Composite sensor and composite detection device

Abstract

The application belongs to the technical field of sensors, and particularly relates to a composite sensor and a composite detection device; the composite sensor comprises a spherical probe shell, a capacitive pressure sensor array located on the outer surface of the inner ring of the outer surface of the spherical probe shell, a flexible piezoelectric ultrasonic transducer array located on the outer ring of the inner surface of the spherical probe shell and penetrating the inner and outer surfaces of the spherical probe shell, and a block piezoelectric ceramic located on the inner surface of the inner ring of the spherical probe shell opposite to the capacitive pressure sensor array; the application enhances the adhesion to the surface to be detected through the design of the spherical probe shell; through the design of the capacitive pressure sensor array, the flexible piezoelectric ultrasonic transducer array and the block piezoelectric ceramic, the synchronous acquisition of the pressure distribution and the internal structure information is realized, the intuitiveness of bionic palpation and the high precision, non-radiation and other characteristics of ultrasonic imaging are fused, and the advantages of bionic palpation technology and ultrasonic imaging technology can be simultaneously exerted.

Description

Technical Field

[0001] The present invention belongs to the technical field of sensors, and in particular relates to a composite sensor and composite detection equipment. Background Art

[0002] Bionic palpation technology primarily simulates the human skin's ability to sense touch. Human skin possesses a complex sensory network, capable of accurately sensing and distinguishing various external stimuli, such as pressure, strain, temperature, and humidity. Bionic palpation sensors utilize flexible materials, piezoresistive effects, and piezoelectric effects to sense surface properties such as surface topography, hardness, and temperature. These bionic palpation sensors can be used in the medical field for palpation examinations, simulating a doctor's palpation technique to help doctors more accurately assess a patient's health.

[0003] Ultrasound imaging is a non-invasive, radiation-free medical imaging technology with high precision. It utilizes the reflection and propagation properties of ultrasound waves within the human body to form images of internal tissues. Ultrasound imaging can clearly show the structure, morphology, and location of internal tissues. Compared to radiation-intensive medical imaging technologies such as X-rays, ultrasound imaging is harmless to the human body and can be performed repeatedly without risk of radiation damage.

[0004] Currently, the diagnostic results of biomimetic palpation sensors rely heavily on the clinician's experience and subjective judgment. Meanwhile, ultrasound imaging technology exhibits low sensitivity in identifying small lesions, which may affect the accuracy of diagnostic results. Summary of the Invention

[0005] Based on the problems existing in the prior art, the present invention provides a composite sensor and a composite detection device.

[0006] In a first aspect of the present invention, the present invention provides a composite sensor comprising:

[0007] Spherical probe housing;

[0008] A capacitive pressure sensor array is located on the outer surface of the inner ring of the spherical probe housing;

[0009] The flexible piezoelectric ultrasonic transducer array is located on the outer ring of the spherical probe shell and penetrates the inner and outer surfaces of the spherical probe shell;

[0010] The bulk piezoelectric ceramic is located on the inner surface of the inner ring of the spherical probe housing opposite to the capacitive pressure sensor array.

[0011] Optionally, the bulk piezoelectric ceramic formed structure is a bulk piezoelectric ceramic array.

[0012] Optionally, the bulk piezoelectric ceramic and the capacitive pressure sensor array are fixed by an adhesive.

[0013] Optionally, the gap between capacitor plates of the capacitive pressure sensor array is smaller than half the wavelength of ultrasound.

[0014] Optionally, the capacitive pressure sensor array and the flexible piezoelectric ultrasonic transducer array work independently in time-sharing.

[0015] Optionally, the flexible piezoelectric ultrasonic transducer array is a piezoelectric micromachined ultrasonic transducer array or a capacitive micromachined ultrasonic transducer array.

[0016] Optionally, the spherical probe shell mimics the surface shape of a fingertip of a human finger.

[0017] In a second aspect of the present invention, the present invention further provides a composite detection device, comprising a detection device body and the composite sensor as described in the first aspect of the present invention, wherein at least a portion of the composite sensor is disposed in the detection device body.

[0018] Optionally, the detection device body includes an external control circuit and a control display component.

[0019] Beneficial effects of the present invention:

[0020] The above-mentioned composite sensor and composite detection equipment can be integrated into an integrated package by providing a spherical probe shell and a capacitive pressure sensor array, a flexible piezoelectric ultrasonic transducer array and a bulk piezoelectric ceramic deployed on the inner and outer rings of the spherical probe shell, so that the size of the composite sensor is very small, which is conducive to use in actual medical scenarios; the above-mentioned composite sensor and composite detection equipment integrate bionic palpation with ultrasonic imaging functions, further improving the accuracy of breast disease diagnosis, etc., and solving problems such as the high risk of misdiagnosis and radiation exposure risk of traditional single detection technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of the structure of a composite sensor provided in an embodiment of the present invention;

[0022] Figure 2 A schematic diagram of the internal structure of a composite sensor provided in an embodiment of the present invention;

[0023] Figure 3 A cross-sectional view of a composite sensor provided in an embodiment of the present invention;

[0024] Figure 4 This is another schematic diagram of the internal structure of the composite sensor provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0026] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the present invention.

[0027] At present, the existing methods of breast cancer screening mainly include clinical breast palpation, breast ultrasound examination, breast mammography, and breast MRI. Among them, clinical breast palpation refers to an examination method in which the doctor touches and presses the breast and surrounding tissues with his fingers to sense whether there are abnormal lumps, nodules or pain symptoms in the breast. It is simple, easy to perform and highly repeatable, but highly relies on the doctor's clinical experience and subjective judgment, and there is a risk of misdiagnosis; breast ultrasound examination is simple, safe, radiation-free, and highly repeatable, but has low sensitivity in identifying small lesions; breast mammography is a method recommended by international guidelines, but X-ray penetration is poor, and it is not easy to detect smaller lumps, which may lead to missed diagnosis in 30% of patients. In addition, it involves radiation, and the pros and cons of screening are controversial; breast MRI is expensive and is mainly used for screening high-risk individuals.

[0028] The composite sensor and composite detection device provided in this embodiment can provide medical personnel with detection information about the composite sensor and composite detection device when in contact with the surface to be detected of the detection object, such as the surface of breast tissue, thereby providing a safer and more accurate effect for the detection object.

[0029] Based on this, certain embodiments described herein provide a composite sensor and composite detection equipment, which are used in some disease screening, such as breast cancer screening; the present invention proposes an innovative bionic palpation and ultrasound composite sensor technology solution, which aims to overcome the limitations of existing technologies in a single detection mode, integrate the intuitiveness of bionic palpation with the high precision and radiation-free characteristics of ultrasound imaging, and can simultaneously give play to the advantages of palpation and ultrasound diagnosis, further improving the accuracy of breast disease diagnosis. The present invention adopts a clever integration of capacitive pressure sensor array and flexible piezoelectric ultrasonic transducer array technology, and the two are uniformly and densely deployed on the surface of the same spherical probe shell. The capacitive pressure sensor array is densely distributed, and the capacitance change is used to accurately sense the pressure distribution of the contact surface, thereby realizing pressure perception of the surface of the detection object; at the same time, the combination of the flexible piezoelectric ultrasonic transducer array and the bulk piezoelectric ceramic serves as an ultrasonic transceiver unit, which respectively completes the transmission and reception of ultrasound, and can achieve high-resolution ultrasound imaging, for example, imaging of the internal structure of the breast.

[0030] This embodiment provides a composite sensor, such as Figure 1-3 As shown, it includes a spherical probe shell 1; the spherical probe shell 1 is divided into an inner and outer ring, the inner ring of the spherical probe shell 1 refers to a relatively small spherical area close to the center of the spherical probe shell, and the outer ring of the spherical probe shell 2 refers to a relatively large spherical area away from the center of the spherical probe shell; a capacitive pressure sensor array 2 is located on the outer surface of the inner ring of the spherical probe shell 1; a flexible piezoelectric ultrasonic transducer array 3 is located on the outer ring of the spherical probe shell 1 and penetrates the inner and outer surfaces of the spherical probe shell; a bulk piezoelectric ceramic 4 is located on the inner surface of the inner ring of the spherical probe shell opposite to the capacitive pressure sensor array.

[0031] This embodiment enhances the fit with the surface being tested through the design of the spherical probe shell 1, which is more conducive to obtaining more accurate sensing detection results; since the spherical probe shell 1 is divided into two circles, the outer surface of the inner circle is provided with a capacitive pressure sensor array 2, which can accurately sense the pressure distribution and texture changes of the tissue, simulate and exceed the perception ability of traditional clinical palpation, and the inner surface of the inner circle is provided with a bulk piezoelectric ceramic 4; the bulk piezoelectric ceramic 4 capacitive pressure sensor array 2 serves as an ultrasonic transmitting transducer, emitting high-frequency ultrasonic pulses into the breast tissue; the outer circle is provided with a flexible piezoelectric ultrasonic transducer array 3, which can serve as an ultrasonic receiving transducer to receive signals reflected back from the inside of the breast tissue, thereby constructing a high-resolution ultrasonic image.

[0032] By setting the bulk piezoelectric ceramic 4 as an ultrasonic transmitting transducer, the conversion of electrical energy to mechanical energy is realized; the bulk piezoelectric ceramic 4 is used to realize the fine capture of the pressure distribution of the surface to be detected, simulating the delicate perception ability of biological palpation; and by setting the flexible piezoelectric ultrasonic transducer array 3 as an ultrasonic receiving transducer, the conversion of mechanical energy to electrical energy is realized, and the high-resolution internal structure imaging is achieved by virtue of the high efficiency, small size and other characteristics of the flexible piezoelectric ultrasonic transducer array 3; the capacitive pressure sensor array 2 is used to realize the fine capture of the pressure distribution of the surface to be detected, simulating the delicate perception ability of biological palpation, and can help doctors judge the health status of patients more accurately by simulating the doctor's palpation technique; the combination of the above sensors realizes the synchronous acquisition of internal structure information, integrates the intuitiveness of bionic palpation with the high precision and radiation-free characteristics of ultrasonic imaging, and can simultaneously give play to the advantages of bionic palpation technology and ultrasonic imaging technology.

[0033] It is understood that in the embodiment of the present application, the capacitive pressure sensor array 2 is composed of a plurality of uniformly arranged capacitive pressure sensors; the flexible piezoelectric ultrasonic transducer array 3 is composed of a plurality of uniformly arranged flexible piezoelectric ultrasonic transducers. The capacitive pressure sensor array 2 and the flexible piezoelectric ultrasonic transducer array 3 are not limited to square arrays, cylindrical arrays, or spherical arrays, but can also be arrays of other shapes; the capacitive pressure sensor array 2 and the flexible piezoelectric ultrasonic transducer array 3 designed with this uniform array layout ensure the richness and accuracy of the detection data.

[0034] In some embodiments, the spherical probe housing 1 is a shell structure with a certain thickness, and the spherical probe housing 1 is biomimetic of the surface shape of the human fingertip; the human fingertip is usually hemispherical or elliptical, with a smooth curve and a certain elasticity. In this embodiment, the spherical probe housing 1 is biomimetic to the surface shape of the human fingertip. This shape helps to increase the contact area with the object and improve the sensitivity of tactile perception. Specifically, the spherical probe housing 1 is a hemispherical cavity structure, the outer surface of its inner ring is distributed with a capacitive pressure sensor array 2, the inner surface of its inner ring is distributed with a block piezoelectric ceramic 4, and the inner and outer surfaces of its outer ring are penetrated by a flexible piezoelectric ultrasonic transducer array 3. This spherical probe housing 1 can enhance the fit with the surface to be detected. The surface to be detected in this embodiment can be the breast skin surface of the detection object.

[0035] In an embodiment of the present invention, a capacitive pressure sensor senses pressure by measuring changes in capacitance between capacitor plates. The gap between the capacitor plates is one of the key factors affecting capacitance changes. When the gap between the capacitor plates changes, the capacitance of the capacitor also changes, reflecting changes in pressure.

[0036] Based on this, this embodiment sets the gap between the capacitor plates of each capacitive pressure sensor in the capacitive pressure sensor array 2 to be less than half the wavelength of the ultrasonic wave. The half wavelength of the ultrasonic wave is expressed as λ / 2=v / f / 2, where λ refers to the propagation distance of the ultrasonic wave in one complete cycle, v is the speed of sound, and the unit is usually meters per second (m / s), and f is the frequency, and the unit is usually Hertz (Hz). When the gap between the capacitor plates of each capacitive pressure sensor is less than half the wavelength of the ultrasonic wave, the ultrasonic wave will not be reflected multiple times in the capacitive pressure sensor. This helps to improve the performance of the composite sensor, reduce signal interference and distortion, and thus improve ultrasonic imaging and obtain higher-quality detection data.

[0037] For example, the frequency of ultrasound is usually 7-13 MHz, and its propagation speed in air is 340 m / s. The propagation speed in materials such as silicon is much greater than this speed. Using air as an example, it is calculated that the range of the half-wavelength of ultrasound is 26-48 μm, and the gap between the capacitor plates of the capacitive pressure sensor can be 10 μm. At this time, the ultrasound will not produce multiple reflections in the capacitive pressure sensor.

[0038] In some embodiments, the capacitive pressure sensor array can be a collection of several capacitive pressure sensors, which are arranged in a flat and dispersed manner, and the electrode layers of the same polarity in all capacitive pressure sensors are connected by circuits and led to the outside for signal processing and measurement.

[0039] For example, the capacitive pressure sensor array is evenly distributed on the outer surface of the inner ring of the spherical probe housing 1 to form a matrix structure of rows and columns. Such an array can be used to monitor the pressure distribution over a large area or at a specific location.

[0040] Exemplarily, the capacitive pressure sensor array can also be made of flexible material, so that the entire capacitive pressure sensor array forms a matrix structure of rows and columns, can adapt to curved or non-planar surfaces, and can adapt to the outer surface of the inner ring of the spherical probe housing 1, so as to be able to biomimetic the surface shape of the fingertips of human fingers, thereby better fitting the human body parts.

[0041] In some embodiments, the capacitive pressure sensor array can be composed of an elastic diaphragm, a fixed electrode, a capacitor, an insulating medium, a circuit interface, and a lead or connector; the elastic diaphragm is the part of the capacitive pressure sensor array that is in direct contact with the detection object, and when the applied pressure acts on the diaphragm, it will deform. The fixed electrode corresponds to the elastic diaphragm and is one or more fixed electrodes, which together constitute a pair of plates of the capacitor. In some examples, the fixed electrode can also be a multi-layer structure to adapt to different measurement requirements. The capacitor consists of the elastic diaphragm (as a movable electrode) and a fixed electrode. When the elastic diaphragm is deformed by external pressure, the distance between it and the fixed electrode changes, thereby changing the capacitance value of the capacitor. This capacitance change can be used to calculate the magnitude of the pressure applied. The insulating medium is located between the two plates, plays the role of electrical isolation, and its dielectric constant affects the capacitance value of the capacitor. In some examples, air itself can act as an insulating medium; while in other examples, solid or liquid materials may be used to enhance performance; the circuit interface may include an oscillator, a demodulator, or other types of signal conditioning circuits to accurately read and amplify tiny capacitance changes, and to convert physical capacitance changes into a usable electrical signal output; the leads or connectors are used to connect the capacitive pressure sensor array to an external circuit so that data can be transmitted for further analysis or display.

[0042] In some embodiments, to reduce signal crosstalk between the capacitive pressure sensor array and the flexible piezoelectric ultrasonic transducer array, this embodiment employs dual-mode time-sharing independent operation. The capacitive pressure sensor array and the flexible piezoelectric ultrasonic transducer array operate independently in time-sharing. The two sensor arrays are not activated or operated simultaneously, but instead operate separately in a specific time sequence. This time-sharing independent operation method ensures that each sensor array can achieve optimal performance in its specific application scenario while avoiding interference between them.

[0043] Exemplary methods for achieving time-sharing and independent operation of the capacitive pressure sensor array and the flexible piezoelectric ultrasonic transducer array can employ a time-switching circuit. This circuit can control the on / off states of the different sensor arrays according to a preset time sequence; for example, at time t1, the capacitive pressure sensor array is turned on, while the flexible piezoelectric ultrasonic transducer array is turned off; and at time t2, the capacitive pressure sensor array is turned off, while the flexible piezoelectric ultrasonic transducer array is turned on. This ensures that each sensor array can achieve optimal performance while avoiding interference between them.

[0044] In some embodiments, the flexible piezoelectric ultrasonic transducer array can be composed of flexible electrodes and a flexible substrate. The flexible electrodes are the key electrical connection components of the flexible ultrasonic transducer. For example, metal nanowires or nanoparticles can be constructed into wavy, serpentine, or mesh shapes to convert vertical movement into tensile strain, achieving stretchability. New materials with flexible and stretchable properties, such as organic semiconductors, conductive polymers, carbon nanotubes, and graphene, can also be used. The flexible substrate enables it to be adhered to irregularly shaped test objects, such as human skin, ensuring that the flexible piezoelectric ultrasonic transducer array can operate stably and provide accurate ultrasonic signals.

[0045] In some embodiments, the flexible piezoelectric ultrasonic transducer array is a piezoelectric micromachined ultrasonic transducer array (PMUT array) or a capacitive micromachined ultrasonic transducer array (CMUT array). The PMUT array works based on the piezoelectric effect. When the ultrasonic wave emitted by the ultrasonic transmitting transducer acts on the piezoelectric material of the piezoelectric micromachined ultrasonic transducer array, it will cause the deformation of the piezoelectric material, thereby generating a voltage signal, realizing the conversion of mechanical energy to electrical energy. Since the PMUT array has high energy conversion efficiency and receiving sensitivity, when the flexible piezoelectric ultrasonic transducer array adopts the PMUT array, high-resolution internal structure imaging can be achieved. The CMUT array is manufactured based on the capacitive sensing principle and micro-mechanical (MEMS) technology. When the ultrasonic wave emitted by the ultrasonic transmitting transducer acts on the thin film of the capacitive micromachined ultrasonic transducer array, the thin film receives the ultrasonic wave and vibrates under the action of the sound pressure, causing the capacitance value of the capacitor to change, thereby realizing the conversion of mechanical energy into electrical energy. Since the CMUT array has the advantages of wide bandwidth, high energy conversion efficiency, high receiving sensitivity, and high detection accuracy, when the flexible piezoelectric ultrasonic transducer array adopts the CMUT array, high-resolution internal structure imaging can be achieved.

[0046] It should be noted that the flexible piezoelectric ultrasonic transducer array of this embodiment is not limited to a piezoelectric micromachined ultrasonic transducer array (PMUT array) or a capacitive micromachined ultrasonic transducer array (CMUT array). It can also be a flexible device that can serve as an ultrasonic receiving transducer. Due to the characteristics of these flexible piezoelectric ultrasonic transducer arrays, such as high receiving sensitivity, small size, and controllable number of array elements, they can achieve high-resolution imaging of internal structures.

[0047] In some embodiments, the piezoelectric ceramic block 4 can be made of a piezoelectric material, such as PZT-5H. Such piezoelectric materials exhibit a piezoelectric effect, enabling the conversion of mechanical signals into electrical signals. When subjected to an electric field, the piezoelectric material mechanically deforms and emits ultrasonic waves. Conversely, when subjected to mechanical pressure, the piezoelectric material generates an electrical signal.

[0048] In some embodiments, the bulk piezoelectric ceramic 4 can be a formed bulk piezoelectric ceramic structure. This means that the bulk piezoelectric ceramic 4 is a complete piezoelectric ceramic block, ensuring that there are no seams or joints within the piezoelectric ceramic block, thereby improving its mechanical strength, reliability, and performance consistency. In this form, the piezoelectric ceramic block can function as a single unit to exert its piezoelectric effect. For example, a complete piezoelectric ceramic block can sense external pressure and convert it into an electrical signal for output.

[0049] In some embodiments, the bulk piezoelectric ceramic 4 may also be a bulk piezoelectric ceramic array 41, such as Figure 4 As shown, each bulk piezoelectric ceramic array comprises multiple piezoelectric ceramic blocks arranged and combined in a certain pattern. This type of bulk piezoelectric ceramic array enables more complex control and response. Bulk piezoelectric ceramic arrays can precisely control the direction of ultrasonic emission, enabling precise positioning and detection of the surface to be inspected. Bulk piezoelectric ceramic arrays also achieve higher sensitivity and a wider dynamic range.

[0050] Exemplarily, each independent array element in the bulk piezoelectric ceramic array 41 transmits an ultrasonic signal to the detection object in turn, and the echo signal is returned after being reflected by the detection object. After the flexible piezoelectric ultrasonic transducer array 3 located on the outer ring of the spherical probe shell 1 receives the echo signal, the capacitive pressure sensor array 2 starts working again; this cycle realizes the composite sensing function.

[0051] It is understandable that because multiple bulk piezoelectric ceramics can operate simultaneously, arrayed piezoelectric ceramics can capture even weaker signal changes and process and analyze them more accurately. Furthermore, arrayed piezoelectric ceramics can withstand greater mechanical stress and temperature changes, thereby improving their reliability and stability in composite sensors.

[0052] In some embodiments, the bulk piezoelectric ceramic 4 and the capacitive pressure sensor array 2 are fixed by an adhesive; the adhesive has good adhesion, temperature resistance, and chemical stability to ensure close bonding and long-term reliability between the bulk piezoelectric ceramic 4 and the capacitive pressure sensor array 2, so as to facilitate the ingenious integration of the capacitive pressure sensor array and the flexible piezoelectric ultrasonic transducer array technology, and both are uniformly and densely deployed on the same spherical probe housing surface to achieve high-resolution ultrasonic imaging and pressure sensing. Exemplarily, the adhesive can be an adhesive material such as epoxy resin glue, phenolic resin glue, and silicone rubber.

[0053] In some embodiments, this embodiment further provides a composite detection device, including a detection device body and the composite sensor, wherein at least a portion of the composite sensor is disposed within the detection device body.

[0054] In some embodiments, the detection device body includes a detection shell, an external control circuit, an image display component, and a signal and system processing circuit.

[0055] In some embodiments, one side of the composite sensor is attached to the surface of the breast skin of the test subject. An external control circuit activates the ultrasonic transceiver unit, and the piezoelectric ceramic block (or block array) transmits ultrasonic waves. After reflection from human tissue, the ultrasonic signals are received by a flexible piezoelectric ultrasonic transducer array, such as a PMUT (CMUT) unit. The external control circuit then deactivates the ultrasonic transceiver unit and activates the capacitive pressure sensor array to collect pressure signals. The signals collected by the flexible piezoelectric ultrasonic transducer and the capacitive pressure sensor array are sent to the back-end signal and system processing circuit for signal processing and image conversion to obtain accurate test results, which are then displayed on an image display component.

[0056] In some embodiments, the external control circuit is responsible for controlling the composite detection device's on / off functions, setting parameters, and connecting and communicating with external devices. This ensures the composite detection device operates according to predetermined modes and requirements, controlling the flexible piezoelectric ultrasonic transducer and the capacitive pressure sensor array's primary piezoelectric ceramic block to achieve their respective functions. This integration of biomimetic palpation and ultrasonic imaging further improves the accuracy of breast disease diagnosis and other issues, addressing the high risk of misdiagnosis and radiation exposure associated with traditional single-detection technologies.

[0057] In some embodiments, the signal and system processing circuit can receive the signal output by the sensor, perform amplification, filtering, analog-to-digital conversion and other processing, and finally output the processed data to the image display component or external device. It can include an amplifier, a filter, an analog-to-digital converter (ADC), a microprocessor (such as a single-chip microcomputer, DSP, etc.) and related interface circuits. The weak signal output by the composite sensor is first amplified and filtered to improve the signal-to-noise ratio and anti-interference ability of the signal. Then, the analog signal is converted into a digital signal through the analog-to-digital converter for subsequent digital signal processing. The microprocessor is responsible for executing various algorithms and programs, further analyzing and processing the digital signal, and finally obtaining the required detection results, which can be presented in the form of graphics or numbers through the image display component.

[0058] In some embodiments, the image display component is used to display data or images detected by the sensor in real time, allowing users to intuitively understand the status or characteristics of the detected object. It may include a display screen (such as an LCD, LED, OLED, etc.) as well as associated drive circuits and image processing modules. The data captured by the composite sensor is processed and presented in graphical or numerical form via the image display component. Users, such as doctors, can quickly judge and analyze the test results by observing the information on the image display component.

[0059] The composite sensor and composite detection equipment of the embodiments of the present invention integrate bionic palpation with ultrasonic imaging functions, further improving the accuracy of breast disease diagnosis, etc., and solving problems such as the high risk of misdiagnosis and radiation exposure risk of traditional single detection technology.

[0060] In the description of the present invention, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inside", "outside", "front", "center", "both ends", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0061] In the present invention, unless otherwise clearly stipulated and limited, the terms "installation", "setting", "connection", "fixation", "rotation" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0062] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A composite sensor, characterized in that: include: A spherical probe shell, wherein the spherical probe shell mimics the surface shape of a human fingertip; A capacitive pressure sensor array is located on the outer surface of the inner ring of the spherical probe housing, wherein the gap between the capacitor plates of the capacitive pressure sensor array is less than half the wavelength of the ultrasonic wave; The flexible piezoelectric ultrasonic transducer array is located on the outer ring of the spherical probe housing and penetrates the inner and outer surfaces of the spherical probe housing. The capacitive pressure sensor array and the flexible piezoelectric ultrasonic transducer array work independently in a time-sharing manner. The capacitive pressure sensor array captures the pressure distribution of the surface to be detected, simulating the perception ability of biological palpation. The bulk piezoelectric ceramic is located on the inner surface of the inner ring of the spherical probe housing opposite to the capacitive pressure sensor array. The bulk piezoelectric ceramic serves as an ultrasonic transmitting transducer to emit high-frequency ultrasonic pulses, and the flexible piezoelectric ultrasonic transducer array serves as an ultrasonic receiving transducer to receive the reflected signals, thereby constructing a high-resolution ultrasonic image.

2. The composite sensor according to claim 1, characterized in that The bulk piezoelectric ceramic is a bulk piezoelectric ceramic formed structure or a bulk piezoelectric ceramic array.

3. The composite sensor according to claim 2, characterized in that The bulk piezoelectric ceramic and the capacitive pressure sensor array are fixed by an adhesive.

4. The composite sensor according to claim 1, characterized in that The flexible piezoelectric ultrasonic transducer array is a piezoelectric micromachined ultrasonic transducer array or a capacitive micromachined ultrasonic transducer array.

5. A composite detection device, characterized in that: The device comprises a detection device body and a composite sensor according to any one of claims 1 to 4, wherein at least a portion of the composite sensor is arranged in the detection device body.

6. The composite detection device according to claim 5, characterized in that: The detection device body includes a detection shell, an external control circuit, an image display component, and a signal and system processing circuit.

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