Embedded nut and device

Abstract

The invention provides an embedded nut which fully takes into account cutting slag countermeasures. The insert nut has a substantially cylindrical shape, and has a threaded portion and a plurality of recessed portions (160) formed on an outer surface portion (150), the recessed portions (160) accommodating cutting slag generated when an object to be embedded is press-fitted in a state in which the insert nut body is screwed by the threaded portion.

Description

Technical Field

[0001] The present invention relates to an embedded nut and a device, and more particularly to an embedded nut that can be embedded in various resin products used in semiconductor processing devices, vehicles, etc., and various devices such as semiconductor processing devices, vehicle devices, etc. having an embedding object for the embedded nut to be embedded. Background Art

[0002] Patent Document 1 discloses an embedded nut which is cylindrical in shape, has a tapping screw portion on the outer peripheral surface, has an internal thread portion on the inner peripheral surface, and is buried in plastic.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 9-96308 Summary of the invention

[0006] Technical problem to be solved by the invention

[0007] However, the insert nut disclosed in Patent Document 1 generates cutting debris when the insert nut is press-fitted in a state where the insert nut is screwed onto a resin molded product (plastic).

[0008] The embedded nut can be used in a device such as a semiconductor wafer processing device that must operate in a clean environment. A grinding device can be cited as such a device. The grinding device has a platen (plant) for holding a semiconductor wafer and a pad connected to the platen to prevent damage to the semiconductor wafer. The embedded nut can be used to connect them.

[0009] When cutting slag remains in the gap between the embedded nut and the resin molded product, the cutting slag may appear on the pad due to vibration during use of the semiconductor wafer processing device. The cutting slag adheres to the semiconductor wafer and hinders the desired semiconductor wafer processing. Therefore, if sufficient countermeasures are not taken against the cutting slag, there is a problem that the devices that can use the embedded nut are limited.

[0010] Therefore, the technical problem of the present invention is to provide an embedded nut that fully considers the countermeasures against cutting slag.

[0011] Solutions to technical problems

[0012] In order to solve the above technical problems, the embedded nut of the present invention is roughly cylindrical in shape, and has an external thread portion and multiple recesses on the outer side surface. The multiple recesses can accommodate the cutting slag generated when the embedded nut body is pressed into the embedded object by screwing it through the external thread portion.

[0013] A tapered portion may be formed adjacent to at least one end of the outer surface portion and gradually tapered from the base end toward the tip end.

[0014] A flange portion such as a flange having an annular shape may be integrally provided at one end portion of the outer surface portion.

[0015] Furthermore, the device of the present invention may include an embedding object for embedding any of the above-mentioned embedded nuts. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic perspective view of the insert nut 100 according to the first embodiment of the present invention.

[0017] Figure 2 yes Figure 1 A front view of the embedded nut 100 is shown.

[0018] Figure 3 yes Figure 1 A right side view of the embedded nut 100 is shown.

[0019] Figure 4 yes Figure 1 A left side view of the embedded nut 100 is shown.

[0020] Figure 5 yes Figure 1 A top view of the insert nut 100 is shown.

[0021] Figure 6 yes Figure 1 A bottom view of the insert nut 100 is shown.

[0022] Figure 7 yes Figure 1 A rear view of the insert nut 100 is shown.

[0023] Figure 8 It is shown Figure 1 1 is a perspective view of a modified example of the embedded nut 100 shown.

[0024] Fig. 9 It is shown Figure 8 A perspective view of another modified example of the embedded nut 100 is shown.

[0025] Fig.10 It is shown Figure 11 is a perspective view of another modified example of the insert nut 100 shown.

[0026] Fig.11 This is a schematic perspective view showing an embedded nut 100 according to a second embodiment of the present invention.

[0027] Fig.12 It is shown Fig.11 FIG. 2 is a diagram showing a modified example of the embedded nut 100 shown in FIG.

[0028] Fig.13 It is shown Fig.11 FIG. 2 is a diagram showing a modified example of the embedded nut 100 shown in FIG.

[0029] Description of Reference Numerals

[0030] 100…Inserted nut

[0031] 110 ... first end

[0032] 120…Second end

[0033] 130 ... first tapered portion

[0034] 140…Second tapered portion

[0035] 150…Lateral face

[0036] 160…concave

[0037] 161…First recess

[0038] 162…Second recess

[0039] 163…Third recess

[0040] 164…Fourth recess DETAILED DESCRIPTION

[0041] Hereinafter, an embedded nut 100 according to an embodiment of the present invention will be described with reference to the accompanying drawings. In the drawings, the same parts are denoted by the same reference numerals.

[0042] (Implementation Method 1)

[0043] Figure 1 This is a schematic perspective view showing the insert nut 100 according to the first embodiment of the present invention. Figure 2 It is shown Figure 1 A front view of the embedded nut 100 is shown. Figure 3 It is shown Figure 1 A right side view of the embedded nut 100 is shown. Figure 4 It is shown Figure 1 A left side view of the embedded nut 100 is shown. Figure 5 It is shown Figure 1 A top view of the insert nut 100 is shown. Figure 6 It is shown Figure 1 A bottom view of the insert nut 100 is shown. Figure 7 It is shown Figure 1 A rear view of the insert nut 100 is shown.

[0044] It should be noted that, for each part of the embedded nut 100 described below, Figure 1 The numbers are marked in Figure 2 to Figure 7 Letter symbols are used to indicate dimensions as described below.

[0045] Figure 1 The embedded nut 100 shown in the figure is generally cylindrical in shape. The embedded nut 100 is a nut that can be embedded in a resin molded product or the like as an embedding object. Specifically, a circular hole with an inner diameter slightly smaller than the outer diameter of the embedded nut 100 is formed in the embedding object, and the embedded nut 100 can be embedded by being screwed to the circular hole.

[0046] The embedded nut 100 can be made of any material, for example, iron, aluminum, brass, stainless steel, free-cutting steel, titanium, etc., provided, of course, that the hardness of the embedded nut 100 is higher than the hardness of the embedded object.

[0047] Figure 1 In the embedded nut 100 shown in FIG. 1 , the first end 110 is located at one end, and the second end 120 is located at the other end. The first end 110 and the second end 120 can be as shown in FIG. Figure 1 In this case, the insert nut 100 can be screwed into the circular hole of the embedding object from either the first end portion 110 or the second end portion 120 .

[0048] Here, the embedded nut is a type of nut that has an annular flange portion that extends in the circumferential direction relative to the embedded nut body and is itself provided integrally at one of both ends. Figure 1 The embedded nut 100 may also be provided with a flange portion on any one of the first end portion 110 and the second end portion 120 .

[0049] Of course, in the case of an embedded nut with a flange, it is impossible to screw the flange to the circular hole of the embedded object. However, it is possible to prevent the cutting slag from the inner wall of the circular hole generated when the embedded nut is screwed to the circular hole of the embedded object from appearing on the surface of the embedded object due to vibration of the embedded object during use.

[0050] In addition, the first tapered portion 130 and the second tapered portion 140 are formed adjacent to the first end portion 110 and the second end portion 120 and gradually become thinner from their base ends toward their top ends. Therefore, it is easy to align the position of the embedded nut 100 with the circular hole of the embedding object.

[0051] It should be noted that it is not necessary to form one or both of the first tapered portion 130 and the second tapered portion 140. In particular, when a flange portion is provided at either the first end portion 110 or the second end portion 120, a tapered portion need not be formed on the flange portion side.

[0052] The outer surface portion 150 is located between the first tapered portion 130 and the second tapered portion 140. For example, as is well known, a thread cutting process such as cutting is performed on the outer surface portion 150 to form an external thread portion consisting of a thread tooth and a thread groove. It should be noted that an internal thread portion necessary for threading with a screw (not shown) is formed on the inner cylinder side of the embedded nut 100 by rolling or the like.

[0053] A plurality of recesses 160 are formed between the first tapered portion 130 and the second tapered portion 140 of the outer surface portion 150 . The recesses 160 receive resin shavings in the circular hole generated when the insert nut 100 is screwed into the circular hole of the embedding target.

[0054] It should be noted that the concave portion 160 is a general term for the first concave portion 161, the second concave portion 162, ..., and ... Figure 1 The second recess 162 , the fourth recess 164 , and the sixth recess 166 among the six recesses 160 are shown in .

[0055] The number, position, size, range, and shape of the recesses 160 are not limited, as long as the embedded nut 100 has a tensile strength that does not allow it to fall out of the circular hole and has a volume sufficient to accommodate the cutting slag. Of course, the cutting slag does not necessarily have to be accommodated in the recesses 160, but can also be accommodated in the gap between the thread groove of the external thread portion formed on the outer side surface 150 near the recess 160 and the circular hole.

[0056] The embedded nut 100 of this embodiment is designed such that the total volume of the gap and the recess 160 (gap volume and hole volume) is approximately 1.3 times or more the amount of cutting slag generated. In addition, although the embedded nut 100 has a tensile strength corresponding to its size, the tensile strength is higher than that of existing commercial products. It should be noted that although Figure 1 The recessed portions 160 of a substantially cylindrical shape are shown in FIG. 1 and FIG. 2 , but their sizes and shapes do not necessarily have to be the same.

[0057] in addition, Figure 1The recessed portions 160 are formed at equal intervals, for example, three, for a total of six, on the first tapered portion 130 side and the second tapered portion 140 side, respectively, but such intervals are not essential. The recessed portions 160 can be formed, for example, by preparing holes through cutting with a drill or the like.

[0058] Figure 1 The embedded nut 100 shown in the figure has a plurality of predetermined sizes according to the size of the screw to be screwed therewith, etc. The sizes of the embedded nut 100 and its parts are exemplified for the case of being used for a so-called M4×0.7 type screw, but are not limited thereto, and may be the following sizes.

[0059] The embedded nut 100 has the following characteristics: Overall height a: 6.0 mm ( Figure 2 ),

[0060] The first end portion 110 to the second end portion 120 are: diameter c: 5.70 mm ( Figure 2 ), height (guide length) h: 0.20mm ( Figure 3 ),

[0061] The first tapered portion 130 to the second tapered portion 140 are: the median value g of the length from the base end to the tip end (the length of the guide angle portion) is: 0.40 mm ( Figure 3 ), the angle (lead angle) α relative to the axial direction of the embedded nut 100: 15.0° ( Figure 3 ),

[0062] The outer surface portion 150 has an outer diameter b of 6.50 mm ( Figure 5 ), inner diameter c: 5.70mm( Figure 2 ), thread width d: 0.45mm (same as thread height) ( Figure 3 ), thread top spacing e: 0.80mm( Figure 3 ), thread groove spacing f: 0.35mm( Figure 3 ),

[0063] The concave portion 160 is: Each diameter (aperture) i: 2.10 mm ( Figure 7 ), the depth from each thread height to each hole bottom (hole depth) j is 0.90 mm ( Figure 7 ), the thickness from the bottom of each hole to the inner wall (hole position thickness) is 0.35mm, and the total volume is 8.00mm 3 .

[0064] When the embedded nut 100 under such conditions is screwed into a resin selected as polyphenylene sulfide (manufactured by Mitsubishi Chemical Advanced Materials: Tecron 1000PPS Plate) and a 6.0 mm diameter round hole is opened in the resin, the volume of the generated cutting slag is about 4.36 mm. 3 .

[0065] The total volume of the recess 160 is more than 1.83 times the amount of cutting debris generated, so the gap between the thread groove of the external thread portion formed by the recess 160 and the outer side surface 150 near it and the circular hole can fully accommodate the cutting debris. In addition, the tensile strength of the embedded nut 100 that meets the dimensions of each part illustrated above is about 3500N.

[0066] Therefore, even in a field requiring a clean use environment such as a semiconductor wafer processing device, the insert nut 100 of the present embodiment does not allow cutting residues to adhere to the semiconductor wafer during use.

[0067] Figure 8 It is shown Figure 1 1 is a perspective view of a modified example of the embedded nut 100 shown. Figure 8 The embedded nut 100 shown in FIG. Figure 1 Compared with the illustrated insert nut 100 , the formation position, number, and size of the recessed portion 160 are different.

[0068] Figure 8 The illustrated embedded nut 100 has four recesses 160 formed therein in total. Figure 8 In the figure, the second concave portion 162 and the fourth concave portion 164 can be seen, whose axes are orthogonal to each other. On their axes, a Figure 8 The first recess 161 and the third recess 163 are not visible.

[0069] Fig. 9 is different from Figure 8 1 is a perspective view of a modified example of the embedded nut 100 shown. Fig. 9 The embedded nut 100 shown in the figure also has four recesses 160 in total, but unlike Figure 8 Compared with the illustrated insert nut 100 , the recess 160 is formed at a different position.

[0070] Fig. 9 In the figure, it can be seen that the second recess 162 and the fourth recess 164 extend parallel to each other in the axes of the four recesses 160. On their axes, a Fig. 9 The first recess 161 and the third recess 163 are not visible.

[0071] Figure 8 , Fig. 9The embedded nut 100 shown, for example, can have a hole diameter of 2.60 mm, a hole depth of 0.90 mm, and a hole position thickness of 0.35 mm for a recess 160 of the type M4×0.7. In this case, the total volume of the recess 160 is 8.08 mm. 3 , is the volume of the cutting slag 4.36mm 3 The tensile strength is about 3600N.

[0072] Fig.10 It is shown Figure 1 1 is a perspective view of another modified example of the insert nut 100 shown. Fig.10 The number of recesses 160 in the illustrated embedded nut 100 is set to 2. In this case, for example, the first recess 161 to the second recess 162 of the M4×0.7 type are adjusted to, for example, 3.10 mm in hole diameter, 0.90 mm in hole depth, and 0.35 mm in hole position thickness, so that the total volume is 7.71 mm 3 When the volume of the cutting slag is 4.36mm 3 The tensile strength is about 1.76 times or more of that of the composite material, and the tensile strength is about 3500N or more.

[0073] Although the number and size of the recesses 160 are not limited as described above, it is not preferable to increase or enlarge them more than necessary to ensure sufficient tensile strength. In addition, if the number of recesses 160 is increased too much, the formation time will be prolonged, and thus the production volume of the embedded nut 100 will be reduced.

[0074] It should be noted that when the embedded nut 100 is screwed in a state where the cutting slag is sandwiched in the gap between the external thread portion of the embedded nut 100 and the circular hole of the embedded object, the cutting slag will cause the embedded object to be excessively cut. In this way, a large gap is generated between the embedded nut 100 and the embedded object, which is likely to cause loosening. Therefore, by providing a certain number of recesses 160, the distance between the recesses 160 can be shortened, and the distance until the cutting slag reaches the recesses 160 can be shortened.

[0075] It should be noted that the number and size (opening area and even volume) of the recesses 160 can have a trade-off relationship, so that the risk of loosening can be reduced without reducing the tensile strength.

[0076] To summarize the above description, as long as the conditions formed between the first tapered portion 130 and the second tapered portion 140 of the outer surface portion 150 are met, the position, number, and size of the recesses 160 are not limited. However, as a rough goal, 2 to 6 recesses 160 can be selected and spaced equally from each other.

[0077] (Implementation Method 2)

[0078] Fig.11 is a schematic perspective view of an embedded nut 100 according to a second embodiment of the present invention. Figure 1 The corresponding figure. Fig.11 The embedded nut 100 shown has a total of three recesses 160. Figure 1 Compared with the concave parts, their shapes are different.

[0079] Right now, Fig.11 The embedded nut 100 shown in FIG. Fig.11 The first recess 161 and the second recess 162 can be seen in FIG. Fig.11 The third recessed portion 163 which cannot be seen in the figure is in the shape of an elongated flat hole.

[0080] For example, in the case of the recess 160 of the M4×0.7 type, each hole diameter is converted into a diameter of about 1.60 mm, the depth from each thread height to each hole bottom (hole depth) is 0.60 mm, the thickness from each hole bottom to the inner wall (hole position thickness) is 0.65 mm, and the total volume is 8.27 mm 3 , so in this case, the volume of the cutting slag becomes 4.36mm 3 The size of the steel is about 1.89 times of that of the steel. And the tensile strength is about 3500N.

[0081] Fig.12 , Fig.13 , is shown Fig.11 FIG. 2 is a diagram showing a modified example of the embedded nut 100 shown in FIG. Fig.12 The illustrated embedded nut 100 is different in that the direction in which the major diameter of the recess 160 extends is inclined.

[0082] Fig.12 , Fig.13 In the illustrated embedded nut 100 , the cutting shavings are accommodated in the recess 160 at an angle relative to the inner wall of the first recess 160 in accordance with the inclination of each recess 160 , and there is an advantage that the accommodation is less likely to be hindered.

[0083] Table 1 shows the sizes of the screws (M3 to M16) that are screwed to the embedded nut 100. Figure 1 The dimensions of the case where the recessed portion 160 is substantially cylindrical and has six recessed portions 160 are shown in the figure. The dimensions of the M4 model mentioned above are also shown in the figure.

[0084]

Table 1

[0085]

[0086] The total volume of the "pore volume" and "gap volume" in any of the items shown in Table 1 is 1.3 times or more of the corresponding "shavings". In addition, the "tensile strength" in any of the items is higher than that of commercial products.

[0087] Table 2 shows the sizes of the screws (M3 to M16) that are screwed to the embedded nut 100. Figure 8 The dimensions of the case where there are four substantially cylindrical recesses, etc. The dimensions of the M4 model mentioned above are also described.

[0088]

Table 2

[0089]

[0090] The total volume of the "pore volume" and "gap volume" in any of the items shown in Table 2 is 1.3 times or more of the corresponding "shavings". In addition, the "tensile strength" in any of the items is higher than that of commercial products.

[0091] Table 3 shows the sizes of the screws (M3 to M16) that are screwed to the embedded nut 100. Fig.11 The dimensions of the case where there are three recessed parts in the shape of a long flat hole, etc. Among them, the dimensions of the M4 model mentioned above are also recorded.

[0092]

Table 3

[0093]

[0094] The total volume of the "pore volume" and "gap volume" in any of the items shown in Table 3 is 1.3 times or more of the corresponding "shavings". In addition, the "tensile strength" in any of the items is higher than that of commercial products.

[0095] As mentioned above, in this embodiment, various forms of the embedded nut 100 are exemplified and described, but the embedded nut of the present invention is not limited to these examples, and the embedded nut defined by the scope of the claims and the equivalent embedded nuts are also included.

[0096] In addition, the embedded nut of the present invention can be embedded in various resin products used in semiconductor processing equipment, vehicles, etc., and the device of the present invention has an embedding object for embedding the embedded nut. Specific examples of such a device include retaining rings, platens, and pads for positioning semiconductor wafers when performing various processes on semiconductor wafers (for example, chemical and mechanical polishing (CMP: Chemical Mechanical Polish)), and vehicles including various resin products.

Claims

1. An embedded nut having a substantially cylindrical shape, wherein an external thread portion and a plurality of recesses are formed on an outer surface portion, wherein the plurality of recesses receive cutting slag generated when the embedded nut body is pressed into an embedded object by screwing the external thread portion.

2. The embedded nut according to claim 1, wherein: A tapered portion is formed adjacent to at least one end of the outer surface portion and gradually becomes thinner from the base end toward the tip end.

3. The embedded nut according to claim 1, wherein: A flange portion having an annular shape is integrally provided on one end portion of the outer surface portion.

4. A device comprising an embedding object for embedding the embedded nut according to claim 1.

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