Device and method capable of simultaneously treating different medium gas cylinders

Abstract

The invention belongs to a device and a method capable of simultaneously treating different medium gas cylinders. Comprising a first gas cylinder box chamber used for treating a gas cylinder with fluorine-containing gas and mixed gas as treatment media, and a second gas cylinder box chamber used for treating corrosive gas and conventional standard gas. The first gas cylinder box chamber comprises a fluorine-containing gas cylinder cavity for placing a fluorine-containing gas cylinder and a mixed gas cylinder cavity for placing a mixed gas cylinder; the second gas cylinder box chamber comprises a cavity for placing a corrosive gas cylinder, a cavity for placing a small conventional standard gas cylinder and a cavity for placing a large conventional standard gas cylinder; independent heating lifting units and valve rows are arranged in cavities of the gas cylinders; the gas balancing unit, the emptying unit and the vacuumizing unit are respectively connected with the valve row; the gas cylinder processing device has the characteristics of processing gas cylinders of different specifications, ensuring the gas cylinder processing precision and quality and realizing simple and convenient operation.

Description

Technical Field

[0001] The invention belongs to the technical field of gas cylinder processing, and in particular relates to a device and a method for simultaneously processing gas cylinders containing different media. Background Art

[0002] Standard gas is a highly uniform, stable and accurate gas. It is mainly used for measurement method evaluation, instrument and meter calibration, measurement standard transfer and value arbitration. Standard gas is usually a mixed gas prepared from two or more media. In large petrochemical plants, dozens of pure gases and hundreds of multi-component standard gases are needed during the start-up and shutdown of the equipment and normal production processes to calibrate and calibrate the online analytical instruments used in the production process and the instruments for analyzing the quality of raw materials and products. Common mixed gases are general mixed gases and mixed gases for the electronics industry. General mixed gases include laser mixed gases, welding mixed gases, fresh-keeping mixed gases, electric light source mixed gases, medical and biological research mixed gases, disinfection and sterilization mixed gases, leak detection (alarm) mixed gases, high-pressure mixed gases, zero-level air, etc.; mixed gases for the electronics industry are divided into epitaxial (growth) mixed gases, chemical vapor deposition (CVD) mixed gases, doping mixed gases, etching mixed gases, other electronic mixed gases, etc. Impurities in other gases have varying degrees of impact on use. For example, the purity of the component gases in the laser mixture directly affects the performance of the laser. In particular, the presence of impurities such as oxygen, moisture, and hydrocarbons in the gas will lead to the loss of laser output power on the mirror (surface) and electrode, and will also cause instability in laser emission.

[0003] The aforementioned gas cylinders all need to be treated after use to prevent impurities from affecting the purity of the gas after filling, especially mixed gas cylinders, fluorine gas cylinders and corrosive gas cylinders, which require special care. Improper treatment will not only cause cylinder pollution, but also lead to environmental pollution. Based on this, existing gas cylinder treatments all adopt a separate treatment method, namely: separate treatment of standard gas cylinders, separate treatment of mixed gas cylinders, separate treatment of fluorine gas cylinders and separate treatment of corrosive gas cylinders. This method not only results in high investment costs, but also has the problem of inconvenient operation. Summary of the invention

[0004] The purpose of the present invention is to overcome the defects in the prior art and provide a device and method for simultaneously processing gas cylinders of different media.

[0005] The object of the present invention is achieved in that:

[0006] A device capable of simultaneously processing gas cylinders of different media, the device comprising a first gas cylinder chamber for processing gas cylinders of fluorine-containing gas and mixed gas as the medium, and a second gas cylinder chamber for processing corrosive gas and conventional standard gas; the first gas cylinder chamber comprises a fluorine-containing gas cylinder cavity for placing fluorine-containing gas cylinders, and a mixed gas cylinder cavity for placing mixed gas cylinders; the second gas cylinder chamber comprises a cavity for placing corrosive gas cylinders, a small conventional standard gas cylinder cavity and a large conventional standard gas cylinder cavity; the above gas cylinder cavities are all provided with independent heating and lifting units and valve rows; a balancing gas unit, a venting unit and a vacuum unit are respectively connected to the valve row.

[0007] The beneficial effects of the present invention are as follows: the present invention uses the first gas cylinder box chamber and the second gas cylinder box chamber to place fluorine-containing gas, mixed gas, corrosive gas and conventional standard gas cylinders, and cooperates with the corresponding valve rows to connect with the balancing gas unit, the venting unit and the vacuum unit, so as to realize the processing of various gas cylinders, thereby achieving the characteristic of setting up a set of processing system to realize the processing of various gas cylinders and reduce the difficulty of operation on the basis of saving investment.

[0008] Preferably, a first baffle is provided between the fluorine-containing gas cylinder cavity and the mixed gas cylinder cavity, a second baffle is provided between the corrosive gas cylinder cavity and the small conventional standard gas cylinder cavity, and a third baffle is provided between the small conventional standard gas cylinder cavity and the large conventional standard gas cylinder cavity.

[0009] Preferably, the gas cylinder cavity comprises a shell, the top of the shell is provided with a hole adapted to the outer contour of the upper part of the gas cylinder, the interior of the shell is provided with an electric heater, and the inner lower part of the shell is provided with a lifting part for adjusting the height of the gas cylinder.

[0010] Preferably, the lifting part is a movable lifting member or a fixed lifting member.

[0011] Preferably, the movable lifting member comprises a lifting platform, the top of the lifting platform is provided with a gas cylinder placement groove for placing the gas cylinder, and the bottom of the lifting platform is provided with a hydraulic cylinder, an electric telescopic rod or a pneumatic cylinder.

[0012] Preferably, the fixed lifting member comprises a groove provided on the inner wall of the shell and a raising plate; at least two outer sides of the raising plate are provided with convex strips matched with the groove.

[0013] Preferably, the balancing gas unit comprises a balancing gas source, and the balancing gas source is connected to the valve row in each gas cylinder cavity through a corresponding balancing gas cut-off valve.

[0014] Preferably, the venting unit includes a fluorine-containing gas cylinder venting part, a corrosive gas cylinder venting part and a common gas venting part; the fluorine-containing gas cylinder venting part includes a fluorine-containing tail gas treatment device, and the fluorine-containing tail gas valve row is connected to the fluorine-containing tail gas treatment device through a fluorine-containing tail gas venting valve; the corrosive gas cylinder venting part includes a corrosive tail gas treatment device, and the corrosive gas valve row is connected to the corrosive tail gas treatment device through a corrosive tail gas venting valve; the common gas air part includes a first venting pipe connected to the mixed gas cylinder valve row, a second venting pipe connected to the small conventional standard gas cylinder valve row, and a third venting pipe connected to the large conventional standard gas cylinder valve row; the first venting pipe is provided with a first venting valve, the second venting pipe is provided with a second venting valve, and the third venting pipe is provided with a third venting valve.

[0015] Preferably, the vacuum unit comprises a first vacuum unit for vacuuming the fluorine-containing gas cylinder, and a second vacuum unit for vacuuming the non-fluorine gas cylinder; the first vacuum unit comprises a first vacuum valve connected to the fluorine-containing tail gas valve row, and the outlet of the first vacuum valve is connected to the fluorine-containing tail gas treatment device through a fluorine gas vacuum pump; the second vacuum unit comprises a first tee provided between the mixed gas cylinder valve row and the corresponding balance gas cut-off valve, and the third end of the first tee is connected to the vacuum row through the second vacuum valve, the vacuum main channel and the mixed gas vacuum pump. The valve row of the corrosive gas cylinder is connected to the vacuum main channel through the third vacuum valve, the valve row of the small conventional standard gas cylinder is connected to the vacuum main channel through the fourth vacuum valve, and the valve row of the large conventional standard gas cylinder is connected to the vacuum main channel through the fifth vacuum valve; the vacuum exhaust part includes a second three-way valve connected to the outlet of the mixed gas vacuum pump, the second end of the second three-way valve is connected to the vacuum exhaust part, and the third end of the second three-way valve is connected to the corrosive exhaust treatment device through the first exhaust cut-off valve; the vacuum exhaust part includes at least one exhaust pipe with a second exhaust cut-off valve.

[0016] The present invention also provides a method for simultaneously processing gas cylinders of different media, including a method for processing gas cylinders containing fluorine, a method for processing gas cylinders containing mixed gas, a method for processing gas cylinders containing corrosive gas, a method for processing gas cylinders containing small quantities of conventional standard gas, and a method for processing gas cylinders containing large quantities of conventional standard gas;

[0017] Among them, the treatment method of fluorine-containing gas cylinders includes the following steps:

[0018] Step 10: Place the fluorine-containing gas cylinder in the fluorine-containing gas cylinder cavity. All fluorine-containing gas cylinders are connected to the fluorine-containing tail gas valve row and ensure air tightness;

[0019] Step 11: vent the fluorine-containing gas cylinder, open the fluorine-containing tail gas vent valve, and allow the residual gas in the fluorine-containing gas cylinder to enter the fluorine-containing tail gas treatment device for treatment; after the residual gas in the fluorine-containing gas cylinder is vented, close the fluorine-containing tail gas vent valve;

[0020] Step 12: Fill the fluorine-containing gas cylinder with balancing gas; open the balancing gas cut-off valve corresponding to the fluorine-containing tail gas valve exhaust, and the balancing gas in the balancing gas source enters each fluorine-containing gas cylinder through the balancing gas cut-off valve and the fluorine-containing tail gas valve exhaust;

[0021] Step 13: heating the fluorine-containing gas cylinder; turning on the corresponding electric heater in the cavity of the fluorine-containing gas cylinder, heating the fluorine-containing gas cylinder to 60-80° C. for 40-50 minutes;

[0022] Step 14: vacuumize the fluorine-containing gas cylinder; open the first vacuum valve and the fluorine gas vacuum pump, and vacuumize the fluorine-containing gas cylinder for 40 to 50 minutes, with a target vacuum degree of 0.05 Pa;

[0023] Step 15: Repeat steps 13 and 14 five times;

[0024] Step 16: vacuum the fluorine-containing gas cylinder again according to the above step 14;

[0025] Step 17: After the fluorine-containing gas cylinders are vacuumed again, the batch of gas cylinders are processed into clean gas cylinders and can be used to refill the fluorine-containing gas;

[0026] Among them, the method for handling corrosive gas cylinders includes the following steps:

[0027] Step 20: Place the corrosive gas cylinders in the corrosive gas cylinder cavity. All corrosive gas cylinders are connected to the corrosive gas valve row and ensure air tightness.

[0028] Step 21: venting the corrosive gas cylinder, opening the corrosive tail gas vent valve, and allowing the residual gas in the corrosive gas cylinder to enter the corrosive tail gas treatment device for treatment; after the residual gas in the corrosive gas cylinder is vented, closing the corrosive tail gas vent valve;

[0029] Step 22: Fill the corrosive gas cylinder with balancing gas; open the balancing gas cut-off valve corresponding to the corrosive gas valve row, and the balancing gas in the balancing gas source enters each corrosive gas cylinder through the balancing gas cut-off valve and the corrosive gas valve row;

[0030] Step 23: heating the corrosive gas cylinder; turning on the corresponding electric heater in the corrosive gas cylinder cavity, heating the corrosive gas cylinder to 60-80° C. for 40-50 minutes;

[0031] Step 24: vacuumizing the corrosive gas cylinder; opening the third vacuuming valve and the mixed gas vacuum pump, vacuumizing the corrosive gas cylinder for 40 to 50 minutes, with a target vacuum degree of 0.05 Pa; the vacuumized gas enters the corrosive tail gas treatment device through the third end of the second three-way and the first exhaust cut-off valve;

[0032] Step 25: Repeat the above steps 23 and 24 five times;

[0033] Step 26: Evacuate the corrosive gas cylinder again according to step 24 above;

[0034] Step 27: After the corrosive gas cylinders are vacuumed again, the batch of cylinders are treated as clean cylinders and can be used to be refilled with corrosive gas;

[0035] The method for handling mixed gas cylinders includes the following steps:

[0036] Step 30: Place the mixed gas cylinder in the mixed gas cylinder cavity, and all the mixed gas cylinders are connected to the mixed gas cylinder valve row to ensure air tightness;

[0037] Step 31: venting the mixed gas cylinder, opening the first vent valve, allowing the residual gas in the mixed gas cylinder to pass through the first vent valve into the first vent pipe for venting, and closing the first vent valve after the residual gas in the mixed gas cylinder is vented;

[0038] Step 32: Fill the mixed gas cylinder with balancing gas; open the balancing gas cut-off valve corresponding to the mixed gas cylinder valve row, and the balancing gas in the balancing gas source enters each mixed gas cylinder through the balancing gas cut-off valve and the mixed gas cylinder valve row;

[0039] Step 33: heating the mixed gas cylinder; turning on the corresponding electric heater in the mixed gas cylinder cavity to heat the mixed gas cylinder to 60-80° C. for 40-50 minutes;

[0040] Step 34: evacuate the mixed gas cylinder; open the second vacuum valve and the mixed gas vacuum pump, evacuate the mixed gas cylinder, the vacuum time is 40 to 50 minutes, and the target vacuum degree is 0.05Pa; the evacuated gas is discharged through the exhaust pipe with the second exhaust shut-off valve;

[0041] Step 35: Repeat the above steps 33 and 34 five times;

[0042] Step 36: vacuum the mixed gas cylinder again according to the above step 34;

[0043] Step 37: After the mixed gas cylinders are vacuumed again, the batch of cylinders are processed into clean cylinders and can be used to be refilled with mixed gas;

[0044] Among them, the processing method of small batches of conventional standard gas cylinders includes the following steps:

[0045] Step 40: placing a small amount of conventional standard gas cylinders in the cavity of the small conventional standard gas cylinder, all conventional standard gas cylinders are connected to the valve row of the small conventional standard gas cylinder, and ensure air tightness; the small amount of conventional standard gas cylinders refers to the number of conventional standard gas cylinders not exceeding 10;

[0046] Step 41: venting the conventional standard gas cylinder, opening the second vent valve, allowing the residual gas in the conventional standard gas cylinder to pass through the second vent valve into the second vent pipe for venting, and closing the second vent valve after the residual gas in the mixed gas cylinder is vented;

[0047] Step 42: Fill the conventional standard gas cylinder with balancing gas; open the balancing gas shut-off valve corresponding to the valve row of the small conventional standard gas cylinder, and the balancing gas in the balancing gas source enters each conventional standard gas cylinder through the balancing gas shut-off valve and the valve row of the small conventional standard gas cylinder;

[0048] Step 43: heating the conventional standard gas cylinder; turning on the corresponding electric heater in the valve row of the small conventional standard gas cylinder to heat the conventional standard gas cylinder to 60-80° C. for 40-50 minutes;

[0049] Step 44: vacuumize the conventional standard gas cylinder; open the fourth vacuum valve and the mixed gas vacuum pump 42, vacuumize the conventional standard gas cylinder, the vacuum time is 40 to 50 minutes, and the target vacuum degree is 0.05Pa; the vacuumized gas is discharged through the exhaust pipe with the second exhaust shut-off valve;

[0050] Step 45: Repeat the above steps 43 and 44 five times;

[0051] Step 46: vacuumizing the conventional standard gas cylinder again according to the above step 44;

[0052] Step 47: After the conventional standard gas cylinders are vacuumed again, the batch of gas cylinders are processed into clean gas cylinders and can be used to be refilled with conventional standard gas;

[0053] Among them, the processing method of large quantities of conventional standard gas cylinders includes the following steps:

[0054] Step 50: placing a large batch of conventional standard gas cylinders in the large conventional standard gas cylinder cavity, all conventional standard gas cylinders are connected to the large conventional standard gas cylinder valve row, and ensure air tightness; the large batch of conventional standard gas cylinders refers to the number of conventional standard gas cylinders not exceeding 20;

[0055] Step 51: venting the conventional standard gas cylinder, opening the third vent valve, allowing the residual gas in the conventional standard gas cylinder to pass through the third vent valve into the third vent pipe for venting, and closing the third vent valve after the residual gas in the mixed gas cylinder is vented;

[0056] Step 52: Fill the conventional standard gas cylinder with balancing gas; open the balancing gas cut-off valve corresponding to the large conventional standard gas cylinder valve row, and the balancing gas in the balancing gas source enters each conventional standard gas cylinder through the balancing gas cut-off valve and the large conventional standard gas cylinder valve row;

[0057] Step 53: heating the conventional standard gas cylinder; turning on the corresponding electric heater in the large conventional standard gas cylinder valve row, heating the conventional standard gas cylinder to 60-80° C. for 40-50 min;

[0058] Step 54: vacuumize the conventional standard gas cylinder; open the fifth vacuum valve and the mixed gas vacuum pump, vacuumize the conventional standard gas cylinder, the vacuum time is 40 to 50 minutes, and the target vacuum degree is 0.05Pa; the vacuumized gas is discharged through the exhaust pipe with the second exhaust shut-off valve;

[0059] Step 55: Repeat the above steps 53 and 54 five times;

[0060] Step 56: vacuumizing the conventional standard gas cylinder again according to the above step 54;

[0061] Step 57: After the conventional standard gas cylinders are evacuated again, the batch of gas cylinders are processed into clean gas cylinders and can be used to be refilled with conventional standard gas.

[0062] According to the above scheme, a device and method for simultaneously processing gas cylinders of different media are prepared. By setting a first gas cylinder chamber and a second gas cylinder chamber, and setting different gas cylinder placement cavities in the above two gas cylinder chambers for placing gas cylinders of various media, the characteristics of using the same system to process the medium gas cylinders are achieved, so as to achieve the characteristics of reducing investment costs and improving ease of operation; further, the present invention divides the two gas cylinder chambers into independent cavities by a baffle, which can not only avoid interference caused by mutual crossing, but also achieve the purpose of energy saving and consumption reduction during the heating process; at the same time, the present invention can achieve the characteristics of adapting to gas cylinders of different specifications by setting a lifting part. The gas source of the balance gas described in the present invention can be nitrogen, etc., which can be adjusted according to the conditions of the media in various gas cylinders; the venting unit described in the present invention can be set in a targeted manner according to the medium in the gas cylinder, wherein the fluorine-containing tail gas has the characteristics of strong corrosiveness and environmental pollution, so a fluorine-containing tail gas treatment device and related pipelines are set separately, which is convenient for setting related corrosion-resistant pipelines, avoiding environmental pollution and achieving the characteristics of long-term stable operation; Similarly, the corrosive tail gas is treated by setting a corrosive tail gas treatment device; further, the present invention sets a vacuum unit, which includes a vacuum part for fluorine-containing tail gas cylinders, and a vacuum treatment part for gas cylinders other than fluorine-containing tail gas cylinders; the vacuum part of the fluorine-containing tail gas cylinder is based on the aforementioned fluorine-containing tail gas treatment device, and a fluorine gas vacuum pump is set to achieve vacuuming and treatment of the gas after vacuuming, avoiding corrosion to the corresponding pipelines and environmentally friendly characteristics; the remaining vacuum parts are based on the vacuuming of mixed gas cylinders, and are equipped with a vacuum main channel, a mixed gas vacuum pump and a vacuum emptying part to achieve vacuuming treatment; the relevant pipelines described in the present invention can be made of stainless steel, and at the same time, the independent setting can effectively avoid the risk of cross-contamination of residual gas in the treatment of gas cylinders; the present invention has the functions of effectively realizing gas cylinder replacement, heating vacuuming, and vacuuming, and has the characteristics of processing gas cylinders of different specifications, ensuring the accuracy and quality of gas cylinder processing, and realizing simplified operation, and the vacuum degree of the treated gas cylinder can reach 0.05Pa, and the residual gas of the gas cylinder can be treated to below the ppm level. BRIEF DESCRIPTION OF THE DRAWINGS

[0063] Figure 1 It is a schematic diagram of the process structure of the present invention.

[0064] Figure 2 It is a schematic structural diagram of the first gas cylinder chamber of the present invention.

[0065] Figure 3 It is a schematic structural diagram of the second gas cylinder chamber of the present invention.

[0066] Figure 4 It is a structural schematic diagram of the top of the lifting platform of the present invention.

[0067] Figure 5 It is a structural schematic diagram of the top of the first gas cylinder chamber of the present invention.

[0068] Figure 6 It is a schematic diagram of the front structure of the first gas cylinder box chamber of the present invention.

[0069] Figure 7 It is a schematic diagram of the top structure of the elevated plate of the present invention.

[0070] Figure 8 It is a schematic diagram of the side structure of the elevated plate of the present invention. DETAILED DESCRIPTION

[0071] In order to have a clearer understanding of the technical features, purposes and effects of the present invention, the specific implementation of the present invention is now described with reference to the accompanying drawings, in which the same reference numerals represent the same components. In order to make the drawings concise, each figure only schematically shows the parts related to the invention, and they do not represent the actual structure of the product.

[0072] like Figure 1-8As shown, the present invention is a device that can simultaneously process gas cylinders of different media, and the device comprises a first gas cylinder chamber 1 for processing gas cylinders of fluorine-containing gas and mixed gas as the medium, and a second gas cylinder chamber 2 for processing corrosive gas and conventional standard gas; the first gas cylinder chamber 1 comprises a fluorine-containing gas cylinder cavity 3 for placing fluorine-containing gas cylinders, and a mixed gas cylinder cavity 4 for placing mixed gas cylinders; the second gas cylinder chamber 2 comprises a cavity 5 for placing corrosive gas cylinders, a small conventional standard gas cylinder cavity 6 and a large conventional standard gas cylinder cavity 7; independent heating and lifting units and valve rows are arranged in the above-mentioned gas cylinder cavities; a balancing gas unit, a venting unit and a vacuum unit are respectively connected to the valve row. The essence of the present invention is to integrate the processing systems of different medium gas cylinders that are independently set in the traditional technology, and re-plan the entire pipeline according to the properties of different medium gases in the gas cylinders. On this basis, the gas cylinder chamber is set up to achieve the characteristics of easy operation, avoid cross contamination and environmental friendliness; it should be pointed out in particular that: the present invention can adopt a manual control or automatic control mode. Since the first gas cylinder chamber 1 and the second gas cylinder chamber 2 can place specific gas cylinders, they have the characteristics of easy automatic operation; each cavity in the present invention is fully market research and the properties of the medium gas and the reduction of cost The present invention is designed under the circumstances that, relatively speaking, the usage of conventional standard gas cylinders is relatively large, the present invention is provided with two cavities, a small conventional standard gas cylinder cavity 6 and a large conventional standard gas cylinder cavity 7, and is divided according to the number of conventional standard gas cylinders that need to be processed, thereby realizing the characteristic of saving heating energy consumption. The fluorine-containing gas in the fluorine-containing gas cylinder has the characteristics of strong corrosiveness and destruction of the environment, while the mixed gas in the mixed gas cylinder has the defect that the gas composition is complex and impurities are easy to contaminate the subsequent filling gas. Therefore, the present invention arranges the above two in the first gas cylinder chamber 1, and simultaneously arranges independent cavities respectively.

[0073] Furthermore, a first baffle 8 is provided between the fluorine-containing gas cylinder cavity 3 and the mixed gas cylinder cavity 4, a second baffle 9 is provided between the corrosive gas cylinder cavity 5 and the small conventional standard gas cylinder cavity 6, and a third baffle 10 is provided between the small conventional standard gas cylinder cavity 6 and the large conventional standard gas cylinder cavity 7. By providing the above-mentioned baffles, each cavity can be divided into a separate space, which can facilitate the placement of gas cylinders and the batch processing of corresponding medium gas cylinders.

[0074] Furthermore, the gas cylinder cavity includes a shell 11, the top of the shell 11 is provided with a hole 12 adapted to the outer contour of the upper part of the gas cylinder, the interior of the shell 11 is provided with an electric heater 13, and the lower inner part of the shell 11 is provided with a lifting part for adjusting the height of the gas cylinder. The aforementioned hole 12, electric heater 13 and lifting part are all arranged relative to the cavity, and the cavity is an independent space. Through the above arrangement, it can be easily adjusted according to the specifications of the gas cylinder, and it is convenient to fix the gas cylinder and arrange the valve to reduce the heat energy loss.

[0075] Furthermore, the lifting part is a movable lifting part or a fixed lifting part. The lifting part described in the present invention is relative to the cavity, that is: a movable lifting part or a fixed lifting part can be selected in the same cavity, but different lifting part forms can be selected in different cavities of the same gas cylinder chamber; conventional standard gas cylinders can be 4L-10L standard gas cylinders or 40-50L standard gas cylinders, and when the lifting part is not raised, it can accommodate 40-50L standard gas cylinders, and when the lifting part is raised, it can accommodate 4L-10L standard gas cylinders. Based on this, the present invention is provided with a fixed lifting part; at the same time, there are special gas cylinders, so a movable lifting part can be provided; to meet the placement and processing requirements of different gas cylinders.

[0076] Furthermore, the movable lifting member includes a lifting platform 14, a gas cylinder placement groove 15 for placing the gas cylinder is provided on the top of the lifting platform 14, and a hydraulic cylinder, an electric telescopic rod or a pneumatic cylinder 16 is provided at the bottom of the lifting platform 14. In the present invention, the movable lifting member uses the hydraulic cylinder, the electric telescopic rod or the pneumatic cylinder 16 as the power to realize the lifting and lowering of the lifting platform 14, and at the same time, the gas cylinder placement groove 15 is provided to facilitate the placement of the gas cylinder and prevent the gas cylinder from tipping over during the lifting process.

[0077] Furthermore, the fixed lifting member includes a groove 17 and a heightening plate 18 provided on the inner wall of the housing 11; at least two outer sides of the heightening plate 18 are provided with convex strips 19 adapted to the groove 17. In actual use, when the gas cylinder is large, the heightening plate 18 can be removed, and when the gas cylinder is small, the convex strips 19 in the heightening plate 18 can be matched with the groove 17, thereby realizing the feature of facilitating the placement of gas cylinders of different specifications while saving energy and reducing consumption.

[0078] Furthermore, the balancing gas unit includes a balancing gas source 20, which is connected to the valve row in each gas cylinder cavity through a corresponding balancing gas cut-off valve 21. The balancing gas source 20 in the present invention can be adjusted based on actual conditions, and can be nitrogen, etc. Preferably, a quick plug can be provided on the balancing gas source 20 to facilitate replacement.

[0079] Further, the venting unit includes a fluorine-containing gas cylinder venting part, a corrosive gas cylinder venting part and a common gas venting part; the fluorine-containing gas cylinder venting part includes a fluorine-containing tail gas treatment device 22, and the fluorine-containing tail gas valve row 23 is connected to the fluorine-containing tail gas treatment device 22 through a fluorine-containing tail gas venting valve 24; the corrosive gas cylinder venting part includes a corrosive tail gas treatment device 25, and the corrosive gas valve row 26 is connected to the corrosive tail gas treatment device 25 through a corrosive tail gas venting valve 27; the common gas air part includes a first venting pipe 29 connected to the mixed gas cylinder valve row 28, a second venting pipe 31 connected to the small conventional standard gas cylinder valve row 30, and a third venting pipe 33 connected to the large conventional standard gas cylinder valve row 32; the first venting pipe 29 is provided with a first venting valve 34, the second venting pipe 31 is provided with a second venting valve 35, and the third venting pipe 33 is provided with a third venting valve 36. The present invention arranges the above-mentioned venting unit according to the characteristics of fluorine-containing gas and corrosive gas. The above-mentioned arrangements are all independently arranged and do not affect each other. Under the premise of convenient operation, the characteristics of automated operation can be realized. By arranging the fluorine-containing tail gas treatment device 22 and the corrosive tail gas treatment device 25, the purpose of avoiding environmental pollution while treating the corresponding gases can be achieved.

[0080] Further, the vacuum unit includes a first vacuum unit for vacuuming a fluorine-containing gas cylinder, and a second vacuum unit for vacuuming a non-fluorine gas cylinder; the first vacuum unit includes a first vacuum valve 37 connected to the fluorine-containing tail gas valve row 23, and the outlet of the first vacuum valve 37 is connected to the fluorine-containing tail gas treatment device 22 through a fluorine gas vacuum pump 38; the second vacuum unit includes a first three-way valve 39 provided between the mixed gas cylinder valve row 28 and the corresponding balance gas cut-off valve 21, and the third end of the first three-way valve 39 is connected to the vacuum exhaust part through a second vacuum valve 40, a vacuum main channel 41 and a mixed gas vacuum pump 42; The corrosive gas cylinder valve row 26 is connected to the vacuum main channel 41 through the third vacuum valve 43, the small conventional standard gas cylinder valve row 30 is connected to the vacuum main channel 41 through the fourth vacuum valve 44, and the large conventional standard gas cylinder valve row 32 is connected to the vacuum main channel 41 through the fifth vacuum valve 45; the vacuum exhaust part includes a second tee 16 connected to the outlet of the mixed gas vacuum pump 42, the second end of the second tee 46 is connected to the vacuum exhaust part, and the third end of the second tee 46 is connected to the corrosive exhaust treatment device 25 through the first exhaust cut-off valve 47; the vacuum exhaust part includes at least one exhaust pipe 49 with a second exhaust cut-off valve 48. The vacuum unit described in the present invention includes a first vacuum unit for vacuuming fluorine-containing gas cylinders, and a second vacuum unit for vacuuming non-fluorine gas cylinders. The first vacuum unit is based on the fluorine-containing tail gas treatment device 22 and is arranged in conjunction with the fluorine gas vacuum pump 38 to achieve the characteristics of preventing corrosion of related pipelines and avoiding environmental pollution; the second vacuum unit is based on vacuuming mixed gas cylinders, and is coordinated with the arrangement of a vacuum main channel, a mixed gas vacuum pump and a vacuum exhaust part to achieve vacuum treatment; the exhaust pipe 49 with the second exhaust shut-off valve 48 is preferably three, and the three exhaust pipes 49 correspond to the mixed gas cylinder valve row 28, the small conventional standard gas cylinder valve row 30 and the large conventional standard gas cylinder valve row 32, respectively, and are emptied separately; in addition, a vacuum gauge is also provided on the relevant pipelines in the present invention to determine the vacuum degree, which is not described in detail because it is a prior art.

[0081] The present invention also provides a method for simultaneously processing gas cylinders of different media, including a method for processing gas cylinders containing fluorine, a method for processing gas cylinders containing mixed gas, a method for processing gas cylinders containing corrosive gas, a method for processing gas cylinders containing small quantities of conventional standard gas, and a method for processing gas cylinders containing large quantities of conventional standard gas;

[0082] Among them, the treatment method of fluorine-containing gas cylinders includes the following steps:

[0083] Step 10: placing the fluorine-containing gas cylinders in the fluorine-containing gas cylinder cavity 3, and all the fluorine-containing gas cylinders are connected to the fluorine-containing tail gas valve row 23, and ensure air tightness;

[0084] Step 11: venting the fluorine-containing gas cylinder, opening the fluorine-containing tail gas venting valve 24, and allowing the residual gas in the fluorine-containing gas cylinder to enter the fluorine-containing tail gas treatment device 22 for treatment; after the residual gas in the fluorine-containing gas cylinder is vented, the fluorine-containing tail gas venting valve 24 is closed;

[0085] Step 12: Fill the fluorine-containing gas cylinder with balancing gas; open the balancing gas cut-off valve 21 corresponding to the fluorine-containing tail gas valve row 23, and the balancing gas in the balancing gas source 20 enters each fluorine-containing gas cylinder through the balancing gas cut-off valve 21 and the fluorine-containing tail gas valve row 23;

[0086] Step 13: heating the fluorine-containing gas cylinder; turning on the corresponding electric heater 13 in the fluorine-containing gas cylinder cavity 3 to heat the fluorine-containing gas cylinder to 60-80° C. for 40-50 minutes;

[0087] Step 14: vacuumizing the fluorine-containing gas cylinder; opening the first vacuumizing valve 37 and the fluorine gas vacuum pump 38, and vacuumizing the fluorine-containing gas cylinder for 40 to 50 minutes, with a target vacuum degree of 0.05 Pa;

[0088] Step 15: Repeat steps 13 and 14 five times;

[0089] Step 16: vacuum the fluorine-containing gas cylinder again according to the above step 14;

[0090] Step 17: After the fluorine-containing gas cylinders are vacuumed again, the batch of gas cylinders are processed into clean gas cylinders and can be used to refill the fluorine-containing gas;

[0091] Among them, the method for handling corrosive gas cylinders includes the following steps:

[0092] Step 20: placing the corrosive gas cylinders in the corrosive gas cylinder cavity 5, all the corrosive gas cylinders are connected to the corrosive gas valve row 26, and ensure air tightness;

[0093] Step 21: venting the corrosive gas cylinder, opening the corrosive tail gas venting valve 27, and allowing the residual gas in the corrosive gas cylinder to enter the corrosive tail gas treatment device 25 for treatment; after the residual gas in the corrosive gas cylinder is vented, the corrosive tail gas venting valve 27 is closed;

[0094] Step 22: Fill the corrosive gas cylinder with balancing gas; open the balancing gas cut-off valve 21 corresponding to the corrosive gas valve row 26, and the balancing gas in the balancing gas source 20 enters each corrosive gas cylinder through the balancing gas cut-off valve 21 and the corrosive gas valve row 26;

[0095] Step 23: heating the corrosive gas cylinder; turning on the corresponding electric heater 13 in the corrosive gas cylinder cavity 5 to heat the corrosive gas cylinder to 60-80° C. for 40-50 minutes;

[0096] Step 24: vacuumizing the corrosive gas cylinder; opening the third vacuumizing valve 43 and the mixed gas vacuum pump 42, vacuumizing the corrosive gas cylinder for 40 to 50 minutes, with a target vacuum degree of 0.05 Pa; the vacuumized gas enters the corrosive tail gas treatment device 25 through the third end of the second three-way valve 46 and the first exhaust cut-off valve 47;

[0097] Step 25: Repeat the above steps 23 and 24 five times;

[0098] Step 26: Evacuate the corrosive gas cylinder again according to step 24 above;

[0099] Step 27: After the corrosive gas cylinders are vacuumed again, the batch of cylinders are treated as clean cylinders and can be used to be refilled with corrosive gas;

[0100] The method for handling mixed gas cylinders includes the following steps:

[0101] Step 30: Place the mixed gas cylinders in the mixed gas cylinder cavity 4, and all the mixed gas cylinders are connected to the mixed gas cylinder valve row 28 to ensure air tightness;

[0102] Step 31: venting the mixed gas cylinder, opening the first vent valve 34, allowing the residual gas in the mixed gas cylinder to pass through the first vent valve 34 into the first vent pipe 29 for venting, and closing the first vent valve 34 after the residual gas in the mixed gas cylinder is vented;

[0103] Step 32: Fill the mixed gas cylinder with balancing gas; open the balancing gas cut-off valve 21 corresponding to the mixed gas cylinder valve row 28, and the balancing gas in the balancing gas source 20 enters each mixed gas cylinder through the balancing gas cut-off valve 21 and the mixed gas cylinder valve row 28;

[0104] Step 33: heating the mixed gas cylinder; turning on the corresponding electric heater 13 in the mixed gas cylinder cavity 4 to heat the mixed gas cylinder to 60-80° C. for 40-50 minutes;

[0105] Step 34: evacuate the mixed gas cylinder; open the second vacuum valve 40 and the mixed gas vacuum pump 42, evacuate the mixed gas cylinder, the vacuum time is 40 to 50 minutes, and the target vacuum degree is 0.05Pa; the evacuated gas is discharged through the exhaust pipe 49 with the second exhaust shut-off valve 48;

[0106] Step 35: Repeat the above steps 33 and 34 five times;

[0107] Step 36: vacuum the mixed gas cylinder again according to the above step 34;

[0108] Step 37: After the mixed gas cylinders are vacuumed again, the batch of cylinders are processed into clean cylinders and can be used to be refilled with mixed gas;

[0109] Among them, the processing method of small batches of conventional standard gas cylinders includes the following steps:

[0110] Step 40: placing a small amount of conventional standard gas cylinders in the small conventional standard gas cylinder cavity 6, all conventional standard gas cylinders are connected to the small conventional standard gas cylinder valve row 30, and ensure air tightness; the small amount of conventional standard gas cylinders refers to the number of conventional standard gas cylinders not exceeding 10;

[0111] Step 41: vent the conventional standard gas cylinder, open the second vent valve 35, and allow the residual gas in the conventional standard gas cylinder to enter the second vent pipe 31 through the second vent valve 35 for venting. After the residual gas in the mixed gas cylinder is vented, close the second vent valve 35;

[0112] Step 42: Fill the conventional standard gas cylinder with balancing gas; open the balancing gas cut-off valve 21 corresponding to the small conventional standard gas cylinder valve row 30, and the balancing gas in the balancing gas source 20 enters each conventional standard gas cylinder through the balancing gas cut-off valve 21 and the small conventional standard gas cylinder valve row 30;

[0113] Step 43: heating the conventional standard gas cylinder; opening the corresponding electric heater 13 in the small conventional standard gas cylinder valve row 30, heating the conventional standard gas cylinder to 60-80°C for 40-50 minutes;

[0114] Step 44: evacuate the conventional standard gas cylinder; open the fourth evacuation valve 44 and the mixed gas vacuum pump (42), evacuate the conventional standard gas cylinder, the evacuation time is 40 to 50 minutes, and the target vacuum degree is 0.05 Pa; the evacuated gas is discharged through the evacuation pipeline 49 with the second evacuation shut-off valve 48;

[0115] Step 45: Repeat the above steps 43 and 44 five times;

[0116] Step 46: vacuumizing the conventional standard gas cylinder again according to the above step 44;

[0117] Step 47: After the conventional standard gas cylinders are vacuumed again, the batch of gas cylinders are processed into clean gas cylinders and can be used to be refilled with conventional standard gas;

[0118] Among them, the processing method of large quantities of conventional standard gas cylinders includes the following steps:

[0119] Step 50: placing a large number of conventional standard gas cylinders in the large conventional standard gas cylinder cavity 7, all conventional standard gas cylinders are connected to the large conventional standard gas cylinder valve row 32, and ensure air tightness; the large number of conventional standard gas cylinders refers to the number of conventional standard gas cylinders not exceeding 20;

[0120] Step 51: vent the conventional standard gas cylinder, open the third vent valve 36, and allow the residual gas in the conventional standard gas cylinder to pass through the third vent valve 36 into the third vent pipe 33 for venting. After the residual gas in the mixed gas cylinder is vented, close the third vent valve 36;

[0121] Step 52: Fill the conventional standard gas cylinder with balancing gas; open the balancing gas cut-off valve 21 corresponding to the large conventional standard gas cylinder valve row 32, and the balancing gas in the balancing gas source 20 enters each conventional standard gas cylinder through the balancing gas cut-off valve 21 and the large conventional standard gas cylinder valve row 32;

[0122] Step 53: heating the conventional standard gas cylinder; opening the corresponding electric heater 13 in the large conventional standard gas cylinder valve row 32, heating the conventional standard gas cylinder to 60-80°C for 40-50 minutes;

[0123] Step 54: vacuumize the conventional standard gas cylinder; open the fifth vacuum valve 45 and the mixed gas vacuum pump 42, vacuumize the conventional standard gas cylinder, the vacuum time is 40 to 50 minutes, and the target vacuum degree is 0.05Pa; the vacuumized gas is discharged through the exhaust pipe 49 with the second exhaust cut-off valve 48;

[0124] Step 55: Repeat the above steps 53 and 54 five times;

[0125] Step 56: vacuumizing the conventional standard gas cylinder again according to the above step 54;

[0126] Step 57: After the conventional standard gas cylinders are evacuated again, the batch of gas cylinders are processed into clean gas cylinders and can be used to be refilled with conventional standard gas.

[0127] The essence of the present invention is to realize that gas cylinders of different media are processed in the same system to achieve the purpose of saving investment and facilitating operation. Based on this, the present invention classifies the commonly used gas cylinders of different media so that the gas cylinders of the same medium are placed in independent cavities respectively, thereby achieving the characteristics of facilitating operation and energy saving and consumption reduction; in order to achieve the above-mentioned purpose of the present invention, the present invention arranges the relevant balance gas filling, venting and vacuuming pipelines from the chamber where the gas cylinder is placed and according to the characteristics of different media. Taking the chamber where the gas cylinder is placed as an example, by setting an independent cavity and coordinating the electric heater 13 and the lifting part, it is possible to improve the applicable scope of the gas cylinder, and achieve the purpose of processing the gas cylinder on the basis of energy saving and consumption reduction; further, in the chamber design of the present invention, the fluorine-containing gas and mixed gas cylinders that are more difficult to process are placed in the first gas cylinder chamber 1, and the corrosive gas cylinders and conventional standard gas cylinders that are relatively simple to process are placed in the second gas cylinder chamber 2, thereby achieving the characteristic of facilitating the subsequent pipeline layout. Furthermore, the present invention also provides a small conventional standard gas cylinder cavity 6 and a large conventional standard gas cylinder cavity 7, through which it is possible to achieve the conventional standard gas cylinder cavity 7 according to the conventional standard gas. Different gas cylinder cavities are selected for processing according to the number of gas bottles, so as to achieve the characteristics of energy saving and consumption reduction. The number of gas cylinders placed in the small conventional standard gas cylinder cavity 6 of the present invention is less than the number of gas cylinders placed in the large conventional standard gas cylinder cavity 7; taking the relevant pipeline layout as an example, the present invention uses a balance gas source to be connected to each valve row respectively to achieve the purpose of convenient filling of the balance gas, and in the venting unit, the fluorine-containing gas is connected to the fluorine-containing tail gas treatment device 22, and the corrosive gas is connected to the corrosive tail gas treatment device 25. The above arrangement can facilitate the arrangement of anti-corrosion pipelines and avoid mixing with other gases. The defects of combination and pollution of the environment; in the vacuum unit, the present invention cooperates with the fluorine gas vacuum pump 38 to connect with the fluorine-containing tail gas treatment device 22 according to the characteristics of the fluorine-containing gas, so as to avoid the influence of the fluorine-containing gas on the relevant pipelines and avoid the problem of polluting the environment, and further uses the pipeline between the mixed gas cylinder valve row 28 and the corresponding balance gas cut-off valve 21 to cooperate with the vacuum main channel 41 to vacuum the remaining cavity gas cylinders, that is: the use of the fluorine gas vacuum pump 38 and the mixed gas vacuum pump 42 can achieve the purpose of vacuuming multiple gas cylinders, thereby achieving the characteristic of reducing investment costs.

[0128] The following will be combined with the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0129] Example 1

[0130] A device capable of simultaneously processing gas cylinders of different media, the device comprising a first gas cylinder chamber 1 for processing gas cylinders of fluorine-containing gas and mixed gas, and a second gas cylinder chamber 2 for processing corrosive gas and conventional standard gas; the first gas cylinder chamber 1 comprises a fluorine-containing gas cylinder cavity 3 for placing fluorine-containing gas cylinders, and a mixed gas cylinder cavity 4 for placing mixed gas cylinders; the second gas cylinder chamber 2 comprises a corrosive gas cylinder cavity 5, a small conventional standard gas cylinder cavity 6 and a large conventional standard gas cylinder cavity 7; the above gas cylinder cavities are all provided with independent heating and lifting units and valve rows; the balancing gas unit, the venting unit and the vacuum unit are respectively connected to the valve row. A first baffle 8 is provided between the fluorine-containing gas cylinder cavity 3 and the mixed gas cylinder cavity 4, a second baffle 9 is provided between the corrosive gas cylinder cavity 5 and the small conventional standard gas cylinder cavity 6, and a third baffle 10 is provided between the small conventional standard gas cylinder cavity 6 and the large conventional standard gas cylinder cavity 7. The gas cylinder cavity includes a shell 11, the top of the shell 11 is provided with a hole 12 adapted to the outer contour of the upper part of the gas cylinder, the interior of the shell 11 is provided with an electric heater 13, and the inner lower part of the shell 11 is provided with a lifting part for adjusting the height of the gas cylinder. The lifting part is a movable lifting part. The movable lifting part includes a lifting platform 14, the top of the lifting platform 14 is provided with a gas cylinder placement groove 15 for placing the gas cylinder, and the bottom of the lifting platform 14 is provided with an electric telescopic rod. The balancing gas unit includes a balancing gas source 20, and the balancing gas source 20 is connected to the valve row in each gas cylinder cavity through a corresponding balancing gas cut-off valve 21. The venting unit includes a fluorine-containing gas cylinder venting part, a corrosive gas cylinder venting part and a common gas venting part; the fluorine-containing gas cylinder venting part includes a fluorine-containing tail gas treatment device 22, and the fluorine-containing tail gas valve row 23 is connected to the fluorine-containing tail gas treatment device 22 through a fluorine-containing tail gas venting valve 24; the corrosive gas cylinder venting part includes a corrosive tail gas treatment device 25, and the corrosive gas valve row 26 is connected to the corrosive tail gas treatment device 25 through a corrosive tail gas venting valve 27; the common gas air part includes a first venting pipe 29 connected to a mixed gas cylinder valve row 28, a second venting pipe 31 connected to a small conventional standard gas cylinder valve row 30, and a third venting pipe 33 connected to a large conventional standard gas cylinder valve row 32; a first venting valve 34 is provided on the first venting pipe 29, a second venting valve 35 is provided on the second venting pipe 31, and a third venting valve 36 is provided on the third venting pipe 33.The vacuum unit includes a first vacuum unit for vacuuming fluorine-containing gas cylinders, and a second vacuum unit for vacuuming non-fluorine gas cylinders; the first vacuum unit includes a first vacuum valve 37 connected to the fluorine-containing tail gas valve row 23, and the outlet of the first vacuum valve 37 is connected to the fluorine-containing tail gas treatment device 22 through a fluorine gas vacuum pump 38; the second vacuum unit includes a first three-way valve 39 provided between the mixed gas cylinder valve row 28 and the corresponding balance gas cut-off valve 21, and the third end of the first three-way valve 39 is connected to the vacuum exhaust part through a second vacuum valve 40, a vacuum main channel 41 and a mixed gas vacuum pump 42; The valve row 26 of the conventional gas cylinder is connected to the vacuum main channel 41 through the third vacuum valve 43, the valve row 30 of the small conventional standard gas cylinder is connected to the vacuum main channel 41 through the fourth vacuum valve 44, and the valve row 32 of the large conventional standard gas cylinder is connected to the vacuum main channel 41 through the fifth vacuum valve 45; the vacuum exhaust part includes a second three-way valve 16 connected to the outlet of the mixed gas vacuum pump 42, the second end of the second three-way valve 46 is connected to the vacuum exhaust part, and the third end of the second three-way valve 46 is connected to the corrosive exhaust treatment device 25 through the first exhaust cut-off valve 47; the vacuum exhaust part includes at least one exhaust pipe 49 with a second exhaust cut-off valve 48.

[0131] The present invention also provides a method for simultaneously processing gas cylinders of different media, including a method for processing gas cylinders containing fluorine, a method for processing gas cylinders containing mixed gas, a method for processing gas cylinders containing corrosive gas, a method for processing gas cylinders containing small quantities of conventional standard gas, and a method for processing gas cylinders containing large quantities of conventional standard gas;

[0132] When handling fluorine-containing gas cylinders, the handling method includes the following steps:

[0133] Step 10: placing the fluorine-containing gas cylinders in the fluorine-containing gas cylinder cavity 3, and all the fluorine-containing gas cylinders are connected to the fluorine-containing tail gas valve row 23, and ensure air tightness;

[0134] Step 11: venting the fluorine-containing gas cylinder, opening the fluorine-containing tail gas venting valve 24, and allowing the residual gas in the fluorine-containing gas cylinder to enter the fluorine-containing tail gas treatment device 22 for treatment; after the residual gas in the fluorine-containing gas cylinder is vented, the fluorine-containing tail gas venting valve 24 is closed;

[0135] Step 12: Fill the fluorine-containing gas cylinder with balancing gas; open the balancing gas cut-off valve 21 corresponding to the fluorine-containing tail gas valve row 23, and the balancing gas in the balancing gas source 20 enters each fluorine-containing gas cylinder through the balancing gas cut-off valve 21 and the fluorine-containing tail gas valve row 23;

[0136] Step 13: heating the fluorine-containing gas cylinder; turning on the corresponding electric heater 13 in the fluorine-containing gas cylinder cavity 3 to heat the fluorine-containing gas cylinder to 60-80° C. for 40-50 minutes;

[0137] Step 14: vacuumizing the fluorine-containing gas cylinder; opening the first vacuumizing valve 37 and the fluorine gas vacuum pump 38, and vacuumizing the fluorine-containing gas cylinder for 40 to 50 minutes, with a target vacuum degree of 0.05 Pa;

[0138] Step 15: Repeat steps 13 and 14 five times;

[0139] Step 16: vacuum the fluorine-containing gas cylinder again according to the above step 14;

[0140] Step 17: After the fluorine-containing gas cylinders are vacuumed again, the batch of cylinders are processed into clean cylinders and can be used to be refilled with fluorine-containing gas.

[0141] Example 2

[0142] A device capable of simultaneously processing gas cylinders of different media, the device comprising a first gas cylinder chamber 1 for processing gas cylinders of fluorine-containing gas and mixed gas, and a second gas cylinder chamber 2 for processing corrosive gas and conventional standard gas; the first gas cylinder chamber 1 comprises a fluorine-containing gas cylinder cavity 3 for placing fluorine-containing gas cylinders, and a mixed gas cylinder cavity 4 for placing mixed gas cylinders; the second gas cylinder chamber 2 comprises a corrosive gas cylinder cavity 5, a small conventional standard gas cylinder cavity 6 and a large conventional standard gas cylinder cavity 7; the above gas cylinder cavities are all provided with independent heating and lifting units and valve rows; the balancing gas unit, the venting unit and the vacuum unit are respectively connected to the valve row. A first baffle 8 is provided between the fluorine-containing gas cylinder cavity 3 and the mixed gas cylinder cavity 4, a second baffle 9 is provided between the corrosive gas cylinder cavity 5 and the small conventional standard gas cylinder cavity 6, and a third baffle 10 is provided between the small conventional standard gas cylinder cavity 6 and the large conventional standard gas cylinder cavity 7. The gas cylinder cavity includes a shell 11, the top of the shell 11 is provided with a hole 12 that matches the outer contour of the upper part of the gas cylinder, the interior of the shell 11 is provided with an electric heater 13, and the inner lower part of the shell 11 is provided with a lifting part for adjusting the height of the gas cylinder. The lifting part is a fixed lifting part. The fixed lifting part includes a groove 17 and a heightening plate 18 provided on the inner wall of the shell 11; at least two outer sides of the heightening plate 18 are provided with convex strips 19 that match the groove 17. The balancing gas unit includes a balancing gas source 20, and the balancing gas source 20 is connected to the valve row in each gas cylinder cavity through a corresponding balancing gas cut-off valve 21. The venting unit includes a fluorine-containing gas cylinder venting part, a corrosive gas cylinder venting part and a common gas venting part; the fluorine-containing gas cylinder venting part includes a fluorine-containing tail gas treatment device 22, and the fluorine-containing tail gas valve row 23 is connected to the fluorine-containing tail gas treatment device 22 through a fluorine-containing tail gas venting valve 24; the corrosive gas cylinder venting part includes a corrosive tail gas treatment device 25, and the corrosive gas valve row 26 is connected to the corrosive tail gas treatment device 25 through a corrosive tail gas venting valve 27; the common gas air part includes a first venting pipe 29 connected to a mixed gas cylinder valve row 28, a second venting pipe 31 connected to a small conventional standard gas cylinder valve row 30, and a third venting pipe 33 connected to a large conventional standard gas cylinder valve row 32; a first venting valve 34 is provided on the first venting pipe 29, a second venting valve 35 is provided on the second venting pipe 31, and a third venting valve 36 is provided on the third venting pipe 33.The vacuum unit includes a first vacuum unit for vacuuming fluorine-containing gas cylinders, and a second vacuum unit for vacuuming non-fluorine gas cylinders; the first vacuum unit includes a first vacuum valve 37 connected to the fluorine-containing tail gas valve row 23, and the outlet of the first vacuum valve 37 is connected to the fluorine-containing tail gas treatment device 22 through a fluorine gas vacuum pump 38; the second vacuum unit includes a first three-way valve 39 provided between the mixed gas cylinder valve row 28 and the corresponding balance gas cut-off valve 21, and the third end of the first three-way valve 39 is connected to the vacuum exhaust part through a second vacuum valve 40, a vacuum main channel 41 and a mixed gas vacuum pump 42; The valve row 26 of the conventional gas cylinder is connected to the vacuum main channel 41 through the third vacuum valve 43, the valve row 30 of the small conventional standard gas cylinder is connected to the vacuum main channel 41 through the fourth vacuum valve 44, and the valve row 32 of the large conventional standard gas cylinder is connected to the vacuum main channel 41 through the fifth vacuum valve 45; the vacuum exhaust part includes a second three-way valve 16 connected to the outlet of the mixed gas vacuum pump 42, the second end of the second three-way valve 46 is connected to the vacuum exhaust part, and the third end of the second three-way valve 46 is connected to the corrosive exhaust treatment device 25 through the first exhaust cut-off valve 47; the vacuum exhaust part includes at least one exhaust pipe 49 with a second exhaust cut-off valve 48.

[0143] The present invention also provides a method for simultaneously processing gas cylinders of different media, including a method for processing gas cylinders containing fluorine, a method for processing gas cylinders containing mixed gas, a method for processing gas cylinders containing corrosive gas, a method for processing gas cylinders containing small quantities of conventional standard gas, and a method for processing gas cylinders containing large quantities of conventional standard gas;

[0144] When corrosive gas cylinders are involved, the treatment method includes the following steps:

[0145] Step 20: placing the corrosive gas cylinders in the corrosive gas cylinder cavity 5, all the corrosive gas cylinders are connected to the corrosive gas valve row 26, and ensure air tightness;

[0146] Step 21: venting the corrosive gas cylinder, opening the corrosive tail gas venting valve 27, and allowing the residual gas in the corrosive gas cylinder to enter the corrosive tail gas treatment device 25 for treatment; after the residual gas in the corrosive gas cylinder is vented, the corrosive tail gas venting valve 27 is closed;

[0147] Step 22: Fill the corrosive gas cylinder with balancing gas; open the balancing gas cut-off valve 21 corresponding to the corrosive gas valve row 26, and the balancing gas in the balancing gas source 20 enters each corrosive gas cylinder through the balancing gas cut-off valve 21 and the corrosive gas valve row 26;

[0148] Step 23: heating the corrosive gas cylinder; turning on the corresponding electric heater 13 in the corrosive gas cylinder cavity 5 to heat the corrosive gas cylinder to 60-80° C. for 40-50 minutes;

[0149] Step 24: vacuumizing the corrosive gas cylinder; opening the third vacuumizing valve 43 and the mixed gas vacuum pump 42, vacuumizing the corrosive gas cylinder for 40 to 50 minutes, with a target vacuum degree of 0.05 Pa; the vacuumized gas enters the corrosive tail gas treatment device 25 through the third end of the second three-way valve 46 and the first exhaust cut-off valve 47;

[0150] Step 25: Repeat the above steps 23 and 24 five times;

[0151] Step 26: Evacuate the corrosive gas cylinder again according to step 24 above;

[0152] Step 27: After the corrosive gas cylinders are vacuumed again, the batch of cylinders are processed into clean cylinders and can be used to be refilled with corrosive gas.

[0153] Example 3

[0154] A device capable of simultaneously processing gas cylinders of different media, the device comprising a first gas cylinder chamber 1 for processing gas cylinders of fluorine-containing gas and mixed gas, and a second gas cylinder chamber 2 for processing corrosive gas and conventional standard gas; the first gas cylinder chamber 1 comprises a fluorine-containing gas cylinder cavity 3 for placing fluorine-containing gas cylinders, and a mixed gas cylinder cavity 4 for placing mixed gas cylinders; the second gas cylinder chamber 2 comprises a corrosive gas cylinder cavity 5, a small conventional standard gas cylinder cavity 6 and a large conventional standard gas cylinder cavity 7; the above gas cylinder cavities are all provided with independent heating and lifting units and valve rows; the balancing gas unit, the venting unit and the vacuum unit are respectively connected to the valve row. A first baffle 8 is provided between the fluorine-containing gas cylinder cavity 3 and the mixed gas cylinder cavity 4, a second baffle 9 is provided between the corrosive gas cylinder cavity 5 and the small conventional standard gas cylinder cavity 6, and a third baffle 10 is provided between the small conventional standard gas cylinder cavity 6 and the large conventional standard gas cylinder cavity 7. The gas cylinder cavity includes a shell 11, the top of the shell 11 is provided with a hole 12 adapted to the outer contour of the upper part of the gas cylinder, the interior of the shell 11 is provided with an electric heater 13, and the inner lower part of the shell 11 is provided with a lifting part for adjusting the height of the gas cylinder. The lifting part is a movable lifting part. The movable lifting part includes a lifting platform 14, the top of the lifting platform 14 is provided with a gas cylinder placement groove 15 for placing the gas cylinder, and the bottom of the lifting platform 14 is provided with a pneumatic cylinder. The balancing gas unit includes a balancing gas source 20, and the balancing gas source 20 is connected to the valve row in each gas cylinder cavity through the corresponding balancing gas cut-off valve 21. The venting unit includes a fluorine-containing gas cylinder venting part, a corrosive gas cylinder venting part and a common gas venting part; the fluorine-containing gas cylinder venting part includes a fluorine-containing tail gas treatment device 22, and the fluorine-containing tail gas valve row 23 is connected to the fluorine-containing tail gas treatment device 22 through a fluorine-containing tail gas venting valve 24; the corrosive gas cylinder venting part includes a corrosive tail gas treatment device 25, and the corrosive gas valve row 26 is connected to the corrosive tail gas treatment device 25 through a corrosive tail gas venting valve 27; the common gas air part includes a first venting pipe 29 connected to a mixed gas cylinder valve row 28, a second venting pipe 31 connected to a small conventional standard gas cylinder valve row 30, and a third venting pipe 33 connected to a large conventional standard gas cylinder valve row 32; a first venting valve 34 is provided on the first venting pipe 29, a second venting valve 35 is provided on the second venting pipe 31, and a third venting valve 36 is provided on the third venting pipe 33.The vacuum unit includes a first vacuum unit for vacuuming fluorine-containing gas cylinders, and a second vacuum unit for vacuuming non-fluorine gas cylinders; the first vacuum unit includes a first vacuum valve 37 connected to the fluorine-containing tail gas valve row 23, and the outlet of the first vacuum valve 37 is connected to the fluorine-containing tail gas treatment device 22 through a fluorine gas vacuum pump 38; the second vacuum unit includes a first three-way valve 39 provided between the mixed gas cylinder valve row 28 and the corresponding balance gas cut-off valve 21, and the third end of the first three-way valve 39 is connected to the vacuum exhaust part through a second vacuum valve 40, a vacuum main channel 41 and a mixed gas vacuum pump 42; The valve row 26 of the conventional gas cylinder is connected to the vacuum main channel 41 through the third vacuum valve 43, the valve row 30 of the small conventional standard gas cylinder is connected to the vacuum main channel 41 through the fourth vacuum valve 44, and the valve row 32 of the large conventional standard gas cylinder is connected to the vacuum main channel 41 through the fifth vacuum valve 45; the vacuum exhaust part includes a second three-way valve 16 connected to the outlet of the mixed gas vacuum pump 42, the second end of the second three-way valve 46 is connected to the vacuum exhaust part, and the third end of the second three-way valve 46 is connected to the corrosive exhaust treatment device 25 through the first exhaust cut-off valve 47; the vacuum exhaust part includes at least one exhaust pipe 49 with a second exhaust cut-off valve 48.

[0155] The present invention also provides a method for simultaneously processing gas cylinders of different media, including a method for processing gas cylinders containing fluorine, a method for processing gas cylinders containing mixed gas, a method for processing gas cylinders containing corrosive gas, a method for processing gas cylinders containing small quantities of conventional standard gas, and a method for processing gas cylinders containing large quantities of conventional standard gas;

[0156] When handling mixed gas cylinders, the handling method includes the following steps:

[0157] Step 30: Place the mixed gas cylinders in the mixed gas cylinder cavity 4, and all the mixed gas cylinders are connected to the mixed gas cylinder valve row 28 to ensure air tightness;

[0158] Step 31: venting the mixed gas cylinder, opening the first vent valve 34, allowing the residual gas in the mixed gas cylinder to pass through the first vent valve 34 into the first vent pipe 29 for venting, and closing the first vent valve 34 after the residual gas in the mixed gas cylinder is vented;

[0159] Step 32: Fill the mixed gas cylinder with balancing gas; open the balancing gas cut-off valve 21 corresponding to the mixed gas cylinder valve row 28, and the balancing gas in the balancing gas source 20 enters each mixed gas cylinder through the balancing gas cut-off valve 21 and the mixed gas cylinder valve row 28;

[0160] Step 33: heating the mixed gas cylinder; turning on the corresponding electric heater 13 in the mixed gas cylinder cavity 4 to heat the mixed gas cylinder to 60-80° C. for 40-50 minutes;

[0161] Step 34: evacuate the mixed gas cylinder; open the second vacuum valve 40 and the mixed gas vacuum pump 42, evacuate the mixed gas cylinder, the vacuum time is 40 to 50 minutes, and the target vacuum degree is 0.05Pa; the evacuated gas is discharged through the exhaust pipe 49 with the second exhaust shut-off valve 48;

[0162] Step 35: Repeat the above steps 33 and 34 five times;

[0163] Step 36: vacuum the mixed gas cylinder again according to the above step 34;

[0164] Step 37: After the mixed gas cylinders are evacuated again, the batch of cylinders are processed into clean cylinders and can be used to be refilled with mixed gas.

[0165] Example 4

[0166] A device capable of simultaneously processing gas cylinders of different media, the device comprising a first gas cylinder chamber 1 for processing gas cylinders of fluorine-containing gas and mixed gas, and a second gas cylinder chamber 2 for processing corrosive gas and conventional standard gas; the first gas cylinder chamber 1 comprises a fluorine-containing gas cylinder cavity 3 for placing fluorine-containing gas cylinders, and a mixed gas cylinder cavity 4 for placing mixed gas cylinders; the second gas cylinder chamber 2 comprises a corrosive gas cylinder cavity 5, a small conventional standard gas cylinder cavity 6 and a large conventional standard gas cylinder cavity 7; the above gas cylinder cavities are all provided with independent heating and lifting units and valve rows; the balancing gas unit, the venting unit and the vacuum unit are respectively connected to the valve row. A first baffle 8 is provided between the fluorine-containing gas cylinder cavity 3 and the mixed gas cylinder cavity 4, a second baffle 9 is provided between the corrosive gas cylinder cavity 5 and the small conventional standard gas cylinder cavity 6, and a third baffle 10 is provided between the small conventional standard gas cylinder cavity 6 and the large conventional standard gas cylinder cavity 7. The gas cylinder cavity includes a shell 11, the top of the shell 11 is provided with a hole 12 that matches the outer contour of the upper part of the gas cylinder, the interior of the shell 11 is provided with an electric heater 13, and the inner lower part of the shell 11 is provided with a lifting part for adjusting the height of the gas cylinder. The lifting part is a fixed lifting part. The fixed lifting part includes a groove 17 and a heightening plate 18 provided on the inner wall of the shell 11; at least two outer sides of the heightening plate 18 are provided with convex strips 19 that match the groove 17. The balancing gas unit includes a balancing gas source 20, and the balancing gas source 20 is connected to the valve row in each gas cylinder cavity through a corresponding balancing gas cut-off valve 21. The venting unit includes a fluorine-containing gas cylinder venting part, a corrosive gas cylinder venting part and a common gas venting part; the fluorine-containing gas cylinder venting part includes a fluorine-containing tail gas treatment device 22, and the fluorine-containing tail gas valve row 23 is connected to the fluorine-containing tail gas treatment device 22 through a fluorine-containing tail gas venting valve 24; the corrosive gas cylinder venting part includes a corrosive tail gas treatment device 25, and the corrosive gas valve row 26 is connected to the corrosive tail gas treatment device 25 through a corrosive tail gas venting valve 27; the common gas air part includes a first venting pipe 29 connected to a mixed gas cylinder valve row 28, a second venting pipe 31 connected to a small conventional standard gas cylinder valve row 30, and a third venting pipe 33 connected to a large conventional standard gas cylinder valve row 32; a first venting valve 34 is provided on the first venting pipe 29, a second venting valve 35 is provided on the second venting pipe 31, and a third venting valve 36 is provided on the third venting pipe 33.The vacuum unit includes a first vacuum unit for vacuuming fluorine-containing gas cylinders, and a second vacuum unit for vacuuming non-fluorine gas cylinders; the first vacuum unit includes a first vacuum valve 37 connected to the fluorine-containing tail gas valve row 23, and the outlet of the first vacuum valve 37 is connected to the fluorine-containing tail gas treatment device 22 through a fluorine gas vacuum pump 38; the second vacuum unit includes a first three-way valve 39 provided between the mixed gas cylinder valve row 28 and the corresponding balance gas cut-off valve 21, and the third end of the first three-way valve 39 is connected to the vacuum exhaust part through a second vacuum valve 40, a vacuum main channel 41 and a mixed gas vacuum pump 42; The valve row 26 of the conventional gas cylinder is connected to the vacuum main channel 41 through the third vacuum valve 43, the valve row 30 of the small conventional standard gas cylinder is connected to the vacuum main channel 41 through the fourth vacuum valve 44, and the valve row 32 of the large conventional standard gas cylinder is connected to the vacuum main channel 41 through the fifth vacuum valve 45; the vacuum exhaust part includes a second three-way valve 16 connected to the outlet of the mixed gas vacuum pump 42, the second end of the second three-way valve 46 is connected to the vacuum exhaust part, and the third end of the second three-way valve 46 is connected to the corrosive exhaust treatment device 25 through the first exhaust cut-off valve 47; the vacuum exhaust part includes at least one exhaust pipe 49 with a second exhaust cut-off valve 48.

[0167] The present invention also provides a method for simultaneously processing gas cylinders of different media, including a method for processing gas cylinders containing fluorine, a method for processing gas cylinders containing mixed gas, a method for processing gas cylinders containing corrosive gas, a method for processing gas cylinders containing small quantities of conventional standard gas, and a method for processing gas cylinders containing large quantities of conventional standard gas;

[0168] When handling small batches of conventional standard gas cylinders, the handling method includes the following steps:

[0169] Step 40: placing a small amount of conventional standard gas cylinders in the small conventional standard gas cylinder cavity 6, all conventional standard gas cylinders are connected to the small conventional standard gas cylinder valve row 30, and ensure air tightness; the small amount of conventional standard gas cylinders refers to the number of conventional standard gas cylinders not exceeding 10;

[0170] Step 41: vent the conventional standard gas cylinder, open the second vent valve 35, and allow the residual gas in the conventional standard gas cylinder to enter the second vent pipe 31 through the second vent valve 35 for venting. After the residual gas in the mixed gas cylinder is vented, close the second vent valve 35;

[0171] Step 42: Fill the conventional standard gas cylinder with balancing gas; open the balancing gas cut-off valve 21 corresponding to the small conventional standard gas cylinder valve row 30, and the balancing gas in the balancing gas source 20 enters each conventional standard gas cylinder through the balancing gas cut-off valve 21 and the small conventional standard gas cylinder valve row 30;

[0172] Step 43: heating the conventional standard gas cylinder; opening the corresponding electric heater 13 in the small conventional standard gas cylinder valve row 30, heating the conventional standard gas cylinder to 60-80°C for 40-50 minutes;

[0173] Step 44: evacuate the conventional standard gas cylinder; open the fourth evacuation valve 44 and the mixed gas vacuum pump (42), evacuate the conventional standard gas cylinder, the evacuation time is 40 to 50 minutes, and the target vacuum degree is 0.05 Pa; the evacuated gas is discharged through the evacuation pipeline 49 with the second evacuation shut-off valve 48;

[0174] Step 45: Repeat the above steps 43 and 44 five times;

[0175] Step 46: vacuumizing the conventional standard gas cylinder again according to the above step 44;

[0176] Step 47: After the conventional standard gas cylinders are evacuated again, the batch of cylinders are processed into clean cylinders and can be used to be refilled with conventional standard gas.

[0177] Example 5

[0178] A device capable of simultaneously processing gas cylinders of different media, the device comprising a first gas cylinder chamber 1 for processing gas cylinders of fluorine-containing gas and mixed gas, and a second gas cylinder chamber 2 for processing corrosive gas and conventional standard gas; the first gas cylinder chamber 1 comprises a fluorine-containing gas cylinder cavity 3 for placing fluorine-containing gas cylinders, and a mixed gas cylinder cavity 4 for placing mixed gas cylinders; the second gas cylinder chamber 2 comprises a corrosive gas cylinder cavity 5, a small conventional standard gas cylinder cavity 6 and a large conventional standard gas cylinder cavity 7; the above gas cylinder cavities are all provided with independent heating and lifting units and valve rows; the balancing gas unit, the venting unit and the vacuum unit are respectively connected to the valve row. A first baffle 8 is provided between the fluorine-containing gas cylinder cavity 3 and the mixed gas cylinder cavity 4, a second baffle 9 is provided between the corrosive gas cylinder cavity 5 and the small conventional standard gas cylinder cavity 6, and a third baffle 10 is provided between the small conventional standard gas cylinder cavity 6 and the large conventional standard gas cylinder cavity 7. The gas cylinder cavity includes a shell 11, the top of the shell 11 is provided with a hole 12 that matches the outer contour of the upper part of the gas cylinder, the interior of the shell 11 is provided with an electric heater 13, and the inner lower part of the shell 11 is provided with a lifting part for adjusting the height of the gas cylinder. The lifting part is a movable lifting part. The movable lifting part includes a lifting platform 14, the top of the lifting platform 14 is provided with a gas cylinder placement groove 15 for placing the gas cylinder, and the bottom of the lifting platform 14 is provided with a hydraulic cylinder. The fixed lifting part includes a groove 17 and a heightening plate 18 provided on the inner wall of the shell 11; at least two outer sides of the heightening plate 18 are provided with convex strips 19 that match the groove 17. The balancing gas unit includes a balancing gas source 20, and the balancing gas source 20 is connected to the valve row in each gas cylinder cavity through the corresponding balancing gas cut-off valve 21. The venting unit includes a fluorine-containing gas cylinder venting part, a corrosive gas cylinder venting part and a common gas venting part; the fluorine-containing gas cylinder venting part includes a fluorine-containing tail gas treatment device 22, and the fluorine-containing tail gas valve row 23 is connected to the fluorine-containing tail gas treatment device 22 through a fluorine-containing tail gas venting valve 24; the corrosive gas cylinder venting part includes a corrosive tail gas treatment device 25, and the corrosive gas valve row 26 is connected to the corrosive tail gas treatment device 25 through a corrosive tail gas venting valve 27; the common gas air part includes a first venting pipe 29 connected to a mixed gas cylinder valve row 28, a second venting pipe 31 connected to a small conventional standard gas cylinder valve row 30, and a third venting pipe 33 connected to a large conventional standard gas cylinder valve row 32; a first venting valve 34 is provided on the first venting pipe 29, a second venting valve 35 is provided on the second venting pipe 31, and a third venting valve 36 is provided on the third venting pipe 33.The vacuum unit includes a first vacuum unit for vacuuming fluorine-containing gas cylinders, and a second vacuum unit for vacuuming non-fluorine gas cylinders; the first vacuum unit includes a first vacuum valve 37 connected to the fluorine-containing tail gas valve row 23, and the outlet of the first vacuum valve 37 is connected to the fluorine-containing tail gas treatment device 22 through a fluorine gas vacuum pump 38; the second vacuum unit includes a first three-way valve 39 provided between the mixed gas cylinder valve row 28 and the corresponding balance gas cut-off valve 21, and the third end of the first three-way valve 39 is connected to the vacuum exhaust part through a second vacuum valve 40, a vacuum main channel 41 and a mixed gas vacuum pump 42; The valve row 26 of the conventional gas cylinder is connected to the vacuum main channel 41 through the third vacuum valve 43, the valve row 30 of the small conventional standard gas cylinder is connected to the vacuum main channel 41 through the fourth vacuum valve 44, and the valve row 32 of the large conventional standard gas cylinder is connected to the vacuum main channel 41 through the fifth vacuum valve 45; the vacuum exhaust part includes a second three-way valve 16 connected to the outlet of the mixed gas vacuum pump 42, the second end of the second three-way valve 46 is connected to the vacuum exhaust part, and the third end of the second three-way valve 46 is connected to the corrosive exhaust treatment device 25 through the first exhaust cut-off valve 47; the vacuum exhaust part includes at least one exhaust pipe 49 with a second exhaust cut-off valve 48.

[0179] The present invention also provides a method for simultaneously processing gas cylinders of different media, including a method for processing gas cylinders containing fluorine, a method for processing gas cylinders containing mixed gas, a method for processing gas cylinders containing corrosive gas, a method for processing gas cylinders containing small quantities of conventional standard gas, and a method for processing gas cylinders containing large quantities of conventional standard gas;

[0180] When there are large quantities of conventional standard gas cylinders, the processing method includes the following steps:

[0181] Step 50: placing a large number of conventional standard gas cylinders in the large conventional standard gas cylinder cavity 7, all conventional standard gas cylinders are connected to the large conventional standard gas cylinder valve row 32, and ensure air tightness; the large number of conventional standard gas cylinders refers to the number of conventional standard gas cylinders not exceeding 20;

[0182] Step 51: vent the conventional standard gas cylinder, open the third vent valve 36, and allow the residual gas in the conventional standard gas cylinder to pass through the third vent valve 36 into the third vent pipe 33 for venting. After the residual gas in the mixed gas cylinder is vented, close the third vent valve 36;

[0183] Step 52: Fill the conventional standard gas cylinder with balancing gas; open the balancing gas cut-off valve 21 corresponding to the large conventional standard gas cylinder valve row 32, and the balancing gas in the balancing gas source 20 enters each conventional standard gas cylinder through the balancing gas cut-off valve 21 and the large conventional standard gas cylinder valve row 32;

[0184] Step 53: heating the conventional standard gas cylinder; opening the corresponding electric heater 13 in the large conventional standard gas cylinder valve row 32, heating the conventional standard gas cylinder to 60-80°C for 40-50 minutes;

[0185] Step 54: vacuumize the conventional standard gas cylinder; open the fifth vacuum valve 45 and the mixed gas vacuum pump 42, vacuumize the conventional standard gas cylinder, the vacuum time is 40 to 50 minutes, and the target vacuum degree is 0.05Pa; the vacuumized gas is discharged through the exhaust pipe 49 with the second exhaust cut-off valve 48;

[0186] Step 55: Repeat the above steps 53 and 54 five times;

[0187] Step 56: vacuumizing the conventional standard gas cylinder again according to the above step 54;

[0188] Step 57: After the conventional standard gas cylinders are evacuated again, the batch of gas cylinders are processed into clean gas cylinders and can be used to be refilled with conventional standard gas.

[0189] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connection", "connected" and the like should be understood in a broad sense. For example, it can be a fixed connection, an integral connection, or a detachable connection; it can also be the internal connection of two elements; it can be a direct connection, or it can be indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. The above examples are only specific descriptions of the feasible implementation methods of the present invention. They are not intended to limit the scope of protection of the present invention. All equivalent implementation methods, changes and modifications that do not deviate from the technical spirit of the present invention should be included in the scope of protection of the present invention.

Claims

1. A device capable of simultaneously processing gas cylinders of different media, characterized in that: The device comprises a first gas cylinder chamber (1) for processing gas cylinders containing fluorine and mixed gases, and a second gas cylinder chamber (2) for processing corrosive gases and conventional standard gases; The first gas cylinder chamber (1) comprises a fluorine-containing gas cylinder cavity (3) for accommodating a fluorine-containing gas cylinder, and a mixed gas cylinder cavity (4) for accommodating a mixed gas cylinder; The second gas cylinder chamber (2) comprises a cavity (5) for placing a corrosive gas cylinder, a cavity (6) for a small conventional standard gas cylinder, and a cavity (7) for a large conventional standard gas cylinder; The above-mentioned gas cylinder cavities are all provided with independent heating and lifting units and valve rows; The balancing gas unit, the venting unit and the vacuum pumping unit are respectively connected to the valve row.

2. The device for simultaneously processing gas cylinders of different media according to claim 1 is characterized in that: A first baffle (8) is provided between the fluorine-containing gas cylinder cavity (3) and the mixed gas cylinder cavity (4), a second baffle (9) is provided between the corrosive gas cylinder cavity (5) and the small conventional standard gas cylinder cavity (6), and a third baffle (10) is provided between the small conventional standard gas cylinder cavity (6) and the large conventional standard gas cylinder cavity (7).

3. A device capable of simultaneously processing gas cylinders of different media according to claim 1 or 2, characterized in that: The gas cylinder cavity comprises a shell (11), the top of the shell (11) is provided with a hole (12) adapted to the outer contour of the upper part of the gas cylinder, the interior of the shell (11) is provided with an electric heater (13), and the lower inner part of the shell (11) is provided with a lifting part for adjusting the height of the gas cylinder.

4. The device for simultaneously processing gas cylinders of different media according to claim 3 is characterized in that: The lifting part is a movable lifting part or a fixed lifting part.

5. The device for simultaneously processing gas cylinders of different media according to claim 4 is characterized in that: The movable lifting member comprises a lifting platform (14), the top of the lifting platform (14) is provided with a gas cylinder placement groove (15) for placing the gas cylinder, and the bottom of the lifting platform (14) is provided with a hydraulic cylinder, an electric telescopic rod or a pneumatic cylinder (16).

6. The device for simultaneously processing gas cylinders of different media according to claim 4 is characterized in that: The fixed lifting member comprises a groove (17) provided on the inner wall of the housing (11) and a heightening plate (18); at least two outer sides of the heightening plate (18) are provided with convex strips (19) matching the groove (17).

7. The device for simultaneously processing gas cylinders of different media according to claim 1 is characterized in that: The balancing gas unit comprises a balancing gas source (20), and the balancing gas source (20) is connected to the valve row in each gas cylinder cavity through a corresponding balancing gas cut-off valve (21).

8. The device capable of simultaneously processing gas cylinders of different media according to claim 1, characterized in that: The venting unit includes a fluorine-containing gas cylinder venting part, a corrosive gas cylinder venting part and a common gas venting part; The fluorine-containing gas cylinder venting part comprises a fluorine-containing tail gas treatment device (22), and the fluorine-containing tail gas valve row (23) is connected to the fluorine-containing tail gas treatment device (22) through a fluorine-containing tail gas venting valve (24); The corrosive gas cylinder venting part comprises a corrosive tail gas treatment device (25), and the corrosive gas valve row (26) is connected to the corrosive tail gas treatment device (25) through a corrosive tail gas venting valve (27); The common gas empty part comprises a first venting pipe (29) connected to the mixed gas cylinder valve row (28), a second venting pipe (31) connected to the small conventional standard gas cylinder valve row (30), and a third venting pipe (33) connected to the large conventional standard gas cylinder valve row (32); the first venting pipe (29) is provided with a first venting valve (34), the second venting pipe (31) is provided with a second venting valve (35), and the third venting pipe (33) is provided with a third venting valve (36).

9. The device capable of simultaneously processing gas cylinders of different media according to claim 7, characterized in that: The vacuum pumping unit comprises a first vacuum pumping unit for vacuuming a fluorine-containing gas cylinder, and a second vacuum pumping unit for vacuuming a non-fluorine gas cylinder; The first vacuum unit comprises a first vacuum valve (37) connected to the fluorine-containing tail gas valve row (23), and the outlet of the first vacuum valve (37) is connected to the fluorine-containing tail gas treatment device (22) via a fluorine gas vacuum pump (38); The second vacuum unit comprises a first three-way connection (39) provided between the mixed gas cylinder valve row (28) and the corresponding balance gas cut-off valve (21), and the third end of the first three-way connection (39) is connected to the vacuum exhausting part through a second vacuum valve (40), a vacuum main channel (41) and a mixed gas vacuum pump (42); The corrosive gas cylinder valve row (26) is connected to the vacuum main channel (41) via the third vacuum valve (43), the small conventional standard gas cylinder valve row (30) is connected to the vacuum main channel (41) via the fourth vacuum valve (44), and the large conventional standard gas cylinder valve row (32) is connected to the vacuum main channel (41) via the fifth vacuum valve (45); The vacuum exhaust section comprises a second tee (46) connected to the outlet of the mixed gas vacuum pump (42), a second end of the second tee (46) is connected to the vacuum exhaust component, and a third end of the second tee (46) is connected to the corrosive tail gas treatment device (25) via a first exhaust cut-off valve (47); The vacuum evacuation device comprises at least one evacuation line (49) with a second evacuation shut-off valve (48).

10. A method for simultaneously processing gas cylinders of different media, characterized in that: The method includes a method for treating fluorine-containing gas cylinders, a method for treating mixed gas cylinders, a method for treating corrosive gas cylinders, a method for treating small batches of conventional standard gas cylinders, and a method for treating large batches of conventional standard gas cylinders; Among them, the treatment method of fluorine-containing gas cylinders includes the following steps: Step 10: placing the fluorine-containing gas cylinders in the fluorine-containing gas cylinder cavity (3), and all the fluorine-containing gas cylinders are connected to the fluorine-containing tail gas valve row (23), and the airtightness is ensured; Step 11: venting the fluorine-containing gas cylinder, opening the fluorine-containing tail gas venting valve (24), and allowing the residual gas in the fluorine-containing gas cylinder to enter the fluorine-containing tail gas treatment device (22) for treatment; after the residual gas in the fluorine-containing gas cylinder is vented, the fluorine-containing tail gas venting valve (24) is closed; Step 12: Fill the fluorine-containing gas cylinder with balancing gas; open the balancing gas cut-off valve (21) corresponding to the fluorine-containing tail gas valve row (23), and the balancing gas in the balancing gas source (20) enters each fluorine-containing gas cylinder through the balancing gas cut-off valve (21) and the fluorine-containing tail gas valve row (23); Step 13: heating the fluorine-containing gas cylinder; turning on the corresponding electric heater (13) in the fluorine-containing gas cylinder cavity (3), heating the fluorine-containing gas cylinder to 60-80° C. for 40-50 minutes; Step 14: vacuumizing the fluorine-containing gas cylinder; opening the first vacuumizing valve (37) and the fluorine gas vacuum pump (38), and vacuumizing the fluorine-containing gas cylinder for 40 to 50 minutes, with a target vacuum degree of 0.05 Pa; Step 15: Repeat steps 13 and 14 five times; Step 16: vacuum the fluorine-containing gas cylinder again according to the above step 14; Step 17: After the fluorine-containing gas cylinders are vacuumed again, the batch of gas cylinders are processed into clean gas cylinders and can be used to refill the fluorine-containing gas; Among them, the method for handling corrosive gas cylinders includes the following steps: Step 20: placing the corrosive gas cylinders in the corrosive gas cylinder cavity (5), and all the corrosive gas cylinders are connected to the corrosive gas valve row (26) to ensure air tightness; Step 21: venting the corrosive gas cylinder, opening the corrosive tail gas venting valve (27), and allowing the residual gas in the corrosive gas cylinder to enter the corrosive tail gas treatment device (25) for treatment; after the residual gas in the corrosive gas cylinder is vented, closing the corrosive tail gas venting valve (27); Step 22: Fill the corrosive gas cylinder with balancing gas; open the balancing gas cut-off valve (21) corresponding to the corrosive gas valve row (26), and the balancing gas in the balancing gas source (20) enters each corrosive gas cylinder through the balancing gas cut-off valve (21) and the corrosive gas valve row (26); Step 23: heating the corrosive gas cylinder; turning on the corresponding electric heater (13) in the corrosive gas cylinder cavity (5) to heat the corrosive gas cylinder to 60-80° C. for 40-50 minutes; Step 24: evacuate the corrosive gas cylinder; open the third evacuation valve (43) and the mixed gas vacuum pump (42), evacuate the corrosive gas cylinder, the evacuation time is 40 to 50 minutes, and the target vacuum degree is 0.05 Pa; the evacuated gas enters the corrosive tail gas treatment device (25) through the third end of the second three-way valve (46) and the first exhaust cut-off valve (47); Step 25: Repeat the above steps 23 and 24 five times; Step 26: Evacuate the corrosive gas cylinder again according to step 24 above; Step 27: After the corrosive gas cylinders are vacuumed again, the batch of cylinders are treated as clean cylinders and can be used to be refilled with corrosive gas; The method for handling mixed gas cylinders includes the following steps: Step 30: Place the mixed gas cylinders in the mixed gas cylinder cavity (4), and all the mixed gas cylinders are connected to the mixed gas cylinder valve row (28) to ensure air tightness; Step 31: venting the mixed gas cylinder, opening the first vent valve (34), allowing the residual gas in the mixed gas cylinder to pass through the first vent valve (34) into the first vent pipe (29) for venting, and closing the first vent valve (34) after the residual gas in the mixed gas cylinder is vented; Step 32: Fill the mixed gas cylinder with balancing gas; open the balancing gas cut-off valve (21) corresponding to the mixed gas cylinder valve row (28), and the balancing gas in the balancing gas source (20) enters each mixed gas cylinder through the balancing gas cut-off valve (21) and the mixed gas cylinder valve row (28); Step 33: heating the mixed gas cylinder; turning on the corresponding electric heater (13) in the mixed gas cylinder cavity (4) to heat the mixed gas cylinder to 60-80° C. for 40-50 minutes; Step 34: evacuate the mixed gas cylinder; open the second vacuum valve (40) and the mixed gas vacuum pump (42), evacuate the mixed gas cylinder, the vacuum time is 40 to 50 minutes, and the target vacuum degree is 0.05 Pa; the evacuated gas is discharged through the exhaust pipe (49) with the second exhaust shut-off valve (48); Step 35: Repeat the above steps 33 and 34 five times; Step 36: vacuum the mixed gas cylinder again according to the above step 34; Step 37: After the mixed gas cylinders are vacuumed again, the batch of cylinders are processed into clean cylinders and can be used to be refilled with mixed gas; Among them, the processing method of small batches of conventional standard gas cylinders includes the following steps: Step 40: placing a small number of conventional standard gas cylinders in the small conventional standard gas cylinder cavity (6), all conventional standard gas cylinders are connected to the small conventional standard gas cylinder valve row (30), and ensure air tightness; the small number of conventional standard gas cylinders refers to the number of conventional standard gas cylinders not exceeding 10; Step 41: venting the conventional standard gas cylinder, opening the second venting valve (35), allowing the residual gas in the conventional standard gas cylinder to pass through the second venting valve (35) into the second venting pipe (31) for venting, and closing the second venting valve (35) after the residual gas in the mixed gas cylinder is vented; Step 42: Fill the conventional standard gas cylinder with balancing gas; open the balancing gas cut-off valve (21) corresponding to the valve row (30) of the small conventional standard gas cylinder, and the balancing gas in the balancing gas source (20) enters each conventional standard gas cylinder through the balancing gas cut-off valve (21) and the valve row (30) of the small conventional standard gas cylinder; Step 43: heating the conventional standard gas cylinder; turning on the corresponding electric heater (13) in the small conventional standard gas cylinder valve row (30), heating the conventional standard gas cylinder to 60-80° C. for 40-50 minutes; Step 44: evacuate the conventional standard gas cylinder; open the fourth evacuation valve (44) and the mixed gas vacuum pump (42), evacuate the conventional standard gas cylinder, the evacuation time is 40 to 50 minutes, and the target vacuum degree is 0.05 Pa; the evacuated gas is discharged through the evacuation pipeline (49) with the second evacuation shut-off valve (48); Step 45: Repeat the above steps 43 and 44 five times; Step 46: vacuumizing the conventional standard gas cylinder again according to the above step 44; Step 47: After the conventional standard gas cylinders are vacuumed again, the batch of gas cylinders are processed into clean gas cylinders and can be used to be refilled with conventional standard gas; Among them, the processing method of large quantities of conventional standard gas cylinders includes the following steps: Step 50: placing a large number of conventional standard gas cylinders in the large conventional standard gas cylinder cavity (7), all of which are connected to the large conventional standard gas cylinder valve row (32) and ensure air tightness; the large number of conventional standard gas cylinders refers to the number of conventional standard gas cylinders not exceeding 20; Step 51: venting the conventional standard gas cylinder, opening the third venting valve (36), allowing the residual gas in the conventional standard gas cylinder to pass through the third venting valve (36) into the third venting pipe (33) for venting, and closing the third venting valve (36) after the residual gas in the mixed gas cylinder is vented; Step 52: Fill the conventional standard gas cylinder with balancing gas; open the balancing gas cut-off valve (21) corresponding to the large conventional standard gas cylinder valve row (32), and the balancing gas in the balancing gas source (20) enters each conventional standard gas cylinder through the balancing gas cut-off valve (21) and the large conventional standard gas cylinder valve row (32); Step 53: heating the conventional standard gas cylinder; turning on the corresponding electric heater (13) in the large conventional standard gas cylinder valve row (32), heating the conventional standard gas cylinder to 60-80° C. for 40-50 minutes; Step 54: evacuate the conventional standard gas cylinder; open the fifth evacuation valve (45) and the mixed gas vacuum pump (42), evacuate the conventional standard gas cylinder, the evacuation time is 40 to 50 minutes, and the target vacuum degree is 0.05 Pa; the evacuated gas is discharged through the evacuation pipeline (49) with the second evacuation shut-off valve (48); Step 55: Repeat the above steps 53 and 54 five times; Step 56: vacuumizing the conventional standard gas cylinder again according to the above step 54; Step 57: After the conventional standard gas cylinders are evacuated again, the batch of gas cylinders are processed into clean gas cylinders and can be used to be refilled with conventional standard gas.

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