Leveling device and detection equipment

Abstract

The invention relates to the technical field of sample detection, in particular to a leveling device and detection equipment. The leveling device comprises a bottom plate and at least two flexible hinge mechanisms, the bottom plate is provided with at least two supporting parts, and the at least two supporting parts are arranged at equal intervals in the circumferential direction of the bottom plate; each flexible hinge mechanism is provided with a bottom and a top which are opposite in the axial direction of the bottom plate, the bottom of each flexible hinge mechanism is arranged on the corresponding supporting part, and the top of each flexible hinge mechanism is used for supporting a sample to be adjusted; the flexible hinge mechanism is provided with a mounting cavity, a motion driving part is arranged in the mounting cavity, and the motion driving part is used for outputting first displacement in the radial direction of the bottom plate to enable the mounting cavity to elastically expand so as to convert the first displacement output in the radial direction of the bottom plate into second displacement in the axial direction of the bottom plate. The motion driving part is arranged in the flexible hinge, a compact displacement steering hinge is obtained, high-precision large-range angle automatic adjustment is achieved, and meanwhile the requirements for small size and light weight are met.

Description

Technical Field

[0001] The present application relates to the technical field of sample detection, and in particular to a leveling device and a detection equipment. Background Art

[0002] The angle adjustment accuracy of the sample to be tested determines the accuracy of high-precision sample testing. Currently, most testing equipment uses manual adjustment to adjust the angle of the sample to be tested, which has poor adjustment accuracy, is difficult, time-consuming and labor-intensive.

[0003] The automatic leveling mechanism in the related art can automatically adjust the angle of the sample to be tested. However, for high-precision samples, the angle adjustment range is small. In order to ensure the adjustment accuracy of the sample, the automatic leveling mechanism needs to be embedded in the testing equipment, which makes the testing equipment large in size and heavy in weight. Summary of the invention

[0004] The present application discloses a leveling device and a detection equipment, which obtains a compact displacement steering hinge by embedding a motion driving part in a flexible hinge, and satisfies the requirements of small size and light weight of the detection equipment on the basis of realizing high-precision automatic adjustment of the angle of the sample to be adjusted.

[0005] In the first aspect, the present application provides a leveling device, which includes: a base plate and at least two flexible hinge mechanisms; the base plate has at least two supporting parts, and the at least two supporting parts are arranged at the same distance along the circumference of the base plate; along the axial direction of the base plate, each of the flexible hinge mechanisms has a relative bottom and top, each of the bottoms is arranged on a corresponding one of the supporting parts, and each of the tops is used to support a sample to be adjusted; the at least two flexible hinge mechanisms respectively have an installation chamber, and a motion driving member is arranged in the installation chamber, and the motion driving member is used to output a first displacement along the radial direction of the base plate to make the installation chamber elastically expand; when the installation chamber elastically expands, the flexible hinge mechanism converts the first displacement output along the radial direction of the base plate into a second displacement output along the axial direction of the base plate.

[0006] In one possible implementation, the flexible hinge mechanism includes: the at least two flexible hinge mechanisms respectively include: a first flexible hinge and a second flexible hinge stacked up and down along the axial direction of the base plate, the first flexible hinge is located below the second flexible hinge; the first flexible hinge is arranged on the support portion, and the second flexible hinge is used to support the sample to be adjusted; the installation chamber is arranged in the first flexible hinge; along the axial direction of the base plate, the installation chamber has a first central axis, the second flexible hinge has a second central axis, and the first central axis and the second central axis coincide.

[0007] The first flexible hinge and the second flexible hinge stacked up and down can reduce the space occupied by the flexible hinge mechanism in the radial direction. When the leveling device is embedded in the detection equipment, it can avoid the leveling device occupying more space of the detection equipment in the radial direction; the installation chamber of the first flexible hinge located at the bottom coincides with the central axis of the second flexible hinge located at the top, so that the flexible hinge mechanism is formed into a symmetrical bridge-type flexible structure, and the motion drive component is built into the symmetrical bridge-type flexible structure, and by outputting radial displacement in the symmetrical bridge-type flexible structure, the symmetrical bridge-type flexible structure undergoes elastic deformation to realize the conversion of radial displacement into axial displacement; in the process of converting radial displacement into axial displacement, there is no need to increase the length of the motion drive component, thereby meeting the requirements of small volume and small weight.

[0008] In one possible implementation, the first flexible hinge is an isosceles trapezoidal structure, which includes a first rectangular flexible part, a first oblique beam assembly and a second oblique beam assembly, the installation chamber is arranged in the first rectangular flexible part, the first rectangular flexible part has a first side surface and a second side surface relative to each other along the radial direction of the base plate, the first oblique beam assembly is arranged on the first side surface, and the second oblique beam assembly is arranged on the second side surface; the second flexible hinge includes a second rectangular flexible part, one end of the second rectangular flexible part is connected to the first rectangular flexible part, and the other end of the second rectangular flexible part is used to support the sample to be adjusted.

[0009] The first rectangular flexible part in the isosceles trapezoidal structure is used to undergo elastic deformation, so that the second rectangular flexible part located above the first rectangular flexible part can output axial displacement; the first oblique beam assembly and the second oblique beam assembly in the isosceles trapezoidal structure have the function of connecting and fixing, so that the flexible hinge mechanism is fixedly connected to the support part, thereby ensuring the accuracy of the angle adjustment of the sample to be adjusted; at the same time, the first oblique beam assembly and the second oblique beam assembly also have the function of increasing the contact area between the flexible hinge mechanism and the support part, so that the force output by the moving drive part can be completely absorbed by the isosceles trapezoidal structure, thereby avoiding the force output by the moving drive part affecting the support part, and effectively reducing the deformation of the support part.

[0010] In one possible implementation, the base plate includes a circular disc and at least two connecting plates, wherein the at least two connecting plates are arranged at the same distance along the circumference of the circular disc, and the at least two connecting plates are respectively connected to the outer circumferential wall of the circular disc; each of the connecting plates is provided with the supporting portion, and the supporting portion forms an installation groove, and the bottom of each of the flexible hinge mechanisms is arranged in a corresponding one of the installation grooves.

[0011] The bottom plate is used as a base to connect with other devices in the detection equipment. To avoid the excessive volume and weight of the bottom plate, the bottom plate is designed as a disk and at least two connecting plates connected to the outer peripheral wall of the disk, and a flexible hinge mechanism is set on the connecting plate. At the same time, at least two connecting plates are arranged at the same distance along the circumference of the disk, and at least two supporting parts are used for leveling. The two supporting parts move asynchronously to achieve the purpose of adjusting the angle of the sample to be adjusted.

[0012] Optionally, the base plate includes three connecting plates, and the three connecting plates are arranged at the same distance in the circumferential direction along the outer circumference of the disk. A three-point leveling method is adopted, and the three supporting parts move asynchronously, thereby further improving the accuracy of the angle adjustment of the sample to be adjusted.

[0013] The bottom of the flexible hinge mechanism is arranged on the installation groove, which can improve the connection strength of the flexible hinge mechanism on the connecting plate and prevent the flexible hinge mechanism from being separated from the connecting plate; at the same time, the flexible hinge mechanism can be directly snapped into the installation groove, making the installation method simpler.

[0014] In one possible implementation, the first rectangular flexible member has a first bottom surface, the first oblique beam assembly has a second bottom surface, and the second oblique beam assembly has a third bottom surface, and the third bottom surface and the second bottom surface are all flush with the first bottom surface; a first connecting hole is provided on the second bottom surface and / or the third bottom surface, and a second connecting hole is provided on the support portion; the leveling device also includes a first connecting member, and the first connecting member is respectively connected to the first connecting hole and the second connecting hole.

[0015] The bottom surface of the first rectangular flexible member is flush with the bottom surfaces of the two oblique beam assemblies, ensuring that the two oblique beam assemblies can increase the contact area between the flexible hinge mechanism and the support portion, so that the isosceles trapezoidal structure can completely absorb the output displacement of the motion driver, spread the reaction force of the motion driver on the support portion, and effectively reduce the deformation of the support portion. At the same time, by connecting the first connecting member to the first connecting hole and the second connecting hole respectively, the connection strength of the flexible hinge mechanism on the connecting plate is further improved to prevent the flexible hinge mechanism from detaching from the connecting plate.

[0016] In a possible implementation, along the circumference of the bottom plate, the installation chamber has a first opening and a second opening that are opposite to each other, and the first opening and the second opening are in communication.

[0017] Providing an opening on the installation chamber can reduce the weight of the first flexible hinge; at the same time, the first opening is communicated with the second opening, which is convenient for assembly and maintenance.

[0018] In one possible implementation, the installation chamber has a first inner wall surface and a second inner wall surface radially opposite to each other along the base plate, and the motion driving member can output the first displacement radially along the base plate so that the two ends of the motion driving member provide radial forces along the base plate to the first inner wall surface and the second inner wall surface respectively.

[0019] The two ends of the motion driving member provide radial forces along the bottom plate to the first inner wall surface and the second inner wall surface respectively, so that the installation chamber expands elastically to realize the conversion of radial displacement into axial displacement.

[0020] In one possible implementation, the installation chamber has a third inner wall surface, the third inner wall surface intersects with the first inner wall surface and the second inner wall surface respectively, and the third inner wall surface is close to the support portion; a third connecting hole is provided on the third inner wall surface, and the motion driving member has a fourth connecting hole; the leveling device also includes a second connecting member, and the second connecting member is connected to the third connecting hole and the fourth connecting hole respectively.

[0021] By respectively connecting the second connecting member to the third connecting hole and the fourth connecting hole, the connection strength of the flexible hinge mechanism on the connecting plate is further improved, thereby preventing the flexible hinge mechanism from detaching from the connecting plate.

[0022] In one possible implementation, the top surface of the second flexible hinge is used to support a sample platform, the sample to be adjusted is arranged on the sample platform, the top surface is provided with a fifth connecting hole, and the sample platform has a sixth connecting hole; the leveling device also includes a third connecting member, and the third connecting member is respectively connected to the fifth connecting hole and the sixth connecting hole.

[0023] By respectively connecting the third connecting member to the fifth connecting hole and the sixth connecting hole, the connection strength between the flexible hinge mechanism and the sample platform can be improved, thereby preventing the sample platform from being separated from the flexible hinge mechanism and ensuring the angle adjustment accuracy of the sample to be adjusted.

[0024] In a second aspect, the present application further provides a detection device, comprising the leveling device in the first aspect.

[0025] In one possible implementation, the detection device further includes at least two auxiliary mounting parts, each of which is disposed on a corresponding one of the support parts, and each of the auxiliary mounting parts is provided with a displacement sensor, and the displacement sensor is used to detect the second displacement.

[0026] The auxiliary mounting parts are used to install the displacement sensor so that the displacement sensor can accurately measure the second displacement. The technicians can determine the angle of the current sample based on the second displacement measured by the displacement sensor and make corresponding adjustments based on the angle of the current sample.

[0027] In one possible implementation, the detection device also includes a motion axis base and a motion axis workpiece table, the motion axis base is provided with a slide rail extending along a first direction, the motion axis workpiece table is slidably connected to the slide rail; the base plate is fixedly connected to the motion axis workpiece table.

[0028] The base plate can move along with the movement of the motion axis workpiece stage, so that the sample can be moved to different positions in the testing equipment for measurement, which is suitable for different measurement scenarios.

[0029] By adopting the leveling mechanism provided in the present application, it is possible to utilize the elastic deformation of the flexible hinge to achieve tiny displacements, thereby meeting the requirements of high-precision automatic angle adjustment of the sample to be adjusted; at the same time, the motion drive component is built into the flexible hinge mechanism to obtain a compact displacement steering hinge. The compact displacement steering hinge is small in size and light in weight. When the above-mentioned compact displacement steering hinge is embedded in the detection equipment, the compact displacement steering hinge occupies less space, thereby reducing the volume and weight of the detection equipment.

[0030] At the same time, under the premise of realizing the angle adjustment function of the sample to be adjusted, the above-mentioned compact displacement steering hinge can also minimize the impact of the leveling device on other components in the detection equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0032] Figure 1 A schematic diagram of the structure of a leveling device provided in an embodiment of the present application;

[0033] Figure 2 A schematic diagram of the structure of a leveling device supporting a sample platform provided in an embodiment of the present application;

[0034] Figure 3 A schematic diagram of the structure of the detection device provided in an embodiment of the present application.

[0035] Description of reference numerals:

[0036] 100-base plate;

[0037] 101-disc; 102-connecting plate;

[0038] 200-flexible hinge mechanism;

[0039] 201 - first flexible hinge; 202 - second flexible hinge; 210 - installation chamber; 211 - third inner wall surface;

[0040] 2011-first rectangular flexible member; 2012-first inclined beam assembly; 2013-second inclined beam assembly;

[0041] 2014-first top surface; 2015-first connecting hole; 2016-third connecting hole; 2021-second top surface; 2022-fifth connecting hole;

[0042] 300-sample platform;

[0043] 301-sixth connecting hole;

[0044] 400-Motion drive parts;

[0045] 500-Motion axis base;

[0046] 501-slide rail;

[0047] 600-Motion axis workpiece table. DETAILED DESCRIPTION

[0048] In order to make the purpose, technical scheme and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings. The terms used in the following embodiments are only for the purpose of describing specific embodiments, and are not intended to be used as limitations to the present application. As used in the specification and the appended claims of the present application, the singular expressions "one", "a kind of", "said", "above", "the" and "this" are intended to also include, for example, "one or more" such expressions, unless there is clearly an opposite indication in the context.

[0049] References to "one embodiment" or "some embodiments" etc. described in this specification mean that one or more embodiments of the present application include specific features, structures or characteristics described in conjunction with the embodiment. Therefore, the sentences "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0050] like Figure 1 and Figure 2 As shown, the leveling device provided in the embodiment of the present application includes: a base plate 100, on which at least two supporting parts are arranged, and along the axial direction of the base plate 100, each supporting part can be set to have the same initial height, so that before adjusting the angle of the sample to be adjusted, each supporting part is unified on the same reference, which is convenient for leveling.

[0051] The leveling device further includes: at least two flexible hinge mechanisms 200. Each flexible hinge mechanism 200 may include at least one flexible hinge. Figure 1 and Figure 2 As shown, the flexible hinge mechanism 200 includes two flexible hinges: a first flexible hinge 201 and a second flexible hinge 202. In another example, the flexible hinge mechanism 200 includes an integrally formed flexible hinge. It is understood that the flexible hinge mechanism 200 may also include more than three flexible hinges, which is not limited in the present application.

[0052] In the axial direction of the base plate 100 , each flexible hinge mechanism 200 has a relative bottom and top, the bottom of each flexible hinge mechanism 200 is arranged on a corresponding support portion, and the top of each flexible hinge mechanism 200 is used to support the sample to be adjusted.

[0053] Among them, the bottom of the flexible hinge mechanism 200 has a bottom outer surface, which is arranged on the support part and fits with the surface of the support part; the top of the flexible hinge mechanism 200 has a top outer surface, and the sample to be adjusted is arranged on the top outer surface, so that the top outer surface can support the sample to be adjusted.

[0054] That is to say, there are at least two supporting parts under the sample to be adjusted, and each flexible hinge mechanism 200 can output an axial displacement along the bottom plate 100 on its corresponding supporting part to change the height of its corresponding supporting part; making the heights of different supporting parts the same, or making the heights of different supporting parts different, so as to achieve the purpose of adjusting the angle of the sample to be adjusted.

[0055] Specifically, when the heights of different supporting parts are the same, the sample to be adjusted is set horizontally, and the angle of the sample to be adjusted is parallel to the radial direction of the base plate 100; when the heights of different supporting parts are different, the sample to be adjusted is tilted relative to the radial plane of the base plate 100, and the inclination angle of the sample to be adjusted is determined by the height difference of different supporting parts; the greater the height difference of different supporting parts, the greater the inclination angle of the sample to be adjusted relative to the radial plane of the base plate 100; the smaller the height difference of different supporting parts, the smaller the inclination angle of the sample to be adjusted relative to the radial plane of the base plate 100.

[0056] It should be noted that at least two flexible hinge mechanisms 200 can simultaneously output axial displacement along the base plate 100, so as to adjust the heights of different support parts at the same time and improve the leveling efficiency; or one of the flexible hinge mechanisms 200 can first output axial displacement along the base plate 100, and then the other flexible hinge mechanisms 200 can output axial displacement along the base plate 100 as needed to meet various adjustment requirements.

[0057] The flexible hinge mechanism 200 can realize micro displacement by utilizing elastic deformation of the flexible hinge.

[0058] Among them, at least two flexible hinge mechanisms 200 respectively have an installation chamber 210, and a motion driving member 400 is arranged in the installation chamber 210. The motion driving member 400 can output a first displacement along the radial direction of the base plate 100. When the motion driving member 400 outputs the first displacement along the radial direction of the base plate 100, the installation chamber 210 will elastically expand; when the installation chamber 210 elastically expands, the flexible hinge mechanism 200 can convert the first displacement output by the motion driving member 400 along the radial direction of the base plate 100 into a second displacement of the flexible hinge mechanism 200 itself along the axial direction of the base plate 100.

[0059] At least two flexible hinge mechanisms 200 utilize the elastic deformation of the flexible hinge to achieve tiny displacements, thereby meeting the requirements of high-precision automatic angle adjustment of the sample to be adjusted; at the same time, the motion drive component 400 is built into the flexible hinge mechanism 200 to obtain a compact displacement steering hinge. The compact displacement steering hinge is small in size and light in weight, and occupies little space when embedded in the detection equipment, thereby avoiding the detection equipment from being too large.

[0060] After the leveling device is embedded in the detection equipment, it needs to be connected with other components in the detection equipment; when the leveling device is too large and heavy, the space occupied by the leveling device is large, resulting in the space occupied by other components being compressed, which will affect the assembly and operation of other components. The compact displacement steering hinge of the embodiment of the present application is small in size and light in weight. On the premise of realizing the angle adjustment function of the leveling device, it can also minimize the impact of the leveling device on other components in the detection equipment.

[0061] The precise micro-displacement of the present application relies on the micro-deformation of the flexible hinge, and the flexible hinge is generally made of high-strength metal material, which means that a large output of the motion driver 400 is usually required to achieve the micro-deformation of the flexible hinge; the motion driver 400 of the embodiment of the present application is a built-in structure, which can maximize the utilization of the output displacement of the motion driver 400.

[0062] The bottom plate 100 is a rigid component to support other structures in the leveling device. The rigid component will not be elastically deformed by external forces. However, the large output of the motion driver 400 can easily cause deformation of adjacent rigid components, that is, deformation of the bottom plate 100. The bottom plate 100 cannot rebound after deformation, resulting in damage to the bottom plate 100 and the support portion on the bottom plate 100, which changes the height of the support portion. Each support portion will not be on the same reference, which is not conducive to the angle adjustment of the sample to be adjusted. The built-in structure of the embodiment of the present application can completely absorb the output displacement of the motion driver 400, avoid the force output by the motion driver 400 affecting the bottom plate 100 and the support portion, and effectively reduce the deformation of the bottom plate 100 and the support portion.

[0063] Among them, in the axial direction of the base plate 100, the built-in structure increases the contact area between the flexible hinge mechanism 200 and the base plate 100, so that the force output by the motion driving component 400 can be completely absorbed by the flexible hinge mechanism 200, avoiding the force output by the motion driving component 400 from affecting the base plate 100 and the support part, and effectively reducing the deformation of the base plate 100 and the support part.

[0064] At the same time, since the radial output displacement of the motion driver 400 is in a certain proportion to its own length, to achieve a large angle adjustment range, a large displacement output of the motion driver 400 is required, and its own length will increase accordingly. The built-in structure of the flexible hinge mechanism 200 can realize the conversion of radial displacement to axial displacement, achieve large displacement output, and do not increase the length of the motion driver 400.

[0065] Therefore, by integrating the motion drive component 400 into the flexible hinge mechanism 200, the overall structure is compactly integrated to obtain a compact displacement steering hinge, which can meet the requirements of small size and light weight while achieving high-precision automatic adjustment of a large range of angles; and improve the compatibility of the leveling device so that it can be better embedded in the detection equipment.

[0066] In one embodiment, the base plate 100 may include a disc 101 and at least two connecting plates 102, wherein the at least two connecting plates 102 are arranged at the same distance along the circumference of the outer circumference of the disc 101, and the at least two connecting plates 102 are connected to the outer circumference of the disc 101, and each connecting plate 102 is provided with a support portion.

[0067] It should be noted that the base plate 100 serves as a base for connecting with other devices in the detection equipment; to avoid excessive volume and weight of the base plate 100, the base plate 100 can be designed as a disk 101 and at least two connecting plates 102 connected to the outer wall of the disk 101, and a flexible hinge mechanism 200 is provided on the connecting plate 102.

[0068] At the same time, at least two connecting plates 102 are arranged at the same distance along the circumference of the disk 101, and there are at least two supporting parts under the sample to be adjusted. The heights of the at least two supporting parts are changed so that the heights of the at least two supporting parts are the same, or the heights of the at least two supporting parts are different, so as to achieve the purpose of angle adjustment of the sample to be adjusted.

[0069] In one embodiment, the bottom plate 100 may include three connecting plates 102 , and the three connecting plates 102 are arranged at the same interval along the circumference of the outer circumference of the disk 101 .

[0070] That is to say, there are three supporting parts under the sample to be adjusted. The heights of the three supporting parts are changed to make the three supporting parts the same, or the heights of the three supporting parts are made different, so as to achieve the purpose of angle adjustment of the sample to be adjusted; the leveling method of the three supporting parts can further improve the accuracy of the angle adjustment.

[0071] The base plate 100 may also include four connecting plates 102 or five connecting plates 102 to meet various angle adjustment requirements.

[0072] refer to Figure 2 In one embodiment, the leveling device further includes: a sample platform 300, the top of each flexible hinge mechanism 200 is used to support the sample platform 300, the sample to be adjusted is set on the sample platform 300, the sample to be adjusted tilts as the sample platform 300 tilts, and the purpose of adjusting the angle of the sample to be adjusted is achieved by adjusting the angle of the sample platform 300.

[0073] Since the shapes and sizes of the samples to be adjusted are different, by adding a sample platform, the leveling device can be applicable to various types of samples to be adjusted.

[0074] In one embodiment, the flexible hinge mechanism 200 includes: a first flexible hinge 201 and a second flexible hinge 202 stacked up and down along the axial direction of the base plate 100, and the first flexible hinge 201 is located below the second flexible hinge 202; along the axial direction of the base plate 100, the first flexible hinge 201 has a relative first top surface 2014 and a first bottom surface, the first bottom surface of the first flexible hinge 201 is also the bottom of the flexible hinge mechanism 200, and the first bottom surface of the first flexible hinge 201 is set on the support portion; along the axial direction of the base plate 100, the second flexible hinge 202 has a relative second top surface 2021 and a second bottom surface, the second bottom surface is in contact with the first top surface, the second top surface 2021 is also the top of the flexible hinge mechanism 200, and the second top surface 2021 is used to support the sample to be adjusted.

[0075] The first flexible hinge 201 and the second flexible hinge 202 stacked up and down can reduce the space occupied by the flexible hinge mechanism 200 in the radial direction. When the leveling device is embedded in the detection equipment, it can avoid the leveling device occupying more space of the detection equipment in the radial direction.

[0076] The installation chamber 210 is disposed in the first flexible hinge 201 ; along the axial direction of the base plate 100 , the installation chamber 210 has a first central axis, the second flexible hinge 202 has a second central axis, and the first central axis and the second central axis coincide with each other.

[0077] That is to say, the installation chamber 210 of the first flexible hinge 201 located at the bottom coincides with the central axis of the second flexible hinge 202 located at the top, so that the installation chamber 210 is located directly below the second flexible hinge 202, and the flexible hinge mechanism 200 is formed as a symmetrical bridge-type flexible structure, and the motion driving component 400 is built into the symmetrical bridge-type flexible structure, and by outputting radial displacement in the symmetrical bridge-type flexible structure, the symmetrical bridge-type flexible structure undergoes elastic deformation to realize the conversion of radial displacement into axial displacement; in the process of converting radial displacement into axial displacement, there is no need to increase the length of the motion driving component 400, thereby meeting the requirements of small volume and small weight.

[0078] It should be noted that, along the axial direction of the base plate 100 , the projection of the second flexible hinge 202 is located within the projection of the installation chamber 210 . When the installation chamber 210 elastically expands, it is ensured that the first flexible hinge 201 can apply force to various positions of the second flexible hinge 202 .

[0079] In one embodiment, the first flexible hinge 201 is an isosceles trapezoidal structure, which includes a first rectangular flexible member 2011, which is arranged on a support portion and has an installation chamber 210; the second flexible hinge 202 includes a second rectangular flexible member, one end of the second rectangular flexible member is connected to the first rectangular flexible member 2011, and the other end of the second rectangular flexible member is used to support the sample platform 300.

[0080] The first rectangular flexible member 2011 in the isosceles trapezoidal structure can undergo elastic deformation, so that the second rectangular flexible member located above the first rectangular flexible member 2011 can output axial displacement.

[0081] The isosceles trapezoidal structure also includes: a first oblique beam assembly 2012 and a second oblique beam assembly 2013. The first rectangular flexible member 2011 has a first side surface and a second side surface relative to each other along the radial direction of the disk 101. The first oblique beam assembly 2012 is arranged on the first side surface, and the second oblique beam assembly 2013 is arranged on the second side surface.

[0082] The first oblique beam assembly 2012 and the second oblique beam assembly 2013 in the isosceles trapezoidal structure have a connecting and fixing function, so that the flexible hinge mechanism 200 is fixedly connected to the support part, ensuring the accuracy of the angle adjustment of the sample to be adjusted.

[0083] It should be noted that the first oblique beam assembly 2012 and the second oblique beam assembly 2013 also have the function of increasing the contact area between the flexible hinge mechanism 200 and the support part, so that the force output by the motion driving part can be completely absorbed by the isosceles trapezoidal structure, avoiding the force output by the motion driving part from affecting the support part, and effectively reducing the deformation of the support part.

[0084] Through the design of the compact displacement steering hinge, the overall leveling device structure can achieve the following effects: the vertical mode of the overall structure is 183Hz, the angle adjustment accuracy of the sample to be adjusted is ≤1 arc second, the angle adjustment range of the sample to be adjusted is greater than 1 arc minute, the vertical height increment is ≤10mm, and the overall weight is ≤500g.

[0085] In one embodiment, the support portion may form a mounting groove, and the bottom of each flexible hinge mechanism 200 is disposed in a corresponding mounting groove.

[0086] Each flexible hinge mechanism 200 is embedded in the installation groove, which can improve the connection strength of the flexible hinge mechanism 200 on the connecting plate, ensure the installation stability, and prevent the flexible hinge mechanism from being separated from the connecting plate. At the same time, the flexible hinge mechanism can be directly connected to the installation groove, making the installation method more simplified.

[0087] In one embodiment, the first rectangular flexible member 2011 has a first bottom surface, the first oblique beam assembly 2012 has a second bottom surface, and the second oblique beam assembly 2013 has a third bottom surface, and the third bottom surface, the second bottom surface and the first bottom surface are all flush.

[0088] Among them, the bottom surface of the first rectangular flexible part 2011 is flush with the bottom surfaces of the two inclined beam assemblies, ensuring that the two inclined beam assemblies can increase the contact area between the flexible hinge mechanism 200 and the support part, so that the isosceles trapezoidal structure can completely absorb the output displacement of the motion driving part 400, and spread the reaction force of the motion driving part 400 on the support part, effectively reducing the deformation of the support part.

[0089] At the same time, the second bottom surface and / or the third bottom surface is further provided with a first connection hole 2015, and the mounting groove of the support portion is further provided with a second connection hole; the leveling device further includes a first connection member, and the first connection member is connected to the first connection hole 2015 and the second connection hole respectively. The flexible hinge mechanism 200 is fixedly connected to the mounting groove, and the connection strength of the flexible hinge mechanism 200 on the connecting plate 102 is further improved by the connection of the first connection member to the first connection hole 2015 and the second connection hole respectively, so as to prevent the flexible hinge mechanism 200 from being separated from the connecting plate 102, and ensure the installation stability of the flexible hinge mechanism 200.

[0090] In one embodiment, along the circumference of the disk 101 , the installation chamber 210 has a first opening and a second opening opposite to each other, and the first opening and the second opening are in communication.

[0091] Providing the first opening and the second opening on the installation cavity 210 can reduce the weight of the first flexible hinge 201 .

[0092] At the same time, the first opening is connected to the second opening, so that the installation chamber 210 can be exposed, which is convenient for the motion driving member 400 to be installed in the flexible hinge mechanism 200 during assembly; it is also convenient for technical personnel to perform subsequent maintenance.

[0093] In one embodiment, the installation chamber 210 has a first inner wall surface and a second inner wall surface which are opposite to each other along the radial direction of the disk 101, and the motion driving member 400 can output a first displacement along the radial direction of the disk 101, so that the two ends of the motion driving member 400 provide radial forces along the disk 101 to the first inner wall surface and the second inner wall surface respectively, so that the installation chamber 210 expands elastically.

[0094] The two ends of the motion driving member 400 provide radial forces to the first inner wall surface and the second inner wall surface of the disk 101 respectively, so that the installation chamber 210 is elastically expanded to achieve the conversion of radial displacement into axial displacement.

[0095] In one embodiment, the installation chamber 210 has a third inner wall surface 211, which intersects with the first inner wall surface and the second inner wall surface respectively, and the third inner wall surface is close to the support portion; a third connecting hole 2016 is provided on the third inner wall surface, and the motion driving member 400 has a fourth connecting hole; the leveling device also includes a second connecting member, which is respectively connected to the third connecting hole 2016 and the fourth connecting hole, so as to improve the installation stability of the motion driving member 400 in the installation chamber 210.

[0096] By connecting the second connecting member to the third connecting hole 2016 and the fourth connecting hole respectively, the connection strength of the flexible hinge mechanism 200 on the connecting plate 102 is further improved, thereby preventing the flexible hinge mechanism 200 from being separated from the connecting plate 102.

[0097] refer to Figure 1 and Figure 2 In one embodiment, the second top surface 2021 of the second flexible hinge 202 is used to support the sample platform 300, the second top surface 2021 of the second flexible hinge 202 is provided with a fifth connecting hole 2022, and the sample platform 300 to be adjusted has a sixth connecting hole 301; the leveling device also includes a third connecting member, which is respectively connected to the fifth connecting hole 2022 and the sixth connecting hole 301.

[0098] By connecting the third connecting member to the fifth connecting hole 2022 and the sixth connecting hole 301 respectively, the connection strength between the flexible hinge mechanism 200 and the sample platform 300 can be improved, the sample platform 300 can be prevented from detaching from the flexible hinge mechanism 200, and the angle adjustment accuracy of the sample to be adjusted can be improved.

[0099] An embodiment of the present application also provides a detection device, which includes the leveling device described above.

[0100] The detection device may be a photo-etching detection device, which is used to automatically adjust the angle of the graphic master so that the angle of the graphic master meets the detection requirements, facilitates the measurement of the size of the graphic master, and facilitates the detection and positioning of the graphic master.

[0101] The detection device also includes at least two auxiliary mounting parts, each of which is arranged on a corresponding support part, and each of which is provided with a displacement sensor, which is used to detect the second displacement in real time and send the second displacement to the control system. The control system controls the motion driving part 400 to work according to the second displacement.

[0102] Among them, the auxiliary mounting parts are used to install the displacement sensor, so that the displacement sensor can accurately measure the second displacement. The technicians can judge the angle of the current sample based on the second displacement measured by the displacement sensor, and make corresponding adjustments based on the angle of the current sample.

[0103] refer to Figure 3 In an embodiment of the present application, the detection equipment may further include a motion axis base 500 and a motion axis workpiece table 600, the motion axis base 500 is provided with a slide rail 501 extending along the first direction, the motion axis workpiece table 600 is slidably connected to the slide rail 501; the bottom plate 100 is fixedly connected to the motion axis workpiece table 600.

[0104] The base plate 100 can move along with the movement of the moving axis workpiece stage 600 so as to move the sample to different positions in the detection device for measurement, which is suitable for different measurement scenarios.

[0105] During the actual detection process, each support part maintains its own height unchanged, so each support part needs a certain maintenance force to ensure that the entire structure is not affected during the movement of the moving axis workpiece table 600.

[0106] In summary, an embodiment of the present application provides a leveling device and a detection device, the leveling device comprising: a base plate 100 and at least two flexible hinge mechanisms 200; the base plate 100 has at least two support portions, and the at least two support portions are arranged at the same distance along the circumference of the base plate 100; along the axial direction of the base plate 100, each flexible hinge mechanism 200 has a relative bottom and top, the bottom of each flexible hinge mechanism 200 is arranged on a corresponding support portion, and the top of each flexible hinge mechanism 200 is used to support the sample to be adjusted; the flexible hinge mechanism 200 has an installation chamber 210, and a motion driving member 400 is arranged in the installation chamber 210, and the motion driving member 400 can output a first displacement along the radial direction of the base plate 100 to make the installation chamber 210 elastically expand; when the installation chamber 210 elastically expands, the flexible hinge mechanism 200 can convert the first displacement output along the radial direction of the base plate 100 into a second displacement output along the axial direction of the base plate 100.

[0107] The flexible hinge mechanism 200 can utilize the elastic deformation of the flexible hinge to achieve tiny displacements, thereby meeting the requirements of high-precision automatic angle adjustment of the sample to be adjusted; at the same time, the motion drive component 400 is built into the flexible hinge mechanism 200 to obtain a compact displacement steering hinge. The compact displacement steering hinge is small in size and light in weight. When the above-mentioned compact displacement steering hinge is embedded in the detection equipment, the compact displacement steering hinge occupies less space.

[0108] At the same time, under the premise of realizing the angle adjustment function of the sample to be adjusted, the above-mentioned compact displacement steering hinge can also minimize the impact of the leveling device on other components in the detection equipment.

[0109] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A leveling device, characterized in that: include: a base plate and at least two flexible hinge mechanisms; The bottom plate has at least two support portions, and the at least two support portions are arranged at the same distance along the circumference of the bottom plate; Along the axial direction of the bottom plate, each of the flexible hinge mechanisms has a bottom and a top, each of the bottoms is arranged on a corresponding one of the supporting parts, and each of the tops is used to support the sample to be adjusted; The at least two flexible hinge mechanisms respectively have an installation chamber, wherein a motion driving member is disposed in the installation chamber, and the motion driving member is used to output a first displacement along the radial direction of the bottom plate to elastically expand the installation chamber; When the installation cavity is elastically expanded, the flexible hinge mechanism converts the first displacement output along the radial direction of the base plate into a second displacement output along the axial direction of the base plate.

2. The leveling device according to claim 1, characterized in that: The at least two flexible hinge mechanisms respectively include: a first flexible hinge and a second flexible hinge stacked up and down along the axial direction of the bottom plate, wherein the first flexible hinge is located below the second flexible hinge; The first flexible hinge is arranged on the supporting portion, and the second flexible hinge is used to support the sample to be adjusted; The mounting chamber is disposed in the first flexible hinge; Along the axial direction of the base plate, the installation chamber has a first central axis, the second flexible hinge has a second central axis, and the first central axis and the second central axis coincide with each other.

3. The leveling device according to claim 2, characterized in that: The first flexible hinge is an isosceles trapezoidal structure, which includes a first rectangular flexible member, a first oblique beam assembly and a second oblique beam assembly, the installation chamber is arranged in the first rectangular flexible member, the first rectangular flexible member has a first side surface and a second side surface opposite to each other along the radial direction of the bottom plate, the first oblique beam assembly is arranged on the first side surface, and the second oblique beam assembly is arranged on the second side surface; The second flexible hinge comprises a second rectangular flexible member, one end of the second rectangular flexible member is connected to the first rectangular flexible member, and the other end of the second rectangular flexible member is used to support the sample to be adjusted.

4. The leveling device according to claim 1, characterized in that: The bottom plate comprises a circular disk and at least two connecting plates, wherein the at least two connecting plates are arranged at the same distance along the circumference of the circular disk, and the at least two connecting plates are respectively connected to the outer peripheral wall of the circular disk; The supporting portion is disposed on each of the connecting plates, and the supporting portion forms a mounting groove. The bottom of each of the flexible hinge mechanisms is disposed in a corresponding mounting groove.

5. The leveling device according to claim 3, characterized in that: The first rectangular flexible member has a first bottom surface, the first oblique beam assembly has a second bottom surface, and the second oblique beam assembly has a third bottom surface, and the third bottom surface and the second bottom surface are all flush with the first bottom surface; A first connection hole is provided on the second bottom surface and / or the third bottom surface, and a second connection hole is provided on the support portion; The leveling device further includes a first connecting member, and the first connecting member is connected to the first connecting hole and the second connecting hole respectively.

6. The leveling device according to any one of claims 1 to 3, characterized in that: The installation chamber has a first opening and a second opening opposite to each other along the circumference of the bottom plate, and the first opening is in communication with the second opening.

7. The leveling device according to any one of claims 1 to 3, characterized in that: The installation chamber has a first inner wall surface and a second inner wall surface which are radially opposite to each other along the bottom plate. When the motion driving member outputs the first displacement radially along the bottom plate, the two ends of the motion driving member respectively provide radial forces along the bottom plate to the first inner wall surface and the second inner wall surface.

8. The leveling device according to claim 7, characterized in that: The installation chamber has a third inner wall surface, the third inner wall surface intersects with the first inner wall surface and the second inner wall surface respectively, and the third inner wall surface is close to the support portion; The third inner wall surface is provided with a third connection hole, and the motion driving member has a fourth connection hole; The leveling device further includes a second connecting member, and the second connecting member is connected to the third connecting hole and the fourth connecting hole respectively.

9. The leveling device according to any one of claims 1 to 3, characterized in that: The top surface of the second flexible hinge is used to support a sample platform, on which the sample to be adjusted is arranged; The top surface is provided with a fifth connection hole, and the sample platform has a sixth connection hole; The leveling device further includes a third connecting member, and the third connecting member is connected to the fifth connecting hole and the sixth connecting hole respectively.

10. A detection device, characterized in that: The invention comprises the leveling device according to any one of claims 1 to 9.

11. The detection device according to claim 10, characterized in that: The detection device further comprises at least two auxiliary mounting parts, each of which is arranged on a corresponding one of the supporting parts, and each of the auxiliary mounting parts is provided with a displacement sensor, and the displacement sensor is used to detect the second displacement.

12. The detection device according to claim 10, characterized in that: The detection device further comprises a motion axis base and a motion axis workpiece table, wherein the motion axis base is provided with a slide rail extending along a first direction, and the motion axis workpiece table is slidably connected to the slide rail; The bottom plate is fixedly connected to the moving axis workpiece table.

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