Sample preparation equipment and method for single crystal blade crystal orientation EBSD detection

Abstract

The invention relates to the technical field of EBSD detection sample processing, in particular to a single crystal blade crystal orientation EBSD detection sample preparation device and method.The sample preparation device comprises a clamp and an electrolysis device, the clamp is used for clamping an EBSD sample and then grinding the EBSD sample on a sample grinding machine, and the electrolysis device is used for electrolyzing the ground EBSD sample; the electrolysis device comprises an electrolytic bath for storing electrolyte, a sample clamp for placing a ground EBSD sample is movably arranged above the electrolytic bath, and the preparation method comprises the following steps: 1) mechanical polishing: (1) cutting the EBSD sample with the same shape from a blade; (2) clamping the EBSD sample in a clamp, and grinding the EBSD sample on a sample grinding machine; 2) electrolytic polishing: (1) placing the mechanically polished EBSD sample in a sample clamp of an electrolysis device; (2) electrolyzing in an electrolyzing device; and (3) cleaning the EBSD sample after electrolysis is ended, and by means of the method, the preparation rate of the EBSD detection sample can be increased, and the crystal orientation detection period of the single crystal blade can be shortened.

Description

Technical Field

[0001] The invention relates to the technical field of EBSD detection sample processing, and in particular to a sample preparation device and method for EBSD detection of crystal orientation of a single crystal blade. Background Art

[0002] Single crystal blades are cast blades with only one crystal grain, which eliminates transverse grain boundaries that are sensitive to holes and cracks, thereby improving the performance of the alloy. At present, when casting single crystal blades, the crystallographic orientation of the casting is generally pursued to be consistent with the direction of the principal stress axis of the blade. However, in the actual directional solidification process of single crystal blades, their orientation deviates from the direction of the principal stress axis by a certain angle. In order to ensure that the performance of single crystal blades meets the use requirements, it is necessary to measure the crystal orientation deviation angle, which is generally required to be no more than 15°.

[0003] At present, the commonly used detection methods for the crystal orientation of single crystal blades are X-ray diffraction (XRD) and electron backscatter diffraction (EBSD). The former uses a continuous beam of X-rays to irradiate the blade to generate diffracted X-rays, records the Laua diffraction pattern of the backscattered part through the detector, and uses a software program to compare it with the standard diffraction pattern in the database to obtain the crystal orientation deviation angle. It directly acts on the blade and has high detection efficiency, but there will be spots due to debris on the blade surface or inappropriate measurement parameters, which will cause the program to misjudge. The latter EBSD uses an electron beam to irradiate the EBSD sample at a high angle in a scanning electron microscope (SEM) to generate a diffraction pattern and receive it on a fluorescent screen. The fluorescent screen is connected to a camera and is directly displayed on the software program after storage. The software program is then used to calibrate the pattern to obtain the crystal orientation deviation angle. Its detection results are accurate, but EBSD has high requirements on the sample surface quality. The sample preparation rate restricts its application in the crystal orientation detection of single crystal blades. Summary of the invention

[0004] In order to solve the above technical problems, the present invention provides a sample preparation device and method for EBSD detection of single crystal blade crystal orientation, which can improve the preparation rate of EBSD detection samples and achieve the purpose of shortening the single crystal blade crystal orientation detection cycle.

[0005] The present invention is achieved through the following technical solutions:

[0006] A sample preparation device for EBSD detection of crystal orientation of a single crystal blade comprises a fixture and an electrolytic device. The fixture is used to clamp the EBSD sample and then grind it on a sample grinder. The electrolytic device is used to electrolyze the ground EBSD sample. The electrolytic device comprises an electrolytic cell for storing electrolyte. A sample fixture for placing the ground EBSD sample is movably provided above the electrolytic cell.

[0007] Further preferably, the fixture adopts fixture one, which includes a base, a longitudinal guide rail, a transverse guide rail and a chuck one, the longitudinal guide rail is connected to the base, the transverse guide rail is slidably connected to the longitudinal guide rail, the chuck one is slidably connected to the transverse guide rail, and the chuck one is used to clamp the EBSD sample.

[0008] Further preferably, a longitudinal slide buckle is slidably provided on the longitudinal guide rail, the transverse guide rail is connected to the longitudinal slide buckle, and a screw rod 1 is provided on one side of the longitudinal slide buckle and penetrates into the longitudinal slide buckle and abuts against the longitudinal guide rail; a transverse slide buckle is slidably provided on the transverse guide rail, a chuck 1 is connected to the transverse slide buckle, and a screw rod 2 is provided on one side of the transverse slide buckle and penetrates into the transverse slide buckle and abuts against the transverse guide rail.

[0009] Further preferably, a clamping groove 1 is provided at the end of the chuck 1, and a screw 3 is provided on one side of the clamping groove 1 and penetrates into the clamping groove 1 and abuts against the sample.

[0010] Further preferably, the clamp adopts clamp 2, which includes a rotating shaft, one end of which is connected to an upper chassis, a side of the upper chassis away from the rotating shaft is detachably connected to a lower chassis, a side of the lower chassis away from the upper chassis is provided with a plurality of embedding grooves, a chuck 2 is embedded in the embedding grooves, and a clamping groove 2 for clamping the EBSD sample is provided at the end of the chuck 2.

[0011] Further preferably, the embedding grooves are evenly distributed in the circumferential direction of the edge of the lower chassis, and a screw rod four is provided on one side of the lower chassis corresponding to the embedding groove, and the screw rod four penetrates into the clamping groove two to abut against the EBSD sample.

[0012] Further preferably, an agitator and a cooling pipeline are provided at the bottom of the electrolytic cell, an electric telescopic tube is provided at the bottom of the electrolytic cell, the output end of the electric telescopic tube is connected to a cathode plate in the electrolytic cell, and a sample fixture is arranged above the cathode plate. The sample fixture is provided with a plurality of sample slots for placing EBSD samples, and the sample slots are evenly distributed in rows.

[0013] Further preferably, the electrolysis device also includes a main support frame, one end of which is above the electrolytic cell and is provided with a lifting structure, a material rack is provided at the end of the lifting structure, and the material rack is connected to the sample fixture.

[0014] A method for preparing a sample preparation device for EBSD detection of single crystal blade crystal orientation, comprising the following steps:

[0015] 1) Mechanical polishing:

[0016] ① Cut EBSD samples with consistent shapes on the blade;

[0017] ② Clamp the EBSD sample in the fixture and grind it on the grinding machine;

[0018] 2) Electrolytic polishing:

[0019] ① Place the mechanically polished EBSD sample in the sample holder of the electrolysis device;

[0020] ② Electrolysis in an electrolysis device;

[0021] ③After electrolysis, clean the EBSD sample.

[0022] Further preferably, the method comprises the following steps:

[0023] 1) Mechanical polishing:

[0024] Use the electric spark wire cutting machine to cut the EBSD sample from the non-body area of ​​the blade, install the sample with the test surface facing down on the fixture one, and clamp it, place the fixture one on the platform of the semi-automatic sample grinding machine, adjust it to the use height and distance, and then grind it; or install the sample with the test surface facing down on the fixture two, after clamping, install the fixture two on the rotating shaft of the automatic sample grinding machine, and start the automatic grinding;

[0025] 2) Electrolytic polishing:

[0026] Place the ground sample on the sample holder of the electrolysis device, lock it, add electrolyte, start the computer program, set the stirring rate and electrolyte temperature; after reaching the temperature, set the electrolysis voltage, cathode distance, and electrolysis time, and start electrolysis. After the electrolysis is completed, close the program, take out the sample holder, clean the sample with a cleaning medium, and dry it to complete the preparation of the EBSD sample.

[0027] Beneficial effects of the present invention:

[0028] The present invention clamps the EBSD sample with a fixture and then grinds it on a grinder, and then electropolishes the mechanically ground EBSD sample in an electrolytic device. The method of the present invention is simple to operate, the equipment is simple to manufacture, and the applicability is strong. The operator can quickly get started and use it, and the preparation rate of the EBSD detection sample can be improved, thereby shortening the crystal orientation detection cycle of the single crystal blade.

[0029] The specific implementation modes of the present invention are further described in detail below in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present invention but do not constitute a limitation of the present invention. In the accompanying drawings:

[0031] Figure 1 It is a structural schematic diagram of a clamp 1 in the sample preparation device of the present invention.

[0032] Figure 2 It is a partial structural schematic diagram of a chuck 1 in the sample preparation device of the present invention.

[0033] Figure 3 It is a structural schematic diagram of the second clamp in the sample preparation device of the present invention.

[0034] Figure 4 It is a schematic diagram of a three-dimensional structure of the second clamp in the sample preparation device of the present invention.

[0035] Figure 5 It is a three-dimensional structural schematic diagram of the electrolysis device in the sample preparation equipment of the present invention.

[0036] 110-base, 111-longitudinal guide rail, 112-transverse guide rail, 113-chuck one, 114-slide one, 115-longitudinal slide buckle, 116-screw one, 117-slide two, 118-transverse slide buckle, 119-screw two, 120-clamping groove one, 121-screw three, 210-rotating shaft, 211-upper chassis, 212-lower chassis, 213-embedded groove, 214-chuck two, 215-clamping groove two, 216-screw four, 310-electrolytic cell, 311-equipment slot, 312-equipment box, 313-electric signal transmitter, 314-agitator, 315-cooling pipeline, 316-cathode plate, 317-sample fixture, 318-sample slot, 319-main support frame, 320-lifting structure, 321-material rack. DETAILED DESCRIPTION

[0037] The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0038] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0039] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0041] The disclosure below provides many different embodiments or examples to realize different structures of the present invention. In order to simplify the disclosure of the present invention, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present invention. In addition, the present invention can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplicity and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides various specific examples of processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0042] Example 1

[0043] A sample preparation device for EBSD detection of crystal orientation of a single crystal blade comprises a fixture and an electrolysis device. The fixture is used to clamp the EBSD sample and then grind it on a semi-automatic sample grinder. The electrolysis device is used to electrolyze the EBSD sample after mechanical grinding and polishing.

[0044] like Figure 1 and 2As shown, the clamp 1 includes a base 110, a longitudinal guide rail 111, a transverse guide rail 112 and a chuck 113. The longitudinal guide rail 111 is connected to the base 110, the transverse guide rail 112 is slidably connected to the longitudinal guide rail 111, and the chuck 113 is slidably connected to the transverse guide rail 112. The base 110 serves as a bearing structure of the clamp 1 tooling. The longitudinal guide rail 111 is fixed to the base 110 by bolts. The longitudinal guide rail 111 has a slide groove 114 for the transverse guide rail 112 to slide up and down along the longitudinal guide rail 111, thereby controlling the longitudinal movement of the use part of the clamp tooling, that is, the longitudinal movement of the chuck 113, so as to adjust the use height. Preferably, a longitudinal slide buckle 115 is provided on the longitudinal guide rail 111 for sliding along a slide groove 114, and the transverse guide rail 112 is connected to the longitudinal slide buckle 115, so that the transverse guide rail 112 is slidably connected to the longitudinal guide rail 111, and a screw rod 116 is provided on one side of the longitudinal slide buckle 115, which penetrates into the longitudinal slide buckle 115 and abuts against the longitudinal guide rail 111. The screw rod 116 is used to lock the longitudinal guide rail 111 and the transverse guide rail 112, thereby controlling the locking of the chuck on the longitudinal guide rail 111.

[0045] The transverse guide rail 112 has a second slide groove 117: a transverse slide buckle 118 is provided on the transverse guide rail 112 to slide along the second slide groove 117, and the chuck 113 is connected to the transverse slide buckle 118, which is used for the chuck 113 to move horizontally and adjust the use distance. A screw rod 2 119 is provided on one side of the transverse slide buckle 118, which penetrates into the transverse slide buckle 118 and abuts against the transverse guide rail 112: the screw rod 2 119 is used to lock the chuck 113 and the transverse guide rail 112. The chuck 113 is preferably set as a columnar structure, and a clamping groove 120 is provided at the end of the chuck 113, and a screw rod 3 121 is provided on one side of the clamping groove 120, which penetrates into the clamping groove 120 and abuts against the sample, and the screw rod 3 121 is used to clamp and fix the EBSD sample.

[0046] like Figure 5 As shown, the electrolysis device includes an electrolytic cell 310, which is used to store electrolyte and perform electrolysis operations. The electrolytic cell 310 is equipped with a ruler for recording the height of the electrolyte. The electrolytic cell 310 is also equipped with a heating belt for heating the electrolyte. An equipment slot 311 is provided at one end of the electrolytic cell 310. Three equipment boxes 312 are provided in the equipment slot 311, which are a collection of power supplies, sensors, and circuits for the electrolysis device. An electric signal transmitter 313 is provided outside the equipment slot 311. The electric signal transmitter 313 is connected to the three equipment boxes 312. The electric signal transmitter 313 receives the signal received by the sensor and converts it into a signal that can be processed by a computer.

[0047] An agitator 314 is provided at the bottom of the electrolytic cell 310. The agitator 314 is an impeller structure and is used to stir the electrolyte and control the concentration of the electrolyte. A cooling pipeline 315 is also laid at the bottom of the electrolytic cell 310. The cooling pipeline 315 is a meander structure and is connected to a cooling medium to cool the electrolyte and control the temperature of the electrolyte. A cathode plate 316 is provided in the electrolytic cell 310. The bottom surface of the cathode plate 316 is connected to the electrolytic cell 310 through an electric telescopic tube, which is used to control the lifting and lowering of the cathode plate 316 and adjust the distance between the cathode and the anode.

[0048] A sample fixture 317 is provided above the cathode plate 316. The sample fixture 317 has a plurality of sample slots 318 matching the EBSD samples. The sample slots 318 are preferably evenly distributed in rows. The sample slots 318 between each row are respectively connected in parallel with the circuit and connected to the transformer to form a closed loop, thereby ensuring that the electrolysis voltage of each EBSD sample is consistent. Optionally, the sample fixture 317 includes a bottom plate and a sample plate. The sample slots 318 are evenly distributed on the sample plate. The sample plate and the bottom plate are detachably connected, such as by using a buckle to fasten the sample plate and the bottom plate together to lock the sample. The bottom plate and the sample plate can also be fixed as a whole.

[0049] The electrolysis device also includes a main support frame 319, the bottom end of which can be connected to the equipment box 312, and the other end of the main support frame 319 is above the electrolytic cell 310, and a lifting structure 320 is arranged on the main support frame 319 at this end, and the lifting structure 320 has a lifting function. A material rack 321 is arranged at the end of the lifting structure 320, and the material rack 321 is connected to the sample fixture 317. The lifting structure 320 on the main support frame 319 drives the sample fixture 317 to rise and fall, thereby completing the control of the depth of the sample penetrating into the electrolyte.

[0050] Example 2

[0051] A sample preparation device for EBSD detection of single crystal leaf crystal orientation, comprising a fixture 2 and an electrolysis device, such as Figure 3 and 4As shown, the second clamp includes a rotating shaft 210, and the rotating shaft 210 is used to connect the second clamp with the fully automatic sample grinding machine. One end of the rotating shaft 210 is connected to an upper chassis 211, and the side of the upper chassis 211 away from the rotating shaft 210 is detachably connected to the lower chassis 212. For example, the upper chassis 211 and the lower chassis 212 are connected by bolts. A plurality of embedding grooves 213 are provided on the side of the lower chassis 212 away from the upper chassis 211. A second chuck 214 is embedded in the embedding groove 213. The second chuck 214 is preferably a cylindrical structure. A clamping groove 215 is provided at the end of the second chuck 214 for clamping the EBSD sample. Preferably, the embedding grooves 213 are evenly distributed in the circumference of the edge of the lower chassis 212, and a screw rod 216 is provided on the side of the lower chassis 212 corresponding to the embedding groove 213. The screw rod 216 penetrates into the clamping groove 215 and abuts against the sample, and the screw rod 216 is used to clamp and fix the EBSD sample.

[0052] In this embodiment, the electrolysis device is the same as the electrolysis device in Embodiment 1.

[0053] Example 3

[0054] A sample preparation method for EBSD detection of crystal orientation of a single crystal blade, using the device of Example 1 to prepare the sample, comprising the following steps:

[0055] 1) Mechanical polishing:

[0056] ① Cut EBSD samples with consistent shapes on the leaves.

[0057] ② The EBSD sample was clamped in the fixture 1 of Example 1 and ground on a semi-automatic grinding machine.

[0058] 2) Electrolytic polishing:

[0059] ① Place the mechanically polished EBSD sample in a dedicated plastic tooling and fix it.

[0060] ② Place the plastic tooling with the EBSD sample in the sample holder 317 of the electrolysis device in Example 1.

[0061] ③Set the electrolysis parameters and start automatic electrolysis.

[0062] ④EBSD sample cleaning.

[0063] Example 4

[0064] A sample preparation method for EBSD detection of crystal orientation of a single crystal blade, using the device of Example 2 to prepare the sample, comprises the following steps:

[0065] 1) Mechanical polishing:

[0066] ① Cut EBSD samples with consistent shapes on the leaves.

[0067] ② The EBSD sample was clamped in the second fixture of Example 2 and ground on a fully automatic sample grinding machine.

[0068] 2) Electrolytic polishing:

[0069] ① Place the mechanically polished EBSD sample in a dedicated plastic tooling and fix it.

[0070] ② Place the plastic tooling with the EBSD sample in the sample holder 317 of the electrolysis device in Example 2.

[0071] ③Set the electrolysis parameters and start automatic electrolysis.

[0072] ④EBSD sample cleaning.

[0073] The present invention uses an electric spark wire cutting machine to cut an EBSD sample that meets the requirements in the non-body area of ​​the blade. The sample detection surface is installed on the first fixture and clamped, and the first fixture is placed on the platform of the semi-automatic sample grinding machine, adjusted to a suitable height and distance for use, and then ground; or the sample detection surface is installed on the second fixture, and the second fixture is installed on the rotating shaft of the automatic sample grinding machine after clamping, and the automatic grinding is started. The sample that has been ground is placed on the sample fixture 317 of the electrolysis device, locked, and then locked and clamped with the material rack 321; add an electrolyte of suitable concentration to a specified height, start the computer program, set the stirring rate and the electrolyte temperature; after reaching the temperature, set the electrolysis voltage, cathode distance, and electrolysis time, and start electrolysis. After the electrolysis is completed, close the program, take out the sample fixture 317, use a cleaning medium to clean the sample, and after drying, the preparation of the EBSD sample is completed.

[0074] The method of the present invention is simple to operate, the equipment is simple to manufacture, and the applicability is strong, so that operators can quickly get started. If there is an EBSD sample with a new composition in the future, the EBSD sample can be quickly prepared by adjusting the electrolyte composition, electrolyte temperature, electrolysis voltage, cathode distance, and electrolysis time.

[0075] In the description of this specification, the description with reference to the terms "one embodiment", "certain embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0076] In summary, although the present invention has been disclosed as above in terms of preferred embodiments, the above preferred embodiments are not intended to limit the present invention. A person skilled in the art may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be based on the scope defined in the claims.

Claims

1. A sample preparation device for EBSD detection of single crystal leaf crystal orientation, characterized by: The invention comprises a fixture and an electrolytic device. The fixture is used to clamp the EBSD sample and then grind it on a sample grinder. The electrolytic device is used to electrolyze the ground EBSD sample. The electrolytic device comprises an electrolytic tank (310) for storing electrolyte. A sample fixture (317) for placing the ground EBSD sample is movably provided above the electrolytic tank (310).

2. The sample preparation device for EBSD detection of single crystal leaf crystal orientation according to claim 1, characterized in that: The clamp adopts clamp one, which includes a base (110), a longitudinal guide rail (111), a transverse guide rail (112) and a chuck one (113). The longitudinal guide rail (111) is connected to the base (110), the transverse guide rail (112) is slidably connected to the longitudinal guide rail (111), and the chuck one (113) is slidably connected to the transverse guide rail (112). The chuck one (113) is used to clamp the EBSD sample.

3. The sample preparation device for EBSD detection of single crystal leaf crystal orientation according to claim 2, characterized in that: A longitudinal slide buckle (115) is slidably provided on the longitudinal guide rail (111), the transverse guide rail (112) is connected to the longitudinal slide buckle (115), and a screw rod (116) is provided on one side of the longitudinal slide buckle (115) and penetrates into the longitudinal slide buckle (115) and abuts against the longitudinal guide rail (111); a transverse slide buckle (118) is slidably provided on the transverse guide rail (112), the clamp head (113) is connected to the transverse slide buckle (118), and a screw rod (119) is provided on one side of the transverse slide buckle (118) and penetrates into the transverse slide buckle (118) and abuts against the transverse guide rail (112).

4. The sample preparation device for EBSD detection of single crystal blade crystal orientation according to claim 2, characterized in that: A clamping groove (120) is provided at the end of the clamping head (113), and a screw (121) is provided on one side of the clamping groove (120) and penetrates into the clamping groove (120) to abut against the sample.

5. The sample preparation device for EBSD detection of single crystal blade crystal orientation according to claim 1, characterized in that: The clamp adopts clamp 2, which includes a rotating shaft (210), one end of the rotating shaft (210) is connected to an upper chassis (211), a side of the upper chassis (211) away from the rotating shaft (210) is detachably connected to a lower chassis (212), a side of the lower chassis (212) away from the upper chassis (211) is provided with a plurality of embedding grooves (213), a second chuck (214) is embedded in the embedding groove (213), and a clamping groove (215) for clamping an EBSD sample is provided at the end of the second chuck (214).

6. The sample preparation device for EBSD detection of single crystal blade crystal orientation according to claim 5, characterized in that: The embedding grooves (213) are evenly distributed around the edge of the lower chassis (212), and a screw rod four (216) is provided on one side of the lower chassis (212) corresponding to the embedding grooves (213), and the screw rod four (216) penetrates into the clamping groove two (215) to abut against the EBSD sample.

7. The sample preparation device for EBSD detection of single crystal blade crystal orientation according to claim 1, characterized in that: The bottom of the electrolytic cell (310) is provided with an agitator (314) and a cooling pipeline (315), the bottom of the electrolytic cell (310) is provided with an electric telescopic tube, the output end of the electric telescopic tube is connected to a cathode plate (316) in the electrolytic cell (310), the sample fixture (317) is arranged above the cathode plate (316), the sample fixture (317) is provided with a plurality of sample slots (318) for placing EBSD samples, and the sample slots (318) are arranged in rows and evenly distributed.

8. The sample preparation device for EBSD detection of single crystal blade crystal orientation according to claim 7, characterized in that: The electrolysis device also includes a main support frame (319), one end of which is above the electrolytic cell (310) and is provided with a lifting structure (320), a material rack (321) is provided at the end of the lifting structure (320), and the material rack (321) is connected to the sample fixture (317).

9. A method for preparing a sample preparation device for EBSD detection of crystal orientation of a single crystal blade according to any one of claims 1 to 8, characterized in that: The following steps are involved: 1) Mechanical polishing: ① Cut EBSD samples with consistent shapes on the blade; ② Clamp the EBSD sample in the fixture and grind it on the grinding machine; 2) Electrolytic polishing: ① Place the mechanically polished EBSD sample in the sample holder (317) of the electrolysis device; ② Electrolysis in an electrolysis device; ③After electrolysis, clean the EBSD sample.

10. The sample preparation method according to claim 9, characterized in that: The following steps are involved: 1) Mechanical polishing: Use the electric spark wire cutting machine to cut the EBSD sample from the non-body area of ​​the blade, install the sample with the test surface facing down on the fixture one, and clamp it, place the fixture one on the platform of the semi-automatic sample grinding machine, adjust it to the use height and distance, and then grind it; or install the sample with the test surface facing down on the fixture two, after clamping, install the fixture two on the rotating shaft of the automatic sample grinding machine, and start the automatic grinding; 2) Electrolytic polishing: The ground sample is placed on the sample holder (317) of the electrolysis device, locked, electrolyte is added, the computer program is started, the stirring rate and the electrolyte temperature are set; after the temperature reaches the temperature, the electrolysis voltage, cathode distance, and electrolysis time are set, and the electrolysis is started. After the electrolysis is completed, the program is closed, the sample holder (317) is taken out, and the sample is cleaned with a cleaning medium. After drying, the preparation of the EBSD sample is completed.

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