Radio wave radiating device

Abstract

In this radio wave emission device, a control unit switches the operation of the device from a normal operation to a protection operation when at least one of a signal amplification unit needs to be protected on the basis of both or one of a temperature measurement value and a reflected wave power measurement value during the execution of the normal operation. The normal operation includes setting a power target value of the radio wave as a normal target value of the radio wave emission unit. The protection operation includes setting a power target value of the radio wave as a protection target value of the radio wave emission unit. The protection target value is smaller than the normal target value in both or one of the radio wave emission unit that is the object to be protected and the radio wave emission unit that is other than the object to be protected. The protection target value is set such that the power consumption distribution in the chamber when the protection operation is executed is closer to the power consumption distribution in the chamber when the normal operation is executed than when only the power target value of the radio wave emission unit to be protected is set as the protection target value.

Description

Technical Field

[0001] The present disclosure relates to a radio wave radiating device. Background Art

[0002] Patent Document 1 discloses a microwave processing device (radio wave radiating device). The microwave processing device disclosed in Patent Document 1 includes a heating chamber for accommodating an object to be heated, an oscillating unit, a power unit, a detecting unit, a power supply unit, and a control unit.

[0003] The power unit amplifies the output signal of the oscillator and outputs the amplified power. The detection unit detects the power of the reflected wave of the microwave flowing back toward the power unit and the power of the traveling wave of the microwave output from the power unit and traveling toward the heating chamber.

[0004] The power supply unit radiates the traveling wave from the detection unit into the heating chamber, and the control unit controls the frequency and level of the output signal from the oscillation unit based on the reflected wave.

[0005] The control unit sets a pre-check period before heating the object to be heated and a formal heating period for formally heating the object to be heated. During the pre-check period, the control unit causes the oscillator to output a low-level signal while periodically and repeatedly changing the frequency within a specified frequency band. The control unit determines the optimal oscillation frequency based on the reflected wave.

[0006] During the formal heating period, the control unit causes the oscillator to output a signal having an optimal oscillation frequency and a frequency close thereto, thereby performing formal heating of the object to be heated. During the formal heating period, when the reflected wave increases as the heating of the object to be heated progresses, the control unit again sets a pre-detection period, detects the optimal oscillation frequency, and performs formal heating based on the oscillation frequency.

[0007] This makes it possible to efficiently heat the object to be heated and prevent the reflected wave from having any influence on the semiconductor element included in the power unit.

[0008] Prior art literature

[0009] Patent Literature

[0010] Patent Document 1: Japanese Patent No. 5467341 Summary of the invention

[0011] In the microwave processing device disclosed in Patent Document 1, when the reflected wave is large, the power of the traveling wave is reduced until the reflected wave is at a level that does not adversely affect the semiconductor element of the power unit. When the reflected wave is small, the power of the traveling wave is increased until the reflected wave is at a level that does not adversely affect the semiconductor element of the power unit.

[0012] When there are multiple power units, when such power adjustment is performed for each power unit, the power consumption distribution in the heating room (especially in the heated object) changes. The change in power consumption distribution may affect the treatment of the heated object (irradiation object). When the power consumption distribution changes greatly or frequently, the treatment of the heated object (irradiation object) becomes unstable and a good result may not be obtained.

[0013] An object of the present disclosure is to provide a radio wave radiating device capable of improving the stability of processing of an irradiated object while protecting a signal amplifying section.

[0014] A radio wave radiating device according to one embodiment of the present disclosure includes a chamber, one or more signal generating units, a plurality of signal amplifying units, a plurality of radio wave radiating units, a plurality of measuring units, and a control unit.

[0015] The one or more signal generating units generate one or more high frequency signals. The plurality of signal amplifying units amplify the one or more high frequency signals and output a plurality of amplified high frequency signals. The plurality of radio wave radiating units radiate a plurality of radio waves into the chamber based on the plurality of amplified high frequency signals.

[0016] The plurality of measuring units outputs temperature measurement values ​​indicating the temperature of the plurality of signal amplifiers and reflected wave power measurement values ​​indicating the power of reflected waves flowing back through the plurality of radio wave radiating units. The control unit controls one or more signal generating units and the plurality of signal amplifiers.

[0017] When it is determined during execution of normal operation that at least one of the plurality of signal amplifiers needs to be protected based on both or one of the temperature measurement value and the reflected wave power measurement value, the control unit switches the operation of the radio wave radiating device from normal operation to protection operation.

[0018] The normal operation includes setting the power target values ​​of the plurality of radio waves as the normal target values ​​of the plurality of radio wave radiators. The protection operation includes setting the power target values ​​of the plurality of radio waves as the protection target values ​​of the plurality of radio wave radiators.

[0019] The protection target value is smaller than the normal target value in both or one of the radio wave radiating section as the protection target corresponding to the signal amplifier section requiring protection and the radio wave radiating section other than the radio wave radiating section as the protection target among the plurality of radio wave radiating sections.

[0020] The protection target values ​​of the plurality of radio wave radiating units are set so that the power consumption distribution in the chamber when the protection action is executed is closer to the power consumption distribution in the chamber when the normal action is executed than when only the power target value of the radio wave radiating unit to be protected is set as the protection target value.

[0021] A radio wave radiating device according to another aspect of the present disclosure includes a chamber, one or more signal generating units, a plurality of signal amplifying units, a plurality of radio wave radiating units, a plurality of measuring units, and a control unit.

[0022] The one or more signal generating units generate one or more high frequency signals. The plurality of signal amplifying units amplify the one or more high frequency signals and output a plurality of amplified high frequency signals. The plurality of radio wave radiating units radiate a plurality of radio waves into the chamber based on the plurality of amplified high frequency signals.

[0023] The plurality of measuring units outputs temperature measurement values ​​indicating the temperature of the plurality of signal amplifiers and reflected wave power measurement values ​​indicating the power of reflected waves flowing back through the plurality of radio wave radiating units. The control unit controls one or more signal generating units and the plurality of signal amplifiers.

[0024] When it is determined during execution of normal operation that at least one of the plurality of signal amplifiers needs to be protected based on both or one of the temperature measurement value and the reflected wave power measurement value, the control unit switches the operation of the radio wave radiating device from normal operation to protection operation.

[0025] The normal operation includes setting the power target values ​​of the plurality of radio waves as the normal target values ​​of the plurality of radio wave radiators. The protection operation includes setting the power target values ​​of the plurality of radio waves as the protection target values ​​of the plurality of radio wave radiators.

[0026] In the plurality of radio wave radiating units, the protection target value is smaller than the normal target value. The ratio of the protection target values ​​of the plurality of radio wave radiating units is equal to the ratio of the normal target values ​​of the plurality of radio wave radiating units.

[0027] According to the above aspect, it is possible to improve the stability of the process of the irradiated object while protecting the signal amplifier. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is a schematic diagram of the radio wave radiating device according to the first embodiment of the present disclosure.

[0029] Figure 2 This is a perspective view showing the appearance of the radio wave radiating device according to the first embodiment.

[0030] Figure 3 This is a three-dimensional view of the radio wave radiating device according to Embodiment 1 in a state where the door is opened.

[0031] Figure 4 This is a plan view of the radio wave radiating device according to the first embodiment schematically showing the internal structure of the casing.

[0032] Figure 5 This is a front view of the radio wave radiating device according to the first embodiment schematically showing the internal structure of the casing.

[0033] Figure 6 yes Figure 4 AA line section view.

[0034] Figure 7 yes Figure 5 BB line cross-sectional view.

[0035] Figure 8 This is a three-dimensional view in which a part of the radio wave radiation device according to the first embodiment is omitted.

[0036] Fig. 9 This is a flowchart showing an example of the protection operation in the radio wave radiating device according to the first to third embodiments.

[0037] Fig.10 This is a flowchart showing an example of the protection operation in the radio wave radiating device according to the first to third embodiments.

[0038] Fig.11 This is a waveform diagram showing an example of the protection operation in the radio wave radiating device according to the first embodiment.

[0039] Fig.12 This is a diagram showing changes in power consumption distribution within an irradiation object arranged in a chamber of the radio wave radiating device according to the first embodiment.

[0040] Fig.13 This is a flowchart showing another example of the protection operation in the radio wave radiating device of Embodiments 1 to 3.

[0041] Fig.14 This is a flowchart showing another example of the protection operation in the radio wave radiating device of Embodiments 1 to 3.

[0042] Fig.15 This is a waveform diagram showing another example of the protection operation in the radio wave radiating device according to the first embodiment.

[0043] Fig.16 This is a schematic diagram of a radio wave radiating device according to Embodiment 2 of the present disclosure.

[0044] Fig.17 This is a top view of the radio wave radiation device according to the second embodiment schematically showing the internal structure of the casing.

[0045] Fig.18 This is a front view of the radio wave radiation device according to the second embodiment schematically showing the internal structure of the casing.

[0046] Fig.19 It is along Fig.17 Cross-sectional view of the CC line.

[0047] Fig. 20 It is along Fig.18Cross-sectional view of line DD.

[0048] Fig.21 This is a three-dimensional view in which a part of the radio wave radiation device of Embodiment 2 is omitted.

[0049] Fig. 22 This is a schematic diagram of a radio wave radiating device according to Embodiment 3 of the present disclosure.

[0050] Fig.23 This is a top view of the radio wave radiating device according to the third embodiment schematically showing the internal structure of the casing.

[0051] Fig.24 This is a front view of the radio wave radiation device according to the third embodiment schematically showing the internal structure of the casing.

[0052] Fig.25 yes Fig. 22 EE line cross-sectional view.

[0053] Fig.26 yes Fig. 22 FF line cross-sectional view.

[0054] Fig. 27 This is a three-dimensional view in which a part of the radio wave radiation device of Embodiment 3 is omitted. DETAILED DESCRIPTION

[0055] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. However, detailed descriptions of known matters may be omitted, and duplicate descriptions of the same or substantially the same structures may be omitted.

[0056] [1. Implementation Method]

[0057] [1.1 Implementation Method 1]

[0058] [1.1.1 Structure]

[0059] Figure 1 1 is a schematic diagram of a radio wave radiating device 1 according to Embodiment 1 of the present disclosure. Figure 1 As shown, the radio wave radiation device 1 includes a signal generating unit 2, a power distributor 2a, signal amplifying units 3-1, 3-2, radio wave radiation units 4-1, 4-2, measuring units 5-1, 5-2, a control unit 6, a storage unit 7, an input / output unit 8 and a housing 10.

[0060] The signal amplifiers 3-1 and 3-2 represent the first signal amplifier 3 and the second signal amplifier 3, respectively. The radio wave radiating units 4-1 and 4-2 and the measuring units 5-1 and 5-2 are the same. Hereinafter, the signal amplifiers 3-1 and 3-2 are collectively referred to as a plurality of signal amplifiers 3. The radio wave radiating units 4-1 and 4-2 are collectively referred to as a plurality of radio wave radiating units 4. The measuring units 5-1 and 5-2 are collectively referred to as a plurality of measuring units 5.

[0061] In addition, when it is simply referred to as the signal amplifier 3, it means any of the signal amplifiers 3-1 and 3-2. When it is simply referred to as the radio wave radiator 4, it means any of the radio wave radiator 4-1 and 4-2. When it is referred to as the single measuring unit 5, it means any of the measuring units 5-1 and 5-2.

[0062] The housing 10 accommodates the signal generator 2, the power distributor 2a, the signal amplifiers 3-1 and 3-2, the radio wave radiators 4-1 and 4-2, the measuring units 5-1 and 5-2, the control unit 6, the storage unit 7, and the input / output unit 8. The housing 10 has a chamber 10a capable of accommodating the irradiation object 20.

[0063] The irradiation object 20 is an object irradiated with radio waves generated by the radio wave irradiation device 1. In the present embodiment, the radio wave irradiation device 1 induction heats the irradiation object 20 by irradiating radio waves to the irradiation object 20. Therefore, in the present embodiment, the chamber 10a is a heating chamber, and the irradiation object 20 is an object to be heated.

[0064] Figure 2 It is a perspective view showing the appearance of the radio wave radiating device 1 . Figure 3 FIG. 1 is a perspective view of the radio wave radiating device 1 with the door 12 opened. Figure 2 as well as Figure 3 As shown, the housing 10 of the radio wave radiating device 1 includes a main body 11 and a door 12. The main body 11 has a rectangular parallelepiped shape and has a chamber 10a inside.

[0065] The chamber 10a is formed by a plurality of walls (left wall 11a, right wall 11b, bottom wall 11c, upper wall 11d, and inner wall 11e) formed by a material for shielding radio waves. The door 12 is mounted on the front surface of the main body 11 to cover the front surface opening of the main body 11. The door 12 is also formed by a material for shielding radio waves. Thus, the chamber 10a can enclose the radio waves (microwaves) supplied from the plurality of radio wave radiating units 4 inside.

[0066] In the present disclosure, "shielding" means attenuating the energy of radio waves by absorption, etc., and blocking radio waves by reflection, multiple reflections, etc. Therefore, any material that can shield radio waves can be any material that can achieve such a "shielding" effect. Materials that shield radio waves include materials that reflect radio waves, such as metal materials, and materials that absorb radio waves, such as ferrite rubber.

[0067] Figure 4 It is a plan view of the radio wave radiation device 1 schematically showing the internal structure of the casing 10 . Figure 5 It is a front view of the radio wave radiation device 1 schematically showing the internal structure of the casing 10 . Figure 6 It is along Figure 4 Cross-sectional view along line AA. Figure 7 It is along Figure 5 Cross-sectional view of line BB. Figure 8 It is a perspective view in which a part of the radio wave radiating device 1 is omitted.

[0068] like Figure 6 , Figure 7 as well as Figure 8 As shown, the main body 11 has a storage space 11f below the chamber 10a. The storage space 11f stores the high-frequency signal generating device 13. The high-frequency signal generating device 13 has a substantially rectangular parallelepiped housing 130. The housing 130 stores the signal generating unit 2, the power distributor 2a, the plurality of signal amplifying units 3, the plurality of measuring units 5, the control unit 6, and the storage unit 7.

[0069] The high-frequency signal generating device 13 has a first port 131 and a second port 132. The first port 131 and the second port 132 output the amplified high-frequency signals from the signal amplifiers 3-1 and 3-2, respectively. The first port 131 and the second port 132 are, for example, coaxial connectors to which coaxial cables can be connected.

[0070] exist Figure 1 In the embodiment, the signal generating unit 2 generates a high-frequency signal having any frequency included in a frequency band of, for example, 300 MHz to 10 GHz.

[0071] The signal generator 2 is composed of a resonance circuit based on voltage control. In order to generate a plurality of high-frequency signals with a wider frequency band, the signal generator 2 may be a PLL (Phase Locked Loop) frequency synthesizer.

[0072] The power distributor 2a is connected between the signal generator 2 and the signal amplifiers 3-1 and 3-2. The power distributor 2a supplies the high-frequency signal from the signal generator 2 to the signal amplifiers 3-1 and 3-2.

[0073] The signal amplifier 3 amplifies the high frequency signal from the signal generator 2. The signal amplifiers 3-1 and 3-2 amplify the supplied high frequency signals and output amplified high frequency signals.

[0074] When the amplified high-frequency signal having a frequency included in the above-mentioned frequency band is radiated toward the irradiation object 20 which is a dielectric, heat is generated inside the irradiation object 20. The irradiation object 20 can be heated by this heat.

[0075] The signal amplifiers 3-1 and 3-2 are connected to the first port 131 and the second port 132 (both refer to Figure 7 ) is connected. Therefore, the first port 131 outputs the amplified high-frequency signal from the signal amplifier 3-1. The second port 132 outputs the amplified high-frequency signal from the signal amplifier 3-2.

[0076] The plurality of radio wave radiating units 4 radiate a plurality of radio waves into the chamber 10a based on the amplified high frequency signals from the plurality of signal amplifiers 3. That is, the radio wave radiating unit 4-1 radiates radio waves into the chamber 10a based on the amplified high frequency signals from the signal amplifier 3-1. The radio wave radiating unit 4-2 radiates radio waves into the chamber 10a based on the amplified high frequency signals from the signal amplifier 3-2.

[0077] The radio wave radiating unit 4-1 includes an antenna 41-1 and a waveguide 42-1. The radio wave radiating unit 4-2 includes an antenna 41-2 and a waveguide 42-2.

[0078] like Figure 7 As shown, the radio wave radiating unit 4-1 includes a connector 43-1 connected to the antenna 41-1. The radio wave radiating unit 4-2 includes a connector 43-2 connected to the antenna 41-2. The connector 43-1 is connected to the first port 131 via the connection cable 14-1. The connector 43-2 is connected to the second port 132 via the connection cable 14-2.

[0079] Thus, antennas 41-1 and 41-2 are connected to signal amplifiers 3-1 and 3-2, respectively. Antennas 41-1 and 41-2 radiate radio waves based on amplified high-frequency signals from signal amplifiers 3-1 and 3-2, respectively. Connectors 43-1 and 43-2 are, for example, coaxial connectors that can connect coaxial cables, and connection cables 14-1 and 14-2 are coaxial cables.

[0080] like Figure 1 As shown, the waveguides 42-1 and 42-2 guide the radio waves radiated from the antennas 41-1 and 41-2 into the chamber 10a, respectively. Figure 5 , Figure 6 as well as Figure 8 As shown, the waveguides 42-1 and 42-2 have a rectangular parallelepiped shape extending in the up-down direction.

[0081] like Figure 6 As shown, the first ends (specifically, the lower ends) of the waveguides 42-1 and 42-2 are disposed in the storage space 11f. Figure 7 As shown, antennas 41-1 and 41-2 are disposed inside the waveguides 42-1 and 42-2 near their first ends, respectively. Connectors 43-1 and 43-2 are disposed outside the waveguides 42-1 and 42-2 near their first ends, respectively.

[0082] The antennas 41-1 and 41-2 are connected to the connectors 43-1 and 43-2, respectively. Openings 4a-1 and 4a-2 are formed on the side surfaces of the second ends (specifically, the upper ends) of the waveguides 42-1 and 42-2, respectively. The opening 4a-1 is arranged on the left wall surface 11a of the main body 11, and connects the chamber 10a with the waveguide 42-1. Thus, the radio waves radiated from the antenna 41-1 are radiated into the chamber 10a via the waveguide 42 and the opening 4a.

[0083] The opening 4a-2 is provided on the right wall surface 11b of the main body 11, and connects the chamber 10a with the waveguide 42-2. Thus, the radio waves radiated from the antenna 41-2 are radiated into the chamber 10a via the waveguide 42-2 and the opening 4a-2.

[0084] like Figure 1 As shown, the plurality of measuring units 5 output temperature measurement values ​​indicating the temperatures of the plurality of signal amplifiers 3 and a plurality of reflected wave power measurement values. That is, the measuring unit 5-1 outputs a temperature measurement value indicating the temperature of the signal amplifier 3-1 and a reflected wave power measurement value indicating the power of the reflected wave flowing back through the radio wave radiating unit 4-1. The measuring unit 5-2 outputs a temperature measurement value indicating the temperature of the signal amplifier 3-2 and a reflected wave power measurement value indicating the power of the reflected wave flowing back through the radio wave radiating unit 4-2.

[0085] The measuring unit 5-1 includes a temperature measuring unit 51-1 and a power measuring unit 52-1. The measuring unit 5-2 includes a temperature measuring unit 51-2 and a power measuring unit 52-2.

[0086] The temperature measuring units 51-1 and 51-2 include temperature sensors respectively provided near the signal amplifiers 3-1 and 3-2. Therefore, the temperature measuring units 51-1 and 51-2 respectively measure the temperatures of the signal amplifiers 3-1 and 3-2. The temperature measuring units 51-1 and 51-2 respectively output temperature measurement values ​​indicating the temperatures of the signal amplifiers 3-1 and 3-2 to the control unit 6.

[0087] The temperature of the signal amplifier 3 does not need to be the temperature of the signal amplifier 3 in a strict sense, and may be a temperature that can be regarded as the temperature of the signal amplifier 3. The temperature measuring parts 51-1 and 51-2 can be constituted by well-known temperature sensors.

[0088] The power measurement unit 52-1 is connected between the signal amplifier 3-1 and the radio wave radiating unit 4-1. The power measurement unit 52-2 is connected between the signal amplifier 3-2 and the radio wave radiating unit 4-2.

[0089] The power measuring unit 52-1 measures the power of the amplified high frequency signal supplied from the signal amplifier 3-1 to the radio wave radiating unit 4-1 for radiating radio waves into the chamber 10a. The power measuring unit 52-2 measures the power of the amplified high frequency signal supplied from the signal amplifier 3-2 to the radio wave radiating unit 4-2 for radiating radio waves into the chamber 10a.

[0090] The amplified high frequency signal radiated as a radio wave from the radio wave radiating units 4 - 1 and 4 - 2 is called a traveling wave. The power measuring units 52 - 1 and 52 - 2 output the traveling wave power measurement value indicating the measured power of the traveling wave to the control unit 6 .

[0091] Furthermore, the power measuring unit 52-1 measures the power of the reflected wave flowing back toward the signal amplifier 3-1 via the radio wave radiating unit 4-1. The power measuring unit 52-2 measures the power of the reflected wave flowing back toward the signal amplifier 3-2 via the radio wave radiating unit 4-2.

[0092] The reflected waves include radio waves that are not radiated from the radio wave radiating unit 4 into the chamber 10a due to impedance mismatching, and radio waves that are not absorbed by the irradiated object 20 and are reflected in the chamber 10a and return to the radio wave radiating unit 4. The power measuring units 52-1 and 52-2 output the reflected wave power measurement values ​​indicating the measured powers of the reflected waves to the control unit 6.

[0093] In this way, the power measuring units 52-1 and 52-2 measure the traveling wave power and the reflected wave power. The power measuring units 52-1 and 52-2 are constituted by, for example, a directional coupler and a detection circuit.

[0094] The storage unit 7 is a storage device for storing information used by the control unit 6 and information generated by the control unit 6. The storage unit 7 includes one or more non-transitory storage media. The storage medium is a semiconductor memory including a RAM (Random Access Memory) and a ROM (Read Only Memory).

[0095] In this embodiment, the storage medium is a flash memory. The storage medium is not limited to a semiconductor memory, and may be any of a HDD (Hard Disc Drive), an optical drive, an SSD (Solid State Drive), an internal type, an external type, and a NAS (Network-Attached Storage).

[0096] The input / output unit 8 functions as an input device for the user to input information and an output device for outputting information to the user. The input / output unit 8 has one or more human-machine interfaces. The human-machine interface is, for example, an input device such as a mechanical switch, a touch pad, a microphone, an output device such as a display, a speaker, or an input / output device such as a touch panel.

[0097] The input / output unit 8 includes a communication interface. The communication interface communicates with an external central device and a terminal device by a predetermined communication method. Thus, the communication interface performs input of information to the radio wave radiating device 1 and output of information from the radio wave radiating device 1 .

[0098] The external central device is an industrial FA (Factory Automation) computer that functions as a master of the communication network, etc. The terminal device is a personal computer, smartphone, tablet computer, wearable terminal, etc. held by the user.

[0099] The control unit 6 controls the signal generation unit 2 and the plurality of signal amplifiers 3 . Thus, the radio wave radiating device 1 radiates a plurality of radio waves from the plurality of radio wave radiating units 4 into the chamber 10 a to heat the irradiation object 20 .

[0100] The control unit 6 is constituted by, for example, a microcontroller having one or more processors and a memory. The control unit 6 is constituted by, for example, an FPGA (Field-Programmable Gate Array) or an ASIC (Application Specific Integrated Circuit).

[0101] The control unit 6 controls the frequency and power of the traveling wave. Therefore, the control unit 6 causes the signal generation unit 2 to change the frequency of the high-frequency signal and causes the signal amplifier 3 to change the amplification factor.

[0102] The control unit 6 may adjust the power of the traveling wave by means of changing the voltage of an internal power supply connected to the signal amplifier 3. The control unit 6 may change the amplification factor of the signal amplifier 3 by means of a variable attenuator.

[0103] The control unit 6 selectively performs a normal operation and a protective operation. The normal operation is an operation for the purpose of radiating radio waves to the irradiation object 20. The protective operation is an operation for the purpose of protecting the signal amplifier 3 while radiating radio waves to the irradiation object 20. When it is necessary to protect the signal amplifier 3 during the execution of the normal operation, the control unit 6 switches the operation of the radio wave radiating device 1 from the normal operation to the protective operation.

[0104] In this embodiment, when it is determined during the execution of normal operation that at least one of the signal amplifiers 3-1, 3-2 needs to be protected based on at least one of the temperature measurement value and the reflected wave power measurement value, the control unit 6 switches the operation of the radio wave radiation device 1 from normal operation to protection operation.

[0105] In this embodiment, the protection action is performed when it is determined to be necessary based on temperature and when it is determined to be necessary based on reflected power. The former is called temperature-based protection action, and the latter is called power-based protection action.

[0106] Below, refer to Figures 9 to 11 , an example of the normal operation and protection operation of the control unit 6 is described.

[0107] Fig. 9 2 is a flowchart showing an example of the protection operation in the radio wave radiating device 1. In the present embodiment, an example of the protection operation in the radio wave radiating device 1 is a power reference protection operation. Fig.10 is a flow chart showing the power reference protection operation. Fig.11 It is a waveform diagram showing the action of power reference protection.

[0108] exist Fig.11 In the figure, Pfd1 represents the measured value of the traveling wave power of the radio wave radiating unit 4-1, and Pfd2 represents the measured value of the traveling wave power of the radio wave radiating unit 4-2. Prd1 represents the measured value of the reflected wave power of the radio wave radiating unit 4-1, and Prd2 represents the measured value of the reflected wave power of the radio wave radiating unit 4-2. R1 represents the reflected power ratio of the radio wave radiating unit 4-1, and R2 represents the reflected power ratio of the radio wave radiating unit 4-2. In addition, the reflected power ratio is obtained by dividing the reflected wave power measured value by the traveling wave power measured value.

[0109] like Fig. 9 As shown, the control unit 6 first performs a normal operation (step S11). The normal operation includes: setting the power target values ​​of the multiple radio waves radiated from the multiple radio wave radiating units 4 to the normal target values ​​of the multiple radio wave radiating units 4. As an example, the normal target value of the radio wave radiating unit 4-1 is 250W, and the normal target value of the radio wave radiating unit 4-2 is 200W.

[0110] The control unit 6 determines whether it is necessary to protect at least one of the signal amplifiers 3-1 and 3-2 based on the reflected wave power measurement value. In this embodiment, the control unit 6 determines whether at least one of the reflected wave power measurement values ​​Prd1 and Prd2 is a protection power threshold value Pth (see Fig.11 )above.

[0111] Thus, the control unit 6 determines whether or not it is necessary to protect at least one of the signal amplifiers 3-1 and 3-2 (step S12). That is, the control unit 6 determines that it is necessary to protect the signal amplifier 3 corresponding to the reflected wave power measurement value greater than the protection power threshold Pth.

[0112] When the result of the determination in step S12 is "yes", the control unit 6 switches the operation of the radio wave radiating device 1 from the normal operation to the protection operation (in this case, the reflected wave power reference protection operation) (step S13). The protection power threshold Pth is pre-set to a value that can protect the signal amplifier 3 from the influence of the reflected wave. For example, the protection power threshold Pth is 100W.

[0113] like Fig.11 As shown, at time t10, the control unit 6 determines that the reflected wave power measurement value Prd2 is equal to or greater than the protection power threshold value Pth during the execution of the normal operation, and switches the operation of the radio wave radiating device 1 from the normal operation to the protection operation.

[0114] like Fig.10 As shown, the protection action includes: setting the power target value of the multiple radio waves emitted from the multiple radio wave radiating units 4 to the protection target value of each of the multiple radio wave radiating units 4 (step S21). The protection target value is smaller than the normal target value in both or one of the radio wave radiating units 4 as the protection target corresponding to the signal amplifier unit 3 to be protected and the radio wave radiating units 4 other than the radio wave radiating units 4 as the protection target among the multiple radio wave radiating units 4.

[0115] In the present embodiment, the protection target value is smaller than the normal target value in all radio wave radiating units 4 regardless of whether or not they are protected targets.

[0116] The protection target values ​​of the multiple radio wave radiating units 4 are set so that the power consumption distribution in the chamber 10a when the protection action is performed is closer to the power consumption distribution in the chamber 10a when the normal action is performed than when only the power target value of the radio wave radiating unit 4 to be protected is set to the protection target value.

[0117] Originally, if only the protection of the signal amplifier 3 is considered, the power target value of the radio wave radiating unit 4 as the protection object is set to a protection target value smaller than the normal target value. However, in this embodiment, in order to prevent the power consumption distribution from changing significantly between the normal operation and the protection operation, the power target value of the radio wave radiating unit 4 other than the radio wave radiating unit 4 as the protection object is also set to a protection target value smaller than the normal target value.

[0118] The case where "the power consumption distribution in the chamber 10a during the protection operation is closer to the power consumption distribution in the chamber 10a during the normal operation than when only the power target value of the radio wave radiating unit 4 to be protected is set to the protection target value" is, for example, the following case.

[0119] This means that, with respect to the power consumption distribution in the chamber 10a, the consistency between the protection operation and the normal operation is higher than the consistency between the power target value of the radio wave radiating unit 4 to be protected is set to the protection target value and the normal operation is performed. The consistency refers to, for example, the consistency between a pattern obtained by standardizing the power consumption distribution in the normal operation and the same pattern in the protection operation.

[0120] Fig.12 : is a diagram showing changes in power consumption distribution within the irradiation target 20 disposed in the chamber 10a. More specifically, Fig.12 The figure shows the change in power consumption distribution when the power target values ​​of the radio wave radiating units 4-1 and 4-2 are changed.

[0121] exist Fig.12 In the figure, P1 and P2 represent the power target values ​​of the radio wave radiating units 4-1 and 4-2, respectively. The row marked as "uniform power ratio" represents the case where the ratio of P1 to P2 is 1:1. The row marked as "uneven power ratio" represents the case where the ratio of P1 to P2 is 7:3.

[0122] The row marked "Total power maintained" indicates that the total of P1 and P2 is 100 W. The total of P1 and P2 in the row marked "Total power decreased" is 60 W, which is lower than the total of P1 and P2 (100 W) in the row marked "Total power maintained". The total of P1 and P2 in the row marked "Total power increased" is 140 W, which is greater than the total of P1 and P2 (100 W) in the row marked "Total power maintained".

[0123] exist Fig.12In the example, as shown in the column labeled "Even Power Ratio", when the ratio of the power target values ​​P1 and P2 is constant, it can be said that the power consumption distribution in the chamber 10a does not change. As shown in the row labeled "Total Power Maintained", when the ratio of the power target values ​​P1 and P2 is different, the power consumption distribution in the chamber 10a tends to change.

[0124] Based on this understanding, in the present embodiment, the ratio of the protection target values ​​of the radio wave radiating units 4-1 and 4-2 is equal to the ratio of the normal target values ​​of the radio wave radiating units 4-1 and 4-2. As a result, the power consumption distribution in the chamber 10a when the protection action is executed is closer to the power consumption distribution in the chamber 10a when the normal action is executed than when only the power target value of the radio wave radiating unit 4 as the protection object is set to the protection target value.

[0125] In addition, the "equal" in the above description includes not only the case of strict equality but also the case of substantial equality.

[0126] In addition, the ratio of the protection target values ​​of the radio wave radiating units 4-1 and 4-2 refers to the ratio of the protection target value of the radio wave radiating unit 4-1 to the protection target value of the radio wave radiating unit 4-2. Hereinafter, it is referred to as the ratio of the protection target values ​​of the multiple radio wave radiating units 4. That is, the ratio of the protection target values ​​of the multiple radio wave radiating units 4 refers to the ratio of the multiple protection target values ​​corresponding to one of the multiple radio wave radiating units 4. The ratio of the normal target values ​​of the multiple radio wave radiating units 4 is also the same.

[0127] The setting of the protection target value will be described in further detail. In the present embodiment, the protection operation (power reference protection operation) includes determining the protection target values ​​of the radio wave radiating units 4-1 and 4-2 so that all the reflected wave power measurement values ​​are lower than the protection power threshold value Pth.

[0128] In more detail, the power reference protection action determines the protection target value of the radio wave radiating unit 4 (i.e., the radio wave radiating unit 4 to be protected) among the multiple radio wave radiating units 4 corresponding to the maximum reflected wave power measurement value based on the reflected wave power measurement value of the radio wave radiating unit 4 having the largest reflected wave power measurement value among the multiple radio wave radiating units 4.

[0129] The protection action (power reference protection action) determines the protection target value of the radio wave radiating unit 4 other than the radio wave radiating unit 4 that is the protection object among the multiple radio wave radiating units 4, based on the ratio of the normal target value of the radio wave radiating unit 4-1 to the normal target value of the radio wave radiating unit 4-2 and the protection target value of the radio wave radiating unit corresponding to the maximum reflected wave power measurement value among the multiple radio wave radiating units 4. As described above, in the present embodiment, the ratio of the protection target values ​​of the multiple radio wave radiating units 4 is equal to the ratio of the normal target values ​​of the multiple radio wave radiating units 4.

[0130] As an example, the protection target value is determined by the following formula (1).

[0131] [Mathematical formula 1]

[0132]

[0133] In formula (1), x represents the number of any radio wave radiating unit 4. y represents the number of the radio wave radiating unit 4 corresponding to the maximum reflected wave power measurement value among the multiple radio wave radiating units 4. x and y are integers greater than 1 (in this embodiment, x and y are 2). That is, Pfnx represents the protection target value of the x-th radio wave radiating unit 4. Prpt represents the target value of the power of the reflected wave in the protection action.

[0134] The target value Prpt is smaller than the protection power threshold value Pth. Therefore, the protection target values ​​of the radio wave radiators 4-1 and 4-2 are set so that the reflected wave power measurement value during the protection operation is smaller than the protection power threshold value Pth.

[0135] Pfdy is the measured value of the traveling wave power supplied to the yth radio wave radiating unit 4. Prdmax represents the maximum measured value of the reflected wave power. Therefore, in formula (1), Pfdy / Prdmax represents the ratio of the measured value of the traveling wave power in the radio wave radiating unit 4 corresponding to the maximum measured value of the reflected wave power to the measured value of the reflected wave power.

[0136] Pfx represents the normal target value of the x-th radio wave radiating unit 4. Pfy represents the normal target value of the radio wave radiating unit 4 corresponding to the maximum reflected wave power measurement value. Therefore, in formula (1), Pfx / Pfy represents the ratio of the normal target value of any radio wave radiating unit 4 to the normal target value of the radio wave radiating unit 4 corresponding to the maximum reflected wave power measurement value among multiple radio wave radiating units 4.

[0137] like Fig.11 As shown, at time t10, the reflected wave power measurement value Prd1 of the radio wave radiator 4-1 is 80 W, and the reflected wave power measurement value Prd2 of the radio wave radiator 4-2 is 100 W. Therefore, the radio wave radiator 4 corresponding to the largest reflected wave power measurement value among the plurality of radio wave radiators 4 is the radio wave radiator 4-2.

[0138] In this example, the radio wave radiator 4-2 is the radio wave radiator 4 to be protected, and the radio wave radiator 4-1 is the radio wave radiator 4 other than the radio wave radiator 4 to be protected among the plurality of radio wave radiators 4. Therefore, the protection target value Pfn2 of the radio wave radiator 4-2 is determined based on the reflected wave power measurement value Prd2 of the radio wave radiator 4-2.

[0139] For example, the target value Prpt is 80 W, and the forward power measurement value Pfd2 of the radio wave radiator 4-2 is equal to the normal target value Pf2. In this case, the protection target value Pfn2 of the radio wave radiator 4-2 is 160 (=80*(200 / 100)*(200 / 200)).

[0140] As described above, the normal target value Pf1 of the radio wave radiator 4-1 is 250 W, and the normal target value Pf2 of the radio wave radiator 4-2 is 200 W. Therefore, the protection target value Pfn1 of the radio wave radiator 4-1 is 200 (=80*(200 / 100)*(250 / 200)).

[0141] As described above, the protection target value Pfn1 is 200 W, and the protection target value Pfn2 is 160 W. The ratio of the protection target values ​​Pfn1 and Pfn2 (for example, 200:160=5:4) is equal to the ratio of the normal target values ​​Pf1 and Pf2 (for example, 250:200=5:4).

[0142] The protection target value Pfn1 of the radio wave radiating unit 4-1 is set to 200 W, and the protection target value Pfn2 of the radio wave radiating unit 4-2 is set to 160 W. As a result, around time t10, the traveling power measurement value Pfd1 of the radio wave radiating unit 4-1 decreases from 250 W to 200 W, and the traveling power measurement value Pfd2 of the radio wave radiating unit 4-2 decreases from 200 W to 160 W.

[0143] like Fig.10 As shown, the control unit 6 determines whether the reflection power ratio R1 of the radio wave radiating unit 4-1 and the reflection power ratio R2 of the radio wave radiating unit 4-2 are lower than the end threshold Rth (step S22) during the execution of the protection action. If the judgment result in step S22 is "yes", the control unit 6 switches the action of the radio wave radiating device 1 from the protection action to the normal action.

[0144] The end threshold Rth specifies the reflected power ratio when the protection action ends. The reflected power ratio when the protection action ends is smaller than the reflected power ratio when the protection action starts. As an example, the protection power threshold Pth is 100W.

[0145] In the radio wave radiating unit 4 - 1 , when the forward wave power measurement value Pfd1 is equal to the normal target value Pf1 , the reflected power ratio (Pth / Pfd1 ) at the start of the protection operation is 0.4 (=100 / 250).

[0146] In the radio wave radiation unit 4-2, when the traveling wave power measurement value Pfd2 is equal to the normal target value Pf2, the reflected power ratio (Pth / Pfd2) at the start of the protection action is 0.5 (=100 / 200). In this embodiment, the end threshold Rth is set to 0.3. The reflected wave power measurement value when the reflected power ratio is equal to the end threshold Rth is called the recovery power threshold.

[0147] When the measured value of the traveling wave power Pfd1 is equal to the protection target value, the restoration power threshold (Rth×Pfd1) of the radio wave radiating unit 4-1 is 60 (=0.3×200). When the measured value of the traveling wave power Pfd2 is equal to the protection target value, the restoration power threshold (Rth×Pfd2) of the radio wave radiating unit 4-2 is 48 (=0.3×160).

[0148] In other words, in step S22 , when it is determined that all reflected wave power measurement values ​​are lower than the restoration power threshold of the radio wave radiating unit 4 during the protection operation, the control unit 6 switches the operation of the radio wave radiating device 1 from the protection operation to the normal operation.

[0149] Each of the plurality of radio wave radiating units sets the restoration power threshold so that the ratio of the restoration power threshold to the forward power measurement value during the protection operation is smaller than the ratio of the protection power threshold Pth to the forward power measurement value during the normal operation.

[0150] like Fig.11 As shown, at time t11, the reflected power ratios of the radio wave radiating units 4-1 and 4-2 are both lower than 0.3. That is, the reflected wave power measurement value Prd1 of the radio wave radiating unit 4-1 is lower than the restoration power threshold value 60W of the radio wave radiating unit 4-1, and the reflected wave power measurement value Prd2 of the radio wave radiating unit 4-2 is lower than the restoration power threshold value 48W of the radio wave radiating unit 4-2.

[0151] Thus, the control unit 6 switches the operation of the radio wave radiating device 1 from the protection operation to the normal operation. Therefore, the control unit 6 sets the power target values ​​of the multiple radio waves radiated from the multiple radio wave radiating units 4 to the normal target values ​​of the multiple radio wave radiating units 4 (refer to Fig. 9 As a result, around time t11, the forward wave power measurement value Pfd1 increases from 200 W to 250 W, and the forward wave power measurement value Pfd2 increases from 160 W to 200 W.

[0152] At time t12, the control unit 6 determines that the reflected wave power measurement value Prd2 is equal to or greater than the protection power threshold value Pth during the normal operation, and switches the operation of the radio wave radiating device 1 from the normal operation to the protection operation again.

[0153] Thus, when it is determined that at least one of the reflected wave power measurement values ​​Prd1 and Prd2 is greater than the protection power threshold value Pth during the execution of the normal operation, the control unit 6 switches the operation of the radio wave radiating device 1 from the normal operation to the protection operation. In both or one of the radio wave radiating units 4 as the protection target corresponding to the signal amplifier unit 3 to be protected and the radio wave radiating units 4 other than the radio wave radiating units 4 as the protection target among the plurality of radio wave radiating units 4, the protection target value is less than the normal target value.

[0154] The protection target values ​​of the plurality of radio wave radiating units 4 are set so that the power consumption distribution in the chamber 10a when the protection action is executed is closer to the power consumption distribution in the chamber 10a when the normal action is executed than when only the power target value of the radio wave radiating unit 4 to be protected is set as the protection target value. Therefore, the stability of the processing of the irradiated object 20 can be improved while protecting the signal amplifier 3.

[0155] Below, refer to Figure 13 to Figure 15 , another example of the normal operation and protection operation of the control unit 6 is described.

[0156] Fig.13 2 is a flowchart showing another example of the protection operation in the radio wave radiating device 1. In the present embodiment, another example of the protection operation in the radio wave radiating device 1 is a temperature reference protection operation. Fig.14 It is a flow chart showing the operation of temperature reference protection. Fig.15 It is a waveform diagram showing the action of temperature reference protection.

[0157] exist Fig.15 In FIG. 1 , P1 and P2 represent power target values ​​of the radio wave radiating units 4-1 and 4-2, respectively. T1 and T2 represent temperature measurement values, which represent the temperature of the signal amplifying units 3-1 and 3-2, respectively.

[0158] like Fig.13 As shown, the control unit 6 first performs a normal operation (step S31). The normal operation includes: setting the power target values ​​of the multiple radio waves radiated from the multiple radio wave radiating units 4 to the normal target values ​​of the multiple radio wave radiating units 4. As an example, the normal target value Pf1 of the radio wave radiating unit 4-1 is 250W, and the normal target value Pf1 of the radio wave radiating unit 4-2 is 200W.

[0159] The control unit 6 determines whether at least one of the temperature measurement values ​​T1 and T2 is at the protection temperature threshold value Tth1 (see Fig.15 ) or more (step S32). Thus, the control unit 6 determines whether it is necessary to protect at least one of the plurality of signal amplifiers 3.

[0160] That is, the control unit 6 determines that it is necessary to protect the signal amplifier 3 corresponding to the temperature measurement value that is equal to or higher than the protection temperature threshold value Tth1. If the determination result of step S32 is "No", the control unit 6 repeats the process of step S32.

[0161] When the determination result of step S32 is "yes", the control unit 6 switches the operation of the radio wave radiation device 1 from the normal operation to the protection operation (in this case, the temperature reference protection operation) (step S33). The protection temperature threshold Tth1 is preset so that the temperature of the signal amplifier 3 is within the temperature range in which the signal amplifier 3 can operate stably. The protection temperature threshold Tth1 is, for example, 100 degrees.

[0162] The temperature of the signal amplifier 3 may increase not only due to the heat generated by the signal amplifier 3 itself but also due to an increase in the power of reflected waves in the chamber 10 a and the like.

[0163] like Fig.15 As shown, at time t20, the control unit 6 determines that the temperature measurement value T1 is equal to or higher than the protection temperature threshold value Tth1 during the normal operation, and switches the operation of the radio wave radiating device 1 from the normal operation to the protection operation.

[0164] like Fig.14 As shown, the temperature reference protection action includes: setting the power target value of the multiple radio waves radiated from the multiple radio wave radiating units 4 to the protection target value of each of the multiple radio wave radiating units 4 (step S41). In at least one of the multiple radio wave radiating units 4, the protection target value is less than the normal target value. In this embodiment, in at least one of the radio wave radiating units 4-1, 4-2, the protection target value is less than the normal target value.

[0165] The protection target values ​​of the plurality of radio wave radiating units 4 are set so that the power consumption distribution in the chamber 10a when the protection action is executed is closer to the power consumption distribution in the chamber 10a when the normal action is executed than when only the power target value of the radio wave radiating unit 4 to be protected is set as the protection target value. In the present embodiment, the ratio of the protection target values ​​of the radio wave radiating units 4-1 and 4-2 is equal to the ratio of the normal target values ​​of the radio wave radiating units 4-1 and 4-2.

[0166] The setting of the protection target value will be described in more detail. The protection operation (temperature reference protection operation) includes determining the protection target value of each of the plurality of radio wave radiating units 4 so that all the temperature measurement values ​​are lower than the protection temperature threshold value Tth1.

[0167] As an example, in the temperature reference protection action, the value after reducing the specified amount from the current power target value of each of the radio wave radiating units 4-1 and 4-2 is set as the protection target value. In each radio wave radiating unit 4-1 and 4-2, the specified amount is a value based on the normal target value. As an example, the specified amount is given by multiplying the normal target value by a specified ratio. The specified ratio is, for example, 0.1 (=10%).

[0168] As an example, the protection target value is determined by the following formula (2).

[0169] [Mathematical formula 2]

[0170] Pfnx=Px*(1-d) (2)

[0171] In formula (2), x represents the number of any radio wave radiating unit 4. x is an integer greater than 1 (in this embodiment, x is 2). That is, Pfnx represents the protection target value of the x-th radio wave radiating unit 4. Px represents the current power target value of the x-th radio wave radiating unit 4. d represents a specified ratio.

[0172] exist Fig.15 At time t20, the power target value P1 of the radio wave radiating unit 4-1 is 250 W, and the power target value P2 of the radio wave radiating unit 4-2 is 200 W. As described above, the normal target value Pf1 of the radio wave radiating unit 4-1 is 250 W, and the normal target value Pf1 of the radio wave radiating unit 4-2 is 200 W.

[0173] When the operation of the radio wave radiating device 1 is switched from normal operation to protection operation, the power target value P1 of the radio wave radiating unit 4-1 and the power target value P2 of the radio wave radiating unit 4-2 are equal to the normal target values ​​Pf1 and Pf2, respectively. Therefore, the protection target value Pfn1 of the radio wave radiating unit 4-1 is 225 (= 250 × (1-0.1)). The protection target value Pfn2 of the radio wave radiating unit 4-2 is 180 (= 200 × (1-0.1)).

[0174] As described above, the protection target value Pfn1 is 225 W, and the protection target value Pfn2 is 180 W. The ratio of the protection target values ​​Pfn1 and Pfn2 (for example, 225:180=5:4) is equal to the ratio of the normal target values ​​Pf1 and Pf2 (for example, 250:200=5:4).

[0175] By setting the protection target value Pfn1 to 225 W and the protection target value Pfn2 to 180 W, around time t20, the power target value P1 is reduced from 250 W to 225 W, and the power target value P2 is reduced from 200 W to 180 W.

[0176] like Fig.14As shown, the temperature reference protection operation includes determining whether the temperature measurement values ​​T1 and T2 are lower than the previous time (step S42). By reducing the power target values ​​P1 and P2 in step S41, it is expected that the temperature measurement values ​​T1 and T2 will decrease.

[0177] However, it takes a certain amount of time from when the power target values ​​P1 and P2 decrease until the temperature measurement values ​​T1 and T2 decrease. Therefore, the control unit 6 confirms that the temperature measurement values ​​T1 and T2 decrease in step S42.

[0178] like Fig.14 As shown, if the determination result of step S42 is "No", the control unit 6 repeats the process of step S42. If the determination result of step S42 is "Yes", the control unit 6 advances the process to step S43.

[0179] In step S43, the control unit 6 determines whether the time change of the temperature measurement values ​​T1 and T2 is within a predetermined range within a predetermined time. Step S43 is performed to determine whether the temperature measurement values ​​T1 and T2 are stable.

[0180] In addition, the prescribed time and prescribed range in step S43 are appropriately set based on whether the temperature measurement values ​​T1 and T2 are stable. Specifically, the prescribed time is more than 1 second and less than 1 minute (for example, 10 seconds). The prescribed range is within 10 degrees (for example, within 3 degrees).

[0181] If the determination result of step S43 is "No", the control unit 6 repeats the process of step S43. If the determination result of step S43 is "Yes", the control unit 6 advances the process to step S44. In step S44, the control unit 6 determines whether at least one of the temperature measurement values ​​T1 and T2 is the temperature target value Tth2 (refer to Fig.15 )above.

[0182] The temperature target value Tth2 is a target value of the temperature of the signal amplifier 3 during the temperature reference protection operation. The temperature target value Tth2 is lower than the protection temperature threshold value Tth1. As an example, the temperature target value Tth2 is 90 degrees.

[0183] If the determination result of step S44 is "Yes", the control unit 6 returns the process to step S41 and sets the protection target values ​​of the radio wave radiators 4-1 and 4-2 again.

[0184] like Fig.15 As shown, at time t21 to t22, the time changes of both the temperature measurement values ​​T1 and T2 are within the specified range within the specified time ( Fig.14 The judgment result of step S43 is "Yes"). However, the temperature measurement value T1 is greater than the temperature target value Tth2 ( Fig.14The determination result of step S44 is "Yes"). Therefore, the control unit 6 returns the process to step S41.

[0185] At time t22, the power target value P1 is 225 W, and the power target value P2 is 180 W. Therefore, the protection target value Pfn1 of the radio wave radiator 4-1 is 203 (=225×(1-0.1)). The protection target value Pfn2 of the radio wave radiator 4-2 is 162 (=180×(1-0.1)).

[0186] Thus, the protection action (temperature reference protection action) includes: gradually reducing the protection target values ​​of the plurality of radio wave radiating units 4 until the temperature measurement values ​​T1 and T2 are lower than the temperature target value Tth2. Thus, the temperature of the signal amplifier unit 3 can be lowered than the temperature target value Tth2, and the signal amplifier unit 3 can be protected.

[0187] If the determination result of step S44 is "No", the control unit 6 advances the process to step S45. In step S45, the control unit 6 determines whether both the temperature measurement values ​​T1 and T2 are lower than the recovery temperature threshold value Tth3 (see Fig.15 ). The restoration temperature threshold Tth3 is lower than the protection temperature threshold Tth1. As an example, the restoration temperature threshold Tth3 is 80 degrees.

[0188] If the determination result of step S45 is "yes", the control unit 6 returns the process to step S31 and switches the operation of the radio wave radiating device 1 from the protection operation to the normal operation. If the determination result of step S45 is "no", the control unit 6 returns the process to step S44.

[0189] like Fig.15 As shown, at time t23-t24, the time variation of the temperature measurement values ​​T1 and T2 is within the specified range within the specified time ( Fig.14 The judgment result of step S43 is "yes"). At time t24, the temperature measurement values ​​T1 and T2 are lower than the temperature target value Tth2 ( Fig.14 The judgment result of step S44 is "No"). The temperature measurement values ​​T1 and T2 are still lower than the recovery temperature threshold value Tth3 ( Fig.14 The judgment result of step S45 is "yes").

[0190] Thus, the control unit 6 switches the operation of the radio wave radiating device 1 from the protection operation to the normal operation. Therefore, the control unit 6 returns the processing to Fig.13 In step S31 , the power target values ​​of the plurality of radio waves radiated from the plurality of radio wave radiating units 4 are set as normal target values ​​of the plurality of radio wave radiating units 4 .

[0191] As a result, around time t24, the power target value P1 increases from 203W to 250W, and the power target value P2 increases from 162W to 200W.

[0192] Thus, when it is determined that at least one of the temperature measurement values ​​T1 and T2 is above the protection temperature threshold value Tth1 during the execution of the normal operation, the control unit 6 switches the operation of the radio wave radiating device 1 from the normal operation to the protection operation. In both or one of the radio wave radiating units 4 as the protection target corresponding to the signal amplifier unit 3 to be protected and the radio wave radiating units 4 other than the radio wave radiating units 4 as the protection target among the plurality of radio wave radiating units 4, the protection target value is smaller than the normal target value.

[0193] The protection target values ​​of the plurality of radio wave radiating units 4 are set so that the power consumption distribution in the chamber 10a when the protection action is executed is closer to the power consumption distribution in the chamber 10a when the normal action is executed than when only the power target value of the radio wave radiating unit 4 to be protected is set as the protection target value. Therefore, the stability of the processing of the irradiated object 20 can be improved while protecting the signal amplifier 3.

[0194] In this embodiment, the control unit 6 can execute two kinds of protection actions. Even if the condition for executing the other protection action is met during the execution of one protection action, the control unit 6 continues the protection action being executed. More specifically, as protection actions, the control unit 6 selectively executes a temperature reference protection action and a power reference protection action.

[0195] Specifically, when the control unit 6 determines that at least one of the temperature measurement values ​​is above the protection temperature threshold value during the execution of the normal operation, the operation of the radio wave radiating device 1 is switched from the normal operation to the temperature reference protection operation. When the operation of the radio wave radiating device 1 is switched from the temperature reference protection operation to the power reference protection operation during the execution of the temperature reference protection operation, the protection of the signal amplifier 3 sometimes becomes unstable.

[0196] In such a case, during the execution of the temperature reference protection operation, even if at least one of the reflected wave power measurement values ​​becomes equal to or higher than the protection power threshold, the control unit 6 continues the temperature reference protection operation. This can reduce the possibility that the protection of the signal amplifier 3 becomes unstable.

[0197] When it is determined that at least one of the reflected wave power measurement values ​​is above the protection power threshold value during the execution of the normal operation, the control unit 6 switches the operation of the radio wave radiating device 1 from the normal operation to the power reference protection operation. When the operation of the radio wave radiating device 1 is switched from the power reference protection operation to the temperature reference protection operation during the execution of the power reference protection operation, the protection of the signal amplifier 3 may become unstable.

[0198] In this case, during the power reference protection operation, even if at least one of the temperature measurement values ​​becomes equal to or higher than the protection temperature threshold, the control unit 6 continues the power reference protection operation. This can reduce the possibility that the protection of the signal amplifier 3 becomes unstable.

[0199] Possibly, during the execution of the normal operation, at least one of the temperature measurement values ​​and at least one of the reflected wave power measurement values ​​may both exceed the threshold value. In such a case, the control unit 6 executes the temperature reference protection operation or the power reference protection operation with a higher priority.

[0200] The priority of the temperature reference protection action and the power reference protection action can be appropriately set. For example, in the temperature reference protection action, the protection target value of the radio wave radiating unit is reduced in order to eliminate the state where the temperature measurement value is above the threshold. On the other hand, in the power reference protection action, the protection target value of the radio wave radiating unit is reduced in order to eliminate the state where the reflected wave power measurement value is above the threshold.

[0201] The change of the protection target value is reflected in the change of the reflected wave power measurement value earlier than the change of the temperature measurement value. Therefore, the power reference protection operation can protect the signal amplifier 3 faster than the temperature reference protection operation.

[0202] However, the temperature-based protection action can not only cope with the increase in the temperature measurement value caused by the reflected wave power, but also cope with the increase in the temperature measurement value caused by other reasons such as the increase in the ambient temperature. On the other hand, since the power-based protection action is based on the reflected wave power measurement value, it is difficult to cope with other factors such as the increase in the ambient temperature. However, the power-based protection action is easier to control than the temperature-based protection action.

[0203] [1.1.2 Effects, etc.]

[0204] The radio wave radiating device 1 includes a chamber 10 a , a signal generating unit 2 , a plurality of signal amplifying units 3 ( 3 - 1 , 3 - 2 ), a plurality of radio wave radiating units 4 ( 4 - 1 , 4 - 2 ), a plurality of measuring units 5 ( 5 - 1 , 5 - 2 ), and a control unit 6 .

[0205] The chamber 10a accommodates the irradiation object 20. The signal generator 2 generates a high frequency signal. The plurality of signal amplifiers 3 amplify the high frequency signal and output a plurality of amplified high frequency signals. The plurality of radio wave radiators 4 radiate a plurality of radio waves into the chamber 10a based on the plurality of amplified high frequency signals.

[0206] The plurality of measuring units 5 outputs one or both of the temperature measurement values ​​(T1, T2) indicating the temperature of the plurality of signal amplifiers 3 and the reflected wave power measurement values ​​(Prd1, Prd2) indicating the power of the reflected waves flowing back through the plurality of radio wave radiating units 4. The control unit 6 controls the signal generating unit 2 and the plurality of signal amplifiers 3.

[0207] When it is determined during the execution of normal operation that at least one of the plurality of signal amplifiers 3 needs to be protected based on both or one of the temperature measurement value and the reflected wave power measurement value, the control unit 6 switches the operation of the radio wave radiating device 1 from normal operation to protection operation.

[0208] The normal action includes: setting the power target value P1 of one radio wave to the normal target value Pf1 of the radio wave radiating unit 4-1, and setting the power target value P2 of another radio wave to the normal target value Pf2 of the radio wave radiating unit 4-2. The protection action includes: setting the power target value P1 of one radio wave to the protection target value Pfn1 of the radio wave radiating unit 4-1, and setting the power target value P2 of another radio wave to the protection target value Pfn2 of the radio wave radiating unit 4-2.

[0209] That is, the normal operation includes setting the power target values ​​of the plurality of radio waves to the normal target values ​​of the respective radio wave radiators 4. The protection operation includes setting the power target values ​​of the plurality of radio waves to the protection target values ​​of the respective radio wave radiators 4.

[0210] The protection target value is smaller than the normal target value in both or one of the protection target radio wave radiating section 4 corresponding to the signal amplifier 3 requiring protection and the radio wave radiating section 4 other than the protection target radio wave radiating section 4 among the plurality of radio wave radiating sections 4 .

[0211] The protection target values ​​of the plurality of radio wave radiating units 4 are set so that the power consumption distribution in the chamber 10a is closer to the power consumption distribution in the chamber 10a during normal operation than when only the power target value of the radio wave radiating unit 4 to be protected is set as the protection target value. This structure can improve the stability of the processing of the irradiated object 20 while protecting the signal amplifier 3.

[0212] In the radio wave radiating device 1, the ratio of the protection target value Pfn1 of the radio wave radiating unit 4-1 to the protection target value Pfn2 of the radio wave radiating unit 4-2 is equal to the ratio of the normal target value Pf1 of the radio wave radiating unit 4-1 to the normal target value Pf2 of the radio wave radiating unit 4-2. This structure can make the power consumption distribution in the chamber 10a when the protection action is performed close to the power consumption distribution in the chamber 10a when the normal action is performed.

[0213] In the radio wave radiating device 1, the protection operation includes determining a protection target value of the radio wave radiating unit corresponding to the largest reflected wave power measurement value of the reflected wave power measurement values ​​Prd1 and Prd2.

[0214] The protection action also includes: determining the protection target value of the radio wave radiating unit other than the radio wave radiating unit as the protection object based on the ratio of the normal target values ​​Pf1 and Pf2 and the protection target value of the radio wave radiating unit corresponding to the reflected wave power measurement value in the radio wave radiating units 4-1 and 4-2. This structure can improve the stability of the processing of the irradiated object 20 while protecting the signal amplifier 3.

[0215] In the radio wave radiating device 1, the protection action includes: gradually reducing the protection target value Pfn1 of the radio wave radiating unit 4-1 and the protection target value Pfn2 of the radio wave radiating unit 4-2 until both the temperature measurement values ​​T1 and T2 are lower than the temperature target value Tth2. This structure can improve the stability of the processing of the irradiated object 20 while protecting the signal amplifier 3.

[0216] In the radio wave radiating device 1, the control unit 6 determines that it is necessary to protect the signal amplifier corresponding to the temperature measurement value above the protection temperature threshold value among the temperature measurement values. The protection target value Pfn1 of the radio wave radiating unit 4-1 is set so that the temperature measurement value T1 during the protection action is lower than the protection temperature threshold value Tth1. The protection target value Pfn2 of the radio wave radiating unit 4-2 is set so that the temperature measurement value T2 during the protection action is lower than the protection temperature threshold value Tth1.

[0217] This configuration can reduce the possibility that the actual temperature of the signal amplifiers 3 - 1 and 3 - 2 will become equal to or higher than the protection temperature threshold value Tth1 during the protection operation.

[0218] In the radio wave radiation device 1, when it is determined that both the temperature measurement values ​​T1 and T2 are lower than the recovery temperature threshold value Tth3 during the execution of the protection action, the control unit 6 switches the action of the radio wave radiation device 1 from the protection action to the normal action. The recovery temperature threshold value Tth3 is lower than the protection temperature threshold value Tth1. This structure can reduce the possibility that the action of the radio wave radiation device 1 is switched to the protection action again just after switching from the protection action to the normal action.

[0219] In the radio wave radiating device 1, the control unit 6 determines that it is necessary to protect the signal amplifier corresponding to the reflected wave power measurement value that is greater than the protection power threshold value among the reflected wave power measurement values. The protection target value Pfn1 of the radio wave radiating unit 4-1 is set so that the reflected wave power measurement value Prd1 during the protection operation is lower than the protection power threshold value Pth. The protection target value Pfn2 of the radio wave radiating unit 4-2 is set so that the reflected wave power measurement value Prd2 during the protection operation is lower than the protection power threshold value Pth.

[0220] This configuration can reduce the possibility that the actual power of the reflected wave in the radio wave radiating units 4 - 1 , 4 - 2 will become equal to or higher than the protection power threshold value Pth during the protection operation.

[0221] In the radio wave radiating device 1, when it is determined that the reflected wave power measurement values ​​Prd1 and Prd2 are all lower than the restoration power thresholds of the radio wave radiating units 4-1 and 4-2 during the execution of the protection action, the control unit 6 switches the action of the radio wave radiating device 1 from the protection action to the normal action. The restoration power threshold is set in the radio wave radiating units 4-1 and 4-2 so that the ratio of the protection power threshold Pth to each of the multiple traveling wave power measurement values ​​as the power values ​​of multiple radio waves is smaller during the execution of the protection action than during the execution of the normal action. This structure can reduce the possibility that the action of the radio wave radiating device 1 is switched to the protection action again just after switching from the protection action to the normal action.

[0222] In the radio wave radiating device 1, the control unit 6 selectively performs the temperature reference protection action and the power reference protection action as protection actions. When it is determined that at least one of the temperature measurement values ​​T1 and T2 is greater than the protection temperature threshold value Tth1 during the execution of the normal action, the control unit 6 switches the action of the radio wave radiating device 1 from the normal action to the temperature reference protection action.

[0223] When determining that at least one of the reflected wave power measurement values ​​Prd1 and Prd2 is equal to or greater than the protection power threshold value Pth during the execution of the normal operation, the control unit 6 switches the operation of the radio wave radiating device 1 from the normal operation to the power reference protection operation.

[0224] The temperature reference protection operation includes determining the protection target value Pfn1 of the radio wave radiating unit 4 - 1 and the protection target value Pfn2 of the radio wave radiating unit 4 - 2 so that both the temperature measurement values ​​T1 and T2 are lower than the protection temperature threshold value Tth1 .

[0225] The power reference protection operation includes determining the protection target value Pfn1 of the radio wave radiating unit 4-1 and the protection target value Pfn2 of the radio wave radiating unit 4-2 so that both the reflected wave power measurement values ​​Prd1 and Prd2 are lower than the protection power threshold value Pth.

[0226] The control unit 6 determines whether at least one of the temperature measurement values ​​T1 and T2 is equal to or greater than the protection temperature threshold Tth1 during normal operation. The control unit 6 determines whether at least one of the reflected wave power measurement values ​​Prd1 and Prd2 is equal to or greater than the protection power threshold Pth during normal operation.

[0227] If the results of these determinations are all "yes", the control unit 6 switches the operation of the radio wave radiating device 1 from the normal operation to the temperature reference protection operation and the power reference protection operation with a higher priority. This structure can select and set the protection operation to be executed with priority from the temperature reference protection operation and the power reference protection operation.

[0228] In the radio wave radiating device 1, during the execution of the temperature reference protection action, even if at least one of the reflected wave power measurement values ​​Prd1 and Prd2 becomes greater than the protection power threshold value Pth, the control unit 6 continues the temperature reference protection action. During the execution of the power reference protection action, even if at least one of the temperature measurement values ​​T1 and T2 becomes greater than the protection temperature threshold value Tth1, the control unit 6 continues the power reference protection action.

[0229] In this configuration, by switching the protection operation from one of the temperature reference protection operation and the power reference protection operation to the other, the possibility that the protection of the signal amplifier 3 becomes unstable can be reduced.

[0230] In another viewpoint, the radio wave radiating device 1 includes a chamber 10 a , a signal generating unit 2 , signal amplifying units 3 - 1 and 3 - 2 , radio wave radiating units 4 - 1 and 4 - 2 , measuring units 5 - 1 and 5 - 2 , and a control unit 6 .

[0231] The chamber 10a accommodates the irradiation object 20. The signal generating unit 2 generates a high-frequency signal. The plurality of signal amplifiers 3 amplify the high-frequency signal and output a plurality of amplified high-frequency signals. The plurality of radio wave radiating units 4 radiate a plurality of radio waves into the chamber 10a based on the plurality of amplified high-frequency signals. The plurality of measuring units 5 output temperature measurement values ​​T1 and T2 indicating the temperature of the signal amplifiers 3-1 and 3-2, respectively, and reflected wave power measurement values ​​Prd1 and Prd2 indicating the power of the reflected wave flowing back through the radio wave radiating units 4-1 and 4-2, both or one of them. The control unit 6 controls the signal generating unit 2 and the signal amplifiers 3-1 and 3-2.

[0232] During the execution of normal action, when it is determined based on both or one of the temperature measurement values ​​T1, T2 and the reflected wave power measurement values ​​Prd1, Prd2 that at least one of the signal amplifiers 3-1, 3-2 needs to be protected, the control unit 6 switches the action of the radio wave radiation device 1 from normal action to protection action.

[0233] The normal action includes: setting the power target value P1 of one radio wave to the normal target value Pf1 of the radio wave radiating unit 4-1, and setting the power target value P2 of another radio wave to the normal target value Pf2 of the radio wave radiating unit 4-2. The protection action includes: setting the power target value P1 of one radio wave to the protection target value Pfn1 of the radio wave radiating unit 4-1, and setting the power target value P2 of another radio wave to the protection target value Pfn2 of the radio wave radiating unit 4-2.

[0234] In the radio wave radiating units 4-1 and 4-2, the protection target value is smaller than the normal target value. The ratio of the protection target value Pfn1 of the radio wave radiating unit 4-1 to the protection target value Pfn2 of the radio wave radiating unit 4-2 is equal to the ratio of the normal target value Pf1 of the radio wave radiating unit 4-1 to the normal target value Pf2 of the radio wave radiating unit 4-2. This structure can improve the stability of the processing of the irradiated object 20 while protecting the signal amplifier 3.

[0235] [1.2 Implementation Method 2]

[0236] [1.2.1 Structure]

[0237] Fig.16 1A is a schematic diagram of a radio wave radiating device 1A according to Embodiment 2 of the present disclosure. Fig.16 As shown, the radio wave radiation device 1A includes a signal generating unit 2, a power distributor 2b, signal amplifying units 3-1, 3-2, 3-3, 3-4, radio wave radiation units 4-1, 4-2, 4-3, 4-4, measuring units 5-1, 5-2, 5-3, 5-4, a control unit 6A, a storage unit 7, an input / output unit 8 and a shell 10.

[0238] The signal amplifiers 3-1 to 3-4 refer to the first to fourth signal amplifiers 3, respectively. The radio wave radiators 4-1 to 4-4 and the measuring units 5-1 to 5-4 are the same. Hereinafter, the signal amplifiers 3-1 to 3-4 are collectively referred to as a plurality of signal amplifiers 3. The radio wave radiators 4-1 to 4-4 are collectively referred to as a plurality of radio wave radiators 4. The measuring units 5-1 to 5-4 are collectively referred to as a plurality of measuring units 5.

[0239] In addition, when simply referred to as the signal amplifier 3, it means any of the signal amplifiers 3-1 to 3-4. When simply referred to as the radio wave radiator 4, it means any of the radio wave radiators 4-1 to 4-4. When referred to as the single measuring unit 5, it means any of the measuring units 5-1 to 5-4.

[0240] Fig.17 It is a plan view of the radio wave radiation device 1A schematically showing the internal structure of the casing 10 . Fig.18 It is a front view schematically showing the internal structure of the radio wave radiation device 1A. Fig.19 It is along Fig.17 Cross-sectional view of the CC line. Fig. 20 It is along Fig.18 Cross-sectional view of line DD. Fig.21 It is a perspective view in which a part of the radio wave radiating device 1A is omitted.

[0241] like Fig.19 , Fig. 20 as well as Fig.21 As shown, the main body 11 has a storage space 11f below the chamber 10a. The storage space 11f stores the high-frequency signal generating device 13A. The high-frequency signal generating device 13A has a substantially rectangular parallelepiped housing 130A. The housing 130A stores the signal generating unit 2, the signal amplifying units 3-1 to 3-4, the measuring units 5-1 to 5-4, the control unit 6A and the storage unit 7.

[0242] The high-frequency signal generating device 13A has a first port 131A, a second port 132A, a third port 133A, and a fourth port 134A. The first ports 131A to 134A respectively output the amplified high-frequency signals from the signal amplifiers 3-1 to 3-4. The first port 131A, the second port 132A, the third port 133A, and the fourth port 134A are, for example, coaxial connectors that can be connected to coaxial cables.

[0243] exist Fig.16 In the example, the signal generator 2 generates a high frequency signal. The power distributor 2b is connected between the signal generator 2 and each of the signal amplifiers 3-1 to 3-4. The power distributor 2b supplies the high frequency signal from the signal generator 2 to the signal amplifiers 3-1 to 3-4.

[0244] The signal amplifier 3 amplifies the high frequency signal from the signal generator 2. The signal amplifiers 3-1 to 3-4 amplify the supplied high frequency signals and output amplified high frequency signals.

[0245] The signal amplifiers 3-1 to 3-4 are connected to the first port 131A, the second port 132A, the third port 133A and the fourth port 134A (see Fig. 20 ) are connected. Therefore, the first port 131A outputs the amplified high-frequency signal from the signal amplifier 3-1. The second port 132A outputs the amplified high-frequency signal from the signal amplifier 3-2. The third port 133A outputs the amplified high-frequency signal from the signal amplifier 3-3. The fourth port 134A outputs the amplified high-frequency signal from the signal amplifier 3-4.

[0246] The plurality of radio wave radiating units 4 radiate a plurality of radio waves into the chamber 10a based on the amplified high-frequency signals from the plurality of signal amplifying units 3. That is, the radio wave radiating unit 4-1 radiates radio waves into the chamber 10a based on the amplified high-frequency signals from the signal amplifying unit 3-1. The radio wave radiating unit 4-2 radiates radio waves into the chamber 10a based on the amplified high-frequency signals from the signal amplifying unit 3-2.

[0247] The radio wave radiating unit 4-3 radiates radio waves into the chamber 10a based on the amplified high frequency signal from the signal amplifier 3-3. The radio wave radiating unit 4-4 radiates radio waves into the chamber 10a based on the amplified high frequency signal from the signal amplifier 3-4.

[0248] The radio wave radiating unit 4-1 includes an antenna 41-1 and a waveguide 42-1. The radio wave radiating unit 4-2 includes an antenna 41-2 and a waveguide 42-2. The radio wave radiating unit 4-3 includes an antenna 41-3 and a waveguide 42-3. The radio wave radiating unit 4-4 includes an antenna 41-4 and a waveguide 42-4.

[0249] like Fig. 20 As shown, the radio wave radiating unit 4-1 includes a connector 43-1 connected to the antenna 41-1. The radio wave radiating unit 4-2 includes a connector 43-2 connected to the antenna 41-2. The radio wave radiating unit 4-3 includes a connector 43-3 connected to the antenna 41-3. The radio wave radiating unit 4-4 includes a connector 43-4 connected to the antenna 41-4.

[0250] The connector 43-1 is connected to the first port 131A via the connection cable 14-1. The connector 43-2 is connected to the first port 132A via the connection cable 14-2. The connector 43-3 is connected to the first port 133A via the connection cable 14-3. The connector 43-4 is connected to the first port 134A via the connection cable 14-4.

[0251] In this way, the antennas 41-1 to 41-4 are connected to the signal amplifiers 3-1 to 3-4, respectively. The antennas 41-1 to 41-4 radiate radio waves based on the amplified high-frequency signals from the signal amplifiers 3-1 to 3-4, respectively.

[0252] The connectors 43-1, 43-2, 43-3, and 43-4 are, for example, coaxial connectors to which coaxial cables can be connected, and the connection cables 14-1, 14-2, 14-3, and 14-4 are coaxial cables.

[0253] like Fig.16 As shown, the waveguides 42-1 to 42-4 guide the radio waves radiated from the antennas 41-1 to 41-4 into the chamber 10a, respectively. Fig.18 , Fig.19 and Fig.21As shown, the waveguides 42-1 to 42-4 have a rectangular parallelepiped shape extending in the up-down direction.

[0254] like Fig.19 As shown, the first ends (specifically, the lower ends) of the waveguides 42 - 1 to 42 - 4 are arranged in the storage space 11 f.

[0255] like Fig. 20 As shown, antennas 41 - 1 to 41 - 4 are respectively arranged inside the waveguides 42 - 1 to 42 - 4 near the first ends.

[0256] Connectors 43 - 1 to 43 - 4 are disposed outside the first end sides of the waveguides 42 - 1 to 42 - 4 , respectively.

[0257] The antennas 41-1 to 41-4 are connected to connectors 43-1 to 43-4, respectively. Openings 4a-1, 4a-2, 4a-3, and 4a-4 are formed on the side surfaces of the second ends (specifically, the upper ends) of the waveguides 42-1 to 42-4, respectively.

[0258] The opening 4a-1 is disposed on the left wall surface 11a of the main body 11, and connects the chamber 10a with the waveguide 42-1. Thus, the radio waves radiated from the antenna 41-1 are radiated into the chamber 10a via the waveguide 42-1 and the opening 4a-1.

[0259] The opening 4a-2 is provided on the left wall surface 11a of the main body 11, and connects the chamber 10a and the waveguide 42-2. Thus, the radio waves radiated from the antenna 41-2 are radiated into the chamber 10a via the waveguide 42-2 and the opening 4a-2.

[0260] The opening 4a-3 is disposed on the right wall surface 11b of the main body 11, and connects the chamber 10a with the waveguide 42-3. Thus, the radio waves radiated from the antenna 41-3 are radiated into the chamber 10a via the waveguide 42-3 and the opening 4a-3.

[0261] The opening 4a-4 is disposed on the right wall surface 11b of the main body 11, and connects the chamber 10a with the waveguide 42-4. Thus, the radio waves radiated from the antenna 41-4 are radiated into the chamber 10a via the waveguide 42-4 and the opening 4a-4.

[0262] like Fig.16 As shown, the plurality of measuring units 5 output temperature measurement values ​​and a plurality of reflected wave power measurement values ​​indicating the temperatures of the plurality of signal amplifiers 3. That is, the measuring units 5-1 to 5-4 output temperature measurement values ​​indicating the temperatures of the signal amplifiers 3-1 to 3-4, respectively.

[0263] Then, the measuring units 5-1 to 5-4 output reflected wave power measurement values ​​indicating the powers of reflected waves flowing backward through the radio wave radiating units 4-1 to 4-4, respectively.

[0264] More specifically, the measuring units 5-1 to 5-4 include temperature measuring units 51-1, 51-2, 51-3, and 51-4, respectively. The measuring units 5-1 to 5-4 also include power measuring units 52-1, 52-2, 52-3, and 52-4, respectively.

[0265] The temperature measuring units 51-1 to 51-4 include temperature sensors disposed near the signal amplifiers 3-1 to 3-4, respectively. Therefore, the temperature measuring units 51-1 to 51-4 measure the temperatures of the signal amplifiers 3-1 to 3-4, respectively. The temperature measuring units 51-1 to 51-4 output temperature measurement values ​​indicating the temperatures of the signal amplifiers 3-1 to 3-4, respectively, to the control unit 6A.

[0266] The power measuring unit 52-1 measures the power of the amplified high-frequency signal (traveling wave) supplied from the signal amplifying unit 3-1 to the radio wave radiating unit 4-1 in order to radiate radio waves into the chamber 10a. The power measuring unit 52-2 measures the power of the amplified high-frequency signal (traveling wave) supplied from the signal amplifying unit 3-2 to the radio wave radiating unit 4-2 in order to radiate radio waves into the chamber 10a.

[0267] The power measuring unit 52-3 measures the power of the amplified high-frequency signal (traveling wave) supplied from the signal amplifying unit 3-3 to the radio wave radiating unit 4-3 in order to radiate radio waves into the chamber 10a. The power measuring unit 52-4 measures the power of the amplified high-frequency signal (traveling wave) supplied from the signal amplifying unit 3-4 to the radio wave radiating unit 4-4 in order to radiate radio waves into the chamber 10a.

[0268] The power measuring units 52 - 1 to 52 - 4 output forward wave power measurement values ​​indicating the measured powers of the forward waves to the control unit 6A.

[0269] Furthermore, the power measuring unit 52-1 measures the power of the reflected wave flowing back toward the signal amplifier 3-1 via the radio wave radiating unit 4-1. The power measuring unit 52-2 measures the power of the reflected wave flowing back toward the signal amplifier 3-2 via the radio wave radiating unit 4-2.

[0270] The power measuring unit 52-3 measures the power of the reflected wave flowing back toward the signal amplifier 3-3 via the radio wave radiating unit 4-3. The power measuring unit 52-4 measures the power of the reflected wave flowing back toward the signal amplifier 3-4 via the radio wave radiating unit 4-4.

[0271] The power measuring units 52 - 1 to 52 - 4 output reflected wave power measurement values ​​indicating the measured powers of reflected waves to the control unit 6 .

[0272] The control unit 6A controls the signal generation unit 2 and the plurality of signal amplifiers 3 . Thus, the radio wave radiating device 1A radiates the plurality of radio waves from the radio wave radiating units 4 - 1 to 4 - 4 into the chamber 10 a , thereby heating the irradiation object 20 .

[0273] As in the first embodiment, the control unit 6A selectively executes the normal operation and the protection operation. The protection operation includes the temperature reference protection operation and the power reference protection operation. Fig. 9 , Fig.10 , Fig.13 as well as Fig.14 The actions shown in the flow chart.

[0274] The power reference protection operation of the control unit 6A is briefly described. Fig. 9 As shown, the control unit 6A first performs a normal operation (step S11).

[0275] Although not shown in the figure, in the following description, P1, P2, P3, and P4 respectively represent the power target values ​​of the plurality of radio waves radiated from the radio wave radiating units 4-1 to 4-4. Pf1, Pf2, Pf3, and Pf4 represent the normal target values ​​of the radio wave radiating units 4-1 to 4-4. Prd1 to Prd4 respectively represent the reflected wave power measurement values ​​measured by the measuring units 5-1 to 5-4.

[0276] The normal operation includes setting the power target values ​​P1 to P4 to normal target values ​​Pf1 to Pf4, respectively. As an example, the normal target values ​​Pf1 to Pf4 are 250W, 200W, 300W, and 150W, respectively.

[0277] During the execution of the normal operation, the control unit 6A determines whether or not at least one of the reflected wave power measurement values ​​Prd1, Prd2, Prd3, and Prd4 is equal to or greater than the protection power threshold value Pth (step S12).

[0278] For example, the reflected wave power measurement values ​​Prd1 to Prd4 are 90 W, 80 W, 100 W, and 90 W, respectively. When the protection power threshold value Pth is 100 W, the control unit 6A determines that the reflected wave power measurement value Prd3 is greater than the protection power threshold value Pth ("Yes" in step S12). Therefore, the control unit 6A switches the operation of the radio wave radiating device 1A from the normal operation to the protection operation (power reference protection operation) (step S13).

[0279] Pfn1, Pfn2, Pfn3, and Pfn4 are protection target values ​​of a plurality of radio waves radiated from the radio wave radiating units 4-1 to 4-4. Fig.10As shown, the power reference protection operation includes setting the power target values ​​P1 to P4 as protection target values ​​Pfn1 to Pfn4 of the radio wave radiating units 4-1 to 4-4, respectively (step S21). The protection target values ​​Pfn1 to Pfn4 are determined by the above-mentioned formula (1).

[0280] When the reflected wave power measurement values ​​Prd1 to Prd4 are 90 W, 80 W, 100 W, and 90 W, respectively, the radio wave radiator 4 corresponding to the largest reflected wave power measurement value among the plurality of radio wave radiators 4 is the radio wave radiator 4-3. Therefore, the protection target value Pfn3 of the radio wave radiator 4-3 is determined based on the reflected wave power measurement value Prd3 of the radio wave radiator 4-3.

[0281] For example, the target value Prpt of the reflected wave power in the protection operation is 80 W, and the traveling wave power measurement value Pfd3 of the radio wave radiating unit 4-3 is equal to the normal target value Pf3. In this case, the protection target value Pfn3 is 240 (=80*(300 / 100)*(300 / 300)).

[0282] As described above, the normal target values ​​Pf1 to Pf4 are respectively 250 W, 200 W, 300 W, and 150 W. Therefore, the protection target value Pfn1 of the radio wave radiating unit 4 - 1 is 200 (=80*(300 / 100)*(250 / 300)).

[0283] The protection target value Pfn2 of the radio wave radiating unit 4-2 is 160 (=80*(300 / 100)*(200 / 300)). The protection target value Pfn4 of the radio wave radiating unit 4-4 is 120 (=80*(300 / 100)*(150 / 300)).

[0284] As described above, the protection target value Pfn1 is 200W, the protection target value Pfn2 is 160W, the protection target value Pfn3 is 240W, and the protection target value Pfn4 is 120W.

[0285] The ratio of the protection target values ​​Pfn1, Pfn2, Pfn3, and Pfn4 (for example, 200:160:240:120=5:4:6:3) is equal to the ratio of the normal target values ​​Pf1, Pf2, Pf3, and Pf4 (for example, 250:200:300:150=5:4:6:3).

[0286] like Fig.10 As shown, the protection operation includes determining whether the reflection power ratio of each of the radio wave radiating units 4-1 to 4-4 is lower than the end threshold Rth (step S22). If the determination result of step S22 is "yes", the control unit 6 switches the operation of the radio wave radiating device 1A from the protection operation to the normal operation.

[0287] Thus, when it is determined during the execution of the normal operation that at least one of the reflected wave power measurement values ​​Prd1 to Prd4 is equal to or greater than the protection power threshold value Pth, the control unit 6A switches the operation of the radio wave radiating device 1A from the normal operation to the protection operation.

[0288] The control unit 6A determines that it is necessary to protect the signal amplifier 3 corresponding to the reflected wave power measurement value above the protection power threshold value Pth. The protection target value is less than the normal target value in both or one of the radio wave radiating unit 4 as the protection target corresponding to the signal amplifier 3 to be protected and the radio wave radiating unit 4 other than the radio wave radiating unit 4 as the protection target among the plurality of radio wave radiating units 4 (4-1 to 4-4).

[0289] The protection target values ​​of the plurality of radio wave radiating units are set so that the power consumption distribution in the chamber 10a when the protection action is executed is closer to the power consumption distribution in the chamber 10a when the normal action is executed than when only the power target value of the radio wave radiating unit 4 as the protection object is set as the protection target value. Therefore, the stability of the processing of the irradiated object 20 can be improved while protecting the signal amplifier 3.

[0290] The temperature reference protection operation of the control unit 6A is briefly described. Fig.13 As shown, the control unit 6A first performs a normal operation (step S31). The normal operation includes: setting the power target values ​​P1 to P4 of the multiple radio waves radiated from the radio wave radiating units 4-1 to 4-4 to the normal target values ​​Pf1 to Pf4 of the radio wave radiating units 4-1 to 4-4 respectively. As an example, the normal target values ​​Pf1 to Pf4 are 250W, 200W, 300W, and 150W respectively.

[0291] Although not shown in the figure, in the following description, T1 to T4 represent the temperature measurement values ​​measured by the measuring units 5-1 to 5-4, respectively. The control unit 6A determines whether at least one of the temperature measurement values ​​T1, T2, T3, and T4 is greater than the protection temperature threshold value Tth1 during the execution of the normal operation (step S32). If the determination result of step S32 is "No", the control unit 6A repeats the processing of step S32.

[0292] When the determination result of step S32 is "YES", the control unit 6A switches the operation of the radio wave radiating device 1A from the normal operation to the protection operation (temperature reference protection operation) (step S33).

[0293] like Fig.14As shown, the protection action (temperature reference protection action) includes setting the power target values ​​P1 to P4 of the plurality of radio waves radiated from the radio wave radiating units 4-1 to 4-4 to the protection target values ​​Pfn1 to Pfn4 of the radio wave radiating units 4-1 to 4-4, respectively (step S41). The protection target values ​​Pfn1 to Pfn4 are determined by the above-mentioned formula (2).

[0294] Normal target values ​​Pf1 to Pf4 are 250 W, 200 W, 300 W, and 150 W. Therefore, when the operation of the radio wave radiating device 1A is switched from normal operation to protection operation (temperature reference protection operation), the power target values ​​P1 to P4 are 250 W, 200 W, 300 W, and 150 W, respectively.

[0295] For example, the prescribed ratio d is set to 0.1. In this case, the protection target value Pfn1 of the radio wave radiating unit 4-1 is 225 (=250×(1-0.1)). The protection target value Pfn2 of the radio wave radiating unit 4-2 is 180 (=200×(1-0.1)). The protection target value Pfn3 of the radio wave radiating unit 4-3 is 270 (=300×(1-0.1)). The protection target value Pfn4 of the radio wave radiating unit 4-4 is 135 (=150×(1-0.1)).

[0296] As described above, the protection target value Pfn1 is 225W, the protection target value Pfn2 is 180W, the protection target value Pfn3 is 270W, and the protection target value Pfn4 is 135W.

[0297] The ratio of the protection target values ​​Pfn1, Pfn2, Pfn3, and Pfn4 (for example, 225:180:270:135=5:4:6:3) is equal to the ratio of the normal target values ​​Pf1, Pf2, Pf3, and Pf4 (for example, 250:200:300:150=5:4:6:3).

[0298] like Fig.14 As shown, during the temperature reference protection operation, the control unit 6A determines whether all the temperature measurement values ​​T1 to T4 are lower than the previous time (step S42). If the determination result of step S42 is "No", the control unit 6A repeats the process of step S42.

[0299] If the determination result of step S42 is "YES", in step S43, the control unit 6A determines whether the time changes of the temperature measurement values ​​T1 to T4 are within a predetermined range within a predetermined time.

[0300] If the determination result of step S43 is "No", the control unit 6A repeats the process of step S43. If the determination result of step S43 is "Yes", the control unit 6A advances the process to step S44. In step S44, the control unit 6A determines whether at least one of the temperature measurement values ​​T1 to T4 is equal to or greater than the temperature target value Tth2.

[0301] If the result of determination in step S44 is "Yes", the control unit 6A returns the process to step S41 and sets the protection target values ​​Pfn1 to Pfn4 again. The power target values ​​P1 to P4 are 225W, 180W, 270W, and 135W, respectively.

[0302] In this case, the protection target value Pfn1 is 203 (=225×(1-0.1)). The protection target value Pfn2 is 162 (=180×(1-0.1)). The protection target value Pfn3 is 243 (=270×(1-0.1)). The protection target value Pfn4 is 122 (=135×(1-0.1)).

[0303] Thus, the protection action (temperature reference protection action) includes gradually reducing the protection target values ​​Pfn1 to Pfn4 of each of the plurality of radio wave radiating units 4 (4-1 to 4-4) until all of the temperature measurement values ​​T1 to T4 are lower than the temperature target value Tth2.

[0304] The control unit 6A determines whether at least one of the temperature measurement values ​​T1 to T4 is greater than the temperature target value Tth2 (step S44). If the determination result of step S44 is "No", in other words, if all the temperature measurement values ​​T1 to T4 are lower than the temperature target value Tth2, the control unit 6 advances the process to step S45.

[0305] In step S45, the control unit 6A determines whether all the temperature measurement values ​​T1 to T4 are lower than the recovery temperature threshold value Tth3. If the determination result of step S45 is "yes", the control unit 6A returns the process to step S31 and switches the operation of the radio wave radiation device 1A from the protection operation to the normal operation. If the determination result of step S45 is "no", the control unit 6 returns the process to step S44.

[0306] Thus, when it is determined that at least one of the temperature measurement values ​​T1 to T4 is equal to or higher than the protection temperature threshold value Tth1 during the execution of the normal operation, the control unit 6A switches the operation of the radio wave radiating device 1A from the normal operation to the protection operation.

[0307] The control unit 6A determines that it is necessary to protect the signal amplifier 3 corresponding to the temperature measurement value above the protection temperature threshold value Tth1. The protection target value is less than the normal target value in both or one of the radio wave radiating unit 4 as the protection target corresponding to the signal amplifier 3 to be protected and the radio wave radiating unit 4 other than the radio wave radiating unit 4 as the protection target among the plurality of radio wave radiating units 4 (4-1 to 4-4).

[0308] The protection target values ​​of the plurality of radio wave radiating units 4 are set so that the power consumption distribution in the chamber 10a when the protection action is executed is closer to the power consumption distribution in the chamber 10a when the normal action is executed than when only the power target value of the radio wave radiating unit 4 to be protected is set as the protection target value. Therefore, the stability of the processing of the irradiated object 20 can be improved while protecting the signal amplifier 3.

[0309] In the radio wave radiating device 1 of the first embodiment, radio waves are radiated from the openings 4a-1 and 4a-2 into the chamber 10a. In contrast, in the radio wave radiating device 1A of the present embodiment, radio waves are radiated from the openings 4a-1, 4a-2, 4a-3, and 4a-4 into the chamber 10a.

[0310] Therefore, the radio wave radiating device 1A has more achievable power consumption distribution patterns than the radio wave radiating device 1. Therefore, the radio wave radiating device 1A can perform more processing on the irradiation target 20 than the radio wave radiating device 1.

[0311] [1.2.2 Effects, etc.]

[0312] The radio wave radiating device 1A includes a chamber 10a, a signal generating unit 2, a plurality of signal amplifying units 3 (3-1 to 3-4), a plurality of radio wave radiating units 4 (4-1 to 4-4), a plurality of measuring units 5 (5-1 to 5-4), and a control unit 6A.

[0313] The chamber 10a accommodates the irradiation object 20. The signal generator 2 generates a high frequency signal. The plurality of signal amplifiers 3 amplify the high frequency signal and output a plurality of amplified high frequency signals. The plurality of radio wave radiators 4 radiate a plurality of radio waves into the chamber 10a based on the plurality of amplified high frequency signals.

[0314] The plurality of measuring units 5 outputs one or both of temperature measurement values ​​(T1 to T4) indicating the temperature of the plurality of signal amplifiers 3 and reflected wave power measurement values ​​(Prd1 to Prd4) indicating the power of reflected waves flowing back through the plurality of radio wave radiating units 4. The control unit 6A controls the signal generating unit 2 and the plurality of signal amplifiers 3.

[0315] When the control unit 6A determines that at least one of the plurality of signal amplifiers 3 needs to be protected based on both or one of the temperature measurement value and the reflected wave power measurement value during the normal operation, the control unit 6A switches the operation of the radio wave radiating device 1A from the normal operation to the protection operation.

[0316] The normal operation includes setting the power target values ​​P1 to P4 of the radio waves to the normal target values ​​Pf1 to Pf4 of the radio wave radiators 4-1 to 4-4, respectively. The protection operation includes setting the power target values ​​Pfn1 to Pfn4 of the radio wave radiators 4-1 to 4-4, respectively.

[0317] The protection target value is smaller than the normal target value in both or one of the radio wave radiating section 4 as the protection target corresponding to the signal amplifier 3 requiring protection and the radio wave radiating section 4 other than the protection target among the plurality of radio wave radiating sections 4 .

[0318] The protection target values ​​of the plurality of radio wave radiating units 4 are set so that the power consumption distribution in the chamber 10a is closer to the power consumption distribution in the chamber 10a during normal operation than when only the power target value of the radio wave radiating unit 4 to be protected is set as the protection target value. This structure can improve the stability of the processing of the irradiated object 20 while protecting the signal amplifier 3.

[0319] [1.3 Implementation Method 3]

[0320] [1.3.1 Structure]

[0321] Fig. 22 1 is a schematic diagram of a radio wave radiating device 1B according to Embodiment 3 of the present disclosure. Fig. 22 As shown, the radio wave radiation device 1B includes signal generating units 2-1, 2-2, signal amplifying units 3-1, 3-2, 3-3, 3-4, power synthesizers 15-1, 15-2, radio wave radiation units 4-1, 4-2, measuring units 5-1, 5-2, 5-3, 5-4, a control unit 6B, a storage unit 7, an input / output unit 8 and a shell 10.

[0322] The signal generating units 2-1 and 2-2 refer to the first signal generating unit 2 and the second signal generating unit 2, respectively. The power combiners 15-1 and 15-2 are the same. The signal amplifiers 3-1 to 3-4 refer to the first signal amplifier 3 to the fourth signal amplifier 3, respectively. The radio wave radiating units 4-1 to 4-4 and the measuring units 5-1 to 5-4 are the same.

[0323] Hereinafter, the signal generating units 2-1 and 2-2 are collectively referred to as a plurality of signal generating units 2. The signal amplifying units 3-1 to 3-4 are collectively referred to as a plurality of signal amplifying units 3. The power combiners 15-1 and 15-2 are collectively referred to as a plurality of power combiners 15. The radio wave radiating units 4-1 and 4-2 are collectively referred to as a plurality of radio wave radiating units 4. The measuring units 5-1 to 5-4 are collectively referred to as a plurality of measuring units 5.

[0324] Fig.23 It is a plan view of the radio wave radiation device 1B schematically showing the internal structure of the casing 10 . Fig.24 It is a front view of the radio wave radiation device 1B schematically showing the internal structure of the casing 10 . Fig.25 It is along Fig.23 A cross-sectional view of line EE. Fig.26 It is along Fig.24 Cross-sectional view of the FF line. Fig. 27 It is a perspective view in which a part of the radio wave radiating device 1B is omitted.

[0325] like Fig.25 , Fig.26 as well as Fig. 27 As shown, the main body 11 has a storage space 11f below the chamber 10a. The storage space 11f stores the high-frequency signal generating devices 13B-1 and 13B-2. The high-frequency signal generating devices 13B-1 and 13B-2 have substantially rectangular parallelepiped housings 130B-1 and 130B-2, respectively.

[0326] The housing 130B-1 houses the signal generating unit 2-1, the signal amplifying units 3-1, 3-2, and the measuring units 5-1, 5-2. The housing 130B-2 houses the signal generating unit 2-2, the signal amplifying units 3-3, 3-4, and the measuring units 5-3, 5-4.

[0327] The high-frequency signal generating device 13B-1 has a first port 131B-1 and a second port 132B-1. The first port 131B-1 outputs the amplified high-frequency signal from the signal amplifier 3-1. The second port 132B-1 outputs the amplified high-frequency signal from the signal amplifier 3-2.

[0328] The first port 131B- 1 and the second port 132B- 1 are, for example, coaxial connectors to which coaxial cables can be connected.

[0329] The high-frequency signal generating device 13B-2 has a first port 131B-2 and a second port 132B-2. The first port 131B-2 outputs the amplified high-frequency signal from the signal amplifier 3-3. The second port 132B-2 outputs the amplified high-frequency signal from the signal amplifier 3-4. The first port 131B-2 and the second port 132B-2 are, for example, coaxial connectors that can be connected to coaxial cables.

[0330] like Fig. 22 As shown, the signal generator 2-1 generates a high frequency signal and supplies the high frequency signal to the signal amplifiers 3-1 and 3-2. The signal generator 2-2 generates a high frequency signal and supplies the high frequency signal to the signal amplifiers 3-3 and 3-4. The signal amplifiers 3-1 to 3-4 amplify the supplied high frequency signals and output the amplified high frequency signals.

[0331] The signal amplifiers 3-1 and 3-2 are connected to the first port 131B-1 and the second port 132B-1 (both refer to Fig.26 ) are connected. The signal amplifiers 3-3 and 3-4 are connected to the first port 131B-2 and the second port 132B-2 (both refer to Fig.26 )connect.

[0332] Therefore, the first port 131B-1 outputs the amplified high-frequency signal from the signal amplifier 3-1. The second port 132B-1 outputs the amplified high-frequency signal from the signal amplifier 3-2. The first port 131B-2 outputs the amplified high-frequency signal from the signal amplifier 3-3. The second port 132B-2 outputs the amplified high-frequency signal from the signal amplifier 3-4.

[0333] The radio wave radiator 4-1 radiates radio waves into the chamber 10a based on the amplified high frequency signals of the signal amplifiers 3-1 and 3-2. The radio wave radiator 4-2 radiates radio waves into the chamber 10a based on the amplified high frequency signals of the signal amplifiers 3-3 and 3-4.

[0334] The radio wave radiating unit 4-1 includes an antenna 41-1 and a waveguide 42-1. The radio wave radiating unit 4-2 includes an antenna 41-2 and a waveguide 42-2.

[0335] like Fig.26 As shown, the radio wave radiating unit 4-1 has a connector 43-1 connected to the antenna 41-1. The connector 43-1 is connected to the first port 131B-1 and the second port 132B-1 via the power combiner 15-1. The power combiner 15-1 combines the amplified high-frequency signals from the first port 131B-1 and the second port 132B-1, and outputs the combined signal to the connector 43-1.

[0336] Thus, antenna 41-1 is connected to signal amplifiers 3-1 and 3-2 via power combiner 15-1. Antenna 41-1 radiates radio waves based on a signal obtained by combining amplified high-frequency signals from signal amplifiers 3-1 and 3-2. Connector 43-1 is a coaxial connector connectable to power combiner 15-1.

[0337] like Fig.26As shown, the radio wave radiation unit 4-2 has a connector 43-2 connected to the antenna 41-2. The connector 43-2 is connected to the first port 131B-2 and the second port 132B-2 via the power combiner 15-2. The power combiner 15-2 combines the amplified high-frequency signals from the first port 131B-2 and the second port 132B-2, and outputs the combined signal to the connector 43-2.

[0338] Thus, antenna 41-2 is connected to signal amplifiers 3-3 and 3-4 via power combiner 15-2. Antenna 41-2 radiates radio waves based on a signal obtained by combining amplified high-frequency signals from signal amplifiers 3-3 and 3-4. Connector 43-2 is a coaxial connector connectable to power combiner 15-2.

[0339] like Fig. 22 As shown, the waveguides 42-1 and 42-2 guide the radio waves radiated from the antennas 41-1 and 41-2 into the chamber 10a, respectively. Fig.24 , Fig.25 and Fig. 27 As shown, the waveguides 42 - 1 and 42 - 2 have a rectangular parallelepiped shape extending in the up-down direction of the housing 10 .

[0340] like Fig.25 As shown, the first ends (specifically, the lower ends) of the waveguides 42-1 and 42-2 are disposed in the storage space 11f. Fig.26 As shown, antennas 41-1 and 41-2 are disposed inside the waveguides 42-1 and 42-2 near their first ends, respectively. Connectors 43-1 and 43-2 are disposed outside the waveguides 42-1 and 42-2 near their first ends, respectively. Antennas 41-1 and 41-2 are connected to connectors 43-1 and 43-2, respectively.

[0341] like Fig.25 As shown, openings 4a-1 and 4a-2 are formed on the side surfaces of the second ends (specifically, the upper ends) of the waveguides 42-1 and 42-2, respectively. The opening 4a-1 of the waveguide 42-1 is arranged on the left wall surface 11a of the main body 11, and the chamber 10a is connected to the waveguide 42-1. Thus, the radio waves radiated from the antenna 41-1 are radiated into the chamber 10a via the waveguide 42-1 and the opening 4a-1.

[0342] The opening 4a-2 is provided on the right wall surface 11b of the main body 11, and connects the chamber 10a with the waveguide 42-2. Thus, the radio waves radiated from the antenna 41-2 are radiated into the chamber 10a via the waveguide 42-2 and the opening 4a-2.

[0343] like Fig. 22As shown, the plurality of measuring units 5 output temperature measurement values ​​and a plurality of reflected wave power measurement values ​​indicating the temperatures of the plurality of signal amplifiers 3. That is, the measuring units 5-1 to 5-4 output temperature measurement values ​​indicating the temperatures of the signal amplifiers 3-1 to 3-4, respectively.

[0344] The measuring units 5-1 and 5-2 output reflected wave power measurement values ​​indicating the power of the reflected wave flowing backward through the radio wave radiating unit 4-1. The measuring units 5-3 and 5-4 output reflected wave power measurement values ​​indicating the power of the reflected wave flowing backward through the radio wave radiating unit 4-2.

[0345] More specifically, the measuring unit 5-1 includes a temperature measuring unit 51-1 and a power measuring unit 52-1. The measuring unit 5-2 includes a temperature measuring unit 51-2 and a power measuring unit 52-2. The measuring unit 5-3 includes a temperature measuring unit 51-3 and a power measuring unit 52-3. The measuring unit 5-4 includes a temperature measuring unit 51-4 and a power measuring unit 52-4.

[0346] The temperature measuring units 51-1 to 51-4 include temperature sensors respectively arranged near the signal amplifiers 3-1 to 3-4. Therefore, the temperature measuring units 51-1 to 51-4 respectively measure the temperatures of the signal amplifiers 3-1 to 3-4. The temperature measuring units 51-1 to 51-4 respectively output temperature measurement values ​​indicating the temperatures of the signal amplifiers 3-1 to 3-4 to the control unit 6B.

[0347] The power measuring unit 52-1 is arranged between the signal amplifier 3-1 and the power combiner 15-1, and the power measuring unit 52-2 is arranged between the signal amplifier 3-2 and the power combiner 15-1. The power measuring units 52-1 and 52-2 measure the power of the amplified high-frequency signals from the signal amplifiers 3-1 and 3-2, respectively. The amplified high-frequency signals from the signal amplifiers 3-1 and 3-2 are signals that form the basis of the radio waves (traveling waves) radiated from the radio wave radiating unit 4-1 into the chamber 10a.

[0348] The total value of the power measured by the power measuring units 52-1 and 52-2 corresponds to the power of the traveling wave radiated from the radio wave radiating unit 4-1. That is, in the measuring units 5-1 and 5-2, the power measuring units 52-1 and 52-2 respectively output the traveling wave power measurement values ​​representing the power of the traveling wave radiated from the radio wave radiating unit 4-1 to the control unit 6B.

[0349] The power measuring units 52-1 and 52-2 measure the power of the reflected wave flowing backward through the radio wave radiating unit 4-1. A power combiner 15-1 is arranged between the radio wave radiating unit 4-1 and the power measuring units 52-1 and 52-2, so that the reflected wave power measurement values ​​measured by the power measuring units 52-1 and 52-2 are half of the actual power of the reflected wave flowing backward through the radio wave radiating unit 4-1.

[0350] Therefore, the sum of the reflected wave power measurement values ​​measured by the power measuring units 52-1 and 52-2 corresponds to the power of the reflected wave flowing backward through the radio wave radiating unit 4-1. That is, in the measuring units 5-1 and 5-2, the power measuring units 52-1 and 52-2 output the reflected wave power measurement values ​​indicating the power of the reflected wave flowing backward through the radio wave radiating unit 4-1 to the control unit 6B.

[0351] The power measuring unit 52-3 is arranged between the signal amplifier 3-3 and the power combiner 15-2, and the power measuring unit 52-4 is arranged between the signal amplifier 3-4 and the power combiner 15-2. The power measuring units 52-3 and 52-4 measure the power of the amplified high-frequency signals from the signal amplifiers 3-3 and 3-4, respectively. The amplified high-frequency signals from the signal amplifiers 3-3 and 3-4 are signals that form the basis of the radio waves (traveling waves) radiated from the radio wave radiating unit 4-1 into the chamber 10a.

[0352] The total value of the power measured by the power measuring units 52-3 and 52-4 corresponds to the power of the traveling wave radiated from the radio wave radiating unit 4-2. That is, in the measuring units 5-3 and 5-4, the power measuring units 52-3 and 52-4 respectively output the traveling wave power measurement values ​​representing the power of the traveling wave radiated from the radio wave radiating unit 4-2 to the control unit 6B.

[0353] The power measuring units 52-3 and 52-4 measure the power of the reflected wave flowing back through the radio wave radiating unit 4-2. A power combiner 15-2 is arranged between the radio wave radiating unit 4-2 and the power measuring units 52-3 and 52-4, so the reflected wave power measurement values ​​measured by the power measuring units 52-3 and 52-4 are respectively half of the actual power of the reflected wave flowing back through the radio wave radiating unit 4-2.

[0354] Therefore, the sum of the reflected wave power measurement values ​​measured by the power measuring units 52-3 and 52-4 corresponds to the power of the reflected wave flowing backward through the radio wave radiating unit 4-2. That is, in the measuring units 5-3 and 5-4, the power measuring units 52-3 and 52-4 output the reflected wave power measurement value indicating the power of the reflected wave flowing backward through the radio wave radiating unit 4-3 to the control unit 6B.

[0355] The control unit 6B controls the signal generation unit 2 and the signal amplifiers 3 - 1 to 3 - 4 to cause the radio wave radiators 4 - 1 and 4 - 2 to radiate a plurality of radio waves into the chamber 10 a .

[0356] As in Embodiments 1 and 2, the control unit 6B selectively executes normal operation and protection operation. The protection operation includes temperature reference protection operation and power reference protection operation. Fig. 9 , Fig.10 , Fig.13 as well as Fig.14The actions shown in the flow chart.

[0357] In this embodiment, two signal amplifiers 3 correspond to one radio wave radiating unit 4. That is, the signal amplifiers 3-1 and 3-2 correspond to the radio wave radiating unit 4-1, and the signal amplifiers 3-3 and 3-4 correspond to the radio wave radiating unit 4-2. In normal operation and protection operation, the control conditions of the plurality of signal amplifiers 3 corresponding to one radio wave radiating unit 4 are the same. That is, the plurality of signal amplifiers 3 corresponding to one radio wave radiating unit 4 are regarded as one signal amplifier 3.

[0358] The power reference protection operation of the control unit 6B is briefly described. Fig. 9 As shown, the control unit 6B first performs a normal operation (step S11).

[0359] The normal operation includes setting the power target values ​​P1 and P2 of the plurality of radio waves radiated from the radio wave radiators 4-1 and 4-2 to the normal target values ​​Pf1 and Pf2 of the radio wave radiators 4-1 and 4-2, respectively. As an example, the normal target values ​​Pf1 and Pf2 are 250W and 200W, respectively.

[0360] The control unit 6B determines whether at least one of the reflected wave power measurement values ​​Prd1 and Prd2 measured by the measurement units 5-1 to 5-4 during the execution of the normal operation is greater than or equal to the protection power threshold value Pth (step S12). The reflected wave power measurement value Prd1 is the sum of the values ​​measured by the measurement units 5-1 and 5-2, and the reflected wave power measurement value Prd2 is the sum of the values ​​measured by the measurement units 5-3 and 5-4.

[0361] For example, the reflected wave power measurement values ​​Prd1 and Prd2 are 100 W and 80 W, respectively. When the protection power threshold value Pth is 100 W, the control unit 6B determines that the reflected wave power measurement value Prd1 is greater than the protection power threshold value Pth ("Yes" in step S12). Therefore, the control unit 6B switches the operation of the radio wave radiating device 1B from the normal operation to the protection operation (power reference protection operation) (step S13).

[0362] like Fig. 9 As shown, the power reference protection operation includes setting the power target values ​​of the plurality of radio waves radiated from the radio wave radiators 4-1 and 4-2 to the protection target values ​​Pfn1 and Pfn2 of the radio wave radiators 4-1 and 4-2, respectively (step S21). The protection target values ​​Pfn1 and Pfn2 are determined by the above-mentioned formula (1).

[0363] When the reflected power measurement values ​​Prd1 and Prd2 are 100 W and 80 W respectively, the radio wave radiator 4 corresponding to the largest reflected power measurement value among the plurality of radio wave radiators 4 is the radio wave radiator 4-1. Therefore, the protection target value Pfn1 of the radio wave radiator 4-1 is determined based on the reflected power measurement value Prd1 of the radio wave radiator 4-1.

[0364] For example, the target value Prpt of the reflected wave power in the protection action is 80 W, and the traveling wave power measurement value Pfd1 of the radio wave radiating unit 4-1 is equal to the normal target value Pf1. In this case, the protection target value Pfn3 of the radio wave radiating unit 4-3 is 200 (=80*(250 / 100)*(250 / 250)).

[0365] As described above, the normal target values ​​Pf1 and Pf2 are respectively 250 W and 200 W. Therefore, the protection target value Pfn2 of the radio wave radiating unit 4-2 is 160 (=80*(250 / 100)*(200 / 250)).

[0366] As described above, the protection target value Pfn1 is 200 W, and the protection target value Pfn2 is 160 W. The ratio of the protection target values ​​Pfn1 and Pfn2 (for example, 200:160=5:4) is equal to the ratio of the normal target values ​​Pf1 and Pf2 (for example, 250:200=5:4).

[0367] like Fig.10 As shown, the protection operation includes determining whether the reflection power ratio of each of the radio wave radiating units 4-1 and 4-2 is lower than the end threshold Rth (step S22). If the determination result of step S22 is "yes", the control unit 6B switches the operation of the radio wave radiating device 1B from the protection operation to the normal operation.

[0368] Thus, when it is determined during the execution of the normal operation that at least one of the reflected wave power measurement values ​​Prd1 and Prd2 is equal to or greater than the protection power threshold value Pth, the control unit 6B switches the operation of the radio wave radiating device 1 from the normal operation to the protection operation.

[0369] The control unit 6B determines that it is necessary to protect the signal amplifier 3 corresponding to the reflected wave power measurement value above the protection power threshold value Pth. The protection target value is smaller than the normal target value in both or one of the radio wave radiating units 4 as the protection target corresponding to the signal amplifier 3 to be protected and the radio wave radiating units 4 other than the radio wave radiating units 4 as the protection target among the plurality of radio wave radiating units 4 (4-1, 4-2).

[0370] The protection target values ​​of the plurality of radio wave radiating units are set so that the power consumption distribution in the chamber 10a when the protection action is executed is closer to the power consumption distribution in the chamber 10a when the normal action is executed than when only the power target value of the radio wave radiating unit 4 as the protection object is set as the protection target value. Therefore, the stability of the processing of the irradiated object 20 can be improved while protecting the signal amplifier 3.

[0371] The temperature reference protection operation of the control unit 6B is briefly described. Fig.13 As shown, the control unit 6B first performs a normal operation (step S31). The normal operation includes: setting the power target values ​​P1 and P2 of the multiple radio waves radiated from the radio wave radiating units 4-1 and 4-2 to the normal target values ​​Pf1 and Pf2 of the radio wave radiating units 4-1 and 4-2, respectively. As an example, the normal target values ​​Pf1 and Pf2 are 250W and 200W, respectively.

[0372] During the normal operation, the control unit 6B determines whether at least one of the temperature measurement values ​​T1 to T4 is equal to or greater than the protection temperature threshold value Tth1 (step S32 ). If the determination result of step S32 is “NO”, the control unit 6B repeats the process of step S32 .

[0373] When the determination result of step S32 becomes "YES", the control unit 6B switches the operation of the radio wave radiating device 1B from the normal operation to the protection operation (temperature reference protection operation) (step S33).

[0374] like Fig.14 As shown, the protection action (temperature reference protection action) includes: setting the power target values ​​P1 and P2 of the multiple radio waves radiated from the radio wave radiating units 4-1 and 4-2 to the protection target values ​​Pfn1 and Pfn2 of the radio wave radiating units 4-1 and 4-2 respectively (step S41). The protection target values ​​Pfn1 and Pfn2 are determined by the above formula (2).

[0375] Normally, the target values ​​Pf1 and Pf2 are 250 W and 200 W. Therefore, when the operation of the radio wave radiating device 1B is switched from the normal operation to the protection operation (temperature reference protection operation), the power target values ​​P1 and P2 are 250 W and 200 W, respectively.

[0376] For example, the predetermined ratio d is set to 0.1. In this case, the protection target value Pfn1 of the radio wave radiator 4-1 is 225 (=250×(1-0.1)). The protection target value Pfn2 of the radio wave radiator 4-2 is 180 (=200×(1-0.1)).

[0377] As described above, the protection target value Pfn1 is 225 W, and the protection target value Pfn2 is 180 W. Furthermore, the ratio of the protection target values ​​Pfn1 and Pfn2 (for example, 225:180=5:4) is equal to the ratio of the normal target values ​​Pf1 and Pf2 (for example, 250:200).

[0378] like Fig.14 As shown, during the temperature reference protection operation, the control unit 6B determines whether all the temperature measurement values ​​T1 to T4 are lower than the previous time (step S42). If the determination result of step S42 is "No", the control unit 6B repeats the process of step S42.

[0379] If the determination result of step S42 is "Yes", in step S43, the control unit 6B determines whether the time change of the temperature measurement values ​​T1 to T4 is within a predetermined range within a predetermined time.

[0380] If the determination result of step S43 is "No", the control unit 6B repeats the process of step S43. If the determination result of step S43 is "Yes", the control unit 6B advances the process to step S44. In step S44, the control unit 6B determines whether at least one of the temperature measurement values ​​T1 to T4 is equal to or greater than the temperature target value Tth2.

[0381] If the result of determination in step S44 is "Yes", the control unit 6B returns the process to step S41 and sets the protection target values ​​Pfn1 and Pfn2 again. The power target values ​​P1 and P2 are 225W and 180W, respectively.

[0382] In this case, the protection target value Pfn1 is 203 (=225×(1-0.1)). The protection target value Pfn2 is 162 (=180×(1-0.1)).

[0383] Thus, the protection action (temperature reference protection action) includes gradually reducing the protection target values ​​Pfn1 to Pfn4 of each of the plurality of radio wave radiating units 4 (4-1 to 4-4) until all of the temperature measurement values ​​T1 to T4 are lower than the temperature target value Tth2.

[0384] The control unit 6B determines whether at least one of the temperature measurement values ​​T1 to T4 is greater than the temperature target value Tth2 (step S44). If the determination result of step S44 is "No", in other words, if all of the temperature measurement values ​​T1 to T4 are lower than the temperature target value Tth2, the control unit 6B advances the process to step S45.

[0385] In step S45, the control unit 6B determines whether all the temperature measurement values ​​T1 to T4 are lower than the recovery temperature threshold value Tth3. If the determination result of step S45 is "yes", the control unit 6B returns the process to step S31 and switches the operation of the radio wave radiation device 1B from the protection operation to the normal operation. If the determination result of step S45 is "no", the control unit 6 returns the process to step S44.

[0386] Thus, when it is determined that at least one of the temperature measurement values ​​T1 to T4 is equal to or higher than the protection temperature threshold value Tth1 during the execution of the normal operation, the control unit 6B switches the operation of the radio wave radiating device 1B from the normal operation to the protection operation.

[0387] The control unit 6B determines that it is necessary to protect the signal amplifier 3 corresponding to the temperature measurement value above the protection temperature threshold value Tth1. The protection target value is smaller than the normal target value in both or one of the radio wave radiating unit 4 as the protection target corresponding to the signal amplifier 3 to be protected and the radio wave radiating unit 4 other than the radio wave radiating unit 4 as the protection target among the multiple radio wave radiating units 4 (4-1, 4-2).

[0388] The protection target values ​​of the plurality of radio wave radiating units 4 are set so that the power consumption distribution in the chamber 10a when the protection action is executed is closer to the power consumption distribution in the chamber 10a when the normal action is executed than when only the power target value of the radio wave radiating unit 4 to be protected is set as the protection target value. Therefore, the stability of the processing of the irradiated object 20 can be improved while protecting the signal amplifier 3.

[0389] In the radio wave radiating device 1 of the first embodiment, a plurality of radio waves are outputted into the chamber 10a using one signal generating unit 2. In contrast, in the radio wave radiating device 1B of the present embodiment, a plurality of radio waves are outputted into the chamber 10a using signal generating units 2-1 and 2-2.

[0390] Therefore, the radio wave radiating device 1B can radiate multiple radio waves of different frequencies into the chamber 10a. As a result, the radio wave radiating device 1B has more achievable power consumption distribution patterns than the radio wave radiating device 1. Therefore, the radio wave radiating device 1B can perform more types of treatments on the irradiated object 20 than the radio wave radiating device 1.

[0391] In addition, the radio wave radiating device 1 of the first embodiment radiates the amplified high-frequency signal from one signal amplifier 3 from the radio wave radiating unit 4 into the chamber 10a. In contrast, the radio wave radiating device 1B of the present embodiment synthesizes the amplified high-frequency signals from a plurality of signal amplifiers 3 and radiates the synthesized amplified high-frequency signal from one radio wave radiating unit 4 into the chamber 10a.

[0392] Therefore, the radio wave radiating device 1B has a wider range of target values ​​of radio wave power than the radio wave radiating device 1. Therefore, the radio wave radiating device 1B can perform more types of processing on the irradiation object 20 than the radio wave radiating device 1.

[0393] [1.3.2 Effects, etc.]

[0394] The radio wave radiating device 1B includes a chamber 10a, a plurality of signal generating units 2 (2-1, 2-2), a plurality of signal amplifying units 3 (3-1 to 3-4), a plurality of radio wave radiating units 4 (4-1, 4-2), a plurality of measuring units 5 (5-1 to 5-4), and a control unit 6B.

[0395] The chamber 10a accommodates the irradiation object 20. The plurality of signal generating units 2 generate a plurality of high-frequency signals. The plurality of signal amplifying units 3 amplify the plurality of high-frequency signals and output a plurality of amplified high-frequency signals. The plurality of radio wave radiating units 4 radiate a plurality of radio waves into the chamber 10a based on the plurality of amplified high-frequency signals. The plurality of measuring units 5 output both or one of the temperature measurement values ​​(T1 to T4) indicating the temperature of the plurality of signal amplifying units 3 and the reflected wave power measurement values ​​(Prd1, Prd2) indicating the power of the reflected waves flowing back through the plurality of radio wave radiating units 4. The control unit 6B controls the plurality of signal generating units 2 and the plurality of signal amplifying units 3.

[0396] When it is determined that at least one of the plurality of signal amplifiers 3 needs to be protected based on both or one of the temperature measurement value and the reflected wave power measurement value during the execution of the normal operation, the control unit 6B switches the operation of the radio wave radiating device 1 from the normal operation to the protection operation.

[0397] The normal operation includes setting the power target values ​​P1 and P2 of the multiple radio waves to the normal target values ​​Pf1 and Pf2 of the radio wave radiators 4-1 and 4-2, respectively. The protection operation includes setting the power target values ​​P1 and P2 of the multiple radio waves to the protection target values ​​Pfn1 and Pfn2 of the radio wave radiators 4-1 and 4-2, respectively.

[0398] The protection target value is smaller than the normal target value in both or one of the protection target radio wave radiating section 4 corresponding to the signal amplifier 3 requiring protection and the radio wave radiating section 4 other than the protection target radio wave radiating section 4 among the plurality of radio wave radiating sections 4 .

[0399] The protection target values ​​of the plurality of radio wave radiating units 4 are set so that the power consumption distribution in the chamber 10a is closer to the power consumption distribution in the chamber 10a during the normal operation than when only the power target value of the radio wave radiating unit 4 to be protected is set as the protection target value. This structure can improve the stability of the processing of the irradiated object 20 while protecting the signal amplifier 3.

[0400] In the radio wave radiating device 1B, the control unit executes a temperature reference priority protection operation as a protection operation.

[0401] The temperature-based priority protection operation includes lowering the protection target value of each of the plurality of radio wave radiating units, or stopping the radiation of the plurality of radio waves from the plurality of radio wave radiating units, compared with the temperature-based priority protection operation.

[0402] When it is determined during the execution of normal operation, temperature reference protection operation or power reference protection operation that at least one of the temperature measurement values ​​is above a priority protection temperature threshold higher than the protection temperature threshold, the control unit switches the operation of the radio wave radiating device to a temperature reference priority protection operation.

[0403] In the radio wave radiating device 1B, the control unit executes a power reference priority protection operation as a protection operation.

[0404] The power reference priority protection operation includes lowering the protection target value of each of the plurality of radio wave radiating units, or stopping the radiation of the plurality of radio waves from the plurality of radio wave radiating units, compared with the power reference protection operation.

[0405] When it is determined during the execution of normal action, temperature reference protection action or power reference protection action that at least one of the reflected wave power measurement values ​​is above a priority protection power threshold that is higher than the protection power threshold, the control unit switches the action of the radio wave radiation device to a power reference priority protection action.

[0406] [2. Modifications]

[0407] The embodiment of the present disclosure is not limited to the above-mentioned Embodiments 1 to 3. As long as the subject of the present disclosure can be achieved, Embodiments 1 to 3 can be variously modified according to design, etc. Modifications of Embodiments 1 to 3 will be described below.

[0408] The modified examples described below can be applied in combination as appropriate. In addition, unless otherwise specified, the modified examples described below can also be applied to any of Embodiments 1 to 3.

[0409] In the first to third embodiments, the power reference protection operation sets the power target values ​​of the plurality of radio waves radiated from the plurality of radio wave radiating units 4 to the protection target values ​​( Fig.10 The protection target value set in the power reference protection action is maintained until the power reference protection action is completed.

[0410] In a modified example, the protection target value set in the power reference protection operation can be changed appropriately. For example, when the power target value is changed from the normal target value to the protection target value at the start of the protection operation, the condition in the chamber 10a may deteriorate and the reflected wave power may increase.

[0411] As an example, in the power reference protection operation, the control unit may monitor the reflected wave power measurement value within a predetermined period after the protection target values ​​of the plurality of radio wave radiators 4 are set, and reset the protection target values ​​of the plurality of radio wave radiators 4 based on the result.

[0412] When at least one of the reflected wave power measurement values ​​increases from the previous time, the control unit may reset the protection target values ​​of the plurality of radio wave radiating units 4 .

[0413] In resetting the protection target value, the protection target value can be lowered compared to the last time. For example, in the above formula (1), by lowering the target value Prpt of the power of the reflected wave in the protection action, the protection target value can be lowered compared to the last time. Alternatively, the protection target values ​​of the multiple radio wave radiating units 4 can all be reduced by a certain proportion.

[0414] In another example, in the power reference protection operation, the control unit may periodically monitor the reflected wave power measurement value, and based on the result, reset the protection target values ​​of the plurality of radio wave radiating units 4. The control unit may reset the protection target values ​​of the plurality of radio wave radiating units 4 when at least one of the reflected wave power measurement values ​​increases from the previous time.

[0415] In a modified example, the control unit may execute a priority protection action that assumes a situation that should be dealt with in priority over a normal protection action (temperature reference protection action, power reference protection action). When the execution condition of the priority protection action is met during the execution of the normal protection action, the control unit switches the action of the radio wave radiating device from the normal protection action to the priority protection action.

[0416] The priority protection actions include temperature reference priority protection actions and power reference priority protection actions.

[0417] When at least one of the temperature measurement values ​​is determined to be greater than the priority protection temperature threshold Tth1, the control unit executes the temperature reference priority protection operation. For example, the priority protection temperature threshold may be set based on a temperature that is likely to have some influence on the signal amplifier 3.

[0418] The temperature reference priority protection operation includes setting the protection target values ​​of the plurality of radio wave radiators 4 lower than the temperature reference protection operation, or stopping the radiation of the plurality of radio waves from the plurality of radio wave radiators 4. This allows the signal amplifier 3 to be protected more quickly than in a normal protection operation.

[0419] When it is determined that at least one of the reflected wave power measurement values ​​is greater than the priority protection power threshold value Pth, the control unit executes the power reference priority protection action. For example, the priority protection power threshold value can be set based on the power of the reflected wave that is likely to have some influence on the signal amplifier 3.

[0420] The power reference priority protection operation includes setting the protection target values ​​of the multiple radio wave radiators 4 lower than the reflected wave power protection operation, or stopping the radiation of multiple radio waves from the multiple radio wave radiators 4. This can protect the signal amplifier 3 more quickly than the normal protection operation.

[0421] In a modified example, the control unit can execute the above two priority protection operations. In this case, even if the condition for executing the other priority protection operation is satisfied during the execution of one priority protection operation, the control unit can continue the priority protection operation being executed.

[0422] In the first embodiment, in order to supply power to the plurality of radio wave radiation units 4, the power distributor 2a distributes the output of the signal generator 2 to the plurality of paths. However, the present disclosure is not limited to this structure. For example, the radio wave radiation device may include two signal generators 2. That is, the outputs of the two signal generators 2 may be amplified by the signal amplifiers 3-1 and 3-2, and the plurality of amplified high-frequency signals may be supplied to the plurality of radio wave radiation units 4.

[0423] In a modified example, the radio wave radiating device may include one or more signal generating units 2 , two or more signal amplifying units 3 , two or more radio wave radiating units 4 , and one or more measuring units 5 .

[0424] In a modified example, the radio wave radiating unit 4-1 may not include the waveguide 42-1. That is, the radio wave radiating unit 4-1 may include the antenna 41-1 disposed in the chamber 10a. The same applies to the radio wave radiating units 4-2, 4-3, and 4-4.

[0425] In one modification, the positions of the openings 4a-1 to 4a-4 of the waveguides 42-1 to 42-4 are not particularly limited, and the positions of the openings 4a-1 to 4a-4 may be appropriately set so as to form a desired power consumption distribution in the chamber 10a.

[0426] In Embodiment 3, the measuring unit 5-1 may include a single power measuring unit disposed between the radio wave radiating unit 4-1 and the power combiner 15-1 instead of the power measuring units 52-1 and 52-2. The measuring unit 5-2 is also the same.

[0427] In one modification, the measuring unit 5 may output either a temperature measurement value indicating the temperature of the signal amplifier 3 or a reflected wave power measurement value indicating the power of the reflected wave in the radio wave radiator 4. In other words, the measuring unit 5 may include either a temperature measuring unit or a power measuring unit.

[0428] In a modified example, the control unit may determine whether to perform switching between the normal operation and the protection operation based on the reflected power ratio obtained from the reflected wave power measurement value.

[0429] As an example, the control unit may determine whether at least one of the reflected power ratios based on the reflected wave power measurement values ​​Prd1 and Prd2 measured by the measuring units 5-1 and 5-2, respectively, is above a predetermined threshold value during the execution of the normal operation. The control unit may determine whether it is necessary to protect at least one of the plurality of signal amplifiers 3 based on the determination result.

[0430] The control unit 6 may determine that it is necessary to protect the signal amplifier 3 corresponding to the reflection power ratio equal to or greater than a predetermined threshold.

[0431] In Embodiments 1 to 3, the protection power thresholds Pth for the plurality of radio wave radiators 4 are the same. However, for example, when the reflection power tolerances of the plurality of signal amplifiers 3 are different from each other, the protection power thresholds Pth for all the plurality of radio wave radiators 4 may be different.

[0432] In Embodiments 1 to 3, the protection temperature threshold Tth1 for each of the plurality of radio wave radiating units 4 is the same. However, for example, when the temperature tolerance of each of the plurality of signal amplifiers 3 is different from each other, the protection temperature threshold Tth1 for all of the plurality of radio wave radiating units 4 may be different. The temperature target value Tth2 and the recovery temperature threshold Tth3 are also the same.

[0433] In a variation, the protection action may be any one of a temperature reference protection action and a power reference protection action.

[0434] In a modified example, the radio wave radiating device may include an additional heating unit. The additional heating unit may be at least one of a radiant heating unit such as a sheath heater and a radio wave radiating unit such as a magnetron.

[0435] In Embodiments 1 to 3, the high-frequency signal generating devices 13, 13A, and 13B are arranged in the storage space 11f below the chamber 10a. However, the arrangement of the high-frequency signal generating devices 13, 13A, and 13B may be appropriately changed. The storage location of the high-frequency signal generating devices may be changed to, for example, above, to the side, or to the rear of the chamber 10a according to the design of the main body 11.

[0436] In Embodiment 3, the total power of the reflected waves flowing back through the plurality of radio wave radiating units 4 is compared with the protection power threshold value Pth. However, the object to be compared with the protection power threshold value Pth may be appropriately changed. For example, the power of the reflected waves measured by the power measuring unit may be compared with the protection power threshold value Pth.

[0437] Considering the situation that the reflected waves flowing back through the multiple radio wave radiating units 4 are not evenly distributed to each port due to the power output from the multiple signal amplifiers 3 and the manufacturing deviation of the power combiner 15, etc. Therefore, when at least one of the multiple reflected waves exceeds the threshold, the operation of the radio wave radiating device can be switched from the normal operation to the power reference protection operation.

[0438] In the third embodiment, the power combiner 15-1 combines the powers output from the signal amplifiers 3-1 and 3-2, and supplies the radio waves to the waveguide 42-1 via the connector 43-1 connected to the antenna 41-1.

[0439] In a modified example, the power combiner 15-1 may be formed by the waveguide 42-1. That is, the antennas connected to the first port 131B1 and the second port 132B1 may be arranged in the waveguide 42-1. In this case, the radio waves radiated from the first port 131B1 and the second port 132B1 may be combined in the waveguide 42-1, and the combined radio waves may be radiated from the opening 4a-1 into the chamber 10a.

[0440] Possibility of Industrial Application

[0441] The present disclosure can be applied to radio wave radiating devices such as microwave ovens.

[0442] Description of Reference Numerals

[0443] 1. A, 1B: radio wave radiating device; 2. 2-1, 2-2: signal generating unit; 3. 3-1, 3-2, 3-3, 3-4: signal amplifying unit; 4. 4-1, 4-2, 4-3, 4-4: radio wave radiating unit; 4a-1, 4a-2, 4a-3, 4a-4: opening; 5. 5-1, 5-2, 5-3, 5-4: measuring unit; 6. 6A, 6B: control unit; 7: storage unit; 8: input / output unit; 10. 130, 130A, 130B-1, 130B-2: shell; 10a: chamber; 11: main body; 11a: left wall; 11b: right wall; 11c: bottom wall; 11d: upper wall; 11e: inner wall; 11f: storage space; 12 : door; 14-1, 14-2, 14-3, 14-4: connecting cable; 15, 15-1, 15-2: power combiner; 20: irradiated object; 41-1, 41-2, 41-3, 41-4: antenna; 42-1, 42-2, 42-3, 42-4: waveguide; 43-1, 43-2, 43-3, 43-4: connector; 51-1, 51-2, 51-3, 51-4: temperature measuring unit; 52-1, 52-2, 52-3, 52-4: power measuring unit; 131, 131A, 131B-1, 131B-2, 132, 132A, 132B, 132B-1, 132B-2, 133A, 134A: port.

Claims

1. A radio wave radiating device, wherein: The radio wave radiating device comprises: a chamber capable of housing an irradiation object; One or more signal generating units, which generate one or more high-frequency signals; a plurality of signal amplifiers configured to amplify the one or more high-frequency signals and output a plurality of amplified high-frequency signals; a plurality of radio wave radiating units configured to radiate a plurality of radio waves into the chamber based on the plurality of amplified high-frequency signals; a plurality of measuring units configured to output both or one of temperature measurement values ​​indicating the temperatures of the plurality of signal amplifying units and reflected wave power measurement values ​​indicating the powers of reflected waves flowing back through the plurality of radio wave radiating units; and a control unit configured to control the one or more signal generating units and the plurality of signal amplifying units, The control unit is configured to switch the operation of the radio wave radiation device from the normal operation to the protection operation when it is determined that at least one of the plurality of signal amplifiers needs to be protected based on both or one of the temperature measurement value and the reflected wave power measurement value during the execution of the normal operation, The normal operation includes: setting the power target values ​​of the plurality of radio waves to the normal target values ​​of the plurality of radio wave radiating units, The protection operation includes: setting the power target values ​​of the plurality of radio waves as protection target values ​​of the respective plurality of radio wave radiating units; In one or both of the radio wave radiating unit as a protection object corresponding to the signal amplifying unit requiring the protection and the radio wave radiating unit other than the radio wave radiating unit as a protection object among the multiple radio wave radiating units, the protection target value is smaller than the normal target value, The protection target values ​​of the multiple radio wave radiating units are set so that the power consumption distribution in the chamber when the protection action is performed is closer to the power consumption distribution in the chamber when the normal action is performed than when only the power target value of the radio wave radiating unit to be protected is set as the protection target value.

2. The radio wave radiating device according to claim 1, wherein: A ratio of the protection target values ​​of the plurality of radio wave radiating units is equal to a ratio of the normal target values ​​of the plurality of radio wave radiating units.

3. The radio wave radiating device according to claim 2, wherein: The protection action includes: determining a protection target value of the radio wave radiating unit corresponding to the largest reflected wave power measurement value among the reflected wave power measurement values; The protection action includes: determining the protection target value of the radio wave radiating unit other than the radio wave radiating unit that is the protection object based on the ratio of the normal target value and the protection target value of the radio wave radiating unit corresponding to the maximum reflected wave power measurement value among the multiple radio wave radiating units.

4. The radio wave radiating device according to claim 2, wherein: The protection operation includes reducing the protection target values ​​of the plurality of radio wave radiating units in stages until all of the temperature measurement values ​​are lower than the temperature target values.

5. The radio wave radiating device according to any one of claims 1 to 4, wherein: The control unit is configured to determine that the signal amplifier corresponding to the temperature measurement value that is greater than or equal to the protection temperature threshold value among the temperature measurement values ​​needs protection, The protection target values ​​of the plurality of radio wave radiating units are set so that all of the temperature measurement values ​​during the execution of the protection operation are lower than the protection temperature threshold value.

6. The radio wave radiating device according to claim 5, wherein: The control unit is configured to switch the operation of the radio wave radiating device from the protection operation to the normal operation when it is determined that all the temperature measurement values ​​are lower than the recovery temperature threshold value during the execution of the protection operation. The recovery temperature threshold is lower than the protection temperature threshold.

7. The radio wave radiating device according to any one of claims 1 to 4, wherein: The control unit is configured to determine that protection is required for the signal amplifier corresponding to the reflected wave power measurement value that is greater than the protection power threshold value among the reflected wave power measurement values, The protection target values ​​of the plurality of radio wave radiating units are set so that all of the reflected wave power measurement values ​​during the execution of the protection operation are lower than the protection power threshold value.

8. The radio wave radiating device according to claim 7, wherein: The control unit is configured to switch the action of the radio wave radiating device from the protection action to the normal action when it is determined that all of the reflected wave power measurement values ​​are lower than the recovery power thresholds of the plurality of radio wave radiating units during the execution of the protection action, In the plurality of radio wave radiating units, the restoration power threshold is set so that the ratio of the protection power threshold to each traveling wave power measurement value, which is the power value of the plurality of radio waves, is smaller during the execution of the protection action than during the execution of the normal action.

9. The radio wave radiating device according to any one of claims 1 to 4, characterized in that: The control unit is configured to selectively execute a temperature reference protection action and a power reference protection action as the protection action. The control unit is configured to switch the operation of the radio wave radiating device from the normal operation to the temperature reference protection operation when it is determined that at least one of the temperature measurement values ​​is above a protection temperature threshold value during the execution of the normal operation. The control unit is configured to switch the operation of the radio wave radiating device from the normal operation to the power reference protection operation when it is determined during the execution of the normal operation that at least one of the reflected wave power measurement values ​​is greater than a protection power threshold, The temperature reference protection operation includes: determining the protection target values ​​of the plurality of radio wave radiating units in such a manner that all of the temperature measurement values ​​are lower than the protection temperature threshold value; The power reference protection operation includes: determining the protection target values ​​of the plurality of radio wave radiating units in such a manner that all of the reflected wave power measurement values ​​are lower than the protection power threshold value; The control unit is configured to switch the action of the radio wave radiation device from the normal action to the one with a higher priority between the temperature reference protection action and the power reference protection action when it is determined during the execution of the normal action that at least one of the temperature measurement values ​​is above the protection temperature threshold and at least one of the reflected wave power measurement values ​​is above the protection power threshold.

10. The radio wave radiating device according to claim 9, wherein: The control unit is configured to continue the temperature reference protection operation even if at least one of the reflected wave power measurement values ​​becomes equal to or greater than the protection power threshold value during the execution of the temperature reference protection operation. The control unit is configured to continue the power reference protection operation even if at least one of the temperature measurement values ​​becomes equal to or higher than the protection temperature threshold value during execution of the power reference protection operation.

11. The radio wave radiating device according to claim 10, wherein: The control unit is configured to execute a temperature reference priority protection action as the protection action, The temperature reference priority protection action includes: making the protection target value of each of the plurality of radio wave radiating units lower than that of the temperature reference protection action, or stopping the radiation of the plurality of radio waves from the plurality of radio wave radiating units. The control unit is configured to switch the action of the radio wave radiation device to the temperature reference priority protection action when it is determined during the execution of the normal action, the temperature reference protection action or the power reference protection action that at least one of the temperature measurement values ​​is above a priority protection temperature threshold that is higher than the protection temperature threshold.

12. The radio wave radiating device according to claim 10, wherein: The control unit is configured to execute a power reference priority protection action as the protection action, The power reference priority protection action includes: making the protection target value of each of the plurality of radio wave radiating units lower than that of the power reference protection action, or stopping the radiation of the plurality of radio waves from the plurality of radio wave radiating units. The control unit is configured to switch the action of the radio wave radiation device to the power reference priority protection action when it is determined during the execution of the normal action, the temperature reference protection action or the power reference protection action that at least one of the reflected wave power measurement values ​​is above a priority protection power threshold that is higher than the protection power threshold.

13. A radio wave radiating device, wherein: The radio wave radiating device comprises: a chamber capable of housing an irradiation object; One or more signal generating units, which generate one or more high-frequency signals; a plurality of signal amplifiers configured to amplify the one or more high-frequency signals and output a plurality of amplified high-frequency signals; a plurality of radio wave radiating units configured to radiate a plurality of radio waves into the chamber based on the plurality of amplified high-frequency signals; a plurality of measuring units configured to output both or one of temperature measurement values ​​indicating the temperatures of the plurality of signal amplifying units and reflected wave power measurement values ​​indicating the powers of the plurality of reflected waves flowing back through the plurality of radio wave radiating units; and a control unit configured to control the one or more signal generating units and the plurality of signal amplifying units, The control unit is configured to switch the operation of the radio wave radiation device from the normal operation to the protection operation when it is determined that at least one of the plurality of signal amplifiers needs to be protected based on both or one of the temperature measurement value and the reflected wave power measurement value during the execution of the normal operation, The normal operation includes: setting the power target values ​​of the plurality of radio waves to the normal target values ​​of the plurality of radio wave radiating devices, The protection operation includes: setting the power target values ​​of the plurality of radio waves as protection target values ​​of the respective plurality of radio wave radiating units; In the plurality of radio wave radiating units, the protection target value is smaller than the normal target value, A ratio of the protection target values ​​of the plurality of radio wave radiating units is equal to a ratio of the normal target values ​​of the plurality of radio wave radiating units.

Images