Particle indentation focusing mechanism and focusing method

Abstract

The invention discloses a particle indentation focusing mechanism and a focusing method. The particle indentation focusing mechanism comprises a line scanning driving assembly and a detection assembly, and the detection assembly is movably connected to the line scanning driving assembly; the detection assembly comprises a distance measuring device and a particle detection camera which are arranged in parallel in the particle indentation detection moving direction, the distance measuring device is located in front of the moving direction of the particle detection camera, and the view center of the particle detection camera deviates from a distance measuring point on the particle indentation. According to the method, the moving track curve of the particle indentation can be obtained through high-speed focusing, then line scanning photographing is carried out through automatic following of the track, the focusing speed is high, the focusing error is small, the image definition is improved, and interference caused by the communication delay problem can be avoided.

Description

Technical Field

[0001] The invention relates to a particle indentation focusing mechanism and a focusing method. Background Art

[0002] Anisotropic conductive adhesive is widely used in the packaging of various electronic components. Anisotropic conductive adhesive is composed of conductive particles and insulating adhesive materials. Its special structure enables it to have the functions of conductivity, isolation and adhesion.

[0003] Conductive particles are a component with conductive properties contained in anisotropic conductive adhesive film. Conductive particles are used to connect the electrodes between the chip and the substrate, while preventing adjacent electrodes from conducting. After the anisotropic conductive adhesive is attached to the upper object and the lower plate for precise alignment and pressing, the insulating adhesive is cured after heating and pressurizing for a period of time, forming a stable structure with vertical conduction and lateral insulation. However, when the anisotropic conductive adhesive is under pressure, uneven or insufficient pressure will lead to an insufficient number of deformed conductive particles that can conduct between the upper object and the lower plate, resulting in poor conductivity; or when the density of the conductive particles is unevenly distributed, the conductivity will also be poor. Therefore, in order to avoid the above situation, when the anisotropic conductive adhesive film is adhered, it is usually necessary to perform indentation detection on the conductive particles and obtain the indentation image to determine the conductivity.

[0004] In the prior art, a line scan camera is combined with a triangulation sensor, and the sensor is synchronously focused when the line scan camera takes a picture, for indentation detection. Since the synchronous focus is performed when taking a picture, the communication delay problem cannot be avoided, resulting in the picture taking point and the sensor focus point not being in the same position, and the image is not clear.

[0005] At the same time, due to the slow focusing speed and large error, the faster the speed, the less clear the image will be. Summary of the invention

[0006] The purpose of the present invention is to provide a technical solution for a particle indentation focusing mechanism and a focusing method to address the deficiencies in the prior art. Not only can the moving trajectory curve of the particle indentation be obtained through high-speed focusing, and then the moving trajectory line can be automatically scanned and photographed. The focusing speed is fast, the focusing error is small, the image clarity is improved, and the interference caused by communication delay problems can be avoided.

[0007] In order to solve the above technical problems, the present invention adopts the following technical solutions: A particle indentation focusing mechanism, comprising A line scanning driving component and a detection component, wherein the detection component is movably connected to the line scanning driving component; Features: The detection component includes a distance measuring device and a particle detection camera which are arranged in parallel along the moving direction of the particle indentation detection. The distance measuring device is located in front of the moving direction of the particle detection camera, and the field center of the particle detection camera is offset from the distance measuring point on the particle indentation. Through the design of the above structure, not only can the moving trajectory curve of the particle indentation be obtained through high-speed focusing, and then the picture can be scanned by automatically following the trajectory line, with fast focusing speed and small focusing error, which improves the clarity of the image and avoids interference caused by communication delay problems.

[0008] Furthermore, the ranging device moves along the moving direction of the particle indentation detection, and after obtaining the moving trajectory, the particle detection camera takes pictures along the moving trajectory to generate an image, or the ranging device and the particle detection camera move along the moving direction of the particle indentation detection while obtaining the trajectory and taking pictures to generate an image, thereby realizing automatic line scanning focusing on the particle indentation.

[0009] Furthermore, the distance measuring device and the particle detection camera are both connected to the line scanning drive assembly through a height adjustment assembly, which is used to adjust the height position of the distance measuring device and the particle detection camera to meet the distance adjustment between the distance measuring device and the particle detection camera and the focusing object, thereby improving the focusing accuracy.

[0010] Furthermore, the height adjustment component includes a mounting frame, an adjustment platform and a motor. Support bars are arranged in parallel on the mounting frame. A baffle is arranged between the two support bars. The motor is arranged on the mounting frame. The motor is connected to the baffle through a screw. The adjustment platform is connected to the screw through a moving block. A sliding component is arranged between the adjustment platform and the support bars. The screw is driven to rotate by the motor, and the adjustment platform can be driven to move in a vertical direction through the moving block, thereby meeting the height adjustment requirements of the ranging device and the particle detection camera. The baffle improves the stability and reliability of the screw during rotation.

[0011] Furthermore, a mounting bar is provided on the adjustment table for controlling the parallelism of the distance measuring device and the particle detection camera.

[0012] Furthermore, the line scanning drive assembly includes a transverse movement module and a transverse movement platform, and the detection assembly is connected to the transverse movement module through the transverse movement platform to drive the detection assembly to move horizontally along the transverse movement module.

[0013] A focusing method of a particle indentation focusing mechanism, characterized in that: the focusing mechanism as described above is adopted, and the following steps are included: S1, obtain movement trajectory; S2, obtaining ranging data along the moving trajectory; S3, taking photos according to the ranging data to generate images, and then post-processing; S4, automatic line scan to complete focusing.

[0014] The focusing method has simple steps. It can not only obtain the moving trajectory curve of the particle indentation through high-speed focusing, but also perform curve smoothing according to the curve fitting algorithm, and then automatically follow the trajectory line to scan and generate images. It has fast focusing speed, small focusing error, improved image clarity, and can avoid interference caused by communication delay problems. The focusing speed can reach 400mm / s, the focusing error is within 2μm, and the image is clearer.

[0015] Furthermore, the post-processing in step S3 includes first performing Hampel filtering and then performing low-pass filtering. This filtering method first removes outliers and then smoothes the results, which can greatly reduce interference factors. Hampel filtering is used to detect and process outliers in the data, and low-pass filtering is used to smooth the data. The current data point is combined with the smoothing result of the previous data point to reduce rapid changes in the data.

[0016] Further, the Hampel filter specifically includes the following steps: 3.1a Set the window size windowSize and threshold threshold; 3.1b For each curve data i, create a distances list containing the distances of other data points in the window for calculating the median and MAD; 3.1c Calculate the median and MAD within the window; 3.1d Calculate the Hampel value and detect outliers: Hampel value hampel = threshold * mad, determine whether the difference between the distance of the current data point dataPoints[i].Distance and the median of the window exceeds the Hampel value. If so, it is an outlier. 3.1e replaces outliers with the median within the window.

[0017] This method determines which points are outliers based on the median and median absolute difference (MAD) of the data and replaces them with the median of the data within the window.

[0018] Further, the low-pass filtering specifically includes the following steps: 3.2a Initialization: Use the distance of the first data point as the initial smoothing value and add it to the result list smoothedData, smoothedDistance 0 =Distance 0 ; 3.2b Iterative smoothing: For the i-th data point, calculate its smooth distance: smoothedDistance i =α* Distance i+(1-α) * smoothedDistance i-1 , Among them: α is the smoothing factor, which controls the weight of the current data point and the previous smoothing value; Distance i is the original distance value of the i-th data point; smoothedDistance i is the smoothed distance value of the i-th data point; 3.2c Add to smoothed dataset: Add each smoothed point to the result list smoothedData.

[0019] The present invention has the following beneficial effects due to the adoption of the above technical solution: 1. The focusing mechanism and focusing method of the present invention can not only obtain the moving trajectory curve of the particle indentation through high-speed focusing, and then take pictures by automatically following the trajectory line, but also have fast focusing speed, small focusing error, and improved image clarity, and can avoid interference caused by communication delay problems.

[0020] 2. The filtering processing method of the present invention first removes outliers and then smoothes the results, which can greatly reduce interference factors. Hampel filtering is used to detect and process outliers in the data, and low-pass filtering is used to smooth the data. The current data point is combined with the smoothing result of the previous data point to reduce rapid changes in the data. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The present invention will be further described below in conjunction with the accompanying drawings: Figure 1 It is a structural schematic diagram of a particle indentation focusing mechanism and a focusing method of the present invention; Figure 2 It is a structural schematic diagram of the detection component in the present invention; Figure 3 It is a schematic diagram of the connection between the adjustment platform and the mounting frame in the present invention; Figure 4 is a flow chart of the focusing method of the present invention; Figure 5 A two-dimensional coordinate diagram when focusing in the present invention; Figure 6 It is a schematic diagram of Hampel filtering in the present invention.

[0022] In the figure: 1-line scanning drive assembly; 101-transverse movement module; 102-transverse movement platform; 2-detection component; 201-mounting frame; 202-adjustment table; 203-particle detection camera; 204-distance measuring device; 205-camera light source; 206-motor; 207-mounting bar; 208-baffle; 209-slide rail; 210-support bar. DETAILED DESCRIPTION

[0023] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0024] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only embodiments of a part of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0025] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions.

[0026] like Figures 1 to 3 As shown, a particle indentation focusing mechanism of the present invention comprises a line scanning drive component 1 and a detection component 2, wherein the detection component 2 is movably connected to the line scanning drive component 1.

[0027] The line scanning driving assembly 1 includes a transverse moving module 101 and a transverse moving platform 102 . The detection assembly 2 is connected to the transverse moving module 101 via the transverse moving platform 102 , and is used to drive the detection assembly 2 to move horizontally along the transverse moving module 101 .

[0028] The detection assembly 2 includes a distance measuring device 204 and a particle detection camera 203 arranged in parallel along the moving direction of the particle indentation detection. The distance measuring device 204 is preferably a laser rangefinder. The distance measuring device 204 is located in front of the moving direction of the particle detection camera 203. The center of the field of view of the particle detection camera 203 is offset from the distance measuring point on the particle indentation, and the offset distance is 1 cm.

[0029] The distance measuring device 204 moves along the moving direction of the particle indentation detection, obtains the moving trajectory, and then uses the particle detection camera 203 to take pictures along the moving trajectory to generate an image, or the distance measuring device 204 and the particle detection camera 203 move along the moving direction of the particle indentation detection while obtaining the trajectory and taking pictures to generate an image, thereby realizing automatic line scanning focusing on the particle indentation.

[0030] Through the design of the above structure, not only can the moving trajectory curve of the particle indentation be obtained through high-speed focusing, and then the picture can be taken by automatically following the trajectory line scanning, the focusing speed is fast, the focusing error is small, the clarity of the image is improved, and the interference caused by communication delay problems can be avoided.

[0031] The distance measuring device 204 and the particle detection camera 203 are both connected to the line scanning drive component 1 through a height adjustment component, which is used to adjust the height position of the distance measuring device 204 and the particle detection camera 203 to meet the distance adjustment between the distance measuring device 204 and the particle detection camera 203 and the focusing object, thereby improving the focusing accuracy.

[0032] The height adjustment component includes a mounting frame 201, an adjustment platform 202 and a motor 206. Support bars 210 are arranged in parallel on the mounting frame 201. A baffle 208 is arranged between the two support bars 210. The motor 206 is arranged on the mounting frame 201. The motor 206 is connected to the baffle 208 through a screw. The adjustment platform 202 is connected to the screw through a moving block. A sliding component is arranged between the adjustment platform 202 and the support bars 210. The screw is driven to rotate by the motor 206, and the adjustment platform 202 can be driven to move in a vertical direction through the moving block, thereby meeting the height adjustment requirements of the ranging device 204 and the particle detection camera 203. The baffle 208 improves the stability and reliability of the screw when rotating.

[0033] The sliding assembly includes a slide rail 209 and a slider. The slide rail 209 is arranged on the support bar 210, and the slider is arranged on the side of the adjustment platform 202 close to the mounting frame 201. The slider slides along the slide rail 209. The design of the slide rail 209 and the slider can improve the stability and reliability of the adjustment platform 202 when moving, and improve the adjustment accuracy.

[0034] A mounting bar 207 is provided on the adjustment platform 202 for controlling the parallelism of the distance measuring device 204 and the particle detection camera 203 .

[0035] The particle detection camera 203 is connected to a camera light source 205 .

[0036] like Figure 4 and Figure 5 As shown, a focusing method of a particle indentation focusing mechanism of the present invention is provided, which adopts the focusing mechanism as described above and comprises the following steps: S1. Obtaining the moving trajectory: The line scanning driving component 1 drives the detection component 2 to move along the X direction, which is the moving direction of the particle indentation detection. The distance measuring device 204 reaches the starting point X of the object to be focused. 0 , the interval between the distance measuring device 204 and the particle detection camera 203 is L, the distance measuring height is Z, the distance measuring device 204 moves along the particle indentation detection moving direction, and starts to obtain the moving trajectory, which is a curve, a point or a curve generated by fitting; S2, obtaining distance measurement data along the moving track: the distance measurement device 204 moves along the X direction to the X direction. 1 , X 1 The focus point is the end point of the object. At this time, the focus object ends and X is obtained. 0 To X 1 Distance measurement data with constant Z on displacement; S3, take a photo based on the distance measurement data to generate an image, and then perform post-processing: translate the distance measurement data along the X direction by L, and perform X on all points n -L, the reference point is changed from the distance measuring device 204 to the particle detection camera 203, and then post-processing is performed, and the interval of the data points along the X direction is 0.1 mm; Post-processing includes first performing Hampel filtering and then performing low-pass filtering. This filtering method first removes outliers and then smoothes the results, which can greatly reduce interference factors. Hampel filtering is used to detect and process outliers in the data, and low-pass filtering is used to smooth the data. The current data point is combined with the smoothed result of the previous data point to reduce rapid changes in the data.

[0037] like Figure 6 As shown, Hampel filtering specifically includes the following steps: 3.1a Set the window size windowSize and threshold threshold; 3.1b For each curve data i, create a distances list containing the distances of other data points in the window for calculating the median and MAD; 3.1c Calculate the median and MAD within the window; 3.1d Calculate the Hampel value and detect outliers: Hampel value hampel = threshold * mad, determine whether the difference between the distance of the current data point dataPoints[i].Distance and the median of the window exceeds the Hampel value. If so, it is an outlier. 3.1e replaces outliers with the median within the window.

[0038] This method determines which points are outliers based on the median and median absolute difference (MAD) of the data and replaces them with the median of the data within the window.

[0039] The low-pass filtering specifically includes the following steps: 3.2a Initialization: Use the distance of the first data point as the initial smoothing value and add it to the result list smoothedData, smoothedDistance 0 =Distance 0 ; 3.2b Iterative smoothing: For the i-th data point, calculate its smoothing distance: smoothedDistance i =α* Distance i +(1-α) * smoothedDistance i-1 , Among them: α is the smoothing factor, which controls the weight of the current data point and the previous smoothing value; Distance i is the original distance value of the i-th data point; smoothedDistance i is the smoothed distance value of the i-th data point; 3.2c Add to smoothed dataset: Add each smoothed point to the result list smoothedData.

[0040] S4, automatic line scanning to complete focusing: the line scanning drive component 1 drives the particle detection camera 203 to move along the X direction to the starting point X of the focus object 0 , this is the first point of the curve data. When both the X and Z directions reach the first point, calculate the X and Z values ​​of the next point. Calculate the movement speed in both directions through the curve data and time, so that it reaches the X and Z directions at the same time. 1 , focus is completed.

[0041] The focusing method has simple steps. It can not only obtain the moving trajectory curve of the particle indentation through high-speed focusing, but also perform curve smoothing according to the curve fitting algorithm, and then automatically follow the trajectory line to scan and generate images. It has fast focusing speed, small focusing error, improved image clarity, and can avoid interference caused by communication delay problems. The focusing speed can reach 400mm / s, the focusing error is within 2μm, and the image is clearer.

[0042] The above are only specific embodiments of the present invention, but the technical features of the present invention are not limited thereto. Any simple changes, equivalent replacements or modifications made based on the present invention to achieve basically the same technical effects are all included in the protection scope of the present invention.

Claims

1. A particle indentation focusing mechanism, comprising A line scanning drive component and a detection component, wherein the detection component is movably connected to the line scanning drive component; Features: The detection component includes a distance measuring device and a particle detection camera which are arranged in parallel along the moving direction of the particle indentation detection. The distance measuring device is located in front of the moving direction of the particle detection camera, and the field center of the particle detection camera is offset from the distance measuring point on the particle indentation.

2. A particle indentation focusing mechanism according to claim 1, characterized in that: The distance measuring device moves along the moving direction of the particle indentation detection, and after obtaining the moving trajectory, the particle detection camera takes pictures along the moving trajectory to generate an image, or the distance measuring device and the particle detection camera move along the moving direction of the particle indentation detection while obtaining the trajectory and taking pictures to generate an image, thereby realizing automatic line scanning focusing on the particle indentation.

3. A particle indentation focusing mechanism according to claim 1, characterized in that: The distance measuring device and the particle detection camera are both connected to the line scanning driving component through a height adjustment component, which is used to adjust the height positions of the distance measuring device and the particle detection camera.

4. A particle indentation focusing mechanism according to claim 3, characterized in that: The height adjustment assembly includes a mounting frame, an adjustment platform and a motor. The mounting frame is provided with support bars in parallel, a baffle is provided between two support bars, the motor is provided on the mounting frame, the motor is connected to the baffle through a screw, the adjustment platform is connected to the screw through a moving block, and a sliding assembly is provided between the adjustment platform and the support bars.

5. A particle indentation focusing mechanism according to claim 4, characterized in that: The adjustment platform is provided with a mounting bar for controlling the parallelism of the distance measuring device and the particle detection camera.

6. A particle indentation focusing mechanism according to claim 1, characterized in that: The line scanning driving assembly includes a transverse moving module and a transverse moving platform. The detection assembly is connected to the transverse moving module via the transverse moving platform to drive the detection assembly to move horizontally along the transverse moving module.

7. A focusing method for a particle indentation focusing mechanism, characterized in that: The focusing mechanism according to any one of claims 1 to 6 comprises the following steps: S1, obtain movement trajectory; S2, acquiring ranging data along the moving trajectory; S3, taking photos according to the distance measurement data to generate an image, and then performing post-processing; S4, automatic line scan to complete focusing.

8. The focusing method of a particle indentation focusing mechanism according to claim 7, characterized in that: The post-processing in step S3 includes first performing Hampel filtering and then performing low-pass filtering.

9. The focusing method of a particle indentation focusing mechanism according to claim 8, characterized in that: The Hampel filtering specifically includes the following steps: 3.1a Set the window size windowSize and threshold threshold; 3.1b For each curve data i, create a distances list containing the distances of other data points in the window for calculating the median and MAD; 3.1c Calculate the median and MAD within the window; 3.1d Calculate the Hampel value and detect outliers: Hampel value hampel = threshold * mad, determine whether the difference between the distance of the current data point dataPoints[i].Distance and the median of the window exceeds the Hampel value. If so, it is an outlier. 3.1e replaces outliers with the median within the window.

10. The focusing method of a particle indentation focusing mechanism according to claim 8, characterized in that: The low-pass filtering specifically comprises the following steps: 3.2a Initialization: Use the distance of the first data point as the initial smoothing value and add it to the result list smoothedData, smoothedDistance0=Distance0; 3.2b Iterative smoothing: For the i-th data point, calculate its smooth distance: smoothedDistance i =α* Distance i +(1-α) * smoothedDistance i-1 , Among them: α is the smoothing factor, which controls the weight of the current data point and the previous smoothing value; Distance i is the original distance value of the i-th data point; smoothedDistance i is the smoothed distance value of the i-th data point; 3.2c Add to smoothed dataset: Add each smoothed point to the result list smoothedData.

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