Backside alignment method and device, laser direct writing exposure equipment and medium

Abstract

The invention discloses a back alignment method and device, laser direct writing exposure equipment and a medium, and the method comprises the steps: obtaining first pixel coordinates of all corner points in a calibration plate collected by a back camera, and forming a first pixel coordinate set; acquiring a second pixel coordinate of each angular point corresponding to each first pixel coordinate acquired by a front camera to form a second pixel coordinate set; determining a relative pixel coordinate set of the front camera relative to the back camera of each angular point based on the first pixel coordinate set and the second pixel coordinate set; screening the relative pixel coordinates based on the distribution characteristics of the relative pixel coordinates in the relative pixel coordinate set to obtain a screened relative pixel coordinate set; and determining the coordinate of the origin coordinate of the front camera in the back coordinate system according to each relative pixel coordinate in the screened relative pixel coordinate set. By using the method, the collection error of the target picture and the error caused in the moving process of the alignment camera are solved.

Description

Technical Field

[0001] The embodiments of the present invention relate to the field of identification technology, and in particular to a back-side alignment method, device, laser direct writing exposure equipment and medium. Background Art

[0002] During the back-alignment process of target alignment, due to hardware limitations, the alignment system itself has the following errors: the acquisition error of the target image and the error caused by the movement of the alignment camera.

[0003] The resolution of the camera determines the upper limit of the alignment accuracy. Under high precision requirements, there will be errors when the alignment camera grabs the target, such as the error caused by the deviation of the target center point captured by the camera under the influence of background light after the target is deformed. Due to the presence of multiple targets, when aligning, the alignment camera needs to be moved to the preset target position first, and there will be errors in this movement process. Summary of the invention

[0004] The embodiments of the present invention provide a back-side alignment method, device, laser direct writing exposure equipment and medium, which solve the acquisition error of the target image and the error caused by the movement of the alignment camera.

[0005] In a first aspect, an embodiment of the present invention provides a backside alignment method, comprising:

[0006] Obtaining the first pixel coordinates of each corner point in the calibration plate captured by the back camera to form a first pixel coordinate set;

[0007] Acquire the second pixel coordinates of each of the corner points corresponding to each of the first pixel coordinates captured by the front camera to form a second pixel coordinate set; the first pixel coordinates and the second pixel coordinates are coordinates relative to a preset back coordinate system;

[0008] Determine a relative pixel coordinate set of the front camera relative to the rear camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set;

[0009] Filtering the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set to obtain a filtered relative pixel coordinate set;

[0010] The coordinates of the origin coordinates of the front camera in the back coordinate system are determined according to the relative pixel coordinates in the filtered relative pixel coordinate set.

[0011] In a second aspect, an embodiment of the present invention further provides a back side alignment device, the device comprising:

[0012] A first acquisition module, used to acquire first pixel coordinates of each corner point in the calibration plate captured by the back camera to form a first pixel coordinate set;

[0013] A second acquisition module, used for acquiring second pixel coordinates of each of the corner points corresponding to each of the first pixel coordinates collected by the front camera, to form a second pixel coordinate set; the first pixel coordinates and the second pixel coordinates are coordinates relative to a preset back coordinate system;

[0014] A first determining module, configured to determine a relative pixel coordinate set of the front camera relative to the rear camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set;

[0015] A screening module, used for screening the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set to obtain a screened relative pixel coordinate set;

[0016] The second determination module is used to determine the coordinates of the origin coordinates of the front camera in the back coordinate system according to the relative pixel coordinates in the filtered relative pixel coordinate set.

[0017] In a third aspect, the embodiments of the present disclosure further provide a laser direct writing exposure device, the laser direct writing exposure device comprising:

[0018] The carrying platform assembly is used to carry the substrate to be exposed;

[0019] The exposure assembly is used to expose the substrate to be exposed;

[0020] The alignment assembly is used to implement the back side alignment method provided in the embodiment of the present disclosure and to calibrate the position of the substrate to be exposed in the carrier assembly.

[0021] In a fourth aspect, the embodiments of the present disclosure further provide a storage medium containing computer executable instructions, which, when executed by a computer processor, are used to implement the back side alignment method provided by the embodiments of the present disclosure.

[0022] In a fifth aspect, an embodiment of the present disclosure further provides a computer program product, which includes a computer program, and when the computer program is executed by a processor, the back side alignment method provided by the embodiment of the present disclosure is implemented.

[0023] The present invention discloses a method, device, laser direct writing exposure equipment and medium for back alignment, the method comprising: obtaining the first pixel coordinates of each corner point in the calibration plate collected by the back camera to form a first pixel coordinate set; obtaining the second pixel coordinates of each corner point corresponding to each of the first pixel coordinates collected by the front camera to form a second pixel coordinate set; the first pixel coordinates and the second pixel coordinates are coordinates relative to a preset back coordinate system; determining the relative pixel coordinate set of the front camera relative to the back camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set; filtering the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set to obtain a filtered relative pixel coordinate set; determining the coordinates of the origin coordinates of the front camera in the back coordinate system according to each relative pixel coordinate in the filtered relative pixel coordinate set. By using this method: the acquisition error of the target image and the error caused by the movement of the alignment camera are solved. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The above and other features, advantages and aspects of the embodiments of the present disclosure will become more apparent with reference to the following detailed description in conjunction with the accompanying drawings. Throughout the accompanying drawings, the same or similar reference numerals represent the same or similar elements. It should be understood that the drawings are schematic and the originals and elements are not necessarily drawn to scale.

[0025] Figure 1 A flow chart of a backside alignment method provided by an embodiment of the present disclosure;

[0026] Figure 2 An exemplary diagram of a backside alignment system provided by an embodiment of the present disclosure;

[0027] Figure 3 A schematic structural diagram of a back-side alignment device provided by an embodiment of the present disclosure;

[0028] Figure 4 A schematic diagram of the structure of an electronic device provided by an embodiment of the present disclosure. DETAILED DESCRIPTION

[0029] Embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as being limited to the embodiments described herein, which are instead provided for a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are only for exemplary purposes and are not intended to limit the scope of protection of the present disclosure.

[0030] It should be understood that the various steps described in the method embodiments of the present disclosure may be performed in different orders and / or in parallel. In addition, the method embodiments may include additional steps and / or omit the steps shown. The scope of the present disclosure is not limited in this respect.

[0031] The term "including" and its variations used herein are open inclusions, i.e., "including but not limited to". The term "based on" means "based at least in part on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". The relevant definitions of other terms will be given in the following description.

[0032] It should be noted that the concepts such as "first" and "second" mentioned in the present disclosure are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0033] It should be noted that the modifications of "one" and "plurality" mentioned in the present disclosure are illustrative rather than restrictive, and those skilled in the art should understand that unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0034] The names of the messages or information exchanged between multiple devices in the embodiments of the present disclosure are only used for illustrative purposes and are not used to limit the scope of these messages or information.

[0035] It is understandable that before using the technical solutions disclosed in the embodiments of the present disclosure, the types, scope of use, usage scenarios, etc. of the personal information involved in the present disclosure should be informed to the user and the user's authorization should be obtained in an appropriate manner in accordance with relevant laws and regulations.

[0036] For example, in response to receiving an active request from a user, a prompt message is sent to the user to clearly prompt the user that the operation requested to be performed will require obtaining and using the user's personal information. Thus, the user can autonomously choose whether to provide personal information to software or hardware such as an electronic device, application, server, or storage medium that performs the operation of the technical solution of the present disclosure according to the prompt message.

[0037] As an optional but non-limiting implementation, in response to receiving an active request from the user, the prompt information may be sent to the user in the form of a pop-up window, in which the prompt information may be presented in text form. In addition, the pop-up window may also carry a selection control for the user to choose "agree" or "disagree" to provide personal information to the electronic device.

[0038] It is understandable that the above notification and the process of obtaining user authorization are merely illustrative and do not constitute a limitation on the implementation of the present disclosure. Other methods that meet the relevant laws and regulations may also be applied to the implementation of the present disclosure.

[0039] It is understandable that the data involved in this technical solution (including but not limited to the data itself, the acquisition or use of the data) shall comply with the requirements of relevant laws, regulations and relevant provisions.

[0040] Embodiment 1

[0041] Figure 1 This is a flow chart of a back alignment method provided by an embodiment of the present disclosure. The embodiment of the present disclosure is applicable to providing a solution to the problem that the alignment system itself has errors due to hardware limitations during the back alignment process of target alignment. The method can be executed by a back alignment method device, which can be implemented in the form of software and / or hardware, and optionally, by an electronic device, which can be a mobile terminal, a PC or a server, etc.

[0042] like Figure 1 As shown, a back side alignment method provided by an embodiment of the present disclosure may specifically include the following steps:

[0043] S110, obtaining the first pixel coordinates of each corner point in the calibration plate captured by the rear camera to form a first pixel coordinate set.

[0044] In this embodiment, Figure 2 This is an example diagram of a backside alignment system provided by an embodiment of the present disclosure. Figure 2 As shown, 4 is a wafer with a calibration plate, 2 is a fixed back camera, and 1 is a movable front camera. The calibration plate can be made of a transparent material. There can be one or more front cameras, and the corner points are evenly distributed on the calibration plate, and the left and right and up and down spacings of each corner point are equal and fixed. The first pixel set can be a set of pixel coordinates of each corner point in the calibration plate collected by the back camera.

[0045] Specifically, this step is used to obtain a first pixel coordinate set of each corner point in the calibration plate captured by the rear camera.

[0046] S120, acquiring second pixel coordinates of each of the corner points corresponding to each of the first pixel coordinates collected by the front camera to form a second pixel coordinate set;

[0047] The first pixel coordinate and the second pixel coordinate are coordinates relative to a preset back side coordinate system.

[0048] In this embodiment, the first pixel coordinates may be the pixel coordinates of each corner point collected by the back camera. The second pixel coordinate set may be the set of pixel coordinates of each corner point collected by the front camera. The second pixel coordinates may be the pixel coordinates of each corner point collected by the front camera. The back coordinate system may be a coordinate system with any corner point as the origin.

[0049] Specifically, the front camera captures corresponding corner points near the positions of each first pixel coordinate in the first pixel coordinate set to form second pixel coordinates relative to the front camera, and obtains a second pixel coordinate set formed by the second pixel coordinates obtained when capturing each corner point.

[0050] S130. Determine a relative pixel coordinate set of the front camera relative to the rear camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set.

[0051] In this embodiment, the relative pixel coordinate set may be a set of coordinates formed by transforming the second pixel coordinates relative to the first pixel coordinates as a reference point.

[0052] Specifically, determine the first pixel coordinate in the first pixel coordinate set and the second pixel coordinate in the second pixel coordinate set corresponding to the same corner point, use the difference between the horizontal coordinates of the first pixel coordinate and the second pixel coordinate corresponding to the same corner point as the horizontal coordinate of each relative pixel coordinate, and use the difference between the vertical coordinates of the first pixel coordinate and the second pixel coordinate corresponding to the same corner point as the vertical coordinate of each relative pixel coordinate, and construct a relative pixel coordinate set based on each relative pixel coordinate.

[0053] Based on the above embodiment, determining the relative pixel coordinate set of the front camera relative to the rear camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set includes the following steps:

[0054] a1) Determine a first pixel coordinate in the first pixel coordinate set and a second pixel coordinate in the second pixel coordinate set corresponding to the same corner point.

[0055] b1) taking the difference between the horizontal coordinates of the first pixel coordinate and the second pixel coordinate corresponding to the same corner point as the horizontal coordinate of each relative pixel coordinate, and taking the difference between the vertical coordinates of the first pixel coordinate and the second pixel coordinate corresponding to the same corner point as the vertical coordinate of each relative pixel coordinate, and constructing a relative pixel coordinate set based on each relative pixel coordinate.

[0056] For example, in the back coordinate system, the coordinate values ​​of the two corner points captured by the back camera are (1, 1) and (1, 3), and the coordinate values ​​of the two corresponding corner points captured by the front camera are (1, 2) and (1, 4). After conversion to relative pixel coordinates, they are (0, 1) and (0, 1).

[0057] S140 , filtering the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set to obtain a filtered relative pixel coordinate set.

[0058] In this embodiment, the distribution characteristic may be an indicator parameter of a standard data distribution condition such as a mean or variance. The filtered relative pixel coordinate set may be a set of coordinates after filtering the relative pixel coordinate set.

[0059] Specifically, the mean and variance of the horizontal coordinates of each relative pixel coordinate and the mean and variance of the vertical coordinates of each relative pixel coordinate are determined, and the relative pixel coordinates in the relative pixel coordinate set are screened according to the mean and variance to obtain the screened relative pixel coordinate set.

[0060] On the basis of the above embodiment, the relative pixel coordinates are screened based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set to obtain the screened relative pixel coordinate set, including the following steps:

[0061] a2) determining a first mean and a first variance of the abscissa of each relative pixel coordinate in the relative pixel coordinate set and a second mean and a second variance of the ordinate of each relative pixel coordinate in the relative pixel coordinate set.

[0062] b2) determining a screening threshold according to the first mean, the second mean, the first variance and the second variance; the screening threshold includes the first screening threshold and the second screening threshold.

[0063] c2) if the abscissa value in the relative pixel coordinates is less than the first screening threshold and the ordinate value in the relative pixel coordinates is less than the second screening threshold, retain the relative pixel coordinates.

[0064] d2) if the horizontal coordinate value in the relative pixel coordinate is greater than or equal to the first screening threshold or the vertical coordinate value in the relative pixel coordinate is greater than or equal to the second screening threshold, the relative pixel coordinate is deleted from the relative pixel coordinate set.

[0065] Specifically, determine the first mean and first variance of the horizontal coordinates of each relative pixel coordinate in the relative pixel coordinate set and the second mean and second variance of the vertical coordinates of each relative pixel coordinate in the relative pixel coordinate set. Determine the first screening threshold value based on the first mean and the first variance, and determine the second screening threshold value based on the second mean and the second variance. If the horizontal coordinate value in the relative pixel coordinates is less than the first screening threshold value and the vertical coordinate value in the relative pixel coordinates is less than the second screening threshold value, retain the relative pixel coordinates. If the horizontal coordinate value in the relative pixel coordinates is greater than or equal to the first screening threshold value or the vertical coordinate value in the relative pixel coordinates is greater than or equal to the second screening threshold value, delete the relative pixel coordinates from the relative pixel coordinate set.

[0066] Based on the above embodiment, determining the screening threshold according to the first mean, the second mean, the first variance and the second variance comprises the following steps:

[0067] b21) Obtaining a preset variance weight coefficient;

[0068] b22) taking the sum of the product of the first variance and the variance weight coefficient and the first mean as the first screening threshold;

[0069] b23) taking the sum of the product of the second variance and the variance weight coefficient and the second mean as the second screening threshold.

[0070] In this embodiment, the variance weight coefficient may be a pre-set parameter, which is set according to actual conditions and is not specifically limited in this embodiment.

[0071] Specifically, a preset variance weight coefficient is obtained, and the sum of the product value of the first variance and the variance weight coefficient and the first mean is used as the first screening threshold, and the sum of the product value of the second variance and the variance weight coefficient and the second mean is used as the second screening threshold.

[0072] S150. Determine the coordinates of the origin of the front camera in the back coordinate system according to the relative pixel coordinates in the filtered relative pixel coordinate set.

[0073] Specifically, the average value of the horizontal coordinates of each relative pixel coordinate in the filtered relative pixel coordinate set is used as the horizontal coordinate value of the origin coordinate of the front camera in the back coordinate system, and the average value of the vertical coordinates of each relative pixel coordinate in the filtered relative pixel coordinate set is used as the vertical coordinate value of the origin coordinate of the front camera in the back coordinate system.

[0074] Specifically, based on the above embodiment, determining the coordinates of the origin coordinates of the front camera in the back coordinate system according to the relative pixel coordinates in the relative pixel coordinate set includes the following steps:

[0075] a3) taking the average of the horizontal coordinates of each relative pixel coordinate in the screened relative pixel coordinate set as the horizontal coordinate value of the origin coordinate of the front camera in the back coordinate system.

[0076] b3) taking the average of the ordinates of the relative pixel coordinates in the screened relative pixel coordinate set as the ordinate value of the origin coordinate of the front camera in the back coordinate system.

[0077] For example, the coordinates of any target point of the back camera on the front are (x b ,y b )=(x zero ,y zero )+(x a ,y a ), (xb ,y b ) is the coordinate collected by the back camera, (x zero ,y zero ) The coordinates of the origin of the front camera in the back coordinate system.

[0078] Specifically, based on the above embodiment, before determining the relative pixel coordinate set of the front camera relative to the rear camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set, the following steps are also included:

[0079] a4) Get the position of each corner point on the calibration plate.

[0080] b4) The position is taken as the theoretical imaging position of each corner point in the front camera.

[0081] c4) determining the difference between the actual imaging position and the theoretical imaging position of each corner point in the front camera, and adjusting the second pixel coordinates in the second pixel coordinate set according to the difference.

[0082] In this embodiment, the theoretical imaging position is the theoretical imaging position of a corner point by the front camera when there is no error, and the actual imaging position is the imaging position of a corner point by the front camera when there is actually an error.

[0083] Specifically, the position of each corner point on the calibration plate is obtained. The position is used as the theoretical imaging position of each corner point in the front camera. The difference between the actual imaging position and the theoretical imaging position of each corner point in the front camera is determined, and the second pixel coordinates in the second pixel coordinate set are adjusted according to the difference.

[0084] On the basis of the above embodiment, before determining the relative pixel coordinate set of the front camera relative to the rear camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set, the following steps are also included:

[0085] a5) establishing a fitting function using a least squares method according to the second pixel coordinate set.

[0086] b5) adjusting the second pixel coordinates according to the fitting function.

[0087] In this embodiment, the least square method is a mathematical optimization technique. It finds the best function match for data by minimizing the square sum of errors. The least square method can be used to easily obtain unknown data, and minimize the square sum of errors between the obtained data and the actual data. The fitting function can be a function formed by minimizing the square sum of errors to find the best function match for data.

[0088] Specifically, a fitting function is established according to the second pixel coordinate set by using the least square method, and the second pixel coordinates are adjusted according to the fitting function so that the coordinate values ​​of the adjusted second pixel coordinates are located on the fitting function.

[0089] The present invention discloses a back alignment method, which includes: obtaining the first pixel coordinates of each corner point in a calibration plate collected by a back camera to form a first pixel coordinate set; obtaining the second pixel coordinates of each corner point corresponding to each first pixel coordinate collected by a front camera to form a second pixel coordinate set; the first pixel coordinate and the second pixel coordinate are coordinates relative to a preset back coordinate system; determining the relative pixel coordinate set of the front camera relative to the back camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set; filtering the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set to obtain a filtered relative pixel coordinate set; determining the coordinates of the origin coordinates of the front camera in the back coordinate system according to each relative pixel coordinate in the filtered relative pixel coordinate set. Utilizing this method: the acquisition error of the target image and the error caused by the movement of the alignment camera are solved.

[0090] Figure 3 The present invention also provides a schematic diagram of a back-side alignment method and device structure. Figure 3 As shown, a first acquisition module 210, a second acquisition module 220, a first determination module 230, a screening module 240 and a second determination module 250.

[0091] A first acquisition module 210 is used to acquire first pixel coordinates of each corner point in the calibration plate captured by the back camera to form a first pixel coordinate set;

[0092] A second acquisition module 220 is used to acquire second pixel coordinates of each of the corner points corresponding to each of the first pixel coordinates collected by the front camera to form a second pixel coordinate set; the first pixel coordinates and the second pixel coordinates are coordinates relative to a preset back coordinate system;

[0093] A first determining module 230, configured to determine a relative pixel coordinate set of the front camera relative to the rear camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set;

[0094] A screening module 240, configured to screen the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set to obtain a screened relative pixel coordinate set;

[0095] The second determination module 250 is used to determine the coordinates of the origin coordinates of the front camera in the back coordinate system according to the relative pixel coordinates in the filtered relative pixel coordinate set.

[0096] The technical solution provided by the embodiment of the present disclosure utilizes this method to solve the acquisition error of the target image and the error caused by the movement of the alignment camera.

[0097] Further, the first determining module 230 may be used to:

[0098] Determine the first pixel coordinates in the first pixel coordinate set and the second pixel coordinates in the second pixel coordinate set corresponding to the same corner point;

[0099] The difference between the horizontal coordinates of the first pixel coordinate and the second pixel coordinate corresponding to the same corner point is used as the horizontal coordinate of each relative pixel coordinate, and the difference between the vertical coordinates of the first pixel coordinate and the second pixel coordinate corresponding to the same corner point is used as the vertical coordinate of each relative pixel coordinate, and the relative pixel coordinate set is constructed based on each relative pixel coordinate.

[0100] Furthermore, the screening module 240 may also be used to:

[0101] Determine a first mean and a first variance of the abscissa of each relative pixel coordinate in the relative pixel coordinate set and a second mean and a second variance of the ordinate of each relative pixel coordinate in the relative pixel coordinate set;

[0102] Determine a screening threshold according to the first mean, the second mean, the first variance, and the second variance; the screening threshold includes a first screening threshold and a second screening threshold;

[0103] If the horizontal coordinate value in the relative pixel coordinate is less than the first screening threshold and the vertical coordinate value in the relative pixel coordinate is less than the second screening threshold, retain the relative pixel coordinate;

[0104] If the horizontal coordinate value in the relative pixel coordinate is greater than or equal to the first screening threshold or the vertical coordinate value in the relative pixel coordinate is greater than or equal to the second screening threshold, the relative pixel coordinate is deleted from the relative pixel coordinate set.

[0105] Furthermore, the screening module 240 may also be used to:

[0106] Get the preset variance weight coefficient;

[0107] Taking the sum of the product of the first variance and the variance weight coefficient and the first mean as the first screening threshold;

[0108] The sum of the product of the second variance and the variance weight coefficient and the second mean is used as the second screening threshold.

[0109] Further, the second determining module 250 may also be used for:

[0110] Taking the average of the horizontal coordinates of the relative pixel coordinates in the screened relative pixel coordinate set as the horizontal coordinate value of the origin coordinate of the front camera in the back coordinate system;

[0111] The average value of the ordinates of the relative pixel coordinates in the filtered relative pixel coordinate set is used as the ordinate value of the origin coordinates of the front camera in the back coordinate system.

[0112] Furthermore, the device can also be used for:

[0113] Before determining the relative pixel coordinate set of the front camera relative to the rear camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set, the method further includes:

[0114] Obtaining the position of each corner point on the calibration plate;

[0115] Taking the positions as theoretical imaging positions of each corner point in the front camera;

[0116] The difference between the actual imaging position of each corner point in the front camera and the theoretical imaging position is determined, and the second pixel coordinates in the second pixel coordinate set are adjusted according to the difference.

[0117] Furthermore, the device can also be used for:

[0118] Before determining the relative pixel coordinate set of the front camera relative to the rear camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set, the method further includes:

[0119] Establishing a fitting function using a least squares method according to the second pixel coordinate set;

[0120] The second pixel coordinates are adjusted according to the fitting function.

[0121] The above device can execute the methods provided by all the above embodiments of the present invention, and has the corresponding functional modules and beneficial effects of executing the above methods. For technical details not described in detail in this embodiment, please refer to the methods provided by all the above embodiments of the present invention.

[0122] The embodiment of the present disclosure also discloses a laser direct writing exposure device, the exposure device comprising a carrier stage assembly, an exposure assembly and an alignment assembly;

[0123] The carrying platform assembly is used to carry the substrate to be exposed;

[0124] The exposure assembly is used to expose the substrate to be exposed;

[0125] The alignment assembly is used to perform the above-mentioned back side alignment method and to calibrate the position of the substrate to be exposed in the carrier assembly.

[0126] Figure 4 A schematic diagram of the structure of an electronic device 10 that can be used to implement an embodiment of the present invention is given. The electronic device is intended to represent various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processing, cellular phones, smart phones, wearable devices (such as helmets, glasses, watches, etc.) and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely examples and are not intended to limit the implementation of the present invention described and / or required herein.

[0127] like Figure 4 As shown, the electronic device 10 includes at least one processor 11, and a memory connected to the at least one processor 11, such as a read-only memory (ROM) 12, a random access memory (RAM) 13, etc., wherein the memory stores a computer program that can be executed by at least one processor, and the processor 11 can perform various appropriate actions and processes according to the computer program stored in the read-only memory (ROM) 12 or the computer program loaded from the storage unit 18 to the random access memory (RAM) 13. In the RAM 13, various programs and data required for the operation of the electronic device 10 can also be stored. The processor 11, the ROM 12, and the RAM 13 are connected to each other through a bus 14. An input / output (I / O) interface 15 is also connected to the bus 14.

[0128] A number of components in the electronic device 10 are connected to the I / O interface 15, including: an input unit 16, such as a keyboard, a mouse, etc.; an output unit 17, such as various types of displays, speakers, etc.; a storage unit 18, such as a disk, an optical disk, etc.; and a communication unit 19, such as a network card, a modem, a wireless communication transceiver, etc. The communication unit 19 allows the electronic device 10 to exchange information / data with other devices through a computer network such as the Internet and / or various telecommunication networks.

[0129] The processor 11 may be a variety of general and / or dedicated processing components with processing and computing capabilities. Some examples of the processor 11 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various dedicated artificial intelligence (AI) computing chips, various processors running machine learning model algorithms, a digital signal processor (DSP), and any appropriate processor, controller, microcontroller, etc. The processor 11 performs the various methods and processes described above, such as the back side alignment method.

[0130] In some embodiments, the method of back side alignment may be implemented as a computer program, which is tangibly contained in a computer readable storage medium, such as a storage unit 18. In some embodiments, part or all of the computer program may be loaded and / or installed on the electronic device 10 via the ROM 12 and / or the communication unit 19. When the computer program is loaded into the RAM 13 and executed by the processor 11, one or more steps of the method of back side alignment described above may be performed. Alternatively, in other embodiments, the processor 11 may be configured to perform the method of back side alignment in any other appropriate manner (e.g., by means of firmware).

[0131] Various implementations of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field programmable gate arrays (FPGAs), application specific integrated circuits (ASICs), application specific standard products (ASSPs), systems on chips (SOCs), load programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various implementations can include: being implemented in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which can be a special purpose or general purpose programmable processor that can receive data and instructions from a storage system, at least one input device, and at least one output device, and transmit data and instructions to the storage system, the at least one input device, and the at least one output device.

[0132] Computer programs for implementing the methods of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device, so that when the computer program is executed by the processor, the functions / operations specified in the flow chart and / or block diagram are implemented. The computer program may be executed entirely on the machine, partially on the machine, partially on the machine and partially on a remote machine as a stand-alone software package, or entirely on a remote machine or server.

[0133] In the context of the present invention, a computer-readable storage medium may be a tangible medium that may contain or store a computer program for use by or in combination with an instruction execution system, device or equipment. A computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, devices or equipment, or any suitable combination of the foregoing. Alternatively, a computer-readable storage medium may be a machine-readable signal medium. A more specific example of a machine-readable storage medium may include an electrical connection based on one or more lines, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.

[0134] To provide interaction with a user, the systems and techniques described herein may be implemented on an electronic device having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and a pointing device (e.g., a mouse or trackball) through which the user can provide input to the electronic device. Other types of devices may also be used to provide interaction with the user; for example, the feedback provided to the user may be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user may be received in any form (including acoustic input, voice input, or tactile input).

[0135] The systems and techniques described herein may be implemented in a computing system that includes backend components (e.g., as a data server), or a computing system that includes middleware components (e.g., an application server), or a computing system that includes frontend components (e.g., a user computer with a graphical user interface or a web browser through which a user can interact with implementations of the systems and techniques described herein), or a computing system that includes any combination of such backend components, middleware components, or frontend components. The components of the system may be interconnected by any form or medium of digital data communication (e.g., a communication network). Examples of communication networks include: a local area network (LAN), a wide area network (WAN), a blockchain network, and the Internet.

[0136] A computing system may include a client and a server. The client and the server are generally remote from each other and usually interact through a communication network. The client and server relationship is generated by computer programs running on the corresponding computers and having a client-server relationship with each other. The server may be a cloud server, also known as a cloud computing server or cloud host, which is a host product in the cloud computing service system to solve the defects of difficult management and weak business scalability in traditional physical hosts and VPS services.

[0137] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution of the present invention can be achieved, and this document does not limit this.

[0138] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A back side alignment method, characterized in that: include: Obtaining the first pixel coordinates of each corner point in the calibration plate captured by the back camera to form a first pixel coordinate set; Acquire the second pixel coordinates of each of the corner points corresponding to each of the first pixel coordinates captured by the front camera to form a second pixel coordinate set; the first pixel coordinates and the second pixel coordinates are coordinates relative to a preset back coordinate system; Determine a relative pixel coordinate set of the front camera relative to the back camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set; Filtering the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set to obtain a filtered relative pixel coordinate set; The coordinates of the origin coordinates of the front camera in the back coordinate system are determined according to the relative pixel coordinates in the filtered relative pixel coordinate set.

2. The method according to claim 1, characterized in that The determining of a relative pixel coordinate set of the front camera relative to the rear camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set includes: Determine the first pixel coordinates in the first pixel coordinate set and the second pixel coordinates in the second pixel coordinate set corresponding to the same corner point; The difference between the horizontal coordinates of the first pixel coordinate and the second pixel coordinate corresponding to the same corner point is used as the horizontal coordinate of each relative pixel coordinate, and the difference between the vertical coordinates of the first pixel coordinate and the second pixel coordinate corresponding to the same corner point is used as the vertical coordinate of each relative pixel coordinate, and the relative pixel coordinate set is constructed based on each relative pixel coordinate.

3. The method according to claim 1, characterized in that The step of screening the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set to obtain a screened relative pixel coordinate set includes: Determine a first mean and a first variance of the abscissa of each relative pixel coordinate in the relative pixel coordinate set and a second mean and a second variance of the ordinate of each relative pixel coordinate in the relative pixel coordinate set; Determine a screening threshold according to the first mean, the second mean, the first variance, and the second variance; the screening threshold includes a first screening threshold and a second screening threshold; If the horizontal coordinate value in the relative pixel coordinate is less than the first screening threshold and the vertical coordinate value in the relative pixel coordinate is less than the second screening threshold, retain the relative pixel coordinate; If the horizontal coordinate value in the relative pixel coordinate is greater than or equal to the first screening threshold or the vertical coordinate value in the relative pixel coordinate is greater than or equal to the second screening threshold, the relative pixel coordinate is deleted from the relative pixel coordinate set.

4. The method according to claim 3, characterized in that The determining a screening threshold according to the first mean, the second mean, the first variance, and the second variance comprises: Get the preset variance weight coefficient; Taking the sum of the product of the first variance and the variance weight coefficient and the first mean as the first screening threshold; The sum of the product of the second variance and the variance weight coefficient and the second mean is used as the second screening threshold.

5. The method according to claim 1, characterized in that The determining the coordinates of the origin coordinates of the front camera in the back coordinate system according to the relative pixel coordinates in the filtered relative pixel coordinate set includes: Taking the average of the horizontal coordinates of the relative pixel coordinates in the screened relative pixel coordinate set as the horizontal coordinate value of the origin coordinate of the front camera in the back coordinate system; The average value of the ordinates of the relative pixel coordinates in the filtered relative pixel coordinate set is used as the ordinate value of the origin coordinates of the front camera in the back coordinate system.

6. The method according to claim 1, characterized in that Before determining the relative pixel coordinate set of the front camera relative to the rear camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set, the method further includes: Obtaining the position of each corner point on the calibration plate; Taking the positions as theoretical imaging positions of each corner point in the front camera; The difference between the actual imaging position of each corner point in the front camera and the theoretical imaging position is determined, and the second pixel coordinates in the second pixel coordinate set are adjusted according to the difference.

7. The method according to claim 1, characterized in that Before determining the relative pixel coordinate set of the front camera relative to the rear camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set, the method further includes: Establishing a fitting function using a least squares method according to the second pixel coordinate set; The second pixel coordinates are adjusted according to the fitting function.

8. A back side alignment device, characterized in that: include: A first acquisition module, used to acquire first pixel coordinates of each corner point in the calibration plate captured by the back camera to form a first pixel coordinate set; A second acquisition module is used to acquire second pixel coordinates of each of the corner points corresponding to each of the first pixel coordinates collected by the front camera to form a second pixel coordinate set; the first pixel coordinates and the second pixel coordinates are coordinates relative to a preset back coordinate system; A first determining module, configured to determine a relative pixel coordinate set of the front camera relative to the rear camera of each corner point based on the first pixel coordinate set and the second pixel coordinate set; A screening module, used for screening the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set to obtain a screened relative pixel coordinate set; The second determination module is used to determine the coordinates of the origin coordinates of the front camera in the back coordinate system according to the relative pixel coordinates in the filtered relative pixel coordinate set.

9. A laser direct writing exposure device, the exposure device comprising a carrier assembly, an exposure assembly and an alignment assembly; The carrying platform assembly is used to carry the substrate to be exposed; The exposure assembly is used to expose the substrate to be exposed; The alignment assembly is used to perform the backside alignment method according to any one of claims 1 to 7 and to calibrate the position of the substrate to be exposed in the carrier assembly.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer instructions, and the computer instructions are used to enable a processor to implement the backside alignment method according to any one of claims 1 to 7 when the instructions are executed.

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