Furnace Nose Airtightness Detection Method and System Applied to Aluminum-Coated Silicon Process

Abstract

This application relates to the technical field of airtightness detection of a furnace nose, and specifically relates to a method and system for detecting the airtightness of a furnace nose applied to an aluminized silicon process. The method includes: obtaining the gas pressure, hydrogen content, and oxygen content at each moment of each cycle at the gas outlet of the furnace nose, the temperature at each moment within each cycle inside the furnace nose, and the external air pressure at each moment within each cycle in the air outside the furnace nose; determining the relative air pressure difference of each cycle; determining the air pressure deviation amount of each cycle; determining the relative trend amount of each cycle; determining the air pressure influence factor of each cycle; determining the hydrogen stability of each cycle; determining the gas fluctuation degree of each cycle; determining the leakage coefficient of each cycle, and detecting the airtightness of the furnace nose. This application can monitor the airtightness of the furnace nose in real time, improve the accuracy of detecting the airtightness of the furnace nose, and help improve the product quality and production efficiency.

Description

Technical Field

[0001] This application relates to the technical field of airtightness detection of furnace noses, and specifically relates to a method and system for detecting the airtightness of furnace noses applied to the aluminized silicon process. Background Art

[0002] With the continuous development of semiconductor technology, the aluminized silicon (Al-Si) process plays an increasingly important role in integrated circuit manufacturing. The aluminized silicon process is mainly used for the formation of metal interconnection layers. The aluminized silicon plate has good heat resistance, heat reflectivity, and corrosion resistance, which can improve the electrical conductivity and reliability of chips. During the production process of aluminized silicon, the performance of the annealing furnace and its connecting component - the furnace nose is crucial. As a key component connecting the annealing furnace and the exhaust system, when the furnace nose is operating, the internal temperature will cause thermal deformation of the flange inside the furnace nose, thus affecting the airtightness of the furnace nose, and directly affecting the quality and efficiency of the aluminized silicon process. With the continuous improvement of the performance requirements for semiconductor devices, ensuring the airtightness of the furnace nose has become a key link in improving the yield and production efficiency of the production line.

[0003] Currently, traditional methods for detecting the airtightness of furnace noses judge whether there is leakage by detecting the change in gas pressure. However, since the gas pressure inside the furnace nose is greatly affected by temperature, and the internal temperature of the furnace nose is not fixed during operation, the gas pressure is constantly changing, thus affecting the accuracy of airtightness detection. Secondly, traditional detection methods often need to pause the working state of the furnace nose for airtightness detection, which affects the continuity and efficiency of the production line, and thus cannot meet the requirements of modern semiconductor manufacturing for high-quality and high-efficiency production. Summary of the Invention

[0004] To solve the above technical problems, a method and system for detecting the airtightness of furnace noses applied to the aluminized silicon process are provided to solve the existing problems.

[0005] The solution of this application to solve the technical problems is to provide a method and system for detecting the airtightness of furnace noses applied to the aluminized silicon process, including the following steps:

[0006] In a first aspect, an embodiment of this application provides a method for detecting the airtightness of furnace noses applied to the aluminized silicon process, and the method includes the following steps:

[0007] Obtain the gas pressure, hydrogen content, and oxygen content at each moment in each cycle at the gas outlet of the furnace nose, the temperature at each moment in each cycle inside the furnace nose, and the external air pressure at each moment in each cycle in the external air of the furnace nose;

[0008] Determine the relative air pressure difference for each cycle according to the difference changes of the gas pressure and the external pressure at different moments within each cycle; analyze the offset of the gas pressure at all moments of each cycle, and determine the air pressure deviation amount for each cycle in combination with the relative air pressure difference;

[0009] Determine the relative trend amount for each cycle according to the change trend of the gas pressure at all moments within each cycle, and in combination with the air pressure deviation amount; analyze the correlation between the gas pressure and the temperature at all moments within each cycle, and determine the air pressure influence factor for each cycle in combination with the relative trend amount;

[0010] Analyze the change of the hydrogen content between different moments within each cycle to determine the hydrogen stability of each cycle; determine the gas fluctuation degree of each cycle according to the discrete situation of the oxygen content at all moments of each cycle and the hydrogen stability, and in combination with the air pressure influence factor, determine the leakage coefficient of each cycle to detect the airtightness of the furnace nose.

[0011] Preferably, the determination of the relative air pressure difference for each cycle includes:

[0012] Record the difference between the gas pressure at the first moment and the external air pressure within each cycle as the initial air pressure difference;

[0013] Record the difference between the gas pressure at the last moment and the external air pressure within each cycle as the end air pressure difference;

[0014] Take the difference between the end air pressure difference and the initial air pressure difference as the relative air pressure difference for each cycle.

[0015] Preferably, the determination of the air pressure deviation amount for each cycle includes:

[0016] Calculate the average deviation of the gas pressure at all moments within each cycle;

[0017] Calculate the product of the average deviation and the relative air pressure difference, and record it as the first product. Take the calculation result of the exponential function with the natural constant as the base and the first product as the exponent as the air pressure deviation amount for each cycle.

[0018] Preferably, the determination of the relative trend amount for each cycle includes:

[0019] Perform trend decomposition on the gas pressure at all moments within each cycle to obtain a trend sequence; form a two-dimensional array with the position serial numbers and elements of each element in the trend sequence;

[0020] Perform linear fitting on all the two-dimensional arrays in the trend sequence to obtain the slope of the fitting straight line;

[0021] Take the product of the absolute value of the slope and the air pressure deviation amount as the relative trend amount for each period.

[0022] Preferably, the determination of the air pressure influence factor for each period includes:

[0023] Calculate the correlation degree between the gas pressure and the temperature at all moments within each period;

[0024] Take the ratio of the relative trend amount to the correlation degree as the air pressure influence factor for each period.

[0025] Preferably, the determination of the hydrogen stability for each period includes:

[0026] Calculate the ratio of the hydrogen content at each moment within each period to its adjacent moment, denoted as the relative content ratio;

[0027] Calculate the mean value of the relative content ratios at all moments within each period as the hydrogen stability for each period.

[0028] Preferably, the determination of the gas fluctuation degree for each period includes:

[0029] Calculate the dispersion degree of the oxygen content at all moments within each period;

[0030] Take the ratio of the dispersion degree to the hydrogen stability as the gas fluctuation degree for each period.

[0031] Preferably, the leakage coefficient for each period is the product of the air pressure influence factor and the gas fluctuation degree.

[0032] Preferably, the detection of the airtightness of the furnace nose includes:

[0033] Calculate the mean value of the leakage coefficients of multiple periods before each period, denoted as the evaluation factor;

[0034] If the leakage coefficient of a certain period is greater than the evaluation factor, the airtightness of the furnace nose is poor; otherwise, the airtightness of the furnace nose is good.

[0035] In a second aspect, an embodiment of the present application further provides a furnace nose airtightness detection system applied to the aluminized silicon process, including a memory, a processor, and a computer program stored in the memory and running on the processor. When the processor executes the computer program, the steps of the furnace nose airtightness detection method applied to the aluminized silicon process described in any one of the above are implemented.

[0036] The present application has at least the following beneficial effects:

[0037] This application determines the relative air pressure difference of each cycle according to the difference changes between the gas pressure and the external pressure at different times within each cycle; analyzes the offset of the gas pressure at all times of each cycle, and combines the relative air pressure difference to determine the air pressure deviation of each cycle. The beneficial effect is that it considers the air pressure difference inside and outside the furnace nose and the distribution fluctuation of the gas pressure inside the furnace nose. By increasing the influence of the gas pressure change, it is beneficial to enhance the sensitivity of gas leakage detection; according to the change trend of the gas pressure at all times within each cycle, and combining the air pressure deviation, determines the relative trend of each cycle; analyzes the correlation between the gas pressure and temperature at all times within each cycle, and combines the relative trend to determine the air pressure influence factor of each cycle. The beneficial effect is that it considers the change trend of the gas pressure and the influence of the gas pressure fluctuation by the temperature change to reflect the fluctuation degree of the gas pressure inside the furnace nose; analyzes the change of the hydrogen content between different times within each cycle to determine the hydrogen stability of each cycle; according to the discrete situation of the oxygen content at all times of each cycle and the hydrogen stability, determines the gas fluctuation degree of each cycle, and combines the air pressure influence factor to determine the leakage coefficient of each cycle to detect the airtightness of the furnace nose. The beneficial effect is that it considers the change trend of the oxygen content and hydrogen content inside the furnace nose under different pressure states to reflect the gas leakage situation of the furnace nose. By real-time monitoring the change of the operation data of the furnace nose, there is no need to pause the furnace nose, which ensures the continuity and efficiency of production. Therefore, the airtightness of the furnace nose can be detected in time during production, the airtightness of the furnace nose can be monitored in real time, and the furnace nose can be repaired in time, thereby improving the accuracy of the airtightness detection of the furnace nose, improving the product quality and production efficiency, and helping to reduce the maintenance cost of the furnace nose. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] The following further describes in detail the method for detecting the airtightness of the furnace nose applied to the aluminized silicon process according to the present application with reference to the accompanying drawings.

[0039] Figure 1 It is a flowchart of the steps of the method for detecting the airtightness of the furnace nose applied to the aluminized silicon process provided by the embodiment of the present application;

[0040] Figure 2 It is a flowchart of the steps of the method for obtaining the air pressure influence factor of each cycle provided by the embodiment of the present application;

[0041] Figure 3 It is a flowchart of the steps of the method for obtaining the leakage coefficient of each cycle provided by the embodiment of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0042] In order to make the objectives, technical solutions and advantages of the present application more clearly understood, the following further elaborates in detail on the furnace nose airtightness detection method and system applied to the aluminized silicon process proposed in the present application in conjunction with the accompanying drawings and implementation examples. It should be understood that the specific implementation examples described herein are merely used to explain the present application and are not used to limit the present application.

[0043] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which this application belongs.

[0044] Please refer to Figure 1 , which shows the step flowchart of the furnace nose airtightness detection method applied to the aluminized silicon process provided by an embodiment of the present application. The method includes the following steps:

[0045] Step 1, obtain the gas pressure, hydrogen content, and oxygen content at each moment of each cycle at the gas outlet of the furnace nose, the temperature at each moment within the furnace nose in each cycle, and the external air pressure at each moment in the external air of the furnace nose in each cycle.

[0046] The high temperature inside the furnace nose will cause thermal deformation of the flange inside the furnace nose, thereby affecting the airtightness of the furnace nose. By adding a combined gasket between the flanges inside the furnace nose, the sealing compensation amount between the flanges is increased, thereby reducing the maintenance cost of the furnace nose. In the present application, a combined gasket is added at the flange of the furnace nose head. The combined gasket is mainly made of copper alloy and supplemented with a high-temperature resistant silicon fiber board through a process. Among them, in this embodiment, the thickness of the copper alloy plate is 1.5 mm, the thickness of the silicon fiber board is 6 mm, the thickness of the combined gasket is 23 mm, the total weight of the combined gasket is 22 kg / pc, and the pre-tightening force of the fastening bolt is 400 N·m (M16). Copper alloy has good high-temperature resistance and good flexibility. When the flange of the furnace nose head is deformed, the combined gasket adapts to the space that needs to be compensated according to the different positions of the deformation, so that the combined gasket can closely fit the flange surface, thereby ensuring the airtightness inside the furnace nose. However, due to the long-term operation of the furnace nose, the flange deformation may cause the fit between the flange and the combined gasket to gradually deteriorate. When air leakage occurs inside the furnace nose, it is necessary to repair the furnace nose in time to ensure that the airtightness inside the furnace nose is always in a good state.

[0047] Based on the above analysis, in order to detect the airtightness inside the furnace nose, a pressure sensor, a hydrogen detector and an oxygen analyzer are installed at the gas outlet of the furnace nose to collect the gas pressure, hydrogen content and oxygen content of the furnace nose respectively; a thermocouple is installed inside the furnace nose to collect the temperature inside the furnace nose. At the same time, the atmospheric pressure in the air outside the furnace nose is measured by a barometer, and the collection time interval is t and the collection period is T. According to the collection time sequence, the gas pressure, hydrogen content and oxygen content at each moment within each period at the gas outlet of the furnace nose, the temperature at each moment within each period inside the furnace nose, and the external air pressure at each moment within each period in the air outside the furnace nose are obtained.

[0048] Preferably, in this embodiment, the collection time interval is 1 s and the collection period is 10 min. As other implementation manners, the implementer can set it by himself according to the actual situation.

[0049] So far, the gas pressure, hydrogen content and oxygen content at each moment within each period at the gas outlet of the furnace nose, the temperature at each moment within each period inside the furnace nose, and the external air pressure at each moment within each period in the air outside the furnace nose are obtained.

[0050] Step 2: Determine the relative air pressure difference of each period according to the difference change situation of the gas pressure and the external pressure at different moments within each period; analyze the deviation situation of the gas pressure at all moments of each period, and combine the relative air pressure difference to determine the air pressure deviation amount of each period; according to the change trend of the gas pressure at all moments within each period, and combine the air pressure deviation amount to determine the relative trend amount of each period; analyze the correlation between the gas pressure and the temperature at all moments within each period, and combine the relative trend amount to determine the air pressure influence factor of each period.

[0051] In the aluminized silicon process, the airtightness of the furnace nose has a great impact on the product quality. If there is a leakage in the furnace nose, that is, when the airtightness is poor, the inside of the furnace nose will exchange with the outside air, resulting in an increase in the oxygen content inside the furnace nose. The oxides generated by the oxidation reaction of oxygen with metal substances will affect the purity and uniformity of the aluminized silicon coating. Therefore, when detecting the airtightness of the furnace nose, the airtightness of the furnace nose is often judged according to the fluctuation of the gas pressure. However, in addition to leakage causing gas pressure fluctuations, the gas pressure is also affected by various factors. For example, when detecting the gas pressure, the gas is very sensitive to temperature changes. When the temperature rises, the gas molecules move more violently, the density will decrease, and the gas pressure will increase; on the contrary, when the temperature drops, the density will increase and the gas pressure will decrease; that is, there is a positive correlation between the gas pressure and the temperature.

[0052] Secondly, due to the low gas density, strong permeability and good fluidity, it shows high volatility in the furnace nose. The more violent the gas fluctuation is, the more difficult it is for the gas pressure to stabilize. At this time, there is no trend change in the fluctuation of gas pressure, that is, the gas pressure fluctuates irregularly around a pressure value, and the fluctuation amplitude is small.

[0053] Further, the step flow chart of the method for obtaining the air pressure influence factor of each cycle provided in the embodiment of the present application is as follows: Figure 2 shown.

[0054] Based on the above analysis, the gas pressure fluctuations and the changes in gas pressure and temperature inside the furnace nose are analyzed to determine the gas pressure influencing factor to reflect the fluctuation characteristics of the gas pressure inside the furnace nose, specifically:

[0055] The trend decomposition algorithm is used to decompose the gas pressure at all times in each cycle, and the trend sequence is obtained in chronological order;

[0056] Preferably, in this embodiment, an STL decomposition algorithm (Seasonal and Trend decomposition using Loess) is adopted, wherein the STL decomposition algorithm is a well-known technology and will not be described in detail herein.

[0057] The position number of each element in the trend sequence and its elements form a two-dimensional array;

[0058] Performing linear fitting on all two-dimensional arrays in the trend sequence to obtain the slope of the fitting line;

[0059] Preferably, in this embodiment, the least square method is used for linear fitting, wherein the least square method is a well-known technology and will not be described in detail here.

[0060] Calculate the correlation between gas pressure and temperature at all times in each cycle;

[0061] Preferably, in this embodiment, the Pearson correlation coefficient between the gas pressure and the temperature at all times in each cycle is calculated, wherein the Pearson correlation coefficient is a well-known technology and will not be described in detail here. As other implementation methods, the implementer may adopt other methods of the prior art, such as the Spearman correlation coefficient, cosine similarity, etc., and this embodiment does not impose any special restrictions on this.

[0062] The difference between the gas pressure and the external air pressure at the first moment in each cycle is recorded as the initial air pressure difference;

[0063] The difference between the gas pressure at the last moment of each cycle and the external air pressure is recorded as the final air pressure difference;

[0064] Preferably, in this embodiment, the difference between the gas pressure at the first moment in each period and the external air pressure is denoted as the initial air pressure difference; the difference between the gas pressure at the last moment in each period and the external air pressure is denoted as the end air pressure difference.

[0065] The difference between the end air pressure difference and the initial air pressure difference is taken as the relative air pressure difference for each period;

[0066] Preferably, in this embodiment, the absolute value of the difference between the end air pressure difference and the initial air pressure difference is taken as the relative air pressure difference for each period.

[0067] Calculate the average deviation of the gas pressure at all moments in each period;

[0068] It should be noted that the calculation of the average deviation is a well-known technology, and the specific calculation method is: , where represents the average deviation, represents the th data, represents the mean value of all data, represents the number of all data.

[0069] Calculate the product of the average deviation and the relative air pressure difference, denoted as the first product, and take the calculation result of the exponential function with the natural constant as the base and the first product as the exponent as the air pressure deviation amount for each period;

[0070] Take the product of the absolute value of the slope and the air pressure deviation amount as the relative trend amount for each period;

[0071] Take the ratio of the relative trend amount to the degree of correlation as the air pressure influence factor for each period;

[0072] Preferably, in this embodiment, the calculation formula for the air pressure influence factor for each period is: , where is the air pressure influence factor for the th period, is the average deviation of the gas pressure at all moments in the th period, is the initial air pressure difference for the th period, is the end air pressure difference for the th period, is the absolute value of the slope of the fitting line for the th period, is the degree of correlation for the th period, is a preset value greater than to avoid a denominator of 0, and its value range is within In this embodiment, takes the value of 1. As other implementation manners, the implementer can set it according to the actual situation. is an exponential function with the natural constant as the base; secondly, is the relative air pressure difference, is the first product, is the air pressure deviation amount, is the relative trend amount.

[0073] It should be noted that the role of the exponential function is to increase the influence of gas pressure fluctuations. Since when a leakage occurs, it mainly causes changes in gas pressure fluctuations, so by increasing the influence of gas pressure fluctuations, it is more conducive to enhancing the sensitivity of gas leakage detection. The greater the degree of correlation, the greater the influence of the gas pressure in the furnace nose on temperature changes. If the temperature change in the furnace nose is relatively stable and there is no gas leakage in the furnace nose, the gas pressure fluctuation is small, and the mean value 、the relative air pressure difference, and the absolute value of the slope are all small, the degree of correlation is large, and the obtained air pressure influence factor is small, indicating that the airtightness of the furnace nose is good; if the temperature change in the furnace nose is large, it will make the difference in gas molecule movement obvious, and the gas pressure fluctuation is large, then the mean value 、the relative air pressure difference, and the absolute value of the slope all increase. However, when the temperature change in the furnace nose is large, the leakage of the furnace nose will cause a significant change in gas pressure, and the drastic temperature change will further exacerbate this change, resulting in more intense pressure fluctuations. At this time, the gas pressure fluctuation caused by the leakage of the furnace nose is more intense than that caused by the non-leakage of the furnace nose. Therefore, the greater the air pressure influence factor, the worse the airtightness of the furnace nose; secondly, if the degree of correlation is smaller, it means that the influence of the gas pressure in the furnace nose on temperature changes is smaller. If the mean value 、the relative air pressure difference, and the absolute value of the slope are large, it means that the gas pressure fluctuation is large, and the obtained air pressure influence factor is even larger, which means that the gas pressure fluctuation in the furnace nose is not caused by temperature, and it is very likely that the airtightness in the furnace nose is poor. By analyzing the ratio of the gas pressure fluctuation situation to the degree of correlation, the influence of temperature on gas pressure is eliminated. Therefore, through the air pressure influence factor, the change situation of gas pressure is reflected.

[0074] So far, the air pressure influence factor for each cycle is obtained.

[0075] Step 3: Analyze the change in hydrogen content at different times within each cycle to determine the hydrogen stability of each cycle; based on the discrete situation of the oxygen content at all times in each cycle and the hydrogen stability, determine the gas fluctuation degree of each cycle, and in combination with the air pressure influence factor, determine the leakage coefficient of each cycle to detect the airtightness of the furnace nose.

[0076] Furthermore, in combination with the change in hydrogen content and oxygen content in the furnace nose, further detect the airtightness of the furnace nose. When the furnace nose is working, a mixed gas of nitrogen and hydrogen is filled into the furnace nose as a protective gas to prevent the oxidation of the aluminized silicon surface. At the same time, in a high-temperature environment, hydrogen will also react with the already formed oxides to ensure the quality of the aluminized silicon. Under normal circumstances, when there is no leakage in the furnace nose, if hydrogen does not react with the oxides, the hydrogen content is basically stable or has a small fluctuation; if hydrogen reacts with the oxides, the hydrogen content will decrease, but since the consumption of chemical substances by chemical reactions is relatively stable, the reduction amount of hydrogen content per unit time is also relatively stable.

[0077] Secondly, when detecting the airtightness of the furnace nose, since the oxygen content in the furnace nose is small, when there is a leakage in the furnace nose, gas exchange occurs between the inside and outside of the furnace nose, which will increase the oxygen content in the furnace nose, so whether there is a leakage is determined by monitoring the change in oxygen content. However, since a protective gas needs to be filled into the furnace nose and the temperature in the furnace nose may cause a relatively large gas pressure, the furnace nose may be in two states: positive pressure and negative pressure.

[0078] Among them, when the furnace nose is in a positive pressure state, the gas pressure inside the furnace nose is greater than the external air pressure outside the furnace nose. Therefore, when there is a leakage, due to the air pressure difference between the inside and outside, the protective gas will be discharged from the furnace nose, that is, hydrogen will be discharged outwards, which will cause a significant reduction in the hydrogen content in the furnace nose. And as the gas is discharged, the gas pressure inside the furnace nose gradually decreases and the gas flow rate slows down, so the hydrogen content discharged per unit time gradually decreases; when the furnace nose is in a negative pressure state, the gas pressure inside the furnace nose is less than the external air pressure outside the furnace nose. Therefore, when there is a leakage, external air will enter the furnace nose, resulting in an increase in the oxygen content in the furnace nose. At the same time, oxygen and hydrogen will undergo a chemical reaction at high temperature, consuming a certain amount of hydrogen, so the hydrogen content will decrease and the reduction amount of hydrogen content per unit time is relatively stable.

[0079] Furthermore, the step flow chart of the method for obtaining the leakage coefficient of each cycle provided by the embodiment of the present application is as Figure 3 shown.

[0080] Based on the above analysis, by analyzing the changes in hydrogen and oxygen, the leakage coefficient is determined to reflect the possibility of gas leakage in the furnace nose, specifically as follows:

[0081] Calculate the degree of dispersion of the oxygen content at all times within each cycle;

[0082] Preferably, in this embodiment, the variance of the oxygen content at all times within each cycle is calculated. As other implementation manners, those skilled in the art can adopt other methods in the prior art, such as standard deviation, coefficient of variation, etc. This embodiment does not make special limitations on this.

[0083] Calculate the ratio of the hydrogen content at each moment within each cycle to its previous moment, denoted as the relative content ratio;

[0084] Calculate the mean value of the relative content ratios at all times within each cycle as the hydrogen stability of each cycle;

[0085] Take the ratio of the degree of dispersion to the hydrogen stability as the gas fluctuation degree of each cycle;

[0086] Take the product of the air pressure influence factor and the gas fluctuation degree as the leakage coefficient of each cycle;

[0087] Preferably, in this embodiment, the calculation formula for the hydrogen stability of each cycle is: , where is the hydrogen stability of the th cycle, is the number of all times within the th cycle, is the hydrogen content at the th moment within the th cycle, is the hydrogen content at the th moment within the th cycle; secondly, is the relative content ratio.

[0088] It should be noted that it is assumed that when there is no obvious air leakage in the furnace nose and the temperature change is small, it is the first phenomenon; when there is no obvious air leakage in the furnace nose and the temperature change is large, it is the second phenomenon; when there is an air leakage phenomenon in the furnace nose under positive pressure, it is the third phenomenon; when there is an air leakage phenomenon in the furnace nose under negative pressure, it is the fourth phenomenon.

[0089] Therefore, in the first phenomenon, the gas pressure fluctuation in the furnace nose is small, so the air pressure influence factor is small, the change in the oxygen content is small, so the degree of dispersion is small. The hydrogen in the furnace nose is mainly used for the reduction reaction, so the hydrogen content consumed per unit time is relatively constant, and the consumption of hydrogen during the reaction within a certain period of time is relatively small. Approximately equal to , the relative content ratio is approximately close to 1, the stability of hydrogen is relatively large, the result of the hydrogen stability is also approximately 1, and the obtained leakage coefficient is smaller; secondly, when the furnace nose is in the second and third phenomena, the air pressure influence factor will increase and the dispersion degree is smaller, but compared with the second phenomenon, the gas pressure in the furnace nose under the third phenomenon is greater than the external air pressure, so the protective gas hydrogen will be discharged outward. As the hydrogen is discharged, the hydrogen content decreases, that is , so is smaller, thus the hydrogen stability is smaller, and the obtained leakage coefficient is larger than that under the second phenomenon; when the furnace nose is in the fourth phenomenon, the gas pressure in the furnace nose will fluctuate greatly, so the air pressure influence factor is large, the hydrogen content consumed per unit time is relatively constant, the hydrogen stability is large, and the result of the hydrogen stability is approximately 1. Compared with the second phenomenon, since the gas pressure in the furnace nose is less than the external air pressure under the fourth phenomenon, air will enter the furnace nose, so the oxygen content changes greatly, that is, the dispersion degree is large, and the obtained leakage coefficient is larger than that under the second phenomenon. Therefore, the larger the leakage coefficient, the greater the possibility of gas leakage from the furnace nose, and the worse the airtightness of the furnace nose.

[0090] Based on the above analysis, by analyzing the leakage coefficient in the historical cycle, the airtightness of the furnace nose is detected, specifically:

[0091] Calculate the mean value of the leakage coefficients of multiple cycles before each cycle, and record it as the evaluation factor;

[0092] Preferably, in this embodiment, calculate the mean value of the leakage coefficients of 10 cycles before each cycle, and record it as the evaluation factor.

[0093] If the leakage coefficient of the cycle is greater than the evaluation factor, the airtightness of the furnace nose is poor; otherwise, the airtightness of the furnace nose is good.

[0094] It should be noted that when the furnace nose does not leak, the leakage coefficient is relatively small; when the furnace nose leaks, whether it is a positive pressure state leak or a negative pressure state leak, the leakage coefficient is large; by using the monitoring data during the operation of the furnace nose to detect the airtightness of the furnace nose, both the gas pressure change situation in the furnace nose and the influence of temperature on the gas pressure are considered, and the airtightness detection is carried out under different pressure states, which enhances the accuracy and efficiency of the airtightness detection of the furnace nose.

[0095] Based on the same inventive concept as the above method, an embodiment of the present application further provides a furnace nose airtightness detection system applied to the aluminized silicon process, including a memory, a processor, and a computer program stored in the memory and running on the processor. When the processor executes the computer program, it implements the steps of any one of the above methods for detecting the airtightness of the furnace nose applied to the aluminized silicon process.

[0096] It should be understood that although Figure 1 the steps in the flowchart of Figure 1 are shown in sequence according to the indication of the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless there is a clear indication in this article, the execution of these steps has no strict order limit, and these steps can be executed in other orders. Moreover,

[0097] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0098] The above-described embodiments only represent several implementation manners of the present application. The description is relatively specific and detailed, but it should not be construed as a limitation to the present application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made. Therefore, any simple modification, equivalent change, and modification made to the above embodiments based on the technical essence of the present application without departing from the content of the technical solution of the present application all belong to the protection scope of the technical solution of the present application.

Claims

1. A method for detecting the air tightness of a furnace nose used in an aluminum silicon plating process, characterized in that: The method comprises the following steps: Obtain the gas pressure, hydrogen content and oxygen content at the gas outlet of the furnace nose at each moment of each cycle, the temperature inside the furnace nose at each moment of each cycle, and the external air pressure in the air outside the furnace nose at each moment of each cycle; Determine the relative pressure difference of each cycle according to the difference between the gas pressure and the external pressure at different times in each cycle; analyze the deviation of the gas pressure at all times in each cycle, and determine the pressure deviation of each cycle in combination with the relative pressure difference; According to the change trend of the gas pressure at all times in each cycle, combined with the gas pressure deviation, the relative trend amount of each cycle is determined; the correlation between the gas pressure and temperature at all times in each cycle is analyzed, and combined with the relative trend amount, the gas pressure influence factor of each cycle is determined; Calculate the ratio of the hydrogen content at each moment in each cycle to its adjacent moments, and record it as the relative content ratio; calculate the mean of the relative content ratio at all moments in each cycle, and use it as the hydrogen stability of each cycle; calculate the discreteness of the oxygen content at all moments in each cycle; use the ratio of the discreteness to the hydrogen stability as the gas fluctuation of each cycle, and combine it with the air pressure influencing factor to determine the leakage coefficient of each cycle, and test the air tightness of the furnace nose.

2. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: Determining the relative air pressure difference in each cycle includes: The difference between the gas pressure and the external air pressure at the first moment in each cycle is recorded as the initial air pressure difference; The difference between the gas pressure at the last moment of each cycle and the external air pressure is recorded as the final air pressure difference; The difference between the final air pressure difference and the initial air pressure difference is taken as the relative air pressure difference of each cycle.

3. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: Determining the air pressure deviation amount in each cycle includes: Calculate the average deviation of gas pressure at all times within each cycle; The product of the average deviation and the relative air pressure difference is calculated and recorded as the first product. The calculation result of the exponential function with the natural constant as the base and the first product as the exponent is used as the air pressure deviation amount of each cycle.

4. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: Determining the relative trend amount of each period includes: Decompose the gas pressure at all times in each cycle to obtain a trend sequence; combine the position number of each element in the trend sequence with its elements to form a two-dimensional array; Performing linear fitting on all the two-dimensional arrays in the trend sequence to obtain the slope of the fitting line; The product of the absolute value of the slope and the air pressure deviation is taken as the relative trend value of each cycle.

5. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: Determining the air pressure influence factor of each cycle includes: Calculate the correlation between gas pressure and temperature at all times in each cycle; The ratio of the relative trend quantity to the correlation degree is used as the air pressure influence factor of each period.

6. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: The leakage coefficient of each cycle is the product of the gas pressure influence factor and the gas fluctuation degree.

7. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: The gas tightness detection of the furnace nose includes: Calculate the average of the leakage coefficients of multiple cycles before each cycle and record it as the evaluation factor; If the leakage coefficient of a period is greater than the evaluation factor, the air tightness of the furnace nose is poor, otherwise, the air tightness of the furnace nose is good.

8. A furnace nose air tightness detection system applied to aluminum silicon plating process, comprising a memory, a processor, and a computer program stored in the memory and running on the processor, characterized in that: When the processor executes the computer program, the steps of the method for detecting the air tightness of the furnace nose applied to the aluminum silicon plating process as described in any one of claims 1-7 are implemented.

Images