In-hole particulate matter cleaning and detecting device for porous part

Abstract

The invention relates to an in-hole particulate matter cleaning and detecting device for a porous part, and the device comprises a housing which is provided with a receiving port used for connecting purge gas, and an exhaust port used for discharging the purge gas; the gas distribution disc is connected with the exhaust port of the housing, and a plurality of gas uniformizing holes are regularly distributed in the gas distribution disc; the bearing disc is connected with the gas distribution disc, the middle of the bearing disc is a hollow area, and the hollow area is used for fixing a porous part; the recovery cavity is fixedly connected with the edge of the bearing disc and is provided with an outlet for discharging particulate matters; and the counter is connected with the outlet of the recovery cavity and is used for acquiring the size and the quantity of the particulate matters cleaned from the porous part. The device can be used for uniformly cleaning the porous parts; and the cleaning device is suitable for porous parts of various sizes, and the cleaning effect is stable and reliable.

Description

Technical Field

[0001] The invention relates to the field of semiconductor equipment, and in particular to a device for cleaning and detecting particles in holes of porous parts. Background Art

[0002] In high-tech fields such as semiconductor manufacturing, industrial production and machinery manufacturing, there are extremely high requirements for the cleanliness of the components used. Especially in the production process of semiconductor devices, even micron-level or even nano-level particle contaminants may affect the overall performance and reliability of the product. These particle contaminants may cause circuit short circuits or circuit breaks, mechanical wear or abnormal chemical reactions, ultimately leading to reduced product performance, shortened lifespan, and even functional abnormalities, seriously weakening the company's product quality and market competitiveness.

[0003] In particular, porous components have become a difficult point in cleaning due to their unique structural characteristics. Not only are these components complex in structure, with numerous and irregularly distributed holes, they often also bear key process functions. For example, porous components such as gas shower heads, gas distribution plates, and panels that are widely used in semiconductor manufacturing equipment often have thousands of holes, and the diameter of each hole is less than 1 mm. Although this fine structural design helps improve process efficiency, it also greatly increases the difficulty of cleaning.

[0004] The cleaning effect of traditional manual cleaning methods can only ensure that the state of the component surface meets the cleanliness requirements, but it is difficult to ensure that every tiny hole can be thoroughly cleaned. Or some local cleaning methods are used to clean the holes. If the cleaning is uneven, it may cause a series of subsequent problems, such as reduced decontamination rate, shortened service life, and increased failure rate, further exacerbating the risks and challenges of quality control. In addition, the differences in materials and functional designs of porous parts also bring more uncertainty to the cleaning work. In extreme cases, it will lead to uneven distribution of cleaning force, thus affecting the cleaning effect. For example, the combination of plasma ashing and wet cleaning can achieve certain results in some cases, but this method also has many potential problems. Plasma treatment may damage the surface of parts, and during wet cleaning, chemicals may penetrate into the pores and absorb moisture, causing the pore structure to collapse or the surface film structure to change during cleaning and baking. Especially for low dielectric constant materials, the presence of moisture may also cause the degradation of material properties, further affecting the reliability and stability of the product.

[0005] For the detection and judgment of the cleanliness of parts, traditional methods such as weight method and optical microscopy method can reflect the degree of contamination on the surface of parts to a certain extent, but they have obvious limitations in identifying the types and distribution characteristics of contaminants. They cannot provide accurate microstructural information of contaminants, making it difficult for us to deeply understand the nature of contaminants and their specific impact on the performance of parts, thus limiting the pertinence and effectiveness of the cleaning process and making it difficult to achieve the ideal cleaning effect.

[0006] Therefore, in order to meet the challenges of cleaning porous structure parts, it is urgently necessary to develop a device for cleaning and detecting particles in the pores of porous structure parts to achieve efficient and non-destructive cleaning and ensure that the cleanliness and performance of the parts are in the best state. Summary of the invention

[0007] The present invention aims to provide a novel device for cleaning and detecting particles in the pores of porous structure parts. By evenly and accurately cleaning the particles in the pores and performing detection, efficient and reliable cleaning of porous parts can be achieved, thereby extending the service life of the parts and saving costs.

[0008] In order to achieve the above-mentioned object, the present invention provides a device for cleaning and detecting particles in the holes of porous parts, comprising:

[0009] a housing having a receiving port for connecting a purge gas and an exhaust port for exhausting the purge gas;

[0010] A gas distribution plate, connected to the exhaust port of the housing, and provided with a plurality of regularly distributed gas distribution holes;

[0011] A support tray connected to the gas distribution plate, wherein the middle of the support tray is a hollow area, and the hollow area is used to fix the porous components;

[0012] A recovery chamber, fixedly connected to the edge of the tray, having an outlet for discharging particulate matter;

[0013] The counter is connected to the outlet of the recovery chamber and is used to obtain the size and quantity of the particles cleaned from the porous parts.

[0014] Furthermore, the cover shell has an arc-shaped inner wall, one end of the arc-shaped inner wall extends to the receiving port, and the other end extends to the discharge port.

[0015] Furthermore, the receiving port is arranged at the top end of the cover shell, and the discharge port is arranged at the bottom end of the cover shell.

[0016] Furthermore, the plurality of gas uniformity holes are distributed along the radial direction of the gas distribution disk, and the hole diameter in the central area is smaller than that in the edge area.

[0017] Furthermore, the inner wall of the recovery chamber is funnel-shaped, the open end of the funnel is connected to the support tray, and the narrow end is connected to the outlet through a channel.

[0018] Furthermore, the surface of the gas distribution plate close to the housing is streamlined, with the center higher than the edge.

[0019] Furthermore, a radially movable fixing device is provided in the central area of ​​the receiving tray.

[0020] Furthermore, the fixing device comprises a radially movable shaft pin and a fixing block abutting against the shaft pin and being radially movable, and the shaft pin and the fixing block are threadedly connected via an adjusting roller.

[0021] Furthermore, a handle is provided on the outer side of the cover shell.

[0022] Furthermore, a sealing ring is provided between the gas distribution plate and the support plate.

[0023] Furthermore, a groove is provided on the outer edge of the bottom surface of the supporting tray, and is snap-connected with the outer edge of the recovery chamber through the groove.

[0024] The present invention has the following beneficial effects:

[0025] Ability to distribute cleaning gas and pressure more evenly, improving cleaning effect;

[0026] It is suitable for porous structure parts with various sizes and complex shapes, and has extremely high flexibility and adaptability.

[0027] It can greatly reduce the tediousness and demand of manual operation, effectively avoid the error problems that may be caused by improper human operation, and ensure the stability and reliability of cleaning operations.

[0028] It can accurately detect the specific size and quantity of particles in the hole, so as to strictly control the cleaning quality and ensure that the cleanliness of porous parts fully meets the established standard requirements, further improving production efficiency and product quality.

[0029] The device has a reasonable structure and is easy to disassemble, making maintenance and care convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A schematic diagram of the structure of a cleaning and detection device according to an embodiment of the present invention;

[0031] Figure 2 A schematic diagram of the structure of a cover shell according to an embodiment of the present invention;

[0032] Figure 3 A schematic diagram of the structure of a gas distribution plate according to an embodiment of the present invention;

[0033] Figure 4 It is a structural schematic diagram of a tray according to an embodiment of the present invention;

[0034] Figure 5 Schematic diagram of the structure of a recovery chamber according to an embodiment of the present invention. DETAILED DESCRIPTION

[0035] The following is a further detailed description of a device for cleaning and detecting particles in the holes of porous parts proposed by the present invention in combination with the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the present invention will be clearer. It should be noted that the drawings are in a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention. In order to make the purposes, features and advantages of the present invention more obvious and easy to understand, please refer to the accompanying drawings. It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present invention, so they have no technical substantive significance. Any structural modification, change in proportional relationship or adjustment of size, without affecting the effects that the present invention can produce and the purposes that can be achieved, should still fall within the scope of the technical content disclosed by the present invention.

[0036] As mentioned in the background technology, when cleaning porous semiconductor parts, micro-scale particle contaminants must be encountered, and cleanliness detection must be performed after cleaning. This process is cumbersome and time-consuming, and there is currently no dedicated cleaning device. To this end, the present invention provides a device for cleaning and detecting particles in the holes of porous parts, which can efficiently clean the parts and simultaneously perform cleanliness detection, thereby improving cleaning efficiency.

[0037] See also Figure 1 , shows a schematic diagram of the structure of a cleaning and detection device according to an embodiment of the present invention. Figure 1As shown, the cleaning and detection device includes a housing 11, a gas distribution plate 12, a tray 13, a recovery chamber 14 and a counter 15. The housing 11, the gas distribution plate 12, the tray 13 and the recovery chamber 14 are connected in sequence from top to bottom, and the housing 11 and the tray 12 are connected by bolts 104. The material of the bolts 104 can be polytetrafluoroethylene to improve the corrosion resistance. The housing 11 is used to connect the purge gas and distribute the purge gas to the tray 13 through the gas distribution plate 12 to clean the porous parts fixed on the tray 13. The cleaned gas enters the recovery chamber 14 with the particles, and then the number and size information of the particles are obtained through the counter 15. When cleaning the porous parts, the information of the counter can be referred to to judge the cleaning condition of the particles. For example, if the number of particles drops to a certain level or the particle size of the particles drops to a predetermined level, it means that the cleaning is completed.

[0038] Specifically, see Figure 2 , shows a schematic diagram of the structure of a housing according to an embodiment of the present invention. The housing 11 has a receiving port 101 for connecting a purge gas, and an exhaust port 102 for exhausting the purge gas. Figure 2 As shown, the inner wall of the housing 11 is arc-shaped, one end of the arc-shaped inner wall extends to the receiving port 101, and the other end extends to the discharge port 102. Due to its arc-shaped design, according to the Bernoulli principle, the flow velocity of the gas increases when passing through, thereby carrying greater kinetic energy to the gas distribution plate 12, which is more conducive to the subsequent cleaning.

[0039] Furthermore, the receiving port 101 is arranged at the top of the housing, and the discharge port 102 is arranged at the bottom of the housing. The receiving port 101 is connected to a device for providing purge gas through a gas pipeline extending outward. Under the action of gravity, the gas flows from the top to the bottom, and impacts the porous parts fixed on the support tray 13 through the gas distribution plate 12. Furthermore, a handle 105 is arranged on the outer side of the housing 11 for easy transportation.

[0040] The gas distribution plate 12 is connected to the exhaust port 102 of the housing 11. Figure 3 , shows a schematic diagram of the structure of a gas distribution plate according to an embodiment of the present invention. Figure 3As shown, the gas distribution plate 12 is provided with a plurality of regularly distributed uniform air holes 103, through which the gas flows to the support tray 13 below. Furthermore, the plurality of uniform air holes 103 are distributed along the radial direction of the gas distribution plate 12, and the aperture of the central area is smaller than that of the edge area. Due to the arc-shaped design of the inner wall of the housing, the gas flow rate at the edge of the housing is large, but the air pressure is small. The gas at the edge flows to the support tray 13 through the uniform air holes 103. When the air pressure there is small, in order to make the air flow at the edge of the gas distribution plate 12 roughly equivalent to that in the central area, it is necessary to increase the aperture of the uniform air holes 103 in the edge area. Because the larger the aperture, the smaller the resistance when the gas passes through, and the more gas can pass through per unit time. In this way, the air flow at the edge of the gas distribution plate can be increased by increasing the aperture when the air pressure is small, so that the air flow at each part of the entire gas distribution plate is roughly equivalent, so as to achieve the purpose of uniformly distributing the gas, and then provide a uniform cleaning effect. In this embodiment, the uniform air holes 103 follow the above-mentioned pore size distribution rule to increase the gas flow at the edge of the gas distribution plate. The gas distribution plate 12 uses these regularly arranged uniform air holes 103 to make the gas flow at each location of the gas distribution plate 12 roughly equal, thereby providing a uniform cleaning effect. Optionally, the uniform air holes 103 have three pore sizes, and their pore size ratio is 1:2:4. Or in other examples, the pore size ratio is not only three, but can also be 1:2:4:6:8 and so on.

[0041] Furthermore, the surface of the gas distribution plate 12 near the housing 11 is streamlined, with the center higher than the edge. This streamlined design reduces the gas flow resistance on the surface of the gas distribution plate 12 and reduces the kinetic energy loss of the gas, so that the gas can blow off the particles on the porous parts on the tray.

[0042] The tray 13 is connected to the gas distribution plate 12, and the middle of the tray 13 is a hollow area, and the hollow area is used to fix the porous parts. Figure 4 , shows a schematic diagram of the structure of a tray according to an embodiment of the present invention. Figure 4As shown, the central area of ​​the tray 13 is provided with a radially movable fixing device 108 to be suitable for porous parts of different sizes. The fixing device 108 is arranged in the circumference of the central area, and multiple fixing devices 108 can be provided. Each fixing device 108 includes a radially movable shaft pin 109, and a fixing block 115 that abuts against the shaft pin 109 and can move radially. The shaft pin 109 and the fixing block 115 are threadedly connected through an adjusting roller 114. The adjusting roller 114 is provided with threads in the circumference, which is rotatably connected with the fixing block 115. The shaft pin 109 is provided with threads on the outer circumference. By rotating the adjusting roller 114, the shaft pin 109 is driven to move radially, and the fixing block 115 abutting against the shaft pin 109 is driven to move, thereby adjusting the radial diameter. In this example, the adjustable size of the central area of ​​the tray 13 is 20 cm to 40 cm, which is suitable for cleaning porous parts of corresponding sizes.

[0043] Furthermore, if Figure 1 As shown, a sealing ring 111 is provided between the gas distribution plate 12 and the support plate 13 to enhance the sealing performance so as to ensure that the purge gas does not leak.

[0044] For environmental protection and detection purposes, a recovery chamber 14 is provided below the tray 13 for recovering particulate matter. The recovery chamber 14 is fixedly connected to the edge of the tray and has an outlet 106 for discharging particulate matter. The edge of the recovery chamber 14 is sealed to the bottom of the tray 13. Figure 1 and Figure 4 As shown, the outer edge of the bottom surface of the tray 13 is provided with a groove 112, which is engaged with the outer edge of the recovery chamber 14 through the groove 112. The shape of the groove 112 matches the edge shape of the recovery chamber 14 to form a sealed contact to ensure that there is no leakage of particles. Figure 5 , shows a schematic diagram of the structure of the recovery chamber of an embodiment of the present invention. Figure 5 As shown, the inner wall of the recovery chamber 14 is funnel-shaped, the open end of the funnel is connected to the support tray 13, and the narrow end is connected to the outlet 106 through the channel 107. After the porous component is swept by the airflow, the particles in the holes will fall into the recovery chamber 14, slide along the inner wall of the recovery chamber into the channel 107, and be discharged from the outlet 106 under the action of the airflow.

[0045] Furthermore, a counter 15 is provided at the outlet 106 for obtaining the size and quantity of the particles cleaned from the porous parts. The cleaning effect of the porous parts can be inferred by observing the size and quantity of the particles in real time. When the number of particles drops to a certain level, the cleaning purge can be stopped. The counter 15 detects the specific size and quantity of the particles discharged from the outlet through the sampling probe, providing strong data support for the control of the cleaning quality. Optionally, the counter 15 is connected to the outlet 106 through an elastic sleeve 113, which can provide good sealing performance and effectively prevent any leakage that may occur when the particles are discharged, thereby ensuring that the entire cleaning process is environmentally friendly and reliable.

[0046] In summary, the present invention can distribute clean gas and pressure more evenly by designing the cover and gas distribution plate, thereby improving the cleaning effect. The device is widely applicable to porous parts of various sizes and complex and changeable shapes, showing extremely high flexibility and adaptability. It can greatly reduce the tediousness and demand of manual operation, effectively avoid the error problem that may be caused by improper human operation, and ensure the stability and reliability of the cleaning operation. In addition, the device is also equipped with an advanced dust particle counter, which can accurately detect the specific size and number of particles in the hole, so as to strictly control the cleaning quality, ensure that the cleanliness of porous parts fully meets the established standard requirements, and further improve production efficiency and product quality. Not only that, in the design process of the device, special consideration is also given to the factors of easy maintenance and maintenance. Through scientific and reasonable structural layout and easy-to-disassemble component design, it is greatly convenient for users to perform necessary maintenance and maintenance work on the device in daily use. For example, the inside of the cover and the inside of the recovery chamber are smooth surfaces, which can facilitate cleaning and maintenance, extend the service life of the device, and reduce maintenance costs.

[0047] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the present invention. After reading the above content, it will be apparent to those skilled in the art that various modifications and substitutions of the present invention will occur. Therefore, the protection scope of the present invention should be limited by the appended claims.

Claims

1. A device for cleaning and detecting particles in the holes of porous parts, characterized in that: include: a housing having a receiving port for connecting a purge gas and an exhaust port for exhausting the purge gas; A gas distribution plate, connected to the exhaust port of the housing, and provided with a plurality of regularly distributed gas distribution holes; A support tray connected to the gas distribution plate, wherein the middle of the support tray is a hollow area, and the hollow area is used to fix the porous components; A recovery chamber, fixedly connected to the edge of the tray, having an outlet for discharging particulate matter; The counter is connected to the outlet of the recovery chamber and is used to obtain the size and quantity of the particles cleaned from the porous parts.

2. The device for cleaning and detecting particles in the holes of porous parts according to claim 1, characterized in that: The housing has an arc-shaped inner wall, one end of which extends to the receiving port, and the other end of which extends to the discharge port.

3. The device for cleaning and detecting particles in the holes of porous parts according to claim 1, characterized in that: The receiving port is arranged at the top end of the housing, and the discharge port is arranged at the bottom end of the housing.

4. The device for cleaning and detecting particles in the holes of porous parts according to claim 1, characterized in that: The plurality of gas uniformity holes are distributed along the radial direction of the gas distribution disk, and the hole diameter in the central area is smaller than that in the edge area.

5. The device for cleaning and detecting particles in the holes of porous parts according to claim 1, characterized in that: The inner wall of the recovery chamber is funnel-shaped, the open end of the funnel is connected to the support tray, and the narrow end is connected to the outlet through a channel.

6. The device for cleaning and detecting particles in the holes of porous parts according to claim 1, characterized in that: The surface of the gas distribution plate close to the housing is streamlined, with the center higher than the edge.

7. The device for cleaning and detecting particles in the holes of porous parts according to claim 1, characterized in that: A radially movable fixing device is arranged in the central area of ​​the supporting tray.

8. The device for cleaning and detecting particles in the holes of porous parts according to claim 7, characterized in that: The fixing device comprises a radially movable shaft pin and a fixing block which abuts against the shaft pin and can move radially. The shaft pin and the fixing block are connected with each other through an adjusting roller thread.

9. The device for cleaning and detecting particles in the holes of porous parts according to claim 1, characterized in that: A handle is arranged on the outer side of the cover shell.

10. The device for cleaning and detecting particles in the holes of porous parts according to claim 1, characterized in that: A sealing ring is arranged between the gas distribution plate and the support plate.

11. The device for cleaning and detecting particles in the holes of porous parts according to claim 1, characterized in that: The outer edge of the bottom surface of the supporting tray is provided with a groove, and the groove is snap-connected with the outer edge of the recovery chamber.

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