Falling sample resetting device for ultrahigh vacuum environment

Abstract

The invention discloses a falling sample resetting device for an ultrahigh vacuum environment. The falling sample resetting device comprises a metal winding plate, a winding wire, a balancing weight, a first manipulator and a first vacuum magnetic rod. The two sides of the metal winding plate are concaved inwards to form first winding parts, part of the winding wire is wound in the first winding parts, and the balancing weight is fixedly connected to one end of the winding wire. The first manipulator is used for clamping a metal rolling plate, the first vacuum magnetic rod is connected with the first manipulator, and the first vacuum magnetic rod can rotate and can reciprocate along the axis of the first vacuum magnetic rod. And vacuum glue is arranged at the bottom of the balancing weight and is used for adhering the balancing weight and the falling sample together. According to the falling sample resetting device for the ultrahigh vacuum environment, the first vacuum magnetic rod is used for driving the winding disc to rotate and move so as to adjust the position of the balancing weight, so that the balancing weight is adhered to a falling sample through vacuum glue at the bottom, and the falling sample is lifted and reset.

Description

Technical Field

[0001] The invention relates to a resetting device, in particular to a falling sample resetting device used in an ultra-high vacuum environment. Background Art

[0002] The Nano Vacuum Interconnection Experiment Station is a nano field platform that integrates material growth, device processing, and test analysis. The platform is designed with an ultra-high vacuum pipeline, and the pipeline is connected to multiple devices for material growth, device processing, and test analysis.

[0003] The transmission of samples in ultra-high vacuum pipelines mainly relies on a dedicated transmission device, which is usually composed of three parts: a sample holder, a transmission rod, and a sample receiving platform. Its function is to transmit samples to various parts of the experimental station. Although the mechanism of the sample transmission process is perfect enough, there is still a risk of samples falling during the transmission process. Since the samples are located in ultra-high vacuum pipelines, the samples will fail when exposed to the atmosphere, and the staff cannot enter the vacuum pipeline to reset the samples. Therefore, it is very troublesome for samples to fall in a vacuum environment.

[0004] The information disclosed in this background technology section is only intended to enhance the understanding of the overall background of the invention and should not be regarded as an acknowledgment or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the invention

[0005] The object of the present invention is to provide a dropped sample resetting device for use in an ultra-high vacuum environment, which can reset a dropped sample in an ultra-high vacuum environment.

[0006] To achieve the above-mentioned purpose, the present invention provides a dropped sample resetting device for an ultra-high vacuum environment, comprising a metal winding plate, a winding wire, a counterweight, a first manipulator and a first vacuum magnetic rod. The two sides of the metal winding plate are concave to form a first winding portion, the winding wire is partially wound in the first winding portion, and the counterweight is fixedly connected to one end of the winding wire. The first manipulator is used to clamp the metal winding plate, and the first vacuum magnetic rod is connected to the first manipulator, and the first vacuum magnetic rod can rotate and can reciprocate along its own axis. Among them, the bottom of the counterweight is provided with vacuum glue, which is used to bond the counterweight to the dropped sample.

[0007] In one or more embodiments, the dropped sample resetting device for ultra-high vacuum environment further includes a second manipulator and a second vacuum magnetic rod, wherein the second manipulator is installed at one end of the second vacuum magnetic rod, and the second vacuum magnetic rod is located below the first vacuum magnetic rod.

[0008] In one or more embodiments, the fallen sample resetting device for ultra-high vacuum environment further comprises a sleeve, which is horizontally mounted on the metal winding plate for the winding wire to pass through.

[0009] In one or more embodiments, the axis of the sleeve coincides with the perpendicular midline of the take-up wire in the first winding portion.

[0010] In one or more embodiments, the sleeve is made of an aluminum alloy material.

[0011] In one or more embodiments, a second winding portion is provided on the metal winding plate, and the second winding portion is located between the first winding portion and the sleeve.

[0012] In one or more embodiments, the first manipulator has two manipulator fingers, and the first manipulator clamps the metal coiled plate by opening and closing the manipulator fingers.

[0013] In one or more embodiments, a card slot is opened on the inner side wall of the two mechanical fingers, and the card slot is used to accommodate the metal winding plate.

[0014] In one or more embodiments, the height of the slot is greater than the thickness of the metal coiling plate.

[0015] In one or more embodiments, the cross-section of the robotic finger is rectangular or arc-shaped.

[0016] In one or more embodiments, the counterweight is made of a metal material.

[0017] In one or more embodiments, the take-up wire is made of copper wire.

[0018] Compared with the prior art, a dropped sample resetting device for an ultra-high vacuum environment according to one embodiment of the present invention utilizes a first vacuum magnetic rod to drive the winding disk to rotate and move to adjust the position of the counterweight block, so that the counterweight block is adhered to the dropped sample through the vacuum glue at the bottom, and the dropped sample is lifted and reset, thereby preserving the sample without destroying the vacuum environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A top view of a dropped sample resetting device for use in an ultra-high vacuum environment according to an embodiment of the present invention;

[0020] Figure 2 A side view of a dropped sample resetting device for use in an ultra-high vacuum environment according to an embodiment of the present invention;

[0021] Figure 3 A schematic diagram of a separation process of a counterweight block and a dropped sample according to an embodiment of the present invention;

[0022] Figure 4 This is a schematic diagram of another separation process of a counterweight block and a dropped sample according to an embodiment of the present invention.

[0023] Among them, 1. metal winding plate, 2. first winding part, 3. winding line, 4. sleeve, 5. counterweight, 6. vacuum glue, 7. first manipulator, 8. first vacuum magnetic rod, 9. dropped sample, 10. sample tray, 11. second manipulator, 12. second vacuum magnetic rod, 13. second winding part. DETAILED DESCRIPTION

[0024] The specific implementation modes of the present invention are described in detail below in conjunction with the accompanying drawings, but it should be understood that the protection scope of the present invention is not limited by the specific implementation modes.

[0025] Unless explicitly stated otherwise, throughout the specification and claims, the term “comprise” or variations such as “include” or “comprising”, etc., will be understood to include the stated elements or components but not to exclude other elements or components.

[0026] like Figure 1-Figure 4 As shown, a dropped sample resetting device for an ultra-high vacuum environment according to an embodiment of the present invention includes a metal winding plate 1, a winding wire 3, a counterweight 5, a first manipulator 7 and a first vacuum magnetic rod 8. The two sides of the metal winding plate 1 are concave to form a first winding portion 2, and the winding wire 3 is partially wound in the first winding portion 2, and the counterweight 5 is fixedly connected to one end of the winding wire 3. The first manipulator 7 is used to clamp the metal winding plate 1. The first vacuum magnetic rod 8 is connected to the first manipulator 7, and the first vacuum magnetic rod 8 is able to rotate and move back and forth along its own axis. Among them, a vacuum glue 6 is provided at the bottom of the counterweight 5, which is used to bond the counterweight 5 to the dropped sample 9.

[0027] Since the vacuum pipe is in an ultra-high vacuum environment, conventional driving elements such as motors cannot be used. Therefore, the first vacuum magnetic rod 8 is used as a power source to drive the metal winding plate 1 to move and rotate, which can prevent substances such as grease and adhesives in conventional driving elements from contaminating precision instruments in a vacuum environment. At the same time, in actual situations, due to the limitations of the vacuum pipe size, sample size and sample transmission path, the positions where the samples fall are basically on the same straight line, so only one first vacuum magnetic rod 8 is equipped in this embodiment. When the sample falling position is not on the same straight line, the first vacuum magnetic rod 8 can be connected to an additional mobile device, and the moving trajectory of the mobile device needs to intersect with the moving trajectory of the first vacuum magnetic rod 8. Of course, in most cases, the best solution is to keep the moving trajectories of the two perpendicular.

[0028] The first vacuum magnetic rod 8 can rotate by itself and can reciprocate along its own axis. Therefore, when a sample falls, the metal winding plate 1 is clamped by the first manipulator 7 on the first vacuum magnetic rod 8, and then the metal winding plate 1 is driven to move directly above the fallen sample 9. The first vacuum magnetic rod 8 drives the metal winding plate 1 to rotate. During the rotation of the metal winding plate 1, the winding wire 3 wound in the first winding part 2 is unwound, so that the counterweight block 5 moves down until the bottom of the counterweight block 5 contacts the fallen sample 9. After the vacuum glue 6 at the bottom of the counterweight block 5 contacts the fallen sample 9, it adheres to the counterweight block 5. Then the first vacuum magnetic rod 8 is controlled to rotate in the opposite direction, the winding wire 3 is wound, and the counterweight block 5 and the fallen sample 9 are driven to move upward together, and the fallen sample 9 is reset.

[0029] The dropped sample resetting device for ultra-high vacuum environment according to one embodiment of the present invention further includes a second manipulator 11 and a second vacuum magnetic rod 12 . The second manipulator 11 is installed at one end of the second vacuum magnetic rod 12 , and the second vacuum magnetic rod 12 is located below the first vacuum magnetic rod 8 .

[0030] After the winding line 3 drives the dropped sample 9 to move upward, the dropped sample 9 is moved to the sample tray 10 for holding the sample, and the dropped sample 9 is placed on the sample tray 10. The second manipulator 11 on the second vacuum magnetic rod 12 of the conveying system is moved to the dropped sample 9 to fix the dropped sample 9. Then the winding line 3 is wound up to drive the counterweight block 5 to move upward, so that the counterweight block 5 can be separated from the dropped sample 9, and finally the dropped sample 9 is reset.

[0031] It should be noted that the dropped sample resetting device for ultra-high vacuum environment of one embodiment of the present invention is matched with the sample conveying system. Therefore, in this embodiment, the second manipulator 11 and the second vacuum magnetic rod 12 can also be applied to the sample conveying system to convey the sample. Or when the sample conveying system is already equipped with a component with the same function as the second manipulator 11 and the second vacuum magnetic rod 12, and the component can assist the resetting device in resetting the sample, in this case, in another embodiment, the second manipulator 11 and the second vacuum magnetic rod 12 may not be provided, but the sample may be reset with the help of the corresponding components in the sample conveying system.

[0032] like Figure 1 and Figure 2As shown, the falling sample resetting device for ultra-high vacuum environment of one embodiment of the present invention also includes a sleeve 4, which is horizontally mounted on the metal winding plate 1 for the winding wire 3 to pass through. And the axis of the sleeve 4 coincides with the perpendicular midline of the winding wire 3 in the first winding portion 2, that is, when the metal winding plate 1 is circular, during the rotation of the metal winding plate 1, since the metal winding plate 1 has a certain thickness, the sleeve 4 will rotate around the axis of the first vacuum magnetic rod 8, but the radius of the rotation path of the sleeve 4 is extremely small and can be basically ignored. It can be regarded that the sleeve 4 only rotates by itself, so the position of the winding wire 3 passing through the sleeve 4 is basically unchanged, and will not reciprocate in a direction perpendicular to the axis of the first vacuum magnetic rod 8, that is, the counterweight block 5 is always directly below the first vacuum magnetic rod 8 and will not be offset, so that the position of the counterweight block 5 is controllable, which is convenient for resetting the falling sample 9.

[0033] In one embodiment, the sleeve 4 is made of aluminum alloy. Aluminum alloy is light in weight, which can reduce the overall weight of the reset device, and has high strength and good pressure resistance, and can be used for a long time under high temperature and high pressure. At the same time, aluminum alloy has good formability and welding performance, and is easy to process, form, and weld, so after the sleeve 4 is formed, it can be directly welded to the metal coiling plate 1.

[0034] like Figure 1 As shown, the metal winding plate 1 is provided with a second winding portion 13, and the second winding portion 13 is located between the first winding portion 2 and the sleeve 4. During the winding process of the winding wire 3, there may be a situation where it cannot be wound on the first winding portion 2. At this time, since the second winding portion 13 is close to the sleeve 4, the winding wire 3 can be wound on the second winding portion 13, so that the winding wire 3 can stably adjust the height of the counterweight 5.

[0035] In order to facilitate the clamping of the metal winding plate 1, the first manipulator 7 has two manipulator fingers. Since conventional power elements cannot be used in an ultra-high vacuum environment, in order to drive the manipulator fingers of the first manipulator 7 to open and close, the manipulator fingers can be connected to the first vacuum magnetic rod 8 using components such as connecting rods, and one end of the manipulator fingers can be hinged, and the first vacuum magnetic rod 8 can be used to drive the manipulator fingers to open and close. Of course, the connection method between the manipulator fingers and the first vacuum magnetic rod 8 is not limited to the above scheme, and other schemes that do not use conventional power elements to drive the manipulator fingers to open and close are applicable to this embodiment.

[0036] In one embodiment, a card slot is provided on the inner side wall of the two mechanical fingers, and the card slot is used to accommodate the metal winding plate 1. When in use, the mechanical fingers clamp the falling sample 9 from both sides thereof, and after the card slot on the mechanical fingers is combined with the metal winding plate 1, the fixing effect of the metal winding plate 1 can be enhanced, and the metal winding plate 1 can be prevented from falling due to insufficient clamping force during the rotation and movement process.

[0037] In order to make it easier for the slot on the mechanical finger to combine with the metal winding plate 1, the height of the slot is greater than the thickness of the metal winding plate 1. However, in actual application, the height of the slot should not be too large, otherwise after combining with the metal winding plate 1, it will leave too much moving space for the metal winding plate 1. In the case of insufficient clamping force, the metal winding plate 1 is easy to move in the slot. After the metal winding plate 1 moves, the position of the counterweight 5 will change, resulting in the inability to accurately control the position of the counterweight 5, which is not conducive to the rapid resetting of the dropped sample 9. Especially when the counterweight 5 is about to contact the dropped sample 9, the metal winding plate 1 suddenly slips in the slot, causing the counterweight 5 to suddenly drop, which can easily cause the dropped sample 9 to be damaged. Therefore, the height of the slot should not be too large, and it only needs to be slightly larger than the thickness of the metal winding plate 1.

[0038] In one embodiment, the cross-section of the mechanical finger can be rectangular or arc-shaped. Rectangular mechanical fingers are easier to process and shape, and the distance between the two mechanical fingers is also convenient to measure during the installation process, making it easier to accurately position the mechanical fingers on both sides during the installation process. The arc-shaped mechanical fingers are easier to fit the curved surface of the metal winding plate 1, which can increase the contact area between the mechanical fingers and the metal winding plate 1, and improve the fixing effect of the mechanical fingers on the metal winding plate 1.

[0039] In one embodiment, the counterweight 5 is made of metal material. Since the counterweight 5 needs to have a certain weight, the winding line 3 connected to the counterweight 5 is always in a straight state, which is convenient for controlling the position of the counterweight 5. At the same time, after the counterweight 5 has a certain weight, the metal winding plate 1 will not drive the counterweight 5 to shake randomly during the rotation process, so that the counterweight 5 always remains vertical. Therefore, in this embodiment, the counterweight 5 can be made of metal material, and its specific material is determined according to the mechanical properties and size of the winding line 3. The essential purpose of the material selection of the counterweight 5 is to keep the counterweight 5 always vertical, and not to make the counterweight 5 apply too much load to the winding line 3, and the counterweight 5 and the vacuum glue 6 should also have good bonding force, so that the vacuum glue 6 is not easy to fall off from the counterweight 5. Of course, when the vacuum glue 6 is connected to the counterweight 5, another adhesive can also be applied between the two to connect the two. Therefore, the good bonding force between the counterweight 5 and the vacuum glue 6 is only a preferred embodiment of the present invention.

[0040] The winding wire 3 can be made of copper wire, because copper wire has high strength, strong fatigue resistance, can withstand large mechanical tension, is not easy to break, and has good flexibility and is easy to wind. When used, one end of the copper wire can be fixed on the metal winding plate 1, and then the winding wire 3 is wound in the first winding part 2 of the metal winding plate 1.

[0041] The tinning pad on the printed circuit board provided by the present invention is further described below in conjunction with specific usage scenarios.

[0042] First, the first vacuum magnetic rod 8 drives the first manipulator 7 to move to the metal winding plate 1, and clamps the metal winding plate 1 from both sides of the metal winding plate 1. Then, the metal winding plate 1 is driven to move to the top of the dropped sample 9, and the first vacuum magnetic rod 8 is controlled to rotate, driving the metal winding plate 1 to rotate together. During the rotation of the metal winding plate 1, the winding wire 3 is released, so that the counterweight block 5 moves down until it contacts the dropped sample 9 at the bottom.

[0043] After the counterweight 5 contacts the dropped sample 9, the vacuum glue 6 at the bottom of the counterweight 5 adheres the dropped sample 9 to the counterweight 5, and then controls the first vacuum magnetic rod 8 to rotate in the opposite direction, pays out the winding line 3, and drives the counterweight 5 and the dropped sample 9 to move upward. Subsequently, the dropped sample 9 is moved to the top of the sample tray 10 by the first vacuum magnetic rod 8, and then the winding line 3 is paid out, and the dropped sample 9 is placed on the sample tray 10.

[0044] Next, the counterweight 5 is separated from the fallen sample 9. The specific separation steps include multiple steps. Two separation steps are provided below for reference:

[0045] 1. If Figure 3 As shown, the second vacuum magnetic rod 12 of the conveying system drives the second manipulator 11 to move above the dropped sample 9, so that the second manipulator 11 contacts the upper surface of the dropped sample 9, presses the dropped sample 9 against the sample tray 10, and then reels the winding line 3, and the counterweight block 5 moves upward and separates from the dropped sample 9.

[0046] 2. If Figure 4 As shown, the second vacuum magnetic rod 12 of the conveying system drives the second manipulator 11 to move to the bottom of the dropped sample 9, so that the second manipulator 11 contacts the lower surface of the dropped sample 9, and the first vacuum magnetic rod 8 simultaneously drives the metal winding plate 1 to move and rotate. Since the surface of the dropped sample 9 has protrusions, the friction between the dropped sample 9 and the contour of the second manipulator 11 is large. The second manipulator 11 can still fix the dropped sample 9 on the sample tray 10, so that the dropped sample 9 is separated from the counterweight 5.

[0047] The foregoing description of specific exemplary embodiments of the present invention is for the purpose of illustration and demonstration. These descriptions are not intended to limit the present invention to the precise form disclosed, and it is clear that many changes and variations can be made as taught above. The purpose of selecting and describing the exemplary embodiments is to explain the specific principles of the present invention and its practical application, so that those skilled in the art can realize and utilize various different exemplary embodiments of the present invention and various different selections and changes. The scope of the present invention is intended to be limited by the claims and their equivalents.

Claims

1. A dropped sample resetting device for ultra-high vacuum environment, characterized in that: include: A metal winding plate (1) with two sides concave to form a first winding portion (2); A winding wire (3) partially wound inside the first winding portion (2); A counterweight block (5) is fixedly connected to one end of the winding line (3); A first manipulator (7) for clamping the metal coiled plate (1); as well as A first vacuum magnetic rod (8) connected to the first manipulator (7), wherein the first vacuum magnetic rod (8) is capable of rotating and reciprocating along its own axis; Wherein, a vacuum glue (6) is provided at the bottom of the counterweight block (5) for bonding the counterweight block (5) and the dropped sample (9) together.

2. The dropped sample resetting device for ultra-high vacuum environment according to claim 1, characterized in that: It also includes a second manipulator (11) and a second vacuum magnetic rod (12), wherein the second manipulator (11) is installed at one end of the second vacuum magnetic rod (12), and the second vacuum magnetic rod (12) is located below the first vacuum magnetic rod (8).

3. The dropped sample resetting device for ultra-high vacuum environment according to claim 1, characterized in that: It also comprises a sleeve (4), which is horizontally mounted on the metal winding plate (1) and allows the winding wire (3) to pass through.

4. The dropped sample resetting device for ultra-high vacuum environment according to claim 3, characterized in that: The axis of the sleeve (4) coincides with the perpendicular midline of the winding wire (3) in the first winding portion (2).

5. The dropped sample resetting device for ultra-high vacuum environment according to claim 3, characterized in that: The sleeve (4) is made of aluminum alloy material.

6. The dropped sample resetting device for ultra-high vacuum environment according to claim 3, characterized in that: The metal winding plate (1) is provided with a second winding portion (13), and the second winding portion (13) is located between the first winding portion (2) and the sleeve (4).

7. The dropped sample resetting device for ultra-high vacuum environment according to claim 1, characterized in that: The first manipulator (7) has two manipulator fingers, and the first manipulator (7) clamps the metal winding plate (1) by opening and closing the manipulator fingers.

8. The dropped sample resetting device for ultra-high vacuum environment according to claim 7, characterized in that: A card slot is provided on the inner side walls of the two mechanical fingers, and the card slot is used to accommodate a metal winding plate (1).

9. The fallen sample resetting device for ultra-high vacuum environment according to claim 8, characterized in that: The height of the clamping groove is greater than the thickness of the metal winding plate (1).

10. The dropped sample resetting device for ultra-high vacuum environment according to claim 7, characterized in that: The cross section of the mechanical finger is rectangular or arc-shaped.

11. The dropped sample resetting device for ultra-high vacuum environment according to claim 1, characterized in that: The counterweight block (5) is made of metal material; and / or the winding wire (3) is made of copper wire.

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