Multi-angle cleaner for magnetron sputtering vacuum chamber

Abstract

The multi-angle cleaner for the magnetron sputtering vacuum chamber comprises a main shell, a transmission shaft extending forwards is rotatably arranged on the main shell, the transmission shaft is in transmission connection with a rotary driving mechanism, a telescopic rod is connected to the front end of the transmission shaft, a brush head is arranged at the front end of the telescopic rod, and the brush head is connected with the main shell. A grabbing handle is arranged on the lower side of the main shell, a water pump shell is arranged on the rear side of the main shell, a water pump liquid cavity is formed in the water pump shell, a piston is arranged in the water pump liquid cavity in a matched mode, the water pump liquid cavity is connected with a water tank through a water supply pipeline, and the piston is also in transmission connection with the rotary driving mechanism through a clutch control mechanism. The side face of the water pump shell is connected with a cleaning pipeline, and the cleaning pipeline corresponds to the brush head. The cleaning device is better in cleaning capacity, smaller in cleaning dead angle, wider in cleaning application range and higher in cleaning efficiency.

Description

Technical Field

[0001] The invention belongs to the field of cleaning brushes, and in particular relates to a multi-angle cleaner for a magnetron sputtering vacuum chamber. Background Art

[0002] In the prior art, multi-angle cleaners are widely used in various laboratories as a rigid requirement for cleaning experimental equipment. Large equipment is often difficult to clean and has many dead corners. Ordinary brushes have poor cleaning effects on stubborn contaminants and cannot meet the use requirements in experiments with higher requirements. The magnetron sputtering vacuum chamber is generally a wide cylindrical shape with a relatively complex internal structure. When conducting target bombardment experiments, ions move irregularly in the vacuum chamber and contaminate the surrounding chambers. Due to its special structure and wide chamber, the cleaning efficiency of ordinary brushes is very low and the effect is poor, and ordinary cleaning is not effective for stubborn contaminants. Summary of the invention

[0003] The purpose of the present invention is to provide a multi-angle cleaner for a magnetron sputtering vacuum chamber, which can achieve better cleaning ability for the inner wall of a large instrument with complex columnar structure, smaller cleaning dead angles, wider cleaning range and higher cleaning efficiency.

[0004] The objective of the present invention is achieved in this way: a multi-angle cleaner for a magnetron sputtering vacuum chamber, comprising a main shell, a transmission shaft extending forward being rotatably provided on the main shell, the transmission shaft being transmission-connected to a rotary drive mechanism, a telescopic rod being connected to the front end of the transmission shaft, a brush head being provided to the front end of the telescopic rod, a gripping handle being provided on the lower side of the main shell, a water pump shell being provided on the rear side of the main shell, a water pump liquid chamber being provided inside the water pump shell, a piston being provided in the water pump liquid chamber, the water pump liquid chamber being connected to a water tank via a water supply pipe, the piston being also transmission-connected to the rotary drive mechanism via a clutch control mechanism, a cleaning pipe being connected to the side of the water pump shell, and the cleaning pipe being provided corresponding to the brush head.

[0005] The method of using the present invention is as follows: when it is determined that the switch state of the driving motor is off, the water tank is filled with cleaning liquid, and then the power cord is connected to the power supply, and the motor switch button is pressed to drive the motor to rotate, and the motor drives the spur gear 2 to rotate, and the spur gear 2 drives the spur gear 1 at the rear end of the telescopic arm to rotate, and the spur gear 1 drives the transmission shaft to rotate. When the pull rod is pressed downward, the limit cap contacts the front limit surface and the middle limit surface, and the limit plate presses the limit cap to form a stable state, and the lower shaft sleeve is merged with the upper shaft sleeve. At this time, when the two bevel gears are meshed and transmitted, the lower rotating shaft is driven to rotate synchronously through the upper rotating shaft, and the two positioning pins remain inserted into the annular ring of the lower shaft sleeve. The groove will not affect the rotation of the lower connecting shaft sleeve, the lower rotating shaft drives the transmission bolt to rotate, and the transmission bolt drives the piston to move back and forth in the water pump housing through the swing connecting rod. The one-way valve is opened through the movement of the piston, and the cleaning fluid enters the water pump liquid chamber from the water tank, changing the volume of the water pump liquid chamber, extracting the cleaning fluid, and the cleaning fluid is pressed into the cleaning pipe. The cleaning fluid is sprayed out from the nozzle, and the brush head starts cleaning; when the pull rod is lifted upward, the limit cap is in contact with the rear limit surface and the middle limit surface, and the limit plate presses the limit cap to form a stable state, the lower connecting shaft sleeve is separated from the upper connecting shaft sleeve, and the nozzle no longer sprays water; the speed of the transmission shaft is 950~1150r / min. Compared with the prior art, the beneficial effects of the present invention are: a multi-angle cleaner for magnetron sputtering vacuum chambers in the laboratory is made with an economical and practical structure, which can effectively target vacuum chambers with complex structures and has very few cleaning dead angles; the device is highly applicable and has stronger adaptability to large machines and internal structures; it is suitable for more large machines after changing the rotating brush head; the device has stronger cleaning ability for large-space vacuum chambers, the rotating brush head operates at multiple angles, the telescopic rod adjusts the distance, the cleaning dead angles are smaller, the range of use is wider and the cleaning efficiency is higher.

[0006] As a further improvement of the present invention, the front end of the transmission shaft extends out of the main housing, the transmission shaft is perpendicular to the front side of the main housing, and the transmission shaft is sequentially sleeved with a bevel gear 1 and a spur gear 1 distributed in front and back intervals, and the bevel gear 1 and the spur gear 1 are both located inside the main housing.

[0007] As a further improvement of the present invention, the rotary drive mechanism includes a drive motor disposed at the upper rear side of the main housing, the output shaft of the drive motor is parallel to the transmission shaft, the output shaft of the drive motor extends forward into the main housing and is sleeved with a spur gear 2, and the spur gear 2 is meshed and connected with the spur gear 1. The drive motor drives the two spur gears to mesh and rotate.

[0008] As a further improvement of the present invention, the main shell includes vertical front side panels and rear side panels parallel to each other, and mutually symmetrical left side panels and right side panels are respectively arranged between the front side panels and the rear side panels, and the upper and lower parts of the front side panels, the rear side panels, the left side panels and the right side panels are respectively provided with horizontal upper side panels and lower side panels.

[0009] As a further improvement of the present invention, the clutch control mechanism comprises a front reinforcing plate and a rear reinforcing plate respectively arranged on the inner wall of the front side plate and the inner wall of the rear side plate, a horizontal base plate is arranged between the upper parts of the front reinforcing plate and the rear reinforcing plate, a through hole 1 is vertically opened on the base plate, a vertical lower rotating shaft is arranged to pass through the through hole 1, a transmission bolt is fixed to the lower end of the lower rotating shaft, a swing connecting rod is hinged to the end of the transmission bolt, the water pump housing is cylindrical, the axis of the water pump housing is perpendicular to the rear side plate, the water pump housing is connected to the inside of the main housing, the piston is cylindrical, a fixed shaft is vertically arranged inside the piston, the other end of the swing connecting rod is hinged to the fixed shaft, and a through hole 2 is opened on the rear side plate for the swing connecting rod to pass through. When the lower rotating shaft rotates, the transmission bolt is driven to rotate, and the transmission bolt drives the piston to move forward and backward in the water pump housing through the swing connecting rod. The clutch control mechanism can control the upper rotating shaft and the lower rotating shaft to be synchronously driven or rotated separately.

[0010] As a further improvement of the present invention, a horizontal mounting plate is correspondingly arranged above the base plate, the length of the mounting plate is smaller than the length of the base plate, a bearing seat is arranged on the mounting plate, a bearing is vertically mounted in the bearing seat, a vertical upper rotating shaft is rotatably mounted on the bearing, the upper end of the upper rotating shaft extends upward and is sleeved with a bevel gear 2 meshingly connected with the bevel gear 1, the lower end of the upper rotating shaft extends downward and is provided with an upper coupling sleeve, a plurality of upper coupling shaft inclined grooves spaced along the circumferential direction are opened on the outer periphery of the lower end of the upper coupling sleeve, the lower rotating shaft comprises shaft body 1, shaft body 2 and shaft body 3 which are sequentially distributed from top to bottom and connected as one, shaft body 1, shaft body 2 and The central axis of the shaft body three coincides, the shaft body one and the shaft body three are both square shafts, the shaft body two is a round shaft, the outer periphery of the shaft body two corresponds to the inner wall of the through hole one and is movably connected, the outer periphery of the shaft body one is sleeved with a lower coupling sleeve, the lower coupling sleeve includes a sleeve body one and a sleeve body two which correspond to each other and are coaxial, the sleeve body two is sleeved on the shaft body one and is movably connected thereto, the outer diameters of the sleeve body one and the sleeve body three are both larger than the outer diameter of the sleeve body two, the upper end outer periphery of the sleeve body one is provided with a plurality of lower coupling shaft bevel grooves spaced along the circumferential direction, each upper coupling shaft bevel groove is arranged one by one with each lower coupling shaft bevel groove, the upper coupling shaft sleeve and the lower coupling shaft sleeve are arranged correspondingly to each other, and an annular groove is provided around the outer periphery of the sleeve body two. The lower coupling shaft sleeve moves upward along the shaft body one and can be assembled with the upper coupling shaft sleeve to realize the synchronous rotation of the upper rotating shaft and the lower rotating shaft; the lower coupling shaft sleeve moves downward along the shaft body one and can be separated from the upper coupling shaft sleeve, and the upper rotating shaft and the lower rotating shaft rotate separately.

[0011] As a further improvement of the present invention, two left-right symmetrical reinforcing connecting plates are vertically arranged between the mounting plate and the base plate, a limit plate is vertically arranged between the upper parts of the two reinforcing connecting plates, the limit plate is parallel to the front side plate, the lower part of the limit plate is arranged in a V shape, the V-shaped surfaces of the limit plate respectively form a front limit surface and a rear limit surface, a middle limit surface is arranged between the front limit surface and the rear limit surface of the limit plate, a mounting shaft is horizontally arranged between the two reinforcing connecting plates, a pull rod is rotatably connected to the mounting shaft, a rotating hole for allowing the mounting shaft to pass through is opened on the pull rod, the pull rod is perpendicular to the mounting shaft, the front end of the pull rod extends out of the front side plate, a U-shaped connecting frame is arranged at the rear end of the pull rod, the inner sides of the left and right side plates of the connecting frame are provided with transverse locating pins, the left and right side plates of the connecting frame are respectively located on the left and right sides of the sleeve body two, The two locating pins are both inserted into the annular groove inwardly. A vertical pole is provided on the upper side of the pull rod. A limit cap that can move up and down is connected to the vertical pole. A socket for accommodating the vertical pole to be inserted is provided at the lower part of the limit cap. A hemispherical surface is provided on the upper end of the limit cap. The outer diameter of the limit cap is larger than the outer diameter of the vertical pole. A compression spring is provided on the outer periphery of the vertical pole. The upper and lower ends of the compression spring elastically contact the lower end surface of the limit cap and the upper side surface of the pull rod respectively. The hemispherical surface of the limit cap is arranged corresponding to the front limit surface, middle limit surface and rear limit surface of the limit plate. A limit hole for accommodating the pull rod to pass through is opened on the front side plate, and the pull rod is arranged corresponding to the limit hole; left-right symmetrical arc-shaped protection plates one and two are arranged between the mounting plate and the base plate. The protection plates one and two are arranged corresponding to the left and right sides of the upper and lower coupling sleeves respectively. The front limit surface and the rear limit surface are flat surfaces, and the middle limit surface is an arc-shaped surface. When the pull rod is pressed downward, the limit cap contacts the front limit surface and the middle limit surface, and the limit plate presses the limit cap to form a stable state, and the lower shaft sleeve is merged with the upper shaft sleeve; when the pull rod is lifted upward, the limit cap contacts the rear limit surface and the middle limit surface, and the limit plate presses the limit cap to form a stable state, the lower shaft sleeve is separated from the upper shaft sleeve, and the nozzle no longer sprays water.

[0012] As a further improvement of the present invention, the water supply pipe is coaxially arranged at the rear end of the water pump housing, the water pump liquid cavity is connected to the inside of the water tank through the water supply pipe, a mounting bracket is arranged inside the water supply pipe, a one-way valve is installed on the mounting bracket, the cleaning pipe includes a main pipe and a nozzle, the main pipe is vertically arranged on the upper side of the water supply pipe, a mounting bracket is also arranged inside the main pipe, a one-way valve is also installed on the mounting bracket, the nozzle extends downward into the main housing through the upper side plate and extends forward through the front side plate, the nozzle protruding end is arranged corresponding to the brush head, the nozzle is connected to the inside of the water supply pipe through the main pipe, and the transmission bolt is installed on the shaft body three. The one-way valve is opened by the movement of the piston, the cleaning liquid enters the water pump liquid cavity from the water tank, the volume of the water pump liquid cavity is changed, the cleaning liquid is extracted, the cleaning liquid is pressed into the cleaning pipe, the cleaning liquid is sprayed out from the nozzle, and the brush head starts cleaning.

[0013] As a further improvement of the present invention, the transmission shaft is a hollow shaft, a mounting sleeve is coaxially provided at the front end of the transmission shaft, the rear end of the transmission shaft is closed, the inner diameter of the mounting sleeve is larger than the inner diameter of the hollow transmission shaft, the telescopic rod is coaxially inserted into the interior of the hollow transmission shaft and is movably connected with the transmission shaft, the front end of the telescopic rod extends out of the mounting sleeve, a telescopic spring is coaxially provided inside the hollow transmission shaft, one end of the telescopic spring is connected to the inner wall of the rear end of the hollow transmission shaft, the telescopic rod is a hollow rod, the front end of the telescopic rod is closed, the other end of the telescopic spring extends into the telescopic rod and is connected to the inner wall of the front end of the telescopic rod, a controller is matched inside the mounting sleeve, the controller includes an upper cover, the lower side of the upper cover is respectively provided with front and rear corresponding U-shaped extrusion parts and annular guide parts, and the upper inner wall of the mounting sleeve is provided with a corresponding upper cover The mounting groove one, the inner wall of the mounting sleeve is provided with mounting groove two and mounting groove three corresponding to the extrusion piece and the guide piece respectively, the lower part of the mounting groove three penetrates the lower side wall of the mounting sleeve, the upper cover is arranged in the mounting groove one, the upper side of the upper cover is provided with a press button, the press button extends out of the mounting sleeve, a control spring is arranged at the bottom of the mounting groove two, the bottom of the extrusion piece is provided with an extrusion part, the extrusion part presses the control spring below, the guide piece is installed in the mounting groove three, the lower side wall of the telescopic rod is provided with a limiting groove, the extrusion piece is provided with a block extending into the limiting groove, the upper side of the block is provided with an inclined guide surface one, the lower side of the telescopic rod is provided with a reset guide block, the reset guide block is abutted against the extrusion piece, and the lower side of the reset guide block is provided with an inclined guide surface two corresponding to the guide surface one; the brush head includes a plurality of bristles connected to the telescopic rod. When the push button is pressed downward, the extrusion piece will control the spring to be pressed downward, the stopper will drop, and the telescopic rod will extend forward. When the telescopic rod needs to be retracted, the telescopic rod will be pushed backward, and the guide surface 2 of the reset guide block will cooperate with the guide surface 1 of the stopper, so that the extrusion piece will drop to control the spring to be pressed downward, the reset guide block of the telescopic rod will return to the rear side of the extrusion piece, and the stopper will block the telescopic rod, so that the telescopic rod will be retracted.

[0014] As a further improvement of the present invention, a switch button for controlling the drive motor is provided on the gripping handle. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a three-dimensional structural diagram of the present invention.

[0016] Figure 2 It is a left-side stereoscopic structural diagram of the present invention.

[0017] Figure 3 It is the internal structure diagram of the present invention.

[0018] Figure 4 for Figure 3 A partial enlarged view of .

[0019] Figure 5 It is a structural schematic diagram of the main shell of the present invention.

[0020] Figure 6 It is a schematic diagram of the structure of the protection plate 1 and the protection plate 2 on the left and right sides of the upper and lower shaft sleeves.

[0021] Figure 7 It is a schematic diagram of the structure of the two reinforcing connecting plates 1 on the left and right sides of the limiting cap.

[0022] Figure 8 It is a schematic diagram of the structure of the upper connecting sleeve of the upper rotating shaft.

[0023] Fig. 9 It is a schematic diagram of the structure of the lower connecting sleeve of the lower rotating shaft.

[0024] Fig.10 It is a structural schematic diagram of the connecting frame.

[0025] Fig.11 It is a schematic diagram of the structure of the upper rotating shaft, the upper connecting shaft sleeve, the lower rotating shaft and the lower connecting shaft sleeve.

[0026] Fig.12 It is a schematic diagram of the structure in which the upper connecting sleeve and the lower connecting sleeve are separated.

[0027] Fig.13 for Fig.12 Enlarged view of point A in the middle.

[0028] Fig.14 It is a schematic diagram of the structure of the transmission shaft and the telescopic rod.

[0029] Fig.15 A diagram showing the position relationship between the controller and the telescopic rod.

[0030] Fig.16 It is a cross-sectional view of the transmission shaft and telescopic rod.

[0031] Fig.17 for Fig.16 Enlarged view of point B in the middle.

[0032] Among them, 1 main housing, 1a front side plate, 1b rear side plate, 1c left side plate, 1d right side plate, 1e upper side plate, 1f lower side plate, 2 transmission shaft, 2a mounting sleeve, 3 telescopic rod, 4 brush head, 5 gripping handle, 6 water pump housing, 6a water pump liquid chamber, 7 piston, 8 water supply pipe, 9 water tank, 10 cleaning pipe, 10a main pipe, 10b nozzle, 11 bevel gear one, 12 spur gear one, 13 drive motor, 14 spur gear two, 15 front reinforcement plate, 16 rear reinforcement plate, 17 base plate, 18 through hole one, 19 lower rotating shaft, 19a shaft body one, 19b shaft body two, 19c shaft body three, 20 transmission bolt, 21 swing connecting rod, 22 fixed shaft, 23 through hole two, 24 mounting plate, 25 bearing seat, 25a bearing, 26 upper rotating shaft, 27 bevel gear two, 28 upper coupling sleeve, 28a upper coupling inclined groove , 29 lower coupling sleeve, 2901 sleeve body one, 2902 sleeve body two, 29a lower coupling inclined groove, 30 annular groove, 31 strengthening connecting plate one, 32 limit plate, 32a front limit surface, 32b rear limit surface, 32c middle limit surface, 33 mounting shaft, 34 pull rod, 35 connecting frame, 35a positioning pin, 36 vertical rod, 37 limit cap, 38 compression spring, 39 limit hole, 40 protection plate one, 41 protection plate two, 42 one-way valve, 42a mounting bracket, 43 telescopic spring, 44 controller, 44a upper cover, 44a1 press button, 44b extrusion piece, 44b1 extrusion part, 44c guide piece, 45 mounting groove one, 46 mounting groove two, 47 mounting groove three, 48 control spring, 49 limit groove, 50 block, 50a guide surface one, 51 reset guide block, 51a guide surface two, 52 switch button. DETAILED DESCRIPTION

[0033] like Figure 1-17 As shown, a multi-angle cleaner for a magnetron sputtering vacuum chamber comprises a main shell 1, on which a transmission shaft 2 extending forward is rotatably provided, the transmission shaft 2 is transmission-connected to a rotary drive mechanism, a telescopic rod 3 is connected to the front end of the transmission shaft 2, a brush head 4 is provided to the front end of the telescopic rod 3, a gripping handle 5 is provided on the lower side of the main shell 1, a switch button 52 for controlling a drive motor 13 is provided on the gripping handle 5; a water pump shell 6 is provided on the rear side of the main shell 1, a water pump liquid chamber 6a is provided inside the water pump shell 6, a piston 7 is provided inside the water pump liquid chamber 6a, the water pump liquid chamber 6a is connected to a water tank 9 via a water supply pipe 8, the piston 7 is also transmission-connected to the rotary drive mechanism via a clutch control mechanism, a cleaning pipe 10 is connected to the side of the water pump shell 6, and the cleaning pipe 10 is provided corresponding to the brush head 4.

[0034] The front end of the transmission shaft 2 extends out of the main housing 1, and the transmission shaft 2 is perpendicular to the front side of the main housing 1. The transmission shaft 2 is sequentially sleeved with a bevel gear 11 and a spur gear 12 that are spaced apart from each other. The bevel gear 11 and the spur gear 12 are both located inside the main housing 1. The rotary drive mechanism includes a drive motor 13 disposed at the upper rear side of the main housing 1. The output shaft of the drive motor 13 is parallel to the transmission shaft 2. The output shaft of the drive motor 13 extends forward into the main housing 1 and is sleeved with a spur gear 2 14. The spur gear 2 14 is meshed and connected with the spur gear 1 12. The drive motor 13 drives the two spur gears to mesh and rotate.

[0035] The main shell 1 includes a vertical front side panel 1a and a rear side panel 1b which are parallel to each other, and a left side panel 1c and a right side panel 1d which are symmetrical to each other are respectively arranged between the front side panel 1a and the rear side panel 1b, and a horizontal upper side panel 1e and a lower side panel 1f are respectively arranged at the upper and lower parts of the front side panel 1a, the rear side panel 1b, the left side panel 1c and the right side panel 1d. The clutch control mechanism includes a front reinforcing plate 15 and a rear reinforcing plate 16 which are respectively arranged on the inner wall of the front side plate 1a and the inner wall of the rear side plate 1b, a horizontal base plate 17 is arranged between the upper parts of the front reinforcing plate 15 and the rear reinforcing plate 16, a through hole 18 is vertically opened on the base plate 17, a vertical lower rotating shaft 19 is arranged to pass through the through hole 18, a transmission bolt 20 is fixed to the lower end of the lower rotating shaft 19, a swing connecting rod 21 is hinged to the end of the transmission bolt 20, the water pump housing 6 is cylindrical, the axis of the water pump housing 6 is perpendicular to the rear side plate 1b, the water pump housing 6 is connected to the inside of the main housing 1, the piston 7 is cylindrical, a fixed shaft 22 is vertically arranged inside the piston 7, the other end of the swing connecting rod 21 is hinged to the fixed shaft 22, and a through hole 23 is opened on the rear side plate 1b for allowing the swing connecting rod 21 to pass through. When the lower rotating shaft 19 rotates, the transmission bolt 20 is driven to rotate, and the transmission bolt 20 drives the piston 7 to move back and forth in the water pump housing 6 through the swing connecting rod 21. The upper rotating shaft 26 and the lower rotating shaft 19 can be controlled to be synchronously driven or rotated separately through the clutch control mechanism.

[0036] A horizontal mounting plate 24 is correspondingly arranged above the base plate 17, and the length of the mounting plate 24 is less than that of the base plate 17. A bearing seat 25 is arranged on the mounting plate 24, and a bearing 25a is vertically installed in the bearing seat 25. A vertical upper rotating shaft 26 is rotatably installed on the bearing 25a. The upper end of the upper rotating shaft 26 extends upward and is sleeved with a bevel gear 27 meshing with the bevel gear 11. The lower end of the upper rotating shaft 26 extends downward and is provided with an upper coupling sleeve 28. The outer periphery of the lower end of the upper coupling sleeve 28 is provided with a plurality of upper coupling shaft inclined grooves 28a arranged at intervals along the circumferential direction. The lower rotating shaft 19 includes a shaft body 19a, a shaft body 2 19b and a shaft body 3 19c which are sequentially distributed and connected from top to bottom, and the central axes of the shaft body 19a, the shaft body 2 19b and the shaft body 3 19c coincide with each other. The shaft body 19a and the shaft body 3 19c are both square shafts, and the shaft body 2 19b is a round shaft. The outer periphery of the shaft body 2 19b corresponds to the inner wall of the through hole 18 and is movably connected. The outer periphery of the shaft body 19a is sleeved with a lower shaft sleeve 29, and the lower shaft sleeve 29 includes a sleeve body 1 2901 and a sleeve body 2 2902 which correspond to each other and are coaxial. The sleeve body 2902 is sleeved on the shaft body 19a and is movably connected thereto. The outer diameters of the sleeve body 1 2901 and the sleeve body 3 are both larger than the outer diameter of the sleeve body 2 2902. A plurality of lower shaft bevel grooves 29a arranged at intervals along the circumferential direction are provided on the upper end outer periphery of the sleeve body 1 2901, and each upper shaft bevel groove 28a is arranged one by one with each lower shaft bevel groove 29a. The upper shaft sleeve 28 and the lower shaft sleeve 29 are arranged corresponding to each other, and an annular groove 30 is provided around the outer periphery of the sleeve body 2 2902. The lower shaft sleeve 29 moves upward along the shaft body 19a and can be assembled with the upper shaft sleeve 28 to realize the synchronous rotation of the upper rotating shaft 26 and the lower rotating shaft 19; the lower shaft sleeve 29 moves downward along the shaft body 19a and can be separated from the upper shaft sleeve 28, and the upper rotating shaft 26 and the lower rotating shaft 19 rotate separately.

[0037] Two symmetrical reinforcing connecting plates 31 are vertically arranged between the mounting plate 24 and the base plate 17, and a limiting plate 32 is vertically arranged between the upper parts of the two reinforcing connecting plates 31. The limiting plate 32 is parallel to the front side plate 1a, and the lower part of the limiting plate 32 is arranged in a V shape. The V-shaped surfaces of the limiting plate 32 respectively form a front limiting surface 32a and a rear limiting surface 32b. A middle limiting surface 32c is arranged between the front limiting surface 32a and the rear limiting surface 32b of the limiting plate 32. A mounting shaft 33 is horizontally arranged between the first and second side plates 31, and a pull rod 34 is rotatably connected to the mounting shaft 33. A rotation hole for accommodating the mounting shaft 33 is opened on the pull rod 34, and the pull rod 34 is perpendicular to the mounting shaft 33. The front end of the pull rod 34 extends out of the front side plate 1a, and a U-shaped connecting frame 35 is arranged at the rear end of the pull rod 34. The inner sides of the left and right side plates of the connecting frame 35 are both provided with transverse positioning pins 35a. The left and right side plates of the connecting frame 35 are respectively located on the left and right sides of the sleeve body 2902, and the two positioning pins 35a are arranged on the left and right sides of the sleeve body 2902. The pins 35a are all inserted into the annular groove 30 inwardly, and a vertical rod 36 is provided on the upper side of the pull rod 34. A limit cap 37 that can move up and down is connected to the vertical rod 36. The lower part of the limit cap 37 is provided with a socket for accommodating the vertical rod 36 to be inserted. The upper end of the limit cap 37 is provided with a hemispherical surface. The outer diameter of the limit cap 37 is larger than the outer diameter of the vertical rod 36. A compression spring 38 is sleeved on the outer periphery of the vertical rod 36. The upper and lower ends of the compression spring 38 elastically contact the lower end surface of the limit cap 37 and the upper side surface of the pull rod 34 respectively. The hemispherical surface of the cap 37 is arranged corresponding to the front limit surface 32a, the middle limit surface 32c and the rear limit surface 32b of the limit plate 32. A limit hole 39 for accommodating the pull rod 34 to pass through is opened on the front side plate 1a, and the pull rod 34 is arranged corresponding to the limit hole 39; a left-right symmetrical arc-shaped protection plate 1 40 and a protection plate 2 41 are arranged between the mounting plate 24 and the base plate 17, and the protection plate 1 40 and the protection plate 2 41 are arranged corresponding to the left and right sides of the upper coupling sleeve 28 and the lower coupling sleeve 29 respectively. The front limit surface 32a and the rear limit surface 32b are planes, and the middle limit surface 32c is an arcuate surface. When the pull rod 34 is pressed downward, the limit cap 37 abuts against the front limit surface 32a and the middle limit surface 32c, and the limit plate 32 presses the limit cap 37 to form a stable state, and the lower shaft sleeve 29 is merged with the upper shaft sleeve 28; when the pull rod 34 is lifted upward, the limit cap 37 abuts against the rear limit surface 32b and the middle limit surface 32c, and the limit plate 32 presses the limit cap 37 to form a stable state, the lower shaft sleeve 29 is separated from the upper shaft sleeve 28, and the nozzle 10b no longer sprays water.

[0038] The water supply pipe 8 is coaxially arranged at the rear end of the water pump housing 6, and the water pump liquid chamber 6a is connected with the interior of the water tank 9 through the water supply pipe 8. A mounting bracket 42a is provided inside the water supply pipe 8, and a one-way valve 42 is installed on the mounting bracket 42a. The cleaning pipe 10 includes a main pipe 10a and a nozzle 10b. The main pipe 10a is vertically installed on the upper side of the water supply pipe 8. A mounting bracket 42a is also provided inside the main pipe 10a, and a one-way valve 42 is also installed on the mounting bracket 42a. The nozzle 10b extends downward through the upper side plate 1e into the interior of the main housing 1 and extends forward through the front side plate 1a. The protruding end of the nozzle 10b is arranged corresponding to the brush head 4. The nozzle 10b is connected with the interior of the water supply pipe 8 through the main pipe 10a, and the transmission bolt 20 is installed on the shaft body three 19c. The one-way valve 42 is opened by the movement of the piston 7, and the cleaning liquid enters the water pump liquid chamber 6a from the water tank 9, changing the volume of the water pump liquid chamber 6a, extracting the cleaning liquid, and the cleaning liquid is forced into the cleaning pipe 10, and the cleaning liquid is sprayed out from the nozzle 10b, and the cleaning starts with the brush head 4.

[0039] The transmission shaft 2 is a hollow shaft, and a mounting sleeve 2a is coaxially provided at the front end of the transmission shaft 2, and the rear end of the transmission shaft 2 is closed. The inner diameter of the mounting sleeve 2a is larger than the inner diameter of the hollow transmission shaft 2, and the telescopic rod 3 is coaxially inserted into the hollow transmission shaft 2 and movably connected with the transmission shaft 2. The front end of the telescopic rod 3 extends out of the mounting sleeve 2a, and a telescopic spring 43 is coaxially provided inside the hollow transmission shaft 2, and one end of the telescopic spring 43 is connected to the inner wall of the rear end of the hollow transmission shaft 2. The telescopic rod 3 is a hollow rod, and the front end of the telescopic rod 3 is closed. The other end of the telescopic spring 43 extends into the telescopic rod 3 and is connected to the inner wall of the front end of the telescopic rod 3. A controller 44 is matched inside the mounting sleeve 2a, and the controller 44 includes an upper cover 44a, and the lower side of the upper cover 44a is respectively provided with a U-shaped extrusion piece 44b and an annular guide piece 44c corresponding to the front and rear. The upper inner wall of the mounting sleeve 2a is provided with a mounting groove 45 corresponding to the upper cover 44a, and the inner wall of the mounting sleeve 2a corresponds to the extrusion piece 44b The guide member 44c is provided with a second installation groove 46 and a third installation groove 47. The lower part of the third installation groove 47 penetrates the lower side wall of the installation sleeve 2a. The upper cover 44a is arranged in the first installation groove 45. The upper side of the upper cover 44a is provided with a pressing button 44a1. The pressing button 44a1 extends out of the installation sleeve 2a. The bottom of the second installation groove 46 is provided with a control spring 48. The bottom of the extrusion member 44b is provided with an extrusion portion 44b1. The extrusion portion 44b1 presses the control spring 48 below. The guide member 44c is provided with a second installation groove 46 and a third installation groove 47. The lower part of the extrusion member 44b is provided with an extrusion portion 44b1. The extrusion portion 44b1 presses the control spring 48 below. Component 44c is installed at mounting groove three 47, a limiting groove 49 is provided on the lower side wall of the telescopic rod 3, a stopper 50 extending into the limiting groove 49 is provided on the extrusion component 44b, an inclined guide surface 1 50a is provided on the upper side of the stopper 50, a reset guide block 51 is provided on the lower side of the telescopic rod 3, the reset guide block 51 is abutted against the extrusion component 44b, and an inclined guide surface 2 51a is provided on the lower side of the reset guide block 51 corresponding to the guide surface 1 50a; the brush head 4 includes a plurality of bristles connected to the telescopic rod 3. By pressing the push button 44a1 downward, the extrusion piece 44b presses the control spring 48 downward, the stopper 50 descends, and the telescopic rod 3 extends forward; when the telescopic rod 3 needs to be retracted, the telescopic rod 3 is pushed backward, and the guide surface 2 51a of the reset guide block 51 cooperates with the guide surface 1 50a of the stopper 50, so that the extrusion piece 44b descends to press the control spring 48 downward, the reset guide block 51 of the telescopic rod 3 returns to the rear side of the extrusion piece 44b, and the stopper 50 blocks the telescopic rod 3, so that the telescopic rod 3 is retracted.

[0040] The method of using the present invention is as follows: when it is determined that the switch state of the driving motor 13 is off, fill the water tank 9 with cleaning liquid, connect the power cord to the power supply, press the motor switch button 52, drive the motor 13 to rotate, the motor drives the spur gear 2 14 to rotate, the spur gear 2 14 drives the spur gear 1 12 at the rear end of the telescopic arm to rotate, the spur gear 1 12 drives the transmission shaft 2 to rotate, when the pull rod 34 is pressed downward, the limit cap 37 abuts against the front limit surface 32a and the middle limit surface 32c, the limit plate 32 presses the limit cap 37 to form a stable state, the lower shaft sleeve 29 is combined with the upper shaft sleeve 28, at this time, when the two bevel gears are meshed and driven, the lower rotating shaft 19 is driven to rotate synchronously through the upper rotating shaft 26, and the two positioning pins 35a remain inserted into the annular groove 30 of the lower shaft sleeve 29. The lower rotating shaft 19 drives the transmission bolt 20 to rotate, and the transmission bolt 20 drives the piston 7 to move back and forth in the water pump housing 6 through the swing connecting rod 21. The one-way valve 42 is opened through the movement of the piston 7, and the cleaning liquid enters the water pump liquid chamber 6a from the water tank 9, changes the volume of the water pump liquid chamber 6a, extracts the cleaning liquid, and the cleaning liquid is hydraulically entered into the cleaning pipe 10, and the cleaning liquid is sprayed out from the nozzle 10b, and the brush head 4 starts cleaning; when the pull rod 34 is lifted upward, the limit cap 37 abuts against the rear limit surface 32b and the middle limit surface 32c, and the limit plate 32 presses the limit cap 37 to form a stable state, the lower coupling sleeve 29 is separated from the upper coupling sleeve 28, and the nozzle 10b no longer sprays water; the rotation speed of the transmission shaft 2 is 950~1150r / min.

[0041] The method of use of the present invention comprises the following steps: (1) When it is determined that the switch state of the reduction motor is off, add cleaning fluid into the water tank 9. When the clutch is pressed down, the cleaning fluid flows from the water tank 9 into the water pump. After continuous squeezing by the piston 7, the cleaning fluid is squeezed from the connecting pipe into the hose, and then enters the injection pipe from the hose, lifting the clutch to its original position, and the cleaning fluid stops entering the water pump cavity.

[0042] (2) After the cleaning liquid is sprayed, press the switch on the telescopic arm, the telescopic arm extends, and is aimed at the difficult-to-clean place. Press the button on the wooden handle, the small motor drives the gear to rotate, the gear drives the transmission shaft 2 to rotate, the transmission shaft 2 drives the porous rotating brush head 4 to rotate, and the porous rotating brush head 4 is aimed at the place to be cleaned to clean.

[0043] The present invention uses an economical and practical structure to manufacture a multi-angle cleaner for a magnetron sputtering vacuum chamber in a laboratory, which can effectively target vacuum chambers with complex structures and has very few cleaning dead angles; the device is highly applicable and has stronger adaptability to large machines and internal structures; after changing the rotating brush head 4, it is applicable to more large machines; the device has a stronger cleaning ability for large-space vacuum chambers, the rotating brush head 4 operates at multiple angles, the telescopic rod 3 adjusts the distance, the cleaning dead angle is smaller, the application range is wider, and the cleaning efficiency is higher.

[0044] The present invention is not limited to the above-mentioned embodiments. On the basis of the technical solution disclosed in the present invention, technicians in this field can make some substitutions and deformations to some technical features therein according to the disclosed technical content without creative labor, and these substitutions and deformations are all within the protection scope of the present invention.

Claims

1. A multi-angle cleaner for a magnetron sputtering vacuum chamber, characterized in that: It includes a main shell, on which a transmission shaft extending forward is rotatably provided, the transmission shaft is transmission-connected to a rotary drive mechanism, a telescopic rod is connected to the front end of the transmission shaft, a brush head is provided at the front end of the telescopic rod, a gripping handle is provided on the lower side of the main shell, a water pump shell is provided on the rear side of the main shell, a water pump liquid chamber is provided inside the water pump shell, a piston is provided in the water pump liquid chamber, the water pump liquid chamber is connected to a water tank via a water supply pipe, the piston is also transmission-connected to the rotary drive mechanism via a clutch control mechanism, a cleaning pipe is connected to the side of the water pump shell, and the cleaning pipe is provided corresponding to the brush head.

2. The multi-angle cleaner for a magnetron sputtering vacuum chamber according to claim 1, characterized in that: The front end of the transmission shaft extends out of the main housing, the transmission shaft is perpendicular to the front side of the main housing, and the transmission shaft is sequentially sleeved with a bevel gear 1 and a spur gear 1 distributed in front and back intervals, and the bevel gear 1 and the spur gear 1 are both located inside the main housing.

3. The multi-angle cleaner for a magnetron sputtering vacuum chamber according to claim 2, characterized in that: The rotary drive mechanism includes a drive motor arranged at the upper rear side of the main housing, the output shaft of the drive motor is parallel to the transmission shaft, the output shaft of the drive motor extends forward into the main housing and is sleeved with a spur gear 2, and the spur gear 2 is meshed and connected with the spur gear 1.

4. A multi-angle cleaner for a magnetron sputtering vacuum chamber according to claim 2 or 3, characterized in that: The main shell includes a vertical front side panel and a rear side panel parallel to each other, and a symmetrical left side panel and a right side panel are respectively arranged between the front side panel and the rear side panel, and the upper and lower parts of the front side panel, the rear side panel, the left side panel and the right side panel are respectively provided with horizontal upper side panels and lower side panels.

5. The multi-angle cleaner for a magnetron sputtering vacuum chamber according to claim 4, characterized in that: The clutch control mechanism includes a front reinforcing plate and a rear reinforcing plate respectively arranged on the inner wall of the front side plate and the inner wall of the rear side plate, a horizontal base plate is arranged between the upper parts of the front reinforcing plate and the rear reinforcing plate, a through hole one is vertically opened on the base plate, and a vertical lower rotating shaft is arranged to pass through the through hole one, a transmission bolt is fixed to the lower end of the lower rotating shaft, and a swing connecting rod is hinged to the end of the transmission bolt, the water pump housing is cylindrical, the axis of the water pump housing is perpendicular to the rear side plate, the water pump housing is connected to the interior of the main housing, the piston is cylindrical, a fixed shaft is vertically arranged inside the piston, the other end of the swing connecting rod is hinged to the fixed shaft, and a through hole two is opened on the rear side plate for allowing the swing connecting rod to pass through.

6. The multi-angle cleaner for a magnetron sputtering vacuum chamber according to claim 5, characterized in that: A horizontal mounting plate is correspondingly arranged above the base plate, and the length of the mounting plate is smaller than the length of the base plate. A bearing seat is arranged on the mounting plate, and a bearing is vertically mounted in the bearing seat. A vertical upper rotating shaft is rotatably mounted on the bearing, and the upper end of the upper rotating shaft extends upward and is sleeved with a bevel gear 2 meshing with the bevel gear 1, and the lower end of the upper rotating shaft extends downward and is provided with an upper coupling sleeve, and the outer periphery of the lower end of the upper coupling sleeve is provided with a plurality of upper coupling shaft inclined grooves spaced along the circumferential direction, and the lower rotating shaft includes shaft body 1, shaft body 2 and shaft body 3 which are sequentially distributed and connected from top to bottom, and the center of shaft body 1, shaft body 2 and shaft body 3 are The axes coincide with each other, shaft body one and shaft body three are both square shafts, shaft body two is a round shaft, the outer periphery of shaft body two corresponds to the inner wall of through hole one and is movably connected, the outer periphery of shaft body one is sleeved with a lower shaft sleeve, the lower shaft sleeve comprises sleeve body one and sleeve body two which correspond to each other and are coaxial, sleeve body two is sleeved on shaft body one and is movably connected thereto, the outer diameters of sleeve body one and sleeve body three are both larger than the outer diameter of sleeve body two, a plurality of lower shaft inclined grooves arranged at intervals along the circumferential direction are provided on the outer periphery of the upper end of sleeve body one, each upper shaft inclined groove is arranged correspondingly to each lower shaft inclined groove, the upper shaft sleeve and the lower shaft sleeve are arranged correspondingly to each other, and an annular groove is provided around the outer periphery of sleeve body two.

7. The multi-angle cleaner for a magnetron sputtering vacuum chamber according to claim 6, characterized in that: Two left-right symmetrical reinforcing connecting plates are vertically arranged between the mounting plate and the base plate, a limit plate is vertically arranged between the upper parts of the two reinforcing connecting plates, the limit plate is parallel to the front side plate, the lower part of the limit plate is arranged in a V shape, the V-shaped surfaces of the limit plate respectively form a front limit surface and a rear limit surface, a middle limit surface is arranged between the front limit surface and the rear limit surface of the limit plate, a mounting shaft is horizontally arranged between the two reinforcing connecting plates, a pull rod is rotatably connected to the mounting shaft, a rotating hole for allowing the mounting shaft to pass through is opened on the pull rod, the pull rod is perpendicular to the mounting shaft, the front end of the pull rod extends out of the front side plate, a U-shaped connecting frame is arranged at the rear end, the inner sides of the left and right side plates of the connecting frame are provided with transverse locating pins, the left and right side plates of the connecting frame are respectively located on the left and right sides of the sleeve body, and the two locating pins are Inserted into the annular groove inward, a vertical pole is provided on the upper side of the pull rod, and a limit cap that can move up and down is connected to the vertical pole. A socket for accommodating the vertical pole to be inserted is provided at the lower part of the limit cap, and a hemispherical surface is provided on the upper end of the limit cap. The outer diameter of the limit cap is larger than the outer diameter of the vertical pole. A compression spring is provided on the outer periphery of the vertical pole, and the upper and lower ends of the compression spring elastically contact the lower end surface of the limit cap and the upper side surface of the pull rod respectively. The hemispherical surface of the limit cap is arranged corresponding to the front limit surface, middle limit surface and rear limit surface of the limit plate, and a limit hole for accommodating the pull rod to pass through is opened on the front side plate, and the pull rod is arranged corresponding to the limit hole; left-right symmetrical arc-shaped protection plates one and two are arranged between the mounting plate and the base plate, and the protection plates one and two are arranged corresponding to the left and right sides of the upper and lower coupling sleeves respectively.

8. The multi-angle cleaner for a magnetron sputtering vacuum chamber according to claim 7, characterized in that: The water supply pipe is coaxially arranged at the rear end of the water pump housing, and the water pump liquid chamber is connected with the interior of the water tank through the water supply pipe. A mounting bracket is provided inside the water supply pipe, and a one-way valve is installed on the mounting bracket. The cleaning pipe includes a main pipe and a nozzle. The main pipe is vertically installed on the upper side of the water supply pipe. A mounting bracket is also provided inside the main pipe, and a one-way valve is also installed on the mounting bracket. The nozzle passes through the upper side plate and extends downward into the interior of the main housing and extends forward through the front side plate. The protruding end of the nozzle is arranged corresponding to the brush head. The nozzle is connected with the interior of the water supply pipe through the main pipe, and the transmission bolt is installed on the shaft body three.

9. A multi-angle cleaner for a magnetron sputtering vacuum chamber according to claim 2 or 3, characterized in that: The transmission shaft is a hollow shaft, and a mounting sleeve is coaxially provided at the front end of the transmission shaft, and the rear end of the transmission shaft is closed. The inner diameter of the mounting sleeve is larger than the inner diameter of the hollow transmission shaft, and the telescopic rod is coaxially inserted into the hollow transmission shaft and movably connected with the transmission shaft. The front end of the telescopic rod extends out of the mounting sleeve, and a telescopic spring is coaxially provided inside the hollow transmission shaft, and one end of the telescopic spring is connected to the inner wall of the rear end of the hollow transmission shaft. The telescopic rod is a hollow rod, and the front end of the telescopic rod is closed. The other end of the telescopic spring extends into the telescopic rod and is connected to the inner wall of the front end of the telescopic rod. A controller is matched inside the mounting sleeve, and the controller includes an upper cover, and the lower side of the upper cover is respectively provided with a U-shaped extrusion piece and an annular guide piece corresponding to the front and rear. The upper inner wall of the mounting sleeve is provided with a mounting groove corresponding to the upper cover. The inner wall of the sleeve is provided with mounting groove 2 and mounting groove 3 corresponding to the extrusion piece and the guide piece respectively, the lower part of the mounting groove 3 penetrates the lower side wall of the mounting sleeve, the upper cover is arranged in the mounting groove 1, and a push button is arranged on the upper side of the upper cover, the push button extends out of the mounting sleeve, a control spring is arranged at the bottom of the mounting groove 2, an extrusion part is arranged at the bottom of the extrusion piece, the extrusion part presses the control spring below, the guide piece is installed in the mounting groove 3, a limiting groove is arranged on the lower side wall of the telescopic rod, a block extending into the limiting groove is arranged on the extrusion piece, an inclined guide surface 1 is arranged on the upper side of the block, a reset guide block is arranged on the lower side of the telescopic rod, the reset guide block is abutted against the extrusion piece, and an inclined guide surface 2 is arranged on the lower side of the reset guide block corresponding to the guide surface 1; the brush head includes a plurality of bristles connected to the telescopic rod.

10. The multi-angle cleaner for a magnetron sputtering vacuum chamber according to claim 3, characterized in that: The gripping handle is provided with a switch button for controlling the driving motor.

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