Process for reducing cost, improving efficiency and improving steps of visual inspection table

Abstract

The invention relates to a process for reducing cost, improving efficiency and improving steps of a visual inspection table, which belongs to the technical field of silicon wafer detection and comprises the following operation steps of: 1, starting appearance detection software after a visual inspection table system is started; 2, inputting an operator number and a Recipe number on a check page; 3, placing the wafer box to be detected in the corresponding detection port, and scanning the silicon wafer; and after scanning is finished, clicking inspection to start appearance detection. Fourthly, after each step of inspection is completed, if no badness is found, an OK button on the operation table is clicked to enter the next procedure; if bad items are found, the NG button is pressed, and after the bad items are confirmed again through manual operation, the NG button is pressed again to enter the next procedure. And 5, after all inspection steps are finished, selecting bad items on an operation interface, and making corresponding records on appearance inspection records and follow-up work orders. On the premise of ensuring the visual inspection efficiency and accuracy, the step time is shortened, the productivity is improved, and the cost is reduced.

Description

Technical Field

[0001] The present invention relates to the field of silicon wafer inspection technology, and in particular to a process for reducing costs, increasing efficiency and improving visual inspection steps. Background Art

[0002] In the production and processing of semiconductor wafers, the final appearance inspection is a necessary process. Its purpose is: (1) to be responsible for the inspection of the front and back periphery of the product appearance. (2) to be used for product quality inspection to ensure product appearance standards.

[0003] The inspection steps of the visual inspection station are as follows: 1. Front flat spotlight 2. Front oblique spotlight 3. Front fluorescent light 4. Back fluorescent light 5. Back flat spotlight 6. Back oblique spotlight 7. Periphery. Through these 7 steps of visual inspection, it takes 55 minutes to manually inspect a box of products from entering the station to leaving the station, and the daily production capacity is about 650 pieces. Summary of the invention

[0004] The present invention mainly solves the deficiencies in the prior art and provides a cost-reducing and efficiency-enhancing improved visual inspection station step process, which improves the existing inspection steps to shorten repetitive actions, shortens step time, improves production capacity and reduces costs while ensuring visual inspection efficiency and accuracy.

[0005] The above technical problems of the present invention are mainly solved by the following technical solutions: A process for reducing costs and increasing efficiency by improving visual inspection steps includes the following steps: Step 1: After the visual inspection system is started, open the appearance inspection software.

[0006] Step 2: Enter the operator number and recipe number on the inspection page.

[0007] Step 3: Place the wafer box to be inspected into the corresponding inspection port and scan the silicon wafer; after scanning, select the silicon wafer number to be inspected, and after selection, click Check to start appearance inspection.

[0008] Step 4: After each step of inspection, if no defect is found, click the OK button on the console to proceed to the next step; if a defect is found, press the NG button. After manually confirming the defect again, press the NG button again to proceed to the next step.

[0009] Step 5: After all inspection steps are completed, select the defective items in the operation interface and make corresponding records in the appearance inspection record and the accompanying work order.

[0010] Preferably, the appearance inspection device will automatically initialize, and after the initialization is completed, click the inspection process to enter the inspection page.

[0011] Preferably, after the cassette to be inspected is placed with a number, the corresponding inspection port where the cassette is placed is selected on the inspection interface, and MAPPING is clicked to perform the scanning operation.

[0012] The present invention can achieve the following effects: The present invention provides a cost-reducing and efficiency-enhancing visual inspection process. Compared with the prior art, the existing inspection steps are improved to shorten repeated actions. Under the premise of ensuring the efficiency and accuracy of visual inspection, the step time is shortened, the production capacity is increased and the cost is reduced. The daily output is increased to 900 pieces, and the visual inspection time for one box is improved to 40 minutes, which is 15 minutes more efficient than before, and the repeated inspection steps are shortened. DETAILED DESCRIPTION

[0013] The technical solution of the invention is further specifically described below through embodiments.

[0014] Embodiment: A process for reducing costs and increasing efficiency to improve visual inspection steps includes the following steps: Step 1: After the visual inspection system is started, open the appearance inspection software. The appearance inspection device will automatically initialize. After initialization, click Inspection Process to enter the inspection page.

[0015] Step 2: Enter the operator number and recipe number on the inspection page.

[0016] Step 3: Place the wafer box to be inspected in the corresponding inspection port. After placing the wafer box number, select the corresponding inspection port where the wafer box is placed in the inspection interface, and click MAPPING to scan the silicon wafer. After scanning, select the silicon wafer number to be inspected, and click Inspect to start the appearance inspection.

[0017] Step 4: After each step of inspection, if no defect is found, click the OK button on the console to proceed to the next step; if a defect is found, press the NG button. After manually confirming the defect again, press the NG button again to proceed to the next step.

[0018] Step 5: After all inspection steps are completed, select the defective items in the operation interface and make corresponding records in the appearance inspection record and the accompanying work order.

[0019] In summary, this cost reduction and efficiency improvement improves the visual inspection station step process, improves the existing inspection steps, shortens repetitive actions, shortens step time, improves production capacity and reduces costs while ensuring visual inspection efficiency and accuracy.

[0020] The above description is only a specific embodiment of the present invention, but the structural features of the present invention are not limited thereto. Any changes or modifications made by any technician in the field of the present invention are included in the patent scope of the present invention.

Claims

1. A process for reducing costs and increasing efficiency to improve the visual inspection process, characterized in that The steps are as follows: Step 1: After the visual inspection system is started, open the appearance inspection software; Step 2: Enter the operator number and recipe number on the check page; Step 3: Place the wafer box to be inspected into the corresponding inspection port and scan the wafer. After scanning, select the wafer number to be inspected. After selecting, click Check to start the appearance inspection. Step 4: After each step of inspection is completed, if no defect is found, click the OK button on the operation table to enter the next step; if a defective item is found, press the NG button, manually confirm the defective item again, and press the NG button again to enter the next step; Step 5: After all inspection steps are completed, select the defective items in the operation interface and make corresponding records in the appearance inspection record and the accompanying work order.

2. The process for reducing costs and increasing efficiency by improving the visual inspection station step according to claim 1 is characterized in that: The appearance inspection device will automatically initialize. After initialization, click Inspection Process to enter the inspection page.

3. The process for reducing costs and increasing efficiency by improving the visual inspection station step according to claim 1 is characterized in that: After placing the number of the cassette to be inspected, select the corresponding inspection port where the cassette is placed on the inspection interface, and click MAPPING to perform the scanning operation.