A method for preparing ceramic material for splitting knife

Abstract

This invention belongs to the field of semiconductor device packaging, specifically disclosing a method for preparing a ceramic material for cleavers. The preparation method includes the following steps: S1: heating a mixed solution including aluminum salt and organic solvent to 25-45°C to obtain a mixed solution A; S2: adding hydrolysate A dropwise to the mixed solution A to carry out a hydrolysis reaction, adjusting the pH to 3-5, to obtain a mixed solution B; S3: mixing the mixed solution B with a mixed solution including zirconium salt and organic solvent, heating to 55-75°C, and then adding hydrolysate B dropwise to carry out a hydrolysis reaction, to obtain a mixed solution C; S4: heating to remove the organic solvent, obtaining a gel, and then calcining to obtain the ceramic material. The preparation method of this invention, by controlling the temperature in three stages and adjusting the pH during aluminum salt hydrolysis, can refine the grain size of alumina and zirconium oxide, making zirconium oxide uniformly distributed in alumina and avoiding zirconium oxide agglomeration.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor device packaging, and specifically relates to a method for preparing a ceramic material for a cleaver. Background Technology

[0002] In semiconductor integrated circuit manufacturing processes, it is typically necessary to connect the solder pads of bare semiconductor chips to the I / O leads of microelectronic packages or the metal wiring solder pads on the substrate using fine metal wires (solder wires). Therefore, a soldering tool is required for this connection. Generally, the solder wire is passed through the through-hole of the soldering tool and soldered using thermo-press bonding or ultrasonic bonding (i.e., under the action of heat, pressure, or friction, the atoms at the contact surface between the solder wire and the solder pad reach the range of atomic attraction and thus weld together). Currently, soldering tools commonly use ZTA composite powder as a raw material; high-performance ZTA composite powder is a prerequisite for preparing soldering tools with high strength and hardness.

[0003] Existing technologies generally utilize the mechanisms of phase transformation toughening and particle dispersion to obtain ZTA composite powders with high strength and hardness by combining alumina and zirconium oxide in a certain proportion. Preparing high-performance ZTA composite powders is a prerequisite for obtaining good ceramic bodies. The preparation methods for ZTA composite powders are mainly divided into solid-phase methods and liquid-phase methods. The solid-phase method involves grinding and mixing alumina and zirconium oxide powders using high-energy ball milling. This method produces powder particles with large sizes and uneven dispersion of zirconium oxide within the alumina. The liquid-phase method involves co-precipitating zirconium and aluminum salts and then calcining them to obtain ZTA composite powders. This method produces powder particles with severe agglomeration and a wide size distribution. Summary of the Invention

[0004] In order to overcome the problems existing in the prior art, one of the objectives of the present invention is to provide a method for preparing ceramic materials.

[0005] The second objective of this invention is to provide a cleaver.

[0006] The third objective of this invention is to provide a method for preparing a cleaver.

[0007] The fourth objective of this invention is to provide a method for preparing the above-mentioned ceramic material and / or the application of the above-mentioned cleaver in the manufacture of semiconductor products.

[0008] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0009] The first aspect of this invention provides a method for preparing a ceramic material, comprising the following steps:

[0010] S1: Heating a mixed solution including aluminum salt and organic solvent to 25-45°C yields mixed solution A;

[0011] S2: Add hydrolysate A dropwise into the mixture A to carry out the hydrolysis reaction, adjust the pH to 3-5, and obtain mixture B;

[0012] S3: Mix the mixture B with a mixed solution including zirconium salt and organic solvent, heat to 55-75°C, and then add hydrolysate B dropwise to carry out a hydrolysis reaction to obtain mixture C;

[0013] S4: Heat the mixture to remove the organic solvent, obtain a gel, and then calcine it to obtain the ceramic material.

[0014] To address the problems of uneven dispersion, severe agglomeration, and wide size distribution in traditional ZTA ceramic materials, this invention combines the principles of metal salt hydrolysis and the attraction of opposite zeta potentials. This results in a ceramic material with good zirconia dispersion and uniformity of both zirconia and alumina particles. Specifically, in the initial stage of alumina salt hydrolysis (step S2), the pH of the reaction system is adjusted to a weakly acidic state. At this time, the surface of the aluminum hydroxide produced by the reaction will adsorb H2O. + The hydrated zirconium oxide produced in step S3, due to its negatively charged surface, is adsorbed around aluminum hydroxide, forming a good dispersion system. This achieves uniform dispersion of zirconium oxide in the ceramic material and avoids agglomeration of zirconium oxide particles.

[0015] In this invention, the heating temperature in step S1 is 25–45°C, for example, selectable from 25°C, 26°C, 27°C, 28°C, 29°C, 30°C, 31°C, 32°C, 33°C, 34°C, 35°C, 36°C, 37°C, 38°C, 39°C, 40°C, 41°C, 42°C, 43°C, 44°C, and 45°C. Preferably, the heating temperature in step S1 is 30–40°C. In step S1, when the heating temperature is adjusted to the range of 25–45°C, the aluminum salt hydrolysis rate can be controlled, resulting in fine and uniform aluminum hydroxide particles generated in the first step. When the heating temperature is controlled within the range of 30–40°C, the aluminum salt hydrolysis reaction is more stable, which is more conducive to obtaining aluminum hydroxide particles with smaller and more uniform particle size. If the heating temperature exceeds 45°C, the reaction temperature is too high, the reaction rate is too fast, and the resulting grain size is uneven.

[0016] Preferably, the aluminum salt is selected from at least one of aluminum isopropoxide and aluminum n-propoxide.

[0017] Preferably, the zirconium salt is selected from at least one of zirconium isopropoxide and zirconium n-propoxide.

[0018] Preferably, the molar ratio of the aluminum salt to the zirconium salt is 1:(0.03 to 0.3), for example, it can be selected from 1:0.03, 1:0.04, 1:0.05, 1:0.06, 1:0.07, 1:0.08, 1:0.09, 1:0.1, 1:0.12, 1:0.14, 1:0.16, 1:0.18, 1:0.2, 1:0.22, 1:0.24, 1:0.26, 1:0.28, and 1:0.3.

[0019] Preferably, the organic solvent is selected from at least one of isopropanol and n-propanol. When the aluminum salt is aluminum n-propoxide and the zirconium salt is zirconium n-propoxide, choosing n-propanol as the organic solvent is more conducive to the reaction; when the aluminum salt is aluminum isopropoxide and the zirconium salt is zirconium isopropoxide, choosing isopropanol as the organic solvent is more conducive to the reaction.

[0020] Preferably, in the mixed solution comprising aluminum salt and organic solvent, the molar ratio of aluminum salt to organic solvent is 1:(95-99), for example, 1:95, 1:96, 1:97, 1:98, or 1:99. In this invention, a molar ratio of aluminum salt to organic solvent within an appropriate range is beneficial for obtaining ceramic powder with fine and uniformly dispersed zirconia grains. Preferably, the molar ratio of aluminum salt to organic solvent is 1:(95-99). If the proportion of organic solvent is too high, the content of organic solvent in the reaction system will be too large, making subsequent recovery difficult and resulting in waste; if the proportion of organic solvent is too low, it will lead to gelation during the reaction, making it difficult to obtain particles of uniform size.

[0021] Preferably, in the mixed solution comprising zirconium salt and organic solvent, the molar ratio of zirconium salt to organic solvent is 1:(95-99), for example, 1:95, 1:96, 1:97, 1:98, or 1:99.

[0022] In this invention, hydrolysate A and hydrolysate B are both mixtures of organic solvent and water.

[0023] Preferably, the hydrolysate A is a mixture of organic solvent and water with a molar ratio of (0.1 to 0.3):1. For example, the molar ratio of organic solvent to water can be selected from 0.1:1, 0.15:1, 0.2:1, 0.25:1, and 0.3:1.

[0024] Preferably, the molar ratio of the aluminum salt to water in the hydrolysate A is 1:(0.8~1.2). When the molar ratio of the aluminum salt to water in the hydrolysate A is within the above range, it is more conducive to the dispersion of zirconium aluminum.

[0025] Preferably, the hydrolysate B is a mixture of organic solvent and water with a molar ratio of (0.1 to 0.3):1. For example, the molar ratio of organic solvent to water can be selected from 0.1:1, 0.15:1, 0.2:1, 0.25:1, and 0.3:1.

[0026] Preferably, the molar ratio of the aluminum salt to water in the hydrolysate B is 1:(7-10). When the molar ratio of the aluminum salt to water in the hydrolysate A is within the above range, it is more conducive to the dispersion of zirconium aluminum.

[0027] In this invention, the water in hydrolysate A and hydrolysate B is diluted with an organic solvent, and both hydrolysate A and hydrolysate B are added dropwise to avoid excessive local saturation, which would lead to more severe aggregation of the reaction products. The higher the dilution factor of the water in hydrolysate A and hydrolysate B using the organic solvent, and the slower the dropwise addition rate, the better the effect. However, considering production efficiency, it is necessary to control it within a certain range.

[0028] Preferably, step S2 is as follows: under stirring, hydrolysate A is added dropwise to the mixture A to carry out the hydrolysis reaction, and the pH is adjusted to 3-5 using acid to obtain mixture B; the addition of hydrolysate A can cause some aluminum salts to hydrolyze to generate aluminum hydroxide suspension.

[0029] Preferably, step S2 involves adjusting the pH to 3-5 using at least one acid selected from formic acid and acetic acid. The pH in step S2 is 3-5, for example, 3, 4, or 5. Under different pH conditions, the surface charge of the reaction products differs; the purpose of adding acid is to adjust the pH of the reaction system within a suitable range, adjust the Zeta potential of the reaction products, and make the aluminum hydroxide colloid positively charged, thereby ensuring uniform dispersion of alumina and zirconium oxide in the subsequent products. This invention controls the pH to 3-5, which on the one hand controls the partial hydrolysis of aluminum salts, generating an aluminum hydroxide suspension; on the other hand, it allows the hydrolyzed hydrated zirconium oxide particles to be adsorbed onto the aluminum hydroxide suspension particles, achieving the purpose of dispersing zirconium oxide. When selecting an acid to adjust the pH, it is necessary to consider that the acid is liquid and has as little water content as possible to avoid hydrolysis reactions during acid addition. Formic acid and acetic acid are readily available in high-purity solutions and are suitable for adjusting pH, while anhydrous nitric acid is easily decomposed and cannot be used, and citric acid is a solid and is also unsuitable. If too much acid is used, the pH value will be too low, making subsequent reactions difficult to proceed. If too little acid is used, the pH value will be too high, resulting in fewer positive charges on the surface of the reaction products and a poorer mixing effect between zirconium oxide and alumina.

[0030] In this invention, the temperature after heating in step S3 is 55–75°C, for example, selectable from 55°C, 56°C, 57°C, 58°C, 59°C, 60°C, 61°C, 62°C, 63°C, 64°C, 65°C, 66°C, 67°C, 68°C, 69°C, 70°C, 71°C, 72°C, 73°C, 74°C, and 75°C; preferably, the heating temperature in step S3 is 60–70°C. In step S3, raising the temperature to 55–75°C is beneficial for increasing the reaction rate within this temperature range; higher temperatures are more conducive to increasing the reaction rate and obtaining smaller reaction product particle sizes. However, excessively high temperatures can lead to excessively fast migration rates of reaction product particles and weakened electrostatic adsorption.

[0031] Preferably, the hydrolysis reaction time in step S3 is greater than 2 hours; more preferably, the hydrolysis reaction time in step S3 is 2 hours to 24 hours, for example, it can be selected from 2 hours, 3 hours, 4 hours, 5 hours, 6 hours, 7 hours, 8 hours, 9 hours, 10 hours, 11 hours, 12 hours, 13 hours, 14 hours, 15 hours, 16 hours, 17 hours, 18 hours, 19 hours, 20 hours, 21 hours, 22 hours, 23 hours, and 24 hours.

[0032] Preferably, the heating temperature in step S4 is 100–120°C, for example, selectable from 100°C, 101°C, 102°C, 103°C, 104°C, 105°C, 106°C, 107°C, 108°C, 109°C, 110°C, 111°C, 112°C, 113°C, 114°C, 115°C, 116°C, 117°C, 118°C, 119°C, and 120°C; more preferably, the heating temperature in step S4 is 105–115°C. In step S4, raising the temperature to 100–120°C is to recover the organic solvent and simultaneously dry the reaction product into a gel before proceeding to the next calcination step. If the heating temperature is too low, the amount of recovered organic solvent will be less, resulting in waste of organic solvent; if the temperature is too high, it increases heating costs, resulting in energy waste. The organic solvents used in this invention can be completely recovered at a temperature of 100–120°C.

[0033] Preferably, the calcination temperature in step S4 is 1000-1100℃, for example, it can be selected from 1000℃, 1010℃, 1020℃, 1030℃, 1040℃, 1050℃, 1060℃, 1070℃, 1080℃, 1090℃, and 1100℃.

[0034] Preferably, the calcination and heat preservation time in step S4 is 1 to 3 hours, for example, it can be selected from 1 hour, 1.5 hours, 2 hours, 2.5 hours, or 3 hours.

[0035] A second aspect of the present invention provides a cleaver, the cleaver comprising a cleaver body, a welding nozzle and a wire through hole, the wire through hole extending along the longitudinal axis of the cleaver body to the inner chamfer of the welding nozzle, the cleaver being made from a ceramic material obtained by the preparation method described in the first aspect of the present invention.

[0036] A third aspect of the present invention provides a method for preparing the cleaver described in the second aspect of the present invention, comprising the following steps:

[0037] The ceramic material prepared by the preparation method described in the first aspect of the present invention is mixed and ground with a dispersant and a solvent to obtain a ceramic slurry;

[0038] The ceramic slurry is dried and shaped, and then sintered.

[0039] Preferably, the dispersant comprises ammonium polyacrylate.

[0040] Preferably, the grinding is performed using a ball mill.

[0041] Preferably, the ball milling time is 4 to 6 hours, for example, it can be selected from 4 hours, 4.5 hours, 5 hours, 5.5 hours, or 6 hours.

[0042] Preferably, the drying temperature is 100-120℃, for example, it can be selected from 100℃, 101℃, 102℃, 103℃, 104℃, 105℃, 106℃, 107℃, 108℃, 109℃, 110℃, 111℃, 112℃, 113℃, 114℃, 115℃, 116℃, 117℃, 118℃, 119℃, and 120℃.

[0043] Preferably, the sintering temperature is 1400-1600℃, for example, it can be selected from 1400℃, 1450℃, 1500℃, 1550℃, and 1600℃.

[0044] Preferably, the sintering holding time is 1 to 3 hours, for example, it can be selected from 1 hour, 2 hours, or 3 hours.

[0045] The fourth aspect of the present invention provides a method for preparing the ceramic material described in the first aspect of the present invention and / or the application of the cleaver described in the second aspect of the present invention in the manufacture of semiconductor products.

[0046] The beneficial effects of the present invention are: the preparation method of the present invention can refine the grain size of alumina and zirconium oxide by controlling the temperature in three stages and adjusting the pH during the hydrolysis of alumina salt, so that zirconium oxide is evenly distributed in alumina and the agglomeration of zirconium oxide is avoided.

[0047] The zirconia and alumina grains in the cleaver of this invention are both small in size. The zirconia grain size is less than 0.5 μm with a CV value of no more than 16%, and the alumina grain size is less than 1 μm with a CV value of no more than 21%. The zirconia is uniformly dispersed in the alumina and does not agglomerate, thereby improving the hardness and strength of the cleaver, making the hardness of the cleaver >1800MPa and the strength >750MPa. Attached Figure Description

[0048] Figure 1 This is a test image of the cross-sectional morphology of the ceramic chopping knife in Example 1.

[0049] Figure 2 This is a test image of the cross-sectional morphology of the ceramic chopping knife in Comparative Example 4. Detailed Implementation

[0050] The specific implementation of the present invention will be further described in detail below with reference to the accompanying drawings and examples, but the implementation and protection of the present invention are not limited thereto. It should be noted that any processes not specifically described in detail below are those that can be implemented or understood by those skilled in the art by referring to the prior art. Reagents or instruments used without specified manufacturers are all conventional products that can be purchased commercially.

[0051] The ceramic chopping tools prepared in Examples 1-7 and Comparative Examples 1-5 of this invention are all cylindrical structures. The structure of the ceramic chopping tool includes a chopping tool body, a welding nozzle, and a wire through hole. The wire through hole extends along the longitudinal axis of the chopping tool body to the inner chamfer of the welding nozzle (for the specific structure of the ceramic chopping tool, please refer to CN108610028A).

[0052] Example 1

[0053] This example provides a method for preparing a ceramic chopping knife, which includes the following steps:

[0054] 1. Mix 1 mol of aluminum n-propoxide and 99 mol of n-propanol until homogeneous to obtain mixture A. Maintain a constant temperature of 35℃ in an oil bath, i.e., temperature A is 35℃.

[0055] 2. While stirring, slowly add hydrolysate A, which is prepared by mixing 0.25 mol n-propanol and 1 mol deionized water, to mixture A. Then adjust the pH of the system to 4 with formic acid to obtain mixture B.

[0056] 3. Add 0.14 mol of zirconium n-propoxide and 13.86 mol of n-propanol to mixture B, raise the oil bath temperature to 65℃ (i.e., temperature B is 65℃) and stir thoroughly. While stirring, slowly add hydrolysate B prepared by mixing 2.03 mol of n-propanol and 8.12 mol of deionized water to react. After the reaction is complete, stir for 2 hours to obtain mixture C.

[0057] 4. Increase the oil bath temperature to 105℃ to evaporate and recover the alcohol in the mixture C, while obtaining a uniformly dispersed zirconium-aluminum gel.

[0058] 5. The obtained gel was placed in a muffle furnace and calcined at 1000℃ for 1.5 hours to obtain a mixture of zirconium oxide and alumina.

[0059] 6. Place the mixture into a ball mill jar, add deionized water and dispersant ammonium polyacrylate, ball mill for 4 hours, and dry and mold at 110℃ to obtain the molded body.

[0060] 7. After sintering the molded body in air at 1450℃ and holding it at that temperature for 2 hours, the ceramic chopping knife in this example is obtained by cutting, grinding and polishing.

[0061] Examples 2-3

[0062] The only difference between the preparation methods of the ceramic chopping knife in Examples 2 and 3 and those in Example 1 is that the temperature A in step 1 is different, as shown in Table 1 below.

[0063] Examples 4-5

[0064] The only difference between the preparation methods of the ceramic chopping knife in Examples 4 and 5 and those in Example 1 is that the temperature B in step 3 is different, as shown in Table 1 below.

[0065] Examples 6-7

[0066] The only difference between the preparation method of the ceramic chopping knife in Examples 6 and 7 and that in Example 1 is that the pH value adjusted in step 2 is different. The specific pH values ​​are shown in Table 1 below.

[0067] Comparative Example 1

[0068] The only difference between the preparation method of the ceramic chopping knife in this example and that in Example 1 is the temperature A in step 1, as shown in Table 1 below.

[0069] Comparative Examples 2-3

[0070] The only difference between the preparation methods of the ceramic chopping knives in Comparative Examples 2 and 3 and those in Example 1 is that the temperature B in step 3 is different, as shown in Table 1 below.

[0071] Comparative Example 4

[0072] The only difference between the preparation method of the ceramic chopping knife in this example and that in Example 1 is that formic acid is not used to adjust the pH value in step 2 of this example.

[0073] Comparative Example 5

[0074] The only difference between the preparation method of the ceramic chopping knife in this example and that in Example 1 is that hydrolysate A is not added in step 2 of this example, but formic acid is added directly to adjust the pH value.

[0075] Table 1. Preparation process parameters for Examples 1-7 and Comparative Examples 1-5

[0076] Serial Number Temperature A / ℃ pH Temperature B / ℃ Example 1 35 4 65 Example 2 25 4 65 Example 3 45 4 65 Example 4 35 4 55 Example 5 35 4 75 Example 6 35 3 65 Example 7 35 5 65 Comparative Example 1 50 4 65 Comparative Example 2 35 4 50 Comparative Example 3 35 4 80 Comparative Example 4 35 7.5 65 Comparative Example 5 35 4 65

[0077] Performance testing:

[0078] The hardness, zirconia grain size, alumina grain size, and three-point bending strength of the ceramic chopping tools prepared in Examples 1-7 and Comparative Examples 1-5 were tested according to the test methods described in Table 2 below. The specific test results are shown in Table 3 below.

[0079] Table 2 Test methods and compliance requirements

[0080]

[0081] Table 3 Performance test data of ceramic chopping knife

[0082]

[0083]

[0084] As shown in Table 3, the preparation method of the ceramic chopping knife in Examples 1 to 7 of the present invention, by controlling temperature A at 25-45℃, temperature B at 55-75℃, and pH of the mixture B at 3-5, can refine the zirconium oxide and alumina grains in the ceramic chopping knife and make zirconium oxide uniformly dispersed in alumina (the smaller the average size of zirconium oxide and alumina grains, the better the dispersion uniformity of zirconium oxide), avoid the agglomeration of zirconium oxide, and thus improve the hardness and strength of the ceramic chopping knife, making the hardness of the ceramic chopping knife >1800MPa and the strength >800MPa.

[0085] The cross-sectional morphology of the ceramic chopping tools in Example 1 and Comparative Example 4 was tested using scanning electron microscopy. The specific test results are as follows: Figure 1 and Figure 2 As shown, where, Figure 1 and Figure 2 The whiter particles are zirconium oxide grains, and the grayer particles are aluminum oxide grains. Figure 1 and Figure 2 It can be seen that the size difference between the zirconia and alumina particles in the ceramic chopping knife of Example 1 is small, and the zirconia grains are uniformly distributed without agglomeration. This test result is consistent with the test data in Table 3. However, the size difference between the zirconia and alumina particles in the ceramic chopping knife of Comparative Example 4 is large, and the zirconia particles exhibit agglomeration.

[0086] While the embodiments of the present invention have been described in detail above, the present invention is not limited to the embodiments described above. Various modifications may be made within the scope of knowledge possessed by a person skilled in the art without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof may be combined with one another unless there is a conflict.

Claims

1. A method for preparing a ceramic material, characterized in that: Includes the following steps: S1: Heating a mixed solution containing aluminum salt and organic solvent to 25~45℃ yields mixed solution A; S2: Add hydrolysate A dropwise into the mixture A to carry out the hydrolysis reaction, adjust the pH to 3-5, and obtain mixture B; S3: Mix the mixture B with a mixed solution including zirconium salt and organic solvent, heat to 55~75℃, and then add hydrolysate B dropwise to carry out hydrolysis reaction to obtain mixture C; S4: Heat the mixture to remove the organic solvent, obtain a gel, and then calcine it to obtain the ceramic material.

2. The method for preparing the ceramic material according to claim 1, characterized in that: The aluminum salt is selected from at least one of aluminum isopropoxide and aluminum n-propoxide; And / or, the zirconium salt is selected from at least one of zirconium isopropoxide and zirconium n-propoxide; And / or, the organic solvent is selected from at least one of isopropanol and n-propanol.

3. The method for preparing the ceramic material according to claim 1, characterized in that: In the mixed solution comprising aluminum salt and organic solvent, the molar ratio of aluminum salt to organic solvent is 1:(95~99). And / or, in the mixed solution comprising zirconium salt and organic solvent, the molar ratio of zirconium salt to organic solvent is 1:(95~99). And / or, the hydrolysate A is a mixture of organic solvent and water in a molar ratio of (0.1~0.3):1; And / or, the hydrolysate B is a mixture of organic solvent and water in a molar ratio of (0.1~0.3):

1.

4. The method for preparing the ceramic material according to claim 1, characterized in that: Step S2 involves adjusting the pH to 3-5 using at least one acid selected from formic acid and acetic acid.

5. The method for preparing the ceramic material according to claim 1, characterized in that: The hydrolysis reaction time in step S3 is greater than 2 hours.

6. The method for preparing the ceramic material according to claim 1, characterized in that: The heating temperature in step S4 is 100~120℃; And / or, the calcination temperature in step S4 is 1000~1100℃; And / or, the calcination and heat preservation time in step S4 is 1~3h.

7. A cleaver, the cleaver comprising a cleaver body, a welding nozzle, and a wire through hole, the wire through hole extending along the longitudinal axis of the cleaver body to the inner chamfer of the welding nozzle, characterized in that: The cleaver is made from raw materials including ceramic materials prepared by the preparation method described in any one of claims 1 to 6.

8. The method for preparing the cleaver according to claim 7, characterized in that: Includes the following steps: The ceramic material prepared by the preparation method according to any one of claims 1 to 6 is mixed and ground with a dispersant and a solvent to obtain a ceramic slurry; The ceramic slurry is dried and shaped, and then sintered.

9. The method for preparing the cleaver according to claim 8, characterized in that: The sintering temperature is 1400~1600℃; And / or, the sintering holding time is 1~3h.

10. The application of the cleaving blade according to claim 7 in the manufacture of semiconductor products.

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