A back-alignment method, device, laser direct writing exposure apparatus and medium

Abstract

The application discloses a back alignment method and device, a laser direct writing exposure equipment and a medium, and relates to the technical field of laser direct writing exposure equipment, and specifically discloses a back alignment method and device, a laser direct writing exposure equipment and a medium, which comprises the following steps: acquiring first pixel coordinates of each corner point in a calibration plate collected by a back camera, and forming a first pixel coordinate set; acquiring second pixel coordinates of each corner point corresponding to each first pixel coordinate collected by a front camera, and forming a second pixel coordinate set; determining a relative pixel coordinate set of each corner point of the front camera relative to the back camera based on the first pixel coordinate set and the second pixel coordinate set; screening the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set, and obtaining a screened relative pixel coordinate set; and determining the coordinates of the origin coordinates of the front camera in the back coordinate system according to each relative pixel coordinate in the screened relative pixel coordinate set. By using the method, the collection error of the target picture and the error caused in the moving process of the alignment camera are solved.

Description

Technical Field

[0001] The embodiments of the present invention relate to the field of identification technology, and in particular to a method, apparatus, laser direct writing exposure equipment and medium for back-side alignment. Background Technology

[0002] During the back-side alignment process using the target, due to hardware limitations, the alignment system itself has the following errors: errors in acquiring the target image and errors caused by the movement of the alignment camera.

[0003] The camera's resolution determines the upper limit of alignment accuracy. Under high-precision requirements, errors will occur when the camera grasps the target, such as errors caused by target deformation or the shift of the target's center point due to background light. Since there are multiple targets, the camera needs to be moved to the preset target position during alignment, and this movement process contains errors. Summary of the Invention

[0004] This invention provides a method, apparatus, laser direct writing exposure device, and medium for back-side alignment, which solves the problems caused by target image acquisition errors and errors during camera movement.

[0005] In a first aspect, embodiments of the present invention provide a method for back-side alignment, comprising:

[0006] Obtain the first pixel coordinates of each corner point in the calibration board captured by the rear camera, and form a set of first pixel coordinates;

[0007] The second pixel coordinates of each corner point corresponding to each first pixel coordinate captured by the front camera are obtained to form a second pixel coordinate set; the first pixel coordinates and the second pixel coordinates are coordinates relative to a preset back coordinate system;

[0008] The relative pixel coordinate set of each corner point of the front camera relative to the rear camera is determined based on the first pixel coordinate set and the second pixel coordinate set;

[0009] The relative pixel coordinates are filtered based on the distribution characteristics of each relative pixel coordinate in the set of relative pixel coordinates to obtain a filtered set of relative pixel coordinates;

[0010] The coordinates of the origin of the front camera in the back coordinate system are determined based on the relative pixel coordinates in the set of relative pixel coordinates.

[0011] Secondly, embodiments of the present invention also provide a back-side alignment device, the device comprising:

[0012] The first acquisition module is used to acquire the first pixel coordinates of each corner point in the calibration board captured by the rear camera, forming a first pixel coordinate set;

[0013] The second acquisition module is used to acquire the second pixel coordinates of each corner point corresponding to each first pixel coordinate captured by the front camera, forming a second pixel coordinate set; the first pixel coordinates and the second pixel coordinates are coordinates relative to a preset back coordinate system;

[0014] The first determining module is used to determine the relative pixel coordinate set of each corner point of the front camera relative to the rear camera based on the first pixel coordinate set and the second pixel coordinate set;

[0015] The filtering module is used to filter the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set, so as to obtain a filtered relative pixel coordinate set.

[0016] The second determining module is used to determine the coordinates of the origin coordinates of the front camera in the back coordinate system based on each relative pixel coordinate in the set of filtered relative pixel coordinates.

[0017] Thirdly, embodiments of this disclosure also provide a laser direct-write exposure apparatus, the laser direct-write exposure apparatus comprising:

[0018] The stage assembly is used to support the substrate to be exposed.

[0019] The exposure component is used to expose the substrate to be exposed;

[0020] The alignment component is used to implement the back-side alignment method provided in the embodiments of this disclosure and to calibrate the position of the substrate to be exposed in the stage assembly.

[0021] Fourthly, embodiments of this disclosure also provide a storage medium containing computer-executable instructions, which, when executed by a computer processor, are used to perform the back-side alignment method provided in embodiments of this disclosure.

[0022] Fifthly, embodiments of this disclosure also provide a computer program product, the computer program product including a computer program that, when executed by a processor, implements the back-side alignment method provided in embodiments of this disclosure.

[0023] This invention discloses a method, apparatus, laser direct-write exposure device, and medium for back-side alignment. The method includes: acquiring the first pixel coordinates of each corner point in a calibration board captured by a back-side camera, forming a first pixel coordinate set; acquiring the second pixel coordinates of each corner point corresponding to each of the first pixel coordinates captured by a front-side camera, forming a second pixel coordinate set; the first pixel coordinates and the second pixel coordinates are coordinates relative to a preset back-side coordinate system; determining the relative pixel coordinate set of each corner point relative to the back-side camera based on the first pixel coordinate set and the second pixel coordinate set; filtering the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set, obtaining a filtered relative pixel coordinate set; and determining the coordinates of the origin coordinates of the front-side camera in the back-side coordinate system based on each relative pixel coordinate in the filtered relative pixel coordinate set. This method solves the problems of target image acquisition errors and errors caused by camera movement during alignment. Attached Figure Description

[0024] The above and other features, advantages, and aspects of the embodiments of this disclosure will become more apparent from the accompanying drawings and the following detailed description. Throughout the drawings, the same or similar reference numerals denote the same or similar elements. It should be understood that the drawings are schematic, and the originals and elements are not necessarily drawn to scale.

[0025] Figure 1 A flowchart illustrating a back-side alignment method provided in an embodiment of this disclosure;

[0026] Figure 2 An example diagram of a back-side alignment system provided in an embodiment of this disclosure;

[0027] Figure 3 A schematic diagram of a back-aligned device provided in an embodiment of this disclosure;

[0028] Figure 4 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this disclosure. Detailed Implementation

[0029] Embodiments of this disclosure will now be described in more detail with reference to the accompanying drawings. While some embodiments of this disclosure are shown in the drawings, it should be understood that this disclosure can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of this disclosure. It should be understood that the accompanying drawings and embodiments of this disclosure are for illustrative purposes only and are not intended to limit the scope of protection of this disclosure.

[0030] It should be understood that the steps described in the method embodiments of this disclosure may be performed in different orders and / or in parallel. Furthermore, the method embodiments may include additional steps and / or omit the steps shown. The scope of this disclosure is not limited in this respect.

[0031] The term "comprising" and its variations as used herein are open-ended inclusions, meaning "including but not limited to". The term "based on" means "at least partially based on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". Definitions of other terms will be given in the description below.

[0032] It should be noted that the concepts of "first" and "second" mentioned in this disclosure are used only to distinguish different devices, modules or units, and are not used to limit the order of functions performed by these devices, modules or units or their interdependencies.

[0033] It should be noted that the terms "a" and "a plurality of" used in this disclosure are illustrative rather than restrictive, and those skilled in the art should understand that, unless otherwise expressly indicated in the context, they should be understood as "one or more".

[0034] The names of messages or information exchanged between multiple devices in the embodiments of this disclosure are for illustrative purposes only and are not intended to limit the scope of such messages or information.

[0035] It is understood that before using the technical solutions disclosed in the various embodiments of this disclosure, users should be informed of the types, scope of use, and usage scenarios of the personal information involved in this disclosure in an appropriate manner in accordance with relevant laws and regulations, and user authorization should be obtained.

[0036] For example, upon receiving a user's active request, a prompt message is sent to the user to explicitly inform them that the requested operation will require the acquisition and use of the user's personal information. This allows the user to independently choose whether to provide personal information to the software or hardware, such as the electronic device, application, server, or storage medium performing the operations of this disclosed technical solution, based on the prompt message.

[0037] As an optional but non-limiting implementation, in response to a user's active request, sending a prompt message to the user can be done via a pop-up window, where the prompt message can be presented in text format. Furthermore, the pop-up window can also include a selection control allowing the user to choose "agree" or "disagree" to provide personal information to the electronic device.

[0038] It is understood that the above notification and user authorization process are merely illustrative and do not constitute a limitation on the implementation of this disclosure. Other methods that comply with relevant laws and regulations may also be applied to the implementation of this disclosure.

[0039] It is understood that the data involved in this technical solution (including but not limited to the data itself, the acquisition or use of the data) shall comply with the requirements of relevant laws, regulations and related provisions.

[0040] Example 1

[0041] Figure 1 This is a flowchart illustrating a back-side alignment method provided by an embodiment of the present disclosure. This embodiment addresses situations where, during back-side alignment of a target, the alignment system itself contains errors due to hardware limitations. The method can be executed by a back-side alignment apparatus, which can be implemented in software and / or hardware, optionally through an electronic device such as a mobile terminal, PC, or server.

[0042] like Figure 1 As shown in the embodiments of this disclosure, a back-side alignment method may specifically include the following steps:

[0043] S110. Obtain the first pixel coordinates of each corner point in the calibration board captured by the rear camera, and form a set of first pixel coordinates.

[0044] In this embodiment, Figure 2 An example diagram of a back-side alignment system provided for an embodiment of this disclosure. Figure 2 As shown, 4 represents the wafer with the calibration plate, 2 represents the fixed rear-side camera, and 1 represents the movable front-side camera. The calibration plate can be made of a transparent material. One or more front-side cameras can be deployed, with corner points evenly distributed on the calibration plate, and the horizontal, vertical, and angular spacing of each corner point being equal and fixed. The first pixel set can be the set of pixel coordinates of each corner point on the calibration plate acquired by the rear-side camera.

[0045] Specifically, this step is used to obtain the set of first pixel coordinates of each corner point in the calibration board captured by the rear camera.

[0046] S120. Obtain the second pixel coordinates of each corner point corresponding to each first pixel coordinate captured by the front camera, and form a set of second pixel coordinates.

[0047] The first pixel coordinates and the second pixel coordinates are coordinates relative to a preset back coordinate system.

[0048] In this embodiment, the first pixel coordinates can be the pixel coordinates of each corner point captured by the rear camera. The second pixel coordinate set can be the set of pixel coordinates of each corner point captured by the front camera. The rear coordinate system can be a coordinate system with any corner point as the origin.

[0049] Specifically, the front camera captures the corresponding corner points near the positions of the first pixel coordinates in the first pixel coordinate set, forming the second pixel coordinates relative to the front camera, and obtains the second pixel coordinate set formed by the second pixel coordinates obtained when capturing each corner point.

[0050] S130. Determine the relative pixel coordinate set of each corner point of the front camera relative to the rear camera based on the first pixel coordinate set and the second pixel coordinate set.

[0051] In this embodiment, the set of relative pixel coordinates can be the set of coordinates formed by transforming the second pixel coordinates relative to the first pixel coordinates as a reference point.

[0052] Specifically, the first pixel coordinate in the first pixel coordinate set corresponding to the same corner point and the second pixel coordinate in the second pixel coordinate set are determined. The difference between the abscissas of the first pixel coordinate and the second pixel coordinate corresponding to the same corner point is used as the abscissa of each relative pixel coordinate, and the difference between the ordinates of the first pixel coordinate and the second pixel coordinate corresponding to the same corner point is used as the ordinate of each relative pixel coordinate. A relative pixel coordinate set is constructed based on each relative pixel coordinate.

[0053] Based on the above embodiments, determining the relative pixel coordinate set of each corner point of the front camera relative to the rear camera based on the first pixel coordinate set and the second pixel coordinate set includes the following steps:

[0054] a1) Determine the first pixel coordinate in the first pixel coordinate set corresponding to the same corner point and the second pixel coordinate in the second pixel coordinate set.

[0055] b1) Take the difference between the x-coordinates of the first and second pixel coordinates corresponding to the same corner point as the x-coordinate of each relative pixel coordinate, and take the difference between the y-coordinates of the first and second pixel coordinates corresponding to the same corner point as the y-coordinate of each relative pixel coordinate, and construct a set of relative pixel coordinates based on each relative pixel coordinate.

[0056] For example, in the back coordinate system, the coordinates of two corner points captured by the back camera are (1, 1) and (1, 3), and the coordinates of the two corresponding corner points captured by the front camera are (1, 2) and (1, 4). After conversion to relative pixel coordinates, they are (0, 1) and (0, 1).

[0057] S140. Based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set, the relative pixel coordinates are filtered to obtain the filtered relative pixel coordinate set.

[0058] In this embodiment, the distribution characteristic can be an index parameter indicating the distribution of standard data, such as the mean or variance. The set of relative pixel coordinates can be a set of coordinates obtained by filtering the set of relative pixel coordinates.

[0059] Specifically, the mean and variance of the x-coordinate and the mean and variance of the y-coordinate of each relative pixel coordinate are determined. Based on the mean and variance, the relative pixel coordinates in the set of relative pixel coordinates are filtered to obtain the filtered set of relative pixel coordinates.

[0060] Based on the above embodiments, the relative pixel coordinates are filtered according to the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set to obtain the filtered relative pixel coordinate set, which includes the following steps:

[0061] a2) Determine the first mean and first variance of the abscissa of each relative pixel coordinate in the relative pixel coordinate set, and the second mean and second variance of the ordinate of each relative pixel coordinate in the relative pixel coordinate set.

[0062] b2) Determine the screening threshold based on the first mean, the second mean, the first variance, and the second variance; the screening threshold includes the first screening threshold and the second screening threshold.

[0063] c2) If the x-coordinate value in the relative pixel coordinates is less than the first filtering threshold and the y-coordinate value in the relative pixel coordinates is less than the second filtering threshold, retain the relative pixel coordinates.

[0064] d2) If the x-coordinate value in the relative pixel coordinates is greater than or equal to the first filtering threshold or the y-coordinate value in the relative pixel coordinates is greater than or equal to the second filtering threshold, delete the relative pixel coordinates from the set of relative pixel coordinates.

[0065] Specifically, a first mean and a first variance of the x-coordinates of each relative pixel coordinate in the relative pixel coordinate set are determined, along with a second mean and a second variance of the y-coordinates. A first filtering threshold is determined based on the first mean and the first variance, and a second filtering threshold is determined based on the second mean and the second variance. If the x-coordinate value of a relative pixel coordinate is less than the first filtering threshold and the y-coordinate value is less than the second filtering threshold, the relative pixel coordinate is retained. If the x-coordinate value of a relative pixel coordinate is greater than or equal to the first filtering threshold, or the y-coordinate value is greater than or equal to the second filtering threshold, the relative pixel coordinate is deleted from the relative pixel coordinate set.

[0066] Based on the above embodiments, determining the screening threshold according to the first mean, the second mean, the first variance, and the second variance includes the following steps:

[0067] b21) Obtain the preset variance weighting coefficients;

[0068] b22) The sum of the product of the first variance and the variance weighting coefficient and the first mean is used as the first screening threshold;

[0069] b23) The sum of the product of the second variance and the variance weighting coefficient and the second mean is used as the second screening threshold.

[0070] In this embodiment, the variance weighting coefficient can be a pre-set parameter, which can be set according to the actual situation, and is not specifically limited in this embodiment.

[0071] Specifically, a preset variance weighting coefficient is obtained, and the sum of the product of the first variance and the variance weighting coefficient and the first mean is used as the first screening threshold. The sum of the product of the second variance and the variance weighting coefficient and the second mean is used as the second screening threshold.

[0072] S150. Determine the coordinates of the origin of the front camera in the back coordinate system based on the relative pixel coordinates in the set of filtered relative pixel coordinates.

[0073] Specifically, the average of the abscissas of each relative pixel coordinate in the set of filtered relative pixel coordinates is used as the abscissa value of the origin coordinate of the front camera in the back coordinate system, and the average of the ordinates of each relative pixel coordinate in the set of filtered relative pixel coordinates is used as the ordinate value of the origin coordinate of the front camera in the back coordinate system.

[0074] Specifically, based on the above embodiments, determining the coordinates of the origin of the front camera in the back coordinate system according to each relative pixel coordinate in the filtered relative pixel coordinate set includes the following steps:

[0075] a3) The mean of the abscissas of each relative pixel coordinate in the set of filtered relative pixel coordinates is used as the abscissa value of the origin coordinate of the front camera in the back coordinate system.

[0076] b3) The mean of the ordinates of each relative pixel coordinate in the set of relative pixel coordinates is used as the ordinate of the origin coordinate of the front camera in the back coordinate system.

[0077] For example, the coordinates of any target point on the rear camera are (x... b y b )=(x zero y zero )+(x a y a ), (xb y b (x) represents the coordinates captured by the rear camera. zero y zero The coordinates of the origin of the front camera in the back coordinate system.

[0078] Specifically, based on the above embodiments, before determining the relative pixel coordinate set of each corner point of the front camera relative to the rear camera based on the first pixel coordinate set and the second pixel coordinate set, the following steps are also included:

[0079] a4) Obtain the position of each corner point on the calibration plate.

[0080] b4) The position is taken as the theoretical imaging position of each corner point in the front camera.

[0081] c4) Determine the difference between the actual and theoretical imaging positions of each corner point in the front camera, and adjust the second pixel coordinates in the second pixel coordinate set according to the difference.

[0082] In this embodiment, the theoretical imaging position is the theoretical imaging position of a corner point by the front camera when there is no error, while the actual imaging position is the imaging position of a corner point by the front camera when there is an actual error.

[0083] Specifically, the positions of each corner point on the calibration board are obtained. These positions are then used as the theoretical imaging positions of each corner point in the front-facing camera. The difference between the actual and theoretical imaging positions of each corner point in the front-facing camera is determined, and the second pixel coordinates in the second pixel coordinate set are adjusted according to the magnitude of this difference.

[0084] Based on the above embodiments, before determining the relative pixel coordinate set of each corner point from the front camera to the rear camera based on the first pixel coordinate set and the second pixel coordinate set, the following steps are also included:

[0085] a5) Establish a fitting function based on the second pixel coordinate set using the least squares method.

[0086] b5) Adjust the coordinates of the second pixel according to the fitting function.

[0087] In this embodiment, the least squares method is a mathematical optimization technique. It finds the best function match for the data by minimizing the sum of squared errors. The least squares method can be used to easily obtain unknown data while minimizing the sum of squared errors between the obtained data and the actual data. The fitting function can be the function formed by finding the best function match for the data by minimizing the sum of squared errors.

[0088] Specifically, a fitting function is established using the least squares method based on the set of second pixel coordinates. The second pixel coordinates are then adjusted according to the fitting function so that the adjusted second pixel coordinates lie on the fitting function.

[0089] This invention discloses a back-side alignment method, which includes: acquiring the first pixel coordinates of each corner point in a calibration board captured by a back-side camera, forming a first pixel coordinate set; acquiring the second pixel coordinates of each corner point corresponding to each first pixel coordinate captured by a front-side camera, forming a second pixel coordinate set; the first and second pixel coordinates are coordinates relative to a preset back-side coordinate system; determining the relative pixel coordinate set of each corner point relative to the back-side camera based on the first and second pixel coordinate sets; filtering the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set, obtaining a filtered relative pixel coordinate set; and determining the coordinates of the origin coordinates of the front-side camera in the back-side coordinate system based on each relative pixel coordinate in the filtered relative pixel coordinate set. This method solves the problems of target image acquisition errors and errors caused by camera movement during alignment.

[0090] Figure 3 A schematic diagram of a back-side alignment method apparatus is also provided as an embodiment of the present invention, as shown below. Figure 3 As shown, there are a first acquisition module 210, a second acquisition module 220, a first determination module 230, a filtering module 240, and a second determination module 250.

[0091] The first acquisition module 210 is used to acquire the first pixel coordinates of each corner point in the calibration board captured by the rear camera, and form a first pixel coordinate set.

[0092] The second acquisition module 220 is used to acquire the second pixel coordinates of each corner point corresponding to each first pixel coordinate captured by the front camera, forming a second pixel coordinate set; the first pixel coordinates and the second pixel coordinates are coordinates relative to a preset back coordinate system;

[0093] The first determining module 230 is used to determine the relative pixel coordinate set of each corner point of the front camera relative to the rear camera based on the first pixel coordinate set and the second pixel coordinate set;

[0094] The filtering module 240 is used to filter the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set, so as to obtain a filtered relative pixel coordinate set.

[0095] The second determining module 250 is used to determine the coordinates of the origin coordinates of the front camera in the back coordinate system based on each relative pixel coordinate in the set of filtered relative pixel coordinates.

[0096] The technical solution provided in this disclosure uses this method to solve the problems of target image acquisition error and error caused by camera movement.

[0097] Furthermore, the first determining module 230 can be used for:

[0098] Determine the first pixel coordinate in the first pixel coordinate set corresponding to the same corner point and the second pixel coordinate in the second pixel coordinate set;

[0099] The difference between the x-coordinates of the first pixel coordinate and the second pixel coordinate corresponding to the same corner point is used as the x-coordinate of each relative pixel coordinate, and the difference between the y-coordinates of the first pixel coordinate and the second pixel coordinate corresponding to the same corner point is used as the y-coordinate of each relative pixel coordinate, and the relative pixel coordinate set is constructed based on each relative pixel coordinate.

[0100] Furthermore, the filtering module 240 can also be used for:

[0101] Determine the first mean and first variance of the abscissa of each relative pixel coordinate in the set of relative pixel coordinates, and the second mean and second variance of the ordinate of each relative pixel coordinate in the set of relative pixel coordinates;

[0102] A screening threshold is determined based on the first mean, the second mean, the first variance, and the second variance; the screening threshold includes a first screening threshold and a second screening threshold.

[0103] If the x-coordinate value of the relative pixel coordinates is less than the first filtering threshold and the y-coordinate value of the relative pixel coordinates is less than the second filtering threshold, the relative pixel coordinates are retained.

[0104] If the horizontal coordinate value of the relative pixel coordinate is greater than or equal to the first filtering threshold, or the vertical coordinate value of the relative pixel coordinate is greater than or equal to the second filtering threshold, the relative pixel coordinate is deleted from the set of relative pixel coordinates.

[0105] Furthermore, the filtering module 240 can also be used for:

[0106] Obtain the preset variance weighting coefficients;

[0107] The sum of the product of the first variance and the variance weighting coefficient and the first mean is used as the first screening threshold;

[0108] The product of the second variance and the variance weighting coefficient, plus the second mean, is used as the second screening threshold.

[0109] Furthermore, the second determining module 250 can also be used for:

[0110] The average of the abscissas of each relative pixel coordinate in the set of filtered relative pixel coordinates is used as the abscissa value of the origin coordinate of the front camera in the back coordinate system.

[0111] The mean of the ordinates of each relative pixel coordinate in the set of filtered relative pixel coordinates is used as the ordinate value of the origin coordinate of the front camera in the back coordinate system.

[0112] Furthermore, the device can also be used for:

[0113] Before determining the relative pixel coordinate set of each corner point of the front camera relative to the rear camera based on the first pixel coordinate set and the second pixel coordinate set, the method further includes:

[0114] Obtain the position of each corner point on the calibration plate;

[0115] The aforementioned positions are taken as the theoretical imaging positions of each corner point in the front-facing camera;

[0116] The difference between the actual imaging position and the theoretical imaging position of each corner point in the front camera is determined, and the second pixel coordinates in the second pixel coordinate set are adjusted according to the difference.

[0117] Furthermore, the device can also be used for:

[0118] Before determining the relative pixel coordinate set of each corner point of the front camera relative to the rear camera based on the first pixel coordinate set and the second pixel coordinate set, the method further includes:

[0119] A fitting function is established based on the second set of pixel coordinates using the least squares method;

[0120] The coordinates of the second pixel are adjusted according to the fitting function.

[0121] The above-described apparatus can execute the methods provided in all the foregoing embodiments of the present invention, and has the corresponding functional modules and beneficial effects for executing the above methods. Technical details not described in detail in this embodiment can be found in the methods provided in all the foregoing embodiments of the present invention.

[0122] This disclosure also discloses a laser direct writing exposure apparatus, the exposure apparatus including a stage assembly, an exposure assembly, and an alignment assembly;

[0123] The stage assembly is used to support the substrate to be exposed.

[0124] The exposure component is used to expose the substrate to be exposed;

[0125] The alignment component is used to perform the back-side alignment method described above and to calibrate the position of the substrate to be exposed in the stage assembly.

[0126] Figure 4 A schematic diagram of an electronic device 10, which can be used to implement embodiments of the present invention, is provided. The electronic device is intended to represent various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processors, cellular phones, smartphones, wearable devices (e.g., helmets, glasses, watches, etc.), and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely illustrative and are not intended to limit the implementation of the invention described and / or claimed herein.

[0127] like Figure 4 As shown, the electronic device 10 includes at least one processor 11 and a memory, such as a read-only memory (ROM) 12 or a random access memory (RAM) 13, communicatively connected to the at least one processor 11. The memory stores computer programs executable by the at least one processor. The processor 11 can perform various appropriate actions and processes based on the computer program stored in the ROM 12 or loaded from storage unit 18 into the RAM 13. The RAM 13 may also store various programs and data required for the operation of the electronic device 10. The processor 11, ROM 12, and RAM 13 are interconnected via a bus 14. An input / output (I / O) interface 15 is also connected to the bus 14.

[0128] Multiple components in electronic device 10 are connected to I / O interface 15, including: input unit 16, such as keyboard, mouse, etc.; output unit 17, such as various types of displays, speakers, etc.; storage unit 18, such as disk, optical disk, etc.; and communication unit 19, such as network card, modem, wireless transceiver, etc. Communication unit 19 allows electronic device 10 to exchange information / data with other devices through computer networks such as the Internet and / or various telecommunications networks.

[0129] Processor 11 can be a variety of general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of processor 11 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various special-purpose artificial intelligence (AI) computing chips, various processors running machine learning model algorithms, a digital signal processor (DSP), and any suitable processor, controller, microcontroller, etc. Processor 11 performs the various methods and processes described above, such as the back-alignment method.

[0130] In some embodiments, the back-side alignment method may be implemented as a computer program tangibly contained in a computer-readable storage medium, such as storage unit 18. In some embodiments, part or all of the computer program may be loaded and / or mounted on electronic device 10 via ROM 12 and / or communication unit 19. When the computer program is loaded into RAM 13 and executed by processor 11, one or more steps of the back-side alignment method described above may be performed. Alternatively, in other embodiments, processor 11 may be configured to perform the back-side alignment method by any other suitable means (e.g., by means of firmware).

[0131] Various embodiments of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field-programmable gate arrays (FPGAs), application-specific integrated circuits (ASICs), application-specific standard products (ASSPs), systems-on-a-chip (SoCs), payload-programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various embodiments may include implementations in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which may be a dedicated or general-purpose programmable processor, capable of receiving data and instructions from a storage system, at least one input device, and at least one output device, and transmitting data and instructions to the storage system, the at least one input device, and the at least one output device.

[0132] Computer programs used to implement the methods of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device, such that when executed by the processor, the computer programs cause the functions / operations specified in the flowcharts and / or block diagrams to be performed. The computer programs may be executed entirely on a machine, partially on a machine, or as a standalone software package, partially on a machine and partially on a remote machine, or entirely on a remote machine or server.

[0133] In the context of this invention, a computer-readable storage medium can be a tangible medium that may contain or store a computer program for use by or in conjunction with an instruction execution system, apparatus, or device. A computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination thereof. Alternatively, a computer-readable storage medium may be a machine-readable signal medium. More specific examples of machine-readable storage media include electrical connections based on one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fibers, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof.

[0134] To provide interaction with a user, the systems and techniques described herein can be implemented on an electronic device having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse or trackball) through which the user provides input to the electronic device. Other types of devices can also be used to provide interaction with the user; for example, feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including sound input, voice input, or tactile input).

[0135] The systems and technologies described herein can be implemented in computing systems that include backend components (e.g., as data servers), or computing systems that include middleware components (e.g., application servers), or computing systems that include frontend components (e.g., user computers with graphical user interfaces or web browsers through which users can interact with implementations of the systems and technologies described herein), or any combination of such backend, middleware, or frontend components. The components of the system can be interconnected via digital data communication of any form or medium (e.g., communication networks). Examples of communication networks include local area networks (LANs), wide area networks (WANs), blockchain networks, and the Internet.

[0136] A computing system can include clients and servers. Clients and servers are generally located far apart and typically interact through communication networks. The client-server relationship is created by computer programs running on the respective computers and having a client-server relationship with each other. The server can be a cloud server, also known as a cloud computing server or cloud host, which is a hosting product within the cloud computing service system to address the shortcomings of traditional physical hosts and VPS services, such as high management difficulty and weak business scalability.

[0137] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and this is not limited herein.

[0138] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A back-alignment method, characterized by, The method comprises: acquiring first pixel coordinates of each corner point in a calibration board captured by a back camera to form a first pixel coordinate set; acquiring second pixel coordinates of each corner point corresponding to each first pixel coordinate captured by a front camera to form a second pixel coordinate set; the first pixel coordinates and the second pixel coordinates are coordinates relative to a preset back coordinate system; determining a relative pixel coordinate set of each corner point of the front camera relative to the back camera based on the first pixel coordinate set and the second pixel coordinate set; screening the relative pixel coordinates based on distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set to obtain a screened relative pixel coordinate set; determining a coordinate of an origin point coordinate of the front camera in the back coordinate system according to each relative pixel coordinate in the screened relative pixel coordinate set.

2. The method of claim 1, wherein, The method of determining the relative pixel coordinate set of each corner point of the front camera relative to the back camera based on the first pixel coordinate set and the second pixel coordinate set comprises: determining the first pixel coordinates in the first pixel coordinate set and the second pixel coordinates in the second pixel coordinate set corresponding to the same corner point; taking a difference value between the horizontal coordinates of the first pixel coordinates and the second pixel coordinates corresponding to the same corner point as the horizontal coordinate of each relative pixel coordinate, and taking a difference value between the vertical coordinates of the first pixel coordinates and the second pixel coordinates corresponding to the same corner point as the vertical coordinate of each relative pixel coordinate, and constructing the relative pixel coordinate set based on each relative pixel coordinate.

3. The method of claim 1, wherein, The method of screening the relative pixel coordinates based on the distribution characteristics of each relative pixel coordinate in the relative pixel coordinate set to obtain a screened relative pixel coordinate set comprises: determining a first mean value and a first variance of the horizontal coordinates of each relative pixel coordinate in the relative pixel coordinate set, and a second mean value and a second variance of the vertical coordinates of each relative pixel coordinate in the relative pixel coordinate set; determining a screening threshold value according to the first mean value, the second mean value, the first variance and the second variance; the screening threshold value comprises a first screening threshold value and a second screening threshold value; if the horizontal coordinate value of the relative pixel coordinate is less than the first screening threshold value and the vertical coordinate value of the relative pixel coordinate is less than the second screening threshold value, the relative pixel coordinate is retained; if the horizontal coordinate value of the relative pixel coordinate is greater than or equal to the first screening threshold value or the vertical coordinate value of the relative pixel coordinate is greater than or equal to the second screening threshold value, the relative pixel coordinate is deleted from the relative pixel coordinate set.

4. The method of claim 3, wherein, The method of determining a screening threshold value according to the first mean value, the second mean value, the first variance and the second variance comprises: acquiring a preset variance weight coefficient; taking a product value of the first variance and the variance weight coefficient and a sum of the first mean value as the first screening threshold value; taking a product value of the second variance and the variance weight coefficient and a sum of the second mean value as the second screening threshold value.

5. The method of claim 1, wherein, The method further includes: The mean value of the horizontal coordinates of the selected relative pixel coordinates is taken as the horizontal coordinate value of the origin coordinate of the front camera in the back coordinate system; The mean value of the vertical coordinates of the selected relative pixel coordinates is taken as the vertical coordinate value of the origin coordinate of the front camera in the back coordinate system.

6. The method of claim 1, wherein, The method further includes: The positions of the corner points on the calibration board are obtained; The positions are taken as the theoretical imaging positions of the corner points in the front camera; The difference between the actual imaging positions of the corner points in the front camera and the theoretical imaging positions is determined, and the second pixel coordinates in the second pixel coordinate set are adjusted according to the difference.

7. The method of claim 1, wherein, The method further includes: A fitting function is established by using a least square method according to the second pixel coordinate set; The second pixel coordinates are adjusted according to the fitting function.

8. A back-to-back device, characterized in that The method further includes: The first acquisition module is configured to acquire first pixel coordinates of corner points in a calibration board collected by a back camera, and form a first pixel coordinate set; The second acquisition module is configured to acquire second pixel coordinates of the corner points corresponding to the first pixel coordinates collected by a front camera, and form a second pixel coordinate set; the first pixel coordinates and the second pixel coordinates are coordinates relative to a preset back coordinate system; The first determination module is configured to determine a relative pixel coordinate set of the front camera relative to the back camera based on the first pixel coordinate set and the second pixel coordinate set; The screening module is configured to screen the relative pixel coordinates based on the distribution characteristics of the relative pixel coordinates in the relative pixel coordinate set, and obtain a selected relative pixel coordinate set; The second determination module is configured to determine the coordinates of the origin coordinate of the front camera in the back coordinate system according to the relative pixel coordinates in the selected relative pixel coordinate set.

9. A laser direct writing exposure apparatus, the exposure apparatus comprising a carrier stage assembly, an exposure assembly, and an alignment assembly; The carrier stage assembly is configured to carry a substrate to be exposed; The exposure assembly is configured to expose the substrate to be exposed; The alignment assembly is configured to perform the back alignment method of any one of claims 1-7 and to calibrate the position of the substrate to be exposed in the carrier stage assembly.

10. A computer-readable storage medium, characterized in that, The computer readable storage medium stores computer instructions for causing the processor to implement the back alignment method of any one of claims 1-7 when executed. The computer readable storage medium stores computer instructions for causing the processor to implement the back alignment method of any one of claims 1-7 when executed.

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