A concentric shaft clamp assembly for a quartz finger

Abstract

The application relates to the technical field of quartz product processing, and more specifically to a concentric shaft clamping assembly of a quartz claw, which comprises a shaft rod and a plurality of supporting claws arranged on the shaft rod; the clamping assembly comprises a mounting frame, a concentric shaft which is a hollow structure and is vertically arranged on the mounting frame, and two clamping parts arranged at two ends of the concentric shaft respectively, the two clamping parts clamping the shaft rod at the two ends of the concentric shaft after the shaft rod is embedded into the concentric shaft; wherein the concentric shaft is arranged on the mounting frame and can rotate with the axis line as the rotation center. The concentric shaft can rotate through the ingenious combination and accurate installation of the upper flange, the lower flange, the connecting column and the bearing and the like, and the concentric shaft can be kept stable, accurate and reliable during the rotation.

Description

Technical Field

[0001] This invention relates to the field of quartz product processing technology, and more specifically, to a concentric shaft clamping assembly for quartz claws. Background Technology

[0002] With the rapid development of the chip industry, the semiconductor equipment industry has also developed rapidly. As an important component in semiconductor equipment, the demand for quartz products is also increasing.

[0003] Quartz claws are a key component in semiconductor epitaxy equipment. Their design, manufacturing, and testing must meet extremely high precision standards to ensure that the wafer can maintain a relatively stable horizontal state in complex process environments. This is crucial for ensuring product quality.

[0004] The quartz claw consists of two main core components: the shaft assembly and the support claw assembly. The shaft assembly, as the center of support and rotation, must possess excellent mechanical strength and meet precise dimensional tolerances. The support claw assembly, responsible for bearing and securing the wafer, must be designed to fully consider the wafer's size, shape, and weight distribution to ensure balanced force distribution and reduce vibration and deviation.

[0005] The quartz claw is manufactured by machining the shaft and support claw separately on a CNC machine tool, then welding the shaft and support claw together. After welding, annealing and grinding are required. After machining, the product dimensions and the perpendicularity of the support claw need to be repeatedly corrected.

[0006] Chinese invention patent application CN115557683A discloses a jig for processing quartz shaft products. The specification describes an "angle adjustment fixture and a high-precision rotary lifting platform". These two components enable the clamping of the shaft and the adjustment of the shaft height. However, the fixture is not only complex in structure and uses many parts, but it also cannot rotate the shaft after clamping it, thus failing to guarantee the perpendicularity of the plane formed by the top of the several support claws to the center line of the shaft. Summary of the Invention

[0007] The main objective of this invention is to provide a concentric shaft clamping assembly for quartz claws to solve the technical problems mentioned in the background art.

[0008] To address the aforementioned technical problems, this invention proposes a concentric shaft clamping assembly for a quartz claw. The quartz claw includes: a shaft and a plurality of support claws disposed on the shaft; wherein, the clamping assembly includes:

[0009] Mounting rack;

[0010] The concentric shaft has a hollow structure and is vertically mounted on the mounting bracket;

[0011] The clamping part has two sets, which are respectively disposed at both ends of the concentric shaft. After the shaft is embedded into the concentric shaft, the two sets of clamping parts clamp the portions of the shaft located at both ends of the concentric shaft respectively.

[0012] Among them, the concentric shaft is mounted on the mounting bracket and can rotate around its axis.

[0013] In this technical solution, the shaft of the quartz claw is inserted into the concentric shaft; then, the clamping part is operated to clamp the inserted end of the shaft. Since the concentric shaft can rotate freely with its axis as the center of rotation, the processing and inspection of the quartz claw can be easily realized, which greatly improves the work efficiency and processing accuracy.

[0014] In the above technical solution, the mounting bracket further includes: an upper flange; a lower flange; and a connecting column for connecting the upper flange and the lower flange;

[0015] The upper and lower flanges are each equipped with a bearing in the middle. A concentric shaft is mounted on the upper and lower flanges and rotates through the bearings, with its two ends passing through and extending out of the upper and lower flanges respectively.

[0016] By employing a clever combination and precise installation of components such as upper flange, lower flange, connecting column, and bearings, the concentric shaft can be ensured to remain stable, accurate, and reliable during rotation.

[0017] In any of the above technical solutions, the connecting post is a hexagonal stud, and the two ends of the hexagonal stud are connected to the upper flange and the lower flange by screws.

[0018] The design, which uses hexagonal studs as connecting posts and connects them to the upper and lower flanges with screws, not only provides a stable connection and support, but also facilitates installation, disassembly and maintenance.

[0019] In any of the above technical solutions, further, conical grooves are provided at both ends of the concentric shaft, and the diameter of the conical grooves gradually decreases from the outside to the inside; the clamping part includes:

[0020] The collet has a hollow chamber through which the shaft passes, and both ends of its outer wall are tapered structures. One end of the outer wall is fitted into a tapered groove, and the other end is located outside the tapered groove.

[0021] The nut has a threaded hole at one end that is threaded to the outer wall of the end of the concentric shaft, and a tapered hole at the other end that is adapted to the tapered structure of the end of the collet that extends out of the concentric shaft.

[0022] The collet has openings at both ends, which allows the diameter of the hollow chamber on the collet to decrease when it is squeezed by the nut and the concentric shaft, so as to clamp the shaft.

[0023] The cooperating mechanism of the concentric shaft, tapered groove, collet, and nut enables the clamping part to effectively clamp the shaft. Moreover, this design is not only simple in structure but also easy to operate. The shaft can be clamped or released by rotating the nut, making it very suitable for applications involving quartz claw processing and inspection.

[0024] In any of the above technical solutions, furthermore, there are multiple openings distributed along the circumferential direction of the collet. By providing multiple openings, the outer wall of the collet can easily deform after being squeezed by the outside (nut) to clamp the shaft.

[0025] In any of the above technical solutions, the outer wall of the collet also has a radially inwardly arranged annular groove. This allows the collet to clamp the shaft more effectively.

[0026] In any of the above technical solutions, the outer wall of the nut is further provided with knurling to facilitate the worker's rotation of the nut.

[0027] Beneficial effects: Compared with existing technologies, by using a clever combination and precise installation of components such as upper flange, lower flange, connecting column and bearing, the concentric shaft can be ensured to remain stable, accurate and reliable during rotation. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the quartz claw structure;

[0030] Figure 2 yes Figure 1 Enlarged view of point A in the middle;

[0031] Figure 3 This is an exploded structural diagram of the present invention;

[0032] Figure 4 This is a schematic diagram of the structure of the quartz clamping claw of the present invention;

[0033] Figure 5 This is a schematic diagram of the internal structure of the quartz clamping claw of the present invention.

[0034] The annotations in the attached figures are explained as follows:

[0035] 100. Quartz claw; 101. Shaft; 102. Support claw; 103. Small hole; 110. Mounting bracket; 111. Upper flange; 112. Lower flange; 113. Connecting column; 120. Concentric shaft; 130. Clamping part; 131. Collet; 1311. Opening; 1312. Annular groove; 132. Nut. Detailed Implementation

[0036] Hereinafter, exemplary embodiments according to this application will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are merely a part of the embodiments of this application, and not all of the embodiments of this application. It should be understood that this application is not limited to the exemplary embodiments described herein. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention.

[0037] It should be noted that, as shown in this application and claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" do not specifically refer to the singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of explicitly identified steps and elements, and these steps and elements do not constitute an exclusive list; the method or apparatus may also include other steps or elements.

[0038] If the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0039] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0040] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the meaning of "and / or" throughout the text includes three parallel solutions; for example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0041] like Figures 1-2 As shown, the quartz claw 100 mainly consists of a cylindrical shaft 101 and supporting claws 102. Generally, there are three supporting claws 102, evenly distributed circumferentially on the upper end of the shaft 101. These three supporting claws 102 are used to support and fix the wafer. Small holes 103 are also provided at the upper end of the supporting claws 102 for further fixing. To facilitate the processing and inspection of the quartz claw, a concentric shaft clamping assembly is provided. This assembly can not only clamp quartz claws 100 of different specifications but also allow them to rotate, ensuring that the axis of rotation of the quartz claw 100 coincides with the axis of the shaft 101.

[0042] The following embodiments will be used to describe in detail a concentric shaft clamping assembly of a quartz claw according to this application.

[0043] Example 1:

[0044] like Figures 1-5 As shown, in this embodiment, a concentric shaft clamping assembly for a quartz claw includes: a mounting frame 110; a concentric shaft 120, which is a hollow structure and is vertically mounted on the mounting frame 110; and two clamping portions 130, which are respectively disposed at both ends of the concentric shaft 120. After the shaft is embedded into the concentric shaft 120, the two sets of clamping portions 130 clamp the portions of the shaft located at both ends of the concentric shaft 120.

[0045] The concentric shaft 120 is mounted on the mounting bracket 110 and is rotatable around its axis.

[0046] First, insert the shaft of the quartz claw into the concentric shaft 120; then, clamp the inserted end of the shaft by operating the clamping part 130. Since the concentric shaft 120 can rotate freely with its axis as the center of rotation, the quartz claw can be easily processed and inspected, greatly improving work efficiency and processing accuracy.

[0047] In this embodiment, it should be noted that the mounting bracket 110 includes: an upper flange 111; a lower flange 112; and a connecting column 113 for connecting the upper flange 111 and the lower flange 112.

[0048] Bearings are provided in the middle of the upper flange 111 and the lower flange 112. The concentric shaft 120 is rotatably mounted on the upper flange 111 and the lower flange 112 through the bearings, and its two ends pass through and extend out of the upper flange 111 and the lower flange 112 respectively.

[0049] The upper flange 111 and lower flange 112, as the main load-bearing and positioning components of the mounting bracket 110, are located at the top and bottom of the mounting bracket 110 respectively, and are tightly connected by the connecting column 113, together forming a stable support frame. The bearing is a crucial component of the mounting bracket 110, and is installed in the middle of the upper flange 111 and lower flange 112 respectively, to support the concentric shaft 120 and allow it to rotate freely around the axis of rotation.

[0050] By employing a clever combination and precise installation of components such as the upper flange 111, lower flange 112, connecting column 113, and bearings, the concentric shaft 120 can be ensured to remain stable, accurate, and reliable during rotation.

[0051] Example 2:

[0052] This embodiment is a further improvement based on Embodiment 1.

[0053] like Figure 3 and Figure 4 As shown, in this embodiment, the connecting post 113 is a hexagonal stud, and the two ends of the hexagonal stud are connected to the upper flange 111 and the lower flange 112 by screws.

[0054] The design of using hexagonal studs as connecting posts 113 and connecting them to the upper flange 111 and lower flange 112 with screws not only provides a stable connection and support, but also facilitates installation, disassembly and maintenance.

[0055] Example 3:

[0056] This embodiment is a further improvement based on Embodiments 1 and 2.

[0057] like Figures 3-5As shown, in this embodiment, the concentric shaft 120 has tapered grooves at both ends, and the diameter of the tapered grooves gradually decreases from the outside to the inside; the clamping part 130 includes: a collet 131, which has a hollow cavity through which the shaft rod passes, and the outer walls at both ends of the collet 131 are tapered structures, and one end of the outer wall is adapted to the tapered groove, which is embedded in the tapered groove, and the other end is located outside the tapered groove; a nut 132, one end of which has a threaded hole and is threaded to the outer wall of the end of the concentric shaft 120, and the other end of which has a tapered hole and is adapted to the tapered structure of the end of the collet 131 that extends out of the concentric shaft 120;

[0058] The collet 131 has openings 1311 at both ends, so that the diameter of the hollow chamber on the collet 131 can be reduced when it is squeezed by the nut 132 and the concentric shaft 120, so as to clamp the shaft.

[0059] In this embodiment, the clamping part 130 effectively clamps the shaft by cooperating with the concentric shaft 120, the tapered groove, the collet 131 and the nut 132. Moreover, this design is not only simple in structure but also easy to operate. The shaft can be clamped or released by rotating the nut 132, which is very suitable for applications such as quartz claw processing and inspection.

[0060] Specifically, after the shaft is inserted into the concentric shaft 120, by rotating the nut 132, when the inner wall of the tapered hole on the nut 132 abuts against the tapered surface of the upper end of the collet 131 and an external force is applied, the collet 131 will move into the concentric shaft 120. During the movement, the interior of the collet 131 gradually shrinks and abuts against the shaft, thereby achieving the clamping of the shaft.

[0061] It should be noted that there are multiple openings 1311, which are distributed along the circumferential direction of the collet 131. By providing multiple openings 1311, the outer wall of the collet 131 can easily deform after being squeezed by the outside (nut 132) to clamp the shaft.

[0062] It should be noted that the outer wall of nut 132 is knurled to facilitate the rotation of nut 132 by the operator.

[0063] Example 4:

[0064] This embodiment is a further improvement based on any of the above embodiments.

[0065] like Figure 3 As shown, in this embodiment, the outer wall of the collet 131 also has an annular groove 1312 arranged radially inward. The annular groove 1312 is located between two conical structures. This arrangement allows the collet 131 to clamp the shaft more effectively.

[0066] The various embodiments of this disclosure have been described above. These descriptions are exemplary and not exhaustive, nor are they limited to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen to best explain the principles, practical application, or improvement of the technology in the market, or to enable others skilled in the art to understand the embodiments disclosed herein.

Claims

1. A concentric shaft clamp assembly for a quartz jaw, the quartz jaw comprising: The shaft rod and a plurality of supporting claws arranged on the shaft rod; characterized in that the clamping assembly comprises: a mounting frame (110); a concentric shaft (120) which is a hollow structure and is arranged vertically on the mounting frame (110); two clamping parts (130) which are arranged at two ends of the concentric shaft (120) respectively, and after the shaft rod is embedded into the concentric shaft (120), the two clamping parts (130) clamp the shaft rod at the two ends of the concentric shaft (120) respectively; wherein the concentric shaft (120) is arranged on the mounting frame (110) and can rotate around its axis.

2. The concentric shaft clamp assembly for a quartz jaw as claimed in claim 1, wherein, The mounting frame (110) comprises: an upper flange (111); a lower flange (112); and a connecting column (113) for connecting the upper flange (111) and the lower flange (112); wherein the concentric shaft (120) is arranged on the upper flange (111) and the lower flange (112), and the two ends of the concentric shaft (120) pass through and extend out of the upper flange (111) and the lower flange (112) respectively.

3. The concentric shaft clamp assembly of claim 2, wherein, The middle part of the upper flange (111) and the lower flange (112) is provided with a bearing, and the concentric shaft (120) is arranged on the upper flange (111) and the lower flange (112) and rotates through the bearing.

4. The concentric shaft clamp assembly of claim 2 wherein, The connecting column (113) is a hexagonal stud, and the two ends of the hexagonal stud are connected to the upper flange (111) and the lower flange (112) through screws.

5. The concentric chuck assembly for a quartz finger as claimed in any one of claims 1 to 4, wherein, The two ends of the concentric shaft (120) are provided with tapered grooves, and the diameters of the tapered grooves gradually decrease from outside to inside; the clamping part (130) comprises: a collet (131) which has a hollow cavity for the shaft rod to pass through, and the outer walls of the two ends of the collet (131) are tapered structures, and one of the outer walls is matched with the tapered groove, and the end part is embedded in the tapered groove, and the other end is located outside the tapered groove; a nut (132) which has a threaded hole at one end and is threadedly connected to the end outer wall of the concentric shaft (120), and has a tapered hole at the other end and is matched with the tapered structure of the end of the collet (131) which extends out of the concentric shaft (120); wherein the two ends of the collet (131) are provided with openings (1311), so that the diameter of the hollow cavity of the collet (131) can be reduced when the collet (131) is extruded by the nut (132) and the concentric shaft (120), so as to clamp the shaft rod.

6. The concentric shaft chuck assembly of claim 5 wherein, There are a plurality of openings (1311) which are distributed along the circumferential direction of the collet (131).

7. The concentric shaft clamp assembly of claim 5 wherein, The outer wall of the collet (131) is also provided with an annular groove (1312) which is arranged radially inward.

8. The concentric shaft clamp assembly of claim 5 wherein, The outer wall of the nut (132) is provided with knurling.

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