A cold trap device for an oil diffusion pump in a vacuum coating machine

Abstract

This invention relates to the field of cold trap technology, and more particularly to a cold trap device for an oil diffusion pump in a vacuum coating machine. The device includes a housing and a condensation assembly, comprising a cold trap shell, a cooling tank, and a liquid storage container. The cold trap shell is disposed within the housing, and its interior forms a receiving cavity. An air inlet pipe is located at the top of the cold trap shell, and its inlet is connected to a steam inlet. The cooling tank is installed at the top of the receiving cavity, and its interior forms a cooling chamber. The upper part of the cooling chamber is connected to the lower outlet of the air inlet pipe via a guide pipe, and the lower part of the cooling chamber forms a drain outlet. A coiled condenser tube is disposed on the outer wall of the cooling tank. A spray assembly is used to atomize cooling water and spray it into the cooling chamber, ensuring sufficient contact between the atomized cooling water and steam. The liquid storage container is used to collect condensate. A water cooling assembly is disposed within the housing and connected to the coiled condenser tube to provide cooling water. This invention achieves efficient steam condensation and recovery.

Description

Technical Field

[0001] This invention relates to the field of cold trap technology, specifically to an oil diffusion pump cold trap device for a vacuum coating machine. Background Technology

[0002] The main structure of the oil diffusion pump in a vacuum coating machine consists of a pump casing, pump core, silicone oil, and an electric furnace. Its principle is to use the electric furnace to heat the silicone oil to 270℃ at the bottom of the pump, causing it to boil and generate oil vapor that is sprayed upwards. This vapor is then ejected through primary, secondary, and tertiary nozzles, forming a high-speed spray oil film. At this point, using aerodynamic principles, air molecules are adsorbed onto the surface of the oil film, compressed by three stages, and then extracted by a mechanical vacuum pump. The cold trap, installed between the vacuum container and the vacuum pump, cools the gas, causing the vapor to condense and be captured. The cold trap is crucial for the oil diffusion pump, as it captures organic matter and water vapor, preventing these substances from entering the pump and reducing its lifespan and vacuum level. Therefore, it is essential for the proper functioning of the oil pump.

[0003] In related technologies, oil diffusion pumps generate a large amount of steam during operation, which contains organic matter and water vapor. If this steam is not treated in time, it will adversely affect the coating quality and equipment performance. Existing cold trap devices often suffer from low condensation efficiency and inconvenient condensate collection when condensing this oil vapor. Summary of the Invention

[0004] This invention aims to at least solve one of the technical problems existing in the prior art. Therefore, the object of this invention is to provide an oil diffusion pump cold trap device for a vacuum coating machine, which achieves efficient steam condensation and recovery through optimized design of the condensation and spraying components.

[0005] The first aspect of this invention provides an oil diffusion pump cold trap device for a vacuum coating machine, comprising a housing with an openable front end for housing and protecting internal components; a steam inlet is provided at the top of the housing, and a steam outlet is provided on the side wall of the housing; further comprising:

[0006] A condensation assembly, comprising a cold trap shell, a cooling tank, and a liquid storage container;

[0007] The cold trap housing is disposed within the box, and an accommodating cavity is formed inside the cold trap housing. An air inlet pipe is provided at the upper part of the cold trap housing, and the air inlet of the air inlet pipe is connected to the steam inlet for receiving and cooling steam from the oil diffusion pump.

[0008] The cooling tank is installed on the upper part of the receiving cavity, and a cooling chamber is formed inside it. The upper part of the cooling chamber is connected to the lower air outlet of the air inlet pipe through a guide pipe, and the lower part of the cooling chamber forms a drain outlet. A coiled condenser is provided on the outer wall of the cooling tank, and the coiled condenser is in contact with the outer wall of the cooling tank.

[0009] A spray assembly is installed inside the cooling chamber. The inlet of the spray assembly is connected to the outlet of the coil-type condenser. The spray assembly is used to atomize the cooling water and spray it into the cooling chamber, so that the atomized cooling water and steam can come into full contact.

[0010] The liquid storage container is disposed in the receiving cavity and located below the drain port, and the liquid storage container is used to collect condensate;

[0011] A water-cooling assembly is disposed inside the housing and connected to the coil-type condenser tube to provide cooling water.

[0012] In a first aspect of the present invention, as a preferred embodiment, the coil-type condenser includes multiple ring pipes and multiple vertical transmission pipes. The multiple ring pipes are distributed at equal intervals along the height direction on the outer wall of the cooling tank. Any two adjacent ring pipes are connected by multiple vertical transmission pipes. The uppermost ring pipe is connected to the water outlet of the water-cooling assembly, and the lowermost ring pipe is connected to the water inlet of the water-cooling assembly.

[0013] In a first aspect of the invention, as a preferred embodiment, the spray assembly is in multiple groups, which are distributed at equal intervals along the height direction within the cooling chamber.

[0014] In a first aspect of the present invention, as a preferred embodiment, each spray assembly includes a mounting bracket, a diversion straight pipe, a first diversion annular pipe, a second diversion annular pipe, and a plurality of atomizing nozzles;

[0015] The mounting bracket is installed on the inner wall of the cooling chamber;

[0016] The inlet end of the split straight pipe passes through the cooling tank and is connected to one of the corresponding ring pipes;

[0017] The first and second diversion annular pipes are respectively installed on the mounting frame, and the inlet ends of the first and second diversion annular pipes are respectively connected to the diversion straight pipe.

[0018] Multiple atomizing nozzles are evenly distributed on the bottom surface of both the first and second diversion annular pipes.

[0019] In a first aspect of the present invention, as a preferred embodiment, the condensation assembly further includes multiple layers of condensation baffles, the multiple layers of condensation baffles are stacked and detachably installed in the receiving cavity and located directly below the drain port, and each condensation baffle has multiple inclined grooves penetrating its upper and lower surfaces on its surface, and the inclined grooves of the multiple condensation baffles are connected one-to-one from top to bottom to form multiple curved channels.

[0020] In a first aspect of the invention, as a preferred embodiment, the condensation assembly further includes a filter element disposed within the receiving cavity and below the lowest condensation baffle. The upper end face of the filter element is connected to the bottom surface of the lowest condensation baffle, and its lower end face is connected to the top opening of the liquid storage container. The filter element is used to receive condensate from the condensation baffle and filter organic matter from the condensate.

[0021] In a first aspect of the present invention, as a preferred embodiment, the water-cooling assembly includes a circulating water tank and a cooling tank;

[0022] The circulating water tank is installed inside the tank, and the interior of the circulating water tank is equipped with a cooling water circulating coil;

[0023] The refrigeration box is located on top of the circulating water tank; the refrigeration box is equipped with several refrigeration plates;

[0024] The inlet of the cooling water circulation coil is connected to the lowest ring pipe via a pipe, and the outlet of the cooling water circulation coil is connected to the inner cavity of the circulating water tank. The inner cavity of the circulating water tank is also connected to the inlet of the refrigeration box via a cooling water return pipe.

[0025] The outlet of the refrigeration unit is connected to the uppermost ring pipe via a cooling water delivery pipe;

[0026] A first water pump is installed on the cooling water return pipe, and a second water pump is installed on the cooling water delivery pipe.

[0027] In a preferred embodiment of the first aspect of the present invention, the inner cavity of the circulating water tank is further provided with a condensing inner chamber, and a steam transmission pipe is also provided. One end of the steam transmission pipe is connected to the lower part of the cooling chamber, and the other end is connected to the inner cavity of the condensing inner chamber. The cooling water circulation coil is in contact with the outer wall of the condensing inner chamber, so that the cooling water circulation coil can condense the steam entering the inner cavity of the condensing inner chamber again. An exhaust pipe connected to the inner cavity of the condensing inner chamber is also provided on the side wall of the circulating water tank, and the exhaust pipe is connected to the steam outlet.

[0028] In a first aspect of the present invention, as a preferred embodiment, a regulating water tank is further included. The regulating water tank is disposed on top of the circulating water tank and is connected to the circulating water tank through a water replenishment pipe. A third water pump is provided on the water replenishment pipe. When the water level in the circulating water tank is too low, water is replenished to the circulating water tank by regulating the water tank.

[0029] In a first aspect of the present invention, as a preferred embodiment, a drain outlet is provided on the outer wall of the liquid storage container, and the drain outlet is connected to an external water pumping device via a pipe.

[0030] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0031] 1. The cold trap device of the present invention is installed at or near the inlet of an oil diffusion pump. When the oil diffusion pump starts working, it generates a strong negative pressure environment to attract and expel gas molecules from the vacuum system. These gas molecules, upon entering the cold trap device through the inlet of the oil diffusion pump, diffuse and first enter the cooling chamber through the inlet pipe. Inside the cooling chamber, steam exchanges heat with the cooling water in the coiled condenser, initiating cooling and condensation. Simultaneously, the spray assembly atomizes the cooling water and sprays it into the cooling chamber, ensuring sufficient contact and heat exchange with the steam, further accelerating the condensation process. The condensed liquid flows into a storage container through the drain port for collection and treatment. The water-cooling assembly provides a continuous supply of cooling water to the coiled condenser, ensuring the continuous condensation process. Thus, the overall solution of the present invention achieves efficient steam condensation and recovery through optimized design of the condensation assembly and spray assembly.

[0032] 2. The coil-type condenser tube of this invention includes multiple ring tubes and multiple vertical transmission tubes. Cooling water flows out from the outlet of the water-cooling assembly and enters the uppermost ring tube. Under the action of a water pump, the cooling water flows downward along the vertical transmission tubes, passing through each ring tube in sequence. In each ring tube, the cooling water exchanges heat with the outer wall of the cooling tank, absorbing heat and cooling down. The cooled cooling water continues to flow downward along the vertical transmission tubes until it reaches the lowermost ring tube. Finally, the cooling water flows back from the lowermost ring tube to the inlet of the water-cooling assembly for further cooling and circulation. This design ensures that the cooling water can flow efficiently through the entire condenser tube and fully exchange heat with the outer wall of the cooling chamber, thereby achieving a highly efficient cooling effect. At the same time, through the circulation action of the water-cooling assembly, cooling water can be continuously supplied to the condenser tube, maintaining its cooling capacity.

[0033] 3. The spray assembly of this invention comprises multiple sets, which are evenly distributed along the height direction within the cooling chamber. When steam or high-temperature gas passes through the cooling chamber, the multiple sets of evenly distributed spray assemblies simultaneously spray water mist. This water mist undergoes sufficient heat exchange with the steam or high-temperature gas, thereby effectively reducing its temperature. Because the spray assemblies are evenly distributed, all areas within the cooling chamber receive a uniform cooling effect. The simultaneous operation of multiple sets of spray assemblies can significantly increase the cooling area and cooling speed within the cooling chamber. Each set of spray assemblies includes a mounting bracket, a straight branch pipe, a first branch annular pipe, a second branch annular pipe, and multiple atomizing nozzles. When cooling water flows through each annular pipe via a coiled condenser, a portion of the cooling water enters the first and second branch annular pipes through the straight branch pipe. Then, the cooling water is atomized into fine water droplets or water mist through the atomizing nozzles. These droplets or water mist disperse inside the cooling chamber and exchange heat with hot air or hot surfaces. In this way, the spray assembly can effectively reduce the temperature inside the cooling chamber, achieving a highly efficient cooling effect. In summary, this spray assembly design has advantages such as compact structure, reasonable layout, and efficient cooling effect.

[0034] 4. This invention utilizes a multi-layered condensing baffle design, allowing steam to contact the baffle surface multiple times during passage, increasing the chances of condensation. The inclined grooves on each baffle cleverly guide steam flow, creating vortices as it passes through, further enhancing the condensation effect. The curved channel design allows steam to exchange heat along a longer path during condensation, thus improving condensation efficiency. This design ensures that steam can fully contact the cooling surface, achieving rapid and efficient condensation. The condensing baffles are designed to be removable, greatly facilitating equipment cleaning and maintenance. When it is necessary to clean impurities generated during condensation or to perform equipment maintenance, simply remove the baffle; there is no need for complex disassembly of the entire condensing assembly. The condensing baffle design, located directly below the drain port, ensures that the condensate flows smoothly into the storage container, avoiding condensate accumulation inside the equipment and potential contamination problems.

[0035] 5. The circulating water tank of the present invention also includes a condensing inner tank within its inner cavity, and a steam transmission pipe. One end of the steam transmission pipe is connected to the lower part of the cooling chamber, and the other end is connected to the inner cavity of the condensing inner tank. The cooling water circulation coil is in contact with the outer wall of the condensing inner tank, allowing the cooling water circulation coil to re-condense the steam entering the inner cavity of the condensing inner tank. An exhaust pipe connected to the inner cavity of the condensing inner tank is also provided on the side wall of the circulating water tank, and the exhaust pipe is connected to the steam outlet. During operation, the oil diffusion pump generates steam, which is introduced into the cooling chamber of the cold trap device through the inlet pipe. Inside the cooling chamber, the steam exchanges heat with the cooling water in the coiled condenser. The cooling water circulates in the condenser, absorbing heat from the steam, causing it to begin cooling and gradually condense. Not all the steam in the cooling chamber condenses immediately. Some uncondensed steam is transported to the condensing inner tank through the steam transmission pipe. The steam entering the condensing inner tank undergoes further heat exchange with the cooling water circulation coil on the outer wall of the condensing inner tank. Due to the continuous circulation of cooling water and the low temperature, the steam will condense back into liquid in the condenser chamber, and the remaining steam will be discharged through the steam outlet. Thus, this invention achieves efficient steam condensation through a dual condensation design of the cooling chamber and the condenser chamber, as well as the recycling of cooling water. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the oil diffusion pump cold trap device of the vacuum coating machine of the present invention;

[0037] Figure 2 This is a schematic diagram of the structure of the oil diffusion pump cold trap device with the casing removed according to the present invention;

[0038] Figure 3 This is a schematic diagram of the oil diffusion pump cold trap device of the present invention with the casing removed from the body;

[0039] Figure 4 This is a schematic diagram of the condensation assembly of the present invention with the cold trap shell removed;

[0040] Figure 5 This is a schematic diagram of the split structure of the condensation assembly of the present invention without the cold trap shell;

[0041] Figure 6 This is a partial cross-sectional view of the cold trap housing of the present invention;

[0042] Figure 7 This is a schematic diagram of the structure of the coil-type condenser and spray assembly of the present invention;

[0043] Figure 8 This is a schematic diagram of the circulating water tank of the present invention;

[0044] Figure 9This is a schematic diagram of the cooling water circulation coil of the present invention.

[0045] In the picture:

[0046] 10. Casing; 11. Steam inlet;

[0047] 20. Condensation assembly; 21. Cold trap shell; 211. Inlet pipe; 22. Cooling tank; 221. Cooling chamber; 222. Guide pipe; 223. Coil-type condenser tube; 2231. Ring pipe; 2232. Vertical transfer pipe; 23. Liquid storage container; 24. Condensation baffle; 241. Inclined groove; 242. Curved channel; 25. Filter element;

[0048] 30. Spray assembly; 31. Mounting bracket; 32. Diverter straight pipe; 33. First diverter annular pipe; 34. Second diverter annular pipe; 35. Multiple atomizing nozzles;

[0049] 40. Water-cooled components; 41. Circulating water tank; 411. Cooling water circulating coil; 412. Condensation chamber; 42. Refrigeration chamber; 421. Refrigeration element; 43. Cooling water return pipe; 44. Cooling water delivery pipe; 45. First water pump; 46. Second water pump; 47. Steam transmission pipe;

[0050] 50. Adjusting water tank; 51. Water supply pipe; 52. Third water pump. Detailed Implementation

[0051] The invention will now be further described with reference to the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments. Unless otherwise specified, the materials and equipment used in this embodiment are commercially available. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0052] In the description of this application, it should be understood that the terms "upper," "lower," "front," "rear," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In the description of this application, "a plurality of" means two or more, unless otherwise precisely specified.

[0053] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected," "linked," and "connected" should be interpreted broadly. For example, they can refer to a fixed connection, a connection through an intermediary, or a connection within two elements or an interaction between two elements. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0054] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or apparatus.

[0055] Please refer to Figure 1-9 As shown, this embodiment provides an oil diffusion pump cold trap device for a vacuum coating machine, including a housing 10 with an openable front end for housing and protecting internal components; a steam inlet 11 is provided on the top of the housing 10, and a steam outlet is provided on the side wall of the housing 10; it also includes: a condensation component 20, a spray component 30, and a water cooling component 40.

[0056] Specifically, the condensation assembly 20 includes a cold trap shell 21, a cooling tank 22, and a liquid storage container 23;

[0057] The cold trap housing 21 is disposed inside the box 10. The interior of the cold trap housing 21 forms a receiving cavity. An air inlet pipe 211 is provided on the upper part of the cold trap housing 21. The air inlet of the air inlet pipe 211 is connected to the steam inlet 11 for receiving and cooling steam from the oil diffusion pump.

[0058] Cooling tank 22 is installed in the upper part of the receiving cavity, and a cooling chamber 221 is formed inside it. The upper part of the cooling chamber 221 is connected to the lower air outlet of the air inlet pipe 211 through the guide pipe 222, and the lower part of the cooling chamber 221 forms a drain outlet. A coiled condenser 223 is provided on the outer wall of the cooling tank 22, and the coiled condenser 223 is in contact with the outer wall of the cooling tank 22.

[0059] Specifically, the spray assembly 30 is installed in the cooling chamber 221. The inlet of the spray assembly 30 is connected to the outlet of the coil-type condenser 223. The spray assembly 30 is used to atomize the cooling water and spray it into the cooling chamber 221, so that the atomized cooling water and steam can come into full contact.

[0060] The liquid storage container 23 is disposed in the receiving cavity and located below the drain port. The liquid storage container 23 is used to collect condensate.

[0061] Specifically, the water-cooling component 40 is disposed inside the housing 10 and connected to the coil-type condenser 223 to provide cooling water.

[0062] Based on the above structure, the working principle of this invention is mainly based on the combined effect of condensation and spray cooling. When the oil diffusion pump starts working, it generates a strong negative pressure environment to attract and expel gas molecules from the vacuum system. These gas molecules, upon entering the cold trap device through the oil diffusion pump inlet, first enter the cooling chamber 221 through the inlet pipe 211. Inside the cooling chamber 221, the steam exchanges heat with the cooling water in the coiled condenser 223, initiating cooling and condensation. Simultaneously, the spray assembly 30 atomizes the cooling water and sprays it into the cooling chamber 221, ensuring sufficient contact and heat exchange with the steam, further accelerating the condensation process. The condensed liquid flows into the storage container 23 through the drain port for collection and treatment. The water cooling assembly 40 is responsible for providing continuous cooling water to the coiled condenser 223, ensuring the continuous condensation process. Thus, the overall solution of this invention, through optimized design of the condensation assembly 20 and the spray assembly 30, achieves efficient steam condensation and recovery.

[0063] In a preferred embodiment of the present invention, the coil-type condenser tube 223 includes a plurality of ring tubes 2231 and a plurality of vertical transmission tubes 2232. The plurality of ring tubes 2231 are distributed at equal intervals along the height direction on the outer wall of the cooling tank 22. Any two adjacent ring tubes 2231 are connected by the plurality of vertical transmission tubes 2232. The uppermost ring tube 2231 is connected to the water outlet of the water-cooling assembly 40, and the lowermost ring tube 2231 is connected to the water inlet of the water-cooling assembly 40.

[0064] Based on the above structure, cooling water flows out from the outlet of the water-cooling assembly 40 and enters the uppermost ring pipe 2231. Driven by a water pump, the cooling water flows downwards along the vertical transmission pipe 2232, passing through each ring pipe 2231 in sequence. In each ring pipe 2231, the cooling water exchanges heat with the outer wall of the cooling tank 22, absorbing heat and cooling down. The cooled cooling water continues to flow downwards along the vertical transmission pipe 2232 until it reaches the lowermost ring pipe 2231. Finally, the cooling water flows back from the lowermost ring pipe 2231 to the inlet of the water-cooling assembly 40 for further cooling and circulation. This design ensures that the cooling water flows efficiently through the entire condenser tube, fully exchanging heat with the outer wall of the cooling chamber 221, thus achieving a highly efficient cooling effect. Simultaneously, through the circulation of the water-cooling assembly 40, cooling water can be continuously supplied to the condenser tube, maintaining its cooling capacity.

[0065] In a preferred embodiment of the present invention, there are multiple spray components 30, which are distributed at equal intervals along the height direction within the cooling chamber 221.

[0066] When steam or high-temperature gas passes through the cooling chamber 221, multiple sets of equally spaced spray components 30 simultaneously spray water mist. This water mist undergoes thorough heat exchange with the steam or high-temperature gas, effectively reducing its temperature. Because the spray components 30 are evenly spaced, all areas within the cooling chamber 221 receive uniform cooling. The simultaneous operation of multiple spray components 30 significantly increases the cooling area and cooling speed within the cooling chamber 221.

[0067] In a first aspect of the present invention, as a preferred embodiment, each spray assembly 30 includes a mounting bracket 31, a diversion straight pipe 32, a first diversion annular pipe 33, a second diversion annular pipe 34, and a plurality of atomizing nozzles 35;

[0068] Mounting bracket 31 is installed on the inner wall of cooling chamber 221;

[0069] The water inlet end of the diversion straight pipe 32 passes through the cooling tank 22 and is connected to a corresponding ring pipe 2231;

[0070] The first diversion annular pipe 33 and the second diversion annular pipe 34 are respectively installed on the mounting bracket 31, and the water inlet ends of the first diversion annular pipe 33 and the second diversion annular pipe 34 are respectively connected to the diversion straight pipe 32.

[0071] Multiple atomizing nozzles are evenly distributed on the bottom surface of both the first diversion annular tube 33 and the second diversion annular tube 34.

[0072] Based on the above structure, when cooling water flows through the coiled condenser tubes 223 and each annular tube 2231, a portion of the cooling water enters the first and second annular tubes 33 and 34 through the straight branch pipes 32. Then, the cooling water is atomized into fine droplets or mist by the atomizing nozzles. These droplets or mist disperse inside the cooling chamber 221 and exchange heat with hot air or hot surfaces. In this way, the spray assembly 30 can effectively reduce the temperature inside the cooling chamber 221, achieving a highly efficient cooling effect. In summary, this spray assembly 30 design has advantages such as compact structure, reasonable layout, and highly efficient cooling effect.

[0073] In a preferred embodiment of the present invention, the condensation assembly 20 further includes a multi-layer condensation baffle 24, which is stacked and detachably installed in the receiving cavity and located directly below the drain port. Each condensation baffle 24 has a plurality of inclined grooves 241 penetrating its upper and lower surfaces. The inclined grooves 241 of the plurality of condensation baffles 24 are connected one-to-one from top to bottom to form a plurality of curved channels 242.

[0074] Based on the above structure, when the steam generated by the oil diffusion pump enters the cold trap device, it first enters the cooling chamber 221 through the inlet pipe 211. Inside the cooling chamber 221, the steam first undergoes preliminary heat exchange with the cooling water in the coiled condenser tube 223, beginning to cool and partially condense. Subsequently, the steam enters the curved channel 242 composed of multiple layers of condensing baffles 24. Here, the steam contacts the inclined grooves 241 on the surface of the condensing baffles 24 multiple times, forming vortices and further enhancing the condensation effect. The condensed liquid flows smoothly along the curved channel 242 into the liquid storage container 23 below the drain port. Simultaneously, the spray assembly 30 atomizes the cooling water and sprays it into the cooling chamber 221, allowing for sufficient contact and heat exchange with the steam, further accelerating the steam condensation process. Thus, through the design of the multiple layers of condensing baffles 24, this invention allows the steam to contact the baffle surface multiple times as it passes through, increasing the chance of condensation. The inclined grooves 241 on each layer of baffles cleverly guide the steam flow, enabling it to form vortices as it passes through, further enhancing the condensation effect. The curved channel 242 allows steam to exchange heat along a longer path during condensation, thus improving condensation efficiency. This design ensures that steam can make more full contact with the cooling surface, achieving rapid and efficient condensation. The condenser baffle 24 is designed to be removable, which greatly facilitates the cleaning and maintenance of the equipment. When it is necessary to clean the impurities generated by condensation or to perform equipment maintenance, the baffle can be simply removed without the need for complex disassembly of the entire condenser assembly 20. The design of the condenser baffle 24, located directly below the drain port, ensures that the condensate flows smoothly into the storage container 23, avoiding the accumulation of condensate inside the equipment and potential contamination problems.

[0075] In a preferred embodiment of the present invention, the condensation assembly 20 further includes a filter element 25, which is disposed in the receiving cavity and located below the lowest condensation baffle 24. The upper end face of the filter element 25 is connected to the bottom surface of the lowest condensation baffle 24, and its lower end face is connected to the top opening of the liquid storage container 23. The filter element 25 is used to receive the condensate from the condensation baffle 24 and filter the organic matter in the condensate.

[0076] Based on the above structure, the condensed liquid flows smoothly down the curved channel 242 and drips onto the filter element 25 below the lowest condensing baffle 24. The filter element 25 filters the condensate, blocking organic matter and impurities, and then the pure condensate flows into the storage container 23 through the lower end face of the filter element 25. By introducing the filter element 25 and optimizing its connection with the condensing baffle 24 and the storage container 23, the cold trap device of this invention achieves efficient steam condensation and effective condensate filtration.

[0077] In a preferred embodiment of the present invention, the water-cooling assembly 40 includes a circulating water tank 41 and a cooling box 42;

[0078] The circulating water tank 41 is installed inside the tank body 10, and the circulating water tank 41 is equipped with a cooling water circulating coil 411 inside;

[0079] The refrigeration box 42 is located on top of the circulating water tank 41; the refrigeration box 42 is equipped with several refrigeration plates 421;

[0080] The inlet of the cooling water circulation coil 411 is connected to the lowest ring pipe 2231 through a pipe. The outlet of the cooling water circulation coil 411 is connected to the inner cavity of the circulating water tank 41. The inner cavity of the circulating water tank 41 is also connected to the inlet of the refrigeration box 42 through the cooling water return pipe 43.

[0081] The outlet of the refrigeration unit 42 is connected to the uppermost ring pipe 2231 via the cooling water delivery pipe 44;

[0082] A first water pump 45 is installed on the cooling water return pipe 43, and a second water pump 46 is installed on the cooling water delivery pipe 44.

[0083] Based on the above structure, cooling water flows out from the lowest ring pipe 2231 of the condenser tube, enters the cooling water circulation coil 411 of the circulating water tank 41, and then enters the circulating water tank 41. The first water pump 45 starts, pumping the hot water in the circulating water tank 41 to the refrigeration box 42 through the cooling water return pipe 43. Inside the refrigeration box 42, the cooling fins 421 work to lower the temperature of the cooling water. Cooling water recirculation: The second water pump 46 starts, pumping the cooled water in the refrigeration box 42 to the highest ring pipe 2231 of the condenser tube through the cooling water delivery pipe 44, realizing the recycling of cooling water. The cooling fins 421 on the refrigeration box 42 can quickly and effectively lower the temperature of the cooling water, improving the cooling efficiency. By recycling the cooling water, water waste is reduced. The reasonable configuration of the first water pump 45 and the second water pump 46, as well as the careful design of the cooling water circulation coil 411, the cooling water return pipe 43, and the cooling water delivery pipe 44, ensure the stable operation of the system and the cooling effect.

[0084] In a preferred embodiment of the present invention, a condenser inner chamber 412 is further provided in the inner cavity of the circulating water tank 41, and a steam transmission pipe 47 is also provided. One end of the steam transmission pipe 47 is connected to the lower part of the cooling chamber 221, and the other end is connected to the inner cavity of the condenser inner chamber 412. The cooling water circulation coil 411 is in contact with the outer wall of the condenser inner chamber 412, so that the cooling water circulation coil 411 can condense the steam entering the inner cavity of the condenser inner chamber 412 again. An exhaust pipe connected to the inner cavity of the condenser inner chamber 412 is also provided on the side wall of the circulating water tank 41, and the exhaust pipe is connected to the steam outlet.

[0085] Based on the above structure, the oil diffusion pump generates steam during operation, which is introduced into the cooling chamber 221 of the cold trap device through the inlet pipe 211. Inside the cooling chamber 221, the steam exchanges heat with the cooling water in the coiled condenser tubes 223. The cooling water circulates in the condenser tubes, absorbing heat from the steam, causing it to begin cooling and gradually condense. Not all the steam in the cooling chamber 221 condenses immediately. Some uncondensed steam is transported to the inner condenser chamber 412 through the steam transfer pipe 47. The steam entering the inner condenser chamber 412 undergoes further heat exchange with the cooling water circulation coils 411 on the outer wall of the inner condenser chamber 412. Due to the continuous circulation of the cooling water and the low temperature, this steam condenses again into liquid in the inner condenser chamber 412, and the remaining steam is discharged through the steam outlet. Thus, this invention achieves efficient steam condensation through the dual condensation design of the cooling chamber 221 and the inner condenser chamber 412, as well as the recycling of cooling water.

[0086] In a preferred embodiment of the present invention, an adjusting water tank 50 is also included. The adjusting water tank 50 is disposed on the top of the circulating water tank 41 and is connected to the circulating water tank 41 through a water replenishment pipe 51. A third water pump 52 is disposed on the water replenishment pipe 51. When the water level in the circulating water tank 41 is too low, water is replenished to the circulating water tank 41 through the adjusting water tank 50.

[0087] The water level in the circulating water tank 41 is monitored by a water level sensor. When the water level in the circulating water tank 41 falls below a preset value, a water replenishment mechanism is triggered. The third water pump 52 starts, pumping water from the regulating water tank 50 to the circulating water tank 41 through the water replenishment pipe 51. The water replenishment process ends when the water level in the circulating water tank 41 reaches the preset value. Once the water in the regulating water tank 50 is depleted, water can be added to the regulating water tank 50 using an external water pump. By adding the regulating water tank 50 and the third water pump 52, an automatic water replenishment function for the circulating water tank 41 is achieved without manual intervention. This ensures that the water level in the circulating water tank 41 is always maintained within an appropriate range, thereby guaranteeing the stable operation of the water-cooling assembly 40.

[0088] In a preferred embodiment of the present invention, a drain outlet is provided on the outer wall of the liquid storage container 23, and the drain outlet is connected to an external water pump device through a pipe.

[0089] Based on the above structure, when the droplets in the liquid storage container 23 accumulate to a certain amount, the water pump will automatically start and extract the droplets through the drain outlet. The water pump can quickly extract the droplets from the liquid storage container 23, avoiding the long-term accumulation of droplets in the tank, thereby improving the processing efficiency.

[0090] Although only certain components and embodiments of this application have been illustrated and described, many modifications and alterations will be apparent to those skilled in the art without actually departing from the scope and spirit of the claims, such as variations in the size, dimensions, structure, shape and proportion of the various elements, installation arrangement, material use, color, orientation, etc.

[0091] The above embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of protection of the present invention. Any non-substantial changes and substitutions made by those skilled in the art based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A cold trap device for an oil diffusion pump in a vacuum coating machine, comprising a housing with an openable front end for housing and protecting internal components; a steam inlet is provided on the top of the housing, and a steam outlet is provided on the side wall of the housing; characterized in that, Also includes: A condensation assembly, comprising a cold trap shell, a cooling tank, and a liquid storage container; The cold trap housing is disposed within the box, and an accommodating cavity is formed inside the cold trap housing. An air inlet pipe is provided at the upper part of the cold trap housing, and the air inlet of the air inlet pipe is connected to the steam inlet for receiving and cooling steam from the oil diffusion pump. The cooling tank is installed on the upper part of the receiving cavity, and a cooling chamber is formed inside it. The upper part of the cooling chamber is connected to the lower air outlet of the air inlet pipe through a guide pipe, and the lower part of the cooling chamber forms a drain outlet. A coiled condenser is provided on the outer wall of the cooling tank, and the coiled condenser is in contact with the outer wall of the cooling tank. A spray assembly is installed inside the cooling chamber. The inlet of the spray assembly is connected to the outlet of the coil-type condenser. The spray assembly is used to atomize the cooling water and spray it into the cooling chamber, so that the atomized cooling water and steam can come into full contact. The liquid storage container is disposed in the receiving cavity and located below the drain port, and the liquid storage container is used to collect condensate; A water-cooling assembly, which is disposed inside the housing and connected to the coil-type condenser tube, is used to provide cooling water; The coil-type condenser includes multiple ring tubes and multiple vertical transmission tubes. The multiple ring tubes are distributed at equal intervals along the height direction on the outer wall of the cooling tank. Any two adjacent ring tubes are connected by multiple vertical transmission tubes. The uppermost ring tube is connected to the water outlet of the water-cooling assembly, and the lowermost ring tube is connected to the water inlet of the water-cooling assembly. The condensation assembly also includes multiple layers of condensation baffles. The multiple layers of condensation baffles are stacked and detachably installed in the receiving cavity and located directly below the drain port. Each condensation baffle has multiple inclined grooves that penetrate its upper and lower surfaces. The inclined grooves of the multiple condensation baffles are connected one-to-one from top to bottom to form multiple curved channels. The condensation assembly also includes a filter element disposed within the receiving cavity and below the lowest condensation baffle. The upper end face of the filter element is connected to the bottom surface of the lowest condensation baffle, and its lower end face is connected to the top opening of the liquid storage container. The filter element is used to receive condensate from the condensation baffle and filter organic matter from the condensate.

2. The oil diffusion pump cold trap device for the vacuum coating machine as described in claim 1, characterized in that, The spray assembly consists of multiple sets, which are evenly distributed in the cooling chamber along the height direction.

3. The oil diffusion pump cold trap device for the vacuum coating machine as described in claim 2, characterized in that, Each spray assembly includes a mounting bracket, a splitting straight tube, a first splitting annular tube, a second splitting annular tube, and multiple atomizing nozzles; The mounting bracket is installed on the inner wall of the cooling chamber; The inlet end of the split straight pipe passes through the cooling tank and is connected to one of the corresponding ring pipes; The first and second diversion annular pipes are respectively installed on the mounting frame, and the inlet ends of the first and second diversion annular pipes are respectively connected to the diversion straight pipe. Multiple atomizing nozzles are evenly distributed on the bottom surface of both the first and second diversion annular pipes.

4. The oil diffusion pump cold trap device for the vacuum coating machine as described in claim 1, characterized in that, The water-cooling assembly includes a circulating water tank and a cooling box; The circulating water tank is installed inside the tank, and the interior of the circulating water tank is equipped with a cooling water circulating coil; The refrigeration box is located on top of the circulating water tank; the refrigeration box is equipped with several refrigeration plates; The inlet of the cooling water circulation coil is connected to the lowest ring pipe via a pipe, and the outlet of the cooling water circulation coil is connected to the inner cavity of the circulating water tank. The inner cavity of the circulating water tank is also connected to the inlet of the refrigeration box via a cooling water return pipe. The outlet of the refrigeration unit is connected to the uppermost ring pipe via a cooling water delivery pipe; A first water pump is installed on the cooling water return pipe, and a second water pump is installed on the cooling water delivery pipe.

5. The oil diffusion pump cold trap device for the vacuum coating machine as described in claim 4, characterized in that, The inner cavity of the circulating water tank is also equipped with a condenser inner box, and includes a steam transmission pipe. One end of the steam transmission pipe is connected to the lower part of the cooling chamber, and the other end is connected to the inner cavity of the condenser inner box. The cooling water circulation coil is in contact with the outer wall of the condenser inner box, so that the cooling water circulation coil can condense the steam entering the inner cavity of the condenser inner box again. The side wall of the circulating water tank is also equipped with an exhaust pipe that is connected to the inner cavity of the condenser inner box, and the exhaust pipe is connected to the steam outlet.

6. The oil diffusion pump cold trap device for the vacuum coating machine as described in claim 5, characterized in that, It also includes an adjusting water tank, which is located on top of the circulating water tank and is connected to the circulating water tank through a water replenishment pipe. A third water pump is installed on the water replenishment pipe. When the water level in the circulating water tank is too low, water is replenished to the circulating water tank through the adjusting water tank.

7. The oil diffusion pump cold trap device for the vacuum coating machine as described in claim 1, characterized in that, The outer wall of the liquid storage container is provided with a drain outlet, which is connected to an external water pump device through a pipe.

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