High-precision disc arrangement device for porcelain pieces and semiconductor production line

Abstract

The application provides a high-precision tray placing device for porcelain pieces and a semiconductor production line, and belongs to the field of semiconductor manufacturing.The high-precision tray placing device for porcelain pieces comprises a feeding assembly, a first multi-head grabbing mechanism, a second multi-head grabbing mechanism and a discharging mechanism.The feeding assembly comprises a magazine lifting assembly and a first carrying assembly, and the first carrying assembly can move the feeding magazine.The first multi-head grabbing mechanism comprises a first mounting part and a plurality of first clamping heads, the first mounting part is used for mounting the first clamping heads, and the first clamping heads are used for clamping and positioning the porcelain pieces and the feeding magazine.The second multi-head grabbing mechanism comprises a second mounting part and a plurality of second clamping heads.The discharging mechanism comprises a tray lifting assembly and a second carrying assembly, the second carrying assembly transfers the discharging tray between the second clamping heads and the tray lifting assembly, and each second clamping head can transfer the porcelain pieces in the movement of the discharging tray.Compared with the prior art, the application solves the technical problems of high processing cost and complex processing steps of the existing porcelain piece tray placing.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor processing, and more specifically, it relates to a high-precision ceramic plate-stacking device. This invention also relates to a semiconductor production line. Background Technology

[0002] Before side printing or processing on multi-layer ceramics, the ceramic piece must be placed face up in a positioning fixture for alignment and printing or processing. Due to the varying sizes and types of ceramic pieces, specific fixtures must be made according to their structure, requiring high precision and resulting in high costs. When manually placing the ceramic pieces in the fixture, measures must be taken to avoid pinching or damaging them, requiring experienced operators and resulting in low efficiency. Furthermore, when manually placing symmetrical ceramic pieces, it is easy to place them upside down, leading to incorrect printing and serious quality problems.

[0003] Due to the high tooling costs, complex manual operation, and poor placement accuracy of the aforementioned ceramic pieces, the printing quality needs to be checked one by one after side printing. The increased processing steps can easily introduce new defects, so improvements are urgently needed. Summary of the Invention

[0004] The purpose of this invention is to provide a high-precision ceramic plate-arranging device to solve the technical problems of high processing cost and complex processing steps in existing ceramic plate-arranging equipment.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is: to provide a high-precision ceramic plate-arranging device, comprising: The feeding mechanism includes a material box lifting assembly and a first conveying assembly. The material box lifting assembly is used to convey the material box in the vertical direction. The first conveying assembly is located on one side of the material box lifting assembly and can move the material box in the horizontal and vertical directions. The first multi-head gripping mechanism includes a first mounting part and a plurality of first clamps. The first mounting part is used to mount each of the first clamps, and the first clamps can move along a first horizontal direction and a second horizontal direction. The first clamps are used to grip and position ceramic parts and a feeding box, and each of the first clamps can move along the vertical direction. The second multi-head gripping mechanism includes a second mounting part and a plurality of second grippers. The second mounting part is used to mount each of the second grippers, and each of the second grippers can move along a first horizontal direction and a second horizontal direction. The unloading mechanism includes a tray lifting assembly and a second conveying assembly. The tray lifting assembly is used to convey the unloading tray in the vertical direction. The second conveying assembly is located on one side of the second chuck and can convey the unloading tray in the second horizontal direction to transfer the unloading tray between the second chuck and the tray lifting assembly. Each of the second chucks can transfer the ceramic parts from the loading box to the unloading tray during the movement of the unloading tray.

[0006] In one possible implementation, the first handling assembly includes a dual-axis robotic arm and a clamping mechanism. The dual-axis robotic arm includes a first robotic arm, a second robotic arm, a first vertical shaft, and a second vertical shaft. The first vertical shaft and the second vertical shaft are respectively located at both ends of the first robotic arm. The first vertical shaft is used to control the swing of the first robotic arm, and the second vertical shaft is used to connect the first robotic arm and the second robotic arm and to control the swing of the first robotic arm. The clamping mechanism is located on the second robotic arm and can clamp the loading box in the vertical direction.

[0007] In one possible implementation, the first multi-head gripping mechanism further includes a first linear drive module, a second linear drive module, and a third linear drive module. The power output direction of the first linear drive module is parallel to a first horizontal direction. The second linear drive module is disposed at the power output end of the first linear drive module, and the power output direction of the second linear drive module extends in a vertical direction. The third linear drive module is disposed at the power output end of the second linear drive module, and the power output direction of the third linear drive module extends in a second horizontal direction. The first mounting portion is disposed at the power output end of the third linear drive module.

[0008] In one possible implementation, the second multi-head gripping mechanism includes a fourth linear drive module, a fifth linear drive module, and a sixth linear drive module. The power output direction of the fourth linear drive module extends along a second horizontal direction. The fifth linear drive module is disposed at the power output end of the fourth linear drive module and extends along a vertical direction. The sixth linear drive module is disposed at the power output end of the fifth linear drive module and extends along a first horizontal direction. The second mounting portion is disposed at the power output end of the sixth linear drive module.

[0009] In one possible implementation, the high-precision ceramic tray placement device further includes a top-firing mechanism, which includes a global camera located above the feeding mechanism. The global camera is capable of visually positioning the material in the feeding box.

[0010] In one possible implementation, the high-precision ceramic component placement device further includes a flipping mechanism, which includes a steering wheel located downstream of the first transport assembly. The steering wheel's steering shaft extends in the vertical direction, and the steering wheel is used to receive the ceramic component and the loading box after the first chuck has been initially positioned.

[0011] In one possible implementation, the high-precision ceramic placement device further includes a bottom-firing mechanism for taking pictures of the ceramic pieces to be placed from the bottom. The bottom-firing mechanism includes a first bottom-firing camera and a second bottom-firing camera. The first bottom-firing camera is located below the first chuck and between the steering wheel and the global camera. The second bottom-firing camera is located below the second chuck and between the steering wheel and the second transport assembly.

[0012] In one possible implementation, the material box lifting assembly includes a vertical drive module and a receiving section. The vertical drive module can drive the receiving section to move up and down. The receiving section is provided with multiple receiving slots. The receiving slots are used to accommodate the unloading tray. The length direction of each receiving slot is parallel to the second horizontal direction, and the receiving slot has an opening facing the second conveying assembly.

[0013] In one possible implementation, the second multi-head grasping mechanism further includes a visual positioning camera disposed on the second mounting portion.

[0014] Compared to existing technologies, the high-precision ceramic tray-stacking device provided by this invention, in its specific implementation process, involves multiple feeding boxes moving upward to a designated height under the drive of the feeding box lifting assembly. Under the action of the first conveying assembly, the feeding box at the top of the feeding box lifting assembly is transferred to below each of the first clamps. As the feeding box moves with the first conveying assembly, each of the first clamps can tray the ceramic pieces in the feeding box, making the trayed ceramic pieces easier to grip with the subsequent second clamps. Similarly, the second conveying assembly can move the unloading tray to the vicinity of the feeding box, and then the second clamps, with the cooperation of the second conveying assembly, can transfer the ceramic pieces in the feeding box to the unloading tray. During the process of the unloading tray being transferred to the tray lifting assembly by the second conveying assembly, each of the second clamps can continue to perform high-precision tray-stacking of the material in the unloading tray. The entire process does not require manual operation or additional fixed tooling, which helps to enhance the tray-stacking efficiency and accuracy of ceramic pieces, thereby solving the technical problems of complex manual operation and poor tray-stacking accuracy in existing ceramic piece tray-stacking methods.

[0015] Another objective of this invention is to provide a semiconductor production line, including the high-precision ceramic component tray arrangement equipment described above.

[0016] Compared with the prior art, the semiconductor production line of the present invention has all the advantages of the high-precision ceramic plate-stacking equipment mentioned above, which will not be elaborated here. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. In the drawings: Figure 1 A perspective view of the high-precision ceramic plate-stacking device provided by the present invention; Figure 2 for Figure 1 An enlarged view of the area shown at point A in the middle; Figure 3 This is a perspective view of the high-precision ceramic plate-stacking device of the present invention from another angle. Figure 4 This is a perspective view of the high-precision ceramic plate-stacking device of the present invention from another angle. Figure 5 This is a top view of the high-precision ceramic plate-stacking device of the present invention.

[0018] In the picture: 1. Feeding mechanism; 11. Material box lifting assembly; 12. First handling assembly; 121. Dual-axis robotic arm; 2. First multi-head gripping mechanism; 21. First mounting part; 22. First chuck; 23. First linear drive module; 24. Second linear drive module; 25. Third linear drive module; 3. Second multi-head gripping mechanism; 31. Second mounting part; 32. Second clamp; 33. Fourth linear drive module; 34. Fifth linear drive module; 35. Sixth linear drive module; 36. Visual positioning camera; 4. Top-mounted camera mechanism; 41. Global camera; 5. Tilting mechanism; 51. Steering wheel; 6. Bottom-shooting mechanism; 61. First bottom-shooting camera; 62. Second bottom-shooting camera; 7. Unloading mechanism; 711. Up and down drive module; 712. Receiving section; 72. Second conveying component. Detailed Implementation

[0019] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other.

[0020] In the description of this invention, it should be noted that if terms such as "upper," "lower," "inner," or "back" appear, indicating orientation or positional relationship, they are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0021] Furthermore, in the description of this invention, unless otherwise explicitly defined, the terms "installation," "connection," "joining," and "connector" should be interpreted broadly. For example, a connection can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention in light of the specific circumstances.

[0022] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0023] Please refer to the following: Figures 1 to 5 The high-precision ceramic plating device provided by this invention will now be described. This high-precision ceramic plating device includes a feeding mechanism, a first multi-head gripping mechanism 2, a second multi-head gripping mechanism 3, and a discharging mechanism 7. The feeding mechanism 1 includes a material box lifting assembly 11 and a first conveying assembly 12. The material box lifting assembly 11 is used to convey the material box in the vertical direction. The first conveying assembly 12 is located on one side of the lifting assembly and can move the material box in both the horizontal and vertical directions. The first multi-head gripping mechanism 2 includes a first mounting part 21 and multiple first clamps 22. The first mounting part 21 is used to mount each first clamp 22, and the first clamps 22 can move in a first horizontal direction and a second horizontal direction. The first clamps 22 are used to grip and position the ceramic pieces and the material box, and each first clamp 22... Each clamp 22 can move in the vertical direction; the second multi-head gripping mechanism 3 includes a second mounting part 31 and multiple second clamps 32. The second mounting part 31 is used to mount each second clamp 32, and each second clamp 32 can move in the first horizontal direction and the second horizontal direction; the unloading mechanism 7 includes a tray lifting assembly and a second conveying assembly 72. The tray lifting assembly is used to convey the unloading tray in the vertical direction. The second conveying assembly 72 is located on one side of the second clamp 32, and the second conveying assembly 72 can convey the unloading tray in the second horizontal direction to transfer the unloading tray between the second clamp 32 and the tray lifting assembly. Each second clamp 32 can transfer the ceramic parts from the loading box to the unloading tray during the movement of the unloading tray.

[0024] The specific implementation process of this embodiment is as follows: The power output end of the first conveying component 12 moves along the horizontal direction, thereby transferring the loading box from the loading box lifting component 11 to below the first chuck 22. During the feeding process of the first conveying component 12, the first chuck 22 can perform initial position adjustment on the ceramic pieces in the loading box, so that the ceramic pieces in the loading box are neatly stacked. As the loading box approaches the second chuck 32, the power output end of the second conveying component 72 moves along the second horizontal direction, so that the unloading tray approaches the loading box. During this process, the second chuck 32 can transfer the neatly stacked ceramic pieces in the loading box to the unloading tray, thereby increasing the stacking density of the ceramic pieces. As the unloading tray moves along the second horizontal direction to the tray lifting component, the second chuck 32 can perform higher precision position adjustment on the ceramic pieces in the unloading tray. The various mechanisms in the above process cooperate with each other to automatically complete the processes of loading and unloading the loading box, initial tray placement, loading and unloading the tray, and secondary tray placement.

[0025] In the above embodiments, the feeding box can generally be set at the unloading and collection station of porcelain pieces before the porcelain pieces are arranged on the tray. The pre-processed porcelain pieces are placed in the feeding box in a disorderly and messy manner. After the porcelain pieces are pre-arranged by the present invention, the unloading tray can accommodate porcelain pieces with higher arrangement density and more orderly posture during the secondary shaping process, which is conducive to the subsequent printing and other operations of the porcelain pieces.

[0026] Compared with the prior art, in this embodiment, multiple loading boxes are moved to a designated height by the lifting assembly 11. Under the action of the first conveying assembly 12, the loading box at the top of the lifting assembly 11 is transferred to below each first clamp 22. As the first conveying assembly 12 moves the loading box, each first clamp 22 can arrange the ceramic pieces in the loading box, making the arrangement of the ceramic pieces easier for the second clamp 32 to grip. Similarly, the second conveying assembly 72 can handle the unloading. The tray moves to the vicinity of the loading box, and then the second chuck 32, in cooperation with the second conveying component 72, can transfer the ceramic pieces in the loading box to the unloading tray. During the process of the unloading tray being transferred to the tray lifting component by the second conveying component 72, each of the second chucks 32 can also continuously perform high-precision tray placement on the material in the unloading tray. The whole process does not require manual operation or the setting of additional fixed fixtures, which helps to enhance the tray placement efficiency and accuracy of ceramic pieces, thereby solving the technical problems of complex manual operation and poor tray placement accuracy in existing ceramic piece tray placement.

[0027] Based on the above design concept, a more preferred embodiment is proposed for the first handling component 12. The first handling component 12 includes a dual-axis robotic arm 121 and a clamping mechanism. The dual-axis robotic arm 121 includes a first robotic arm, a second robotic arm, a first vertical shaft, and a second vertical shaft. The first vertical shaft and the second vertical shaft are respectively located at both ends of the first robotic arm. The first vertical shaft is used to control the swing of the first robotic arm, and the second vertical shaft is used to connect the first robotic arm and the second robotic arm and to control the swing of the first robotic arm. The clamping mechanism is located on the second robotic arm and can clamp the loading box in the vertical direction. By driving the two vertical shafts to rotate, the two robotic arms can be driven to swing. This solves the technical problems of the existing robotic arm occupying too much space and the clamping mechanism being able to move only along a single arc. This is beneficial to improving the range of motion of the clamping mechanism, enabling the clamping mechanism to move in the first horizontal direction or the second horizontal direction, and also helps to save space occupied by the first handling component 12 in the entire tray-loading device.

[0028] Based on the above embodiments, a feasible implementation method is proposed. In order to drive the first chuck 22 and the second chuck 32 to move, the first multi-head gripping mechanism 2 further includes a first linear drive module 23, a second linear drive module 24 and a third linear drive module 25. The power output direction of the first linear drive module 23 is parallel to the first horizontal direction. The second linear drive module 24 is disposed at the power output end of the first linear drive module 23 and the power output direction of the second linear drive module 24 extends in the vertical direction. The third linear drive module 25 is disposed at the power output end of the second linear drive module 24 and the power output direction of the third linear drive module 25 extends in the second horizontal direction. The first mounting part 21 is disposed at the power output end of the third linear drive module 25. The second multi-head gripping mechanism 3 includes a fourth linear drive module 33, a fifth linear drive module 34, and a sixth linear drive module 35. The power output direction of the fourth linear drive module 33 extends along a second horizontal direction. The fifth linear drive module 34 is located at the power output end of the fourth linear drive module 33, and its power output direction extends vertically. The sixth linear drive module 35 is located at the power output end of the fifth linear drive module 34, and its power output direction extends along a first horizontal direction. The second mounting part 31 is located at the power output end of the sixth linear drive module 35. As configured above, with the cooperation of the first, second, and third linear drive modules 25, the first chuck 22 can cooperate with the first conveying component 12 to perform tray placement operations during the movement of the loading box. Similarly, with the cooperation of the fourth, fifth, and sixth linear drive modules 35, the second chuck 32 can transfer the ceramic parts in the loading box to the unloading tray and adjust the ceramic parts therein during the movement of the unloading tray.

[0029] To improve the accuracy of ceramic piece placement, a feasible implementation method is proposed. Specifically, the high-precision ceramic piece placement device also includes a top-feeding mechanism 4. The top-feeding mechanism 4 includes a global camera 41 located above the feeding mechanism 1. The global camera 41 can perform visual positioning of the material in the feeding box, so as to calibrate the actions of the above two mechanisms during the process of the first conveying component 12 moving the feeding box and the first clamp 22 swinging the ceramic piece, thereby improving the positioning accuracy of the ceramic piece and the feeding box.

[0030] Based on the above embodiments, in one feasible implementation, the high-precision ceramic component placement device further includes a flipping mechanism 5. The flipping mechanism 5 includes a steering wheel 51 located downstream of the first conveying component 12. The steering shaft of the steering wheel 51 extends in the vertical direction. The steering wheel 51 is used to receive the ceramic component and the loading box after the first chuck 22 has been initially positioned, so as to facilitate the transfer of the ceramic component between the loading box and the unloading tray. This transfers a portion of the position operation steps of the ceramic component from the movement of the chuck to the rotation of the steering wheel 51, thereby reducing the range of motion of the first chuck 22 and the second chuck 32, which is beneficial to improving the clamping accuracy of the first chuck 22 and the second chuck 32.

[0031] Similar to the top-firing mechanism 4 described above, in one feasible embodiment, the high-precision ceramic tray placement device also includes a bottom-firing mechanism 6 for taking pictures of the ceramic pieces to be placed from the bottom. The bottom-firing mechanism 6 includes a first bottom-firing camera 61 and a second bottom-firing camera 62. The first bottom-firing camera 61 is located below the first chuck 22 and between the steering wheel 51 and the global camera 41. The second bottom-firing camera 62 is located below the second chuck 32 and between the steering wheel 51 and the second transport assembly 72. With this configuration, this embodiment can position the loading box and the ceramic pieces within it as the loading box approaches the steering wheel 51, facilitating the initial material handling by the first chuck 22. The second bottom-firing mechanism 6 can position the unloading tray and the ceramic pieces within it carried by the second transport assembly 72, thereby facilitating the precise positioning of the ceramic pieces in the unloading tray by the second chuck 32.

[0032] Based on the above embodiments, a feasible implementation method is proposed. The material box lifting assembly 11 includes an up-and-down drive module 711 and a receiving part 712. The up-and-down drive module 711 can drive the receiving part 712 to move up and down. The receiving part 712 is provided with multiple receiving slots to enhance the receiving slots for accommodating the unloading tray. The length direction of each receiving slot is parallel to the second horizontal direction, and the receiving slot has an opening facing the second conveying assembly 72. Thus, in this embodiment, the unloading tray can enter and exit the receiving slot through the mutual cooperation of the up-and-down drive module 711 and the second conveying assembly 72, making the movement process of the unloading tray more reasonable.

[0033] Based on the above embodiments, a feasible implementation method is proposed. The second multi-head gripping mechanism 3 further includes a visual positioning camera 36 disposed on the second mounting part 31, so as to improve the placement accuracy of the ceramic pieces during the movement of the second clamp 32 by means of the visual positioning camera 36.

[0034] In summary, compared with the prior art, the high-precision ceramic placement equipment provided by this invention can perform a first placement of the ceramic pieces inside the loading box during the loading process and a second placement of the ceramic pieces inside the loading tray during the unloading process. With the cooperation of the conveying mechanism, the gripping mechanism and the photographing mechanism, as the loading box and the unloading tray move up and down and horizontally in batches, the ceramic pieces are stacked from the loading box to the unloading tray. The whole process does not require manual operation or additional fixed fixtures, which helps to improve the placement efficiency and placement accuracy of ceramic pieces, thereby solving the technical problems of complex manual operation and poor placement accuracy in existing ceramic placement equipment.

[0035] Based on the same inventive concept, the present invention also proposes a semiconductor production line, which includes the high-precision ceramic plate-stacking equipment mentioned above.

[0036] Compared with the prior art, the semiconductor production line of the present invention has all the advantages of the high-precision ceramic plate-stacking equipment mentioned above, which will not be elaborated here.

[0037] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A high-precision ceramic piece arranging device, characterized in that, include: The feeding mechanism includes a material box lifting assembly and a first conveying assembly. The material box lifting assembly is used to convey the material box in the vertical direction. The first conveying assembly is located on one side of the material box lifting assembly and can move the material box in the horizontal plane and vertical direction. The first multi-head gripping mechanism is located downstream of the material box lifting assembly and includes a first mounting part and a plurality of first clamps. The first mounting part is used to mount each of the first clamps and can drive the first clamps to move along a first horizontal direction and a second horizontal direction. The first clamps are used to grip and position the ceramic parts and the material box, and each of the first clamps is movably mounted on the first mounting part in the vertical direction. The second multi-head gripping mechanism is located downstream of the first multi-head gripping mechanism and includes a second mounting part and a plurality of second clamps. The second mounting part is used to mount each of the second clamps and can drive the second clamps to move along a first horizontal direction and a second horizontal direction. The second clamps are used to grip and position the ceramic parts and the feeding box, and each of the second clamps is movably mounted on the second mounting part in the vertical direction. The unloading mechanism is located downstream of the second multi-head gripping mechanism and includes a tray lifting assembly and a second conveying assembly. The tray lifting assembly is used to convey the unloading tray in the vertical direction. The second conveying assembly is located on one side of the second chuck and can convey the unloading tray in the second horizontal direction to transfer the unloading tray between the second chuck and the tray lifting assembly. Each of the second chucks can transfer the ceramic parts from the loading box to the unloading tray during the movement of the unloading tray. The top-mounted camera mechanism includes a global camera positioned above the feeding mechanism, which is capable of visually positioning the material in the feeding box. A flipping mechanism, the flipping mechanism including a steering wheel located downstream of the first conveying component, the steering wheel having a steering shaft extending in the vertical direction, the steering wheel being used to receive the ceramic piece and the loading box after the first chuck has been initially positioned. The bottom-shooting mechanism is used to take pictures of the porcelain pieces to be displayed from the bottom. The bottom-shooting mechanism includes a first bottom-shooting camera and a second bottom-shooting camera. The first bottom-shooting camera is located below the first chuck and between the steering wheel and the full-range camera. The second bottom-shooting camera is located below the second chuck and between the steering wheel and the second transport assembly. In this process, under the action of the first conveying component, the loading box located at the top of the material box lifting component is transferred to the area below each of the first clamps. During the movement of the loading box driven by the first conveying component, each of the first clamps can arrange the ceramic pieces in the loading box on a tray so that the arranged ceramic pieces are easy to grip by the second clamps. The second conveying component can move the unloading tray to the vicinity of the loading box. With the cooperation of the second conveying component, the second clamps transfer the ceramic pieces in the loading box to the unloading tray. During the process of the unloading tray being transferred to the material tray lifting component by the second conveying component, each of the second clamps can continuously perform high-precision traying of the material in the unloading tray.

2. The high-precision ceramic plate-stacking device as described in claim 1, characterized in that, The first handling assembly includes a dual-axis robotic arm and a clamping mechanism for gripping the loading box. The dual-axis robotic arm includes a first robotic arm, a second robotic arm, a first vertical shaft, and a second vertical shaft. The length directions of the first robotic arm and the second robotic arm are both perpendicular to the vertical direction. One end of the first robotic arm rotates synchronously with the first vertical shaft, and the other end is rotatably adapted to the second vertical shaft. The first vertical shaft is rotatably disposed on one side of the loading box lifting assembly around its own axis. One end of the second robotic arm rotates synchronously with the second vertical shaft, and the other end is connected to the clamping mechanism. The clamping mechanism is movably disposed on the second robotic arm in the vertical direction.

3. The high-precision ceramic plate-stacking device as described in claim 1, characterized in that, The first multi-head gripping mechanism further includes a first linear drive module, a second linear drive module, and a third linear drive module. The power output direction of the first linear drive module is parallel to a first horizontal direction. The second linear drive module is disposed at the power output end of the first linear drive module, and the power output direction of the second linear drive module extends in a vertical direction. The third linear drive module is disposed at the power output end of the second linear drive module, and the power output direction of the third linear drive module extends in a second horizontal direction. The first mounting part is disposed at the power output end of the third linear drive module.

4. The high-precision ceramic plate-stacking device as described in claim 1, characterized in that, The second multi-head gripping mechanism includes a fourth linear drive module, a fifth linear drive module, and a sixth linear drive module. The power output direction of the fourth linear drive module extends along a second horizontal direction. The fifth linear drive module is located at the power output end of the fourth linear drive module and extends along a vertical direction. The sixth linear drive module is located at the power output end of the fifth linear drive module and extends along a first horizontal direction. The second mounting portion is located at the power output end of the sixth linear drive module.

5. The high-precision ceramic plate-stacking device as described in claim 1, characterized in that, The material tray lifting assembly includes an up-and-down drive module and a receiving section. The up-and-down drive module can drive the receiving section to move up and down. The receiving section is provided with multiple receiving slots. The receiving slots are used to accommodate the unloading tray. The length direction of each receiving slot is parallel to the second horizontal direction, and the receiving slot has an opening facing the second conveying assembly.

6. The high-precision ceramic plate-stacking device as described in claim 1, characterized in that, The second multi-head grasping mechanism also includes a visual positioning camera located on the second mounting part.

7. A semiconductor production line, characterized in that, The high-precision plate-arranging device for ceramic pieces includes any one of claims 1 to 6.

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