Solar cell detection system and detection method thereof

Abstract

The invention discloses a solar cell detection system and a detection method thereof. The solar cell detection system comprises a signal source assembly, a sample detection module, a reflection module and an image acquisition module. The signal source assembly comprises a first signal source and a second signal source, and detection signals emitted by the first signal source and the second signal source are different. When a detection signal emitted by the first signal source or the second signal source is an optical signal, the detection signal reaches the reflection module, and the reflection module reflects the optical signal to the to-be-detected sample, so that the to-be-detected sample reflects the optical signal or excites an internal optical signal. And acquiring the reflected light signal or a light signal generated by exciting the interior of the to-be-detected sample through an image acquisition module so as to obtain a detection image of the to-be-detected sample.

Description

Technical Field

[0001] The present application relates to the field of optical detection, and in particular to a solar cell detection system and a detection method thereof. Background Art

[0002] In order to fully realize the potential of solar cells, modern and accurate testing methods are particularly important. Efficient and accurate testing technology can help researchers evaluate the photoelectric conversion efficiency, stability and life of the battery, optimize the manufacturing process, and solve material and environmental related problems, thereby promoting the further development and commercial application of solar cell technology.

[0003] Existing testing equipment and technologies are often limited to specific testing functions or parameters and lack comprehensiveness and comprehensiveness. This results in the need to use a variety of different testing equipment and methods simultaneously when evaluating solar cell performance, increasing costs and complexity. The lack of comprehensive equipment also limits the ability to fully evaluate and effectively monitor cell performance in actual production and large-scale applications. Summary of the invention

[0004] The embodiments of the present application provide a solar cell detection system and a detection method thereof, aiming to provide a solar cell detection system with better integration.

[0005] A first aspect of the present application provides a solar cell detection system, comprising: a signal source component, comprising a first signal source and a second signal source, the first signal source and the second signal source being used to emit different detection signals; a sample detection module, for placing a sample to be tested; a reflection module, located between the signal source component and the sample detection module, and at least used to reflect a signal emitted by at least one of the first signal source and the second signal source to the sample to be tested; and an image acquisition module, for acquiring a detection image of the sample to be tested.

[0006] According to an implementation scheme of the first aspect of the present application, the first signal source includes a first light source, the second signal source includes a second light source, the collimation of the second light source is better than that of the first light source, the reflection module includes a first beam splitter and a second beam splitter, the first beam splitter and the second beam splitter are arranged at intervals between the image acquisition module and the sample detection module, the first beam splitter is at least used to reflect the light emitted by the first light source to the sample to be tested, and the second beam splitter is at least used to reflect the light emitted by the second light source to the sample to be tested.

[0007] According to any of the aforementioned embodiments of the first aspect of the present application, a first collimating structure is arranged between the second light source and the second beam splitter, and the first collimating structure is used to convert the light beam emitted by the second light source into a parallel light beam through the first collimating structure.

[0008] According to any of the aforementioned embodiments of the first aspect of the present application, a first filtering structure is arranged between the second light source and the second beam splitter, and the first filtering structure is used to filter the light beam emitted by the second light source.

[0009] According to any of the aforementioned embodiments of the first aspect of the present application, a light intensity adjustment structure is provided between the second light source and the second beam splitter, and the light intensity adjustment structure is used to attenuate the light intensity of the light from the second light source after passing through the light intensity adjustment structure.

[0010] According to any of the aforementioned embodiments of the first aspect of the present application, it also includes: a detection meter, which is used to be electrically connected to the sample to be tested to detect electrical parameters of the sample to be tested.

[0011] According to any of the aforementioned embodiments of the first aspect of the present application, the reflection module includes a first reflection structure located between the second light source and the second beam splitter, and the first reflection structure is used to reflect light emitted by the second light source to the second beam splitter.

[0012] According to any of the aforementioned embodiments of the first aspect of the present application, a second reflective structure is arranged between the first reflective structure and the second light source, and the second reflective structure is used to reflect the light emitted by the second light source to the first reflective structure.

[0013] According to any of the aforementioned embodiments of the first aspect of the present application, it also includes a spectrometer, which is used to collect light emitted by the sample to be tested and reflected by the second beam splitter.

[0014] According to any of the aforementioned embodiments of the first aspect of the present application, a dichroic mirror is arranged between the first reflective structure and the second reflective structure, at least for reflecting the light emitted by the sample to be tested and reflected by the second beam splitter and the first reflective structure to the spectrometer.

[0015] According to any of the aforementioned embodiments of the first aspect of the present application, a second filtering structure is provided between the dichroic mirror and the spectrometer for filtering the reflected light of the dichroic mirror.

[0016] According to any of the aforementioned embodiments of the first aspect of the present application, the image acquisition module includes an imaging module, and the imaging module is arranged opposite to the sample detection module.

[0017] According to any of the aforementioned embodiments of the first aspect of the present application, a switchable filter structure is arranged between the imaging module and the reflection module, a light beam detection area is formed between the imaging module and the sample detection module, and the switchable filter structure has a first state and a second state. In the first state, the switchable filter module is located outside the light beam detection area, and in the second state, the switchable filter structure is located within the light beam detection area.

[0018] According to any of the aforementioned embodiments of the first aspect of the present application, it also includes: a source meter, which is used to provide an electrical signal to the sample to be tested, or is multiplexed as a detection meter.

[0019] The second aspect of the present application provides a detection method for a solar cell detection system, the method comprising:

[0020] Allow at least one of the first signal source and the second signal source to transmit a detection signal to the reflection module, wherein the first signal source and the second signal source are used to transmit different detection signals;

[0021] A reflection module is used to reflect the detection signal to the sample to be tested in the sample detection module;

[0022] An image acquisition module is used to acquire the detection image of the sample to be tested.

[0023] According to the solar cell detection system of the embodiment of the present application, the solar cell detection system includes a signal source component, a sample detection module, a reflection module and an image acquisition module. The signal source component includes a first signal source and a second signal source, and the detection signals emitted by the first signal source and the second signal source are different. For example, the detection signals emitted by the first signal source and the second signal source are optical signals with different spectral bandwidths, or the detection signal emitted by the first signal source is an optical signal, and the detection signal emitted by the second signal source is an electrical signal. When the detection signal emitted by the first signal source or the second signal source is an optical signal, the detection signal reaches the reflection module, and the reflection module reflects the optical signal to the sample to be tested, so that the sample to be tested reflects the optical signal or excites the internal optical signal, and the image acquisition module collects the reflected optical signal or the optical signal generated by the internal excitation of the sample to be tested to obtain the detection image of the sample to be tested. The present application integrates the two detection processes of the first signal source and the second signal source into the same detection system. The detection system can detect multiple detection processes and obtain detection results of multiple dimensions, and has high integration to comprehensively evaluate the performance and characteristics of solar cells and obtain defect information of solar cells. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Other features, objects and advantages of the present application will become more apparent by reading the following detailed description of non-limiting embodiments with reference to the accompanying drawings, in which the same or similar reference numerals represent the same or similar features and the accompanying drawings are not drawn to scale.

[0025] Figure 1 is a structural schematic diagram of a solar cell system provided in an embodiment of the present application;

[0026] Figure 2 is a schematic structural diagram of a solar cell system in another embodiment;

[0027] Figure 3 is a schematic structural diagram of a solar cell system in another embodiment;

[0028] Figure 4 is a schematic structural diagram of a solar cell system in yet another embodiment;

[0029] Figure 5 is a structural schematic diagram of a solar cell system in yet another embodiment;

[0030] Figure 6 is a structural schematic diagram of a solar cell system in yet another embodiment;

[0031] Figure 7 It is a schematic flow chart of a detection method for a solar cell system provided in an embodiment of the present application.

[0032] Description of reference numerals:

[0033] 100, first signal source; 101, first light source; 110, light uniformity structure;

[0034] 200, second signal source; 201, second light source; 210, first collimation structure; 220, light intensity adjustment structure; 230, first filter structure; 240, focusing structure; 250, dichroic mirror; 260, spectrometer; 270, second filter structure; 280, second collimation structure;

[0035] 300, reflection module; 310, first beam splitter; 320, second beam splitter; 330, first reflection structure; 340, second reflection structure;

[0036] 400, image acquisition module; 410, switchable filter structure;

[0037] 500, sample detection module; 510, sample to be detected

[0038] 600, test meter; 610, source meter. DETAILED DESCRIPTION

[0039] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only configured to explain the present application and are not configured to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by illustrating the examples of the present application.

[0040] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "include..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0041] It should be understood that when describing the structure of a component, when a layer or a region is referred to as being "on" or "over" another layer or another region, it may mean that it is directly on the other layer or another region, or that other layers or regions are included between it and the other layer or another region. Moreover, if the component is turned over, the layer or a region will be "below" or "beneath" another layer or another region.

[0042] The embodiments of the present application provide a solar cell detection system and a detection method thereof. The embodiments of the solar cell detection system and the detection method thereof will be described below in conjunction with the accompanying drawings.

[0043] See also Figure 1 , Figure 1 It is a structural schematic diagram of a solar cell system provided in an embodiment of the present application.

[0044] like Figure 1 As shown, an embodiment of the present application provides a solar cell detection system, including: a signal source component, including a first signal source 100 and a second signal source 200, the first signal source 100 and the second signal source 200 are used to emit different detection signals; a sample detection module 500, used to place a sample 510 to be tested; a reflection module 300, located between the signal source component and the sample detection module 500, at least used to reflect the signal emitted by at least one of the first signal source 100 and the second signal source 200 to the sample 510 to be tested; an image acquisition module 400, used to acquire a detection image of the sample 510 to be tested.

[0045] According to the solar cell detection system of the embodiment of the present application, the solar cell detection system includes a signal source component, a sample detection module 500, a reflection module 300 and an image acquisition module 400. The signal source component includes a first signal source 100 and a second signal source 200. The detection signals emitted by the first signal source 100 and the second signal source 200 are different. For example, the detection signals emitted by the first signal source 100 and the second signal source 200 are optical signals with different spectral bandwidths, or the detection signal emitted by the first signal source 100 is an optical signal, and the detection signal emitted by the second signal source 200 is an electrical signal. When the detection signal emitted by the first signal source 100 or the second signal source 200 is an optical signal, the detection signal reaches the reflection module 300, and the reflection module 300 reflects the optical signal to the sample to be tested 510, so that the sample to be tested 510 reflects the optical signal or excites the internal optical signal, and the image acquisition module 400 collects the reflected optical signal or the optical signal generated by the internal excitation of the sample to be tested 510 to obtain a detection image of the sample to be tested 510. The present application integrates the two detection processes of the first signal source 100 and the second signal source 200 into the same detection system. The detection system can be used to detect multiple detection processes and obtain detection results in multiple dimensions. It has high integration, so as to comprehensively evaluate the performance and characteristics of solar cells and obtain defect information of solar cells.

[0046] When the detection signal emitted by the first signal source 100 or the second signal source 200 is an electrical signal, the first signal source 100 or the second signal source 200 is electrically connected to the sample to be tested 510 to provide an electrical signal to the sample to be tested 510. When the sample to be tested 510 receives the electrical signal, the electrons excited by the electric field of the sample to be tested 510 hit the luminescence center, causing the electrons to transition, change, and recombine between energy levels, resulting in luminescence, thereby the detection pattern of the sample to be tested 510 is captured by the image acquisition module 400, and the electroluminescence imaging of the sample to be tested 510 is obtained.

[0047] Optionally, the sample to be tested 510 includes a solar cell, such as a perovskite solar cell, that is, a solar cell whose active layer is a perovskite material. Through the detection system of the present application, it is possible to detect multiple aspects of the perovskite solar cell, such as bright field imaging, photoluminescence imaging, electroluminescence imaging, photovoltage scanning, and fluorescence spectrum detection, so as to comprehensively evaluate the performance and characteristics of the perovskite solar cell and obtain defect information of the perovskite solar cell.

[0048] like Figure 1As shown, in some optional embodiments, the first signal source 100 includes a first light source 101, the second signal source 200 includes a second light source 201, the collimation of the second light source 201 is better than the collimation of the first light source 101, the reflection module 300 includes a first beam splitter 310 and a second beam splitter 320, the first beam splitter 310 and the second beam splitter 320 are arranged at intervals between the image acquisition module 400 and the sample detection module 500, the first beam splitter 310 is at least used to reflect the light emitted by the first light source 101 to the sample to be tested 510, and the second beam splitter 320 is at least used to reflect the light emitted by the second light source 201 to the sample to be tested 510.

[0049] The first beam splitter 310 and the second beam splitter 320 can both allow part of the light to pass through, and part of the light can be reflected by the first beam splitter 310 and the second beam splitter 320. Therefore, although the first beam splitter 310 and the second beam splitter 320 are disposed between the image acquisition module 400 and the sample detection module 500, the image acquisition module 400 will not affect the image acquisition of the sample 510 to be detected.

[0050] Collimation refers to the property of a light source or particle beam that can be collimated to a certain degree after being processed by appropriate optical or physical means. In short, it describes the ability of a light source or particle beam to easily make its light or particle beam parallel or nearly parallel through technical means. The second light source 201 has better collimation, which means that the light emitted by the second light source 201 is easier to make its light or particle beam parallel or nearly parallel through technical means.

[0051] In these optional embodiments, the first beam splitter 310 reflects the light emitted by the first light source 101 to the sample 510 to be tested, and the sample 510 to be tested reflects the light to the image acquisition module 400, and the image acquisition module 400 collects the reflected light signal of the sample 510 to obtain the bright field imaging of the surface of the sample 510 to be tested, or the interior of the sample 510 to be tested is excited to generate fluorescence, and the fluorescence reaches the image acquisition module 400 through the first beam splitter 310 and the second beam splitter 320, so that the image acquisition module 400 collects the fluorescence pattern of the solar cell and obtains the photoluminescence imaging of the solar cell. Through the photoluminescence imaging, the luminescence properties and carrier lifetime change trends of the solar cell can be analyzed, so as to obtain the defect information of the solar cell. The second beam splitter 320 reflects the light emitted by the second light source 201 to the sample 510 to be tested, and the carriers inside the sample 510 to be tested move, so as to generate photocurrent. By collecting the photocurrent or photovoltage of the sample 510 to be tested, the photocurrent imaging or photovoltage imaging of the sample 510 to be tested can be obtained.

[0052] Optionally, the second light source 201 includes a laser, and the laser light emitted by the laser has a narrow spectral bandwidth, so that the sample 510 to be tested can be better stimulated to move the carriers inside the sample 510 to generate photocurrent. Moreover, the laser can generate a continuous and stable light source.

[0053] Optionally, a light homogenizing structure 110 is arranged between the first light source 101 and the first beam splitter 310, which is used to make the light emitted by the first light source 101 to achieve uniform light output after passing through the light homogenizing structure 110. The uniform light beam is emitted to the surface of the sample to be tested 510 after passing through the first beam splitter 310, and is thereby reflected by the sample to be tested 510 to the image acquisition module 400, or the sample to be tested 510 is excited to generate fluorescence, and the generated fluorescence is emitted to the image acquisition module 400. The image acquisition module 400 obtains a relatively uniform reflection image or fluorescence image, and can better evaluate the defects of the solar cell based on bright field imaging.

[0054] Optionally, the light homogenization structure 110 includes a Kohler illumination system. The Kohler illumination system ensures that the sample is evenly illuminated in the entire field of view through the synergistic effect of multiple optical elements, thereby eliminating light spots and shadows and improving image quality.

[0055] See also Figure 2 , Figure 2 is a schematic structural diagram of a solar cell system in another embodiment.

[0056] like Figure 2 As shown, in some optional embodiments, a first collimating structure 210 is disposed between the second light source 201 and the second beam splitter 320 , and the first collimating structure 210 is used to convert the light beam emitted by the second light source 201 into a parallel light beam through the first collimating structure 210 .

[0057] In these optional embodiments, the light emitted by the second light source 201 becomes a parallel light beam after passing through the first collimating structure 210. The parallel light beam can be better transmitted on the optical path and reaches the second beam splitter 320, thereby reducing the loss of the light beam during transmission and improving the excitation efficiency of the second light source 201 on the sample to be tested 510, so as to obtain clearer photocurrent imaging, which is convenient for analyzing the defect information of the solar cell based on photoluminescence imaging.

[0058] Optionally, the first collimating structure 210 includes a collimating lens.

[0059] In some optional embodiments, a first light filtering structure 230 is disposed between the second light source 201 and the second beam splitter 320 , and the first light filtering structure 230 is used to filter the light beam emitted by the second light source 201 .

[0060] In these optional embodiments, after the light emitted by the second light source 201 passes through the first filtering structure 230, the first filtering structure 230 filters the light beam to filter out spectral components outside the excitation bandwidth in the light beam emitted by the second light source 201, so that the subsequently collected images are clearer.

[0061] Optionally, the first filtering structure 230 is disposed between the first collimating structure 210 and the second beam splitter 320. The light emitted by the second light source 201 is collimated into parallel light by the first collimating structure 210 and then filtered by the first filtering structure 230 to filter out spectral components outside the excitation bandwidth. The filtered light beam reaches the second beam splitter 320 and is reflected by the second beam splitter 320 to the sample to be tested 510.

[0062] In some optional embodiments, a light intensity adjustment structure 220 is provided between the second light source 201 and the second beam splitter 320 , and the light intensity adjustment structure 220 is used to attenuate the light intensity of the light from the second light source 201 after passing through the light intensity adjustment structure 220 .

[0063] In these optional embodiments, after the light emitted by the second light source 201 passes through the light intensity adjustment structure 220, the light intensity adjustment structure 220 can adjust the light beam intensity to obtain a light beam of actually required light intensity, and then reflect the adjusted light beam to the sample to be tested 510 through the second beam splitter 320.

[0064] Optionally, the light intensity modulation structure 220 includes a neutral density filter.

[0065] Optionally, the light intensity modulation structure 220 is arranged between the first collimating structure 210 and the first filtering structure 230. After the light emitted by the second light source 201 is collimated into parallel light by the first collimating structure 210, the light intensity is adjusted by the light intensity modulation structure 220, and then the light is filtered by the first filtering structure 230 to filter out spectral components outside the excitation bandwidth. The filtered light beam reaches the second beam splitter 320 and is reflected by the second beam splitter 320 to the sample to be tested 510.

[0066] See also Figure 3 , Figure 3 is a structural schematic diagram of a solar cell system in yet another embodiment.

[0067] like Figure 3 As shown, in some optional embodiments, it also includes: a detection meter 600, which is used to be electrically connected to the sample 510 to detect the electrical parameters of the sample 510 to be tested.

[0068] In these optional embodiments, when the light emitted by the second light source 201 is reflected to the sample to be tested 510 through the second beam splitter 320, the interior of the sample to be tested 510 is excited, and the carriers move inside the sample to be tested 510, thereby generating current. The detection meter 600 collects the generated current or voltage to obtain the real-time photocurrent or photovoltage of the sample to be tested 510.

[0069] Optionally, the sample detection module 500 also includes a translation stage, and the sample to be tested 510 is located on the translation stage. The translation stage can move the sample to be tested 510 on the translation stage, so that the sample to be tested 510 can be excited at multiple points, that is, the light emitted by the second light source 201 can irradiate the sample to be tested 510 at multiple points, and the signal is sampled between the two electrodes of the sample to be tested 510 by detecting the ammeter 600 to obtain a photocurrent or photovoltage scanning imaging of the sample to be tested 510, that is, the photocurrent imaging or photovoltage imaging of the sample to be tested 510.

[0070] See also Figure 4 , Figure 4 is a schematic structural diagram of a solar cell system in yet another embodiment.

[0071] like Figure 4 As shown, in some optional embodiments, the reflection module 300 includes a first reflection structure 330 located between the second light source 201 and the second beam splitter 320 , and the first reflection structure 330 is used to reflect the light emitted by the second light source 201 to the second beam splitter 320 .

[0072] In these optional embodiments, after the light emitted by the second light source 201 reaches the first reflective structure 330, the first reflective structure 330 reflects the light to the second beam splitter 320, and the second beam splitter 320 then reflects the light to the interior of the sample to be tested 510 to be excited, and the carriers move to generate photocurrent, which is then detected to obtain a photocurrent scanning image.

[0073] Optionally, the first reflective structure 330 includes a high reflective mirror.

[0074] Optionally, a second reflecting structure 340 is arranged between the first reflecting structure 330 and the second light source 201. The second reflecting structure 340 is used to reflect the light emitted by the second light source 201 to the first reflecting structure 330. The first reflecting structure 330 then reflects the light to the second beam splitter 320. The second beam splitter 320 reflects the light emitted by the second light source 201 to the sample to be tested 510. The carriers inside the sample to be tested 510 move, thereby generating a photocurrent. By collecting the photocurrent or photovoltage of the sample to be tested 510, photocurrent imaging or photovoltage imaging of the sample to be tested 510 can be obtained.

[0075] Optionally, the second reflective structure 340 includes a high reflective mirror.

[0076] Optionally, a focusing structure 240 is arranged between the first reflection structure 330 and the second beam splitter 320. The light emitted by the second light source 201 is reflected by the first reflection structure 330 and then reaches the second beam splitter 320 through the focusing structure 240. The focusing structure 240 enables the light reflected by the first reflection structure 330 to be focused to reduce the light spot, and then reflected by the second beam splitter 320 to the sample to be tested 510. The focused light beam can better excite the sample to be tested 510 to move the carriers inside the sample to be tested 510, thereby generating a photocurrent. By collecting the photocurrent or photovoltage of the sample to be tested 510, the photocurrent imaging or photovoltage imaging of the sample to be tested 510 can be obtained.

[0077] Optionally, the focusing structure 240 includes a focusing lens.

[0078] See also Figure 5 , Figure 5 FIG. 4 is a schematic structural diagram of a solar cell system in another embodiment.

[0079] like Figure 5 As shown, in some optional embodiments, the solar cell system further includes a spectrometer 260 , and the spectrometer 260 is used to collect light emitted by the sample to be tested 510 and reflected by the second beam splitter 320 .

[0080] In these optional embodiments, after the light emitted by the first light source 101 is reflected by the first beam splitter 310 to the sample to be tested 510, the sample to be tested 510 is excited to generate fluorescence, and a part of the fluorescence reaches the image acquisition module 400 through the second beam splitter 320 and the first beam splitter 310 to realize the acquisition of photoluminescence imaging, and the other part of the fluorescence is reflected by the second beam splitter 320 to the first reflection structure 330, and the first reflection structure 330 reflects the fluorescence to the spectrometer 260. The spectrometer 260 can scan the fluorescence and obtain the intensity information of the fluorescence under different wavelength ranges.

[0081] In some optional embodiments, a dichroic mirror 250 is disposed between the first reflective structure 330 and the second reflective structure 340 , at least for reflecting light emitted by the sample 510 to be tested and reflected by the second beam splitter 320 and the first reflective structure 330 to the spectrometer 260 .

[0082] In these optional embodiments, the dichroic mirror 250 is disposed between the first reflection structure 330 and the second reflection structure 340. When the light emitted by the second light source 201 is reflected by the second reflection structure 340 to the first reflection structure 330, it will pass through the dichroic mirror 250 and then reach the first reflection structure 330. After the fluorescence generated by the sample 510 to be tested is reflected by the first reflection structure 330, it will be reflected by the dichroic mirror 250 to the spectrometer 260. Therefore, the dichroic mirror 250 can allow the light emitted by the second light source 201 to pass through, and can reflect the fluorescence emitted by the sample 510 to be tested.

[0083] In some optional embodiments, a second filter structure 270 is disposed between the dichroic mirror 250 and the spectrometer 260 for filtering the reflected light of the dichroic mirror 250 and filtering out the spectrum components corresponding to the excitation light.

[0084] In these optional embodiments, the second filtering structure 270 is disposed between the dichroic mirror 250 and the spectrometer 260. The fluorescence emitted by the sample 510 to be tested is reflected by the dichroic mirror 250 to the spectrometer 260, and passes through the second filtering structure 270. The second filtering structure 270 filters the fluorescence and filters out the spectral components corresponding to the excitation light, so that the wavelength information and intensity information of the obtained fluorescence are more accurate.

[0085] Optionally, a second collimating structure 280 is provided between the dichroic mirror 250 and the spectrometer 260. After the dichroic mirror 250 reflects the light beam, the light passes through the second collimating structure 280, which focuses the light beam into a small spot and couples it to the optical fiber end face of the spectrometer 260, thereby effectively collecting the signal.

[0086] Optionally, a second collimating structure 280 is disposed between the dichroic mirror 250 and the second filtering structure 270, so that after the dichroic mirror 250 reflects the fluorescence, it is first collimated by the second collimating structure 280, which focuses the light beam into a small spot, and then is filtered by the second filtering structure 270 to filter out the spectral components corresponding to the excitation light, and finally coupled to the optical fiber end face of the spectrometer 260, thereby effectively collecting signals and further making the obtained wavelength information and intensity information of the fluorescence more accurate.

[0087] In some optional embodiments, the image acquisition module 400 includes an imaging module, and the imaging module is arranged opposite to the sample detection module 500, such as a high-resolution optical camera, a CCD camera, a CMOS camera, etc.

[0088] In these optional embodiments, in bright field imaging, after the light emitted by the first light source 101 reaches the sample 510 to be tested and is reflected by the sample 510 to be tested, it can be collected by the imaging module, thereby obtaining a bright field imaging image of the sample 510 to be tested. In photoluminescence imaging, after the light emitted by the first light source 101 reaches the sample 510 to be tested, the sample 510 to be tested is excited and generates fluorescence inside, and the fluorescence is collected by the imaging module through the first beam splitter 310 and the second beam splitter 320, thereby obtaining a photoluminescence imaging image of the sample 510 to be tested.

[0089] See also Figure 6 , Figure 6 FIG. 4 is a schematic structural diagram of a solar cell system in another embodiment.

[0090] like Figure 6 As shown, in some optional embodiments, a switchable filter structure 410 is arranged between the imaging module and the reflection module 300, and a light beam detection area is formed between the imaging module and the sample detection module 500. The switchable filter structure 410 has a first state and a second state. In the first state, the switchable filter structure 410 is located outside the light beam detection area. In the second state, the switchable filter structure 410 is located within the light beam detection area.

[0091] In these optional embodiments, in bright field imaging, the switchable filter structure 410 is in the first state, and the light emitted by the first light source 101 reaches the sample to be tested 510 and is reflected by the sample to be tested 510, and then reaches the image acquisition module 400 via the second beam splitter 320 and the first beam splitter 310, thereby obtaining a bright field imaging pattern of the sample to be tested 510. In photoluminescence imaging and electroluminescence imaging, the switchable filter structure 410 is in the second state, the sample to be tested 510 is excited, and fluorescence is generated inside, and the fluorescence reaches the switchable filter structure 410 through the first beam splitter 310 and the second beam splitter 320, and the switchable filter structure 410 filters the fluorescence, filters out the spectral components corresponding to the excitation light, so that the fluorescence finally reaches the image acquisition module 400, and the photoluminescence imaging pattern and electroluminescence imaging pattern of the sample to be tested 510 are obtained.

[0092] In some optional embodiments, it further includes: a source meter 610 for providing an electrical signal to the sample 510 to be tested, or multiplexed as a detection meter 600.

[0093] In these optional embodiments, when the source meter 610 provides an electrical signal to the sample 510 to be tested, the electrons excited by the electric field of the sample 510 to be tested hit the luminescence center, causing the electrons to transition, change, and recombine between energy levels, resulting in luminescence, so that the image acquisition module 400 collects the detection image of the sample 510 to obtain the electroluminescence imaging of the sample 510 to be tested. When the source meter 610 is multiplexed as the detection meter 600, it can provide a bias voltage to the sample 510 to be tested during electroluminescence imaging, and can also detect the sample 510 to be tested during photocurrent imaging.

[0094] According to an embodiment of the present application, in bright field imaging, light emitted by the first light source 101 passes through the light homogenizing structure 110 and reaches the first beam splitter 310. The first beam splitter 310 reflects the light. After being reflected, the light passes through the second beam splitter 320 to reach the surface of the sample to be tested 510. The sample to be tested 510 reflects the light and reaches the image acquisition module 400 via the second beam splitter 320 and the first beam splitter 310.

[0095] According to an embodiment of the present application, in photoluminescence imaging, light emitted by the first light source 101 passes through the light homogenizing structure 110 and reaches the first beam splitter 310. The first beam splitter 310 reflects the light. After being reflected, the light passes through the second beam splitter 320 and the stray light is filtered out by the switchable filter structure 410, thereby being collected by the image acquisition module 400 to obtain an image of photoluminescence imaging.

[0096] Photoluminescence testing studies the optoelectronic properties of materials by exciting them and measuring the photons they emit. Photoluminescence imaging provides important information about the material's band structure, defect states, and the electron-hole recombination process, which directly affect the photoelectric conversion efficiency of solar cells. By analyzing the photoluminescence images under different processes, problems in each link can be found in a targeted manner based on the defects, and the preparation process of solar cells can be optimized, thereby effectively improving the optoelectronic performance of solar cells, reducing costs while increasing the cell yield, and providing effective support for high-quality large-scale production of solar cells.

[0097] In photocurrent imaging, the light emitted by the second light source 201 passes through the first collimating structure 210, the light intensity adjustment structure 220, the first filtering structure 230, the second reflecting structure 340, the dichroic mirror 250, the first reflecting structure 330, the focusing lens, the second beam splitter 320 and reaches the sample to be tested 510. The sample to be tested 510 is irradiated by the light of the second light source 201, and the carriers move inside, thereby generating a photocurrent. The generated current can be collected by the detection meter 600 or the source meter 610 to realize the collection of the photocurrent or photovoltage of the sample to be tested 510. The sample to be tested 510 is moved by the translation stage to perform multi-point irradiation and scanning on the sample to be tested 510 to obtain the photocurrent scanning imaging of the sample to be tested 510.

[0098] Photocurrent imaging can measure the photoelectric response of solar cell materials at a microscopic scale, revealing the charge distribution and local characteristics inside the solar cell materials.

[0099] According to the embodiment of the present application, in electroluminescence imaging, the source meter 610 applies a bias voltage to the sample to be tested 510, and the sample to be tested 510 generates fluorescence, which passes through the second beam splitter 320, the first beam splitter 310, the switchable filter structure 410 and reaches the image acquisition module 400 in sequence, thereby obtaining electroluminescence imaging of the sample to be tested 510. The source meter 610 is multiplexed as the second signal source 200, thereby sending an electrical signal to the sample to be tested.

[0100] Electroluminescence can detect faults and aging effects in material films and battery circuits in a short time. The image of dark defects, uniformity and overall efficiency can visualize the luminescence characteristics of the battery in actual operation.

[0101] In addition to integrating multiple imaging methods, the present invention can also realize fluorescence spectrum collection. The fluorescence generated by the sample 510 to be tested can pass through the second beam splitter 320, the focusing structure 240, the first reflection structure 330, the dichroic mirror 250, the second filter structure 270, and the second collimation structure 280 in sequence and reach the spectrometer 260 to realize fluorescence spectrum collection and obtain fluorescence intensity information at a series of wavelengths.

[0102] Please also read Figures 1 to 7 , Figure 7 It is a schematic flow chart of a detection method for a solar cell system provided in an embodiment of the present application.

[0103] like Figures 1 to 7 As shown, an embodiment of the second aspect of the present application provides a detection method of a solar cell detection system, the method comprising:

[0104] Step S1: enabling at least one of the first signal source 100 and the second signal source 200 to transmit a detection signal to the reflection module 300, wherein the first signal source 100 and the second signal source 200 are used to transmit different detection signals;

[0105] Step S2: using the reflection module 300 to reflect the detection signal onto the sample 510 to be detected in the sample detection module 500;

[0106] Step S3: using an image acquisition module to acquire a detection image of the sample 510 to be tested.

[0107] According to the detection method of the solar cell detection system of the embodiment of the present application, the detection signals emitted by the first signal source 100 and the second signal source 200 are different. For example, the detection signals emitted by the first signal source 100 and the second signal source 200 are optical signals with different spectral bandwidths, or the detection signal emitted by the first signal source 100 is an optical signal, and the detection signal emitted by the second signal source 200 is an electrical signal. When the detection signal emitted by the first signal source 100 or the second signal source 200 is an optical signal, the detection signal reaches the reflection module 300, and the reflection module 300 reflects the optical signal to the sample to be tested 510, so that the sample to be tested 510 reflects the optical signal or excites the internal optical signal, and the reflected optical signal or the optical signal generated by the internal excitation of the sample to be tested 510 is collected by the image acquisition module 400 to obtain a detection image of the sample to be tested 510. The present application integrates the two detection processes of the first signal source 100 and the second signal source 200 into the same detection system. The detection system can be used to detect multiple detection processes and obtain detection results in multiple dimensions. It has high integration, so as to comprehensively evaluate the performance and characteristics of solar cells and obtain defect information of solar cells.

[0108] Compared with the prior art, the present invention has the following advantages:

[0109] 1. The present invention can realize bright field imaging, photoluminescence imaging, electroluminescence imaging, and photocurrent imaging of the same area, eliminating the problem of inconsistent imaging areas caused by sample displacement and repositioning under different test environments, and ensuring the consistency and stability of the samples.

[0110] 2. Traditional imaging systems cannot visually observe many defects and are limited by a single detection method. The present invention can comprehensively detect the photoelectric properties of circuits or materials related to solar cells.

[0111] According to the embodiments described above, these embodiments do not describe all the details in detail, nor do they limit the invention to the specific embodiments described. Obviously, many modifications and changes can be made based on the above description. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present application, so that those skilled in the art can make good use of the present application and the modifications based on the present application. The present application is limited only by the claims and their full scope and equivalents.

Claims

1. A solar cell detection system, characterized in that: include: A signal source component, comprising a first signal source and a second signal source, wherein the first signal source and the second signal source are used to emit different detection signals; A sample detection module is used to place samples to be tested; A reflection module, located between the signal source component and the sample detection module, and at least used to reflect the signal emitted by at least one of the first signal source and the second signal source to the sample to be detected; The image acquisition module is used to acquire the detection image of the sample to be tested.

2. The solar cell detection system according to claim 1, characterized in that: The first signal source includes a first light source, the second signal source includes a second light source, the collimation of the second light source is better than that of the first light source, the reflection module includes a first beam splitter and a second beam splitter, the first beam splitter and the second beam splitter are arranged at intervals between the image acquisition module and the sample detection module, the first beam splitter is at least used to reflect the light emitted by the first light source to the sample to be tested, and the second beam splitter is at least used to reflect the light emitted by the second light source to the sample to be tested.

3. The solar cell detection system according to claim 2, characterized in that: A first collimating structure is arranged between the second light source and the second beam splitter, and the first collimating structure is used to convert the light beam emitted by the second light source into a parallel light beam through the first collimating structure.

4. The solar cell detection system according to claim 2, characterized in that: A first filter structure is arranged between the second light source and the second beam splitter, and the first filter structure is used for filtering the light beam emitted by the second light source.

5. The solar cell detection system according to claim 2, characterized in that: A light intensity adjustment structure is arranged between the second light source and the second beam splitter, and the light intensity adjustment structure is used to attenuate the light intensity of the light from the second light source after passing through the light intensity adjustment structure.

6. The solar cell detection system according to claim 2, characterized in that: Also includes: A detection meter is used to be electrically connected to the sample to be tested so as to detect electrical parameters of the sample to be tested.

7. The solar cell detection system according to claim 2, characterized in that: The reflection module includes a first reflection structure located between the second light source and the second beam splitter, and the first reflection structure is used for reflecting the light emitted by the second light source to the second beam splitter.

8. The solar cell detection system according to claim 7, characterized in that: A second reflective structure is disposed between the first reflective structure and the second light source, and the second reflective structure is used to reflect the light emitted by the second light source to the first reflective structure.

9. The solar cell detection system according to claim 8, characterized in that: It also includes a spectrometer, which is used to collect light emitted by the sample to be tested and reflected by the second beam splitter.

10. The solar cell detection system according to claim 9, characterized in that: A dichroic mirror is arranged between the first reflecting structure and the second reflecting structure, and is at least used to reflect the light emitted by the sample to be tested and reflected by the second beam splitter and the first reflecting structure to the spectrometer.

11. The solar cell detection system according to claim 10, characterized in that: A second filter structure is arranged between the dichroic mirror and the spectrometer for filtering the reflected light of the dichroic mirror.

12. The solar cell detection system according to claim 1, characterized in that: The image acquisition module includes an imaging module, and the imaging module is arranged opposite to the sample detection module.

13. The solar cell detection system according to claim 12, characterized in that: A switchable filter structure is arranged between the imaging module and the reflection module, and a light beam detection area is formed between the imaging module and the sample detection module. The switchable filter structure has a first state and a second state. In the first state, the switchable filter module is located outside the light beam detection area, and in the second state, the switchable filter structure is located within the light beam detection area.

14. The solar cell detection system according to claim 1, characterized in that: Also includes: The source meter is used to provide an electrical signal to the sample to be tested, or to be multiplexed as a detection meter.

15. A detection method for a solar cell detection system, characterized in that: The method comprises: Allow at least one of a first signal source and a second signal source to transmit a detection signal to a reflection module, wherein the first signal source and the second signal source are used to transmit different detection signals; The reflection module is used to reflect the detection signal onto the sample to be detected in the sample detection module; An image acquisition module is used to acquire the detection image of the sample to be tested.

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