A laser gas waste gas recovery device

Abstract

The present invention discloses a device for recovering waste gas from laser gas, which relates to the technical field of filtration; in order to solve the problem of cleaning effect; specifically, it includes a filtration channel; at least one set of filtration mechanisms is arranged inside the filtration channel, and a self-driven lifting part is arranged on the outer wall of the filtration channel above the filtration mechanism; the self-driven lifting part includes a fixing frame, a filter element and a plurality of arc-shaped elastic pieces located downstream of the gas flow direction. The fixing frame is fixed to the inner wall of the filtration channel, and the periphery of the filter element is fixed to the inner wall of the fixing frame. By utilizing the flexibility of the filter element and the elasticity of the arc-shaped elastic pieces, the filter element can be in a "dense" state during the filtration state, ensuring the reliability of filtration. In the non-filtration state, the filter element can be opened by the limit of the arc-shaped elastic pieces, and then vibration cleaning is carried out, so that the impurities existing inside or in the folds of the filter element can be cleaned, increasing the cleaning effect.

Description

Technical Field

[0001] The present invention relates to the technical field of filtration, and particularly to a laser gas waste gas recovery device. Background Art

[0002] After the laser gas used by the lithography machine is exhausted, depending on the type of laser gas, it not only enriches neon, krypton, xenon, argon but also enriches some hydrogen. During the use of the lithography machine, almost no neon is lost, and recycling and re-separation become an option for the chip factory.

[0003] When separating and recycling laser gas, the distillation method is used for separation. However, during the lithography process of the lithography machine, the gas contains a large amount of particulate soot. Therefore, during recycling, the gas needs to be filtered first.

[0004] After retrieval, a patent with the Chinese patent publication number CN118649492B discloses a gas dust removal filter, including: a box body, inside which a horizontal plate is constructed. A plurality of pipes are arranged on the top of the horizontal plate. An air inlet pipe is installed on the box body. The ends of the pipes all penetrate through the horizontal plate and are communicated with the air inlet pipe; a cleaning port is opened at the bottom of the box body, and an outer cover for closing the cleaning port is provided; a round plate is arranged at the end of the pipe, and through holes are opened on it. A baffle and a mounting frame are respectively arranged on both sides of the through hole. The mounting frame is connected to the end of the pipe, and the baffle is connected to the mounting frame through a first tension spring.

[0005] The above patent has the following deficiencies: It uses a cleaning part to clean the filter screen. However, when the filter screen filters small gas particles, most use a multi-folded cotton filter element. This allows some particulate impurities to enter the interior or folds of the cotton filter element rather than just on the surface, making reliable cleaning impossible. Summary of the Invention

[0006] The purpose of the present invention is to solve the shortcomings existing in the prior art, and to propose a laser gas waste gas recovery device.

[0007] To achieve the above purpose, the present invention adopts the following technical solutions:

[0008] A laser gas waste gas recovery device includes a filtration channel;

[0009] At least one set of filtration mechanisms is arranged inside the filtration channel, and a self-driven lifting part is arranged on the outer wall of the filtration channel above the filtration mechanism;

[0010] The self-driving lifting part includes a fixing frame, a filter element, and a plurality of arc-shaped elastic pieces located downstream of the gas flow. The fixing frame is fixed to the inner wall of the filtering channel, the periphery of the filter element is fixed to the inner wall of the fixing frame, the bottoms of the plurality of arc-shaped elastic pieces are fixed to the inner side wall of the bottom of the fixing frame through fixing pieces, and the tops of the plurality of arc-shaped elastic pieces are fixed with the same sliding piece;

[0011] The self-driving lifting part includes a lifting rod and a self-driving lifting component for driving the lifting rod to move up and down. The lifting rod is slidably connected to the inner walls of the filtering channel and the fixing frame, and the bottom end of the lifting rod is fixed to the outer wall of the top of the sliding piece.

[0012] Preferably: The self-driving lifting component includes a sliding block, a winding drum, and a limiting shell. A rotating shaft is fixed to the inner wall of the winding drum, the rotating shaft is rotatably connected to the top of the filtering channel through a support plate, the limiting shell is fixed to the outer wall of the top of the filtering channel through bolts, the sliding block is slidably connected to the inner wall of the limiting shell, the lifting rod passes through the inner wall of the sliding block, and limiting convex platforms are fixed to the outer walls of the top and bottom of the sliding block where the lifting rod is located, and the distance between the two limiting convex platforms is greater than the thickness of the sliding block.

[0013] Further: A first spring is buckled on the top of the sliding block, the other end of the first spring is buckled on the lower surface of the top of the limiting shell, a cable is wound around the outer wall of the winding drum, and the other end of the cable is fixed to the top of the sliding block.

[0014] Based on the foregoing solution: A rotating rod is fixed to one side of the winding drum, waist-shaped holes are opened in the inner walls on both sides of the rotating rod, a limiting column is movably and limit-fitted in the inner wall of the waist-shaped hole, and one end of the limiting column is fixed with a telescopic component arranged on the outer wall of the top of the filtering channel.

[0015] A better solution in the foregoing solution is: The sliding block is of a hollow structure, and a plurality of elastic balls are accommodated in the hollow part of the sliding block.

[0016] As a further solution of the present invention: The telescopic component includes a piston, a piston rod, and a cylinder body. The cylinder body is fixed to the outer wall of the top of the filtering channel, the piston is slidably connected to the inner wall of the cylinder body, a communication hole for communicating the inner cavities of the filtering channel and the cylinder body is opened in the inner wall of the filtering channel, and two communication holes in the same group are respectively located on both sides of the filtering mechanism.

[0017] At the same time, a plurality of teeth are arranged on the outer wall of the rotating shaft, a slider is slidably connected to the inner wall of the support plate through a chute, a ratchet that cooperates with the teeth is slidably connected to the top of the slider, the ratchet is connected to the slider through a third spring, and one of the opposite sides of the teeth and the ratchet is beveled and the other side is flat.

[0018] As a preferred embodiment of the present invention: A second spring is buckled on the outer wall of the bottom of the slider, and the other side of the second spring is buckled on the inner wall of the support plate. The inner wall of the support plate is fixed with a telescopic device by bolts, and the telescopic end of the telescopic device is fixed to the outer wall of the bottom of the slider by bolts.

[0019] Meanwhile, the telescopic device is a pneumatic telescopic rod, and the rodless cavity of the telescopic device communicates with the inner cavity of the filter channel.

[0020] As a more optimal solution of the present invention: A cooling mechanism is provided at the intake side end of the filter channel. The cooling mechanism includes a heat exchange tube, a heat exchanger and a fluid pump. The heat exchange tube is installed inside the filter channel, and both sides of the heat exchange tube penetrate through the filter channel and are fixed to the heat exchanger. The fluid pump is connected between the heat exchange tube and the heat exchanger, and a heat exchange medium is provided in the heat exchange tube and the heat exchanger.

[0021] The beneficial effects of the present invention are as follows:

[0022] 1. In the present invention, by utilizing the flexibility of the filter element and the elasticity of the arc-shaped elastic piece, the filter element can be in a "dense" state during the filtering state, ensuring the reliability of filtering. In the non-filtering state, the filter element can be opened by the limitation of the arc-shaped elastic piece, and then vibrated and cleaned, so that the impurities existing inside or in the folds of the filter element can be cleaned, increasing the cleaning effect.

[0023] 2. In the present invention, while the vibration cleaning can be realized by the impact between the sliding block and the limiting boss, the sliding block is set as a hollow structure, so that during the impact between the sliding block and the limiting boss and the inertia of the movement of the sliding block, multiple elastic collisions can occur between the elastic balls and between the elastic balls and the inner wall of the sliding block, so that multiple tiny secondary vibrations are generated after one vibration, further increasing the cleaning effect.

[0024] 3. In the present invention, through the targeted setting of the telescopic assembly, on the one hand, it can make the filtering state and the reset state of the filtering mechanism related to the air pressure in the inner cavity of the filter channel, reducing the drive and simplifying the control. On the other hand, it can also adaptively adjust the size of the rebound energy storage according to the pressure difference on both sides of the filtering mechanism, so as to realize the function that the higher the degree of blockage, the greater the rebound cleaning energy.

[0025] 4. In the present invention, by setting the tooth and the ratchet, and combining with the pneumatic design of the telescopic device, on the one hand, it can make the rotating shaft quickly rebound only when the air pressure in the inner cavity of the filter channel dissipates, increasing the rebound speed and thus increasing the vibration cleaning effect. On the other hand, the combination and separation of the tooth and the ratchet rely on the automatic control of the air pressure in the inner cavity of the filter channel, saving the setting of power layout and control logic and reducing costs.

[0026] 5. In the present invention, by providing a cooling mechanism, the fluid pump can make the heat exchange medium in the heat exchange tube and the heat exchanger flow directionally, thereby taking away the heat of the laser gas and cooling it, so as to prevent the high-temperature laser gas from damaging the filtering mechanism and increase the service life. Description of the Drawings

[0027] Figure 1 It is a schematic diagram of the overall structure of a laser gas waste gas recovery device proposed by the present invention;

[0028] Figure 2 It is a schematic diagram of the structure of the filtering mechanism of a laser gas waste gas recovery device proposed by the present invention;

[0029] Figure 3 It is a schematic diagram of the structure of the self-driving lifting part of a laser gas waste gas recovery device proposed by the present invention;

[0030] Figure 4 It is a schematic diagram of the structure of the self-driving lifting assembly of a laser gas waste gas recovery device proposed by the present invention;

[0031] Figure 5 It is a schematic cross-sectional view of the telescopic assembly of a laser gas waste gas recovery device proposed by the present invention;

[0032] Figure 6 It is a schematic diagram of the reverse locking part of the rotating shaft of a laser gas waste gas recovery device proposed by the present invention;

[0033] Figure 7 It is a schematic cross-sectional view of the reverse locking part of the rotating shaft of a laser gas waste gas recovery device proposed by the present invention;

[0034] Figure 8 It is a schematic diagram of the structure of the cooling mechanism of a laser gas waste gas recovery device proposed by the present invention.

[0035] In the figure: 1, filtering channel; 2, self-driving lifting part; 3, filtering mechanism; 4, cooling mechanism; 5, lifting rod; 6, self-driving lifting assembly; 7, fixing frame; 8, filter element; 9, arc-shaped elastic piece; 10, fixing piece; 11, sliding piece; 12, limiting boss; 13, sliding block; 14, support plate; 15, rotating shaft; 16, winding drum; 17, cable; 18, spring one; 19, limiting shell; 20, limiting column; 21, rotating rod; 22, kidney-shaped hole; 23, telescopic assembly; 24, communication hole; 25, piston; 26, piston rod; 27, cylinder block; 28, tooth; 29, ratchet tooth; 30, slider; 31, chute; 32, spring two; 33, telescopic device; 34, spring three; 35, heat exchange tube; 36, heat exchanger; 37, fluid pump. Detailed Embodiments

[0036] The technical solution of the present invention will be further described in detail below in conjunction with specific embodiments.

[0037] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation of the present invention.

[0038] Embodiment 1: A laser gas waste gas recovery device, as Figures 1-8 shown, includes a filtration channel 1, at least one set of filtration mechanisms 3 is arranged inside the filtration channel 1, and a self-driven lifting part 2 is arranged on the outer wall above the filtration mechanism 3 of the filtration channel 1.

[0039] The self-driven lifting part 2 includes a fixing frame 7, a filter element 8, and a plurality of arc-shaped elastic pieces 9 located downstream of the gas flow direction. The fixing frame 7 is fixed to the inner wall of the filtration channel 1, the periphery of the filter element 8 is fixed to the inner wall of the fixing frame 7, the bottoms of the plurality of arc-shaped elastic pieces 9 are fixed to the inner side wall of the bottom of the fixing frame 7 through fixing pieces 10, and the tops of the plurality of arc-shaped elastic pieces 9 are fixed to the same sliding piece 11.

[0040] The self-driven lifting part 2 includes a lifting rod 5 and a self-driven lifting assembly 6 for driving the up and down movement of the lifting rod 5. The lifting rod 5 is slidably connected to the inner walls of the filtration channel 1 and the fixing frame 7, and the bottom end of the lifting rod 5 is fixed to the outer wall of the top of the sliding piece 11.

[0041] When the device is in use, gas enters from one side of the filtration channel 1 and is discharged after passing through the filter element 8. During the filtration process, the self-driven lifting assembly 6 will pull the lifting rod 5 upward, thereby pulling the sliding piece 11 upward. Due to the elastic action of the arc-shaped elastic pieces 9, the arc of the arc-shaped elastic pieces 9 is small and does not limit the filter element 8. After the filtration is completed, the self-driven lifting assembly 6 quickly moves the lifting rod 5 downward, thereby moving the sliding piece 11 downward, and the arc-shaped elastic pieces 9 are squeezed, increasing the arc, so that the middle part of the filter element 8 bulges toward the air inlet side, making the filter element 8 in an open state. At the same time, the self-driven lifting assembly 6 will also apply vibration to the lifting rod 5, thereby cleaning the opened filter element 8 through vibration.

[0042] In this device, by utilizing the flexibility of the filter element 8 and the elasticity of the arc-shaped elastic pieces 9, the filter element 8 can be in a "dense" state during the filtration state, ensuring the reliability of filtration. In the non-filtration state, the arc-shaped elastic pieces 9 can be used to limit the filter element 8 to open, and then vibration cleaning is performed, so that impurities existing inside or in the folds of the filter element 8 can be cleaned, increasing the cleaning effect.

[0043] To solve the vibration problem; as Figure 3As shown, the self-driving lifting component 6 includes a sliding block 13, a winding drum 16, and a limiting shell 19. A rotating shaft 15 is fixed to the inner wall of the winding drum 16. The rotating shaft 15 is rotatably connected to the top of the filtering channel 1 through a support plate 14. The limiting shell 19 is fixed to the outer wall of the top of the filtering channel 1 by bolts. The sliding block 13 is slidably connected to the inner wall of the limiting shell 19. The lifting rod 5 passes through the inner wall of the sliding block 13, and limiting bosses 12 are fixed to the outer walls of the top and bottom of the sliding block 13. The distance between the two limiting bosses 12 is greater than the thickness of the sliding block 13.

[0044] A first spring 18 is buckled to the top of the sliding block 13, and the other end of the first spring 18 is buckled to the lower surface of the top of the limiting shell 19. A cable 17 is wound around the outer wall of the winding drum 16, and the other end of the cable 17 is fixed to the top of the sliding block 13.

[0045] A rotating rod 21 is fixed to one side of the winding drum 16. Waist-shaped holes 22 are formed in the inner walls on both sides of the rotating rod 21. A limiting post 20 is movably and limit-fitted to the inner wall of the waist-shaped hole 22. One end of the limiting post 20 is fixed to a telescopic component 23 arranged on the outer wall of the top of the filtering channel 1.

[0046] When in the filtering state, the two telescopic components 23 are telescoped to different degrees, so that the rotating rod 21 drives the winding drum 16 to rotate, thereby pulling the sliding block 13 upward through the cable 17. The sliding block 13 contacts and is limited by the limiting boss 12 at the top, driving the lifting rod 5 to move upward. After the filtering is completed, the winding drum 16 loses drive, the filtering channel 1 is released, the sliding block 13 moves downward, the lifting rod 5 loses the limit, and thus the filter element 8 is pushed out and opened by the elastic force of the arc-shaped elastic sheet 9 itself. At the same time, the sliding block 13 will also move downward under the action of the elastic force of the first spring 18, thereby hitting the limiting boss 12 at the bottom, causing the lifting rod 5 to vibrate. The lifting rod 5 transmits the vibration to the arc-shaped elastic sheet 9 through the sliding sheet 11 and then to the filter element 8 for cleaning.

[0047] The sliding block 13 is of a hollow structure, and a plurality of elastic balls are accommodated in the hollow part of the sliding block 13.

[0048] In this device, while the vibration cleaning can be realized by the impact between the sliding block 13 and the limiting boss 12, the sliding block 13 is set to be of a hollow structure, so that during the impact between the sliding block 13 and the limiting boss 12 and the inertia of the movement of the sliding block 13, multiple elastic collisions can occur between the elastic balls and between the elastic balls and the inner wall of the sliding block 13, thereby generating multiple tiny secondary vibrations after one vibration, further increasing the cleaning effect.

[0049] To solve the self-driving problem; as Figure 5As shown, the telescopic assembly 23 includes a piston 25, a piston rod 26, and a cylinder block 27. The cylinder block 27 is fixed to the top outer wall of the filtration channel 1. The piston 25 is slidably connected to the inner wall of the cylinder block 27. Communication holes 24 for communicating the inner cavity of the filtration channel 1 and the inner cavity of the cylinder block 27 are formed in the inner wall of the filtration channel 1, and the two communication holes 24 in the same group are respectively located on both sides of the filtration mechanism 3.

[0050] When in the filtration state, there is air pressure in the inner cavities on both sides of the filtration mechanism 3 in the filtration channel 1 at this time. Thus, the air pressure is transmitted to the inner cavity of the cylinder block 27 through the communication holes 24. The piston 25 moves under the action of the air pressure. And due to pressure loss during the filtration of the filtration mechanism 3, the pressure on the air inlet side of the filtration mechanism 3 is greater than that on the air outlet side. As a result, the piston 25 on the air inlet side moves a larger amplitude, and the piston 25 on the air outlet side moves a smaller amplitude. This causes the piston rod 26 to rotate. Moreover, the greater the degree of blockage of the filtration mechanism 3, the greater the gas pressure difference between the two sides of the filtration mechanism 3, the greater the position difference between the two pistons 25 on both sides, and the greater the rotation angle of the piston rod 26 and the greater the rebound energy.

[0051] In this device, through the targeted setting of the telescopic assembly 23, on the one hand, it can make the filtration state and reset state of the filtration mechanism 3 related to the air pressure in the inner cavity of the filtration channel 1, reducing drive and simplifying control. On the other hand, it can also adaptively adjust the size of the rebound energy storage according to the pressure difference between the two sides of the filtration mechanism 3, thereby realizing the function that the higher the degree of blockage, the greater the rebound cleaning energy.

[0052] Since even when the power source of the laser gas drive stops, the pressure in the inner cavity of the filtration channel 1 dissipates slowly and continuously, this makes the rebound of the lifting rod 5 slow, resulting in small vibration energy and poor cleaning effect. Therefore, to solve the cleaning effect problem; as Figure 6 、 Figure 7 As shown, a plurality of teeth 28 are provided on the outer wall of the rotating shaft 15. A slider 30 is slidably connected to the inner wall of the support plate 14 through a chute 31. A ratchet 29 cooperating with the teeth 28 is slidably connected to the top of the slider 30. The ratchet 29 is connected to the slider 30 through a spring three 34.

[0053] One of the opposite sides of the teeth 28 and the ratchet 29 is a bevel surface, and the other side is a flat surface.

[0054] A spring two 32 is buckled on the bottom outer wall of the slider 30, and the other side of the spring two 32 is buckled on the inner wall of the support plate 14. A telescopic device 33 is fixed to the inner wall of the support plate 14 by bolts, and the telescopic end of the telescopic device 33 is fixed to the bottom outer wall of the slider 30 by bolts.

[0055] The telescopic device 33 is a pneumatic telescopic rod, and the rodless cavity of the telescopic device 33 is communicated with the inner cavity of the filtration channel 1.

[0056] When in the filtering state, the air pressure in the inner cavity of the filtering channel 1 is transmitted to the expander 33, so that the expander 33 drives the slider 30 to move upward against the pulling force of the second spring 32, causing the ratchet 29 to engage with the tooth 28. And when the rotating shaft 15 drives the reel 16 to rotate to wind the cable 17 at this time, the inclined surfaces of the tooth 28 and the ratchet 29 cooperate in this rotation direction, so that the ratchet 29 allows the tooth 28 to rotate. When the filtering ends and the machine stops, when the pressure in the inner cavity of the filtering channel 1 has not completely dissipated, the rotating shaft 15 has a turning force, so that the tooth 28 and the ratchet 29 are in plane contact and generate contact pressure and friction force. At this time, the rotating shaft 15 will not rotate in the reverse direction until the pressure in the inner cavity of the filtering channel 1 is completely dissipated. The second spring 32 overcomes the friction force and pulls the slider 30 downward, so that the tooth 28 and the ratchet 29 are separated, and the rotating shaft 15 quickly rebounds.

[0057] In this device, by setting the tooth 28 and the ratchet 29 and combining with the pneumatic design of the expander 33, on the one hand, it can make the rotating shaft 15 quickly rebound only when the air pressure in the inner cavity of the filtering channel 1 dissipates, increasing the rebound speed and thus enhancing the vibration cleaning effect. On the other hand, the engagement and separation of the tooth 28 and the ratchet 29 rely on the automatic control of the air pressure in the inner cavity of the filtering channel 1, saving the setting of power layout and control logic and reducing costs.

[0058] In the use of this embodiment, gas enters from one side of the filtering channel 1, is discharged after being filtered by the filter element 8. During the filtering process, the self-driven lifting assembly 6 will pull the lifting rod 5 upward, thereby pulling the sliding piece 11 upward. Due to the elastic effect of the arc-shaped elastic piece 9, the arc of the arc-shaped elastic piece 9 is small and does not limit the filter element 8. After the filtering is completed, the self-driven lifting assembly 6 quickly moves the lifting rod 5 downward, thereby moving the sliding piece 11 downward. The arc-shaped elastic piece 9 is squeezed and the arc increases, so that the middle part of the filter element 8 bulges toward the air inlet side, making the filter element 8 in an open state. At the same time, the self-driven lifting assembly 6 will also apply vibration to the lifting rod 5, thereby cleaning the open filter element 8 through vibration. And when in the filtering state, the two telescopic assemblies 23 telescopically move to different degrees, so that the rotating rod 21 drives the winding drum 16 to rotate, thereby pulling the sliding block 13 upward through the cable 17. The sliding block 13 contacts and is limited by the limiting boss 12 at the top, driving the lifting rod 5 upward. When the filtering is completed, the winding drum 16 loses drive, the filtering channel 1 is released, the sliding block 13 moves downward, and the lifting rod 5 loses the limit, so that the filter element 8 is pushed out and opened by the elastic force of the arc-shaped elastic piece 9 itself. At the same time, the sliding block 13 will also move downward under the elastic force of the first spring 18, thereby hitting the limiting boss 12 at the bottom, making the lifting rod 5 vibrate. The lifting rod 5 transmits the vibration to the arc-shaped elastic piece 9 through the sliding piece 11 and then to the filter element 8 for cleaning. At the same time, when in the filtering state, at this time, there is air pressure in the inner cavities on both sides of the filtering channel 1 of the filtering mechanism 3. Thus, the air pressure is transmitted to the inner cavity of the cylinder body 27 through the communication hole 24. The piston 25 moves under the action of the air pressure. And because there is a pressure loss during the filtering of the filtering mechanism 3, the air inlet side pressure of the filtering mechanism 3 is greater than the air outlet side pressure. Thus, the piston 25 on the air inlet side moves with a larger amplitude, and the piston 25 on the air outlet side moves with a smaller amplitude. Thus, the piston rod 26 rotates. And the greater the degree of blockage of the filtering mechanism 3, the greater the gas pressure difference between the two sides of the filtering mechanism 3, the greater the position difference between the two pistons 25, and the greater the rotation angle of the piston rod 26 and the greater the rebound energy. Finally, when in the filtering state, the air pressure in the inner cavity of the filtering channel 1 is transmitted to the expander 33, so that the expander 33 drives the slider 30 to move upward against the pulling force of the second spring 32, making the ratchet 29 engage with the tooth 28. And at this time, when the rotating shaft 15 drives the winding drum 16 to rotate and wind up the cable 17, the inclined plane of the tooth 28 and the ratchet 29 cooperate in this rotation direction, so that the ratchet 29 allows the tooth 28 to rotate. When the filtering is completed and the machine stops, when the pressure in the inner cavity of the filtering channel 1 has not completely dissipated, the rotating shaft 15 has a turning force, so that the tooth 28 contacts the plane of the ratchet 29 and generates contact pressure and friction force. At this time, the rotating shaft 15 will not rotate in the reverse direction until the pressure in the inner cavity of the filtering channel 1 is completely dissipated. The second spring 32 overcomes the friction force and pulls the slider 30 downward, so that the tooth 28 is separated from the ratchet 29, and the rotating shaft 15 quickly rebounds.

[0059] Embodiment 2: A laser gas waste gas recovery device, as Figure 1 , Figure 8 shown, to solve the problem of temperature reduction; the following improvements are made on the basis of Embodiment 1 in this embodiment: a cooling mechanism 4 is provided at the intake side end of the filtering channel 1, and the cooling mechanism 4 includes a heat exchange tube 35, a heat exchanger 36 and a fluid pump 37. The heat exchange tube 35 is installed inside the filtering channel 1, and both sides of the heat exchange tube 35 penetrate through the filtering channel 1 and are fixed to the heat exchanger 36. The fluid pump 37 is connected between the heat exchange tube 35 and the heat exchanger 36, and a heat exchange medium is provided in the heat exchange tube 35 and the heat exchanger 36.

[0060] In this embodiment, by providing the cooling mechanism 4, the fluid pump 37 can make the heat exchange medium in the heat exchange tube 35 and the heat exchanger 36 flow directionally, so as to take away the heat of the laser gas and cool it, thereby preventing the damage of the high-temperature laser gas to the filtering mechanism 3 and increasing the service life.

[0061] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.

Claims

1. A laser gas waste gas recovery device, comprising a filter channel (1), characterized in that: At least one set of filtering mechanisms (3) is arranged on the inner side of the filtering channel (1), and a self-driven lifting portion (2) is arranged on the outer wall of the filtering channel (1) above the filtering mechanism (3); The self-driven lifting part (2) comprises a fixing frame (7), a filter element (8) and a plurality of arc-shaped spring pieces (9) located downstream of the gas flow direction, the fixing frame (7) is fixed to the inner wall of the filter channel (1), the periphery of the filter element (8) is fixed to the inner wall of the fixing frame (7), the bottoms of the plurality of arc-shaped spring pieces (9) are fixed to the inner side wall of the bottom of the fixing frame (7) via a fixing sheet (10), and the tops of the plurality of arc-shaped spring pieces (9) are fixed with a same sliding sheet (11); The self-driven lifting part (2) comprises a lifting rod (5) and a self-driven lifting assembly (6) for driving the lifting rod (5) to move up and down, the lifting rod (5) being slidably connected to the filter channel (1) and the inner wall of the fixing frame (7), and the bottom end of the lifting rod (5) is fixed to the top outer wall of the sliding sheet (11); The self-driven lifting assembly (6) comprises a sliding block (13), a reel (16) and a limiting shell (19); a rotating shaft (15) is fixed to the inner wall of the reel (16); the rotating shaft (15) is rotatably connected to the top of the filter channel (1) through a support plate (14); the limiting shell (19) is fixed to the top outer wall of the filter channel (1) through bolts; the sliding block (13) is slidably connected to the inner wall of the limiting shell (19); the lifting rod (5) passes through the inner wall of the sliding block (13); and limiting bosses (12) are fixed to the outer walls of the top and bottom of the sliding block (13) where the lifting rod (5) is located; and the spacing between the two limiting bosses (12) is greater than the thickness of the sliding block (13); The top of the sliding block (13) is buckled with a spring 1 (18), the other end of the spring 1 (18) is buckled with the top lower surface of the limiting shell (19), the outer wall of the winding drum (16) is wound with a twisted rope (17), and the other end of the twisted rope (17) is fixed to the top of the sliding block (13); A rotating rod (21) is fixed to one side of the reel (16); waist-shaped holes (22) are provided on the inner walls of both sides of the rotating rod (21); the inner walls of the waist-shaped holes (22) are movably limited to cooperate with the limiting posts (20); and a telescopic component (23) arranged on the outer wall of the top of the filtering channel (1) is fixed to one end of the limiting post (20); The telescopic assembly (23) comprises a piston (25), a piston rod (26) and a cylinder body (27); the cylinder body (27) is fixed to the top outer wall of the filter channel (1); the piston (25) is slidably connected to the inner wall of the cylinder body (27); the inner wall of the filter channel (1) is provided with a connecting hole (24) for connecting the filter channel (1) and the inner cavity of the cylinder body (27); and the two connecting holes (24) in the same group are respectively located on two sides of the filter mechanism (3).

2. The laser gas waste gas recovery device according to claim 1, characterized in that: The sliding block (13) is a hollow structure, and a plurality of elastic balls are accommodated in the hollow portion of the sliding block (13).

3. The laser gas waste gas recovery device according to claim 1, characterized in that: The outer wall of the rotating shaft (15) is provided with a plurality of teeth (28); the inner wall of the support plate (14) is slidably connected to a slider (30) via a slide groove (31); a ratchet (29) cooperating with the teeth (28) is slidably connected to the top of the slider (30); the ratchet (29) is connected to the slider (30) via a spring three (34); one of the opposite sides of the teeth (28) and the ratchet (29) is an inclined surface, and the other side is a plane.

4. The laser gas waste gas recovery device according to claim 3, characterized in that: A second spring (32) is buckled on the bottom outer wall of the slider (30), the other side of the second spring (32) is buckled on the inner wall of the support plate (14), a telescopic device (33) is fixed to the inner wall of the support plate (14) by bolts, and the telescopic end of the telescopic device (33) is fixed to the bottom outer wall of the slider (30) by bolts.

5. The laser gas waste gas recovery device according to claim 4, characterized in that: The telescopic device (33) is a pneumatic telescopic rod, and the rodless cavity of the telescopic device (33) is connected to the inner cavity of the filtering channel (1).

6. The laser gas waste gas recovery device according to claim 1, characterized in that: A cooling mechanism (4) is provided at the air inlet side end of the filter channel (1), the cooling mechanism (4) comprising a heat exchange tube (35), a heat exchanger (36) and a fluid pump (37); the heat exchange tube (35) is installed on the inner side of the filter channel (1), and both sides of the heat exchange tube (35) penetrate the filter channel (1) and are fixed to the heat exchanger (36); the fluid pump (37) is connected between the heat exchange tube (35) and the heat exchanger (36); and heat exchange medium is provided in the heat exchange tube (35) and the heat exchanger (36).

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