Valve device capable of directly heating polluted gas

Abstract

The invention relates to the technical field of valves, in particular to a valve device capable of directly heating polluted gas. According to the technical scheme, the valve device capable of directly heating the polluted gas comprises a base box, a control box, a first pollutant blocking ring, a flap valve set, a heatable module, a heat insulation pipe sleeve and a second pollutant blocking ring; the first pollutant blocking ring and the second pollutant blocking ring are ingeniously installed in the center of the upper portion of the base box, an effective barrier is formed, and harmful effects of pollutants on the interior of equipment can be prevented. Meanwhile, heat insulation pipe sleeves are further arranged on the peripheries of the first pollutant blocking ring and the second pollutant blocking ring, heat loss can be effectively prevented through the design, the energy utilization efficiency is improved, and the problem of poor driving caused by product pollution is greatly solved in the mode that a flow path of polluted gas is directly heated.

Description

Technical Field

[0001] The invention relates to the field of valve technology, and in particular to a valve device capable of directly heating polluted gas. Background Art

[0002] The pressure control valve ensures that the pressure in the engineering cavity is always maintained within the preset range through its precise adjustment function, thereby effectively reducing pump damage caused by byproduct gas and extending the service life of the equipment. At the same time, a stable pressure environment also helps to reduce pollution, protect key materials such as chips and glass from damage, and improve product yield and performance. In industrial processes such as SEMI, LCD, LED, and SOLAR, the pressure control valve is not only a key component to maintain the stability of the internal environment of the engineering cavity, but also an important barrier to ensure production efficiency and product quality.

[0003] In the industrial processes such as SEMI, LCD, LED, and SOLAR, the engineering gases used inside the engineering chamber often produce byproduct gases after the process is completed. If these byproduct gases are not handled properly, the life of the DRY Pump will be significantly reduced, which will lead to equipment failure. Especially in key links such as wafer manufacturing and glass processing, such as CVD (chemical vapor deposition) and PVD (physical vapor deposition), the pollution problem is particularly serious and accidents occur frequently. When using external heating elements to heat the inside, incomplete heating and low efficiency will occur. For this reason, a valve device that can directly heat the polluted gas can be designed. Summary of the invention

[0004] In order to overcome the problems of byproduct gas often generated after the process of engineering gas used inside the engineering cavity in SEMI, LCD, LED, SOLAR and other industrial processes is completed, improper handling will greatly shorten the life of the DRY Pump and cause equipment failure, especially in the CVD, PVD and other processes of wafer manufacturing and glass processing, the pollution is serious and accidents are frequent, and the external heating is prone to incomplete heating and low efficiency.

[0005] The technical solution of the present invention is: a valve device that can directly heat polluted gas, including a base box, a control box, a first pollutant blocking ring, a flap valve group, a heatable module, an insulating pipe sleeve and a second pollutant blocking ring; a base box used for installing and positioning a structure, a first pollutant blocking ring and a second pollutant blocking ring for preventing pollution influence are linearly penetrated through the center line above the base box, the first pollutant blocking ring and the second pollutant blocking ring are both sleeved with an insulating pipe sleeve for preventing heat loss on the periphery, a heatable module that can be rotatably operated to heat the polluted gas for impurity purification is provided between the first pollutant blocking ring and the second pollutant blocking ring, a control box for controlling the start of the heatable module is provided on the base box, and a flap valve group that can be flipped to adjust the pressure is provided at the end of the second pollutant blocking ring away from the first pollutant blocking ring.

[0006] Preferably, a heatable module is provided between the first contaminant blocking ring and the second contaminant blocking ring. This module can perform a rotational heating operation to efficiently purify the contaminated gas from impurities, thereby ensuring the purity of the gas. A flap valve group is provided. It can perform a flipping operation to achieve precise pressure regulation and effectively heat the inside of the product.

[0007] Preferably, a center hole for installing the first contaminant blocking ring and the second contaminant blocking ring is provided in the center of the base box, and a plurality of groups of positioning connection holes are distributed on the periphery of the center hole on the base box. A control screen is provided in the center of the control box, control buttons are connected to the side ends of the control box, a connection end is provided at the bottom of the control box, and an overheat protector is provided inside the control box.

[0008] Preferably, the flap valve group includes a first flange ring, a gap sealing ring, a mounting hole, a through hole, a fixing ring, a rotating rod, a protective cover, a gate plate, a brush, a positioning box, a first drive motor, a wire tube, an airbag plate, a one-way suction hole, a filter core plate, a one-way discharge hole and a delivery pipe, a delivery pipe for connecting the second pollutant blocking ring, the delivery pipe is fixedly connected with the first flange ring at one end away from the second pollution blocking ring, a plurality of mounting holes are circumferentially opened on the outer periphery of the first flange ring near the edge, and a gap sealing ring is provided on the inner side of the first flange ring.

[0009] Preferably, a spring rubber damping layer is provided inside the gap sealing ring, a through hole is penetrated through the conveying tube, a rotating rod is provided on the conveying tube in the through hole, a protective cover is fixedly connected to the top of the rotating rod, a fixing ring fixed to the conveying tube is sleeved on the rotating rod near the protective cover, a positioning box is sleeved under the rotating rod, a first drive motor is provided at the bottom of the rotating rod, a wire tube is provided at the center of the positioning box, and a starter for controlling the first drive motor is provided inside the positioning box.

[0010] Preferably, a gate plate is fixed to the middle part of the rotating rod, and several groups of strip brushes are circumferentially fixed to both sides of the gate plate near the edges. An airbag plate is symmetrically fixed to one side of the gate plate. A filter core plate is provided in the center of the airbag plate, and several groups of one-way suction holes are distributed on the filter core plate. Several groups of one-way discharge holes are linearly opened on the side ends of the filter core plate.

[0011] Preferably, the heatable module includes a ring sleeve, a heater, an annular cable, a steering rod, a positioning sleeve, a first gear ring, an oblique heating plate, a heat transfer sleeve, a cutting blade, a second drive motor, a control cable, a high-temperature rubber ring, a heating ring plate and a second gear ring. The middle outer sleeve of the heating ring plate is provided with a second gear ring, and four groups of steering rods are provided in an annular manner on the outer periphery of the second gear ring. The middle sleeve of the steering rod is provided with a first gear ring meshing with the second gear ring. One end of one group of steering rods is provided with a second drive motor, and the outer end of the second drive motor is provided with a control cable electrically connected to the control box.

[0012] Preferably, both ends of the heating ring plate are sleeved with heat conducting plates, the outer periphery of the heat conducting plates is contacted with a heating coil, the outer end of the heating coil is connected to a heater, the outer end of the heater is provided with an annular cable electrically connected to the control box, the inner ends of the heating ring plate are covered with high-temperature rubber rings, the inner side of the heating ring plate is annularly fixed with multiple groups of oblique heating plates, the outer periphery of the oblique heating plates is covered with a heat transfer sleeve, and one end of the oblique heating plate is fixed with a cutting blade.

[0013] Preferably, a ring sleeve is provided on the outer periphery of the annular cable, and positioning sleeves are provided on both ends of the steering rod.

[0014] Preferably, a second flange ring is fixedly connected to the inner side of one end of the insulation pipe sleeve close to the first pollutant blocking ring, and a plurality of groups of clamping holes are circumferentially opened on the second flange ring near the edge.

[0015] Beneficial effects of the present invention: 1. According to the previous industrial processes such as SEMI, LCD, LED, and SOLAR, the engineering gas process used inside the engineering cavity often produces byproduct gas after completion. Improper handling will greatly shorten the life of the DRY Pump and cause equipment failure. Especially in the CVD and PVD processes of wafer manufacturing and glass processing, there is serious pollution and frequent accidents. In addition, it is easy to have incomplete heating and low efficiency when heating externally. Different from this, the device is equipped with a first contaminant blocking ring and a second contaminant blocking ring. They are cleverly installed at the center position above the base box, forming an effective barrier to prevent contaminants from causing adverse effects on the inside of the equipment. At the same time, we also set up an insulation sleeve on the periphery of the first contaminant blocking ring and the second contaminant blocking ring. This design can effectively prevent heat loss and improve energy utilization efficiency. A heatable module is set between the first contaminant blocking ring and the second contaminant blocking ring. This module can perform rotary heating operations to efficiently purify the contaminated gas of impurities, thereby ensuring the purity of the gas. A flap valve group is set. It can be turned over to achieve precise pressure regulation and effectively heat the inside of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the valve device of the present invention; Figure 2 It is a schematic diagram of the overall structure of the valve device of the present invention from another angle; Figure 3 A schematic diagram of a gate of a valve device of the present invention; Figure 4 A schematic diagram of the gate of the valve device of the present invention from another angle; Figure 5 A schematic diagram of the cooperation between the first gear ring and the second gear ring of the valve device of the present invention; Figure 6 A schematic diagram of an oblique heating plate of a valve device of the present invention; Figure 7 A schematic diagram of a heating ring assembly of a valve device of the present invention; Figure 8 It is a partial enlarged schematic diagram of point A of the valve device of the present invention.

[0017] Explanation of reference numerals: 1. base box; 2. control box; 3. first pollutant blocking ring; 4. flap valve group; 5. heatable module; 6. insulation sleeve; 7. second pollutant blocking ring; 101. center hole; 102. connecting hole; 201. control screen; 202. control button; 203. connecting end; 401. first flange ring; 402. gap sealing ring; 403. mounting hole; 404. through hole; 405. fixing ring; 406. rotating rod; 407. protective cover; 408. gate; 409. strip brush; 410. positioning box; 411. first driving motor machine; 412, wire tube; 413, airbag plate; 414, one-way suction hole; 415, filter core plate; 416, one-way discharge hole; 417, delivery pipe; 501, ring sleeve; 502, heater; 503, annular cable; 504, steering rod; 505, positioning sleeve; 506, first gear ring; 507, oblique heating plate; 508, heat transfer sleeve; 509, cutting blade; 510, second drive motor; 511, control cable; 512, high temperature rubber ring; 513, heating ring plate; 514, second gear ring; 601, clamping hole; 602, second flange ring. DETAILED DESCRIPTION

[0018] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0019] See also Figure 1-8 The present invention provides an embodiment: a valve device that can directly heat polluted gas, comprising a base box 1, a control box 2, a first pollutant blocking ring 3, a flap valve group 4, a heatable module 5, an insulating pipe sleeve 6 and a second pollutant blocking ring 7; a base box 1 for installing and positioning a structure, a first pollutant blocking ring 3 and a second pollutant blocking ring 7 for preventing pollution influence are linearly penetrated on the center line above the base box 1, the first pollutant blocking ring 3 and the second pollutant blocking ring 7 are both sleeved with an insulating pipe sleeve 6 for preventing heat loss on the periphery, a heatable module 5 that can be rotatably operated to heat the polluted gas for impurity purification is provided between the first pollutant blocking ring 3 and the second pollutant blocking ring 7, a control box 2 for controlling the start of the heatable module 5 is provided on the base box 1, and a flap valve group 4 that can be flipped to adjust the pressure is provided at one end of the second pollutant blocking ring 7 away from the first pollutant blocking ring 3.

[0020] See also Figure 1-3 In this embodiment, a center hole 101 for installing the first contaminant blocking ring 3 and the second contaminant blocking ring 7 is provided at the center of the base box 1, and a plurality of groups of positioning connection holes 102 are distributed on the periphery of the center hole 101 on the base box 1, a control screen 201 is provided at the center of the control box 2, a control button 202 is connected to the side end of the control box 2, a connection end 203 is provided at the bottom of the control box 2, and an overheat protector is provided inside the control box 2; The multiple groups of positioning connection holes 102 distributed around the center hole 101 on the base box 1 greatly enhance the connection stability and accuracy between the base box 1 and other components. The configured overheating protector effectively prevents the equipment from overheating due to long-term operation or abnormal conditions, thereby greatly extending the service life of the equipment and improving the overall safety. The overheating protector model is 17AM031A5.

[0021] See also Figure 2-4 In this embodiment, the flap valve group 4 includes a first flange ring 401, a gap sealing ring 402, a mounting hole 403, a through hole 404, a fixing ring 405, a rotating rod 406, a protective cover 407, a gate 408, a brush 409, a positioning box 410, a first driving motor 411, a wire tube 412, an airbag plate 413, a one-way suction hole 414, a filter core plate 415, a one-way discharge hole 416 and a delivery pipe 417, which is used to connect the delivery pipe 417 of the second pollutant blocking ring 7, and the delivery pipe 417 is fixedly connected to the first flange ring 401 at one end away from the second pollution blocking ring, and a plurality of groups of mounting holes 403 are circumferentially opened near the edge of the outer periphery of the first flange ring 401, and the first A gap sealing ring 402 is provided on the inner side of a flange ring 401, a spring rubber damping layer is provided inside the gap sealing ring 402, a through hole 404 is provided through the delivery pipe 417, a rotating rod 406 is provided on the delivery pipe 417 in the through hole 404, a protective cover 407 is fixedly connected to the top of the rotating rod 406, a fixing ring 405 fixedly connected to the delivery pipe 417 is sleeved near the protective cover 407 on the rotating rod 406, a positioning box 410 is sleeved below the rotating rod 406, a first driving motor 411 is provided at the bottom of the rotating rod 406, a wire tube 412 is provided at the center of the positioning box 410, and a starter for controlling the first driving motor 411 is provided inside the positioning box 410; The combination of the first flange ring 401 and the gap sealing ring 402, together with the spring rubber damping layer, effectively improves the sealing performance of the valve group and prevents gas leakage. The gate plate 408 is driven to turn by the rotating rod 406, thereby achieving efficient gas filtration and flow control.

[0022] See also Figure 3-4 In this embodiment, a gate plate 408 is fixedly connected to the middle of the rotating rod 406, and a plurality of groups of strip brushes 409 are circumferentially fixedly connected to the edges of both sides of the gate plate 408. An airbag plate 413 is symmetrically fixedly connected to one side of the gate plate 408. A filter core plate 415 is provided at the center of the airbag plate 413. A plurality of groups of one-way suction holes 414 are distributed on the filter core plate 415, and a plurality of groups of one-way discharge holes 416 are linearly provided on the side ends of the filter core plate 415. The gate plate 408 is fixed to the middle of the rotating rod 406, and several groups of strip brushes 409 are fixed to the gate plate 408 near the edges on both sides. Such a structure not only enhances the sealing between the gate plate 408 and the surrounding environment, but also effectively prevents the entry of impurities or particulate matter, thereby ensuring the cleanliness of the system. At the same time, an airbag plate 413 is symmetrically fixed to one side of the gate plate 408, and a filter core plate 415 is arranged at the center of the airbag plate 413. This innovative design enables the gas to undergo multi-stage filtration when passing through. Several groups of one-way suction holes 414 distributed on the filter core plate 415 can ensure that the gas enters the filtration system smoothly and orderly, while several groups of one-way discharge holes 416 linearly opened on the side end ensure that the filtered gas can be discharged efficiently and stably, thereby avoiding gas backflow or turbulence. This structure not only improves the filtration efficiency, but also effectively extends the service life of the filter core plate 415.

[0023] See also Figure 2-8 In this embodiment, the heatable module 5 includes a ring sleeve 501, a heater 502, a ring cable 503, a steering rod 504, a positioning sleeve 505, a first gear ring 506, an oblique heating plate 507, a heat transfer sleeve 508, a cutting blade 509, a second drive motor 510, a control cable 511, a high-temperature rubber ring 512, a heating ring plate 513 and a second gear ring 514. The middle outer periphery of the heating ring plate 513 is sleeved with a second gear ring 514, and the outer periphery of the second gear ring 514 is circumferentially provided with four groups of steering rods 504. The middle part of the steering rod 504 is sleeved with a first gear ring 506 meshing with the second gear ring 514. One end of one group of steering rods 504 is provided with a second drive motor 510. The outer end of the machine 510 is provided with a control cable 511 electrically connected to the control box 2, both ends of the heating ring plate 513 are sleeved with heat conducting plates, the outer periphery of the heat conducting plates is contacted and connected with a heating coil, the outer end of the heating coil is connected with a heater 502, the outer end of the heater 502 is provided with an annular cable 503 electrically connected to the control box, the inner ends of the heating ring plate 513 are covered with high-temperature rubber rings 512, the inner side of the heating ring plate 513 is annularly fixed with multiple groups of oblique heating plates 507, the outer periphery of the oblique heating plates 507 is covered with a heat transfer sleeve 508, one end of the oblique heating plates 507 is fixedly connected with a cutting blade 509, the outer periphery of the annular cable 503 is sleeved with a sleeve 501, and both ends of the steering rod 504 are sleeved with positioning sleeves 505; The second drive motor 510 drives the steering rod 504, so that the first gear ring 506 and the second gear ring 514 are closely meshed, thereby driving the rotation of the heating ring plate 513, further improving the uniformity and efficiency of heating. The design of the oblique heating plate 507 and the heat transfer sleeve 508 effectively enhances the transfer and dissipation of heat, so that the polluted gas can be more fully heated and processed. In addition, the existence of the cutting blade 509 also has a certain impurity crushing function, which increases the impurity processing effect of the polluted gas. The model of the heater 502 is 3003A.

[0024] See also Figure 5 In this embodiment, a second flange ring 602 is fixedly connected to the inner side of one end of the insulation sleeve 6 close to the first pollutant blocking ring 3, and a plurality of groups of clamping holes 601 are circumferentially opened on the second flange ring 602 near the edge; The design of the second flange ring 602 and the clamping hole 601 allows the insulation sleeve 6 to be more conveniently connected to other components with flange structures. This design greatly improves work efficiency and operational convenience, especially when frequent disassembly, cleaning or inspection is required.

[0025] During operation, we can conveniently perform pipe docking installation by using the mounting hole 403 on the first flange ring 401 and the clamping hole 601 on the second flange ring 602. After installation, we can accurately adjust the power supply and heating parameters through the control button 202 and the control screen 201 on the control box 2 to ensure efficient operation of the device; When the polluted gas passes through the device, it will first pass through the first pollutant blocking ring 3, which will effectively block and accumulate impurities in the gas and protect the inner wall of the valve body from damage. Then, the control cable 511 transmits a signal to the second drive motor 510, driving the steering rod 504 to make the first gear ring 506 and the second gear ring 514 tightly meshed, thereby driving the heating ring plate 513 to rotate; During the heating process, the annular cable 503 transmits the signal to the heater 502 and the heating coil, causing the heat conducting plate to heat up quickly. The heat is then evenly dissipated inside the device through the oblique heating plate 507 and the heat transfer sleeve 508, forming a heat flow transmission. At the same time, the rotating heating ring plate 513 uses the cutting blade 509 to crush the impurities and further process the polluted gas; The treated gas impacts the airbag plate 413 for buffering, and then is sucked in and filtered through the one-way suction hole 414 on the filter core plate 415. Finally, the filtered gas is discharged from the device through the one-way discharge hole 416. Due to the presence of the insulation pipe sleeve 6, the heating effect inside the device is gradually improved, and the loss of heat is effectively avoided.

[0026] Through the above steps, a heatable module 5 is arranged between the first pollutant blocking ring 3 and the second pollutant blocking ring 7. This module can perform a rotation heating operation to efficiently purify the polluted gas from impurities, thereby ensuring the purity of the gas. A flap valve group 4 is arranged. It can perform a flipping operation to achieve precise pressure regulation and effectively heat the inside of the product.

[0027] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of those skilled in the art without departing from the spirit of the present invention.

Claims

1. A valve device capable of directly heating polluted gas, comprising a base box (1); characterized in that: It also comprises a control box (2), a first pollutant blocking ring (3), a flap valve group (4), a heatable module (5), a thermal insulation pipe sleeve (6) and a second pollutant blocking ring (7); a base box (1) for mounting and positioning the structure; a first pollutant blocking ring (3) and a second pollutant blocking ring (7) for preventing pollution are linearly penetrated on the center of the base box (1); the first pollutant blocking ring (3) and the second pollutant blocking ring (7) are sleeved with thermal insulation pipe sleeves (6) for preventing heat loss on the peripheries of the first pollutant blocking ring (3) and the second pollutant blocking ring (7); a heatable module (5) rotatably operated for heating polluted gas for impurity purification is arranged between the first pollutant blocking ring (3) and the second pollutant blocking ring (7); a control box (2) for controlling the start of the heatable module (5) is arranged on the base box (1); and a flap valve group (4) for pressure regulation is arranged at one end of the second pollutant blocking ring (7) away from the first pollutant blocking ring (3).

2. A valve device capable of directly heating polluted gas according to claim 1, characterized in that: A center hole (101) for mounting a first pollutant blocking ring (3) and a second pollutant blocking ring (7) is provided at the center of the base box (1); a plurality of groups of positioning connection holes (102) are distributed on the base box (1) at the periphery of the center hole (101); a control screen (201) is provided at the center of the control box (2); a control button (202) is connected to a side end of the control box (2); a connection end (203) is provided at the bottom of the control box (2); and an overheat protector is provided inside the control box (2).

3. A valve device capable of directly heating polluted gas according to claim 1, characterized in that: The flap valve assembly (4) comprises a first flange ring (401), a gap sealing ring (402), a mounting hole (403), a through hole (404), a fixing ring (405), a rotating rod (406), a protective cover (407), a gate plate (408), a strip brush (409), a positioning box (410), a first driving motor (411), a wire tube (412), an airbag plate (413), a one-way suction hole (414), a filter core plate (415), a one-way discharge hole (416) and a delivery pipe (417), the delivery pipe (417) being used to connect to the second pollutant blocking ring (7), the delivery pipe (417) being fixedly connected to the first flange ring (401) at one end away from the second pollutant blocking ring, a plurality of groups of mounting holes (403) being circumferentially opened on the outer periphery of the first flange ring (401) near the edge, and a gap sealing ring (402) being provided on the inner side of the first flange ring (401).

4. A valve device capable of directly heating polluted gas according to claim 3, characterized in that: A spring rubber damping layer is provided inside the gap sealing ring (402); a through hole (404) is formed through the delivery tube (417); a rotating rod (406) is provided on the delivery tube (417) in the through hole (404); a protective cover (407) is fixedly connected to the top of the rotating rod (406); a fixing ring (405) fixedly connected to the delivery tube (417) is sleeved on the rotating rod (406) at a position close to the protective cover (407); a positioning box (410) is sleeved below the rotating rod (406); a first driving motor (411) is provided at the bottom of the rotating rod (406); a wire tube (412) is provided at the center of the positioning box (410); and a starter for controlling the first driving motor (411) is provided inside the positioning box (410).

5. A valve device capable of directly heating polluted gas according to claim 3, characterized in that: A gate plate (408) is fixedly connected to the middle of the rotating rod (406), and a plurality of groups of strip brushes (409) are circumferentially fixedly connected to both sides of the gate plate (408) near the edges. An airbag plate (413) is symmetrically fixedly connected to one side of the gate plate (408), and a filter core plate (415) is provided at the center of the airbag plate (413). A plurality of groups of one-way suction holes (414) are distributed on the filter core plate (415), and a plurality of groups of one-way discharge holes (416) are linearly opened on the side ends of the filter core plate (415).

6. A valve device capable of directly heating polluted gas according to claim 1, characterized in that: The heatable module (5) comprises a ring sleeve (501), a heater (502), an annular cable (503), a steering rod (504), a positioning sleeve (505), a first gear ring (506), an oblique heating plate (507), a heat transfer sleeve (508), a cutting blade (509), a second drive motor (510), a control cable (511), a high-temperature rubber ring (512), a heating ring plate (513) and a second gear ring (514); the heating ring plate (513) is sleeved with a second gear ring (514) on the outer periphery of the middle portion; four groups of steering rods (504) are sleeved on the outer periphery of the second gear ring (514); the steering rods (504) are sleeved with a first gear ring (506) meshing with the second gear ring (514) on the middle portion; one end of one group of steering rods (504) is provided with a second drive motor (510); and the outer end of the second drive motor (510) is provided with a control cable (511) electrically connected to a control box (2).

7. A valve device capable of directly heating polluted gas according to claim 6, characterized in that: Both ends of the heating ring plate (513) are sleeved with heat conducting plates, the outer periphery of the heat conducting plates is in contact with a heating coil, the outer end of the heating coil is connected to a heater (502), the outer end of the heater (502) is provided with a ring-shaped cable (503) electrically connected to a control box, the inner ends of the heating ring plate (513) are covered with high-temperature rubber rings (512), the inner side of the heating ring plate (513) is annularly fixed with multiple groups of oblique heating plates (507), the outer periphery of the oblique heating plates (507) is covered with a heat transfer sleeve (508), and one end of the oblique heating plates (507) is fixedly connected to a cutting blade (509).

8. A valve device capable of directly heating polluted gas according to claim 6, characterized in that: The outer periphery of the annular cable (503) is provided with an annular sleeve (501), and both ends of the steering rod (504) are provided with positioning sleeves (505).

9. The valve device capable of directly heating polluted gas according to claim 1, characterized in that: A second flange ring (602) is fixedly connected to the inner side of one end of the thermal insulation pipe sleeve (6) close to the first pollutant blocking ring (3), and a plurality of groups of clamping holes (601) are circumferentially opened on the second flange ring (602) close to the edge.

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