 32 ​​is mainly bending. The second elastic sheet 32 ​​can be made of metal, or non-metallic materials such as plastic. The number of the second elastic sheet 32 ​​can be one, or the number of the second elastic sheet 32 ​​can be multiple. When there are multiple second elastic sheets 32, the multiple second elastic sheets 32 can be arranged in a direction parallel to the second axis. The second elastic sheet 32 ​​is also parallel to the second axis, one end of the second elastic sheet 32 ​​is fixedly attached to the support seat 1, and the other end is fixedly attached to the connection end 21.

[0044] In this embodiment, by providing a second elastic sheet 32 ​​on the basis of the first elastic sheet 31, the strength of the connection between the swing arm assembly 2 and the support seat 1 can be further enhanced. By arranging the first elastic sheet 31 and the second elastic sheet 32 ​​in a direction parallel to the second axis, and the projections of the second elastic sheet 32 ​​and the first elastic sheet 31 on a plane perpendicular to the second axis intersect with each other, the swing arm assembly 2 can be prevented from deviating from the second axis when swinging, thereby making the swing of the swing arm assembly 2 more stable and the solid crystal more precise.

[0045] It should be noted that when the projections of the second elastic sheet 32 ​​and the first elastic sheet 31 on the plane intersect with each other, the intersection position of the second elastic sheet 32 ​​and the first elastic sheet 31 is the position of the second axis, and the second axis intersects with the second elastic sheet 32 ​​and the first elastic sheet 31, wherein the above-mentioned plane generally refers to a vertical plane, and the angle between the second elastic sheet 32 ​​and the first elastic sheet 31 is generally a right angle, so that the force on the swing arm assembly 2 is more uniform.

[0046] In one embodiment, see Figure 2 and Figure 3 , the first elastic sheet 31 is arranged in the horizontal direction, the second axis penetrates the first elastic sheet 31, and in the horizontal direction, the first elastic sheet 31 is located in an area flush with the nozzle surface 51 of the nozzle structure 5. In this embodiment, by arranging the first elastic sheet 31 in the horizontal direction, the second elastic sheet 32 ​​can be arranged in the vertical direction, and the second axis penetrates the first elastic sheet 31, and the first elastic sheet 31 and the nozzle surface 51 of the nozzle structure 5 are located in the same horizontal plane, when the nozzle surface 51 of the nozzle structure 5 moves the same distance in the vertical direction, the deviation in the horizontal direction can be smaller, thereby reducing the deviation of the nozzle surface 51 when the swing arm assembly 2 swings. In an optional embodiment, please refer to Figure 4 and Figure 5The support seat 1 is provided with a first pressing block 33 for pressing the first elastic sheet 31 or the second elastic sheet 32. The first pressing block 33 can be fixed to the support seat 1 by screws. At least part of the first elastic sheet 31 or at least part of the second elastic sheet 32 ​​is located between the first pressing block 33 and the support seat 1. The first pressing block 33 can be pressed to make the first elastic sheet 31 or the second elastic sheet 32 ​​fit and fix on the support seat 1. At the same time, a mounting hole can be provided on the first elastic sheet 31 or the second elastic sheet 32. When the first pressing block 33 is fixed by a fastener, the fastener can also pass through the mounting hole on the first elastic sheet 31 or the second elastic sheet 32, so that the fit and fixation between the first elastic sheet 31 or the second elastic sheet 32 ​​and the support seat 1 is more firm. Similarly, a second pressing block 34 for pressing the first elastic sheet 31 or the second elastic sheet 32 ​​is provided on the swing arm assembly 2. The second pressing block 34 can be fixed to the swing arm assembly 2 by screws. At least part of the first elastic sheet 31 or at least part of the second elastic sheet 32 ​​is located between the second pressing block 34 and the swing arm assembly 2. The first elastic sheet 31 or the second elastic sheet 32 ​​can be pressed by the second pressing block 34 to fit and fix on the swing arm assembly 2. At the same time, a mounting hole can be provided on the first elastic sheet 31 or the second elastic sheet 32. When the second pressing block 34 is fixed by a fastener, the fastener can also pass through the mounting hole on the first elastic sheet 31 or the second elastic sheet 32, so that the fit and fixation between the first elastic sheet 31 or the second elastic sheet 32 ​​and the swing arm assembly 2 is more firm.

[0047] In one embodiment, see Figure 1The swing arm assembly 2 includes a swing arm mounting seat 24 and a swing arm body 25. The first end of the swing arm mounting seat 24 is connected to the support seat 1 through the elastic connection group 3, and the second end is connected to the first end of the swing arm body 25. The second end of the swing arm body 25 extends in a direction away from the swing arm mounting seat 24. The driving end is connected to the swing arm mounting seat 24. The first end of the swing arm mounting seat 24 is the connecting end 21, and the second end of the swing arm body 25 is the crystal fixing end 22. Specifically, the swing arm mounting seat 24 refers to a component with a certain volume. The swing arm mounting seat 24 can be a block, a plate, or a combination of multiple shapes. The swing arm body 25 refers to a component with a certain length. The swing arm body 25 can be columnar, rod-shaped, or block-shaped. The first end of the swing arm body 25 of the swing arm body 25 can be connected to the second end of the swing arm mounting seat 24 by means of clamping, fastener fixing, and welding. A weight reduction structure can also be provided on the swing arm body 25. By configuring the swing arm assembly 2 as a split structure consisting of a swing arm mounting base 24 and a swing arm body 25, the swing arm mounting base 24 and the swing arm body 25 can be processed separately, thereby reducing the overall manufacturing cost of the swing arm assembly 2. At the same time, after the swing arm mounting base 24 is connected to the support base 1 through an elastic structure, the swing arm body 25 can be installed on the second end of the swing arm mounting base 24, thereby making the assembly of the swing arm assembly 2 faster and more convenient.

[0048] In one embodiment, see Figure 5 , a first mounting surface 26 and a second mounting surface 27 are also provided at the first end of the swing arm mounting seat 24, and the first mounting surface 26 is used to fit and fix with the first elastic sheet 31, and the second mounting surface 27 is used to fit and fix with the second elastic sheet 32. Specifically, the first mounting surface 26 and the first mounting surface 26 both refer to surface structures with a certain area, and the first mounting surface 26 and the first mounting surface 26 are generally planar structures, and the first mounting surface 26 and the first mounting surface 26 can be arranged perpendicular to each other. In this embodiment, by providing the first mounting surface 26 and the first mounting surface 26 at the first end of the swing arm mounting seat 24, that is, at the connecting end 21 of the swing arm assembly 2, the fitting and fixing of the first elastic sheet 31 and the second elastic sheet 32 ​​to the connecting end 21 can be made more convenient and more secure.

[0049] Based on the above-mentioned features of the first mounting surface 26 and the second mounting surface 27, please refer to Figure 1 A third mounting surface and a fourth mounting surface are also provided on the support seat 1. The third mounting surface is parallel to the first mounting surface 26, and the fourth mounting surface can be parallel to the second mounting surface 27. The third mounting surface and the fourth mounting surface can make the installation of the first elastic sheet 31 and the second elastic sheet 32 ​​more convenient and firm.

[0050] In one embodiment, see Figure 1The driving unit 4 includes a voice coil motor, which includes a stator assembly 41 and a mover assembly 42. The stator assembly 41 is fixedly mounted on the support seat 1, and the mover assembly 42 is movably arranged inside the stator assembly 41. At least part of the mover assembly 42 is connected to the middle part 23 of the swing arm assembly 2. The stator assembly 41 has a magnetic part, and the mover assembly 42 has a coil part for connecting with an external circuit, and the coil part is also used to interact with the magnetic part after power is supplied to drive the mover assembly 42 to reciprocate along a preset path.

[0051] Specifically, the stator assembly 41 refers to a component with a certain volume, and a containing structure is usually provided on the stator assembly 41, and the containing structure can be a containing groove, a containing hole, etc. The magnetic part refers to a component that has magnetism and can generate a stable magnetic field, and the magnetic part can be provided in the containing structure on the stator assembly 41. The moving subassembly 42 also refers to a component with a certain volume, and a coil part is also provided on the moving subassembly 42, and the coil part refers to a structure wound by a wire. When the voice coil motor is working, the coil part can be connected to the external circuit, and a magnetic field will be generated after the coil part is energized, and the magnetic field will interact with the magnetic field generated by the magnetic part to make the moving subassembly 42 move along a straight line or an arc, and by changing the direction of the current passed into the coil part (for example, passing alternating current), the reciprocating motion of the moving subassembly 42 can be achieved. By connecting at least part of the moving subassembly 42 to the power end of the swing arm assembly 2, the power end of the swing arm assembly 2 will also be driven to move together when the moving subassembly 42 moves.

[0052] In this embodiment, a voice coil motor is used instead of a servo motor to drive the movement of the power end of the swing arm assembly 2. The voice coil motor has better high-frequency response characteristics, can achieve high-speed reciprocating linear motion, and is particularly suitable for short-stroke servo control with high positioning accuracy. The voice coil motor has no intermediate transmission link, which can greatly simplify its own structure and volume, thereby improving the compactness of the entire swing arm assembly 2. At the same time, it also reduces the motion inertia of the swing arm assembly 2, thereby improving the working efficiency and solid crystal accuracy of the entire swing arm assembly 2 during operation.

[0053] In one embodiment, see Figure 1 , an elastic limiting group 6 is provided between the support seat 1 and / or the main body of the driving unit 4 and the swing arm assembly 2, and the elastic limiting group 6 is used to limit the swing arm assembly 2 to avoid collision between the swing arm assembly 2 and the support seat 1. Specifically, the elastic limiting group 6 refers to a component or assembly used to elastically limit an object through its own elasticity. In this embodiment, by providing an elastic limiting group 6 between the support seat 1 and the swing arm assembly 2, and providing an elastic limiting group 6 between the main body of the driving unit 4 and the swing arm assembly 2, the swing arm assembly 2 can be elastically limited during the swinging process of the swing arm assembly 2, thereby avoiding collision between the swing arm assembly 2 and the support seat 1.

[0054] In one embodiment, see Figure 1 The elastic limiting part includes a mounting bracket 61 and an elastic push pin 62. One end of the elastic push pin 62 is fixed on the support seat 1 or the driving unit 4 through the mounting bracket 61, and the other end of the elastic push pin 62 abuts against the swing arm assembly 2. Specifically, the mounting bracket 61 refers to a component with a certain volume. The mounting bracket 61 can be a block, a plate, or a combination of multiple shapes. The elastic push pin 62 refers to an elastic component with a certain length. The elastic push pin 62 can be an integral elastic component, such as a columnar spring or a rubber column. The elastic push pin 62 can also be a combination of multiple components. For example, a columnar component is arranged in a sleeve, and a buffer spring is arranged in the sleeve to form the entire elastic push pin 62. In this embodiment, the body of the elastic push pin 62 is fixed to the body of the support seat 1 or the drive unit 4 through the mounting bracket 61, and one end of the elastic push pin 62 can abut against the swing arm assembly 2. When the swing arm assembly 2 is close to the support seat 1 or the body of the drive unit 4, the elasticity of the elastic push pin 62 can apply a force to the swing arm assembly 2, thereby limiting the swing arm assembly 2 to avoid collision.

[0055] In a second aspect, a die bonding device is provided, comprising any of the above-mentioned die bonding swing arm devices. It is understandable that the beneficial effects of the above-mentioned second aspect can be referred to the relevant description in the above-mentioned first aspect, and will not be repeated here.

[0056] The above are only preferred embodiments of the present invention, and only specifically describe the technical principles of the present invention. These descriptions are only for explaining the principles of the present invention and cannot be interpreted as limiting the scope of protection of the present invention in any way. Based on the explanations here, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention, and other specific implementations of the present invention that can be associated with by technicians in this field without creative labor, should be included in the scope of protection of the present invention.

Claims

1. A crystal bonding swing arm device, characterized in that: include: The support seat has the freedom to rotate about the first axis; A swing arm assembly, the swing arm assembly having a connecting end and a die-bonding end arranged opposite to each other, and the swing arm assembly also having a middle portion, the middle portion being located in a region between the connecting end and the die-bonding end; an elastic connection group, connected between the support seat and the connection end, the elastic connection group being elastically deformable when subjected to an external force, so as to enable the swing arm assembly to reciprocate around a second axis supported by the elastic connection group, and the second axis being arranged at an angle to the first axis; and A driving unit is arranged on the supporting seat, and a driving end of the driving unit is connected to the middle part of the swing arm assembly, and is used for driving the swing arm assembly to swing back and forth around the first axis.

2. The die-bonding swing arm device according to claim 1, characterized in that: The die-bonding swing arm device further comprises a nozzle structure, wherein the nozzle structure comprises a nozzle surface for contacting the chip, and the second axis is in a horizontal direction, and in the horizontal direction, the second axis is located in an area flush with the nozzle surface.

3. The die-bonding swing arm device according to claim 2, characterized in that: The elastic connection group includes a first elastic sheet, the first elastic sheet is parallel to the second axis, one end of the first elastic sheet is fixed to the support seat, and the other end of the first elastic sheet is fitted and fixed to the connection end.

4. The die-bonding swing arm device according to claim 3, characterized in that: The elastic connection group also includes a second elastic sheet, which is also parallel to the second axis. One end of the second elastic sheet is fitted and fixed to the support seat, and the other end is fitted and fixed to the connecting end. The projections of the second elastic sheet and the first elastic sheet on a plane perpendicular to the second axis intersect with each other.

5. The die-bonding swing arm device according to claim 3 or 4, characterized in that: The first elastic sheet is arranged along the horizontal direction, the second axis runs through the first elastic sheet, and along the horizontal direction, the first elastic sheet is located in a region flush with the nozzle surface of the nozzle structure.

6. The die-bonding swing arm device according to claim 5, characterized in that: The swing arm assembly includes a swing arm mounting seat and a swing arm body, the first end of the swing arm mounting seat is connected to the support seat through an elastic connection group, the second end is connected to the first end of the swing arm body, and the second end of the swing arm body extends away from the swing arm mounting seat, the driving end is connected to the swing arm mounting seat, the first end of the swing arm mounting seat is the connecting end, and the second end of the swing arm body is the solid crystal end.

7. The die-bonding swing arm device according to claim 1 or 2, characterized in that: The driving unit includes a voice coil motor, which includes a stator assembly and a mover assembly. The stator assembly is fixedly mounted on the support seat, and the mover assembly is movably arranged inside the stator assembly. At least a portion of the mover assembly is connected to the middle portion of the swing arm assembly. The stator assembly has a magnetic portion, and the mover assembly has a coil portion for connecting to an external circuit. The coil portion is also used to interact with the magnetic portion after power is supplied to drive the mover assembly to reciprocate along a preset path.

8. The die-bonding swing arm device according to claim 1 or 2, characterized in that: An elastic limiting group is arranged between the support seat and / or the main body of the driving unit and the swing arm assembly, and the elastic limiting group is used to limit the swing arm assembly to avoid collision between the swing arm assembly and the support seat.

9. The die-bonding swing arm device according to claim 8, characterized in that: The elastic limiting portion includes a mounting bracket and an elastic ejector pin, one end of the elastic ejector pin is fixed to the support seat or the driving unit through the mounting bracket, and the other end of the elastic ejector pin abuts against the swing arm assembly.

10. A die bonding device, characterized in that: It comprises the crystal bonding swing arm device as described in any one of claims 1 to 9.

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