Thermal cycle equipment for baking electronic components

By designing a thermal cycling equipment for baking integrated circuit chips, using technical means such as mesh belt conveying components and diverting out air ducts, the problems of uneven temperature distribution and low waste heat recovery caused by centralized airflow discharge are solved, and more efficient heat utilization and a more uniform baking effect are achieved.

CN119826494APending Publication Date: 2025-04-15NANJING ANZHIHUA NETWORK TECH CO LTD
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Patent Information

Application Number
CN202411967416.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-30
Publication Date
2025-04-15

AI Technical Summary

Technical Problem

When baking integrated circuit chips, the concentrated discharge of airflow leads to uneven temperature distribution, low waste heat recovery rate, and inconsistent airflow flow rate, which affects the baking effect.

Method used

A thermal circulation equipment is designed, including a support frame, mesh belt conveyor assembly, a baking oven, a heat storage box, an air supply unit, a diversion air duct and a ventilation adjustment unit. Automatic and rapid baking is achieved through the mesh belt conveyor assembly and a positioning trigger mechanism, and the full storage and recycling of waste heat is achieved through the diversion air duct and a heat storage cotton.

Benefits of technology

The utilization rate of heat energy during the baking process is improved, the uniformity of temperature distribution is ensured, the waste heat recovery rate is improved, and the damage caused by the extremely rapid heating of the integrated circuit chip is avoided.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention belongs to the technical field of heat energy utilization of baking ovens, and particularly relates to heat cycle equipment for baking electronic components, which comprises two support frames and a mesh belt conveying assembly arranged between the two support frames, and further comprises a baking box, a heat exchange device, a heat exchange device and a heat exchange device, the baking box is clamped to the end faces of the two supporting frames, an electric heating assembly is installed at the inner bottom of the baking box, first material passing openings are formed in the two side walls of the baking box, a mesh belt of the mesh belt conveying assembly penetrates through the two first material passing openings, and a positioning triggering mechanism is installed on the baking box. The chip baking device can automatically and quickly bake chips, effectively distribute and discharge hot air, fully recover waste heat and preheat the chips, improve the baking efficiency, prevent the chips from being damaged, regulate and control the air flow according to the humidity in the baking box, enable the heating process of the chips to be consistent, and prevent excessive or insufficient heating.
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Description

Technical Field

[0001] The invention belongs to the technical field of heat energy utilization of baking furnaces, and in particular relates to a thermal circulation device for baking electronic components. Background Art

[0002] During the production of integrated circuit chips, chip manufacturing goes through multiple complex processes such as photolithography, etching, and ion implantation. Each process will introduce contaminants, so the integrated circuit chips need to be cleaned. After cleaning, the integrated circuit chips need to be baked to avoid moisture and other residues inside the chip.

[0003] At present, when integrated circuit chips are baked, they are generally heat-treated in a special baking furnace to evaporate moisture. Since ventilation is required to remove the evaporated moisture in time, and the wind will take away some heat. In order to improve the utilization rate of heat energy, a structure for recycling waste heat is usually installed, such as the heat energy recycling device for heat treatment furnace disclosed in patent announcement number CN102384659A; When baking integrated circuit chips, it is necessary to ventilate and drain water vapor in the baking space, and the ventilation airflow is concentrated and discharged to the heat storage structure (the heat storage structure is used to store waste heat for the convenience of waste heat reuse). Due to the different moisture content on the chip surface, the heat absorbed by each chip is also different, so the temperature distribution of the baking cavity is uneven, and the concentrated discharge of airflow is not conducive to sufficient heat exchange with the heat storage structure, resulting in a low waste heat recovery rate. In addition, the concentrated discharge of airflow will cause different airflow velocities on the surface of each chip. For example, the airflow velocity around the chip near the vent is too large, which will lead to different degrees of chip drying and affect the baking effect. Summary of the invention

[0004] The object of the present invention is to provide a thermal cycle device for baking electronic components in view of the above problems.

[0005] To achieve the above object, the present invention adopts the following technical solution: A thermal cycle device for baking electronic components, comprising two support frames and a mesh belt conveyor assembly installed between the two support frames, wherein a controller is fixedly installed on the side wall of one of the support frames, and further comprising: A baking oven is clamped on the end faces of the two support frames, an electric heating component is installed on the inner bottom of the baking oven, first material passing openings are opened on both side walls of the baking oven, and the mesh belt of the mesh belt conveying component passes through the two first material passing openings, and a positioning trigger mechanism is installed on the baking oven; A heat storage box is clamped on the end faces of the two support frames, and the heat storage box is arranged on one side of the baking oven. The two side walls of the heat storage box are both provided with second material passing openings, and the mesh belt of the mesh belt conveyor assembly passes through the two second material passing openings. The inner bottom of the heat storage box is installed with heat storage cotton, and the top of the heat storage cotton is in sliding contact with the mesh belt of the mesh belt conveyor assembly. an air supply unit, installed on the side wall of the baking oven, for supplying air to the interior of the baking oven; Multiple split air outlet ducts are fixedly plugged into the side wall of the oven away from the air supply unit, and the air outlet end of each split air outlet duct passes through the heat storage box and the heat storage cotton; Multiple ventilation adjustment units are installed at the air outlet end of each split air outlet duct; The dehumidification reflow unit is installed on the side wall of the heat storage box, and the air outlet end of the dehumidification reflow unit is connected to the air inlet end of the air supply unit.

[0006] Preferably, the positioning trigger mechanism includes a storage groove opened on the upper side wall of the two first material passing ports, and electromagnetic push rods are fixedly installed inside the two storage grooves, sealing baffles are installed at the telescopic ends of the two electromagnetic push rods, and proximity switches are fixedly plugged into the bottoms of the two sealing baffles. A plurality of groups of positioning strips are installed on the outer surface of the mesh belt of the mesh belt conveyor assembly, and two positioning strips in the same group are respectively arranged on the inner sides of the corresponding first material passing ports, and the two electromagnetic push rods and the two proximity switches are electrically connected to the controller.

[0007] Preferably, the air supply unit includes a right fixed cover fixedly installed on the front side wall of the baking oven, a mounting sleeve is fixedly installed on the inner wall of the right fixed cover, and a fan is fixedly installed inside the mounting sleeve, an air inlet is provided on the side wall of the right fixed cover at the air inlet end of the fan, a plurality of air outlet holes corresponding to the positions of diversion air outlet ducts are provided on the side wall of the baking oven at the inner side of the right fixed cover, a dust filter assembly is installed on one side of the air outlet end of the fan inside the right fixed cover, and the fan is electrically connected to the controller.

[0008] Preferably, each of the ventilation and adjustment units includes a detection box fixedly installed on the outlet end of the diverter air duct, a humidity detection probe is fixedly inserted into the side wall of the detection box, and the detection end of the humidity detection probe is arranged inside the detection box, and a plurality of circular holes are opened at the end of the detection box away from the diverter air duct, an air inlet proportional solenoid valve is installed at the air inlet end of each of the diverter air ducts, and an air outlet proportional solenoid valve is installed inside each of the air outlet holes, and the controller controls the opening and closing degree of the corresponding air inlet proportional solenoid valve and the air outlet proportional solenoid valve according to the electrical signal output by the humidity detection probe.

[0009] Preferably, the dehumidification reflux unit includes a left fixed cover fixedly mounted on the front side wall of the heat storage tank, and a baffle is fixedly mounted inside the left fixed cover, each of the detection boxes is arranged between the baffle and the heat storage tank, the inside of the left fixed cover is filled with silica gel desiccant at a position on the side of the baffle away from the heat storage tank, a connecting pipe is fixedly connected to the side wall of the left fixed cover, and the connecting pipe is connected to the right fixed cover, and a humidity metering mechanism is installed on the top of the heat storage tank.

[0010] Preferably, the dust filter assembly includes a mounting frame fixedly mounted on the inner wall of the right fixed cover, a dust filter net is provided between the mounting frame and the mounting sleeve, and a frame-shaped rubber pad is fixedly provided between the outer edge of the side wall of the dust filter net and the mounting frame.

[0011] Preferably, the humidity metering mechanism includes an insulating box fixedly mounted on the top of the heat storage box, and a plurality of lamp beads are fixedly mounted on the inner top of the insulating box, the controller controls the luminous power of each lamp bead according to the electrical signal output by each humidity detection probe, a photosensitive resistor is fixedly mounted on the inner bottom of the insulating box, and the light emitted by each lamp bead is irradiated to the photosensitive surface of the photosensitive resistor, a motor is fixedly mounted on the side wall of the right fixed cover, and the output shaft of the motor is rotatably connected to the side wall of the right fixed cover, a photoelectric encoder is fixedly mounted on the inner wall of the right fixed cover, and the photoelectric encoder is drivingly connected to the output shaft of the motor, the photosensitive resistor is electrically connected to the motor through the controller, and the photoelectric encoder is electrically connected to the controller.

[0012] Preferably, an eccentric wheel is installed at the shaft end of the output shaft of the motor, and a hemisphere is fixedly installed on the side wall of the dust filter. When the motor drives the eccentric wheel to rotate one circle, the eccentric wheel squeezes the hemisphere once.

[0013] Compared with the existing technology, the advantages of a thermal cycle device for baking electronic components are: 1. Through the cooperation of the support frame, mesh belt conveyor assembly, controller, baking box, electric heating assembly, first feeding port and positioning trigger mechanism, the integrated circuit chip can be automatically and quickly baked, and through the cooperation of the heat storage box, second feeding port, heat storage cotton, air supply unit and multiple diversion air outlet ducts, the hot air from various areas in the baking box can be diverted and discharged, which is conducive to fully storing the baking waste heat and improving the adequacy of waste heat recovery. The waste heat can be used to preheat the integrated circuit chip, which can not only improve the subsequent baking efficiency of the integrated circuit chip, but also avoid the integrated circuit chip from being heated up extremely quickly, resulting in heating damage to the integrated circuit chip.

[0014] 2. By setting up the ventilation adjustment unit, the air flow rate passing through each area can be automatically adjusted based on the humidity of each area inside the baking oven, so that the heating process of the integrated circuit chips in each area can be kept uniform as much as possible, which can avoid the integrated circuit chips from being overheated and the integrated circuit chips from being insufficiently baked.

[0015] 3. The dehumidification reflux unit can reflux hot air to further reduce heat energy waste, and the humidity metering mechanism can automatically remind personnel to regenerate the silica gel desiccant based on the humidity of the air flow passing through each silica gel desiccant. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of a thermal cycle device for baking electronic components provided by the present invention; Figure 2 It is a schematic diagram of the internal structure of a baking box and a heat storage box of a thermal cycle device for baking electronic components provided by the present invention; Figure 3 The invention provides a thermal cycle device for baking electronic components. Figure 2 A magnified view of the structure of part A; Figure 4 It is a schematic diagram of the internal top view of a baking box and a heat storage box of a thermal cycle device for baking electronic components provided by the present invention; Figure 5 The invention provides a thermal cycle device for baking electronic components. Figure 4 A magnified view of the structure of part B; Figure 6 The invention provides a thermal cycle device for baking electronic components. Figure 4 The structure of the C part is enlarged; Figure 7 The present invention provides a schematic diagram of the internal structure of an insulating box of a thermal cycle device for baking electronic components.

[0017] In the figure: 1 support frame, 2 mesh belt conveyor assembly, 3 controller, 4 baking box, 5 electric heating assembly, 6 first feeding port, 7 positioning trigger mechanism, 71 storage slot, 72 electromagnetic push rod, 73 sealing baffle, 74 proximity switch, 75 positioning strip, 8 heat storage box, 9 second feeding port, 10 heat storage cotton, 11 air supply unit, 111 right fixed cover, 112 installation sleeve, 113 fan, 114 air inlet, 115 air outlet, 12 split outlet duct, 13 ventilation adjustment unit, 131 detection box, 132 humidity detection probe, 133 round hole, 134 air inlet proportional solenoid valve, 135 air outlet proportional solenoid valve, 14 dehumidification reflux unit, 141 left fixed cover, 142 baffle, 143 silica gel desiccant, 144 connecting pipe, 15 dust filter assembly, 151 installation frame, 152 dust filter, 153 frame rubber pad, 16 humidity metering mechanism, 161 insulation box, 162 lamp beads, 163 photosensitive resistor, 164 motor, 165 photoelectric encoder, 17 eccentric wheel, 18 hemisphere. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0019] like Figure 1-Figure 7 As shown, a thermal cycle device for baking electronic components comprises two support frames 1 and a mesh belt conveyor assembly 2 installed between the two support frames 1, wherein a controller 3 is fixedly installed on the side wall of one of the support frames 1, and further comprises: a baking box 4, the baking box 4 is clamped on the end faces of the two support frames 1, an electric heating assembly 5 is installed on the inner bottom of the baking box 4, first feeding ports 6 are opened on both side walls of the baking box 4, and the mesh belt of the mesh belt conveyor assembly 2 passes through the two first feeding ports 6, and a positioning trigger mechanism 7 is installed on the baking box 4, and the positioning trigger mechanism 7 comprises a storage groove 71 opened on the upper side wall of the two first feeding ports 6, and the two storage grooves 71 The inside of each of the two electromagnetic push rods 72 is fixedly installed, and the telescopic ends of the two electromagnetic push rods 72 are installed with sealing baffles 73. The bottoms of the two sealing baffles 73 are fixedly connected with proximity switches 74. The outer surface of the mesh belt of the mesh belt conveyor assembly 2 is installed with multiple groups of positioning strips 75, and the two positioning strips 75 of the same group are respectively arranged on the inner sides of the corresponding first material passing port 6. The two electromagnetic push rods 72 and the two proximity switches 74 are electrically connected to the controller 3. After the proximity switch 74 detects the positioning strip 75, it will output an electrical signal to the controller 3. Only when the two proximity switches 74 output electrical signals to the controller 3 at the same time, the controller 3 will start the baking operation.

[0020] The heat storage box 8 is clamped on the end faces of the two support frames 1, and the heat storage box 8 is arranged on one side of the baking oven. The two side walls of the heat storage box 8 are both provided with second material passing ports 9, and the mesh belt of the mesh belt conveying assembly 2 passes through the two second material passing ports 9. The inner bottom of the heat storage box 8 is installed with heat storage cotton 10, and the top of the heat storage cotton 10 is in sliding contact with the mesh belt of the mesh belt conveying assembly 2. The air supply unit 11 is installed on the side wall of the baking oven 4 for supplying air to the interior of the baking oven 4. The air supply unit 11 includes a right fixed cover 111 fixedly installed on the front side wall of the baking oven 4, and the inner wall of the right fixed cover 111 is fixedly installed with a mounting sleeve 11 2, and a fan 113 is fixedly installed inside the mounting sleeve 112, an air inlet 114 is opened on the side wall of the right fixed cover 111 at the air inlet end of the fan 113, a plurality of air outlet holes 115 corresponding to the position of the split air outlet duct 12 are opened on the side wall of the baking oven 4 at the inner side of the right fixed cover 111, a dust filter assembly 15 is installed on one side of the air outlet end of the fan 113 inside the right fixed cover 111, the fan 113 is electrically connected to the controller 3, a dust hopper is provided at the bottom of the right fixed cover 111, and a sealing cover is threadedly connected to the bottom of the dust hopper for transferring filtered dust for processing.

[0021] A plurality of shunt air outlet ducts 12 are fixedly plugged into the side wall of the baking oven 4 away from the air supply unit 11, and the air outlet ends of each shunt air outlet duct 12 penetrate the heat storage box 8 and the heat storage cotton 10. A plurality of ventilation adjustment units 13 are installed at the air outlet ends of each shunt air outlet duct 12. Each ventilation adjustment unit 13 includes a detection box 131 fixedly installed at the air outlet end of the shunt air outlet duct 12. A humidity detection probe 132 is fixedly plugged into the side wall of the detection box 131, and the detection end of the humidity detection probe 132 is arranged inside the detection box 131. The detection box 131 is away from the shunt air outlet duct 12. A plurality of circular holes 133 are provided at one end, an air inlet proportional solenoid valve 134 is installed at the air inlet end of each branch air outlet pipe 12, and an air outlet proportional solenoid valve 135 is installed inside each air outlet hole 115. The controller 3 controls the opening and closing degree of the corresponding air inlet proportional solenoid valve 134 and the air outlet proportional solenoid valve 135 according to the electrical signal output by the humidity detection probe 132. When the current passed through the electromagnetic components inside the air inlet proportional solenoid valve 134 and the air outlet proportional solenoid valve 135 changes, the magnetic attraction force of the electromagnetic components on the valve core structure will also change synchronously. At this time, the degree of opening of each valve core changes synchronously.

[0022] The dehumidification reflow unit 14 is installed on the side wall of the heat storage tank 8, and the air outlet end of the dehumidification reflow unit 14 is connected to the air inlet end of the air supply unit 11. The dehumidification reflow unit 14 includes a left fixed cover 141 fixedly installed on the front side wall of the heat storage tank 8, and a baffle 142 is fixedly installed inside the left fixed cover 141. Each detection box 131 is arranged between the baffle 142 and the heat storage tank 8. The inside of the left fixed cover 141 is located at a position on the side of the baffle 142 away from the heat storage tank 8 and is filled with a silica gel desiccant 143. The side wall of the left fixed cover 141 is fixedly connected with a connecting pipe 144, and the connecting pipe 144 is connected to the right fixed cover 111. A humidity metering mechanism 16 is installed on the top of the heat storage tank 8, and the silica gel desiccant 143 can absorb moisture.

[0023] The dust filter assembly 15 includes a mounting frame 151 fixedly mounted on the inner wall of the right fixed cover 111 , a dust filter net 152 is provided between the mounting frame 151 and the mounting sleeve 112 , and a frame-shaped rubber pad 153 is fixedly provided between the outer edge of the side wall of the dust filter net 152 and the mounting frame 151 .

[0024] The humidity metering mechanism 16 includes an insulating box 161 fixedly mounted on the top of the heat storage tank 8, and a plurality of lamp beads 162 are fixedly mounted on the inner top of the insulating box 161. The controller 3 controls the luminous power of each lamp bead 162 according to the electrical signal output by each humidity detection probe 132. A photosensitive resistor 163 is fixedly mounted on the inner bottom of the insulating box 161, and the light emitted by each lamp bead 162 is irradiated to the photosensitive surface of the photosensitive resistor 163. A motor 164 is fixedly mounted on the side wall of the right fixed cover 111, and the motor 164 is The output shaft is rotationally connected to the side wall of the right fixed cover 111, and a photoelectric encoder 165 is fixedly installed on the inner wall of the right fixed cover 111, and the photoelectric encoder 165 is transmission-connected to the output shaft of the motor 164. The photosensitive resistor 163 is electrically connected to the motor 164 through the controller 3, and the photoelectric encoder 165 is electrically connected to the controller 3. When the light intensity received by the photosensitive resistor 163 increases, its own resistance decreases. The photoelectric encoder 165 includes structures such as a grating, a fixed shell, a rotating column, a light source, and a diode.

[0025] An eccentric wheel 17 is installed at the shaft end of the output shaft of the motor 164, and a hemisphere 18 is fixedly installed on the side wall of the dust filter 152. When the motor 164 drives the eccentric wheel 17 to rotate one circle, the eccentric wheel 17 will squeeze the hemisphere 18 once. By driving the eccentric wheel 17 to rotate by the motor 164, the hemisphere 18 can be cooperated to displace one side of the dust filter 152. In conjunction with the frame-type rubber pad 153, the dust filter 152 can be vibrated, thereby preventing dust from being blocked on the surface of the dust filter 152.

[0026] The operating principle of the present invention is now described as follows: through an external feeding device, each integrated circuit chip that needs to be baked is placed on the mesh belt conveyor assembly 2 (the mesh belt conveyor assembly 2 includes a metal mesh belt that is resistant to high temperatures and has good electrical conductivity, and also includes components such as conveyor rollers, drive motors, bearings, and transmission belts. The purpose of high temperature resistance is to enable the metal mesh belt to withstand the heating temperature of the electric heating component 5, and the electrical conductivity is to prevent the integrated circuit chip from being damaged by static electricity during the conveying process. The side wall of the metal mesh belt needs to be provided with a special grounding structure for timely conducting static electricity), so that each integrated circuit chip is located between two positioning bars 75 in the same group, and the controller 3 is started. The controller 3 will control the mesh belt conveyor assembly 2 to work, and the mesh belt conveyor The conveying assembly 2 can drive the integrated circuit chip to move toward the heat storage box 8 and the baking box 4. When the two positioning bars 75 of the same group move to the inside of the two first feeding ports 6, the proximity switches 74 at the bottom of the two sealing baffles 73 will detect that the two positioning bars 75 have reached the set position. At this time, the two proximity switches 74 will simultaneously output electrical signals to the controller 3. After receiving the electrical signals simultaneously transmitted by the two proximity switches 74, the controller 3 will immediately control the mesh belt conveying assembly 2 to stop working. Subsequently, the controller 3 controls the two electromagnetic push rods 72 to work. The two electromagnetic push rods 72 can push the sealing baffle 73 on the same side to move downward and abut against the corresponding positioning bars 75, thereby blocking the two first feeding ports 6 to prevent the wind from escaping from here. After the controller 3 is started, the controller 3 will control the electric heating component 5 to work, and the electric heating component 5 can heat up the inside of the baking oven 4 (the temperature of the heating can be set by the controller 3 according to the baking temperature requirement of the integrated circuit chip), so that the integrated circuit chip moved to the inside of the baking oven 4 can be baked. At the same time, the controller 3 will start the fan 113, each air inlet proportional solenoid valve 134 and each air outlet proportional solenoid valve 135. The fan 113 can inhale air through the air inlet 114 and transport it to the inside of the right fixed cover 111. Under the action of the dust filter 152, dust in the air can be filtered out. The filtered air will enter the baking oven 4 through each air outlet 115, and each integrated circuit chip will be heated up. The heat evaporated by the chip due to heating is discharged into each branch outlet pipe 12 through the flowing air flow, and the hot air flow carrying the evaporated water vapor will enter each detection box 131 through the branch outlet pipe 12, and the hot air flow can exchange heat with the heat storage cotton 10 through the branch outlet pipe 12, and the heat storage cotton 10 can store heat, and the air in the heat storage cotton 10 is heated after heat exchange, and the heated hot air will flow to the upper side, so as to preheat each integrated circuit chip in the heat storage box 8 at this time. By preheating the integrated circuit chip, it can not only help to improve the subsequent baking and heating efficiency of the electric heating component 5 for the integrated current chip, but also prevent the integrated circuit chip from directly entering the high temperature environment from the low temperature environment, causing the integrated circuit chip to be damaged; The airflow entering each detection box 131 will be discharged through each circular hole 133. Before being discharged, each humidity detection probe 132 will detect the humidity of the airflow flowing through the corresponding detection box 131. The humidity-sensitive element of the humidity detection probe 132 will decrease in resistance due to increased humidity. At this time, the electrical signal strength output by the humidity detection probe 132 to the controller 3 becomes larger, and the higher the humidity, the lower its resistance. At this time, the greater the electrical signal strength output to the controller 3, the greater the electrical signal output by the humidity detection probe 132 received by the controller 3 becomes, and the corresponding air intake ratio will be controlled. For example, the current passed through the electromagnetic parts inside the electromagnetic valve 134 and the air outlet proportional electromagnetic valve 135 becomes larger. At this time, due to the increase in the current intensity passed through the electromagnetic parts, the magnetic attraction of the electromagnetic parts to the valve core structure is greater. At this time, the degree of opening of each valve core is greater, so that more air flows through the corresponding split air outlet pipe 12 and the air outlet hole 115. Since the airflow around each integrated circuit chip will be taken away by the air outlet hole 115 and the split air outlet pipe 12 at the corresponding position, when the surface moisture of the integrated circuit chip at this position is more, the air entering the corresponding split air outlet pipe 12 The greater the humidity of the air flow, the greater the opening degree of the air inlet proportional solenoid valve 134 and the air outlet proportional solenoid valve 135 in the corresponding split air outlet duct 12 and the air outlet hole 115. Therefore, for the area with more moisture, more air flow will pass through here, thereby making the evaporation rate of moisture faster. On the contrary, for the area with less moisture, the amount of air flow passing through will be reduced, thereby making the evaporation rate of moisture slower, so that the moisture evaporation process of each area can be kept as uniform as possible. Among them, when the humidity detected by each humidity detection probe 132 reaches the qualified threshold, the measurement circuit of the controller 3 will detect that the current intensity of the humidity sensitive element connection circuit in each humidity detection probe 132 reaches the qualified threshold. At this time, the controller 3 determines that the baking work of the electronic components in the baking oven 4 is completed. At this time, the controller 3 will control the two electromagnetic push rods 72 to cut off the power, and the controller 3 controls the mesh belt conveyor assembly 2 to resume work until the two proximity switches 74 detect that the next group of positioning bars 75 move to the corresponding position. The controller 3 controls the mesh belt conveyor assembly 2 to suspend work, and then continues to bake the next group of preheated integrated circuit chips; The airflow discharged through the circular hole 133 of each detection box 131 will pass through the silica gel desiccant 143, and the silica gel desiccant 143 will absorb the moisture of the airflow, so as to dry the airflow. The dried airflow will flow back to the inside of the right fixed cover 111 through the connecting pipe 144, and will be sucked back into the baking box 4 by the fan 113, so that the airflow can circulate. Since the airflow may still contain a certain amount of heat after the heat exchange with the heat storage cotton 10, the airflow is returned to the fan 113, so that the heating rate of the refluxed airflow by the electric heating component 5 can be increased, so that the waste of heat energy can be further reduced. Secondly, the circulating airflow can reduce the filtering burden of the dust filter 152, so that the airflow quality remains sufficiently stable, which is conducive to the baking of the integrated circuit chip. When each humidity detection probe 132 is working, the controller 3 controls the luminous power of each lamp bead 162 according to the strength of the electrical signal output by each humidity detection probe 132. For example, when the humidity detected by a humidity detection probe 132 is too high, the strength of the electrical signal output to the controller 3 is too high. At this time, the controller 3 controls the luminous power of the corresponding lamp bead 162 to increase synchronously, thereby increasing the light intensity generated by the lamp bead 162. Therefore, the light intensity received by the photosensitive resistor 163 increases synchronously. The higher the humidity of the airflow, the more moisture the silica gel desiccant 143 absorbs. Therefore, the regeneration time needs to be shortened. At this time, after the light intensity irradiated to the photosensitive resistor 163 increases, the resistance of the photosensitive element of the photosensitive resistor 163 decreases. Therefore, the current intensity passed to the motor 164 through the controller 3 increases. At this time, the output power of the motor 164 increases, so the speed of the output shaft of the motor 164 increases. At this time, the frequency of the electrical signal output by the photoelectric encoder 165 to the controller 3 increases (the photoelectric encoder 165 includes a grating, a fixed shell, Rotating column, light source, diode and other structures), and the counting module of the controller 3 itself will increase the count by "1" each time it receives the electrical signal output by the photoelectric encoder 165. When the count reaches the set value (the set value can be set based on the material and quantity of the silica gel desiccant 143), the counting module of the controller 3 will feedback an electrical signal to its own control circuit, and the controller 3 will immediately send a prompt voice to the personnel through its own buzzer, so as to remind the personnel to regenerate the silica gel desiccant 143 (the silica gel desiccant 143 can be regenerated by heating the silica gel desiccant 143. The heat source for heating can be an electric heating component 5, and the fan 113 can be used to deliver hot air at a certain temperature. The wall of the connecting pipe 144 is provided with an exhaust pipe. The exhaust pipe and the connecting pipe 144 are provided with valves for discharging the water-containing airflow generated by the silica gel desiccant 143 to the external environment when the silica gel desiccant 143 is regenerated), and the operation of the device is suspended until the staff regenerates the silica gel desiccant 143 and presses the restart button of the controller 3 to resume operation.

[0027] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A thermal cycle device for baking electronic components, comprising two support frames (1) and a mesh belt conveyor assembly (2) installed between the two support frames (1), wherein a controller (3) is fixedly installed on the side wall of one of the support frames (1), characterized in that: Also includes: A baking oven (4) is clamped on the end surfaces of the two support frames (1); an electric heating component (5) is installed on the inner bottom of the baking oven (4); first material passage openings (6) are provided on both side walls of the baking oven (4); and the mesh belt of the mesh belt conveying component (2) passes through the two first material passage openings (6); and a positioning trigger mechanism (7) is installed on the baking oven (4); A heat storage box (8) is clamped on the end surfaces of the two support frames (1), and the heat storage box (8) is arranged on one side of the baking oven, and the two side walls of the heat storage box (8) are each provided with a second material passage opening (9), and the mesh belt of the mesh belt conveyor assembly (2) passes through the two second material passage openings (9), and the inner bottom of the heat storage box (8) is installed with heat storage cotton (10), and the top of the heat storage cotton (10) is in sliding contact with the mesh belt of the mesh belt conveyor assembly (2); An air supply unit (11), installed on a side wall of the baking oven (4), and used for supplying air into the interior of the baking oven (4); A plurality of split air outlet ducts (12) are fixedly plugged into a side wall of the baking box (4) away from the air supply unit (11), and an air outlet end of each split air outlet duct (12) passes through the heat storage box (8) and the heat storage cotton (10); A plurality of ventilation adjustment units (13), each installed at the air outlet end of each split air outlet pipe (12); The dehumidification reflow unit (14) is installed on the side wall of the heat storage box (8), and the air outlet end of the dehumidification reflow unit (14) is connected to the air inlet end of the air supply unit (11).

2. A thermal cycle device for baking electronic components according to claim 1, characterized in that: The positioning trigger mechanism (7) comprises a receiving groove (71) provided on the upper side wall of the two first material passage openings (6), and the two receiving grooves (71) are both fixedly installed with electromagnetic push rods (72), the telescopic ends of the two electromagnetic push rods (72) are both installed with sealing baffles (73), and the bottoms of the two sealing baffles (73) are both fixedly plugged with proximity switches (74), the outer surface of the mesh belt of the mesh belt conveying assembly (2) is installed with multiple groups of positioning strips (75), and the two positioning strips (75) in the same group are respectively arranged on the inner side of the corresponding first material passage openings (6), and the two electromagnetic push rods (72) and the two proximity switches (74) are both electrically connected to the controller (3).

3. A thermal cycle device for baking electronic components according to claim 1, characterized in that: The air supply unit (11) comprises a right fixed cover (111) fixedly mounted on the front side wall of the baking oven (4); a mounting sleeve (112) is fixedly mounted on the inner wall of the right fixed cover (111); a fan (113) is fixedly mounted inside the mounting sleeve (112); an air inlet (114) is provided on the side wall of the right fixed cover (111) at a position of an air inlet end of the fan (113); a plurality of air outlet holes (115) corresponding to the positions of the split air outlet duct (12) are provided on the side wall of the baking oven (4) at a position inside the right fixed cover (111); a dust filter assembly (15) is installed on one side of the air outlet end of the fan (113) inside the right fixed cover (111); and the fan (113) is electrically connected to the controller (3).

4. A thermal cycle device for baking electronic components according to claim 3, characterized in that: Each of the ventilation adjustment units (13) comprises a detection box (131) fixedly mounted on the air outlet end of the shunt air outlet duct (12); a humidity detection probe (132) is fixedly plugged into the side wall of the detection box (131); and a detection end of the humidity detection probe (132) is arranged inside the detection box (131); a plurality of circular holes (133) are provided at one end of the detection box (131) away from the shunt air outlet duct (12); an air inlet proportional solenoid valve (134) is installed at the air inlet end of each of the shunt air outlet ducts (12); and an air outlet proportional solenoid valve (135) is installed inside each of the air outlet holes (115); and the controller (3) controls the opening and closing degree of the corresponding air inlet proportional solenoid valve (134) and the air outlet proportional solenoid valve (135) according to the electrical signal output by the humidity detection probe (132).

5. A thermal cycle device for baking electronic components according to claim 4, characterized in that: The dehumidification reflow unit (14) comprises a left fixed cover (141) fixedly mounted on the front side wall of the heat storage tank (8), and a baffle (142) is fixedly mounted inside the left fixed cover (141), each of the detection boxes (131) is arranged between the baffle (142) and the heat storage tank (8), and a silica gel desiccant (143) is filled inside the left fixed cover (141) at a position on the side of the baffle (142) away from the heat storage tank (8), and a connecting pipe (144) is fixedly connected to the side wall of the left fixed cover (141), and the connecting pipe (144) is connected to the right fixed cover (111), and a humidity metering mechanism (16) is installed on the top of the heat storage tank (8).

6. A thermal cycle device for baking electronic components according to claim 4, characterized in that: The dust filter assembly (15) comprises a mounting frame (151) fixedly mounted on the inner wall of the right fixed cover (111); a dust filter net (152) is provided between the mounting frame (151) and the mounting sleeve (112); and a frame-shaped rubber pad (153) is fixedly provided between the outer edge of the side wall of the dust filter net (152) and the mounting frame (151).

7. A thermal cycle device for baking electronic components according to claim 6, characterized in that: The humidity metering mechanism (16) comprises an insulating box (161) fixedly mounted on the top of the heat storage box (8), and a plurality of lamp beads (162) are fixedly mounted on the inner top of the insulating box (161); the controller (3) controls the luminous power of each lamp bead (162) according to the electrical signal output by each humidity detection probe (132); a photosensitive resistor (163) is fixedly mounted on the inner bottom of the insulating box (161), and the light emitted by each lamp bead (162) is irradiated onto the photosensitive surface of the photosensitive resistor (163). A motor (164) is fixedly mounted on the side wall of the right fixed cover (111), and an output shaft of the motor (164) is rotatably connected to the side wall of the right fixed cover (111); a photoelectric encoder (165) is fixedly mounted on the inner wall of the right fixed cover (111), and the photoelectric encoder (165) is drivingly connected to the output shaft of the motor (164); the photosensitive resistor (163) is electrically connected to the motor (164) via the controller (3), and the photoelectric encoder (165) is electrically connected to the controller (3).

8. A thermal cycle device for baking electronic components according to claim 7, characterized in that: An eccentric wheel (17) is mounted on the shaft end of the output shaft of the motor (164), and a hemisphere (18) is fixedly mounted on the side wall of the dust filter (152); when the motor (164) drives the eccentric wheel (17) to rotate one circle, the eccentric wheel (17) squeezes the hemisphere (18) once.

Citation Information

Patent Citations

  • Heat energy recovering and utilizing device for thermal treatment furnace

    CN102384659A