A decomposable slot coating die head and coating equipment

Abstract

The present invention relates to the field of coating technology, and particularly to a decomposable slot coating die head and a coating device. The decomposable slot coating die head includes a cover plate, a first flow channel plate, and a support plate which are stacked from top to bottom; the cover plate, the first flow channel plate, and the support plate are detachably connected; a plurality of liquid supply pipes are arranged at the bottom of the first flow channel plate; a coating lip assembly is arranged below the support plate; a liquid inlet groove or a plurality of liquid inlet holes are arranged in the coating lip assembly; the liquid supply pipes are inserted into the liquid inlet groove or the liquid inlet holes; a first flow splitting pipeline is arranged on the top surface or the bottom surface of the first flow channel plate; a liquid inlet pipe is connected to the cover plate; and the liquid outlet ends of the first flow channel plate are communicated with the plurality of liquid supply pipes respectively. The slot coating die head of the present invention can be disassembled, which is convenient for cleaning the flow splitting pipeline, and has good uniformity of liquid feeding to the slot, smaller overall volume and weight, and stronger controllability.

Description

Technical Field

[0001] The present invention relates to the field of coating technology, and particularly relates to a decomposable slit coating die head and a coating device. Background Art

[0002] Slit coating equipment and technology are widely used in fields such as TFT lithography, flexible substrates of OLED (organic light-emitting diode) displays, color filter films of liquid crystal displays, and thin-film solar cells. Slit coating is to coat various liquid materials on a rigid and flat substrate, and then through processes such as drying and hardening, the materials are made into film layers. These film layers can be used to fabricate thin-film devices and components such as TFTs using lithography technology, can also be the substrates of flexible devices, or can be the functional layers of devices. This technology is one of the important manufacturing processes for components such as liquid crystal displays, OLED displays, and thin-film solar cells.

[0003] Taking the production of a TFT substrate as an example, in an atmospheric environment, liquid photoresist is injected into the die head of a slit coating equipment from the liquid inlet of the die head, passes through the liquid flow channel, and then is extruded from the slit of the die head and coated on the surface of a glass substrate. Then, the substrate is transferred to a heating station for heating to form a solid film of the photoresist.

[0004] Generally, a cavity is provided inside a slit coating die head to store liquid coating materials. The liquid coating materials are extruded onto the substrate through a slit, and the liquid materials are coated on the surface of the substrate through the relative movement between the die head and the substrate. The uniformity of the liquid discharge from the die head slit largely determines the coating uniformity in the length direction of the die head slit on the substrate, and will also determine the uniformity of the solid film finally formed on the surface of the glass substrate. The coating uniformity in the direction perpendicular to the slit length is determined by the relative scanning movement between the die head and the substrate, etc., and is relatively easy to control. Therefore, the control of the uniformity of the liquid discharge from the die head slit is of crucial importance. There are at least two key influencing factors for the uniform discharge of the liquid from the die head slit. One is the uniformity of the liquid supply to the slit, and the other is the uniformity of the slit width.

[0005] The current prior art has the following problems:

[0006] 1. Most of the liquid supply of the existing die heads adopts single-point feeding. In this way, to ensure uniform supply to all parts of the entire slit, a very large buffer cavity is required to store the liquid. If set like this, the volume and weight of the die head will become very large, thereby increasing the difficulty of controlling the movement of the large-weight die head. For the few die heads that adopt multi-point feeding, it is difficult to clean because most of the feeding channels are arranged inside the die head.

[0007] 2. The die head is usually made in two parts. When the two parts of the die head are combined, a gasket is added in the middle. The thickness of the gasket is used to control the width of the slit between the two parts of the die head, so as to control the amount of liquid discharged. To ensure the uniformity of the discharged material, the two walls of the slit must be kept parallel and a predetermined slit gap. Since the two parts of the die head are fixed by screws on three sides, and the fourth side, that is, the slit discharge end, has no fastening constraint, it is not easy to ensure the parallelism of the two walls of the slit and the predetermined slit gap due to reasons such as material deformation.

[0008] 3. To ensure that the two walls of the slit do not deform, the prior art usually uses special hard materials to make the above two parts of the die head, and the large-volume die head will further increase the manufacturing cost.

[0009] As the generation of the coated substrate increases, the width of the die head needs to be further widened, and the above problems will become more serious.

[0010] It can be seen that the prior art still needs to be improved. Summary of the Invention

[0011] In view of the deficiencies of the above prior art, the purpose of the present invention is to provide a decomposable slit coating die head and coating equipment, aiming to solve the technical problem that the multi-point feeding die head in the prior art is not easy to clean and aiming to improve the supply uniformity.

[0012] To achieve the above purpose, the present invention adopts the following technical solutions:

[0013] The first aspect of the present invention provides a decomposable slit coating die head, which includes a cover plate, a first flow channel plate and a support plate stacked from top to bottom; the cover plate, the first flow channel plate and the support plate are detachably connected; a plurality of liquid supply pipes are arranged at the bottom of the first flow channel plate; a coating lip assembly is arranged below the support plate; a liquid inlet groove or a plurality of liquid inlet holes are arranged in the coating lip assembly; the liquid supply pipes are inserted into the liquid inlet groove or the liquid inlet holes; a first shunt pipeline is arranged on the top surface or the bottom surface of the first flow channel plate, and the first shunt pipeline is arranged on the top surface or the bottom surface of the first flow channel plate in a grooved form; a liquid inlet pipe is connected to the cover plate; the liquid inlet pipe passes through the cover plate and is communicated with the liquid inlet end of the first flow channel plate; the liquid outlet ends of the first flow channel plate are respectively communicated with a plurality of liquid supply pipes.

[0014] For the decomposable slit coating die head, a first shunt pipeline is arranged on the top surface or the bottom surface of the first flow channel plate; the liquid inlet pipe passes through the cover plate and is communicated with the liquid inlet end of the first shunt pipeline; the liquid outlet ends of the first shunt pipeline are respectively communicated with a plurality of liquid supply pipes.

[0015] The decomposable slit coating die head, wherein a plurality of second shunt pipes are arranged on the bottom surface or the top surface of the first flow channel plate relative to the first shunt pipe; the plurality of liquid outlet ends of the first shunt pipe are respectively communicated with the liquid inlet ends of the plurality of second shunt pipes; the liquid outlet ends of the plurality of second shunt pipes are respectively communicated with a plurality of liquid supply pipes.

[0016] The decomposable slit coating die head, wherein the first shunt pipe and the second shunt pipe include a plurality of stages of two-way shunt pipes; the plurality of liquid outlet ends of the two-way shunt pipe at the upper stage are respectively connected with the liquid inlet ends of the plurality of two-way shunt pipes at the lower stage.

[0017] The decomposable slit coating die head, further comprising a first gasket and a second gasket; the first gasket is arranged between the cover plate and the first flow channel plate; the second gasket is arranged between the first flow channel plate and the support plate.

[0018] The decomposable slit coating die head, further comprising at least one second flow channel plate; the second flow channel plate is arranged between the first flow channel plate and the support plate.

[0019] The decomposable slit coating die head, further comprising at least one third gasket, and the third gasket is arranged at least at one of the positions between the cover plate and the first flow channel plate, between the first flow channel plate and the second flow channel plate, between two adjacent second flow channel plates, or between the second flow channel plate and the support plate.

[0020] The decomposable slit coating die head, wherein an installation cavity is arranged at the bottom of the cover plate, and the first flow channel plate is arranged in the installation cavity; the bottom surface of the cavity wall of the installation cavity is connected with the support plate.

[0021] The decomposable slit coating die head, wherein the lip assembly comprises a first lip and a second lip arranged vertically; the first lip and the second lip are detachably connected; the liquid inlet groove or the liquid inlet hole is arranged in the first lip; a fourth gasket is arranged vertically between the first lip and the second lip; the fourth gasket is used for forming a slit between the first lip and the second lip.

[0022] The decomposable slit coating die head, wherein a buffer cavity is further arranged in the lip assembly; the buffer cavity is arranged between the liquid inlet groove and the slit, or between the liquid inlet hole and the slit.

[0023] The decomposable slit coating die head, wherein an exhaust channel is arranged above the support plate; the air inlet end of the exhaust channel is communicated with the liquid inlet groove or the liquid inlet hole; an exhaust pipe is arranged on the support plate; the air inlet end of the exhaust pipe is communicated with the air outlet end of the exhaust channel.

[0024] The decomposable slit coating die head, wherein a spoiler is arranged in the liquid inlet groove.

[0025] The decomposable slot coating die head described above, wherein the cover plate is made of marble.

[0026] The decomposable slot coating die head described above, wherein the first flow channel plate is made of plastic, ceramic or metal.

[0027] The decomposable slot coating die head described above, wherein the hardness of the material of the first flow channel plate is less than the hardness of the materials of the cover plate and the support plate.

[0028] The decomposable slot coating die head described above, wherein the liquid surface contact angle of the materials of the first flow channel plate and the second flow channel plate is greater than 30°.

[0029] A second aspect of the present invention provides a coating device, including the decomposable slot coating die head described above.

[0030] Beneficial effects: The present invention provides a decomposable slot coating die head. The slot coating die head is configured such that the main body of the first shunt pipeline is disposed on the surface of the first flow channel plate, and then is enclosed by a detachable cover plate and a support plate. When cleaning is required, the first flow channel plate can be exposed by disassembly, thereby achieving the purpose of facilitating cleaning. In addition, the first shunt pipeline is arranged on the surface of the first flow channel plate in the form of grooves. Compared with arranging the shunt pipeline inside, it is not only convenient for cleaning, but also can effectively reduce the thickness required for manufacturing the first flow channel plate, reducing the volume and weight of the die head as a whole, making it easier to control and having higher precision during die head coating.

[0031] Furthermore, the decomposable slot coating die head of the present invention can be flexibly expanded by adding a second flow channel plate as needed, further improving the shunt effect without affecting cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a perspective view of the decomposable slot coating die head.

[0033] Figure 2 It is an exploded view of the decomposable slot coating die head Figure 1 .

[0034] Figure 3 It is a schematic diagram of the overall liquid flow channel in the coating die head Figure 1 .

[0035] Figure 4 It is an exploded view of the decomposable slot coating die head Figure 2 .

[0036] Figure 5 It is a cross-sectional schematic diagram of the decomposable slot coating die head Figure 1 .

[0037] Figure 6 Schematic cross-section of a decomposable slot coating die Figure 2 。

[0038] Figure 7 Schematic of the overall liquid flow channel in the coating die Figure 2 。

[0039] Figure 8 Explosion of the decomposable slot coating die Figure 3 。

[0040] Figure 9 Bottom view of the first flow channel plate Figure 1 。

[0041] Figure 10 Schematic of the overall liquid flow channel in the coating die Figure 3 。

[0042] Figure 11 Explosion of the decomposable slot coating die Figure 4 。

[0043] Figure 12 Bottom view of the first flow channel plate Figure 2 。

[0044] Figure 13 Schematic of the overall liquid flow channel in the coating die Figure 4 。

[0045] Figure 14 Explosion of the decomposable slot coating die Figure 5 。

[0046] Figure 15 Explosion of the decomposable slot coating die Figure 6 。

[0047] Figure 16 Schematic cross-section of a decomposable slot coating die Figure 3 。

[0048] Figure 17 Schematic cross-section of a decomposable slot coating die Figure 4 。

[0049] Explanation of main component symbols: 1 - Cover plate, 2 - First flow channel plate, 3 - Support plate, 4 - Liquid inlet pipe, 5 - Coating lip assembly, 51 - Liquid inlet groove, 6 - Liquid supply pipe, 21 - First shunt pipeline, 22 - Second shunt pipeline, 23 - Third shunt pipeline, 7 - First gasket, 8 - Second gasket, 9 - Second flow channel plate, 11 - Installation cavity, 52 - First coating lip, 53 - Second coating lip, 54 - Fourth gasket, 55 - Buffer cavity, 56 - Slot, 57 - Turbulence plate, 24 - Exhaust channel, 31 - Exhaust pipe. Detailed implementation manners

[0050] The present invention provides a decomposable slit coating die head and a coating device. To make the objectives, technical solutions and effects of the present invention clearer and more definite, the following further describes the present invention in detail with reference to the accompanying drawings and by way of examples. It should be understood that the specific examples described herein are only used to explain the present invention and are not used to limit the present invention.

[0051] In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", etc. indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, as well as a specific orientation structure and operation. Therefore, it should not be construed as a limitation to the present invention. In addition, "first" and "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Therefore, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, the meaning of "a plurality of" is more than two.

[0052] Please refer to Figures 1 - 6 , the first aspect of the present invention provides a decomposable slit coating die head, which includes a cover plate 1, a first flow channel plate 2 and a support plate 3 stacked from top to bottom; the cover plate 1, the first flow channel plate 2 and the support plate 3 are detachably connected; a plurality of liquid supply pipes 6 are arranged at the bottom of the first flow channel plate 2; a lip coating assembly 5 is arranged below the support plate 3; an inlet liquid groove 51 or a plurality of inlet liquid holes are arranged in the lip coating assembly 5; the liquid supply pipes 6 are inserted into the inlet liquid groove 51 or the inlet liquid holes; a first shunt pipeline 21 is arranged on the top surface or the bottom surface of the first flow channel plate 2; a liquid inlet pipe 4 is connected to the cover plate 1; the liquid inlet pipe 4 passes through the cover plate 1 and is communicated with the liquid inlet end of the first flow channel plate 2; the liquid outlet ends of the first flow channel plate 2 are respectively communicated with a plurality of liquid supply pipes 6.

[0053] When a plurality of inlet liquid holes are arranged in the lip coating assembly 5, the plurality of inlet liquid holes correspond to the plurality of liquid supply pipes 6 one by one.

[0054] Specifically, the first flow channel plate 2 is used to shunt the liquid, so as to evenly supply the liquid to the liquid outlet end at the bottom of the slit coating die head. The present invention adopts a decomposable structure, which can expose each flow channel or pipeline in the die head to a great extent during cleaning, thereby improving the cleaning efficiency and cleanliness.

[0055] Preferably, a first flow dividing pipeline 21 is provided on the top surface or the bottom surface of the first flow channel plate 2; a liquid inlet pipe 4 is connected to the cover plate 1; the liquid inlet pipe 4 penetrates through the cover plate 1 and communicates with the liquid inlet end of the first flow dividing pipeline 21; the liquid outlet ends of the first flow dividing pipeline 21 are respectively communicated with a plurality of liquid supply pipes 6.

[0056] The first flow dividing pipeline 21 is provided on the top surface or the bottom surface of the first flow channel plate 2 in a grooved form. Wherein, when the first flow dividing pipeline 21 is provided on the bottom surface of the first flow channel plate 2, a vertical hole is provided in the middle of the first flow channel plate 2 for communicating the liquid inlet end of the first flow dividing pipeline 21 and the liquid inlet pipe 4. After assembly, the first flow dividing pipeline 21 is covered by the cover plate 1 or the support plate 3 to form a pipeline for directional flow.

[0057] A plurality of fixing holes are respectively provided at the edges of the cover plate 1, the first flow channel plate 2 and the support plate 3 of the present invention for fixed connection by nuts and screws. When cleaning is required, the three are disassembled, and the first flow dividing pipeline 21 on the surface of the first flow channel plate 2 will be fully exposed, so that it is easy to clean. At the same time, since the first flow channel plate 2 is penetrated by the vertical hole, connecting the upper and lower parts of the first flow channel plate 2, there are no bent pipelines inside the first flow channel plate 2, making cleaning easier.

[0058] Please refer to Figures 7 - 12 Preferably, a plurality of second flow dividing pipelines 22 are provided on the bottom surface or the top surface of the first flow channel plate 2 opposite to the first flow dividing pipeline 21; the plurality of liquid outlet ends of the first flow dividing pipeline 21 are respectively communicated with the liquid inlet ends of the plurality of second flow dividing pipelines 22; the liquid outlet ends of the plurality of second flow dividing pipelines 22 are respectively communicated with a plurality of liquid supply pipes 6.

[0059] In this embodiment, the second flow dividing pipeline 22 is arranged opposite to the first flow dividing pipeline 21. When the first flow dividing pipeline 21 is on the top surface of the first flow channel plate 2, the second flow dividing pipeline 22 is located on the bottom surface of the first flow channel plate 2, so that they will not affect each other during the flow channel distribution.

[0060] Please refer to Figures 7 - 9 In this embodiment, the first flow dividing pipeline 21 is provided on the bottom surface of the first flow channel plate 2, and the second flow dividing pipeline 22 is provided on the top surface of the first flow channel plate 2; the liquid of the liquid inlet pipe 4 sequentially reaches the liquid inlet end of the first flow dividing pipeline 21 through the vertical hole penetrating through the cover plate 1 and the first flow channel plate 2. After being divided by the first flow dividing pipeline 21, it respectively reaches a plurality of second flow dividing pipelines 22 located above through a plurality of vertical holes, and after being divided by the second flow dividing pipelines 22, it reaches the lower liquid supply pipes 6 through the vertical pipes extending downward at the liquid outlet ends of the second flow dividing pipelines 22.

[0061] Please refer to Figures 10 - 12, in this embodiment, the first shunt pipeline 21 is arranged on the top surface of the first flow channel plate 2, and the second shunt pipeline 22 is arranged on the bottom surface of the first flow channel plate 2; the liquid in the liquid inlet pipe 4 reaches the liquid inlet end of the first shunt pipeline 21 through the vertical holes penetrating the cover plate 1. After being shunted by the first shunt pipeline 21, it then reaches a plurality of second shunt pipelines 22 located below through a plurality of vertical holes respectively. After being shunted by the second shunt pipelines 22 again, it enters the liquid supply pipe 6 at the liquid outlet end of the second shunt pipelines 22.

[0062] Preferably, the first shunt pipeline 21 and the second shunt pipeline 22 include multiple stages of two-way shunt pipelines; the two liquid outlet ends of the two-way shunt pipeline at the upper stage are respectively connected to the liquid inlet ends of two two-way shunt pipelines at the lower stage. Specifically, the two liquid outlet flow channels of the two-way shunt pipeline are symmetrically arranged on both sides of the liquid inlet end to ensure that the flow rates of the two branches are uniform.

[0063] In the multiple stages of two-way shunt pipelines, the orientations of the two-way shunt pipelines at each stage can be the same or opposite. For example, Figure 2 and Figure 3 in the embodiment of, the first shunt pipeline 21 is provided with four stages of two-way shunt pipelines, and the orientations of the two-way shunt pipelines at the lower stage are all opposite to that of the upper stage, so that the width of the first shunt pipeline 21 can be smaller. Correspondingly, the volume of the first flow channel plate 2 is also smaller, and the overall volume and weight of the die head can also be correspondingly smaller.

[0064] Figure 7 and Figure 10 in the embodiment of, the first shunt pipeline 21 is provided with three stages of two-way shunt pipelines, while the second shunt pipeline 22 is provided with two stages of two-way shunt pipelines.

[0065] Preferably, the multiple liquid outlet ends of the first shunt pipeline 21 and the second shunt pipeline 22 are linearly arranged at equal intervals.

[0066] Preferably, the decomposable slit coating die head further includes a first gasket 7 and a second gasket 8; the first gasket 7 is arranged between the cover plate 1 and the first flow channel plate 2; the second gasket 8 is arranged between the first flow channel plate 2 and the support plate 3. The first gasket 7 and the second gasket 8 are used to improve the sealing performance.

[0067] Specifically, the first gasket 7 and the second gasket 8 are respectively provided with through holes and through grooves corresponding to the liquid inlet end and the liquid outlet end of the first flow channel plate 2.

[0068] Please refer to Figures 13 - 15 , in one implementation manner, the decomposable slit coating die head further includes at least one second flow channel plate 9; the second flow channel plate 9 is arranged between the first flow channel plate 2 and the support plate 3.

[0069] The second flow channel plate 9 can adopt a design similar to that of the first flow channel plate 2, that is, at least one of the top surface and the bottom surface is provided with a flow splitting pipeline to further achieve flow splitting and improve the uniformity of liquid supply. The multiple liquid outlet ends of the first flow channel plate 2 correspond to the multiple liquid inlet ends of the next-level second flow channel plate 9. The number of the second flow channel plates 9 can be one or multiple, which can be adjusted according to production requirements.

[0070] In a specific embodiment, the top surface and the bottom surface of the first flow channel plate 2 are respectively provided with flow splitting pipelines, while the top surface or the bottom surface of the second flow channel plate 9 is provided with a flow splitting pipeline.

[0071] In another embodiment, the top surface or the bottom surface of the first flow channel plate 2 is respectively provided with flow splitting pipelines, while the top surface or the bottom surface of the second flow channel plate 9 is provided with a flow splitting pipeline.

[0072] In another embodiment, the top surface and the bottom surface of the first flow channel plate 2 are respectively provided with flow splitting pipelines, and the top surface and the bottom surface of the second flow channel plate 9 are also respectively provided with flow splitting pipelines.

[0073] Please refer to Figures 13 - 15 , in this embodiment, a plurality of third flow splitting pipelines 23 are provided on the bottom surface of the second flow channel plate 9; the third flow splitting pipelines 23 are two-way flow splitting pipelines; the liquid inlet ends of the plurality of third flow splitting pipelines 23 are respectively communicated with the plurality of liquid outlet ends of the second flow splitting pipeline 22 through a plurality of vertical pipes penetrating the second flow channel plate 9. The liquid in this embodiment is sequentially split through the first flow splitting pipeline 21, the second flow splitting pipeline 22, and the third flow splitting pipeline 23, and more liquid supply ports can be formed, further improving the uniformity of liquid supply.

[0074] Please refer to Figure 4 , in an implementation manner, an installation cavity 11 is provided at the bottom of the cover plate 1, and the first flow channel plate 2 is arranged in the installation cavity 11; the bottom surface of the cavity wall of the installation cavity 11 is connected to the support plate 3. In this implementation manner, by wrapping the first flow channel plate 2 between the cover plate 1 and the support plate 3, better sealing performance can be obtained.

[0075] Please refer to Figure 6 , in an implementation manner, the lip coating assembly 5 includes a vertically arranged first lip coating 52 and a second lip coating 53; the first lip coating 52 and the second lip coating 53 are detachably connected; the liquid inlet groove 51 or the liquid inlet hole is arranged in the first lip coating 52; a fourth gasket 54 is vertically arranged between the first lip coating 52 and the second lip coating 53; the fourth gasket 54 is used to form a slit 56 between the first lip coating 52 and the second lip coating 53.

[0076] Specifically, the first lip coating 52 can be fixedly connected to the support plate 3 and can be obtained by integral processing and forming. The liquid inlet groove 51 is arranged in the first lip coating 52.

[0077] Please refer to Figure 6 In one embodiment, a buffer cavity 55 is further provided in the lip coating assembly 5; the buffer cavity 55 is provided between the liquid inlet groove 51 and the slit 56. The liquid inlet groove 51 can also be replaced by a plurality of liquid inlet holes. The buffer cavity 55 is used to improve the stability of liquid discharge. Specifically, at least one of the two inner side surfaces of the first lip 52 opposite to the second lip 53 can be selected to be provided with a concave cavity, and the buffer cavity 55 is formed after the first lip 52 and the second lip 53 are connected.

[0078] Please refer to Figure 16 Preferably, a spoiler 57 is provided in the liquid inlet groove 51.

[0079] Please refer to Figure 6 and Figure 16 In one embodiment, an exhaust passage 24 is provided above the support plate 3; the intake end of the exhaust passage 24 is communicated with the liquid inlet groove 51; an exhaust pipe 31 is provided on the support plate 3; the intake end of the exhaust pipe 31 is communicated with the outlet end of the exhaust passage 24.

[0080] Please refer to Figure 4 In one embodiment, a plurality of exhaust grooves are provided on the bottom surface of the first flow channel plate 2, corresponding to a plurality of liquid supply pipes 6 respectively. The exhaust grooves form the exhaust passage 24 after being covered by the support plate 3.

[0081] When the liquid inlet groove 51 is replaced by a plurality of liquid inlet holes, the plurality of exhaust grooves are respectively communicated with the plurality of liquid inlet holes.

[0082] In another embodiment, when the decomposable slit coating die head includes the first flow channel plate 2 and the second flow channel plate 9, the exhaust grooves are provided on the bottom surface of the second flow channel plate 9 instead of the bottom surface of the first flow channel plate 2.

[0083] Please refer to Figure 6 and Figure 8 In another embodiment, for the decomposable slit coating die head provided with the second gasket 8, the exhaust passage 24 is provided on the second gasket 8.

[0084] One or more exhaust pipes 31 can be provided on the support plate 3. The outlet ends of the plurality of exhaust passages 24 can be converged through a confluence groove, and then one or more exhaust pipes 31 are connected through the confluence groove. The uniformity of exhaust also affects the uniformity during coating.

[0085] Specifically, the liquid supply pipe 6 is detachably connected to the first flow channel plate 2 or is integrally formed by machining.

[0086] Please refer to Figure 16 and Figure 17, when a flow splitting pipeline is provided on the bottom surface of the first flow channel plate 2 and the bottom surface flow splitting pipeline is connected to the liquid supply pipe 6, it is difficult to integrally process and form the liquid supply pipe 6 and the first flow channel plate 2. Therefore, it is appropriate to adopt the method of connecting them after separate processing. The detachable connection method also facilitates the cleaning of the turning connection part between the liquid supply pipe 6 and the bottom surface flow splitting pipeline.

[0087] For the case where the liquid supply pipe 6 is not connected to the bottom surface flow splitting pipeline, it is appropriate to adopt integral processing and forming for production.

[0088] Preferably, the manufacturing materials of the first flow channel plate 2 and the second flow channel plate 9 can be materials with a liquid surface contact angle greater than 30°.

[0089] Preferably, the manufacturing materials of the first flow channel plate 2 and the second flow channel plate 9 are plastics (such as polytetrafluoroethylene), ceramics or metals; the hardness of the manufacturing materials of the first flow channel plate 2 and the second flow channel plate 9 is less than the hardness of the manufacturing materials of the cover plate 1 and the support plate 3; the manufacturing material of the cover plate 1 can be marble, ceramics or metals.

[0090] Among them, the flow channel plate made of polytetrafluoroethylene has a smaller weight, which can greatly reduce the overall weight of the die head. At the same time, using polytetrafluoroethylene can achieve a good sealing effect. The polytetrafluoroethylene material has a large liquid surface contact angle, is easy for liquid to flow, and is easier to clean.

[0091] In the second aspect of the present invention, a coating device is provided, which includes the decomposable slit coating die head as described above.

[0092] To sum up, the present invention sets a decomposable slit coating die head, and by arranging the flow splitting pipeline on the top surface or the bottom surface of the flow channel plate, it is easy to clean the exposed flow splitting pipeline after disassembling. The design of the flow channel plate of the present invention not only ensures the uniformity of supply, but also makes the volume and weight of the die head smaller and easier to control.

[0093] It can be understood that for those of ordinary skill in the art, equivalent substitutions or changes can be made according to the technical solutions and inventive concepts of the present invention, and all such changes or substitutions should fall within the protection scope of the appended claims of the present invention.

Claims

1. A decomposable slot coating die head, characterized in that: The invention comprises a cover plate, a first flow channel plate and a support plate which are stacked from top to bottom; the cover plate, the first flow channel plate and the support plate are detachably connected; a plurality of liquid supply pipes are arranged at the bottom of the first flow channel plate; a lip coating assembly is arranged below the support plate; a liquid inlet groove or a plurality of liquid inlet holes are arranged in the lip coating assembly; the liquid supply pipe is inserted into the liquid inlet groove or the liquid inlet hole; a first shunt pipe is arranged on the top surface or the bottom surface of the first flow channel plate, and the first shunt pipe is arranged on the top surface or the bottom surface of the first flow channel plate in the form of a groove; a liquid inlet pipe is connected to the cover plate; the liquid inlet pipe passes through the cover plate and is connected to the liquid inlet end of the first flow channel plate; when the first shunt pipe is arranged on the bottom surface of the first flow channel plate, the top surface of the first flow channel plate is provided with a plurality of A second diversion pipe; when a first diversion pipe is provided on the top surface of the first flow channel plate, a plurality of second diversion pipes are provided on the bottom surface of the first flow channel plate; a plurality of liquid outlet ends of the first diversion pipe are respectively connected with the liquid inlet ends of a plurality of second diversion pipes; a plurality of liquid outlet ends of the second diversion pipes are respectively connected with a plurality of liquid supply pipes; the first diversion pipe and the second diversion pipe include a multi-stage two-diversion pipe; a plurality of liquid outlet ends of the two-diversion pipes at the upper stage are respectively connected with the liquid inlet ends of a plurality of two-diversion pipes at the lower stage; an exhaust duct is provided above the support plate; an air inlet end of the exhaust duct is connected with the liquid inlet groove or the liquid inlet hole; an exhaust pipe is provided on the support plate; the air inlet end of the exhaust pipe is connected with the air outlet end of the exhaust duct.

2. The decomposable slot coating die according to claim 1, characterized in that: It also includes a first gasket and a second gasket; the first gasket is arranged between the cover plate and the first flow channel plate; the second gasket is arranged between the first flow channel plate and the support plate.

3. The decomposable slot coating die according to claim 1, characterized in that: It also includes at least one second flow channel plate; the second flow channel plate is arranged between the first flow channel plate and the support plate.

4. The decomposable slot coating die according to claim 3, characterized in that: It also includes at least one third gasket, which is arranged at least one of between the cover plate and the first flow channel plate, between the first flow channel plate and the second flow channel plate, between two adjacent second flow channel plates, or between the second flow channel plate and the support plate.

5. The decomposable slot coating die according to claim 1, characterized in that: The bottom of the cover plate is provided with a mounting cavity, and the first flow channel plate is arranged in the mounting cavity; the bottom surface of the cavity wall of the mounting cavity is connected to the support plate.

6. The decomposable slot coating die according to claim 1, characterized in that: The lip smear assembly includes a first lip smear and a second lip smear; the first lip smear and the second lip smear are detachably connected; the liquid inlet groove or the liquid inlet hole is arranged in the first lip smear; a fourth gasket is vertically arranged between the first lip smear and the second lip smear; the fourth gasket is used to form a slit between the first lip smear and the second lip smear.

7. The decomposable slot coating die according to claim 1, characterized in that: A buffer cavity is also arranged in the lip coating assembly; the buffer cavity is arranged between the liquid inlet groove and the slit, or between the liquid inlet hole and the slit.

8. The decomposable slot coating die according to claim 1, characterized in that: A spoiler is arranged in the liquid inlet tank.

9. The decomposable slot coating die according to claim 1, characterized in that: The cover plate is made of marble.

10. The decomposable slot coating die according to claim 1, characterized in that: The first flow channel plate is made of plastic, ceramic or metal.

11. The decomposable slot coating die according to claim 1, characterized in that: The hardness of the material of which the first flow channel plate is made is smaller than the hardness of the material of which the cover plate and the support plate are made.

12. The decomposable slot coating die according to claim 3, characterized in that: The liquid surface contact angle of the materials used to make the first flow channel plate and the second flow channel plate is greater than 30°.

13. A coating device, characterized in that: It comprises the decomposable slot coating die as described in any one of claims 1 to 12.

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