Heatable pressure control valve

Abstract

The invention relates to the technical field of valves, in particular to a heatable pressure control valve. According to the technical scheme, the heatable pressure control valve comprises a valve body, a conveying pipe, a flange ring, a positioning ring, a heating control module and a filtering and heating integrated module; by means of the filtering and heating integrated module, the valve can efficiently filter impurities in airflow, the impurities are effectively prevented from being accumulated in the valve in a solid form, and therefore the situation that the pressure control precision is reduced due to pollution is avoided. Meanwhile, the module further has a heating decomposition function, filtered gas is further treated, the purity and stability of the filtered gas are ensured, the two sides of the valve penetrate into the heating control module arranged in the valve, and gas impurities are directly heated and dissolved. According to the internal heating mode, the heat transfer efficiency is improved, the heating uniformity is ensured, and the problem that an external heating device is poor in heating effect in a vacuum state is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of valves, and in particular to a heatable pressure control valve. Background Art

[0002] ‌A pressure control valve is a valve used to control and adjust the pressure of the fluid in a hydraulic system. In semiconductor, LCD, LED, SOLAR and other projects, fast and accurate pressure control of the process chamber is a prerequisite. The process chamber often needs to work within a certain pressure range to maintain the stability of its internal environment. The pressure control valve is a valve that can accurately control and adjust the system oil pressure or air pressure.

[0003] However, in the manufacturing process of SEMI, LCD, LED, SOLAR, etc., electronic special gases, acid and alkali chemical liquids, and other related chemical materials are supplied to the chamber. These substances are easy to contaminate the flow path inside the valve and accumulate in solid form, thereby interfering with the precise pressure control, making it impossible to maintain the pressure within the predetermined range, and ultimately causing the product to fail to work properly or achieve the expected performance. In the mass production process, if such pollution problems occur frequently, the valve replacement cycle will be shortened. When a heater is installed on the outside of the valve, it is hoped that the influence of pollutants can be reduced or eliminated by heating. However, this external heating method has obvious limitations. On the one hand, the interior of the product is often in a vacuum state, and heat is difficult to be effectively transferred to the inside; on the other hand, external heating may cause heat damage to the semiconductor devices used in the product circuit, because semiconductor devices are very sensitive to temperature, reducing the overall use effect. For this reason, a heatable pressure control valve can be designed. Summary of the invention

[0004] In order to overcome the problem that chemical materials such as electronic special gases, acid and alkaline chemical liquids are easy to contaminate the flow path inside the valve and accumulate in solid form when supplied to the chamber. This contamination and accumulation will interfere with precise pressure control. An external inward heating device is set. Under vacuum conditions, the heat generated by the external heater is difficult to be evenly transferred to the inside of the valve, resulting in poor heating effect and reduced overall use effect.

[0005] The technical solution of the present invention is: a heatable pressure control valve, including a valve body, a delivery pipe, a flange ring, a positioning ring, a heating control module and a filtering and heating integrated module; the valve body is integrally formed with a delivery pipe for guiding the flow of air, and the delivery pipe is fixedly connected to a flange ring for connecting a pipeline at one end away from the valve body, and a positioning ring for positioning the filtering and heating integrated module is sleeved on the top of the valve body. The center of the valve body can be rotatably operated to control the air pressure and filter the airflow impurities for heating and decomposition by the filtering and heating integrated module, and the two sides of the valve body are integrally connected with heating control modules for heating and dissolving gas impurities deep inside.

[0006] Preferably, through the integrated filtering and heating module, the valve can efficiently filter impurities in the airflow, effectively preventing these impurities from accumulating in solid form inside the valve, thereby avoiding the decrease in pressure control accuracy caused by pollution. At the same time, the module also has a heating decomposition function to further process the filtered gas to ensure its purity and stability. The heating control modules deeply set inside the valve on both sides realize the direct heating and dissolution of gas impurities. This internal heating method not only improves the efficiency of heat transfer, but also ensures the uniformity of heating.

[0007] Preferably, a base is fixedly connected to the bottom of the valve body, a sleeve is fixedly connected to the top center of the valve body, a sealing box for positioning the integrated filtering and heating module is fixedly connected to the center of the sleeve, an air box is fixedly connected to the outer end of the sealing box, and one end of the air box is provided with a connecting air pipe connected to the integrated filtering and heating module.

[0008] Preferably, multiple groups of shock-absorbing columns are fixedly connected to the bottom of the base, multiple groups of stop columns connected to the base are fixedly connected in an annular manner on the outer side below the valve body, air flow grooves are distributed on both sides of the air box, an air pressure control pump is provided in the center of the air box, and a dust exhaust pipe is provided in the middle of the air box.

[0009] Preferably, a through hole is opened on the delivery pipe, a steering rod is passed through the through hole, the top and bottom of the steering rod are respectively sleeved with a first fixed sleeve and a second fixed sleeve fixed to the delivery pipe, a pressure gauge is fixed to the top of the first fixed sleeve, and an air pressure sensor extending to the delivery pipe is provided inside the pressure gauge.

[0010] Preferably, a first drive motor is provided at the bottom of the steering rod, a filter plate is fixedly connected to the middle part of the steering rod, the first drive motor drives the steering rod to drive the filter plate to rotate, the outside of the filter plate is covered with a waterproof cover, a plurality of groups of inclined filter holes are linearly opened in the middle part of the filter plate, and a plurality of groups of straight filter holes are distributed on the diversion plate.

[0011] Preferably, the outer side of the flange ring is covered with a temperature insulation sleeve, and several groups of positioning holes are circumferentially opened on the flange ring near the edge. Two groups of sealing rings are linearly arranged in the center of the flange ring, and a slow flow channel is formed between the two groups of sealing rings. The positioning rings are arranged in two groups in a superimposed manner, and multiple groups of positioning rods are circumferentially connected on the two groups of positioning rings, and positioning bolts are provided between the positioning rods and the positioning rings.

[0012] Preferably, the heating control module includes a covering ring, a control box, a control screen, a signal cable, a main control box, a control knob, an adjustment screen and an electric heating plate. The covering rings are arranged in two groups. A main control box connected to the valve body is arranged above the two groups of covering rings. A control knob and an adjustment screen are arranged on the surface of the main control box. A controller is arranged inside the main control box. A control screen is arranged on the control box. A signal cable is electrically connected between the control screen and the controller. An electric heating plate that penetrates into the valve body is arranged on the inner side of the control box.

[0013] Preferably, the integrated filtering and heating module includes an adjusting shaft, a second driving motor, a counterweight ring, a gate plate, air flow holes, a dust collecting plate, a heating rod and an adsorption hole. The second driving motor is provided at the top of the adjusting shaft, the gate plate is provided at the bottom of the adjusting shaft, a counterweight ring is provided between the gate plate and the adjusting shaft, and a heating rod electrically connected to the control is provided in the middle of the gate plate.

[0014] Preferably, air flow holes are distributed on the gate plate, dust collecting plates are staggered and fixedly connected to the gate plate, and adsorption holes are distributed on the dust collecting plates.

[0015] Beneficial effects of the present invention: 1. According to the previous experience, when electronic special gases, acid and alkali chemical liquids and other chemical materials are supplied to the chamber, they are easy to contaminate the flow path inside the valve and accumulate in solid form. This contamination and accumulation will interfere with precise pressure control. In addition, an external inward heating device is set up. Under vacuum conditions, the heat generated by the external heater is difficult to be evenly transferred to the inside of the valve, resulting in poor heating effect and reducing the overall use effect. The difference is that through the integrated filtering and heating module, the valve can efficiently filter impurities in the airflow, effectively preventing these impurities from accumulating in solid form inside the valve, thereby avoiding the decrease in pressure control accuracy caused by contamination. At the same time, the module also has a heating decomposition function to further process the filtered gas to ensure its purity and stability. The heating control modules set deep inside the valve on both sides realize direct heating and dissolution of gas impurities. This internal heating method not only improves the efficiency of heat transfer and ensures the uniformity of heating, but also avoids the problem of poor heating effect of the external heating device under vacuum conditions. Therefore, the valve can more effectively remove solid impurities in the gas and ensure the purity and fluidity of the gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the control valve of the present invention; Figure 2 It is a schematic diagram of the overall structure of the control valve of the present invention from another angle; Figure 3 A schematic diagram of a valve body and a positioning ring of a control valve of the present invention; Figure 4 It is a schematic diagram of the delivery pipe and flange ring of the control valve of the present invention; Figure 5 It is a schematic diagram of the filter plate of the control valve of the present invention; Figure 6 A schematic diagram of a heating control module for controlling a valve according to the present invention; Figure 7 This is a schematic diagram of the integrated filtering and heating module for controlling a valve according to the present invention.

[0017] Explanation of reference numerals: 1. valve body; 2. delivery pipe; 3. flange ring; 4. positioning ring; 5. heating control module; 6. filtering and heating integrated module; 101. base; 102. shock-absorbing column; 103. stop column; 104. sleeve; 105. sealing box; 106. connecting air pipe; 107. air box; 108. dust exhaust pipe; 109. air pressure control pump; 110. air flow groove; 201. through hole; 202. steering rod; 203. first fixing sleeve; 204. pressure gauge; 205. second fixing sleeve; 206. first driving motor; 207. filter plate; 208. waterproof sleeve ; 209, straight filter hole; 210, inclined filter hole; 301, slow flow channel; 302, sealing ring; 303, positioning hole; 304, insulation sleeve; 401, positioning bolt; 402, positioning rod; 501, covering ring; 502, control box; 503, operation screen; 504, signal cable; 505, main control box; 506, operation knob; 507, adjustment screen; 508, electric heating plate; 601, adjustment shaft; 602, second drive motor; 603, counterweight ring; 604, gate; 605, air flow hole; 606, dust suction plate; 607, heating rod; 609, adsorption hole. DETAILED DESCRIPTION

[0018] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0019] See also Figure 1-7The present invention provides an embodiment: a heatable pressure control valve, comprising a valve body 1, a delivery pipe 2, a flange ring 3, a positioning ring 4, a heating control module 5 and a filtering and heating integrated module 6; the valve body 1 is integrally formed with a delivery pipe 2 for guiding the flow of air, the delivery pipe 2 is fixedly connected to the flange ring 3 for connecting the pipeline at one end away from the valve body 1, the top of the valve body 1 is sleeved with a positioning ring 4 for positioning the filtering and heating integrated module 6, the center of the valve body 1 can be rotatably operated to control the air pressure and filter the airflow impurities for heating and decomposition, and the two sides of the valve body 1 are integrally connected with heating control modules 5 for heating and dissolving gas impurities deep inside.

[0020] See also Figure 1-3 In this embodiment, a base 101 is fixedly connected to the bottom of the valve body 1, a sleeve 104 is fixedly connected to the top center of the valve body 1, a sealing box 105 for positioning the filtering and heating integrated module 6 is fixedly connected to the center of the sleeve 104, an air box 107 is fixedly connected to the outer end of the sealing box 105, one end of the air box 107 is provided with a connecting air pipe 106 connected to the filtering and heating integrated module 6, a plurality of groups of shock absorbing columns 102 are fixedly connected to the bottom of the base 101, a plurality of groups of stop columns 103 connected to the base 101 are fixedly connected to the outer side of the lower side of the valve body 1 in an annular direction, air flow grooves 110 are distributed on both sides of the air box 107, an air pressure control pump 109 is provided in the center of the air box 107, and a dust exhaust pipe 108 is provided in the middle of the air box 107; The sleeve 104 is fixed at the center of the top of the valve body 1, the sealing box 105 is fixed at the center of the sleeve 104 for positioning the integrated filtering and heating module 6, and the air box 107 is fixed at the outer end of the sealing box 105. One end of the air box 107 is provided with a connecting air pipe 106 connected to the integrated filtering and heating module 6 to ensure smooth airflow and effective filtering and heating. At the same time, multiple groups of shock-absorbing columns 102 are distributed and fixed at the bottom of the base 101 of the valve body 1, and multiple groups of stop columns 103 connected to the base 101 are fixed in an annular direction on the outer side below the valve body 1, which enhance the stability and durability of the valve body 1. The airflow grooves 110 opened on both sides of the air box 107 help to evenly distribute the airflow, and the air pressure control pump 109 in the center of the air box 107 can accurately control the air pressure. In addition, the dust exhaust pipe 108 design in the middle of the air box 107 is convenient for timely discharge of filtered impurities and keeping the inside of the valve body 1 clean.

[0021] See also Figure 4-5In this embodiment, a through hole 201 is formed on the delivery pipe 2, a steering rod 202 is formed in the through hole 201, a first fixing sleeve 203 and a second fixing sleeve 205 fixed to the delivery pipe 2 are respectively sleeved on the top and bottom of the steering rod 202, a pressure gauge 204 is fixed to the top of the first fixing sleeve 203, an air pressure sensor extending to the delivery pipe 2 is provided inside the pressure gauge 204, a first driving motor 206 is provided at the bottom of the steering rod 202, a filter plate 207 is fixed to the middle of the steering rod 202, the first driving motor 206 drives the steering rod 202 to rotate the filter plate 207, the outside of the filter plate 207 is covered with a waterproof cover 208, a plurality of groups of oblique filter holes 210 are linearly formed in the middle of the filter plate 207, and a plurality of groups of straight filter holes 209 are distributed on the diverter plate; The through hole 201 formed on the delivery pipe 2 and the steering rod 202 passing therethrough constitute the core transmission structure of the entire filtration, so that the steering rod 202 can stably rotate in the delivery pipe 2, thereby driving the filter plate 207 to perform efficient filtering operation; Secondly, the top and bottom of the steering rod 202 are respectively sleeved with a first fixing sleeve 203 and a second fixing sleeve 205 fixed to the delivery pipe 2, which ensures the stability and accuracy of the steering rod 202 and the filter plate 207 during the rotation process. This stable connection method effectively prevents the filtration efficiency from decreasing due to vibration or external force. Furthermore, a pressure gauge 204 is fixedly connected to the top of the first fixing sleeve 203, and an air pressure sensor of model AHT20+BMP280 is arranged inside the pressure gauge 204 and extends to the delivery pipe 2. This design can monitor the air pressure changes in the delivery pipe 2 in real time, providing accurate air pressure data for the operator, which helps to adjust the filtering parameters in time and ensure the filtering effect; The first driving motor 206 drives the steering rod 202 to drive the filter plate 207 to rotate, thereby realizing the rapid separation and filtration of impurities in the airflow. This automated and efficient filtration method greatly improves the work efficiency and filtration quality; Finally, the design of the filter plate 207 is also a highlight. It is covered with a waterproof cover 208, which effectively prevents moisture from eroding and damaging the filtration system. At the same time, a number of groups of oblique filter holes 210 are linearly opened in the middle of the filter plate 207, and a number of groups of straight filter holes 209 are distributed on the diverter plate. This porous design not only increases the filtration area, but also improves the filtration accuracy and efficiency. This structure allows the airflow to be fully filtered and purified when passing through the filter plate 207, thereby ensuring the purity and quality of the output airflow.

[0022] See also Figure 3-6In this embodiment, the outer side of the flange ring 3 is covered with a temperature insulating sleeve 304, and a plurality of positioning holes 303 are circumferentially opened on the flange ring 3 near the edge. Two groups of sealing rings 302 are linearly arranged in the center of the flange ring 3, and a slow flow channel 301 is formed between the two groups of sealing rings 302. The positioning ring 4 is arranged in two groups in a superimposed manner, and a plurality of positioning rods 402 are circumferentially penetrated on the two groups of positioning rings 4, and positioning bolts 401 are arranged between the positioning rods 402 and the positioning ring 4.

[0023] The outer side of the flange ring 3 is covered with a temperature insulation sleeve 304, which effectively isolates the influence of the external temperature on the internal temperature of the flange ring 3, ensures the stable operation of the flange ring 3 under different temperature environments, and improves its durability and reliability. A plurality of positioning holes 303 are circumferentially opened near the edge of the flange ring 3. These positioning holes 303 cooperate with the positioning rod 402 and the positioning bolt 401 to achieve accurate positioning and firm installation of the flange ring 3. This design not only simplifies the installation process, but also improves the stability and safety of the flange ring 3 during use. Two sets of sealing rings 302 are linearly arranged in the center of the flange ring 3, and a slow flow channel 301 is formed between the two sets of sealing rings 302. This double sealing ring 302 design enhances the sealing performance of the flange ring 3 and effectively prevents the leakage of gas or liquid. At the same time, the design of the slow flow channel 301 enables the fluid to flow smoothly when passing through the flange ring 3, reduces the impact and wear of the fluid on the flange ring 3, and prolongs the service life of the flange ring 3.

[0024] See also Figure 6-7 In this embodiment, the heating control module 5 includes a covering ring 501, a control box 502, a control screen 503, a signal cable 504, a main control box 505, a control knob 506, an adjustment screen 507 and an electric heating plate 508. The covering ring 501 is provided in two groups. A main control box 505 connected to the valve body 1 is provided above the two groups of covering rings 501. A control knob 506 and an adjustment screen 507 are provided on the surface of the main control box 505. A controller is provided inside the main control box 505. A control screen 503 is provided on the control box 502. A signal cable 504 is electrically connected between the control screen 503 and the controller. An electric heating plate 508 that penetrates into the valve body 1 is provided on the inner side of the control box 502. Two sets of covering rings 501 are used to effectively fix and protect the connection between the heating control module 5 and the valve body 1, and enhance the stability and durability of the structure. The electric heating plate 508 arranged inside the control box 502 directly penetrates into the valve body 1 to achieve efficient and uniform heating effect and improve heating efficiency. By optimizing the signal transmission path and adopting a high-performance controller model XYZ1234, efficient communication between the control panel 503 and the controller is achieved to ensure accurate transmission of heating instructions. At the same time, the in-depth layout of the electric heating plate 508 makes the heating more uniform and efficient, effectively shortens the heating time, and improves the accuracy of temperature control.

[0025] See also Figure 7 In this embodiment, the filtering and heating integrated module 6 includes an adjusting shaft 601, a second driving motor 602, a counterweight ring 603, a gate plate 604, an air flow hole 605, a dust collecting plate 606, a heating rod 607 and an adsorption hole 609. The second driving motor 602 is provided at the top of the adjusting shaft 601, and the gate plate 604 is provided at the bottom of the adjusting shaft 601. A counterweight ring 603 is provided between the gate plate 604 and the adjusting shaft 601. A heating rod 607 electrically connected to the control is provided in the middle of the gate plate 604. Air flow holes 605 are distributed on the gate plate 604. Dust collecting plates 606 are staggered and fixed on the gate plate 604. Adsorption holes 609 are distributed on the dust collecting plate 606. A counterweight ring 603 is cleverly arranged between the adjustment shaft 601 and the gate plate 604, which effectively balances the center of gravity of the module during operation, reduces vibration noise, and improves the stability and durability of the module. A heating rod 607 is integrated in the middle of the gate plate 604, and the heating rod 607 is electrically connected to the control to achieve precise control of the heating process. This design not only improves the heating efficiency, but also ensures the uniform distribution of the heating temperature, thereby optimizing the filtering effect. In addition, the air flow holes 605 distributed on the gate plate 604 further promote the circulation and heating of the gas. The dust collecting plates 606 are staggered and fixed on the gate plate 604, and the dust collecting plates 606 are distributed with adsorption holes 609. This staggered layout not only increases the filtering area, but also improves the filtering efficiency.

[0026] When working, first, the positioning hole 303 on the flange ring 3 is tightly connected with the corresponding pipe, and the dust bag is connected with the dust exhaust pipe 108 to prepare for the subsequent dust removal work. When the airflow enters the valve, it will first pass through the slow flow channel 301. This design can reduce the impact of the airflow and make the airflow enter the delivery pipe 2 more smoothly; Next, the first drive motor 206 is started to drive the steering rod 202 to drive the filter plate 207 to rotate. The carefully designed oblique filter holes 210 and straight filter holes 209 on the filter plate 207 can effectively interfere with the impact of the airflow and achieve the diversion and filtering of the airflow. This step can preliminarily remove some impurities in the airflow; Subsequently, the user can conveniently adjust the heating parameters through the control screen 503 and the adjustment screen 507. These parameter signals are uniformly transmitted through the signal cable 504 to ensure that the electric heating plate 508 and the heating rod 607 can start heating synchronously, and accurately control the internal environment of the valve body 1. This heating process can not only prevent impurities from adhering to the inner wall of the valve body 1, but also accelerate the melting speed of existing impurities, further improving the dust removal effect; Finally, the second drive motor 602 drives the adjustment shaft 601 to drive the gate plate 604 to turn. The rotation angle of the gate plate 604 will directly affect the air pressure flow state inside the valve body 1. During the rotation process, the air pressure control pump 109 uses the suction force generated by the rotation of the gate plate 604 through the air pipe to effectively absorb impurities. These impurities are then absorbed into the dust exhaust pipe 108 through the adsorption hole 609 and the air pipe, and finally discharged into the dust collection bag. This step can completely remove the impurity accumulation inside the valve body 1 and ensure the long-term stable operation of the valve.

[0027] Through the above steps, the valve can efficiently filter impurities in the airflow through the filtering and heating integrated module 6, effectively preventing these impurities from accumulating in solid form inside the valve. The heating control modules 5 arranged deep inside the valve on both sides realize direct heating and dissolution of gas impurities. This internal heating method not only improves the efficiency of heat transfer, but also ensures the uniformity of heating.

[0028] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of those skilled in the art without departing from the spirit of the present invention.

Claims

1. A heatable pressure control valve, comprising a valve body (1); characterized in that: The valve body (1) further comprises a delivery pipe (2), a flange ring (3), a positioning ring (4), a heating control module (5) and a filtering and heating integrated module (6); the valve body (1) is integrally formed with a delivery pipe (2) for guiding the flow of air, the delivery pipe (2) is fixedly connected to one end of the delivery pipe (2) away from the valve body (1) with a flange ring (3) for connecting to a pipeline, the top of the valve body (1) is sleeved with a positioning ring (4) for positioning the filtering and heating integrated module (6), the center of the valve body (1) is rotatably operated to control the air pressure and filter the airflow impurities for heating and decomposition, and the two sides of the valve body (1) are integrally connected with heating control modules (5) for heating and dissolving gas impurities in the interior.

2. A heatable pressure control valve according to claim 1, characterized in that: The bottom of the valve body (1) is fixedly connected to a base (101), the top center of the valve body (1) is fixedly connected to a sleeve (104), the center of the sleeve (104) is fixedly connected to a sealing box (105) for positioning the integrated filtering and heating module (6), the outer end of the sealing box (105) is fixedly connected to an air box (107), and one end of the air box (107) is provided with a connecting air pipe (106) that is connected to the integrated filtering and heating module (6).

3. A heatable pressure control valve according to claim 2, characterized in that: A plurality of groups of shock absorbing columns (102) are fixedly connected to the bottom of the base (101), a plurality of groups of stop columns (103) connected to the base (101) are fixedly connected to the outer side of the bottom of the valve body (1) in an annular direction, air flow grooves (110) are distributed on both sides of the air box (107), an air pressure control pump (109) is provided at the center of the air box (107), and a dust exhaust pipe (108) is provided in the middle of the air box (108).

4. A heatable pressure control valve according to claim 1, characterized in that: A through hole (201) is formed through the delivery pipe (2), a steering rod (202) is formed in the through hole (201), a first fixing sleeve (203) and a second fixing sleeve (205) fixed to the delivery pipe (2) are respectively sleeved on the top and bottom of the steering rod (202), a pressure gauge (204) is fixedly connected to the top of the first fixing sleeve (203), and an air pressure sensor extending to the delivery pipe (2) is provided inside the pressure gauge (204).

5. A heatable pressure control valve according to claim 4, characterized in that: A first drive motor (206) is provided at the bottom of the steering rod (202), a filter plate (207) is fixedly connected to the middle of the steering rod (202), the first drive motor (206) drives the steering rod (202) to drive the filter plate (207) to rotate, the outside of the filter plate (207) is covered with a waterproof cover (208), a plurality of groups of oblique filter holes (210) are linearly provided in the middle of the filter plate (207), and a plurality of groups of straight filter holes (209) are distributed on the diverter plate.

6. A heatable pressure control valve according to claim 1, characterized in that: The outer side of the flange ring (3) is covered with a temperature insulating sleeve (304), a plurality of groups of positioning holes (303) are circumferentially opened on the flange ring (3) near the edge, two groups of sealing rings (302) are linearly arranged at the center of the flange ring (3), a slow flow channel (301) is formed between the two groups of sealing rings (302), the positioning ring (4) is arranged in two groups in a superimposed manner, a plurality of groups of positioning rods (402) are circumferentially penetrated on the two groups of positioning rings (4), and positioning bolts (401) are arranged between the positioning rods (402) and the positioning rings (4).

7. A heatable pressure control valve according to claim 1, characterized in that: The heating control module (5) comprises a covering ring (501), a control box (502), a control screen (503), a signal cable (504), a main control box (505), a control knob (506), an adjustment screen (507) and an electric heating plate (508). The covering ring (501) is provided in two groups. A main control box (505) connected to the valve body (1) is provided above the two groups of covering rings (501). A control knob (506) and an adjustment screen (507) are provided on the surface of the main control box (505). A controller is provided inside the main control box (505). A control screen (503) is provided on the control box (502). A signal cable (504) is electrically connected between the control screen (503) and the controller. An electric heating plate (508) that penetrates into the valve body (1) is provided on the inner side of the control box (502).

8. A heatable pressure control valve according to claim 7, characterized in that: The integrated filtering and heating module (6) comprises an adjusting shaft (601), a second driving motor (602), a counterweight ring (603), a gate plate (604), an air flow hole (605), a dust collecting plate (606), a heating rod (607) and an adsorption hole (609). The second driving motor (602) is arranged at the top of the adjusting shaft (601), the gate plate (604) is arranged at the bottom of the adjusting shaft (601), a counterweight ring (603) is arranged between the gate plate (604) and the adjusting shaft (601), and a heating rod (607) electrically connected to the control is arranged in the middle of the gate plate (604).

9. A heatable pressure control valve according to claim 8, characterized in that: The gate plate (604) is provided with air flow holes (605) distributed thereon, a dust collecting plate (606) is staggeredly fixedly connected to the gate plate (604), and adsorption holes (609) are distributed thereon.

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